JP2010011587A - Optically driven actuator - Google Patents

Optically driven actuator Download PDF

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JP2010011587A
JP2010011587A JP2008165986A JP2008165986A JP2010011587A JP 2010011587 A JP2010011587 A JP 2010011587A JP 2008165986 A JP2008165986 A JP 2008165986A JP 2008165986 A JP2008165986 A JP 2008165986A JP 2010011587 A JP2010011587 A JP 2010011587A
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light
drive
driven actuator
deformable
driving
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JP5380921B2 (en
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Natsuko Shioda
奈津子 塩田
Akira Kosaka
明 小坂
Yasutaka Tanimura
康隆 谷村
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Konica Minolta Inc
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Konica Minolta Inc
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an optically driven actuator which can be used for an optical device using light with the same or substantially the same wavelength as that of a driving light for driving a photo-deformable member to stably generate highly accurate displacement and a driving force caused by the displacement. <P>SOLUTION: The optically driven actuator includes a photo-deformable member 1 to be deformed by an irradiation of the drive light with a specific wavelength, a light source member 4 emitting the drive light, and a light guide member 2 arranged adjacent to the photo-deformable member 1, wherein at least a part of the photo-deformable member 1 or the light guide member 2 is covered with a light shield member 3 suppressing the transmission of the driving light therethrough. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

本発明は光を照射することで変形する光変形材料を用いたアクチュエータに関するものである。   The present invention relates to an actuator using a photo-deformable material that deforms when irradiated with light.

従来、アクチュエータとして、電力を供給することで駆動する電動モータを用いたものが多く採用されている。前記電動モータは内部に永久磁石とコイルとを備え、前記コイルに電力を供給することで、前記コイルと前記永久磁石の間で発生する磁力によって回転されるものである。また、設置場所の大きさ、形状等の制限によって、前記アクチュエータとして、前記可動部から離れた場所に設置された動力源と、駆動軸、歯車、プーリ、ベルト等の前記動力源と前記可動部とを機械的に連結し前記可動部に前記動力源より発生した動力を伝達する連結機構とを備えているものもある。   Conventionally, many actuators using an electric motor driven by supplying electric power have been adopted. The electric motor includes a permanent magnet and a coil therein, and is rotated by a magnetic force generated between the coil and the permanent magnet by supplying electric power to the coil. In addition, due to restrictions on the size, shape, etc. of the installation location, the power source installed at a location away from the movable portion as the actuator, the power source such as a drive shaft, gear, pulley, belt, etc. and the movable portion And a connecting mechanism for transmitting the power generated from the power source to the movable part.

近年、電子機器は小型化されてきつつある。前記電子機器の小型化に伴い、その内部に配置された物品の小型化も要求されており、当然アクチュエータの小型化も要求されている。そこで、小型の電動モータを用いたアクチュエータが開発されてきている。   In recent years, electronic devices have been reduced in size. Along with the downsizing of the electronic equipment, there is a demand for downsizing of articles disposed therein, and naturally downsizing of actuators is also required. Therefore, actuators using small electric motors have been developed.

また、特開2001−232600号公報には、光誘起相転移物質を膜状に形成すると共に可動膜の表面に固定し、前記光誘起相転移物質の膜状部材に2種の光を照射することで、前記可動膜を可逆的に変形させる光駆動型アクチュエータが記載されている。   Japanese Patent Laid-Open No. 2001-232600 discloses that a light-induced phase transition material is formed in a film shape and fixed on the surface of a movable film, and the light-induced phase transition material is irradiated with two types of light. Thus, an optically driven actuator that reversibly deforms the movable film is described.

しかしながら、特開2001-232600号公報に記載の発明では、アクチュエータの駆動に必要な波長の光が含まれた光が照射されている領域では、外部からの光に光誘起相転移物質が反応してしまい、アクチュエータの動作の精度が悪くなる。   However, in the invention described in Japanese Patent Application Laid-Open No. 2001-232232, in a region where light containing light having a wavelength necessary for driving the actuator is irradiated, the light-induced phase transition material reacts with light from the outside. As a result, the accuracy of the operation of the actuator is deteriorated.

そこで、特開平6−27427号公報には、光スイッチ、光変調器、高調波発生素子、短波長光源、モード変換器等として機能する光機能素子の光導波路を導波光が伝播するときに、基板から放射光が出て行くのを抑制している。
特開2001−232600号公報 特開平6−27427号公報
Therefore, in JP-A-6-27427, when guided light propagates through an optical waveguide of an optical functional element that functions as an optical switch, an optical modulator, a harmonic generation element, a short wavelength light source, a mode converter, or the like, Suppressing the emission of radiation from the substrate.
JP 2001-232600 A JP-A-6-27427

特開平6ー27427号公報に記載の発明では、光導波路から放射光が基板外に出るのを防ぎ、光導波路からの出射光のON、OFFや、放射光の強度を変調するものであり、光変形型アクチュエータに関する発明ではなく、外部より入射される光を遮光するものではない。また、光導波路を覆っていないので、光駆動型アクチュエータを駆動するための駆動光と同じ或いは略同じ波長の光が進入しやすく、前記駆動光と同じ或いは略同じ波長の光を用いる光学装置の内部で使用することは難しい。   In the invention described in JP-A-6-27427, the emitted light from the optical waveguide is prevented from coming out of the substrate, the emitted light from the optical waveguide is turned on and off, and the intensity of the emitted light is modulated. It is not an invention relating to a light deformation type actuator, and does not block light incident from the outside. Further, since the optical waveguide is not covered, light having the same or substantially the same wavelength as the driving light for driving the optically driven actuator is likely to enter, and an optical device using light having the same or substantially the same wavelength as the driving light is used. It is difficult to use inside.

そこで本発明は、光変形部材を駆動する駆動光と同じ又は略同じ波長の光を用いる光学装置に、使用することが可能であり、安定して高精度の変位及び変位に伴う駆動力を発生させることができる光駆動型アクチュエータを提供することを目的とする。   Therefore, the present invention can be used in an optical device that uses light having the same or substantially the same wavelength as the driving light that drives the light deformable member, and stably generates high-accuracy displacement and driving force associated with the displacement. It is an object to provide an optically driven actuator that can be made to operate.

上記目的を達成するために本発明は、所定波長の駆動光が照射されることで変形される光変形部材と、前記駆動光を出射する光源部材と、前記光変形部材に隣接配置され前記駆動光を前記光変形部材に導く導光部材とを有し、前記駆動光が照射されることで駆動される光駆動型アクチュエータであって、前記光変形部材、又は前記導光部材の少なくとも一部が前記駆動光が持つ波長域の光の透過を抑制する遮光部材で覆われている。   In order to achieve the above object, the present invention provides a light deformation member that is deformed by being irradiated with drive light having a predetermined wavelength, a light source member that emits the drive light, and a drive member that is disposed adjacent to the light deformation member. A light-driven actuator having a light guide member that guides light to the light deformable member and driven by being irradiated with the drive light, wherein the light deformable member or at least a part of the light guide member Is covered with a light shielding member that suppresses transmission of light in the wavelength region of the drive light.

この構成によると、前記遮光部材により、外部からの光が前記光変形部材に照射されるのを抑制することができる。このことにより、前記光変形部材が駆動光以外の光で変形されるのを抑制することができ、変位の精度を高くすることができる。   According to this structure, it can suppress that the light from the outside is irradiated to the said light deformation member by the said light shielding member. Thereby, it can suppress that the said optical deformation member is deform | transformed with lights other than drive light, and can raise the precision of a displacement.

また、前記遮光部材により、前記駆動光が外部に漏洩するのを抑制することができるので、駆動光が外部の雰囲気に対して有害であったり、何らかの作用を及ぼしたりするものであっても、外部の環境にかかわらず光駆動型アクチュエータを設置することができる。   Further, since the driving light can be prevented from leaking to the outside by the light shielding member, even if the driving light is harmful to the external atmosphere or has some effect, A light-driven actuator can be installed regardless of the external environment.

上記構成において、前記遮光部材は前記光変形部材及び前記導光部材の全体を囲み、前記光変形部材が変形されても、前記駆動光が持つ波長域の光の透過を抑制するものであってもよい。上記構成において、前記遮光部材が前記光変形部材よりも高い柔軟性を有する材料で作製されており、前記光変形部材の変形に伴って変形できるものであってもよい。   In the above configuration, the light shielding member surrounds the entire light deforming member and the light guide member, and suppresses transmission of light in a wavelength region of the driving light even when the light deforming member is deformed. Also good. The said structure WHEREIN: The said light-shielding member is produced with the material which has a softness | flexibility higher than the said optical deformation member, and can deform | transform with the deformation | transformation of the said optical deformation member.

この構成によると、前記光変形部材が変形しても、外部からの光が進入したり、外部に駆動光が漏洩したりするのを抑制することができる。これにより、光駆動型アクチュエータはより精度の高い変位を取り出すことが可能である。   According to this configuration, even if the light deformable member is deformed, it is possible to prevent external light from entering or leakage of driving light to the outside. As a result, the optically driven actuator can extract displacement with higher accuracy.

上記構成において、前記遮光部材は、内部が前記駆動光を反射することができるように形成されているものであってもよい。   The said structure WHEREIN: The said light shielding member may be formed so that the inside can reflect the said drive light.

この構成によると、前記駆動光が反射されることで、前記駆動光の光量が減衰するのを抑制することができるので、効率よく高精度の変位を取り出すことが可能である。また、光量の減衰を抑制することで、駆動に必要なエネルギを低減することが可能である。   According to this configuration, since the drive light is reflected, it is possible to suppress the light amount of the drive light from being attenuated, so that it is possible to efficiently extract a highly accurate displacement. In addition, energy required for driving can be reduced by suppressing the attenuation of the amount of light.

上記構成において、前記光源が前記遮光部材と前記光変形部材又は前記導光部材の間に配置されているものであってもよい。   The said structure WHEREIN: The said light source may be arrange | positioned between the said light-shielding member and the said optical deformation member, or the said light guide member.

上記構成において、前記光源部材が前記遮光部材の外側に配置され、前記駆動光を前記遮光部材で覆われた前記導光部材に導くための導波路を備えているものであってもよい。   The said structure WHEREIN: The said light source member may be arrange | positioned on the outer side of the said light shielding member, and may be provided with the waveguide for guiding the said drive light to the said light guide member covered with the said light shielding member.

この構成によると、前記光変形部材と前記光源部材とを離して配置することが可能であるので、前記光駆動型アクチュエータの設置自由度を挙げることができる。また、前記光駆動型アクチュエータを容易に遠隔操作することが可能である。   According to this configuration, since the light deformable member and the light source member can be arranged apart from each other, the degree of freedom in installing the light driven actuator can be increased. In addition, the light-driven actuator can be easily remotely operated.

上記構成において、光駆動型アクチュエータの使用例として、以下に示すものを挙げることができる。すなわち、前記光源部材が前記遮光部材の外側に配置され、前記駆動光を前記遮光部材で覆われた前記導光部材に導くための導波路を備えており、前記遮光部材は円筒部と、前記円筒部の両端部と連結された円板部と、前記円筒部の内面に内側に突出された突起部とを有しており、前記円板部の一方の中心を前記導波路が回転可能に貫通しており、他方の円板部の中心を回転可能に貫通する軸支部材が備えられており、前記軸支部材の遮光部材内部側の端部に固定された固定板が備えられており、前記固定板の中央に前記導光部材が配置されているとともに、前記固定板の周端部に前記突起部と接触可能に光変形部材が配置されており、前記光変形部材の変形によって前記突起部が押され前記遮光部材が回転する。   In the above configuration, examples of usage of the optically driven actuator include the following. That is, the light source member is disposed outside the light shielding member, and includes a waveguide for guiding the driving light to the light guide member covered with the light shielding member, the light shielding member including a cylindrical portion, It has a disk part connected to both ends of the cylindrical part, and a protrusion part protruding inwardly on the inner surface of the cylindrical part, and the waveguide can rotate around one center of the disk part. A shaft support member that passes through and rotates through the center of the other disk portion is provided, and a fixed plate that is fixed to the end of the shaft support member on the inner side of the light shielding member is provided. The light guide member is disposed at the center of the fixed plate, and a light deformable member is disposed at a peripheral end portion of the fixed plate so as to be in contact with the protrusion. The projection is pushed and the light shielding member rotates.

本発明によると、光変形部材を駆動する駆動光と同じ又は略同じ波長の光を用いる光学装置に、使用することが可能であり、安定して高精度の変位及び変位に伴う駆動力を発生させることができる光駆動型アクチュエータを提供することができる。   According to the present invention, it can be used in an optical device that uses light having the same or substantially the same wavelength as the driving light that drives the light deformable member, and stably generates a high precision displacement and a driving force associated with the displacement. An optically driven actuator that can be provided can be provided.

以下に、本発明の実施の形態について図面を参照して説明するが、本発明はこれらの実施形態に限定されるものではない。   Embodiments of the present invention will be described below with reference to the drawings, but the present invention is not limited to these embodiments.

光駆動型アクチュエータの概略構成について、図面を参照して説明する。図1は本発明にかかる光駆動型アクチュエータの概略斜視図であり、図2は図1に示す光アクチュエータの断面図である。図1、図2に示すように、光駆動型アクチュエータは、光変形部材1と、導光部材2と、遮光部材3と、光源部材4とを有している。   A schematic configuration of the optically driven actuator will be described with reference to the drawings. FIG. 1 is a schematic perspective view of an optically driven actuator according to the present invention, and FIG. 2 is a cross-sectional view of the optical actuator shown in FIG. As shown in FIGS. 1 and 2, the light-driven actuator includes a light deformation member 1, a light guide member 2, a light shielding member 3, and a light source member 4.

光変形部材1は所定波長の光の照射によって変形される光変形材料で形成された平板状部材である。光変形材料として、ジアリールエテン、アゾベンゼン等のフォトクロミック材料単体又はその化合物、あるいは、バイモルフ構造を有するPLZT等を挙げることができる。   The light deformable member 1 is a flat member formed of a light deformable material that is deformed by irradiation with light having a predetermined wavelength. Examples of the photo-deformable material include a photochromic material alone or a compound thereof such as diarylethene and azobenzene, or PLZT having a bimorph structure.

図1、図2に示すように、導光部材2は駆動光が入射される入射部21と、入射部21より入射した駆動光を出射する出射部22とを有する平板状部材である。導光部材2は入射部より入射された駆動光の光量が減衰するのを抑制しつつ端部まで導光することができる透明ガラス、透明樹脂等を基材とし、その基材に基材と屈折率の異なる添加材(たとえば架橋ポリメタクリル酸メチル等の微粒子ポリマー)を添加したものを薄板状に作製したものである。導光部材2は入射部21より入射された光を拡散させ、出射部22より出射される光の光束を均一化することができる。   As shown in FIGS. 1 and 2, the light guide member 2 is a flat plate member having an incident portion 21 into which driving light is incident and an emitting portion 22 that emits driving light incident from the incident portion 21. The light guide member 2 is made of a transparent glass, a transparent resin, or the like that can guide light to the end while suppressing the amount of driving light incident from the incident portion from being attenuated. A material obtained by adding an additive having a different refractive index (for example, a fine particle polymer such as cross-linked polymethyl methacrylate) is formed into a thin plate shape. The light guide member 2 can diffuse the light incident from the incident portion 21 and uniformize the light beam emitted from the light emitting portion 22.

添加材を添加するもの以外にも、内部に光を拡散させるための無数の気泡を形成したもの、出射部22の表面に微細な傷をつけすりガラス状に形成したもの等を採用することができる。なお、出射部22の表面は積層時に光変形部材1と接合されるので、平滑な面であることが好ましい。そのため、表面に凹凸をつけて形成された出射部を有するものの場合、出射部の上に光の透過率が高いクリア層が形成されていることが好ましい。このクリア層としては、予め出射部22の表面に施工されていても良く、透過性が高い接着剤で代用してもよい。なお、以下の実施形態では特に記載の無い限り、導光部材2としてガラス基材に添加剤を添加した材料で作製したものを採用している。   In addition to those to which additives are added, those in which countless bubbles for diffusing light inside are formed, those in which the surface of the emission part 22 is finely scratched and formed in a glass shape, etc. can be adopted. . In addition, since the surface of the emission part 22 is joined with the optical deformation member 1 at the time of lamination, a smooth surface is preferable. For this reason, in the case of having an emission part formed with unevenness on the surface, it is preferable that a clear layer having a high light transmittance is formed on the emission part. As this clear layer, the surface of the emission part 22 may be applied in advance, or an adhesive having high permeability may be substituted. In the following embodiments, unless otherwise specified, a light guide member 2 made of a material obtained by adding an additive to a glass substrate is employed.

導光部材2は出射部22が光変形部材1と対面するように配置されている。光変形部材1と導光部材2とは透光性を有する接着剤による接着、溶着、圧着等の従来よく知られた駆動光が透過するのを妨げない方法によってなされる。また、スパッタリング、蒸着等の物理的あるいは化学的な製膜法にて、光変形部材1と導光部材2とを交互に製膜して積層体を形成することも可能である。本実施形態の光駆動型アクチュエータでは、光変形部材1と導光部材2とを接着剤により貼り合わせるものが採用されている。導光部材2は光変形部材1の変形にあわせて変形される柔軟性を有している。   The light guide member 2 is disposed such that the emission portion 22 faces the light deformable member 1. The light deformable member 1 and the light guide member 2 are made by a method that does not prevent the transmission of well-known driving light, such as adhesion, welding, and pressure bonding using a translucent adhesive. It is also possible to form a laminate by alternately forming the light deformable member 1 and the light guide member 2 by a physical or chemical film forming method such as sputtering or vapor deposition. In the light-driven actuator according to the present embodiment, a member in which the light deformable member 1 and the light guide member 2 are bonded with an adhesive is employed. The light guide member 2 has flexibility to be deformed in accordance with the deformation of the light deformable member 1.

図1、図2に示すように遮光部材3は光変形部材1と導光部材2とを覆うように形成されている箱体である。遮光部材3は光変形部材1に照射される駆動光が外部に漏洩するのを抑制するとともに、外部より駆動光と同じ波長の光が内部に侵入するのを抑制するための部材である。遮光部材3は内面が駆動光を反射することができるように形成されている。遮光部材3は光変形部材1の変形にあわせて伸縮できるように柔軟性を有した部材で形成されている。   As shown in FIGS. 1 and 2, the light blocking member 3 is a box formed so as to cover the light deformable member 1 and the light guide member 2. The light shielding member 3 is a member for suppressing the light having the same wavelength as that of the drive light from entering the inside from the outside while suppressing the drive light irradiated to the light deformable member 1 from leaking to the outside. The light shielding member 3 is formed so that the inner surface can reflect the drive light. The light shielding member 3 is formed of a flexible member so that it can be expanded and contracted in accordance with the deformation of the light deformable member 1.

また、遮光部材3として、駆動光と同じ波長の光の透過を抑制することができる膜であって、光変形部材1または導光部材2の少なくとも外部に露出している部分を覆うように形成されているものであってもよい。   Further, the light shielding member 3 is a film capable of suppressing transmission of light having the same wavelength as that of the drive light, and is formed so as to cover at least a portion exposed to the outside of the light deformation member 1 or the light guide member 2. It may be what has been done.

光源部材4は電力が供給されることで駆動光を出射する光源41と、その先端部が導光部材2の入射部21と対面して配置されており、駆動光を入射部21に導光する導波路42とを有している。光源41としては、たとえば、LED素子、レーザダイオード素子、有機EL素子等の電力が供給されることで駆動光を出射することができるものを広く採用することが可能である。光源部材4には、図示を省略しているが、光源41に電力を供給するための配線が備えられている。導波路42は駆動光を光量の減衰を抑制しつつ導光部材2の入射部21に導光するものであり、それには限定されないが、光ファイバー等を挙げることができる。   The light source member 4 is provided with a light source 41 that emits driving light when power is supplied, and a tip portion of the light source member 4 that faces the incident portion 21 of the light guide member 2, and guides the driving light to the incident portion 21. And a waveguide 42. As the light source 41, for example, a light source that can emit drive light by supplying power such as an LED element, a laser diode element, or an organic EL element can be widely used. Although not shown, the light source member 4 is provided with wiring for supplying power to the light source 41. The waveguide 42 guides the drive light to the incident portion 21 of the light guide member 2 while suppressing the attenuation of the light amount, and is not limited thereto, and examples thereof include an optical fiber.

(第1実施形態)
本発明にかかる光駆動型アクチュエータを図面を参照して説明する。図3は本発明にかかる光駆動型アクチュエータの一例の断面図である。図3に示す光駆動型アクチュエータA1は、フォトクロミック材料を用いた光変形部材1cを備えている。光変形部材は変形に必要な駆動光として、波長が350nmの紫外光である第1駆動光、波長が540nmの可視光である第2駆動光によって変形される。なお、第1駆動光、第2駆動光の主たる波長は、光変形部材1を構成するフォトクロミック材料によって変わるものであるが、紫外光と可視光とが用いられている場合が多い。
(First embodiment)
An optically driven actuator according to the present invention will be described with reference to the drawings. FIG. 3 is a cross-sectional view of an example of an optically driven actuator according to the present invention. The optically driven actuator A1 shown in FIG. 3 includes an optical deformation member 1c using a photochromic material. The light deformable member is deformed by drive light necessary for deformation by first drive light that is ultraviolet light having a wavelength of 350 nm and second drive light that is visible light having a wavelength of 540 nm. The main wavelengths of the first driving light and the second driving light vary depending on the photochromic material constituting the light deformable member 1, but ultraviolet light and visible light are often used.

ここで、フォトクロミック材料について説明する。フォトクロミック材料は、所定波長の光が照射されることで分子量の変化を伴わず分子内での化学結合の組み替えなどによって分子の構造変化(異性化)が発生し、この異性化に従って変形(変位)が発生する材料である。また、光変形部材を構成するフォトクロミック材料は結晶の配向によって変形方向を変化させることができる特性を有している。ここでは、光変形部材1cが長手方向に伸縮変形する。   Here, the photochromic material will be described. Photochromic materials undergo molecular structural changes (isomerization) due to recombination of chemical bonds within the molecule without changing molecular weight when irradiated with light of a predetermined wavelength, and deform (displace) according to this isomerization. Is a material that generates Further, the photochromic material constituting the light deformable member has a characteristic that the deformation direction can be changed by the orientation of the crystal. Here, the optically deformable member 1c expands and contracts in the longitudinal direction.

光源41は第1駆動光(紫外光)及び第2駆動光(可視光)を選択的に出射することができる光源である。図3に示すように、光駆動型アクチュエータA1は、光源部材4が遮光部材3の外部に配置されている。よって、導波路42も一部が遮光部材3の外部に突出されており、外部に突出している部分には駆動光と同じ波長の光が透過するのを抑制する遮光部421が形成されている。遮光部421と遮光部材3とは接合部から駆動光と同じ波長の光が侵入するのを防ぐことができるように接着されている。なお、遮光部421と遮光部材3とが一体的に形成されているものであってもよい。   The light source 41 is a light source that can selectively emit first driving light (ultraviolet light) and second driving light (visible light). As shown in FIG. 3, in the light-driven actuator A <b> 1, the light source member 4 is disposed outside the light shielding member 3. Therefore, a part of the waveguide 42 is also projected to the outside of the light shielding member 3, and a light shielding portion 421 that suppresses transmission of light having the same wavelength as the driving light is formed in the portion projecting to the outside. . The light shielding part 421 and the light shielding member 3 are bonded so that light having the same wavelength as the driving light can be prevented from entering from the joint part. The light shielding part 421 and the light shielding member 3 may be integrally formed.

光駆動型アクチュエータA1は光源41に電力が供給されると、光源41より第1駆動光が出射される。光源41より出射された第1駆動光は導光路42を介して遮光部材3の内部に導光される。導光路42にて導光された第1駆動光は導光部材2の入射部21より入射される。第1駆動光は導光部材2で拡散され、光束が均一化されて出射部22より出射される。出射部22は光変形部材1cと接着されており、第1駆動光は光変形部材1cに照射される。   When power is supplied to the light source 41, the light-driven actuator A1 emits first drive light from the light source 41. The first drive light emitted from the light source 41 is guided to the inside of the light shielding member 3 through the light guide path 42. The first drive light guided by the light guide path 42 is incident from the incident portion 21 of the light guide member 2. The first drive light is diffused by the light guide member 2, and the light flux is made uniform and emitted from the emission part 22. The emission part 22 is bonded to the light deformable member 1c, and the first drive light is irradiated to the light deformable member 1c.

第1駆動光が照射された光変形部材1cは長手方向に伸長変形される。光変形部材1cの変形に伴って導光部材2及び遮光部材3は変形される。これにより、光駆動型アクチュエータA1が伸長状態に変形される。   The light deformable member 1c irradiated with the first drive light is elongated and deformed in the longitudinal direction. The light guide member 2 and the light shielding member 3 are deformed along with the deformation of the light deformable member 1c. As a result, the optically driven actuator A1 is deformed to the extended state.

光源41からの第1駆動光の照射を停止すると、光変形部材1cへの第1駆動光の照射が停止される。光変形部材1cへの外部から入射される変形にかかる波長の光(外乱光)は遮光部材3にて遮られているので、光変形部材1cに第2駆動光と同じ波長の光が照射されない。また、熱エネルギ、外部からの力が作用していない状態の場合、光変形部材1cは伸長状態を維持する。   When the irradiation of the first drive light from the light source 41 is stopped, the irradiation of the first drive light to the light deformable member 1c is stopped. Since the light having a wavelength (disturbance light) applied to the light deformable member 1c from the outside is blocked by the light blocking member 3, the light deformable member 1c is not irradiated with light having the same wavelength as the second drive light. . Further, in the state where heat energy and external force are not acting, the light deformable member 1c maintains the extended state.

光源41より第2駆動光が出射されると、第2駆動光は動向路42を介して入射部21に入射される。第2駆動光は導光部材2で拡散され、光束が均一化されて出射部22より光変形部材1cに照射される。光変形部材1cは第2駆動光が照射されることで、収縮変形され、第1駆動光が照射される前の状態に戻る。これにより、導光部材2及び遮光部材3も収縮変形し、光駆動型アクチュエータA1も収縮変形される。光源41からの第2駆動光の出射を停止しても、第1駆動光を停止したときと同様に、光変形部材1cは収縮状態を維持する。   When the second drive light is emitted from the light source 41, the second drive light is incident on the incident portion 21 via the movement path 42. The second driving light is diffused by the light guide member 2, the light flux is made uniform, and is irradiated to the light deformable member 1 c from the emitting portion 22. The light deformable member 1c is contracted and deformed by being irradiated with the second drive light, and returns to the state before the first drive light is irradiated. Thereby, the light guide member 2 and the light shielding member 3 are also contracted and deformed, and the light-driven actuator A1 is contracted and deformed. Even when the emission of the second drive light from the light source 41 is stopped, the light deformable member 1c maintains the contracted state in the same manner as when the first drive light is stopped.

このように、第1駆動光及び第2駆動光を照射することで、光駆動型アクチュエータA1は収縮状態と伸長状態とに選択的に変形される。また、第1駆動光及び第2駆動光を交互に照射させることで、光駆動型アクチュエータA1は収縮状態と伸長状態とを繰り返す。   In this way, by irradiating the first drive light and the second drive light, the light drive actuator A1 is selectively deformed into a contracted state and an extended state. Further, by alternately irradiating the first drive light and the second drive light, the light drive actuator A1 repeats the contracted state and the extended state.

光駆動型アクチュエータA1のように、遮光部材3を備えていることで、外乱光が光変形部材1cに照射されるのを抑制することができる。これにより、必要以上に駆動光が照射されて、光変形部材1cが不意に変形するのを抑制することができ、光駆動型アクチュエータA1は高精度で変位を発生させることができる。また、遮光部材3を備えていることで、駆動光が外部に漏洩するのを抑制することができるので、光源41より出射された駆動光を効率よく光変形部材1cに照射することができる。これにより、光駆動型アクチュエータA1の消費エネルギを低減することが可能である。なお、光変形部材1cは長手方向に伸縮変形するものとしているが、フォトクロミック材料の結晶配向によって変形方向を変更することが可能である。   By providing the light shielding member 3 as in the light-driven actuator A1, it is possible to suppress the disturbance light from being irradiated to the light deformation member 1c. Thereby, it is possible to suppress the light deformation member 1c from being unexpectedly deformed by being irradiated with drive light more than necessary, and the light drive actuator A1 can generate displacement with high accuracy. Moreover, since the light shielding member 3 is provided, it is possible to suppress the drive light from leaking to the outside, so that the drive light emitted from the light source 41 can be efficiently applied to the light deformation member 1c. Thereby, it is possible to reduce the energy consumption of the light-driven actuator A1. In addition, although the optical deformation member 1c is assumed to be elastically deformed in the longitudinal direction, the deformation direction can be changed depending on the crystal orientation of the photochromic material.

(第2実施形態)
本発明にかかる光駆動型アクチュエータの他の例を図面を参照して説明する。図4は本発明にかかる光駆動型アクチュエータの一例の断面図である。図4に示す光駆動型アクチュエータA2はバイモルフ構造のPLZTで作製された光変形部材1pを用いている。
(Second Embodiment)
Another example of the optically driven actuator according to the present invention will be described with reference to the drawings. FIG. 4 is a cross-sectional view of an example of an optically driven actuator according to the present invention. The optically driven actuator A2 shown in FIG. 4 uses an optically deformable member 1p made of PLZT having a bimorph structure.

PLZTは駆動光(紫外光)が照射されると変形し、照射が停止されると元の状態に復帰するセラミック材料である。光変形部材をPLZTを用いて作製した場合、変形状態を維持するには駆動光を照射し続ける必要があるが、1種の駆動光で変形を制御できる。   PLZT is a ceramic material that deforms when irradiated with drive light (ultraviolet light) and returns to its original state when irradiation is stopped. When the optically deformable member is manufactured using PLZT, it is necessary to continuously irradiate the drive light to maintain the deformed state, but the deformation can be controlled with one kind of drive light.

光源41は第1駆動光(紫外光)及び第2駆動光(可視光)を選択的に出射することができる光源である。図3に示すように、光駆動型アクチュエータA1は、光源部材4が遮光部材3の外部に配置されている。よって、導波路42も一部が遮光部材3の外部に突出されており、外部に突出している部分には駆動光と同じ波長の光が透過するのを抑制する遮光部421が形成されている。遮光部421と遮光部材3とは接合部から駆動光と同じ波長の光が侵入するのを防ぐことができるように接着されている。なお、遮光部421と遮光部材3とが一体的に形成されているものであってもよい。   The light source 41 is a light source that can selectively emit first driving light (ultraviolet light) and second driving light (visible light). As shown in FIG. 3, in the light-driven actuator A <b> 1, the light source member 4 is disposed outside the light shielding member 3. Therefore, a part of the waveguide 42 is also projected to the outside of the light shielding member 3, and a light shielding portion 421 that suppresses transmission of light having the same wavelength as the driving light is formed in the portion projecting to the outside. . The light shielding part 421 and the light shielding member 3 are bonded so that light having the same wavelength as the driving light can be prevented from entering from the joint part. The light shielding part 421 and the light shielding member 3 may be integrally formed.

光駆動型アクチュエータA2は光源41に電力が供給されると、光源41より駆動光が出射される。光源41より出射された駆動光は導光路42を介して遮光部材3の内部に導光される。導光路42にて導光された駆動光は導光部材2の入射部21より入射される。駆動光は導光部材2で拡散され、光束が均一化されて出射部22より出射される。出射部22は光変形部材1pと接着されており、駆動光は光変形部材1pに照射される。   When power is supplied to the light source 41, the light driving actuator A2 emits driving light from the light source 41. The drive light emitted from the light source 41 is guided into the light shielding member 3 through the light guide path 42. The drive light guided by the light guide path 42 is incident from the incident portion 21 of the light guide member 2. The drive light is diffused by the light guide member 2, and the light flux is made uniform and emitted from the emission part 22. The emission part 22 is bonded to the light deformable member 1p, and the drive light is irradiated to the light deformable member 1p.

駆動光が照射された光変形部材1pは長手方向に伸長変形される。光変形部材1pの変形に伴って導光部材2及び遮光部材3は変形される。これにより、光駆動型アクチュエータA2が伸長状態に変形される。   The light deformation member 1p irradiated with the drive light is elongated and deformed in the longitudinal direction. The light guide member 2 and the light shielding member 3 are deformed along with the deformation of the light deformable member 1p. As a result, the optically driven actuator A2 is deformed to the extended state.

光源41からの駆動光が出射されている間、光変形部材1pは伸長状態を維持する。このとき、光変形部材1pへの外部から入射される変形にかかる波長の光(外乱光)は遮光部材3にて遮られているので、光変形部材1pに駆動光と同じ波長の光が照射されない。また、熱エネルギ、外部からの力が作用していない状態の場合、光変形部材1pは意図しない変形はしない。   While the drive light from the light source 41 is emitted, the light deformable member 1p maintains the extended state. At this time, since light having a wavelength (disturbance light) applied to the light deformation member 1p from the outside is blocked by the light blocking member 3, the light deformation member 1p is irradiated with light having the same wavelength as the drive light. Not. Further, in the state where heat energy and external force are not acting, the light deformable member 1p is not deformed unintentionally.

光源41より駆動光が停止されると、光変形部材1pへの駆動光の照射が停止される。光変形部材1pは駆動光の照射が停止されることで、収縮変形され、駆動光が照射される前の状態に戻る。これにより、導光部材2及び遮光部材3も収縮変形し、光駆動型アクチュエータA2も収縮変形される。遮光部材3によって外乱光の内部への照射が遮られるので光変形部材1pは収縮状態を維持する。   When the driving light is stopped by the light source 41, the irradiation of the driving light to the light deformable member 1p is stopped. The light deformation member 1p is contracted and deformed by stopping the irradiation of the driving light, and returns to the state before the driving light is irradiated. Thereby, the light guide member 2 and the light shielding member 3 are also contracted and deformed, and the light-driven actuator A2 is contracted and deformed. Since the light is disturbed by the light blocking member 3, the light deformable member 1p maintains the contracted state.

このように、駆動光の照射、停止を切り替えることで、光駆動型アクチュエータA2は収縮状態と伸長状態とに選択的に変形される。また、駆動光の照射と停止を繰り返すことで、光駆動型アクチュエータA1は収縮状態と伸長状態とを繰り返す。   In this way, the light-driven actuator A2 is selectively deformed between the contracted state and the extended state by switching between irradiation and stop of the drive light. Further, by repeatedly irradiating and stopping the drive light, the light-driven actuator A1 repeats the contracted state and the extended state.

光駆動型アクチュエータA2のように、遮光部材3を備えていることで、外乱光が光変形部材1pに照射されるのを抑制することができる。これにより、必要以上に駆動光が照射されて、光変形部材1pが不意に変形するのを抑制することができ、光駆動型アクチュエータA2は高精度で変位を発生させることができる。また、遮光部材3を備えていることで、駆動光が外部に漏洩するのを抑制することができるので、光源41より出射された駆動光を効率よく光変形部材1pに照射することができる。これにより、光駆動型アクチュエータA2の消費エネルギを低減することが可能である。なお、光変形部材1pは長手方向に伸縮変形するものとしているが、PLZTの結晶配向によって変形方向を変更することが可能である。   By providing the light shielding member 3 as in the light-driven actuator A2, it is possible to suppress the disturbance light from being irradiated to the light deformation member 1p. Thereby, it is possible to suppress the light deformation member 1p from being unexpectedly deformed by being irradiated with drive light more than necessary, and the light drive actuator A2 can generate displacement with high accuracy. Further, since the light shielding member 3 is provided, it is possible to suppress the drive light from leaking to the outside, so that the drive light emitted from the light source 41 can be efficiently applied to the light deformation member 1p. Thereby, it is possible to reduce the energy consumption of the light-driven actuator A2. In addition, although the optical deformation member 1p expands and contracts in the longitudinal direction, the deformation direction can be changed by the crystal orientation of PLZT.

光駆動型アクチュエータA1、A2を用いる場合、導波路42の長さを調整することで、離れた位置からの遠隔操作が可能である。しかしながら、導波路42での光量の損失が0ではないので、長くなりすぎないものが好ましい。また、導光部材2、遮光部材3及び光変形部材1c(1p)と光源部材4とが離れて配置されているので、光駆動型アクチュエータを設置する場所が制限されにくい。   When the optically driven actuators A1 and A2 are used, the length of the waveguide 42 can be adjusted to enable remote operation from a remote position. However, since the loss of light quantity in the waveguide 42 is not zero, it is preferable that the length is not too long. Further, since the light guide member 2, the light shielding member 3, the light deformable member 1c (1p), and the light source member 4 are arranged apart from each other, the place where the light driven actuator is installed is not easily limited.

(第3実施形態)
本発明にかかる光駆動型アクチュエータのさらに他の例について図面を参照して説明する。図5は本発明にかかる光駆動型アクチュエータの一例の断面図である。図5に示す光駆動型アクチュエータBは遮光部材3で覆われている領域の内部に光源部材5が配置されている。図5に示す光駆動型アクチュエータB1は、フォトクロミック材料を用いた光変形部材1cを備えている。光源部材5以外は光駆動型アクチュエータA1と同様の構成を有しており、実質上同一の部材には同じ符号が付してある。
(Third embodiment)
Still another example of the optically driven actuator according to the present invention will be described with reference to the drawings. FIG. 5 is a cross-sectional view of an example of an optically driven actuator according to the present invention. In the light-driven actuator B shown in FIG. 5, the light source member 5 is arranged inside the region covered with the light shielding member 3. The optically driven actuator B1 shown in FIG. 5 includes an optical deformation member 1c using a photochromic material. Except the light source member 5, it has the same configuration as the optically driven actuator A1, and substantially the same members are denoted by the same reference numerals.

光源部材5は光変形部材1cを駆動することができる第1駆動光及び第2駆動光を選択的に出射することができるものである。図5に示す光駆動型アクチュエータB1において、光源部材5は第1駆動光を出射することができる第1光源511と、第2駆動光を出射することができる第2光源512と、第1光源511及び第2光源512より出射された駆動光を導光部材2の入射部21に導光する導波路52とを有している。図5に示すように、第1光源511と第2光源512とは、光変形部材1cの伸縮変形方向(ここでは、長手方向)の両端部と近接して配置されている。   The light source member 5 can selectively emit the first driving light and the second driving light that can drive the light deformable member 1c. In the light-driven actuator B1 shown in FIG. 5, the light source member 5 has a first light source 511 that can emit first drive light, a second light source 512 that can emit second drive light, and a first light source. 511 and a waveguide 52 for guiding the drive light emitted from the second light source 512 to the incident portion 21 of the light guide member 2. As shown in FIG. 5, the first light source 511 and the second light source 512 are disposed close to both ends of the optical deformation member 1c in the expansion / contraction deformation direction (longitudinal direction here).

光駆動型アクチュエータBでは第1光源511より第1駆動光を出射し光変形部材1cを伸長変形させ、第2光源512より第2駆動光を出射し光変形部材1cを収縮変形させるものである。光変形部材1cの変形及び光変形部材1cの変形に伴う光駆動型アクチュエータB1の変形の過程は、図3に示す光駆動型アクチュエータA1と同じであり詳細は省略する。   In the optically driven actuator B, the first driving light is emitted from the first light source 511 to elongate and deform the light deformation member 1c, and the second driving light is emitted from the second light source 512 to contract and deform the light deformation member 1c. . The deformation process of the optically deformable member 1c and the deformation process of the optically driven actuator B1 accompanying the deformation of the optically deformable member 1c are the same as those of the optically driven actuator A1 shown in FIG.

このように光源部材5を遮光部材3で覆われた領域の内部に配置することで、光源部材5より出射された駆動光を効率よく光変形部材1cに照射することが可能である。光源部材5より出射された駆動光の光量を抑えつつ、十分な変位及び駆動力を発生する光駆動型アクチュエータBを提供することが可能である。なお、光駆動型アクチュエータB1において、光変形部材1cとして長手方向に伸縮変形するものを採用しているが、それに限定されるものではない。   By arranging the light source member 5 in the region covered with the light shielding member 3 in this way, it is possible to efficiently irradiate the light deformable member 1c with the driving light emitted from the light source member 5. It is possible to provide an optically driven actuator B that generates sufficient displacement and driving force while suppressing the amount of driving light emitted from the light source member 5. In the light-driven actuator B1, a light deformation member 1c that expands and contracts in the longitudinal direction is employed, but the light deformation member 1c is not limited thereto.

(第4実施形態)
本発明にかかる光駆動型アクチュエータのさらに他の例について図面を参照して説明する。図6は本発明にかかる光駆動型アクチュエータの一例の断面図である。図6に示す光駆動型アクチュエータB2は遮光部材3で覆われている領域の内部に光源部材5bが配置されている。図6に示す光駆動型アクチュエータB2は、バイモルフ構造のPLZTを用いた光変形部材1pを備えている。光源部材5b以外は光駆動型アクチュエータA2と同様の構成を有しており、実質上同一の部材には同じ符号が付してある。
(Fourth embodiment)
Still another example of the optically driven actuator according to the present invention will be described with reference to the drawings. FIG. 6 is a cross-sectional view of an example of an optically driven actuator according to the present invention. In the light-driven actuator B <b> 2 shown in FIG. 6, the light source member 5 b is disposed inside the area covered with the light shielding member 3. The optically driven actuator B2 shown in FIG. 6 includes an optical deformation member 1p using a bimorph-structured PLZT. Except the light source member 5b, it has the same configuration as the optically driven actuator A2, and substantially the same members are denoted by the same reference numerals.

光源部材5bは光変形部材1pを駆動することができる駆動光を出射することができるものである。図6に示す光駆動型アクチュエータB2において、光源部材5bは駆動光を出射することができる光源51b、光源51bより出射された駆動光を導光部材2の入射部21に導光する導波路52bとを有している。図6に示すように、光源51bは、光変形部材1pの伸縮変形方向(ここでは、長手方向)の端部の一方と近接して配置されている。   The light source member 5b can emit drive light that can drive the light deformable member 1p. In the optically driven actuator B2 shown in FIG. 6, the light source member 5b can emit drive light, and the waveguide 52b guides the drive light emitted from the light source 51b to the incident portion 21 of the light guide member 2. And have. As shown in FIG. 6, the light source 51b is disposed close to one of the end portions of the optical deformation member 1p in the expansion / contraction deformation direction (here, the longitudinal direction).

光駆動型アクチュエータB2では光源51bより駆動光を出射し光変形部材1pを伸長変形させ、駆動光の照射を停止することで光変形部材1pを収縮変形させるものである。光変形部材1pの変形及び光変形部材1pの変形に伴う光駆動型アクチュエータB2の変形の過程は、図4に示す光駆動型アクチュエータA2と同じであり詳細は省略する。   The light-driven actuator B2 emits drive light from the light source 51b, expands and deforms the light deformable member 1p, and stops the irradiation of the drive light to contract and deform the light deformable member 1p. The deformation process of the optically deformable member 1p and the deformation process of the optically driven actuator B2 accompanying the deformation of the optically deformable member 1p are the same as those of the optically driven actuator A2 shown in FIG.

このように光源部材5bを遮光部材3で覆われた領域の内部に配置することで、光源部材5bより出射された駆動光を効率よく光変形部材1pに照射することが可能である。光源部材5より出射された駆動光の光量を抑えつつ、十分な変位及び駆動力を発生する光駆動型アクチュエータB2を提供することが可能である。また、光駆動型アクチュエータB2の光源部材5bは1種類の駆動光を照射する光源51bを備えていればよく、小型であり、遮光部材3で覆われた領域に収まりやすい。なお、光駆動型アクチュエータB2において、光変形部材1pとして長手方向に伸縮変形するものを採用しているが、それに限定されるものではない。   By disposing the light source member 5b in the region covered with the light shielding member 3 in this way, it is possible to efficiently irradiate the light deformation member 1p with the driving light emitted from the light source member 5b. It is possible to provide an optically driven actuator B2 that generates sufficient displacement and driving force while suppressing the amount of driving light emitted from the light source member 5. The light source member 5b of the light-driven actuator B2 only needs to include the light source 51b that emits one type of drive light, and is small in size and easily fit in the region covered with the light shielding member 3. In the light-driven actuator B2, a light deformation member 1p that expands and contracts in the longitudinal direction is employed, but the light deformation member 1p is not limited thereto.

(第5実施形態)
本発明にかかる光駆動型アクチュエータの他の例について図面を参照して説明する。図7は本発明にかかる光駆動型アクチュエータの他の例の断面図である。図7に示すように、光駆動型アクチュエータCは、光変形部材としてフォトクロミック材料で作製した光変形部材1cを用いている。それには限定されないが、光変形部材1cは長手方向に伸縮変形する。光駆動型アクチュエータCは、4個の薄型の光変形部材1cと3個の薄型の導光部材2とが交互に接着され、積層された積層体11を備えている。
(Fifth embodiment)
Another example of the optically driven actuator according to the present invention will be described with reference to the drawings. FIG. 7 is a cross-sectional view of another example of the optically driven actuator according to the present invention. As shown in FIG. 7, the light-driven actuator C uses a light deformable member 1c made of a photochromic material as a light deformable member. Although not limited to this, the optical deformation member 1c is elastically deformed in the longitudinal direction. The light-driven actuator C includes a laminated body 11 in which four thin light deformable members 1c and three thin light guide members 2 are alternately bonded.

接着方法としては、接着剤を用いた接着、溶着、光変形部材1c及び(又は)導光部材2を交互に蒸着、スパッタリング等の製膜方法で製膜する方法等、従来よく知られた方法を採用することができる。ここでは、接着剤による接着が採用されている。なお、導光部材2は光変形部材1cを引っ張るのを抑制するために、柔軟性を備えた材料で形成されることが好ましい。また、柔軟性を有する接着方法を用いてもよい。   As a bonding method, a conventionally well-known method such as bonding using an adhesive, welding, a method in which the light deformable member 1c and / or the light guide member 2 are alternately formed by a film forming method such as vapor deposition or sputtering, etc. Can be adopted. Here, adhesion by an adhesive is employed. The light guide member 2 is preferably formed of a material having flexibility in order to suppress pulling of the light deformable member 1c. Further, a bonding method having flexibility may be used.

積層体11において、導光部材2は出射部22が光変形部材1cと接着されており、光変形部材1cと接着されていない側面に入射部21が形成されている。フォトクロミック材料は照射される駆動光の出力にもよるが、その表面に光が照射されるものであり、深部には光が照射されにくい。これにより、駆動光が照射されている表面に配置されたフォトクロミック材料の結晶には駆動光が照射され変形されるが、深部に配置された結晶には駆動光が照射されず変形されない。   In the laminated body 11, the light guide member 2 has the emitting portion 22 bonded to the light deformable member 1c and the incident portion 21 formed on the side surface not bonded to the light deformable member 1c. Although the photochromic material depends on the output of the driving light to be irradiated, the surface is irradiated with light, and the deep portion is not easily irradiated with light. Thereby, the crystal of the photochromic material disposed on the surface irradiated with the drive light is irradiated with the drive light and deformed, but the crystal disposed in the deep part is not irradiated with the drive light and is not deformed.

しかしながら、光変形部材1cを薄型に形成し隣り合う光変形部材1cの間に導光部材2をはさんで接着積層することで、同量のフォトクロミック材料を使って1層の光変形部材1cを作製したものに比べ、形状をコンパクトにするとともに、駆動光が照射される光変形部材1cの面積を大きくすることができる。これにより、駆動光の光量、光変形部材1cの形状、大きさを変えることなく、光変形部材1cの変位を大きくすることができ、変位に伴って発生する駆動力も大きくすることが可能である。   However, by forming the light deformable member 1c thin and adhering and laminating the light guide member 2 between the adjacent light deformable members 1c, one layer of the light deformable member 1c can be formed using the same amount of photochromic material. Compared to the manufactured one, the shape can be made compact, and the area of the light deformable member 1c irradiated with the drive light can be increased. Accordingly, the displacement of the light deformable member 1c can be increased without changing the light amount of the drive light, the shape and size of the light deformable member 1c, and the driving force generated with the displacement can be increased. .

光駆動型アクチュエータCでは遮光部材3で覆われた内部に光源部材5を備えたものを例に説明しているが、遮光部材3の外部に光源部材4を備えた光駆動型アクチュエータにも積層体11を採用することが可能である。また、積層体11を構成する光変形部材としてフォトクロミック材料で作製された光変形部材1cを採用しているが、バイモルフ構造のPLZTで構成された光変形部材1pでも同様の積層体を構成することが可能である。   In the light-driven actuator C, an example in which the light source member 5 is provided inside the light-shielding member 3 is described. However, the light-driven actuator C is also stacked on the light-driven actuator provided with the light source member 4 outside the light shielding member 3. It is possible to employ the body 11. Moreover, although the optical deformation member 1c produced with the photochromic material is employ | adopted as the optical deformation member which comprises the laminated body 11, the same laminated body is comprised also with the optical deformation member 1p comprised by PLZT of a bimorph structure. Is possible.

(第6実施形態)
本発明にかかる光駆動型アクチュエータを利用例の一つである回転駆動体について図面を参照して説明する。図8は本発明にかかる回転駆動する光駆動型アクチュエータの回転軸に垂直な断面で切断した断面図であり、図9は図8に示す光駆動型アクチュエータの回転軸に沿う面で切断した断面図である。
(Sixth embodiment)
A rotary drive body that is one example of using an optically driven actuator according to the present invention will be described with reference to the drawings. FIG. 8 is a cross-sectional view taken along a section perpendicular to the rotation axis of the optically driven actuator that rotates according to the present invention, and FIG. 9 is a cross section taken along a plane along the rotational axis of the optically driven actuator shown in FIG. FIG.

光駆動型アクチュエータDは、光変形部材1dと、導光部材2dと、遮光部材3dと、光源部材4dと、回転支軸6dと、固定板7dとを有している。光変形部材1dはフォトクロミック材料を作製したものであり、図9に示すように、駆動光の照射によって真直状態(まっすぐな状態)と湾曲状態とに交互に変形される。   The light-driven actuator D includes a light deforming member 1d, a light guide member 2d, a light shielding member 3d, a light source member 4d, a rotation support shaft 6d, and a fixed plate 7d. The light deformable member 1d is made of a photochromic material, and is deformed alternately into a straight state (straight state) and a curved state by irradiation with drive light, as shown in FIG.

光変形部材1dは一部が円板形状の固定板7dに固定されている。それには限定されないが光駆動型アクチュエータDでは、2個の光変形部材1dが固定板7dに、固定板7dの中心をはさんで対称に配置されている。図8、図9に示すように、光変形部材1dは固定板7dの外周部の近傍に配置固定されている。導光部材2dは光源部材4にて導光された駆動光を光変形部材1dに導くものである。導光部材2dは固定板7dの中央に配置されており、プリズム、反射板等の駆動光の光路を変更することができるものが用いられている。   A part of the light deformable member 1d is fixed to a fixed plate 7d having a disk shape. Although not limited thereto, in the optically driven actuator D, the two light deformable members 1d are disposed symmetrically on the fixed plate 7d with the center of the fixed plate 7d interposed therebetween. As shown in FIGS. 8 and 9, the optical deformation member 1d is arranged and fixed in the vicinity of the outer peripheral portion of the fixing plate 7d. The light guide member 2d guides the drive light guided by the light source member 4 to the light deformation member 1d. The light guide member 2d is disposed at the center of the fixed plate 7d, and a member that can change the optical path of the drive light, such as a prism or a reflector, is used.

遮光部材3dは光変形部材1dを駆動するための駆動光と同じ波長の光を遮断することができる部材である。遮光部材3dは、円筒部31dと、円筒部31dの軸方向の一端部に円筒部31dと連結された第1円板部32dと、円筒部31dの第1円板部32dとは反対側の端部に円筒部31dと連結された第2円板部33dと、円筒部31dの内壁面より内部に突出された突起部34dとを有している。   The light shielding member 3d is a member that can block light having the same wavelength as the driving light for driving the light deformable member 1d. The light shielding member 3d includes a cylindrical portion 31d, a first disc portion 32d connected to the cylindrical portion 31d at one end portion in the axial direction of the cylindrical portion 31d, and a first disc portion 32d on the opposite side of the cylindrical portion 31d. It has the 2nd disc part 33d connected with the cylindrical part 31d in the edge part, and the projection part 34d protruded inside from the inner wall face of the cylindrical part 31d.

第1円板部32dは中心に回転支軸6dが貫通される第1貫通孔321dを有している。また、第2円板部33dは中心に光源部材4dの後述する導波路42dが貫通される第2貫通孔331dを有している。   The first disc portion 32d has a first through hole 321d through which the rotation support shaft 6d passes. Further, the second disc portion 33d has a second through hole 331d through which a waveguide 42d described later of the light source member 4d passes in the center.

突起部34dは円筒部31dの内壁面より中心に向けて突出しており、突起部34dは円筒部31dの内壁面に周方向に一方向に等中心角度となるように並んで配置されている。突起部34dは第1傾斜部341dと、第2傾斜部342dと、第1傾斜部341dと第2傾斜部342dとが交差する頂点部343dとを有している。突起部34dは第1傾斜部341dの円筒部31dの内壁面の接線に対する傾斜角が、第2傾斜部342dの内壁面に対する傾斜角よりも、小さくなるように形成されている。第2傾斜部342dはそれには限定されないが、ここでは、円筒部31dの接線に対して垂直(法線と重なる)ように形成されている。   The protruding portion 34d protrudes toward the center from the inner wall surface of the cylindrical portion 31d, and the protruding portion 34d is arranged on the inner wall surface of the cylindrical portion 31d so as to be equicentered in one direction in the circumferential direction. The protrusion 34d has a first inclined portion 341d, a second inclined portion 342d, and a vertex portion 343d where the first inclined portion 341d and the second inclined portion 342d intersect. The protrusion 34d is formed such that the inclination angle of the first inclined portion 341d with respect to the tangent to the inner wall surface of the cylindrical portion 31d is smaller than the inclination angle of the second inclined portion 342d with respect to the inner wall surface. The second inclined portion 342d is not limited to this, but is formed so as to be perpendicular to the tangent to the cylindrical portion 31d (overlap with the normal line).

光源部材4dはフォトクロミック材料を変形させることができる波長の第1駆動光及び第2駆動光を選択的に出射する光源41dと、第1駆動光又は第2駆動光とを遮光部の内部に導光するための導波路42dとを備えている。光源41dは図示を省略した制御装置より駆動信号を受信することで、駆動光を出射するものである。   The light source member 4d guides the light source 41d that selectively emits the first driving light and the second driving light having a wavelength capable of deforming the photochromic material, and the first driving light or the second driving light into the light shielding portion. And a waveguide 42d for emitting light. The light source 41d emits drive light by receiving a drive signal from a control device (not shown).

導波路42dは、駆動光を導光するものであり、光ファイバー等の導光材料を円柱状に成型することで作製される。導波路42dは遮光部材3dの貫通孔331dに摺動可能に貫通されており、一部が遮光部材3dの外部に露出している。よって、導波路42dの外部からの光の進入及び導波路42dから外部への駆動光の漏洩を抑制するために遮光部421dが形成されている。遮光部421dは駆動光と同じ波長の光が透過するのを抑制する部材であり、導波路42dと密接して形成されている。   The waveguide 42d guides driving light, and is produced by molding a light guide material such as an optical fiber into a cylindrical shape. The waveguide 42d is slidably penetrated through the through hole 331d of the light shielding member 3d, and a part thereof is exposed to the outside of the light shielding member 3d. Therefore, the light shielding portion 421d is formed in order to suppress the ingress of light from the outside of the waveguide 42d and the leakage of driving light from the waveguide 42d to the outside. The light shielding portion 421d is a member that suppresses transmission of light having the same wavelength as the driving light, and is formed in close contact with the waveguide 42d.

遮光部材3dと導波路42dの接続部について詳細に説明する。図10は導波路と遮光部材との接続部の拡大断面図である。図10に示すように、第2貫通孔331dは小径部332dと、大径部333dの異なる内径を有する貫通孔が、軸方向に連結された段つき形状を有するものである。遮光部材3dの外側が小径部332d、内側が333dとなるように形成されている。導波路42dは図示を省略した保持部材にて保持されている。   The connecting portion between the light shielding member 3d and the waveguide 42d will be described in detail. FIG. 10 is an enlarged cross-sectional view of a connection portion between the waveguide and the light shielding member. As shown in FIG. 10, the second through hole 331d has a stepped shape in which a small diameter portion 332d and a through hole having different inner diameters of the large diameter portion 333d are connected in the axial direction. The light shielding member 3d is formed such that the outer side is a small diameter portion 332d and the inner side is 333d. The waveguide 42d is held by a holding member (not shown).

一方、図10に示すように、導波路42dの遮光部421dにはフランジ部422dが形成されている。遮光部421dの外周面と小径部332dの内周面及びフランジ部422dの外周面と大径部333dの内周面とが摺動するように、導波路42dが第2貫通孔331dを貫通している。このように導波路42dと貫通孔331dとを嵌合させることで、効果的に遮光部材3dの外部から内部への駆動光と同じ波長の光が進入するのを抑制することができる。また、導波路42dの遮光部材3dからの脱落を抑制することが可能である。   On the other hand, as shown in FIG. 10, a flange portion 422d is formed in the light shielding portion 421d of the waveguide 42d. The waveguide 42d passes through the second through hole 331d so that the outer peripheral surface of the light shielding portion 421d, the inner peripheral surface of the small diameter portion 332d, and the outer peripheral surface of the flange portion 422d and the inner peripheral surface of the large diameter portion 333d slide. ing. By fitting the waveguide 42d and the through hole 331d in this manner, it is possible to effectively prevent light having the same wavelength as the driving light from the outside to the inside of the light shielding member 3d. Further, it is possible to suppress the dropout of the waveguide 42d from the light shielding member 3d.

回転支軸6dは外周面が遮光部材3dの第1貫通孔321dの内周面と摺動可能となるように第1貫通孔321dを貫通する円柱状の軸部材である。回転支軸6dは中心軸が導波路42dの中心軸と一致している。回転支軸6dと第1円板部32d及び導波路42dと第2円板33dとはそれぞれ直交するように配置されており、導波路42dの遮光部材3dより露出した部分と回転支軸6dの遮光部材3dより露出した部分とを保持することで、遮光部材3dは円滑に回転できるように支持される。   The rotation support shaft 6d is a cylindrical shaft member that penetrates the first through hole 321d so that the outer peripheral surface can slide with the inner peripheral surface of the first through hole 321d of the light shielding member 3d. The central axis of the rotation support shaft 6d coincides with the central axis of the waveguide 42d. The rotation support shaft 6d and the first disk portion 32d and the waveguide 42d and the second disk 33d are arranged so as to be orthogonal to each other, and the portion of the waveguide 42d exposed from the light shielding member 3d and the rotation support shaft 6d. By holding the exposed portion from the light shielding member 3d, the light shielding member 3d is supported so as to be able to rotate smoothly.

回転支軸6dは一部が遮光部材3dの内部に挿入されている。回転支軸6dの遮光部材3dの内部側の端部には、固定板7dが回転支軸6dの中心軸と直交するように連結固定されている。固定板7dは上述したように、中央に導光部材2dが、周側部に導光部材2dをはさんで対向するように2個の光変形部材1dが配置されている。また、導波路42dの遮光部材3dの内部に挿入されている側の先端部が導光部材2dと対向するように配置されている。導波路42dにて導光された駆動光は導光部材2dにて光路が曲げられて、光変形部材1dに照射される。   A part of the rotating spindle 6d is inserted into the light shielding member 3d. A fixed plate 7d is connected and fixed to the inner end of the light shielding member 3d of the rotation support shaft 6d so as to be orthogonal to the central axis of the rotation support shaft 6d. As described above, the light guide member 2d is disposed at the center of the fixed plate 7d, and the two light deformable members 1d are disposed so as to face each other with the light guide member 2d sandwiched therebetween. The tip of the waveguide 42d on the side inserted into the light shielding member 3d is disposed so as to face the light guide member 2d. The drive light guided by the waveguide 42d is irradiated to the light deformable member 1d after the optical path is bent by the light guide member 2d.

光駆動型アクチュエータDの動作について説明する。図11は図8に示す光駆動型アクチュエータを駆動するときの駆動光の照射切り替えのタイミングを示すタイミングチャートである。図11を参照すると、まず光源41dに電力を供給し、第1駆動光(紫外光)を出射させる。第1駆動光は導波路42dを介して遮光部材3dにて囲まれた空間の内部に導光される。第1駆動光は導波路42dより導光部材2dに照射され、導光部材2dにて光路が変更されて、光変形部材1dに照射される。   The operation of the optically driven actuator D will be described. FIG. 11 is a timing chart showing the timing of switching the irradiation of the driving light when driving the light-driven actuator shown in FIG. Referring to FIG. 11, first, power is supplied to the light source 41d to emit the first drive light (ultraviolet light). The first drive light is guided to the inside of the space surrounded by the light shielding member 3d through the waveguide 42d. The first drive light is irradiated to the light guide member 2d from the waveguide 42d, the optical path is changed by the light guide member 2d, and the light deformation member 1d is irradiated.

第1駆動光が照射された光変形部材1dは真直状態から屈曲状態に変形する。光変形部材1dが真直状態から屈曲状態に変形するときに、第2傾斜部342dが光変形部材1dに押される。これにより、突起部34dが固定された遮光部材3dが回転される。光源41dから第1駆動光及び第2駆動光を交互に出射することで光変形部材1dが真直状態と屈曲状態とに繰り返し変形される。これにより、遮光部材4dに備えられた複数個の突起部34dを順次、押して遮光部材3dを連続して回転させる。   The light deformable member 1d irradiated with the first drive light is deformed from a straight state to a bent state. When the light deformable member 1d is deformed from the straight state to the bent state, the second inclined portion 342d is pushed by the light deformable member 1d. Thereby, the light shielding member 3d to which the protrusion 34d is fixed is rotated. By alternately emitting the first drive light and the second drive light from the light source 41d, the light deformable member 1d is repeatedly deformed into a straight state and a bent state. As a result, the plurality of protrusions 34d provided on the light shielding member 4d are sequentially pushed to continuously rotate the light shielding member 3d.

光駆動型アクチュエータDにおいて、光変形部材1dは屈曲状態から真直状態に変形するときに、突起部34dと接触する。第1傾斜部341dの接線に対する傾斜角が小さく形成されており、光変形部材1dが第1傾斜部341d上をすべり、少ない抵抗で頂上部343dを乗り越えることができる。これにより、光変形部材1dが屈曲状態から真直状態に変形するときに、光変形部材1dより遮光部材3dが逆転する方向に付勢される力を低減することができ、遮光部材3dの回転を効率よく円滑に行うことが可能である。   In the light-driven actuator D, the light deformable member 1d contacts the protrusion 34d when deforming from the bent state to the straight state. The inclination angle with respect to the tangent line of the first inclined portion 341d is formed small, and the light deformable member 1d can slide on the first inclined portion 341d and can get over the top portion 343d with a small resistance. Thereby, when the light deformable member 1d is deformed from the bent state to the straight state, it is possible to reduce the force urged by the light deformable member 1d in the direction in which the light shield member 3d is reversely rotated. It is possible to carry out efficiently and smoothly.

なお、突起部34dの第1傾斜部341dの円筒部31dとの接点部での接線となす角、すなわち、第1傾斜部341dの円筒部31dの内壁面に対する傾斜角は光変形部材1dが頂点部343dを越えやすい角度が採用されている。   Note that the angle between the projection 34d and the contact portion of the first inclined portion 341d with the cylindrical portion 31d, that is, the inclination angle of the first inclined portion 341d with respect to the inner wall surface of the cylindrical portion 31d is the vertex of the light deformable member 1d. An angle that easily exceeds the portion 343d is employed.

本実施形態では、フォトクロミック材料で作製された光変形部材1dを用いているが、それに限定されるものではなく、バイモルフ構造のPLZTで作製された光変形部材を用いるものであってもよい。この場合、駆動光が1種類となる点、駆動光の照射を停止することで光変形部材が元の形状に復帰する点が異なるが、これら以外は光駆動型アクチュエータDと同じ構成である。   In this embodiment, the optically deformable member 1d made of a photochromic material is used. However, the present invention is not limited to this, and an optically deformable member made of PLZT having a bimorph structure may be used. In this case, the configuration is the same as that of the optically driven actuator D except that the driving light becomes one type and the light deformable member returns to the original shape by stopping the irradiation of the driving light.

以上、本発明を具体的な実施形態を参照して説明したが、本発明の範囲は実施形態に記載されたものに限定されるものではなく、その要旨を逸脱しない範囲で種々変更可能である。   The present invention has been described above with reference to specific embodiments, but the scope of the present invention is not limited to those described in the embodiments, and various modifications can be made without departing from the scope of the invention. .

本発明の光駆動型アクチュエータは、光が照射されることで変形する光変形部材を用いたアクチュエータで、小型、構造が簡単、電磁波等の外部環境に左右されにくい等の長所を有するものであり、光学機器、電子機器等のアクチュエータとして用いることができる。   The light-driven actuator of the present invention is an actuator using a light deformable member that deforms when irradiated with light, and has advantages such as a small size, a simple structure, and being hardly influenced by an external environment such as electromagnetic waves. It can be used as an actuator for optical equipment, electronic equipment, and the like.

は、本発明にかかる光駆動型アクチュエータの概略斜視図である。These are the schematic perspective views of the optically driven actuator concerning this invention. は、図1に示す光アクチュエータの断面図である。These are sectional drawings of the optical actuator shown in FIG. は、本発明にかかる光駆動型アクチュエータの一例の断面図である。These are sectional drawings of an example of the optical drive type actuator concerning the present invention. は、本発明にかかる光駆動型アクチュエータの一例の断面図である。These are sectional drawings of an example of the optical drive type actuator concerning the present invention. は、本発明にかかる光駆動型アクチュエータの一例の断面図である。These are sectional drawings of an example of the optical drive type actuator concerning the present invention. は、本発明にかかる光駆動型アクチュエータの一例の断面図である。These are sectional drawings of an example of the optical drive type actuator concerning the present invention. は、本発明にかかる光駆動型アクチュエータの他の例の断面図である。These are sectional drawings of other examples of a light drive type actuator concerning the present invention. は、本発明にかかる回転駆動する光駆動型アクチュエータの回転軸に垂直な断面で切断した断面図である。These are sectional drawings cut | disconnected by the cross section perpendicular | vertical to the rotating shaft of the optically driven actuator which rotationally drives concerning this invention. は、図8に示す光駆動型アクチュエータの回転軸に沿う面で切断した断面図である。These are sectional drawings cut | disconnected by the surface in alignment with the rotating shaft of the optically driven actuator shown in FIG. は、導波路と遮光部材との接続部の拡大断面図である。These are the expanded sectional views of the connection part of a waveguide and a light shielding member. は、図8に示す光駆動型アクチュエータを駆動するときの駆動光の照射切り替えのタイミングを示すタイミングチャートである。These are timing charts showing the timing of switching the irradiation of drive light when driving the optically driven actuator shown in FIG.

符号の説明Explanation of symbols

1、1c、1p 光変形部材
11 積層体
2 導光部材
21 入射部
22 出射部
3 遮光部材
4 光源部材
41 光源
42 導波路
421 遮光部
5 光源部材
511 第1光源
512 第2光源
52 導波路
1d 光変形部材
2d 導光部材
3d 遮光部材
4d 光源部材
6d 支軸部材
7d 固定板
DESCRIPTION OF SYMBOLS 1, 1c, 1p Light deformation member 11 Laminated body 2 Light guide member 21 Incident part 22 Output part 3 Light shielding member 4 Light source member 41 Light source 42 Waveguide 421 Light shielding part 5 Light source member 511 1st light source 512 2nd light source 52 Waveguide 1d Light deformation member 2d Light guide member 3d Light blocking member 4d Light source member 6d Support shaft member 7d Fixing plate

Claims (7)

所定波長の駆動光が照射されることで変形される光変形部材と、
前記駆動光を出射する光源部材と、
前記光変形部材に隣接配置され前記駆動光を前記光変形部材に導く導光部材とを有し、前記駆動光が照射されることで駆動される光駆動型アクチュエータであって、
前記光変形部材、又は前記導光部材の少なくとも一部が前記駆動光が持つ波長域の光の透過を抑制する遮光部材で覆われていることを特徴とする光駆動型アクチュエータ。
A light deformable member that is deformed by being irradiated with drive light of a predetermined wavelength;
A light source member for emitting the driving light;
A light-driven actuator that is disposed adjacent to the light-deformable member and guides the drive light to the light-deformable member, and is driven by being irradiated with the drive light,
An optically driven actuator, wherein at least a part of the optically deformable member or the light guide member is covered with a light shielding member that suppresses transmission of light in a wavelength region of the driving light.
前記遮光部材は前記光変形部材及び前記導光部材の全体を囲み、前記光変形部材が変形されても、前記駆動光が持つ波長域の光の透過を抑制できる請求項1記載の光駆動型アクチュエータ。   2. The optically driven type according to claim 1, wherein the light shielding member surrounds the entire optically deformable member and the light guide member, and can suppress transmission of light in a wavelength region of the drive light even when the optically deformable member is deformed. Actuator. 前記遮光部材が前記光変形部材よりも高い柔軟性を有する材料で作製されており、前記光変形部材の変形に伴って変形できる請求光1又は請求光2に記載の光駆動型アクチュエータ。   The light-driven actuator according to claim 1 or claim 2, wherein the light shielding member is made of a material having higher flexibility than the light deformable member and can be deformed along with the deformation of the light deformable member. 前記遮光部材は、内部が前記駆動光を反射することができるように形成されている請求項1から請求項3のいずれかに記載の光駆動型アクチュエータ。   4. The optically driven actuator according to claim 1, wherein the light shielding member is formed so that an inside thereof can reflect the driving light. 5. 前記光源が前記遮光部材と前記光変形部材又は前記導光部材の間に配置されている請求項1から請求項4のいずれかに記載の光駆動型アクチュエータ。   The light-driven actuator according to any one of claims 1 to 4, wherein the light source is disposed between the light shielding member and the light deformable member or the light guide member. 前記光源部材が前記遮光部材の外側に配置され、前記駆動光を前記遮光部材で覆われた前記導光部材に導くための導波路を備えている請求項1から請求項4のいずれかに記載の光駆動型アクチュエータ。   The said light source member is arrange | positioned on the outer side of the said light-shielding member, The waveguide for guiding the said drive light to the said light guide member covered with the said light-shielding member is provided in any one of Claims 1-4. Light-driven actuator. 前記光源部材が前記遮光部材の外側に配置され、前記駆動光を前記遮光部材で覆われた前記導光部材に導くための導波路を備えており、
前記遮光部材は円筒部と、前記円筒部の両端部と連結された円板部と、前記円筒部の内面に内側に突出された突起部とを有しており、前記円板部の一方の中心を前記導波路が回転可能に貫通しており、
他方の円板部の中心を回転可能に貫通する軸支部材が備えられており、
前記軸支部材の遮光部材内部側の端部に固定された固定板が備えられており、
前記固定板の中央に前記導光部材が配置されているとともに、前記固定板の周端部に前記突起部と接触可能に光変形部材が配置されており、
前記光変形部材の変形によって前記突起部が押され前記遮光部材が回転する請求項2に記載の光駆動型アクチュエータ。
The light source member is disposed outside the light shielding member, and includes a waveguide for guiding the driving light to the light guide member covered with the light shielding member;
The light shielding member includes a cylindrical part, a disk part connected to both ends of the cylindrical part, and a protruding part protruding inwardly on the inner surface of the cylindrical part, and one of the disk parts The waveguide passes through the center in a rotatable manner,
A shaft support member is provided that rotatably penetrates the center of the other disk part,
A fixing plate fixed to the end portion of the shaft support member on the inner side of the light shielding member is provided;
The light guide member is disposed at the center of the fixed plate, and a light deformable member is disposed at a peripheral end portion of the fixed plate so as to be in contact with the protrusion.
The light-driven actuator according to claim 2, wherein the projection is pushed by the deformation of the light deformation member and the light shielding member rotates.
JP2008165986A 2008-06-25 2008-06-25 Light-driven actuator Expired - Fee Related JP5380921B2 (en)

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WO2016135775A1 (en) * 2015-02-25 2016-09-01 オリンパス株式会社 Optical driving device
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