JP2010014705A - Three-dimensional refractive index measuring method and three-dimensional refractive index measuring instrument - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To solve the problem wherein retardation of a thin film prepared on a transparent substrate is rippled by influence of multiplex interference in the thin film to the wavelength, and is insufficient as basic data for calculating three-dimensional refractive index for each wavelength or wavelength dependence of it. <P>SOLUTION: This three-dimensional refractive index measuring method of a thin film comprises a step of using a transparent substrate for which the reflectivity from the thin film formed on it is as low as possible, making linearly polarized light come into it perpendicularly, and determining the optical axis of the thin film in the plane, a step of making a monochromatic polarized light traveling in the plane that includes the optical axis and is perpendicular to the thin film come into the thin film at a plurality of, at least three or more, incident angles &phiv;i, and determining retardation R(&phiv;i), a step of determining calculating formula R(&phiv;i;n<SB>x</SB>,n<SB>y</SB>,n<SB>z</SB>,&beta;) of the three-dimensional refractive index, and a step of determining n<SB>x</SB>, n<SB>y</SB>, n<SB>z</SB>and &beta; using the retardation R(&phiv;i) and calculating formula R so that (R(&phiv;i)-R(&phiv;i;n<SB>x</SB>,n<SB>y</SB>,n<SB>z</SB>,&beta;))2 becomes as small as possible. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

  The present invention relates to the measurement of the three-dimensional refractive index of optically anisotropic transparent (transparent or translucent) materials, in particular retardation films, color filters and general stretched films used for liquid crystal display devices, etc. The present invention relates to a three-dimensional refractive index measurement method.

The liquid crystal display device is a display element that utilizes the birefringence of liquid crystal molecules, and includes a liquid crystal cell, a polarizing element, and an optical compensation layer. Liquid crystal display devices are roughly classified into two types according to the type of light source: a transmissive type having a light source inside and a reflective type having a structure using an external light source. The transmissive liquid crystal display device has a configuration in which two polarizing elements are attached to both sides of a liquid crystal cell, and one or two optical compensation layers are disposed between the liquid crystal cell and the polarizing element. In the reflective liquid crystal display device, the reflector, the liquid crystal cell, one optical compensation layer, and one polarizing element are arranged in this order.
In a liquid crystal cell, rod-like liquid crystal molecules sandwiched between two substrates are aligned and sealed, and a rod-like liquid crystal is formed by applying a voltage to the electrode layers disposed on both sides or one side of the opposing substrate inner surface. This is a mechanism for switching light transmission / light-shielding by changing the orientation state of the active molecule.

  In recent years, liquid crystal display devices have been evaluated for their space-saving, light-weight, and power-saving properties due to their thinness, and at the same time they are rapidly expanding as televisions, and at the same time display performance such as brightness, contrast, and visibility in all directions. There is a strong demand for higher levels.

In response to such demands, it is necessary to further optimize the birefringence of optical elements such as optical compensation layers and color filters used in the liquid crystal display device according to the liquid crystal display mode. In an IPS (In Plane Switching, lateral electric field) mode liquid crystal display device having good display characteristics in a high viewing angle range, for example, a three-dimensional main refractive index _nx , _ny , n _z to, biaxial retardation film having a refractive index ellipsoid of n _x ≧ n _y ≧ n _z is used (e.g., see non-Patent Document 1). In addition, two biaxial λ / 2 wavelength plates with different _nz sizes are used to compensate for each other's wavelength dispersion, thereby reducing the light leakage in the visible light region in black display and reducing the field of view. An angular IPS liquid crystal display device is disclosed (for example, see Non-Patent Document 2).

  In addition, since the birefringence of the color filter affects the visibility of the liquid crystal display device, it is pointed out that it is necessary to control the thickness direction retardation for each of the red, green and blue colored pixels of the color filter. (For example, refer to Patent Document 1).

  As an apparatus for measuring the birefringence of an optical element such as an optical compensation layer or a color filter, anisotropy of the sample is detected by detecting a polarization state when light is transmitted through the sample or reflected on the surface thereof. Various devices such as birefringence measuring devices that measure optical constants and devices called transmission polarimetry by the photoelastic modulation method are commercially available, and those that suit the intended use are selected and used be able to. (For example, refer to Patent Documents 2 and 3).

Using the above measurement apparatus, the refractive index or birefringence of an optical element used in a liquid crystal display device or the like is only in a plane perpendicular to the optical element (hereinafter referred to as a sample for simplicity). In recent years, it has become necessary to precisely evaluate and manage the state of light transmission from various directions, and the three-dimensional refractive index of the optical element (three axes perpendicular to the refractive index ellipsoid). length of: _{n x,} n y, it is required to n _z) accurately measured.

  Usually, as a method for obtaining a three-dimensional refractive index, a method is employed in which a sample is cut in three orthogonal directions and the refractive index or birefringence in each plane is measured. At least one layer is formed on a transparent substrate. In the case of a sample in which the above thin film is formed, particularly a retardation film used as an optical compensation layer and an optical element such as a color filter, it is possible to produce a plate-like solid sample in such three orthogonal directions. It is extremely difficult. Further, the values of the thin film and the bulk do not always match.

  Therefore, for an optical element for a liquid crystal display device, it is necessary to directly measure the thin film on the transparent substrate as it is and evaluate the three-dimensional refractive index under an appropriate approximation. A serious problem arises in that multiple interference occurring between the transparent substrate and the thin film affects the measurement result.

  Hereinafter, this point will be described. First, the suitability of the multiple reflection theory for a multilayer film will be described.

  As shown in FIG. 1, there is a thin film 2 having a thickness d1 and a refractive index n1 = n1-ik1 on a substrate 1 having a thickness d2 and a refractive index n2 = n2-ik2, and is incident from a medium having a refractive index n0. Assuming that light is incident at an angle φ0 (part 3 in the figure), the amplitude reflectances Rp and Rs for the component (p component) parallel to the incident surface of the electric vector of the incident light and the component (s component) perpendicular to the incident surface at this time. In general, it is known that the transmittances Tp and Ts are expressed by the following formula (3) in consideration of the multiple reflection (portion 4 in the figure) inside the film (for example, Non-Patent Document 3). reference).

  In Equation (3) and FIG. 1, r1, t1 and r2, t2 are the Fresnel coefficients of reflection and transmission at the medium / film and film / substrate interfaces, respectively.

  However,

  The Fresnel coefficient of transmission is calculated using the Fresnel coefficient of reflection.

で表される。λは真空中での光の波長、φ１、φ２は膜および基板内における屈折角で、Ｓｎｅｌｌの法則より、

It is represented by λ is the wavelength of light in vacuum, φ1 and φ2 are refraction angles in the film and substrate, and from Snell's law,

  Is a complex number.

  Therefore, in principle, the reflectance Rp, Rs, transmittance Tp, and Rs are measured for unknown variables, and the simultaneous equations are solved to obtain a three-dimensional refractive index that does not include an approximation that incorporates multiple interference. However, solving these simultaneous equations is not easy in practice and impossible in practice. Hereinafter, n1 and n2 indicate complex refractive indexes unless otherwise specified.

  Next, as a method for obtaining the three-dimensional refractive index of the color filter without depending on the above Fresnel relational expression, there is a method based on a retardation value that can be directly measured, and this is applied to the red colored composition layer on the glass substrate. Describes the problems found when applied.

A transparent substrate 1 in FIG. 1 is formed with a non-alkali glass substrate having a thickness of 0.7 mm, which is generally used in a liquid crystal display device, and a thin colored film 2 is formed with red colored pixels of a color filter of the liquid crystal display device. A sample for measurement was prepared using the red coloring composition used for this purpose.
FIG. 2 shows a graph in which the spectral transmittance (T) of the red colored composition layer at this time is plotted on the vertical axis and the wavelength (λ) of light is plotted on the horizontal axis.
Using a spectroscopic ellipsometer (M-200 manufactured by JASCO Corporation), the sample surface is irradiated with polarized light having a wavelength of 400 nm to 780 nm from an angle of incidence of 45 degrees and 90 degrees to the thin film on which the red coloring composition is formed. Thus, FIG. 3 shows a measurement result of chromatic dispersion when the retardation (Re) calculated from the obtained ellipso parameter Δ is plotted on the vertical axis and the wavelength (λ) of light is plotted on the horizontal axis.

  Here, when the light wavelength (λ) is plotted on the horizontal axis and the refractive index (n) is plotted on the vertical axis, the chromatic dispersion of the retardation of the substance is such that, if there is no anomalous dispersion, the magnitude of the inclination is closer to the shorter wavelength side. It is generally known that the curve is large. It is known that this property is derived from Cauchy's dispersion formula, and based on this, the chromatic dispersion of retardation (FIG. 3) should also be a curve that changes monotonically (increases or decreases) at each wavelength. .

  From FIG. 2, the red colored composition layer shows a flat transmittance of 80% or more from around 600 nm to around 700 nm. Therefore, it is expected that the wavelength dispersion of retardation follows the Cauchy dispersion formula in this wavelength region. On the other hand, the wavelength dispersion of the retardation in FIG. 3 is a result of undulation from around 600 nm to around 700 nm.

  That is, due to the multiple interference that occurs between the transparent substrate and the thin film, the above-described waveform wavy phenomenon appears, indicating that the retardation has not been evaluated correctly. Therefore, when the three-dimensional refractive index is calculated based on this experimental result, the obtained three-dimensional refractive index includes many errors.

  As another example, a transparent film made of triacetyl cellulose (hereinafter sometimes referred to as “TAC”) is used for the transparent substrate 1 of FIG. 1, and a polymerizable liquid crystal material having birefringence anisotropy is used for the thin film 2. The result of wavelength dispersion measurement of retardation (Re) measured from the direction of incident angle of 45 degrees of the used sample is shown in FIG. Even in this case, it can be confirmed that the influence of multiple interference appearing between the transparent substrate and the thin film appears.

JP 2007-279379 A JP-A-1-216235 Japanese Patent Laid-Open No. 2005-3386

SID Digest, 1094. (2000) Stone pots, Jpn. J. et al. Appl. Phys. 41, 4553 (2002) Fujiwara, “Spectroscopic Ellipsometry” Maruzen (2003) Wu et al., Jpn. J. et al. Appl. Phys. 39, 869 (2000)

  The three-dimensional refractive index and wavelength dependency of optical elements used in liquid crystal display devices such as optical compensation layers and color filters need to be evaluated in a thin film state of several μm in thickness. It is not appropriate to create, cut out and evaluate. Moreover, even if it is possible in principle, it is difficult in practice to measure the reflectance and transmittance of the multilayer thin film and calculate them using the Fresnel equation. For this reason, retardation measurement capable of highly accurate experimental measurement is performed, and a three-dimensional refractive index is derived from this data by some approximation.

  However, the retardation of a thin film formed on a transparent substrate is a wave that is affected by multiple interference in the thin film with respect to the incident angle or wavelength with respect to the thin film, as described above, in the conventional simple measurement method. Thus, there is a problem that the three-dimensional refractive index is incomplete for each wavelength or as basic data for calculating the wavelength dependence. In addition, in the conventional measurement method, the analysis is mostly made only when the principal axis of the refractive index ellipsoid of the sample as shown in FIG. 7A is coincident with Nx, Ny, Nz in the reference coordinate system. With respect to the means for obtaining the three-dimensional refractive index when the principal axes Nx ′, Ny ′, Nz ′ of the refractive index ellipsoid of the sample as shown in FIG. 7B do not coincide with the laboratory coordinate systems Nx, Ny, Nz. Was hardly studied. Therefore, the present invention provides a means for suppressing retardation from undulating with respect to the incident angle or wavelength with respect to the thin film, and calculates the three-dimensional refractive index with high accuracy even when the principal axis of the refractive index ellipsoid of the sample is inclined. The challenge was to make it possible.

The invention according to claim 1 for achieving the above object is as follows.
At least 1. for the thin film formed on the transparent substrate. Determining the in-plane optical axis of the thin film by vertically injecting linearly polarized light;
2. Allowing the linearly polarized light including the optical axis and traveling in a plane perpendicular to the thin film to enter the thin film at at least three or more incident angles φi to obtain a retardation R (φi);
Formula 3.3 dimensional refractive index _{R (φi; n x, n} y, n z, β) step of determining a
4). The retardation R (.phi.i) and formulas _{R (φi; n x, n} y, n z, β) as ρ of the formula (1) is as small as possible with _{a, n x, n y, n} z, obtaining β,
In a three-dimensional refractive index measurement method having:
The method of measuring a three-dimensional refractive index of a thin film, characterized in that the retardation R (φi) is measured using a transparent substrate having a reflectance as small as possible from the thin film.

(Here, i is the angle of inclination with respect to an integer of 3 or _{more, n x, n y, n} z is three orthogonal components of the refractive index ellipsoid of the thin film, beta is xyz axial directions in the refractive index ellipsoid of the film .)
When a transparent substrate is used so that the reflectance from the thin film is as small as possible, the amount of incident polarized light that travels backward as reflected light is reduced, and the phenomenon of retardation rippling is suppressed.

  The invention according to claim 2 is a refractive index satisfying | n 2 −n 1 | ≦ 0.1, where n 2 is the refractive index of the transparent substrate and n 1 is the refractive index of the outermost layer thin film formed on the transparent substrate. 2. The method for measuring a three-dimensional refractive index of a thin film according to claim 1, wherein a transparent substrate having the above is used.

  When the refractive index difference between the transparent substrate and the thin film is set in the above range, the effect of suppressing the phenomenon of retardation waving becomes extremely remarkable.

According invention in claim 3, wherein the 3 approximate expression for dimensional refractive index _{R (φi; n x, n} y, n z, β) is, according to claim 1, characterized by being represented by the following formula (2) Alternatively, the three-dimensional refractive index measurement method according to claim 2.

(Where i, _nx , _ny , and _nz are the same as in equation (1). Also, in equation (2), θ, d are known parameters, and β is each axis of xyz in the refractive index ellipsoid of the thin film. (Inclination angle with respect to direction)
The above formula gives a calculation formula that links the angle at which linearly polarized light for measuring retardation enters the thin film and the three-dimensional refractive index of the thin film. Although this is an example and it is not necessary to specifically limit it, the above formula can also be applied to the case where the refractive index ellipsoid of the thin film is tilted from one predetermined axis of the reference coordinate axis.

The invention according to claim 4 is the method for measuring a three-dimensional refractive index according to claim 3, wherein the refraction angle of the refraction angle in the direction of incidence on the incidence surface is θ ₁ , and the refraction angle in the direction outside the incidence surface is θ _2. A method for measuring a three-dimensional refractive index, including a step of obtaining a three-dimensional refractive index using a refraction angle θ of a sample expressed by the equation (4).

However, θ ₁ is the refraction angle represented by the equation (5), θ ₂ is the refraction angle represented by the equation (6), the incident angle is Φ, the refraction angle in the sample of the polarized light is θ, and x in the refractive index ellipsoid of the sample. The inclination angle with respect to the axial direction is β, and n ′ is the refractive index in the incident surface represented by the equation (7).

  The invention according to claim 5 is a step for obtaining the retardation R (φi) according to claim 1, and sequentially for the same thin film formed on k transparent substrates having different refractive indexes (k ≧ 2). Retardation Rk (φi) is obtained, and for each φi, the retardation Rk (φi) corresponding to the transparent substrate having the minimum reflectance at φi is selected from the k retardations Rk (φi). 2. The three-dimensional refractive index measurement method according to claim 1, wherein R ([phi] i) is set.

  Among the measured values of retardation R (φi) for each thin film formed on a plurality of transparent substrates having different refractive indexes, retardation R (corresponding to the transparent substrate having the lowest reflectance (highest transmittance) ( The φi) value is a highly reliable value with little influence of multiple interference. The number k of transparent substrates is preferably about 4.5.

The invention according to claim 6 is:
At least 1. for the thin film formed on the transparent substrate. Means for obtaining an in-plane optical axis of the thin film by vertically incidence of linearly polarized light;
2. Means for determining retardation R (φi) by causing linearly polarized light traveling in a plane including the optical axis and perpendicular to the thin film to enter the thin film at a plurality of incident angles φi of at least three or more;
3.3 dimensional refractive index formula _{R (φi; n x, n} y, n z, β) means for determining a
4). The retardation R (.phi.i) and formulas _{R (φi; n x, n} y, n z, β) as ρ of the formula (1) is as small as possible with a, n _x, n _y, and n _z A three-dimensional refractive index measuring device.

(Here, i is the angle of inclination with respect to an integer of 3 or _{more, n x, n y, n} z is three orthogonal components of the refractive index ellipsoid of the thin film, beta is xyz axial directions in the refractive index ellipsoid of the film .)
It is.

If it is such a device configuration, first, the plurality of retardation values obtained by changing the incident angle of the incident light, formula R (.phi.i) retardation theoretically calculated from _{R (φi; n x, n} y , _Nz , β), the three-dimensional refractive index _nx , _ny , _nz of the thin film formed on a specific transparent substrate is determined so as to minimize the difference between the transparent substrate and the thin film. Can be averaged. Next, the refractive index of the thin film on another transparent substrate can be obtained in the same procedure. In this way, the refractive indexes of the plurality of thin films on the substrate can be obtained sequentially. The refractive indices n _x corresponding to the case the smallest reflectance (when the highest transmittance is) for a wavelength, n _y, and singled out n _z, it may be a value for obtaining this. By repeating this for each wavelength, the wavelength dependence of the three-dimensional refractive index can also be determined. Alternatively, the wavelength may be swept first with respect to one transparent substrate, and then the substrate may be replaced.

Invention according to claim 7, wherein the 3 approximate expression for dimensional refractive index R; claim 6 _{(φi n x, n y,} n z, β) , characterized by being represented by the following formula (2) Is a three-dimensional refractive index measuring device.

(Where i, _nx , _ny , and _nz are the same as in equation (1). Also, in equation (2), θ and d are known parameters, and β is the xyz axis direction in the refractive index ellipsoid of the thin film. The tilt angle with respect to
The invention according to claim 8 is the three-dimensional refractive index measuring apparatus according to claim 7, wherein the refraction angle of the refraction angle in the incident surface direction is θ ₁ and the refraction angle in the outer direction of the incidence surface is θ _2. The three-dimensional refractive index measuring apparatus includes means for obtaining a three-dimensional refractive index using the refraction angle θ of the sample expressed by the equation (4).

However, θ ₁ is the refraction angle represented by the equation (5), θ ₂ is the refraction angle represented by the equation (6), the incident angle is Φ, the refraction angle in the sample of the polarized light is θ, and x in the refractive index ellipsoid of the sample. The inclination angle with respect to the axial direction is β, and n ′ is the refractive index in the incident surface represented by the equation (7).

  The invention according to claim 9 comprises means for mounting k transparent substrates having different refractive indexes (k ≧ 2) on which a thin film is formed. It is a rate measuring device.

With such an apparatus configuration, the refractive index of a plurality of thin films on a substrate mounted in the apparatus can be automatically determined sequentially, and when the reflectance is the lowest for a certain wavelength (when the transmittance is the highest) refractive indices n _x corresponding to), n _y, and singled out n _z, may be a value for obtaining this.

  According to the present invention, a transparent substrate to be combined with a thin film is selected from those having as little reflectivity as possible from the thin film, thereby suppressing the undulation of the retardation, and a suitable calculation formula for calculating the refractive index from the retardation value. By doing so, accurate and highly accurate calculation of the three-dimensional refractive index of the thin film on the transparent substrate becomes possible. In addition, since the refractive index measuring device is a device that can mount a plurality of transparent substrates having different refractive indexes, even if the magnitude of the refractive index of the thin film to be obtained is unknown, the measurement is efficiently performed. It is possible to easily calculate the three-dimensional refractive index.

FIG. 1 is an explanatory view showing a sample in which a single-layer thin film is formed on a transparent substrate. FIG. 2 is a spectral vector diagram showing an example of the spectral transmittance of a sample in which a single-layer thin film is formed on a transparent substrate. FIG. 3 is a graph showing an example of wavelength dispersion of retardation at an incident angle of 45 degrees of a sample in which one thin film is formed on a transparent substrate. FIG. 4 is a graph showing another example of retardation wavelength dispersion at an incident angle of 45 degrees of a sample in which a single thin film is formed on a transparent substrate. FIG. 5 is a schematic configuration diagram illustrating an example of a three-dimensional refractive index measurement apparatus according to an embodiment of the present invention. FIG. 6 is a graph showing retardation obtained by obliquely incident polarized light on a sample from a plurality of oblique incidence angles including normal incidence and a retardation calculation result for explaining a three-dimensional refractive index calculation method. . FIG. 7 shows an example of a refractive index ellipsoid of the sample for explaining a case where the refractive index ellipsoid of the sample matches Nx, Ny, Nz in the reference coordinate system (a) and a case where it does not match (b). It is explanatory drawing shown. FIG. 8 is a graph showing the incident angle dependence of retardation when the influence of multiple interference is not considered. FIG. 9 is a graph showing an example of the incidence angle dependency of retardation. FIG. 10 is a graph showing the incidence angle dependency of retardation according to an embodiment of the present invention. FIG. 11 is a graph showing the dependency of retardation on the incident angle in the comparative example.

  In the following, embodiments of the present invention will be described in the order of the apparatus surface, the refractive index calculation method, the basic principle of the present invention, and finally the examples.

The three-dimensional refractive index measuring apparatus of the present invention includes means for obtaining linearly polarized light vertically incident on a sample in which at least one thin film is formed on a transparent substrate and obtaining an in-plane optical axis of the thin film; Polarized light including the optical axis and traveling in a plane perpendicular to the thin film is incident on the thin film at at least one or more incident angles φi, and retardation R (φi) (hereinafter also referred to as a phase difference for simplicity). means for determining also) be, dimensions refractive index formula _{R (φi; n x, n} y, n z, means for determining the beta), further, the retardation R (.phi.i) and formulas R (φi; n _{x, n y, n z,} β) with, as the value of the expression (1) below is as small as _{possible, n x, n y, n} z,
a three-dimensional refractive index measuring device comprising at least means for obtaining β.

  That is, by multiplying the retardation measurement result obtained by the equation (1) with the retardation measurement result at normal incidence and oblique incidence to obtain the minimum value of the error ρ, the multiple generated between the transparent substrate and the thin film is obtained. It is a measuring device that can average the influence of interference.

Furthermore, the three-dimensional refractive index measuring apparatus of the present invention includes at least two or more transparent substrates having different refractive indexes on which thin films having the same layer configuration are formed. as 1) is as small as possible, respectively _{n x, n y, n z} , comprising means for obtaining the beta, n _x in the transparent substrate formula (1) is minimized, n _y, n _z, beta And at least means for determining a three-dimensional refractive index. That is, when the refractive index of the transparent substrate is n2 and the refractive index of the thin film formed in the first layer on the transparent substrate is n1, at least two or more samples having different | n2−n1 | are mounted. Preferably, automatic continuous measurement is possible, and includes means for determining n _x , n _y , n _z , and β on the transparent substrate that minimizes each equation (1) as a three-dimensional refractive index.

  Specifically, as shown in FIG. 5, the light source unit 5, the spectroscope 6, the polarizer 7, the sample stage 8, the analyzer 9, the detection unit 10, the data processing device 11, and the display device 12 are configured as basic units. It is a device. As the light source part 5, what has a broad wavelength distribution within a measurement wavelength range, for example, a white light source, can be used. The spectroscope 6 is a unit that projects a measurement light beam onto the surface of the object to be measured, a collimator optical system (lens, concave mirror, etc.) that forms a parallel light beam with a uniform cross-sectional intensity distribution, and a wavelength for extracting a single color of a specific wavelength. Selection means such as a narrow band filter may be included. The polarizer 7 is a polarizer for extracting linearly polarized light having a specific polarization direction. The polarizing element of the analyzer 9 is configured to have a predetermined polarization direction relationship with the corresponding polarizing element, for example, parallel Nicols. The detection unit 10 is a light detection element that generates an electrical signal corresponding to the light intensity, and is configured by, for example, a photodiode or a two-dimensional CCD element (charge coupled device), and can be configured to arbitrarily sample the detection output. ing. Moreover, the apparatus etc. which perform amplification and A / D conversion part of the obtained light beam can be included. The data processing device 11 is a computer that performs data processing of detection signals, operation control of the device, and the like. Further, the spectroscope 6 serving as a wavelength selection unit may be provided before the detector of the light receiving unit or between the polarizer 7 and the analyzer 9 instead of being provided between the light source unit 5 and the polarizer 7. Here, the light source may be monochromatic light such as a laser. In this case, both monochromaticity and linear polarization may have a certain width.

  The sample (measurement) stage 8 allows the sample attached to the sample stage to be rotated about a normal incident light axis and a rotation axis perpendicular to the light axis. The sample stage 8 is configured to be driven by a power source under the control of an unillustrated rotating stage that can be rotated by a shaft, a stepping motor, etc., an encoder that generates a rotation angle position signal of the rotating stage, and a drive control unit. ing. Further, the sample stage 8 has at least three or more different | n 2 −n 1 |, where n 2 is the refractive index of the transparent substrate and n 1 is the refractive index of the thin film formed on the first layer of the transparent substrate. In order to be able to mount multiple samples and automatic continuous measurement is possible, a stage that can be replaced by a stepping motor, etc., an encoder that generates a stage position signal, and a power source under the control of the drive controller A driven configuration is provided.

With such a configuration, it is possible to obtain the optical axis in the plane of the sample, that is, the main refractive index direction by allowing the substantially linearly polarized polarized light to vertically enter the sample. Further, the sample stage can be rotated around the vertical incident optical axis so that the optical axis direction is included in the oblique incident surface, and the oblique incident incident surface can be rotated around the rotational axis perpendicular to the light axis. Retardation can be obtained by obliquely incident polarized light on the sample from at least one or more oblique incidence angles in a plane including the axis and perpendicular to the sample. In this state, transmitted light by normal incidence measurement and oblique incidence measurement is detected in parallel, and birefringence characteristics (main refractive index direction, retardation value, etc.) are obtained respectively, and the three-dimensional refractive index is combined with the normal incidence measurement results. Is the basic data to be calculated.
An example in which the retardation (Re) obtained by this apparatus is plotted on the vertical axis and the incident angle is plotted on the horizontal axis is shown in FIG.

  In the conventional measuring apparatus, the analysis is performed only when the principal axis of the refractive index ellipsoid of the sample as shown in FIG. 7A coincides with Nx, Ny, Nz in the reference coordinate system. The means for obtaining the three-dimensional refractive index when the principal axes Nx ′, Ny ′, Nz ′ of the refractive index ellipsoid of the sample as shown in (b) do not coincide with the laboratory coordinate system Nx, Ny, Nz are almost studied. It wasn't.

  Whether or not the refractive index ellipsoid of the sample is tilted from the reference coordinate system as shown in FIG. 7B can be determined by being left-right asymmetric as shown by □ (measured value) in FIG. it can.

Then 3-dimensional refractive indices n _x by measured values and curve fitting of the retardation, n _y, the calculation formula for obtaining the n _z will be described. Here, the inventors set the inclination angle of the optical axis of the optical compensation film in the retardation calculation formula corresponding to FIG. 7B when the refractive index ellipsoid is inclined by β degrees from the z-axis direction. It has been found that it is preferable to use the following formula (2) that can be calculated. (For example, refer nonpatent literature 4).

_{However, n x, n y, n} z x -axis direction in the respective reference coordinate system, y-axis direction, the z-axis direction of the three-dimensional refractive index represents plane _{n x, n y (n x} ≧ n y), It is set to _{nz in the} thickness direction. Also, the incident angle is φi, the film thickness of the sample is d, and the refraction angle of the polarized light in the sample is θ.
If β = 0 in the above equation, this corresponds to the case where the principal axis direction of the refractive index ellipsoid in FIG. 7A is parallel to the reference coordinates. Here, it should be noted that only θ and β are functions of the incident angle (including the normal incidence) φi for measuring the retardation. Further, depending on the arrangement or the like, a plurality of parameters other than β may be included.
The incident angle φi is an optical axis within the surface of the sample obtained by vertically incident polarized light of substantially linear polarized light at the time of normal incidence, that is, an in-plane angle including the main refractive index direction or the main refractive index direction. It is an angle within a plane perpendicular to the surface, and can be measured by selecting either one at the start of measurement or continuously. When β was measured as an in-plane angle including the main refractive index direction as an incident angle, an inclination angle with respect to the x-axis was measured as an incident angle and an in-plane angle perpendicular to the main refractive index direction. In some cases, it is handled as an inclination angle with respect to the y-axis, and therefore, the inclination angle with respect to the two axes of the x-axis and the y-axis may be obtained by measuring at both angles.

  (2) Further, since the refraction angle θ is considered to show different values in the in-incident surface direction and the out-of-incident surface direction, when θ 1 and θ 2 are respectively expressed by the following equation (4): Further, the three-dimensional refractive index can be obtained with high accuracy.

  However, θ1 is the refraction angle represented by the equation (5), θ2 is the refraction angle represented by the equation (6), the incident angle is φ, the refraction angle of the polarized light in the sample is θ, and the z-axis direction of the refractive index ellipsoid of the sample The inclination angle from the angle β is β, and n ′ is the refractive index in the incident surface represented by the equation (7).

The n _x formula (2), to calculate the retardation n _y, by applying the n _z and β sequentially, so that the error between the measurement result at all angles of incidence obtained by actual measurement is minimal, fitting n _x, n _y, determines the inclination angle beta from 3 dimensional refractive index and the z-axis direction by fitting the value of n _z and beta. As the curve fitting algorithm, a linear programming method such as a simplex method, a non-linear curve fitting method such as a Levenburg-Marquardt method, or the like is preferably used.

The above, n _x, n _y, if n _z and β is Motomare, n _x by the following equation _{(8) ', n y'} , n z ' is obtained.

  However, it is clear that even if the refractive index is calculated by applying the above algorithm to the measurement result including the incidence angle dependency of the retardation influenced by the multiple interference as shown in FIG. There was also poor convergence.

Therefore, as a result of intensive studies in view of the above circumstances, the present inventors have determined that the refractive index of the transparent substrate is n2, and the refractive index of the thin film formed in the first layer on the transparent substrate is n1, It is possible to obtain a highly reliable retardation value by selecting a transparent substrate so that | n 2 −n 1 | ≦ 0.1 at a certain wavelength, preferably in a considerable wavelength range, and a highly accurate three-dimensional refractive index. I found that the value was reached.
That is, it has been found that the influence of optical multiple interference can be minimized by selecting the material of the transparent substrate so as to minimize the difference in refractive index between the transparent substrate and the thin film. It is generally known that optical interference is greatly influenced by the intensity of reflected light generated between the substrate and the thin film, and the intensity R of the reflected light determines the refractive index of each layer as n2, n1. Then, it is known that the following equation (9) is given.

  If the difference in refractive index between the transparent substrate and the thin film becomes small, the intensity of reflected light becomes weak and the amount of transmitted light that contributes to retardation measurement increases, so that the influence of optical interference can be minimized. Since the wavelength dependence of the refractive index n1 of the transparent substrate can be measured in advance, it is preferable to prepare a plurality of different values and to form a thin film thereon. When the refractive index of the transparent substrate and the thin film varies depending on the wavelength, it is desirable to switch the transparent substrate so that the reflectance becomes as small as possible for each wavelength, and measure the retardation to obtain a group of basic data.

  Here, it should be noted that a low reflectance from the thin film surface means a high transmittance from the transparent substrate. When there are two or more thin films on the transparent substrate, n2 can be considered as a certain average refractive index of them.

Further, in the present invention, the step of obtaining the above-mentioned retardation, curve-fitting the calculated value of the retardation to the measurement result at the normal incidence and the measurement result at the oblique incidence, and the minimum value of the error ρ calculated from the equation (1) A plurality of samples having different | n 2 −n 1 |, where n 2 is the refractive index of the transparent substrate and n 1 is the refractive index of the thin film formed on the transparent substrate as the first layer. Can be mounted, automatic continuous measurement is possible, and the step of calculating the minimum value of | n2−n1 | by curve fitting the error ρ of each sample is more efficient. The refractive index can be determined.

   In fact, as shown in FIG. 9, when the refractive index of the transparent substrate is increased from 1.52 to 1.65 and 1.69, it becomes clear that the wavy phenomenon is eliminated with respect to the incident angle. It was. Therefore, it is clear that if the fitting is performed such that the error ρ between the retardation value and the calculated value is minimized, the birefringence value of the thin film with high accuracy can be obtained. Furthermore, since the refractive index of the transparent substrate when the error ρ is the smallest becomes substantially equal to the refractive index of the thin film, it is possible to easily obtain the refractive index simultaneously with the birefringence. It is possible to omit the complicated steps required for obtaining the rate and the birefringence.

  A sample that can be measured by the three-dimensional refractive index measuring apparatus of the present invention will be described below. In addition to the above-described optical element, at least one thin film is formed on the transparent substrate unless departing from the spirit of the present invention. Any sample may be used as long as it is formed.

  Transparent substrates include glass plates such as soda lime glass, low alkali borosilicate glass and non-alkali aluminoborosilicate glass, resin plates such as polycarbonate, polymethyl methacrylate, and polyethylene terephthalate, triacetyl cellulose (hereinafter “TAC”). A transparent film made of Moreover, as a transparent base material for eliminating the refractive index difference from the thin film, synthetic glass, borofloat, BK7, K5, B270, Zerodur, SK11, BaK4, SSKN8, F2, which are optical glass manufactured by Shot Japan Co., Ltd., BaSF1, SF2, LaKN22, SF8, SF18, SF10, SF14, Sapphire, SF11, SFL11, LaSFN30, SFL6, SF6, SF57, LaSFN9, CORNING Pyrex (registered trademark) 7740, C0550, HOYA B13 BaFN10, SF5, FD5, FD10, TAC4, OHARA S-TIH1, 3, 4, 6, 10, 11, 13, 14, 18, 23, 53, 53, L-TIH53, S-NPH1, S -NPH2, 53, -NBH5, 8, 51, 52, 53, 55, L-NBH54, S-LAH51, 52, 53, 55, 58, 59, 60, 63, 64, 65, 66, 71, 79, L-LAH53, 81 83, 84, 85, S-LAM2, 3, 7, 51, 52, 54, 55, 58, 59, 60, 61, 66, L-LAM 60, 69, 72, S-BAH10, 11, 27, 28 32, S-TIM1, 2, 3, 5, 8, 22, 25, 27, 28, 35, 39, S-FTM16, L-TIM28, S-BAM3, 4, 12, S-NBM51, S-TIL1 2, 6, 25, 26, 27, S-YGH51, S-LAL7, 8, 9, 10, 12, 13, 14, 18, 54, 56, 58, 59, 61, L-LAL12, 13, S -BSM2, 4, 9, 10, 14, 15 16, 18, 22, 25, 28, 71, 81, S-PHM52, 53, S-BAL2, 3, 11, 12, 14, 35, 41, 42, L-PHL1, 2, L-BAL35, 42, Optical glass such as S-NSL3, 5, 36, S-BSL7, L-BSL7, S-FSL5, S-FPL51, and S-FPL53 can be preferably used.

  As a thin film layer, a polymerizable liquid crystal material having birefringence anisotropy for optically compensating the birefringence of a liquid crystal display device, and a color filter for extracting light of a specific wavelength from white backlight light are formed. For example, a transparent electrode made of a combination of metal oxides such as indium oxide, tin oxide, zinc oxide, and antimony oxide for driving a liquid crystal after forming a colored composition and a liquid crystal panel.

In this case, when the substrate to be measured is a color filter, the retardation value of the single colored pixel layer is measured by using a mask processed so as to transmit only the single colored pixel layer of R, G, and B. Can be requested.
Further, for example, when light having a wavelength of 610 nm is used as incident light, the phase difference value caused only by the red colored pixel, in the case of 550 nm, the phase difference value caused only by the green colored pixel, in the case of 450 nm, The approximate value of the single colored pixel layer can be estimated as the phase difference value caused only by the blue colored pixels.
In addition, when the substrate to be measured is a single colored pixel layer of R, G, or B (a configuration in which a coating film of a monochrome color filter coloring composition is formed on a transparent substrate), without using a mask The phase difference can be measured.

  In the three-dimensional refractive index measuring method of the present invention, a known measuring device with high measurement accuracy is used as a measuring device for obtaining retardation, and the three-dimensional refractive index is separately calculated from the obtained retardation and calculation formula. Good. Suitable measuring devices include a birefringence measuring device that measures the anisotropy, optical constant, etc. of the sample by detecting the polarization state when light is transmitted through the sample or reflected from the surface thereof, or photoelastic modulation. An apparatus called transmission-type polarimetry by the method is preferable, and a Mueller matrix polarimeter is more preferably used.

  Finally, the present invention will be specifically described based on examples.

[Example 1]
a) Preparation of red colored coating film Red resist CDP-RS6300 (Toyo Ink Manufacturing Co., Ltd.) for color filter was applied to optical glass S-TIM22 (refractive index 1.65) manufactured by OHARA Co., Ltd. by spin coating. Then, it prebaked at 70 degreeC for 20 minutes in clean oven. Next, the substrate was cooled to room temperature and then exposed to ultraviolet rays using an ultrahigh pressure mercury lamp. Thereafter, the substrate was spray-developed using a sodium carbonate aqueous solution at 23 ° C., washed with ion-exchanged water, and air-dried.
Thereafter, post-baking was performed at 230 ° C. for 30 minutes in a clean oven to obtain each color coating film. The film thickness of the dried coating film was 2.0 μm in all cases.

b) Retardation measurement retardation is 5 degree steps from a direction inclined -45 degrees to 45 degrees from the normal direction of the substrate on which the coating film is formed using a transmission spectroscopic ellipsometer ("M-200" manufactured by JASCO Corporation). Was measured at a wavelength of 610 nm, and an ellipso parameter δ was obtained. A phase difference value Δ (λ) was calculated from Δ = δ / 360 × λ, and a retardation calculation value obtained from the equation (3) was curve-fitted using this value to calculate a three-dimensional refractive index.
Here, linear programming was used for curve fitting, and nx, ny, nz, and β were obtained so that the error ρ between the actually measured value and the calculated value represented by Equation (1) was minimized. The obtained results are shown in Table 1. Further, FIG. 10 is a graph in which retardation is plotted on the vertical axis and the incident angle is plotted on the horizontal axis, and FIG. 11 shows the results of chromatic dispersion at wavelengths of 400 nm to 700 nm when irradiated from 45 degrees obliquely.

[Example 2]
Evaluation was performed in the same manner as in Example 1 except that optical glass S-TIM35 (refractive index: 1.69) manufactured by OHARA Corporation was used for the transparent substrate. The obtained results are shown in Table 1, the graph in which retardation is plotted on the vertical axis and the incident angle is plotted on the horizontal axis is shown in FIG. 10, and the results of chromatic dispersion at wavelengths of 400 nm to 700 nm when irradiated from 45 degrees obliquely are shown in FIG. .

[Example 3]
Evaluation was performed in the same manner as in Example 1 except that optical glass S-LAM60 (refractive index: 1.74) manufactured by OHARA Corporation was used for the transparent substrate. The obtained results are shown in Table 1, the graph in which retardation is plotted on the vertical axis and the incident angle is plotted on the horizontal axis is shown in FIG. 10, and the results of chromatic dispersion at wavelengths of 400 nm to 700 nm when irradiated from 45 degrees obliquely are shown in FIG. .

[Example 4]
Evaluation was performed in the same manner as in Example 1 except that optical glass S-LAH66 (refractive index: 1.77) manufactured by OHARA Corporation was used for the transparent substrate. The obtained results are shown in Table 1, the graph in which retardation is plotted on the vertical axis and the incident angle is plotted on the horizontal axis is shown in FIG. 10, and the results of chromatic dispersion at wavelengths of 400 nm to 700 nm when irradiated from 45 degrees obliquely are shown in FIG. .

[Comparative Example 1]
Evaluation was performed in the same manner as in Example 1 except that a glass substrate 1737 (refractive index: 1.52) manufactured by CORNING was used as the transparent substrate. The obtained results are shown in Table 1, the graph in which retardation is plotted on the vertical axis and the incident angle is plotted on the horizontal axis is shown in FIG. 10, and the results of chromatic dispersion at wavelengths of 400 nm to 700 nm when irradiated from 45 degrees obliquely are shown in FIG. .

  According to Table 1, the error using the optical glass having a refractive index of 1.65 to 1.77 is as small as 0.02 to 0.012 in the example, whereas it is as large as 0.252 in the comparative example. Yes. In addition, it can be seen from the graph showing the dependence of retardation on the incident angle (FIG. 10) that the example shows a curve closer to the calculated value. As apparent from the chromatic dispersion graph of FIG. 11, the cause of this is that the wave swell due to multiple interference is reduced in the embodiment. This shows that the three-dimensional refractive index measuring method and measuring apparatus of the present invention are very excellent.

DESCRIPTION OF SYMBOLS 1 ... Glass substrate 2 ... Thin film 3 ... Light transmission state in thin film 4 ... Light transmission state in thin film considering multiple interference 5 ... Light source 6 ... Spectroscope 7 ... Polarizer 8 ... Sample stage 9 ... Analyzer 10 ... Detector 11 ... Data processing device 12 ... Display device

Claims (9)

At least 1. for the thin film formed on the transparent substrate. Determining the in-plane optical axis of the thin film by vertically injecting linearly polarized light;
2. Allowing the linearly polarized light including the optical axis and traveling in a plane perpendicular to the thin film to enter the thin film at at least three or more incident angles φi to obtain a retardation R (φi);
Formula 3.3 dimensional refractive index _{R (φi; n x, n} y, n z, β) step of determining a
4). The retardation R (.phi.i) and formulas _{R (φi; n x, n} y, n z, β) as ρ of the formula (1) is as small as possible with _{a, n x, n y, n} z, obtaining β,
In a three-dimensional refractive index measurement method having:
A method for measuring a three-dimensional refractive index of a thin film, wherein the retardation R (φi) is measured using a transparent substrate having a reflectance as small as possible from the thin film.

(Here, i is an integer of 3 or more, nx, ny, and nz are three orthogonal components of the refractive index ellipsoid of the thin film, and β is an inclination angle with respect to each axis direction of xyz in the refractive index ellipsoid of the thin film.)   When the refractive index of the transparent substrate is n 2 and the refractive index of the outermost layer thin film formed on the transparent substrate is n 1, a transparent substrate having a refractive index satisfying | n 2 −n 1 | ≦ 0.1 is used. The method for measuring a three-dimensional refractive index of a thin film according to claim 1. The 3 approximate expression of dimensional refractive index _{R (φi; n x, n} y, n z, β) is 3 according to claim 1 or claim 2, characterized by being represented by the following formula (2) Dimensional refractive index measurement method.

(Where i, _nx , _ny , and _nz are the same as in equation (1). Also, in equation (2), θ, d are known parameters, and β is each axis of xyz in the refractive index ellipsoid of the thin film. (Inclination angle with respect to direction.) In the three-dimensional refractive index measurement method according to claim 3, when the refraction angle of the refraction angle in the incident surface direction is θ ₁ and the refraction angle in the outer direction of the incidence surface is θ ₂ , the refraction angle is expressed by Expression (3). A method for measuring a three-dimensional refractive index, comprising a step of obtaining a three-dimensional refractive index using a refraction angle θ of a sample.

However, θ ₁ is the refraction angle represented by the equation (5), θ ₂ is the refraction angle represented by the equation (6), the incident angle is Φ, the refraction angle in the sample of the polarized light is θ, and x in the refractive index ellipsoid of the sample. The inclination angle with respect to the axial direction is β, and n ′ is the refractive index in the incident surface represented by the equation (7).

  The step of obtaining the retardation R (φi) according to claim 1, wherein the retardation Rk (φi) is sequentially obtained for the same thin film formed on k transparent substrates having different refractive indexes (k ≧ 2), For each φi, among the k retardations Rk (φi), the retardation Rk (φi) corresponding to the transparent substrate having the minimum reflectance at φi is set as R (φi) to be obtained. The three-dimensional refractive index measurement method according to claim 1. At least 1. for the thin film formed on the transparent substrate. Means for obtaining an in-plane optical axis of the thin film by vertically incidence of linearly polarized light;
2. Means for determining retardation R (φi) by causing linearly polarized light traveling in a plane including the optical axis and perpendicular to the thin film to enter the thin film at a plurality of incident angles φi of at least three or more;
3.3 dimensional refractive index formula _{R (φi; n x, n} y, n z, β) means for determining a
4). The retardation R (.phi.i) and formulas _{R (φi; n x, n} y, n z, β) as ρ of the formula (1) is as small as possible by using a means for calculating nx, ny, and nz, And a three-dimensional refractive index measuring device.

(Where i is an integer of 3 or more, nx, ny, and nz are three orthogonal components of the refractive index of the thin film, and β is an inclination angle with respect to the xyz axes in the refractive index ellipsoid of the thin film.) The 3 approximate expression of dimensional refractive index _{R (φi; n x, n} y, n z, β) is the three-dimensional refractive index measurement according to claim 6, characterized by being represented by the following formula (2) apparatus.

(Where i, _nx , _ny , and _nz are the same as in equation (1). Also, in equation (2), θ and d are known parameters, and β is the xyz axis direction in the refractive index ellipsoid of the thin film. The tilt angle with respect to 8. The three-dimensional refractive index measurement apparatus according to claim 7, wherein when the refraction angle of the refraction angle in the in-plane direction of the incident surface is θ ₁ and the refraction angle of the out-of-incidence direction is θ ₂ , the equation (4) is expressed. A three-dimensional refractive index measuring device comprising means for obtaining a three-dimensional refractive index using a refraction angle θ of a sample.

However, θ ₁ is the refraction angle represented by the equation (5), θ ₂ is the refraction angle represented by the equation (6), the incident angle is Φ, the refraction angle in the sample of the polarized light is θ, and x in the refractive index ellipsoid of the sample. The inclination angle with respect to the axial direction is β, and n ′ is the refractive index in the incident surface represented by the equation (7).

  9. The three-dimensional refractive index measuring apparatus according to claim 7, further comprising means for mounting k transparent substrates having different refractive indexes (k ≧ 2) on which a thin film is formed.

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