JP2010042328A - Surface treatment jig - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a surface treatment jig including a means for airtightly holding the non-treatment region of an object to be treated requring prevention of the penetration of a treatment solution and can simply and certainly ascertain the holding of airtightness without applying damage to the object to be treated by performing the ascertainment of the holding of airtightness using an ultrasonic wave. <P>SOLUTION: The surface treatment jig includes a cover member for covering the non-treatment region of the object to be treated and a seal member for sealing the gap between the cover member and the periphery of the non-treatment region of the object to be treated, characterized in that an ultrasonic wave generator is provided to the internal space covered with the cover member. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention is, for example, a treatment that becomes a problem when a treatment liquid enters in a surface treatment such as cleaning treatment, plating treatment, or alumite treatment of an object to be treated such as a deposition plate and a vacuum pipe of a semiconductor manufacturing apparatus. More particularly, the present invention relates to a surface treatment jig capable of confirming an airtight state.

Conventionally, when cleaning parts to be reused, the surface of the masking area is not required to be processed, and the cleaning liquid is prevented from entering the masked non-cleaning area, thereby removing dirt and the like in the desired cleaning area. In the cleaning apparatus, the masking member that covers the non-cleaning region of the member to be cleaned, the seal portion that contacts the member to be cleaned at the outer peripheral portion of the masking member, and the seal portion at the outer peripheral portion of the masking member And pressurizing means for sealing the space covered by the masking member, and blowing air for sending a predetermined gas into the sealed space covered by the masking member and holding the inside of the sealed space at a predetermined pressure And a cleaning means for cleaning the member to be cleaned, the pressure in the sealed space covered by the masking member is kept higher than the external pressure. , The cleaning was to clean the cleaning area which is not covered by the masking member of the cleaning member device is known (e.g., see Patent Document 1.).
Further, the present invention relates to a partial plating jig for electroplating, a partial electroplating masking jig in which a sealing material is fitted in a groove formed at an inner peripheral end of a hollow cylindrical seal holder. In the case where the workpiece is inserted into the hollow cylindrical seal holder and immersed in a plating solution and subjected to partial plating, the seal material is fitted into the groove of the seal holder, and the seal material is inserted into the groove of the workpiece. A partial electroplating masking jig is known in which the boundary between a plated portion and a non-plated portion is sealed by being pressed against the outer periphery (see, for example, Patent Document 2).

In the prior arts described in these Patent Documents 1 and 2, the attachment confirmation of the masking member or the masking jig (hereinafter collectively referred to simply as “jigs”) was actually performed. Confirm that the jigs are properly installed by submerging reusable parts or workpieces (hereinafter collectively referred to simply as “objects to be treated”) in a liquid such as water so that no bubbles are generated. Was.
On the other hand, in attaching the jig, there are problems such as foreign matter or the like being caught in the seal part when attaching the jig, forgetting to attach the seal member, and a poor attachment method.
Further, in the prior art, since it cannot be soaked in water after confirming that it is completely airtight, it can only be hoped that there is no leakage. Although there is a problem that even if it can reduce the number of poker mistakes and inspection mistakes as much as possible, it cannot be reduced to zero. The necessity of replacement occurred, and the entire apparatus was in a state of operation stoppage, which was a big problem.

In addition, there is a method of performing a leak inspection using a large apparatus such as a He leak tester, but it is not practical to perform the inspection immediately before processing because it is large in terms of equipment.
Furthermore, in a method in which gas or the like is pressurized and sealed inside, and the leak from the jig is confirmed to be free of bubbles with soapy water, the object to be processed is deformed without being able to withstand the internal pressure. Such a structure cannot be used.
JP-A-11-128866 Japanese Patent Laid-Open No. 7-243082

  The present invention has been made to solve the above-described problems of the prior art, and in the surface treatment such as cleaning treatment, plating treatment, or alumite treatment, non-treatment of the object to be treated that needs to prevent treatment liquid from entering. Surface that has a means for holding the area airtight, and the airtightness can be confirmed easily and reliably without damaging the target object by using ultrasonic waves. The object is to provide a processing jig.

To achieve the above object, a surface treatment jig according to the present invention includes, firstly, a cover member that covers a non-treatment region of a target object in the surface treatment jig, and a non-process between the cover member and the target object. A seal member that seals the periphery of the processing region is provided, and an ultrasonic generator is provided in the internal space covered with the cover member.
As described above, since the airtightness of the sealing member is confirmed using ultrasonic waves, it is possible to confirm the airtightness easily and reliably without immersing the object to be processed in the inspection liquid. In addition, even if leakage is confirmed in the seal part, the inspection liquid does not enter the non-processed area, so that the object to be processed is not damaged, and the seal part is rechecked and repaired. Since the work is completed, the airtightness confirmation work can be performed in a short time.

The surface treatment jig of the present invention is secondly characterized in that, in the first feature, the surface treatment is a cleaning treatment.
Thirdly, the surface treatment jig of the present invention is characterized in that, in the first feature, the surface treatment is a plating treatment or an alumite treatment.
The surface treatment jig of the present invention can be applied to any case where the surface treatment is a cleaning treatment, a plating treatment or an alumite treatment.

The surface treatment jig according to the present invention is fourthly characterized in that, in any of the first to third features, the non-treatment region is an exposed portion of an electrical component provided on the object to be treated. .
The surface treatment jig according to the present invention has a sealing member in a state where there is no fear that the treatment liquid may enter from the exposed portion and damage the electrical component even when the exposed portion of the electrical component exists on the object to be processed. Airtightness can be confirmed.

In addition, the surface treatment jig according to the fifth aspect of the present invention is, in any one of the first to fourth features, a vertical wall that surrounds the periphery of the non-treatment region with the cover member that covers the non-treatment region of the object to be treated. And a ceiling wall covering the upper part surrounded by the vertical wall, an ultrasonic generator is provided in an internal space formed by the vertical wall and the ceiling wall, and an end face facing the periphery of the non-processed area of the vertical wall A plurality of bolt holes are formed so as to pass through the vertical wall at the inner side or the outer side of the sealing member mounting position, and around the non-process area corresponding to the plurality of bolt holes. A plurality of screw holes are formed, and the cover member is attached to the object to be processed by a plurality of bolts.
For this reason, it is possible to confirm the airtightness easily and reliably without immersing the object to be processed in the inspection liquid. In addition, even if leakage is confirmed in the seal part, the inspection liquid does not enter the non-processed area, so that the object to be processed is not damaged, and the seal part is rechecked and repaired. Since the work is completed, the airtightness confirmation work can be performed in a short time. In addition to the case where the surface shape around the non-processed area of the object to be processed is a flat plate shape, a spherical shape is also applicable, and the surface shape is a curved surface shape such as a cylindrical surface or an uneven shape. Even in the case of a stepped shape, it can be applied only by changing the shape of the vertical wall of the cover member and the shape of the seal member so as to match the surface shape, and has the flexibility to cope with various shapes of objects to be processed. .
Furthermore, the shape of the cover member is simple, and attachment / detachment to / from the object to be processed can be easily performed by simply removing the bolt from the cover member side.

Further, according to the surface treatment jig of the present invention, in any one of the first to fourth features, the vertical wall surrounding the periphery of the non-treatment region with the cover member covering the non-treatment region of the object to be treated And a ceiling wall covering the upper part of the vertical wall, an ultrasonic generator is provided in an internal space formed by the vertical wall and the ceiling wall, and a sealing member is provided on an end surface of the vertical wall facing the periphery of the non-processed area A plurality of screw holes are formed in the vertical wall at the outer side of the seal member mounting position, and a plurality of bolt holes are formed around the non-processed region corresponding to the plurality of screw holes. The cover member is attached to the object to be processed with the bolts.
For this reason, it is possible to confirm the airtightness easily and reliably without immersing the object to be processed in the inspection liquid. In addition, even if leakage is confirmed in the seal part, the inspection liquid does not enter the non-processed area, so that the object to be processed is not damaged, and the seal part is rechecked and repaired. Since the work is completed, the airtightness confirmation work can be performed in a short time. In addition to the case where the surface shape around the non-processed area of the object to be processed is a flat plate shape, a spherical shape is also applicable, and the surface shape is a curved surface shape such as a cylindrical surface or an uneven shape. Even in the case of a stepped shape, it can be applied only by changing the shape of the vertical wall of the cover member and the shape of the seal member so as to match the surface shape, and has the flexibility to cope with various shapes of objects to be processed. .
Furthermore, the shape of the cover member is simple, and attachment / detachment to / from the object to be processed can be easily performed by simply removing the bolt from the object to be processed.

Further, according to a seventh aspect of the surface treatment jig of the present invention, in any one of the first to fourth features, the cover member that covers the non-treatment region of the object to be treated is engaged with the end surface flange of the tubular object to be treated. It is formed into a closed flange shape that closes the opening and is provided, an ultrasonic generator is provided on the inner wall of the cover member, a seal member is mounted between the end surface flange of the object to be processed and the cover member, and the end surface of the object to be processed The flange and the cover member are fastened by a fastening member.
For this reason, it is possible to confirm the airtightness easily and reliably without immersing the object to be processed in the inspection liquid. In addition, even if leakage is confirmed in the seal part, the inspection liquid does not enter the non-processed area, so that the object to be processed is not damaged, and the seal part is rechecked and repaired. Since the work is completed, the airtightness confirmation work can be performed in a short time. Further, the present invention can also be applied to a case where the object to be processed has a tubular shape having end flanges, and the non-processed region is the inner surface of the tubular body.
Furthermore, the shape of the cover member is simple because it is a closed flange shape, and the cover member can be easily attached to and detached from the object by a fastening member such as a clamp.

Eighthly, according to any one of the first to fourth features, the surface treatment jig of the present invention seals the cover member that covers the non-treatment region of the object to be treated to the end surface of the tubular object to be treated. A flange projecting through a hollow cylinder that engages through a member; a closing flange that engages with the flange through a seal member and closes the opening; An ultrasonic generator is provided in the inner space between the flange and the closing flange, which is formed by a cap having a female screw portion that engages with the male screw portion at the end.
For this reason, it is possible to confirm the airtightness easily and reliably without immersing the object to be processed in the inspection liquid. In addition, even if leakage is confirmed in the seal part, the inspection liquid does not enter the non-processed area, so that the object to be processed is not damaged, and the seal part is rechecked and repaired. Since the work is completed, the airtightness confirmation work can be performed in a short time. Further, the present invention can also be applied to a case where the object to be processed has a tubular shape having a male screw and the non-processed region is the inner surface of the tubular body.
Further, the cover member can be easily attached to and removed from the object by rotating the cap.

The surface treatment jig of the present invention has the following excellent effects.
(1) Since the airtightness of the sealing member is confirmed using ultrasonic waves, it is possible to confirm the airtightness easily and reliably without immersing the object to be processed in the inspection liquid. In addition, even if leakage is confirmed in the seal part, the inspection liquid does not enter the non-processed area, so that the object to be processed is not damaged, and the seal part is rechecked and repaired. Since the work is completed, the airtightness confirmation work can be performed in a short time.
(2) The present invention can be applied to any case where the surface treatment is a cleaning treatment, a plating treatment or an alumite treatment.
(3) Even when there is an exposed part of the electrical component on the object to be processed, it is possible to confirm the airtightness of the seal member in a state where there is no fear that the processing liquid enters from the exposed part and damages the electrical component.

(4) According to the fifth feature of the present invention, it is possible to apply a spherical shape as well as a case where the surface shape around the non-processed region of the object to be processed is a flat plate shape. Even when the surface shape is a curved surface shape such as a cylindrical surface, an uneven shape, or a stepped shape, it can be applied by simply changing the shape of the vertical wall of the cover member and the shape of the seal member to match the surface shape. It has the flexibility to handle the object to be processed.
Furthermore, the shape of the cover member is simple, and attachment / detachment to / from the object to be processed can be easily performed by simply removing the bolt from the cover member side.
(5) According to the sixth feature of the present invention, in particular, the attachment to and removal from the object to be processed can be easily performed by simply removing the bolt from the object to be processed.
(6) According to the seventh feature of the present invention, in particular, the present invention can also be applied to a case where the object to be processed has a tubular shape having end face flanges and the non-processed region is the inner surface of the tubular body.
Further, the shape of the cover member is simple because it is a closed flange shape, and the cover member can be easily attached to and detached from the object by a tightening member such as a clamp.
(7) According to the eighth feature of the present invention, the present invention can be applied particularly when the object to be processed has a tubular shape having a male screw and the non-processed region is the inner surface of the tubular body.
Also, the cover member can be easily attached to and removed from the object by rotating the cap.

  The best mode for carrying out the surface treatment jig according to the present invention will be described in detail with reference to the drawings. However, the present invention is not construed as being limited thereto, and departs from the scope of the present invention. Insofar as various changes, modifications, and improvements can be made based on the knowledge of those skilled in the art.

FIG. 1 is a perspective view illustrating an example of an object to be processed according to the surface treatment of the present invention.
The object to be processed shown in FIG. 1 is an adhesion-preventing plate that prevents scattered matters generated by vacuum processing from adhering to the inner wall of the vacuum chamber when a semiconductor substrate is subjected to sputtering processing, vacuum deposition processing, plasma etching processing, or the like. The adhesion prevention plate 1 of this example has a substantially cylindrical shape so as to cover the semiconductor wafer placed on the susceptor, and is composed of an upper flat surface portion 2 and a side surface portion 3, and a semiconductor is formed in the internal space. A wafer is accommodated and a predetermined process is performed.
An opening 4 is formed in the upper flat surface portion 2 of the deposition preventing plate 1, and a heater 5 for heating the inner wall of the vacuum chamber is embedded. The heater 5 is heated to a predetermined temperature by a lead wire 7 connected to the heater 5 via a lead wire outlet 6 provided in the upper flat portion 2. A semiconductor wafer transfer port 8 is provided on the side surface portion 3 of the deposition preventing plate 1.

  When vacuum treatment is performed using the above-described deposition preventive plate 1, scattered matter generated by the vacuum treatment adheres mainly to the inner surface of the side surface portion 3 of the deposition preventive plate 1. For this reason, it is necessary to remove the deposition preventing plate 1 from the vacuum chamber and periodically clean it. This cleaning is performed by, for example, immersing the entire deposition preventing plate 1 in water. At this time, it is necessary to prevent water from entering the lead wire outlet 6.

In the example shown in FIG. 1, the treatment of the object to be treated is cleaning, but even if the treatment of the object to be treated is a plating process or an alumite treatment, the treatment liquid is a part of the object to be treated, as described in FIG. It is necessary to take measures to prevent intrusion.
In the example shown in FIG. 1, the periphery of the lead wire outlet 6, which is a non-processed area of the object to be processed, is formed in a flat plate shape, so that a surface treatment jig capable of dealing with the flat plate portion is necessary. In addition, in the case where the inner surface of the tubular body is used as a non-processed region and the outer surface is subjected to surface treatment, a surface treatment jig capable of corresponding to the end shape of the tube is required.
Hereinafter, various embodiments will be described.

[Embodiment 1]
FIG. 2 explains Embodiment 1 of the surface treatment jig according to the present invention, wherein (a) is a plan view, (b) is a front view, and (c) is a sectional view showing a state before assembly. It is.
In FIG. 2, for convenience of explanation, the case where the surface shape around the non-processed region s of the object 10 is a flat plate will be described as a representative, but the surface shape around the non-processed region is a spherical surface. The shape can also be applied, and it is possible to cope with a curved surface shape such as a cylindrical surface, an uneven shape, or a step shape without changing the basic structure.

  In FIG. 2, a cover member 11 that covers the non-processed region s of the object 10 is formed of a metal material and covers a vertical wall 12 that surrounds the periphery of the non-processed region s and an upper portion surrounded by the vertical wall 12. And a ceiling wall 13. An O-ring groove 15 for mounting the O-ring 14 constituting the seal member is formed on the entire end surface of the vertical wall 12 facing the periphery of the non-processed region s, and is located inside the position of the O-ring groove 15. Two bolt holes 16 are formed so as to penetrate the vertical wall 12. The seal member is not limited to the O-ring, and is appropriately changed according to the processing liquid. For example, a shape such as a C-type seal or a metal gasket can be used.

Two screw holes 17 are formed around the non-processed region s of the workpiece 10 corresponding to the two bolt holes 16 of the cover member 11. A bolt 18 formed so as to penetrate the bolt hole 16 and screw into the screw hole 17 is inserted from above the cover member 11 to fix the cover member 11 to the object to be processed 10. An O-ring 14 attached to the O-ring groove 15 is crimped around the non-processing area s of the object 10 to be processed, and the end surface of the vertical wall 12 of the cover member 11 and the periphery of the non-processing area s of the object 10 Seal between. When the surface shape around the non-processed region is a cylindrical surface, a concavo-convex shape, or a stepped shape, the vertical wall 12 may be formed along the surface shape.
In this example, the case where two bolts 18 are used is described, but it is needless to say that three or more bolts 18 may be used depending on the shape or size of the cover member 11.
A seal groove 20 is also formed on the lower surface of the head portion 19 of the bolt 18, and an O-ring 21 that constitutes a seal member is attached to the seal groove 20, and the lower surface of the head portion 19 of the bolt 18 and the upper surface of the cover member 11. It is designed to seal between.

  In the case of this example, since the screw hole 17 is provided so as to penetrate the region to be processed s, in order to seal the non-processed region s, the outside of the screw hole 17 needs to be a seal line. The position of the groove 15 is set outside the bolt hole 16, and it is necessary to seal between the lower surface of the head 19 of the bolt 18 and the upper surface of the cover member 11, and the screw hole 17 is to be processed. If it is possible not to penetrate the body 10, the inside of the screw hole 17 can be a seal line, and the position of the O-ring groove 15 can be set to the inside of the bolt hole 16. There is no need to seal between the lower surface of the head 19 of the bolt 18 and the upper surface of the cover member 11.

  An ultrasonic generator 22 is provided in an internal space formed by the vertical wall 12 and the ceiling wall 13 of the cover member 11. In the example of FIG. 2, the ultrasonic generator 22 is fixed to the inner wall of the ceiling wall 13 by a fixing means such as a bolt, but is not limited thereto, and may be fixed to the inner wall of the vertical wall 12. Further, it may be suspended from the ceiling wall 13. Furthermore, you may mount in internal space, without fixing to the cover member 11. FIG. Since the thickness of the vertical wall 12 and the ceiling wall 13 of the cover member 11 is formed to be about 2 to 10 mm, the ultrasonic wave from the ultrasonic generator 22 is not leaked to the outside unless the seal part leaks. Absent.

In principle, the ultrasonic generator 22 includes an ultrasonic transmitter having a known vibrator represented by a piezoelectric ceramic or the like, and an apparatus that generates ultrasonic waves having a frequency of 20 to 100 kHz is used. The size of the ultrasonic generator 22 is related to the size of the cover member 11, but is preferably configured to be, for example, 50 mm ³ or less. At this time, the electrical circuit configuration of the ultrasonic generator 22 may be basically the same as a known circuit. However, if a small battery such as a button battery or a square battery is used as a power source, the ultrasonic generator 22 is small. Can be achieved.

  The ultrasonic detector 23 is provided between the end surface of the vertical wall 12 of the cover member 11 and the periphery of the non-processing region s of the object 10 or between the lower surface of the head 19 of the bolt 18 and the upper surface of the cover member 11. Ultrasonic waves leaking from the seal portion between them, that is, ultrasonic waves having a frequency in a predetermined band are detected, and when there is a leak, a leak signal is output to the lamp 24 and the like. As the ultrasonic detector 23, a known detector can be used.

As shown in FIGS. 2A and 2B, an ultrasonic generator 22 is mounted in the internal space of the cover member 11, and the O-ring 14 is crimped around the non-process area s of the object 10 by the bolt 18. The cover member 11 is fixed to the target object 10 in a state where the gap between the end surface of the vertical wall 12 of the cover member 11 and the periphery of the non-process region s of the target object 10 is sealed. Send sound waves. In this state, a seal between the end surface of the vertical wall 12 of the cover member 11 and the periphery of the non-process region s of the object to be processed 10 or between the lower surface of the head 19 of the bolt 18 and the upper surface of the cover member 11. The ultrasonic detector 23 is moved along the part to detect leakage of the seal part.
In addition, before fixing the cover member 11 around the non-process area | region s of the to-be-processed object 10, it is confirmed with the ultrasonic detector 23 that the ultrasonic generator 22 was turned ON and the ultrasonic wave was transmitted. It's better to do it. In addition, it is effective to check in advance the airtightness other than the non-process region s because the specific portion of the leak can be limited to the seal portion.

In the leak detection, if a leak is detected, there is no foreign matter or the like in the seal part, whether you have forgotten to attach the seal member, or whether there is a defect in the installation method of the seal member, Etc., and detect the leak again.
As described above, since the airtightness of the non-processed area can be confirmed before the surface-treated object is immersed in the processing liquid, inadvertent damage to the object to be processed can be prevented.

[Embodiment 2]
FIG. 3 explains Embodiment 2 of the surface treatment jig according to the present invention, where (a) is a plan view, (b) is a front view, and (c) is a sectional view showing a state before assembly. However, the difference from the first embodiment shown in FIG. 2 in the configuration is as follows.
In addition, the same code | symbol as shown in FIG. 2 has shown the same member, The description is abbreviate | omitted.
In FIG. 3, a bolt 18 ′ is inserted from below the object to be processed 10 to fix the cover member 11. A bolt hole 16 ′ is formed in the object to be processed 10, and a blind screw is formed in the cover member 11. A hole 17 'is formed. In this example, since the bolt hole 16 ′ is provided outside the processing area s, an O-ring groove 15 ′ for mounting the O-ring 14 ′ as a seal member can be formed inside the bolt hole 16 ′. The inner side of the bolt hole 16 ′ becomes a seal line. For this reason, it is not necessary to seal between the volt | bolt 18 'and the to-be-processed object 10, and it is not necessary to provide the O-ring 21 shown in FIG.

[Embodiment 3]
FIG. 4 explains Embodiment 3 of the surface treatment jig according to the present invention, wherein (a) is a plan view and (b) is a front sectional view. In addition, the same code | symbol as shown in FIG. 2 has shown the same member, The description is abbreviate | omitted.

In FIG. 4, the target object 30 is a tubular member, and the inner surface of the tubular member is a non-treatment region s.
The cover member 31 that covers the non-process region s of the object 30 is formed in a closed flange shape that engages with the end surface flange 32 of the object 30 and closes the opening. An O-ring 34 that is a seal member is attached between the end face flange 32 of the workpiece 30 and the flange 33 of the cover member 31. In order to support the O-ring 34 from the inside, a support ring 35 is attached to the inner peripheral surface of the O-ring 34.

The ultrasonic generator 22 is fixed to the inner wall of the cover member 31 by fixing means such as a bolt.
The end surface flange 32 of the workpiece 30 and the flange 33 of the cover member 31 are fastened by the fastening tool 36, and at the same time, the O-ring 34 is compressed and airtightly fixed.
The clamp 36 is a clamp made of, for example, a metal material, and as shown in FIG. 4, two semicircular clamp levers 38 each having a groove 37 with which both flanges 32 and 33 can be engaged are provided. , 39, a support pin 40 that rotatably supports the clamp levers 38, 39 at one end thereof, and a bolt 41 that clamps the other end of the clamp levers 38, 39, and a groove 37 of the clamp levers 38, 39. By tightening the bolt 41 with the outer ends of both flanges 32 and 33 fitted together, the outer ends of both flanges 32 and 33 are bitten into the groove 37 and fastened and fixed.

As shown in FIG. 4, the ultrasonic generator 22 is mounted on the inner wall of the cover member 31, and clamped with an O-ring 34 mounted between the end surface flange 32 of the workpiece 30 and the flange 33 of the cover member 31. Tighten both flanges 32 and 33 with levers 38 and 39,
An ultrasonic wave is transmitted by the ultrasonic generator 22 fixed to the cover member 31 in a state where the non-process area s of the object 30 is sealed. In this state, the ultrasonic detector 23 is moved along the seal portion of the O-ring 34 between the flange 33 of the cover member 31 and the end surface flange 32 of the object 30 to detect leakage of the seal portion.

In the leak detection, if a leak is detected, there is no foreign matter or the like in the seal part, whether you have forgotten to attach the seal member, or whether there is a defect in the installation method of the seal member, Etc., and detect the leak again.
As described above, since the airtightness of the non-processed area can be confirmed before the surface-treated object is immersed in the processing liquid, inadvertent damage to the object to be processed can be prevented.

[Embodiment 4]
FIG. 5 explains Embodiment 4 of the surface treatment jig according to the present invention, in which (a) is a front sectional view showing a state before the surface treatment jig is mounted on the object to be treated; b) is a front view of a main part showing an engaged state between the surface treatment jig and the object to be treated. In addition, the same code | symbol as shown in FIG. 2 has shown the same member, The description is abbreviate | omitted.

In FIG. 5, an object to be processed 50 is a tubular member, and the inner surface of the tubular member is a non-treatment region s. As shown in FIG. 5A, a male screw portion 51 is formed on the outer surface of the end portion of the workpiece 50 so that it can be screw-coupled with a connection partner.
The cover member 67 that covers the non-process region s of the object to be processed 50 has a hollow cylinder 55 provided with an end surface 54 that engages with the end surface 52 of the object to be processed 50 via a metal packing 53 that constitutes a seal member. A flange 56, a closing flange 58 that is engaged with the flange 56 via a metal packing 57 that constitutes a seal member and that is configured to close the opening, and a hollow cylinder 55 that is externally fitted to the workpiece 50. The cap 60 is provided with a female screw portion 59 that engages with the male screw portion 51 at the end.

As shown in FIG. 5A, recesses 63 and 64 are formed in the flange 56 and the closing flange 58, respectively, and an inner space 65 is formed by these recesses 63 and 64. An ultrasonic generator 22 is disposed in the internal space 65. The internal passage 66 of the hollow cylinder 55 communicates with the internal space 65.
A screw hole 61 is formed in the flange 56 and the closing flange 58, and the flange 56 and the closing flange 58 are tightened by a bolt 62 to compress the metal packing 57, and the flanges 56 and 58 are hermetically sealed. Further, when the cap 60 is tightened, the end surface 52 of the object to be processed 50 and the end surface 54 of the hollow cylinder 55 are tightened to compress the metal packing 53 and hermetically seal between the end surfaces 52 and 54.
Therefore, the locations where leakage is detected by ultrasonic waves are between both flanges 56 and 58 and between both end faces 52 and 54.

As shown in FIG. 5A, the ultrasonic generator 22 is disposed in the internal space 65, the bolts 62 are tightened in a state where the metal packing 57 is mounted between the flanges 56, 58, and the workpiece 50 is processed. The cap 60 is tightened in a state where the metal packing 53 is mounted between the end surface 52 of the hollow cylinder 55 and the end surface 54 of the hollow cylinder 55, and the ultrasonic wave is generated by the ultrasonic generator 22 in a state where the non-process region s of the object to be processed 50 is sealed. Make a call. In this state, the ultrasonic detector 23 is moved along the seal portion between both the flanges 56 and 58 and between the end surface 52 of the workpiece 50 and the end surface 54 of the hollow cylinder 55, and leakage of the seal portion is caused. Detect.
In the leak detection, if a leak is detected, the same treatment as in the first to third embodiments is performed.

It is a perspective view explaining an example of a processed object concerning surface treatment of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS Embodiment 1 of a surface treatment jig according to the present invention will be described, wherein (a) is a plan view, (b) is a front view, and (c) is a sectional view showing a state before assembly. Embodiment 2 of the jig for surface treatment according to the present invention will be described, wherein (a) is a plan view, (b) is a front view, and (c) is a sectional view showing a state before assembly. Embodiment 3 of the jig for surface treatment according to the present invention will be described, wherein (a) is a plan view and (b) is a front sectional view. Embodiment 4 of the jig for surface treatment according to the present invention will be described, wherein (a) is a front sectional view showing a state before the surface treatment jig is mounted on the object to be treated, and (b) is the surface. It is a front view of the principal part which shows the engagement state of the processing jig and to-be-processed object.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Prevention plate 2 Upper plane part 3 Side part 4 Opening 5 Heater 6 Lead wire outlet 7 Lead wire 8 Conveyance port 10 To-be-processed object 11 Cover member 12 Vertical wall 13 Ceiling wall 14, 14 'O-ring 14
15, 15 'O-ring groove
16, 16 'bolt hole
17, 17 'screw hole
18, 18 'bolt
DESCRIPTION OF SYMBOLS 19 Head 20 Sealing groove 21 O-ring 22 Ultrasonic generator 23 Ultrasonic detector 24 Lamp 30 Processed object 31 Cover member 32 End surface flange 33 Flange 34 O-ring 35 Support ring 36 Fastening tool 37 Groove 38 Clamp lever 39 Clamp lever 40 support pin 41 bolt
50 workpiece
51 Male thread part 52 End face 53 Metal packing 54 End face 55 Hollow cylinder 56 Flange 57 Metal packing 58 Flange 59 Female thread part 60 Cap 61 Screw hole 62 Bolt 63 Concave part 64 Concave part 65 Internal space 66 Internal passage 67 Cover member

Claims (8)

    In the surface treatment jig, a cover member that covers the non-processed area of the object to be processed and a seal member that seals between the cover member and the periphery of the non-processed area of the object to be processed are provided and covered with the cover member. An ultrasonic generator is provided in the inner space.     2. The surface treatment jig according to claim 1, wherein the surface treatment is a washing treatment.     2. The surface treatment jig according to claim 1, wherein the surface treatment is a plating treatment or an alumite treatment.    The surface treatment jig according to any one of claims 1 to 3, wherein the non-treatment region is an exposed portion of an electrical component provided on the object to be treated.    The cover member that covers the non-processing area of the object to be processed is formed of a vertical wall that surrounds the periphery of the non-processing area and a ceiling wall that covers the upper part surrounded by the vertical wall, and is formed by the vertical wall and the ceiling wall An ultrasonic generator is provided in the internal space, a seal member is mounted on the end surface facing the periphery of the non-processed area of the vertical wall, and a plurality of the seal members are installed inside or outside the position where the seal member is mounted. A plurality of screw holes are formed around a non-process region corresponding to the plurality of bolt holes, and the cover member is attached to the object to be processed by the plurality of bolts. 5. The surface treatment jig according to any one of 1 to 4.   A cover member that covers the non-processing area of the object to be processed is formed of a vertical wall that surrounds the periphery of the non-processing area and a ceiling wall that covers the top of the vertical wall, and an internal space formed by the vertical wall and the ceiling wall An ultrasonic generator is provided, a seal member is mounted on the end surface of the vertical wall facing the non-processed region, and a plurality of screw holes are formed in the vertical wall at the outer side of the seal member mounting position. A plurality of bolt holes are formed around the non-processed area corresponding to the screw holes, and the cover member is attached to the object to be processed by the plurality of bolts. The jig for surface treatment as described.   A cover member that covers the non-processed area of the object to be processed is formed into a closed flange shape that engages with the end surface flange of the tubular object to be processed and closes the opening, and an ultrasonic generator is provided on the inner wall of the cover member, The sealing member is mounted between the end surface flange and the cover member of the body, and the end surface flange and the cover member of the object to be processed are tightened by the tightening member. Surface treatment jig. A cover member that covers a non-processed region of the object to be processed is engaged with a flange projecting a hollow cylinder that engages the end surface of the tubular object to be processed via the seal member, and the flange is engaged with the flange via the seal member. An internal space between the flange and the closing flange formed by a closing flange that closes the opening and a cap that is externally fitted to the hollow cylinder and has a female threaded portion that engages with the male threaded portion at the end of the workpiece. An ultrasonic generator is provided on the surface treatment jig according to any one of claims 1 to 4.

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