JP2009288278A - Liquid body discharge device, liquid body discharge method, manufacturing apparatus of electro-optic device, manufacturing method of electro-optic device, manufacturing apparatus for electronic equipment and manufacturing method of electronic equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a liquid body discharge device capable of suppressing the fluctuation of the discharge quantity in a required pattern formation and the increase of load onto a controller of the liquid body discharge device in the point of time when a discharge means forms the pattern, a liquid body discharge method, a manufacturing apparatus of an electro-optic device, a manufacturing method of an electrooptic device, a manufacturing apparatus for electronic equipment and a manufacturing method of electronic equipment. <P>SOLUTION: The liquid body discharge device for forming the desired pattern on a material where a liquid body is discharged by relatively moving a discharge means for discharging the liquid body and the material on which the liquid body is discharged is provided with a temperature receiving means for receiving temperature in the formation of the desired pattern in the discharge means, a temperature control means for controlling the temperature of the discharge means. The temperature control means controls the temperature of the discharge means in the start of the formation of the desired pattern to the temperature in the formation of the desired pattern. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a liquid material discharge apparatus including a discharge head having a discharge nozzle for discharging a liquid material, a liquid material discharge method in the liquid material discharge apparatus, an electro-optical device manufacturing apparatus including the liquid material discharge apparatus, and the liquid material BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing an electro-optical device using the discharge device or the liquid discharge method, an apparatus for manufacturing an electronic device including the liquid discharge device, and a method for manufacturing an electronic apparatus using the liquid discharge device or the liquid discharge method. .

  Conventionally, as a technique for forming a functional film such as a color filter film of a color liquid crystal device, a liquid droplet containing a functional film material is used using a droplet discharge device having a droplet discharge head that discharges a liquid material as droplets. A technique for forming a functional film by discharging a droplet of a body and landing it on an arbitrary position on a substrate as a workpiece, disposing the liquid material at the position, and drying the disposed liquid material Are known. Since the droplet discharge head of the droplet discharge apparatus used for forming such a film can selectively discharge minute droplets from the discharge nozzle and land with high positional accuracy, the precise planar shape and film A film having a thickness can be formed.

In order to form a functional film having a higher function, it is necessary to realize a functional film having a more precise planar shape and film thickness. In order to form a functional film having a constant thickness, it is necessary to maintain a constant discharge amount of the functional liquid from the discharge nozzle. The ejection amount is the size (volume) of the droplets ejected by the droplet ejection head or the amount ejected per unit time by the ejection head that continuously ejects. The weight of the functional liquid corresponding to the discharge amount is expressed as the discharge weight. Discharge for discharging the liquid material toward the workpiece is referred to as drawing discharge, and a substantially continuous discharge process including drawing discharge is referred to as a drawing discharge process.
Patent Document 1 discloses an ink jet printer that stabilizes print quality by cooling or heating an ink jet head using a Peltier element, paying attention to the fact that print quality is affected by temperature environment. However, even if the temperature of the entire droplet discharge head is kept constant, the discharge amount of each of the plurality of discharge nozzles of the droplet discharge head is not necessarily uniform, so that it is formed by one droplet discharge head. In some cases, the plurality of functional films are not necessarily uniform. Patent Document 2 discloses a method for manufacturing a color filter, a method for manufacturing a color filter, which uniformizes the ink discharge amount of a nozzle of a liquid discharge head by controlling the discharge amount by changing the voltage of a drive pulse for each discharge nozzle. A manufacturing apparatus and manufacturing method, a manufacturing method of a liquid crystal display panel, and a manufacturing method of an apparatus including a liquid crystal display panel are disclosed.

JP 2001-334645 A JP 2004-90621 A

  However, in order to adjust the temperature in the drawing discharge process as in the method or apparatus disclosed in Patent Document 1 or Patent Document 2, the temperature is set as part of the drawing discharge control in parallel with the drawing discharge. It is necessary to implement control to be adjusted. Therefore, there is a problem that even a normal drawing discharge control requires a larger load on a control device that requires a large load because it requires a huge amount of data processing. In particular, in recent years, the droplet discharge device has become large in response to the increase in the size of the workpiece to improve production efficiency, and the number of droplet discharge heads (discharge nozzles) provided has increased. The load on the control device tends to increase. When the load applied to the control device is large and the time required for processing becomes long, there arises a problem that the working time of the droplet discharge device becomes long.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

  Application Example 1 In the liquid material discharge apparatus according to this application example, a discharge unit that discharges a liquid material and a discharge object to which the liquid material is discharged are relatively moved to form a predetermined pattern on the discharge object. A liquid material ejecting apparatus, comprising: a temperature acquisition means for acquiring a temperature at the time of the predetermined pattern formation of the discharge means; and a temperature adjustment means for adjusting the temperature of the discharge means, wherein the temperature adjustment means comprises: The temperature of the ejection unit at the time of starting the predetermined pattern formation is adjusted to the temperature at the time of the predetermined pattern formation.

According to this liquid material discharge apparatus, the temperature adjusting unit adjusts the temperature of the discharge unit at the time when the discharge unit starts to form a predetermined pattern to the temperature at the time of the predetermined pattern formation acquired by the temperature acquisition unit. Since the temperature of the ejection unit is the temperature at which the ejection unit forms the predetermined pattern from the time when the predetermined pattern formation is started, the temperature of the ejection unit at the time of the predetermined pattern formation is the temperature of the predetermined pattern. It becomes substantially constant from the beginning of formation. Since the amount of liquid discharged from the discharge means per unit time or the discharge volume, which is the volume of discharged droplets, is affected by the temperature of the discharge means, the temperature of the discharge means at the time of forming a predetermined pattern is determined. By making the predetermined pattern formation substantially constant from the beginning, it is possible to suppress fluctuations in the ejection amount during the formation of the predetermined pattern. The temperature adjusting unit adjusts the temperature of the discharge unit when the discharge unit is forming a predetermined pattern in order to adjust the temperature of the discharge unit when the discharge unit starts forming a predetermined pattern. Therefore, it is not necessary to operate for this purpose. Therefore, when the temperature adjusting unit is operated, an increase in the load on the control device of the liquid material discharging device is suppressed at the time when the discharging unit is performing pattern formation. be able to.
The temperature of the discharge means includes the temperature around the hole through which the liquid material is discharged in the discharge means, the temperature of the pressurizing chamber that applies discharge pressure to the liquid material, the temperature of the flow path of the liquid material, The temperature of the outer wall surface of the chamber or the flow path can be appropriately employed. Regardless of the temperature of any part, the temperature of the part at the time of the predetermined pattern formation by the ejection unit is acquired, and the temperature acquisition unit acquires the temperature of the part at the time when the ejection unit starts to form the predetermined pattern The temperature is adjusted to the predetermined pattern formation temperature.

  Application Example 2 In the liquid material discharge apparatus according to this application example, a discharge unit that discharges the liquid material and a discharge object to which the liquid material is discharged are relatively moved to form a predetermined pattern on the discharge object. A liquid discharge apparatus that includes: a temperature acquisition unit that acquires a temperature at the time of forming the predetermined pattern of the liquid; and a temperature adjustment unit that adjusts the temperature of the liquid. The temperature of the liquid material at the time of starting the predetermined pattern formation is adjusted to the temperature at the time of the predetermined pattern formation.

According to this liquid material discharge apparatus, the temperature adjusting unit adjusts the temperature of the liquid material at the time when the discharge unit starts to form a predetermined pattern to the temperature at the time of the predetermined pattern formation acquired by the temperature acquisition unit. Since the temperature of the liquid material is the temperature of the liquid material when the ejection unit forms the predetermined pattern from the time when the predetermined pattern formation is started, the temperature of the liquid material at the time of the predetermined pattern formation is the predetermined temperature. It is substantially constant from the beginning of pattern formation. The amount of liquid ejected from the ejection means per unit time or the volume of ejected droplets is affected by the temperature of the liquid, so the temperature of the liquid during the predetermined pattern formation is By making the predetermined pattern formation substantially constant from the beginning, it is possible to suppress fluctuations in the ejection amount during the formation of the predetermined pattern. The temperature adjusting means adjusts the temperature of the liquid material at the time when the discharge means is forming the predetermined pattern in order to adjust the temperature of the liquid material at the time when the discharge means starts the predetermined pattern formation. Therefore, it is not necessary to operate for this purpose. Therefore, when the temperature adjusting unit is operated, an increase in the load on the control device of the liquid material discharging device is suppressed at the time when the discharging unit is performing pattern formation. be able to.
Note that the temperature of the liquid material includes the temperature of the liquid material in the hole through which the liquid material is discharged in the discharge means, the temperature of the liquid material in the pressurizing chamber that applies the discharge pressure to the liquid material, The temperature of the liquid material, the temperature of the liquid material immediately before being supplied to the discharge means, and the like can be appropriately employed. At any temperature, the temperature of the liquid material at the time of the predetermined pattern formation by the discharge means is acquired, and the temperature acquisition means acquires the temperature of the liquid material at the time when the discharge means starts the predetermined pattern formation. The temperature is adjusted to the predetermined pattern formation temperature.

  Application Example 3 In the liquid material discharge apparatus according to the above application example, the temperature adjustment unit drives the discharge unit to warm-up, thereby changing the temperature of the discharge unit or the liquid material when the predetermined pattern is formed. It is preferable to adjust to the temperature.

  According to this liquid material discharge apparatus, the temperature of the discharge means or the liquid material can be set to a temperature at the time of forming a predetermined pattern without separately providing a temperature adjusting device by driving the discharge means to warm up. The drive state in which the discharge means is driven to warm up includes a drive state in which the discharge means is driven to discharge the liquid material in a normal state or to a level at which the liquid material is not discharged. It is.

  Application Example 4 In the liquid material discharge apparatus according to the application example described above, the temperature acquisition unit performs the warm-up drive under two or more different warm-up drive conditions of the warm-up drive, so that the predetermined pattern is obtained. It is preferable to estimate the temperature at the time of formation.

  According to this liquid material discharge device, warm-up driving is performed under different warm-up driving conditions. When the warm-up drive is performed under different warm-up drive conditions, the state of temperature change caused by the warm-up drive is different for each warm-up drive condition. By comparing different temperature change states, the temperature at the time of forming a predetermined pattern can be estimated.

  Application Example 5 The liquid material discharge device according to the application example described above further includes a warm-up condition setting unit that obtains a warm-up drive condition for the warm-up drive, and the warm-up condition setting unit includes two or more different types of the warm-up condition setting unit. It is preferable to estimate the warm-up driving condition in which the temperature of the discharge unit or the liquid material becomes the temperature at the time of forming the predetermined pattern by performing the warm-up drive under the warm-up driving condition.

  According to this liquid material discharge device, warm-up driving is performed under different warm-up driving conditions. When the warm-up drive is performed under different warm-up drive conditions, the state of temperature change caused by the warm-up drive is different for each warm-up drive condition. By comparing different temperature change states, the temperature at the time of the predetermined pattern formation can be estimated. Therefore, as the drive condition that can realize the temperature, the drive condition that can realize the temperature at the time of the predetermined pattern formation is estimated. Can do.

  Application Example 6 In the liquid material discharge apparatus according to the application example, the temperature adjusting unit further includes a temperature measurement unit that measures the temperature of the discharge unit or the liquid material, and the measurement result of the temperature measurement unit Accordingly, it is preferable that the temperature of the ejection unit or the liquid material is adjusted to the temperature at which the predetermined pattern is formed by driving the ejection unit to warm up.

  According to this liquid material discharge device, the temperature measuring means measures the temperature of the discharge means or the liquid material by adjusting the temperature of the discharge means or the liquid material by warming up the discharge means according to the measurement result of the temperature measuring means. The actual temperature of the body can be reliably adjusted to the temperature at which the predetermined pattern is formed.

  Application Example 7 In the liquid material discharge apparatus according to the above application example, the temperature adjusting means is a heating means or a cooling means, and the discharge means or the liquid material is heated or cooled to heat or cool the discharge means or the liquid material. It is preferable to adjust the temperature of the liquid material to a temperature at the time of forming the predetermined pattern.

  According to this liquid material discharge apparatus, the temperature of the discharge means or the liquid material can be changed reliably by heating or cooling the discharge means or the liquid material by the heating means or the cooling means, so that the predetermined pattern can be reliably formed. Can be adjusted to temperature.

  Application Example 8 In the liquid material discharge apparatus according to the above application example, the temperature acquisition unit adjusts the temperature of the discharge unit or the liquid material at two or more different temperatures when the predetermined pattern formation is started. It is preferable that the temperature at the time of the predetermined pattern formation is estimated based on a temperature change when the predetermined pattern formation is performed at each temperature.

  According to this liquid material discharge apparatus, predetermined pattern formation is started in a state where the temperature of the discharge means or the liquid material is different. Since the temperature at the start of the predetermined pattern formation is different, the behavior of the temperature of the discharge means or the liquid material when performing the predetermined pattern formation is different. By comparing different temperature changes, the temperature at the time of forming a predetermined pattern can be estimated.

  Application Example 9 In the liquid material discharge apparatus according to the application example, the temperature adjustment unit further includes a temperature measurement unit that measures the temperature of the discharge unit or the liquid material, and the heating unit or the cooling unit includes The temperature of the discharge means or the liquid material may be adjusted to the temperature at which the predetermined pattern is formed by heating or cooling the discharge means or the liquid material according to the measurement result of the temperature measurement means. preferable.

  According to this liquid material discharge apparatus, the heating means or the cooling means heats or cools the discharge means or the liquid according to the measurement result of the temperature measuring means. For this reason, the actual temperature of the discharging means or the liquid material actually measured by the temperature measuring means can be reliably adjusted to the temperature at the time of forming the predetermined pattern.

  [Application Example 10] In the liquid material discharge method according to this application example, a predetermined pattern is formed on the discharge object by relatively moving the discharge means for discharging the liquid material and the discharge object to which the liquid material is discharged. A liquid material discharge method, comprising: a temperature acquisition step of acquiring a temperature at the time of forming the predetermined pattern of the discharge unit; and a temperature adjustment step of adjusting a temperature of the discharge unit, the temperature adjustment step The temperature of the discharge means at the time of starting the predetermined pattern formation is adjusted to the temperature at the time of the predetermined pattern formation.

According to this liquid material discharge method, in the temperature adjustment step, the temperature of the discharge unit when the discharge unit starts to form a predetermined pattern is adjusted to the temperature at the time of the predetermined pattern formation acquired in the temperature acquisition step. Since the temperature of the ejection unit is the temperature at which the ejection unit forms the predetermined pattern from the time when the predetermined pattern formation is started, the temperature of the ejection unit at the time of the predetermined pattern formation is the temperature of the predetermined pattern. It becomes substantially constant from the beginning of formation. Since the amount of liquid discharged from the discharge means per unit time or the discharge volume, which is the volume of discharged droplets, is affected by the temperature of the discharge means, the temperature of the discharge means at the time of forming a predetermined pattern is determined. By making the predetermined pattern formation substantially constant from the beginning, it is possible to suppress fluctuations in the ejection amount during the formation of the predetermined pattern. In the temperature adjustment step, in order to adjust the temperature of the ejection unit when the ejection unit starts to form a predetermined pattern, the temperature of the ejection unit is adjusted when the ejection unit is forming a predetermined pattern. Is not necessary, and therefore, it is possible to suppress an increase in the load on the control device of the liquid material discharge device, compared to the case where the temperature adjustment step is performed in parallel with the formation of the predetermined pattern by the discharge means. .
The temperature of the discharge means includes the temperature around the hole through which the liquid material is discharged in the discharge means, the temperature of the pressurizing chamber that applies discharge pressure to the liquid material, the temperature of the flow path of the liquid material, The temperature of the outer wall surface of the chamber or the flow path can be appropriately employed. Regardless of the temperature of any part, the temperature of the part at the time of the predetermined pattern formation by the ejection unit is acquired, and the temperature of the part at the time when the ejection unit starts the predetermined pattern formation is acquired in the temperature acquisition process. The temperature is adjusted to the predetermined pattern formation temperature.

  Application Example 11 In the liquid material discharge method according to this application example, the discharge unit for discharging the liquid material and the discharge object to which the liquid material is discharged are relatively moved to form a predetermined pattern on the discharge object. A liquid material discharge method comprising: a temperature acquisition step of acquiring a temperature of the liquid material at the time of forming the predetermined pattern; and a temperature adjustment step of adjusting the temperature of the liquid material, wherein the temperature adjustment step The temperature of the liquid material at the time of starting the predetermined pattern formation is adjusted to the temperature at the time of the predetermined pattern formation.

According to this liquid material discharge method, in the temperature adjustment step, the temperature of the liquid material at the time when the discharge means starts to form a predetermined pattern is adjusted to the temperature at the time of the predetermined pattern formation acquired in the temperature acquisition step. Since the temperature of the liquid material is the temperature of the liquid material when the ejection unit forms the predetermined pattern from the time when the predetermined pattern formation is started, the temperature of the liquid material at the time of the predetermined pattern formation is the predetermined temperature. It is substantially constant from the beginning of pattern formation. The amount of liquid ejected from the ejection means per unit time or the volume of ejected droplets is affected by the temperature of the liquid, so the temperature of the liquid during the predetermined pattern formation is By making the predetermined pattern formation substantially constant from the beginning, it is possible to suppress fluctuations in the ejection amount during the formation of the predetermined pattern. In the temperature adjustment process, in order to adjust the temperature of the liquid material at the time when the ejection unit starts to form a predetermined pattern, the temperature adjustment process is performed when the ejection unit is performing the formation of the predetermined pattern. Since it is not necessary, it is possible to suppress an increase in the load on the control device of the liquid material discharge device compared to the case where the temperature adjustment process is performed in parallel when the discharge means is forming a predetermined pattern. can do.
Note that the temperature of the liquid material includes the temperature of the liquid material in the hole through which the liquid material is discharged in the discharge means, the temperature of the liquid material in the pressurizing chamber that applies the discharge pressure to the liquid material, The temperature of the liquid material, the temperature of the liquid material immediately before being supplied to the discharge means, and the like can be appropriately employed. Regardless of the temperature of any liquid material, the temperature of the liquid material at the time of the predetermined pattern formation by the discharge unit is acquired, and the temperature of the liquid material at the time when the discharge unit starts the predetermined pattern formation is acquired. The temperature is adjusted to the predetermined pattern formation temperature acquired in the process.

  Application Example 12 In the liquid material discharge method according to the application example described above, in the temperature adjustment step, the temperature of the discharge unit or the liquid material is changed during the predetermined pattern formation by driving the discharge unit warm-up. It is preferable to adjust to the temperature.

  According to this liquid material discharge method, the temperature of the discharge means or the liquid material can be set to a temperature at the time of forming a predetermined pattern without separately providing a temperature adjusting device by driving the discharge means to warm up. The drive state in which the discharge means is driven to warm up includes a drive state in which the discharge means is driven to discharge the liquid material in a normal state or to a level at which the liquid material is not discharged. It is.

  [Application Example 13] In the liquid material discharge method according to the application example, the temperature acquisition step includes the step of forming the predetermined pattern after the warm-up driving is performed under the first warm-up driving condition, and the first Forming the predetermined pattern after performing the warm-up drive under a second warm-up drive condition different from the warm-up drive condition, and forming the predetermined pattern in each step It is preferable that the temperature at the time of forming the predetermined pattern is estimated based on the temperature change of the discharge means or the liquid material.

  According to this liquid material discharge method, warm-up driving is performed under different warm-up driving conditions. When the warm-up drive is performed under different warm-up drive conditions, the temperature change state and the reached temperature due to the warm-up drive differ for each warm-up drive condition. Therefore, the temperature at the time of starting the process of forming the predetermined pattern is different for each warm-up driving condition. The process of forming the predetermined pattern when the starting temperatures are different is different in temperature change state. By comparing different temperature change states, the temperature at the time of forming a predetermined pattern can be estimated.

  Application Example 14 In the liquid material discharge method according to the application example described above, the liquid material discharge method further includes a warm-up condition setting step for obtaining a warm-up drive condition for the warm-up drive. The step of forming the predetermined pattern after performing the warm-up drive under a driving condition, and the predetermined pattern after performing the warm-up driving under a second warm-up drive condition different from the first warm-up drive condition Forming the pattern, and by performing the warm-up drive according to a temperature change of the discharge unit or the liquid material when forming the predetermined pattern in each step, the discharge unit or the liquid material It is preferable to include a step of estimating the warm-up driving condition at which the temperature becomes the temperature at the time of forming the predetermined pattern.

  According to this liquid material discharge method, warm-up driving is performed under different warm-up driving conditions. When the warm-up drive is performed under different warm-up drive conditions, the temperature change state and the reached temperature due to the warm-up drive differ for each warm-up drive condition. Therefore, the temperature at the time of starting the process of forming the predetermined pattern is different for each warm-up driving condition. The process of forming the predetermined pattern when the starting temperatures are different is different in temperature change state. By comparing different temperature change states, the temperature at the time of the predetermined pattern formation can be estimated. Therefore, as the drive condition that can realize the temperature, the drive condition that can realize the temperature at the time of the predetermined pattern formation is estimated. Can do.

  Application Example 15 In the liquid material discharge method according to the application example, the temperature adjustment step includes a temperature measurement step of measuring the temperature of the discharge means or the liquid material, and according to the measurement result in the temperature measurement step. It is preferable that the temperature of the ejection unit or the liquid material is adjusted to the temperature at which the predetermined pattern is formed by driving the ejection unit to warm up.

  According to this discharge method, since the temperature of the discharge means or the liquid material is adjusted by warming up the discharge means in accordance with the measurement result in the temperature measurement process, the discharge means or the liquid material actually measured in the temperature measurement process is adjusted. It is possible to reliably adjust the actual temperature to the temperature at which a predetermined pattern is formed.

  Application Example 16 In the liquid material discharge method according to the application example described above, in the temperature adjustment step, the temperature of the discharge means or the liquid material is set to the predetermined temperature by heating or cooling the discharge means or the liquid material. It is preferable to adjust the temperature at the time of pattern formation.

  According to this liquid material discharge method, by heating or cooling the discharge means or the liquid material, the temperature of the discharge means or the liquid material can be changed reliably and adjusted to a predetermined pattern forming temperature. .

  Application Example 17 In the liquid material discharge method according to the above application example, in the temperature acquisition step, the temperature of the discharge unit or the liquid material at the time of starting the predetermined pattern formation is adjusted to two or more different temperatures. It is preferable that the temperature at the time of the predetermined pattern formation is estimated based on a temperature change when the predetermined pattern formation is performed at each temperature.

  According to this liquid material discharge method, predetermined pattern formation is started in a state where the temperature of the discharge means or the liquid material is different. Since the temperature at the start of the predetermined pattern formation is different, the behavior of the temperature of the discharge means or the liquid material when performing the predetermined pattern formation is different. By comparing different temperature changes, the temperature at the time of forming a predetermined pattern can be estimated.

  [Application Example 18] In the liquid material discharge method according to the application example, the temperature adjustment step further includes a temperature measurement step of measuring the temperature of the discharge means or the liquid material, and the measurement result in the temperature measurement step Accordingly, it is preferable to adjust the temperature of the discharge means or the liquid material to the temperature at the time of forming the predetermined pattern by heating or cooling the discharge means or the liquid material.

  According to this liquid material discharge method, the discharge means or the liquid material is heated or cooled according to the measurement result in the temperature measurement step. For this reason, the actual temperature of the discharge means or the liquid material actually measured in the temperature measurement step can be reliably adjusted to the temperature at the time of forming the predetermined pattern.

  Application Example 19 An electro-optical device manufacturing apparatus according to this application example includes the liquid material ejection device according to the application example, and uses the liquid material ejection device to form a functional film constituting the electro-optical device. It is characterized by.

  According to the electro-optical device manufacturing apparatus, the liquid material discharge device included in the apparatus sets the temperature of the discharge means or the liquid material at the time of the predetermined pattern formation to be substantially constant from the beginning of the predetermined pattern formation. In addition, it is possible to suppress fluctuations in the discharge amount during the formation of the predetermined pattern, and the load on the control device of the liquid material discharge apparatus increases at the time when the discharge means is performing the formation of the predetermined pattern. Can be suppressed. Since the functional film of the electro-optical device is formed by using this liquid material discharge device, it is possible to suppress the functional film from being impaired due to a change in the thickness of the functional film due to a change in the discharge amount. In addition, the electro-optical device can be efficiently manufactured while suppressing an increase in the load on the control device.

  Application Example 20 An electro-optical device manufacturing method according to this application example includes a liquid material ejection device according to the application example, or a functional film that constitutes an electro-optical device using the liquid material ejection method according to the application example. It is characterized by forming.

  According to the method of manufacturing the electro-optical device, the discharge amount at the time of the predetermined pattern formation is set by making the temperature of the discharge means or the liquid material at the time of the predetermined pattern formation substantially constant from the beginning of the predetermined pattern formation. Liquid discharge device that can suppress fluctuations and can suppress an increase in the load on the control device of the liquid discharge device at the time when the discharge means is performing the formation of the predetermined pattern. Alternatively, a liquid discharge method is used. As a result, it is possible to suppress the functional film from being impaired due to fluctuations in the thickness of the functional film due to fluctuations in the discharge amount when the functional film of the electro-optical device is manufactured, and An electro-optical device can be efficiently manufactured while suppressing an increase in the load on the control device.

  Application Example 21 An electronic device manufacturing apparatus according to this application example includes the liquid material discharge device according to the above application example, and uses the liquid material discharge device to form a functional film constituting the electronic device. And

  According to this electronic apparatus manufacturing apparatus, the liquid material discharge device included in the apparatus is configured so that the temperature of the discharge means or the liquid material at the time of the predetermined pattern formation is substantially constant from the beginning of the predetermined pattern formation. It is possible to prevent the discharge amount from fluctuating during the formation of the predetermined pattern, and to increase the load on the control device of the liquid material discharge device at the time when the discharge means is performing the formation of the predetermined pattern. Can be suppressed. In order to form a functional film of an electronic device using this liquid material discharge device, it is possible to suppress the functional film from being impaired due to fluctuations in the thickness of the functional film caused by fluctuations in the discharge amount. In addition, an increase in the load on the control device can be suppressed and an electronic device can be efficiently manufactured.

  Application Example 22 An electronic device manufacturing method according to this application example forms a functional film constituting an electronic device using the liquid material ejection device according to the application example or the liquid material ejection method according to the application example. It is characterized by that.

  According to this method of manufacturing an electronic device, the discharge amount fluctuates during the formation of the predetermined pattern by making the temperature of the discharge means or the liquid at the time of the predetermined pattern formation substantially constant from the beginning of the formation of the predetermined pattern. A liquid discharge device capable of suppressing the increase in the load on the control device of the liquid discharge device at the time when the discharge means is performing the formation of the predetermined pattern. A liquid discharge method is used. As a result, it is possible to prevent the function of the functional film from being impaired due to fluctuations in the thickness of the functional film due to fluctuations in the discharge amount when manufacturing the functional film of the electronic device, and to control the function film. An electronic device can be efficiently manufactured while suppressing an increase in the load on the apparatus.

  Hereinafter, preferred embodiments of a liquid material discharge device, a liquid material discharge method, an electro-optical device manufacturing apparatus, an electro-optical device manufacturing method, an electronic device manufacturing apparatus, and an electronic device manufacturing method will be described with reference to the drawings. I will explain. In the embodiment, a color that forms a color filter on a substrate having a color filter that forms a liquid crystal display device that is an example of an electro-optical device using an ink jet type droplet discharge device that is an example of a liquid material discharge device A process for forming an element film (filter film) or the like will be described as an example. In the drawings referred to in the following description, the vertical and horizontal scales of members or portions may be shown differently from actual ones for convenience of illustration.

(First embodiment)
A droplet discharge device as a liquid material discharge device according to the present embodiment is incorporated in a liquid crystal device production line, and is an inkjet droplet discharge capable of discharging a functional liquid including a material constituting a color element film. A color element film or the like of a color filter is formed by arranging the functional liquid on a glass substrate or the like as a drawing target (workpiece) using a head.

<Droplet ejection method>
First, a droplet discharge method used for forming a functional film such as a filter film will be described. The droplet discharge method has an advantage that a material is less wasted and a desired amount of material can be accurately placed at a desired position. Examples of the discharge technique of the droplet discharge method include a charge control method, a pressure vibration method, an electromechanical conversion method, an electrothermal conversion method, and an electrostatic suction method.
Among them, the electromechanical conversion method utilizes the property that a piezoelectric element (piezoelectric element) deforms in response to a pulsed electric signal, and the piezoelectric element is deformed to be flexible in a space in which a liquid material is stored. Pressure is applied through a member formed of a material having a property, and a liquid material is pushed out from this space and discharged from a discharge nozzle. The piezo method has the advantages that the liquid material is not heated and foamed, so there is little effect on the composition of the material and the droplet size can be easily adjusted by adjusting the drive voltage. Have. In this embodiment, since the composition of the material is not affected, the degree of freedom in selecting the liquid material is high, and since the size of the droplet can be easily adjusted, the controllability of the droplet is good. The above piezo method is used.

<Droplet ejection device>
Next, the overall configuration of the droplet discharge device 1 will be described with reference to FIGS. 1 and 2. FIG. 1 is a plan view showing a schematic configuration of a droplet discharge device. FIG. 2 is a side view showing a schematic configuration of the droplet discharge device.

  As shown in FIG. 1 or FIG. 2, the droplet discharge device 1 includes a discharge unit 2 having a droplet discharge head 17 (see FIG. 3), a work unit 3, and a liquid supply unit 60 (see FIG. 7). And an inspection unit 4, a maintenance unit 5, and a discharge device controller 6 (see FIG. 7).

  The discharge unit 2 includes six droplet discharge heads 17 that discharge a functional liquid corresponding to a liquid as droplets. The droplet discharge head 17 is moved in the Y-axis direction and held at the moved position. A Y-axis table 12 is provided. The work unit 3 includes a work mounting table 21 on which a work W that is a discharge target of liquid droplets discharged from the liquid droplet discharge head 17 is mounted. The liquid supply unit 60 includes a storage tank (not shown) that stores the functional liquid, and supplies the functional liquid to the droplet discharge head 17. The inspection unit 4 includes a discharge inspection unit 18 and a weight measurement unit 19 for inspecting a discharge state from the droplet discharge head 17, and the weight measurement unit 19 is provided with a flushing unit 14. The maintenance unit 5 includes a suction unit 15 and a wiping unit 16 that maintain the droplet discharge head 17.

  The discharge device control unit 6 comprehensively controls these units and the like. For the weight measurement process, drawing process, discharge inspection process, and maintenance process performed using the weight measurement unit 19, the discharge unit 2, the discharge inspection unit 18, the maintenance unit 5, etc., the discharge device control unit 6 performs each unit. It is carried out by controlling the above.

  The droplet discharge device 1 includes an X-axis support base 1A supported on a stone surface plate, and each unit is disposed on the X-axis support base 1A. The X-axis table 11 extends in the X-axis direction as the main scanning direction, is disposed on the X-axis support base 1A, and moves the workpiece mounting table 21 in the X-axis direction (main scanning direction). .

The Y-axis table 12 of the discharge unit 2 is disposed on a pair of Y-axis support bases 7 and 7 spanned across the X-axis table 11 via a plurality of support columns 7A. Extending in the Y-axis direction. The discharge unit 2 includes a carriage unit 51 having six droplet discharge heads 17. The carriage unit 51 is suspended from the bridge plate 52. The bridge plate 52 is supported by the Y-axis table 12 via a Y-axis slider (not shown) so as to be slidable in the Y-axis direction. The Y-axis table 12 moves the bridge plate 52 (carriage unit 51) in the Y-axis direction (sub-scanning direction).
In synchronism with the driving of the X-axis table 11 and the Y-axis table 12, the droplet discharge head 17 of the discharge unit 2 is driven to discharge, thereby discharging the functional liquid droplets on the workpiece mounting table 21. An arbitrary drawing pattern is drawn with the functional liquid on the placed work W.

  The discharge inspection unit 18 includes an inspection drawing unit 161 and an imaging unit 162. The inspection drawing unit 161 is fixed to the X-axis second slider 23 and is configured to move integrally with the weight measuring unit 19 and the flushing unit 14 that are also fixed to the X-axis second slider 23. The imaging unit 162 includes two inspection cameras 163 and a camera moving mechanism 164 that slidably supports the inspection camera 163 in the Y-axis direction.

  The suction unit 15 and the wiping unit 16 included in the maintenance unit 5 are disposed on the gantry 8 disposed at a position where the carriage unit 51 can be moved by the Y-axis table 12 while being detached from the X-axis table 11. Yes. The suction unit 15 includes a cap unit 15a, seals the nozzle forming surface 76a (see FIG. 3) of the droplet discharge head 17, and sucks the discharge nozzle 78 (see FIG. 3) to thereby drop the droplet discharge head 17. The functional liquid is forcibly discharged from the discharge nozzle 78. The wiping unit 16 includes a wiping sheet 16a sprayed with a cleaning liquid, and wipes (performs wiping) the nozzle forming surface 76a of the droplet discharge head 17 after suction. In this way, the suction unit 15 and the wiping unit 16 perform maintenance work for maintaining or recovering the function of the droplet discharge head 17 of the discharge unit 2.

  The X-axis table 11 includes an X-axis first slider 22, an X-axis second slider 23, a pair of left and right X-axis linear motors 26 and 26, and a pair of X-axis common support bases 24 and 24. .

  A workpiece mounting table 21 is attached to the X-axis first slider 22. The X-axis first slider 22 is supported by an X-axis common support base 24 extending in the X-axis direction so as to be slidable in the X-axis direction. An inspection drawing unit 161, a weight measurement unit 19, and a flushing unit 14 are attached to the X-axis second slider 23. The X-axis second slider 23 is supported by an X-axis common support base 24 extending in the X-axis direction so as to be slidable in the X-axis direction. The X-axis linear motor 26 is arranged in parallel with the X-axis common support base 24, and moves the X-axis first slider 22 or the X-axis second slider 23 along the X-axis common support base 24. The placing table 21 (work W placed on the workpiece placing table 21) or the weight measuring unit 19 is moved in the X-axis direction. The X-axis first slider 22 and the X-axis second slider 23 can be individually driven by an X-axis linear motor 26. The X-axis direction corresponds to the main scanning direction, and the Y-axis direction corresponds to the sub-scanning direction.

  The work mounting table 21 includes a suction table 31 and a θ table 32. The suction table 31 holds and holds the work W placed thereon. The θ table 32 supports the suction table 31, and corrects the position of the workpiece W set on the suction table 31 in the θ direction around the Z axis perpendicular to the X axis direction and the Y axis direction, and the θ correction is completed. Maintain direction and hold. The θ table 32 has a θ drive motor 532 and is driven by the θ drive motor 532.

  The position of the workpiece mounting table 21 in FIG. 1 and FIG. 2 is a feeding / unloading material position for feeding and unloading the workpiece W, and when an unprocessed workpiece W is introduced (feeding) into the suction table 31 Or, when the processed workpiece W is collected (material removal), the suction table 31 is moved to this position. The workpiece W is carried in and out (replaced) with respect to the suction table 31 by a robot arm (not shown) at the supply / discharge material position. The alignment of the unprocessed workpiece W supplied to the suction table 31 is performed at the supply / discharge material position using the θ table 32 and the image recognition unit 80.

  The image recognition unit 80 has two alignment cameras 81 and a camera moving mechanism 82. The camera moving mechanism 82 is disposed on the X-axis support base 1 </ b> A so as to extend in the Y-axis direction and straddle the X-axis table 11. The alignment camera 81 is supported by a camera moving mechanism 82 via a camera holder (not shown) so as to be slidable in the Y-axis direction. The alignment camera 81 supported by the camera moving mechanism 82 faces the X-axis table 11 from above, and images each reference mark (alignment mark) of the work W placed on the work placing table 21 on the X-axis table 11. Can be recognized. The two alignment cameras 81 are independently moved in the Y-axis direction by a camera movement motor (not shown).

  Each alignment camera 81 cooperates with the movement of the work table 21 in the X-axis direction, and moves in the Y-axis direction by the camera moving mechanism 82 while the alignment marks of the various works W supplied by the robot arm described above. To recognize the position of various workpieces W. Based on the imaging result of the alignment camera 81, θ correction (alignment) of the workpiece W by the θ table 32 is performed.

  The Y-axis table 12 includes a pair of Y-axis sliders (not shown) and a pair of Y-axis linear motors (not shown). The pair of Y-axis linear motors are respectively installed on the pair of Y-axis support bases 7 and 7 and extend in the Y-axis direction. The pair of Y-axis sliders are slidably supported one by one on each of the pair of Y-axis support bases 7 and 7. The pair of Y-axis sliders, each composed of one Y-axis slider supported on each of the pair of Y-axis support bases 7, 7, has both bridge plates 52 to which the carriage unit 51 constituting the discharge unit 2 is fixed. I support it. The bridge plate 52 to which the carriage unit 51 constituting the discharge unit 2 is fixed is installed on the pair of Y-axis support bases 7 and 7 via a Y-axis slider that supports the bridge plate 52 with both ends.

  When the pair of Y-axis linear motors are driven (synchronously), each Y-axis slider translates in the Y-axis direction simultaneously with the pair of Y-axis support bases 7 and 7 as a guide. As a result, the bridge plate 52 moves in the Y-axis direction, and the carriage unit 51 suspended from the bridge plate 52 moves in the Y-axis direction.

  The carriage unit 51 includes a head unit 54 having six droplet discharge heads 17 and a carriage plate 53 (see FIG. 4) that supports the six droplet discharge heads 17 in two groups. 4). The head unit 54 is supported so as to be movable up and down in the Z-axis direction via a head lifting mechanism (not shown).

<Droplet ejection head>
Next, the droplet discharge head 17 will be described with reference to FIG. FIG. 3 is a diagram illustrating the configuration of the droplet discharge head. 3A is an external perspective view of the droplet discharge head as viewed from the nozzle plate side, and FIG. 3B is a perspective cross-sectional view showing the structure around the pressure chamber of the droplet discharge head. FIG. 3C is a cross-sectional view showing the structure of the discharge nozzle portion of the droplet discharge head. The droplet discharge head 17 corresponds to the discharge unit.

  As shown in FIG. 3A, the droplet discharge head 17 is a so-called double-unit, and includes a liquid introduction part 71 having two connection needles 72 and 72 and a side of the liquid introduction part 71. A head substrate 73 that is continuous, a pump portion 75 that is continuous with the liquid introduction portion 71, and a nozzle plate 76 that is continuous with the pump portion 75 are provided. A pipe connection member is connected to each connection needle 72 of the liquid introduction portion 71, a liquid supply tube is connected via the pipe connection member, and a functional liquid is supplied from the liquid supply unit 60 connected to the liquid supply tube. Is supplied. A pair of head connectors 77 and 77 are mounted on the head substrate 73, and a flexible flat cable (FFC cable) is connected via the head connector 77. The droplet discharge head 17 is connected to the discharge device control unit 6 via an FFC cable, and signals are exchanged via the FFC cable. The pump unit 75 and the nozzle plate 76 constitute a square head main body 74.

  A flange portion 79 is formed in a square flange shape on the base side of the pump unit 75, that is, the base side of the head main body 74 so as to receive the liquid introduction unit 71 and the head substrate 73. The flange portion 79 is formed with a pair of screw holes (female screws) 79 a for small screws for fixing the droplet discharge head 17. The droplet discharge head 17 is fixed to the head holding member by a head set screw that passes through the head holding member and is screwed into the screw hole 79a.

  On the nozzle forming surface 76a of the nozzle plate 76, two nozzle rows 78A are formed which are formed on the nozzle plate 76 and include discharge nozzles 78 for discharging droplets. The two nozzle rows 78A are arranged in parallel to each other, and each nozzle row 78A is configured by, for example, 180 (schematically illustrated) discharge nozzles 78 arranged at an equal pitch. . That is, two nozzle rows 78A are disposed on the nozzle forming surface 76a of the head body 74 with the center line therebetween.

  In a state where the droplet discharge head 17 is attached to the droplet discharge device 1, the nozzle row 78A extends in the Y-axis direction. The positions of the discharge nozzles 78 constituting the two nozzle rows 78A are shifted from each other by a half nozzle pitch in the Y-axis direction. One nozzle pitch is 140 μm, for example. At the same position in the X-axis direction, droplets discharged from the discharge nozzles 78 constituting each nozzle row 78A land on a straight line at equal intervals in the Y-axis direction by design. When the nozzle pitch of the discharge nozzles 78 in the nozzle row 78A is 140 μm, the center-to-center distance between the landing positions that are connected in a straight line is 70 μm by design.

As shown in FIGS. 3B and 3C, in the droplet discharge head 17, the pressure chamber plate 151 constituting the pump unit 75 is laminated on the nozzle plate 76, and the vibration plate 152 is disposed on the pressure chamber plate 151. Are stacked.
The pressure chamber plate 151 is formed with a liquid pool 155 that is always filled with the functional liquid supplied from the liquid introducing portion 71 via the liquid supply hole 153 of the vibration plate 152. The liquid pool 155 is a space surrounded by the diaphragm 152, the nozzle plate 76, and the wall of the pressure chamber plate 151. The pressure chamber plate 151 is formed with a pressure chamber 158 divided by a plurality of head partition walls 157. A space surrounded by the diaphragm 152, the nozzle plate 76, and the two head partition walls 157 is a pressure chamber 158.

  The pressure chambers 158 are provided corresponding to the discharge nozzles 78, and the number of pressure chambers 158 and the number of discharge nozzles 78 are the same. The functional fluid is supplied from the liquid pool 155 to the pressure chamber 158 via the supply port 156 located between the two head partition walls 157. A set of the head partition wall 157, the pressure chamber 158, the discharge nozzle 78, and the supply port 156 is arranged in a line along the liquid pool 155, and the discharge nozzles 78 arranged in a line form a nozzle line 78A. . Although not shown in FIG. 3B, the discharge nozzles 78 arranged in one line in the substantially symmetrical position with respect to the liquid pool 155 with respect to the nozzle line 78 </ b> A including the illustrated discharge nozzles 78 are another line of nozzles. A row 78A is formed, and a set of the corresponding head partition wall 157, pressure chamber 158, and supply port 156 is arranged in one row.

One end of the piezoelectric element 159 is fixed to the portion of the diaphragm 152 that constitutes the pressure chamber 158. The other end of the piezoelectric element 159 is fixed to a base (not shown) that supports the entire droplet discharge head 17 via a fixing plate 154 (see FIG. 9B).
The piezoelectric element 159 has an active portion in which an electrode layer and a piezoelectric material are stacked. By applying a driving voltage to the electrode layer, the active portion is arranged in the longitudinal direction (the diaphragm 152 in FIG. 3B or 3C). Shrink in the thickness direction). By contracting the active portion, the diaphragm 152 to which one end of the piezoelectric element 159 is fixed receives a force that is pulled to the side opposite to the pressure chamber 158. When the diaphragm 152 is pulled to the opposite side to the pressure chamber 158, the diaphragm 152 is bent to the opposite side of the pressure chamber 158. Thereby, since the volume of the pressure chamber 158 increases, the functional liquid is supplied from the liquid pool 155 to the pressure chamber 158 through the supply port 156. Next, when the driving voltage applied to the electrode layer is released, the active portion returns to the original length, and the piezoelectric element 159 presses the diaphragm 152. When the diaphragm 152 is pressed, it returns to the pressure chamber 158 side. As a result, the volume of the pressure chamber 158 suddenly returns to the original, that is, the increased volume is reduced, so that pressure is applied to the functional liquid filled in the pressure chamber 158, and the pressure chamber 158 communicates with the pressure chamber 158. The functional liquid is discharged as droplets from the discharge nozzle 78 formed in this manner. The liquid pool 155, the supply port 156, the pressure chamber 158, and the like through which the functional liquid flows correspond to the functional liquid flow path.

  The discharge device control unit 6 controls the discharge of the functional liquid to each of the plurality of discharge nozzles 78 by controlling the voltage applied to the piezoelectric element 159, that is, by controlling the drive signal. More specifically, the volume of droplets ejected from the ejection nozzle 78, the number of droplets ejected per unit time, and the like can be changed. This makes it possible to change the distance between the droplets that have landed on the substrate, the amount of the functional liquid to land on a certain area on the substrate, and the like. For example, by selectively using a discharge nozzle 78 that discharges droplets from among a plurality of discharge nozzles 78 arranged in the nozzle row 78A, the range of the length of the nozzle row 78A in the extending direction of the nozzle row 78A. In this case, a plurality of droplets can be discharged simultaneously at the pitch interval of the discharge nozzles 78. In a direction substantially orthogonal to the extending direction of the nozzle row 78A, the substrate and the discharge nozzle 78 are moved relative to each other, and the discharge nozzle 78 is located at an arbitrary position on the substrate where the discharge nozzle 78 can face in the relative movement direction. It is possible to arrange liquid droplets discharged from the liquid crystal. In addition, the volume of the droplet discharged from each of the discharge nozzles 78 is variable between 1 pl and 300 pl (picoliter), for example.

<Head unit>
Next, a schematic configuration of the head unit 54 provided in the discharge unit 2 will be described with reference to FIG. FIG. 4 is a plan view showing a schematic configuration of the head unit. The X axis and the Y axis shown in FIG. 4 coincide with the X axis and the Y axis shown in FIG. 1 when the head unit 54 is attached to the droplet discharge device 1.

  As shown in FIG. 4, the head unit 54 includes a carriage plate 53 and six droplet discharge heads 17 mounted on the carriage plate 53. The droplet discharge head 17 is fixed to the carriage plate 53 via a head holding member (not shown), and the head main body 74 is loosely fitted in a hole (not shown) formed in the carriage plate 53, so that the nozzle plate 76. The (head body 74) protrudes from the surface of the carriage plate 53. FIG. 4 is a view as seen from the nozzle plate 76 (nozzle forming surface 76a) side. The six droplet discharge heads 17 are divided in the Y-axis direction to form two groups of head groups 55 each having three droplet discharge heads 17. The nozzle row 78A of each droplet discharge head 17 extends in the Y-axis direction.

  The three droplet discharge heads 17 included in one head set 55 are more than the discharge nozzles 78 at the ends of one droplet discharge head 17 of the droplet discharge heads 17 adjacent to each other in the Y-axis direction. The discharge nozzle 78 at the end of one droplet discharge head 17 is positioned so as to be shifted by a half nozzle pitch. If the positions of all the discharge nozzles 78 in the X-axis direction in the three droplet discharge heads 17 included in the head set 55 are the same, the discharge nozzles 78 are arranged at equal intervals of a half nozzle pitch in the Y-axis direction. . In other words, at the same position in the X-axis direction, the droplets ejected from the ejection nozzles 78 constituting each nozzle row 78A included in each droplet ejection head 17 are arranged at equal intervals in the Y-axis direction by design. To land on a straight line. Since the droplet discharge heads 17 overlap each other in the Y-axis direction, the head set 55 is configured in a stepwise manner in the X-axis direction.

<Discharge inspection unit>
Next, the discharge inspection unit 18 will be described with reference to FIG. FIG. 5 is an external perspective view showing the overall configuration of the inspection drawing unit. As described with reference to FIGS. 1 and 2, the ejection inspection unit 18 includes an inspection drawing unit 161 and an imaging unit 162. The inspection drawing unit 161 is configured to move integrally with the weight measurement unit 19 and the flushing unit 14.

  The discharge inspection unit 18 is for inspecting whether or not the functional liquid is properly discharged from the all liquid droplet discharge heads 17 (discharge nozzles 78) constituting the discharge unit 2. The inspection drawing unit 161 has an all-droplet ejection head provided in the head unit 54 when the head unit 54 constituting the ejection unit 2 is in a position that can face the workpiece W placed on the workpiece platform 21 in the Y-axis direction. It is configured to receive the functional liquid that has been inspected and discharged from all 17 discharge nozzles 78. The imaging unit 162 images and inspects an inspection pattern (landing dot pattern) drawn on the inspection drawing unit 161. As described above, the inspection drawing unit 161 is mounted on the X-axis table 11. The imaging unit 162 is fixed to the Y-axis support base 7 immediately below the Y-axis table 12, and is fixedly provided at the inspection position in the X-axis direction. The two inspection cameras 163 included in the imaging unit 162 can move independently in the Y-axis direction.

  As shown in FIG. 5, the inspection drawing unit 161 includes an inspection sheet 171, an inspection stage 172, a sheet feeding unit 173, a sheet feeding support member 174, and a unit base 175. The inspection sheet 171 is a belt-like sheet for landing the functional liquid droplets inspected and discharged from the droplet discharge head 17. The inspection sheet 171 extends in the Y-axis direction shown in FIG. The inspection stage 172 extends in the Y-axis direction shown in FIG. 1 in the droplet discharge device 1, and the inspection sheet 171 is placed on the inspection stage 172. The sheet feeding means 173 moves the inspection sheet 171 so that the non-inspected part is fed to the inspection stage 172 and the inspected part of the inspection sheet 171 is sent out from above the inspection stage 172. The sheet feeding unit 173 is supported by the sheet feeding support member 174, and the sheet feeding support member 174 is supported by the unit base 175.

  As described with reference to FIG. 2, the imaging unit 162 includes the two inspection cameras 163 and the camera moving mechanism 164 that supports the inspection camera 163 slidably in the Y-axis direction. The inspection camera 163 recognizes the landing dots that have been inspected and discharged on the inspection sheet 171, and faces the X-axis table 11 from above, via a camera moving mechanism 164 fixed to the Y-axis support base 7. It is supported by a Y-axis support base 7 so as to be slidable in the Y-axis direction.

  The inspection drawing unit 161 can move to a position where the inspection sheet 171 faces the inspection camera 163 of the image pickup unit 162 when the suction table 31 moves to the supply / discharge material position. The imaging results obtained by the two inspection cameras 163 are transmitted to the ejection device control unit 6 for image recognition. Based on this image recognition, each ejection nozzle 78 of each droplet ejection head 17 normally ejects the functional liquid. It is determined whether or not there is no nozzle clogging. Further, it is determined whether or not the relative position of the landed droplet is a specified position.

<Weight measuring unit>
Next, the weight measuring unit 19 and the flushing unit 14 will be described with reference to FIG. FIG. 6 is a diagram of a weight measurement block including a weight measurement unit portion and a flushing unit portion. FIG. 6A is a plan view of the weight measurement block, and FIG. 6B is a side view of the weight measurement block. As described above, the discharge inspection block provided integrally with the weight measuring unit 19, the flushing unit 14, and the inspection drawing unit 161 is configured to move integrally.

  As shown in FIG. 6, the weight measurement block 91 </ b> A includes two weight measurement devices 91 and a support frame 92. The support frame 92 supports two weight measuring devices 91, and the weight measuring block 91 </ b> A is mounted on the X-axis second slider 23 by fixing the support frame 92 to the X-axis second slider 23. Yes. One weight measuring device 91 corresponds to one head set 55, and two weight measuring devices 91 in parallel correspond to one head unit 54.

  The weight measuring device 91 includes a regular flushing box 93, a liquid receiving container 94, an electronic balance 99 (hidden under the liquid receiving container 94 in FIG. 6A), a weight measuring flushing box 95, and a function. It has a liquid absorbent material 97, a presser plate 98, and a case 96 that accommodates these. The regular flushing box 93, the weight measurement flushing box 95, the functional liquid absorbent 97, and the presser plate 98 are included in the flushing unit 14. The liquid receiving container 94 and the electronic balance 99 are included in the weight measuring unit 19.

  The liquid receiving container 94 is a functional liquid discharged from the droplet discharge head 17 so as to face only one arbitrary droplet discharge head 17 among the three droplet discharge heads 17 constituting the head set 55. It is the size that can receive. The liquid receiving container 94 is placed on the electronic balance 99, and the electronic balance 99 measures the weight of the functional liquid landed in the liquid receiving container 94 by measuring the weight of the liquid receiving container 94. The weight of the liquid receiving container 94 increased by receiving the functional liquid discharged from the droplet discharge head 17 is the weight of the functional liquid discharged from the liquid droplet discharge head 17 and landed in the liquid receiving container 94.

  In the weight measurement flushing box 95, a weight measurement flushing box 95a and a weight measurement flushing box 95b are arranged with a liquid receiving container 94 interposed therebetween in the X-axis direction. When one of the three droplet discharge heads 17 constituting the head set 55 is in a position facing the liquid receiving container 94, the other two droplet discharges constituting the head set 55 are discharged. The head 17 is located at a position facing either the weight measurement flushing box 95a or the weight measurement flushing box 95b. When the droplet discharge head 17 subject to weight measurement faces the liquid receiving container 94 and performs discharge for weight measurement, the droplet discharge head 17 other than the measurement subject may be the flushing box 95a during weight measurement or the flushing during weight measurement. Faced with the box 95b, waste discharge is performed.

  Since the weight measurement is performed on the three droplet discharge heads 17 of the head set 55 by one weight measuring device 91, when the one droplet discharge head 17 performs the weight measurement discharge, the other two The liquid droplet ejection head 17 waits for the end of the weight measurement ejection, but the liquid droplet ejection head 17 in the “waiting” state can be discarded and ejected. Accordingly, the discharge nozzle 78 can be prevented from drying during the “waiting” state, and the weight measurement discharge performed after the “waiting” state can be performed well, and an appropriate measurement result can be obtained. .

The regular flushing box 93 receives the functional liquid discarded and discharged during the regular flushing.
In the weight measurement flushing box 95 and the regular flushing box 93, a functional liquid absorbent 97 is laid in a state where both long sides thereof are pressed by a pair of presser plates 98. The liquid receiving container 94 is formed in a size that can receive the functional liquid for each droplet discharge head 17 in units of nozzle rows.

  The electronic balance 99 measures the weight of the functional liquid discharged to the liquid receiving container 94 and outputs the measurement result to the discharge device control unit 6. The discharge device control unit 6 controls the drive power (voltage value) applied to the droplet discharge head 17 from the head driver 17d (see FIG. 7) based on the measurement result input from the electronic balance 99.

<Electrical configuration of droplet discharge device>
Next, an electrical configuration for driving the droplet discharge device 1 having the above-described configuration will be described with reference to FIG. FIG. 7 is an electrical configuration block diagram showing an electrical configuration of the droplet discharge device. The droplet discharge device 1 is controlled by inputting data or inputting a control command such as operation start or stop via the control device 65. The control device 65 includes a host computer 66 for performing arithmetic processing and an input / output device 68 for inputting / outputting information to / from the droplet discharge device 1, and controls the discharge device via an interface (I / F) 67. Connected to the unit 6. The input / output device 68 includes a keyboard capable of inputting information, an external input / output device that inputs / outputs information via a recording medium, a recording unit that stores information input via the external input / output device, a monitor device, and the like It is.

  The ejection device controller 6 of the droplet ejection device 1 includes an interface (I / F) 47, a CPU (Central Processing Unit) 44, a ROM (Read Only Memory) 45, a RAM (Random Access Memory) 46, And a hard disk 48. Further, the head driver 17d, the drive mechanism driver 40d, the liquid supply driver 60d, the maintenance driver 5d, the inspection driver 4d, and the detection unit interface (I / F) 43 are provided. These are electrically connected to each other via a data bus 49.

  The interface 47 exchanges data with the control device 65, and the CPU 44 performs various arithmetic processes based on commands from the control device 65, and outputs control signals that control the operation of each part of the droplet discharge device 1. . The RAM 46 temporarily stores control commands and print data received from the control device 65 in accordance with instructions from the CPU 44. The ROM 45 stores routines for the CPU 44 to perform various arithmetic processes. The hard disk 48 stores control commands and print data received from the control device 65, and stores routines for the CPU 44 to perform various arithmetic processes.

  A droplet discharge head 17 constituting the discharge unit 2 is connected to the head driver 17d. The head driver 17d drives the droplet discharge head 17 in accordance with a control signal from the CPU 44, and discharges droplets of the functional liquid. The drive mechanism driver 40d is connected to a head moving motor of the Y-axis table 12, an X-axis linear motor 26 of the X-axis table 11, and a drive mechanism 41 including various drive mechanisms having various drive sources. The various drive mechanisms are the above-described camera movement motor for moving the alignment camera 81, the θ drive motor 532 of the θ table 32, and the like. The drive mechanism driver 40d drives the motor or the like in accordance with a control signal from the CPU 44 to move the droplet discharge head 17 and the workpiece W relative to each other so that an arbitrary position of the workpiece W and the droplet discharge head 17 are opposed to each other. In cooperation with the head driver 17d, the droplet of the functional liquid is landed at an arbitrary position on the workpiece W.

  A suction unit 15 of the maintenance unit 5 and a wiping unit 16 are connected to the maintenance driver 5d. The maintenance driver 5d drives the suction unit 15 or the wiping unit 16 in accordance with a control signal from the CPU 44, and performs maintenance work on the droplet discharge head 17.

A discharge inspection unit 18 of the inspection unit 4 and a weight measurement unit 19 are connected to the inspection driver 4d. The inspection driver 4d drives the discharge inspection unit 18 or the weight measurement unit 19 in accordance with a control signal from the CPU 44, and inspects the discharge state of the droplet discharge head 17 such as discharge weight, discharge availability, and landing position accuracy. To implement.
The discharge weight in the present embodiment is the weight of one droplet of the functional liquid discharged from the droplet discharge head 17. The size (volume) of one droplet of the functional liquid discharged from the droplet discharge head 17 is expressed as a discharge amount. The discharge weight and the discharge amount are respective names when the same amount is expressed by weight or volume.

A liquid supply unit 60 is connected to the liquid supply driver 60d. The liquid supply driver 60 d drives the liquid supply unit 60 in accordance with a control signal from the CPU 44 and supplies the functional liquid to the droplet discharge head 17. The detection unit interface 43 is connected to a detection unit 42 including various sensors such as a head temperature sensor 142 that measures the temperature of the droplet discharge head 17. Detection information detected by each sensor of the detection unit 42 is transmitted to the CPU 44 via the detection unit interface 43.
Note that the temperature of the droplet discharge head 17 is a portion of the droplet discharge head 17, and the variation in temperature of the portion can be measured in association with the variation in the weight of the droplet discharged by the droplet discharge head 17. Use the temperature of the correct part. For example, any one of the temperature of the outer wall surface of the pump unit 75, the temperature of the nozzle plate 76, the temperature of the portion constituting the pressure chamber 158 of the diaphragm 152, and the like can be used. The head temperature sensor 142 is, for example, a contact-type temperature sensor, and is disposed at a position where any one of these temperatures can be measured by contacting any of these.

<Discharge of functional liquid>
Next, a discharge control method in the droplet discharge apparatus 1 will be described with reference to FIG. FIG. 8 is an explanatory diagram showing the electrical configuration of the droplet discharge head and the flow of signals.

As described above, the droplet discharge device 1 includes the CPU 44 that outputs a control signal that controls the operation of each unit of the droplet discharge device 1 and the head driver 17d that performs electrical drive control of the droplet discharge head 17. I have.
As shown in FIG. 8, the head driver 17d is electrically connected to each droplet discharge head 17 via an FFC cable. Further, the droplet discharge head 17 corresponds to the piezoelectric element 159 provided for each discharge nozzle 78 (see FIG. 3), a shift register (SL) 85, a latch circuit (LAT) 86, and a level shifter (LS). 87 and a switch (SW) 88.

  The ejection control in the droplet ejection apparatus 1 is performed as follows. First, the CPU 44 transmits to the head driver 17d dot pattern data obtained by converting the functional liquid arrangement pattern on the drawing object such as the workpiece W into data. Then, the head driver 17d decodes the dot pattern data to generate nozzle data that is ON / OFF (discharge / non-discharge) information for each discharge nozzle 78. The nozzle data is converted into a serial signal (SI) and transmitted to each shift register 85 in synchronization with the clock signal (CK).

  The nozzle data transmitted to the shift register 85 is latched at the timing when the latch signal (LAT) is input to the latch circuit 86, and further converted into a gate signal for the switch 88 by the level shifter 87. That is, when the nozzle data is “ON”, the switch 88 is opened and the drive signal (COM) is supplied to the piezoelectric element 159. When the nozzle data is “OFF”, the switch 88 is closed and the piezoelectric element 159 is closed. The drive signal (COM) is not supplied. Then, the functional liquid is discharged as droplets from the discharge nozzle 78 corresponding to “ON”, and the discharged droplets of the functional liquid land on the drawing object such as the workpiece W, and the drawing object The functional liquid is placed on the top.

<Drive waveform>
Next, the drive waveform of the drive signal applied to the piezoelectric element 159 and the ejection operation by the operation of the piezoelectric element 159 to which the drive signal of the drive waveform is applied will be described with reference to FIG. FIG. 9 is a diagram illustrating the basic waveform of the drive waveform and the operation of the piezoelectric element corresponding to the drive waveform. FIG. 9A is a diagram showing a basic waveform of the drive waveform of the drive signal applied to the piezoelectric element, and FIG. 9B is an ejection operation of the droplet ejection head by the operation of the piezoelectric element corresponding to the drive waveform. It is a schematic cross section which shows.

As shown in FIG. 9A, in the standby state before the drive signal is applied, a constant voltage is applied to the piezoelectric element 159 (A in FIG. 9A). This voltage is expressed as an intermediate potential. When drawing is performed, the voltage applied to the piezoelectric element 159 is raised to an intermediate potential before starting drawing, and then returned to the ground level after drawing is completed.
As shown in FIG. 9B, in the standby state in which the piezoelectric element 159 is maintained at an intermediate potential, the piezoelectric element 159 is slightly contracted and the diaphragm 152 is pulled toward the piezoelectric element 159, so that the diaphragm 152 is It is bent to the opposite side of the pressure chamber 158 (A in FIG. 9B).

  In the first step of the driving cycle, the voltage applied to the piezoelectric element 159 starts from an intermediate potential and is raised to a high potential (B in FIG. 9A). As the voltage applied to the piezoelectric element 159 increases, the piezoelectric element 159 further contracts, and the diaphragm 152 receives a force that is pulled to the opposite side of the pressure chamber 158. When the diaphragm 152 is pulled to the opposite side of the pressure chamber 158, the diaphragm 152 formed of a flexible material is bent to the opposite side of the pressure chamber 158. Thereby, since the volume of the pressure chamber 158 increases, the functional liquid is supplied from the liquid pool 155 through the supply port 156 to the pressure chamber 158 (B in FIG. 9B). This process is referred to as a pressurization liquid supply process. In the pressurizing liquid supply process, the piezoelectric element 159 is slowly displaced so that air does not enter the pressure chamber 158 from the discharge nozzle 78. The high potential voltage applied to the piezoelectric element 159 corresponds to the drive voltage applied to drive the droplet discharge head 17.

  After the boosting liquid supply step, the voltage applied to the piezoelectric element 159 is maintained at a high potential. This state is referred to as a standby state before discharge (C in FIG. 9A). Since the piezoelectric material constituting the piezoelectric element 159 is mechanically vibrated even when the voltage fluctuation disappears, the step of waiting until the mechanical vibration is subtracted is the standby state before discharge.

After maintaining the standby state before ejection for a time during which mechanical vibrations subside, the voltage applied to the piezoelectric element 159 is lowered at once (D in FIG. 9A). By reducing the voltage applied to the piezoelectric element 159 at once, the displacement of the piezoelectric element 159 becomes zero at a stroke, the pressure chamber 158 becomes narrow suddenly, and the functional liquid filled in the pressure chamber 158 is discharged. The ink is discharged from the nozzle 78 (D in FIG. 9B). This process is referred to as a step-down discharge process.
Since the amount of contraction of the piezoelectric element 159 varies depending on the high potential voltage value, the amount of increase in the volume of the pressure chamber 158 also varies. Therefore, by changing the voltage value of the high potential, it is possible to adjust the amount of the functional liquid that is filled and discharged in the pressure chamber 158, that is, the discharge amount from the droplet discharge head 17.

Following the step-down discharge process, the voltage applied to the piezoelectric element 159 is maintained at a low potential. This state is referred to as a post-discharge standby state (E in FIG. 9A). The step of maintaining the low potential state for a time during which the mechanical vibration of the piezoelectric element 159 is settled is a standby state after ejection.
After maintaining the standby state after ejection for a time during which the mechanical vibration of the piezoelectric element 159 is settled, the voltage applied to the piezoelectric element 159 is raised to the intermediate potential (F in FIG. 9A), and again enters the standby state (intermediate potential). To do.

<Configuration of LCD panel>
Next, a liquid crystal display panel which is an example of a liquid crystal device as an electro-optical device that forms a functional film using the droplet discharge device 1 will be described. The liquid crystal display panel 200 (see FIG. 10) is an example of a liquid crystal device, and is a liquid crystal display panel including a color filter for a liquid crystal display panel that is an example of a color filter.
First, the configuration of the liquid crystal display panel 200 will be described with reference to FIG. FIG. 10 is an exploded perspective view showing a schematic configuration of the liquid crystal display panel. A liquid crystal display panel 200 shown in FIG. 10 is an active matrix type liquid crystal device using a thin film transistor (TFT (Thin Film Transistor) element) as a drive element, and is a transmissive liquid crystal device using a backlight (not shown).

  As shown in FIG. 10, the liquid crystal display panel 200 includes an element substrate 210 having a TFT element 215, a counter substrate 220 having a counter electrode 207, and the element substrate 210 and the counter substrate 220 bonded by a sealing material (not shown). And a liquid crystal 230 (see FIG. 15K) filled in the gap. A polarizing plate 231 and a polarizing plate 232 are disposed on the element substrate 210 and the counter substrate 220 which are bonded to each other on the opposite sides of the surfaces bonded to each other.

  The element substrate 210 has a TFT element 215, a conductive pixel electrode 217, a scanning line 212, and a signal line 214 formed on a surface of the glass substrate 211 facing the counter substrate 220. An insulating layer 216 is formed so as to fill in between these elements and conductive films, and the scanning line 212 and the signal line 214 are formed so as to cross each other with the insulating layer 216 interposed therebetween. Yes. The scanning line 212 and the signal line 214 are insulated from each other with the insulating layer 216 interposed therebetween. A pixel electrode 217 is formed in a region surrounded by the scanning lines 212 and the signal lines 214. The pixel electrode 217 has a shape in which some corners of the rectangular shape are lacking in the rectangular shape. A TFT element 215 including a source electrode, a drain electrode, a semiconductor portion, and a gate electrode is incorporated in a portion surrounded by the cutout portion of the pixel electrode 217, the scanning line 212, and the signal line 214. By applying a signal to the scanning line 212 and the signal line 214, the TFT element 215 is turned on / off to control energization to the pixel electrode 217.

  An alignment film 218 is provided on the surface of the element substrate 210 in contact with the liquid crystal 230 so as to cover the entire region where the scanning lines 212, the signal lines 214, and the pixel electrodes 217 are formed.

  In the counter substrate 220, a color filter (hereinafter referred to as “CF”) layer 208 is formed on the surface of the glass substrate 201 facing the element substrate 210. The CF layer 208 includes a partition wall 204, a red filter film 205R, a green filter film 205G, and a blue filter film 205B. On the glass substrate 201, the black matrix 202 which comprises the partition 204 in a grid | lattice form is formed, and the bank 203 is formed on the black matrix 202. FIG. A square filter film region 225 is formed by a partition wall 204 composed of the black matrix 202 and the bank 203. In the filter film region 225, a red filter film 205R, a green filter film 205G, or a blue filter film 205B is formed. The red filter film 205 </ b> R, the green filter film 205 </ b> G, and the blue filter film 205 </ b> B are formed at positions and shapes that face the pixel electrodes 217, respectively.

  A planarizing film 206 is provided on the CF layer 208 (on the element substrate 210 side). On the planarizing film 206, a counter electrode 207 made of a transparent conductive material such as ITO is provided. By providing the planarization film 206, the surface on which the counter electrode 207 is formed is made substantially flat. The counter electrode 207 is a continuous film having a size covering the entire region where the pixel electrode 217 is formed. The counter electrode 207 is connected to a wiring formed on the element substrate 210 through a conduction portion (not shown).

  An alignment film 228 that covers the entire surface of the pixel electrode 217 is provided on the surface of the counter substrate 220 in contact with the liquid crystal 230. The liquid crystal 230 is a sealing material that bonds the alignment film 228 of the counter substrate 220, the alignment film 218 of the element substrate 210, and the counter substrate 220 and the element substrate 210 in a state where the element substrate 210 and the counter substrate 220 are bonded to each other. The space surrounded by is filled.

  Although the liquid crystal display panel 200 has a transmissive configuration, a reflective layer or a transflective liquid crystal device may be provided by providing a reflective layer or a transflective layer.

<Mother counter substrate>
Next, the mother counter substrate 201A will be described with reference to FIG. The counter substrate 220 is formed by forming the above-described CF layer 208 on the mother counter substrate 201A to be divided into the glass substrate 201, and then dividing the mother counter substrate 201A into individual counter substrates 220 (glass substrates 201). It is formed. FIG. 11A is a plan view schematically illustrating the planar structure of the counter substrate, and FIG. 11B is a plan view schematically illustrating the planar structure of the mother counter substrate. In the present embodiment, a substrate in which the CF layer 208 or the like is formed on the mother counter substrate 201A or a state in the middle of forming the CF layer 208 or the like is also referred to as a mother counter substrate 201A.

  The counter substrate 220 is formed using a glass substrate 201 made of transparent quartz glass having a thickness of approximately 1.0 mm. As shown in FIG. 11A, the counter substrate 220 has a CF layer 208 formed in a portion excluding a slight frame region around the glass substrate 201. The CF layer 208 is formed by forming a plurality of filter film regions 225 in the form of a dot pattern, in the present embodiment in the form of a dot matrix, on the surface of a rectangular glass substrate 201, and forming the filter film 205 in the filter film region 225. Is formed by. An alignment mark (not shown) is formed at a position that does not cover the region where the CF layer 208 is formed on the glass substrate 201. The alignment mark is used as a reference mark for positioning when the glass substrate 201 is attached to a manufacturing apparatus such as the droplet discharge device 1 in order to execute various processes for forming the CF layer 208 and the like.

  As shown in FIG. 11B, in the mother counter substrate 201A, the CF layer 208 of the counter substrate 220 is formed on each of the portions to be divided to become the glass substrate 201.

<Color filter>
Next, the arrangement of the filter layer 205 (the red filter film 205R, the green filter film 205G, and the blue filter film 205B) in the CF layer 208 and the CF layer 208 formed on the counter substrate 220 will be described with reference to FIG. To do. FIG. 12 is a schematic plan view showing an example of the arrangement of the filter films of the three-color filter.

  As shown in FIG. 12, the filter film 205 includes a plurality of, for example, rectangular filter film regions that are partitioned by partition walls 204 formed in a lattice pattern by a resin material that does not transmit light and are arranged in a dot matrix. It is formed by filling 225 with a color material. For example, a film-like filter that fills the filter film region 225 by filling the filter film region 225 with a functional liquid containing a color material constituting the filter film 205 and evaporating the solvent of the functional liquid to dry the functional liquid. A film 205 is formed.

  As an arrangement of the red filter film 205R, the green filter film 205G, and the blue filter film 205B in the three-color filter, for example, a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like are known. As shown in FIG. 12A, the stripe arrangement is an arrangement in which the matrix columns are all the same color red filter film 205R, green filter film 205G, or blue filter film 205B. As shown in FIG. 12B, the mosaic arrangement is an arrangement in which the color is shifted by one filter film 205 for each row in the horizontal direction. In the case of a three-color filter, an arbitrary arrangement arranged on vertical and horizontal straight lines is used. The three filter films 205 are arranged in three colors. In the delta arrangement, as shown in FIG. 12C, the arrangement of the filter films 205 is different, and in the case of a three-color filter, any three adjacent filter films 205 have different colors.

  In the three-color filter shown in FIGS. 12A, 12B, or 12C, each of the filter films 205 is any one of R (red), G (green), and B (blue). It is made of colored material. A set of filter films 205 each including a red filter film 205R, a green filter film 205G, and a blue filter film 205B that are formed adjacent to each other. A pixel filter 254 "). By selectively allowing light to pass through any one of or a combination of the red filter film 205R, the green filter film 205G, and the blue filter film 205B in one picture element filter 254, the amount of light that passes therethrough is further increased. Full color display is performed by adjusting.

<Formation of liquid crystal display panel>
Next, a process for forming the liquid crystal display panel 200 will be described with reference to FIGS. 13, 14, and 15. FIG. 13 is a flowchart showing a process of forming a liquid crystal display panel. 14 is a cross-sectional view showing a process of forming a filter film in the process of forming a liquid crystal display panel, and FIG. 15 is a cross-sectional view showing a process of forming an alignment film in the process of forming a liquid crystal display panel. is there. The liquid crystal display panel 200 is formed by bonding together an element substrate 210 and a counter substrate 220 that are separately formed.

The counter substrate 220 is formed by executing steps S1 to S5 shown in FIG.
In step S <b> 1, a partition wall for partitioning the filter film region 225 is formed on the glass substrate 201. The partition walls are formed by forming the black matrix 202 in a lattice shape, forming the bank 203 thereon, and disposing the partition walls 204 composed of the black matrix 202 and the bank 203 in the lattice shape. Thereby, as shown in FIG. 14A, a square filter film region 225 partitioned by the partition walls 204 is formed on the surface of the glass substrate 201.

  Next, in step S2 of FIG. 13, the red filter film 205R, the green filter film 205G, and the blue filter film 205B are formed, and the CF layer 208 is formed. The red filter film 205R, the green filter film 205G, and the blue filter film 205B fill the filter film region 225 with the functional liquid containing the material constituting the red filter film 205R, the green filter film 205G, or the blue filter film 205B, respectively. Then, the functional liquid is formed by drying.

  More specifically, as shown in FIG. 14B, the red discharge head 17R is opposed to the surface of the glass substrate 201 on which the filter film region 225 partitioned by the partition 204 is formed. The red functional liquid 252R is disposed in the filter film region 225R by discharging the red functional liquid 252R from the discharge nozzle 78 of the red discharge head 17R toward the filter film region 225R where the red filter film 205R is to be formed. . At the same time, the red functional liquid 252R is disposed in all the filter film regions 225R formed on the glass substrate 201 by moving the red discharge head 17R relative to the glass substrate 201 as indicated by the arrow a. By drying the arranged red functional liquid 252R, a red filter film 205R is formed in the filter film region 225R as shown in FIG. 14C.

  Similarly, in the filter film region 225G or the filter film region 225B where the green filter film 205G or the blue filter film 205B shown in FIG. 14B is to be formed, as shown in FIG. 252G or blue functional liquid 252B is disposed. By drying the green functional liquid 252G and the blue functional liquid 252B, the green filter film 205G or the blue filter film 205B is formed in the filter film region 225G and the filter film region 225B as shown in FIG. Together with the red filter film 205R, a three-color filter composed of a red filter film 205R, a green filter film 205G, and a blue filter film 205B is formed.

Next, in step S3 of FIG. 13, a planarizing layer is formed. As shown in FIG. 14E, a planarizing film 206 as a planarizing layer is formed on the red filter film 205R, the green filter film 205G, the blue filter film 205B, and the partition wall 204 that constitute the CF layer 208. . The planarizing film 206 is formed in a region that covers at least the entire surface of the CF layer 208. By providing the planarization film 206, the surface on which the counter electrode 207 is formed is made substantially flat.
Next, in step S4 of FIG. 13, the counter electrode 207 is formed. As shown in FIG. 14F, a thin film is formed using a transparent conductive material on the planarizing film 206 and covering at least the entire area of the area where the filter film 205 of the CF layer 208 is formed. . This thin film is the counter electrode 207 described above.

Next, in step S <b> 5 of FIG. 13, the alignment film 228 of the counter substrate 220 is formed on the counter electrode 207. The alignment film 228 is formed in a region covering at least the entire surface of the CF layer 208.
As shown in FIG. 15G, the liquid droplet ejection head 17 is opposed to the surface of the glass substrate 201 on which the counter electrode 207 is formed, and the alignment film liquid is directed from the liquid droplet ejection head 17 toward the surface of the glass substrate 201. 242 is discharged. At the same time, by moving the droplet discharge head 17 relative to the glass substrate 201 as indicated by the arrow a, the alignment film liquid 242 is disposed on the entire surface of the glass substrate 201 where the alignment film 228 is to be formed. By drying the alignment film liquid 242 disposed, an alignment film 228 is formed as shown in FIG. Step S5 is performed, and the counter substrate 220 is formed.

The element substrate 210 is formed by executing steps S6 to S8 shown in FIG.
In step S6, a conductive layer, an insulating layer, or a semiconductor layer is formed over the glass substrate 211, thereby forming an element such as the TFT element 215, the scanning line 212, the signal line 214, the insulating layer 216, or the like. The scanning line 212 and the signal line 214 are formed at a position facing the partition wall 204, that is, a position around the pixel, in a state where the element substrate 210 and the counter substrate 220 are bonded to each other. The TFT element 215 is formed so as to be positioned at the end of the pixel, and at least one TFT element 215 is formed in one pixel.

  Next, in step S7, the pixel electrode 217 is formed. The pixel electrode 217 is formed at a position facing the red filter film 205R, the green filter film 205G, or the blue filter film 205B in a state where the element substrate 210 and the counter substrate 220 are bonded to each other. The pixel electrode 217 is electrically connected to the drain electrode of the TFT element 215.

Next, in step S8, an alignment film 218 of the element substrate 210 is formed on the pixel electrode 217 or the like. The alignment film 218 is formed in a region covering the entire surface of at least all the pixel electrodes 217.
As shown in FIG. 15 (i), the droplet discharge head 17 is opposed to the surface of the glass substrate 211 on which the pixel electrode 217 is formed, and the alignment film liquid is directed from the droplet discharge head 17 toward the surface of the glass substrate 211. 242 is discharged. At the same time, the liquid droplet ejection head 17 is moved relative to the glass substrate 211 as indicated by an arrow a, thereby arranging the alignment film liquid 242 on the entire surface of the glass substrate 211 where the alignment film 218 is to be formed. By drying the alignment film liquid 242 disposed, an alignment film 218 is formed as shown in FIG. Step S8 is performed, and the element substrate 210 is formed.

  Next, in step S9 of FIG. 13, the counter substrate 220 and the element substrate 210 formed are bonded together, and the liquid crystal 230 is filled therebetween as shown in FIG. Further, the liquid crystal display panel 200 is assembled by attaching the polarizing plate 231 and the polarizing plate 232 or the like. When a plurality of counter substrates 220 and element substrates 210 are formed on a mother substrate composed of a plurality of glass substrates 201 and glass substrates 211, the mother substrate on which the plurality of liquid crystal display panels 200 are formed is used as the individual liquid crystal display panel 200. Divide into Alternatively, step S9 is performed after the step of dividing the mother counter substrate 201A and the mother element substrate into the counter substrate 220 and the element substrate 210 is performed. Step S9 is performed and the process of forming the liquid crystal display panel 200 is completed.

<Configuration of wiring board>
Next, a wiring board on which metal wiring is formed will be described with reference to FIG. 16 as an example of an object on which functional liquid is arranged by using the droplet discharge device 1 to form a functional film. FIG. 16 is a schematic plan view showing a mother board of a wiring board.
As shown in FIG. 16, the wiring board 270 is a circuit board on which a semiconductor device (IC) is mounted in a plane, and an input as wiring made of a conductive material arranged corresponding to the input / output electrodes (bumps) of the IC. The wiring 271 and the output wiring 273 and the insulating film 277 are included. The insulating film 277 is formed inside the outer shape 276 indicated by the two-dot chain line and in a portion other than the mounting region 275 indicated by the two-dot chain line, and avoids the input terminal portion 272 and the output terminal portion 274, The plurality of input wirings 271 and output wirings 273 are covered so that a part of each of the input wiring 271 and the output wiring 273 is exposed inside the mounting region 275. In the wiring board 270, a plurality of wiring boards 270 are formed in a matrix on the mother board 270A. By dividing the mother board 270A, individual wiring boards 270 are removed. As the mother substrate 270A, a rigid glass substrate, a ceramic substrate, a glass epoxy resin substrate, or a flexible resin substrate can be used as an insulating substrate. As a dividing method, scribing, dicing, laser cutting, pressing, or the like can be selected according to the material of the mother substrate 270A.

  In the present embodiment, the input wiring 271 and the output wiring 273 made of a conductive material and the insulating film 277 made of an insulating material are formed by a droplet discharging method using the droplet discharging device 1 described above. By using the droplet discharge method, it is possible to form a wiring or an insulating film without wasting each material. Further, since steps such as an exposure mask for forming a pattern, development, and etching are not required as compared with the photolithography method, the steps can be simplified regardless of the size of the mother substrate 270A.

  Examples of the conductive material included in the functional liquid discharged from the droplet discharge device 1 include, in addition to metal fine particles containing at least one of gold, silver, copper, aluminum, palladium, and nickel. Oxides and fine particles of conductive polymers and superconductors are used. These conductive fine particles can be used by coating the surface with an organic substance or the like in order to improve dispersibility. The particle diameter of the conductive fine particles is preferably 1 nm or more and 1.0 μm or less. If it is larger than 1.0 μm, the discharge nozzle 78 of the droplet discharge head 17 may be clogged. On the other hand, if the thickness is smaller than 1 nm, the volume ratio of the coating agent to the conductive fine particles becomes large, and the ratio of organic substances in the obtained film becomes excessive.

  The dispersion medium is not particularly limited as long as it can disperse the conductive fine particles and does not cause aggregation. For example, in addition to water, alcohols such as methanol, ethanol, propanol, butanol, n-heptane, n-octane, decane, dodecane, tetradecane, toluene, xylene, cymene, durene, indene, dipentene, tetrahydronaphthalene, decahydro Hydrocarbon compounds such as naphthalene and cyclohexylbenzene, ethylene glycol dimethyl ether, ethylene glycol diethyl ether, ethylene glycol methyl ethyl ether, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, diethylene glycol methyl ethyl ether, 1,2-dimethoxyethane, bis (2- Methoxyethyl) ether, ether compounds such as p-dioxane, propylene carbonate, γ- Butyrolactone, N- methyl-2-pyrrolidone, dimethylformamide, dimethyl sulfoxide, can be exemplified polar compounds such as cyclohexanone. Of these, water, alcohols, hydrocarbon compounds, and ether compounds are preferable and more preferable dispersion media in terms of fine particle dispersibility, dispersion stability, and ease of application to the droplet discharge method. Examples thereof include water and hydrocarbon compounds.

  The surface tension of the conductive fine particle dispersion (functional liquid) is preferably in the range of 0.02 N / m to 0.07 N / m. When the functional liquid is discharged by the droplet discharge method, if the surface tension is less than 0.02 N / m, the wettability of the functional liquid with respect to the nozzle forming surface 76a increases, and thus flight bending easily occurs, and 0.07 N / m If it exceeds m, the shape of the meniscus at the tip of the discharge nozzle 78 is not stable, and it becomes difficult to control the discharge amount and the discharge timing. In order to adjust the surface tension, it is preferable to add a small amount of a surface tension regulator such as a fluorine-based, silicone-based, or nonionic-based material to the dispersion so long as the contact angle with the mother substrate 270A is not greatly reduced. The nonionic surface tension modifier improves the wettability of the functional liquid to the mother substrate 270A, improves the leveling property of the film, and helps prevent the occurrence of fine irregularities on the film. The surface tension adjusting agent may contain an organic compound such as alcohol, ether, ester, or ketone, if necessary.

  The viscosity of the dispersion is preferably 1 mPa · s or more and 50 mPa · s or less. When the functional liquid is ejected as droplets using the droplet ejection method, if the viscosity is less than 1 mPa · s, the periphery of the ejection nozzle 78 is easily contaminated by the outflow of the functional liquid, and the viscosity is greater than 50 mPa · s. In this case, the clogging frequency in the nozzle hole of the discharge nozzle 78 increases, and it becomes difficult to smoothly discharge the droplets. Since the viscosity of the dispersion varies as the temperature of the dispersion changes, it is preferable that the temperature of the dispersion is kept substantially constant.

<Functional liquid arrangement>
Next, a process for ejecting the functional liquid from the liquid droplet ejection head 17 included in the liquid droplet ejection apparatus 1 and disposing the functional liquid on the filter film region 225 of the CF layer 208 in the mother counter substrate 201A will be described with reference to FIG. Will be described with reference to FIG. FIG. 17 is a flowchart showing a process of arranging the functional liquid.

In step S21 of FIG. 17, the drawing saturation temperature obtained in advance is acquired. The saturation temperature during drawing is driven by the droplet discharge head 17 when drawing discharge is performed in which the functional liquid is discharged from the droplet discharge head 17 of the droplet discharge apparatus 1 toward the mother counter substrate 201A or the like. As a result, the temperature of the droplet discharge head 17 is changed, and the temperature is in a substantially constant state by continuing driving.
As described above, the temperature of the droplet discharge head 17 is a portion of the droplet discharge head 17, and the variation in the temperature of the portion is related to the variation in the weight of the droplet discharged by the droplet discharge head 17. Use the temperature of the measurable part. For example, any one of the temperature of the outer wall surface of the pump unit 75, the temperature of the nozzle plate 76, the temperature of the portion constituting the pressure chamber 158 of the diaphragm 152, and the like can be used.
The temperature of the outer wall surface of the pump unit 75 and the part constituting the pressure chamber 158 of the diaphragm 152 can be measured by disposing the head temperature sensor 142 in the part. The temperature of the portion constituting the pressure chamber 158 of the diaphragm 152 can also be measured by using the piezoelectric material constituting the piezoelectric element 159 as a temperature sensor. The temperature of the outer wall surface of the pump unit 75 and the temperature of the nozzle plate 76 can also be measured from a remote position using a non-contact infrared temperature sensor.
The drawing saturation temperature is input from, for example, the input / output device 68 of the control device 65 and stored in the RAM 46 or the hard disk 48 of the discharge device control unit 6. The input / output device 68 of the control device 65 in this case corresponds to the temperature acquisition means.

  Next, in step S22, warm-up driving is performed. The driving conditions for warm-up driving are calculated and input in advance for each temperature corresponding to the drawing saturation temperature to be reached, and are stored in the RAM 46 or the hard disk 48 of the ejection device controller 6. Is used. The discharge device control unit 6 performs the warm-up drive by driving the droplet discharge head 17 under the driving conditions. The discharge device control unit 6 corresponds to a temperature adjusting unit.

Next, in step S23, drawing discharge is performed to discharge the functional liquid from the droplet discharge head 17 adjusted to the saturation temperature during drawing toward the filter film region 225 and the like. By performing the warm-up drive in step S22, the temperature of the droplet discharge head 17 at the time when drawing discharge is started is adjusted to the saturation temperature during drawing. For this reason, there is almost no fluctuation in the temperature of the droplet discharge head 17 during the drawing discharge, so that there is almost no change in the discharge amount due to the fluctuation in the temperature of the droplet discharge head 17 during drawing. An appropriate amount of functional liquid can be stably discharged from the start to the end of drawing discharge. When adjusting the temperature of the droplet discharge head 17 to the saturation temperature during drawing, the saturation temperature may be different for each droplet discharge head depending on the position of the droplet discharge head, individual differences of the droplet discharge heads, and the like. The temperature is preferably adjusted by each droplet discharge head. Drawing drawing discharge of step S23 is implemented and the process of arrange | positioning a functional liquid is complete | finished.
Note that when the processing object such as the mother counter substrate 201A for which drawing discharge has been completed is replaced with a new processing object, the droplet discharge head 17 is in a resting state, and the liquid used when drawing discharge is being performed. There is a possibility that the temperature of the droplet discharge head 17 is not maintained. Therefore, when the droplet discharge head 17 is stopped during drawing discharge, such as during the replacement of the workpiece, the droplet discharge head 17 is warmed to suppress the change in head temperature. It is preferable to implement machine drive.

<Setting drive conditions for warm-up drive>
Next, a method for setting a driving condition for warm-up driving in the droplet discharge head 17 will be described with reference to FIG. FIG. 18A is a graph showing the relationship between the discharge weight (discharge amount) and the head temperature, and FIG. 18B is a graph showing the relationship between the drawing discharge time and the head temperature. FIG. 18C is a graph showing the relationship between the time during which warm-up driving and drawing discharge are performed and the head temperature, and FIG. 18D shows a method for estimating the warm-up drive voltage. It is a graph.

  As shown in FIG. 18A, the discharge amount of the droplet discharge head 17 depends on the head temperature of the droplet discharge head 17. As described above, the head temperature of the droplet discharge head 17 is a portion of the droplet discharge head 17, and a change in the temperature of the portion corresponds to a change in the weight of the droplet discharged from the droplet discharge head 17. A temperature at a portion that can be measured in association with each other and has a relationship as shown in FIG. 18A is used.

  As shown in FIG. 18B, the temperature of the droplet discharge head 17 that performs drawing discharge rises with the drawing discharge execution time, reaches the saturation temperature HM ° C. during drawing, and becomes substantially stable.

As shown in FIG. 18C, when drawing discharge is started at time S without performing warm-up driving, the temperature of the droplet discharge head 17 performing drawing discharge is as shown in FIG. As in the case shown, after the drawing discharge for a certain time, the drawing temperature becomes substantially the saturation temperature HM ° C. and becomes substantially stable.
When warm-up driving is performed with a driving voltage a that is a driving voltage a% of the designed driving voltage that can obtain an appropriate discharge amount, the head temperature converges to Ha ° C., and the head temperature at time S becomes Ha ° C. . When drawing discharge is started at a head temperature of Ha ° C., the head temperature rises with a temperature rise curve denoted as a0 in FIG. 18C, and is substantially stabilized at the saturation temperature HM ° C. during drawing. The slope of the curve a0 at the time S is denoted as the slope a1.
When warm-up driving is performed with the driving voltage b that is a driving voltage b% of the designed driving voltage that can obtain an appropriate discharge amount, the head temperature converges to Hb ° C., and the head temperature at time S becomes Hb ° C. . When the drawing discharge is started at the head temperature of Hb ° C., the head temperature is lowered by a temperature drop curve denoted as b0 in FIG. 18C, and is substantially stabilized at the saturation temperature HM ° C. during drawing. The slope of the curve b0 at the time S is denoted as the slope b1.

As shown in FIG. 18 (d), the vertical axis is inclined, the horizontal axis is the warm-up drive voltage, and the straight line passing through the points (a, a1) and (b, b1) intersects the horizontal axis. A value M of the warm-up drive voltage when the inclination becomes 0 is obtained.
As shown in FIG. 18C, when the warm-up driving is performed with the driving voltage M that is a driving voltage M% of the designed driving voltage that can obtain an appropriate discharge amount, the head temperature converges to HM ° C. The head temperature at time S is estimated to be the saturation temperature HM ° C. during drawing. When drawing discharge is started at the head temperature of the drawing saturation temperature HM ° C., the temperature of the droplet discharge head 17 hardly changes during drawing discharge. Is almost stable.
When warming-up driving is performed at the driving voltage M and the temperature of the droplet discharge head 17 that is reached is different from the drawing saturation temperature HM ° C., the warming-up driving voltage is finely adjusted from M. Then, warm-up driving is performed again using the drive voltage, and an appropriate warm-up drive voltage for obtaining the drawing saturation temperature HM ° C. is obtained.

According to the first embodiment, the following effects can be obtained.
(1) Prior to drawing discharge, warm-up driving is performed, and the liquid during the drawing discharge is adjusted by adjusting the temperature of the droplet discharge head 17 at the time of starting drawing discharge to the saturation temperature during drawing. Variations in the temperature of the droplet discharge head 17 can be suppressed. Thereby, the fluctuation | variation of the discharge amount resulting from the fluctuation | variation of the temperature of the droplet discharge head 17 at the time of implementing drawing discharge can be suppressed.

  (2) Warm-up driving is performed at the driving voltage a or the driving voltage b, and the head temperature is set to the drawing-in-saturation temperature HM ° C. by the warm-up driving from the slope of the head temperature rising or falling curve at the start of drawing discharge Estimated drive voltage. As a result, it is possible to reduce the time for obtaining the drive voltage compared to the case of obtaining the drive voltage for the warm-up drive by actually performing the drawing discharge. It is also possible to suppress consumption of the functional liquid and the workpiece to be consumed for obtaining the drive voltage.

  (3) The warm-up drive is performed at a drive voltage that can bring the head temperature to the saturation temperature HM ° C. during drawing by performing the warm-up drive. For this reason, when warm-up driving is performed, the temperature of the head of the droplet discharge head 17 changes at least in a direction approaching the saturation temperature HM ° C. during drawing. Therefore, the possibility that the head temperature is excessively changed depending on the length of time during which the warm-up driving is performed can be extremely reduced.

(Second embodiment)
Next, a liquid material ejection device, a liquid material ejection method, an electro-optical device manufacturing apparatus, an electro-optical device manufacturing method, an electronic device manufacturing apparatus, and an electronic device manufacturing method according to a second embodiment will be described. The liquid droplet ejection device as the liquid material ejection device according to the present embodiment is incorporated in a liquid crystal device production line, as in the first embodiment. This droplet discharge device uses an ink jet type droplet discharge head capable of discharging a functional liquid including a material constituting a color element film and the like on a glass substrate or the like as a drawing target (workpiece). By disposing the functional liquid, a functional film such as a color element film of the color filter is formed.
The droplet discharge device 301 (see FIG. 20) of this embodiment has the same basic configuration and function as the droplet discharge device 1 of the first embodiment. A configuration of the droplet discharge device 301 different from the droplet discharge device 1 and a drawing process for forming the filter film 205 using the droplet discharge device 301 will be described.

<Installation of droplet discharge head and temperature adjustment unit>
First, the mounting structure of the droplet discharge head 17 to the carriage plate 53 and the mounting structure of the temperature adjustment unit 110 in the head unit 354 of the discharge unit 302 (see FIG. 20) will be described with reference to FIG. . FIG. 19 is a view showing a structure for attaching the droplet discharge head and the temperature adjustment unit to the carriage plate. FIG. 19A is a plan view of the droplet discharge head and the temperature adjustment unit attached to the carriage plate as viewed from the nozzle plate side, and FIG. 19B is indicated by AA in FIG. FIG. FIG. 19C is a side view of the droplet discharge head and the temperature adjustment unit attached to the carriage plate, and FIG. 19D is a side view of the temperature adjustment unit attached to the carriage plate. 19 (e) is a plan view of the terminal board of the temperature adjustment unit.

As shown in FIGS. 19A, 19B, and 19C, the droplet discharge head 17 is attached to the carriage plate 53 via the main head holding member 102 and the sub head holding member 103. . The main head holding member 102 and the sub head holding member 103 are used to position the droplet discharge head 17 with respect to the carriage plate 53 with high accuracy and to be easily attached to and detached from the carriage plate 53.
A head opening 53a is formed in the carriage plate 53, and the main head holding member 102 is fixed to the carriage plate 53 so as to substantially cover the head opening 53a. The main head holding member 102 is fixed to the carriage plate 53 by three holding member screws 108 that pass through holes formed in the main head holding member 102 and screw into screw holes formed in the carriage plate 53. Yes. Hereinafter, the side on which the main head holding member 102 is set is referred to as “back side”, and the opposite side is referred to as “front side”.

  A flange opening 102a is formed in the main head holding member 102, and the sub head holding member 103 is fixed to the back side of the main head holding member 102 so as to straddle the flange opening 102a at both ends in the long side direction. Has been. The sub head holding member 103 is inserted into the main head holding member 102 by two holding member screws 108 that pass through holes formed in the sub head holding member 103 and are screwed into screw holes formed in the main head holding member 102. It is fixed to.

  The sub head holding member 103 is made of stainless steel or the like, and is formed in a substantially rectangular flat plate shape. The sub head holding member 103 is formed with a square head main body opening 103 d through which the head main body 74 of the droplet discharge head 17 is inserted. As described above, the sub head holding member 103 is set on the back side of the main head holding member 102 so as to straddle the flange opening 102a. On the other hand, the droplet discharge head 17 inserts the head main body 74 into the head main body opening 103 d so that the head main body 74 protrudes to the back side of the sub head holding member 103, so that the front side of the main head holding member 102 It is set from. The droplet discharge head 17 passes through a hole formed in the sub head holding member 103 and is screwed into two screw holes 79a (see FIG. 3) formed in the flange portion 79 (see FIG. 3). It is fixed to the sub head holding member 103 by a screw 107.

  Around the head main body opening 103d of the sub head holding member 103, there are two through holes corresponding to the screw holes 79a, and the first adjustment hole 103a and the second adjustment hole 103b on the center line of the head main body opening 103d. Is formed. The first adjustment hole 103a and the second adjustment hole 103b are portions where the position correction adjustment pins are engaged.

Further, on the center line of the head main body opening 103d, adhesive holes 103c are formed at substantially symmetrical positions with respect to the head main body opening 103d on the opposite side of the first main adjustment hole 103a or the second adjustment hole 103b from the head main body opening 103d. Has been. Each adhesive hole 103 c is a long hole extending in the transverse direction of the sub head holding member 103. An adhesive is injected into the adhesive hole 103c, and the sub head holding member 103 is bonded and fixed to the main head holding member 102 with the adhesive (not shown).
Two temperature adjustment units 110 are attached to one droplet discharge head 17. The temperature adjustment unit 110 is fixed along the outer surface extending in the extending direction of the nozzle row 78 </ b> A (see FIG. 3) of the droplet discharge head 17 in the head main body 74.

As shown in FIG. 19D, the temperature adjustment unit 110 includes a temperature adjustment element 111 and a terminal board 112. The terminal substrate 112 is formed by laminating a base film 116, a heat transfer pattern 114, and a cover film 117 with the heat transfer pattern 114 interposed therebetween. The base film 116 and the cover film 117 are made of a highly flexible material such as polyimide. The heat transfer pattern 114 is made of a material having high thermal conductivity such as copper, and is formed in a foil-like or thin-plate shape that can be bent and deformed.
The exposed portion of the heat transfer pattern 114 that is not covered with the cover film 117 is bonded to the outer wall of the head main body 74 of the droplet discharge head 17 using an adhesive formed of a material having high thermal conductivity. . A temperature adjustment element 111 is fixed to the heat transfer pattern 114 exposed at the opening 116 a shown in FIG. 19E in the base film 116. The temperature adjustment element 111 is electrically connected to the discharge device control unit 306 (see FIG. 20) by a flexible flat cable (FFC cable) (not shown). The temperature of the temperature adjustment element 111 is controlled by sending a control signal from the discharge device control unit 306 to the temperature adjustment element 111 via the FFC cable.
Thermal energy is applied from the temperature adjustment element 111 to the outer wall of the head main body 74 of the droplet discharge head 17 to which the heat transfer pattern 114 is bonded via the heat transfer pattern 114 of the terminal substrate 112 fixed to the temperature adjustment element 111. Conducted or heat energy is taken away from the droplet discharge head 17. As a result, the temperature of the droplet discharge head 17 is adjusted. As described with reference to FIG. 3, the pressure chamber 158 is formed inside the outer wall of the head main body 74, and the pressure of the pressure chamber 158 and the nozzle plate 76 is adjusted by adjusting the temperature of the outer wall. The temperature of the portion facing the chamber 158 and the functional liquid in the pressure chamber 158 is adjusted. As the temperature adjustment element 111, for example, a Peltier element is used. The Peltier element functions as a heating element or a cooling element only by changing the polarity of the applied voltage.

As shown in FIG. 19 (e), the heat transfer pattern 114 has a heat transfer base 114a and a terminal portion 114b. A plurality of adjustment holes 115 are formed at a boundary portion between the heat transfer base portion 114a and the terminal portion 114b.
One side of the heat transfer base 114 a is covered with the cover film 117, and the other side of the heat transfer base 114 a is covered with the base film 116, and the opening 116 a portion of the base film 116 is exposed. The temperature adjustment element 111 is connected to the exposed portion of the heat transfer base 114a so as to be able to conduct heat.

One side of the terminal portion 114b is covered with the base film 116 together with the heat transfer base portion 114a. On the other side, the cover film 117 covers from the heat transfer base part 114a to the middle part of the adjustment hole 115, and the terminal part 114b is exposed. The exposed terminal portion 114b is connected to the outer wall of the head body 74 so as to be able to conduct heat.
By changing the width of the adjustment hole 115 in each of the plurality of adjustment holes 115 formed at the boundary portion between the heat transfer base portion 114a and the terminal portion 114b, the width of the boundary portion between the heat transfer base portion 114a and the terminal portion 114b. , And the arrangement of the portion connecting the heat transfer base portion 114a and the terminal portion 114b can be adjusted. By adjusting the arrangement of the portion that connects the heat transfer base portion 114a and the terminal portion 114b, the amount of heat transferred per unit time can be made different in the arrangement direction of the discharge nozzles in the nozzle row.

<Electrical configuration of droplet discharge device>
Next, an electrical configuration for driving the droplet discharge device 301 having the above-described configuration will be described with reference to FIG. FIG. 20 is an electrical configuration block diagram showing an electrical configuration of the droplet discharge device. Similar to the droplet discharge device 1 in the first embodiment, the droplet discharge device 301 is controlled by inputting data and control commands such as operation start and stop via the control device 65. The

The discharge device control unit 306 of the droplet discharge device 301 includes a temperature control element driver 111d, and the rest has basically the same configuration as the discharge device control unit 6 of the droplet discharge device 1.
The temperature adjustment element 111 of the temperature adjustment unit 110 is connected to the temperature adjustment element driver 111d. The temperature adjustment element driver 111 d drives the temperature adjustment element 111 according to a control signal from the CPU 44 to adjust the temperature of the droplet discharge head 17.

  The detection unit interface 43 is connected to a detection unit 42 having various sensors such as a head temperature sensor 142 that measures the temperature of the droplet discharge head 17. Detection information detected by each sensor of the detection unit 42 is transmitted to the CPU 44 via the detection unit interface 43.

<Functional liquid arrangement>
Next, a process for ejecting the functional liquid from the liquid droplet ejection head 17 included in the liquid droplet ejection apparatus 301 and disposing the functional liquid on the filter film region 225 of the CF layer 208 in the mother counter substrate 201A will be described with reference to FIG. Will be described with reference to FIG. FIG. 21 is a flowchart showing a process of arranging the functional liquid.

In step S31 of FIG. 21, the drawing saturation temperature obtained in advance is acquired. The saturation temperature during drawing is driven by the droplet discharge head 17 when drawing discharge is performed to discharge the functional liquid from the droplet discharge head 17 of the droplet discharge device 301 toward the mother counter substrate 201A. As a result, the temperature of the droplet discharge head 17 changes, and the temperature is in a substantially constant state by continuing the driving for drawing discharge.
Here, the temperature of the droplet discharge head 17 is a portion of the droplet discharge head 17, and a change in temperature of the portion is measured in association with a change in the weight of the droplet discharged from the droplet discharge head 17. Use the temperature of the possible part. For example, any one of the temperature of the portion of the outer wall surface of the pump unit 75 where the terminal substrate 112 is not in contact, the temperature of the nozzle plate 76, the temperature of the portion constituting the pressure chamber 158 of the diaphragm 152, and the like can be used. .
The temperature of the outer wall surface of the pump unit 75 and the part constituting the pressure chamber 158 of the diaphragm 152 can be measured by arranging a temperature sensor in the part. The temperature of the portion constituting the pressure chamber 158 of the diaphragm 152 can also be measured by using the piezoelectric material constituting the piezoelectric element 159 as a temperature sensor. The temperature of the outer wall surface of the pump unit 75 and the temperature of the nozzle plate 76 can also be measured from a remote position using a non-contact infrared temperature sensor.
The drawing saturation temperature is input from, for example, the input / output device 68 of the control device 65 and stored in the RAM 46 or the hard disk 48 of the ejection device control unit 306. The input / output device 68 of the control device 65 in this case corresponds to the temperature acquisition means.

Next, in step S32, the head temperature of the droplet discharge head 17 is adjusted. As described above, the temperature of the temperature adjustment element 111 of the temperature adjustment unit 110 can be controlled by the discharge device control unit 306 to adjust the temperature of the droplet discharge head 17, and the temperature adjustment unit 110 is used. The temperature of the droplet discharge head 17 is adjusted to the saturation temperature during drawing.
More specifically, the mutual relationship between the temperature of the portion of the droplet discharge head 17 in which the temperature of the portion is the saturation temperature during drawing of the head temperature and the temperature of the temperature adjustment element 111 is obtained in advance, and the head temperature and temperature A temperature relationship table with the adjustment element 111 is created and stored in the RAM 46 or the hard disk 48 of the ejection device control unit 306. Next, the drawing saturation temperature input in step S31 is compared with the temperature relation table to obtain the temperature of the temperature adjusting element 111 corresponding to the drawing saturation temperature. Next, the temperature of the temperature adjusting element 111 is adjusted to the temperature of the temperature adjusting element 111 corresponding to the obtained saturation temperature during drawing.
The discharge device control unit 306 and the temperature adjustment unit 110 correspond to a temperature adjustment unit, and also correspond to a heating unit or a cooling unit.

Next, in step S33, drawing discharge is performed to discharge the functional liquid from the droplet discharge head 17 adjusted to the saturation temperature during drawing toward the filter film region 225 and the like. By adjusting the head temperature of the droplet discharge head 17 in step S32, the temperature of the droplet discharge head 17 at the start of drawing discharge is adjusted to the saturation temperature during drawing. For this reason, there is almost no variation in the temperature of the droplet discharge head 17 during the drawing discharge, and therefore there is almost no variation in the discharge amount due to the variation in the temperature of the droplet discharge head 17. The drawing discharge in step S33 is performed, and the step of arranging the functional liquid is completed.
Note that when the processing object such as the mother counter substrate 201A for which drawing discharge has been completed is replaced with a new processing object, the droplet discharge head 17 is in a resting state, and the liquid used when drawing discharge is being performed. There is a possibility that the temperature of the droplet discharge head 17 is not maintained. Therefore, when the droplet discharge head 17 is stopped during drawing discharge, such as during the exchange of the workpiece, the temperature adjustment unit 110 is operated during that period, and the droplet discharge head 17 is operated. It is preferable to adjust the head temperature.

<Installation of other temperature control units and other temperature control units>
Next, a configuration of the temperature adjustment unit 310 different from the temperature adjustment unit 110, and a mounting structure of the droplet discharge head 17 to the carriage plate 53 and a mounting structure of the temperature adjustment unit 310 in the head unit 374 having the temperature adjustment unit 310. This will be described with reference to FIG. FIG. 22 is a diagram showing the configuration of the temperature adjustment unit and the structure for attaching the droplet discharge head and the temperature adjustment unit to the carriage plate. 22A is a plan view of the terminal board of the temperature adjustment unit, and FIG. 22B is a side view of the droplet discharge head and the temperature adjustment unit attached to the carriage plate. ) Is a plan view of the droplet discharge head and the temperature adjustment unit attached to the carriage plate as viewed from the nozzle plate side.

  As shown in FIGS. 22A and 22B, the temperature adjustment unit 310 includes a temperature adjustment element 311 and a terminal board 312. The terminal substrate 312 is formed by laminating a base film 316, a heat transfer pattern 314, and a cover film 317 with the heat transfer pattern 314 sandwiched therebetween. The base film 316 and the cover film 317 are formed of a highly flexible material such as polyimide. The heat transfer pattern 314 is made of a material having high thermal conductivity, such as copper, and is formed into a shape that can be bent and deformed.

The exposed portion of the heat transfer pattern 314 that is not covered by the cover film 317 is adhered to the outer wall of the head main body 74 of the droplet discharge head 17 using an adhesive formed of a material having high thermal conductivity. Yes. The temperature adjustment element 311 is bonded and fixed to the heat transfer pattern 314 exposed at the opening 316a in the base film 316 using an adhesive formed of a material having high thermal conductivity. The terminal board 312 has a plurality of heat transfer patterns 314, and the temperature adjustment element 311 is fixed to each of the heat transfer patterns 314.
The temperature adjustment element 311 is electrically connected to a discharge device control unit similar to the discharge device control unit 306 (see FIG. 20) by a flexible flat cable (not shown), similarly to the temperature adjustment element 111. The device controller controls the temperature. The temperature of the plurality of temperature adjusting elements 311 is independently controlled.
The discharge device controller and the temperature adjustment unit 310 correspond to temperature adjustment means, and also correspond to heating means or cooling means.

  The temperature adjustment element 311 adjusts the temperature of the heat transfer pattern 314 to which the temperature adjustment element 311 is fixed, and the temperature of the outer wall of the head main body 74 to which the heat transfer pattern 314 is bonded is adjusted. As described with reference to FIG. 3, a pressure chamber 158 is formed inside the outer wall, and the outer wall faces the pressure chamber 158 and the pressure chamber 158 of the nozzle plate 76 by adjusting the temperature. The temperature of the portion and the functional liquid in the pressure chamber 158 is adjusted.

As shown in FIG. 22C, the attachment of the droplet discharge head 17 to the carriage plate 53 in the head unit 374 is performed on the carriage plate 53 of the droplet discharge head 17 in the head unit 354 described with reference to FIG. It is the same as the attachment to.
The attachment of the temperature adjustment unit 310 to the carriage plate 53 in the head unit 374 is the same as the attachment of the temperature adjustment unit 110 to the carriage plate 53 in the head unit 354 described with reference to FIG.

<Electronic equipment>
Next, an electronic device will be described with reference to FIG. 23 as an example of an object on which a functional liquid is formed by using the droplet discharge device 1 or the droplet discharge device 301 to form a functional film. The electronic device of the present embodiment is an electronic device including a liquid crystal display device such as the liquid crystal display panel 200 described in the first embodiment. A specific example of the electronic apparatus of this embodiment will be described.

  FIG. 23 is an external perspective view showing a large-sized liquid crystal television which is an example of an electronic apparatus. As shown in FIG. 23, a large-sized liquid crystal television 400, which is an example of an electronic device, includes a display unit 401. The display unit 401 includes a liquid crystal display device such as the liquid crystal display panel 200 described in the first embodiment as a display unit.

According to 2nd embodiment, in addition to the effect acquired by 1st embodiment, the effect described below is acquired.
(1) The head unit 354 and the head unit 374 include the temperature adjustment unit 110 or the temperature adjustment unit 310. For this reason, the droplet discharge device 301 can adjust the temperature of the droplet discharge head 17 to the saturation temperature during drawing using the temperature adjustment unit 110 or the temperature adjustment unit 310.

  (2) The terminal board 312 of the temperature adjustment unit 310 has a plurality of heat transfer patterns 314, and the temperature adjustment element 311 is fixed to each of the heat transfer patterns 314. Thereby, the temperature can be adjusted independently for each heat transfer pattern 314. Therefore, the temperature can be adjusted independently for each individual discharge nozzle 78 or a plurality of discharge nozzles 78 in the range corresponding to the heat transfer pattern 314.

  (3) The temperature adjustment unit 110 and the temperature adjustment unit 310 are connected to the droplet discharge head 17 through the flexible terminal board 112 or the terminal board 312 so as to conduct heat. Therefore, it is not necessary to strictly align the temperature adjustment unit 110 and the temperature adjustment unit 310 with respect to the droplet discharge head 17, and the temperature adjustment unit 110 and the temperature adjustment unit 310 can be easily adjusted to the head unit 354 or the head. It can be attached to the unit 374.

  As mentioned above, although preferred embodiment was described referring an accompanying drawing, suitable embodiment is not restricted to the said embodiment. The embodiment can of course be modified in various ways without departing from the scope, and can also be implemented as follows.

  (Modification 1) In the embodiment, the drawing saturation temperature is obtained as the temperature at the time of formation of a predetermined pattern of the head temperature in the droplet discharge head 17 as the discharge means, and the drawing temperature is set to the saturation temperature during drawing. The head temperature at the start of ejection was adjusted. However, the target for adjusting the temperature at the start of the predetermined pattern formation so as to obtain the temperature at the predetermined pattern formation and to be the temperature at the predetermined pattern formation is not limited to the temperature of the ejection unit. The temperature at the time of the predetermined pattern formation of the liquid material may be obtained, and the temperature of the liquid material at the time of starting the predetermined pattern formation may be adjusted to be the temperature at the time of the predetermined pattern formation. When the temperature of the liquid changes, the viscosity of the liquid changes. Since the discharge amount is affected by the viscosity of the discharged liquid material, the fluctuation of the discharge amount of the liquid material can be suppressed by adjusting the temperature of the liquid material to suppress the fluctuation of the temperature of the liquid material.

  (Modification 2) In the first embodiment, the head temperature sensor 142 is used to measure the saturation temperature during drawing. However, it is not essential to actually measure the saturation temperature during drawing as the temperature for forming a predetermined pattern. The saturation temperature during drawing may be estimated and obtained. The drawing saturation temperature can be estimated, for example, in the same manner as the method for estimating and obtaining the warm-up drive condition described with reference to FIG.

As shown in FIG. 18C, when drawing discharge is started at time S without performing warm-up driving, the temperature of the droplet discharge head 17 performing drawing discharge is as shown in FIG. As in the case shown, after the drawing discharge for a certain time, the drawing temperature becomes substantially the saturation temperature HM ° C. and becomes substantially stable.
When warm-up driving is performed with a driving voltage a that is a driving voltage a% of the designed driving voltage that can obtain an appropriate discharge amount, the head temperature converges to Ha ° C., and the head temperature at time S becomes Ha ° C. . When drawing discharge is started at a head temperature of Ha ° C., the head temperature rises with a temperature rise curve denoted as a0 in FIG. 18C, and is substantially stabilized at the saturation temperature HM ° C. during drawing. The slope of the curve a0 at the time S is denoted as the slope a1.
When warm-up driving is performed with the driving voltage b that is a driving voltage b% of the designed driving voltage that can obtain an appropriate discharge amount, the head temperature converges to Hb ° C., and the head temperature at time S becomes Hb ° C. . When the drawing discharge is started at the head temperature of Hb ° C., the head temperature is lowered by a temperature drop curve denoted as b0 in FIG. 18C, and is substantially stabilized at the saturation temperature HM ° C. during drawing. The slope of the curve b0 at the time S is denoted as the slope b1.

  Similarly to the method described with reference to FIG. 18D, the temperature of the droplet discharge head 17 which is inclined on the vertical axis and converges as a result of the warm-up drive on the horizontal axis is taken as (a, Ha) points and ( b, Hb) A point at which the straight line passing through the point intersects the horizontal axis, that is, the temperature value of the droplet discharge head 17 at which the inclination becomes zero is obtained. It is estimated that the temperature is a saturation temperature during drawing. Whether or not the temperature is a saturation temperature during drawing can be verified by adjusting the temperature of the droplet discharge head 17 to the temperature and starting drawing and discharging. If the temperature is a saturation temperature during drawing, when drawing discharge is started at the temperature, there is almost no possibility that the temperature of the droplet discharge head 17 fluctuates during drawing discharge. For this reason, when drawing discharge is started at the said temperature and the temperature of the droplet discharge head 17 is substantially stable from the time of drawing discharge, the said temperature is saturation temperature during drawing. In this case, the ejection device controller 6 that estimates the saturation temperature during drawing by controlling the driving conditions of the droplet ejection head 17 corresponds to the temperature acquisition unit.

  (Modification 3) In the above-described embodiment, the saturation temperature during drawing is obtained in advance, and the saturation temperature during drawing obtained in advance is obtained in the step of arranging the functional liquid. However, it is not essential to obtain the drawing saturation temperature in advance as the temperature at the time of forming the predetermined pattern. Instead of the step of obtaining a predetermined temperature at the time of forming a predetermined pattern, each nozzle, droplet discharge head, or driving of a liquid material discharge device including them is measured while measuring or drawing the temperature at the time of forming a predetermined pattern. You may implement the process of acquiring the temperature at the time of predetermined pattern formation by estimating a temperature change from conditions.

  (Modification 4) In the first embodiment, the warming-up driving is performed to obtain a driving condition in which the temperature of the droplet discharge head 17 becomes the saturation temperature during drawing, and the warming-up driving is performed under the driving condition. Although it has been implemented, it is not essential to obtain a driving condition in which the temperature of the droplet discharge head 17 becomes the saturation temperature during drawing. The temperature of the droplet discharge head 17 is measured using a temperature sensor such as the head temperature sensor 142 that measures the temperature of the droplet discharge head 17 while performing the warm-up drive, and the warm-up drive is performed according to the measurement result. You may control. In this case, the head temperature sensor 142 corresponds to a temperature measuring unit included in the temperature adjusting unit.

  (Modification 5) In the embodiment described above, the saturation temperature during drawing of the droplet discharge head 17 is obtained, and the temperature at which the droplet discharge head 17 is brought to the saturation temperature during drawing is obtained using the saturation temperature during drawing as an index. Although the driving conditions for machine driving have been obtained, it is not essential to use the saturation temperature during drawing as an index. Similarly to the second modification described above, a driving condition in which the temperature of the droplet discharge head 17 becomes the saturation temperature during drawing may be estimated, and the driving condition may be used as an index. It may be estimated that the saturation temperature during drawing is realized by performing warm-up driving under the driving conditions.

  (Modification 6) In the second embodiment, the drawing temperature saturation temperature is measured using the head temperature sensor 142. However, it is not essential to actually measure the saturation temperature during drawing as the temperature for forming a predetermined pattern. Similar to the example described in the second modification, the drawing saturation temperature may be estimated. For example, it can be estimated in the same manner as the method for estimating and obtaining the warm-up drive condition described with reference to FIG.

As shown in FIG. 18C, when drawing discharge is started at time S without adjusting the temperature, the temperature of the droplet discharge head 17 performing drawing discharge is shown in FIG. As in the case of the above, after the drawing discharge for a certain time, the saturation temperature HM ° C. is almost reached during the drawing, and is substantially stabilized.
For example, the temperature adjustment unit 110 is operated to heat or cool the head temperature of the droplet discharge head 17 to Ha ° C. As described above, when drawing discharge is started at a head temperature of Ha ° C., the head temperature rises with a temperature rise curve denoted as a0 in FIG. 18C, and is substantially stable at a saturation temperature HM ° C. during drawing. To do. The slope of the curve a0 at the time S is denoted as the slope a1.
Similarly, the temperature adjustment unit 110 is operated to heat or cool the head temperature of the droplet discharge head 17 to Hb ° C. As described above, when drawing ejection is started at a head temperature of Hb ° C., the head temperature falls along a temperature drop curve denoted as b0 in FIG. 18C, and is substantially stabilized at a saturation temperature HM ° C. during drawing. To do. The slope of the curve b0 at the time S is denoted as the slope b1.

  Similarly to the method described with reference to FIG. 18D, the temperature of the droplet discharge head 17 which is inclined on the vertical axis and converges as a result of the warm-up drive on the horizontal axis is taken as (a, Ha) points and ( b, Hb) A point at which the straight line passing through the point intersects the horizontal axis, that is, the temperature value of the droplet discharge head 17 at which the inclination becomes zero is obtained. It is estimated that the temperature is a saturation temperature during drawing. Whether or not the temperature is a saturation temperature during drawing can be verified by adjusting the temperature of the droplet discharge head 17 to the temperature and starting drawing and discharging. If the temperature is a saturation temperature during drawing, when drawing discharge is started at the temperature, there is almost no possibility that the temperature of the droplet discharge head 17 fluctuates during drawing discharge. For this reason, when drawing discharge is started at the said temperature and the temperature of the droplet discharge head 17 is substantially stable from the time of drawing discharge, the said temperature is saturation temperature during drawing. In this case, the ejection device control unit 306 that estimates the saturation temperature during drawing by controlling the driving conditions of the droplet ejection head 17 corresponds to the temperature acquisition unit.

  (Modification 7) In the second embodiment, by adjusting the temperature of the temperature adjustment element 111 to the temperature of the temperature adjustment element 111 corresponding to the saturation temperature during drawing of the droplet discharge head 17 obtained in advance, The temperature of the droplet discharge head 17 was adjusted to the saturation temperature during drawing. However, it is not essential to obtain the temperature of the temperature adjusting element 111 corresponding to the saturation temperature during drawing of the droplet discharge head 17. While measuring the temperature of the droplet discharge head 17 using a temperature sensor such as the head temperature sensor 142 that measures the temperature of the droplet discharge head 17, the temperature of the temperature adjustment element 111 is controlled according to the measurement result. Also good. Since the measured value of the temperature of the droplet discharge head 17 is adjusted to the saturation temperature during drawing, the temperature of the droplet discharge head 17 can be more accurately adjusted to the saturation temperature during drawing. In this case, the head temperature sensor 142 corresponds to a temperature measuring unit included in the temperature adjusting unit.

  (Modification 8) In the above-described embodiment, the head temperature sensor 142 is, for example, a contact-type temperature sensor, and includes, for example, the outer wall surface of the pump unit 75, the nozzle plate 76, and the pressure chamber 158 of the diaphragm 152. One of these temperatures was measured in contact with any of the parts. However, it is not essential that the head temperature sensor is a contact type temperature sensor. A non-contact infrared temperature sensor or the like may be used as the head temperature sensor.

  (Modification 9) In the above-described embodiment, the drive voltage is defined as the drive condition for the warm-up drive. However, the drive voltage is regulated as the drive condition for the warm-up drive and adjusted to change the drive condition. Not limited to. By changing various elements of the drive waveform described with reference to FIG. 9, it is possible to adjust the ejection amount and also to adjust the temperature of the droplet ejection head.

  (Modification 10) In the above-described embodiment, the droplet discharge device 1 and the droplet discharge device 301 are devices that measure the discharge amount of the droplet discharge head 17 and measure the weight of the discharged functional liquid. Although the apparatus 91 is provided, it is not essential to measure the discharge amount by measuring the discharge weight. For example, the discharge amount may be measured by determining the size and volume of the droplet by an optical method. By optically measuring the size of the droplet in flight, the shape and size of the droplet immediately after landing on the object, the size of the droplet that landed on the object, and the like, The discharge amount may be measured by determining the volume.

  (Modification 11) In the embodiment described above, the head unit 54 of the droplet discharge device 1 and the head unit 354 of the droplet discharge device 301 include the six droplet discharge heads 17. The number of droplet discharge heads is not limited to six. The head unit may include any number of droplet discharge heads.

  (Modification 12) In the above-described embodiment, the droplet discharge device 1 as a liquid material discharge device includes a set of head units 54, and the droplet discharge device 301 includes a set of head units 354. However, the head unit provided in the liquid material discharge device is not limited to one set. The liquid material ejection device may include any number of sets of head units.

  (Modification 13) In the embodiment, the heat transfer pattern 114 or the heat transfer pattern 314 as a heat transfer member for transferring heat between the temperature adjustment element 111 or the temperature adjustment element 311 and the droplet discharge head 17 is made of metal. Although the material is formed in a substrate shape with a film or a thin plate shape sandwiched between films, the form of the heat transfer member is not limited to the substrate shape. Any shape may be used as long as heat can be conducted by contacting the ejection head. The material constituting the heat transfer member may be any material as long as it has a high thermal conductivity.

  (Modification 14) In the embodiment, the heat transfer pattern 114 or the heat transfer pattern 314 as a heat transfer member for transferring heat between the temperature adjustment element 111 or the temperature adjustment element 311 and the droplet discharge head 17 is a metal. Although the material is formed in a substrate shape with a film or a thin plate shape sandwiched between films, it is not essential that the heat transfer member is a solid such as a metal. A configuration may be adopted in which a flow path of a liquid material is provided between the temperature adjustment element and the droplet discharge head, and heat is transmitted by circulating the liquid material in the flow path.

  (Modification 15) In the above embodiment, the heat transfer pattern 114 or the heat transfer pattern 314 as a heat transfer member for transferring heat between the temperature adjustment element 111 or the temperature adjustment element 311 and the droplet discharge head 17 is a liquid It was bonded to the outer wall of the head main body 74 of the droplet discharge head 17 using an adhesive formed of a material having high thermal conductivity. However, it is not essential to use an adhesive to fix the heat transfer member to the ejection head. Any fixing method may be used as long as heat conduction can be performed satisfactorily. The connection between the temperature adjusting element and the heat transfer member may be any connection method as long as heat conduction can be performed satisfactorily.

(Modification 16) In the above embodiment, the drawing discharge when forming the filter film 205 of the liquid crystal display panel 200 has been described. However, the film to be formed is not limited to the filter film. The film to be formed may be an overcoat film provided to protect a pixel electrode film, an alignment film, a counter electrode film, a color filter, or the like of a liquid crystal display device.
An apparatus having a film to be formed or an apparatus that needs to form a film in the formation process is not limited to a liquid crystal display device. Any device may be used as long as it is a device having a film as described above or a device that needs to form a film as described above in the formation process. For example, it can be applied to an organic EL display device. The functional film formed by using the above-described droplet discharge device when manufacturing the organic EL display device includes a positive electrode film and a cathode electrode film of the organic EL display device, a film for forming a pattern by photoetching, It may be a photoresist film such as photoetching.

  (Modification 17) In the above-described embodiment, a liquid crystal including a color filter, which is an example of an electro-optical device, as an example of a drawing target on which drawing is performed by arranging a functional liquid using the droplet discharge device 1 The display panel 200 has been described. In addition, the wiring substrate 270 having the wiring made of the conductive material has been described. However, the drawing object is not limited to the electro-optical device or the wiring board. The liquid material discharge apparatus and the liquid material discharge method described above can be used as a manufacturing apparatus and a manufacturing method for processing various objects to be processed in which various liquid materials are arranged during manufacturing. For example, a processing method or processing apparatus for a wiring conductive film of a semiconductor device that discharges a semiconductor wafer and a liquid conductive material, a processing method or processing apparatus for an insulating layer of a semiconductor device that discharges a semiconductor wafer or a liquid insulating material, etc. Can also be used.

  (Modification 18) In the above embodiment, the CF layer 208 provided in the liquid crystal display panel 200 is a three-color filter having three color filter films: a red filter film 205R, a green filter film 205G, and a blue filter film 205B. However, the color filter may be a multicolor color filter having more types of filter films. As the multicolor filter, for example, six colors including organic EL elements of cyan (blue green), magenta (purple red), and yellow (yellow) which are complementary colors of red, green and blue in addition to red, green and blue. Examples include a color filter and a four-color filter in which green is added to three colors of cyan (blue green), magenta (purple red), and yellow (yellow).

  (Modification 19) In the above embodiment, the film forming section, the functional film section, or the filter film area 225 as the color element area is rectangular, but the film forming section, the functional film section, or the color element area is It is not essential to be rectangular. In recent years, in order to improve display characteristics, display devices having pixel shapes different from rectangular shapes have been devised. The shape of the film forming section, the functional film section, or the color element region may be a shape capable of forming a pixel or the like whose shape is different from the rectangle.

  (Modification 20) In the above-described embodiment, in one film formation region, functional film region, or filter region film, the film formation region, the functional film region, the filter film region 225 as the color element region, etc. are the same size. And shape. However, in one film formation region, functional film region, or filter region film, it is not essential that the film formation section, the functional film section, or the color element region have a single size and shape. For example, film formation sections, functional film sections, or color element areas of different sizes, such that the sizes of the colors of the color elements constituting the minimum display unit in the four-color filter are different according to the characteristics of the light source It may be a film forming region, a functional film region, or a filter region film.

(Modification 21) In the embodiment described above, the droplet discharge device 1 and the droplet discharge device 301 move the workpiece mounting table 21 on which the mother counter substrate 201A and the like are mounted in the main scanning direction, and also the droplet discharge head. The functional liquid was arranged by discharging the functional liquid from 17. Further, by moving the head unit 54 or the head unit 354 in the sub-scanning direction, the position of the droplet discharge head 17 (discharge nozzle 78) with respect to the mother counter substrate 201A and the like is adjusted. However, the relative movement in the main scanning direction between the droplet discharge head as the placement head and the mother substrate can be performed by moving the mother substrate, and the relative movement in the sub-scanning direction can also be performed by moving the discharge head. It is not essential to do.
The relative movement in the main scanning direction between the ejection head and the mother substrate may be performed by moving the ejection head in the main scanning direction. The relative movement between the ejection head and the mother substrate in the sub-scanning direction may be performed by moving the mother substrate in the sub-scanning direction. Alternatively, the relative movement of the ejection head and the mother substrate in the main scanning direction and the sub-scanning direction may be performed by moving either the ejection head or the mother substrate in the main scanning direction and the sub-scanning direction. Alternatively, both the ejection head and the mother substrate may be moved in the main scanning direction and the sub scanning direction.

  (Modification 22) In the above-described embodiment, the liquid droplet discharge device 1 or the droplet discharge device 301 provided with the ink jet type liquid droplet discharge head 17 is used as the liquid material discharge device that places the functional liquid on the mother counter substrate 201A or the like. Although described as an example, it is not essential that the liquid material ejection device is a droplet ejection device. As the liquid material discharge device, for example, a discharge device including a dispenser can be used. When it is necessary to dispose a large amount of film material in a large-area film formation section, it is useful to use a dispenser having a larger discharge amount per unit time than the droplet discharge head.

1 is a plan view showing a schematic configuration of a droplet discharge device according to a first embodiment. The side view which shows schematic structure of a droplet discharge apparatus. (A) is the external appearance perspective view which looked at the droplet discharge head from the nozzle plate side. (B) is a perspective sectional view showing a structure around a pressure chamber of a droplet discharge head. FIG. 6C is a cross-sectional view showing the structure of the discharge nozzle portion of the droplet discharge head. FIG. 2 is a plan view showing a schematic configuration of a head unit. The external appearance perspective view which shows the whole structure of a test | inspection drawing unit. (A) is a top view of the weight measurement block containing the part of a weight measurement unit and the part of a flushing unit. (B) is a side view of a weight measurement block. FIG. 3 is an electrical configuration block diagram showing an electrical configuration of the droplet discharge device. Explanatory drawing which shows the electrical structure and signal flow of a droplet discharge head. (A) is a figure which shows the basic waveform of the drive waveform of the drive signal applied to a piezoelectric element. (B) is a schematic cross-sectional view showing the discharge operation of the droplet discharge head by the operation of the piezoelectric element corresponding to the drive waveform. The disassembled perspective view which shows schematic structure of a liquid crystal display panel. (A) is a top view which shows typically the planar structure of a counter substrate. (B) is a top view which shows typically the planar structure of a mother opposing substrate. The schematic plan view which shows the example of an arrangement | sequence of the filter film | membrane of a 3 color filter. The flowchart which shows the process in which a liquid crystal display panel is formed. Sectional drawing which shows the process etc. which form the filter film in the process of forming a liquid crystal display panel. Sectional drawing which shows the process etc. which form the alignment film in the process of forming a liquid crystal display panel. The schematic plan view which shows the mother board | substrate of a wiring board. The flowchart which shows the process of arrange | positioning a functional liquid. (A) is a graph which shows the relationship between discharge amount and head temperature. (B) is a graph showing the relationship between the time during which drawing ejection is performed and the head temperature. (C) is a graph showing the relationship between the time during which warm-up driving and drawing discharge are performed and the head temperature. (D) is a graph which shows the method of estimating warm-up drive voltage. (A) is the top view which looked at the droplet discharge head and temperature control unit attached to the carriage plate from the nozzle plate side. (B) is sectional drawing of the cross section shown by AA in (a). (C) is a side view of a droplet discharge head and a temperature adjustment unit attached to a carriage plate. FIG. 4D is a side view of the temperature adjustment unit attached to the carriage plate. (E) is a top view of the terminal board of a temperature control unit. FIG. 3 is an electrical configuration block diagram showing an electrical configuration of the droplet discharge device. The flowchart which shows the process of arrange | positioning a functional liquid. (A) is a top view of the terminal board of a temperature control unit. FIG. 6B is a side view of the droplet discharge head and the temperature adjustment unit attached to the carriage plate. FIG. 6C is a plan view of the droplet discharge head and the temperature adjustment unit attached to the carriage plate when viewed from the nozzle plate side. 1 is an external perspective view showing a large-sized liquid crystal television that is an example of an electronic apparatus.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1,301 ... Droplet discharge device, 6,306 ... Discharge device control part, 17 ... Droplet discharge head, 44 ... CPU, 45 ... ROM, 46 ... RAM, 53 ... Carriage plate, 54 ... Head unit, 68 ... On Output device 74 ... head body 75 ... pump unit 76 ... nozzle plate 78 ... discharge nozzle 78A ... nozzle row 91 ... weight measuring device 110 ... temperature adjustment unit 111 ... temperature adjustment element 112 ... terminal substrate , 114 ... Heat transfer pattern, 142 ... Head temperature sensor, 151 ... Pressure chamber plate, 152 ... Vibration plate, 158 ... Pressure chamber, 159 ... Piezoelectric element, 200 ... Liquid crystal display panel, 201A ... Mother counter substrate, 205 ... Filter film 218 ... Alignment film 310 ... Temperature adjustment unit 311 ... Temperature adjustment element 312 ... Terminal substrate 400 ... Large liquid crystal television 401 The display unit.

Claims (22)

A liquid discharge device that forms a predetermined pattern on the discharge object by relatively moving a discharge means for discharging the liquid and a discharge object to which the liquid is discharged,
Temperature acquisition means for acquiring a temperature at the time of forming the predetermined pattern of the discharge means;
Temperature adjusting means for adjusting the temperature of the discharge means,
The temperature adjusting means adjusts the temperature of the discharge means at the time of starting the predetermined pattern formation to the temperature at the time of the predetermined pattern formation. A liquid discharge device that forms a predetermined pattern on the discharge object by relatively moving a discharge means for discharging the liquid and a discharge object to which the liquid is discharged,
Temperature acquisition means for acquiring a temperature at the time of forming the predetermined pattern of the liquid,
Temperature adjusting means for adjusting the temperature of the liquid material,
The temperature adjusting means adjusts the temperature of the liquid material at the time of starting the predetermined pattern formation to the temperature at the time of the predetermined pattern formation.   The temperature adjusting means adjusts the temperature of the discharge means or the liquid material to a temperature at the time of forming the predetermined pattern by driving the discharge means to warm up. The liquid material discharge device according to 1.   The temperature acquisition unit estimates the temperature at the time of forming the predetermined pattern by performing warm-up driving under two or more different warm-up driving conditions of the warm-up driving. The liquid material discharge device according to 1.   Further comprising a warm-up condition setting means for obtaining a warm-up drive condition of the warm-up drive, wherein the warm-up condition setting means performs the warm-up drive in two or more different warm-up drive conditions, The liquid discharge apparatus according to claim 3, wherein the warm-up driving condition in which the temperature of the discharge unit or the liquid is the temperature at the time of forming the predetermined pattern is estimated.   The temperature adjusting means further includes a temperature measuring means for measuring the temperature of the discharging means or the liquid material, and the discharging means is warmed up according to the measurement result of the temperature measuring means, whereby the discharging means 6. The liquid material ejection apparatus according to claim 3, wherein the temperature of the liquid material is adjusted to a temperature at the time of forming the predetermined pattern.   The temperature adjusting means is a heating means or a cooling means, and by heating or cooling the discharge means or the liquid material, the temperature of the discharge means or the liquid material is changed to a temperature at the time of forming the predetermined pattern. It adjusts, The liquid discharger of Claim 1 or 2 characterized by the above-mentioned.   The temperature acquisition means adjusts the temperature of the discharge means or the liquid material at the time of starting the predetermined pattern formation to two or more different temperatures, and performs the predetermined pattern formation at each temperature. 8. The liquid material ejecting apparatus according to claim 7, wherein a temperature at the time of forming the predetermined pattern is estimated by a temperature change at the time.   The temperature adjusting unit further includes a temperature measuring unit that measures the temperature of the discharging unit or the liquid material, and the heating unit or the cooling unit is configured to output the discharging unit or the cooling unit according to a measurement result of the temperature measuring unit. The liquid discharge apparatus according to claim 7, wherein the temperature of the discharge means or the liquid is adjusted to a temperature at the time of forming the predetermined pattern by heating or cooling the liquid. A liquid discharge method for forming a predetermined pattern on the discharge object by relatively moving the discharge means for discharging the liquid and the discharge object to which the liquid is discharged,
A temperature acquisition step of acquiring a temperature at the time of forming the predetermined pattern of the ejection unit;
Adjusting the temperature of the discharge means, and
In the temperature adjusting step, the temperature of the discharge unit at the time of starting the predetermined pattern formation is adjusted to the temperature at the time of the predetermined pattern formation. A liquid discharge method for forming a predetermined pattern on the discharge object by relatively moving the discharge means for discharging the liquid and the discharge object to which the liquid is discharged,
A temperature acquisition step of acquiring the temperature of the liquid material at the time of forming the predetermined pattern;
A temperature adjusting step for adjusting the temperature of the liquid material,
In the temperature adjustment step, the temperature of the liquid material at the time of starting the predetermined pattern formation is adjusted to the temperature at the time of the predetermined pattern formation.   12. The temperature adjustment step, wherein the temperature of the discharge unit or the liquid material is adjusted to a temperature at the time of forming the predetermined pattern by driving the discharge unit to warm up. The liquid discharge method as described in 1. The temperature acquisition step includes a step of forming the predetermined pattern after performing warm-up drive under the first warm-up drive condition, and a second warm-up drive condition different from the first warm-up drive condition. Forming the predetermined pattern after performing the warm-up drive,
The liquid material according to claim 12, wherein a temperature at the time of forming the predetermined pattern is estimated by a temperature change of the ejection unit or the liquid material at the time of forming the predetermined pattern in each step. Discharge method.   A warm-up condition setting step for obtaining a warm-up drive condition for the warm-up drive, wherein the warm-up condition setting step performs the predetermined pattern after performing the warm-up drive in a first warm-up drive condition; Forming the predetermined pattern after performing the warm-up drive under a second warm-up drive condition different from the first warm-up drive condition, and the predetermined pattern in each step The warm-up drive in which the temperature of the discharge means or the liquid material becomes the temperature at the time of forming the predetermined pattern by performing the warm-up drive according to the temperature change of the discharge means or the liquid material when forming the liquid The liquid material discharging method according to claim 12, further comprising a step of estimating a condition.   The temperature adjustment step includes a temperature measurement step of measuring the temperature of the discharge means or the liquid material, and the discharge means or the temperature control step is performed by driving the discharge means in accordance with a measurement result in the temperature measurement step. The method of discharging a liquid material according to claim 12, wherein the temperature of the liquid material is adjusted to a temperature at the time of forming the predetermined pattern.   The temperature adjustment step adjusts the temperature of the discharge means or the liquid material to a temperature at the time of forming the predetermined pattern by heating or cooling the discharge means or the liquid material. Item 12. The liquid discharge method according to Item 10 or 11.   In the temperature acquisition step, the temperature of the ejection unit or the liquid material at the time of starting the predetermined pattern formation is adjusted to two or more different temperatures, and the predetermined pattern formation is performed at each temperature. The liquid discharge method according to claim 16, wherein a temperature at the time of forming the predetermined pattern is estimated based on a change in temperature at the time.   The temperature adjustment step further includes a temperature measurement step for measuring the temperature of the discharge means or the liquid material, and heating or cooling the discharge means or the liquid material according to a measurement result in the temperature measurement step. The liquid discharge method according to claim 16, wherein the temperature of the discharge means or the liquid is adjusted to a temperature at the time of forming the predetermined pattern.   10. An electro-optical device manufacturing method comprising: the liquid material discharge device according to claim 1; and forming a functional film constituting the electro-optical device using the liquid material discharge device. apparatus.   A functional film constituting an electro-optical device is formed using the liquid material discharge device according to any one of claims 1 to 9 or the liquid material discharge method according to any one of claims 10 to 18. A method of manufacturing an electro-optical device.   An apparatus for manufacturing an electronic device, comprising the liquid material discharge device according to claim 1, wherein a functional film constituting the electronic device is formed using the liquid material discharge device.   A functional film constituting an electronic device is formed by using the liquid discharge device according to any one of claims 1 to 9 or the liquid discharge method according to any one of claims 10 to 18. A method for manufacturing an electronic device, characterized by:

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