JP2009291709A - Apparatus for spraying liquid, apparatus for producing flat panel display, flat panel display, apparatus for fabricating solar cell panel, and solar cell panel - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To protect an ejection head by checking the vertical position of an ejection head such as an inkjet head at every predetermined timing. <P>SOLUTION: An apparatus for spraying a liquid includes a linear motor means 21 for intermittently transferring a transfer table 20 and an inkjet head 30 by causing them to move relative to each other, a head slide mechanism 26 that causes the inkjet head 30 to horizontally move between an ink spraying area A1 and a waiting area A2, and height detection censors 41, 42 that detect the vertical position of the inkjet head 30, with the height detection sensors 41, 42 detecting the vertical position of the inkjet head 30 whenever the slide mechanism 26 horizontally moves the inkjet head 30 from the waiting area A2 to the ink spraying area A1 and drives the linear motor means 21 only when the detected vertical position of the inkjet head 30 is proper. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention applies a liquid spraying device for spraying a liquid on a substrate, a flat panel display manufacturing device to which the liquid spraying device is applied, a flat panel display manufactured by the flat panel display manufacturing device, and the liquid spraying device described above. The present invention relates to a solar cell panel manufacturing apparatus and a solar cell panel manufactured by the solar cell panel manufacturing apparatus.

  A liquid crystal display as a flat panel display is composed of a TFT substrate made of a transparent thin plate such as glass and a color filter substrate, and a minute gap called a cell gap is formed between the TFT substrate and the color filter substrate. Is formed. The cell gap is secured by a spacer made of an aggregate of a plurality of spacer beads, and liquid crystal is sealed in this space. The spacer is composed of spherical fine particles having a particle diameter of 3 to 5 μm, and a large number of spacers are dispersed on either the TFT substrate or the color filter substrate.

The spacer is limitedly arranged in the black matrix region on the substrate. For this purpose, spacer ink made of a liquid in which spacer beads are uniformly dispersed in a solvent is used to spray the spacer ink so as to land on the black matrix region. As a method for supplying the spacer ink, an ink jet method as in Patent Document 1 is adopted. In the ink jet system as shown in Patent Document 1, a droplet of spacer ink is ejected from each nozzle toward a substrate using an ink jet head in which a plurality of minute nozzles are arranged in a row. The ink jet head is fixedly disposed on the upper part of the transport table, and the ink jet head is disposed orthogonally or obliquely to the transport direction of the substrate. While the substrate is mounted on the transfer table and intermittently fed in one direction, ink is sprayed from the nozzles of the inkjet head toward the substrate in accordance with the intermittent feed timing.
JP 2007-025334 A

  The ink sprayed on the substrate must be distributed in a limited manner in the black matrix region, and since extremely high landing accuracy is required, the distance between the substrate and the inkjet head is set to be extremely small. When replacing the substrate, the substrate is carried into the lower portion of the inkjet head while the inkjet head is waiting at the intersection of the inkjet head and the substrate. At this time, if a slight shift occurs in the height position of the inkjet head and the two are in a position where they interfere, the substrate collides with the inkjet head. In particular, since the substrate is mounted on the transfer table and is carried in at a relatively high speed, deformation or breakage that occurs in the ink jet head may become large. Since each nozzle of the inkjet head is made of precision parts, it must be replaced even if it is slightly deformed. For this reason, the running cost becomes high, and the processing cannot be performed during that time, which greatly affects the throughput.

  Adjustment of the height position of the ink jet head is performed when the ink jet head is first assembled to the apparatus, and is basically not performed thereafter. In addition, when maintenance such as disassembly / repair is performed, adjustment may be performed again. Therefore, once the ink jet head is assembled to the apparatus, the height position is not adjusted again unless a failure or breakage occurs.

  However, the ink jet head is a movable member, and if the ink is repeatedly ejected, there is a possibility that the position shift gradually occurs. Since the distance between the substrate and the ink-jet head is very small, there is a possibility that a collision will occur even if the gap is gradually generated. Further, when the ink is repeatedly ejected from the ink jet head, the ink is dried and fixed to the nozzle, resulting in defective ejection of the ink, non-ejection, and the like, so that maintenance is periodically performed. At the time of maintenance, the inkjet head is removed and mounted again, so that the inkjet head and the substrate may interfere with each other depending on the mounting accuracy.

  Therefore, an object of the present invention is to protect the ejection head by checking the height position of the ejection head such as an inkjet head at every predetermined timing.

  In the liquid spraying apparatus according to the first aspect of the present invention, while intermittently feeding the transport table on which the substrate is mounted, the spray ports for spraying the liquid containing the fine particles downward are arranged in one or a plurality of rows. A liquid spraying device for spraying the liquid from the provided ejection head to the substrate, the relative movement means for performing the intermittent feed by relatively moving the transport table and the ejection head, and the ejection head; A head moving means for horizontally moving between the spray position of the liquid on the substrate and a retracted position retracted horizontally from the position; a head position detecting means for detecting the height position of the ejection head; The head position detecting means detects and detects the height position of the ejection head each time the head moving means horizontally moves the ejection head from the retracted position to the spraying position. The height position of the serial ejection head is driven said relative movement means only when it is appropriate, characterized by.

  According to this liquid spraying device, the height position is detected every time the spraying head is horizontally moved from the retracted position to the spraying position, and the relative moving means is driven only when it is determined to be normal, whereby the spraying head When an abnormality occurs in the height position, the ejection head and the substrate do not move relative to each other. For this reason, the ejection head and the substrate do not interfere with each other, and the ejection head can be protected.

  The liquid spraying device according to a second aspect of the present invention is the liquid spraying device according to the first aspect, wherein the head moving means moves the ejection head each time spraying of the liquid on one substrate is completed. And horizontally moving from the spraying position to the retracted position and horizontally moving from the retracted position to the spraying position.

  According to this liquid spraying apparatus, after the liquid spraying on one substrate is completed, the ejection head moves from the spraying position to the retracted position, and also moves from the retracted position to the spraying position. The height position of the ejection head is always detected when the substrate after the liquid spraying is unloaded and the next substrate is loaded. For this reason, the height position of the ejection head can be frequently checked, and the safety of the ejection head can be further ensured.

  The liquid spraying apparatus according to claim 3 of the present invention is the liquid spraying apparatus according to claim 1, wherein the head moving means is set in the head moving means by performing a lifting and lowering operation in a direction of approaching and separating from the substrate. It is characterized in that it is detected whether or not the descending width is appropriate, and the relative moving means is driven only when it is appropriate.

  According to this liquid spraying apparatus, even if the height position of the ejection head is appropriate, if the descending width set in the head moving means is incorrect, the substrate and the ejection head are not moved relative to each other. Therefore, it is possible to fully protect the ejection head.

  The liquid spraying device according to a fourth aspect of the present invention is the liquid spraying device according to the first aspect, wherein the head position detecting means is two sensors that respectively detect height positions of both ends of the ejection head. It is characterized by.

  According to this liquid spraying apparatus, since the ejection head has a certain length, the height position is detected even when the ejection head is inclined by detecting the height positions of both ends thereof. Can be recognized as inappropriate. As a result, the ejection head can be reliably protected.

  The liquid spraying device according to claim 5 of the present invention is characterized in that, in the liquid spraying device according to claim 1, when the height position of the ejection head is not appropriate, an informing means for informing the fact is provided. And

  According to this liquid spraying device, since the notification is made when an abnormality in the height position of the ejection head is detected, for example, the operator can be immediately notified of the abnormality, and quick recovery measures can be taken. Will be able to.

  A flat panel display manufacturing apparatus according to a sixth aspect of the present invention includes the liquid spraying apparatus according to any one of the first to fifth aspects. A flat panel display according to a seventh aspect of the present invention is manufactured by the flat panel display manufacturing apparatus according to the sixth aspect.

  When used as an inkjet head in which spacer beads are mixed as an ejection head, a liquid spraying apparatus can be applied to a manufacturing apparatus for manufacturing a flat panel display. In this case, the liquid is ink mixed with spacer beads dispersedly arranged in the black matrix region. In addition, as the flat panel display, an organic EL display, a plasma display, or the like can be applied.

  An apparatus for manufacturing a solar cell panel according to an eighth aspect of the present invention includes the liquid spraying device according to any one of the first to fifth aspects. A solar cell panel according to claim 9 of the present invention is manufactured by the solar cell panel manufacturing apparatus according to claim 8.

  When used as an ejection head that ejects a liquid in which metal particles or the like are mixed as the ejection head, the liquid spraying apparatus can be applied to a manufacturing apparatus that manufactures a solar cell panel. In the solar battery panel, a metal wiring and a metal film for taking out the generated electricity in the panel cell to the outside, a silicon film for converting sunlight into electricity, ITO (transparent conductive film) and the like are formed on a glass substrate. At this time, metal particles in nano units can be mixed in the liquid, and the liquid can be ejected from the ejection head to form a metal film or draw a metal wiring on the glass substrate.

  According to the present invention, each time the ejection head is horizontally moved from the retracted position to the spraying position, the height position of the ejection head is detected and the ejection head and the substrate are relatively moved only after confirming that they are appropriate. Therefore, since the height position is frequently checked even during aging and ejection head maintenance, the ejection head can be protected without interference between the ejection head and the substrate. .

  Hereinafter, embodiments of the present invention will be described. In the following, a head cleaning apparatus will be described by exemplifying a liquid crystal display manufacturing apparatus which is one of flat panel displays. Accordingly, the ejection head is described as an inkjet head, the liquid is ink, and the particles in the liquid are spacer beads. However, the present invention is not limited to this. For example, when applied to a solar cell manufacturing apparatus, particles mixed in a liquid are nano-unit metal particles.

  In FIG. 1, a substrate 1 is a transparent thin plate such as glass. As the substrate 1, a TFT substrate on which a TFT circuit is formed or a color filter substrate on which a color filter is formed can be applied. Here, the substrate 1 will be described as a color filter substrate. The substrate 1 mainly has a pixel region 2 and a black matrix region 3. The pixel area 2 is a pixel area constituting pixels of each color of RGB, and the pixel area 2 is partitioned and formed by a black matrix area 3. In the black matrix region 3, spacers 4 are uniformly distributed in a lattice shape, and when the color filter substrate and the TFT substrate are joined by the spacers 4, a cell gap is formed as a predetermined gap. A liquid crystal panel is formed by sealing liquid crystal in a gap between the two substrates formed by the spacer 4. The spacer 4 may be formed not only on the color filter substrate side but also on the TFT substrate side.

  FIG. 2 shows the ink spraying device 10. The ink spraying device 10 is installed on a base 11 and mainly includes a transport table 20, linear motor means 21, an X-axis guide 22, a gantry 23, and an ink jet mechanism 24. The ink jet mechanism 24 includes a head block 25, a head slide mechanism 26, a head up / down mechanism 27, a head shift mechanism 28, and a head rotation mechanism 29 and is schematically configured. The head block 25 is provided with four inkjet heads 30A, 30B, 30C, and 30D (collectively referred to as inkjet heads 30), and ink is supplied from a large number of nozzles arranged in a row in each inkjet head 30. Be injected. In FIG. 2, the head block 25 includes four inkjet heads 30, but may include one inkjet head 30. In this case, not the head block 30 but the inkjet head 30 is provided in the inkjet mechanism 24. Further, although one example of the head block 25 is shown, a plurality of head blocks 25 may be provided. Further, although the head block 25 is disposed in a direction orthogonal to the substrate transport direction, the head block 25 may be provided so as to be inclined with respect to the substrate transport direction. By providing it so as to be inclined with respect to the transport direction of the substrate, it is possible to spray ink narrower than the interval between the nozzles of the inkjet head 30.

  The substrate 1 is mounted on the transfer table 20 and fixedly held by a vacuum suction means or the like. The conveyance table 20 is driven by the linear motor means 21 and is conveyed in the X direction in the drawing along the X-axis guide 22 which is a guide rail. The linear motor means 21 includes a stator 21F and a mover 21M. The stator 21F is composed of a superconducting coil, and generates a magnetic field by a current flowing through the coil. The stator 21F is arranged so as to extend linearly in the moving direction of the movable element 21M, that is, in the X direction in the drawing. The mover 21M is a motor with an encoder and is equipped with a superconducting magnet. The mover 21M is propelled and moved along the stator 21F by the magnetic field generated in the stator 21F and the superconducting magnet of the mover 21M. Since the conveyance table 20 is intermittently fed, the operation of the movable element 21M is also intermittently fed.

  In the configuration of FIG. 2, the transport table 20 is transported by the linear motor means 21, and the ink jet mechanism 24 is kept stationary by the gantry 23 to spray ink. For this reason, the linear motor means 21 is used as a relative movement means for relatively moving the inkjet mechanism 24 and the transport table 20. However, the transport table 20 may be in a stationary state, and the ink jet mechanism 24 may be moved in one direction and relatively moved so as to spray ink.

  The ink jet mechanism 24 is electrically connected to the control device 31, and each mechanism provided in the ink jet mechanism 24 is controlled by a command from the control device 31. The control device 31 is connected to a computer 32 so that the control contents of the control device 31 can be changed by the computer 32. The head slide mechanism 26 is attached to a gantry 23 having a gate shape so as to straddle the transport table 20, and moves the entire inkjet mechanism 24 in the Y direction. The head up-and-down mechanism 27 is a mechanism for moving the head block 25 up and down in the Z direction (up and down direction approaching and separating from the substrate 1). The head shift mechanism 28 is a mechanism that minutely moves the head block 25 in the X direction, and the head rotation mechanism 29 is a mechanism that rotates the head block 25 at an arbitrary angle.

  The ink spraying device 10 is roughly divided into two areas in the Y direction. One is an ink spraying area A1 where the transport table 20 is transported and ink is sprayed, and the other is a retreat area A2 which is a space for retracting the ink jet mechanism 24. A first height detection sensor 41 and a second height detection sensor 42 are fixedly disposed on the base 11 in the retreat area A2. The first height detection sensor 41 detects the height position of one end of the head block 25 located at the top, and the second height detection sensor 42 detects the height position of the other end of the head block 25. ing. The first height detection sensor 41 and the second height detection sensor 42 are electrically connected to the control device 31, and output information on the detected height position to the control device 31. As the first height detection sensor 41 and the second height detection sensor 42, for example, a laser displacement meter or the like can be used.

  The ink jet mechanism 24 can reciprocate between the ink spraying area A1 and the retreat area A2. When the head slide mechanism 26 of the ink jet mechanism 24 moves the gantry 23 in the Y direction under the control of the control device 31, the ink jet mechanism 24 reciprocates between the ink spraying area A1 and the retreat area A2.

  The substrate 1 mounted on the transport table 20 is sequentially transported to the ink spraying device 10 by the linear motor means 21, and ink is sprayed by each inkjet head 30 of the head block 25. By intermittently feeding the movable element 21M and ejecting ink in accordance with the timing, the ink is landed in a matrix on the substrate 1, and the spacers 4 are dispersedly arranged in the black matrix region 3. When the ink spraying process for all locations on the substrate 1 is completed, the movable element 21M is controlled to slide the transport table 20 and carry it out of the ink spraying device 10. Then, the next substrate 1 is carried into the ink spraying device 10. The mover 21 </ b> M is electrically connected to the control device 31, and stops and starts the operation based on a command from the control device 31.

  The ink jet mechanism 24 can wait in the same position until the next substrate 1 is carried in after the substrate 1 after the completion of the ink spraying process is carried in, but is once evacuated to the evacuation area A2. . The inkjet mechanism 24 retracted to the retreat area A2 can perform the above-described maintenance or the like, and can be kept in the retreat area A2 as it is if maintenance is not necessary.

  The ink jet mechanism 24 is located in the retreat area A2 in the state shown in FIG. When the ink spraying process is started again from this state, as shown in FIG. 4, the head slide mechanism 26 of the ink jet mechanism 24 moves in the gantry 23 in the Y direction and returns to the ink spraying area A1. At this time, the transport table 20 has not yet been carried into the ink spreading area A1. Then, from this state, the head up-and-down mechanism 27 lowers the head block 25 by a preset descending width. The lowered position is the optimum height (ink spraying height) at which the ink is sprayed on the substrate 1, and becomes a so-called teaching point. The ink spraying height is a height position at which ink is actually sprayed, and is set to be extremely small with respect to the substrate 1. Then, as shown in FIG. 5, the substrate 1 mounted on the transport table 20 is carried under the head block 25 waiting at the ink spraying height, and the ink spraying process is started.

  The movement of the inkjet mechanism 24 in the Y direction and the lowering operation in the Z direction are all performed until the transport table 20 is carried into the ink spraying device 10. In terms of spraying ink onto the substrate 1, after the substrate 1 is carried into the ink spraying device 10, the ink jet mechanism 24 is moved to the ink spraying area A1 and lowered to the ink spraying height, and then the ink spraying process is performed. You may make it start. However, as described above, the ink jet mechanism 24 is moved in the Y direction and the Z direction in advance, and is positioned at the ink spraying height, so that the transport table is ready in the state where the preparation for performing the ink spraying process is completed. 20 is carried in, and the ink spraying process can be started immediately. As a result, the processing efficiency can be improved.

  When the inkjet mechanism 24 is located in the retreat area A2, an error may occur in the height position in the Z direction due to maintenance or the aging. When performing maintenance, the head block 25 is usually removed, maintenance is performed, and the gantry 23 is mounted again. For this reason, when the head block 25 is mounted again, the height position may be displaced. Further, as described above, when cleaning is performed using the cleaning tank provided in the retreat area A2, the head block 25 can be cleaned while being attached to the inkjet mechanism 24, but the head block 25 is moved up and down. Since an impact is applied to the head block 25 during cleaning, the height position may be shifted. Further, since the inkjet mechanism 24 repeatedly reciprocates the gantry 23, the height may be gradually shifted during the movement, and the height position may be gradually shifted due to such secular change. . As described above, when the transport table 20 is loaded in a state where the height position of the head block 25 is shifted, the substrate 1 or the transport table 20 collides with the head block 25 that is waiting. Each ink jet head 30 of the head block 25 must be replaced even if it is slightly deformed or damaged, which causes problems such as an increase in running cost and a decrease in throughput.

  Accordingly, the check of whether or not the height position of the head block 25 is appropriate is frequently performed not only when the head block 25 is assembled to the ink spraying device 10 but also frequently. For this purpose, the height position of the head block 25 is checked every time the head block 25 moves horizontally from the retreat area A2 to the ink spraying area A1, and the mover 21M is controlled to control the mover 21M only when it is appropriate. 20 is carried into the ink spraying device 10. First, in the evacuation area A2, as shown in FIG. 3, the height positions at both ends of the head block 25 are detected by the first height detection sensor 41 and the second height detection sensor. The control device 31 stores in advance appropriate ranges of the height positions at both ends of the head block 25, and the height positions output from the first height detection sensor 41 and the second height detection sensor 42 are stored. It is determined whether or not the information is within an appropriate range stored in advance. When it is determined that either one of both ends of the head block 25 is outside the pre-stored appropriate range, it is detected that the height position of the head block 25 is not appropriate. By detecting the height positions of both ends of the head block 25, it is possible to detect that the head blocks 25 are not appropriate even when the height positions of both ends are inclined due to a difference. The appropriate range stored in advance in the control device 31 is a range having an allowable error with respect to a value measured as an ideal height position when the ink spraying device 10 is first installed. it can.

  Basically, if the height position of the head block 25 is appropriate, interference between the head block 25 and the substrate 1 can be avoided. However, when the descending width set in the head vertical mechanism 27, that is, the teaching point is incorrect, interference occurs even if the height position of the head block 25 is appropriate. That is, the descending width of the head block 25 can be changed when the type of the head block 25, the type of ink, or the like is changed, and the setting value of the descending width can be updated by the computer 32. . Therefore, although the value of the descending width can be changed by operating the computer 32, the value of the descending width may be erroneously changed under the circumstances where the change should not be originally performed. In this case, if the value is set lower than that before the change, the head block 25 is excessively lowered and collides with the transport table 20.

  Therefore, detection of whether or not the descending width is appropriate is also performed. The optimum value of the descending width is a value when the distance from the substrate 1 is optimally adjusted when the ink spraying device 10 is first installed, and the value is stored in the control device 31. For this reason, the control device 31 compares the value of the descending width stored first with the value of the set descending width, and determines that the descending width is not appropriate when it detects a difference. This can also be determined by detecting that the descending width has been updated.

  Therefore, the movable element 21M is driven only when the double condition of (1) whether the height of the head block 25 is appropriate and (2) whether the descending width is appropriate is cleared. Thus, the transport table 20 is carried into the ink spraying device 10. As a result, the head block 25 and the substrate 1 do not interfere with each other reliably, so that the head block 25 can be protected.

  The appropriate checks (1) and (2) are performed every time the head block 25 moves from the retreat area A2 to the ink spraying area A1, but the transition timing at this time is one sheet. It is possible to set an arbitrary timing such as every time the ink spreading process for the substrate 1 is completed or every time the ink spreading process for a plurality of substrates is completed. At this time, if the appropriateness check is frequently performed, a time loss is generated correspondingly, and the overall throughput is reduced. However, the head block 25 can be protected accordingly. In this sense, it is desirable to perform an appropriate check for each substrate 1. Further, when the maintenance of the head block 25 is performed, a certain amount of time is required. Even if the height position is checked at the same time as the maintenance, the time loss is not so much. On the other hand, since the head block 25 is attached and detached during maintenance, the height position is likely to be shifted, and the head block 25 is fully protected by checking the appropriate height position at the maintenance timing. The time loss can be suppressed to the minimum while aiming.

  In addition, a notification device such as a buzzer or an alarm is provided in the control device 31, and when it is determined that either (1) or (2) is not appropriate, a buzzer or an alarm is sounded quickly and reliably. The operator can be notified of the fact.

It is structure explanatory drawing of the board | substrate with which a spacer is spread | dispersed. It is an external view which shows the whole structure of an ink spreading device. It is explanatory drawing when a head block is located in an evacuation area. It is explanatory drawing when a head block is located in an ink spreading area. It is explanatory drawing when a head block descends and a board | substrate is carried in.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Board | substrate 10 Ink spraying apparatus 20 Conveyance table 21 Linear motor means 24 Inkjet mechanism 25 Head block 30 Inkjet head 31 Control apparatus 32 Computer 41 1st height detection sensor 42 2nd height detection sensor

Claims (9)

While intermittently feeding a transport table on which a substrate is mounted, the liquid is applied to the substrate from an ejection head in which ejection ports that eject liquid containing fine particles downward are arranged in one or more rows. A liquid spraying device for spraying
Relative moving means for performing the intermittent feeding by relatively moving the transport table and the ejection head;
A head moving means for horizontally moving the ejection head between a spray position of the liquid on the substrate and a retracted position retracted horizontally from the position;
A head position detecting means for detecting a height position of the ejection head,
The head position detecting means detects the height position of the ejection head every time the head moving means horizontally moves the ejection head from the retracted position to the spraying position, and the detected height position of the ejection head is The liquid spraying device, wherein the relative moving means is driven only when it is appropriate.   The head moving means horizontally moves the ejection head from the spraying position to the retracted position and from the retracted position to the spraying position every time the liquid spraying on one substrate is completed. The liquid spraying device according to claim 1, wherein the liquid spraying device is moved horizontally. The head moving means moves up and down in a direction to approach and separate from the substrate,
2. The liquid spraying apparatus according to claim 1, wherein it is detected whether or not the descending width set in the head moving means is appropriate, and the relative moving means is driven only when it is appropriate.   The liquid spraying apparatus according to claim 1, wherein the head position detection unit is two sensors that respectively detect height positions of both ends of the ejection head.   The liquid spraying device according to claim 1, further comprising a notification unit that notifies the fact that the height position of the ejection head is not appropriate.   An apparatus for manufacturing a flat panel display, comprising the liquid spraying apparatus according to claim 1.   A flat panel display manufactured by the flat panel display manufacturing apparatus according to claim 6.   An apparatus for manufacturing a solar cell panel, comprising the liquid spraying device according to any one of claims 1 to 5.   The solar cell panel manufactured with the manufacturing apparatus of the solar cell panel of Claim 8.

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