JP2010055779A - Ultraviolet irradiation device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To generate well-matched ultraviolet irradiation, even when the type or shape of an electrodeless lamp is changed. <P>SOLUTION: After oscillated microwaves are converted into microwaves which can be transferred from a high-frequency power supply 11 with a built-in oscillating magnetron 12 via a coaxial cable 14, the microwaves are emitted from the coaxial cable 14 to a lamp house 17 storing the electrodeless lamp 18. Between the coaxial cable 14 and the lamp house 17, a matching adjusting unit 16 is arranged and the unit uses a sub 161 for adjusting the matching conditions of the microwaves to be matched and improves lamp performance. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a microwave power supply type ultraviolet irradiation module.

Conventionally, a microwave ultraviolet irradiation device that propagates a microwave output from a magnetron through a coaxial cable and supplies it to an electrodeless lamp is a microwave output from the magnetron when supplying microwave energy to the electrodeless lamp. Then, it is propagated through a coaxial cable and supplied to an electrodeless lamp, and ultraviolet rays are emitted from the electrodeless lamp. (For example, Patent Document 1)
JP 2003-109787 A

  The technique of Patent Document 1 described above has a design in which the shape and characteristics of the electrodeless lamp are fixed in order to maintain the matching state when the microwave output from the magnetron is propagated through the coaxial cable and supplied to the lamp. Therefore, when the type of the electrodeless lamp is changed, the matching condition is deteriorated, and there is a problem that the energy supply to the electrodeless lamp cannot be optimally performed.

  SUMMARY OF THE INVENTION An object of the present invention is to provide an ultraviolet irradiating apparatus that can perform matching ultraviolet irradiation even when the type and shape of an electrodeless lamp are changed, and can obtain a reliable alignment with a simple structure. .

  In order to solve the above-mentioned problems, an ultraviolet irradiation device according to the present invention includes a discharge medium encapsulated, an electrodeless lamp made of a light-transmitting dielectric, a magnetron that oscillates at a high frequency, and the lamp oscillated from the magnetron. In the ultraviolet irradiation module composed of a coaxial cable for transmitting a microwave and a mechanism for cooling the lamp, the microwave radiated to the electrodeless lamp in accordance with the change of the electrodeless lamp mounted And an alignment adjusting means for adjusting the alignment state.

  According to the present invention, even when the type and shape of the electrodeless lamp are changed, it is possible to irradiate microwaves in a state where the alignment is adjusted by adjusting the alignment state adjusting means.

  Hereinafter, the best mode for carrying out the present invention will be described in detail with reference to the drawings.

  1 to 3 are diagrams for explaining a first embodiment of the ultraviolet irradiation apparatus according to the present invention, FIG. 1 is a schematic configuration diagram, FIG. 2 is a configuration diagram of a main part of FIG. 1, and FIG. It is a block diagram of the principal part of FIG.

  In FIG. 1, reference numeral 11 denotes a high frequency power supply unit in which a magnetron 12 is accommodated in the same casing. The microwaves emitted from the magnetron 12 of the high frequency power supply unit 11 are supplied to the lamp house 17 through the connector 13, the coaxial cable 14, the connector 15, and the matching adjuster 16, respectively. An electrodeless lamp 18 is accommodated in the lamp house 17 at a predetermined position. A cooling fan 19 is attached to the upper portion of the lamp house 17 to dissipate heat generated from the electrodeless lamp 18. The ultraviolet light emitted from the electrodeless lamp 18 is reflected from the irradiation window 20 formed in the lower part of the lamp house 17 and reflected to the reflector 21 arranged on the back surface.

  The irradiation window 20 is provided with a screen 22 having an opening, for example, formed by knitting a metal wire into a mesh shape or by forming a metal plate by punching. Reference numeral 23 denotes a microwave cavity formed of an electrodeless lamp 18, a reflector 21, and a screen 22.

  FIG. 2 shows a configuration diagram of the high-frequency power supply unit 11. A power source 21 supplies the magnetron 12 with power from the power source 21 and generates a microwave from the magnetron 12. This microwave is supplied via the waveguide 112 to the coaxial / waveguide converter 113 for converting the microwave of the waveguide 112 into a microwave transmitted through the coaxial cable 14. The microwave converted for the coaxial cable 14 by the coaxial / waveguide converter 113 is transmitted to the coaxial cable 14, matched by the matching adjuster 16, and then radiated to the microwave cavity 23.

  Here, a configuration example of the electrodeless lamp 18 will be described with reference to FIG. Reference numeral 181 denotes a cylindrical bulb having a length of about 240 mm made of quartz glass that transmits ultraviolet light. The valve 181 is provided with a taper so that the central portion 182 is thinner than both end portions 183 and 184. The outer diameter of both end portions 183 and 184 is, for example, about 17 mm, and the outer diameter of the central portion 182 is 10 mm. Degree.

  In the light emitting space 185 of the bulb 181, an inert gas and a discharge medium for discharging with a microwave mainly composed of mercury and iron are enclosed. Support portions 186 and 187 that support the valve 181 are formed integrally with the valve 181 at both ends of the valve 181.

  The alignment adjuster 16 has a conductive box-like shape made of, for example, aluminum. The connector 15 is attached to one side surface, and an opening for radiating the microwave to the microwave cavity 23 is formed on the other side surface. Has been. Furthermore, the matching adjuster 16 is provided with a stub 161 for detecting the reflected voltage of the microwave and adjusting the frequency / power according to the detected voltage.

  As shown in FIG. 4, the stub 161 is an adjustment unit that performs alignment adjustment when the alignment attached to the upper surface of the alignment adjuster 16 is not achieved. The stub 161 can adjust the frequency / power corresponding to the electrodeless lamp 18 by inserting and removing a plurality of conductive adjustment shafts 41 into and from the alignment adjuster 16. For example, the adjustment shaft 41 is formed with a screw groove 42 on the outer periphery of the adjustment shaft 41, a screw thread 44 is formed on the inner periphery of the adjustment hole 43 formed in the upper surface of the alignment adjuster 16, and the stub 161 is rotated to adjust the alignment. The inside and outside of the vessel 16 can be taken in and out.

  Therefore, by adjusting the mismatch of the microwaves with the stub 161 of the matching adjuster 16 based on the change in the type and shape of the electrodeless lamp 18, the microwave matched with the change in the type and shape of the electrodeless lamp 18. Can be realized.

  FIG. 5 is a schematic configuration diagram for explaining a second embodiment relating to the ultraviolet irradiation apparatus of the present invention. The same components as those in the first embodiment described above are denoted by reference numerals, and description thereof is omitted here.

  In this embodiment, the stub 161 is directly installed on the upper surface of the lamp house 17. That is, the lamp house 17 itself is a part of the alignment adjuster 16, and the adjustment shaft 41 of the stub 161 is directly attached to the lamp house 17 so that it can be put in and out. By adjusting the adjustment shaft 41 based on a change in the type and shape of the electrodeless lamp 18, it is possible to realize microwave irradiation that matches the change in the type and shape of the electrodeless lamp 18.

  In this case, since a part of the configuration of the matching adjuster 16 can be shared by the lamp house 17, the configuration can be further simplified.

  6 and 7 are diagrams for explaining a third embodiment relating to the ultraviolet irradiation apparatus of the present invention, FIG. 6 is a schematic configuration diagram, and FIG. 7 is a configuration diagram for explaining an example of a main part of FIG. It is. The same components as those in the first embodiment described above are denoted by reference numerals, and description thereof is omitted here.

  In this embodiment, even when the adjustment is performed by the matching adjuster 16, the lamp performance is deteriorated when the matching is not successfully performed and the reflected wave of the microwave continues to be used in a mismatched state, and the lifetime of the magnetron is reduced. Is to prevent.

  That is, even in a mismatched state, the coaxial cable 14 generates more heat due to the reflection of microwaves. Therefore, as shown in FIG. 6, a temperature sensor 61 is attached to the coaxial cable 14, and the power supply 21 in the high frequency power supply 111 is stopped based on the detection result of the temperature sensor 61.

  Specifically, as shown in FIG. 7, a comparison is made by a comparator 71 that compares the output voltage of the temperature sensor 61 and a reference voltage Vref, and the power supply 21 is turned on / off based on the comparison result. That is, when the output of the temperature sensor 61 is lower than the reference voltage Vref, the comparator 71 is off and the power supply 21 remains on. When the output of the temperature sensor 61 is higher than the reference voltage Vref, the comparator 71 is turned on and controls the power supply 21 to be turned off.

  As described above, even when the matching state is adjusted by the matching adjuster 16, the temperature sensor 61 detects whether the mismatching state is the matching state based on the detection result in the temperature state of the coaxial cable 14. In this case, the lamp performance is prevented from deteriorating and the life of the magnetron is prevented from decreasing.

  8 and 9 are diagrams for explaining a fourth embodiment related to the ultraviolet irradiation apparatus of the present invention. FIG. 8 is a schematic configuration diagram of the main part, and FIG. 9 is a cross-sectional view of FIG. The same components as those in the first embodiment described above are denoted by reference numerals, and description thereof is omitted here.

  FIG. 8 shows a connection portion of the coaxial cable 14 by the matching adjuster 16 and the connector 15. The matching adjuster 16 is an improved means for matching the microwave and the microwave cavity 23.

  That is, the alignment can be adjusted by inserting and removing the stub 81 having the same shape as the alignment adjuster 16 in the alignment adjuster 16 in the direction of the arrow in the figure.

  In this embodiment, as in the stub 161 of the first embodiment, when the microwaves are in an inconsistent state, the alignment can be adjusted by inserting and removing the stub 81 into and from the alignment adjuster 16.

BRIEF DESCRIPTION OF THE DRAWINGS The schematic block diagram for demonstrating 1st Embodiment regarding the ultraviolet irradiation device of this invention. The block diagram of the principal part of FIG. The block diagram for demonstrating an example of the electrodeless lamp used in FIG. The block diagram of the principal part of FIG. The schematic block diagram for demonstrating 2nd Embodiment regarding the ultraviolet irradiation device of this invention. The schematic block diagram for demonstrating 3rd Embodiment regarding the ultraviolet irradiation device of this invention. 6 is a configuration diagram for explaining a configuration example of the main part. The schematic block diagram of the principal part for demonstrating 4th Embodiment regarding the ultraviolet irradiation device of this invention. FIG. 9 is a cross-sectional view of FIG. 8.

Explanation of symbols

DESCRIPTION OF SYMBOLS 11 High frequency power supply part 111 Power supply 112 Waveguide 113 Coaxial / waveguide conversion part 12 Magnetron 13,15 Connector 14 Coaxial cable 16 Matching regulator 161,81 Stub 17 Lamphouse 18 Electrodeless lamp 19 Fan 20 Irradiation window 21 Reflector 22 Screen 23 Microwave cavity 61 Temperature sensor 71 Comparator

Claims (3)

Electrodeless lamp made of a light-transmitting dielectric material in which a discharge medium is enclosed, a magnetron that oscillates a high frequency, a coaxial cable that transmits microwaves oscillated from the magnetron to the lamp, and a mechanism for cooling the lamp In the ultraviolet irradiation module composed of
An ultraviolet irradiation apparatus comprising: an alignment adjusting unit that adjusts an alignment state of the microwaves radiated to the electrodeless lamp in accordance with a change in the electrodeless lamp to be mounted.   2. The ultraviolet irradiation apparatus according to claim 1, wherein the alignment adjusting means also serves as a part of a lamp house that supports the electrodeless lamp and irradiates ultraviolet rays.   3. The ultraviolet irradiation device according to claim 1, wherein the temperature of the coaxial cable is detected, and on / off of a power supply for supplying a high voltage to the magnetron is controlled based on a detection result.

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