JP2010043926A5 - - Google Patents

Claims (8)

A movable member supported lifting to the fixed member and the solid-tough material and the element support member formed integrally with crystalline material, were respectively integrated with the two end portions of the stress sensitive portion and the stress sensitive portion and a stress sensitive device formed fixed end at crystal material,
It said element supporting member includes a first indicator portion shows the binding Akirajiku direction,
Before SL stress sensitive element, a second indicator portion shows the binding Akirajiku direction,
Acceleration detection , wherein the fixed end is fixed to the fixed member and the movable member in a state where a positional relationship between the first index portion and the second index portion has a predetermined relationship. unit. Acceleration detection unit according to claim 1, characterized that you outer contour of said element support member and said stress sensitive element match. The first indicator portion and the second indicator portion are configured to have different shapes or different colors , and the stress pressure sensitive element has transparency, and the stress sensitive element side acceleration detection unit according to claim 1, characterized in that it is a confirmation that the possible configurations of alignment with said second indicator portion and the first indicator portion when viewed element support. 2. The acceleration detection unit according to claim 1, wherein the first index portion is a recess formed in an edge of each of the element support member and the stress sensitive element. An acceleration sensor comprising: the acceleration detection unit according to claim 1; and a package that accommodates the acceleration detection unit.
The package has a package main body and a lid, and the acceleration when the acceleration detection unit is mounted at a normal position on the inner bottom of the package main body is formed on a part of the electrode pattern formed on the inner bottom of the package main body. An acceleration sensor characterized in that it has a shape that matches the outline of the detection unit and is set so as to be able to determine misalignment. The package body side marking and the stress-sensitive marking are formed on the inner bottom portion of the package body, the element support member, and the stress-sensitive element by forming different colored markings or different colored markings, respectively. 6. The acceleration sensor according to claim 5 , wherein the presence or absence of matching between the element side marking and the element support member side marking can be confirmed through the stress sensitive element.   A method for manufacturing an acceleration detection unit, comprising:
A fixing member and a movable member supported by the fixing member are integrally formed of a crystal material, and a step of preparing an element support member including a first index portion indicating a crystal axis direction;
A stress sensitive element comprising a stress sensitive portion and a fixed end integrated with both ends of the stress sensitive portion is formed of a crystal material, and includes a second index portion indicating a crystal axis direction. And a process of
Stacking the element support member and the stress sensitive element such that a positional relationship between the first index portion and the second index portion is a predetermined relationship;
  Fixing the element support member and the stress sensitive element;
Method of manufacturing an acceleration detection unit including   The crystal material of the element support member and the crystal material of the stress sensitive element are the same type,
  In the step of overlapping, the orientation of the crystal axis of the element supporting member and the orientation of the crystal axis of the stress sensitive element are determined by setting the positional relationship between the first index portion and the second index portion to a predetermined relationship. The method for manufacturing an acceleration detection unit according to claim 7, wherein the element supporting member and the stress sensitive element are overlapped with each other in a state of being in alignment.