JP2010042468A5 - - Google Patents

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Publication number
JP2010042468A5
JP2010042468A5 JP2008207678A JP2008207678A JP2010042468A5 JP 2010042468 A5 JP2010042468 A5 JP 2010042468A5 JP 2008207678 A JP2008207678 A JP 2008207678A JP 2008207678 A JP2008207678 A JP 2008207678A JP 2010042468 A5 JP2010042468 A5 JP 2010042468A5
Authority
JP
Japan
Prior art keywords
polishing
substrate
load
control means
polishing load
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2008207678A
Other languages
English (en)
Japanese (ja)
Other versions
JP2010042468A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2008207678A priority Critical patent/JP2010042468A/ja
Priority claimed from JP2008207678A external-priority patent/JP2010042468A/ja
Publication of JP2010042468A publication Critical patent/JP2010042468A/ja
Publication of JP2010042468A5 publication Critical patent/JP2010042468A5/ja
Withdrawn legal-status Critical Current

Links

JP2008207678A 2008-08-12 2008-08-12 研磨方法 Withdrawn JP2010042468A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008207678A JP2010042468A (ja) 2008-08-12 2008-08-12 研磨方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008207678A JP2010042468A (ja) 2008-08-12 2008-08-12 研磨方法

Publications (2)

Publication Number Publication Date
JP2010042468A JP2010042468A (ja) 2010-02-25
JP2010042468A5 true JP2010042468A5 (https=) 2011-07-28

Family

ID=42014269

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008207678A Withdrawn JP2010042468A (ja) 2008-08-12 2008-08-12 研磨方法

Country Status (1)

Country Link
JP (1) JP2010042468A (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102398213B (zh) * 2011-05-11 2014-06-18 上海双明光学科技有限公司 反压式双面研磨抛光机
CN104772692A (zh) * 2015-03-27 2015-07-15 苏州赫瑞特电子专用设备科技有限公司 一种上盘万向调心加载机构
JP7560320B2 (ja) * 2020-10-29 2024-10-02 株式会社ディスコ ウェーハの研削方法

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