JP2010012656A - Vacuum laminator - Google Patents

Vacuum laminator Download PDF

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JP2010012656A
JP2010012656A JP2008173314A JP2008173314A JP2010012656A JP 2010012656 A JP2010012656 A JP 2010012656A JP 2008173314 A JP2008173314 A JP 2008173314A JP 2008173314 A JP2008173314 A JP 2008173314A JP 2010012656 A JP2010012656 A JP 2010012656A
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film
pair
vacuum
substrate
carry
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JP5093606B2 (en
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Tamotsu Kirino
保 桐野
Toshiaki Yoshimura
敏明 吉村
Hiroshige Hirasawa
広重 平沢
Masahiro Sawada
昌宏 沢田
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Showa Denko Materials Co Ltd
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Hitachi Chemical Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a vacuum laminator which has a vacuum tank for bonding a film to a base and a pair of sealing rollers arranged at a carry-in orifice or a carry-out orifice of the vacuum tank, and also, which can cut the time required for the elimination of creases apt to be easily generated in a film which is first, drawn alone from the carry-out orifice, in procedures to take prior to bonding the base and the film together, and further, can prevent the base from being carried in tilting through the carry-in orifice, when the base is of a continuous length shape. <P>SOLUTION: This vacuum laminator includes an opening means for the purpose of temporarily opening a gap across a pair of the sealing rollers to the larger interstice than the thickness of the base or the film passing through the carry-in orifice or the carry-out orifice. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、真空中で、基板にフィルムを貼り合わせる(ラミネートする)真空ラミネート装置に関するものである。特に、真空ラミネート装置のシールローラに関するものである。   The present invention relates to a vacuum laminating apparatus for laminating (laminating) a film on a substrate in a vacuum. In particular, the present invention relates to a seal roller of a vacuum laminating apparatus.

従来、基板にフィルムを貼り合わせるラミネート装置は、基板とフィルムを一対の熱ローラで加熱加圧してラミネートしている。また、基板とフィルム間の微小な気泡をなくすために、これを真空中でおこなっている(特許文献1)。この真空中でのラミネートは真空槽内で行っていて、基板をこの真空槽外から搬入または搬出するために、この真空槽の搬入口または搬出口に一対のシールローラを設けている。このシールローラは一般にゴム製で、シールローラ同士と、この真空槽の搬入口または搬出口の周辺の壁とで接触することにより真空を保持する構造になっている。

特開平8−323915号公報
2. Description of the Related Art Conventionally, a laminating apparatus for attaching a film to a substrate laminates the substrate and the film by heating and pressing with a pair of heat rollers. Moreover, in order to eliminate the micro bubble between a board | substrate and a film, this is performed in the vacuum (patent document 1). Lamination in vacuum is performed in a vacuum chamber, and a pair of seal rollers are provided at the entrance or exit of the vacuum chamber in order to carry the substrate in or out of the vacuum chamber. This seal roller is generally made of rubber, and has a structure in which a vacuum is maintained by contact between the seal rollers and the wall around the inlet or outlet of the vacuum chamber.

JP-A-8-323915

解決しようとする問題点は、基板とフィルムをラミネートする前に、真空槽の搬出口からフィルム単独でまず引き出し、その後それに重ね合わせた形で基板がフィルムとラミネートされるが、搬出口からまず単独で引き出されたフィルムにはしわが入りやすく、なかなかしわがとれず、フィルムがムダになる点と、そのためラミネートするまでに時間のロスが発生する点である。
また、基板が、長尺連続体の場合、基板が傾いて真空槽の搬入口から搬入されるとズレが拡大し、基板が搬入口の端に接触し、基板にダメージを与える点である。
The problem to be solved is that before laminating the substrate and the film, the film alone is first pulled out from the outlet of the vacuum chamber, and after that, the substrate is laminated with the film in a superimposed form. The film drawn out in (1) is easy to wrinkle, and the wrinkle is not easily removed, and the film is wasted. Therefore, time is lost until the film is laminated.
In addition, when the substrate is a long continuous body, when the substrate is tilted and is carried in from the carry-in port of the vacuum chamber, the displacement is enlarged, the substrate comes into contact with the end of the carry-in port, and the substrate is damaged.

本発明の目的は、基板とフィルムをラミネートする前の段取りにおけるフィルムのムダや時間のロスまたは基板に与えるダメージを解消した真空ラミネート装置を提供することである。   An object of the present invention is to provide a vacuum laminating apparatus that eliminates film waste, time loss, or damage to the substrate during setup before laminating the substrate and the film.

本発明は、課題を解決するための手段として、基板にフィルムを貼り合わせるための真空槽と、この真空槽の搬入口または搬出口に設けた一対のシールローラとを有する真空ラミネート装置において、前記搬入口または搬出口を通過する前記基板またはフィルムの厚さより大きい高さで、前記一対のシールローラの間に隙間を一時的に開けるための開放手段を設けることである。
また、本発明は、基板にフィルムを貼り合わせるための真空槽と、この真空槽の搬入口または搬出口に設けた一対のシールローラとを有する真空ラミネート装置において、前記一対のシールローラには回転軸を有していて、前記搬入口または搬出口を通過する前記基板またはフィルムの厚さより大きい高さで、前記一対のシールローラの間に隙間を一時的に開けるために、前記一対のシールローラの回転軸間を押し広げるくさびを設けることである。
As a means for solving the problem, the present invention provides a vacuum laminator having a vacuum chamber for bonding a film to a substrate and a pair of seal rollers provided at a carry-in port or a carry-out port of the vacuum vessel. An opening means is provided to temporarily open a gap between the pair of seal rollers at a height greater than the thickness of the substrate or film passing through the carry-in port or the carry-out port.
Further, the present invention provides a vacuum laminating apparatus having a vacuum chamber for attaching a film to a substrate and a pair of seal rollers provided at a carry-in port or a carry-out port of the vacuum vessel. The pair of seal rollers having a shaft and having a height greater than the thickness of the substrate or film passing through the carry-in port or the carry-out port to temporarily open a gap between the pair of seal rollers It is to provide a wedge that pushes between the rotating shafts.

すなわち、本発明は、以下のものに関する。
(1)基板にフィルムを貼り合わせるための真空槽と、この真空槽の搬入口または搬出口に設けた一対のシールローラとを有する真空ラミネート装置において、前記搬入口または搬出口を通過する前記基板またはフィルムの厚さより大きい高さで、前記一対のシールローラの間に隙間を一時的に開けるための開放手段を設ける真空ラミネート装置。
(2)基板にフィルムを貼り合わせるための真空槽と、この真空槽の搬入口または搬出口に設けた一対のシールローラとを有する真空ラミネート装置において、前記一対のシールローラには回転軸を有していて、前記搬入口または搬出口を通過する前記基板またはフィルムの厚さより大きい高さで、前記一対のシールローラの間に隙間を一時的に開けるために、前記一対のシールローラの回転軸間を押し広げるくさびを設ける真空ラミネート装置。
That is, the present invention relates to the following.
(1) In a vacuum laminating apparatus having a vacuum chamber for attaching a film to a substrate and a pair of seal rollers provided at the entrance or exit of the vacuum chamber, the substrate passing through the entrance or exit Alternatively, a vacuum laminating apparatus having an opening means for temporarily opening a gap between the pair of seal rollers at a height greater than the thickness of the film.
(2) In a vacuum laminating apparatus having a vacuum chamber for attaching a film to a substrate and a pair of seal rollers provided at the entrance or exit of the vacuum chamber, the pair of seal rollers has a rotation shaft. And rotating the shafts of the pair of seal rollers to temporarily open a gap between the pair of seal rollers at a height greater than the thickness of the substrate or film passing through the carry-in port or carry-out port. A vacuum laminating machine that provides a wedge that pushes the gap.

本発明は、基板とフィルムをラミネートする前の段取りにおけるフィルムのムダや時間のロスまたは基板に与えるダメージを解消した真空ラミネート装置を提供することができる。
INDUSTRIAL APPLICABILITY The present invention can provide a vacuum laminating apparatus that eliminates film waste, time loss, or damage to the substrate in the setup before laminating the substrate and the film.

本発明に述べる基板は、板状またはフィルム状のもの、枚葉のもの長尺連続体のものと特に制約はないが、真空でフィルムと貼り合わせるため、片面または両面に、凹凸面をもったものが好都合である。例えば、プリント配線板の製造においては、10μmから1mm程度の凹凸表面をもった、樹脂や金属が積層された回路基板をさし、素子が内蔵される場合もある。   The substrate described in the present invention is not particularly limited to a plate-like or film-like one, a sheet-like long continuous body, but has a concavo-convex surface on one side or both sides in order to bond with a film in a vacuum. Things are convenient. For example, in the production of a printed wiring board, a circuit board on which a resin or metal is laminated having an uneven surface of about 10 μm to 1 mm may be incorporated.

本発明に述べるフィルムは、室温または加温中で、加圧によりの張り付き力を持つフィルムをさす。例えば、プリント配線板の製造においては、ドライフィルムをさし、エッチングで残す部分やめっきしない部分のマスクや、部品を実装してはんだ付けするときにはんだが不要な部分などを覆うためのフィルム材料をさす。また、張り合わせる側には、一般に保護フィルムが張られていて、貼り合わせ前にはがされる。   The film described in the present invention refers to a film having a sticking force by pressurization at room temperature or in warming. For example, in the production of printed wiring boards, dry film is used to mask parts that remain etched or not plated, and film materials that cover parts that do not require solder when mounting and soldering parts. Sure. Further, a protective film is generally stretched on the side to be bonded, and is peeled off before bonding.

本発明に述べる真空槽は、真空ポンプ等により内部を減圧できる一般的な槽をさす。真空槽内には、例えば、基板にフィルムを貼り合わせる手段としての加熱加圧ローラや、貼り合わせるフィルム等を収納する。 The vacuum tank described in the present invention refers to a general tank whose inside can be decompressed by a vacuum pump or the like. In the vacuum chamber, for example, a heat and pressure roller as means for attaching the film to the substrate, a film to be attached, and the like are accommodated.

本発明に述べるシールローラは、円柱状の金属性などの軸に弾性体を円柱状に成形したものである。
金属性の軸には、一般的に銅、アルミニウム、鉄、ステンレスなどの金属、ステンレスや鉄にニッケル、マンガン、モリブデン、シリコンなどを添加した合金等が用いられる。
弾性体の材質は、シリコーンゴム、フッ素ゴム、エチレンプロピレンゴム、ニトリルブタジエンゴム、クロロプレーンゴムなどの耐熱性のあるエラストマが使用できる。無機ヒイラーを添加したりして硬度を調節する。また、基板の凹凸の状態により、表面が柔らかで背面が硬いような複層の弾性体や硬度の異なる複数枚の弾性体を用いてもよい。
The seal roller described in the present invention is formed by cylindrically molding an elastic body on a cylindrical metal shaft.
The metallic shaft is generally made of a metal such as copper, aluminum, iron or stainless steel, or an alloy obtained by adding nickel, manganese, molybdenum, silicon or the like to stainless steel or iron.
As the material of the elastic body, a heat-resistant elastomer such as silicone rubber, fluorine rubber, ethylene propylene rubber, nitrile butadiene rubber, chloroprene rubber or the like can be used. The hardness is adjusted by adding an inorganic heeler. Further, a multilayer elastic body having a soft surface and a hard back surface or a plurality of elastic bodies having different hardness may be used depending on the unevenness of the substrate.

本発明に述べる開放手段は、シールローラとシールローラの間に隙間を一時的に設けるものである。搬出口に設ける場合、そこを通すフィルムを一時的に自由に動かすことができる手段で、そのためにシールローラとシールローラの間に隙間の高さを、フィルムの厚さより高い高さにすることにより得られる。また、搬入口に設ける場合、そこを通す基板を一時的に自由に動かすことができる手段で、そのためにシールローラとシールローラの間に隙間の高さを、基板の厚さより高い高さにすることにより得られる。   The opening means described in the present invention temporarily provides a gap between the seal roller and the seal roller. When it is provided at the carry-out port, it is a means by which the film passing therethrough can be freely moved temporarily. For this purpose, the height of the gap between the seal roller and the seal roller is made higher than the thickness of the film. can get. Further, when it is provided at the carry-in port, it is a means that allows the substrate passing therethrough to be freely moved temporarily. For that purpose, the height of the gap between the seal roller and the seal roller is set higher than the thickness of the substrate. Can be obtained.

本発明に述べるくさびは、一対のシールローラの金属性の軸間に挿入し、その軸間を広げたり、広げたものをもどしたりするものである。くさびの挿入は、シールローラの弾性体から露出した両端部分の軸間に同時に挿入するほうが、シールローラとシールローラの間に隙間の高さを平行に広げることができる。材質としては例えば金属性の板を加工したものを使用し、くさびと接触するシールローラの金属性の軸との間にはグリス等を設ける。また、くさびの挿入は、シールローラの弾性体から露出した両端部分の軸にはめ込んだベアリングどうしの側面間に挿入してもよい。そのほうが容易に挿入することができる。
The wedge described in the present invention is inserted between the metallic shafts of a pair of seal rollers, and the space between the shafts is widened or the widened one is returned. When the wedges are inserted simultaneously between the shafts of both end portions exposed from the elastic body of the seal roller, the height of the gap can be increased in parallel between the seal roller and the seal roller. For example, a material obtained by processing a metal plate is used, and grease or the like is provided between the seal roller and the metal shaft that comes into contact with the wedge. Further, the wedge may be inserted between the side surfaces of the bearings fitted into the shafts of both end portions exposed from the elastic body of the seal roller. That is easier to insert.

以下、本発明を図面に示す実施の形態に基づいて説明する。図1は、本発明で用いる真空ラミネート装置の概略図を示していて(シールローラ間を一時的に開けるための開放手段の表示は省く)、ラミネートローラを上下に用い、基板を水平に挿入し、その表裏両面にフィルムを同時に被着する真空ラミネート装置例の概略を示している。   Hereinafter, the present invention will be described based on embodiments shown in the drawings. FIG. 1 shows a schematic view of a vacuum laminating apparatus used in the present invention (the indication of an opening means for temporarily opening between seal rollers is omitted), and the substrate is inserted horizontally using the laminating rollers up and down. The outline of the example of the vacuum laminating apparatus which deposits a film on both the front and back simultaneously is shown.

図1において、ラミネートは、真空を保持する真空槽1内で一対のラミネートローラ2で行い、真空槽1には真空排気用ポンプ3を設ける。真空槽1内への基板4の搬入または取り出し部分には、一対のシールローラ5を設ける。
ラミネートローラ2には、加熱手段を設け、また、ラミネートローラ2の表面には弾性体を設ける。
そして、一対のラミネートローラ2の一方には、ラミネートローラ2が上下に移動できるためのエアーまたは油圧シリンダ等の上下運動手段(表示は省く)を設け、他方のラミネートローラ2は、真空槽1の内壁に固定する。
図1の装置では、真空槽1内に設けた、ロール状に巻かれたフィルム供給手段6から供給された上下2枚のフィルム7を一対のラミネートローラ5間に通しながら、そのフィルム7間に入るように、右から基板4を、搬入口に設けた一対のシールローラ5間から挿入し、真空槽1内の搬送ローラ8により水平に保ちながら、ラミネートされる。ラミネート後、真空槽1の取り出し口に設けた一対のシールローラ5を通し、搬出ローラ9により水平に保ちながら、搬出される。
In FIG. 1, lamination is performed by a pair of laminating rollers 2 in a vacuum chamber 1 that holds a vacuum, and a vacuum exhaust pump 3 is provided in the vacuum chamber 1. A pair of seal rollers 5 is provided at a portion where the substrate 4 is carried into or taken out from the vacuum chamber 1.
The laminating roller 2 is provided with heating means, and an elastic body is provided on the surface of the laminating roller 2.
One of the pair of laminating rollers 2 is provided with vertical movement means (not shown) such as air or a hydraulic cylinder for allowing the laminating roller 2 to move up and down. Secure to the inner wall.
In the apparatus of FIG. 1, two upper and lower films 7 supplied from a roll-fed film supply means 6 provided in the vacuum chamber 1 are passed between a pair of laminating rollers 5 while passing between the films 7. In order to enter, the substrate 4 is inserted from the right between a pair of seal rollers 5 provided at the carry-in port, and is laminated while being kept horizontal by the transfer roller 8 in the vacuum chamber 1. After laminating, it passes through a pair of sealing rollers 5 provided at the outlet of the vacuum chamber 1 and is carried out while being kept horizontal by the carry-out roller 9.

本発明は、このラミネートをする前に、まず、フィルムのしわを取り除いてからラミネートする。
図2は、ラミネートローラと取り出し口のシールローラ部分の部分図(シールローラ間を一時的に開けるための開放手段の表示は省く)で、このフィルムのしわの除去方法を示している。
In the present invention, before the lamination, the film is first wrinkled and then laminated.
FIG. 2 is a partial view of the laminating roller and the sealing roller portion of the take-out port (the indication of the opening means for temporarily opening the space between the sealing rollers is omitted), and shows a method for removing wrinkles from the film.

初めに、図2(a)に示すように、一対のラミネートローラ2間と取り出し口に設けた一対のシールローラ5間には隙間を設けておいて、ロール状に巻かれたフィルム供給手段6から供給された上下2枚のフィルム7を、一対のラミネートローラ2間と、次に真空槽の取り出し口に設けた一対のシールローラ5間に通し、真空槽1外に引き出し放置する。このとき2枚のフィルム7は、長さ方向にも幅方向にもたるんだ状態となっている場合が多い。
次に、図2(b)に示すように、フィルム供給手段6の回転を停止させた後、フィルム7の真空槽外に引き出した部分10を図2では左方向に、また幅方向にも広がるように引っ張って、フィルム7のたるみを除く。
次に、図2(c)に示すように、フィルム7の真空槽外に引き出した部分10を引っ張ったままで、一対のラミネートローラ2間を押し付け合って隙間をなくし、次に、一対のシールローラ5間を押し付け合って隙間をなくす。
以上の方法により、ラミネートをする前の段取りにおいて、フィルムのしわの除去を行う。
次に、一対のラミネートローラ2間の隙間を閉じて真空ラミネートを開始する。
First, as shown in FIG. 2A, a gap is provided between the pair of laminating rollers 2 and the pair of seal rollers 5 provided at the takeout port, and the film supply means 6 wound in a roll shape. The two upper and lower films 7 supplied from are passed between the pair of laminating rollers 2 and then between the pair of seal rollers 5 provided at the take-out port of the vacuum chamber, and are drawn out to the outside of the vacuum chamber 1 and left. At this time, the two films 7 are often in a state of sagging both in the length direction and in the width direction.
Next, as shown in FIG. 2 (b), after the rotation of the film supply means 6 is stopped, the portion 10 of the film 7 drawn out of the vacuum chamber spreads in the left direction and also in the width direction in FIG. To remove the slack of the film 7.
Next, as shown in FIG. 2 (c), with the portion 10 drawn out of the vacuum chamber of the film 7 being pulled, the pair of laminating rollers 2 are pressed against each other to eliminate the gap, and then the pair of sealing rollers Press between the five to eliminate gaps.
By the above method, wrinkles of the film are removed in the setup before laminating.
Next, the gap between the pair of laminating rollers 2 is closed, and vacuum laminating is started.

また、特に基板が、長尺連続体体の場合、基板が傾いて真空槽の搬入口から搬入されないように、真空槽の搬入口と搬出口に設けた一対のシールローラ間に隙間を設けておいて、基板を一時的に自由に動かすことができるようにし、真空ラミネート前の段取りにおいて、基板の進行方向の傾きを補正する。   In particular, when the substrate is a long continuous body, a gap is provided between the pair of seal rollers provided at the inlet and the outlet of the vacuum chamber so that the substrate is not inclined and carried from the inlet of the vacuum chamber. In this case, the substrate can be moved freely and temporarily, and the inclination in the traveling direction of the substrate is corrected in the setup before vacuum lamination.

図3は、本発明に係る真空ラミネート装置の部分図を示していて、真空槽の搬入口または搬出口の、一対のシールローラの間を一時的に開けるために、くさびを用いる方法の例を示している。図3(a)は、この部分の斜視図を、図3(b)および(c)は、動作を説明するための側面図を示している。   FIG. 3 shows a partial view of a vacuum laminating apparatus according to the present invention, and an example of a method using a wedge to temporarily open a pair of seal rollers at the inlet or outlet of a vacuum chamber. Show. 3A is a perspective view of this portion, and FIGS. 3B and 3C are side views for explaining the operation.

図3(a)に示すように、くさび11は、一対のシールローラの両端から露出した回転軸部分12間にそれぞれ挿入される。そして、図3(b)および(c)に示すように、くさび11をエアーまたは油圧シリンダ等の左右運動手段13により、回転軸12間を押し広げることにより、シールローラ5の間を一時的に開けることができる。そして、フィルムの厚さより大きい高さで開けることにより、フィルムが自由に移動することはできるようになる。   As shown in FIG. 3A, the wedges 11 are inserted between the rotary shaft portions 12 exposed from both ends of the pair of seal rollers, respectively. Then, as shown in FIGS. 3B and 3C, the wedge 11 is temporarily moved between the seal rollers 5 by pushing the wedge 11 between the rotary shafts 12 by means of a lateral movement means 13 such as air or a hydraulic cylinder. Can be opened. The film can be moved freely by opening at a height larger than the thickness of the film.

図4は、本発明に係る真空ラミネート装置のくさびを用いる別の方法の部分図を示している。一対のシールローラ5の両端から露出した回転軸部分12にはベアリング14がはめ込まれていて、そのベアリング14間にくさび11をそれぞれ挿入している。   FIG. 4 shows a partial view of another method using a wedge of a vacuum laminator according to the present invention. Bearings 14 are fitted into the rotating shaft portions 12 exposed from both ends of the pair of seal rollers 5, and wedges 11 are inserted between the bearings 14, respectively.

本発明の真空ラミネート装置は、一対のシールローラの間に隙間を一時的に開けるための手段を講じて、そこを通過する基板やフィルムを自由にずらすことができるので、基板とフィルムをラミネートする前の段取りにおいて、搬出口からまず単独で引き出されるフィルムに入りやすいしわ取りの時間を低減することができる。また、基板が長尺連続体の場合には、基板が傾いて真空槽の搬入口から搬入されるのを防止することができる。
The vacuum laminating apparatus of the present invention provides a means for temporarily opening a gap between a pair of seal rollers, and the substrate and film passing therethrough can be freely displaced, so the substrate and the film are laminated. In the previous setup, it is possible to reduce the wrinkle removal time that tends to enter the film that is first pulled out from the carry-out port. Moreover, when a board | substrate is a elongate continuous body, it can prevent a board | substrate tilting and carrying in from the carrying-in port of a vacuum chamber.

本発明に用いる真空ラミネート装置の概略図を示している。The schematic of the vacuum laminating apparatus used for this invention is shown. 本発明に係る真空ラミネート装置の動作を説明するための部分図を示している。The fragmentary view for demonstrating operation | movement of the vacuum laminating apparatus which concerns on this invention is shown. 本発明に係る真空ラミネート装置のくさびを用いる方法の部分図を示している。FIG. 3 shows a partial view of a method using a wedge of a vacuum laminator according to the present invention. 本発明に係る真空ラミネート装置のくさびを用いる別の方法の部分図を示している。FIG. 6 shows a partial view of another method using a wedge of a vacuum laminator according to the present invention.

符号の説明Explanation of symbols

1…真空槽、2…ラミネートローラ、3…真空排気用ポンプ、4…基板、5…シールローラ、6…フィルム供給手段、7…フィルム、8…搬送ローラ、9…搬出ローラ、10…フィルムの真空槽外に引き出した部分、11…くさび、12…シールローラの両端から露出した回転軸部分、13…左右運動手段、14…ベアリング。   DESCRIPTION OF SYMBOLS 1 ... Vacuum tank, 2 ... Laminating roller, 3 ... Vacuum exhaust pump, 4 ... Substrate, 5 ... Seal roller, 6 ... Film supply means, 7 ... Film, 8 ... Conveyance roller, 9 ... Unloading roller, 10 ... Film A part drawn out of the vacuum chamber, 11 ... a wedge, 12 ... a rotating shaft part exposed from both ends of the seal roller, 13 ... a left-right motion means, 14 ... a bearing.

Claims (2)

基板にフィルムを貼り合わせるための真空槽と、この真空槽の搬入口または搬出口に設けた一対のシールローラとを有する真空ラミネート装置において、前記搬入口または搬出口を通過する前記基板またはフィルムの厚さより大きい高さで、前記一対のシールローラの間に隙間を一時的に開けるための開放手段を設ける真空ラミネート装置。   In a vacuum laminating apparatus having a vacuum chamber for attaching a film to a substrate and a pair of seal rollers provided at the entrance or exit of the vacuum chamber, the substrate or film passing through the entrance or exit A vacuum laminating apparatus provided with an opening means for temporarily opening a gap between the pair of seal rollers at a height greater than the thickness. 基板にフィルムを貼り合わせるための真空槽と、この真空槽の搬入口または搬出口に設けた一対のシールローラとを有する真空ラミネート装置において、前記一対のシールローラには回転軸を有していて、前記搬入口または搬出口を通過する前記基板またはフィルムの厚さより大きい高さで、前記一対のシールローラの間に隙間を一時的に開けるために、前記一対のシールローラの回転軸間を押し広げるくさびを設ける真空ラミネート装置。   In a vacuum laminating apparatus having a vacuum chamber for attaching a film to a substrate and a pair of seal rollers provided at the inlet or outlet of the vacuum chamber, the pair of seal rollers have a rotation shaft. Pressing between the rotating shafts of the pair of seal rollers to temporarily open a gap between the pair of seal rollers at a height greater than the thickness of the substrate or film passing through the carry-in or carry-out port A vacuum laminator that provides a wedge to spread.
JP2008173314A 2008-07-02 2008-07-02 Vacuum laminator Active JP5093606B2 (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104457695A (en) * 2014-11-27 2015-03-25 苏州市欧博锐自动化科技有限公司 Paper inclination measuring system for laminator
CN114311631A (en) * 2022-03-07 2022-04-12 江油星联电子科技有限公司 Film pressing equipment for copper foil substrate

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS574194A (en) * 1980-06-10 1982-01-09 Hitachi Chemical Co Ltd Sealing structure for continuous pressure reduction bonding device
JPS57193531U (en) * 1981-06-02 1982-12-08
JPH08323915A (en) * 1995-05-30 1996-12-10 Hitachi Chem Co Ltd Method and apparatus for laminating photosensitive film

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS574194A (en) * 1980-06-10 1982-01-09 Hitachi Chemical Co Ltd Sealing structure for continuous pressure reduction bonding device
JPS57193531U (en) * 1981-06-02 1982-12-08
JPH08323915A (en) * 1995-05-30 1996-12-10 Hitachi Chem Co Ltd Method and apparatus for laminating photosensitive film

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104457695A (en) * 2014-11-27 2015-03-25 苏州市欧博锐自动化科技有限公司 Paper inclination measuring system for laminator
CN114311631A (en) * 2022-03-07 2022-04-12 江油星联电子科技有限公司 Film pressing equipment for copper foil substrate

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