JP2010031922A - Throttle device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a throttle device easy in processing with a relatively inexpensive, simple and compact constitution, superior in product assembling performance, and capable of realizing highly accurate flow rate control, by restraining a change in a flow rate factor by the temperature, while realizing maintenance-free by restraining the occurrence of clogging, even when controlling a very small flow rate. <P>SOLUTION: In this throttle device used for a constant flow rate control device, in a throttle element 200, a plurality of restrictions 231-235 are arranged on one opening member 230, and fluid is passed through the restrictions in order via a flow passage formed of elongate holes 221-223 and 241-243. Thus, a pressure loss in the whole throttle elements 200 for passing the fluid can be relatively increased, and when controlled in the same flow rate, the effective area of the restrictions can be increased more than a conventional constant flow rate valve. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a throttling device that throttles a flow path cross-sectional area of a fluid, and more particularly to a throttling device that can suppress a change in a flow coefficient with respect to a temperature change of a fluid.

  Conventionally, when the flow rate of fluid is controlled, a pressure reducing means such as a governor is provided upstream of an orifice as a throttle portion (or a throttle element), and the fluid pressure at the orifice inlet is adjusted to be substantially constant by the pressure reducing means. Thus, the flow rate of the fluid passing through the orifice is controlled to be constant.

  However, in the flow rate control device using such pressure reducing means such as the governor, there are problems such as a significant increase in cost and an increase in the size of the device.

For this reason, various flow control devices have been conventionally proposed. For example, Patent Document 1 describes the following constant flow valve.
That is, the constant flow valve described in Patent Document 1 is interposed in the fluid passage 1, and as shown in FIG. 30, the first chamber 2 into which fluid flows from the upstream side of the fluid passage 1, and the fluid passage 1 A second chamber 4 communicating with the downstream side of the first chamber, a diaphragm 3 defining the first chamber 2 and the second chamber 4, and the first chamber 2 and the second chamber bypassing the diaphragm 3 4 and an orifice 5 communicating with 4.

  Further, in the constant flow valve, a valve body 3A is attached substantially integrally to the diaphragm 3, and the second chamber 4 and the fluid on the downstream side correspond to the valve body 3A and the valve body 3A. The flow passage area can be controlled in a predetermined manner by changing the relative position of the valve seat 7A provided at the inlet portion of the outlet passage 7 communicating with the passage 1, and the first chamber 2 and the second chamber A coil spring 6 is disposed as an elastic member for biasing the diaphragm 3 or the valve body 3A in a predetermined manner so as to resist a pressure difference from the pressure 4.

  In the constant flow valve having such a configuration, the fluid flowing into the first chamber 2 from the upstream fluid passage 1 is depressurized by the orifice 5 and flows into the second chamber 4, and the first chamber and the second chamber. Passes through the gap between the valve seat 7A and the valve body 3A having a predetermined throttling effect so that the pressure difference becomes constant, and flows out to the outlet passage 7 and then to the fluid passage 1 on the downstream side.

The constant flow valve operates as follows to control the flow rate of the fluid passing through the constant flow valve to a predetermined flow rate.
That is, from the state where the inflow flow rate of the fluid from the upstream fluid passage 1 to the first chamber 2 and the outflow flow rate flowing out through the valve seat 7A and the valve body 3A are equal, When the pressure of the fluid flowing into the chamber 2 rises and the pressure difference with the fluid pressure of the second chamber 4 becomes larger than the set differential pressure, the diaphragm 3 and the valve body 3A close against the elastic force of the coil spring 6. It is moved in the valve direction (downward in FIG. 30). As a result, the gap between the valve seat 7A and the valve body 3A is reduced, and the pressure difference between the pressure of the fluid flowing into the first chamber 2 and the pressure of the fluid in the second chamber 4 is kept constant. Thus, the flow rate of the fluid passing through the gap is prevented from increasing with an increase in the pressure of the fluid, and functions to maintain the outflow rate constant.

On the contrary, when the pressure of the fluid flowing into the first chamber 2 decreases, the diaphragm 3 and the valve body 3A move in the valve opening direction (upward in FIG. 30). As a result, the gap between the valve seat 7A and the valve body 3A is increased, and the pressure difference between the pressure of the fluid flowing into the first chamber 2 and the pressure of the fluid in the second chamber 4 is kept constant. Thus, the flow rate of the fluid passing through the gap is suppressed from decreasing with a decrease in the pressure of the fluid, and functions to maintain the outflow rate constant.
JP-A-5-99354

  Here, the relationship between the flow rate in the conventional constant flow valve as described above and the orifice diameter (the effective area of the orifice) which is the restrictor (or restrictor element) will be described with reference to the schematic diagram shown in FIG. To do. Here, the effective area indicates the maximum projected area of the hole through which the fluid passes.

As shown in FIG. 29, the fluid pressure in the first chamber 2 is P ₁ , the fluid pressure in the second chamber 4 is P ₂ , the pressure of the fluid that has passed through the valve seat 7A is P ₃ , and the effective pressure receiving area of the diaphragm 3 is a _D, the spring load of the coil spring F _S, the effective area of the orifice 5 S, when the effective area of the outlet passage 7 (valve seat 7A) and a _N, the following relationship is established is generally known .

P ₁ · A _D = P ₂ · (A _D −A _N ) + P ₃ · A _N + F _{S
(P 1 -P 2) · A} D = F S - (P 2 -P 3) · A N
When P ₁ -P ₂ = ΔP,

_{ΔP = P 1 -P 2 = (} F S - (P 2 -P 3) · A N) / A D

_{= F S / A D -A N} / A D · (P 2 -P 3)
It becomes.

Here, if A _N is sufficiently smaller than A _D , the A _N / A _D term can be ignored. Further, F _S can be said to be F _S / A _D = const in the case of a minute displacement.
Therefore,
The _{ΔP ≒ F S / A D =} const.
Accordingly, the flow rate Q = kS (ΔP) ^1/2 = const k: a proportional constant flow rate Q Ｓ S (ΔP) ^1/2 Ｓ S is obtained.

  That is, the flow rate Q is a constant flow rate (const) and is proportional to the effective area S of the orifice 5. Therefore, it is understood that the effective area S of the orifice 5 becomes minute when the minute flow rate is controlled quantitatively.

  Accordingly, when trying to control a minute flow rate using a conventional constant flow valve as described in Patent Document 1, the effective area of the orifice 5 becomes very small (high pressure loss), and this is required. In such a case, even if a strainer or the like is provided on the upstream side, clogging or the like is likely to occur due to slime, foreign matter, dust, or the like passing through the strainer or the like, and for example, regular maintenance is required. There is a possibility that it is inferior.

  Further, such a small-diameter orifice has a problem that it is difficult to process, and the flow rate is sensitive to the processing accuracy, resulting in poor yield and poor productivity.

  For this reason, the present applicants, in Japanese Patent Application No. 2007-069377, include a pipe-like throttle element and a multistage orifice as a constant flow rate control device capable of realizing a high pressure loss while maintaining a diameter at a predetermined size. A constant flow rate control device with a throttle part was proposed.

  The constant flow rate control device proposed in Japanese Patent Application No. 2007-069377 is a configuration that realizes a high pressure loss while maintaining the throttle portion at a predetermined diameter size in order to suppress the occurrence of clogging or the like. The grounds are sought in “Hagen-Poiseuille's Law”.

That means
Instantaneous flow Q = (πr ⁴ / 8η) × (ΔP / L) = (πr ⁴ × ΔP) / (8η × L)
r: Inner radius of pipe, η: Viscosity of fluid, ΔP: Pressure loss, L: When obtaining the same flow rate Q, if η and ΔP are not changed, L ( By increasing the length in the flow direction, it is possible to increase r (inner radius of the pipe), thereby achieving constant flow control in a very small area with high accuracy without causing clogging or the like. At the same time, productivity can be secured.

  In other words, it aims to increase the inner diameter of the tube while realizing high pressure loss by utilizing the pressure loss due to the shear force between the inner wall of the tube through which the fluid flows and the fluid or the shear force inside the fluid. However, on the other hand, these shear forces have a characteristic that they greatly depend on the viscosity of the fluid.

  That is, η (viscosity of the fluid) changes depending on the temperature, and when η (viscosity of the fluid) changes depending on the temperature, the instantaneous flow rate Q changes depending on the temperature from the above equation. Therefore, for example, in the case of a constant flow control device using a pipe-shaped restrictor, the flow rate fluctuates according to the temperature change of the fluid under the use conditions where the fluid temperature changes, and the constant flow rate control device It is assumed that the control range of the control fluctuates, or that a temperature compensation mechanism is required, resulting in an increase in cost.

  Japanese Patent Application No. 2007-069377 describes a constant flow rate control device having a throttle portion including a multi-stage orifice. However, depending on the use mode and the like, this configuration has a large number of parts and is expensive. Because it is relatively difficult to downsize and there is a possibility that it is inferior in productivity, there are cases where it is difficult to adopt.

  For this reason, it is relatively inexpensive, simple and compact, yet easy to process and excellent in product assembly. Even when controlling a small flow rate, it suppresses the occurrence of clogging and is maintenance-free. However, constant flow rate control that enables high-precision flow rate control by suppressing changes in the control flow rate due to temperature, thus ensuring both productivity and reliability and improving the accuracy of constant flow rate control. There is a need to provide a diaphragm device suitable for realizing the device.

  The present invention has been made in view of such circumstances, and is relatively inexpensive, simple, and compact, yet easy to process and excellent in product assembly, and even when controlling a minute flow rate. An object of the present invention is to provide a throttling device capable of realizing highly accurate flow rate control by suppressing changes in the flow rate coefficient due to temperature while suppressing occurrence of clogging and making maintenance free.

In order to achieve the above object, the diaphragm device according to the present invention includes:
A throttling device that is interposed in a fluid passage and applies pressure loss to the fluid flowing through the fluid passage through a throttling hole,
An opening member having a plurality of aperture holes opened;
A first flow path member for forming a plurality of elongated hole-like pressure chambers corresponding to the throttle holes so that fluid sequentially passes through the plurality of throttle holes;
To form a plurality of elongated hole-like pressure chambers corresponding to the throttle holes, which are arranged on the opposite side of the first flow path member with the opening member interposed therebetween, so that fluid sequentially passes through the plurality of throttle holes. A second flow path member of
An inlet for allowing fluid to flow into one pressure chamber of the first flow path member from the upstream side of the fluid passage is provided so as to cover one surface of the first flow path member so that the fluid does not flow out to other than a predetermined path. A first passing member disposed;
A discharge port for allowing fluid to flow out from one pressure chamber of the second flow path member to the downstream side of the fluid passage, and covering one side of the second flow path member so that the fluid does not flow outside a predetermined path A second passage member arranged as follows:
It is characterized by including.

  In the present invention, the throttling device is configured to be able to apply a predetermined pressure loss while maintaining an effective area of the throttling holes at a predetermined level or more by adjusting the number of the plurality of throttling holes. It can be.

  In the present invention, at least one of the introduction port or the discharge port functions as a throttle hole.

  In the present invention, the restriction hole is formed such that a flow direction length of the restriction hole is 1.5 d or less with respect to a diameter d of a circle having the same area as the effective area of the restriction hole. can do.

  In the present invention, the first passage member, the first passage member, the opening member, the second passage member, and the second passage member are laminated in this order, and at least two adjacent members are integrated with each other. It can be characterized by having comprised.

  In the present invention, the first passage member, the first flow path member, the opening member, the second flow path member, and the second passage member are configured as a diaphragm module formed integrally. it can.

The diaphragm device according to the present invention includes a diaphragm element configured by laminating the first passage member, the first flow path member, the opening member, the second flow path member, and the second passage member in this order. Consisting of
At least one multiplexing element in which the first flow path member, the opening member, the second flow path member, and the second passage member are stacked in this order is connected to the downstream side of the throttle element. Can be characterized.

  In the present invention, at least two adjacent members of the first passage member, the first passage member, the opening member, the second passage member, and the second passage member are integrally molded or formed. It can be characterized by being.

  According to the present invention, although it is a relatively inexpensive, simple, and compact configuration, it is easy to process and has excellent product assemblability, and even when a minute flow rate is controlled, occurrence of clogging or the like is suppressed. Thus, it is possible to provide a throttling device that can realize high-accuracy flow rate control by suppressing changes in the flow rate coefficient due to temperature while maintaining maintenance-free.

Hereinafter, embodiments of the diaphragm device according to the present invention will be described in detail with reference to the accompanying drawings. The present invention is not limited to the examples described below.
The fluid that is an object of flow control of the constant flow control device according to the following embodiments can be applied to both incompressible fluid and compressible fluid. Moreover, it can be applied to gases as well as liquids such as tap water and pure water.

  As shown in FIGS. 1 and 2, the constant flow rate control device (constant flow rate valve) according to the first embodiment of the present invention is interposed in the fluid passage 110, and the fluid flows in from the upstream side of the fluid passage 110. A first chamber 120, a second chamber 140 communicating with the downstream side of the fluid passage 110, a diaphragm 130 defining the first chamber 120 and the second chamber 140, the first chamber 120 and the second chamber A movable valve body 151 that is provided integrally with the diaphragm 130 including a throttle portion 150 that communicates with the chamber 140 is configured.

The movable valve body 151 includes a needle valve 150A on the second chamber 140 side.
A valve seat 170A corresponding to the needle valve 150A is provided at the inlet of the outlet passage 170 that connects the second chamber 140 and the downstream fluid passage 110, and the needle valve 150A with respect to the valve seat 170A is provided. The flow path area can be controlled to a predetermined value by changing the relative position of each.

  Further, so as to resist the pressure difference ΔP between the first chamber 120 and the second chamber 140 (so as to resist the displacement of the diaphragm 130 and the needle valve 150A), the diaphragm 130 extends as described above. A coil spring 160 is provided as an elastic member that biases the movable valve body 151 in a predetermined manner.

Here, the diaphragm 150 according to the present embodiment will be described in detail.
As described above, when the minute flow rate is controlled by using the constant flow valve as described in Patent Document 1, the effective area of the orifice as the throttle portion becomes very small, and the scale is reduced. In addition, clogging or the like is likely to occur due to slime, foreign matter, dust, etc., and there is a concern that regular maintenance or the like may be required. Further, such a small-diameter orifice has a problem that it is difficult to process, and the flow rate is sensitive to the processing accuracy, resulting in poor yield and poor productivity.

  Further, in the case of a constant flow rate control device using a long pipe-shaped throttle part as described in Japanese Patent Application No. 2007-069377 by the present applicants, the inner wall and the fluid flow in the throttle part. The distance at which the shearing force is generated is long (the pipe friction coefficient is large), so the change in the instantaneous flow rate of the control due to the temperature change of the fluid is large. It is assumed that a temperature compensation mechanism must be provided for the control.

  For this reason, the present inventors can reduce the instantaneous flow rate change due to the fluid temperature without causing clogging and the like, and can achieve constant flow rate control with high accuracy and at the same time maintain productivity at a high level. As a result of repeating various investigations and research experiments in order to provide a throttle mechanism and a constant flow rate control device, the following knowledge was obtained.

  That is, the present inventors are a constant flow control device of the type including the first chamber 120, the diaphragm 130, the second chamber 140, the throttle unit 150 that communicates the first chamber 120 and the second chamber 140, We have found a structure of a throttle that can improve the flow rate coefficient by changing the temperature of the fluid and improve the flow rate change without causing clogging, etc., and achieve constant flow control with high accuracy and at the same time ensuring productivity. .

Specifically, the present invention utilizes pressure loss due to the contraction phenomenon that occurs in the throttle.
The pressure of the fluid decreases (pressure loss) by flowing while overcoming the friction force caused by the shear force inside the fluid and the friction force caused by the shear force between the pipe wall and the fluid (tube friction). The force is highly dependent on the viscosity of the fluid, and the viscosity is highly dependent on the temperature.

  On the other hand, as shown in FIG. 6, when the fluid passes through the throttle portion, the flow of fluid from all directions flows into the throttle portion, so that the fluid flow advances through the throttle portion while changing the streamline direction. The fluid flow has a contracted portion in the vicinity of about 0.5 d in the fluid flow direction from the inlet surface of the throttle portion with respect to the hole diameter d (diameter) of the throttle portion, and then the inlet surface of the throttle portion. In the vicinity of about 1.5d in the fluid flow direction, the fluid flow cross section expands to the hole diameter d, and thereafter the fluid flows along the inner wall of the throttle A.

  From these facts, in order to reduce the influence on the fluid flow rate of the temperature change of shear force such as pipe friction in the throttle part, it is effective to reduce the length of contact with the pipe wall at the throttle part. It has been found that it is effective for the length to be 1.5 d or less in the fluid flow direction from the inlet surface of the restrictor with respect to the hole diameter d of the restrictor.

  By the way, in the Japanese Patent Application No. 2007-069377, the applicants and the like pass through a throttle hole of a predetermined size while intentionally changing the fluid streamline direction many times, thereby passing the finer throttle hole. Has proposed a constant flow control device having a multistage orifice utilizing the fact that the same pressure loss effect as that obtained can be obtained. The consideration on the influence of the temperature change of the shearing force on the fluid flow rate is insufficient, and a plurality of partition plates having minute openings are arranged at predetermined intervals in the fluid flow direction. There is much room for improvement in productivity and cost.

  Accordingly, the present inventors arrange a plurality of throttle holes formed on one part so that the length L in the fluid flow direction is 1.5 d or less from the inlet surface of the throttle part with respect to the hole diameter d of the throttle part. If the structure to be used is adopted, the fluctuation of the instantaneous flow coefficient due to temperature change will be extended while maintaining the size of the throttle hole at a relatively large size (hole diameter) and suppressing the occurrence of clogging etc. We focused on the fact that high-precision constant flow control can be achieved by suppressing instantaneous flow rate fluctuations, and at the same time, cost reduction, weight reduction, compactness, and improvement in productivity can be realized by reducing the number of parts.

  In view of this situation, the throttle unit 150 according to the present embodiment employs a configuration in which the length L in the fluid flow direction of the throttle unit is 1.5 d or less with respect to each throttle hole diameter d.

  As shown in FIGS. 1 and 2, the throttle unit 150 according to the present embodiment is attached to the center of the diaphragm 130 to define the first chamber 120 side and the second chamber 140 side, and the needle valve 150A. And a movable valve body 151 movable so that the gap between the valve seat 170A changes.

  The movable valve body 151 includes a substantially cylindrical cylindrical portion 152 that opens toward the first chamber 120 side, and a lower end wall 153 provided on the lower end side of the cylindrical portion 152 in FIG. The wall 153 is provided with a communication passage 155 that is opened in a part of the lower end wall 153 and extends to the internal space 154 of the cylindrical portion 152 and communicates with the first chamber 120 and the second chamber 140. In addition, the needle valve 150A described above is provided on the second chamber 140 side of the lower end wall 153 so as to protrude downward from the lower end wall 153 so as to extend downward in FIG.

  As shown in FIGS. 1 and 2, the throttle element 200 is inserted into the inner cylindrical portion of the cylindrical portion 152, and the cylindrical portion 152 is interposed through a fixing member 260 in which the passage 261 of the fluid 110 is opened. It is fixed and attached to. Specifically, a screw is cut on the inner circumference of the inner cylinder portion of the cylindrical member 152, and a screw that is screwed to the inner cylinder portion is cut on the outer circumference of the fixing member 260, and the fixing member 260 is attached to the cylindrical portion 152. By tightening, the throttle element 200 is fixedly attached to the seal member 180 (for example, an O-ring) interposed between the lower end wall 153 and the throttle element 200 by predetermined pressing. .

  The sealing material 180 can be made of rubber having a predetermined elastic force, silicon or other resin, or metal such as relatively soft copper. In addition, a liquid sealing agent such as liquid packing can be used as the sealing material 180.

  As shown in FIGS. 3 and 4, the aperture element 200 includes a first passage member 210, a first passage member 220, an opening member 230, a second passage member 240, and a second passage member 250. It is configured to be stacked in this order with respect to the flow direction of the fluid 110. The diaphragm element 200 constitutes the diaphragm device according to the present invention.

  The first passage member 210 is formed by opening an inlet hole 211 through which a fluid flows into a thin disk member.

  The first flow path member 220 is formed by opening, for example, three elongated holes 221, 222, and 223 in a thin disk member. The long hole 221 is disposed so as to face the inlet hole 211.

  As illustrated in the enlarged view of FIG. 5, the opening member 230 is configured by opening five throttle holes 231 to 235 in a thin disk member. The throttle hole 231 is disposed so as to face the long hole 221, the throttle holes 232 and 233 are disposed so as to face the long hole 222, and the throttle holes 234 and 235 are disposed so as to face the long hole 223.

  The second flow path member 240 is formed by opening three elongated holes 241, 242, and 243 in a thin disk member. The long hole 242 is disposed so as to face the throttle holes 231 and 232, the long hole 243 is disposed so as to face the throttle holes 233 and 234, and the long hole 241 is disposed so that the throttle hole 235 faces. .

  The second passage member 250 is formed by opening an outlet hole 251 through which a fluid flows out in a thin disk member. The outlet hole 251 is disposed so as to face the long hole 241.

  In addition, around the inlet hole 211, each throttle hole 231 to 235, and the outlet hole 251, the inlet hole 211 with respect to the long holes 221 to 223 and 241 to 243 arranged facing each other, each throttle hole 231 to 235, and the outlet hole 251 A cylinder that is substantially concentric with the inlet hole 211, each of the throttle holes 231 to 235, and the outlet hole 251, which protrudes from the surface of the disk member and can be accommodated in the corresponding elongated hole so as to ensure positioning and the like. Each protrusion is formed. However, these cylindrical protrusions can be omitted. The cylindrical protrusion is omitted except in FIG.

The first passage member 210, the first passage member 220, the opening member 230, the second passage member 240, and the second passage member 250 as described above are configured by being laminated in this order with respect to the fluid flow direction. The members of the diaphragm 200 are in close contact with each other so as to seal the fluid 110.
The seal between the members can be a seal by the surface pressure between the members, but depending on the use conditions such as the type of fluid used and the pressure, for example, a liquid sealant such as liquid packing may be applied, or O -It is also possible to interpose a sealing material such as a ring.

Therefore, in the aperture element 200 according to the present embodiment, as shown in FIG. 4 (the first passage member 210 and the second passage member 250 are not shown in FIG. 4), the first chamber 120 is provided. The fluid that flows in and is guided through the passage 261 and passes through the inlet hole 211 of the first passage member 210 flows into the flow path (pressure chamber) defined (or formed) by the elongated hole 221 of the first flow path member 220. Will do.
Thereafter, the fluid that has flowed into the flow path passes through the throttle hole 231 that faces the elongated hole 221 and flows into the flow path (pressure chamber) defined by the elongated hole 242.
Next, the fluid that has flowed into the flow path passes through the throttle hole 232 that opens toward the long hole 242, and flows into the flow path (pressure chamber) defined by the long hole 222.
Next, the fluid that has flowed into the flow path passes through the throttle hole 233 that opens toward the long hole 222 and flows into the flow path (pressure chamber) formed by the long hole 243.
Next, the fluid that has flowed into the flow path passes through the throttle hole 234 that opens toward the long hole 243 and flows into the flow path (pressure chamber) formed by the long hole 223.
Next, the fluid that has flowed into the flow path passes through the throttle hole 235 that opens toward the long hole 223 and flows into the flow path (pressure chamber) formed by the long hole 241.
Thereafter, the fluid flows through the outlet hole 251 of the second passage member 250 opened to face the elongated hole 241 and then flows out into the internal space 154 of the cylindrical portion 152.

In addition, as shown in FIG. 5, each throttle hole 231 to 235 according to the present embodiment (the inlet hole 211 and the outlet hole 251 can be formed as a throttle hole and can function as a plurality of throttle holes). A length L in the fluid flow direction with respect to the hole diameter d is formed to be 1.5 d or less from the inlet surface, and a plurality of throttle holes 231 to 235 are arranged on the opening member 230 as one component. Therefore, it is possible to realize the throttle element 200 having a high pressure loss while reducing the influence on the fluid flow rate of the temperature change of the shearing force such as pipe friction in the throttle hole while simplifying the configuration and reducing the weight and size. . For this reason, the size of the throttle hole is maintained at a relatively large size (hole diameter) to suppress clogging and the like, while suppressing fluctuations in the instantaneous flow rate caused by temperature changes and realizing highly accurate constant flow rate control. At the same time, it is possible to simultaneously realize cost reduction, light weight / compactness, and productivity improvement by reducing the number of parts.
By the way, although the case where there are five throttle holes has been described here as a representative, the number of throttle holes can be increased or decreased as necessary.

  Here, returning to the overall configuration diagram of FIG. 1, the overall flow of a fluid that is an object of flow control of the constant flow control device according to the present embodiment will be described.

  In the constant flow control device according to the present embodiment, the fluid that has flowed into the first chamber 120 from the upstream fluid passage 110 passes through the passage 261 of the fixed member 260 and enters the inlet of the first passage member 210 of the throttle element 200. It flows into the hole 211.

  Thereafter, in the throttle element 200, as described above, the fluid is guided to pass through the throttle holes 231 to 235 through the flow paths formed by the long holes 221 to 223 and 241 to 243, so that the fluid After the pressure is reduced to a predetermined level, the fluid flows out from the outlet hole 251 of the second passage member 250.

  The fluid that has passed through the throttle element 200 in this manner flows out into the inner cylinder space 154 of the cylindrical portion 152 and then passes through the communication passage 155 provided in the lower end wall 153 of the cylindrical member 152 to the second portion. It flows out into the chamber 140.

  Then, the fluid passes through the gap between the valve seat 170A and the needle valve 150A having a predetermined throttling effect so that the pressure difference between the first chamber and the second chamber becomes constant, and extends to the outlet passage 170 or downstream. To the fluid passage 110 on the side.

  Further, in the constant flow control device according to the present embodiment, the flow rate of the fluid passing through the constant flow control device is controlled to a predetermined flow rate (target flow rate) as follows.

  That is, from the state where the inflow flow rate of the fluid from the upstream fluid passage 110 to the first chamber 120 and the outflow flow rate that flows out between the valve seat 170A and the needle valve 150A are equal, When the pressure of the fluid flowing into the chamber 120 rises and the pressure difference with the second chamber 140 becomes higher than the set differential pressure, the diaphragm 130 and the movable valve body 151 close the valve closing direction against the elastic force of the coil spring 160. (Downward in FIG. 1). As a result, the gap between the valve seat 170A and the needle valve 150A is reduced, and the pressure difference between the pressure of the fluid flowing into the first chamber 120 and the pressure of the fluid in the second chamber 140 is kept constant. Thus, the flow rate of the fluid passing through the gap is prevented from increasing with an increase in the pressure of the fluid, and functions to maintain the outflow rate constant.

  On the contrary, when the pressure of the fluid flowing into the first chamber 120 decreases, the diaphragm 130 and the movable valve body 151 move in the valve opening direction (upward in FIG. 1). As a result, the gap between the valve seat 170A and the needle valve 150A is increased, and the pressure difference between the pressure of the fluid flowing into the first chamber 120 and the pressure of the fluid in the second chamber 140 is kept constant. Thus, the flow rate of the fluid passing through the gap is suppressed from decreasing with a decrease in the pressure of the fluid, and functions to maintain the outflow rate constant. In this embodiment, the needle valve is a part of the movable valve body, but a needle valve made of a separate part may be integrally attached to the movable valve body. Alternatively, an attachment method that behaves integrally when the pressure difference is controlled may be used.

  As described above, according to the constant flow rate control device according to the present embodiment, in the throttle element 200, a plurality of throttle holes 231 to 235 (the inlet hole 211 and the outlet hole 251 are formed as throttle holes, and these throttle holes are used. Is provided on one opening member 230, and the fluid is passed through the restriction holes in order through the flow path formed by the long holes 221 to 223 and 241 to 243. The pressure loss coefficient of the entire throttle element 200 through which the valve passes can be made relatively large, and when the flow rate is controlled to be the same, the effective area of the throttle hole is increased compared to the conventional constant flow valve. Can do.

  For this reason, according to the constant flow rate control device according to the present embodiment, when the flow rate is controlled to a very small flow rate (for example, when the flow rate is controlled to a very small flow rate of 0.1 kg / min level or a very small flow rate of 0.001 kg / min level). The orifice diameter is small and clogging or the like is likely to occur due to scale, slime, foreign matter, dust, etc., and for example, it is possible to effectively suppress the possibility that regular maintenance is required. For clogging and the like, the shape of the throttle hole of the throttle element 200 is advantageous in terms of clearance with a foreign object or the like, but is not limited thereto. In addition, with conventional constant flow valves that use small-diameter orifices, especially in the case of pure water, there is a risk that the bacteria will proliferate and clog the orifice when contaminated with bacteria, but such concerns are also effective. Can be suppressed.

  Further, according to the present embodiment, the diameter of the aperture hole of the aperture element 200 can be made relatively large, so that the processing can be facilitated, so that the yield is good, and the productivity, product quality, etc. Improvements can be achieved and, in turn, cost reduction can be promoted.

  Furthermore, in this embodiment, each of the throttle holes 231 to 235 (the inlet hole 211 and the outlet hole 251 can be formed as throttle holes and can function as a plurality of throttle holes) is fluidized with respect to the hole diameter d. Since the length L in the flow direction is 1.5 d or less from the entrance surface and a plurality of throttle holes 231 to 235 are arranged on the opening member 230 as one part, the configuration is simplified. While reducing the weight and size, it is possible to realize the throttle element 200 having a high pressure loss while reducing the influence of the temperature change of the shearing force such as pipe friction in the throttle hole on the fluid flow rate. For this reason, the size of the throttle hole is maintained at a relatively large size (hole diameter) to suppress clogging and the like, while suppressing fluctuations in the instantaneous flow rate caused by temperature changes and realizing highly accurate constant flow rate control. At the same time, it is possible to realize cost reduction, light weight and compactness, and improvement of productivity by reducing the number of parts.

In the present embodiment, the first passage member 210, the first passage member 220, the opening member 230, the second passage member 240, and the second passage member 250 of the aperture element 200 are manufactured by etching (for example, etching processing). In this case, a stainless material can be used as an example of the material of these members), and further, it can be integrally configured as an assembly product having a drawing function by diffusion bonding or the like. The assembly process of the constant flow rate control device can be simplified, and the control flow rate inspection can be performed with a single throttle element, and the inspection process can be simplified.
The bonding method is not limited to diffusion bonding, and other bonding methods such as thermocompression bonding, ultrasonic welding, heat welding, bonding with an adhesive, and the like can be used.

  For example, if the flow rate inspection is performed in the final product form, the parts such as the disposal of the parts, the separation, and the investigation of the defective part are wide when the defect is detected. By enabling the flow rate inspection in a state where functional parts are assembled (that is, an assembly product having the above-described throttling function), it is possible to detect defects in the functional parts alone, and there is no adverse effect on subsequent processes. Therefore, productivity can be improved by reducing man-hours and reducing the risk of assembly of defective parts.

  Further, since the throttle element 200 is functionalized as a single unit, it is possible to inspect the throttle characteristics (pressure loss) independently without being incorporated into a product. Therefore, even when the fluid is water, it is possible to substitute for air characteristic inspection in the atmosphere without assembling the process to ensure water tightness, and there is no need for a drying process after the water flow inspection. It also has the effect of. Further, as shown in FIG. 8, the throttle element integrally attached to the throttle unit 150 is arranged on the downstream side of the throttle element 200 on the first flow path member 220, the opening member 230, the second flow path member 240, and the second passage. A multiplexing element in which the members 250 are stacked in this order can be stacked, and a plurality of aperture elements 200 can be stacked as shown in FIGS. 9 and 10.

  By the way, although the form which fixes the fixing member 260 by screwing is shown in FIG. 1, FIG. 2, the fixing system by heat welding (FIG. 11), the fixing system by ultrasonic welding (FIG. 12), and fixing by a snap fit A method (FIG. 13), a fixing method using a ring stopper (FIG. 14), a fixing method using an external tooth washer (FIG. 15), a caulking method, and the like may be employed.

  Here, FIG. 7 shows experimental data in the case where the constant flow rate control device is designed under the condition of an outer shape of 50 mm × 50 mm or less, for example. From FIG. 7, for example, when the flow rate data near 5 ° C. is used as a reference, the flow rate fluctuation rate with respect to the reference around 65 ° C. is the same as that of the three pipe-like throttle structure described in Japanese Patent Application No. 2007-069377. The flow rate control device (without the temperature compensation mechanism) increases about 130%, while the constant flow rate control device according to the present invention (when 13 throttling holes are provided) increases about 13%. It has been confirmed that the influence of temperature on the flow rate control characteristic can be effectively improved by the present invention.

  In addition, although the present Example demonstrated the case where the flow path defined by the long holes 221-223 and 241-243 was functioned as a pressure chamber, it is not restricted to this, In use conditions etc. with a small change of fluid temperature Can be made to function as a throttle by reducing the effective area of the flow path.

Next, a second embodiment of the present invention will be described.
The second embodiment differs from the constant flow control device described in the first embodiment in the structure of the throttle element provided in the throttle unit 150 as shown in FIGS. 16 and 17.
Accordingly, the aperture elements having different configurations will be described in detail. Elements similar to those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

  In the second embodiment, a diaphragm element 300 is employed as the diaphragm element of the diaphragm unit 150 instead of the diaphragm element 200 according to the first embodiment. As illustrated in FIGS. The inlet side member 320 in which the first passage member 210 and the first flow path member 220 in the first embodiment are integrally formed, the opening member 330, the second flow path member 240, and the second passage member 250 are integrally formed. And an outlet-side member 340 formed in the shape.

  The throttle element 300 is attached and fixed to the cylindrical portion 152 via a fixing member 360 in which a passage 361 for the fluid 110 is opened. In this embodiment, the snap-fit method is exemplified as the fixing method. Specifically, as shown in FIG. 16, a snap-fit groove is formed in the cylindrical member 152, and the snap-fit groove is fixed to the snap-fit groove. By engaging a snap fit portion that is substantially integrally formed with the member 360 and has a predetermined elastic force, the diaphragm element 300 is fixed while being pressed against the lower end wall 153 in a predetermined manner.

  The inlet side member 320 has an inlet hole 311 through which a fluid flows, and the outlet side member 340 has an outlet hole 351 through which a fluid flows out.

  The opening member 330 is provided with a plurality of apertures that function in the same manner as described in the first embodiment, and also function in the same manner as the long holes described in the first embodiment and flow into the opening member 311. A plurality of long grooves 321 forming a passage for allowing the fluid to flow out from the outlet hole 351 by guiding the fluid to be discharged to one throttle hole and sequentially leading the fluid flowing out from the one throttle hole to the other throttle hole, 341 is engraved on the lower surface of the inlet side member 320 and the upper surface of the outlet side member 340.

  In this embodiment, for example, when the fluid used is water, the inlet side member 320 and the outlet side member 340 are formed of an elastic body such as rubber or urethane, so that the first chamber 120 and the second chamber 140 are formed. Thus, the sealing material (O-ring or the like) 180 used in the first embodiment can be omitted. However, the present invention is not limited to this, and the inlet side member 320 and the outlet side member 340 can be made of metal, resin, or the like when a predetermined sealing property corresponding to the fluid used can be achieved.

Next, Embodiment 3 of the present invention will be described.
The third embodiment differs from the constant flow control device described in the first embodiment in the throttle elements provided in the throttle unit 150 as shown in FIGS. 18 and 19.
Accordingly, as a detailed description of the aperture element, elements similar to those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

  In the third embodiment, a diaphragm element 400 is employed as the diaphragm element of the diaphragm unit 150 instead of the diaphragm element 200 and the fixing member 260 according to the first embodiment. This diaphragm element 400 is illustrated in FIGS. 18 and 19. As described above, the first passage member 210, the first flow path member 220, the opening member 230, the second flow path member 240, and the second passage member 250 in the first embodiment are stacked, and insert molding or outsert is performed on the fixing member 410. It is configured to be supported so as to enclose the outer peripheral portion thereof by molding or the like.

  In the present embodiment, as an example of a method of fixing the diaphragm element 400 to the cylindrical portion 152 of the diaphragm 150, an ultrasonic bonding method is employed as shown in FIG. 19, but the present invention is not limited to this. For example, as shown in FIGS. 20 and 21, a snap-fit groove is formed in the cylindrical portion 152 of the movable valve body 151, and the snap-fit groove is substantially integrally formed with the fixing member 410 and has a predetermined elastic force. By engaging the snap-fit portion having the above, the throttle element 400 and the inside of the cylindrical portion 152 can be fixed via the sealing material 180 while securing a predetermined sealing property.

  Also in this embodiment, a fixing method using a screw (see FIG. 1 and the like), a fixing method using heat welding (see FIG. 11 and the like), a fixing method using a snap ring (see FIG. 14 and the like), and a fixing method using an external tooth washer. (See FIG. 15 and the like), a caulking method (see FIG. 22 and the like), and the like can also be employed.

  By the way, the aperture element 400 according to the present embodiment joins the first passage member 210, the first flow path member 220, the opening member 230, the second flow path member 240, and the second passage member 250 manufactured by, for example, etching. In a state before the molding, these are overlapped at the time of molding and insert molding, outsert molding or the like is performed so as to be integrally molded (for example, integrally molded) with the fixing member 410 and manufactured as a drawing module. The molding at this time can be molding using rubber, urethane, silicon or other resin molding, or aluminum or other metal material.

  The first passage member 210, the first passage member 220, the opening member 230, the second passage member 240, and the second passage member 250 are joined in advance (in addition to diffusion joining, thermocompression bonding, ultrasonic welding, thermal welding, adhesion) It is also possible to use a diaphragm module in which the fixing member 410 is integrally molded by insert molding or outsert molding.

  By the way, as shown in FIG. 27, the plurality of first flow members 210 are formed on the thin blank while being supported by the thin support portions by the etching process or the punching process. The plate on which the path member 220 is formed, the plate on which the plurality of opening members 230 are formed similarly, the plate on which the plurality of second flow path members 240 are formed similarly, and the plurality of second passage members 250 in the same manner A plurality of fixing members 410 are simultaneously formed by performing insert molding, outsert molding, or the like in a state where these plates are overlapped, and the fixing members 410 are individually formed after molding. It is also possible to adopt a production method that separates into a finished product.

Next, a fourth embodiment of the present invention will be described.
In the fourth embodiment, as shown in FIG. 22, for example, the throttle element 200 is fixed to the movable valve body 151 by direct heat caulking, for example.
As described above, if the throttle element 200 is fixed by heat caulking with the movable valve body 151, the number of parts is reduced, and as a result, the number of assembly steps is reduced. The simplification and simplification of the product is promoted, and the product cost can be further reduced.

Next, a fifth embodiment of the present invention will be described.
In the fifth embodiment, as shown in FIGS. 23 and 24, the fixing member 360 having the snap fit portion described in the second embodiment and the inlet side member 320 are integrally formed, and the outlet side member 340 and the movable valve are integrally formed. An example in which the aperture 150 is configured by integrally forming the lower end 153 of the body 151 and interposing an opening member 330 therebetween is shown.

Next, a sixth embodiment of the present invention will be described.
As shown in FIGS. 25 and 26, the sixth embodiment includes the throttle element 200 similar to that of the first embodiment, but the method for attaching and fixing the throttle element 200 to the cylindrical portion 152 of the movable valve body 151 is different. .

  That is, in this embodiment, when the elastic member 500 such as a coil spring is interposed between the fixed member 260 and the first passage member 210 and the fixed member 260 is attached to the movable valve body 151 and fixed, The diaphragm element 200 is fixed while being pressed against the lower end wall 153 by the elastic force of the member 500.

  With such a configuration, the first passage member 210, the first flow path member 220, the opening member 230, the second flow path member 240, the second passage member 250, and the like are formed of a material that is difficult to bond or a material that is weak against heat. Therefore, such a method is effective in securing the seal surface pressure of each part.

  The sealing material 180 shown in FIGS. 1, 2 and the like has a predetermined elastic force and can perform the same function. For example, depending on the type of fluid used when the sealing material 180 is employed. Even when there is a possibility that the sealing material 180 swells or passes, according to the present embodiment, it is possible to stably maintain the sealing surface pressure of each part over a long period of time.

By the way, according to the second to sixth embodiments of the present invention described above, as described in the first embodiment, the throttle portion in which the flow direction length of the throttle portion is 1.5 d or less is adopted, and the throttle portion is Since the pressure loss coefficient is increased by providing a plurality of times of contraction and increasing the pressure loss coefficient, the effective stage area of the throttle element can be increased while suppressing the temperature effect as compared with the conventional constant flow valve.
In addition, since a configuration in which a plurality of throttle holes are arranged on an opening member, which is a single part, is adopted, fluid flow rate due to temperature change of shearing force such as pipe friction in the throttle holes while simplifying the configuration and reducing the weight and size. It is possible to realize a throttle element with high pressure loss while minimizing the effect on the pressure, so that the size of the throttle hole is maintained at a relatively large size (hole diameter) and the occurrence of clogging and the like is suppressed. It is possible to achieve high-accuracy constant flow control by suppressing instantaneous flow rate fluctuations, and at the same time, reduce costs by reducing the number of parts, reduce weight and size, and improve productivity.

  According to each embodiment of the present invention, when the flow rate is controlled to be a minute flow rate, the orifice diameter is small and clogging or the like is likely to occur due to scale, slime, foreign matter, dust, etc., for example, periodic maintenance is required. Can be effectively suppressed. For clogging and the like, the shape of the throttle hole of the throttle element 200 is advantageous in terms of clearance with a foreign object or the like, but is not limited thereto. In addition, with conventional constant flow valves that use small-diameter orifices, especially in the case of pure water, there is a risk that the bacteria will proliferate and clog the orifice when contaminated with bacteria, but such concerns are also effective. Can be suppressed.

  Further, according to each of the embodiments of the present invention, the diameter of the throttle hole of the throttle element can be made relatively large, so that the processing can be facilitated, and thus the yield is good, and the productivity and product are improved. It is possible to improve the quality and the like and to promote cost reduction.

  When the first passage member 210, the first passage member 220, the opening member 230, the second passage member 240, and the second passage member 250 are integrally joined by diffusion joining or the like, all elements As shown in FIG. 27A, at least two adjacent ones of the elements can be integrally joined (molded or formed) as well.

By the way, in each of the above-described embodiments, the case where the throttle device according to the present invention is used for the constant flow rate control device has been described, but the present invention is not limited to this, and the throttle unit such as a flash valve, an on-off valve, a proportional valve, etc. Is also applicable.
The embodiments described above are merely examples for explaining the present invention, and various modifications can be made without departing from the scope of the present invention.

  Although the present invention is relatively inexpensive, simple and compact, it is easy to process and excellent in productivity. Even with a high pressure loss throttle, it is maintenance-free by suppressing occurrence of clogging, etc. By restricting changes in the flow coefficient, it is possible to maintain the throttling function with high accuracy, thereby ensuring both productivity and reliability and improving the throttling function with high accuracy. In addition to the throttle part of the apparatus, it is useful as a mechanism for a fluid throttle part used for a flash valve, an on-off valve, a proportional valve, or the like.

It is sectional drawing which shows the whole structure of the constant flow control apparatus which concerns on Example 1 of this invention. It is the perspective view which isolate | separated each element of FIG. 1, and showed the cross section roughly. It is a perspective view which expands and shows the aperture element of an Example same as the above. It is a perspective view for demonstrating the flow of the fluid in the aperture | throttle element of an Example same as the above. It is a perspective view which shows the structural example of the aperture hole of an Example same as the above. It is a figure for demonstrating the flow of the fluid in an aperture hole. It is the figure (experimental result) which compared the flow volume change by the temperature of this invention and the conventional apparatus. It is a perspective view which shows the structural example of the multiplexed aperture element of an Example same as the above. It is sectional drawing which shows the structural example at the time of overlapping the aperture element of an Example same as the above. It is the perspective view which isolate | separated each element of FIG. 9, and showed the cross section roughly. It is sectional drawing which showed an example of the heat welding system. It is sectional drawing which showed an example of the ultrasonic bonding system. It is sectional drawing which showed an example of the snap fit system. It is sectional drawing which showed an example of the snap ring system. It is sectional drawing which showed an example of the external tooth washer system. It is the perspective view which isolate | separated each element of the constant flow control apparatus which concerns on Example 2 of this invention, and showed the cross section roughly. It is sectional drawing which shows the whole structure of the constant flow control apparatus which concerns on an Example same as the above. It is the perspective view which isolate | separated each element of the constant flow control apparatus (ultrasonic bonding system) which concerns on Example 3 of this invention, and showed the cross section roughly. It is sectional drawing which shows the whole structure of the constant flow control apparatus (ultrasonic bonding system) which concerns on an Example same as the above. It is the perspective view which isolate | separated each element of the constant flow control apparatus (snap fit system) based on an Example same as the above, and showed the cross section roughly. It is sectional drawing which shows the whole structure of the constant flow control apparatus (snap fit system) which concerns on an Example same as the above. It is sectional drawing which shows the whole structure of the constant flow control apparatus which concerns on Example 4 of this invention. It is the perspective view which isolate | separated each element of the constant flow control apparatus which concerns on Example 5 of this invention, and showed the cross section roughly. It is a perspective view of the fixing member which concerns on an Example same as the above. It is sectional drawing which shows the structural example of the conventional constant flow valve. It is the perspective view which isolate | separated each element of the constant flow control apparatus which concerns on Example 6 of this invention, and showed the cross section roughly. It is sectional drawing which shows the whole structure of the constant flow control apparatus which concerns on an Example same as the above. It is a figure explaining an example of the assembly method of an aperture element. It is a perspective view for demonstrating the joining example of the member which comprises an aperture element. It is a schematic diagram for demonstrating the relationship between the flow volume and orifice diameter in a constant flow valve. It is sectional drawing which shows the structural example of the conventional constant flow valve.

Explanation of symbols

DESCRIPTION OF SYMBOLS 110 Fluid path 120 1st chamber 130 Diaphragm 140 2nd chamber 150 Restriction part 150A Needle valve 151 Movable valve body 160 Coil spring 170A Valve seat 180 Seal material 200 Restriction element 210 First passage member (inlet side)
211 Inlet hole 220 First flow path member 221 to 223 Elongated hole 230 Opening member 231 to 235 Restriction hole 240 Second flow path member 241 to 243 Elongated hole 250 Second passage member (outlet side)
251 Exit hole 300 Throttle element 400 Throttle element 500 Elastic member

Claims (8)

A throttling device that is interposed in a fluid passage and applies pressure loss to the fluid flowing through the fluid passage through a throttling hole,
An opening member having a plurality of aperture holes opened;
A first flow path member for forming a plurality of elongated hole-like pressure chambers corresponding to the throttle holes so that fluid sequentially passes through the plurality of throttle holes;
To form a plurality of elongated hole-like pressure chambers corresponding to the throttle holes, which are arranged on the opposite side of the first flow path member with the opening member interposed therebetween, so that fluid sequentially passes through the plurality of throttle holes. A second flow path member of
An inlet for allowing fluid to flow into one pressure chamber of the first flow path member from the upstream side of the fluid passage is provided so as to cover one surface of the first flow path member so that the fluid does not flow out to other than a predetermined path. A first passing member disposed;
A discharge port for allowing fluid to flow out from one pressure chamber of the second flow path member to the downstream side of the fluid passage, and covering one side of the second flow path member so that the fluid does not flow outside a predetermined path A second passage member arranged as follows:
A diaphragm device comprising:   The throttle device is configured to be able to apply a predetermined pressure loss while maintaining an effective area of the throttle hole at a predetermined level or more by adjusting the number of the plurality of throttle holes. 2. The diaphragm apparatus according to 1.   The throttling device according to claim 1 or 2, wherein at least one of the introduction port or the discharge port functions as a throttling hole.   2. The restriction hole is formed such that a flow direction length of a fluid in the restriction hole is 1.5 d or less with respect to a diameter d of a circle having the same area as the effective area of the restriction hole. The diaphragm apparatus according to any one of claims 3 to 4.   The first passage member, the first passage member, the opening member, the second passage member, and the second passage member are laminated in this order, and at least two adjacent members are integrally configured. The diaphragm apparatus according to any one of claims 1 to 4, characterized in that:   The first passage member, the first flow path member, the opening member, the second flow path member, and the second passage member are configured as a diaphragm module formed integrally. 5. The aperture device according to any one of 5 above. The first passage member, the first flow path member, the opening member, the second flow path member, and a throttle element configured by laminating the second passage member in this order,
At least one multiplexing element in which the first flow path member, the opening member, the second flow path member, and the second passage member are stacked in this order is connected to the downstream side of the throttle element. The diaphragm device according to any one of claims 1 to 6.   That at least two adjacent ones of the first passage member, the first passage member, the opening member, the second passage member, and the second passage member are integrally molded or formed. The diaphragm apparatus according to any one of claims 1 to 7, characterized in that: