JP2010049191A - Optical apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical apparatus in which a movable mirror is largely rocked by a small driving force. <P>SOLUTION: Supporting parts 19, 21, 23 and 25 are abutted on the back face of a movable mirror 36, and provide a supporting point 18 for the movable mirror which rocks so that the first end 32 of the movable mirror 36 approaches a substrate 14, and a supporting point 24 for the movable mirror which rocks so that the second end 40 of the movable mirror approaches the substrate 40. Actuators 30, 42 select arbitral one of the first end 32 and the second end 14 of the movable mirror and make the end 32 or the end 40 on the selected side of the movable mirror approach the substrate 14. Connection parts 52, 54, 56 and 58 connect the movable mirror 36 to the substrate 14 in a state of allowing a relative motion in which (1) the movable mirror 36 rocks in a direction in which the movable mirror 36 separates from the supporting point 24 on the second end side centering on the supporting part 18 of the first end side, and (2) the movable mirror rocks in the direction in which the movable mirror separates from the supporting point 18 at the first end side centering on the supporting part 24 of the second end side. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to an optical device that switches a reflection direction of a light beam.

Methods for manufacturing microelectromechanical structures (MEMS) have been developed. There is also a need for an optical device that switches the direction of reflection of the light beam. Therefore, a technique for realizing an optical device that switches the reflection direction of a light beam by MEMS has been developed.
In the case of an optical device that switches the reflection direction of the light beam, it is necessary to swing the mirror that reflects the light beam, and a suction force is generated between the opposing members, and the interval between the opposing members is reduced by the suction force. The actuator is used. At this time, a larger suction force can be obtained as the interval prepared for the actuator is narrower, whereas when the interval is decreased, the swingable angle of the movable mirror is decreased.

The optical device of Patent Document 1 has been proposed. The optical device of Patent Document 1 includes a substrate, a movable beam, a movable layer, a movable mirror, and a support column. The movable layer is connected to the substrate via a movable beam and extends at a height spaced from the substrate. The end of the movable mirror is connected to the end of the movable layer. The column extends from the surface of the substrate through the movable layer toward the lower surface of the movable mirror.
In a state where no electrostatic attractive force is generated between the movable layer and the substrate, the movable mirror overlaps the movable layer. Both the movable mirror and the movable layer are supported by columns, and the movable mirror is parallel to the substrate. When an electrostatic attractive force is generated between the movable layer and the substrate, the movable layer translates in a direction approaching the substrate. As a result, the end of the movable mirror on the side fixed to the movable layer approaches the substrate, but the movable mirror cannot be further accessed at the portion in contact with the support column, so that the movable mirror is inclined. By tilting the movable mirror, the reflection direction of the light beam can be switched.
In the technique of Patent Document 1, since the lever is used as a fulcrum, the movable mirror can be largely inclined even if the moving distance of the movable layer is small.

Japanese Patent Laying-Open No. 2005-70091

  The technique of Patent Document 1 is an excellent technique that has succeeded in both generating a large suction force and swinging the movable mirror greatly. However, there is a demand to further swing the movable mirror. In order to further swing the movable mirror, it is advantageous to swing the movable mirror in both directions. However, the technique of Patent Document 1 can swing the movable mirror only in one direction.

When the optical device of Patent Document 1 is viewed in plan, the movable mirror is rectangular. The edge of the movable mirror on the side connected to the movable layer is defined as a first end, and the edge on the opposite side is defined as a second end.
In the technique of Patent Document 1, the movable mirror and the substrate are parallel in normal times. When the actuator is operated, the movable mirror swings in a direction in which the first end approaches the substrate and the second end separates from the substrate. It cannot swing in the opposite direction, that is, in the direction in which the first end portion is separated from the substrate and the second end portion approaches the substrate.

  An object of the present invention is to improve the technique of Patent Document 1 and provide an optical device in which a movable mirror swings in both directions. That is, if the first end portion of the movable mirror can be swung in the direction in which the first end portion approaches the substrate and the second end portion is separated from the substrate, the first end portion is separated from the substrate and the second end portion is brought into contact with the substrate. Provided is an optical device that can swing in an approaching direction.

The technology disclosed in this specification relates to an optical device that switches the reflection direction of a light beam. This optical device includes a substrate, a movable mirror, a support portion, an actuator, and a connecting portion.
The movable mirror extends from the first end to the second end when the optical device is viewed in plan.
The support portion is in contact with the surface of the movable mirror on the substrate side, and provides a fulcrum when the first end portion of the movable mirror swings in a direction approaching the substrate and the second end portion away from the substrate. An end side fulcrum and a second end side fulcrum that provides a fulcrum when the first end of the movable mirror is separated from the substrate and swings in a direction in which the second end approaches the substrate are provided. The actuator selects any one of the first end and the second end of the movable mirror, and brings the end of the selected movable mirror closer to the substrate side. The connecting part connects the movable mirror to the substrate, but the following relative motion:
(1) The movable mirror swings around the first end side fulcrum in the direction away from the second end side fulcrum.
(2) The movable mirror is allowed to move relative to the second end side fulcrum in a direction away from the first end side fulcrum.

The fulcrum in the above is not limited to a point, but may extend along a straight line. The support portion only needs to provide the first end portion side fulcrum and the second end portion side fulcrum, and may be a single member or may be composed of a plurality of members. A typical actuator is constituted by a pair of electrodes facing each other at a distance, but is not limited thereto. You may generate | occur | produce a suction | attraction force using a coil etc.
The mechanism for connecting the movable mirror to the substrate in a manner that allows relative movement is not particularly limited. The movable mirror can be connected to the substrate in such a manner as to allow relative motion using a beam that can be flexibly bent or a beam that can be flexibly twisted.

When the connecting portion that connects the movable mirror to the substrate includes a movable beam that allows relative motion, a configuration in which the movable beam extends between the substrate and the movable mirror may be employed.
The movable mirror arranged between the substrate and the movable mirror may be a movable beam extending parallel to the substrate, a movable beam extending in a direction orthogonal to the substrate, or a combination of both. It may be a beam.
In this case, in a state where the movable mirror is viewed in plan, it is not necessary to dispose the connecting portion outside the movable mirror, and at least most of the movable beam can be accommodated on the back surface of the movable mirror. Since there is no connecting portion outside the movable mirror, the movable mirror and the movable mirror can be disposed adjacent to each other, and the gap between the movable mirror and the movable mirror can be reduced. This is advantageous for densely arranging or arranging optical devices.

When the movable beam extends between the substrate and the movable mirror, an actuator can be provided between the movable beam and the substrate.
A large suction force can be obtained by narrowing the interval for generating the suction force.

  The movable beam connected to the first end of the movable mirror is preferably fixed to the substrate at a portion extending from the first end side fulcrum side beyond the second end side fulcrum side. Similarly, the movable beam connected to the second end of the movable mirror is preferably fixed to the substrate at a portion extending from the second end side fulcrum side beyond the first end side fulcrum side. .

The movable beam connected to the first end of the movable mirror is deformed as the first end of the movable mirror is displaced. In particular, when swinging about the second end side fulcrum, the first end of the movable mirror is greatly displaced, and the movable beam connected to the first end is greatly deformed.
At this time, if the movable beam connected to the first end is fixed to the substrate at a portion extending from the first end side fulcrum side beyond the second end side fulcrum side, the movable mirror is When swinging about the two end side fulcrum, a relationship is obtained in which the distance between both ends of the movable beam connected to the first end portion is reduced. On the other hand, when the movable beam is fixed to the substrate at a position closer to the first end side fulcrum than the second end side fulcrum, the movable mirror swings around the second end side fulcrum. Thus, a relationship is obtained in which the distance between both ends of the movable beam connected to the first end portion is increased. In general, a material used for MEMS has high tensile strength, and a large force is required when a movement to stretch the movable beam is required. On the other hand, when reducing the distance between both ends of the movable beam, it is sufficient that the movable beam is slack, and a small force is sufficient. When the movable beam connected to the first end of the movable mirror is fixed to the substrate at a portion extending from the first end side fulcrum side beyond the second end side fulcrum side, it can be moved with a small force. The mirror can be swung around the second end side fulcrum.
Similarly, if the movable beam connected to the second end of the movable mirror is fixed to the substrate at a portion extending from the second end side fulcrum side beyond the first end side fulcrum side, The movable mirror can be swung around the first end side fulcrum by force.

The connecting portion that connects the movable mirror to the substrate so as to be capable of relative movement is preferably formed of a bending beam, a torsion beam, a combined bending and twisting beam, or a combination thereof.
By using the movable beam, it is possible to realize a connection structure that has a small resistance to a required relative motion and a large resistance to other relative displacements.

As described above, an actuator may be provided between the movable beam and the substrate, but an actuator may be provided between the movable mirror and the substrate. According to the latter structure, the structure of the optical device is simplified.
In this case, the movable beam and the movable mirror may be arranged on the same plane.

According to the optical device of the present invention, since the movable mirror swings in both directions, a large swing angle can be obtained. The reflection direction of the light beam can be greatly changed.
In addition, since the back surface of the movable mirror is supported by a fulcrum and swings, that is, the lever principle is used, the swing angle of the movable mirror is increased even if the actuator displacement is small. can do.
Since both can be obtained, a very large swingable angle of the movable mirror can be obtained.

A silicon-based material is preferably used as the MEMS material. Various microfabrication techniques developed for manufacturing semiconductor devices can be used. In particular, it is preferable to use polycrystalline silicon containing impurities. When the movable mirror or the movable beam is formed of polycrystalline silicon having low resistance, the movable electrode can be provided by polycrystalline silicon. It is possible to eliminate the necessity of forming the movable electrode on the movable mirror or the movable beam.
The method for forming the reflecting surface of the movable mirror is not particularly limited. For example, the reflective surface may be formed by forming a metal film on the upper surface of the silicon layer. Alternatively, the upper surface of the silicon movable mirror itself may be used as the reflecting surface.

The configuration of the actuator is not particularly limited. For example, electrostatic attraction may be applied by applying a voltage difference between a pair of electrodes facing each other with a gap therebetween. Alternatively, a Lorentz force generated by passing a current through the coil may be used.
The optical device provided in this specification may be a single optical element, and a plurality of optical elements may be arranged one-dimensionally or two-dimensionally.

The main features of the embodiment described below are organized.
(Feature 1) The substrate, the movable mirror, the support portion, and the connecting portion are made of a silicon-based material.
(Feature 2) The movable mirror and the connecting portion are made of polycrystalline silicon.
(Characteristic 3) The support part is comprised by the support pillar extended from the surface of a board | substrate.
(Feature 4) The connecting portion is formed of a movable beam.
(Characteristic 5) The beam constituting the connecting portion is formed between the movable mirror and the substrate.
(Characteristic 6) The beam which comprises a connection part is formed in the same plane as a movable mirror.
(Characteristic 7) When the driving mirror is applied to the actuator to swing the movable mirror, the distance between both ends of the beam decreases, and the beam constituting the connecting portion satisfies the relationship in which the beam sags.

(First embodiment)
Fig.1 (a) shows the top view of the optical apparatus 10 of 1st Example. FIG.1 (b) shows the bb line schematic longitudinal cross-sectional view of Fig.1 (a). FIG. 1C also shows a schematic vertical sectional view taken along the line bb of FIG. 1A. The first actuator 30 generates a suction force so that the first end 32 of the movable mirror 36 is applied to the substrate 14. The close state is shown. The substrate 14 is widely spread and is not shown in FIG.

As shown in FIG. 1B, the substrate 14 is formed with a first support wall 20 and a second support wall 22. Each of the support walls 20 and 22 extends in the direction D3-D4. The first support wall 20 is disposed on the D1 side of the second support wall 22. In addition, the first connection base 12 and the second connection base 28 are formed on the substrate 14. The first connection base 12 is disposed on the D1 side with respect to the first support wall 20, and the second connection base 28 is disposed on the D2 side with respect to the second support wall 22.
The movable mirror 36 has a rectangular shape in plan view, straddles between the first support wall 20 and the second support wall 22, extends to the D1 side from the first support wall 20, and extends from the second support wall 22 to D2. It also extends to the side. An end portion on the D1 side of the movable mirror 36 is referred to as a first end portion 32, and an end portion on the D2 side of the movable mirror 36 is referred to as a second end portion 40. The movable mirror 36 extends from the first end 32 to the second end 40. The shape of the movable mirror 36 when viewed in plan may be a polygon such as a circle or a hexagon, and is not limited to a rectangle.

  A first movable beam 44 is interposed between the first end 32 of the movable mirror 36 and the first coupling base 12. A second movable beam 46 is passed between the second end 40 of the movable mirror 36 and the second coupling base 28. Each of the movable beams 44 and 46 is formed with a narrow width, and is flexible so that it can be bent. The movable beams 44 and 46 function as tension springs. As a result of the movable beams 44 and 46 acting as springs, the movable mirror 36 is positioned in parallel with the substrate 14 unless an external force is applied to the movable mirror 36 by an actuator described later. That is, it is stable in a posture in which the back surface of the movable mirror 36 is supported by the top surfaces of the pair of support walls 20 and 22.

As shown in FIG. 1B, the first substrate-side electrode 16 is formed on the upper surface of the substrate 14 in a range that is closer to the D1 side than the first support wall 20 and closer to the D2 side than the first end portion 32. ing. The movable mirror 36 itself is made of polycrystalline silicon to which impurities are added, and has a low resistance. The potential of the movable mirror 36 can be controlled. Therefore, a potential difference can be applied between the first substrate side electrode 16 and the movable mirror 36. When a potential difference is applied between the first substrate side electrode 16 and the movable mirror 36, the movable mirror 36 in a range facing the first substrate side electrode 16 can be attracted toward the first substrate side electrode 16. A first actuator 30 is formed by the first substrate side electrode 16 and the movable mirror 36 in a range facing the first substrate side electrode 16.
FIG. 1C shows a state in which the gap between the movable mirror 36 and the substrate 14 is narrowed at the position where the first actuator 30 is formed by operating the first actuator 30. The first actuator 30 is located on the D1 side of the first support wall 20. When the first actuator 30 is operated, the first end 32 of the movable mirror 36 approaches toward the substrate 14. At that time, since the movable mirror 36 in a portion supported by the top surface of the first support wall 20 cannot approach the substrate 14 beyond that, the first support wall 20 is pivoted. Precisely, it swings with the edge 18 on the D1 side of the top surface of the first support wall 20 as a fulcrum. As a result, the second end portion 40 of the movable mirror 36 is separated from the substrate 14. The movable mirror 36 is also separated from the top surface of the second support wall 22.

As shown in FIG. 1B, the second substrate-side electrode 26 is formed on the upper surface of the substrate 14 in a range that is closer to the D2 side than the second support wall 22 and closer to the D1 side than the second end portion 40. ing. As described above, the movable mirror 36 itself is made of polycrystalline silicon to which impurities are added, and has a low resistance. The potential of the movable mirror 36 can be controlled. Therefore, a potential difference can be applied between the second substrate side electrode 26 and the movable mirror 36. When a potential difference is applied between the second substrate side electrode 26 and the movable mirror 36, the movable mirror 36 in a range facing the second substrate side electrode 26 can be attracted toward the second substrate side electrode 26. A second actuator 42 is formed by the second substrate side electrode 26 and the movable mirror 36 in a range facing the second substrate side electrode 26.
The second actuator 42 is located on the D2 side of the second support wall 22. When the second actuator 42 is actuated, the second end 40 of the movable mirror 36 approaches toward the substrate 14. At that time, since the movable mirror 36 in the portion supported by the top surface of the second support wall 22 cannot approach the substrate 14 any further, the movable mirror 36 uses the second support wall 22 as a fulcrum. Swing. To be precise, the second support wall 22 swings with the edge 24 on the D2 side of the top surface as a fulcrum. As a result, the first end portion 32 of the movable mirror 36 is separated from the substrate 14. The movable mirror 36 is also separated from the top surface of the first support wall 20. The situation is obtained by inverting the left and right in FIG.

  When the movable mirror 36 is rotated counterclockwise by the first actuator 30, both the movable beams 44 and 46 are extended. In the case of the present embodiment, the spring coefficient of the movable beams 44 and 46 is adjusted in a range that does not prevent the movable mirror 36 from being swung by the first actuator 30. If the application of voltage to the first actuator 30 is stopped while the movable mirror 36 is rotated counterclockwise by the first actuator 30, the stretched movable beams 44 and 46 return to their natural shapes. As a result, the movable mirror 36 returns to the posture shown in FIG. 1B from the posture shown in FIG. Further, the gravity acting on the movable mirror 36 also helps the movable mirror 36 to return from the posture of FIG. 1C to the posture of FIG.

When the movable mirror 36 is rotated clockwise by the second actuator 42, both the movable beams 44 and 46 are stretched. In the case of the present embodiment, the spring coefficients of the movable beams 44 and 46 are adjusted in a range that does not prevent the movable mirror 36 from being swung by the second actuator 42. If the application of voltage to the second actuator 42 is stopped while the movable mirror 36 is being rotated clockwise by the second actuator 42, the stretched movable beams 44 and 46 return to their natural shapes. As a result, the movable mirror 36 returns to the posture shown in FIG. Further, the gravity acting on the movable mirror 36 also helps the movable mirror 36 to return to the posture shown in FIG.
In the optical device 10 of the first embodiment, the movable mirror 36 swings by 2 × θ. The reflection direction of the light beam can be greatly changed.

(Second embodiment)
An optical device 50 according to the second embodiment will be described with reference to FIG. The same members as those in the optical device 10 of the first embodiment are denoted by the same reference numerals, and redundant description is omitted. Below, it demonstrates centering around difference with 1st Example.

In the first embodiment, the support portion is constituted by the first support wall 20 and the second support wall 22, but in the second embodiment, the support portion is constituted by four support columns 19, 21, 23, 25. To do. The fulcrum 18 on the first end 32 side is secured by the left edge of the top surfaces of the support columns 19 and 21, and the fulcrum 24 on the second end 40 side is secured by the right edge of the top surfaces of the support columns 23 and 25. .
The number of support pillars is not limited to four. Only one support column may be disposed between the support columns 19 and 21, and only one support column may be disposed between the support columns 23 and 25.
The connecting portion of the second embodiment includes a movable beam 58 connected to the first end portion 32 of the movable mirror 36, a first connection base 56 that fixes the other end of the movable beam 58 to the substrate 14, and the movable mirror 36. The movable beam 54 is connected to the second end portion 40 of the first and second movable bases 54, and the second connection base portion 52 that fixes the other end of the movable beam 54 to the substrate 14.
When the first actuator 30 is operated to bring the first end 32 of the movable mirror 36 closer to the substrate 14, the movable mirror 36 swings around the fulcrum 18 on the first end 32 side and the second end 40. Greatly separates from the substrate 14. As a result, the movable beam 54 connected to the second end 40 is greatly deformed.

  FIG. 17 schematically shows the movement of the movable beam 54 when the movable mirror 36 swings with respect to the substrate 14 about the fulcrum 18. Subscript a indicates that the movable mirror 36 is parallel to the substrate 14. A subscript b indicates a state in which the movable mirror 36 is rotated counterclockwise by θ. The distance from the fulcrum 18 to the second end 40 of the movable mirror 36 is r, and the distance from the fulcrum 18 to the connecting base 52 of the movable beam 54 is x. The distance x is positive when the connecting base 52 is on the D1 side with respect to the fulcrum 18. That is, when the movable beam 54 extends from the second end 40 side beyond the fulcrum 18 on the first end 32 side and is fixed to the substrate 14 via the connection base 52, the distance x is Suppose it is positive. P52 indicates the position of the connection point between the movable beam 54 and the connection base 52. P40 indicates the position of the connection point between the movable beam 54 and the second end 40 of the movable mirror 36. P40a indicates a position before swinging, and P40b indicates a position after the movable mirror 36 rotates around the fulcrum 18 by θ in the counterclockwise direction.

  When the difference between the square of the distance from P52 to P40a and the square of the distance from P52 to P40b is taken, the value shown in Expression (1) is obtained. When the distance x is positive, the value on the right side is positive. When the movable beam 54 is fixed to the substrate 14 via the connecting base 52 at a portion extending from the second end 40 side beyond the fulcrum 18 on the first end 32 side, the movable mirror 36 is connected to the fulcrum 18. By rotating around, the distance between both ends of the movable beam 54 is shortened. If the distance x is zero, even if the movable mirror 36 rotates around the fulcrum 18, the distance between both ends of the movable beam 54 does not change. If the distance x is negative, the distance between both ends of the movable beam 54 is increased by the movable mirror 36 rotating around the fulcrum 18.

In the case of the second embodiment, as shown in FIG. 2, the connection base 52 of the movable beam 54 is located closer to the first end 32 than the fulcrum 18 on the first end 32 side. That is, the movable beam 54 connected to the second end portion 40 of the movable mirror 36 is a portion that extends beyond the fulcrum 18 on the first end portion 32 side from the fulcrum 24 side on the second end portion 40 side, It is fixed to the substrate 14.
With this relationship, the distance between the coupling base 52 and the second end 40 when the movable mirror 36 is parallel to the substrate 14 and the movable mirror 36 centered on the fulcrum 18 on the first end 32 side. Comparing the distance between the connecting base 52 and the second end 40 when rotated counterclockwise, the latter is shorter than the former as shown in the equation (1). That is, when the movable mirror 36 rotates counterclockwise around the fulcrum 18 on the first end portion 32 side, the movable beam 54 is not stretched and sags conversely.

While the force required to stretch the movable beam 54 is relatively large, no force is required to sag the movable beam 54. In the case of the second embodiment, the movable mirror 36 is not swung while the movable beam 54 is stretched, but the movable mirror 36 is swung while the movable beam 54 is slackened. The force required for the first actuator 30 may be small.
If the connecting base 52 is on the second end 40 side of the fulcrum 18 on the first end 32 side, the connection between the connecting base 52 and the second end 40 when the movable mirror 36 is parallel to the substrate 14. Comparing the distance and the distance between the connecting base 52 and the second end 40 when the movable mirror 36 rotates counterclockwise around the fulcrum 18 on the first end 32 side, the latter is more effective than the former. become longer. That is, when the movable mirror 36 rotates counterclockwise around the fulcrum 18 on the first end portion 32 side, the movable beam 54 is stretched. In this case, since it is necessary to swing the movable mirror 36 while the movable beam 54 is stretched, the force required for the first actuator 30 required to swing the movable mirror 36 is increased.

  When the distance x shown in FIG. 17 is zero, that is, the connection point P52 between the connection base 52 and the movable beam 54 is on a straight line passing through the fulcrum 18 on the first end 32 side and extending in the D3-D4 direction. When the movable mirror 36 rotates around the fulcrum 18, the length of the movable beam 54 should not change. However, the movable beam 54 is not swingable with respect to the connection base 52, and is not swingable with respect to the second end 40 of the movable mirror 36. When the movable mirror 36 rotates around the fulcrum 18 on the first end portion 32 side, the movable beam 54 bends so as to wave in the cross section of FIG. If the movable beam 54 is bent so as to wave, the linear distance connecting both ends of the movable beam tends to be shortened. If the connection point P52 between the connection base 52 and the movable beam 54 is on a straight line that passes through the fulcrum 18 and extends in the D3-D4 direction, the linear distance connecting both ends of the movable beam 54 tends to decrease. However, both ends of the movable beam 54 are constrained by a substrate or the like and cannot be shortened. This means that the movable mirror 36 swings while the movable beam 54 is substantially extended. In the case of the second embodiment, the distance x is set to be positive, and the movable mirror 36 oscillates even if the distance between both ends is shortened by bending the movable beam 54 so as to wave. This realizes the relationship in which the movable beam 54 sag.

  17 (2) represents the distortion rate generated in the movable beam 54, and (3) represents an expression differentiated by the distance x. As apparent from the equation (3), when r = x, the distortion rate has a maximum value. The distance x is preferably set to a positive value not more than the distance r.

As shown in FIG. 2, the coupling base 56 of the movable beam 58 coupled to the first end 32 of the movable mirror 36 is located closer to the second end 40 than the fulcrum 24 on the second end 40 side. ing. That is, the movable beam 58 connected to the first end portion 32 of the movable mirror 36 is a portion extending beyond the fulcrum 24 on the second end portion 40 side from the fulcrum 18 side on the first end portion 32 side, It is fixed to the substrate 14.
In this relationship, the distance between the coupling base 56 and the first end 32 when the movable mirror 36 is parallel to the substrate 14, and the movable mirror 36 around the fulcrum 24 on the second end 40 side. Comparing the distance between the connecting base 52 and the first end 32 when rotated clockwise, the latter is shorter than the former. That is, when the movable mirror 36 rotates in the clockwise direction around the fulcrum 24 on the second end 40 side, the movable beam 58 is not stretched and is slacked.

  In the case of the second embodiment, the movable mirror 36 is not swung while the movable beam 58 is stretched, but the movable mirror 36 is swung while the movable beam 58 is slackened. The force required for the second actuator 42 may be small.

(Third embodiment)
The optical device 60 of the third embodiment will be described with reference to FIG. The same members as those in the optical device 50 of the second embodiment are denoted by the same reference numerals, and redundant description is omitted. Below, it demonstrates centering around difference with 2nd Example.

In the case of the third embodiment, the movable beam 68 connected to the first end 32 of the movable mirror 36 does not protrude beyond the first end 32 toward the D1 side. Therefore, as shown in FIG. 3C, when the first end 32 of the movable mirror 36 swings to the side closer to the substrate 14, the movable beam 68 is more than the first end 32. It does not contact the substrate 14 first and it does not determine the swing limit angle. The first end 32 can be swung until it abuts against the substrate 14.
Similarly, the movable beam 64 connected to the second end 40 of the movable mirror 36 does not protrude beyond the second end 40 to the D2 side. For this reason, when the second end 40 of the movable mirror 36 swings toward the side closer to the substrate 14, the movable beam 64 comes into contact with the substrate 14 earlier than the second end 40. The swing limit angle is not determined. The second end 40 can be swung until it contacts the substrate 14.

In the case of the third embodiment, the movable beam 68 connected to the first end portion 32 remains on the second end portion 40 side with respect to the first end portion 32, and is movable connected to the second end portion 40. Since the beam 64 stays on the first end portion 32 side with respect to the second end portion 40, the movable beam does not limit the swing limit angle, and a large swingable angle can be secured.
Further, in the case of the third embodiment, a support portion is formed by one support base 17. Even if the support portion is not divided into a plurality of portions, the fulcrum 18 on the first end portion 32 side and the fulcrum 24 on the second end portion 40 side can be provided.

(Fourth embodiment)
The optical device 70 of the fourth embodiment will be described with reference to FIG. The same members as those in the optical device 50 of the second embodiment are denoted by the same reference numerals, and redundant description is omitted. Below, it demonstrates centering around difference with 2nd Example.

  In the case of the fourth embodiment, two movable beams 82 and 86 are connected to the first end portion 32 of the movable mirror 36. The movable beam 82 is connected to the vicinity of the end portion on the D3 side of the first end portion 32, and the movable beam 86 is connected to the vicinity of the end portion of the first end portion 32 on the D4 side. The connection bases 80 and 84 of the movable beams 82 and 86 are on the second end 40 side with respect to the fulcrum 24 on the second end 40 side. The movable beams 82 and 84 are in a slack relationship when the movable mirror 36 swings around the fulcrum 24 on the second end 40 side. Even if the two movable beams 82 and 86 are connected to the first end portion 32, the movable beams 82 and 86 do not hinder the displacement of the first end portion 32.

  Similarly, two movable beams 74 and 78 are connected to the second end portion 40 of the movable mirror 36. The movable beam 78 is connected to the vicinity of the end of the second end 40 on the D3 side, and the movable beam 78 is connected to the vicinity of the end of the second end 40 on the D4 side. The connection bases 72 and 76 of the movable beams 74 and 78 are located closer to the first end portion 32 than the fulcrum 18 on the first end portion 32 side. The movable beams 74 and 78 are in a relationship of sagging when the movable mirror 36 swings around the fulcrum 18 on the first end portion 32 side. Even if the two movable beams 74 and 78 are connected to the second end portion 40, the movable beams 74 and 78 do not hinder the displacement of the second end portion 40.

  In the optical device 70 of the fourth embodiment, since the movable mirror 36 is coupled to the substrate 14 by the four movable beams 74, 78, 82, 86, the positions of the movable mirror 36 and the substrate 14 when viewed in plan view. The relationship is stable. An optical device having high resistance to vibration or the like can be realized.

(5th Example)
The optical device 90 of the fifth embodiment will be described with reference to FIG. The same members as those in the optical device 70 of the fourth embodiment are denoted by the same reference numerals, and a duplicate description is omitted. Below, it demonstrates centering on difference with a 4th Example.

In the case of the fifth embodiment, the movable beams 102 and 106 connected to the first end 32 of the movable mirror 36 do not protrude beyond the first end 32 toward the D1 side. For this reason, when the first end 32 of the movable mirror 36 swings toward the side closer to the substrate 14, the movable beams 102 and 106 come into contact with the substrate 14 earlier than the first end 32. It does not determine the swing limit angle. The first end 32 can be swung until it abuts against the substrate 14.
Similarly, the movable beams 94 and 98 connected to the second end 40 of the movable mirror 36 do not protrude beyond the second end 40 on the D2 side. For this reason, when the second end 40 of the movable mirror 36 swings toward the side closer to the substrate 14, the movable beams 94 and 98 come into contact with the substrate 14 earlier than the second end 40. It does not determine the swing limit angle. The second end 40 can be swung until it contacts the substrate 14.

  In the case of the fifth embodiment, since the movable mirror 36 is connected to the substrate 14 by the four movable beams 94, 98, 102, 106, the positional relationship between the movable mirror 36 and the substrate 14 is stable when viewed in plan. To do. An optical device having high resistance to vibration or the like can be realized. Further, the movable beams 94, 98, 102, and 106 come into contact with the substrate 14 before the movable mirror 36, and this does not determine the swing limit angle. The movable mirror 36 can be largely swung until it comes into contact with the substrate 14.

(Sixth embodiment)
The optical device 110 of the sixth embodiment will be described with reference to FIG. The same members as those in the optical device 70 of the fourth embodiment are denoted by the same reference numerals, and a duplicate description is omitted. Below, it demonstrates centering on difference with a 4th Example.

  In the case of the sixth embodiment, two movable beams 118 and 120 are connected to the first end 32 of the movable mirror 36. The movable beam 118 is connected to the vicinity of the end portion on the D4 side of the first end portion 32, and the movable beam 120 is connected to the vicinity of the end portion of the first end portion 32 on the D3 side. The connection base portion 122 of the movable beams 118 and 122 is on the second end portion 40 side with respect to the fulcrum 24 on the second end portion 40 side. The movable beams 118 and 120 are in a sag relationship when the movable mirror 36 swings around the fulcrum 24 on the second end 40 side. Even if the two movable beams 118 and 120 are connected to the first end portion 32, the movable beams 118 and 120 do not hinder the displacement of the first end portion 32.

  Similarly, two movable beams 112 and 114 are connected to the second end portion 40 of the movable mirror 36. The movable beam 112 is connected to the vicinity of the end portion on the D4 side of the second end portion 40, and the movable beam 114 is connected to the vicinity of the end portion of the second end portion 40 on the D3 side. The connecting base portion 116 of the movable beams 112 and 114 is closer to the first end portion 32 than the fulcrum 18 on the first end portion 32 side. The movable beams 112 and 114 are in a relationship of sagging when the movable mirror 36 swings around the fulcrum 18 on the first end portion 32 side. Even if the two movable beams 112 and 114 are connected to the second end portion 40, the movable beams 112 and 114 do not hinder the displacement of the second end portion 40.

  In the optical device 110 of the sixth embodiment, since the movable mirror 36 is coupled to the substrate 14 by the four movable beams 112, 114, 118, 120, the positions of the movable mirror 36 and the substrate 14 when viewed in plan view. The relationship is stable. An optical device having high resistance to vibration or the like can be realized.

(Seventh embodiment)
The optical device 130 of the seventh embodiment will be described with reference to FIG. The same members as those in the optical device 50 of the second embodiment are denoted by the same reference numerals, and redundant description is omitted. Below, it demonstrates centering around difference with 2nd Example.

In the case of the seventh embodiment, no movable beam is connected to the first end 32 of the movable mirror 36. On the other hand, the movable beam 54 is connected to the second end portion 40.
Even if only one movable beam 54 is used, the positional relationship when the movable mirror 36 and the substrate 14 are viewed in plan is maintained constant by the movable beam 54, and a voltage is applied to the first actuator 30 or the second actuator 42. When the application is stopped, the movable beam 54 exerts a force to return the second end portion 40 to the height before the swing, and the back surface of the movable mirror 36 comes into contact with both the support wall 20 and the support wall 22. Return. An initial action can be obtained by connecting the movable mirror 36 to the substrate 14 by a single movable beam 54.

  In the case of the optical device 130 of the seventh embodiment, when the first end 32 is swung in the direction away from the substrate 14 around the fulcrum 24 on the second end 40 side, the movable beam swings the movable mirror. There is no hindrance.

(Eighth embodiment)
The optical device 140 according to the eighth embodiment will be described with reference to FIG. The difference from the optical device 130 of the seventh embodiment will be mainly described.
In the case of the eighth embodiment, no movable beam is connected to the first end 32 of the movable mirror 36. On the other hand, movable beams 144 and 148 are connected to the second end portion 40.
In the case of the optical apparatus 140 of the eighth embodiment, when the first end 32 is swung in the direction away from the substrate 14 around the fulcrum 24 on the second end 40 side, the movable beam swings the movable mirror. There is no hindrance.
Further, since the two movable beams 144 and 148 are used, the positional relationship when the movable mirror 36 and the substrate 14 are viewed in plan can be maintained more constant.

(Ninth embodiment)
The optical device 150 according to the ninth embodiment will be described with reference to FIG. In the first to eighth embodiments, actuators 30 and 42 are provided between the movable mirror 36 and the substrate 14. On the other hand, in the embodiment described below, an actuator is provided between the movable beam and the substrate. In the following embodiments, a movable beam that connects the movable mirror 36 to the substrate 14 so as to allow a predetermined relative movement extends between the substrate and the movable mirror.

  The optical device 150 of the ninth embodiment includes a layer of the substrate 14, an intermediate layer in which the movable beam extends, and a layer of the movable mirror 36. FIG. 9A shows a plan view of the layer of the movable mirror 36, and FIG. 9B shows a plan view of the intermediate layer. FIG. 9C shows a cross-sectional view taken along the line cc of FIG. 9A or 9B.

As shown in FIG. 9C and the like, four support columns 19, 21, 23, 25 extend from the surface of the substrate 14. The support columns 19, 21, 23, 25 extend through the intermediate layer to the back surface of the movable mirror 36. The first substrate side electrode 16 is fixed to the D1 side of the support columns 19 and 21, and the second substrate side electrode 26 is fixed to the D2 side of the support columns 23 and 25.
The movable beams 151, 152, and 154 extend from the intermediate height of the support column 19. The movable beam 151 extends in the D4 direction, the movable beam 152 extends in the D2 direction, and the movable beam 154 extends in the D3 direction. The movable beam 154 extends on the D2 side of the second end portion 40 of the movable mirror 36 in parallel with the second end portion 40. A base 156 rises from the end of the movable beam 154 on the D3 side, and a base 158 rises from the end of the movable beam 154 on the D4 side. The support column 19 and the movable beams 151, 152, and 154 are formed of conductive polycrystalline silicon, and the potential of the movable beam 154 can be controlled.

The movable beams 159, 160, and 162 extend from the intermediate height of the support column 25. The movable beam 159 extends in the D3 direction, the movable beam 160 extends in the D1 direction, and the movable beam 162 extends in the D4 direction. The movable beam 162 extends parallel to the first end 32 on the D1 side of the first end 32 of the movable mirror 36. The base 166 rises from the end of the movable beam 162 on the D3 side, and the base 164 rises from the end of the movable beam 162 on the D4 side. The support column 25 and the movable beams 159, 160, and 162 are formed of conductive polycrystalline silicon, and the potential of the movable beam 162 can be controlled.
As shown in FIG. 9A, the movable beam 168 extends between the pair of base portions 156 and 158. The movable beam 170 extends in the direction D1 from the intermediate point of the movable beam 168. The tip of the movable beam 170 is connected to the midpoint of the second end 40 of the movable mirror 36. A movable beam 172 extends between the pair of base portions 164 and 166. The movable beam 174 extends in the direction D2 from the middle point of the movable beam 172. The distal end of the movable beam 174 is connected to the intermediate point of the first end portion 32 of the movable mirror 36.

  The first substrate side electrode 16 is formed in a range that faces the lower surface of the movable beam 162. A first actuator 30 is formed by the first substrate side electrode 16 and the movable beam 162. A second substrate side electrode 26 is formed in a range that faces the lower surface of the movable beam 154. A second actuator 42 is formed by the second substrate side electrode 26 and the movable beam 154. In a state where neither the first actuator 30 nor the second actuator 42 is applied with a driving voltage, the back surface of the movable mirror 36 is in contact with and supported by the upper surfaces of the four support columns 19, 21, 23, 25.

  The first actuator 30 is located closer to the first end 32 than the support columns 19 and 21. When the first actuator 30 exerts a suction force, the first actuator 30 is more than the support columns 19 and 21 of the movable mirror 36. A portion on the first end portion 32 side approaches toward the substrate 14. The movable mirror 36 oscillates with the edge 18 on the first end 32 side of the top surface of the support columns 19 and 21 as a fulcrum. The edge 18 on the first end 32 side of the top surface of the support columns 19 and 21 provides a fulcrum 18 on the first end 32 side.

  The second actuator 42 is positioned on the second end 40 side of the support columns 23 and 25, and when the second actuator 42 exerts a suction force, the movable mirror 36 is more than the support columns 23 and 25. The portion on the second end 40 side approaches toward the substrate 14. The movable mirror 36 oscillates with the edge 24 on the second end 40 side of the top surfaces of the support columns 23 and 25 as a fulcrum. The edge 24 on the second end 40 side of the top surfaces of the support columns 23 and 25 provides a fulcrum 24 on the second end 40 side.

  The series of movable beams 159, 160, 162, 172, and 174 allow relative movement in which the first end 32 of the movable mirror 36 approaches or separates from the substrate 14, while the first end 32 of the movable mirror 36 is the substrate. 14 is forbidden to move in a plane parallel to 14. The series of movable beams 159, 160, 162, 172, and 174 allow a relative movement in which the first end portion 32 of the movable mirror 36 approaches or separates from the substrate 14 by moving in a combined manner of twisting and bending. . The series of movable beams 159, 160, 162, 172, and 174 give a strong resistance to the movement of the first end 32 of the movable mirror 36 in a plane parallel to the substrate 14, and the first end Little resistance is applied to the relative motion of 32 approaching or leaving the substrate 14.

  The series of movable beams 151, 152, 154, 168, and 170 allow relative movement in which the second end 40 of the movable mirror 36 approaches or separates from the substrate 14, while the second end 40 of the movable mirror 36 is the substrate. 14 is forbidden to move in a plane parallel to 14. The series of movable beams 151, 152, 154, 168, and 170 allow a relative movement in which the second end portion 40 of the movable mirror 36 approaches or separates from the substrate 14 by performing a combined movement of twisting and bending. . The series of movable beams 151, 152, 154, 168, 170 gives a strong resistance against the movement of the second end 40 of the movable mirror 36 in a plane parallel to the substrate 14, and the second end Almost no resistance is exerted on the relative movement 40 moves toward or away from the substrate 14.

In the optical device 150, the movable beam that connects the movable mirror 36 to the substrate 14 is hidden behind the movable mirror 36, and the movable mirrors 36 can be arranged close to each other. The movable mirror 36 group can be efficiently arranged in a limited area.
In the optical device 150, the support pillars 19 and 25 also serve as a coupling base, and the structure is simple.

(Tenth embodiment)
The optical device 180 according to the tenth embodiment will be described with reference to FIG. Only the differences from the ninth embodiment will be described below.

In the optical device 180, movable beams 182 and 184 are provided between the support column 23 and the movable beam 162. Since the movable beams 159 and 160 and the movable beams 182 and 184 are connected to the movable beam 162, the position of the movable beam 162 when viewed in plan is stabilized.
Similarly, in the optical device 180, movable beams 186 and 188 are provided between the support column 21 and the movable beam 154. Since the movable beams 151 and 152 and the movable beams 186 and 188 are connected to the movable beam 154, the position of the movable beam 154 when viewed in plan is stable. The positions of the beams 162 and 154 are stabilized, and the position of the movable mirror 36 when viewed in plan is stabilized. Even if vibration is applied to the optical device 180, the position of the movable mirror 36 does not shift.

(Eleventh embodiment)
The optical device 190 of the eleventh embodiment will be described with reference to FIG. Only the differences from the ninth embodiment will be described below.
In the optical device 190, the movable beam 162 is supported by the movable beams 196 and 194. The end of the movable beam 194 on the D2 side is fixed to the substrate 14 by a connection base 192. The movable beam 194 supporting the first end portion 32 of the movable mirror 36 extends from the first end portion 32 side to the D2 side beyond the fulcrum 24 on the second end portion 40 side, and the second end portion 40. The fulcrum 24 on the side is connected to the substrate 14 on the D2 side.

  When the movable beam 194 supporting the first end portion 32 is connected to the substrate 14 on the D2 side with respect to the fulcrum 24 on the second end portion 40 side, the movable mirror 36 is centered on the fulcrum 24 on the second end portion 40 side. When swinging, a relationship in which the movable beam 194 sag is obtained. The movable beam 194 does not prevent the first end 32 of the movable mirror 36 from swinging.

  In the optical device 190, the movable beam 154 is supported by the movable beams 200 and 202. The end of the movable beam 200 on the D1 side is fixed to the substrate 14 by a connection base 198. The movable beam 200 supporting the second end 40 of the movable mirror 36 extends from the second end 40 side to the D1 side beyond the fulcrum 18 on the first end 32 side, and the first end 32. The fulcrum 18 on the side is connected to the substrate 14 on the D1 side.

  When the movable beam 200 supporting the second end portion 40 is connected to the substrate 14 on the D1 side of the fulcrum 18 on the first end portion 32 side, the movable mirror 36 is centered on the fulcrum 18 on the first end portion 32 side. When swinging, a relationship in which the movable beam 200 sag is obtained. The movable beam 200 does not prevent the second end 40 of the movable mirror 36 from swinging.

(Twelfth embodiment)
The optical device 210 of the twelfth embodiment will be described with reference to FIG. Only the differences from the ninth embodiment will be described below.
In the optical device 210, the movable beam 162 is supported by the movable beams 218, 216, and 214. The end of the movable beam 214 on the D2 side is fixed to the substrate 14 by a connection base 212. The movable beam 214 supporting the first end portion 32 of the movable mirror 36 extends from the first end portion 32 side to the D2 side beyond the fulcrum 24 on the second end portion 40 side, and the second end portion 40. The fulcrum 24 on the side is connected to the substrate 14 on the D2 side.

When the movable beam 214 supporting the first end portion 32 is connected to the substrate 14 on the D2 side with respect to the fulcrum 24 on the second end portion 40 side, the movable mirror 36 is centered on the fulcrum 24 on the second end portion 40 side. When swinging, a relationship in which the movable beams 218, 216 and 214 sag is obtained. The movable beams 218, 216, 214 do not prevent the first end 32 of the movable mirror 36 from swinging.
The movable beam 216 extends long in the direction D3-D4. When the movable mirror 36 swings around the fulcrum 24 on the second end 40 side, the movable beam 216 flexes flexibly and twists flexibly. Since the movable beams 218, 216, 214 are flexibly bent and twisted, the movable mirror 36 swings greatly even if the suction force of the second actuator 40 is small.

  In the optical device 190, the movable beam 154 is supported by the movable beams 226, 224, and 222. The end of the movable beam 222 on the D1 side is fixed to the substrate 14 with a connection base 220. The movable beam 222 supporting the second end portion 40 of the movable mirror 36 extends from the second end portion 40 side to the D1 side beyond the fulcrum 18 on the first end portion 32 side, and the first end portion 32. The fulcrum 18 on the side is connected to the substrate 14 on the D1 side.

  When the movable beam 222 supporting the second end 40 is connected to the substrate 14 on the D1 side with respect to the fulcrum 18 on the first end 32 side, the movable mirror 36 is centered on the fulcrum 18 on the first end 32 side. When swinging, a relationship in which the movable beams 222, 224, and 226 sag is obtained. The movable beams 222, 224, and 226 do not prevent the second end 40 of the movable mirror 36 from swinging.

  The movable beam 224 extends long in the direction D3-D4. When the movable mirror 36 swings around the fulcrum 18 on the first end portion 32 side, the movable beam 224 flexes flexibly and twists flexibly. Since the movable beams 222, 224, and 226 are flexibly bent and twisted, the movable mirror 36 swings greatly even if the suction force of the first actuator 30 is small.

(13th embodiment)
The optical device 230 of the thirteenth embodiment will be described with reference to FIG. Only the differences from the ninth embodiment will be described below.
Movable beams 246, 248, 250, and 252 extend from the connection base 244. The movable beam 246 extends in the D4 direction, the movable beam 248 extends in the 45 degree direction, the movable beam 250 extends in the D2 direction, and the movable beam 252 extends in the D3 direction. The movable beam 252 extends in parallel with the second end 40 on the D2 side of the second end 40 of the movable mirror 36. The base 232 rises from the end of the movable beam 252 on the D3 side, and the base 236 rises from the end of the movable beam 252 on the D4 side.

  Movable beams 256, 258, 260, and 262 extend from the connection base 254. The movable beam 250 extends in the D3 direction, the movable beam 258 extends in the 45 degree direction, the movable beam 260 extends in the D1 direction, and the movable beam 262 extends in the D4 direction. The movable beam 262 extends on the D1 side of the first end 32 of the movable mirror 36 in parallel with the first end 32. A base 238 rises from the end of the movable beam 262 on the D3 side, and a base 242 rises from the end of the movable beam 262 on the D4 side.

  The first actuator 30 is located closer to the first end 32 than the support columns 19 and 21. When the first actuator 30 exerts a suction force, the first actuator 30 is more than the support columns 19 and 21 of the movable mirror 36. A portion on the first end portion 32 side approaches toward the substrate 14. The movable mirror 36 oscillates with the edge 18 on the first end 32 side of the top surface of the support columns 19 and 21 as a fulcrum. The edge 18 on the first end 32 side of the top surface of the support columns 19 and 21 provides a fulcrum 18 on the first end 32 side.

  The second actuator 42 is positioned on the second end 40 side of the support columns 23 and 25, and when the second actuator 42 exerts a suction force, the movable mirror 36 is more than the support columns 23 and 25. The portion on the second end 40 side approaches toward the substrate 14. The movable mirror 36 oscillates with the edge 24 on the second end 40 side of the top surfaces of the support columns 23 and 25 as a fulcrum. The edge 24 on the second end 40 side of the top surfaces of the support columns 23 and 25 provides a fulcrum 24 on the second end 40 side.

  The series of movable beams 256, 258, 260, 262, 240, and 241 allow the first end 32 of the movable mirror 36 while allowing the relative movement of the first end 32 of the movable mirror 36 toward or away from the substrate 14. Is prohibited from moving in a plane parallel to the substrate 14. The series of movable beams 256, 258, 260, 262, 240, and 241 move relative to each other so that the first end 32 of the movable mirror 36 approaches or separates from the substrate 14 by moving in a combined manner of twisting and bending. Allow. The series of movable beams 256, 258, 260, 262, 240, and 241 provide a strong resistance against the movement of the first end 32 of the movable mirror 36 in a plane parallel to the substrate 14, and the first Little resistance is applied to the relative movement of the end 32 toward or away from the substrate 14.

  FIG. 14A shows the postures of the movable beams 256 and 260 when a suction force is applied to the second actuator 42 to move the first end 32 of the movable mirror 36 away from the substrate 14. The movable beam 256 is lifted upward while being twisted. Since the movable beam 256 deforms flexibly, the movable mirror 36 can swing greatly.

  A series of movable beams 246, 248, 250, 252, 234, 235 allow the second end 40 of the movable mirror 36 to move relative to the second end 40 of the movable mirror 36 approaching or moving away from the substrate 14. 40 is prohibited from moving in a plane parallel to the substrate 14. The series of movable beams 246, 248, 250, 252, 234, and 235 move relative to each other so that the second end 40 of the movable mirror 36 approaches or separates from the substrate 14 by moving in a combined manner of twisting and bending. Allow. The series of movable beams 246, 248, 250, 252, 234, and 235 give a strong resistance against the movement of the second end 40 of the movable mirror 36 in a plane parallel to the substrate 14, and the second Almost no resistance is applied to the relative movement of the end 40 approaching or leaving the substrate 14.

FIG. 14B shows the posture of the movable beams 246 and 250 when the second actuator 40 is moved away from the substrate 14 by applying a suction force to the first actuator 30. The movable beam 246 is lifted upward while being twisted. Since the movable beam 246 deforms smoothly, the movable mirror 36 can swing greatly.
As shown in FIG. 15, the support columns 21 and 23 can be omitted. The support portion of the movable mirror 36 may be configured by the two support columns 19 and 25.

(14th embodiment)
The optical device 270 of the fourteenth embodiment will be described with reference to FIG. Only the differences between the ninth embodiment and the thirteenth embodiment will be described below.
In the optical device 270, the movable beam 276 extends longer in the D3-D4 direction than the movable beam 246 of the thirteenth embodiment, and the movable beam 154 extends longer in the D3-D4 direction than the movable beam 252 of the thirteenth embodiment. . Similarly, the movable beam 286 extends in the D3-D4 direction longer than the movable beam 256 of the thirteenth embodiment, and the movable beam 162 extends longer in the D3-D4 direction than the movable beam 262 of the thirteenth embodiment. The structure above the movable beams 154 and 162 is the same as that of the ninth embodiment, and redundant description is omitted.

Specific examples of the present invention have been described in detail above, but these are merely examples and do not limit the scope of the claims. The technology described in the claims includes various modifications and changes of the specific examples illustrated above.
The technical elements described in this specification or the drawings exhibit technical usefulness alone or in various combinations, and are not limited to the combinations described in the claims at the time of filing. In addition, the technology illustrated in the present specification or the drawings achieves a plurality of objects at the same time, and has technical utility by achieving one of the objects.

(A) shows the top view of the optical apparatus of 1st Example. (B) shows the longitudinal cross-sectional view of the bb line of (a). (C) shows a longitudinal sectional view when the first actuator generates a suction force. (A) shows the top view of the optical apparatus of 2nd Example. (B) shows the longitudinal cross-sectional view of the bb line of (a). (C) shows a longitudinal sectional view when the first actuator generates a suction force. (A) shows the top view of the optical apparatus of 3rd Example. (B) shows the longitudinal cross-sectional view of the bb line of (a). (C) shows a longitudinal sectional view when the first actuator generates a suction force. The top view of the optical apparatus of 4th Example is shown. The top view of the optical apparatus of 5th Example is shown. The top view of the optical apparatus of 6th Example is shown. The top view of the optical apparatus of 7th Example is shown. The top view of the optical apparatus of 8th Example is shown. (A) shows the top view of the optical apparatus of 9th Example. (B) shows the top view of a movable beam layer. (C) shows the cc line longitudinal cross-sectional view of (a) and (b). (A) shows the top view of the optical apparatus of 10th Example. (B) shows the top view of a movable beam layer. (C) shows the cc line longitudinal cross-sectional view of (a) and (b). (A) shows the top view of the optical apparatus of 11th Example. (B) shows the top view of a movable beam layer. (C) shows the cc line longitudinal cross-sectional view of (a) and (b). (A) shows the top view of the optical apparatus of 12th Example. (B) shows the top view of a movable beam layer. (C) shows the cc line longitudinal cross-sectional view of (a) and (b). (A) shows the top view of the optical apparatus of 13th Example. (B) shows the top view of a movable beam layer. (C) shows the cc line longitudinal cross-sectional view of (a) and (b). (A) and (b) show the operation of the optical apparatus of the thirteenth embodiment. The top view of the modification of 13th Example is shown. (A) shows the top view of the optical apparatus of 14th Example. (B) shows the top view of a movable beam layer. (C) shows the cc line longitudinal cross-sectional view of (a) and (b). The change of the length of the movable beam that occurs when the movable mirror swings is shown.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10: Optical apparatus 12; Connection base part 14: Board | substrate 16: The 1st board | substrate side electrode 18: The fulcrum 20 of the 1st edge part side: The support wall 22: The support wall 24: The fulcrum 26 of the 2nd edge part side: The 2nd board | substrate side Electrode 28: linking base 30: first actuator 32: first end 36: movable mirror 40: second end 42: second actuator 44: first movable beam 46: second movable beam θ: swing angle 17: Support bases 19, 21, 23, 25: support columns 52, 56, 62, 66, 72, 76, 80, 84, 92, 96, 100, 104, 116, 122, 142, 146: connection bases 54, 58, 64, 68, 74, 78, 82, 86, 112, 114, 118, 120, 144, 148: movable beam

Claims (7)

An optical device that switches the reflection direction of the light beam,
It has a substrate, a movable mirror, a support part, an actuator, and a connection part.
The movable mirror extends from the first end to the second end when the optical device is viewed in plan view,
The support portion is in contact with the surface of the movable mirror on the substrate side, and serves as a fulcrum when the first end of the movable mirror swings in a direction in which the first end approaches the substrate and the second end separates from the substrate. A first end side fulcrum to be provided and a second end side fulcrum to provide a fulcrum when the first end of the movable mirror is separated from the substrate and swings in a direction in which the second end approaches the substrate. With
The actuator selects any one of the first end and the second end of the movable mirror, and brings the end of the movable mirror on the selected side closer to the substrate side,
The connecting part has the following relative motion:
(1) The movable mirror swings around the first end side fulcrum in the direction away from the second end side fulcrum.
(2) The movable mirror is connected to the substrate in such a manner that the movable mirror is allowed to move relative to the second end side fulcrum in a direction away from the first end side fulcrum. Optical device characterized.   The optical device according to claim 1, wherein the connecting portion includes a movable beam that allows the relative motion.   The optical apparatus according to claim 2, wherein the movable beam extends between the substrate and the movable mirror.   The optical apparatus according to claim 3, wherein the actuator is provided between the movable beam and the substrate. The movable beam connected to the first end of the movable mirror is fixed to the substrate at a portion extending from the first end side fulcrum side beyond the second end side fulcrum side,
The movable beam connected to the second end of the movable mirror is fixed to the substrate at a portion extending from the second end side fulcrum side beyond the first end side fulcrum side. The optical device according to claim 2, wherein the optical device is characterized in that:   6. The optical apparatus according to claim 2, wherein the movable beam is one of a bending beam, a torsion beam, and a composite beam of bending and twisting.   3. The optical apparatus according to claim 1, wherein the actuator is provided between the movable mirror and the substrate.

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