JP2010045115A - Production control system, production control method, production control program, and host computer - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a production control system capable of carrying out manufacture by specifying a semiconductor manufacturing device with favorable manufacturing quality. <P>SOLUTION: The production control system is equipped with a host computer determining a selected manufacturing device from a plurality of semiconductor manufacturing devices (facility units 1-4) 51-54 and outputting conveyance instructions, a rank A type DB classifying semiconductor products into rank A types wherein dispersion of quality should be suppressed to a constant value or less and rank B types other than the rank A types and storing identifiers of the rank A types in correspondence to process conditions of the rank A types, and a facility unit number DB recording information indicating whether or not if each of the plurality of semiconductor manufacturing devices can manufacture the rank A types in the process conditions and quality information based upon quality of semiconductor products manufactured by each semiconductor manufacturing device in correspondence to each semiconductor manufacturing device. A semiconductor manufacturing device with favorable quality information based upon the quality information is determined as the selected manufacturing device from semiconductor manufacturing devices capable of manufacturing the rank A types in the process conditions of the semiconductor manufacturing devices. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a production management system, and more particularly to a production management system for a semiconductor manufacturing apparatus.

  The production management system performs management and control in the manufacturing process of the semiconductor manufacturing apparatus. The developed LSI (Large Scale Integration: hereinafter referred to as a semiconductor product) is given a product name according to the application and function. The production management system sets the process conditions corresponding to the product name and the model and number of the semiconductor manufacturing equipment to be used. The semiconductor manufacturing apparatus performs a semiconductor product manufacturing work in accordance with a command from the production management system. A semiconductor manufacturing apparatus is usually provided with a plurality of facilities under the same process conditions. The plurality of semiconductor manufacturing apparatuses are prepared to cope with an increase in the number of semiconductor products produced or a sudden failure of the semiconductor manufacturing apparatus. The production management system designates a facility for manufacturing work according to the product name of the semiconductor product and the in-process status from among the plurality of semiconductor manufacturing apparatuses.

  The following are disclosed as related technologies related to the production management system.

Patent Document 1 discloses a production control system that manages a production line that manufactures a predetermined object through a series of a plurality of work processes. For each product and / or lot of the product that is basic data in the object manufacturing operation Disclosed a production control system that can set work number instructions in stages in each process for each product process procedure data, and can specify the work number to be used accurately for the work number that is a production facility. is doing. In the production control system of Patent Document 1, when a series of a plurality of work steps are added to a predetermined object to produce another object, the type of work, the type of equipment to be used, and each work at least in each step In accordance with the processing data including the above-mentioned conditions, a process procedure table in which the execution order of the series of a plurality of work processes is set is created at least at each product or each product lot, and recorded in the process procedure table. In a production control system configured so that predetermined operations are sequentially executed in accordance with the processing data, a work number indicating step for determining work number indicating data for executing a predetermined operation by a predetermined type of work number is provided. It is characterized in that it is individually provided for each process in at least one stage of the process procedure unit for each product or the process procedure unit for each product lot. .
JP-A-9-260231

  Generally, a semiconductor manufacturing apparatus has a certain fluctuation in the quality of a semiconductor product to be manufactured. Depending on the type of semiconductor product, there are semiconductor products that allow a certain variation in quality, and semiconductor products that require a high quality with a certain level of variation in quality. However, the conventional production management system designates a semiconductor manufacturing apparatus that manufactures semiconductor products based on the type of work, the type of equipment, and the work conditions. In addition, when the conventional production management system can be manufactured by a plurality of semiconductor manufacturing apparatuses, the facility for manufacturing is specified according to the in-process state of each semiconductor manufacturing apparatus. In other words, the production management system has no problem in setting the process conditions of the semiconductor manufacturing apparatus, regardless of the type that requires high quality (hereinafter referred to as rank A type) or a type other than rank A type (hereinafter referred to as rank B type). Depending on the in-process status of each facility, the manufacturing object is distributed to each facility for manufacturing. Therefore, there is a possibility that the rank A type is manufactured in equipment that is not a failure but is inferior in manufacturing quality to other semiconductor manufacturing apparatuses. In such a case, there is a problem that even if it is a rank A type product, variation in quality cannot be suppressed to a certain level, and a high-quality semiconductor product may not be obtained.

  Hereinafter, means for solving the problem will be described using the numbers used in (Best Mode for Carrying Out the Invention). These numbers are added to clarify the correspondence between the description of (Claims) and (Best Mode for Carrying Out the Invention). However, these numbers should not be used to interpret the technical scope of the invention described in (Claims).

  The production management system of the present invention determines a selected manufacturing apparatus from among a plurality of semiconductor manufacturing apparatuses (51 to 54), and outputs a transfer instruction to the selected manufacturing apparatus based on the transfer instruction. The semiconductor product is classified into a rank A type and a rank B type other than the rank A type, and the host computer (40) having a transfer control device (40) for transferring a lot of semiconductor products. 30) is a rank A product DB (100) that stores an identifier of a rank A product and a process condition of the rank A product in association with each other, and each of the plurality of semiconductor manufacturing apparatuses (51 to 54) is ranked in the process condition. Information indicating whether it is possible to manufacture the A type and quality information based on the quality of the semiconductor product manufactured by each semiconductor manufacturing apparatus (51-54), The equipment number DB (110) for recording corresponding to the conductor manufacturing apparatus (51-54) is provided, and the rank A type can be manufactured under the process conditions in each of the semiconductor manufacturing apparatuses (51-54). Among the semiconductor manufacturing apparatuses, a semiconductor manufacturing apparatus with good quality information is determined as a selective manufacturing apparatus based on the quality information.

  The host computer of the present invention is used in the above production management system.

  In the production management method of the present invention, a selected manufacturing apparatus is determined from a plurality of semiconductor manufacturing apparatuses, a transport instruction is output (S40, S130), and a semiconductor product lot is sent to the selected manufacturing apparatus based on the transport instruction. The semiconductor product is classified into a rank A type and a rank B type other than the rank A type, and the rank A type identifier, rank A Steps (S10, S100) for storing the process conditions of the types in association with each other, information indicating whether each of the plurality of semiconductor manufacturing apparatuses can manufacture the rank A type in the process conditions, Steps (S20, S110) for recording quality information based on the quality of the semiconductor product manufactured by the semiconductor manufacturing apparatus corresponding to each semiconductor manufacturing apparatus, and each half A step of determining a semiconductor manufacturing apparatus having good quality information as a selective manufacturing apparatus based on the quality information from among the semiconductor manufacturing apparatuses capable of manufacturing the rank A type in the process conditions among the body manufacturing apparatuses (S30). , S120).

  The production management program of the present invention determines a selected manufacturing apparatus to be selected from a plurality of semiconductor manufacturing apparatuses, and outputs a semiconductor product lot conveyance instruction (S40, S130), and the semiconductor product has a quality variation. Are classified into rank A varieties and rank B varieties other than rank A varieties, and the identifiers of rank A varieties and the process conditions of rank A varieties are stored in association with each other (S10, S100); , Information indicating whether or not each of the plurality of semiconductor manufacturing apparatuses can manufacture the rank A type in the process conditions, and quality information based on the quality of the semiconductor product manufactured by each semiconductor manufacturing apparatus, A step (S20, S110) of recording corresponding to the semiconductor manufacturing apparatus and manufacturing a rank A type product under process conditions among the respective semiconductor manufacturing apparatuses. From among the capable semiconductor manufacturing apparatus, and a step (S30, S120) the quality information to determine a good semiconductor manufacturing apparatus, as selected manufacturing apparatus based on the quality information.

  According to the present invention, a semiconductor product requiring high quality is manufactured by designating a semiconductor manufacturing apparatus having a good semiconductor product manufacturing quality from among a plurality of semiconductor manufacturing apparatuses capable of manufacturing the semiconductor product. It is possible to provide a production management system capable of

  A production management system according to an embodiment of the present invention will be described below with reference to the accompanying drawings.

(First embodiment)
First, the first embodiment of the present invention will be described.

[Description of configuration]
First, the configuration of the first embodiment will be described. FIG. 1 shows the configuration of a production management system in the present embodiment. The production management system of the present embodiment includes an office terminal 10, a manufacturing site terminal 20, a host computer 30, a transfer control device 40, and semiconductor manufacturing devices (hereinafter, equipment number machines) 51 to 54.

  First, the office terminal 10 and the manufacturing site terminal 20 will be described. The office terminal 10 and the manufacturing site terminal 20 are input terminals for inputting data to the host computer 30. A manager (hereinafter, manager) of the production management system uses the office terminal 10 to register the rank A type and the process condition code in the host computer 30. In addition, an on-site person in charge at the manufacturing site (hereinafter referred to as an on-site person in charge) uses the manufacturing site terminal 20 to send the host computer 30 to the host computer 30 in which the equipment quality machine maintains the production quality in a good state. (Hereinafter referred to as the “equipment with good quality”).

  The office terminal 10 and the manufacturing site terminal 20 are personal computers (hereinafter referred to as PCs). Therefore, the office terminal 10 and the manufacturing site terminal 20 are configured by a storage device (not shown) such as a ROM (Read Only Memory) or an HDD (Hard Disk Drive), and the functions of the office terminal 10 and the manufacturing site terminal 20 are provided. A storage unit that records a processing program and data to be realized, and a central processing unit (CPU) and a random access memory (RAM), and the office terminal 10 by executing the program stored in the storage unit It consists of a processing unit that realizes the functions of the manufacturing site terminal 20, a keyboard and a mouse, an input unit that is used for input by an administrator or a person in charge of the site, and an LCD (Liquid Crystal Display), and an input screen 1 or entered Comprising a display unit for displaying a screen 5, it is composed of a LAN (Local Area Network) port, and a communication unit that performs host computer 30 and data communication. In the present embodiment, the office terminal 10 and the manufacturing site terminal 20 are configured separately. You may comprise this with one PC provided with the function of the office terminal 10 and the manufacturing site terminal 20. FIG. Moreover, the person who performs each input work is not limited to the manager or the field staff.

  FIG. 2 shows an input screen 1 in which the administrator sets the product name and process condition code of the rank A type in the office terminal 10. The input screen 1 is displayed on the display unit when the processing unit executes the processing program stored in the storage unit of the office terminal 10. The input screen 1 includes a rank A product name input field 2, a process condition code input field 3, and a registration button 4. The administrator inputs the rank A product name in the input field 2 and the process condition code in the input field 3 from the input unit of the office terminal 10. The administrator presses the registration button 4 when the input is completed. When the registration button 4 is pressed, the processing unit of the office terminal 10 transmits the input rank A type registration data to the host computer 30 through the communication unit. As a result, the rank A product name and the process condition code are registered in the host computer 30. The rank A type name and the process condition code are determined in advance by the administrator.

  As described above, the rank A product is a semiconductor product that needs to have a high quality of a certain level or higher. Here, a specific example of a semiconductor product for which high quality is required refers to a vehicle-mounted product used for electronic control of an automobile or the like.

  In addition, process conditions are the designation of work conditions (temperature, film thickness, gas type, etc.) and the work environment (equipment that can be operated) when working in the process. Specify these data in.

  FIG. 3 shows an input screen 5 on which the person in charge of the site sets up a good quality equipment number among the equipment numbers 51 to 54. The input screen 5 is displayed on the display unit when the processing unit executes the processing program stored in the storage unit in the manufacturing site terminal 20. The input screen 5 includes an equipment column code input field 6 and a registration button 7. The person in charge of the site inputs the equipment number code into the input field 6 from the input unit of the manufacturing site terminal 20. The person in charge of the site presses the registration button 7 when the input is completed. When the registration button 7 is pressed, the processing unit of the production site terminal 20 transmits the input equipment quality registration data that has been input to the host computer 30 via the communication unit. As a result, the equipment number code is registered in the host computer 30.

  In the present embodiment, among the equipment numbers 51 to 54, the good quality equipment number is determined based on statistical information (hereinafter referred to as quality information) relating to the quality that the person in charge of the field performs in advance. Judgment as to whether the equipment is of good quality is based on quality information such as the number of wafer defects, process capability index, and yield rate. For example, the number of wafer defects is determined in each of the equipment numbers 51 to 54 based on whether the number of manufactured wafer defects is equal to or less than a certain threshold value. Whether the process capability index is equal to or greater than a certain threshold based on in-process management characteristics such as film deposition film pressure, wiring dimensions, and electrical characteristics of the wafers manufactured by each of the equipment numbers 51 to 54. Make a decision based on this. Further, the yield rate is determined based on information such as whether the test result of the wafer manufactured by each of the equipment numbers 51 to 54 is good and the yield rate is equal to or higher than a certain threshold value. Alternatively, the determination may be made by combining a plurality of these pieces of quality information, or a priority order may be set based on each quality information, and the determination may be made in order of priority.

  Next, the host computer 30 will be described. The host computer 30 determines a good quality equipment number among the work numbers capable of producing the rank A type and notifies the transfer control device 40 of the good quality equipment number. The host computer 30 inputs the process condition code and rank A product name transmitted from the office terminal 10. Further, the host computer 30 inputs the equipment number code of the good quality equipment number from the manufacturing site terminal 20. The host computer 30 determines a good quality equipment number from among the work number machines capable of producing the rank A variety under certain process conditions. The host computer 30 transmits a conveyance instruction to the conveyance control device 40 so that the rank A type is manufactured by the high-quality equipment number machine.

  The host computer 30 is configured by a storage device (not shown) such as a ROM or HDD, and is configured by a storage unit that records processing programs and data for realizing the functions of the host computer 30, and a CPU and RAM. A processing unit that realizes the function of the host computer 30 by executing a program stored in the unit, a keyboard and a mouse, an input unit used by an administrator to input settings, and an LCD A display unit that displays a screen and a communication unit that includes a LAN port and performs data communication with the office terminal 10, the manufacturing site terminal 20, and the transfer control device 40 are provided.

  The storage unit includes a rank A product name database (hereinafter, rank A product DB) 100 and an equipment number database (hereinafter, equipment number DB) 110.

FIG. 4 shows the rank A type DB 100. The rank A type DB 100 includes a process condition code column 101 and a rank A type name column 102.
When the description is made with reference to the data recorded at the highest level, the highest level data indicates that the type name “ABC-12345” is the rank A type in the process condition “XYZ01”. In other words, the product name “ABC-12345” is required to have high quality. Similarly, rank A type names are recorded corresponding to other process condition codes.
The process condition code column 101 and the rank A product name column 102 are recorded based on data transmitted by the office terminal 10. That is, the processing unit of the host computer 30 receives rank A product type registration data transmitted from the office terminal 10 via the communication unit. The processing unit of the host computer 30 records the rank A type and the corresponding process conditions included in the rank A type registration data in the rank A type DB 100 of the storage unit. In this way, the rank A type and the corresponding process conditions are recorded in the rank A type DB 100.

Next, FIG. 5 shows the equipment number DB 110. The equipment number DB 110 includes a facility number name column 111, a facility number code column 112, a rank A type availability column 113, a rank B type availability column 114, and a status flag column 115.
The equipment number machine name column 111, the equipment number machine code column 112, the rank A type availability column 113, and the rank B type availability column 114 are registered in advance in the host computer 30 by the administrator. That is, the administrator inputs the equipment number machine name column 111, the equipment number machine code column 112, the rank A type availability column 113, and the rank B type availability column 114 from the input unit of the host computer 30. The processing unit of the cost computer 30 records the input equipment number name column 111, equipment number code column 112, rank A type availability column 113, and rank B type availability column 114 in the equipment number DB 110 of the storage unit. . In this way, the equipment number machine name column 111, the equipment number machine code column 112, the rank A type availability column 113, and the rank B type availability column 114 are recorded in advance in the equipment number DB 110 of the storage unit by the administrator. Yes.
Further, the status flag column 115 is recorded based on data transmitted from the manufacturing site terminal 20. That is, the processing unit of the host computer 30 receives the good quality equipment number registration data transmitted from the manufacturing site terminal 20 via the communication unit. The processing unit of the host computer 30 records a flag in the status flag column 115 corresponding to the equipment number code based on the equipment number code included in the good quality equipment number registration data. In this way, a good quality equipment number machine is recorded in the equipment number machine DB 110.

In the equipment number column 111, names uniquely assigned to the equipment numbers 51 to 54 are recorded. In this embodiment, the equipment numbers 51 to 54 are assigned names from “No. 1” to “No. 4”, respectively. The equipment number code column 112 is an identification number uniquely assigned to the equipment numbers 51 to 54. The rank A type availability column 113 records whether the equipment numbers 51 to 54 can manufacture the rank A type. The rank B type column 114 records whether the equipment numbers 51 to 54 can manufacture the rank B type. The status flag column 115 indicates whether or not the equipment number machine 51 to 54 is a good quality equipment number machine.
In addition, in FIG. 5, the state of the equipment numbers 51-54 regarding process condition "XYZ01" is recorded. Thus, the host computer 30 records the state of the corresponding equipment numbers 51 to 54 for each process condition.

Referring to FIG. 5, “No. 1 machine (equipment machine No. 51)” is assigned the equipment machine code “ABC567” and cannot be manufactured for both the rank A type and the rank B type. That is, “Unit 1 (Equipment Unit 51)” cannot perform the manufacturing operation of the process condition “XYZ01” due to a bad state or a failure. Next, “Unit No. 2 (Equipment No. 52)” is assigned the equipment No. code “BFG453”, and the Rank A type cannot be manufactured, but the Rank B type can be manufactured. In other words, it can be said that “No. 2 (equipment No. 52)” is not in a good state so that the manufacturing operation of the rank A type can be performed. Next, “Unit No. 3 (Equipment No. 53)” is assigned the equipment No. code “JKG682”, and both Rank A type and Rank B type can be manufactured. In addition, “No. 4 (Equipment No. 54)” is assigned the equipment No. code “PQR101”, and, similarly to “No. 3 (Equipment No. 53)”, both rank A type and rank B type are manufactured. It is possible.
Here, as described above with reference to FIG. 3, the person in charge of the site registers the equipment number code “PQR101” as a good quality equipment number from the input screen 5 of the manufacturing site terminal 20. The processing unit of the host computer 30 receives the good quality equipment number registration data via the communication unit and records it in the equipment number DB 110 of the storage unit. The equipment number code “PQR101” corresponds to the equipment number “number 4 (equipment number 54)”. The processing unit of the host computer 30 specifies a record corresponding to the equipment number code from the equipment number DB 110, and records a flag of a good quality equipment number in the status flag column 115 of the record. In this way, “◯” is entered in the status flag column 115 of “No. 4 (equipment No. 54)” as shown in FIG.
The processing unit of the host computer 30 refers to the recorded state in the status flag column 115 and determines a good quality equipment number for producing the rank A type of the process condition from among the equipment numbers capable of producing the rank A type. In the case of the present embodiment, the processing unit of the host computer 30 searches the equipment number DB 110 and among “No. 3 (equipment No. 53)” and “No. 4 (equipment No. 54)” that can manufacture the rank A type. Then, it is determined that “No. 4 machine (equipment machine 54)” in which the “◯” flag is recorded in the status flag column 115 is made to produce the rank A type. As for the rank B type, it is possible to manufacture among “No. 2 (Equipment No. 52)”, “No. 3 (Equipment No. 53)”, and “No. 4 (Equipment No. 54)” that can be manufactured. Designate equipment with less equipment and manufacture. In this manner, the host computer 30 determines a good quality equipment number in the process condition, and transmits a transport instruction to the transport control device 40 so as to produce a rank A product by the good quality equipment number.

  Next, the conveyance control device 40 will be described. The conveyance control device 40 conveys the lot of rank A type to the good quality equipment number machine among the equipment number machines 51 to 54 based on the conveyance instruction received from the host computer 30.

  Next, the equipment numbers 51 to 54 will be described. The equipment numbers 51 to 54 perform the manufacturing work of the lots transported from the transport control device 40. In the present embodiment, the description has been made using four machines from equipment numbers 51 to 54, but semiconductor products may be manufactured by more (or fewer) equipment numbers.

  The above is the description of the configuration of the production management system in the present embodiment.

[Description of operation method]
Next, the operation method of the production management system in the present embodiment will be described with reference to FIG. FIG. 6 shows an operation flow of the production management system of this embodiment.

(Step S10)
The administrator uses the office terminal 10 to register the rank A type and process conditions corresponding to the rank A type. In the present embodiment, the rank A type and process conditions corresponding to the rank A type are determined in advance by an administrator. The office terminal 10 transmits rank A product type registration data to the host computer 30. The host computer 30 receives the rank A product type registration data. The host computer 30 registers the rank A product and the corresponding process conditions included in the rank A product registration data in the rank A product DB 100.

(Step S20)
The person in charge of the site uses the manufacturing site terminal 20 to register the equipment of good quality. In the present embodiment, the good quality equipment number is determined in advance by the person in charge of the site based on the statistical information of the equipment numbers 51 to 54. The manufacturing site terminal 20 transmits good quality equipment number registration data to the host computer 30. The host computer 30 records the good quality equipment number machine included in the good quality equipment number machine registration data in the equipment number machine DB 110.

(Step S30)
The host computer 30 specifies the rank A type in a certain process condition from the rank A type DB 100. The host computer 30 refers to the equipment number DB 110 and identifies a good quality equipment number among the equipment numbers 51 to 54 that can manufacture the rank A type.

(Step S40)
The host computer 30 transmits a transport instruction to the transport control device 40 so as to manufacture the rank A type by the good quality equipment number machine. In addition, the host computer 30 specifies the rank A type and the high quality equipment number for each process condition, and transmits a transfer instruction to the transfer control device 40.

(Step S50)
The transport control device 40 receives a transport instruction from the host computer 30. The conveyance control device 40 conveys the lot of rank A type to the good quality equipment number machine among the equipment number machines 51 to 54 based on the conveyance instruction. Among the equipment numbers 51 to 54, the good quality equipment number performs the manufacturing work of the lot transported from the transport control device 40.

  The above is the description of the operation method of the production management system in the first embodiment.

  Up to this point, the production management system of the first embodiment has been described. According to the production management system of the present embodiment, the host computer 30 manufactures the rank A varieties for each process condition registered from the office management terminal 10 with the good quality equipment number registered from the manufacturing site terminal 20. A conveyance instruction is transmitted to the conveyance control device 40. By comprising in this way, it becomes possible to designate a good quality equipment number machine with a good semiconductor product manufacturing quality state from among the equipment number machines 51 to 54 capable of producing the rank A type. For this reason, it is possible to manufacture rank A varieties with equipment units having better conditions among the units capable of producing rank A varieties.

(Second Embodiment)
Next, a second embodiment of the present invention will be described.

[Description of configuration]
First, the configuration of the second embodiment will be described. FIG. 7 shows the configuration of the production management system in this embodiment. The production management system of this embodiment is almost the same as that of the first embodiment. Therefore, the description will be focused on the parts different from the first embodiment. Moreover, the same code | symbol is demonstrated to the structure similar to 1st Embodiment.

The production management system of this embodiment includes an office terminal 10, a host computer 30, a transfer control system 40, and work number machines 51 to 54, as in the first embodiment. On the other hand, the production management system of the present embodiment is different from the first embodiment in that the production site terminal 20 is not provided. Further, the host computer 30 in the present embodiment acquires quality information from the production number machines 51 to 54. The equipment numbers 51 to 54 in the present embodiment perform statistical processing of quality information. The quality information is information such as the number of wafer defects, the process capability index, and the yield rate described in the first embodiment. Each equipment number 51 to 54 collects statistics of quality information regarding semiconductor products manufactured by the respective equipment number 51 to 54 and outputs the statistics to the host computer 30. The host computer 30 acquires quality information from the equipment number machines 51 to 54 and records it in the equipment number machine DB 110. The host computer 30 identifies a good quality equipment number machine based on the quality information acquired from the equipment number machines 51-54. By doing in this way, the person in charge of the site does not need to input a good quality equipment number using the manufacturing site terminal 20.
In addition, since the office terminal 10, the conveyance control system 40, and the work number machines 51-54 are the same as that of 1st Embodiment, description is abbreviate | omitted.

  FIG. 8 shows the equipment number DB 110 in this embodiment. The equipment number DB 110 includes a manufacturing device name column 111, a manufacturing device code column 112, a rank A type availability column 113, a rank B type column 114, and a status flag column 115, as in the first embodiment. The status flag column 115 in the equipment number DB 110 of this embodiment records quality information acquired from the equipment numbers 51 to 54. Referring to FIG. 8, the status flag column 115 records the process capability index [Cpk] in the equipment numbers 51 to 54. The host computer 30 identifies the equipment with good quality based on the process capability index which is the quality information. For example, in the case of FIG. 8, No. 4 (equipment No. 54) has the highest process capability index. Therefore, the host computer 30 specifies the No. 4 machine (equipment No. 54) as a good quality equipment No., and instructs the transport control device 40 to manufacture the rank A type with the No. 4 machine (equipment No. 54).

The quality information recorded in the status flag column 115 is not limited to the process capability index. As described above, values such as the number of wafer defects and the yield rate may be recorded as quality information, or a plurality of quality information may be recorded. Similarly, the host computer 30 is not limited to specifying a high-quality equipment number based on the process capability index. The host computer 30 may specify a good quality equipment number based on other quality information, or may specify a good quality equipment number based on a plurality of quality information. Further, as described above, the equipment unit with good quality may be the equipment unit with the best quality information, or may be a facility unit with a certain threshold value for quality information that exceeds (or falls below) the threshold value. . Furthermore, in these cases, the method is not limited to the method of determining only one unit with good quality equipment, but may be a method of selecting and determining a plurality of units and manufacturing semiconductor products with priorities. These identification methods are registered in advance in the host computer 30 by an administrator or a person in charge at the site.
Moreover, in this embodiment, although the equipment number machines 51-54 have taken the statistics of quality information, the statistics of quality information are acquired using another measuring apparatus, and quality information is sent to the host computer 30. May be output. Although not shown, the rank A type DB 100 in the present embodiment is the same as that in the first embodiment, and thus the description thereof is omitted.

  The above is the description of the configuration of the production management system in the present embodiment.

[Description of operation method]
Next, the operation method of the production management system in this embodiment will be described with reference to FIG. FIG. 9 shows an operation flow of the production management system of this embodiment.

(Step S100)
The administrator uses the office terminal 10 to register the rank A type and process conditions corresponding to the rank A type. This step is the same as step S10 described above.

(Step S110)
Each equipment number 51-54 acquires quality information statistics. The equipment numbers 51 to 54 transmit quality information to the host computer 30. The host computer 30 acquires quality information from the equipment number machines 51 to 54 and records it in the equipment number machine DB 110. The quality information in the equipment numbers 51 to 54 may be transmitted to the host computer 30 by collecting statistics using another measuring device.

(Step S120)
The host computer 30 refers to the quality information recorded in the status flag column 115 of the equipment number DB 110, and identifies a good quality equipment number among the equipment numbers that can manufacture the rank A type. The status flag column 115 may record a plurality of quality information. In that case, the host computer 30 may identify a good quality equipment number machine based on a plurality of quality information.

(Step S130)
The host computer 30 transmits a transport instruction to the transport control device 40 so as to manufacture the rank A type by the good quality equipment number machine. In addition, the host computer 30 identifies a good quality equipment number for each process condition, and transmits a conveyance instruction to the conveyance control device 40.

(Step S140)
The transport control device 40 receives a transport instruction from the host computer 30. The conveyance control device 40 conveys the lot of rank A type to the good quality equipment number machine among the equipment number machines 51 to 54 based on the conveyance instruction. Next, the equipment numbers 51 to 54 will be described. The equipment numbers 51 to 54 perform the manufacturing work of the lots transported from the transport control device 40.

  The above is the description of the operation method of the production management system in the second embodiment.

  Up to this point, the production management system of the second embodiment has been described. According to the production management system of the present embodiment, the facility number machines 51 to 54 acquire statistics of quality information in the respective facility number machines 51 to 54 and transmit them to the host computer 30. The host computer 30 records the quality information of the equipment number machines 51 to 54 in the equipment number machine DB 110, and identifies the equipment number machine with good quality based on the quality information. The host computer 30 transmits a conveyance instruction to the conveyance control device 40 so that the rank A type is manufactured by the equipment of good quality. By configuring in this way, the host computer 30 can reflect the quality information in real time, so that it is possible to more appropriately identify the equipment with good quality. Moreover, the person in charge of the site does not have to register a high-quality equipment unit, so labor can be saved.

  The present invention has been described above with reference to the embodiment, but the present invention is not limited to the above embodiment. Various changes that can be understood by those skilled in the art can be made to the configuration and details of the present invention within the scope of the present invention. Each embodiment is not limited to being realized independently. Each embodiment can also be implemented in combination with each other.

It is a figure which shows the structure of the production management system in 1st Embodiment. It is a figure which shows the input screen 1 which sets the item name and process condition code of rank A type. It is a figure which shows the input screen 5 which sets a quality good equipment number machine. It is a figure which shows rank A kind DB100. It is a figure showing equipment number machine DB110 in a 1st embodiment. It is an operation | movement flow of the production management system in 1st Embodiment. It is a figure which shows the structure of the production management system in 2nd Embodiment. It is a figure which shows equipment number machine DB110 in 2nd Embodiment. It is an operation | movement flow of the production management system of 2nd Embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Input screen 2 Input field 3 Input field 4 Registration button 5 Input screen 6 Input field 7 Registration button 10 Office terminal 20 Manufacturing site terminal 30 Host computer 40 Transport control device 51 Equipment No. 1 (No. 1)
52 Equipment No.2 (No.2)
53 Equipment Unit (Unit 3)
54 Equipment No. 4
100 rank A variety DB
101 Process condition code column 101
102 Rank A product name 102
110 Equipment Unit DB
111 Equipment number column 112 Equipment code field 113 Rank A type availability column 114 Rank B type availability column 115 Status flag field

Claims (10)

A host computer that determines a selected manufacturing device from a plurality of semiconductor manufacturing devices and outputs a conveyance instruction;
A transport control device for transporting a lot of semiconductor products to the selected manufacturing device based on the transport instruction;
The semiconductor products are classified into rank A varieties for which variation in quality should be kept below a certain level, and rank B varieties other than the rank A varieties,
The host computer
A rank A type DB for storing the identifier of the rank A type and the process conditions of the rank A type in association with each other;
Information indicating whether each of the plurality of semiconductor manufacturing apparatuses can manufacture the rank A product under the process conditions, and quality based on the quality of the semiconductor product manufactured by each semiconductor manufacturing apparatus Equipment number DB that records information corresponding to each semiconductor manufacturing apparatus, and
Among the semiconductor manufacturing apparatuses capable of manufacturing the rank A type in the process conditions among the semiconductor manufacturing apparatuses, select the semiconductor manufacturing apparatus with good quality information based on the quality information. Production management system determined as a manufacturing device. The production management system according to claim 1,
The quality information is based on one or more of the number of wafer defects, the process capability index, the yield rate in each of the semiconductor manufacturing apparatuses,
The host computer is a semiconductor manufacturing device that exceeds the threshold value among the semiconductor equipment devices, or a semiconductor manufacturing device that exhibits the best value among the quality information, based on a certain threshold value defined in the quality information. A production management system that determines an apparatus as the manufacturing apparatus with good quality. The production management system according to claim 2,
The quality information is statistics in each semiconductor manufacturing apparatus,
The host computer acquires the quality information from each semiconductor manufacturing apparatus.   A host computer used in the production management system according to any one of claims 1 to 3. Determining a selected manufacturing device from a plurality of semiconductor manufacturing devices and outputting a transport instruction;
A step of transporting a lot of semiconductor products to the selective manufacturing apparatus based on the transport instruction;
The semiconductor products are classified into rank A varieties for which variation in quality should be kept below a certain level, and rank B varieties other than the rank A varieties,
Storing the identifier of the rank A product and the process condition of the rank A product in association with each other;
Information indicating whether each of the plurality of semiconductor manufacturing apparatuses can manufacture the rank A product under the process conditions, and quality based on the quality of the semiconductor product manufactured by each semiconductor manufacturing apparatus Recording information corresponding to each semiconductor manufacturing apparatus;
Among the semiconductor manufacturing apparatuses capable of manufacturing the rank A type in the process conditions among the semiconductor manufacturing apparatuses, select the semiconductor manufacturing apparatus with good quality information based on the quality information. A production management method comprising: determining as a manufacturing apparatus. The production management method according to claim 5,
The quality information is one or more of the number of wafer defects, the process capability index, the yield rate in each of the semiconductor manufacturing apparatuses,
The step of determining as the selective manufacturing apparatus is:
Based on a certain threshold value respectively defined in the quality information, the semiconductor manufacturing device that exceeds the threshold value among the semiconductor facility devices or the semiconductor manufacturing device that shows the best value among the quality information is selected. A production management method including a step of determining a manufacturing device. The production management method according to claim 6,
The quality information is statistics in each semiconductor manufacturing apparatus,
A production management method further comprising the step of acquiring the quality information from each of the semiconductor manufacturing apparatuses. Determining a selected manufacturing device to be selected from a plurality of semiconductor manufacturing devices, and outputting a lot product semiconductor transport instruction;
The semiconductor products are classified into rank A varieties for which variation in quality should be kept below a certain level, and rank B varieties other than the rank A varieties,
Storing the identifier of the rank A product and the process condition of the rank A product in association with each other;
Information indicating whether each of the plurality of semiconductor manufacturing apparatuses can manufacture the rank A product under the process conditions, and quality based on the quality of the semiconductor product manufactured by each semiconductor manufacturing apparatus Recording information corresponding to each semiconductor manufacturing apparatus;
Among the semiconductor manufacturing apparatuses capable of manufacturing the rank A type in the process conditions among the semiconductor manufacturing apparatuses, select the semiconductor manufacturing apparatus with good quality information based on the quality information. A production management program comprising the steps of determining as a manufacturing device. The production management program according to claim 8,
The quality information is one or more of the number of wafer defects, the process capability index, the yield rate in each of the semiconductor manufacturing apparatuses,
The step of determining as the selective manufacturing apparatus is:
Based on a certain threshold value respectively defined in the quality information, the semiconductor manufacturing device that exceeds the threshold value among the semiconductor facility devices or the semiconductor manufacturing device that shows the best value among the quality information is selected. A production management program that includes the step of determining a manufacturing device. The production management program according to claim 9,
The quality information is statistics in each semiconductor manufacturing apparatus,
A production management program further comprising the step of acquiring the quality information from each of the semiconductor manufacturing apparatuses.

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