JP2009278088A - 変調ドープ活性層を備えた発光デバイス - Google Patents
変調ドープ活性層を備えた発光デバイス Download PDFInfo
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- JP2009278088A JP2009278088A JP2009113297A JP2009113297A JP2009278088A JP 2009278088 A JP2009278088 A JP 2009278088A JP 2009113297 A JP2009113297 A JP 2009113297A JP 2009113297 A JP2009113297 A JP 2009113297A JP 2009278088 A JP2009278088 A JP 2009278088A
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- 239000000463 material Substances 0.000 claims abstract description 37
- 239000004065 semiconductor Substances 0.000 claims abstract description 4
- 230000004888 barrier function Effects 0.000 claims description 35
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims description 8
- 229910052710 silicon Inorganic materials 0.000 claims description 8
- 239000010703 silicon Substances 0.000 claims description 8
- 229910002601 GaN Inorganic materials 0.000 claims description 7
- AUCDRFABNLOFRE-UHFFFAOYSA-N alumane;indium Chemical compound [AlH3].[In] AUCDRFABNLOFRE-UHFFFAOYSA-N 0.000 claims description 5
- 239000013590 bulk material Substances 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims description 4
- 238000002347 injection Methods 0.000 description 13
- 239000007924 injection Substances 0.000 description 13
- 239000002019 doping agent Substances 0.000 description 12
- 239000012535 impurity Substances 0.000 description 10
- 238000000034 method Methods 0.000 description 8
- 239000000758 substrate Substances 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 230000008569 process Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 230000005684 electric field Effects 0.000 description 5
- 230000006798 recombination Effects 0.000 description 5
- 238000005215 recombination Methods 0.000 description 5
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 4
- 239000011777 magnesium Substances 0.000 description 4
- 230000009467 reduction Effects 0.000 description 4
- 229910000077 silane Inorganic materials 0.000 description 4
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 3
- 239000000969 carrier Substances 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 229910052749 magnesium Inorganic materials 0.000 description 3
- 230000000737 periodic effect Effects 0.000 description 3
- 229910052594 sapphire Inorganic materials 0.000 description 3
- 239000010980 sapphire Substances 0.000 description 3
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 2
- FTWRSWRBSVXQPI-UHFFFAOYSA-N alumanylidynearsane;gallanylidynearsane Chemical compound [As]#[Al].[As]#[Ga] FTWRSWRBSVXQPI-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000001451 molecular beam epitaxy Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229910017083 AlN Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- MDPILPRLPQYEEN-UHFFFAOYSA-N aluminium arsenide Chemical compound [As]#[Al] MDPILPRLPQYEEN-UHFFFAOYSA-N 0.000 description 1
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 238000013481 data capture Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02538—Group 13/15 materials
- H01L21/0254—Nitrides
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02387—Group 13/15 materials
- H01L21/02389—Nitrides
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
- H01L21/02455—Group 13/15 materials
- H01L21/02458—Nitrides
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02494—Structure
- H01L21/02496—Layer structure
- H01L21/02505—Layer structure consisting of more than two layers
- H01L21/02507—Alternating layers, e.g. superlattice
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/025—Physical imperfections, e.g. particular concentration or distribution of impurities
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/04—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
- H01L33/06—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction within the light emitting region, e.g. quantum confinement structure or tunnel barrier
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
- H01L33/32—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen
- H01L33/325—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen characterised by the doping materials
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- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/305—Structure or shape of the active region; Materials used for the active region characterised by the doping materials used in the laser structure
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/305—Structure or shape of the active region; Materials used for the active region characterised by the doping materials used in the laser structure
- H01S5/3086—Structure or shape of the active region; Materials used for the active region characterised by the doping materials used in the laser structure doping of the active layer
- H01S5/309—Structure or shape of the active region; Materials used for the active region characterised by the doping materials used in the laser structure doping of the active layer doping of barrier layers that confine charge carriers in the laser structure, e.g. the barriers in a quantum well structure
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- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
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Abstract
【解決手段】n型層と、p型層と、これらp型層とn型層との間に配置されドープ材料及び非ドープ材料が交互に起こる領域を有する発光活性層と、を有する半導体発光デバイスを製造する。
【選択図】図1
Description
前記活性層は、ドープされたバルク材料の領域と、ドープされないバルク材料の領域と、を有するバルク活性層を含んでもよい。
前記活性層は、バリア材料及び量子井戸材料の交互層を有する多重量子井戸を含み、バリア材料の少なくとも一層が更にドープされてもよい。
前記量子井戸材料が、第1の化学式を有するインジウム・アルミニウム窒化ガリウムを含み、前記バリア材料が、第2の化学式を有し更にシリコンでドープされたインジウム・アルミニウム窒化ガリウムを含んでもよい。
12 基板
14 テンプレート層
18 n型材料層
20 電子注入層
22 活性層
24 ホール注入層
Claims (4)
- n型層と、
p型層と、
前記p型層と前記n型層との間に配置される発光活性層であって、ドープ材料及び非ドープ材料の交互領域を有する前記発光活性層と、
を含む、半導体発光デバイス。 - 前記活性層が、ドープされたバルク材料の領域と、ドープされないバルク材料の領域と、を有するバルク活性層を含む、請求項1に記載の発光デバイス。
- 前記活性層が、バリア材料及び量子井戸材料の交互層を有する多重量子井戸を含み、バリア材料の少なくとも一層が更にドープされる、請求項1に記載の発光デバイス。
- 前記量子井戸材料が、第1の化学式を有するインジウム・アルミニウム窒化ガリウムを含み、前記バリア材料が、第2の化学式を有し更にシリコンでドープされたインジウム・アルミニウム窒化ガリウムを含む、請求項1に記載の発光デバイス。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/121,431 US20090283746A1 (en) | 2008-05-15 | 2008-05-15 | Light-emitting devices with modulation doped active layers |
Publications (1)
Publication Number | Publication Date |
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JP2009278088A true JP2009278088A (ja) | 2009-11-26 |
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Family Applications (1)
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JP2009113297A Pending JP2009278088A (ja) | 2008-05-15 | 2009-05-08 | 変調ドープ活性層を備えた発光デバイス |
Country Status (2)
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US (1) | US20090283746A1 (ja) |
JP (1) | JP2009278088A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6438542B1 (ja) * | 2017-07-27 | 2018-12-12 | 日機装株式会社 | 半導体発光素子 |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6958497B2 (en) | 2001-05-30 | 2005-10-25 | Cree, Inc. | Group III nitride based light emitting diode structures with a quantum well and superlattice, group III nitride based quantum well structures and group III nitride based superlattice structures |
US8704252B2 (en) * | 2008-10-23 | 2014-04-22 | Epistar Corporation | Light emitting device |
KR100993085B1 (ko) * | 2009-12-07 | 2010-11-08 | 엘지이노텍 주식회사 | 발광 소자, 발광 소자 패키지 및 라이트 유닛 |
US8536615B1 (en) | 2009-12-16 | 2013-09-17 | Cree, Inc. | Semiconductor device structures with modulated and delta doping and related methods |
US8604461B2 (en) | 2009-12-16 | 2013-12-10 | Cree, Inc. | Semiconductor device structures with modulated doping and related methods |
US8575592B2 (en) * | 2010-02-03 | 2013-11-05 | Cree, Inc. | Group III nitride based light emitting diode structures with multiple quantum well structures having varying well thicknesses |
US8451877B1 (en) * | 2010-03-23 | 2013-05-28 | Sandia Corporation | High efficiency III-nitride light-emitting diodes |
KR20120119449A (ko) * | 2011-04-21 | 2012-10-31 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 |
CN102368524A (zh) * | 2011-10-18 | 2012-03-07 | 中国科学院上海技术物理研究所 | 一种高效GaN基半导体发光二极管 |
CN104576856A (zh) * | 2015-01-30 | 2015-04-29 | 天津三安光电有限公司 | 带有掺杂的多层量子阱多元化合物半导体高效率发光组件 |
CN107809058B (zh) * | 2017-11-16 | 2020-09-04 | 太原理工大学 | 一种单片集成半导体随机激光器 |
WO2021056472A1 (zh) * | 2019-09-27 | 2021-04-01 | 中国科学技术大学 | 一种多量子阱结构、光电器件外延片及光电器件 |
Citations (2)
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JP2000133883A (ja) * | 1998-10-22 | 2000-05-12 | Nichia Chem Ind Ltd | 窒化物半導体素子 |
JP2003229645A (ja) * | 2002-01-31 | 2003-08-15 | Nec Corp | 量子井戸構造およびそれを用いた半導体素子ならびに半導体素子の製造方法 |
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US4980892A (en) * | 1989-05-30 | 1990-12-25 | At&T Bell Laboratories | Optical system including wavelength-tunable semiconductor laser |
EP0732754B1 (en) * | 1995-03-17 | 2007-10-31 | Toyoda Gosei Co., Ltd. | Light-emitting semiconductor device using group III nitride compound |
US6542526B1 (en) * | 1996-10-30 | 2003-04-01 | Hitachi, Ltd. | Optical information processor and semiconductor light emitting device suitable for the same |
JP4201862B2 (ja) * | 1997-02-27 | 2008-12-24 | シャープ株式会社 | 液晶表示装置 |
JP2003332694A (ja) * | 2002-05-17 | 2003-11-21 | Mitsubishi Electric Corp | 半導体レーザ |
JP4950219B2 (ja) * | 2006-12-05 | 2012-06-13 | シャープ株式会社 | 液晶表示装置 |
-
2008
- 2008-05-15 US US12/121,431 patent/US20090283746A1/en not_active Abandoned
-
2009
- 2009-05-08 JP JP2009113297A patent/JP2009278088A/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2000133883A (ja) * | 1998-10-22 | 2000-05-12 | Nichia Chem Ind Ltd | 窒化物半導体素子 |
JP2003229645A (ja) * | 2002-01-31 | 2003-08-15 | Nec Corp | 量子井戸構造およびそれを用いた半導体素子ならびに半導体素子の製造方法 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6438542B1 (ja) * | 2017-07-27 | 2018-12-12 | 日機装株式会社 | 半導体発光素子 |
WO2019021684A1 (ja) * | 2017-07-27 | 2019-01-31 | 日機装株式会社 | 半導体発光素子 |
JP2019029438A (ja) * | 2017-07-27 | 2019-02-21 | 日機装株式会社 | 半導体発光素子 |
TWI672829B (zh) * | 2017-07-27 | 2019-09-21 | 日商日機裝股份有限公司 | 半導體發光元件 |
CN110998876A (zh) * | 2017-07-27 | 2020-04-10 | 日机装株式会社 | 半导体发光元件 |
US11302845B2 (en) | 2017-07-27 | 2022-04-12 | Nikkiso Co., Ltd. | Semiconductor light-emitting element |
CN110998876B (zh) * | 2017-07-27 | 2023-04-18 | 日机装株式会社 | 半导体发光元件 |
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