JP2010004036A - Apparatus for suspension and contacting of piezoelectric component - Google Patents

Apparatus for suspension and contacting of piezoelectric component Download PDF

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JP2010004036A
JP2010004036A JP2009128649A JP2009128649A JP2010004036A JP 2010004036 A JP2010004036 A JP 2010004036A JP 2009128649 A JP2009128649 A JP 2009128649A JP 2009128649 A JP2009128649 A JP 2009128649A JP 2010004036 A JP2010004036 A JP 2010004036A
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piezoelectric element
substrate
contact
suspension
region
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Gernot Feiel
フェイエル ゲルノット
Hans Kruger
クルーガー ハンス
Anton Leidl
レイドル アントン
Markus Puff
パフ マルクス
Alois Stelzl
シュテルツル アロイス
Justinus Slakhorst
スラコースト ユスティヌス
Johannes Lehrhofer
レーホファー ヨハネス
Brunner Sebastian
ブルンナー セバスティアン
Christian Hoffmann
ホフマン クリスティアン
Igor Kartaschev
カルタシェフ イゴール
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TDK Electronics AG
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Epcos AG
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/40Piezoelectric or electrostrictive devices with electrical input and electrical output, e.g. functioning as transformers
    • HELECTRICITY
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    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/80Constructional details
    • H10N30/87Electrodes or interconnections, e.g. leads or terminals
    • H10N30/875Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins
    • HELECTRICITY
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    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/80Constructional details
    • H10N30/88Mounts; Supports; Enclosures; Casings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
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    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/18Printed circuits structurally associated with non-printed electric components
    • H05K1/181Printed circuits structurally associated with non-printed electric components associated with surface mounted components
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
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    • H05K2201/03Conductive materials
    • H05K2201/0302Properties and characteristics in general
    • H05K2201/0311Metallic part with specific elastic properties, e.g. bent piece of metal as electrical contact
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    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
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    • H05K2201/10Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10007Types of components
    • H05K2201/10083Electromechanical or electro-acoustic component, e.g. microphone
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    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10227Other objects, e.g. metallic pieces
    • H05K2201/10287Metal wires as connectors or conductors
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    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
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    • H05K2201/10613Details of electrical connections of non-printed components, e.g. special leads
    • H05K2201/10621Components characterised by their electrical contacts
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    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
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    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/325Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by abutting or pinching, i.e. without alloying process; mechanical auxiliary parts therefor
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Abstract

<P>PROBLEM TO BE SOLVED: To provide an apparatus in which vibrations of the piezoelectric element remain extensively unaffected. <P>SOLUTION: The apparatus is disclosed for the suspension and contacting of the piezoelectric component 1 which has multiple electrode layers. The apparatus has a substrate 2 on which electrical conductor tracks 3 are arranged. The piezoelectric component 1 is suspended above the substrate 2 and electrically contacted at a minimum of two of its edge areas, in which the component has vibration nodes 4a and 4b. The piezoelectric component 1 is spaced apart from the substrate 2 and the vibrations of the piezoelectric component 1 remain extensively unaffected by the suspension. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

圧電変圧器は特許文献1から知られている。   A piezoelectric transformer is known from US Pat.

独国特許出願公開第10 2006 050 110号明細書German Patent Application Publication No. 10 2006 050 110

本発明が扱う課題は、極限まで非減衰な方法で懸架されることが可能であり、接触が可能な、圧電素子を備える装置を開示することである。   The problem addressed by the present invention is to disclose a device comprising a piezoelectric element that can be suspended and contacted in an extremely non-damped manner.

この課題は、請求項1に記載の装置を用いて解決される。装置の有利な構成は従属項の対象である。   This problem is solved with the device according to claim 1. Advantageous configurations of the device are the subject of the dependent claims.

圧電層と交互に積層し得る多数の電極層を有する圧電素子を備えることを特徴とする圧電素子のサスペンション及び接触用装置が開示される。装置はさらに、導体トラックから構成される基板を有する。圧電素子は、その少なくとも2つの端領域で、基板の上に懸架され、電気的に接触される。圧電素子は振動節が生じる領域を有する。圧電素子のサスペンションと接触は、素子の少なくとも2つの端領域において実施されることが好ましく、端領域は振動節の領域に位置する。圧電素子の振動ができるだけ減衰しないようにするために、圧電素子は基板から離れて配置される。圧電素子の振動は、サスペンションと接触によって大きくは影響を受けない。   Disclosed is a piezoelectric element suspension and contact device comprising a piezoelectric element having a number of electrode layers that can be alternately stacked with piezoelectric layers. The apparatus further comprises a substrate composed of conductor tracks. The piezoelectric element is suspended on and electrically contacted with the substrate in at least two end regions thereof. The piezoelectric element has a region where a vibration node occurs. The suspension and contact of the piezoelectric element is preferably carried out in at least two end regions of the element, the end region being located in the region of the vibration node. In order to minimize the vibration of the piezoelectric element, the piezoelectric element is arranged away from the substrate. The vibration of the piezoelectric element is not significantly affected by contact with the suspension.

圧電素子の電極層は、圧電素子の内部に配置されることが好ましい。   The electrode layer of the piezoelectric element is preferably disposed inside the piezoelectric element.

好適実施形態において、圧電素子は、振動節の領域における、圧電素子の外側に金属接触領域を有する。圧電素子の金属接触領域は、圧電素子の電極層と電気的に接触されることが好ましい。   In a preferred embodiment, the piezoelectric element has a metal contact region outside the piezoelectric element in the region of the vibration node. The metal contact region of the piezoelectric element is preferably in electrical contact with the electrode layer of the piezoelectric element.

接触領域は、圧電素子の側面に配置されることが好ましい。他の実施形態では、接触領域は圧電素子の上部及び底面にも拡張し得る。1つの実施形態では、接触領域は、例えば、銀から作られる導体トラックのジェットプリンティングによって付けられる。   The contact region is preferably disposed on the side surface of the piezoelectric element. In other embodiments, the contact area may extend to the top and bottom of the piezoelectric element. In one embodiment, the contact area is applied by jet printing of a conductor track made of, for example, silver.

1つの実施形態では、圧電素子はワイヤを用いて基板の上に懸架される。ワイヤは基板の上に接着されるのが好ましい。ワイヤは、1つの実施形態において、円形か長方形の断面を有する。   In one embodiment, the piezoelectric element is suspended on the substrate using a wire. The wire is preferably bonded onto the substrate. The wire, in one embodiment, has a circular or rectangular cross section.

圧電素子の接触表面における又は接触領域におけるワイヤの固定は、例えば、1つ以上の点において、接着剤、レーザ溶接又はレーザはんだ付けを用いて実施される。   The fixing of the wire at or at the contact surface of the piezoelectric element is performed using, for example, adhesive, laser welding or laser soldering at one or more points.

別の実施形態において、基板を有する電気素子のサスペンションはクリップを用いて実施される。クリップは少なくとも部分的に圧電素子を囲み、配置されたクリップはあらゆる側面において素子から離れ、振動節の領域で圧電素子と電気接触のみする。圧電素子におけるクリップの接触は、接触領域で行われることが好ましい。クリップを用いた圧電素子の接触は、接触領域において圧電素子の上部、底部、又は側部における1つ以上の点で実施され得る。   In another embodiment, the suspension of the electrical element having the substrate is implemented using a clip. The clip at least partially surrounds the piezoelectric element, and the placed clip is separated from the element on all sides and only makes electrical contact with the piezoelectric element in the region of the vibration node. The contact of the clip in the piezoelectric element is preferably performed in the contact area. Contact of the piezoelectric element with the clip may be performed at one or more points at the top, bottom, or sides of the piezoelectric element in the contact area.

1つの実施形態では、組立てるための熱処理を行う間に、クリップを振動節の位置又は接触領域で圧電素子にはんだ付けされるような方法で、クリップは、コーティングされ得る。   In one embodiment, the clip can be coated in such a way that the clip is soldered to the piezoelectric element at the location of the vibration node or contact area during the heat treatment for assembly.

他の実施形態では、基板の上の圧電素子のサスペンションは、はんだテールを用いて実行される。はんだテールは、圧電素子に備え付けられるコンダクタ部を用いて、圧電素子から離れて位置する。コンダクタ部は接触領域で圧電素子と電気接触する。   In other embodiments, suspension of the piezoelectric element on the substrate is performed using a solder tail. The solder tail is located away from the piezoelectric element by using a conductor portion provided in the piezoelectric element. The conductor portion is in electrical contact with the piezoelectric element in the contact area.

1つの好適実施形態において、銅箔状のはんだテールを有する圧電素子は、例えば、まだ硬化していない銀で満たされたポリマー導体トラックに接着され得る。   In one preferred embodiment, a piezoelectric element having a copper foil-like solder tail can be bonded to a polymer conductor track, for example, filled with uncured silver.

他の実施形態において、圧電素子の接触は、バンプを用いて基板上に実施される。1つの実施形態では、バンプは、接触領域で圧電素子の底部において、配置され得る。他の実施形態では、圧電素子は、上部、又は底部に、コンダクタトラック部又は導体トラックを有し、それらは接触領域に電気的に接続される。これらの導体トラックに、基板上の圧電素子のサスペンション及び接触用に使用される、1又は複数のバンプが配置される。圧電素子のコンダクタトラック部は、圧電素子の振動節に沿って配置されることが好ましい。バンプを用いて、圧電素子の基板への接続は、例えば、はんだ付けやサーモソニックボンディングによって実施される。   In other embodiments, the contact of the piezoelectric element is performed on the substrate using bumps. In one embodiment, the bumps can be placed at the bottom of the piezoelectric element in the contact area. In other embodiments, the piezoelectric element has a conductor track or conductor track on the top or bottom, which is electrically connected to the contact area. On these conductor tracks, one or more bumps used for suspension and contact of the piezoelectric elements on the substrate are arranged. The conductor track portion of the piezoelectric element is preferably arranged along the vibration node of the piezoelectric element. The connection of the piezoelectric element to the substrate using the bump is performed by, for example, soldering or thermosonic bonding.

他の実施形態において、基板上の圧電素子のサスペンションは、弾性バネ接触により実施される。バネ接触は少なくとも部分的に圧電素子を囲むことが好ましく、一方バネ接触は、離れて位置し、好ましくは振動節の領域において圧電素子と接触する。バネ接触は基板上の接触に適した領域を有する。接触は、接触領域で、圧電素子の表面、底部、又は側面における1つ以上の点で行われることが好ましい。   In other embodiments, the suspension of the piezoelectric element on the substrate is implemented by elastic spring contact. The spring contact preferably surrounds the piezoelectric element at least partially, while the spring contact is located remotely and preferably contacts the piezoelectric element in the region of the vibration node. The spring contact has an area suitable for contact on the substrate. Contact is preferably made at one or more points on the surface, bottom or side of the piezoelectric element in the contact area.

他の実施形態において、バネ接触は、適切な温度工程の後に、圧電素子と部分的なはんだ接続を形成するような方法でコーティングされ得る。   In other embodiments, the spring contact can be coated in such a way as to form a partial solder connection with the piezoelectric element after an appropriate temperature step.

他の実施形態において、鋳造合成物は圧電素子と基板との間に配置される。   In other embodiments, the casting composition is disposed between the piezoelectric element and the substrate.

1つの実施形態において、弾性バネ接触は基板の上の圧電素子を懸架し圧電素子と接触するために使用され、接触領域は、例えば、基板上の鋳造合成物に埋め込まれ得る。   In one embodiment, elastic spring contact is used to suspend and contact the piezoelectric element on the substrate, and the contact area can be embedded in, for example, a casting composition on the substrate.

装置の他の実施形態において、他の電気素子は、鋳造合成物に埋め込まれ得る。電気素子は、基板に直接配置され、基板の導体トラックに電気的に接触されることが好ましい。他の実施形態において、圧電素子は、例えばバネ接触やはんだテールを用いて、埋め込まれた電気素子の上に固定され配置され得る。   In other embodiments of the device, other electrical elements can be embedded in the casting composition. The electrical element is preferably placed directly on the substrate and is in electrical contact with the conductor tracks of the substrate. In other embodiments, the piezoelectric element may be fixed and placed over the embedded electrical element, for example using a spring contact or a solder tail.

圧電素子は、好適実施形態において、変圧器の形式で構成され得る。圧電素子は、附加的な機能を実現するが、圧電素子の振動がそれ自体の接触及びサスペンションにより減衰しないということは保証される。   The piezoelectric element may be configured in the form of a transformer in a preferred embodiment. The piezoelectric element realizes an additional function, but it is guaranteed that the vibration of the piezoelectric element is not damped by its own contact and suspension.

非常に小さい圧電素子において、特に、振動節の領域において残留振動を示すので、これらの場合、素子の、極限まで減衰しないサスペンション及び接触がもたらされ又は保証されなければならない。好適実施形態において、圧電素子は最大、およそ15mmの設置面積を有する。 In very small piezoelectric elements, in particular in the region of the vibration nodes, they exhibit residual vibrations, so in these cases the suspension and contact of the element that is not damped to the limit must be provided or guaranteed. In a preferred embodiment, the piezoelectric element is a maximum, has a footprint of approximately 15 mm 2.

個々のサスペンションと接触の間の距離は、基板の側部において、接触がSMDグリッドサイズに配置されるように選択されることが好ましい。これは、サスペンション装置を備える既成の圧電素子の単純な組み立てが他のプロセスでも可能であることを意味する。   The distance between the individual suspensions and the contacts is preferably chosen such that the contacts are arranged in SMD grid size on the sides of the substrate. This means that simple assembly of a prefabricated piezoelectric element with a suspension device is possible in other processes.

好適実施形態において、圧電素子は、0.2〜0.5Wの範囲の出力を有する圧電変圧器である。   In a preferred embodiment, the piezoelectric element is a piezoelectric transformer having an output in the range of 0.2-0.5W.

上記に記載の物は、以下の図及び例示的な実施形態に基づいてより詳細に説明される。   What has been described above is explained in more detail on the basis of the following figures and exemplary embodiments.

以下に示される図は、実寸として解釈されるものではない。むしろ、個々の寸法は、拡大され、縮小され、又はより良い説明のために変形されて示され得る。互いに一致する又は同じ機能を果たす要素には同じ参照符号が割り当てられる。   The figures shown below are not to be construed as actual scale. Rather, individual dimensions may be shown enlarged, reduced, or modified for better explanation. Elements that match each other or perform the same function are assigned the same reference numerals.

第1実施形態の分離した状態の3次元図である。It is a three-dimensional figure of the separated state of a 1st embodiment. 図1に記載の実施形態の連結を示す図である。It is a figure which shows the connection of embodiment described in FIG. サスペンション及び接触がクリップを用いて実施される他の実施形態を示す図である。FIG. 6 shows another embodiment in which the suspension and contact are implemented using clips. サスペンションがはんだテールを用いて実施される他の実施形態を示す図である。FIG. 6 shows another embodiment in which the suspension is implemented using a solder tail. バンプが圧電素子の上に配置される他の実施形態を示す図である。It is a figure which shows other embodiment by which a bump is arrange | positioned on a piezoelectric element. サスペンション及び接触用のクリップを備える他の実施形態を示す図である。It is a figure which shows other embodiment provided with the suspension and the clip for contact. 他の電気素子が圧電素子と基板との間に配置される他の実施形態を示す図である。It is a figure which shows other embodiment by which another electric element is arrange | positioned between a piezoelectric element and a board | substrate. 圧電素子の他の実施形態を示す図である。It is a figure which shows other embodiment of a piezoelectric element. 圧電素子の接触の他の実施形態を示す図である。It is a figure which shows other embodiment of the contact of a piezoelectric element. 圧電素子の接触の他の実施形態を示す図である。It is a figure which shows other embodiment of the contact of a piezoelectric element. 圧電素子の接触の他の実施形態を示す図である。It is a figure which shows other embodiment of the contact of a piezoelectric element. 圧電素子の接触の他の実施形態を示す図である。It is a figure which shows other embodiment of the contact of a piezoelectric element. ストッパによって動きが制限される圧電素子の他の実施形態を示す図である。It is a figure which shows other embodiment of the piezoelectric element by which a movement is restrict | limited by a stopper. 図10の実施形態の側面図である。FIG. 11 is a side view of the embodiment of FIG. 10. 圧電素子における電極層の配置を示す図である。It is a figure which shows arrangement | positioning of the electrode layer in a piezoelectric element. 図12の電極の接触をより詳細に示す図である。It is a figure which shows the contact of the electrode of FIG. 12 in detail.

図1は、圧電素子1の第1の実施形態を示す図であり、より良く説明するために、基板2から離れて示されている。圧電素子1を基板2との連結及び接触は図2から見ることができる。   FIG. 1 shows a first embodiment of a piezoelectric element 1 and is shown away from a substrate 2 for better explanation. The connection and contact of the piezoelectric element 1 with the substrate 2 can be seen from FIG.

図1の圧電素子1は内部電極を有し、図示された実施形態において、圧電素子の少なくとも1つの入力領域及び1つの出力領域を形成する。内部電極は図1には図示されていない。しかし、内部電極は圧電素子で用いられる実施形態に対応する。圧電素子1は動作中に振動節が生じる2つの領域4a、4bを有する。   The piezoelectric element 1 of FIG. 1 has internal electrodes and, in the illustrated embodiment, forms at least one input region and one output region of the piezoelectric element. The internal electrodes are not shown in FIG. However, the internal electrode corresponds to the embodiment used in the piezoelectric element. The piezoelectric element 1 has two regions 4a and 4b in which vibration nodes are generated during operation.

圧電素子1の接触及びサスペンションのために、接触領域5は圧電素子1の端の、振動節4a、4bの領域において配置される。接触領域5は蒸着した金属化層を用いて形成されることが好ましい。接触領域5は圧電素子1の内部電極に電気的に接触する。   For contact and suspension of the piezoelectric element 1, the contact area 5 is arranged in the area of the vibration nodes 4 a, 4 b at the end of the piezoelectric element 1. The contact area 5 is preferably formed using a deposited metallized layer. The contact region 5 is in electrical contact with the internal electrode of the piezoelectric element 1.

図1の基板2は、より大きな回路装置から抜粋したもののみを図示する。基板2はその表面に複数の導体トラック3を示し、例えば、ガルバニック的に又は異なって蒸着された金属化によって形成される。圧電素子1を接触するために、基板2はワイヤ6を有し、例えば、導体トラック3の領域で、基板上に接着される。接着領域において、導体トラックは接触領域を形成するために拡大され、又は、そのような領域に接続され得る。ワイヤ3は、例えば、円形又は角のある断面を有する。   The substrate 2 in FIG. 1 only shows an excerpt from a larger circuit device. The substrate 2 shows a plurality of conductor tracks 3 on its surface and is formed, for example, by galvanic or differently deposited metallization. In order to make contact with the piezoelectric element 1, the substrate 2 has wires 6 and is bonded onto the substrate, for example in the region of the conductor tracks 3. In the bonding area, the conductor tracks can be enlarged or connected to such areas to form contact areas. The wire 3 has, for example, a circular or angular cross section.

図2は、図1に記載の基板2の上の圧電素子1の配置を示す。圧電素子1は振動節4a、4bの領域にワイヤ6を介して基板2に接続される。ワイヤ6は圧電素子1の接触領域5に電気的に接触されることが好ましい。ワイヤ6は圧電素子1の接触領域5に点状の接続により接続されることが好ましい。サスペンションと圧電素子1との間のできるだけ小さな接続領域を利用して、その振動を最小限に減衰させる。   FIG. 2 shows an arrangement of the piezoelectric elements 1 on the substrate 2 shown in FIG. The piezoelectric element 1 is connected to the substrate 2 via a wire 6 in the region of the vibration nodes 4a and 4b. The wire 6 is preferably in electrical contact with the contact area 5 of the piezoelectric element 1. The wire 6 is preferably connected to the contact region 5 of the piezoelectric element 1 by a dot-like connection. The smallest possible connection area between the suspension and the piezoelectric element 1 is used to dampen the vibration to a minimum.

ギャップ14が、圧電素子1と基板2との間にあることが好ましい。従って、圧電素子1の底部は基板2と直接接触しない。これは、圧電素子1の振動ができるだけ減衰しないことを意味する。   The gap 14 is preferably between the piezoelectric element 1 and the substrate 2. Therefore, the bottom of the piezoelectric element 1 does not come into direct contact with the substrate 2. This means that the vibration of the piezoelectric element 1 is not attenuated as much as possible.

図3は、基板2上の圧電素子1のサスペンション及び接触のための装置の他の実施形態を示す。圧電素子1は、少なくともその端領域の振動節4a、5bの領域に接触領域5を有する。接触領域5はまた、圧電素子1の上部及び底部を、少なくとも部分的に覆う。   FIG. 3 shows another embodiment of the device for suspension and contact of the piezoelectric element 1 on the substrate 2. The piezoelectric element 1 has a contact region 5 at least in the region of the vibration nodes 4a and 5b in the end region. The contact area 5 also at least partially covers the top and bottom of the piezoelectric element 1.

クリップ7は、実施形態の基板2上の圧電素子1のサスペンション及び接触のために使用される。クリップ7は少なくとも部分的に圧電素子1を囲み、クリップ7はあらゆる側面で圧電素子1から離れて位置する。接触する目的のため、クリップ7は、クリップ7と圧電素子1の接触領域5との間の領域で、点状に接触することが好ましい。クリップ7は、圧電素子1の上部及び底部で、圧電素子1と1つの電気接触を有することが好ましい。他の実施形態では、クリップ7と接触領域5との間の電気接触は縞状に又は平面領域にも形成され得、接触は最小限の減衰しか生じない、又は、全く減衰を生じないことが保証されるべきである。図3において、クリップ7の2つの異なる実施形態が図示され、クリップは右側に、例えば、直接基板2の導体トラックにはんだ付けされ得る。左側のクリップ7は、はんだフット15を有し、クリップは接続され、基板2に埋め込まれた孔に固定される。圧電素子1は、圧電素子1と基板2との間に隙間14が残るような方法で、クリップを用いて基板2の上に懸架されることが好ましい。これは、圧電素子1のサスペンションにおいて最低限の減衰を与える。   The clip 7 is used for suspension and contact of the piezoelectric element 1 on the substrate 2 of the embodiment. The clip 7 at least partially surrounds the piezoelectric element 1 and the clip 7 is located away from the piezoelectric element 1 on every side. For the purpose of contact, the clip 7 is preferably in a point-like contact with the region between the clip 7 and the contact region 5 of the piezoelectric element 1. The clip 7 preferably has one electrical contact with the piezoelectric element 1 at the top and bottom of the piezoelectric element 1. In other embodiments, the electrical contact between the clip 7 and the contact area 5 can be formed in a striped or even planar area, and the contact can cause minimal or no attenuation. Should be guaranteed. In FIG. 3, two different embodiments of the clip 7 are illustrated, which can be soldered to the right side, for example directly to the conductor tracks of the substrate 2. The left clip 7 has a solder foot 15, which is connected and fixed in a hole embedded in the substrate 2. The piezoelectric element 1 is preferably suspended on the substrate 2 using a clip in such a way that a gap 14 remains between the piezoelectric element 1 and the substrate 2. This gives minimal attenuation in the suspension of the piezoelectric element 1.

図4は、圧電素子1のサスペンション及び接触装置の他の実施形態を示す。この目的のために、圧電素子1は、圧電素子1の底部にコンダクタ部9を有し、コンダクタ部9は圧電素子1の接触領域5に電気的に接触される。はんだテール8はコンダクタトラック部9に配置され、はんだテール8は圧電素子1から離れて位置する。圧電素子1は、はんだテール8を利用して基板2の上に備え付けられる。はんだテール8は基板2の導体トラックと電気的に接触することが好ましい。圧電素子1とはんだテール8との間のコンダクタ部9によって、装置は圧電素子1と基板2との間の隙間14を有する。   FIG. 4 shows another embodiment of the suspension and contact device of the piezoelectric element 1. For this purpose, the piezoelectric element 1 has a conductor part 9 at the bottom of the piezoelectric element 1, and the conductor part 9 is in electrical contact with the contact area 5 of the piezoelectric element 1. The solder tail 8 is disposed on the conductor track portion 9, and the solder tail 8 is located away from the piezoelectric element 1. The piezoelectric element 1 is provided on the substrate 2 using a solder tail 8. The solder tail 8 is preferably in electrical contact with the conductor tracks of the substrate 2. Due to the conductor 9 between the piezoelectric element 1 and the solder tail 8, the device has a gap 14 between the piezoelectric element 1 and the substrate 2.

図5は、バンプ10が圧電素子1の底部に配置される圧電素子1の他の実施形態を示す。1つの可能な実施形態において、バンプ10は圧電素子1の接触領域5の上に直接配置され得る。圧電素子1の左側の接触領域5は、それぞれ、圧電素子1の接触領域5の上に直接配置されたバンプ10を有する。圧電素子1の右側の接触領域5は他の可能な実施形態を示し、バンプ10は、振動節4a、4bの領域で、できる限り離れて配置されたコンダクタトラック部9を介して、圧電素子1の接触領域5に接続される。バンプ10により、圧電素子1は、圧電素子1の振動がほんの少ししか影響を受けないように保証するサスペンションを有する。   FIG. 5 shows another embodiment of the piezoelectric element 1 in which the bumps 10 are arranged at the bottom of the piezoelectric element 1. In one possible embodiment, the bump 10 can be placed directly on the contact area 5 of the piezoelectric element 1. Each contact area 5 on the left side of the piezoelectric element 1 has a bump 10 disposed directly on the contact area 5 of the piezoelectric element 1. The contact area 5 on the right side of the piezoelectric element 1 shows another possible embodiment, and the bump 10 is located in the area of the vibration nodes 4a, 4b via the conductor track part 9 arranged as far as possible. To the contact area 5. Due to the bumps 10, the piezoelectric element 1 has a suspension that ensures that the vibration of the piezoelectric element 1 is only slightly affected.

図6において、装置の他の実施形態が図示される。圧電素子1はバネ接触11を用いて懸架される。バネ接触11は基板2の上に直接配置されることが好ましく、基板2の上の導体トラックと電気的に接触する。圧電素子1とバネ接触11との接触は接触領域5において実施されることが好ましいが、図6において明示的に示されていない。図6に図示されるように、バネ接触11は基板2の領域において鋳造合成物12で包まれ得、鋳造合成物12と圧電素子1との間に隙間14が残るので、圧電素子1の振動はわずかしか減衰しない。他の実施形態において、バネ接触11は鋳造合成物12がなくてもよい。   In FIG. 6, another embodiment of the device is illustrated. The piezoelectric element 1 is suspended using a spring contact 11. The spring contact 11 is preferably placed directly on the substrate 2 and is in electrical contact with a conductor track on the substrate 2. The contact between the piezoelectric element 1 and the spring contact 11 is preferably carried out in the contact area 5, but is not explicitly shown in FIG. As shown in FIG. 6, the spring contact 11 can be wrapped with a casting compound 12 in the region of the substrate 2, and a gap 14 remains between the casting compound 12 and the piezoelectric element 1. Is slightly attenuated. In other embodiments, the spring contact 11 may be free of the cast composite 12.

図7は、他の電気素子13が圧電素子1の底部に配置される装置の他の実施形態を示す。電気素子13は、図7に示すように、鋳造合成物12に埋め込まれ得る。しかし、電気素子13は、鋳造合成物12を用いないようにするために、基板2に配置されることも可能である。例えば図6に描かれるように、電気素子13の上に圧電素子1が配置され、圧電素子はバネ接触11を用いて接触され、懸架される。他の実施形態において、図4に描かれているように、圧電素子1は、はんだテール8を用いて懸架され得る。はんだテール8は圧電素子1の接触領域5に配置され、コンダクタ部9を用いて接触される。   FIG. 7 shows another embodiment of the device in which another electrical element 13 is arranged at the bottom of the piezoelectric element 1. The electrical element 13 can be embedded in the casting composition 12, as shown in FIG. However, the electrical element 13 can also be arranged on the substrate 2 in order not to use the casting composition 12. For example, as depicted in FIG. 6, the piezoelectric element 1 is disposed on the electric element 13, and the piezoelectric element is contacted and suspended using the spring contact 11. In other embodiments, as depicted in FIG. 4, the piezoelectric element 1 can be suspended using a solder tail 8. The solder tail 8 is disposed in the contact region 5 of the piezoelectric element 1 and is contacted using the conductor portion 9.

他の実施形態において、図7の装置は、図2乃至図5の変形と合成し得る。1つの実施形態において、圧電素子1は、はんだテール8又はバネ接触11を介して電気素子13に電気的に接触し得る。他の実施形態において、圧電素子1は基板2の導体トラックと直接接触され得、電気素子13への直接的な電気接触が存在する必要はない。   In other embodiments, the apparatus of FIG. 7 can be combined with the variations of FIGS. In one embodiment, the piezoelectric element 1 can be in electrical contact with the electrical element 13 via the solder tail 8 or the spring contact 11. In other embodiments, the piezoelectric element 1 can be in direct contact with the conductor track of the substrate 2, and no direct electrical contact to the electrical element 13 need be present.

図8は、基板2に配置された圧電素子1の他の実施形態を示す。圧電素子1は接触領域5を備え、接触領域は圧電素子1の側面に配置される。圧電素子1の各側面は2つの接触領域5を備え、接触領域は振動節4a、4bの範囲内で指定されるのが好ましい。接触領域5と基板2の上の導体トラック3との間で、導電媒質16によって、電気接触が行われる。   FIG. 8 shows another embodiment of the piezoelectric element 1 arranged on the substrate 2. The piezoelectric element 1 includes a contact area 5, and the contact area is disposed on a side surface of the piezoelectric element 1. Each side surface of the piezoelectric element 1 is provided with two contact areas 5, which are preferably specified within the range of the vibration nodes 4a, 4b. Electrical contact is made by the conductive medium 16 between the contact area 5 and the conductor track 3 on the substrate 2.

図9a及び9bは、圧電素子1と基板2の上の導体トラック3との間の電気接触の実施形態をより詳細に示す。導電媒質16は圧電素子1の振動節の範囲内に配置される。支持要素17は、導電媒質16を取り付ける間、圧電素子1の底部と基板との間に位置する。支持要素17を取り除いた後、素子1は導電媒質16を介して機械的接触のみ有する。   FIGS. 9 a and 9 b show in more detail an embodiment of the electrical contact between the piezoelectric element 1 and the conductor track 3 on the substrate 2. The conductive medium 16 is disposed within the range of the vibration node of the piezoelectric element 1. The support element 17 is located between the bottom of the piezoelectric element 1 and the substrate while the conductive medium 16 is attached. After removing the support element 17, the element 1 has only mechanical contact via the conductive medium 16.

他の実施形態において、図9c及び9dに示されるように、圧電素子1と導電パス3(導体トラック)との間の電気接触が素子1の底部に設けられる。この場合、接触領域5は、素子1の上面及び/又は底面において、又は、少なくとも接触点又はバンプ10の領域において少し広がる。図9dに示された実施形態は、よく知られたフリップチップ技術を用いて基板2に素子1をはんだ付けするのに良く適している。   In other embodiments, as shown in FIGS. 9 c and 9 d, electrical contact between the piezoelectric element 1 and the conductive path 3 (conductor track) is provided at the bottom of the element 1. In this case, the contact area 5 extends a little on the top and / or bottom surface of the element 1 or at least in the area of contact points or bumps 10. The embodiment shown in FIG. 9d is well suited for soldering the element 1 to the substrate 2 using well-known flip chip technology.

素子1の底部と基板2の間の支持要素17は、取り除くことができるように作られ、導電媒質16の貼り付け及び固定の間の技術プロセスにおいてのみ使用されることが好ましい。支持要素17を取り除いた後、圧電素子1は、電気接触の領域において導電媒質16を介して基板2のみと機械接触を有する。圧電素子1と基板との間の隙間は10ないし500μmであることが好ましい。   The support element 17 between the bottom of the element 1 and the substrate 2 is made such that it can be removed and is preferably used only in a technical process during the application and fixing of the conductive medium 16. After removing the support element 17, the piezoelectric element 1 has mechanical contact only with the substrate 2 via the conductive medium 16 in the region of electrical contact. The gap between the piezoelectric element 1 and the substrate is preferably 10 to 500 μm.

図10及び11は、基板2の上に配置された圧電素子1の他の実施形態を示す。圧電素子1の運動は、素子1の周りに配置された附加的なストッパ18によって最大移動量に関して制限される。導電媒質16が、柔軟性があり、最初の位置から圧電素子1がずれることを許容するあそびを備えるなら、この移動の最大値は、ストッパ18によってどの方向にも制限され得る。ストッパ18は、圧電素子1の各側面の位置で基板2を突き抜ける。圧電動作の通常の状態では、素子1はストッパ18の表面には接触しないが、大きく加速している状態では、素子1は動き、ストッパ19に接触し、ストッパを越えて動くことはできない。従って、大きく移動しすぎて導電媒質16が破壊されることは、防がれる。ストッパ18が、素子1を覆い、基板2に対して相対的に動きを制限する1つの共通の蓋で実施される場合にも、同じ効果が与えられる。   10 and 11 show another embodiment of the piezoelectric element 1 disposed on the substrate 2. The movement of the piezoelectric element 1 is limited with respect to the maximum amount of movement by an additional stopper 18 arranged around the element 1. If the conductive medium 16 is flexible and has a play that allows the piezoelectric element 1 to deviate from its initial position, the maximum value of this movement can be limited in any direction by the stopper 18. The stopper 18 penetrates the substrate 2 at the position of each side surface of the piezoelectric element 1. In a normal state of piezoelectric operation, the element 1 does not contact the surface of the stopper 18, but in a state of being greatly accelerated, the element 1 moves, contacts the stopper 19, and cannot move beyond the stopper. Accordingly, it is possible to prevent the conductive medium 16 from being destroyed by moving too much. The same effect is also provided when the stopper 18 is implemented with one common lid that covers the element 1 and restricts movement relative to the substrate 2.

固定する技術プロセスの間に、素子1は支持要素17の上に配置され、それは導電媒質16によって素子のはんだ付けの後に取り除かれる。   During the fixing technical process, the element 1 is placed on a support element 17 which is removed by means of a conductive medium 16 after the element has been soldered.

図示されていない他の実施形態において、圧電素子1は、後に蓋によって密閉されるハウジング内に初めに配置される。素子1の表面の接触領域5とハウジングの内部コンタクトとの間に、図10に記載したものと同じ方法で、ハウジング内部の電気接続が実施される。その後、ハウジングの内部接触と電気接続されたハウジングの外側の接触は、基板2の表面の導体トラック3にはんだ付けされる。   In other embodiments not shown, the piezoelectric element 1 is initially placed in a housing that is later sealed by a lid. Between the contact area 5 on the surface of the element 1 and the internal contact of the housing, an electrical connection inside the housing is carried out in the same way as described in FIG. Thereafter, the inner contact of the housing and the outer contact of the housing electrically connected are soldered to the conductor track 3 on the surface of the substrate 2.

図12は圧電素子1の電極層の配置を示す。圧電素子1は、圧電素子1の側面の接触領域5に交互に電気接続されて積み重なった電極19’、20’を備える左側の入力部又は出力部から構成される。右側の対応する出力部又は入力部は、圧電素子1の側面の2つの接触領域5の他のセットに交互に接続されて積み重なった電極19、20から構成される。電極19、20の構造は、与えられた接触領域5に接触しない電極19の端と、同じ電極スタックの隣接する電極20に接続された接触領域5との間の距離が最大化されるような方法で、作られる。これは、接触領域5周りに同心円状に電極19の非接触端に凹部を形成することによって成され得、凹部は電極19から接触領域5までの距離を拡大する。凹部は、電極領域と、同時に反対側の接触領域までの距離を最適化することを可能にする。   FIG. 12 shows the arrangement of the electrode layers of the piezoelectric element 1. The piezoelectric element 1 includes a left input unit or output unit including electrodes 19 ′ and 20 ′ stacked alternately by being electrically connected to the contact region 5 on the side surface of the piezoelectric element 1. The corresponding output section or input section on the right side is composed of electrodes 19 and 20 that are alternately connected to and stacked on another set of two contact areas 5 on the side surface of the piezoelectric element 1. The structure of the electrodes 19, 20 is such that the distance between the end of the electrode 19 that does not contact a given contact area 5 and the contact area 5 connected to an adjacent electrode 20 of the same electrode stack is maximized. Made in the way. This can be done by forming a recess at the non-contact end of the electrode 19 concentrically around the contact area 5, which increases the distance from the electrode 19 to the contact area 5. The recess makes it possible to optimize the distance to the electrode area and at the same time to the opposite contact area.

図12の圧電素子1の電極構造のより詳細な図は図13に示される。圧電素子1の左側の電極19’又は20’の構造、又は右側の電極19、20の構造は、入力側及び出力側に同様に使用され得る。電極19、19’、20、20’の構造は、圧電素子1の振動節の軸方向に対称であることが好ましい。図12の左側の電極19’、20’の構造は、圧電素子の内部に配置された電極用に使用され、一方、反対側の接触領域5までの距離を最大化するために、右側の電極構造は圧電素子1の上部及び底部領域において配置される電極用に使用されることが好ましい。電極から反対側の接触領域5及び圧電素子1の側面までの距離を最大化することによって、電極と接触領域5との間のスパークを避けることが可能となる。   A more detailed view of the electrode structure of the piezoelectric element 1 of FIG. 12 is shown in FIG. The structure of the left electrode 19 ′ or 20 ′ of the piezoelectric element 1 or the structure of the right electrodes 19, 20 can be used similarly on the input side and the output side. The structure of the electrodes 19, 19 ′, 20, 20 ′ is preferably symmetrical with respect to the axial direction of the vibration node of the piezoelectric element 1. The structure of the left electrodes 19 ′, 20 ′ in FIG. 12 is used for the electrodes arranged inside the piezoelectric element, while the right electrode is used to maximize the distance to the opposite contact area 5. The structure is preferably used for electrodes arranged in the top and bottom regions of the piezoelectric element 1. By maximizing the distance from the electrode to the opposite contact area 5 and the side surface of the piezoelectric element 1, it is possible to avoid sparks between the electrode and the contact area 5.

本発明の可能な拡張は例示的な実施形態において限られた数だけ記述され得るが、本発明はこれらに制限されない。サスペンションが圧電素子の最小限の減衰しか起こさないことが保証される限り、サスペンションのどのような形状も選択することは原則可能である。   Although a limited number of possible extensions of the invention may be described in the exemplary embodiments, the invention is not limited thereto. It is possible in principle to select any shape of the suspension, as long as it is guaranteed that the suspension will cause only minimal damping of the piezoelectric element.

本発明は、図示された要素の数に制限されない。   The invention is not limited to the number of elements shown.

ここで示された物の記述は、それぞれの特定の実施形態に制限されるものではなく、むしろ、各実施形態の特徴は、技術的に意義のある方法で要求通りに組み合わせることも可能である。   The descriptions of items presented herein are not limited to each particular embodiment, but rather the features of each embodiment may be combined as desired in a technically meaningful manner. .

1 圧電素子
2 基板
3 導体トラック
4a、4b 振動節
5 接触領域
6 ワイヤ
7 クリップ
8 はんだテール
9 コンダクタ部
10 バンプ
11 バネ接触
12 鋳造合成物
13 電気素子
14 隙間
15 はんだフット
16 導電媒質
17 支持要素
18 ストッパ
19、19’ 電極
20、20’ 電極
DESCRIPTION OF SYMBOLS 1 Piezoelectric element 2 Board | substrate 3 Conductor track 4a, 4b Vibration node 5 Contact area 6 Wire 7 Clip 8 Solder tail 9 Conductor part 10 Bump 11 Spring contact 12 Cast compound 13 Electrical element 14 Crevice 15 Solder foot 16 Conductive medium 17 Support element 18 Stopper 19, 19 'electrode 20, 20' electrode

Claims (14)

複数の電極層を有する圧電素子(1)と、
導体トラック(3)を有する基板(2)と、
を備え、
前記圧電素子(1)は、前記基板(2)の上に懸架され、前記圧電素子(1)は振動節(4a、4b)を有する少なくとも2つの端領域に電気的に接触され、
前記圧電素子(1)は前記基板(2)から離れて位置し、
前記圧電素子(1)の振動は、懸架されること(サスペンション)により大きくは影響を受けない状態である
ことを特徴とする圧電素子のサスペンション及び接触のための装置。
A piezoelectric element (1) having a plurality of electrode layers;
A substrate (2) having conductor tracks (3);
With
The piezoelectric element (1) is suspended on the substrate (2), and the piezoelectric element (1) is in electrical contact with at least two end regions having vibration nodes (4a, 4b);
The piezoelectric element (1) is located away from the substrate (2);
The apparatus for suspension and contact of a piezoelectric element, wherein the vibration of the piezoelectric element (1) is not greatly affected by being suspended (suspension).
前記振動節(4a、4b)の領域で、前記圧電素子(1)は、外側において、前記圧電素子(1)の電極層と電気的に接触している金属の接触領域(5)を有する
ことを特徴とする請求項1に記載の装置。
In the region of the vibration nodes (4a, 4b), the piezoelectric element (1) has a metal contact region (5) in electrical contact with the electrode layer of the piezoelectric element (1) on the outside. The apparatus of claim 1.
前記サスペンションは、前記基板(2)に接着されたワイヤ(6)を用いて実施される
ことを特徴とする請求項1又は2に記載の装置。
The device according to claim 1 or 2, characterized in that the suspension is implemented using a wire (6) bonded to the substrate (2).
前記サスペンションは、少なくとも部分的に前記圧電素子(1)を囲むクリップ(7)を用いて実施され、前記クリップは前記圧電素子(1)から離れて位置し、前記振動節(4a、4b)の領域においてのみ圧電素子と接触する
ことを特徴とする請求項1又は2に記載の装置。
The suspension is implemented using a clip (7) that at least partially surrounds the piezoelectric element (1), the clip being located away from the piezoelectric element (1) and of the vibration nodes (4a, 4b). The device according to claim 1, wherein the device contacts the piezoelectric element only in the region.
前記サスペンションは、前記基板(2)に接触するはんだテール(8)を用いて実施され、前記はんだテールはコンダクタ部(9)を用いて前記圧電素子(1)から離れて位置する
ことを特徴とする請求項1又は2に記載の装置。
The suspension is implemented using a solder tail (8) that contacts the substrate (2), and the solder tail is located away from the piezoelectric element (1) using a conductor portion (9). The apparatus according to claim 1 or 2.
前記サスペンションは、前記圧電素子(1)の前記振動節(4a、4b)の領域に配置されるバンプ(10)を用いて実施され、
前記圧電素子(1)は、前記バンプ(10)を用いて前記基板(2)から離れて位置する
ことを特徴とする請求項1又は2に記載の装置。
The suspension is implemented using bumps (10) arranged in the region of the vibration nodes (4a, 4b) of the piezoelectric element (1),
The device according to claim 1 or 2, wherein the piezoelectric element (1) is located away from the substrate (2) using the bump (10).
前記サスペンションは、弾性バネコンタクト(11)を用いて実施され、前期弾性バネコンタクトは、前記振動節(4a、4b)の領域で前記圧電素子(1)を押し、前記基板(2)に接触するのに適した領域を有する
ことを特徴とする請求項1又は2に記載の装置。
The suspension is implemented using an elastic spring contact (11), and the first elastic spring contact presses the piezoelectric element (1) in the region of the vibration nodes (4a, 4b) and contacts the substrate (2). The device according to claim 1, wherein the device has a region suitable for the following.
鋳造合成物(12)が前記圧電素子(1)と前記基板(2)との間に配置される
ことを特徴とする請求項1乃至7のうちいずれか1項に記載の装置。
The apparatus according to any one of the preceding claims, characterized in that a casting compound (12) is arranged between the piezoelectric element (1) and the substrate (2).
前記鋳造合成物(12)は、前記基板(2)に配置された電気素子(13)を囲む
ことを特徴とする請求項8に記載の装置。
The device according to claim 8, wherein the casting composition (12) surrounds an electrical element (13) arranged on the substrate (2).
前記圧電素子(1)は変圧器として構成される
ことを特徴とする請求項1乃至9のうちいずれか1項に記載の装置。
10. A device according to any one of the preceding claims, characterized in that the piezoelectric element (1) is configured as a transformer.
前記圧電素子(1)は最大15mmの設置面積を有する
ことを特徴とする請求項1乃至10のうちいずれか1項に記載の装置。
The piezoelectric element (1) Apparatus according to any one of claims 1 to 10, characterized in that it has a footprint up to 15 mm 2.
前記基板(2)の側部からの前記サスペンションの間隔はSMDグリッドサイズと対応する
ことを特徴とする請求項1乃至11のうちいずれか1項に記載の装置。
The apparatus according to any one of claims 1 to 11, characterized in that the distance of the suspension from the side of the substrate (2) corresponds to the SMD grid size.
前記圧電素子(1)の最大移動はストッパ(18)によって制限される
ことを特徴とする請求項1乃至12のうちいずれか1項に記載の装置。
Device according to any one of the preceding claims, characterized in that the maximum movement of the piezoelectric element (1) is limited by a stopper (18).
電極(19、20)から反対側の前記接触領域(5)までの距離は最大化される
ことを特徴とする請求項1乃至13のうちいずれか1項に記載の装置。
14. A device according to any one of claims 1 to 13, characterized in that the distance from the electrode (19, 20) to the contact area (5) on the opposite side is maximized.
JP2009128649A 2008-05-28 2009-05-28 Apparatus for suspension and contacting of piezoelectric component Pending JP2010004036A (en)

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Publication number Priority date Publication date Assignee Title
DE102010055266A1 (en) * 2010-12-20 2012-06-21 Epcos Ag Electrical component i.e. microelectronic component, for creating operation voltage in LCD backlight unit in e.g. laptop, has chip for connecting arms to terminal, where surface of chip is arranged at retention device in non-contact manner
EP2529846A1 (en) * 2011-05-31 2012-12-05 Pepperl & Fuchs GmbH Ultrasound assembly
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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02301183A (en) * 1989-05-15 1990-12-13 Toshiba Corp Manufacture of mounting type circuit component
JPH0936452A (en) * 1995-07-19 1997-02-07 Hitachi Metals Ltd Piezoelectric transformer
JPH0951131A (en) * 1995-08-08 1997-02-18 Tokin Corp Piezoelectric transformer and transformer device using it
JPH0983033A (en) * 1995-09-14 1997-03-28 Sony Corp Piezoelectric ceramic transformer
JPH09181559A (en) * 1995-12-25 1997-07-11 Murata Mfg Co Ltd Piezoelectric part and its manufacture
JPH1022540A (en) * 1996-06-29 1998-01-23 Mitsui Petrochem Ind Ltd Piezoelectric oscillator and its mounting structure
JP2001177210A (en) * 1999-12-21 2001-06-29 Tokin Corp Method of mounting piezoelectric transformer and device using the transformer

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2885188B2 (en) * 1996-06-19 1999-04-19 日本電気株式会社 Piezoelectric transformer
US6448697B1 (en) * 2000-12-28 2002-09-10 Cts Corporation Piezoelectric device having increased mechanical compliance
JP3743302B2 (en) * 2001-04-25 2006-02-08 株式会社村田製作所 Electronic component and method for forming substrate electrode of electronic component
KR100691270B1 (en) * 2005-08-05 2007-03-12 삼성전기주식회사 Supporting Structure For Finding the Nodal Point on the Piezoelectric Stator Automatically
DE102006050110A1 (en) 2006-10-24 2008-04-30 Epcos Ag Piezoelectric transformer for integrated power supply of compact electrical module, has parts with electrodes aligned perpendicular to main surface and connected with each other, and contact surfaces arranged on main surface

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02301183A (en) * 1989-05-15 1990-12-13 Toshiba Corp Manufacture of mounting type circuit component
JPH0936452A (en) * 1995-07-19 1997-02-07 Hitachi Metals Ltd Piezoelectric transformer
JPH0951131A (en) * 1995-08-08 1997-02-18 Tokin Corp Piezoelectric transformer and transformer device using it
JPH0983033A (en) * 1995-09-14 1997-03-28 Sony Corp Piezoelectric ceramic transformer
JPH09181559A (en) * 1995-12-25 1997-07-11 Murata Mfg Co Ltd Piezoelectric part and its manufacture
JPH1022540A (en) * 1996-06-29 1998-01-23 Mitsui Petrochem Ind Ltd Piezoelectric oscillator and its mounting structure
JP2001177210A (en) * 1999-12-21 2001-06-29 Tokin Corp Method of mounting piezoelectric transformer and device using the transformer

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