JP2010032667A - Laser light source module and method of manufacturing the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a laser light source module which has a hologram wavefront recording plate in place of a lens used in the laser light source module, and exposes, develops and fixes the hologram wavefront recording plate in an assembly process, and to provide a method of manufacturing the laser light source module. <P>SOLUTION: The laser light source module includes: a laser light source 11 which is oscillated at a wavelength λ; a dual mode optical fiber 12 which is composed of a member which is developed and fixed in a dry process and propagates light at a single mode at wavelengths λ and λ/n (n is an integer of 2 or more); and the hologram wavefront recording plate 13 manufactured by the interference of light having the wavelength λ/n. The laser light having the wavelength λ emitted from the laser light source 11 passes through or is reflected on the hologram wavefront recording plate 13, and is made incident to the dual mode optical fiber 12. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a laser light source module applied to optical communication and a method for manufacturing a laser light source module. In particular, the present invention relates to a laser light source module that can be easily assembled and a method for manufacturing the laser light source module.

  Conventionally, hybrid optical functional components have used lenses to combine the beams of waveguide devices such as semiconductor lasers and fibers. Waveguide devices, which are separately manufactured to have a defined spot size, are placed in a predetermined position, and a lens to which they are coupled is placed in a predetermined position. However, due to unavoidable manufacturing variations and arrangement errors, the coupling is not optimal as it is, and it is necessary to adjust the position so that the optimum coupling is achieved before fixing the respective positions.

  For example, in the case of the first example of the conventional optical functional component shown in FIG. 10, when the semiconductor laser (LD) 11 is arranged without adjustment, it is necessary to adjust the fixing position of the lens 81 and the optical fiber 15 according to the LD 11. was there. Therefore, assembling the optical parts always requires time for adjusting the fixed position, and in order to increase the production capacity, it is necessary to increase the number of personnel and equipment for adjustment. In order to eliminate the adjustment of the fixed position, it is preferable that parameters such as the optical axis and focal length of the lens can be set flexibly during assembly.

On the other hand, as in the second example of the conventional optical functional component shown in FIG. 11, the lens 81 shown in FIG. 10 may be replaced with a hologram wavefront recording plate 83 (see, for example, Patent Document 1).
Holography was developed in 1948 by D.C. Proposed by Gabor and in 1962 EN. Lewis and J.H. This is a wavefront recording technique whose practicality has been confirmed by Upniks. This wavefront recording technique is called a hologram, and a photographic dry plate or film has been used from the beginning of development. In recent years, development and fixing by only a dry process has become possible due to the results of research and development of photopolymers (see Non-Patent Document 1, for example).

Photopolymers that can be developed and fixed only by a dry process need to be exposed to visible light like photographic films, and do not react at all to infrared light. A hybrid optical functional component for optical communication belongs to the near infrared region not only in a so-called “long wavelength band” having a wavelength of 1.3 μm to 1.5 μm but also in a wavelength band called a “short wavelength band” of 0.85 μm. For this reason, it is not suitable for hologram exposure. However, the inventors have confirmed that it is possible to use a hologram exposed with visible light in the near-infrared region, although it is not exposed to light.
JP 07-31458 A http: www. daiso-co. com / rd04. html

  In order to eliminate the adjustment of the fixed position of the optical component, an optical component having the desired optical parameter is prepared, and the optical component having the optimal optical parameter is not optimized by adjusting the position of the optical component. Can be produced at the time of assembly.

  Therefore, in the laser light source module and the laser light source module manufacturing method according to the present invention, the lens used in the laser light source module is replaced with a hologram wavefront recording plate, and the hologram wavefront recording plate is exposed and developed and fixed at the assembly stage. Objective.

  To achieve the above object, a laser light source module according to the present invention includes a laser light source that oscillates at a wavelength of λ, and dual-mode light that propagates in a single mode at wavelengths of λ and λ / n (n is an integer of 2 or more). A hologram and a hologram wavefront recording plate made by interference of light having a wavelength of λ / n, comprising a fiber and a member after development and fixing by a dry process, and the laser light having a wavelength of λ from the laser light source The laser beam is transmitted through or reflected by a wavefront recording plate and is incident on the dual mode optical fiber.

  The dual-mode optical fiber propagates light of a wavelength of λ / n in a single mode to illuminate a hologram wavefront recording plate when the laser light source module is manufactured, and propagates light of a wavelength of λ in a single mode when the laser light source module is used. It exits from the exit. Thus, the lens used in the laser light source module can be replaced with a hologram wavefront recording plate, and the hologram wavefront recording plate can be exposed at the assembly stage. In addition, since the hologram wavefront recording plate is made of a member that can be developed and fixed by a dry process, it is possible to develop and fix the laser light source, the hologram wavefront recording plate, and the dual mode optical fiber while maintaining their mutual positional relationship. Therefore, instead of preparing an optical component having a desired optical parameter and adjusting its position, the coupling can be optimized, and an optical component having an optimal optical parameter can be produced at the time of assembly.

  A method of manufacturing a laser light source module according to the present invention includes a dual-mode optical fiber that propagates laser light from a laser light source that oscillates at a wavelength of λ in a single mode at wavelengths of λ and λ / n (n is an integer of 2 or more). A method of manufacturing a laser light source module that emits light from an exit port of the laser light source, wherein a hologram wavefront recording plate that can be developed and fixed by a dry process is sandwiched between the exit port of the laser light source and the entrance port of the dual-mode optical fiber A fixing step for fixing the hologram wavefront recording plate, the laser light source and the entrance of the dual mode optical fiber; and irradiating the hologram wavefront recording plate with laser light having a wavelength of λ / n from the exit of the laser light source. At the same time, a laser beam having a wavelength of λ / n is incident from the exit of the dual mode optical fiber, and the dual mode optical fiber is An irradiation exposure step of irradiating the hologram wavefront recording plate from an incident port of a fiber and a development fixing step of developing and fixing the hologram wavefront recording plate are sequentially provided.

  Since the hologram wavefront recording plate is irradiated with light having a wavelength of λ / n from the entrance of the dual mode optical fiber and light having a wavelength of λ / n from the exit of the laser light source, the exit of the laser light source is exposed. A hologram wavefront recording plate that condenses the laser beam having a wavelength of λ emitted from the laser beam at the entrance of the dual mode optical fiber can be manufactured. Further, since the hologram wavefront recording plate can be developed and fixed by a dry process, the lens used in the laser light source module can be replaced with a hologram wavefront recording plate, and the hologram wavefront recording plate can be exposed and developed and fixed at the assembly stage. Therefore, instead of preparing an optical component having a desired optical parameter and adjusting its position, the coupling can be optimized, and an optical component having an optimal optical parameter can be produced at the time of assembly.

  In the method of manufacturing a laser light source module according to the present invention, the laser light source is arranged at a semiconductor laser that oscillates at a wavelength of λ, and λ / n with respect to the incidence of laser light having a wavelength of λ that is disposed at the exit of the laser light source. A harmonic generation unit that generates a harmonic of a wavelength of λ / n, and in the irradiation exposure step, the semiconductor laser is oscillated at a wavelength of λ and is incident on the harmonic generation unit. Preferably, the hologram wavefront recording plate is irradiated with laser light having a wavelength of λ / n from the exit of the laser light source by generating harmonics of the wavelength.

  In the irradiation exposure step, a harmonic having a wavelength of λ / n is generated from light having a wavelength of λ generated by a semiconductor laser. For this reason, the apparatus for generating the light of the wavelength of (lambda) / n for interference can be simplified.

  In the method of manufacturing a laser light source module according to the present invention, the laser light source includes a semiconductor laser, and in the irradiation exposure step, laser light having a wavelength of λ / n is incident from the opposite side of the emission port of the semiconductor laser, It is preferable that the hologram wavefront recording plate is irradiated with a laser beam having a wavelength of λ / n from the exit of the laser light source by passing through the active layer of the semiconductor laser.

  In the irradiation exposure step, the generated harmonics having the wavelength of λ / n can be emitted through the active layer of the semiconductor laser, so that the harmonic generation component can be omitted from the configuration of the laser light source module. Further, since the hologram wavefront recording plate is exposed by irradiating light with a wavelength of λ / n from the exit of the semiconductor laser, the arrangement setting at the time of manufacturing the laser light source module is easy.

  A method of manufacturing a laser light source module according to the present invention includes a dual-mode optical fiber that propagates laser light from a laser light source that oscillates at a wavelength of λ in a single mode at wavelengths of λ and λ / n (n is an integer of 2 or more). A method of manufacturing a laser light source module that emits light from an exit port of a laser beam, wherein a hologram wavefront recording plate that can be developed and fixed by a dry process faces the exit port of the laser light source, and light from the entrance port of the dual-mode optical fiber is A fixing step of fixing the hologram wavefront recording plate, the laser light source, and the input port of the dual mode optical fiber by disposing the entrance of the dual mode optical fiber at a position where the hologram wavefront recording plate is irradiated; The dual mode optical fiber is configured such that a laser beam having a wavelength of λ / n is incident from the exit of the optical fiber. Irradiation of the dual-mode optical fiber of the hologram wavefront recording plate so that the hologram wavefront recording plate irradiates the hologram wavefront recording plate from the entrance and simultaneously reflects or transmits from the hologram wavefront recording plate and focuses on the exit of the laser light source. An irradiation exposure step of irradiating the hologram wavefront recording plate with a laser beam having a wavelength of λ / n from a surface opposite to the mouth, and a development fixing step of developing and fixing the hologram wavefront recording plate in order To do.

  Since the hologram wavefront recording plate is irradiated with light having a wavelength of λ / n from the entrance of the dual mode optical fiber and light having a wavelength of λ / n that is focused on the exit of the laser light source, the laser light source It is possible to produce a hologram wavefront recording plate that condenses laser light having a wavelength of λ emitted from the emission port at the entrance of the dual mode optical fiber. Further, since the hologram wavefront recording plate can be developed and fixed by a dry process, the lens used in the laser light source module can be replaced with a hologram wavefront recording plate, and the hologram wavefront recording plate can be exposed and developed and fixed at the assembly stage. Therefore, instead of preparing an optical component having a desired optical parameter and adjusting its position, the coupling can be optimized, and an optical component having an optimal optical parameter can be produced at the time of assembly.

  A method of manufacturing a laser light source module according to the present invention includes a dual-mode optical fiber that propagates laser light from a laser light source that oscillates at a wavelength of λ in a single mode at wavelengths of λ and λ / n (n is an integer of 2 or more). A method of manufacturing a laser light source module that emits light from an exit port of a laser beam, wherein a hologram wavefront recording plate that can be developed and fixed by a dry process faces the exit port of the laser light source, and light from the entrance port of the dual-mode optical fiber is A fixing step of fixing the hologram wavefront recording plate, the laser light source, and the entrance port of the dual mode optical fiber by disposing an entrance of the dual mode optical fiber so as to irradiate the hologram wavefront recording plate; The dual mode optical fiber is configured such that a laser beam having a wavelength of λ / n is incident from the exit of the optical fiber. The hologram wavefront recording plate irradiates the hologram wavefront recording plate through the hologram wavefront recording plate and simultaneously passes through the hologram wavefront recording plate and focuses on the exit port of the laser light source. An irradiation exposure step of irradiating the hologram wavefront recording plate with a laser beam having a wavelength of λ / n from the same side surface, and a development fixing step of developing and fixing the hologram wavefront recording plate are sequentially provided.

Since the hologram wavefront recording plate is irradiated with light having a wavelength of λ / n from the entrance of the dual mode optical fiber and light having a wavelength of λ / n that is focused on the exit of the laser light source, the laser light source It is possible to produce a hologram wavefront recording plate that condenses laser light having a wavelength of λ emitted from the emission port at the entrance of the dual mode optical fiber. Further, since the hologram wavefront recording plate can be developed and fixed by a dry process, the lens used in the laser light source module can be replaced with a hologram wavefront recording plate, and the hologram wavefront recording plate can be exposed and developed and fixed at the assembly stage. Therefore, instead of preparing an optical component having a desired optical parameter and adjusting its position, the coupling can be optimized, and an optical component having an optimal optical parameter can be produced at the time of assembly.
Furthermore, since light with a wavelength of λ / n that is focused on the exit of the laser light source is irradiated from the surface on the same side as the entrance of the dual-mode optical fiber of the hologram wavefront recording plate, exposure is performed. The influence of light can be reduced.

  According to the present invention, the lens used in the laser light source module can be replaced with a hologram wavefront recording plate, and the hologram wavefront recording plate can be exposed and developed and fixed at the assembly stage. Thus, an optical component having a desired optical parameter is prepared, and the coupling is not optimized by adjusting the position of the optical component, but an optical component having an optimal optical parameter can be produced at the time of assembly.

  Furthermore, the number of parts used in the laser light source module can be reduced, and the adjustment operation can be reduced, so that the manufacturing cost can be greatly reduced.

Embodiments of the present invention will be described with reference to the accompanying drawings. The embodiment described below is an example of the configuration of the present invention, and the present invention is not limited to the following embodiment.
The laser light source module according to this embodiment includes a laser light source that oscillates at a wavelength of λ, a dual-mode optical fiber that propagates in a single mode at wavelengths of λ and λ / n (n is an integer of 2 or more), and development by a dry process. A holographic wavefront recording plate made by interference of light having a wavelength of λ / n, and a laser beam having a wavelength of λ from the laser light source is transmitted or reflected by the hologram wavefront recording plate. Then, it is incident on the dual mode optical fiber.

  It is clear theoretically and experimentally that when exposure is performed by irradiating with light of an integral number of a wavelength used as a laser light source module, the diffraction condition at the time of exposure is satisfied even at a long wavelength used after development. That's what it means. That is, a hologram wavefront recording plate that can be developed and fixed by a dry process such as a photopolymer is used as the hologram wavefront recording plate 83 in FIG. The optical system shown in FIG. 11 can be realized by performing the exposure with the above light and operating the actual laser light source module at the wavelength λ.

  FIG. 1 is a schematic configuration diagram of a dual mode optical fiber according to the present embodiment. The dual mode optical fiber according to the present embodiment includes a first core having a core diameter a that propagates in a single mode at a wavelength of λ, and a second core having a core diameter b that propagates in a single mode at a wavelength of λ / n. Prepare. For example, if the core diameter a is about 10 μm, the core diameter b is about (10 / n) μm. When light of wavelengths λ and λ / n is emitted from the laser light source, a dual mode optical fiber having a similar waveguide structure at the exit of the laser light source may be used.

  The laser light source module needs to operate as a waveguide at both the use wavelength λ and the exposure wavelength λ / n of the laser light source module, but the spot size differs depending on the wavelength. Furthermore, a waveguide designed in a single mode at the operating wavelength λ performs multimode operation at the exposure wavelength λ / n. Since the wavefront in the multimode is different from that in the single mode operation, the desired effect cannot be obtained even if the light diffracted from the waveguide operating in the multimode is used for the exposure of the hologram. Therefore, it is conceivable to form two cores coaxially in the waveguide, that is, to share the center. Such a structure is called a dual mode structure and has been commercialized.

  However, since the optical fiber having a dual mode structure that has been commercialized has a single mode and a multimode core simply formed in a coaxial structure, it cannot be applied to the present invention as it is. Therefore, in the dual mode optical fiber according to the present embodiment, the core diameters of the first core and the second core are large enough to operate in a single mode at the use wavelength λ and the exposure wavelength λ / n of the laser light source module. .

(Embodiment 1)
FIG. 2 is a schematic configuration diagram of the laser light source module according to the present embodiment, where (a) shows the time of manufacture and (b) shows the time of use. The laser light source module according to the present embodiment includes a laser light source 11, a dual mode optical fiber 12, and a hologram wavefront recording plate 13.

  In this embodiment, the laser light source 11 is arranged at the exit of the semiconductor laser 11a that oscillates at a wavelength of λ and the laser light source 11, and emits a harmonic of a wavelength of λ / n with respect to the incidence of a laser beam of a wavelength of λ. A harmonic generation unit 11b is provided. The harmonic generator 11b is a nonlinear optical crystal such as a BBO crystal, an LBO crystal, or a CLBO crystal. The laser light source 11 may oscillate these two types of wavelengths simultaneously.

  At the time of manufacture shown in FIG. 2A, the hologram wavefront recording plate 13 is irradiated with a laser beam having a wavelength λ / n from the harmonic generation unit 11b to be exposed. At the time of use shown in FIG. 2B, the hologram wavefront recording plate 13 is irradiated with laser light having a wavelength λ from the semiconductor laser 11a for exposure. It is preferable that the laser light with the wavelength λ / n and the laser light with the wavelength λ are switchable so that the laser light source 11 does not need to be rearranged and emitted from the same emission port.

The laser light source module manufacturing method according to the present embodiment includes a fixing step, an irradiation exposure step, and a development fixing step in this order.
In the fixing step, as shown in FIG. 2 (a), the hologram wavefront recording plate 13, the hologram wavefront recording plate 13, with the exit of the laser light source 11 and the entrance of the dual mode optical fiber 12 facing each other, The entrances of the laser light source 11 and the dual mode optical fiber 12 are fixed. For example, as shown in FIG. 2A, the exit port of the laser light source 11, the hologram wavefront recording plate 13, and the entrance port of the dual mode optical fiber 12 are arranged in order on a straight line.

  In the irradiation exposure step, as shown in FIG. 2A, the hologram wavefront recording plate 13 is irradiated with a laser beam having a wavelength of λ / n from the exit of the laser light source 11 and exposed, and at the same time, a dual mode optical fiber. Laser light having a wavelength of λ / n is incident from the 12 exits, and the hologram wavefront recording plate 13 is irradiated from the entrance of the dual mode optical fiber 21 for exposure. Here, the dual mode optical fiber 12 propagates the incident laser light having a wavelength of λ / n in a single mode. Thereby, the dual mode optical fiber 12 can be exposed by irradiating the hologram wavefront recording plate 13 with a laser beam having a wavelength of λ / n.

  In the present embodiment, in the irradiation exposure step, the semiconductor laser 11a is oscillated at a wavelength of λ, is incident on the harmonic generation unit 11b, and the harmonic generation unit 11b generates a harmonic of a wavelength of λ / n. Exposure is performed by irradiating the hologram wavefront recording plate 13 with a laser beam having a wavelength of λ / n from the exit of the light source 11.

  In the development fixing step, the hologram wavefront recording plate 13 is developed and fixed. Since the hologram wavefront recording plate 13 can be subjected to a dry process, the hologram wavefront recording plate 13 can be developed and fixed by performing heat treatment such as irradiation with heat rays or placing it in a furnace.

  As described above, the fixing step, the irradiation exposure step, and the development fixing step are sequentially provided, so that the laser light source 11 that oscillates at the wavelength of λ and the dual mode optical fiber 12 that propagates in the single mode at the wavelengths of λ and λ / n. And a hologram wavefront recording plate 13 made of a member after development and fixing by a dry process and produced by interference of light having a wavelength of λ / n, and the laser light having a wavelength of λ from the laser light source 11 is converted into a hologram wavefront. A laser light source module that passes through the recording plate 13 and enters the dual mode optical fiber 12 can be manufactured.

  At the time of use, as shown in FIG. 2B, the laser light from the laser light source 11 oscillating at the wavelength of λ is emitted from the emission port of the dual mode optical fiber 12. At this time, the dual mode optical fiber 12 propagates the laser light from the laser light source 11 in a single mode at a wavelength of λ. Since the hologram wavefront recording plate 13 is exposed with light having a wavelength of λ / n, the diffraction condition is satisfied even at a wavelength λ that is an integral multiple of the wavelength of λ / n. The irradiation exposure step and the development fixing step are performed while maintaining the positions of the entrances of the hologram wavefront recording plate 13, the laser light source 11, and the dual mode optical fiber 12 fixed in the fixing step. The emitted light is optimally coupled to the dual mode optical fiber 12 without adjustment. Thus, there is no need for fine position adjustment when fixing components related to optical coupling.

(Embodiment 2)
FIG. 3 is a schematic configuration diagram of the laser light source module according to the present embodiment, in which (a) shows the time of manufacture and (b) shows the time of use. In the present embodiment, the laser light source 11, the dual mode optical fiber 12, and the hologram wavefront recording plate 13 are provided as in the configuration of the laser light source module described with reference to FIG. 2, but the laser light source 11 is different. The laser light source 11 of this embodiment includes a semiconductor laser 11a that oscillates at a wavelength of λ. 3A, the active layer of the semiconductor laser 11a transmits laser light having a wavelength of λ / n incident from the opposite side of the emission port of the semiconductor laser 11 from the emission port of the semiconductor laser 11. Exit.

  The manufacturing method of the laser light source module according to this embodiment includes a fixing step, an irradiation exposure step, and a development fixing step in the same manner as the manufacturing method described in FIG. 2, but the irradiation exposure step is different. In the present embodiment, in the irradiation exposure step, a laser beam having a wavelength of λ / n is incident from the opposite side of the exit of the laser light source 11 and passes through the active layer of the semiconductor laser 11a to be emitted from the exit of the laser light source 11. The hologram wavefront recording plate 13 is irradiated with a laser beam having a wavelength of λ / n for exposure.

  As described above, the fixing step, the irradiation exposure step, and the development fixing step are sequentially provided, so that the laser light source 11 that oscillates at the wavelength of λ and the dual mode optical fiber 12 that propagates in the single mode at the wavelengths of λ and λ / n. And a hologram wavefront recording plate 13 made of a member after development and fixing by a dry process and produced by interference of light having a wavelength of λ / n, and the laser light having a wavelength of λ from the laser light source 11 is converted into a hologram wavefront. A laser light source module that passes through the recording plate 13 and enters the dual mode optical fiber 12 can be manufactured.

(Embodiment 3)
FIG. 4 is a schematic diagram of the configuration of the laser light source module according to the present embodiment, where (a) shows the time of manufacture and (b) shows the time of use. In this embodiment, similarly to the configuration of the laser light source module described in the second embodiment, the laser light source 11, the dual mode optical fiber 12, and the hologram wavefront recording plate 13 are provided, but the hologram wavefront recording plate 13 is different. In the present embodiment, at the time of manufacturing shown in FIG. 4A, the hologram wavefront recording plate 13 is provided so that laser light having a wavelength of λ / n can be irradiated onto the hologram wavefront recording plate 13 from a direction different from the laser light source 11. It is characterized by being inclined.

  Since semiconductor lasers tend to absorb short wavelengths, there is a laser light source 11 that is difficult to transmit laser light having a wavelength of λ / n as in the second embodiment. In this case, the hologram wavefront recording plate 13 is tilted so that exposure is performed by irradiating a laser beam having a wavelength of λ / n so as to be reflected from the hologram wavefront recording plate 13 and focused on the exit of the laser light source 11. Can do.

  FIG. 5 shows another embodiment of the laser light source module according to the present embodiment, where (a) shows the time of manufacture and (b) shows the time of use. The configuration shown in FIG. 4 and the configuration shown in FIG. 5 are such that in the configuration shown in FIG. 4, the laser light source 11 and the dual mode optical fiber 12 are arranged on a substantially straight line, whereas in the configuration shown in FIG. 11 and the dual mode optical fiber 12 are arranged substantially orthogonally. With the configuration in which the laser light source 11 and the dual mode optical fiber 12 shown in FIG. 4 are arranged on a substantially straight line, the wavelength stability of the laser light source module is excellent. On the other hand, by adopting a configuration in which the laser light source 11 and the dual mode optical fiber 12 shown in FIG. 5 are arranged substantially orthogonally, the hologram wavefront recording plate 13 is arranged on the surface of the housing for storing the laser light source 11 or in the vicinity thereof. Therefore, the hologram wavefront recording plate 13 can be easily heated from the outside, and the productivity is excellent.

  The hologram wavefront recording plate 13 of the present embodiment reflects or transmits laser light having a wavelength λ from the laser light source 11. For example, as shown in FIG. 4B, when the exit of the laser light source 11 and the entrance of the dual mode optical fiber 12 are arranged on the same straight line, the hologram wavefront recording plate 13 has a wavelength λ from the laser light source 11. The laser beam is transmitted. On the other hand, as shown in FIG. 5B, when the laser light source 11 and the entrance of the dual mode optical fiber 12 are arranged substantially orthogonal to each other, the hologram wavefront recording plate 13 emits laser light having a wavelength λ from the laser light source 11. Reflect.

  The manufacturing method of the laser light source module according to the present embodiment includes a fixing step, an irradiation exposure step, and a development fixing step in the same manner as the manufacturing method described in the second embodiment. Hereinafter, different parts of each step will be described.

  In the fixing step, as shown in FIGS. 4A and 5A, a hologram wavefront recording plate 13 that can be developed and fixed by a dry process is made to face the exit of the laser light source 11, and the entrance of the dual mode optical fiber 12 is used. The entrance of the dual-mode optical fiber 12 is placed at a position where the light from the laser beam irradiates the hologram wavefront recording plate 13 and is exposed, and the entrance of the hologram wavefront recording plate 13, the laser light source 11, and the dual-mode optical fiber 12 is fixed. To do. Further, the condenser lens 17 is fixed at a position where the interference laser beam having the wavelength of λ / n is focused on the exit of the laser light source 11.

  In the irradiation exposure step, as shown in FIG. 4A, a laser beam having a wavelength of λ / n is incident from the exit of the dual mode optical fiber 12, and the hologram wavefront recording plate is entered from the entrance of the dual mode optical fiber 12. 13 is exposed to light and simultaneously reflected from the hologram wavefront recording plate 13 and focused on the exit of the laser light source 11, the surface of the hologram wavefront recording plate 13 opposite to the entrance of the dual mode optical fiber 12. To λ / n of laser light is irradiated onto the hologram wavefront recording plate 13 for exposure. For example, the interference light from the condenser lens 17 is applied to the surface of the hologram wavefront recording plate 13 opposite to the entrance of the dual mode optical fiber 12. As shown in FIG. 5A, when the laser light source 11 and the dual mode optical fiber 12 are arranged substantially orthogonally, the light passes through the hologram wavefront recording plate 13 and is focused on the exit of the laser light source 11. The hologram wavefront recording plate 13 is exposed by irradiating the hologram wavefront recording plate 13 with a laser beam having a wavelength of λ / n from the surface opposite to the entrance of the dual mode optical fiber 12 of the hologram wavefront recording plate 13.

  At this time, it is preferable to monitor whether or not the interference light is focused on the exit of the laser light source 11. For example, the current injection element 16 to the laser light source 11 can be used as a monitor terminal. When the voltage output from the current injection element 16 decreases, it can be detected that the focus of the interference light has deviated from the exit of the laser light source 11.

  In the developing and fixing step, since the hologram wavefront recording plate 13 is inclined, the hologram wavefront recording plate 13 can be heated by irradiation with heat rays such as an infrared heater.

  In the present embodiment, there may be a monitoring step for checking whether or not the interference light is focused on the exit of the laser light source 11 between the fixing step and the irradiation exposure step. For example, the current injection element 16 to the laser light source 11 can be used as a monitor terminal. The exposure conditions such as the spot diameter and incident angle of the interference light on the hologram wavefront recording plate 13 are adjusted so that the voltage output from the current injection element 16 is maximized. Alternatively, returning to the fixing step, the position of the entrance of the hologram wavefront recording plate 13, the laser light source 11, or the dual mode optical fiber 12 may be adjusted. The adjustment as to whether or not the interference light is focused on the exit of the laser light source 11 may be performed at a wavelength of λ, for example.

  As shown in FIG. 5, when the laser light source 11 and the entrance of the dual mode optical fiber 12 are arranged substantially orthogonal to each other, a reflection film having a high reflectance at the wavelength used for λ is formed on the hologram wavefront recording plate 13. May be. Further, before the fixing step, the wavelength filter film is of a wavelength selective type as a reflection surface, that is, a wavelength filter film having a medium reflectance at an exposure wavelength of λ / n but having a light reflectance at a wavelength used for λ. A forming step may be further included.

  As described above, the fixing step, the irradiation exposure step, and the development fixing step are sequentially provided, so that the laser light source 11 that oscillates at the wavelength of λ and the dual mode optical fiber 12 that propagates in the single mode at the wavelengths of λ and λ / n. And a hologram wavefront recording plate 13 made of a member after development and fixing by a dry process and produced by interference of light having a wavelength of λ / n, and the laser light having a wavelength of λ from the laser light source 11 is converted into a hologram wavefront. A laser light source module that reflects or transmits through the recording plate 13 and enters the dual mode optical fiber 12 can be manufactured.

(Embodiment 4)
FIG. 6 is a schematic configuration diagram of the laser light source module according to the present embodiment, in which (a) shows the time of manufacture and (b) shows the time of use. In the present embodiment, similarly to the configuration of the laser light source module described in the second embodiment, in addition to the laser light source 11, the dual mode optical fiber 12, and the hologram wavefront recording plate 13, the entrance of the dual mode optical fiber 12 is further provided. And a wavelength filter 14 between the hologram wavefront recording plate 13.

  When a photopolymer is used as the hologram material of the hologram wavefront recording plate 13, a volume hologram is obtained, and the first-order diffraction becomes strong. In this case, when the hologram wavefront recording plate 13 is used as a reflective optical element, diffracted light appears not only on the positive side but also on the negative side, and the diffraction efficiency tends to be lower than that of the transmission type. Therefore, a wavelength filter 14 is provided so that the hologram wavefront recording plate 13 can be used as a transmission type diffraction grating. Thereby, the diffraction efficiency of the hologram wavefront recording plate 13 can be increased.

  FIG. 7 shows another embodiment of the laser light source module according to the present embodiment, where (a) shows the time of manufacture and (b) shows the time of use. The configuration shown in FIG. 6 and the configuration shown in FIG. 7 are such that in the configuration shown in FIG. 6, the laser light source 11 and the dual mode optical fiber 12 are arranged on a substantially straight line, whereas in the configuration shown in FIG. 11 and the dual mode optical fiber 12 are arranged substantially orthogonally.

  As shown in FIG. 6A, the wavelength filter 14 transmits the laser light having a wavelength of λ / n from the entrance of the dual mode optical fiber 12 and enters the interference λ / that is incident from the condenser lens 17. Reflects laser light having a wavelength of n. As shown in FIG. 7A, in the case where the exit of the laser light source 11 and the entrance of the dual mode optical fiber 12 are substantially orthogonal to each other, the wavelength filter 14 has a wavelength λ from the entrance of the dual mode optical fiber 12. The laser beam having the wavelength of / n is reflected, and the laser beam having the wavelength of λ / n incident from the condenser lens 17 is transmitted.

  The wavelength filter 14 reflects or transmits the laser light having the wavelength λ from the laser light source 11. For example, as shown in FIG. 6B, when the exit of the laser light source 11 and the entrance of the dual mode optical fiber 12 are arranged on the same straight line, the wavelength filter 14 is a laser having a wavelength λ from the laser light source 11. Transmits light. Further, the wavelength filter 14 shown in FIG. 6B may be removed. On the other hand, as shown in FIG. 7A, when the exit of the laser light source 11 and the entrance of the dual mode optical fiber 12 are arranged substantially orthogonally, the wavelength filter 14 is a laser having a wavelength λ from the laser light source 11. Reflects light.

  The manufacturing method of the laser light source module according to the present embodiment includes a fixing step, an irradiation exposure step, and a development fixing step in the same manner as the manufacturing method described in the second embodiment. Hereinafter, different parts of each step will be described.

  In the fixing step, as shown in FIGS. 6A and 7A, the hologram wavefront recording plate 13 that can be developed and fixed by a dry process is made to face the exit of the laser light source 11, and the entrance of the dual mode optical fiber 12 is used. The incident port of the dual mode optical fiber 12 is arranged so that the light from the beam can irradiate the hologram wavefront recording plate 13, and the incident ports of the hologram wavefront recording plate 13, the laser light source 11 and the dual mode optical fiber 12 are fixed. Further, the condenser lens 17 is fixed at a position where the interference laser beam having the wavelength of λ / n is focused on the exit of the laser light source 11.

  In the irradiation exposure step, as shown in FIGS. 6A and 7A, a laser beam having a wavelength of λ / n is incident from the exit of the dual mode optical fiber 12, and the dual mode optical fiber 12 is incident. The hologram wavefront recording plate 13 is irradiated and exposed through the aperture, and at the same time, the dual-mode optical fiber entrance of the hologram wavefront recording plate 13 is focused through the hologram wavefront recording plate 13 and focused on the exit of the laser light source 11. The hologram wavefront recording plate 13 is irradiated with a laser beam having a wavelength of λ / n from the same side surface. For example, as shown in FIGS. 6A and 7A, the interference light from the condenser lens 17 is irradiated to the surface of the wavelength filter 14 opposite to the entrance of the dual mode optical fiber 12. . At this time, it is preferable to monitor whether or not the interference light is focused on the exit of the laser light source 11 as in the third embodiment.

  In the present embodiment, as in the third embodiment, a monitoring step may be provided between the fixing step and the irradiation exposure step. Further, as shown in FIG. 7A, when the laser light source 11 and the entrance of the dual mode optical fiber 12 are arranged substantially orthogonal to each other, after the developing and fixing step, a high reflectance is obtained at a wavelength used for λ. A reflective film may be formed on the wavelength filter 14.

  As described above, the fixing step, the irradiation exposure step, and the development fixing step are sequentially provided, so that the laser light source 11 that oscillates at the wavelength of λ and the dual mode optical fiber 12 that propagates in the single mode at the wavelengths of λ and λ / n. And a hologram wavefront recording plate 13 made of a member after development and fixing by a dry process and produced by interference of light having a wavelength of λ / n, and the laser light having a wavelength of λ from the laser light source 11 is converted into a hologram wavefront. A laser light source module that reflects or transmits through the recording plate 13 and enters the dual mode optical fiber 12 can be manufactured.

(Embodiment 5)
FIG. 8 is a schematic configuration diagram of the laser light source module according to the present embodiment, in which (a) shows the time of manufacture and (b) shows the time of use. In the present embodiment, similarly to the configuration of the laser light source module described in the fourth embodiment, in addition to the laser light source 11, the dual mode optical fiber 12, the hologram wavefront recording plate 13, and the wavelength filter 14, the hologram wavefront recording is further performed. A prism 15 is provided between the plate 13 and the wavelength filter 14.

  FIG. 9 shows another embodiment of the laser light source module according to the present embodiment, where (a) shows the time of manufacture and (b) shows the time of use. The configuration shown in FIG. 8 and the configuration shown in FIG. 9 are such that, in the configuration shown in FIG. 8, the laser light source 11 and the dual mode optical fiber 12 are arranged on a substantially straight line, whereas in the configuration shown in FIG. 11 and the dual mode optical fiber 12 are arranged substantially orthogonally.

  In the present embodiment, as shown in FIGS. 8B and 9B, the hologram wavefront recording plate 13 and the wavelength filter 14 can be provided on the surface of the prism 15. Further, as shown in FIG. 8A, the prism 15 preferably has a shape for correcting the refraction of the optical axis of the light having the wavelength of λ / n for interference incident on the wavelength filter 14.

  The manufacturing method of the laser light source module according to the present embodiment is the same as the manufacturing method described in the fourth embodiment. In this embodiment, as shown in FIG. 8A and FIG. 9A, the prism 15 is further provided. Therefore, in the irradiation exposure step, it is easy to adjust the optical axis of the light having the wavelength of λ / n for interference. There is an advantage.

  As shown in FIG. 9 (a), when the laser light source 11 and the entrance of the dual mode optical fiber 12 are arranged substantially orthogonally, the reflection having a high reflectance at the wavelength used at λ after the developing and fixing step. A film may be formed on the wavelength filter 14. The hologram wavefront recording plate 13 can have a high refractive index, and light loss can be reduced.

  The present invention can be used for a hybrid optical functional component for optical communication.

It is a composition schematic diagram of the dual mode optical fiber concerning this embodiment. It is the structure schematic of the laser light source module which concerns on Embodiment 1, (a) is at the time of manufacture, (b) shows the time of use. It is the structure schematic of the laser light source module which concerns on Embodiment 2, (a) is at the time of manufacture, (b) shows the time of use. It is the structure schematic of the laser light source module which concerns on Embodiment 3, (a) shows at the time of manufacture, (b) shows the time of use. It is another form of the laser light source module which concerns on Embodiment 3, (a) is at the time of manufacture, (b) shows the time of use. It is the structure schematic of the laser light source module which concerns on Embodiment 4, (a) shows at the time of manufacture, (b) shows the time of use. It is another form of the laser light source module which concerns on Embodiment 4, (a) shows at the time of manufacture, (b) shows the time of use. It is the structure schematic of the laser light source module which concerns on Embodiment 5, (a) is at the time of manufacture, (b) shows the time of use. It is another form of the laser light source module which concerns on Embodiment 5, (a) is at the time of manufacture, (b) shows the time of use. It is a schematic block diagram which shows the 1st example of the conventional optical functional component. It is a schematic block diagram which shows the 2nd example of the conventional optical functional component.

Explanation of symbols

DESCRIPTION OF SYMBOLS 11 Laser light source 12 Dual mode optical fiber 13 Hologram wavefront recording plate 14 Wavelength filter 15 Prism 16 Current injection element 17 Condensing lens 81 Lens 82 Optical fiber 83 Hologram wavefront recording plate

Claims (6)

a laser light source that oscillates at a wavelength of λ;
a dual mode optical fiber that propagates in a single mode at wavelengths of λ and λ / n (n is an integer of 2 or more);
A hologram wavefront recording plate made of a member after development and fixing in a dry process, and produced by interference of light having a wavelength of λ / n,
A laser light source module, wherein a laser beam having a wavelength of λ from the laser light source transmits or reflects the hologram wavefront recording plate and enters the dual mode optical fiber. Method of manufacturing a laser light source module for emitting laser light from a laser light source oscillating at a wavelength of λ from the exit of a dual mode optical fiber that propagates in a single mode at wavelengths of λ and λ / n (n is an integer of 2 or more) Because
The hologram wavefront recording plate, the laser light source, and the dual mode optical fiber are disposed so that the exit of the laser light source faces the entrance of the dual mode optical fiber with a hologram wavefront recording plate that can be developed and fixed by a dry process interposed therebetween. A fixing step for fixing the entrance of
The hologram wavefront recording plate is irradiated with laser light having a wavelength of λ / n from the exit of the laser light source, and simultaneously, laser light having a wavelength of λ / n is incident from the exit of the dual mode optical fiber. Irradiation exposure step of irradiating the hologram wavefront recording plate from the entrance of the dual mode optical fiber;
And a development fixing step of developing and fixing the hologram wavefront recording plate in order. The laser light source is a semiconductor laser that oscillates at a wavelength of λ, and a harmonic generation unit that is arranged at the exit of the laser light source and generates a harmonic of a wavelength of λ / n with respect to the incidence of the laser light of the wavelength of λ With
In the irradiation exposure step, the semiconductor laser is oscillated at a wavelength of λ, is incident on the harmonic generation unit, and the harmonic generation unit generates a harmonic of a wavelength of λ / n, thereby emitting the laser light source. 3. The method of manufacturing a laser light source module according to claim 2, wherein the hologram wavefront recording plate is irradiated with a laser beam having a wavelength of 1 to λ / n. The laser light source comprises a semiconductor laser;
In the irradiation exposure step, a laser beam having a wavelength of λ / n is incident from the opposite side of the emission port of the semiconductor laser, and is allowed to pass through the active layer of the semiconductor laser to have a wavelength of λ / n from the emission port of the laser light source. 3. The method of manufacturing a laser light source module according to claim 2, wherein the hologram wavefront recording plate is irradiated with laser light having a wavelength. Method of manufacturing a laser light source module for emitting laser light from a laser light source oscillating at a wavelength of λ from the exit of a dual mode optical fiber that propagates in a single mode at wavelengths of λ and λ / n (n is an integer of 2 or more) Because
A hologram wavefront recording plate that can be developed and fixed by a dry process is made to face the exit of the laser light source, and the light from the entrance of the dual mode optical fiber is incident on the position where the hologram wavefront recording plate is irradiated. A fixing step of fixing an entrance of the hologram wavefront recording plate, the laser light source, and the dual mode optical fiber by arranging a mouth;
A laser beam having a wavelength of λ / n is incident from the exit port of the dual mode optical fiber, irradiated to the hologram wavefront recording plate from the entrance port of the dual mode optical fiber, and simultaneously reflected from the hologram wavefront recording plate or Laser light having a wavelength of λ / n is transmitted to the hologram wavefront recording plate from the surface opposite to the entrance of the dual mode optical fiber of the hologram wavefront recording plate so as to pass through and focus on the exit port of the laser light source. An irradiation exposure step for irradiating;
And a development fixing step of developing and fixing the hologram wavefront recording plate in order. Method of manufacturing a laser light source module for emitting laser light from a laser light source oscillating at a wavelength of λ from the exit of a dual mode optical fiber that propagates in a single mode at wavelengths of λ and λ / n (n is an integer of 2 or more) Because
The dual-mode optical fiber is incident so that the hologram wavefront recording plate that can be developed and fixed by a dry process faces the exit of the laser light source, and light from the dual-mode optical fiber entrance can irradiate the hologram wavefront recording plate. A fixing step of disposing an aperture and fixing an incident port of the hologram wavefront recording plate, the laser light source and the dual mode optical fiber;
A laser beam having a wavelength of λ / n is incident from the exit of the dual mode optical fiber, irradiated to the hologram wavefront recording plate from the entrance of the dual mode optical fiber, and simultaneously transmitted through the hologram wavefront recording plate. Then, the hologram wavefront recording plate is irradiated with a laser beam having a wavelength of λ / n from the same side of the hologram wavefront recording plate as the entrance of the dual mode optical fiber so as to focus on the emission port of the laser light source. Irradiation exposure step;
And a development fixing step of developing and fixing the hologram wavefront recording plate in order.

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