JP2010048643A5 - - Google Patents

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Publication number
JP2010048643A5
JP2010048643A5 JP2008212511A JP2008212511A JP2010048643A5 JP 2010048643 A5 JP2010048643 A5 JP 2010048643A5 JP 2008212511 A JP2008212511 A JP 2008212511A JP 2008212511 A JP2008212511 A JP 2008212511A JP 2010048643 A5 JP2010048643 A5 JP 2010048643A5
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JP
Japan
Prior art keywords
tuning fork
acceleration detection
double
bases
arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2008212511A
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English (en)
Japanese (ja)
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JP2010048643A (ja
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Publication date
Application filed filed Critical
Priority to JP2008212511A priority Critical patent/JP2010048643A/ja
Priority claimed from JP2008212511A external-priority patent/JP2010048643A/ja
Publication of JP2010048643A publication Critical patent/JP2010048643A/ja
Publication of JP2010048643A5 publication Critical patent/JP2010048643A5/ja
Withdrawn legal-status Critical Current

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JP2008212511A 2008-08-21 2008-08-21 加速度検知ユニット、及び加速度センサ Withdrawn JP2010048643A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008212511A JP2010048643A (ja) 2008-08-21 2008-08-21 加速度検知ユニット、及び加速度センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008212511A JP2010048643A (ja) 2008-08-21 2008-08-21 加速度検知ユニット、及び加速度センサ

Publications (2)

Publication Number Publication Date
JP2010048643A JP2010048643A (ja) 2010-03-04
JP2010048643A5 true JP2010048643A5 (https=) 2011-10-20

Family

ID=42065848

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008212511A Withdrawn JP2010048643A (ja) 2008-08-21 2008-08-21 加速度検知ユニット、及び加速度センサ

Country Status (1)

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JP (1) JP2010048643A (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5633319B2 (ja) * 2010-03-17 2014-12-03 セイコーエプソン株式会社 振動片、センサー素子、センサーおよび電子機器
CN108459173B (zh) * 2018-04-13 2023-08-11 北京强度环境研究所 一种应用于高g值冲击加速度传感器的机械滤波器
CN114994366B (zh) * 2022-06-06 2025-07-29 西安微电子技术研究所 一种温度补偿型石英振梁加速度计控制电路

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