JP2009276404A - Resist composition, resist pattern forming method, and novel compound - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a novel compound useful as a quencher component for a resist composition, the resist composition containing the compound as the quencher component, and a resist pattern forming method. <P>SOLUTION: This resist composition contains a base component A whose solubility to an alkali developer is changed by an action of an acid, an acid generator component B of generating an acid by light exposure, and the quencher component D. The quencher component D contains an onium salt D1 having no aromatic group in a cationic part, in the resist composition. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a resist composition, a method for forming a resist pattern using the resist composition, and a novel compound useful as a quencher for the resist composition.

In lithography technology, for example, a resist film made of a resist material is formed on a substrate, and the resist film is selectively exposed to radiation such as light or an electron beam through a mask on which a predetermined pattern is formed. And a development process is performed to form a resist pattern having a predetermined shape on the resist film. A resist material in which the exposed portion changes to a property that dissolves in the developer is referred to as a positive type, and a resist material that changes to a property in which the exposed portion does not dissolve in the developer is referred to as a negative type.
In recent years, in the manufacture of semiconductor elements and liquid crystal display elements, pattern miniaturization has rapidly progressed due to advances in lithography technology.
As a technique for miniaturization, the wavelength of an exposure light source is generally shortened. Specifically, conventionally, ultraviolet rays typified by g-line and i-line have been used, but at present, mass production of semiconductor elements using a KrF excimer laser or an ArF excimer laser has started. In addition, studies have been made on F ₂ excimer lasers, electron beams, EUV (extreme ultraviolet rays), X-rays, and the like having shorter wavelengths than these excimer lasers.

  Resist materials are required to have lithography characteristics such as sensitivity to these exposure light sources and resolution capable of reproducing a pattern with fine dimensions. As a resist material that satisfies such requirements, a chemically amplified resist containing a base resin whose solubility in an alkaline developer is changed by the action of an acid and an acid generator that generates an acid upon exposure is used. For example, a positive chemically amplified resist contains, as a base resin, a resin that increases solubility in an alkaline developer by the action of an acid and an acid generator. When the acid is generated, the exposed portion becomes soluble in the alkaline developer.

Up to now, as the base resin of chemically amplified resist, polyhydroxystyrene (PHS), which is highly transparent to KrF excimer laser (248 nm), and a resin whose hydroxyl group is protected with an acid dissociable, dissolution inhibiting group (PHS resin) Has been used. However, since the PHS resin has an aromatic ring such as a benzene ring, the transparency to light having a wavelength shorter than 248 nm, for example, 193 nm, is not sufficient. Therefore, a chemically amplified resist having a PHS-based resin as a base resin component has drawbacks such as low resolution in a process using 193 nm light, for example. Therefore, as a resist base resin currently used in ArF excimer laser lithography and the like, it has a structural unit generally derived from a (meth) acrylic acid ester in its main chain because of its excellent transparency near 193 nm. Resin (acrylic resin) is used. In the case of the positive type, the resin includes a structural unit derived from a (meth) acrylic acid ester containing a tertiary alkyl ester type acid dissociable, dissolution inhibiting group containing an aliphatic polycyclic group, for example, 2-alkyl. A resin having a structural unit derived from 2-adamantyl (meth) acrylate or the like is mainly used (for example, see Patent Document 1).
The “(meth) acrylic acid ester” means one or both of an acrylic acid ester having a hydrogen atom bonded to the α-position and a methacrylic acid ester having a methyl group bonded to the α-position. “(Meth) acrylate” means one or both of an acrylate having a hydrogen atom bonded to the α-position and a methacrylate having a methyl group bonded to the α-position. “(Meth) acrylic acid” means one or both of acrylic acid having a hydrogen atom bonded to the α-position and methacrylic acid having a methyl group bonded to the α-position.

Known acid generators used in chemically amplified resists include onium salt-based acid generators such as iodonium salts and sulfonium salts. Further, in order to form a fine pattern, it is necessary to control the diffusion length of the acid generated from the acid generator by exposure, and an organic amine is generally used as a quencher component therefor.
JP 2003-241385 A

However, these organic amines have uneven distribution in the resist film due to their polarizability, and the lithography properties are insufficient.
The present invention has been made in view of the above circumstances, and provides a novel compound useful as a quencher component for a resist composition, a resist composition containing the compound as a quencher component, and a resist pattern forming method The purpose is to do.

In order to achieve the above object, the present invention employs the following configuration.
That is, the first aspect of the present invention comprises a base material component (A) whose solubility in an alkaline developer is changed by the action of an acid, an acid generator component (B) that generates an acid upon exposure, and a quencher component ( A resist composition containing D), wherein the quencher component (D) contains an onium salt (D1) having no aromatic group in the cation portion.

  According to a second aspect of the present invention, there is provided a step of forming a resist film on a support using the resist composition of the first aspect, a step of exposing the resist film, and an alkali developing of the resist film to form a resist It is a resist pattern formation method including the process of forming a pattern.

  The third aspect of the present invention is a compound represented by the following general formula (d1-1) (hereinafter referred to as compound (d1-1)) and a compound represented by general formula (d1-2) (hereinafter referred to as “compound”). Compound (d1-2)).

［式（ｄ１−１）中、Ｒ^０は置換基を有してもよい炭素数１〜１２の炭化水素である。ただし、−ＳＯ_３ ⁻における硫黄原子に隣接する炭素原子にはフッ素原子が結合していない。Ｚ⁺は芳香族基を有さない脂肪族有機カチオンである。ｎは０または１である。］

[In the formula (d1-1), R ⁰ is a hydrocarbon having 1 to 12 carbon atoms which may have a substituent. However, the fluorine atom is not bonded to the carbon atom adjacent to the sulfur atom in —SO ₃ ^— . Z ⁺ is an aliphatic organic cation having no aromatic group. n is 0 or 1. ]

［式（ｄ１−２）中、Ｒ^０２は置換基を有してもよい炭素数１〜１２の炭化水素であり、Ｚ⁺は芳香族基を有さない脂肪族有機カチオンである。］

[In the formula (d1-2), R ⁰² is an optionally substituted hydrocarbon having 1 to 12 carbon atoms, and Z ⁺ is an aliphatic organic cation having no aromatic group. ]

In the present specification and claims, the “alkyl group” includes linear, branched and cyclic monovalent saturated hydrocarbon groups unless otherwise specified.
Further, the “alkylene group” includes linear, branched and cyclic divalent saturated hydrocarbon groups unless otherwise specified.
The “lower alkyl group” is an alkyl group having 1 to 5 carbon atoms.
The “halogenated alkyl group” is a group in which part or all of the hydrogen atoms of the alkyl group are substituted with a halogen atom, and examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.
“Aliphatic” is a relative concept with respect to aromatics, and is defined to mean groups, compounds, etc. that do not have aromaticity.
The “structural unit” means a monomer unit (monomer unit) constituting a polymer compound (polymer, copolymer).
“Exposure” is a concept including general irradiation of radiation.

  ADVANTAGE OF THE INVENTION According to this invention, the novel compound useful as a quencher for resist compositions, its manufacturing method, the resist composition which can form the resist pattern of a favorable shape, and exhibits the outstanding lithography characteristic, and this resist A resist pattern forming method using the composition can be provided.

≪Resist composition≫
The resist composition according to the first aspect of the present invention comprises a base component (A) whose solubility in an alkaline developer is changed by the action of an acid (hereinafter referred to as component (A)), an acid that generates an acid upon exposure. The generator component (B) (hereinafter referred to as the component (B)) and the quencher component (D), wherein the component (D) is an onium salt (D1) having no aromatic group in the cation moiety. Containing.
When a resist film formed using such a resist composition is selectively exposed at the time of resist pattern formation, an acid is generated from the component (B), and the acid has a solubility in the alkaline developer of the component (A). Change. As a result, while the solubility of the exposed portion of the resist film in the alkaline developer changes, the unexposed portion does not change the solubility in the alkaline developer. In the case of the negative type, the unexposed part is dissolved and removed, and a resist pattern is formed.
The resist composition of the present invention may be a negative resist composition or a positive resist composition.

<(A) component>
As the component (A), organic compounds that are usually used as base components for chemically amplified resists can be used alone or in combination of two or more.
Here, the “base material component” is an organic compound having a film forming ability, and an organic compound having a molecular weight of 500 or more is preferably used. When the molecular weight of the organic compound is 500 or more, the film-forming ability is improved and a nano-level resist pattern is easily formed.
The organic compound having a molecular weight of 500 or more is largely classified into a low molecular weight organic compound having a molecular weight of 500 to less than 2000 (hereinafter referred to as a low molecular compound) and a high molecular weight resin having a molecular weight of 2000 or more (polymer material). Separated. As the low molecular weight compound, a non-polymer is usually used. In the case of a resin (polymer, copolymer), a polystyrene-reduced mass average molecular weight by GPC (gel permeation chromatography) is used as the “molecular weight”. Hereinafter, the term “resin” refers to a resin having a molecular weight of 2000 or more.
As the component (A), a resin having an acid dissociable, dissolution inhibiting group and capable of changing alkali solubility by the action of acid can be used, and a low molecular weight material having alkali solubility changing by the action of acid can be used. You can also.

When the resist composition of the present invention is a negative resist composition, a base component that is soluble in an alkaline developer is used as the component (A), and a crosslinking agent is further added to the negative resist composition.
In such a negative resist composition, when an acid is generated from the component (B) by exposure, the acid acts to cause cross-linking between the base component and the cross-linking agent, resulting in poor solubility in an alkali developer. To do. Therefore, in the formation of the resist pattern, when the resist film obtained by coating the negative resist composition on the substrate is selectively exposed, the exposed portion turns into poorly soluble in an alkaline developer, while unexposed. Since the portion remains soluble in the alkali developer and does not change, a resist pattern can be formed by alkali development.
As the component (A) of the negative resist composition, a resin that is soluble in an alkali developer (hereinafter referred to as an alkali-soluble resin) is usually used.
As the alkali-soluble resin, a resin having a unit derived from at least one selected from α- (hydroxyalkyl) acrylic acid or a lower alkyl ester of α- (hydroxyalkyl) acrylic acid is a good resist with little swelling. A pattern can be formed, which is preferable. Note that α- (hydroxyalkyl) acrylic acid includes acrylic acid in which a hydrogen atom is bonded to the α-position carbon atom to which the carboxy group is bonded, and a hydroxyalkyl group (preferably having 1 carbon atom) in the α-position carbon atom. One or both of [alpha] -hydroxyalkylacrylic acids to which (5) hydroxyalkyl groups) are attached.
As the crosslinking agent, for example, it is usually preferable to use an amino crosslinking agent such as glycoluril having a methylol group or an alkoxymethyl group because a good resist pattern with less swelling can be formed. It is preferable that the compounding quantity of a crosslinking agent is 1-50 mass parts with respect to 100 mass parts of alkali-soluble resin.

  When the resist composition of the present invention is a positive resist composition, as the component (A), a base component having an acid dissociable, dissolution inhibiting group and increasing solubility in an alkali developer by the action of an acid is used. Used. The component (A) is hardly soluble in an alkali developer before exposure. When an acid is generated from the component (B) by exposure, the solubility in the alkali developer is increased by the action of the acid. Therefore, in the formation of the resist pattern, when the resist film obtained by applying the positive resist composition on the substrate is selectively exposed, the exposed portion changes from poorly soluble to soluble in an alkaline developer. On the other hand, since the unexposed portion remains hardly soluble in alkali and does not change, a resist pattern can be formed by alkali development.

In the resist composition of the present invention, the component (A) is preferably a base material component having an acid dissociable, dissolution inhibiting group and increasing the solubility in an alkali developer by the action of an acid. That is, the resist composition of the present invention is preferably a positive resist composition.
The component (A) is a resin component (A1) (hereinafter sometimes referred to as the component (A1)) having an acid dissociable, dissolution inhibiting group and increasing the solubility in an alkali developer by the action of an acid. Even a low molecular weight compound (A2) (hereinafter sometimes referred to as component (A2)) having an acid dissociable, dissolution inhibiting group and increasing the solubility in an alkali developer by the action of an acid. It may be a mixture thereof. Especially, it is preferable that this (A) component contains (A1) component.

[(A1) component]
As the component (A1), resin components (base resins) that are usually used as base components for chemically amplified resists can be used alone or in combination of two or more.
In the present invention, the component (A1) preferably contains a structural unit derived from an acrylate ester.
Here, in the present specification and claims, the “structural unit derived from an acrylate ester” means a structural unit formed by cleavage of an ethylenic double bond of an acrylate ester.
“Acrylic acid esters” include not only acrylic acid esters in which a hydrogen atom is bonded to the α-position carbon atom, but also those in which a substituent (an atom or group other than a hydrogen atom) is bonded to the α-position carbon atom. Include concepts. Examples of the substituent include a lower alkyl group and a halogenated lower alkyl group.
Note that the α position (α-position carbon atom) of a structural unit derived from an acrylate ester means a carbon atom to which a carbonyl group is bonded unless otherwise specified.
In the acrylate ester, as the lower alkyl group as a substituent at the α-position, specifically, methyl group, ethyl group, propyl group, isopropyl group, n-butyl group, isobutyl group, tert-butyl group, pentyl group, Examples include lower linear or branched alkyl groups such as isopentyl group and neopentyl group.
Specific examples of the halogenated lower alkyl group include groups in which part or all of the hydrogen atoms in the above-mentioned “lower alkyl group as a substituent at the α-position” are substituted with halogen atoms. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom, and a fluorine atom is particularly preferable.
In the present invention, the α-position of the acrylate ester is preferably a hydrogen atom, a lower alkyl group or a halogenated lower alkyl group, and is a hydrogen atom, a lower alkyl group or a fluorinated lower alkyl group. In view of industrial availability, a hydrogen atom or a methyl group is most preferable.

The component (A1) particularly preferably has a structural unit (a1) derived from an acrylate ester containing an acid dissociable, dissolution inhibiting group.
In addition to the structural unit (a1), the component (A1) preferably further has a structural unit (a2) derived from an acrylate ester containing a lactone-containing cyclic group.
The component (A1) is derived from an acrylate ester containing a polar group-containing aliphatic hydrocarbon group in addition to the structural unit (a1) or in addition to the structural units (a1) and (a2). It is preferable to have a structural unit (a3).

・ Structural unit (a1)
The acid dissociable, dissolution inhibiting group in the structural unit (a1) has an alkali dissolution inhibiting property that makes the entire component (A1) difficult to dissolve in an alkali developer before dissociation, and dissociates with an acid. This increases the solubility of the entire component in an alkaline developer, and those that have been proposed as acid dissociable, dissolution inhibiting groups for base resins for chemically amplified resists can be used. In general, a group that forms a cyclic or chain tertiary alkyl ester with a carboxy group in (meth) acrylic acid or the like; an acetal-type acid dissociable, dissolution inhibiting group such as an alkoxyalkyl group is widely known. .

Here, the “tertiary alkyl ester” is an ester formed by replacing a hydrogen atom of a carboxy group with a chain or cyclic alkyl group, and the carbonyloxy group (—C (O)). A structure in which the tertiary carbon atom of the chain or cyclic alkyl group is bonded to the terminal oxygen atom of -O-). In this tertiary alkyl ester, when an acid acts, a bond is cut between an oxygen atom and a tertiary carbon atom.
The chain or cyclic alkyl group may have a substituent.
Hereinafter, a group that is acid dissociable by constituting a carboxy group and a tertiary alkyl ester is referred to as a “tertiary alkyl ester type acid dissociable, dissolution inhibiting group” for convenience.
Examples of the tertiary alkyl ester type acid dissociable, dissolution inhibiting group include an aliphatic branched acid dissociable, dissolution inhibiting group and an acid dissociable, dissolution inhibiting group containing an aliphatic cyclic group.

“Aliphatic branched” means having a branched structure having no aromaticity.
The structure of the “aliphatic branched acid dissociable, dissolution inhibiting group” is not limited to a group consisting of carbon and hydrogen (hydrocarbon group), but is preferably a hydrocarbon group. The “hydrocarbon group” may be either saturated or unsaturated, but is usually preferably saturated.
As the aliphatic branched acid dissociable, dissolution inhibiting group, a tertiary alkyl group having 4 to 8 carbon atoms is preferable, and specific examples include a tert-butyl group, a tert-pentyl group, and a tert-heptyl group. .

The “aliphatic cyclic group” means a monocyclic group or a polycyclic group having no aromaticity.
The “aliphatic cyclic group” in the structural unit (a1) may or may not have a substituent. Examples of the substituent include a lower alkyl group having 1 to 5 carbon atoms, a fluorine atom, a fluorinated lower alkyl group having 1 to 5 carbon atoms substituted with a fluorine atom, and an oxygen atom (= O).
The basic ring structure excluding the substituent of the “aliphatic cyclic group” is not limited to a group consisting of carbon and hydrogen (hydrocarbon group), but is preferably a hydrocarbon group. The “hydrocarbon group” may be either saturated or unsaturated, but is usually preferably saturated. The “aliphatic cyclic group” is preferably a polycyclic group.
Examples of the aliphatic cyclic group include monocycloalkanes, bicycloalkanes, tricycloalkanes, tetracycloalkanes which may or may not be substituted with a lower alkyl group, a fluorine atom or a fluorinated alkyl group. And groups obtained by removing one or more hydrogen atoms from a polycycloalkane. More specific examples include monocycloalkanes such as cyclopentane and cyclohexane, and groups obtained by removing one or more hydrogen atoms from polycycloalkanes such as adamantane, norbornane, isobornane, tricyclodecane, and tetracyclododecane. .

  Examples of the acid dissociable, dissolution inhibiting group containing an aliphatic cyclic group include a group having a tertiary carbon atom on the ring skeleton of a cyclic alkyl group. Specifically, 2-methyl-2 -Adamantyl group, 2-ethyl-2-adamantyl group, etc. are mentioned. Alternatively, in the structural units represented by the following general formulas (a1 ″ -1) to (a1 ″ -6), an adamantyl group such as a group bonded to an oxygen atom of a carbonyloxy group (—C (O) —O—) An aliphatic cyclic group such as a cyclohexyl group, a cyclopentyl group, a norbornyl group, a tricyclodecanyl group, or a tetracyclododecanyl group, and a branched alkylene group having a tertiary carbon atom bonded thereto. Groups.

［式中、Ｒは水素原子、低級アルキル基またはハロゲン化低級アルキル基を示し；Ｒ^１５、Ｒ^１６はアルキル基（直鎖状、分岐鎖状のいずれでもよく、好ましくは炭素数１〜５である）を示す。］

[Wherein, R represents a hydrogen atom, a lower alkyl group or a halogenated lower alkyl group; R ¹⁵ and R ¹⁶ may be alkyl groups (both linear and branched, preferably 1 to 5 carbon atoms). Is). ]

  In the general formulas (a1 ″ -1) to (a1 ″ -6), the lower alkyl group or halogenated lower alkyl group of R is a lower alkyl group or halogenated lower alkyl which may be bonded to the α-position of the acrylate ester. It is the same as the alkyl group.

The “acetal-type acid dissociable, dissolution inhibiting group” is generally bonded to an oxygen atom by substituting a hydrogen atom at the terminal of an alkali-soluble group such as a carboxy group or a hydroxyl group. When an acid is generated by exposure, this acid acts to break the bond between the acetal acid dissociable, dissolution inhibiting group and the oxygen atom to which the acetal acid dissociable, dissolution inhibiting group is bonded.
Examples of the acetal type acid dissociable, dissolution inhibiting group include a group represented by the following general formula (p1).

［式中、Ｒ^１’，Ｒ^２’はそれぞれ独立して水素原子または低級アルキル基を表し、ｎは０〜３の整数を表し、Ｙは低級アルキル基または脂肪族環式基を表す。］

[Wherein, R ¹ ′ and R ² ′ each independently represents a hydrogen atom or a lower alkyl group, n represents an integer of 0 to 3, and Y represents a lower alkyl group or an aliphatic cyclic group. ]

In the above formula, n is preferably an integer of 0 to 2, more preferably 0 or 1, and most preferably 0.
Examples of the lower alkyl group for R ¹ ′ and R ² ′ include the same lower alkyl groups as those described above for R. A methyl group or an ethyl group is preferable, and a methyl group is most preferable.
In the present invention, it is preferable that at least one of R ¹ ′ and R ² ′ is a hydrogen atom. That is, the acid dissociable, dissolution inhibiting group (p1) is preferably a group represented by the following general formula (p1-1).

［式中、Ｒ^１’、ｎ、Ｙは上記と同様である。］

Wherein, ^{R 1} ', n, Y are as defined above. ]

Examples of the lower alkyl group for Y include the same lower alkyl groups as those described above for R.
The aliphatic cyclic group for Y can be appropriately selected from monocyclic or polycyclic aliphatic cyclic groups that have been proposed in a number of conventional ArF resists. For example, the above “aliphatic ring” Examples thereof are the same as those in the formula group.

  Examples of the acetal type acid dissociable, dissolution inhibiting group also include a group represented by the following general formula (p2).

［式中、Ｒ^１７、Ｒ^１８はそれぞれ独立して直鎖状もしくは分岐鎖状のアルキル基または水素原子であり、Ｒ^１９は直鎖状、分岐鎖状または環状のアルキル基である。または、Ｒ^１７およびＲ^１９がそれぞれ独立に直鎖状または分岐鎖状のアルキレン基であって、Ｒ^１７の末端とＲ^１９の末端とが結合して環を形成していてもよい。］

[Wherein, R ¹⁷ and R ¹⁸ each independently represent a linear or branched alkyl group or a hydrogen atom, and R ¹⁹ represents a linear, branched or cyclic alkyl group. Alternatively, R ¹⁷ and R ¹⁹ may be each independently a linear or branched alkylene group, and the end of R ^{17 and} the end of R ¹⁹ may be bonded to form a ring. ]

In R ¹⁷ and R ¹⁸ , the alkyl group preferably has 1 to 15 carbon atoms, may be linear or branched, and is preferably an ethyl group or a methyl group, and most preferably a methyl group.
In particular, it is preferable that one of R ¹⁷ and R ¹⁸ is a hydrogen atom and the other is a methyl group.
R ¹⁹ is a linear, branched or cyclic alkyl group, preferably having 1 to 15 carbon atoms, and may be any of linear, branched or cyclic.
When R ¹⁹ is linear or branched, it preferably has 1 to 5 carbon atoms, more preferably an ethyl group or a methyl group, and most preferably an ethyl group.
When R ¹⁹ is cyclic, it preferably has 4 to 15 carbon atoms, more preferably 4 to 12 carbon atoms, and most preferably 5 to 10 carbon atoms. Specifically, one or more polycycloalkanes such as monocycloalkane, bicycloalkane, tricycloalkane, and tetracycloalkane, which may or may not be substituted with a fluorine atom or a fluorinated alkyl group, are included. Examples include groups excluding hydrogen atoms. Specific examples thereof include monocycloalkanes such as cyclopentane and cyclohexane, and groups obtained by removing one or more hydrogen atoms from polycycloalkanes such as adamantane, norbornane, isobornane, tricyclodecane, and tetracyclododecane. Among them, a group obtained by removing one or more hydrogen atoms from adamantane is preferable.
In the above formula, R ¹⁷ and R ¹⁹ are each independently a linear or branched alkylene group (preferably an alkylene group having 1 to 5 carbon atoms), and the end of R ^{19 and} the end of R ¹⁷ And may be combined.
In this case, a cyclic group is formed by R ¹⁷ , R ¹⁹ , the oxygen atom to which R ¹⁹ is bonded, and the carbon atom to which the oxygen atom and R ¹⁷ are bonded. The cyclic group is preferably a 4-7 membered ring, and more preferably a 4-6 membered ring. Specific examples of the cyclic group include a tetrahydropyranyl group and a tetrahydrofuranyl group.

  As the structural unit (a1), one or more selected from the group consisting of structural units represented by the following general formula (a1-0-1) and structural units represented by the following general formula (a1-0-2): Is preferably used.

［式中、Ｒは水素原子、低級アルキル基またはハロゲン化低級アルキル基を示し；Ｘ^１は酸解離性溶解抑制基を示す。］

[Wherein, R represents a hydrogen atom, a lower alkyl group or a halogenated lower alkyl group; and X ¹ represents an acid dissociable, dissolution inhibiting group. ]

［式中、Ｒは水素原子、低級アルキル基またはハロゲン化低級アルキル基を示し；Ｘ^２は酸解離性溶解抑制基を示し；Ｙ^２は２価の連結基を示す。］

[Wherein, R represents a hydrogen atom, a lower alkyl group or a halogenated lower alkyl group; X ² represents an acid dissociable, dissolution inhibiting group; Y ² represents a divalent linking group. ]

In general formula (a1-0-1), the lower alkyl group or halogenated lower alkyl group for R is the same as the lower alkyl group or halogenated lower alkyl group that may be bonded to the α-position of the acrylate ester. .
X ¹ is not particularly limited as long as it is an acid dissociable, dissolution inhibiting group, and examples thereof include the above-described tertiary alkyl ester type acid dissociable, dissolution inhibiting group and acetal type acid dissociable, dissolution inhibiting group. And tertiary alkyl ester type acid dissociable, dissolution inhibiting groups are preferred.

In general formula (a1-0-2), R is the same as defined above.
X ² is the same as X ¹ in formula (a1-0-1).
Examples of the divalent linking group for Y ² include an alkylene group, a divalent aliphatic cyclic group, a divalent linking group containing a hetero atom, or a combination thereof.
As the aliphatic cyclic group, those similar to the description of the “aliphatic cyclic group” can be used except that a group in which two or more hydrogen atoms are removed is used.
When Y ² is an alkylene group, it is preferably 1 to 10 carbon atoms, more preferably 1 to 6 carbon atoms, particularly preferably 1 to 4 carbon atoms, and 1 to 3 carbon atoms. Most preferably it is.
When Y ² is a divalent aliphatic cyclic group, a group in which two or more hydrogen atoms have been removed from cyclopentane, cyclohexane, norbornane, isobornane, adamantane, tricyclodecane, or tetracyclododecane is particularly preferable. .

When Y ² is a divalent linking group containing a hetero atom, examples of the divalent linking group containing a hetero atom include —O—, —C (═O) —O—, —C (═O) —, -O-C (= O) -O -, - C (= O) -NH -, - NR 04 - (R 04 is an alkyl group, an acyl group, etc.), - NH-C (= O) -, = N _{-, - S -, - S} (= O) 2 -, - S (= O) 2 -O -, "- A-O (oxygen atom) -B- (However, A and B are each independently substituted A divalent hydrocarbon group which may have a group.

In —NR ⁰⁴ — of Y ² , R ⁰⁴ preferably has 1 to 10 carbon atoms, more preferably 1 to 8 carbon atoms, and particularly preferably 1 to 5 carbon atoms.
When Y ² is “A—O—B”, A and B are each independently a divalent hydrocarbon group which may have a substituent. The hydrocarbon group having “substituent” means that part or all of the hydrogen atoms in the hydrocarbon group are substituted with groups or atoms other than hydrogen atoms.

  The hydrocarbon group in A may be an aliphatic hydrocarbon group or an aromatic hydrocarbon group. An aliphatic hydrocarbon group means a hydrocarbon group having no aromaticity.

The aliphatic hydrocarbon group for A may be saturated or unsaturated, and is usually preferably saturated.
Specific examples of the aliphatic hydrocarbon group for A include a linear or branched aliphatic hydrocarbon group, and an aliphatic hydrocarbon group containing a ring in the structure.

The linear or branched aliphatic hydrocarbon group preferably has 1 to 10 carbon atoms, more preferably 1 to 8, still more preferably 2 to 5, and most preferably 2.
As the linear aliphatic hydrocarbon group, a linear alkylene group is preferable, and specifically, a methylene group, an ethylene group [— (CH ₂ ) ₂ —], a trimethylene group [— (CH ₂ ) ₃ -], Tetramethylene group [— (CH ₂ ) ₄ —], pentamethylene group [— (CH ₂ ) ₅ —] and the like.
As the branched aliphatic hydrocarbon group, a branched alkylene group is preferred, and specifically, —CH (CH ₃ ) —, —CH (CH ₂ CH ₃ ) —, —C (CH ₃ ). _{2 -, - C (CH 3} ) (CH 2 CH 3) -, - C (CH 3) (CH 2 CH 2 CH 3) -, - C (CH 2 CH 3) 2 - ; alkylethylene groups such as - _{CH (CH 3) CH 2 -} , - CH (CH 3) CH (CH 3) -, - C (CH 3) 2 CH 2 -, - CH (CH 2 CH 3) CH 2 -, - CH (CH 2 Alkylethylene groups such as CH ₃ ) CH ₂ —; alkyltrimethylene groups such as —CH (CH ₃ ) CH ₂ CH ₂ —, —CH ₂ CH (CH ₃ ) CH ₂ —; —CH (CH ₃ ) CH _{2 CH 2 CH 2 -, - CH} 2 CH (CH 3) CH 2 CH 2 - , etc. And alkyl alkylene groups such as Le Kill tetramethylene group. The alkyl group in the alkyl alkylene group is preferably a linear alkyl group having 1 to 5 carbon atoms.
The chain-like aliphatic hydrocarbon group may or may not have a substituent. Examples of the substituent include a fluorine atom, a fluorinated lower alkyl group having 1 to 5 carbon atoms substituted with a fluorine atom, an oxygen atom (═O), and the like.

Examples of the aliphatic hydrocarbon group including a ring in the structure include a cyclic aliphatic hydrocarbon group (a group obtained by removing two hydrogen atoms from an aliphatic hydrocarbon ring), and the cyclic aliphatic hydrocarbon group includes the chain described above. And a group that is bonded to the terminal of the chain-like aliphatic hydrocarbon group or intervenes in the middle of the chain-like aliphatic hydrocarbon group.
The cyclic aliphatic hydrocarbon group preferably has 3 to 20 carbon atoms, and more preferably 3 to 12 carbon atoms.
The cyclic aliphatic hydrocarbon group may be a polycyclic group or a monocyclic group. As the monocyclic group, a group in which two hydrogen atoms are removed from a monocycloalkane having 3 to 6 carbon atoms is preferable, and examples of the monocycloalkane include cyclopentane and cyclohexane.
As the polycyclic group, a group in which two hydrogen atoms have been removed from a polycycloalkane having 7 to 12 carbon atoms is preferable. Specific examples of the polycycloalkane include adamantane, norbornane, isobornane, tricyclodecane, tetra And cyclododecane.
The cyclic aliphatic hydrocarbon group may or may not have a substituent. Examples of the substituent include a lower alkyl group having 1 to 5 carbon atoms, a fluorine atom, a fluorinated lower alkyl group having 1 to 5 carbon atoms substituted with a fluorine atom, and an oxygen atom (= O).

  A is preferably a linear aliphatic hydrocarbon group, more preferably a linear alkylene group, still more preferably a linear alkylene group having 2 to 5 carbon atoms, and most preferably a methylene group or an ethylene group. .

Examples of the hydrocarbon group for B include the same divalent hydrocarbon groups as those described above for A.
B is preferably a linear or branched aliphatic hydrocarbon group, particularly preferably a methylene group or an alkylmethylene group.
The alkyl group in the alkylmethylene group is preferably a linear alkyl group having 1 to 5 carbon atoms, more preferably a linear alkyl group having 1 to 3 carbon atoms, and most preferably a methyl group.

The divalent linking group for Y ² is more preferably an alkylene group, a divalent aliphatic cyclic group, or a divalent linking group containing an alkylene group and a hetero atom, and a divalent linking group containing an alkylene group and a hetero atom. The group is particularly preferred.

  More specifically, examples of the structural unit (a1) include structural units represented by the following general formulas (a1-1) to (a1-4).

［式中、Ｘ’は第３級アルキルエステル型酸解離性溶解抑制基を表し、Ｙは炭素数１〜５の低級アルキル基、または脂肪族環式基を表し；ｎは０〜３の整数を表し；Ｙ^２はアルキレン基または脂肪族環式基を表し；Ｒは前記と同じであり、Ｒ^１’、Ｒ^２’はそれぞれ独立して水素原子または炭素数１〜５の低級アルキル基を表す。］

[Wherein, X ′ represents a tertiary alkyl ester type acid dissociable, dissolution inhibiting group, Y represents a lower alkyl group having 1 to 5 carbon atoms, or an aliphatic cyclic group; n represents an integer of 0 to 3] Y ² represents an alkylene group or an aliphatic cyclic group; R is the same as defined above, and R ¹ ′ and R ² ′ each independently represent a hydrogen atom or a lower alkyl group having 1 to 5 carbon atoms. To express. ]

Wherein, X 'include those of the same tertiary alkyl ester-type acid dissociable, dissolution inhibiting groups as those described above for X ^{1.
R 1 ', R 2',} n, as the Y, respectively, ^{R 1} in the general formula listed in the description of "acetal-type acid dissociable, dissolution inhibiting group" described above ^{(p1) ', R 2'} , n, Y The same thing is mentioned.
The Y ^2, the same groups as those described above for ^{Y 2} in the general formula (a1-0-2).

  Specific examples of the structural units represented by the general formulas (a1-1) to (a1-4) are shown below.

As the structural unit (a1), one type may be used alone, or two or more types may be used in combination.
Among these, the structural unit represented by general formula (a1-1) or (a1-3) is preferable, and specifically, the formula (a1-1-1) to (a1-1-7) and the formula (a1) -1-36) to (a1-1-42), formulas (a1-1-47) to (a1-1-48) and formulas (a1-3-57) to (a1-3-58) It is more preferable to use at least one selected from the group consisting of structural units.
Furthermore, as the structural unit (a1), in particular, the structural unit represented by the following general formula (a1-1-01) including the structural units represented by the formulas (a1-1-1) to (a1-1-5). Those represented by the following general formula (a1-1-02) including the structural units represented by the formulas (a1-1-36) to (a1-1-42), and the formula (a1-1 -47) to (a1-1-48) and those represented by the following general formula (a1-1-03) and the following general formula (a1-1-04). Those represented by the following general formula (a1-3-01) including the structural units represented by the formulas (a1-3-57) to (a1-3-58) and the following general formula (a1-3 -02), the following general formula (a1-3-0) including the structural units of formulas (a1-3-49) to (a1-3-52) ) In those represented, preferably also those represented by the formula (a1-3-53) ~ (following formula which includes the structural units a1-3-56) (a1-3-04).

［式（ａ１−１−０１）中、Ｒは水素原子、低級アルキル基またはハロゲン化低級アルキル基を示し、Ｒ^１１は低級アルキル基を示す。式（ａ１−１−０２）中、Ｒは前記と同じであり、Ｒ^１２は低級アルキル基を示し、ｈは１〜３の整数を表す。］

[In the formula (a1-1-01), R represents a hydrogen atom, a lower alkyl group or a halogenated lower alkyl group, and R ¹¹ represents a lower alkyl group. In formula (a1-1-02), R is the same as defined above, R ¹² represents a lower alkyl group, and h represents an integer of 1 to 3. ]

In general formula (a1-1-01), R is the same as defined above.
The lower alkyl group for R ^{11 is the same as} the lower alkyl group for R, preferably a methyl group or an ethyl group, and most preferably an ethyl group.
In general formula (a1-1-02), R is the same as defined above.
The lower alkyl group for R ^{12 is the same as} the lower alkyl group for R, preferably a methyl group or an ethyl group, and most preferably an ethyl group. h is preferably 1 or 2, and most preferably 2.

［式（ａ１−１−０３）中、Ｒは前記と同じであり、Ｒ^１３は炭素数３以上の分岐鎖状のアルキル基である。式（ａ１−１−０４）中、Ｒ、Ｒ^１３は式（ａ１−１−０３）におけるＲ、Ｒ^１３とそれぞれ同じであり、ｔは０〜３の整数である。］

[In formula (a1-1-03), R is the same as defined above, and R ¹³ represents a branched alkyl group having 3 or more carbon atoms. Wherein ^{(a1-1-04), R,} R ¹³ are the same each ^R, and ^{R 13} in formula (a1-1-03), t is an integer of 0 to 3. ]

In general formula (a1-1-03), R is the same as defined above.
R ¹³ is a branched alkyl group having 3 or more carbon atoms, preferably 3 to 10 carbon atoms, and more preferably 3 to 5 carbon atoms. Specific examples of R ¹³ include an isopropyl group, an isobutyl group, a tert-butyl group, an isopentyl group, a neopentyl group, and the like, and an isopropyl group is most preferable.
In general formula (a1-1-04), R and R ¹³ are the same as R and R ¹³ in general formula (a1-1-03), respectively.
t is an integer of 0 to 3, and 1 or 2 is preferable.

［式（ａ１−３−０１）中、Ｒは前記と同じであり、Ｒ^１４は低級アルキル基であり、ａは１〜１０の整数であり、ｂは１〜１０の整数である。式（ａ１−３−０２）中、Ｒ、Ｒ^１４、ａ、ｂは式（ａ１−３−０１）におけるＲ、Ｒ^１４、ａ、ｂとそれぞれ同じであり、ｔは０〜３の整数である。式（ａ１−３−０３）中、Ｒ、Ｒ^１４、ａ、ｂは式（ａ１−３−０１）におけるＲ、Ｒ^１４、ａ、ｂとそれぞれ同じである。式（ａ１−３−０４）中、Ｒ、Ｒ^１４、ａ、ｂ、ｔは式（ａ１−３−０２）におけるＲ、Ｒ^１４、ａ、ｂ、ｔとそれぞれ同じである。］

[In formula (a1-3-01), R is as defined above, R ¹⁴ is a lower alkyl group, a is an integer of 1 to 10, and b is an integer of 1 to 10. Wherein ^{(a1-3-02), R, R 14} , a, b is ^{R, R 14, a,} b and respectively the same in the formula (a1-3-01), t is an integer of 0 to 3 is there. Wherein ^{(a1-3-03), R, R 14} , a, b is ^{R, R 14, a,} b and respectively the same in the formula (a1-3-01). Wherein ^{(a1-3-04), R, R 14} , a, b, t is ^{R, R 14, a, b} , respectively and t same in formula (a1-3-02). ]

In general formula (a1-3-01) and general formula (a1-3-03), R is the same as described above.
The lower alkyl group for R ^{14 is the same as} the lower alkyl group for R, and is preferably a methyl group or an ethyl group, and more preferably a methyl group.
a is an integer of 1 to 10, an integer of 1 to 5 is preferable, and 1 or 2 is particularly preferable.
b is an integer of 1 to 10, an integer of 1 to 5 is preferable, and 1 or 2 is particularly preferable.

Formula (a1-3-02), in the general formula ^{(a1-3-04), R, R 14} , a, for b, ^R in the general formula ^{(a1-3-01), R 14, a} , b Are the same.
t is an integer of 0 to 3, and 1 or 2 is preferable.

As the structural unit (a1), one type may be used alone, or two or more types may be used in combination.
In the component (A1), the proportion of the structural unit (a1) is preferably 10 to 80 mol%, more preferably 20 to 70 mol%, and more preferably 25 to 50 mol% with respect to all the structural units constituting the component (A1). Is more preferable. By setting it to the lower limit value or more, a pattern can be easily obtained when the resist composition is used, and by setting it to the upper limit value or less, it is possible to balance with other structural units.

・ Structural unit (a2)
The structural unit (a2) is a structural unit derived from an acrylate ester containing a lactone-containing cyclic group.
Here, the lactone-containing cyclic group refers to a cyclic group containing one ring (lactone ring) containing an —O—C (O) — structure. The lactone ring is counted as the first ring, and when it is only the lactone ring, it is called a monocyclic group, and when it has another ring structure, it is called a polycyclic group regardless of the structure.
The lactone cyclic group of the structural unit (a2) has an affinity for a developer containing water or a polymer compound (A1) when the polymer compound (A1) is used for forming a resist film. It is effective in enhancing the sex.

As the structural unit (a2), any unit can be used without any particular limitation.
Specifically, examples of the lactone-containing monocyclic group include groups in which one hydrogen atom has been removed from γ-butyrolactone. Examples of the lactone-containing polycyclic group include groups in which one hydrogen atom has been removed from a bicycloalkane, tricycloalkane, or tetracycloalkane having a lactone ring.

  More specifically, examples of the structural unit (a2) include structural units represented by general formulas (a2-1) to (a2-5) shown below.

［式中、Ｒは水素原子、低級アルキル基またはハロゲン化低級アルキル基であり、Ｒ’は水素原子、低級アルキル基、炭素数１〜５のアルコキシ基または−ＣＯＯＲ”であり、前記Ｒ”は水素原子、または炭素数１〜１５の直鎖状、分岐鎖状もしくは環状のアルキル基であり、ｍは０または１の整数であり、Ａ”は酸素原子もしくは硫黄原子を含んでいてもよい炭素数１〜５のアルキレン基、酸素原子または硫黄原子である。］

[Wherein, R is a hydrogen atom, a lower alkyl group or a halogenated lower alkyl group, R ′ is a hydrogen atom, a lower alkyl group, an alkoxy group having 1 to 5 carbon atoms, or —COOR ″, and the above R ″ is A hydrogen atom or a linear, branched or cyclic alkyl group having 1 to 15 carbon atoms, m is an integer of 0 or 1, and A ″ is a carbon which may contain an oxygen atom or a sulfur atom. It is an alkylene group of formula 1 to 5, an oxygen atom or a sulfur atom.

R in the general formulas (a2-1) to (a2-5) is the same as R in the structural unit (a1).
Examples of the lower alkyl group for R ′ include the same as the lower alkyl group for R in the structural unit (a1).
When R ″ is a linear or branched alkyl group, it preferably has 1 to 10 carbon atoms, and more preferably 1 to 5 carbon atoms.
When R ″ is a cyclic alkyl group, it preferably has 3 to 15 carbon atoms, more preferably 4 to 12 carbon atoms, and most preferably 5 to 10 carbon atoms. Specifically, a fluorine atom or Groups in which one or more hydrogen atoms have been removed from a polycycloalkane such as monocycloalkane, bicycloalkane, tricycloalkane, and tetracycloalkane, which may or may not be substituted with a fluorinated alkyl group Specific examples include monocycloalkanes such as cyclopentane and cyclohexane, and groups obtained by removing one or more hydrogen atoms from polycycloalkanes such as adamantane, norbornane, isobornane, tricyclodecane, and tetracyclododecane. Is mentioned.
In general formulas (a2-1) to (a2-5), R ′ is preferably a hydrogen atom in view of industrial availability.
Specific examples of the alkylene group having 1 to 5 carbon atoms that may contain an oxygen atom or sulfur atom of A ″ include a methylene group, an ethylene group, an n-propylene group, an isopropylene group, —O—CH ₂ —. _{, -CH 2 -O-CH 2 -} , - S-CH 2 -, - CH 2 -S-CH 2 - , and the like.
Below, the specific structural unit of the said general formula (a2-1)-(a2-5) is illustrated.

  As the structural unit (a2), at least one selected from the group consisting of structural units represented by the general formulas (a2-1) to (a2-5) is preferable, and the general formulas (a2-1) to ( At least one selected from the group consisting of structural units represented by a2-3) is more preferred. Among them, chemical formulas (a2-1-1), (a2-1-2), (a2-2-1), (a2-2-2), (a2-2-9), (a2-2-10) ), (A2-3-1), (a2-3-2), (a2-3-9) and (a2-3-10), and at least one selected from the group consisting of structural units represented by preferable.

As the structural unit (a2), one type may be used alone, or two or more types may be used in combination.
In the component (A1), the proportion of the structural unit (a2) is preferably 5 to 60 mol%, more preferably 10 to 60 mol%, with respect to the total of all structural units constituting the component (A1). 60 mol% is more preferable. By setting it to the lower limit value or more, the effect of containing the structural unit (a2) can be sufficiently obtained, and by setting the upper limit value or less, it is possible to balance with other structural units.

・ Structural unit (a3)
The structural unit (a3) is a structural unit derived from an acrylate ester containing a polar group-containing aliphatic hydrocarbon group.
When the component (A1) has the structural unit (a3), the hydrophilicity of the component (A1) is increased, the affinity with the developer is increased, the alkali solubility in the exposed area is improved, and the resolution is improved. Contributes to improvement.
Examples of the polar group include a hydroxyl group, a cyano group, a carboxy group, and a hydroxyalkyl group in which a part of hydrogen atoms of an alkyl group is substituted with a fluorine atom. A hydroxyl group is particularly preferable.
Examples of the aliphatic hydrocarbon group include a linear or branched hydrocarbon group having 1 to 10 carbon atoms (preferably an alkylene group) and a polycyclic aliphatic hydrocarbon group (polycyclic group). It is done. As the polycyclic group, for example, a resin for a resist composition for ArF excimer laser can be appropriately selected from among many proposed ones. The polycyclic group preferably has 7 to 30 carbon atoms.
Among them, a structural unit derived from an acrylate ester containing an aliphatic polycyclic group containing a hydroxyalkyl group in which a part of hydrogen atoms of a hydroxyl group, a cyano group, a carboxy group, or an alkyl group is substituted with a fluorine atom Is more preferable. Examples of the polycyclic group include groups in which two or more hydrogen atoms have been removed from bicycloalkane, tricycloalkane, tetracycloalkane and the like. Specific examples include groups in which two or more hydrogen atoms have been removed from a polycycloalkane such as adamantane, norbornane, isobornane, tricyclodecane, and tetracyclododecane. Among these polycyclic groups, there are groups in which two or more hydrogen atoms have been removed from adamantane, groups in which two or more hydrogen atoms have been removed from norbornane, and groups in which two or more hydrogen atoms have been removed from tetracyclododecane. Industrially preferable.

  The structural unit (a3) is derived from a hydroxyethyl ester of acrylic acid when the hydrocarbon group in the polar group-containing aliphatic hydrocarbon group is a linear or branched hydrocarbon group having 1 to 10 carbon atoms. When the hydrocarbon group is a polycyclic group, a structural unit represented by the following formula (a3-1), a structural unit represented by (a3-2), (a3-3) ) Is preferable.

（式中、Ｒは前記と同じであり、ｊは１〜３の整数であり、ｋは１〜３の整数であり、ｔ’は１〜３の整数であり、ｌは１〜５の整数であり、ｓは１〜３の整数である。）

Wherein R is the same as above, j is an integer of 1 to 3, k is an integer of 1 to 3, t 'is an integer of 1 to 3, and l is an integer of 1 to 5. And s is an integer of 1 to 3.)

In formula (a3-1), j is preferably 1 or 2, and more preferably 1. When j is 2, it is preferable that the hydroxyl group is bonded to the 3rd and 5th positions of the adamantyl group. When j is 1, it is preferable that the hydroxyl group is bonded to the 3-position of the adamantyl group.
j is preferably 1, and a hydroxyl group bonded to the 3-position of the adamantyl group is particularly preferred.
In formula (a3-2), k is preferably 1. The cyano group is preferably bonded to the 5th or 6th position of the norbornyl group.
In formula (a3-3), t ′ is preferably 1. l is preferably 1. s is preferably 1. These preferably have a 2-norbornyl group or a 3-norbornyl group bonded to the terminal of the carboxy group of acrylic acid. The fluorinated alkyl alcohol is preferably bonded to the 5th or 6th position of the norbornyl group.

As the structural unit (a3), one type may be used alone, or two or more types may be used in combination.
In the component (A1), the proportion of the structural unit (a3) is preferably 5 to 50 mol%, more preferably 5 to 40 mol%, and more preferably 5 to 25 mol% with respect to all the structural units constituting the component (A1). Is more preferable. By setting it to the lower limit value or more, the effect of containing the structural unit (a3) is sufficiently obtained, and by setting the upper limit value or less, it is possible to balance with other structural units.

・ Structural unit (a4)
The component (A1) may contain other structural units (a4) other than the structural units (a1) to (a3) as long as the effects of the present invention are not impaired.
The structural unit (a4) is not particularly limited as long as it is another structural unit not classified into the above structural units (a1) to (a3), and for ArF excimer laser, for KrF excimer laser (preferably ArF excimer) A number of hitherto known materials can be used for resist resins such as lasers.
As the structural unit (a4), for example, a structural unit derived from an acrylate ester containing a non-acid-dissociable aliphatic polycyclic group is preferable. Examples of the polycyclic group include those exemplified in the case of the structural unit (a1), and for ArF excimer laser and KrF excimer laser (preferably for ArF excimer laser). A number of hitherto known materials can be used as the resin component of the resist composition.
In particular, at least one selected from a tricyclodecanyl group, an adamantyl group, a tetracyclododecanyl group, an isobornyl group, and a norbornyl group is preferable in terms of industrial availability. These polycyclic groups may have a linear or branched alkyl group having 1 to 5 carbon atoms as a substituent.
Specific examples of the structural unit (a4) include those represented by the following general formulas (a4-1) to (a4-5).

（式中、Ｒは前記と同じである。）

(In the formula, R is as defined above.)

  When the structural unit (a4) is contained in the component (A1), the proportion of the structural unit (a4) in the component (A1) is 1 to 30 with respect to the total of all the structural units constituting the component (A1). Mol% is preferable and 10 to 20 mol% is more preferable.

  In the present invention, the component (A1) preferably contains a copolymer having the structural units (a1), (a2) and (a3). Examples of the copolymer include copolymers composed of the structural units (a1), (a2) and (a3), copolymers composed of the structural units (a1), (a2), (a3) and (a4). Can be mentioned.

The component (A1) can be obtained by polymerizing a monomer for deriving each structural unit by a known radical polymerization using a radical polymerization initiator such as azobisisobutyronitrile (AIBN).
Further, for the component (A1), in the polymerization, a chain transfer agent such as HS—CH ₂ —CH ₂ —CH ₂ —C (CF ₃ ) ₂ —OH is used in combination, so that the terminal A —C (CF ₃ ) ₂ —OH group may be introduced into the. As described above, a copolymer introduced with a hydroxyalkyl group in which a part of hydrogen atoms of the alkyl group is substituted with a fluorine atom reduces development defects and LER (line edge roughness: uneven unevenness of line side walls). It is effective in reducing

The mass average molecular weight (Mw) (polystyrene conversion standard by gel permeation chromatography) of the component (A1) is not particularly limited, but is preferably 2000 to 50000, more preferably 3000 to 30000, and 5000 to 20000. Most preferred. When it is smaller than the upper limit of this range, it has sufficient solubility in a resist solvent to be used as a resist. When it is larger than the lower limit of this range, dry etching resistance and resist pattern cross-sectional shape are good.
Further, the dispersity (Mw / Mn) is preferably 1.0 to 5.0, more preferably 1.0 to 3.0, and most preferably 1.2 to 2.5. In addition, Mn shows a number average molecular weight.

[(A2) component]
As the component (A2), a low molecular compound having a molecular weight of 500 or more and less than 2000 and having an acid dissociable, dissolution inhibiting group and a hydrophilic group as exemplified in the description of the component (A1) above is preferable. Specifically, a compound in which a part of hydrogen atoms of a hydroxyl group of a compound having a plurality of phenol skeletons is substituted with the acid dissociable, dissolution inhibiting group can be mentioned.
The component (A2) is, for example, a part of the hydrogen atom of the hydroxyl group of a low molecular weight phenol compound known as a sensitizer in a non-chemically amplified g-line or i-line resist or a heat resistance improver. Those substituted with a soluble dissolution inhibiting group are preferred and can be arbitrarily used.
Examples of such low molecular weight phenol compounds include bis (4-hydroxyphenyl) methane, bis (2,3,4-trihydroxyphenyl) methane, 2- (4-hydroxyphenyl) -2- (4′-hydroxyphenyl). ) Propane, 2- (2,3,4-trihydroxyphenyl) -2- (2 ′, 3 ′, 4′-trihydroxyphenyl) propane, tris (4-hydroxyphenyl) methane, bis (4-hydroxy-) 3,5-dimethylphenyl) -2-hydroxyphenylmethane, bis (4-hydroxy-2,5-dimethylphenyl) -2-hydroxyphenylmethane, bis (4-hydroxy-3,5-dimethylphenyl) -3, 4-dihydroxyphenylmethane, bis (4-hydroxy-2,5-dimethylphenyl) -3,4-dihydroxyph Phenylmethane, bis (4-hydroxy-3-methylphenyl) -3,4-dihydroxyphenylmethane, bis (3-cyclohexyl-4-hydroxy-6-methylphenyl) -4-hydroxyphenylmethane, bis (3-cyclohexyl- 4-hydroxy-6-methylphenyl) -3,4-dihydroxyphenylmethane, 1- [1- (4-hydroxyphenyl) isopropyl] -4- [1,1-bis (4-hydroxyphenyl) ethyl] benzene, Examples include 2, 3, 4 nuclei of formalin condensates of phenols such as phenol, m-cresol, p-cresol or xylenol. Of course, it is not limited to these.
The acid dissociable, dissolution inhibiting group is not particularly limited, and examples thereof include those described above.

As the component (A), one type may be used alone, or two or more types may be used in combination.
In the resist composition of the present invention, the content of the component (A) may be adjusted according to the resist film thickness to be formed.

<(B) component>
(B) It does not specifically limit as a component, What has been proposed as an acid generator for chemical amplification type resists until now can be used. Examples of such acid generators include onium salt acid generators such as iodonium salts and sulfonium salts, oxime sulfonate acid generators, bisalkyl or bisarylsulfonyldiazomethanes, poly (bissulfonyl) diazomethanes, and the like. There are various known diazomethane acid generators, nitrobenzyl sulfonate acid generators, imino sulfonate acid generators, disulfone acid generators, and the like.

  As the onium salt acid generator, for example, a compound represented by the following general formula (b-1) or (b-2) can be used.

［式中、Ｒ^１”〜Ｒ^３”，Ｒ^５”〜Ｒ^６”は、それぞれ独立に、アリール基またはアルキル基を表し；式（ｂ−１）におけるＲ^１”〜Ｒ^３”のうち、いずれか２つが相互に結合して式中のイオウ原子と共に環を形成してもよく；Ｒ^４”は、置換基を有していても良いアルキル基、ハロゲン化アルキル基、アリール基、またはアルケニル基を表し；Ｒ^１”〜Ｒ^３”のうち少なくとも１つはアリール基を表し、Ｒ^５”〜Ｒ^６”のうち少なくとも１つはアリール基を表す。］

[Wherein, R ¹ ″ to R ³ ″ and R ⁵ ″ to R ⁶ ″ each independently represents an aryl group or an alkyl group; among R ¹ ″ to R ³ ″ in formula (b-1), Any two may be bonded to each other to form a ring together with the sulfur atom in the formula; R ⁴ ″ may be an alkyl group, a halogenated alkyl group, an aryl group or an alkenyl which may have a substituent; Represents at least one of R ¹ ″ to R ³ ″ represents an aryl group, and at least one of R ⁵ ″ to R ⁶ ″ represents an aryl group.]

In formula (b-1), R ¹ ″ to R ³ ″ each independently represents an aryl group or an alkyl group. In addition, any two of R ¹ ″ to R ³ ″ in formula (b-1) may be bonded to each other to form a ring together with the sulfur atom in the formula.
Further, at least one of R ¹ ″ to R ³ ″ represents an aryl group. Of R ¹ ″ to R ³ ″, two or more are preferably aryl groups, and most preferably all R ¹ ″ to R ³ ″ are aryl groups.

The aryl group for R ¹ ″ to R ³ ″ is not particularly limited, and is, for example, an aryl group having 6 to 20 carbon atoms, in which part or all of the hydrogen atoms are alkyl groups, alkoxy groups It may or may not be substituted with a group, a halogen atom, a hydroxyl group or the like.
The aryl group is preferably an aryl group having 6 to 10 carbon atoms because it can be synthesized at a low cost. Specific examples include a phenyl group and a naphthyl group.
The alkyl group that may be substituted for the hydrogen atom of the aryl group is preferably an alkyl group having 1 to 5 carbon atoms, and is a methyl group, an ethyl group, a propyl group, an n-butyl group, or a tert-butyl group. Is most preferred.
As the alkoxy group that may be substituted for the hydrogen atom of the aryl group, an alkoxy group having 1 to 5 carbon atoms is preferable, and a methoxy group, an ethoxy group, an n-propoxy group, an iso-propoxy group, an n-butoxy group, A tert-butoxy group is preferable, and a methoxy group and an ethoxy group are most preferable.
The halogen atom that may be substituted for the hydrogen atom of the aryl group is preferably a fluorine atom.

The alkyl group for R 1 ^{"~R 3",} is not particularly limited, for example, linear C1-10, branched or cyclic alkyl group, and the like. It is preferable that it is C1-C5 from the point which is excellent in resolution. Specific examples include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, an isobutyl group, an n-pentyl group, a cyclopentyl group, a hexyl group, a cyclohexyl group, a nonyl group, and a decanyl group. A methyl group is preferable because it is excellent in resolution and can be synthesized at low cost.

When any two of R ¹ ″ to R ³ ″ in formula (b-1) are bonded to each other to form a ring together with the sulfur atom in the formula, a 3 to 10 membered ring including the sulfur atom is formed. It is preferable that a 5- to 7-membered ring is formed.
When any two of R ¹ ″ to R ³ ″ in formula (b-1) are bonded to each other to form a ring together with the sulfur atom in the formula, the remaining one may be an aryl group preferable. Examples of the aryl group include the same aryl groups as those described above for R ¹ ″ to R ³ ″.

R 4 ^"is an optionally substituted alkyl group, a halogenated alkyl group, an aryl group or an alkenyl group.
The alkyl group for R ⁴ ″ may be linear, branched or cyclic.
The linear or branched alkyl group preferably has 1 to 10 carbon atoms, more preferably 1 to 8 carbon atoms, and most preferably 1 to 4 carbon atoms.
The cyclic alkyl group preferably has 4 to 15 carbon atoms, more preferably 4 to 10 carbon atoms, and most preferably 6 to 10 carbon atoms.

Examples of the halogenated alkyl group for R ⁴ ″ include groups in which part or all of the hydrogen atoms of the linear, branched or cyclic alkyl group have been substituted with halogen atoms. A fluorine atom, a chlorine atom, a bromine atom, an iodine atom, etc. are mentioned, A fluorine atom is preferable.
In the halogenated alkyl group, the ratio of the number of halogen atoms to the total number of halogen atoms and hydrogen atoms contained in the halogenated alkyl group (halogenation rate (%)) is preferably 10 to 100%. It is preferable that it is 50 to 100%, and 100% is the most preferable. The higher the halogenation rate, the more preferable the strength of the acid.

The aryl group for R ⁴ ″ is preferably an aryl group having 6 to 20 carbon atoms.
The alkenyl group in R ⁴ ″ is preferably an alkenyl group having 2 to 10 carbon atoms.

In the above R ⁴ ″, “optionally substituted” means one of hydrogen atoms in the linear, branched or cyclic alkyl group, halogenated alkyl group, aryl group, or alkenyl group. It means that part or all may be substituted with a substituent (an atom or group other than a hydrogen atom).
The number of substituents in R ⁴ ″ may be one or two or more.

Examples of the substituent include, for example, a halogen atom, a hetero atom, an alkyl group, a formula: XQ ^1- [wherein Q ¹ is a divalent linking group containing an oxygen atom, and X has a substituent. And a hydrocarbon group having 3 to 30 carbon atoms. ] Etc. which are represented by these.
Examples of the halogen atom and alkyl group are the same as those described as the halogen atom and alkyl group in the halogenated alkyl group in R ⁴ ″.
Examples of the hetero atom include an oxygen atom, a nitrogen atom, and a sulfur atom.

X-Q 1 ^- In the group represented by, Q ¹ represents a divalent linking group containing an oxygen atom.
Q ¹ may contain an atom other than an oxygen atom. Examples of atoms other than oxygen atoms include carbon atoms, hydrogen atoms, oxygen atoms, sulfur atoms, and nitrogen atoms.
Examples of the divalent linking group containing an oxygen atom include an oxygen atom (ether bond; —O—), an ester bond (—C (═O) —O—), and an amide bond (—C (═O) —NH. -), A carbonyl group (-C (= O)-), a non-hydrocarbon oxygen atom-containing linking group such as a carbonate bond (-O-C (= O) -O-); the non-hydrocarbon oxygen atom Examples include a combination of a containing linking group and an alkylene group.
Examples of the combination include —R ⁹¹ —O—, —R ⁹² —O—C (═O) —, —C (═O) —O—R ⁹³ —O—C (═O) — , R ^{91 to} R ⁹³ are each independently an alkylene group.) And the like.
The alkylene group for R ^{91 to} R ⁹³ is preferably a linear or branched alkylene group, and the alkylene group preferably has 1 to 12 carbon atoms, more preferably 1 to 5 carbon atoms, and particularly preferably 1 to 3 carbon atoms. preferable.
Specific examples of the alkylene group include a methylene group [—CH ₂ —]; —CH (CH ₃ ) —, —CH (CH ₂ CH ₃ ) —, —C (CH ₃ ) ₂ —, —C ( _{CH 3) (CH 2 CH 3} ) -, - C (CH 3) (CH 2 CH 2 CH 3) -, - C (CH 2 CH 3) 2 - ; alkylethylene groups such as ethylene group _[-CH 2 CH _2— ]; —CH (CH ₃ ) CH ₂ —, —CH (CH ₃ ) CH (CH ₃ ) —, —C (CH ₃ ) ₂ CH ₂ —, —CH (CH ₂ CH ₃ ) CH ₂ —, Alkylethylene groups such as —CH (CH ₂ CH ₃ ) CH ₂ —; trimethylene group (n-propylene group) [—CH ₂ CH ₂ CH ₂ —]; —CH (CH ₃ ) CH ₂ CH ₂ —, —CH _{2 CH (CH 3) CH 2} - alkyl trimethylene group and the like; Toramechiren group _{[-CH 2 CH 2 CH 2 CH} 2 -]; - CH (CH 3) CH 2 CH 2 CH 2 -, - CH 2 CH (CH 3) CH 2 CH 2 - alkyl tetramethylene group and the like; penta And methylene group [—CH ₂ CH ₂ CH ₂ CH ₂ CH ₂ —] and the like.
Q ¹ is preferably a divalent linking group containing an ester bond or an ether bond, and in particular, —R ⁹¹ —O—, —R ⁹² —O—C (═O) — or —C (═O) — O—R ⁹³ —O—C (═O) — is preferred.

In the group represented by XQ ^1- , the hydrocarbon group of X may be an aromatic hydrocarbon group or an aliphatic hydrocarbon group.
The aromatic hydrocarbon group is a hydrocarbon group having an aromatic ring. The aromatic hydrocarbon group preferably has 3 to 30 carbon atoms, more preferably 5 to 30, more preferably 5 to 20, still more preferably 6 to 15, and most preferably 6 to 12. However, the carbon number does not include the carbon number in the substituent.
Specific examples of the aromatic hydrocarbon group include a hydrogen atom from an aromatic hydrocarbon ring such as a phenyl group, a biphenyl group, a fluorenyl group, a naphthyl group, an anthryl group, and a phenanthryl group. Aryl groups such as aryl group, benzyl group, phenethyl group, 1-naphthylmethyl group, 2-naphthylmethyl group, 1-naphthylethyl group, 2-naphthylethyl group, etc., from which one is removed. The carbon number of the alkyl chain in the arylalkyl group is preferably 1 to 4, more preferably 1 to 2, and particularly preferably 1.
The aromatic hydrocarbon group may have a substituent. For example, a part of carbon atoms constituting the aromatic ring of the aromatic hydrocarbon group may be substituted with a hetero atom, and the hydrogen atom bonded to the aromatic ring of the aromatic hydrocarbon group is substituted with the substituent. May be.
Examples of the former include heteroaryl groups in which some of the carbon atoms constituting the ring of the aryl group are substituted with heteroatoms such as oxygen atoms, sulfur atoms, nitrogen atoms, and aromatic hydrocarbons in the arylalkyl groups. Examples include heteroarylalkyl groups in which some of the carbon atoms constituting the ring are substituted with the above heteroatoms.
Examples of the substituent of the aromatic hydrocarbon group in the latter example include an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, and an oxygen atom (═O).
The alkyl group as a substituent of the aromatic hydrocarbon group is preferably an alkyl group having 1 to 5 carbon atoms, and most preferably a methyl group, an ethyl group, a propyl group, an n-butyl group, or a tert-butyl group. preferable.
The alkoxy group as a substituent of the aromatic hydrocarbon group is preferably an alkoxy group having 1 to 5 carbon atoms, and is a methoxy group, ethoxy group, n-propoxy group, iso-propoxy group, n-butoxy group, tert- A butoxy group is preferable, and a methoxy group and an ethoxy group are most preferable.
Examples of the halogen atom as a substituent for the aromatic hydrocarbon group include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom, and a fluorine atom is preferable.
Examples of the halogenated alkyl group as the substituent of the aromatic hydrocarbon group include groups in which part or all of the hydrogen atoms of the alkyl group have been substituted with the halogen atoms.

The aliphatic hydrocarbon group for X may be a saturated aliphatic hydrocarbon group or an unsaturated aliphatic hydrocarbon group. The aliphatic hydrocarbon group may be linear, branched or cyclic.
In X, the aliphatic hydrocarbon group may have a part of the carbon atoms constituting the aliphatic hydrocarbon group substituted by a substituent containing a hetero atom, and the hydrogen atom constituting the aliphatic hydrocarbon group May be substituted with a substituent containing a hetero atom.
The “heteroatom” in X is not particularly limited as long as it is an atom other than a carbon atom and a hydrogen atom, and examples thereof include a halogen atom, an oxygen atom, a sulfur atom, and a nitrogen atom. Examples of the halogen atom include a fluorine atom, a chlorine atom, an iodine atom, and a bromine atom.
The substituent containing a hetero atom may be composed of only the hetero atom, or may be a group containing a group or atom other than the hetero atom.
Specific examples of the substituent for substituting a part of the carbon atom include —O—, —C (═O) —O—, —C (═O) —, —O—C (═O) —O. —, —C (═O) —NH—, —NH— (H may be substituted with a substituent such as an alkyl group, an acyl group, etc.), —S—, —S (═O) ₂ —, — S (= O) ₂ —O— and the like can be mentioned. When the aliphatic hydrocarbon group is cyclic, these substituents may be included in the ring structure.
Specific examples of the substituent that substitutes part or all of the hydrogen atoms include an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, an oxygen atom (═O), and a cyano group.
The alkoxy group is preferably an alkoxy group having 1 to 5 carbon atoms, preferably a methoxy group, an ethoxy group, an n-propoxy group, an iso-propoxy group, an n-butoxy group or a tert-butoxy group, and a methoxy group or an ethoxy group. Is most preferred.
As said halogen atom, a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, etc. are mentioned, A fluorine atom is preferable.
As the halogenated alkyl group, a part or all of hydrogen atoms of an alkyl group having 1 to 5 carbon atoms, such as a methyl group, an ethyl group, a propyl group, an n-butyl group, a tert-butyl group, etc. And a group substituted with a halogen atom.

Examples of the aliphatic hydrocarbon group include a linear or branched saturated hydrocarbon group, a linear or branched monovalent unsaturated hydrocarbon group, or a cyclic aliphatic hydrocarbon group (aliphatic ring). Formula group) is preferred.
The linear saturated hydrocarbon group (alkyl group) preferably has 1 to 20 carbon atoms, more preferably 1 to 15 carbon atoms, and most preferably 1 to 10 carbon atoms. Specifically, for example, methyl group, ethyl group, propyl group, butyl group, pentyl group, hexyl group, heptyl group, octyl group, nonyl group, decanyl group, undecyl group, dodecyl group, tridecyl group, isotridecyl group, tetradecyl group Group, pentadecyl group, hexadecyl group, isohexadecyl group, heptadecyl group, octadecyl group, nonadecyl group, icosyl group, heicosyl group, docosyl group and the like.
The branched saturated hydrocarbon group (alkyl group) preferably has 3 to 20 carbon atoms, more preferably 3 to 15 carbon atoms, and most preferably 3 to 10 carbon atoms. Specifically, for example, 1-methylethyl group, 1-methylpropyl group, 2-methylpropyl group, 1-methylbutyl group, 2-methylbutyl group, 3-methylbutyl group, 1-ethylbutyl group, 2-ethylbutyl group, Examples include 1-methylpentyl group, 2-methylpentyl group, 3-methylpentyl group, 4-methylpentyl group and the like.

As an unsaturated hydrocarbon group, it is preferable that carbon number is 2-10, 2-5 are preferable, 2-4 are preferable, and 3 is especially preferable. Examples of the linear monovalent unsaturated hydrocarbon group include a vinyl group, a propenyl group (allyl group), and a butynyl group. Examples of the branched monovalent unsaturated hydrocarbon group include a 1-methylpropenyl group and a 2-methylpropenyl group.
Among the above, the unsaturated hydrocarbon group is particularly preferably a propenyl group.

The aliphatic cyclic group may be a monocyclic group or a polycyclic group. The number of carbon atoms is preferably 3 to 30, more preferably 5 to 30, further preferably 5 to 20, particularly preferably 6 to 15, and most preferably 6 to 12.
Specifically, for example, a group in which one or more hydrogen atoms are removed from a monocycloalkane; a group in which one or more hydrogen atoms are removed from a polycycloalkane such as bicycloalkane, tricycloalkane, tetracycloalkane, etc. Can be mentioned. More specifically, a group in which one or more hydrogen atoms have been removed from a monocycloalkane such as cyclopentane or cyclohexane; one or more polycycloalkanes such as adamantane, norbornane, isobornane, tricyclodecane, or tetracyclododecane. Examples include a group excluding a hydrogen atom.
When the aliphatic cyclic group does not contain a substituent containing a hetero atom in the ring structure, the aliphatic cyclic group is preferably a polycyclic group, and has one or more hydrogen atoms from the polycycloalkane. Excluded groups are preferred, and groups obtained by removing one or more hydrogen atoms from adamantane are most preferred.
When the aliphatic cyclic group includes a substituent containing a hetero atom in the ring structure, examples of the substituent containing a hetero atom include —O—, —C (═O) —O—, —S—. , —S (═O) ₂ — and —S (═O) ₂ —O— are preferable. Specific examples of the aliphatic cyclic group include the following formulas (L1) to (L5), (S1) to (S4), and the like.

［式中、Ｑ”は炭素数１〜５のアルキレン基、−Ｏ−、−Ｓ−、−Ｏ−Ｒ^９４−または−Ｓ−Ｒ^９５−であり、Ｒ^９４およびＲ^９５はそれぞれ独立に炭素数１〜５のアルキレン基であり、ｍは０または１の整数である。］

[Wherein, Q ″ is an alkylene group having 1 to 5 carbon atoms, —O—, —S—, —O—R ⁹⁴ — or —S—R ⁹⁵ —, and R ⁹⁴ and R ⁹⁵ are each independently carbon. An alkylene group of 1 to 5 and m is an integer of 0 or 1.]

In the formula, examples of the alkylene group for Q ″, R ⁹⁴ and R ⁹⁵ include the same alkylene groups as those described above for R ^{91 to} R ⁹³ .
In these aliphatic cyclic groups, a part of hydrogen atoms bonded to carbon atoms constituting the ring structure may be substituted with a substituent. Examples of the substituent include an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, and an oxygen atom (═O).
As said alkyl group, a C1-C5 alkyl group is preferable, and it is especially preferable that they are a methyl group, an ethyl group, a propyl group, n-butyl group, and a tert- butyl group.
Examples of the alkoxy group and the halogen atom are the same as those exemplified as the substituent for substituting part or all of the hydrogen atoms.

In the present invention, X is preferably a cyclic group which may have a substituent. The cyclic group may be an aromatic hydrocarbon group which may have a substituent, an aliphatic cyclic group which may have a substituent, or a substituent. It is preferably an aliphatic cyclic group that may be used.
The aromatic hydrocarbon group is preferably a naphthyl group which may have a substituent or a phenyl group which may have a substituent.
As the aliphatic cyclic group which may have a substituent, a polycyclic aliphatic cyclic group which may have a substituent is preferable. The polycyclic aliphatic cyclic group is preferably a group obtained by removing one or more hydrogen atoms from the polycycloalkane, the above (L2) to (L5), (S3) to (S4), and the like.

In the present invention, ^{R 4} ", ^{X-Q 1} - as a substituent preferably has the case, ^{R 4."} The, ^{X-Q 1} -Y 1 - in the Formula, ^{Q 1} and X are the And Y ¹ is an optionally substituted alkylene group having 1 to 4 carbon atoms or an optionally substituted fluorinated alkylene group having 1 to 4 carbon atoms. ] Is preferable.
In the group represented by XQ ¹ -Y ^1- , the alkylene group for Y ¹ includes the same alkylene groups as those described above for Q ¹ having 1 to 4 carbon atoms.
Examples of the fluorinated alkylene group include groups in which part or all of the hydrogen atoms of the alkylene group have been substituted with fluorine atoms.
As Y ^1, _{specifically, -CF 2 -, - CF 2} CF 2 -, - CF 2 CF 2 CF 2 -, - CF (CF 3) CF 2 -, - CF (CF 2 CF 3) -, _{-C (CF 3) 2 -,} - CF 2 CF 2 CF 2 CF 2 -, - CF (CF 3) CF 2 CF 2 -, - CF 2 CF (CF 3) CF 2 -, - CF (CF 3) CF (CF ₃ ) —, —C (CF ₃ ) ₂ CF ₂ —, —CF (CF ₂ CF ₃ ) CF ₂ —, —CF (CF ₂ CF ₂ CF ₃ ) —, —C (CF ₃ ) (CF _{2 CF 3) -; - CHF} -, - CH 2 CF 2 -, - CH 2 CH 2 CF 2 -, - CH 2 CF 2 CF 2 -, - CH (CF 3) CH 2 -, - CH (CF 2 _{CF 3) -, - C (} CH 3) (CF 3) -, - CH 2 CH 2 CH 2 CF 2 -, - C H ₂ CH ₂ CF ₂ CF ₂ —, —CH (CF ₃ ) CH ₂ CH ₂ —, —CH ₂ CH (CF ₃ ) CH ₂ —, —CH (CF ₃ ) CH (CF ₃ ) —, —C ( _{CF 3) 2 CH 2 -;} - CH 2 -, - CH 2 CH 2 -, - CH 2 CH 2 CH 2 -, - CH (CH 3) CH 2 -, - CH (CH 2 CH 3) -, - _{C (CH 3) 2 -,} - CH 2 CH 2 CH 2 CH 2 -, - CH (CH 3) CH 2 CH 2 -, - CH 2 CH (CH 3) CH 2 -, - CH (CH 3) CH _{(CH 3) -, - C} (CH 3) 2 CH 2 -, - CH (CH 2 CH 3) CH 2 -, - CH (CH 2 CH 2 CH 3) -, - C (CH 3) (CH 2 CH ₃ ) — and the like.

Y ¹ is preferably a fluorinated alkylene group, and particularly preferably a fluorinated alkylene group in which the carbon atom bonded to the adjacent sulfur atom is fluorinated. Examples of such fluorinated alkylene _{group, -CF 2 -, - CF 2} CF 2 -, - CF 2 CF 2 CF 2 -, - CF (CF 3) CF 2 -, - CF 2 CF 2 CF 2 CF 2 _{-, - CF (CF 3)} CF 2 CF 2 -, - CF 2 CF (CF 3) CF 2 -, - CF (CF 3) CF (CF 3) -, - C (CF 3) 2 CF 2 -, _{-CF (CF 2 CF 3) CF} 2 -; - CH 2 CF 2 -, - CH 2 CH 2 CF 2 -, - CH 2 CF 2 CF 2 -; - CH 2 CH 2 CH 2 CF 2 -, - CH ₂ CH ₂ CF ₂ CF ₂ —, —CH ₂ CF ₂ CF ₂ CF ₂ — and the like can be mentioned.
Of _{these, -CF 2 -, - CF 2} CF 2 -, - CF 2 CF 2 CF 2 -, or _CH 2 _CF 2 CF ₂ - is _{preferable, -CF 2 -, - CF 2} CF 2 - or -CF ₂ CF ₂ CF ₂ - is more preferable, -CF ₂ - is particularly preferred.

The alkylene group or fluorinated alkylene group may have a substituent. An alkylene group or a fluorinated alkylene group has a “substituent” means that part or all of the hydrogen atom or fluorine atom in the alkylene group or fluorinated alkylene group is substituted with an atom or group other than a hydrogen atom and a fluorine atom. Means that
Examples of the substituent that the alkylene group or fluorinated alkylene group may have include an alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, and a hydroxyl group.

In formula (b-2), R ⁵ ″ to R ⁶ ″ each independently represents an aryl group or an alkyl group. At least one of R ⁵ ″ to R ⁶ ″ represents an aryl group. All of R ⁵ ″ to R ⁶ ″ are preferably aryl groups.
As the aryl group for R ⁵ ″ to R ⁶ ″, the same as the aryl groups for R ¹ ″ to R ³ ″ can be used.
Examples of the alkyl group for R ⁵ ″ to R ⁶ ″ include the same as the alkyl group for R ¹ ″ to R ³ ″.
Among these, it is most preferable that all of R ⁵ ″ to R ⁶ ″ are phenyl groups.
"As ^{R 4} in the formula (b-1)" ^{R 4} in the In the formula (b-2) include the same as.

Specific examples of the onium salt acid generators represented by the formulas (b-1) and (b-2) include diphenyliodonium trifluoromethanesulfonate or nonafluorobutanesulfonate, bis (4-tert-butylphenyl) iodonium. Trifluoromethane sulfonate or nonafluorobutane sulfonate, triphenylsulfonium trifluoromethane sulfonate, its heptafluoropropane sulfonate or its nonafluorobutane sulfonate, tri (4-methylphenyl) sulfonium trifluoromethane sulfonate, its heptafluoropropane sulfonate or its Nonafluorobutanesulfonate, dimethyl (4-hydroxynaphthyl) sulfonium trifluoromethanesulfonate, its heptaful Lopropanesulfonate or its nonafluorobutanesulfonate, trifluoromethanesulfonate of monophenyldimethylsulfonium, its heptafluoropropanesulfonate or its nonafluorobutanesulfonate; trifluoromethanesulfonate of diphenylmonomethylsulfonium, its heptafluoropropanesulfonate or its nonafluorobutanesulfonate (4-methylphenyl) diphenylsulfonium trifluoromethanesulfonate, its heptafluoropropane sulfonate or its nonafluorobutane sulfonate, (4-methoxyphenyl) diphenylsulfonium trifluoromethanesulfonate, its heptafluoropropane sulfonate or its nonafluorobutane sulfonate , Trifluoromethanesulfonate of tri (4-tert-butyl) phenylsulfonium, its heptafluoropropanesulfonate or its nonafluorobutanesulfonate, trifluoromethanesulfonate of diphenyl (1- (4-methoxy) naphthyl) sulfonium, its heptafluoropropane Sulfonate or its nonafluorobutane sulfonate, di (1-naphthyl) phenyl sulphonium trifluoromethane sulphonate, its heptafluoropropane sulphonate or its nonafluorobutane sulphonate; 1-phenyltetrahydrothiophenium trifluoromethane sulphonate, its heptafluoropropane sulphonate Or nonafluorobutanesulfonate thereof; 1- (4-methylphenyl) ) Tetrahydrothiophenium trifluoromethanesulfonate, its heptafluoropropane sulfonate or its nonafluorobutane sulfonate; 1- (3,5-dimethyl-4-hydroxyphenyl) tetrahydrothiophenium trifluoromethanesulfonate, its heptafluoropropane sulfonate 1- (4-methoxynaphthalen-1-yl) tetrahydrothiophenium trifluoromethanesulfonate, its heptafluoropropanesulfonate or its nonafluorobutanesulfonate; 1- (4-ethoxynaphthalene-1- Yl) tetrahydrothiophenium trifluoromethanesulfonate, its heptafluoropropanesulfonate or its nonaflu 1- (4-n-butoxynaphthalen-1-yl) tetrahydrothiophenium trifluoromethanesulfonate, its heptafluoropropanesulfonate or its nonafluorobutanesulfonate; 1-phenyltetrahydrothiopyranium trifluoromethanesulfonate , Its heptafluoropropane sulfonate or its nonafluorobutane sulfonate; 1- (4-hydroxyphenyl) tetrahydrothiopyranium trifluoromethane sulfonate, its heptafluoropropane sulfonate or its nonafluorobutane sulfonate; 1- (3,5-dimethyl -4-Hydroxyphenyl) tetrahydrothiopyranium trifluoromethanesulfonate, its heptafluoropropanes Honeto or nonafluorobutanesulfonate; 1- (4-methylphenyl) trifluoromethanesulfonate tetrahydrothiophenium Pila chloride, heptafluoropropane sulfonate or its nonafluorobutane sulfonate, and the like.
Moreover, the onium salt which replaced the anion part of these onium salts with alkyl sulfonates, such as methanesulfonate, n-propanesulfonate, n-butanesulfonate, n-octanesulfonate, can also be used.
Moreover, the onium salt which replaced the anion part of these onium salts by the anion part represented by either of following formula (b1)-(b7) can also be used.

［式中、ｐは１〜３の整数であり、ｑ１〜ｑ２はそれぞれ独立に１〜５の整数であり、ｒ１は０〜３の整数であり、ｇは１〜２０の整数であり、Ｒ^７は置換基であり、ｎ１〜ｎ５はそれぞれ独立に０または１であり、ｖ１〜ｖ５はそれぞれ独立に０〜３の整数であり、ｗ１〜ｗ５はそれぞれ独立に０〜３の整数であり、Ｑ”は前記と同じである。］

[Wherein, p is an integer of 1 to 3, q1 to q2 are each independently an integer of 1 to 5, r1 is an integer of 0 to 3, g is an integer of 1 to 20, R ⁷ is a substituent, n1 to n5 are each independently 0 or 1, v1 to v5 are each independently an integer of 0 to 3, w1 to w5 are each independently an integer of 0 to 3, Q ″ is the same as above.]

Examples of the substituent for R ⁷ are the same as those described above as the substituent that the aliphatic hydrocarbon group may have and the substituent that the aromatic hydrocarbon group may have in X. Can be mentioned.
Code (r1, w1 to w5) attached to R ⁷ when is an integer of 2 or more, a plurality of the R ⁷ groups may be the same, respectively, it may be different.

  Moreover, as an onium salt type | system | group acid generator, in the said general formula (b-1) or (b-2), an anion part is represented by the following general formula (b-3) or (b-4). An onium salt-based acid generator replaced with can also be used (the cation moiety is the same as (b-1) or (b-2)).

［式中、Ｘ”は、少なくとも１つの水素原子がフッ素原子で置換された炭素数２〜６のアルキレン基を表し；Ｙ”、Ｚ”は、それぞれ独立に、少なくとも１つの水素原子がフッ素原子で置換された炭素数１〜１０のアルキル基を表す。］

[Wherein X ″ represents an alkylene group having 2 to 6 carbon atoms in which at least one hydrogen atom is substituted with a fluorine atom; Y ″ and Z ″ each independently represent at least one hydrogen atom as a fluorine atom; Represents an alkyl group having 1 to 10 carbon atoms and substituted with

X ″ is a linear or branched alkylene group in which at least one hydrogen atom is substituted with a fluorine atom, and the alkylene group has 2 to 6 carbon atoms, preferably 3 to 5 carbon atoms, Most preferably, it has 3 carbon atoms.
Y ″ and Z ″ are each independently a linear or branched alkyl group in which at least one hydrogen atom is substituted with a fluorine atom, and the alkyl group has 1 to 10 carbon atoms, Has 1 to 7 carbon atoms, more preferably 1 to 3 carbon atoms.
The carbon number of the alkylene group of X ″ or the carbon number of the alkyl group of Y ″ and Z ″ is preferably as small as possible because the solubility in the resist solvent is good within the above carbon number range.
In addition, in the alkylene group of X ″ or the alkyl group of Y ″ and Z ″, the strength of the acid increases as the number of hydrogen atoms substituted with fluorine atoms increases, and high-energy light or electron beam of 200 nm or less The ratio of fluorine atoms in the alkylene group or alkyl group, that is, the fluorination rate is preferably 70 to 100%, more preferably 90 to 100%, and most preferably all. Are a perfluoroalkylene group or a perfluoroalkyl group in which a hydrogen atom is substituted with a fluorine atom.

  Moreover, the sulfonium salt which has a cation part represented by the following general formula (b-5) or (b-6) can also be used as an onium salt type | system | group acid generator.

［式中、Ｒ^４１〜Ｒ^４６はそれぞれ独立してアルキル基、アセチル基、アルコキシ基、カルボキシ基、水酸基またはヒドロキシアルキル基であり；ｎ_１〜ｎ_５はそれぞれ独立して０〜３の整数であり、ｎ_６は０〜２の整数である。］

[Wherein R ^{41 to} R ⁴⁶ are each independently an alkyl group, acetyl group, alkoxy group, carboxy group, hydroxyl group or hydroxyalkyl group; n _{1 to} n ₅ are each independently an integer of 0 to 3; There, _{n 6} is an integer of 0-2. ]

In R ^{41 to} R ⁴⁶ , the alkyl group is preferably an alkyl group having 1 to 5 carbon atoms, more preferably a linear or branched alkyl group, and a methyl group, an ethyl group, a propyl group, an isopropyl group, n A butyl group or a tert-butyl group is particularly preferable.
The alkoxy group is preferably an alkoxy group having 1 to 5 carbon atoms, more preferably a linear or branched alkoxy group, and particularly preferably a methoxy group or an ethoxy group.
The hydroxyalkyl group is preferably a group in which one or more hydrogen atoms in the alkyl group are substituted with a hydroxy group, and examples thereof include a hydroxymethyl group, a hydroxyethyl group, and a hydroxypropyl group.
When the symbols n _{1 to} n ₆ attached to R ^{41 to} R ⁴⁶ are integers of 2 or more, the plurality of R ^{41 to} R ⁴⁶ may be the same or different.
n ₁ is preferably 0 to 2, more preferably 0 or 1, and still more preferably 0.
n ₂ and n ₃ are preferably each independently 0 or 1, more preferably 0.
n ₄ is preferably 0 to 2, more preferably 0 or 1.
n ₅ is preferably 0 or 1, more preferably 0.
n ₆ is preferably 0 or 1, more preferably 1.

The anion part of the sulfonium salt having a cation part represented by the formula (b-5) or (b-6) is not particularly limited, and is the same as the anion part of the onium salt acid generators proposed so far. It may be a thing. Examples of the anion moiety include fluorinated alkyl sulfonate ions such as the anion moiety (R ^{4 ″} SO ₃ ⁻ ) of the onium salt acid generator represented by the general formula (b-1) or (b-2). The anion part represented by the general formula (b-3) or (b-4) may be used.

  In this specification, the oxime sulfonate acid generator is a compound having at least one group represented by the following general formula (B-1), and has a property of generating an acid upon irradiation with radiation. is there. Such oxime sulfonate-based acid generators are frequently used for chemically amplified resist compositions, and can be arbitrarily selected and used.

（式（Ｂ−１）中、Ｒ^３１、Ｒ^３２はそれぞれ独立に有機基を表す。）

(In formula (B-1), R ³¹ and R ³² each independently represents an organic group.)

The organic groups of R ³¹ and R ³² are groups containing carbon atoms, and atoms other than carbon atoms (for example, hydrogen atoms, oxygen atoms, nitrogen atoms, sulfur atoms, halogen atoms (fluorine atoms, chlorine atoms, etc.), etc.) You may have.
As the organic group for R ^31, a linear, branched, or cyclic alkyl group or aryl group is preferable. These alkyl groups and aryl groups may have a substituent. There is no restriction | limiting in particular as this substituent, For example, a fluorine atom, a C1-C6 linear, branched or cyclic alkyl group etc. are mentioned. Here, “having a substituent” means that part or all of the hydrogen atoms of the alkyl group or aryl group are substituted with a substituent.
As an alkyl group, C1-C20 is preferable, C1-C10 is more preferable, C1-C8 is more preferable, C1-C6 is especially preferable, and C1-C4 is the most preferable. As the alkyl group, a partially or completely halogenated alkyl group (hereinafter sometimes referred to as a halogenated alkyl group) is particularly preferable. The partially halogenated alkyl group means an alkyl group in which a part of hydrogen atoms is substituted with a halogen atom, and the fully halogenated alkyl group means that all of the hydrogen atoms are halogen atoms. Means an alkyl group substituted with Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom, and a fluorine atom is particularly preferable. That is, the halogenated alkyl group is preferably a fluorinated alkyl group.
The aryl group preferably has 4 to 20 carbon atoms, more preferably 4 to 10 carbon atoms, and most preferably 6 to 10 carbon atoms. As the aryl group, a partially or completely halogenated aryl group is particularly preferable. The partially halogenated aryl group means an aryl group in which a part of hydrogen atoms is substituted with a halogen atom, and the fully halogenated aryl group means that all of the hydrogen atoms are halogen atoms. Means an aryl group substituted with.
R ³¹ is particularly preferably an alkyl group having 1 to 4 carbon atoms or a fluorinated alkyl group having 1 to 4 carbon atoms which has no substituent.

As the organic group for R ^32, a linear, branched, or cyclic alkyl group, aryl group, or cyano group is preferable. As the alkyl group and aryl group for R ^32, the same alkyl groups and aryl groups as those described above for R ³¹ can be used.
R ³² is particularly preferably a cyano group, an alkyl group having 1 to 8 carbon atoms having no substituent, or a fluorinated alkyl group having 1 to 8 carbon atoms.

  More preferable examples of the oxime sulfonate-based acid generator include compounds represented by the following general formula (B-2) or (B-3).

［式（Ｂ−２）中、Ｒ^３３は、シアノ基、置換基を有さないアルキル基またはハロゲン化アルキル基である。Ｒ^３４はアリール基である。Ｒ^３５は置換基を有さないアルキル基またはハロゲン化アルキル基である。］

[In Formula (B-2), R ³³ represents a cyano group, an alkyl group having no substituent, or a halogenated alkyl group. R ³⁴ is an aryl group. R ³⁵ represents an alkyl group having no substituent or a halogenated alkyl group. ]

［式（Ｂ−３）中、Ｒ^３６はシアノ基、置換基を有さないアルキル基またはハロゲン化アルキル基である。Ｒ^３７は２または３価の芳香族炭化水素基である。Ｒ^３８は置換基を有さないアルキル基またはハロゲン化アルキル基である。ｐ”は２または３である。］

[In Formula (B-3), R ³⁶ represents a cyano group, an alkyl group having no substituent, or a halogenated alkyl group. R ³⁷ is a divalent or trivalent aromatic hydrocarbon group. ^R38 is an alkyl group having no substituent or a halogenated alkyl group. p ″ is 2 or 3.]

In the general formula (B-2), the alkyl group or halogenated alkyl group having no substituent of R ³³ preferably has 1 to 10 carbon atoms, more preferably 1 to 8 carbon atoms, and carbon atoms. Numbers 1 to 6 are most preferable.
R ³³ is preferably a halogenated alkyl group, more preferably a fluorinated alkyl group.
The fluorinated alkyl group for R ³³ is preferably such that the hydrogen atom of the alkyl group is 50% or more fluorinated, more preferably 70% or more fluorinated, and 90% or more fluorinated. Particularly preferred.

As the aryl group of R ³⁴ , one hydrogen atom is removed from an aromatic hydrocarbon ring such as a phenyl group, a biphenyl group, a fluorenyl group, a naphthyl group, an anthryl group, or a phenanthryl group. And a heteroaryl group in which a part of carbon atoms constituting the ring of these groups is substituted with a heteroatom such as an oxygen atom, a sulfur atom, or a nitrogen atom. Among these, a fluorenyl group is preferable.
The aryl group of R ³⁴ may have a substituent such as an alkyl group having 1 to 10 carbon atoms, a halogenated alkyl group, or an alkoxy group. The alkyl group or halogenated alkyl group in the substituent preferably has 1 to 8 carbon atoms, and more preferably 1 to 4 carbon atoms. The halogenated alkyl group is preferably a fluorinated alkyl group.

The alkyl group or halogenated alkyl group having no substituent for R ³⁵ preferably has 1 to 10 carbon atoms, more preferably 1 to 8 carbon atoms, and most preferably 1 to 6 carbon atoms.
R ³⁵ is preferably a halogenated alkyl group, more preferably a fluorinated alkyl group.
The fluorinated alkyl group for R ³⁵ is preferably such that the hydrogen atom of the alkyl group is 50% or more fluorinated, more preferably 70% or more fluorinated, and 90% or more fluorinated. Particularly preferred is the strength of the acid generated. Most preferably, it is a fully fluorinated alkyl group in which a hydrogen atom is 100% fluorine-substituted.

In the general formula (B-3), the alkyl group or halogenated alkyl group having no substituent for R ³⁶ is the same as the alkyl group or halogenated alkyl group having no substituent for R ^33. Is mentioned.
Examples of the divalent or trivalent aromatic hydrocarbon group for R ³⁷ include groups obtained by further removing one or two hydrogen atoms from the aryl group for R ³⁴ .
Examples of the alkyl group or halogenated alkyl group having no substituent of R ³⁸ include the same alkyl groups or halogenated alkyl groups as those having no substituent of R ³⁵ .
p ″ is preferably 2.

Specific examples of the oxime sulfonate acid generator include α- (p-toluenesulfonyloxyimino) -benzyl cyanide, α- (p-chlorobenzenesulfonyloxyimino) -benzyl cyanide, α- (4-nitrobenzenesulfonyloxy). Imino) -benzylcyanide, α- (4-nitro-2-trifluoromethylbenzenesulfonyloxyimino) -benzylcyanide, α- (benzenesulfonyloxyimino) -4-chlorobenzylcyanide, α- (benzenesulfonyl) Oxyimino) -2,4-dichlorobenzyl cyanide, α- (benzenesulfonyloxyimino) -2,6-dichlorobenzyl cyanide, α- (benzenesulfonyloxyimino) -4-methoxybenzyl cyanide, α- ( 2-Chlorobenzenesulfonyloxyimino) 4-methoxybenzylcyanide, α- (benzenesulfonyloxyimino) -thien-2-ylacetonitrile, α- (4-dodecylbenzenesulfonyloxyimino) -benzylcyanide, α-[(p-toluenesulfonyloxyimino) -4-methoxyphenyl] acetonitrile, α-[(dodecylbenzenesulfonyloxyimino) -4-methoxyphenyl] acetonitrile, α- (tosyloxyimino) -4-thienyl cyanide, α- (methylsulfonyloxyimino) -1-cyclo Pentenyl acetonitrile, α- (methylsulfonyloxyimino) -1-cyclohexenylacetonitrile, α- (methylsulfonyloxyimino) -1-cycloheptenylacetonitrile, α- (methylsulfonyloxyimino) -1-cyclooctene Acetonitrile, α- (trifluoromethylsulfonyloxyimino) -1-cyclopentenylacetonitrile, α- (trifluoromethylsulfonyloxyimino) -cyclohexylacetonitrile, α- (ethylsulfonyloxyimino) -ethylacetonitrile, α- (propyl Sulfonyloxyimino) -propylacetonitrile, α- (cyclohexylsulfonyloxyimino) -cyclopentylacetonitrile, α- (cyclohexylsulfonyloxyimino) -cyclohexylacetonitrile, α- (cyclohexylsulfonyloxyimino) -1-cyclopentenylacetonitrile, α- ( Ethylsulfonyloxyimino) -1-cyclopentenylacetonitrile, α- (isopropylsulfonyloxyimino) -1-cyclope N-tenyl acetonitrile, α- (n-butylsulfonyloxyimino) -1-cyclopentenylacetonitrile, α- (ethylsulfonyloxyimino) -1-cyclohexenylacetonitrile, α- (isopropylsulfonyloxyimino) -1-cyclohexenylacetonitrile , Α- (n-butylsulfonyloxyimino) -1-cyclohexenylacetonitrile, α- (methylsulfonyloxyimino) -phenylacetonitrile, α- (methylsulfonyloxyimino) -p-methoxyphenylacetonitrile, α- (trifluoro Methylsulfonyloxyimino) -phenylacetonitrile, α- (trifluoromethylsulfonyloxyimino) -p-methoxyphenylacetonitrile, α- (ethylsulfonyloxyimino) -p- Butoxy phenylacetonitrile, alpha-(propylsulfonyl oxyimino)-p-methylphenyl acetonitrile, alpha-like (methylsulfonyloxyimino)-p-bromophenyl acetonitrile.
Also, an oxime sulfonate-based acid generator disclosed in JP-A-9-208554 (paragraphs [0012] to [0014] [chemical formula 18] to [chemical formula 19]), WO 2004 / 074242A2 (pages 65 to 85). The oxime sulfonate acid generators disclosed in Examples 1 to 40) of No. 1 can also be suitably used.
Moreover, the following can be illustrated as a suitable thing.

Among diazomethane acid generators, specific examples of bisalkyl or bisarylsulfonyldiazomethanes include bis (isopropylsulfonyl) diazomethane, bis (p-toluenesulfonyl) diazomethane, bis (1,1-dimethylethylsulfonyl) diazomethane, Examples include bis (cyclohexylsulfonyl) diazomethane, bis (2,4-dimethylphenylsulfonyl) diazomethane, and the like.
Further, diazomethane acid generators disclosed in JP-A-11-035551, JP-A-11-035552, and JP-A-11-035573 can also be suitably used.
Examples of poly (bissulfonyl) diazomethanes include 1,3-bis (phenylsulfonyldiazomethylsulfonyl) propane and 1,4-bis (phenylsulfonyldiazo) disclosed in JP-A-11-322707. Methylsulfonyl) butane, 1,6-bis (phenylsulfonyldiazomethylsulfonyl) hexane, 1,10-bis (phenylsulfonyldiazomethylsulfonyl) decane, 1,2-bis (cyclohexylsulfonyldiazomethylsulfonyl) ethane, 1,3 -Bis (cyclohexylsulfonyldiazomethylsulfonyl) propane, 1,6-bis (cyclohexylsulfonyldiazomethylsulfonyl) hexane, 1,10-bis (cyclohexylsulfonyldiazomethylsulfonyl) decane, etc. Door can be.

(B) As a component, these acid generators may be used individually by 1 type, and may be used in combination of 2 or more type.
In the present invention, as the component (B), it is preferable to use an onium salt acid generator having an anion of a fluorinated alkyl sulfonate ion which may have a substituent.
The content of the component (B) in the positive resist composition of the present invention is preferably 0.5 to 50 parts by mass, more preferably 1 to 30 parts by mass, and 2 to 20 parts per 100 parts by mass of the component (A). Part by mass is most preferred. By setting it within the above range, pattern formation is sufficiently performed. Moreover, since a uniform solution is obtained and storage stability becomes favorable, it is preferable.

<(D) component>
The resist composition of the present invention further contains a quencher component (D) (hereinafter referred to as (D) component). The component (D) contains an onium salt (D1) (hereinafter referred to as the component (D1)) that does not have an aromatic group in the cation portion.
Here, as the component (D1), for example, a compound represented by the following general formula (d1-1) (hereinafter referred to as compound (d1-1)) and a general formula (d1-2) are used. Compound (hereinafter referred to as compound (d1-2)).

［式（ｄ１−１）中、Ｒ^０は置換基を有してもよい炭素数１〜１２の炭化水素である。ただし、−ＳＯ_３ ⁻における硫黄原子に隣接する炭素原子にはフッ素原子が結合していない。Ｚ⁺は芳香族基を有さない脂肪族有機カチオンである。ｎは０または１である。］

[In the formula (d1-1), R ⁰ is a hydrocarbon having 1 to 12 carbon atoms which may have a substituent. However, the fluorine atom is not bonded to the carbon atom adjacent to the sulfur atom in —SO ₃ ^— . Z ⁺ is an aliphatic organic cation having no aromatic group. n is 0 or 1. ]

［式（ｄ１−２）中、Ｒ^０２は置換基を有してもよい炭素数１〜１２の炭化水素であり、Ｚ⁺は芳香族基を有さない脂肪族有機カチオンである。］

[In the formula (d1-2), R ⁰² is an optionally substituted hydrocarbon having 1 to 12 carbon atoms, and Z ⁺ is an aliphatic organic cation having no aromatic group. ]

In the formula (d1-1), the hydrocarbon group for R ⁰ may or may not have a substituent.
However, the fluorine atom is not bonded to the carbon atom adjacent to the sulfur atom in —SO ₃ ^— .
The substituent preferably does not contain a fluorine atom, and examples thereof include a lower alkyl group having 1 to 5 carbon atoms and an oxygen atom (= O).

The hydrocarbon group having 1 to 12 carbon atoms in R ⁰ may be an aliphatic hydrocarbon group or an aromatic hydrocarbon group. By being a hydrocarbon group having 1 to 12 carbon atoms, the rectangularity of the resist pattern is improved.

When the hydrocarbon group in R ⁰ is an aliphatic hydrocarbon group, the aliphatic hydrocarbon group may be either saturated or unsaturated, and is usually preferably saturated.
In addition, the aliphatic hydrocarbon group may be a chain (straight chain or branched chain) or may be cyclic.
The chain hydrocarbon group is preferably a linear or branched alkyl group, and the alkyl group preferably has 1 to 10 carbon atoms, more preferably 1 to 8 carbon atoms. Preferably, it is 3-8.
Specific examples of linear or branched alkyl groups include methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, tert-butyl, pentyl, isopentyl, neopentyl. Group, n-hexyl group, n-heptyl group, n-octyl group and the like. Among these, a methyl group, an n-propyl group, an n-butyl group, and an n-octyl group are preferable, and an n-octyl group is particularly preferable.

Specific examples of the compound (d1-1) having a sulfonate ion in which R ⁰ is a linear or branched alkyl group as an anion part include, for example, the following onium cation as a cation part, and Examples of the anion moiety include onium salts having a sulfonate ion represented by the following general formula (d1-1-1).

  In said formula (d1-1-1), a is an integer of 1-10, Preferably it is an integer of 1-8. Specific examples of the sulfonate ion represented by the general formula (d1-1-1) include, for example, methanesulfonate ion, ethanesulfonate ion, n-propanesulfonate ion, n-butanesulfonate ion, n-octanesulfonate ion, and the like. Is mentioned.

In the hydrocarbon group of R ⁰ , the cyclic hydrocarbon group is an aliphatic cyclic group or a group in which at least one hydrogen atom of a chain hydrocarbon group is substituted with an aliphatic cyclic group (aliphatic ring). Formula group-containing group) and the like.
Examples of the “aliphatic cyclic group” include the same groups as those described as the “aliphatic cyclic group” in the acid dissociable, dissolution inhibiting group of the component (A), which has 3 to 12 carbon atoms. It is preferable that the number of carbon atoms is 4-10.
The aliphatic cyclic group may be a polycyclic group or a monocyclic group.
As the monocyclic group, a group in which one hydrogen atom is removed from a monocycloalkane having 3 to 6 carbon atoms is preferable, and examples thereof include a cyclopentyl group and a cyclohexyl group.
The polycyclic group preferably has 7 to 12 carbon atoms, and specifically includes an adamantyl group, norbornyl group, isobornyl group, tricyclodecanyl group, tetracyclododecanyl group and the like.
Among these, a polycyclic group is preferable, and an adamantyl group, a norbornyl group, and a tetracyclododecanyl group are preferable industrially. Further, as described above, these aliphatic cyclic groups may or may not have a substituent.
Examples of the aliphatic cyclic group in the “aliphatic cyclic group-containing group” include the same as those described above. In the “aliphatic cyclic group-containing group”, the linear hydrocarbon group to which the aliphatic cyclic group is bonded is preferably a linear or branched alkyl group, and a lower alkyl group having 1 to 5 carbon atoms. Preferred examples include a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, an isobutyl group, a tert-butyl group, a pentyl group, an isopentyl group, and a neopentyl group. Among these, a linear alkyl group Are preferred, and a methyl group or an ethyl group is preferred industrially.

Specific examples of the sulfonate ion in which R ⁰ is a cyclic hydrocarbon group include those represented by the following formulas (d1-1-2-1) to (d1-1-2-7).
In the present invention, the anion moiety of the compound (d1-1) is preferably an anion represented by the formula (d1-1-2-1) among these.

In the hydrocarbon group of R ⁰ , examples of the aromatic hydrocarbon group include a phenyl group, a tolyl group, a xylyl group, a mesityl group, a phenethyl group, and a naphthyl group. As described above, the aromatic hydrocarbon group may or may not have a substituent.
Specific examples of the case where R ⁰ is an aromatic hydrocarbon group include groups represented by the following formula (d1-1-3-1) or (d1-1-3-2).

In formula (d1-1-3-1), R ⁶¹ and R ⁶² are each independently an alkyl group having 1 to 5 carbon atoms or an alkoxy group having 1 to 5 carbon atoms.
^Examples of the alkyl group of R ⁶¹ and R ⁶² include a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, an isobutyl group, a tert-butyl group, a pentyl group, an isopentyl group, and a neopentyl group. A methyl group is preferred.
^Examples of the alkoxy group of R ⁶¹ and R ⁶² include a methoxy group, an ethoxy group, an n-propoxy group, an isopropoxy group, an n-butoxy group, a tert-butoxy group, and the like, and a methoxy group and an ethoxy group are particularly preferable.
d and e are each independently an integer of 0 to 4, preferably 0 to 2, and most preferably 0.
d and / or a e is 2 or more ^{integer, if R 61} and / or ^{R 62} there are a plurality, a plurality of ^{R 61} and / or ^{R 62} may be different may be the same as each other .

In formula (d1-1-3-2), R ⁶³ represents an alkyl group having 1 to 5 carbon atoms or an alkoxy group having 1 to 5 carbon atoms.
^Examples of the alkyl group of R ⁶³ include a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, an isobutyl group, a tert-butyl group, a pentyl group, an isopentyl group, and a neopentyl group. preferable.
^Examples of the alkoxy group for R ⁶³ include a methoxy group, an ethoxy group, an n-propoxy group, an isopropoxy group, an n-butoxy group, and a tert-butoxy group, and a methoxy group and an ethoxy group are particularly preferable.
f is an integer of 0 to 3, preferably 1 or 2, and most preferably 1.
A f is an integer of 2 or more, if R ⁶³ there are a plurality, a plurality of R ⁶³ may be different may be the same as each other.

In the present invention, Z ⁺ is an aliphatic organic cation having no aromatic group.
The aliphatic organic cation of Z ⁺ is not particularly limited as long as it does not have an aromatic group, and includes aliphatic tertiary sulfonium, aliphatic secondary iodonium, aliphatic quaternary ammonium, aliphatic quaternary phosphonium, An onium cation having an aliphatic alkyl group such as an aliphatic tertiary oxonium can be appropriately used.

  Examples of the alkyl group possessed by these onium cations include a linear, branched or cyclic alkyl group. Specific examples include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, an isobutyl group, an n-pentyl group, a cyclopentyl group, a hexyl group, a cyclohexyl group, a nonyl group, and a decanyl group. . Any two of these alkyl groups may be bonded to each other to form a ring together with the sulfur atom, iodine atom and the like in the formula. When forming a ring with a sulfur atom, it is preferable to form a 3-10 membered ring including a sulfur atom, and it is more preferable to form a 5-7 membered ring.

  Examples of the aliphatic tertiary sulfonium include trimethylsulfonium, triethylsulfonium, ethyldimethylsulfonium, diethylmethylsulfonium, tri-n-propylsulfonium, triisopropylsulfonium, tri-n-butylsulfonium and the like.

  Examples of the aliphatic secondary iodonium include dimethyl iodonium, diethyl iodonium, ethyl methyl iodonium, di-n-propyl iodonium, diisopropyl iodonium, di-n-butyl iodonium and the like.

  Examples of the aliphatic quaternary ammonium include trimethylethylammonium, triethylammonium, diethyldimethylammonium, triethylmethylammonium and the like.

  Aliphatic quaternary phosphoniums include tetramethylphosphonium, tetraethylphosphonium, tetrapropylphosphonium, tetrabutylphosphonium, methyltriethylphosphonium, methyltripropylphosphonium, methyltributylphosphonium, dimethyldiethylphosphonium, trimethylethylphosphonium, trimethylpropylphosphonium, ethyltrimethyl. Examples thereof include propylphosphonium, ethyltributylphosphonium, diethyldibutylphosphonium, triethylbutylphosphonium, propyltributylphosphonium, dipropyldibutylphosphonium, tripropylbutylphosphonium and the like.

  Examples of the aliphatic tertiary oxonium include trimethyloxonium, triethyloxonium, ethyldimethyloxonium, diethylmethyloxonium and the like.

  As the onium cation, aliphatic tertiary sulfonium or aliphatic secondary iodonium is preferable, and aliphatic tertiary sulfonium is more preferable. The alkyl group of the onium cation is preferably an alkyl group having 1 to 10 carbon atoms from the viewpoint of excellent transparency in the vicinity of 193 nm and excellent resolution when used in a resist composition. More preferably, it is a 1-5 linear alkyl group. Specific examples include a methyl group, an ethyl group, an n-propyl group, an n-butyl group, and an n-pentyl group, and an n-butyl group is most preferable.

In the formula (d1-2), the hydrocarbon group for R ⁰² may or may not have a substituent. Examples of the substituent include a lower alkyl group having 1 to 5 carbon atoms, an oxygen atom (= O), a halogen atom (a fluorine atom, a chlorine atom, a bromine atom, an iodine atom) and the like.
The hydrocarbon group having 1 to 12 carbon atoms in R ⁰² may be an aliphatic hydrocarbon group or an aromatic hydrocarbon group. By being a hydrocarbon group having 1 to 12 carbon atoms, the rectangularity of the resist pattern is improved.

When the hydrocarbon group in R ⁰² is an aliphatic hydrocarbon group, the aliphatic hydrocarbon group may be either saturated or unsaturated, and is usually preferably saturated.
In addition, the aliphatic hydrocarbon group may be a chain (straight chain or branched chain) or may be cyclic.
The chain hydrocarbon group is preferably a linear or branched alkyl group which may have a substituent, and the alkyl group preferably has 1 to 10 carbon atoms.
Specific examples of linear or branched alkyl groups include methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, tert-butyl, pentyl, isopentyl, neopentyl. Group, n-hexyl group, n-heptyl group, n-octyl group and the like. Among these, a methyl group, an n-propyl group, an n-butyl group, and an n-octyl group are preferable, and a methyl group and a trifluoromethyl group are particularly preferable.

In the hydrocarbon group of R ⁰² , the cyclic hydrocarbon group includes an aliphatic cyclic group and a group in which at least one hydrogen atom of a chain hydrocarbon group is substituted with an aliphatic cyclic group (aliphatic ring). Formula group-containing group) and the like.
Examples of the “aliphatic cyclic group” include the same groups as those described as the “aliphatic cyclic group” in the acid dissociable, dissolution inhibiting group of the component (A), which has 3 to 12 carbon atoms. It is preferable that the number of carbon atoms is 4-10.
The aliphatic cyclic group may be a polycyclic group or a monocyclic group.
As the monocyclic group, a group in which one hydrogen atom is removed from a monocycloalkane having 3 to 6 carbon atoms is preferable, and examples thereof include a cyclopentyl group and a cyclohexyl group.
The polycyclic group preferably has 7 to 12 carbon atoms, and specifically includes an adamantyl group, norbornyl group, isobornyl group, tricyclodecanyl group, tetracyclododecanyl group and the like.
Among these, a polycyclic group is preferable, and an adamantyl group, a norbornyl group, and a tetracyclododecanyl group are preferable industrially. Further, as described above, these aliphatic cyclic groups may or may not have a substituent.
Examples of the aliphatic cyclic group in the “aliphatic cyclic group-containing group” include the same as those described above. In the “aliphatic cyclic group-containing group”, the linear hydrocarbon group to which the aliphatic cyclic group is bonded is preferably a linear or branched alkyl group, and a lower alkyl group having 1 to 5 carbon atoms. Preferred examples include a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, an isobutyl group, a tert-butyl group, a pentyl group, an isopentyl group, and a neopentyl group. Among these, a linear alkyl group Are preferred, and a methyl group or an ethyl group is preferred industrially.

In the formula (d1-2), ^{Z +} of the organic cation is the same as the aliphatic organic cation has no aromatic group in ^{Z +} in formula (d1-1).

  Although it does not specifically limit as a manufacturing method of compound (d1-1) and (d1-2), For example, it represents with the following general formula (II) and the following compound (I-1) or compound (I-2). Can be produced by reacting the compound (II).

式（Ｉ−１）および（Ｉ−２）中、ｎ、Ｒ^０、Ｒ^０２は、それぞれ前記一般式（ｄ１−１）および（ｄ１−２）中のｎ、Ｒ^０、Ｒ^０２と同じである。

Wherein (I-1) and ^{(I-2), n,} R 0, R 02 is, ⁿ of each of the general formula (d1-1) and (d1-2) in the same as R ^{0, R 02} is there.

式(ＩＩ)中、Ｚ⁺は前記と同じであり、Ａ⁻は硫酸アルキルイオン、ハロゲンイオン等、化合物（Ｉ−１）および化合物（Ｉ−２）よりも酸性度が低い酸になりうるイオンである。

In the formula (II), Z ⁺ is the same as defined above, and A ⁻ is an ion that can be an acid having a lower acidity than the compound (I-1) or the compound (I-2), such as an alkyl sulfate ion or a halogen ion. It is.

A ^- The alkyl sulfate ions in, preferably ion having a linear alkyl group of 1 to 5 carbon atoms, and most preferably sulfate butyl ion.
A ^- Examples of the halogen ions in the bromine ion, a chlorine ion.
A ^- the ionic compound (I-1) and acidity than the compound (I-2) can become a low acid in include quaternary ammonium salts of carboxylic acids.
Compound (I-1) or compound (I-2) and compound (II) are, for example, these compounds are dissolved in a solvent such as water, dichloromethane, acetonitrile, methanol, chloroform, methylene chloride, and stirred. Etc. can be reacted.
The reaction temperature is preferably about 0 ° C to 150 ° C, more preferably about 0 ° C to 100 ° C. The reaction time varies depending on the reactivity, reaction temperature, etc. of compound (I-1) or compound (I-2) and compound (II), but usually 0.5 to 30 hours are preferable, and 1 to 20 hours Is more preferable.
The amount of compound (II) used in the above reaction is usually preferably about 0.5 to 2 mol with respect to 1 mol of compound (I-1) or compound (I-2).

The structure of the compound obtained as described above includes ¹ H-nuclear magnetic resonance (NMR) spectrum method, ¹³ C-NMR spectrum method, ¹⁹ F-NMR spectrum method, infrared absorption (IR) spectrum method, mass spectrometry (MS ) Method, elemental analysis method, X-ray crystal diffraction method, etc.

  The compound (d1-1) and the compound (d1-2) are novel compounds that can be used as a quencher, and can be blended in the resist composition as a quencher.

  The method for producing the compound (II) is not particularly limited. For example, the compound (II-a) represented by the following general formula (II-a) and dialkyl sulfate are mixed with a base and an organic solvent. A method including a step of obtaining compound (II) by reacting in the presence is preferably used.

In the general formula (II-a), examples of R ¹ ″ and R ² ″ include the same alkyl groups as the onium cation. In particular, a linear alkyl group having 1 to 5 carbon atoms is preferable. Specific examples include a methyl group, an ethyl group, an n-propyl group, an n-butyl group, an n-pentyl group, and the like, and an n-butyl group is most preferable.
As said dialkyl sulfate, what has a C1-C5 linear alkyl group is preferable, and dibutyl sulfate is the most preferable.
As compound (II-a) and dialkyl sulfate, commercially available compounds may be used or synthesized.

In the reaction of compound (II-a) with dialkyl sulfate, first, dialkyl sulfate and compound (II-a) are mixed and heated and stirred. After completion of the reaction, the reaction solution can be extracted and purified.
The reaction temperature is preferably about 20 ° C to 200 ° C, more preferably about 20 ° C to 150 ° C. The reaction time varies depending on the reactivity of the compound (II-a) and dialkyl sulfate, the reaction temperature, and the like, but is usually preferably 1 to 80 hours, more preferably 3 to 70 hours.

  Although the usage-amount of compound (II-a) in reaction is not specifically limited, Usually, about 1-20 mol is preferable with respect to 1 mol of dialkyl sulfates, About 1-10 mol is more preferable, About 1-5 mol Is most preferred.

The structure of the compound obtained as described above includes ¹ H-nuclear magnetic resonance (NMR) spectrum method, ¹³ C-NMR spectrum method, ¹⁹ F-NMR spectrum method, infrared absorption (IR) spectrum method, mass spectrometry (MS ) Method, elemental analysis method, X-ray crystal diffraction method, etc.

(D1) A component may be used individually by 1 type and may be used in combination of 2 or more type.
The content ratio of the component (D1) in the resist composition of the present invention is preferably in the range of 0.01 to 10 parts by mass, and 0.05 to 10 parts by mass with respect to 100 parts by mass of the component (A). Is more preferably in the range of 0.1 to 8 parts by mass, and most preferably in the range of 0.5 to 6 parts by mass. When it is at least the lower limit of the above range, the resist pattern shape becomes better and the lithography properties are further improved. Storage stability will become favorable as it is below the upper limit of the said range.

<(D2) component>
The resist composition of the present invention can further contain a nitrogen-containing organic compound (D2) (hereinafter, referred to as “component (D2)”) in order to improve the resist pattern shape, the stability over time, and the like.
Since a wide variety of components (D2) have already been proposed, any known one may be used. Among them, aliphatic amines, particularly secondary aliphatic amines and tertiary aliphatic amines are used. preferable. An aliphatic amine is an amine having one or more aliphatic groups, and the aliphatic groups preferably have 1 to 12 carbon atoms.
Examples of the aliphatic amine include an amine (alkyl amine or alkyl alcohol amine) or a cyclic amine in which at least one hydrogen atom of ammonia NH ₃ is substituted with an alkyl group or hydroxyalkyl group having 12 or less carbon atoms.
Specific examples of alkylamines and alkyl alcohol amines include monoalkylamines such as n-hexylamine, n-heptylamine, n-octylamine, n-nonylamine, n-decylamine; diethylamine, di-n-propylamine, di- -Dialkylamines such as n-heptylamine, di-n-octylamine, dicyclohexylamine; trimethylamine, triethylamine, tri-n-propylamine, tri-n-butylamine, tri-n-pentylamine, tri-n-hexylamine , Tri-n-heptylamine, tri-n-octylamine, tri-n-nonylamine, tri-n-decanylamine, tri-n-dodecylamine, and the like; diethanolamine, triethanolamine, diisopropanolamine Triisopropanolamine, di -n- octanol amines, alkyl alcohol amines tri -n- octanol amine. Among these, a trialkylamine in which 3 alkyl groups having 5 to 10 carbon atoms are bonded to a nitrogen atom is preferable, and tri-n-pentylamine is most preferable.
Examples of the cyclic amine include heterocyclic compounds containing a nitrogen atom as a hetero atom. The heterocyclic compound may be monocyclic (aliphatic monocyclic amine) or polycyclic (aliphatic polycyclic amine).
Specific examples of the aliphatic monocyclic amine include piperidine and piperazine.
As the aliphatic polycyclic amine, those having 6 to 10 carbon atoms are preferable. Specifically, 1,5-diazabicyclo [4.3.0] -5-nonene, 1,8-diazabicyclo [5. 4.0] -7-undecene, hexamethylenetetramine, 1,4-diazabicyclo [2.2.2] octane, and the like.
These may be used alone or in combination of two or more.
(D2) A component is normally used in 0.01-5.0 mass parts with respect to 100 mass parts of (A) component.

<Optional component>
[(E) component]
The resist composition of the present invention comprises, as optional components, an organic carboxylic acid, a phosphorus oxo acid, and derivatives thereof for the purpose of preventing sensitivity deterioration and improving the resist pattern shape, retention stability over time, and the like. At least one compound (E) selected from the group (hereinafter referred to as component (E)) can be contained.
As the organic carboxylic acid, for example, acetic acid, malonic acid, citric acid, malic acid, succinic acid, benzoic acid, salicylic acid and the like are suitable.
Examples of phosphorus oxo acids and derivatives thereof include phosphoric acid, phosphonic acid, phosphinic acid and the like, and among these, phosphonic acid is particularly preferable.
Examples of the oxo acid derivative of phosphorus include esters in which the hydrogen atom of the oxo acid is substituted with a hydrocarbon group, and the hydrocarbon group includes an alkyl group having 1 to 5 carbon atoms and 6 to 6 carbon atoms. 15 aryl groups and the like.
Examples of phosphoric acid derivatives include phosphoric acid esters such as di-n-butyl phosphate and diphenyl phosphate.
Examples of phosphonic acid derivatives include phosphonic acid esters such as phosphonic acid dimethyl ester, phosphonic acid-di-n-butyl ester, phenylphosphonic acid, phosphonic acid diphenyl ester, and phosphonic acid dibenzyl ester.
Examples of phosphinic acid derivatives include phosphinic acid esters such as phenylphosphinic acid.
(E) A component may be used individually by 1 type and may use 2 or more types together.
As the component (E), an organic carboxylic acid is preferable, and salicylic acid is particularly preferable.
(E) A component is used in the ratio of 0.01-5.0 mass parts per 100 mass parts of (A) component.

  The resist composition of the present invention may further contain, if desired, miscible additives such as an additional resin for improving the performance of the resist film, a surfactant for improving coatability, a dissolution inhibitor, Plasticizers, stabilizers, colorants, antihalation agents, dyes, and the like can be added and contained as appropriate.

[Organic solvent (S)]
The resist composition of the present invention can be produced by dissolving the material in an organic solvent (S) (hereinafter sometimes referred to as (S) component).
As the component (S), any component can be used as long as it can dissolve each component to be used to form a uniform solution. Conventionally, any one of known solvents for chemically amplified resists can be used. Two or more types can be appropriately selected and used.
For example, lactones such as γ-butyrolactone; ketones such as acetone, methyl ethyl ketone, cyclohexanone, methyl-n-pentyl ketone, methyl isopentyl ketone, and 2-heptanone; many such as ethylene glycol, diethylene glycol, propylene glycol, and dipropylene glycol Monohydric alcohols: compounds having an ester bond such as ethylene glycol monoacetate, diethylene glycol monoacetate, propylene glycol monoacetate or dipropylene glycol monoacetate, monomethyl ether, monoethyl of the polyhydric alcohols or the compound having an ester bond Ether alkyl such as ether, monopropyl ether, monobutyl ether or monophenyl ether Derivatives of polyhydric alcohols such as compounds having a propylene glycol monomethyl ether acetate (PGMEA) or propylene glycol monomethyl ether (PGME) among these]; cyclic ethers such as dioxane, methyl lactate, Esters such as ethyl lactate (EL), methyl acetate, ethyl acetate, butyl acetate, methyl pyruvate, ethyl pyruvate, methyl methoxypropionate, ethyl ethoxypropionate; anisole, ethyl benzyl ether, cresyl methyl ether, diphenyl ether, Aromatic organics such as dibenzyl ether, phenetol, butyl phenyl ether, ethylbenzene, diethylbenzene, pentylbenzene, isopropylbenzene, toluene, xylene, cymene, mesitylene A solvent etc. can be mentioned.
These organic solvents may be used independently and may be used as 2 or more types of mixed solvents.
Among these, propylene glycol monomethyl ether acetate (PGMEA), propylene glycol monomethyl ether (PGME), and EL are preferable.
Moreover, the mixed solvent which mixed PGMEA and the polar solvent is also preferable. The blending ratio (mass ratio) may be appropriately determined in consideration of the compatibility between PGMEA and the polar solvent, preferably 1: 9 to 9: 1, more preferably 2: 8 to 8: 2. It is preferable to be within the range.
More specifically, when EL is blended as a polar solvent, the mass ratio of PGMEA: EL is preferably 1: 9 to 9: 1, more preferably 2: 8 to 8: 2. Moreover, when mix | blending PGME as a polar solvent, the mass ratio of PGMEA: PGME becomes like this. Preferably it is 1: 9-9: 1, More preferably, it is 2: 8-8: 2, More preferably, it is 3: 7-7: 3.
In addition, as the component (S), a mixed solvent of at least one selected from PGMEA and EL and γ-butyrolactone is also preferable. In this case, the mixing ratio of the former and the latter is preferably 70:30 to 95: 5.
The amount of the component (S) used is not particularly limited, but is a concentration that can be applied to a substrate or the like, and is appropriately set according to the coating film thickness. In general, the solid content concentration of the resist composition is 2 -20% by mass, preferably 2-15% by mass.

≪Resist pattern formation method≫
The resist pattern forming method of the second aspect of the present invention includes a step of forming a resist film on a support using the resist composition of the first aspect of the present invention, a step of exposing the resist film, and the A step of forming a resist pattern by alkali developing the resist film.
The resist pattern forming method of the present invention can be performed, for example, as follows.
That is, first, the resist composition of the present invention is applied onto a support with a spinner or the like, and prebaked (post-apply bake (PAB)) for 40 to 120 seconds, preferably 60 to 150 ° C. under a temperature condition of 80 to 150 ° C. This is applied for 90 seconds, and this is selectively exposed to ArF excimer laser light through a desired mask pattern using, for example, an ArF exposure apparatus, and then subjected to PEB (post-exposure heating) at a temperature of 80 to 150 ° C. It is applied for 120 seconds, preferably 60 to 90 seconds. Subsequently, this is alkali-development-processed using an alkali developing solution, for example, 0.1-10 mass% tetramethylammonium hydroxide (TMAH) aqueous solution, Preferably, a water rinse is carried out using a pure water, and it dries. In some cases, a baking treatment (post-baking) may be performed after the alkali development treatment. In this way, a resist pattern faithful to the mask pattern can be obtained.

The support is not particularly limited, and a conventionally known one can be used, and examples thereof include a substrate for electronic components and a substrate on which a predetermined wiring pattern is formed. More specifically, a silicon substrate, a metal substrate such as copper, chromium, iron, and aluminum, a glass substrate, and the like can be given. As a material for the wiring pattern, for example, copper, aluminum, nickel, gold or the like can be used.
Further, the support may be a substrate in which an inorganic and / or organic film is provided on the above-described substrate. An inorganic antireflection film (inorganic BARC) is an example of the inorganic film. Examples of the organic film include an organic antireflection film (organic BARC).

The wavelength used for the exposure is not particularly limited, and ArF excimer laser, KrF excimer laser, F ₂ excimer laser, EUV (extreme ultraviolet), VUV (vacuum ultraviolet), EB (electron beam), X-ray, soft X-ray, etc. Can be done using radiation. The resist composition is effective for KrF excimer laser, ArF excimer laser, EB or EUV, and particularly effective for ArF excimer laser.

The exposure of the resist film may be normal exposure (dry exposure) performed in an inert gas such as air or nitrogen, or may be immersion exposure.
In immersion exposure, as described above, the portion between the lens, which has been filled with an inert gas such as air or nitrogen, and the resist film on the wafer at the time of exposure is refracted larger than the refractive index of air. The exposure is performed in a state filled with a solvent having a high rate (immersion medium).
More specifically, the immersion exposure is a solvent (immersion medium) having a refractive index larger than the refractive index of air between the resist film obtained as described above and the lowermost lens of the exposure apparatus. And in this state, exposure (immersion exposure) is performed through a desired mask pattern.
As the immersion medium, a solvent having a refractive index larger than the refractive index of air and smaller than the refractive index of the resist film exposed by the immersion exposure is preferable. The refractive index of such a solvent is not particularly limited as long as it is within the above range.
Examples of the solvent having a refractive index larger than the refractive index of air and smaller than the refractive index of the resist film include water, a fluorine-based inert liquid, a silicon-based solvent, and a hydrocarbon-based solvent.
Specific examples of the fluorinated inert liquid include fluorinated compounds such as C ₃ HCl ₂ F ₅ , C ₄ F ₉ OCH ₃ , C ₄ F ₉ OC ₂ H ₅ , and C ₅ H ₃ F ₇ as main components. Examples thereof include liquids, and those having a boiling point of 70 to 180 ° C are preferable, and those having a boiling point of 80 to 160 ° C are more preferable. It is preferable that the fluorine-based inert liquid has a boiling point in the above range since the medium used for immersion can be removed by a simple method after the exposure is completed.
As the fluorine-based inert liquid, a perfluoroalkyl compound in which all hydrogen atoms of the alkyl group are substituted with fluorine atoms is particularly preferable. Specific examples of the perfluoroalkyl compound include a perfluoroalkyl ether compound and a perfluoroalkylamine compound.
More specifically, examples of the perfluoroalkyl ether compound include perfluoro (2-butyl-tetrahydrofuran) (boiling point 102 ° C.). Examples of the perfluoroalkylamine compound include perfluorotributylamine ( Boiling point of 174 ° C.).

The resist composition of the present invention is a novel one that has not been conventionally known.
In addition, according to the resist composition of the present invention, lithography characteristics such as improvement in mask reproducibility when forming a resist pattern (for example, mask linearity and roundness of the hole when forming a hole pattern) are achieved. A good resist pattern can be formed. The reason is not clear, but is presumed as follows.
The resist composition of this invention contains the onium salt (D1) which does not have an aromatic group in a cation part. The onium salt (D1) is considered to have a role as a quencher due to salt exchange with the acid generated from the component (B).
From the above, in the resist composition, in the resist film, diffusion of the acid generated in the exposed area to the unexposed area is remarkably suppressed, and as a result, alkali development between the unexposed area and the exposed area is achieved. Since a difference in solubility (dissolution contrast) with respect to the liquid is remarkably obtained, a resist pattern having a good shape can be formed, and it is estimated that excellent lithography characteristics are exhibited. Moreover, since the resist composition is not biased to basicity, the temporal stability in the bottle is improved.

EXAMPLES Next, although an Example demonstrates this invention further in detail, this invention is not limited by these examples.
[Example 1]
Dibutyl sulfide (8.78 g) and dibutyl sulfate (43.9 g) were charged into a three-necked flask equipped with a stirrer and a thermometer, and heated to 100 ° C. After stirring at that temperature for 4 hours, the reaction mixture was slowly added dropwise to pure water (87.8 g) and tert-butyl methyl ether (TBME) (130.8 g) that had been cooled to 15 ° C. or lower in advance. did. After further stirring for 5 minutes, liquid separation was performed, and the aqueous phase was washed twice with tert-butyl methyl ether (130.8 g) to obtain an aqueous solution of compound (1) (solid content: 18.8 g).

Compound (1) was analyzed by ¹ H-NMR.
¹ H-NMR (DMSO-d6, 400 MHz): δ (ppm) = 3.98 (quantt, 2H, h), 3.36 (t, 6H, d), 1.68 (quintet, 6H, c), 1.58 (quintet, 6H, g), 1.35-1.44 (m, 8H, b + f), 0.81-0.93 (m, 12H, a + e).
From the results described above, it was confirmed that the compound (1) had a structure shown above.

[Example 2]
The following compound (2) ((+)-10-camphorsulfonic acid, 6.97 g) was added to a 13.9 wt% aqueous solution (43.09 g) of the compound (1) and heated to 80 ° C. Thereafter, the mixture was stirred at 80 ° C. for 18 hours, cooled to room temperature, and extracted three times with dichloromethane (39.4 g), and the organic phase was washed with diluted ammonia and washed with water. The separated organic phase was concentrated under reduced pressure to obtain 3.34 g of the desired compound (3).

Compound (3) was analyzed by ¹ H-NMR.
¹ H-NMR (DMSO-d6, 400 MHz): δ (ppm) = 3.33 (t, 6H, d), 2.85 (d, 1H, anion), 2.70 (quintet, 1H, anion), 2.34 (d, 1H, anion), 2.22 (dt, 1H, anion), 1.92 (t, 1H, anion), 1.80-1.86 (m, 2H, anion), 1. 69 (quintet, 6H, c), 1.41 (sixtet, 6H, b), 1.25 (q, 2H, anion), 1.04 (s, 3H, anion), 0.94 (t, 9H, a), 0.73 (s, 3H, anion).
From the results described above, it was confirmed that the compound (3) had a structure shown above.

[Synthesis Example 1]
(Synthesis of 2- (2- (2-methyl-2-adamantyloxy) -2-oxoethoxy) -2-oxoethanol)
A 2 L three-necked flask equipped with a thermometer, a condenser and a stirrer was charged with 37.6 g (494 mmol) of glycolic acid, 700 mL of DMF, 86.5 g (626 mmol) of potassium carbonate, and 28.3 g (170 mmol) of potassium iodide at room temperature. For 30 minutes. Then, 300 mL of dimethylformamide in 100 g (412 mmol) of 2-methyl-2-adamantyl chloroacetate was slowly added. The temperature was raised to 40 ° C. and stirred for 4 hours. After completion of the reaction, 2000 mL of diethyl ether was added and filtered, and the resulting solution was washed 3 times with 500 mL of distilled water. Crystallization was performed using a mixed solution of toluene (300 mL) and heptane (200 mL) to obtain 78 g (yield 67%, GC purity 99%) of the target product as a colorless solid.

The instrumental analysis results of the obtained compound were as follows.
¹ H-NMR: 1.59 (d, 2H, J = 12.5 Hz), 1.64 (s, 3H), 1.71 to 1.99 (m, 10H), 2.29 (m, 2H) 2.63 (t, 1H, J = 5.2 Hz), 4.29 (d, 2H, J = 5.2 Hz), 4.67 (s, 2H).
¹³ C-NMR: 22.35, 26.56, 27.26, 32.97, 34.54, 36.29, 38.05, 60.54, 61.50, 89.87, 165.97, 172 .81.
GC-MS: 282 (M ⁺ , 0.02%), 165 (0.09%), 149 (40%), 148 (100%), 133 (22%), 117 (2.57%), 89 (0.40%).
From the above results, it was confirmed that the obtained compound was 2- (2- (2-methyl-2-adamantyloxy) -2-oxoethoxy) -2-oxoethanol.

[Synthesis Example 2]
(Synthesis of 2- (2- (2-methyl-2-adamantyloxy) -2-oxoethoxy) -2-oxoethyl methacrylate (monomer 3))
To a 2 L three-necked flask equipped with a thermometer, a condenser and a stirrer was added 165 g (584 mmol) of 2- (2- (2-methyl-2-adamantyloxy) -2-oxoethoxy) -2-oxoethanol, 2000 mL of THF, Triethylamine 105 mL (754 mmol) and p-methoxyphenol 0.165 g (1000 ppm) were added and dissolved. After dissolution, 62.7 mL (648 mmol) of methacryloyl chloride was slowly added in an ice bath, warmed to room temperature, and stirred for 3 hours. After completion of the reaction, 1000 mL of diethyl ether was added and washed 5 times with 200 mL of distilled water. The extract was concentrated to obtain 198 g (yield 97%, GC purity 99%) of the target product as a colorless liquid.

The instrumental analysis results of the obtained monomer 3 were as follows.
¹ H-NMR: 1.58 (d, J = 12.5 Hz, 2H), 1.63 (s, 3H), 1.71 to 1.89 (m, 8H), 1.98 (s, 3H) , 2.00 (m, 2H), 2.30 (m, 2H), 4.62 (s, 2H), 4.80 (s, 2H), 5.66 (m, 1H), 6.23 ( m, 1H).
¹³ C-NMR: 18.04, 22.15, 26.42, 27.14, 32.82, 34.38, 36.11, 37.92, 60.44, 61.28, 89.42, 126 79, 135.18, 165.61, 166.30, 167.20.
GC-MS: 350 (M +, 1.4%), 206 (0.13%), 149 (47%), 148 (100%), 133 (20%), 69 (37%).
From the above results, it was confirmed that the obtained compound was 2- (2- (2-methyl-2-adamantyloxy) -2-oxoethoxy) -2-oxoethyl methacrylate.

[Production Example 2 (Synthesis of polymer compound (1))]
In a 500 mL beaker, 18.05 g (106.17 mmol) of the following [Monomer 1], 20.06 g (80.89 mmol) of the following [Monomer 2], 15.04 g (42.97 mmol) obtained in Synthesis Example 2 above. The following [Monomer 3] of 5.37 g (22.75 mmol) of [Monomer 4] was added and dissolved in 234.08 g of methyl ethyl ketone. To this solution, 17.7 mmol of dimethyl azobisisobutyrate (V-601) as a polymerization initiator was added and dissolved. This reaction solution was added dropwise to 97.53 g of methyl ethyl ketone heated to 75 ° C. in a separable flask over 6 hours under a nitrogen atmosphere. After completion of dropping, the reaction solution was heated and stirred for 1 hour, and then the reaction solution was cooled to room temperature. The obtained reaction polymerization solution is concentrated under reduced pressure, then dropped into a large amount of methanol / water mixed solution, and the reaction product (copolymer) is precipitated. The precipitated reaction product is filtered, washed and dried. As a result, 35 g of the target polymer compound (1) was obtained.

With respect to this polymer compound (1), the mass average molecular weight (Mw) in terms of standard polystyrene determined by GPC measurement was 8,900, and the dispersity (Mw / Mn) was 1.95.
The copolymer composition ratio (ratio of each structural unit in the above structural formula (molar ratio)) determined by carbon 13 nuclear magnetic resonance spectrum (600 MHz — ¹³ C-NMR) at 600 MHz is 1 / m / n / o = 52.4 / 19.6 / 18.7 / 9.4.

[Synthesis Example 3 (Synthesis of Compound (II))]
(I)
343.6 g of 30% aqueous sodium hydroxide solution was added dropwise to 150 g of methyl fluorosulfonyl (difluoro) acetate and 375 g of pure water while maintaining the temperature at 10 ° C. or lower in an ice bath. After dropping, the mixture was refluxed at 100 ° C. for 3 hours, cooled and neutralized with concentrated hydrochloric acid. The obtained solution was added dropwise to 8888 g of acetone, and the precipitate was filtered and dried to obtain 184.5 g of compound (I) as a white solid (purity: 88.9%, yield: 95.5%). .

(Ii)
Compound (I) 56.2g and acetonitrile 562.2g were prepared, p-toluenesulfonic acid monohydrate 77.4g was added, and it recirculate | refluxed at 110 degreeC for 3 hours. Then, it filtered and the filtrate was concentrated and dried. To the obtained solid, 900 g of t-butyl methyl ether was added and stirred. Then, it filtered and the filtrate was dried, and 22.2 g (purity: 91.0%, yield: 44.9%) of compound (II) was obtained as a white solid.

[Synthesis Example 4 (Synthesis of Compound (VI))]
(I)
Charge 4.34 g (purity: 94.1%) of the compound (II), 3.14 g of 2-benzyloxyethanol, and 43.4 g of toluene, add 0.47 g of p-toluenesulfonic acid monohydrate, and add 105 Reflux at 20 ° C. for 20 hours. The reaction solution was filtered, and 20 g of hexane was added to the filtrate and stirred. Filtration was performed again, and the residue was dried to obtain 1.41 g (yield: 43.1%) of compound (III).

(Ii)
To 1.00 g of the compound (III) and 3.00 g of acetonitrile, 0.82 g of 1-adamantanecarbonyl chloride and 0.397 g of triethylamine were added dropwise under ice cooling. After completion of dropping, the mixture was stirred at room temperature for 20 hours and filtered. The filtrate was concentrated to dryness, dissolved in 30 g of dichloromethane and washed with water three times. The organic layer was concentrated and dried to obtain 0.82 g (yield: 41%) of compound (IV).

(Iii)
0.384 g of compound (V) was dissolved in 3.84 g of dichloromethane and 3.84 g of water, and 0.40 g of the compound (IV) was added. After stirring for 1 hour, the organic layer was recovered by liquid separation treatment and washed with water 3.84 g three times. The obtained organic layer was concentrated and dried to obtain 0.44 g (yield: 81.5%) of compound (VI).

[Examples 3 to 5, Comparative Examples 1 to 3]
Each component shown in Table 1 was mixed and dissolved to prepare a positive resist composition.

In Table 1, the numerical values in [] indicate the blending amount (parts by mass). Moreover, the symbol in Table 1 shows the following, respectively.
(A) -1: High molecular compound (1)
(A) -2: Chemical formula (A) -2 below
(B) -1: Compound (VI) above
(D) -1: Compound (3) above
(D) -2: Tri-n-pentylamine (D) -3: Chemical formula (D) -3 below
(S) -1: Mixed solvent of PGMEA / PGME = 6/4 (mass ratio)

The following evaluation was performed using the obtained resist composition.
[Resolution and sensitivity]
An organic antireflection film composition “ARC29” (trade name, manufactured by Brewer Science Co., Ltd.) is applied onto a 12-inch silicon wafer using a spinner, and baked on a hot plate at 205 ° C. for 60 seconds to be dried. Thereby, an organic antireflection film having a film thickness of 89 nm was formed. Then, the resist compositions of Example 1 and Comparative Example 1 obtained above were respectively applied on the antireflection film using a spinner, and prebaked on a hot plate at 90 ° C. for 60 seconds. By performing (PAB) treatment and drying, a resist film having a thickness of 120 nm was formed.
Next, a protective film-forming coating solution “TSRC-002” (trade name, manufactured by Tokyo Ohka Kogyo Co., Ltd.) is applied onto the resist film using a spinner and heated at 90 ° C. for 60 seconds. A top coat having a thickness of 28 nm was formed.
Next, an immersion ArF exposure apparatus NSR-S609B (Nikon Corporation; NA (numerical aperture) = 1.07, 2/3 annular illumination, reduction magnification 1/4) is applied to the resist film on which the top coat is formed. Double, immersion medium: water), ArF excimer laser (193 nm) is passed through a mask pattern (6% halftone) targeting a contact hole pattern (hereinafter referred to as CH pattern) having a hole diameter of 70 nm / pitch of 131 nm. Selectively irradiated.
Next, the top coat is removed using a protective film removing solution “TS-Remover-S” (trade name, manufactured by Tokyo Ohka Kogyo Co., Ltd.), and then subjected to PEB treatment at 95 ° C. for 60 seconds, and further to 23 ° C. Then, it is alkali-developed with a 2.38 mass% TMAH aqueous solution NMD-W (trade name, manufactured by Tokyo Ohka Kogyo Co., Ltd.) for 30 seconds, rinsed with pure water for 25 seconds, and then shaken and dried. It was.
The exposure amount at which a contact hole pattern with a hole diameter of 70 nm and a pitch of 131 nm was formed was defined as the optimum exposure amount (mJ / cm ² ; sensitivity).

[Evaluation of roundness]
Each contact hole pattern formed above was observed from above using a scanning electron microscope (SEM), and the roundness of the hole pattern was evaluated according to the following criteria. The results are also shown in Table 1.
○: The hole pattern as a whole had a high roundness and a good shape.
Δ: Distortion was observed in part of the hole pattern.
X: The whole pattern caused film slippage, and the whole hole pattern was distorted.

[Evaluation of cross-sectional shape]
Each contact hole pattern formed above was evaluated for the cross-sectional shape of the hole pattern using the cross-section SEM according to the following criteria. The results are also shown in Table 1.
A: A resist pattern with high verticality.
X: Tapered shape.

  From the above results, it was confirmed that the resist compositions of Examples 3 to 5 were excellent in lithography characteristics.

Claims (9)

A resist composition comprising a base material component (A) whose solubility in an alkali developer is changed by the action of an acid, an acid generator component (B) that generates acid upon exposure, and a quencher component (D). ,
The resist composition, wherein the quencher component (D) contains an onium salt (D1) having no aromatic group in the cation portion. The onium salt (D1) is selected from the group consisting of a compound (d1-1) represented by the following general formula (d1-1) and a compound (d1-2) represented by the following general formula (d1-2) The resist composition according to claim 1, comprising at least one compound.

[In the formula (d1-1), R ⁰ is a hydrocarbon having 1 to 12 carbon atoms which may have a substituent. However, the fluorine atom is not bonded to the carbon atom adjacent to the sulfur atom in —SO ₃ ^— . Z ⁺ is an aliphatic organic cation having no aromatic group. n is 0 or 1. ]

[In the formula (d1-2), R ⁰² is an optionally substituted hydrocarbon having 1 to 12 carbon atoms, and Z ⁺ is an aliphatic organic cation having no aromatic group. ]   The resist composition according to claim 1, wherein the base material component (A) is a base material component whose solubility in an alkaline developer is increased by the action of an acid.   The base material component (A) contains a resin component (A1) whose solubility in an alkaline developer is increased by the action of an acid, and the resin component (A1) contains an acid dissociable, dissolution inhibiting group. The resist composition according to claim 3, which has a structural unit (a1) derived from   The resist composition according to claim 4, wherein the resin component (A1) further has a structural unit (a2) derived from an acrylate ester containing a lactone-containing cyclic group.   The resist composition according to claim 4 or 5, wherein the resin component (A1) further comprises a structural unit (a3) derived from an acrylate ester containing a polar group-containing aliphatic hydrocarbon group.   A step of forming a resist film on a support using the resist composition according to any one of claims 1 to 6, a step of exposing the resist film, and an alkali development of the resist film to form a resist pattern A resist pattern forming method including a forming step. The compound represented by the following general formula (d1-1).

[In the formula (d1-1), R ⁰ is a hydrocarbon having 1 to 12 carbon atoms which may have a substituent. However, the fluorine atom is not bonded to the carbon atom adjacent to the sulfur atom in —SO ₃ ^— . Z ⁺ is an aliphatic organic cation having no aromatic group. n is 0 or 1. ] The compound represented by the following general formula (d1-2).

[In the formula (d1-2), R ⁰² is an optionally substituted hydrocarbon having 1 to 12 carbon atoms, and Z ⁺ is an aliphatic organic cation having no aromatic group. ]