JP2010060347A - Oscillating sensor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an oscillating sensor for preventing a buffer action due to a flexure of supports, transmitting a movement of a platform to oscillating arms without a loss when an acceleration is applied, and improving the detection sensitivity. <P>SOLUTION: The oscillating sensor includes: a first base 12; a second base 13; the oscillating arms 15, 16 extended and cantilevered between the first and second bases 12, 13; extensions 17, 18 extended in the direction for intersecting with the extension direction of the oscillating arms 15, 16 of the first and second bases 12, 13; an oscillating piece 11 including the supports 19, 20, 21, 22 extended from the extensions 17, 18 to the oscillating arms 15, 16 in parallel; and the platform 23 for supporting the oscillating piece 11. The oscillating piece 11 is connected to the platform 23 in fixing sections 32, 33, 34, 35 in a connection region on one main surface including a region in which the extensions 17, 18 intersect with the supports 19, 20, 21, 22. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a vibration type sensor that detects a change in resonance frequency of a piezoelectric vibrating piece due to application of a force accompanying an influence such as acceleration.

  A vibration type sensor is known as a force sensor for measuring a force accompanying an influence such as applied acceleration. This vibration type sensor detects the magnitude of the force by detecting a change in the resonance frequency of the piezoelectric vibrating piece caused by the application of a force accompanying the influence of acceleration or the like (see, for example, Non-Patent Document 1 and Patent Document 1). ).

  Hereinafter, a configuration using an acceleration sensor as an example of a vibration type sensor will be described. FIG. 8 is a perspective view showing an outline of a conventional acceleration sensor. As shown in FIG. 8, the acceleration sensor 500 includes two connection bases 102 and 103 formed on the base 101 and the vibration piece 100 connected to the connection bases 102 and 103. The vibrating piece 100 is formed using a piezoelectric material such as quartz, and the vibrating arms 105 and 106 divided by the through holes 104 and the first base 107 extending from both ends of the vibrating arms 105 and 106. The two base portions of the second base portion 108 are formed.

  Here, using an example in which acceleration in the thickness direction (P direction) of the resonator element 100 is applied to the acceleration sensor 500, an acceleration detection operation will be briefly described. When acceleration is applied to the acceleration sensor 500, the base 101 bends because the second base portion 101a on the second base portion 108 side moves in the rotational direction with the hinge 109 formed on the base 101 as a fulcrum. The acceleration sensor 500 detects the magnitude of the applied acceleration by detecting a change in the resonance frequency due to the deformation of the vibrating arms 105 and 106 caused by the bending. The detection sensitivity at this time is as expressed by the equation (1), and it can be seen that the longer the length l (el) of the vibrating arm, the better.

ａ₁：支持などにより決定される定数、ｍ：質量、ａ：加速度、Ｅ：弾性定数、ｌ：振動腕の腕長、ｔ：振動片の厚さ、ｗ：振動腕の腕幅。

a ₁ : Constant determined by support, m: mass, a: acceleration, E: elastic constant, l: arm length of vibrating arm, t: thickness of vibrating piece, w: arm width of vibrating arm.

  Further, leakage vibration from the vibrating arms 105 and 106 is propagated to the first base 107 and the second base 108. For this reason, it is necessary to connect the resonator element 100 and the base 101 at a position away from the vibrating arms 105 and 106 that are not affected by leakage vibration. However, in the acceleration sensor 500 described above, the vibrating arms 105 and 106, the first base 107, and the second base 108 are arranged in series in the length direction of the vibrating arms 105 and 106, so It was not suitable for high sensitivity and miniaturization.

  In response to this problem, an acceleration sensor as shown in FIG. 9 has been proposed (see, for example, Patent Document 2). 9A and 9B show a conventional acceleration sensor, wherein FIG. 9A is a plan view and FIG. 9B is a QQ cross-sectional view of FIG. As shown in FIG. 9, in the acceleration sensor 600 of the present example, a vibrating piece 200 is connected to bases 201a and 201b.

  The vibrating piece 200 is formed using a piezoelectric material such as quartz as in the previous example. The resonating piece 200 includes vibration arms 205 and 206, two base portions of a first base portion 207 and a second base portion 208, extension portions 210 and 211, and support portions 212, 213, 214, and 215 integrally. Is formed. The vibrating arms 205 and 206 have two beam shapes divided by the through hole 204, and both ends in the extending direction (longitudinal direction) extend to the first base 207 and the second base 208. The first base 207 and the second base 208 are extended in the extending direction of the vibrating arms 205 and 206, and the ends of the vibrating arms 205 and 206 are connected to the ends opposite to the connection side with the vibrating arms 205 and 206. Extension portions 210 and 211 extending in a direction crossing the extending direction are formed. The support portions 212, 213, 214, and 215 are extended from both ends of the extension portions 210 and 211 toward the center in the extending direction of the vibrating arms 205 and 206, and in parallel with the vibrating arms 205 and 206, respectively. The ends of the two are opposed with a gap. The vibrating piece 200 is fixed to the bases 201a and 201b by connection pins 216 and the like in the vicinity of the aforementioned end portions of the support portions 212, 213, 214, and 215. In this example, for example, when acceleration in the thickness direction of the resonator element 200 (F direction shown in FIG. 9B) is applied, the base 201a moves in a direction opposite to the acceleration (P direction shown in FIG. 9B). It moves, the vibrating arms 205 and 206 are bent, and the resonance frequency changes.

Japanese National Patent Publication No. 4-505509 (FIG. 1) Japanese Patent Laid-Open No. 9-5176 (FIG. 3) W. C. Albert, "Force sensing using quartz crystal flexure resonators", 38th Annual Frequency Control Symposium 1984, pp233-239

  However, in the acceleration sensor 600 described above, the vibration piece 200 and the bases 201a and 201b are fixed in the vicinity of the ends of the support portions 212, 213, 214, and 215. In other words, the support portions 212, 213, 214, and 215 are not fixed from the portion fixed by the connection pin 216 or the like to the extension portions 210 and 211. For this reason, when force such as acceleration is applied, the support portions 212 and 213 that are not fixed are bent with a portion fixed by the connection pin 216 or the like as a fulcrum (indicated by 213a in FIG. 9). The bending of the support portions 212 and 213 (indicated by 213a) causes the bending of the vibrating arms 205 and 206 to be buffered, and prevents the movement of the base 201a from being transmitted to the vibrating arms 205 and 206 without waste. . As a result, since the bending of the vibrating arms 205 and 206 is reduced, the change in the resonance frequency is reduced, resulting in a decrease in acceleration detection sensitivity.

  The present invention is realized as the following forms or application examples so as to solve at least a part of the problems described above.

  [Application Example 1] The vibration type sensor according to this application example extends in a beam shape between a first base and a second base having main surfaces on the front and back sides, and between the first base and the second base. A vibrating arm that vibrates at a resonance frequency of, an extension portion extending from at least one of the first base portion or the second base portion in a direction intersecting with the extending direction of the vibrating arm, and the vibration from the extension portion. A vibrating piece including a support portion extending in parallel with the arm and having an open end; and a base for supporting the vibrating piece, wherein the support of the vibrating piece includes the extension portion and the support. The connection area of one main surface including the area | region where a part cross | intersects and the said base are connected, It is characterized by the above-mentioned.

  According to this application example, the vibration piece is supported by connecting the connection region on one main surface including the region where the extension portion and the support portion intersect with the base. For this reason, there is no elongated support portion between the connection portion and the extension portion. This makes it difficult for the support portion to bend (buffer action) when acceleration is applied, so that the bending of the base can be directly transmitted to the vibrating arm. Therefore, even a slight bending of the base can be detected as a change in the resonance frequency of the vibrating arm, and a reduction in detection sensitivity can be prevented. That is, it is possible to provide a vibration type sensor with high detection sensitivity.

  Application Example 2 In the vibration type sensor according to the application example described above, the vibrating arm is divided into at least two beams by a through hole penetrating the front and back.

  According to this application example, since at least two vibrating arms are formed, the vibration efficiency of the vibrating arms is improved by the resonance action of the respective vibrating arms. As a result, it is possible to provide a vibration type sensor that can obtain more stable vibration.

  Application Example 3 In the vibration type sensor according to the application example, the connection region reaches an end portion of the extension portion provided in the extending direction of the vibrating arm.

  According to this application example, the connection region that supports the resonator element includes the end of the extension formed in the extending direction of the vibrating arm. For this reason, since there is no component part of the vibration piece which is not fixed outside the extending direction of the vibration arm from the region where the vibration piece is fixed, the buffer action due to the bending of the vibration piece is less likely to occur. Therefore, it is possible to provide a vibration type sensor with higher detection sensitivity.

  Application Example 4 In the vibration type sensor according to the application example described above, the support of the vibrating piece is the end of the extension portion provided in the extending direction of the vibrating arm from the open end of the support portion. The connection area of one main surface of the area reaching the part is connected to the base.

  According to this application example, the vibration piece is supported on the base in a region from the open end of the support portion to the end portion of the extension portion provided in the extending direction of the vibration arm. For this reason, it is possible to fix the resonator element in a longer region. Therefore, more reliable fixing is possible, and in addition, a buffering action due to the bending of the vibrating piece is less likely to occur.

  Application Example 5 In the vibration type sensor according to the application example described above, the first base portion and the second base portion have a constricted portion having a narrow width in a plane, and the It is connected to the extension part.

  According to this application example, by providing the constricted portion, it is possible to reduce vibration leakage that propagates from the vibrating arm to the extension portion and the support portion. Therefore, the vibrating arm can vibrate more stably, and it is possible to provide a vibration sensor with high detection sensitivity and high accuracy.

  Application Example 6 In the vibration type sensor according to the application example described above, the base includes a hinge portion formed so as to be thin in a groove shape, and one side with respect to the hinge portion. A support portion extending from the first base is connected to the base, and a support portion extending from the second base is connected to the other base.

  According to this application example, since the groove-like hinge portion is formed, it is possible to cause bending only in the force applied to the vibrating piece in the vertical direction. Accordingly, it is possible to make it less susceptible to the influence of horizontal force noise, and it is possible to provide a more accurate vibration type sensor.

  Embodiments of the present invention will be described below with reference to the drawings. In addition, the figure referred below is a schematic diagram different from an actual thing about the member or the horizontal and horizontal scales for convenience of illustration.

(First embodiment)
As a first embodiment, an acceleration sensor as an example of a vibration type sensor will be described with reference to FIGS. FIG. 1 is a perspective view schematically showing an acceleration sensor as the first embodiment. 2A and 2B show an outline of the acceleration sensor as the first embodiment, where FIG. 2A is a plan view, FIG. 2B is a cross-sectional view taken along the line A-A in FIG. 2A, and FIG. is there.

  As shown in FIGS. 1 and 2A, 2 </ b> B, and 2 </ b> C, the acceleration sensor 10 includes a base 23 and a vibrating piece 11 supported by the base 23.

The vibrating piece 11 is made of a piezoelectric material. As the piezoelectric material, lead titanate (PbTiO ₃ ), lead zirconate titanate (PZT), zinc oxide (ZnO), crystal, or the like can be used. In the first embodiment, a case where a crystal having excellent frequency temperature characteristics and a high Q value is used will be described as an example.

  The vibrating piece 11 (quartz crystal vibrating piece) includes beam-like vibrating arms 15 and 16 that bend and vibrate in a plane direction at a predetermined resonance frequency, a first base portion 12 that extends from both ends of the vibrating arms 15 and 16, and And a second base portion 13. Further, the resonator element 11 includes an extension portion 17, 18 extending from the first base portion 12 and the second base portion 13 in a direction intersecting with the extending direction of the vibrating arms 15, 16 (Y direction shown in the drawing), and vibration Supporting portions 19, 20, 21, and 22 extending from the extending portions 17 and 18 so as to be parallel to the arms 15 and 16 are provided.

The support portions 19, 20, 21, and 22 are formed with open ends as open ends 19 a, 20 a, 21 a, and 22 a, respectively.
The vibrating arms 15 and 16 are divided by a through hole 14 penetrating between the main surfaces of the front and back sides, and are formed in two parallel beam shapes. Note that, for example, electrodes such as excitation electrodes are formed on the vibrating arms 15 and 16, but are not shown.

  In this example, the base 23 is provided with a hinge portion 24 in which a groove portion is formed from one end surface 25 in the width direction to the other end surface 26 on both the front and back surfaces. And the base 23 has two areas on the basis of the hinge part 24, and is the first base 27 provided in the area on the first base 12 side, which is one area, and the other area. And a second base 28 provided in a region on the second base portion 13 side. The first base 27 becomes a fixed base, and the second base 28 becomes a movable base (sometimes referred to as a cantilever portion). The hinge portion 24 is formed at a position offset toward the first base portion 12 from the center in the extending direction of the vibrating arms 15 and 16. Moreover, although the groove part is formed in both the front and back, the hinge part 24 of this example may be the structure by which the groove part is formed in any one surface.

  In the resonator element 11, one main surface (back surface) 31 of the support portions 19 and 20 is supported by the first base 27 in the connection region of the fixing portions 32 and 34, and one main surface (back surface) 31 of the support portions 21 and 22. Is supported by the second base 28 in the connection region of the fixing portions 33 and 35 and is fixed to the base 23 using an adhesive or the like. Thereby, the resonator element 11 is fixed to the base 23. Note that a conductive adhesive can also be used when connecting to an excitation electrode (not shown).

  A connection region of the fixing portions 32, 33, 34, and 35 indicated by diagonal lines in FIG. The connection region of the fixing portions 32 and 34 includes intersection regions 36 and 37 that are regions where the extension portion 17 and the support portions 19 and 20 intersect. The connection region of the fixing portions 33 and 35 includes the extension portion 18. Crossing regions 38 and 39, which are regions where the support portions 21 and 22 intersect, are included. In FIG. 2C, the intersecting regions 36, 37, 38, 39 are shown as regions having a predetermined width. However, the extension lines of the sides 17a, 18a inside the extension portions 17, 18 are shown. It may be a substantially phantom line region intersecting with the support portions 19, 20, 21, and 22.

  Each of the connection regions of the fixing portions 32, 33, 34, 35 has one end at the center in the longitudinal direction of the support portions 19, 20, 21, 22 and the other end in the extending direction of the vibrating arms 15, 16. To the end portions 29 and 30 of the respective extension portions 17 and 18 formed in each. Note that the end portions 29 and 30 are both end portions in the longitudinal direction of the resonator element 11.

  Next, an outline of the acceleration detection operation in the acceleration sensor 10 will be described. The vibrating arms 15 and 16 of the acceleration sensor 10 perform bending vibration in the X-axis direction (the width direction of the vibrating piece 11) shown in the drawing at a predetermined resonance frequency. When acceleration in the Z direction shown in the figure is applied to the acceleration sensor 10, the first base 27 is fixed as a fixed base, so the second base 28 having a large mass has the hinge portion 24 as a fulcrum by inertial force. It moves in the direction opposite to the direction of acceleration (-Z direction). This causes the base 23 to bend. Due to this bending, a tensile stress is applied to the vibrating piece 11 (vibrating arms 15 and 16) fixed to the first base 27 and the second base 28 in the Y-axis direction shown in the drawing.

  The vibrating arms 15 and 16 that are oscillating change in a direction in which the resonance frequency increases when a tensile stress is generated, and change in a direction in which the resonance frequency decreases when a compressive stress is generated. , 16 becomes higher. When acceleration in the opposite direction to that described above is applied, the second base 28 also moves in the reverse direction (the base 23 also bends in the reverse direction), and the resonance frequency of the vibrating arms 15 and 16 becomes low. . The amount of change in the resonance frequency is detected by a detection circuit (not shown), and the detected resonance frequency is converted into a voltage by a conversion circuit (not shown) and detected as an acceleration. In this way, the acceleration applied to the acceleration sensor 10 can be detected.

  Further, as shown in the partially enlarged plan view of the vibrating piece 11 in FIGS. 3A and 3B, the vibrating piece 11 is fixed to the base (not shown in FIG. 3) in the intersection region 36. , 37, 38, 39 may be included. For example, the following connection area may be used.

  As shown in FIG. 3A, the connection region of the fixing portions 32, 33, 34, 35 extends from the open ends 19a, 20a, 21a, 22a of the support portions 19, 20, 21, 22 to the extension portions 17, Eighteen end portions 29 and 30 are provided.

  As shown in FIG. 3 (b), the connection region of the fixing portions 32, 33, 34, 35 extends from the open ends 19a, 20a, 21a, 22a of the support portions 19, 20, 21, 22 to the extension portions 17, 18 near the center. At this time, the connection regions of the fixing portions 32, 33, 34, and 35 include intersection regions 36, 37, 38, and 39.

  By including the intersection areas 36, 37, 38, 39 where the extension parts 17, 18 and the support parts 19, 20, 21, 22 intersect in the connection area of the fixing parts 32, 33, 34, 35, There are no narrow portions of the support portions 19, 20, 21, 22 on the side of the end portions 29, 30 from the connection region of the fixing portions 32, 33, 34, 35. As a result, there are no weak portions in the support portions 19, 20, 21, and 22, and stress is hardly applied. And since it becomes difficult to produce the bending (buffer action) of the support parts 19, 20, 21, and 22 when acceleration is applied, it becomes possible to transmit the bending of the second base 28 to the vibrating arm as it is, and the detection sensitivity can be improved. It is possible to prevent the decrease. Accordingly, even a slight deflection of the second base 28 can be detected as a change in the resonance frequency of the vibrating arms 15 and 16, and the acceleration sensor 10 with high detection sensitivity can be provided.

  In the above description, the fixing portions 32 and 34 on the first base portion 12 side and the fixing portions 33 and 35 on the second base portion 13 side have been described with the same connection area, but both may not necessarily be the same connection area. . However, it is more preferable to use the connection region described above for the fixing portions 32 and 34 on the first base 12 side, to which a stress due to the bending moment of the second base 28 is strongly applied.

As shown in FIG. 4, the resonator element 11 includes a fixed portion 40 a in which the fixed portion 34 of the support portion 19 and the fixed portion 32 of the support portion 20 are provided along the entire length of the end portion 29 of the extension portion 17. It may be fixed in the connected connection area.
Similarly, the fixing portion 35 of the support portion 21 and the fixing portion 33 of the support portion 22 may be fixed in a connection region connected by a fixing portion 40 b provided along the entire length of the end portion 30 of the extension portion 18. .

Further, the outermost end portion of the resonator element 11 is a portion where stress concentrates when acceleration is applied to the acceleration sensor 10, and the resonator element 11 is also likely to be bent. However, as described above, the fixing portions 40a and 40b are provided over the entire lengths of the end portions 29 and 30 of the extension portions 17 and 18, whereby the longitudinal direction of the vibrating piece 11 (the extending direction of the vibrating arms 15 and 16). Since the outermost end is fixed over the entire width, the vibration piece 11 is hardly bent. As a result, the buffering action due to the bending of the vibrating piece 11 is less likely to occur, and the stress transmission loss can be reduced, so that detection with higher sensitivity can be performed.
Further, since the acceleration sensor 10 receives a repeated force, it is required to improve the bonding strength, and the bonding reliability can be improved by increasing the bonding area by the above-described bonding.

Note that the first base 12 side and the second base 13 side of the resonator element 11 do not have to be fixed portions in the same connection region. For example, it is possible to use various combinations such that the first base 12 side is the connection region of the fixed part shown in FIG. 4 and the second base 13 side is the connection region of the fixed part shown in FIG. .
In addition, it is more preferable that the resonator element 11 is symmetrical with respect to the center line (BB line) shown in FIG. Due to the symmetrical shape, the balance of the resonator element 11 is improved, and characteristics such as oscillation and detection are stabilized.

(Second Embodiment)
As a second embodiment, an acceleration sensor as an example of a vibration sensor will be described with reference to FIG. In the second embodiment, the configuration of the vibrating piece of the first embodiment described above is different, and the base is the same as that of the first embodiment, and thus the description thereof is omitted. FIG. 5 is a plan view of a resonator element used in the acceleration sensor, and the same reference numerals are given to common portions with the first embodiment.

  As shown in FIG. 5, the resonator element 51 is formed of a piezoelectric material similar to that of the first embodiment described above. Although description of the piezoelectric material is omitted, the second embodiment also uses a crystal having excellent frequency temperature characteristics and a high Q value.

  The vibrating piece 51 includes beam-like vibrating arms 15 and 16 that bend and vibrate in a plane direction at a predetermined resonance frequency, and a first base portion 12 and a second base portion 13 that extend from both ends of the vibrating arms 15 and 16. have. Further, the resonator element 51 includes extension portions 17 and 18 extending from the first base portion 12 and the second base portion 13 in one direction out of the directions intersecting with the extending direction of the vibrating arms 15 and 16. . Further, the vibration piece 51 has support portions 19 and 21 extending from the extension portions 17 and 18 so as to be parallel to the vibration arms 15 and 16.

  In the vibrating piece 51, one main surface (back surface) of the support portion 19 is supported by a first base (not shown) in the connection region of the fixing portion 34, and one main surface (back surface) of the support portion 21 is connected to the fixing region 35. And supported by a second base (not shown) and fixed using an adhesive or the like. Thereby, the resonator element 51 is fixed to a base (not shown). In addition, the connection area | region of the fixing | fixed part 34 and 35 is shown with the oblique line in the same figure.

  The connection region of the fixing portion 34 includes an intersection region 37 where the extension portion 17 and the support portion 19 intersect, and the connection region of the fixing portion 35 includes an intersection region 39 where the extension portion 18 and the support portion 21 intersect. It is included. The connection region of the fixing portions 34 and 35 extends from the open ends 19a and 21a of the support portions 19 and 21 to the end portions 29 and 30 of the extension portions 17 and 18 formed in the extending direction of the vibrating arms 15 and 16. Has reached. Note that the end portions 29 and 30 are both end portions in the longitudinal direction of the vibrating piece 51. In the figure, the intersecting regions 37 and 39 are shown as regions having a predetermined width, but are substantially virtual lines where the sides 17a and 18a inside the extending portions 17 and 18 intersect with the supporting portions 19 and 21. It may be a region.

  In addition, the connection area of the fixing | fixed part 34 and 35 can use the same connection area as the various connection area demonstrated in 1st Embodiment.

  According to the second embodiment, the same effects as those of the first embodiment are obtained. In addition, since the support portions 19 and 21 are provided in only one direction with respect to the direction intersecting with the extending direction of the vibrating arms 15 and 16 (the width direction of the vibrating piece 51), the width dimension of the vibrating piece 51 is increased. Can be kept small. This makes it possible to provide a smaller acceleration sensor.

(Third embodiment)
As a third embodiment, an acceleration sensor as an example of a vibration type sensor will be described with reference to FIG. In the third embodiment, the configuration of the resonator element of the first embodiment described above is different, and the base is the same as that of the first embodiment, and thus the description thereof is omitted. FIG. 6 is a plan view of a resonator element used in the acceleration sensor, and the same reference numerals are given to common portions with the first embodiment.

  As shown in FIG. 6, the vibrating piece 61 is made of a piezoelectric material similar to that of the first embodiment described above. Although description of the piezoelectric material is omitted, crystal is also used in the third embodiment. The vibrating piece 61 includes two beam-like vibrating arms 15 and 16 that bend and vibrate in a plane direction at a predetermined resonance frequency, and a first base portion 12 and a second base portion that extend from both ends of the vibrating arms 15 and 16. 13.

  Constrictions 41 and 42 are formed in the first base 12 and the second base 13 so as to be recessed in the width direction of the vibrating piece 61. The constricted portions 41 and 42 are provided in order to prevent the vibrations of the vibrating arms 15 and 16 from being transmitted to the connection areas of the fixing portions 32, 33, 34, and 35 described later. Further, the vibration piece 61 includes extension portions 17 and 18 extending from the first base portion 12 and the second base portion 13 in a direction intersecting with the extending direction of the vibrating arms 15 and 16 (Y direction shown in the drawing), and vibration Supporting portions 19, 20, 21, and 22 extending from the extending portions 17 and 18 so as to be parallel to the arms 15 and 16 are provided.

  The vibration piece 61 has one main surface (back surface) of the support portions 19 and 20 supported by a first base (not shown) in the connection region of the fixing portions 32 and 34, and one main surface (back surface) of the support portions 21 and 22. It is supported by a second base (not shown) in the connection region of the fixing portions 33 and 35 and is fixed by an adhesive or the like. Thereby, the vibration piece 61 is fixed to a base (not shown). In addition, the connection area | region of the fixing | fixed part 32, 33, 34, 35 is shown with the oblique line in the figure.

  The connection region of the fixing portions 32 and 34 includes intersection regions 36 and 37 where the extension portion 17 and the support portions 19 and 20 intersect, and the connection region of the fixing portions 33 and 35 includes the extension portion 18 and the support portion. Intersection areas 38 and 39 where 21 and 22 intersect are included. And the connection area | region of the fixing | fixed part 32,33,34,35 is formed in the extending direction of the vibrating arms 15 and 16 from the open end 19a, 20a, 21a, 22a of the support part 19,20,21,22. The end portions 29 and 30 of the extension portions 17 and 18 are reached. Note that the end portions 29 and 30 are both end portions in the longitudinal direction of the vibrating piece 61. In the figure, the intersecting regions 36, 37, 38, 39 are shown as regions having a predetermined width, but the inner sides 17a, 18a of the extension portions 17, 18 are the support portions 19, 20, 21. , 22 may be a substantially virtual line area.

  In addition, the connection area of the fixing | fixed part 32, 33, 34, 35 can use the same connection area as the various connection area demonstrated in 1st Embodiment.

  According to the third embodiment, the same effects as those of the first embodiment are obtained. In addition, the provision of the constricted portions 41 and 42 makes it difficult for the vibrations of the vibrating arms 15 and 16 to be transmitted to the connection region of the fixing portions 32, 33, 34, and 35. Loss is reduced, and more stable vibration can be performed. The functions of the constricted portions 41 and 42 are more effective for an embodiment having a configuration in which the connection regions of the fixing portions 32 and 34 are close to the end portion 29 as shown in FIG. That is, as shown in FIG. 3A, in the case of the acceleration sensor configured by bringing the connection region to the end 29, the vibration piece 61 is firmly fixed to the base as compared with the configuration shown in FIG. Although there is an advantage that it can be done, since the distance between the connection region serving as a propagation path of the leakage vibration and the first base portion 12 is short on average, the loss of vibration due to the leakage vibration is likely to increase. On the other hand, in the third embodiment shown in FIG. 6, by providing the constricted portion 41, the vibrating piece 61 is firmly fixed to the base while stably vibrating as compared with the case of the configuration of FIG. Is possible.

  Next, a modification of the fixed part of the resonator element will be described with reference to FIG. FIG. 7A is a plan view showing the resonator element of the first modification, and FIG. 7B is a plan view showing the resonator element of the second modification.

(Modification 1)
A vibrating piece 71a shown in FIG. 7A has a configuration in which the support portions 21 and 22 on the second base portion 13 side in the vibrating piece 61 described in the third embodiment shown in FIG. 6 are not provided. Although the vibration piece 71a will be described in detail below, the first base portion 12 side has the same configuration as the vibration piece 61 described in the third embodiment, and therefore detailed description thereof will be omitted, and the second base portion 13 side will be mainly described. .

  The vibrating piece 71 a includes vibrating arms 15 and 16, and a first base 12 and a second base 13 that extend from both ends of the vibrating arms 15 and 16. In the second base portion 13, a constricted portion 42 is formed so as to be recessed in the width direction of the vibrating piece 71 a. Further, the vibrating piece 71 a is formed with an extending portion 18 extending from the second base portion 13 in a direction intersecting with the extending direction of the vibrating arms 15 and 16. The extension 18 has a width between the inner side 18 a and the end 30.

  The vibration piece 71a is supported by a second base (not shown) in the connection region of the fixing portions 33 and 35 at one main surface (back surface) in the vicinity of both ends 18b of the extension portion 18 so that the connection of the fixing portions 32 and 34 is achieved. The region is supported by a first base (not shown) and is fixed by an adhesive or the like. Thereby, the vibration piece 71a is fixed to a base (not shown). In addition, the connection area | region of the fixing | fixed part 32, 33, 34, 35 is shown with the oblique line in the figure.

  The connection area of the fixing parts 32 and 34 includes intersection areas 36 and 37 where the extension part 17 and the support parts 19 and 20 intersect, and the connection area of the fixing parts 33 and 35 is provided inside the extension part 18. Side 18a is included. Further, as the connection region of the fixing portions 32, 33, 34, and 35, the same connection region as the various connection regions described in the first embodiment can be used.

  According to the first modification, as in the first embodiment, it is difficult for the support portions 19 and 20 to bend (buffer action) when acceleration is applied, and the extension 18 on the second base portion 13 side bend. (Buffer action) is also less likely to occur. Accordingly, it is possible to prevent a decrease in detection sensitivity of the acceleration sensor.

(Modification 2)
A vibrating piece 71b shown in FIG. 7B has a configuration in which the shapes of the support portions 21 and 22 on the second base portion 13 side in the vibrating piece 61 described in the third embodiment shown in FIG. 6 are changed. Although the vibration piece 71b will be described in detail below, the first base portion 12 side has the same configuration as the vibration piece 61 described in the third embodiment, and thus detailed description thereof will be omitted, and the second base portion 13 side will be mainly described. .

  In the vibrating piece 71b shown in FIG. 7B, the open ends 21a and 22a of the support portions 21 and 22 on the second base 13 side in the vibrating piece 61 described in the third embodiment shown in FIG. 6 are on the first base 12 side. It is the structure which has reached to the vicinity of the open ends 19a and 20a of the support parts 19 and 20. Although the vibration piece 71b will be described in detail below, the first base portion 12 side has the same configuration as the vibration piece 61 described in the third embodiment, and thus detailed description thereof will be omitted, and the second base portion 13 side will be mainly described. .

  The vibrating piece 71 b includes vibrating arms 15 and 16, and a first base portion 12 and a second base portion 13 extending from both ends of the vibrating arms 15 and 16. A constricted portion 42 is formed in the second base portion 13 so as to be recessed in the width direction of the vibrating piece 71b. Further, the vibrating piece 71 b is formed with an extension 18 extending from the second base portion 13 in a direction intersecting with the extending direction of the vibrating arms 15 and 16. The extension 18 has a width between the inner side 18 a and the end 30.

  The vibration piece 71 b includes support portions 21 and 22 that extend from the extension portion 18 so as to be parallel to the vibration arms 15 and 16 in a direction that intersects with the extending direction of the vibration arms 15 and 16. The support portions 21 and 22 have open ends 21a and 22a that face and are close to the open ends 19a and 20a of the support portions 19 and 20 on the first base 12 side. That is, the support portions 21 and 22 are longer than the vibrating piece 61 of the third embodiment described above, and the mass of the longer portion is increased.

  The vibration piece 71b has one main surface (back surface) of the support portions 19 and 20 supported by a first base (not shown) in the connection region of the fixing portions 32 and 34, and one main surface (back surface) of the support portions 21 and 22 ) Is supported by a second base (not shown) in the connection region of the fixing portions 33 and 35 and is fixed by an adhesive or the like. Thereby, the vibration piece 71b is fixed to a base (not shown). In addition, the connection area | region of the fixing | fixed part 32, 33, 34, 35 is shown with the oblique line in the figure.

  The connection region of the fixing portions 32 and 34 includes intersection regions 36 and 37 where the extension portion 17 and the support portions 19 and 20 intersect, and the connection region of the fixing portions 33 and 35 includes the extension portion 18 and the support portion. Intersection areas 38 and 39 where 21 and 22 intersect are included. In addition, the connection area | region of the fixing | fixed part 33 and 35 is a connection area | region which has an edge in the location containing the cross | intersection area | regions 38 and 39 from one edge part 30 of the support parts 21 and 22. FIG. In the same figure, the intersecting regions 36, 37, 38, 39 are shown as regions having a predetermined width, but the inner sides 17a, 18a of the extension portions 17, 18 are the support portions 19, 20, 21. , 22 may be a substantially virtual line region. Further, the connection areas of the fixing portions 32, 33, 34, and 35 can be the same connection areas as the various connection areas described in the first embodiment.

  According to the second modification, as in the first embodiment, it is difficult for the support portions 19 and 20 to bend (buffer action) when acceleration is applied, and the extension portion 18 on the second base 13 side is bent. (Buffer action) is also less likely to occur. Accordingly, it is possible to prevent a decrease in detection sensitivity of the acceleration sensor.

  In addition to the above, according to the second modification, the length of the support portions 21 and 22 on the second base portion 13 side fixed to the second base that is a movable base is increased, and the mass is efficiently increased. Can be bigger. By increasing the mass, it is possible to obtain a large inertial force by the second base, and it is possible to improve the acceleration detection sensitivity of the acceleration sensor.

  In the first and second modifications, the first base 12 and the second base 13 are described as having the constricted portions 41 and 42. However, the constricted portions 41 and 42 are not formed. It may be.

  In the above-described embodiment, the configuration of the vibrating arm has been described with the configuration of the vibrating arms 15 and 16 that are divided by the through-holes 14 penetrating between the main surfaces of the front and back sides and formed in two parallel beam shapes. The vibrating arm may be formed by a single beam that is not divided. Moreover, the structure of the vibrating arm formed in the shape of three or more beams by the division | segmentation by two or more through-holes may be sufficient, and it has the same effect, respectively.

  In the above description, the acceleration sensor is described as an example of the vibration type sensor. However, the present invention can be applied to a force sensor, a pressure sensor, and the like.

The perspective view which shows the outline of the acceleration sensor as 1st Embodiment. BRIEF DESCRIPTION OF THE DRAWINGS The outline of the acceleration sensor as 1st Embodiment is shown, (a) is a top view, (b) is AA sectional drawing of (a), (c) is the elements on larger scale of (a). (A), (b) is the elements on larger scale of the vibration piece plane for demonstrating the connection area | region of the fixing | fixed part in 1st Embodiment. The elements on larger scale of the vibration piece plane for demonstrating the other example of the connection area | region of the fixing | fixed part in 1st Embodiment. The top view of the vibration piece used for the acceleration sensor as 2nd Embodiment. The top view of the vibration piece used for the acceleration sensor as 3rd Embodiment. (A) is a top view which shows the vibration piece of the modification 1, (b) is a top view which shows the vibration piece of the modification 2. The perspective view which shows the outline of the conventional acceleration sensor. The conventional acceleration sensor is shown, (a) is a plan view, (b) is a QQ cross-sectional view of (a).

Explanation of symbols

  DESCRIPTION OF SYMBOLS 10 ... Acceleration sensor as a vibration-type sensor, 11, 51, 61, 71a, 71b ... Vibrating piece, 12 ... 1st base, 13 ... 2nd base, 14 ... Through-hole, 15, 16 ... Vibrating arm, 17, 18 ... Extension part, 19, 20, 21, 22 ... Support part, 19a, 20a, 21a, 22a ... Open end, 23 ... Base, 24 ... Hinge part, 25 ... One end face, 26 ... Other end face, 27 ... First 28, second base, 29, 30 ... end, 31 ... one main surface (back surface), 32, 33, 34, 35 ... fixed portion, 36, 37, 38, 39 ... crossing region, 41, 42 ... Constriction part.

Claims (6)

A first base and a second base having main surfaces on the front and back, a vibrating arm extending in a beam shape between the first base and the second base, and vibrating at a predetermined resonance frequency; An extension portion extending from at least one of the base portion or the second base portion in a direction intersecting with the extending direction of the vibrating arm, and extending from the extension portion so as to be parallel to the vibrating arm and having an open end. A vibrating piece including a support part;
A base for supporting the vibrating piece,
The vibration-type sensor is characterized in that the vibration piece is supported by connecting a connection region on one main surface including a region where the extension portion and the support portion intersect with the base. The vibration type sensor according to claim 1,
The vibration type sensor is characterized in that the vibrating arm is divided into at least two beams by a through-hole penetrating the front and back. In the vibration type sensor according to claim 1 or 2,
The vibration type sensor according to claim 1, wherein the connection region reaches an end portion of the extension portion provided in an extending direction of the vibrating arm. In the vibration type sensor according to any one of claims 1 to 3,
The support of the resonator element is formed by connecting a connection region on one main surface of the region extending from the open end of the support portion to the end portion of the extension portion provided in the extending direction of the vibration arm and the base. The vibration type sensor is characterized by being performed. In the vibration type sensor according to any one of claims 1 to 4,
The first base portion and the second base portion each have a constricted portion having a narrow width in a plan view, and are connected to the extension portion via the constricted portion. In the vibration type sensor according to any one of claims 1 to 5,
The base has a hinge portion formed to be thin in a groove shape, and a support portion extended from the first base is connected to the base on one side with respect to the hinge portion. The vibration type sensor is characterized in that a support portion extending from the second base portion is connected to the base on the other side.

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