JP2010046746A - Thin blade diamond grinding wheel and method of manufacturing the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a thin blade diamond grinding wheel which allows diamond abrasive grains to be strongly fixed thereto and allows the height of the diamond abrasive grains fixed to a side surface to be uniformed. <P>SOLUTION: Metal-based, ceramics-based, or a resin-based paste 18 and the diamond abrasive grains 20 are mixed with water or a solvent other than water to form a muddy mixture, and the mixture is impregnated into a porous material 14 made of metal, graphite, ceramics, or resin and is baked. Paste 19 with a different material and diamond abrasive grains 22 with a different grain size are arranged at the side surface. Flat pressure plates 24 support the surfaces of the porous material 14 in parallel and the paste 18, 19 are solidified while pushing the diamond abrasive grains 22 to the surface of the porous material 14. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a thin blade diamond grindstone used for cutting various objects using diamond abrasive grains and a method for producing the same.

A cutting apparatus using diamond abrasive grains is widely used for processing various materials such as semiconductor devices. In order to improve the performance, for example, a technique for making a thin blade diamond grindstone more robust has been developed (see Patent Document 1).
JP-A-9-233777

The known prior art has the following problems to be solved.
The sharpness in the cutting process depends on the state of the diamond abrasive grains used in the thin blade diamond grindstone. When a part of diamond abrasive grains is clogged during cutting, the sharpness is deteriorated. Further, although the diamond abrasive grains are also fired on the side surfaces of thin diamond diamond wheels, there is a problem in that there is a large chipping called chipping in the cut work material because the grain diameters of the diamond abrasive grains vary.
In order to solve the above-mentioned problems, an object of the present invention is to provide the following thin blade diamond grindstone and a method for producing the same.

The following configurations are means for solving the above-described problems.
<Configuration 1>
A porous material made of metal, graphite, ceramics, or resin, impregnated with metal, ceramics, or resin powder and diamond abrasive grains mixed with an organic solvent, and impregnated and fired under pressure A method for producing a thin blade diamond grindstone characterized by

<Configuration 2>
A method for producing a thin blade diamond grindstone as set forth in Structure 1, wherein a plurality of plate-like porous materials impregnated with said powder and diamond abrasive grains are laminated and fired under pressure. .

<Configuration 3>
In the method for producing a thin blade diamond grindstone according to Configuration 1 or 2, the porous material is impregnated with the powder and diamond abrasive grains, and then the organic solvent is volatilized, and the porous material is formed using a flat pressure plate. A method for producing a thin blade diamond grindstone, wherein the surface is pressurized and fired so as to be thinned to a predetermined thickness.

<Configuration 4>
In the method for manufacturing a thin blade diamond grindstone according to any one of the constitutions 1 to 3, the porous material is first impregnated with ceramic powder and diamond abrasive grains, and then the metal powder and particle size from the surface of the porous plate. Is impregnated with diamond abrasive grains of the same grade or smaller than those impregnated first.

<Configuration 5>
In the method for manufacturing a thin blade diamond grindstone according to any one of the constitutions 1 to 3, the ceramic powder and a plate-shaped porous material impregnated with diamond abrasive grains are sandwiched between the metal powder and the particle size of the diamond. A method for producing a thin-blade diamond grindstone, comprising laminating plate-shaped porous materials impregnated with diamond abrasive grains of the same grade as or smaller than abrasive grains, followed by pressure firing.

<Configuration 6>
A thin blade diamond grindstone obtained by impregnating a metal, ceramic, or resin-based porous material and diamond abrasive grains into a porous material made of metal, graphite, ceramics, or resin, followed by pressure firing.

<Configuration 7>
The thin blade diamond grindstone according to constitution 6, wherein a plurality of plate-like porous materials impregnated with the powder and diamond abrasive grains are laminated and fired under pressure.

<Configuration 8>
The thin blade diamond grindstone according to constitution 6 or 7, wherein the surface of the porous material is compressed under pressure.

<Configuration 9>
In the thin blade diamond grindstone according to any one of Structures 6 to 8, the metal porous material is impregnated with ceramic powder and diamond abrasive grains, and the surface of the porous plate has the same particle size as the metal powder. A thin blade diamond wheel impregnated with grade or small grade diamond abrasive grains.

<Configuration 10>
The thin blade diamond grindstone according to any one of Structures 6 to 8, wherein a metal powder and a particle size of the diamond abrasive grains are sandwiched between a ceramic powder and a plate-shaped porous material impregnated with diamond abrasive grains. A thin blade diamond grindstone characterized by laminating a plate-shaped porous material impregnated with diamond abrasive grains of the same grade or a small grade and pressurizing and firing.

<Configuration 11>
A porous material made of metal, graphite, ceramics, or resin is impregnated with metal-based, ceramic-based, or resin-based powder and diamond abrasive grains, and the core material is surrounded by pressure-fired tape. Wire saw.

<Configuration 12>
6. The method for producing a thin blade diamond grindstone according to any one of claims 1 to 5, wherein the porous material is a plate-like or sheet-like material in which fibers are gathered.

<Configuration 13>
11. The thin blade diamond grindstone according to any one of claims 6 to 10, wherein the porous material is made of a plate-like or sheet-like material in which fibers are gathered.

<Configuration 14>
The band saw or wire saw according to claim 10, wherein the porous material is a plate-like or sheet-like material in which fibers are gathered.

(1) Since a porous material is impregnated with a paste and diamond abrasive grains and fired, the diamond abrasive grains can be firmly fixed, and a thin-edged diamond grindstone with stable sharpness can be obtained.
(2) When diamond grains having different grain sizes or different types of paste powder are laminated, a thin blade diamond grindstone having characteristics according to requirements can be obtained.
(3) When the surface of the porous material is pressed and thinned to a predetermined thickness using a flat pressure plate, the side surface of the thin-blade diamond grindstone can be flattened, and the quality of the cutting surface of the object can be improved.
(4) The sharpness of the blade can be maintained if a ceramic paste and a diamond grain having a large particle size are arranged in the core. If the side surface is reinforced with a metal paste, the quality of the cut surface of the object can be improved by using diamond grains having a small particle size.

FIG. 1 is a perspective view of a thin blade diamond grindstone of the present invention and a schematic configuration explanatory diagram of a cutting state.
As shown to (a) of a figure, the thin blade diamond grindstone 10 is used as a disk shaped cutter rotated centering around the rotating shaft 11, for example. In addition, as will be described later, the thin blade diamond grindstone of the present invention can be applied to a belt-shaped band saw or wire saw. The thin blade diamond grindstone 10 of FIG. 1A is used for cutting the object 12 with a predetermined thickness as shown in FIG. At this time, the edge indicated by the arrow A functions to cut through the object 12. Further, the side portion indicated by the arrow B rubs the cut object 12, and thus affects the quality of the cutting surface of the object. An embodiment for improving the quality of the cut surface will be introduced later.

FIG. 2 is an explanatory diagram of a method for manufacturing the thin-blade diamond grindstone 10 of the present invention.
In order to manufacture the thin-blade diamond grindstone 10 of the present invention, for example, a container 13 is filled with a paste 18 in which a powder 18 for firing is dissolved in a volatile organic solvent such as alcohol to form a mud, Diamond abrasive grains 20 are mixed. As the powder 18, a metal-based, ceramic-based, or resin-based one is used. For example, glass powder is known as the ceramic powder 18 for the thin diamond wheel 10. The diamond abrasive grains 20 are uniformly dispersed in the paste 18. Next, the porous material 14 is submerged in the paste 18 in the container 13 and decompressed. In this embodiment, paste 18 and diamond abrasive grains mixed with a volatile organic solvent such as alcohol are used, but the mixing ratio may be experimentally selected through an impregnation treatment. .

  The porous material 14 is made of a metal, graphite, ceramics, or resin material. The foaming rate of the porous material is preferably 30% to 95%. The foam diameter of the porous material is preferably 20 μm to 500 μm. If the foaming rate is high and the bubble diameter is too large, the strength becomes insufficient. Moreover, when the foaming rate is low and the bubble diameter is too small, a sufficient amount of paste for retaining diamond abrasive grains cannot be impregnated. In addition, a plate-like or sheet-like material in which fibers such as carbon fiber and glass fiber are assembled can be used as the porous material. In this case, the fiber can be expected to improve the strength of the thin blade diamond grindstone as a whole. Moreover, it is more flexible than a foamed plate, and for example, it is easy to adjust the plate thickness when pressurized.

  When the porous material 14 is submerged in the paste 18 and the pressure is reduced, air can be extracted from the bubbles inside the porous material 14. Thereafter, when the atmosphere is returned to atmospheric pressure, the paste 18 and the diamond abrasive grains 20 are impregnated in the bubbles of the porous material 14. Then, for example, it is heated and pressed around 800 degrees Celsius. In this way, the powder 18 is fired to fix the diamond abrasive grains 20 to the porous material 14. Furthermore, by applying pressure while heating and baking, bubbles in the porous material 14 are crushed and adjusted to a desired thickness.

  By the above method, the thin blade diamond grindstone 10 as shown in FIG. 1 is completed. Part of the diamond abrasive grains 20 appears on the edge portion indicated by arrow A and the side surface indicated by arrow B of the porous material 14 shown in FIG. Thereby, the object 12 as shown in FIG. 1B can be cut. Part of the diamond abrasive grains 20 will also fall off, but new edges will appear successively, so that the sharpness can be kept constant. On the other hand, the side surface indicated by the arrow B has a function of adjusting the cut surface of the cut object 12. If the diamond abrasive grains 20 protruding from the side surfaces are irregularly arranged, the cutting surface of the object 12 becomes rough.

  In the present invention, when the porous material 14 is fired after impregnating the paste 18 and the diamond abrasive grains 20, for example, the porous material 14 is sandwiched by using two flat pressure plates. The pressure plate crushes the side surface of the porous material 14 flatly. Thereby, the tips of the diamond abrasive grains 20 protruding on the side surface of B are aligned at a substantially constant height, and the quality of the cutting surface of the object 12 can be improved. Next, the manufacturing method will be specifically described with reference to the drawings.

FIGS. 3A and 3B are longitudinal sectional views of main parts when the thin-blade diamond grindstone 10 is manufactured.
The porous material 14 shown in (a) is impregnated with a paste 18 and diamond abrasive grains 20 in advance. When the cross section of the porous material 14 in the figure is viewed in detail, as shown by a circle C, the paste 18 and the diamond abrasive grains 20 are accommodated in the bubbles 26. It is preferable that the size of the bubbles 26 can accommodate about several hundred to several thousand diamond abrasive grains 20.

  As shown in FIG. 5B, when the paste is heated and fired so as to be sandwiched between two flat pressure plates 24, the tips of the diamond abrasive grains 20 protruding to the side surface are aligned at a substantially constant height. Powder and diamond may be fired by supporting a flat pressure plate parallel to the surface of the porous material and controlling the pressure so that the diamond abrasive grains 20 have a predetermined thickness toward the surface of the porous material.

  In this example, different powders and diamond abrasive grains are used in the inside of the porous material 14 (the edge portion of A) and the side surface portion in order to further enhance the function of the thin blade diamond grindstone. The powder 18 used in the porous material 14 is a ceramic-based glass powder, for example. The diamond abrasive grains 20 have an average particle diameter of, for example, 20 μm. On the other hand, a mixture of a metal paste 19 and diamond abrasive grains 22 is applied to both side surfaces of the porous material 14. Then, vacuum impregnation is performed again. The diamond abrasive grains 22 are assumed to have an average particle diameter of about 5 μm, which is smaller than the diamond abrasive grains 20.

Thereby, as shown in (b) of the figure, both side surfaces of the porous material 14 are covered with the mixture of the metal-based powder 19 and the diamond abrasive grains 22. In this state, the pressure plates 24 are arranged on both sides of the porous material 14, and the baking is performed by heating at about 800 degrees Celsius while applying pressure so that the height of the diamond abrasive grains 22 is uniform. As a result, a thin blade diamond grindstone 10 having a cross-sectional structure as shown in FIG. An enlarged cross section of the thin blade diamond grindstone 10 is indicated by a circle D. As shown in this circle D, diamond abrasive grains 22 protrude from the side surface of the thin-blade diamond grindstone 10.

  Bubbles 27 immediately below diamond abrasive grains 22 are impregnated with paste 19 and diamond abrasive grains 22. With such a structure, the side surfaces of the thin-blade diamond grindstone 10 are reinforced by the paste 19 and the diamond abrasive grains 22 arranged on the surface have the same height, so that the cut surface of the object can be maintained with high quality. Further, since the fired product of the metal powder has higher fracture strength than the fired product of the ceramic powder, it is possible to prevent the grinding stone from being damaged. Further, since the diamond abrasive grains 22 have an average particle size smaller than that of the diamond abrasive grains 20, there is little edge chipping on the cut surface of the object to be cut, and the quality of a cut semiconductor chip or the like can be improved.

FIG. 4 is an explanatory diagram for manufacturing the thin-blade diamond grindstone 10 having the same function as in FIG. 3 by another method. (A) is the principal part sectional drawing, (b) is the exploded perspective view.
As shown in FIG. 4A, the porous material 14 is impregnated with diamond abrasive grains 20 and a paste 18. The porous material 16 is impregnated with diamond abrasive grains 22 and a paste 19. The particle size of the diamond abrasive grains and the type of paste can be arbitrarily selected for each porous material. In this state, one porous material 14 and two porous materials 16 as shown in FIG. 4B are overlapped, and then fired with both sides of the pressure plate 24 as shown in FIG. To do. As a result, a product having the same function as that of the thin-blade diamond grindstone 10 described in FIG. 3 can be manufactured. Since both the porous material 14 and the porous material 16 have a large number of bubbles and are impregnated with a bond material, they can be firmly bonded to each other and can maintain sufficient strength as a thin blade diamond grindstone.

FIG. 5 is an explanatory view of a modified example of the thin blade diamond grindstone of the present invention.
A wire saw 30 shown in (b) of the figure is, for example, linear (endless) and is stretched over a pulley or the like (not shown) and used to cut an object. For example, as shown to (a) of a figure, the stainless steel core material 32 and the sheet-like porous material 34 are used. As the porous material 34, a tape-shaped metal material having good moldability is used. The porous material 34 is impregnated with the diamond abrasive grains 20 and the paste 18 using metal powder and fired. The tape-like sheet thus completed is tubed so as to surround the core member 32 using a known tape format. The completed wire saw 30 is flexible as a whole, and since the diamond abrasive grains 20 are fixed to the porous material 34, sufficient strength can be maintained as in the above-described embodiment. In addition, after tubing the metal-based porous material 34 on the outer periphery of the core material 32, impregnating the diamond abrasive grains 20 and the paste 18 using the metal-based powder, reducing the diameter using a die, and then firing. A wire saw with good characteristics can be produced efficiently. Moreover, when a flat core material is used, a band saw can be manufactured.

  In addition, although the example shown in the said FIG. 1 etc. was a disk-shaped thing, there exist a thing of an outer peripheral blade and a thing of an inner peripheral blade in a rotary cutting blade. Either is fine. Further, in the laminated type, two or more porous plates having an arbitrary thickness and having an arbitrary thickness can be stacked. And since these can be laminated and impregnated with diamond abrasive grains and paste-like powder and fired all at once, there is an effect that the heat treatment process can be performed collectively.

Use a porous plate (disk with a thickness of 0.5mm and 10cmm) SUS316L or equivalent. Diamond abrasive grains (average particle diameter: 20 μm) and glass powder (Al ₂ O ₃ , SiO ₂ glass) were mixed uniformly and made into a paste with alcohol. This mud mixture was vacuum impregnated into a porous board. The powder was fired by heating to a temperature of 700 degrees Celsius, and both sides of the porous disk were pressed with a press machine to finish a disk with a thickness of 100 μm. When compared with a conventional metal-based thin blade diamond grindstone in a cutting test, it was proved that the sharpness peculiar to the Vitri grindstone was good and the cutting speed was fast.

  Prepare a porous plate (a disk with a thickness of 0.5mm and 10cmm) SUS316L or equivalent. Diamond abrasive grains (average particle diameter: 20 μm) and metal powder (Cu, Sn) were uniformly mixed and made into a paste with alcohol. This pasty mixture was vacuum impregnated into a porous board. The powder was fired by heating to a temperature of 700 degrees Celsius, and both sides of the porous disk were pressed with a press machine to finish a disk with a thickness of 100 μm. Compared with a conventional metal-based thin blade diamond grindstone in a cutting test, it has been demonstrated that the life is long and the wear resistance is improved.

Prepare three porous plates (discs with a thickness of 0.2mm and 10cmm) SUS316L equivalent. Diamond abrasive grains (average particle diameter: 20 μm) and glass powder (Al ₂ O ₃ , SiO ₂ glass) were mixed uniformly and made into a paste with alcohol. This paste-like mixture was vacuum impregnated into one porous board. On the other hand, diamond abrasive grains (average particle size: 3 μm) and metal powder (Cu, Sn) were mixed uniformly and made muddy with alcohol. The mud mixture was vacuum impregnated into the remaining two porous discs. One porous board using glass powder as a powder is sandwiched between the remaining two porous boards, heated to a temperature of 700 degrees Celsius to melt the powder, and both sides of the porous board are pressed with a press device, Finished into a disk with a thickness of 100 μm. Since there is a layer using glass as a paste at the center, the cutting speed is fast as in the first embodiment. In addition, since the relatively brittle center layer is protected by being sandwiched between layers using metal as a paste, the strength is high as a whole, and the grindstone is not damaged. Furthermore, since both sides of the diamond abrasive grains having a small particle size are distributed at a uniform height and are firmly fixed as in the embodiment, the whole wears out uniformly, so that the chipping of the work material is extremely small. The effect was also demonstrated.

It is schematic structure explanatory drawing of the thin blade diamond grindstone of this invention. It is explanatory drawing of the manufacturing method of the thin blade diamond grindstone 10 of this invention. (A) And (b) is a principal part longitudinal cross-sectional view at the time of thin blade diamond grindstone 10 manufacture, respectively. It is explanatory drawing which manufactures the thin blade diamond grindstone 10 with the function similar to FIG. 3 by another method. It is explanatory drawing of the modification of the thin blade diamond grindstone of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Thin blade diamond grindstone 11 Rotating shaft 12 Target object 13 Container 14 Porous material 16 Porous material 18 Paste 19 Paste 20 Diamond abrasive grain 22 Diamond abrasive grain 24 Pressure plate 26 Bubble 30 Wire saw 32 Core material 34 Porous material

Claims (14)

  A porous material made of metal, graphite, ceramics, or resin is impregnated with a paste made by mixing metal, ceramics, or resin powder and diamond abrasive with an organic solvent, and then fired under pressure. A method for producing a thin blade diamond grindstone. In the manufacturing method of the thin-blade diamond grindstone of Claim 1,
A method for producing a thin blade diamond grindstone, comprising laminating a plurality of plate-like porous materials impregnated with the powder and diamond abrasive grains, followed by pressure firing. In the manufacturing method of the thin blade diamond grindstone according to claim 1 or 2,
After impregnating the porous material with the powder and diamond abrasive grains, the organic solvent is volatilized and the surface of the porous material is pressurized using a flat pressure plate to reduce the thickness to a predetermined thickness. A method for producing a thin blade diamond grindstone, characterized by being pressure fired. In the manufacturing method of the thin blade diamond grindstone in any one of Claims 1 thru | or 3,
Porous material is first impregnated with ceramic powder and diamond abrasive, and then impregnated with the same or smaller grade of diamond abrasive from the surface of the porous plate with metal powder and particle size. A method for producing a thin-blade diamond grindstone, characterized by comprising: In the manufacturing method of the thin blade diamond grindstone in any one of Claims 1 thru | or 3,
A plate-shaped material impregnated with a diamond powder of the same or smaller grade than the diamond powder with a metal powder sandwiched between a ceramic powder and a plate-shaped porous material impregnated with diamond abrasive A method for producing a thin-blade diamond grindstone, characterized in that a porous material is laminated and fired under pressure.   A thin blade diamond grindstone obtained by impregnating a metal, ceramic, or resin-based porous material and diamond abrasive grains into a porous material made of metal, graphite, ceramics, or resin, followed by pressure firing. In the thin blade diamond grindstone according to claim 6,
A thin blade diamond grindstone, wherein a plurality of plate-like porous materials impregnated with the powder and diamond abrasive grains are laminated and pressure fired. In the thin blade diamond grindstone according to claim 6 or 7,
A thin blade diamond grindstone, wherein the surface of the porous material is compressed under pressure. In the thin blade diamond grindstone in any one of Claims 6 thru | or 8,
The metal-based porous material is impregnated with ceramic-based powder and diamond abrasive grains, and the surface of the porous plate is impregnated with metal-based powder and diamond abrasive grains of the same or smaller grade. Thin blade diamond whetstone. In the thin blade diamond grindstone in any one of Claims 6 thru | or 8,
A plate-shaped material impregnated with a diamond powder of the same or smaller grade than the diamond powder with a metal powder sandwiched between a ceramic powder and a plate-shaped porous material impregnated with diamond abrasive A thin-blade diamond grindstone, which is obtained by laminating a porous material and pressurizing and firing.   A porous material made of metal, graphite, ceramics, or resin is impregnated with metal, ceramics, or resin-based powder and diamond abrasive grains, and the core material is surrounded by a porous material that is pressure-fired. Band saw or wire saw.   6. The method for producing a thin blade diamond grindstone according to any one of claims 1 to 5, wherein the porous material is a plate-like or sheet-like material in which fibers are gathered.   11. The thin blade diamond grindstone according to claim 6, wherein the porous material is a plate-like or sheet-like material in which fibers are gathered.   The band saw or wire saw according to claim 10, wherein the porous material is a plate-like or sheet-like material in which fibers are gathered.

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