JP2009275884A - Changeover valve - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a changeover valve capable of carrying out miniaturization of a structure and reduction of costs by enabling miniaturization of an actuator by reduction of driving force for operating a valve element and enabling a plurality of operation of valve elements by one actuator. <P>SOLUTION: The changeover valve 101 is equipped with a body 1 having fluid passages C1, C2, and valve holes 1a in middles of the fluid passages C1, C2 of an interior of the body 1. The valve element 2 freely sliding and rotating in an interior is housed in the valve hole 1a. A vibrating actuator 10 having piezoelectric device parts 11, 12, 13 is provided in the interior of the body 1, and the vibrating actuator 10 is abutted on the valve element 2 to side and rotate the valve element 2 by vibration of the piezoelectric device parts 11, 12, 13. The valve element 2 is communicated with one of the fluid passages C1, C2 by sliding, and a flow rate of the communicated fluid passage C1 or C2 is adjusted by rotating. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a switching valve using an actuator including a piezoelectric element.

Conventionally, a variety of proposals have been made for a flow path switching valve for selecting a flow path for flowing a fluid from a plurality of flow paths capable of flowing a fluid composed of a liquid such as air or oil, according to the application, and for flowing the fluid. Has been made.
For example, the flow path switching valve of Patent Document 1 is a flow path switching valve in a hydraulic mechanism, and includes a plurality of first output ports corresponding to a first input port and a first input port, a second input port, and a second input port. A plurality of second output ports corresponding to the input ports are provided. The flow path switching valve communicates the first input port with any one of the plurality of first output ports through the spool by sliding a spool, which is a valve body provided in the valve case, in the axial direction. Further, the second input port communicates with one of the second output ports by rotating the spool around the axis. Two arms, a first operating arm and a second operating arm, extend outside the flow path switching valve, and the first operating arm slides the spool in the axial direction. The operation arm rotates the spool around the axis. That is, the flow path switching valve of Patent Document 1 switches two flow paths through a single spool slide operation and a rotation operation.

JP-A-11-182701

  However, in the flow path switching valve described in Patent Document 1, the first operation arm is connected to the flow path switching valve inside thereof and extends to the outside, and the second operation arm extends to the outside of the flow path switching valve. The spool is connected outside the flow path switching valve. Therefore, in order to prevent leakage of oil inside the flow path switching valve to the outside, a sealing material is provided around the first operation arm and the spool, and the sealing with the valve case is maintained. Thus, since the first operating arm and the spool are provided with the seal material at the movable part, the sliding resistance is increased, and the driving force required for the sliding and rotating operation of the spool is increased. There's a problem. Furthermore, when an actuator or the like is used to drive the first operating arm and the spool, there is a problem that the actuator is increased in size and the flow path switching valve itself is also increased in size.

  In addition, since the spool slide operation and the rotation operation are performed by separate operation means, for example, when the operation means is motorized, two drive means are required, or when the two operation means are driven by one drive means. Causes a problem that the flow path switching valve is increased in size and costs are increased.

  The present invention has been made to solve the above-described problems, and by reducing the driving force for operating the valve body, the actuator can be reduced in size, and a plurality of operations of the valve body can be performed with one actuator. An object of the present invention is to provide a switching valve that can reduce the size of the valve structure and reduce the cost.

  A switching valve according to the present invention includes a valve main body having at least two fluid passages, and a cylindrical cylindrical portion that is accommodated in a valve hole provided in the valve main body inside the valve main body and is capable of two different movements. The fluid passage has a flow path, an inflow path, and an outflow path formed by the valve body in the valve hole, and at least two fluids are generated by one of two different movements of the valve body. In at least one of the fluid passages, the flow path switches between communication and non-communication between the inflow passage and the outflow passage, and the other of the two different movements of the valve body causes the at least one fluid passage to communicate with each other. A switching valve in which the flow path cross-sectional area of the flow path is changed and the opening degree of at least one fluid passage communicated is adjusted, and is a vibration actuator provided inside the valve body and having a piezoelectric element, Abuts the disc And it has a contact portion, the vibration of the piezoelectric element, and further comprising a vibration actuator to perform two movements differ valve body.

  For this reason, since the vibration actuator operated by the piezoelectric element can be reduced in size, it is accommodated together with the valve body in the valve body. At this time, the valve body that is not exposed to the outside of the valve body does not need a seal with the valve body. Therefore, since a member that acts as an operation resistance is not provided around the valve body, that is, a movable part of the valve body, the driving force for operating the valve body can be reduced, and the small vibration actuator that requires a small driving force can be achieved. The valve body also operates. Therefore, this switching valve makes it possible to reduce the size of the structure. Furthermore, this switching valve can perform switching of the fluid passage to be communicated and adjusting its flow rate by causing the valve body to perform two different movements by one vibration actuator. Therefore, it is possible to reduce the cost by downsizing the structure of the switching valve and simplifying the structure.

In the vibration actuator, the contact portion may perform elliptical motion by vibration of the piezoelectric element. When the contact portion of the vibration actuator with the valve body makes an elliptical motion, the vibration actuator causes the valve body to perform two different movements by scratching the surface of the valve body at the contact portion.
The valve body may have an elastic member inside the valve body, and the elastic member may press the contact portion of the vibration actuator against the valve body. The vibration actuator is subjected to two different movements on the valve body by applying a pre-pressure, which is a force that is pressed against the valve body, by an elastic member inside the valve body, thereby bringing the contact portion into contact with the valve body. Make it. Further, the vibration actuator is pressed against the valve body by the elastic member even when the vibration actuator is stopped, and fixes the valve body. Therefore, no holding electricity or the like is required for maintaining the state of the valve body, that is, for maintaining the flow path and the flow rate.

One of the two different movements of the valve element is a linear reciprocating motion in the axial direction of the cylindrical part of the valve element, and the other of the two movements of the valve element is the circumferential direction of the cylindrical part of the valve element It may be a rotating operation.
The valve body may be provided with a through hole penetrating the cylindrical portion in the cylindrical portion, and the through hole may form a flow path of the fluid passage. The through hole provided in the valve body communicates the inflow path and the outflow path in the fluid passage by the valve body performing linear reciprocating motion in the axial direction of the cylindrical portion, that is, communicates the fluid passage. Further, the through-hole communicating with the fluid passage by the linear reciprocating motion of the valve body changes the flow passage cross-sectional area of the fluid passage by the valve body rotating, thereby changing the flow rate of the fluid passage.

  The valve body has a groove portion provided in the cylindrical portion along the direction of the rotation operation of the valve body, and the groove portion forms a flow path of the fluid passage together with the valve hole, along the direction of the rotation operation of the valve body. Thus, the cross-sectional area perpendicular to the direction of the rotation operation may change. The groove portion provided in the valve body communicates the inflow path and the outflow path in the fluid passage by the valve body performing linear reciprocation in the axial direction of the cylindrical portion, that is, communicates the fluid passage. Further, the groove portion communicating with the fluid passage by the linear reciprocating motion of the valve body changes the flow passage cross-sectional area of the fluid passage by the valve body rotating, thereby changing the flow rate of the fluid passage.

  The groove portion of the valve body may have a symmetric cross-sectional shape with respect to a plane perpendicular to the axial direction of the cylindrical portion of the valve body. The pressure of the fluid applied to the groove portion of the valve body is equal with respect to a plane perpendicular to the axial direction of the cylindrical portion of the valve body. Therefore, the valve body does not receive a force in the direction of the linear reciprocation that is the axial direction of the cylindrical portion due to the pressure of the fluid, and is not pressed against the valve body in this direction. Therefore, the driving force for causing the valve element to perform the linear reciprocating operation and the rotating operation is not affected by the magnitude of the pressure of the fluid. Therefore, even when a high-pressure fluid is circulated, the valve body can be linearly reciprocated and rotated by a vibration actuator having a small driving force, and the switching valve is further miniaturized.

  According to the present invention, the switching valve enables downsizing of the actuator by reducing the driving force for operating the valve body and multiple operations of the valve body by one actuator, thereby reducing the size and cost of the structure. Reduction can be achieved.

Embodiments of the present invention will be described below with reference to the accompanying drawings.
Embodiment 1 FIG.
First, the configuration of the switching valve 101 according to Embodiment 1 of the present invention will be described with reference to FIGS. The switching valve 101 is used in a fluid circuit that uses a circulating fluid as a gas.
Referring to FIG. 1, the switching valve 101 includes a body 1 that is a substantially rectangular parallelepiped valve body. The body 1 is formed with a cylindrical valve hole 1a perpendicular to the lower surface thereof, and the valve hole 1a does not penetrate the body 1 and extends vertically upward to the middle thereof.
The body 1 is also formed with a first inflow passage 1b and a first outflow passage 1c that extend in a direction perpendicular to the central axis of the valve hole 1a and communicate the valve hole 1a with the outside of the body 1, respectively. . The first inflow passage 1b and the first outflow passage 1c have a circular cross section and the same shape as each other, and have the same central axis and intersect perpendicularly to the central axis of the valve hole 1a.

Further, below each of the first inflow path 1b and the first outflow path 1c, a second inflow path 1d and a second outflow path 1e are formed in parallel therewith. The second inflow passage 1d and the second outflow passage 1e communicate the valve hole 1a with the outside of the body 1, respectively. Further, the second inflow passage 1d and the second outflow passage 1e have circular sections larger than those of the first inflow passage 1b and the first outflow passage 1c and have the same shape as each other, and have the same central axis as the valve hole 1a. It intersects perpendicularly with the central axis.
Further, a substantially cylindrical recess 1f that extends in a direction perpendicular to the central axis of the valve hole 1a and communicates the valve hole 1a with the outside of the body 1 is formed below the second inflow passage 1d. .

  Further, a cylindrical valve body 2 that is aligned with the inner peripheral surface of the valve hole 1a is inserted into the valve hole 1a of the body 1. The length of the valve body 2 is shorter than the valve hole 1a, and the valve body 2 is rotatable in the circumferential direction of the columnar part 2c having a cylindrical shape in the valve hole 1a, and the center of the columnar part 2c. It can be reciprocated linearly in the axial direction, that is, it can slide. In addition, the valve body 2 intersects perpendicularly to the central axis of rotation of the valve body 2 and is a cylindrical first flow path 2a and second flow path 2b which are through holes penetrating the column portion 2c of the valve body 2. Are formed side by side in the vertical direction. The first flow path 2a and the second flow path 2b are parallel to each other, and the distance L2 between the lower end of the first flow path 2a and the upper end of the second flow path 2b is the upper end of the opening of the first inflow path 1b with respect to the valve hole 1a. And a distance L1 between the opening lower end of the second inflow passage 1d. The first flow path 2a has the same circular cross section as the opening cross section to the valve hole 1a of the first inflow path 1b and the first outflow path 1c, and the second flow path 2b includes the second inflow path 1d and the second inflow path 1c. 2 It has the same circular cross section as the opening cross section to the valve hole 1a of the outflow passage 1e.

Therefore, when the valve body 2 slides in the valve hole 1a, the first flow path 2a communicates the first inflow path 1b and the first outflow path 1c, and the first inflow path 1b and the first flow path. 2a and the 1st outflow channel 1c comprise the 1st fluid passage C1. The flow passage cross-sectional area of the first fluid passage C1 is the flow passage cross-sectional area at the communication portion between the first inflow passage 1b and the first flow passage 2a, and the communication between the first flow passage 2a and the first outflow passage 1c. Determined by the cross-sectional area of the first channel 2a. Further, the first inflow path 1b and the first outflow path 1c are symmetric with respect to the rotation center axis of the valve body 2, and the first flow path 2a is also symmetric with respect to the rotation center axis of the valve body 2. The flow path cross-sectional area at the communication portion between the path 1b and the first flow path 2a and the flow path cross-sectional area at the communication portion between the first flow path 2a and the first outflow path 1c are equal.
Therefore, when the valve body 2 rotates in the valve hole 1a, the flow passage cross-sectional area of the first flow passage 2a changes, and the flow passage cross-sectional area of the first fluid passage C1, that is, the flow rate changes.

Further, when the valve body 2 slides in the valve hole 1a, the second flow path 2b communicates the second inflow path 1d and the second outflow path 1e, and the second inflow path 1d and the second flow path. 2b and the second outflow passage 1e constitute a second fluid passage C2. The flow passage cross-sectional area of the second fluid passage C2 is the flow passage cross-sectional area at the communication portion between the second inflow passage 1d and the second flow passage 2b, and the communication between the second flow passage 2b and the second outflow passage 1e. Determined by the cross-sectional area of the channel, that is, the cross-sectional area of the second channel 2b. Similarly to the first fluid passage C1, the flow passage cross-sectional area at the communication portion between the second inflow passage 1d and the second flow passage 2b and the flow at the communication portion between the second flow passage 2b and the second outflow passage 1e. The road cross-sectional areas are equal.
Therefore, when the valve body 2 further rotates in the valve hole 1a, the flow passage cross-sectional area of the second flow passage 2b changes in the same manner as the first fluid passage C1, and the flow rate of the second fluid passage C2 is changed. Change.

Note that the distance L2 between the lower end of the first flow path 2a and the upper end of the second flow path 2b is larger than the distance L1 between the upper opening end of the first inflow path 1b and the lower opening end of the second inflow path 1d with respect to the valve hole 1a. Therefore, only one of the first fluid passage C1 and the second fluid passage C2 communicates with the sliding of the valve body 2 in the valve hole 1a.
Further, the valve hole 1 a is closed by the lid portion 3 below the valve body 2. The body 1 and the lid 3 are sealed with an O-ring 3a that is a fixed seal.

Next, referring to FIG. 2, the state shown in FIG. 2 is obtained by rotating the valve body 2 of the switching valve 101 in FIG. 1 by 90 degrees.
Therefore, the cylindrical portion 2c of the valve body 2 is partly cut out vertically from the upper end to the lower side of the second flow path 2b of the valve body 2, and the cut-out portion is cut out. A surface 2d is formed. The notch surface 2d is formed at a position that is parallel to the first flow path 2a and the second flow path 2b of the valve body 2. Furthermore, a communication hole 2 e that communicates the notch surface 2 d and the lower end surface of the valve body 2 and extends downward inside the valve body 2 is formed at the lower end of the notch surface 2 d.
Therefore, the space 1aa (shown as zero volume in FIGS. 1 and 2) and 1ab formed by the valve hole 1a and both end faces of the cylindrical portion 2c of the valve body 2 are the valve hole 1a and the notch surface 2d. Are communicated with each other by the communication hole 2e. For this reason, compressive force and negative pressure are not generated in the fluid in the spaces 1aa and 1ab due to the sliding of the valve body 2 in the valve hole 1a. Therefore, the valve body 2 is not subjected to resistance in sliding by the fluid in the spaces 1aa and 1ab.

Next, a vibration actuator 10 including a piezoelectric element is provided in the recess 1f, and the recess 1f is sealed by a cap 4 having a sealing function. The vibration actuator 10 is connected to a spring 8 that is an elastic member provided on the concave portion 1 f side of the cap 4. Therefore, the vibration actuator 10 is urged against the valve body 2 by the spring 8 and presses the tip of the vibration actuator 10 against the valve body 2. That is, the spring 8 applies a preload to the valve body 2 to the vibration actuator 10. Further, the vibration actuator 10 is electrically connected to a drive device 9 provided outside the body 1 by a wiring 10 a penetrating the cap 4. The driving device 9 applies an AC voltage to the vibration actuator 10 and controls its operation.
A capacitance sensor 5 for measuring the distance from the valve body 2 is provided at the upper end in the valve hole 1 a above the valve body 2. The capacitance sensor 5 is electrically connected to the drive device 9. The body 1 and the valve body 2 are formed of a conductor, and the valve body 2 is electrically grounded via the body 1.

  Therefore, when a voltage is applied to the capacitance sensor 5 by the driving device 9, a current inversely proportional to the distance between the capacitance sensor 5 and the valve body 2 is generated. Further, a distance calculating means (not shown) is provided in the driving device 9, and the distance calculating means includes a voltage value applied by the driving device 9 and a current generated between the capacitance sensor 5 and the valve body 2. The distance between the capacitance sensor 5 and the valve body 2 is calculated from the value.

  A permanent magnet 6 is embedded at the upper end of the surface of the cylindrical portion 2c of the valve body 2, and a hall sensor 7 is provided on the outer upper surface of the body 1 at a position facing the permanent magnet 6. Yes. The hall sensor 7 obtains the relative position of the permanent magnet 6 by the magnetic flux of the permanent magnet 6 that changes as the relative position of the hall sensor 7 and the permanent magnet 6 changes. Therefore, the rotation angle of the valve body 2 that rotates together with the permanent magnet 6 is obtained by the Hall sensor 7. The hall sensor 7 is electrically connected to the driving device 9, and the rotation angle information of the valve body 2 detected by the hall sensor 7 is sent to the driving device 9.

Here, the configuration of the vibration actuator 10 will be described.
As shown in FIG. 5, the vibration actuator 10 has a tip piece 10b having a cylindrical shape that is tapered from the middle thereof, and a base piece 10c having a cylindrical shape. The tip piece 10b and the base piece 10c are sandwiched between the first piezoelectric element part 11, the second piezoelectric element part 12 and the third piezoelectric element part 13 which are substantially annular plates, and are connected to each other by a connecting bolt 10d passing through the inside. It is connected. Further, each of the first piezoelectric element unit 11, the second piezoelectric element unit 12, and the third piezoelectric element unit 13 is electrically connected to the driving device 9 (see FIG. 1) by a wiring 10a (see FIG. 1). Further, a convex portion 10ba having a smaller cylindrical shape is formed at the distal end portion of the distal end piece 10b. On the other hand, a spring 8 is connected to the base piece 10c. The convex portion 10ba of the tip piece 10b constitutes a contact portion, and the vibration actuator 10 contacts the valve body 2 (see FIG. 1) at the convex portion 10ba. The first piezoelectric element unit 11, the second piezoelectric element unit 12, and the third piezoelectric element unit 13 constitute a piezoelectric element.

  Further, for convenience of explanation, the central axis of the base piece 10c from the base piece 10c toward the tip piece 10b is defined as the z-axis, and the y-axis is perpendicular to the z-axis (upward in FIGS. 1 and 2), Assume that the x-axis extends perpendicularly to the y-axis and the z-axis, respectively. At this time, each of the first piezoelectric element unit 11, the second piezoelectric element unit 12, and the third piezoelectric element unit 13 is parallel to the xy plane.

Further, referring to FIG. 6, the detailed configuration of the tip piece 10b, the first piezoelectric element portion 11, the second piezoelectric element portion 12, the third piezoelectric element portion 13 and the base piece 10c is shown.
The first piezoelectric element portion 11 has a structure in which an electrode plate 11a, a piezoelectric element plate 11b, an electrode plate 11c, a piezoelectric element plate 11d, and an electrode plate 11e each having a substantially annular plate shape are sequentially stacked. Similarly, the second piezoelectric element portion 12 has a structure in which an electrode plate 12a, a piezoelectric element plate 12b, an electrode plate 12c, a piezoelectric element plate 12d, and an electrode plate 12e each having a substantially annular plate shape are sequentially stacked. Yes. Similarly, the third piezoelectric element portion 13 has a structure in which an electrode plate 13a, a piezoelectric element plate 13b, an electrode plate 13c, a piezoelectric element plate 13d, and an electrode plate 13e each having a substantially annular plate shape are sequentially stacked. is doing.

Further, the tip piece 10b and the first piezoelectric element portion 11 are insulated by a substantially annular insulating sheet 14, and similarly, the first piezoelectric element portion 11 and the second piezoelectric element portion 12 are insulated by an insulating sheet 15, The second piezoelectric element portion 12 and the third piezoelectric element portion 13 are insulated by an insulating sheet 16, and the third piezoelectric element portion 13 and the base piece 10 c are insulated by an insulating sheet 17.
An electrode plate 11a and an electrode plate 11e disposed at both end surface portions of the first piezoelectric element portion 11, an electrode plate 12a and an electrode plate 12e disposed at both end surface portions of the second piezoelectric element portion 12, and a third The electrode plate 13a and the electrode plate 13e disposed on both end surfaces of the piezoelectric element portion 13 are electrically grounded. Further, the electrode plate 11 c disposed between the pair of piezoelectric element plates 11 b and 11 d of the first piezoelectric element portion 11 and the pair of piezoelectric element plates 12 b and 12 d of the second piezoelectric element portion 12 are disposed. The electrode plate 12c and the electrode plate 13c disposed between the pair of piezoelectric element plates 13b and 13d of the third piezoelectric element portion 13 are electrically connected to the driving device 9 (see FIG. 1), respectively. .

  Further, as shown in FIG. 7, each of the pair of piezoelectric element plates 11b and 11d of the first piezoelectric element portion 11 is divided into two so as to be separated in the y-axis direction, and the respective parts have opposite polarities. And polarized so as to perform deformation behavior opposite to expansion and contraction in the z-axis direction (thickness direction). That is, when an AC voltage is applied to the electrode plate 11c (see FIG. 6) disposed between the piezoelectric element plates 11b and 11d, the convex portion 10ba (see FIG. 6) of the tip piece 10b of the vibration actuator 10 cooperates. 5) is oscillated around the x axis (in the yz plane), the piezoelectric element plate 11b and the piezoelectric element plate 11d are arranged inside out.

Each of the pair of piezoelectric element plates 12b and 12d of the second piezoelectric element portion 12 is polarized so that the entire piezoelectric element plates 12b and 12d perform deformation behavior of expansion or contraction in the z-axis direction (thickness direction). That is, when an AC voltage is applied to the electrode plate 12c (see FIG. 6) disposed between the piezoelectric element plates 12b and 12d, the convex portion 10ba (see FIG. 6) of the tip piece 10b of the vibration actuator 10 cooperates. 5) is oscillated in the z-axis direction, the piezoelectric element plate 12b and the piezoelectric element plate 12d are disposed inside out.
Each of the pair of piezoelectric element plates 13b and 13d of the third piezoelectric element portion 13 is divided into two parts so as to be separated in the x-axis direction, and each part has a reverse polarity to each other, and each z-axis direction ( Polarized so as to perform deformation behavior opposite to expansion and contraction in the thickness direction). That is, when an AC voltage is applied to the electrode plate 13c (see FIG. 6) disposed between the piezoelectric element plates 13b and 13d, the convex portion 10ba (see FIG. 6) of the tip piece 10b of the vibration actuator 10 cooperates. 5) is vibrated around the y-axis (in the xz plane), the piezoelectric element plate 13b and the piezoelectric element plate 13d are disposed inside out.

Next, the operation of the vibration actuator 10 will be described.
Referring to FIG. 7, the drive device 9 (see FIG. 1) has an AC voltage having a frequency close to the natural frequency of the vibration actuator 10 (see FIG. 5) on the electrode plate 11 c (see FIG. 6) of the first piezoelectric element portion 11. Is applied, the two divided portions of the pair of piezoelectric element plates 11b and 11d of the first piezoelectric element section 11 alternately repeat expansion and contraction in the z-axis direction, and the tip piece 10b of the vibration actuator 10 (see FIG. 5). ) Generates a flexural vibration that swings around the x axis on the yz plane.
Similarly, when the driving device 9 (see FIG. 1) applies an AC voltage to the electrode plate 12c (see FIG. 6) of the second piezoelectric element portion 12, a pair of piezoelectric element plates 12b and 12d of the second piezoelectric element portion 12 is provided. Repeats expansion and contraction in the z-axis direction, and longitudinal vibration in the z-axis direction is generated in the tip piece 10b (see FIG. 5).
Similarly, when the drive device 9 (see FIG. 1) applies an AC voltage to the electrode plate 13c (see FIG. 6) of the third piezoelectric element portion 13, a pair of piezoelectric element plates 13b of the third piezoelectric element portion 13 is provided. And 13d divided into 2 parts alternately repeat expansion and contraction in the z-axis direction to generate a flexural vibration that swings around the y-axis on the xz plane at the tip piece 10b of the vibration actuator 10 (see FIG. 5). To do.

  Therefore, referring to FIG. 5, the electrode plate 11c (see FIG. 6) of the first piezoelectric element portion 11 and the electrode plate 12c (see FIG. 6) of the second piezoelectric element portion 12 according to the control of the driving device 9 (see FIG. 1). ) And an alternating voltage whose phase is shifted by 90 degrees is combined with the flexural vibration swung around the x-axis and the longitudinal vibration in the z-axis direction, and the tip of the tip piece 10b of the vibration actuator 10 is convex. Elliptical vibration in the yz plane is generated in the portion 10ba. That is, the convex portion 10ba of the tip piece 10b performs elliptical vibration around the x axis. Note that the phase of the AC voltage to be applied advances or delays the electrode plate 12c (see FIG. 6) of the second piezoelectric element portion 12 by 90 degrees with respect to the electrode plate 11c (see FIG. 6) of the first piezoelectric element portion 11. Thus, the rotational direction of the elliptical motion can be selected from either of the directions P11 and Q11.

  Accordingly, returning to FIG. 1, since the vibration actuator 10 is pre-applied to the valve body 2 by the spring 8, the tip piece 10b of the vibration actuator 10 that elliptically moves in the direction P11 or Q11 around the x axis. The convex portion 10ba is slid vertically upward or downward so as to scratch the valve body 2. When the convex portion 10ba of the tip piece 10b performs an elliptical motion in the direction P11, the valve body 2 slides upward, and when the convex portion 10ba of the tip piece 10b performs an elliptical motion in the direction Q11, the valve body 2 Slides downward.

  Returning to FIG. 5, the electrode plate 12c of the second piezoelectric element portion 12 (see FIG. 6) and the electrode plate 13c of the third piezoelectric element portion 13 (see FIG. 6) are controlled according to the control of the driving device 9 (see FIG. 1). When an AC voltage having a phase shifted by 90 degrees is applied to both of them, the longitudinal vibration in the z-axis direction and the flexural vibration that swings around the y-axis are combined to produce a convex portion 10ba at the tip of the tip piece 10b of the vibration actuator 10. Elliptical vibrations occur in the xz plane. That is, the convex portion 10ba of the tip piece 10b performs elliptical vibration around the y axis. The phase of the AC voltage to be applied is advanced or delayed by 90 degrees with respect to the electrode plate 13c (see FIG. 6) of the third piezoelectric element portion 13 with respect to the electrode plate 12c (see FIG. 6) of the second piezoelectric element portion 12. Thus, the rotational direction of the elliptical motion can be selected from either of the directions P12 and Q12.

Therefore, referring to FIG. 3, since the vibration actuator 10 is pre-applied to the valve body 2 by the spring 8, the tip piece 10b of the vibration actuator 10 that elliptically moves in the direction P12 or Q12 around the y axis. The convex portion 10ba is rotated in the direction P or Q so as to scratch the valve body 2. When the convex portion 10ba of the tip piece 10b performs an elliptical motion in the direction P12, the valve body 2 rotates in the direction P. When the convex portion 10ba of the tip piece 10b performs an elliptical motion in the direction Q12, the valve body 2 Rotate in direction Q.
From the above, referring to FIGS. 1 and 3, the vibration actuator 10 generates an elliptical motion around the x-axis in the convex portion 10ba at its tip due to the vibration of the piezoelectric element portions 11 and 12 (see FIG. 5). The body 2 is slid vertically upward or downward (y-axis direction). In addition, the vibration actuator 10 causes the elliptical motion around the y-axis to be generated in the convex portion 10ba at the tip by the vibration of the piezoelectric element portions 12 and 13 (see FIG. 5), and rotates the valve body 2.

Next, operation | movement of the switching valve 101 which concerns on Embodiment 1 of this invention is shown using FIGS.
Referring to FIG. 1, a gas fluid supplied from a surge tank (not shown) flows into the switching valve 101 from the first inflow path 1 b and the second inflow path 1 d. When the valve body 2 is in the state shown in FIG. 1, the first inflow path 1b is blocked by the valve body 2, so that only the fluid that has flowed into the second inflow path 1d passes through the second flow path 2b. It flows out of the switching valve 101 from the path 1e. At this time, the central axis of the second inflow path 1d and the second outflow path 1e is the same as the central axis of the second flow path 2b, and the second inflow path 1d and the second flow path 2b communicate with each other. The area of the part and the area of the communication part of the second flow path 2b and the second outflow path 1e are the maximum. Therefore, the flow path cross-sectional area of the second flow path 2b, that is, the flow path cross-sectional area of the second fluid passage C2 is maximized.

Therefore, when the flow rate of the second fluid passage C2 in the switching valve 101 is adjusted to a predetermined flow rate, the driving device 9 rotates the valve body 2 in order to obtain a predetermined flow rate from the current rotational position of the valve body 2. Then, after calculating the rotation angle, a voltage is applied to the vibration actuator 10 to operate, and the valve body 2 is rotated in a predetermined direction.
At this time, referring to FIG. 3, the vibration actuator 10 is applied with a voltage by the driving device 9 (see FIG. 1) in accordance with the rotation direction of the valve body 2, and the convex portion 10ba has an elliptical motion in the direction P12 or Q12. I do. Further, the valve body 2 rotates in the direction P or Q according to the direction P12 or Q12 which is the rotational direction of the elliptical motion of the convex portion 10ba. Along with this, the area of the communication part of the second inflow path 1d and the second flow path 2b and the area of the communication part of the second flow path 2b and the second outflow path 1e change continuously in the same way, The flow path cross-sectional area of the flow path 2b, that is, the flow rate of the second fluid passage C2 continuously changes.

Further, referring to FIG. 1, the rotation angle information of the valve body 2 detected by the Hall sensor 7 is sent to the driving device 9, and the rotation angle of the valve body 2 is set to a set value, that is, the flow path breakage of the second fluid passage C2. When the channel cross-sectional area of the second channel 2b, which is the area, reaches the set value, the driving device 9 stops the vibration actuator 10. Since the vibration actuator 10 is pressed against the valve body 2 by the spring 8, even when the vibration is stopped, the convex portion 10ba at the tip is pressed against the valve body 2 so that the valve body 2 is rotated in the rotational direction and up and down. Secure against sliding direction.
Moreover, the switching valve 101 becomes a state shown in FIG. 2 by rotating the valve body 2, and cuts off the communication of the second fluid passage C2 in addition to the first fluid passage C1.

  Next, referring to FIG. 1, when the fluid passage communicating with the switching valve 101 is changed from the second fluid passage C <b> 2 to the first fluid passage C <b> 1, the driving device 9 starts from the current position of the valve body 2 to the valve body 2. After calculating the position and sliding direction after sliding, the voltage is applied to the vibration actuator 10 to operate, and the valve body 2 is slid vertically downward. In the state where the sliding of the valve body 2 is completed, the valve body 2 is configured such that the central axis of the first inflow path 1b and the second outflow path 1c is the same as the central axis of the first flow path 2a. This is a vertical position. Further, when the valve body 2 is slid vertically downward, the convex portion 10ba of the vibration actuator 10 performs an elliptical motion in the direction Q11.

In addition, a voltage is applied to the capacitance sensor 5 by the drive device 9, and the drive device 9 is determined from the current value generated between the capacitance sensor 5 and the valve body 2 by this voltage and the applied voltage value. The distance between the capacitance sensor 5 and the valve body 2 is calculated by a distance calculation means (not shown). When the position of the valve body 2 calculated from this distance reaches a predetermined position, that is, a position where the central axis of the first inflow path 1b and the second outflow path 1c and the central axis of the first flow path 2a are the same. The drive device 9 stops the vibration actuator 10. At this time, the valve body 2 is in the state shown in FIG. 4, the first fluid passage C1 communicates, and the communication of the second fluid passage C2 is blocked.
The flow rate of the first fluid passage C1, that is, the flow passage cross-sectional area of the first flow passage 2a is adjusted by the vibration actuator 10 under the control of the drive device 9 in the same manner as the second fluid passage C2. This is done by rotating the body 2.

  Therefore, the switching valve 101 selects one of the first fluid passage C1 having the first inflow passage 1b and the first outflow passage 1c and the second fluid passage C2 having the second inflow passage 1d and the second outflow passage 1e. And the flow rate is adjusted from the maximum flow rate to 0.

  As described above, the switching valve 101 according to the first embodiment includes the body 1 having the first fluid passage C1 and the second fluid passage C2, and the valve body 2 accommodated in the valve hole 1a provided in the body 1. And have. In addition, the valve body 2 accommodated in the valve hole 1a can perform two different movements in which the cylindrical portion 2c slides in the axial direction and rotates in the circumferential direction. The first fluid passage C1 has a flow path 2a, an inflow path 1b, and an outflow path 1c, and the second fluid path C2 has a flow path 2b, an inflow path 1d, and an outflow path 1e. By sliding the valve body 2, the first flow path 2a communicates the first inflow path 1b and the first outflow path 1c, or the second flow path 2b is connected to the second inflow path 1d and the second outflow path 1e. The first fluid passage C1 or the second fluid passage C2 communicates with each other. Furthermore, the flow passage cross-sectional area of the first flow path 2a or the second flow path 2b in the communicated first fluid path C1 or the second fluid path C2 is changed by the rotation of the valve body 2, and the communicated first fluid path The opening degree of C1 or the second fluid passage C2 is adjusted. In addition, the switching valve 101 includes a vibration actuator 10 having piezoelectric elements 11, 12, and 13 inside the body 1, and abuts against the valve body 2 at the vibration actuator 10 and the convex portion 10 ba, so that the piezoelectric elements 11, 12, and 13 are in contact. The valve body 2 is slid and rotated by this vibration.

  As a result, the vibration actuator 10 is accommodated in the body 1 together with the valve body 2. At this time, the valve body 2 that is not exposed to the outside of the body 1 does not need a seal with the body 1. Therefore, since a member that acts as a resistance of operation is not provided around the valve body 2, that is, a movable part of the valve body 2, the driving force for operating the valve body 2 can be reduced, and the driving force can be reduced and the small size can be reduced. The valve body 2 also operates by the vibration actuator 10. Therefore, the switching valve 101 can reduce the size of the structure. Further, the switching valve 101 can switch the fluid passage and adjust the flow rate thereof by sliding and rotating the valve body 2 with one small vibration actuator 10. Therefore, the switching valve 101 can be reduced in cost by downsizing its structure and simplifying its structure.

In addition, the seal structure in the switching valve 101 may be the O-ring 3a and the cap 4 that are fixed seals, and the seal structure is simple because the movable body that is the sliding and rotating part of the valve body 2 does not require a seal. In addition, fluid leakage to the outside of the switching valve 101 can be easily prevented.
Further, the vibration actuator 10 does not generate a magnetic field. Therefore, by using the vibration actuator 10 as a drive mechanism of the valve body 2, the switching valve 101 can be integrated with an electronic device that is easily affected by a magnetic field. They can be combined, and further miniaturization can be achieved.

  Further, when the vibration actuator 10 is stopped, the convex portion 10ba of the tip piece 10b of the vibration actuator 10 is pressed against the valve body 2 by the spring 8, so that the valve body 2 is fixed. Therefore, since no holding power or the like is required for maintaining the state of the valve body 2, that is, for maintaining the flow path and the flow rate, the power consumption of the switching valve 101 can be reduced.

Embodiment 2. FIG.
The switching valve 102 according to the second embodiment of the present invention is obtained by changing the structure of the valve body 2 with respect to the switching valve 101 of the first embodiment.
In the following embodiments, the same reference numerals as those in the previous drawings are the same or similar components, and thus detailed description thereof is omitted.
First, the configuration of the switching valve 102 according to Embodiment 2 of the present invention will be described with reference to FIGS.

Referring to FIG. 8, in the valve hole 1a of the body 1, a cylindrical valve body 22 that is aligned with the inner peripheral surface of the valve hole 1a is inserted in the same manner as in the first embodiment. The valve body 22 is rotatable in the circumferential direction of the cylindrical portion 22c in the valve hole 1a, and is slidable in the central axis direction of the rotation.
The valve body 22 is formed with a communication hole 22 d that passes through the valve body 22 and communicates with both end faces of the cylindrical portion 22 c of the valve body 22 along the rotation center axis of the valve body 2. As a result, the spaces 1aa and 1ab formed by the valve hole 1a and both end faces of the cylindrical portion 22c of the valve body 22 communicate with each other through the communication hole 22d. Therefore, the fluid in the spaces 1aa and 1ab is in the valve hole 1a. The sliding force of the valve body 22 does not generate compressive force or negative pressure. Therefore, the valve body 22 is not subjected to resistance against sliding by the fluid in the spaces 1aa and 1ab.

  Furthermore, two V-shaped grooves 22a and 22b having a triangular cross section whose depth continuously changes in the outer circumferential direction which is the rotation direction of the valve body 22 on the surface of the cylindrical portion 22c of the valve body 22 are vertically It is formed in the same direction along the direction. The V-shaped grooves 22a and 22b extend in a direction perpendicular to the rotation center axis of the valve body 22, and constitute a groove portion. Therefore, the V-shaped grooves 22a and 22b have a shape in which a cross-sectional area perpendicular to the rotation direction changes continuously along the rotation direction of the valve body 22.

The triangular cross sections of the V-shaped grooves 22a and 22b have an isosceles triangle shape, and the equilateral portions of the isosceles triangles constitute the bottom surfaces of the V-shaped grooves 22a and 22b. That is, the V-shaped grooves 22a and 22b pass through the apexes of the V-shaped bottom surface and have a shape that is symmetric with respect to a plane perpendicular to the rotation center axis of the valve body 22, that is, a horizontal plane.
The distance L22 between the lower end of the V-shaped groove 22a and the upper end of the V-shaped groove 22b on the surface of the cylindrical portion 22c of the valve body 22 is the upper end of the opening of the first inflow path 1b with respect to the valve hole 1a and the second inflow path 1d. It is larger than the distance L1 with the lower end of the opening.

  Referring to FIG. 9, the second inflow channel 1d and the second outflow channel 1e have the same center axis, but are eccentric with respect to the center axis of the valve hole 1a. Further, the first inflow passage 1b (see FIG. 8) and the first outflow passage 1c (see FIG. 8) are parallel to the second inflow passage 1d and the second outflow passage 1e, and the second inflow passage 1d and the second outflow passage 1d. Like the two outflow passages 1e, it is eccentric with respect to the central axis of the valve hole 1a.

  Returning to FIG. 8, when the valve body 22 slides in the valve hole 1a, the first flow path 22ab, which is a space formed by the V-shaped groove 22a and the valve hole 1a, is connected to the first inflow path 1b and the first flow path. The first inflow path 1b, the first flow path 22ab, and the first outflow path 1c constitute a first fluid path C12. A second flow path 22bb, which is a space formed by the V-shaped groove 22b and the valve hole 1a, communicates the second inflow path 1d and the second outflow path 1e, and the second inflow path 1d and the second flow path. The passage 22bb and the second outflow passage 1e constitute a second fluid passage C22. The distance L22 between the lower end of the V-shaped groove 22a and the upper end of the V-shaped groove 22b on the surface of the cylindrical portion 22c of the valve body 22 is the upper end of the opening of the first inflow path 1b with respect to the valve hole 1a and the second inflow path 1d. Therefore, only one of the first fluid passage C12 and the second fluid passage C22 communicates with the sliding of the valve body 22 in the valve hole 1a.

Further, the first fluid passage C12 and the second fluid passage C22 have the passage sectional areas of the first passage 22ab and the second passage 22bb, respectively.
Therefore, referring to FIG. 9, the second flow path 22bb has the flow path cross-sectional area as the area of the smallest cross section in the plane perpendicular to the central axis of the second inflow path 1d and the second outflow path 1e. For example, in the states shown in the states (a9) and (b9), the cross-sectional areas of the cross sections at the positions indicated by the widths α1 and α2 are the flow path cross-sectional areas. Further, the position of the cross-sectional area of the first flow path 22ab is the same as that of the second flow path 22bb.

Returning to FIG. 8, when the fluid passes through the first flow path 22ab or the second flow path 22bb, the pressure of the fluid is applied to the valve body 22 by two bottom surfaces of the V-shaped grooves 22a or 22b, That is, since it acts on the bottom surface symmetrical in the vertical direction, the vertical force acting on the valve body 22 is offset and balanced. That is, the valve body 22 has a so-called pressure balance shape. Therefore, the valve body 22 is not affected by the fluid pressure in the vertical direction, and therefore is not affected by the fluid pressure in the sliding and rotating operations.
Further, since the other structure of the switching valve 102 according to the second embodiment is the same as that of the first embodiment, the description thereof is omitted.

Next, the operation of the switching valve 102 according to the second embodiment of the present invention will be described with reference to FIGS.
First, the operation of the valve body 22 will be described with reference to FIGS.
Referring to FIG. 9, states (a9) and (b9) indicate that the V-shaped groove 22b communicates with the second inflow passage 1d and the second outflow passage 1e, that is, the second fluid passage in the switching valve 102. This is a state where C22 (see FIG. 8) is in communication. At this time, the second flow path 22bb has a cross-sectional area at the position where the flow path width is the width α1 in the state shown in the state (a9), and the flow path width is the width α2 in the state shown in the state (b9). The cross-sectional area at a certain position is the flow path cross-sectional area.

  Therefore, the state 22bc where the depth of the V-shaped groove 22b with respect to the surface of the cylindrical portion 22c of the valve element 22 forms the flow path width α1 of the second flow path 22bb, that is, the state shown in the state (a9) The second flow path 22bb has the maximum flow path cross-sectional area, and the flow rate of the second fluid path C22 (see FIG. 8) is the maximum. Further, the flow path cross section at the position of the width α1 constituting the flow path cross-sectional area of the second flow path 22bb at this time is indicated by a cross section 22bd indicated by diagonal lines in the state (a10) of FIG.

  Similarly to the first embodiment, when the vibration actuator 10 (see FIG. 8) is operated under the control of the drive device 9 (see FIG. 8), the valve body 22 is rotated in the direction P from this state. The second channel 22bb continuously decreases its channel width. Furthermore, in the state shown in the state (b9), the second flow path 22bb has the flow path width as the width α2, and the flow path cross-sectional area is minimized, that is, the flow rate of the second fluid path C22 (see FIG. 8) is Minimal. The state shown in the state (b9) is a state in which the valve body 22 is rotated in the direction P to the maximum while the valve body 22 and the valve hole 1a can be sealed at the portion 1ac of the valve hole 1a. . Further, the flow path cross section at the position of the width α2 constituting the flow path cross-sectional area of the second flow path 22bb at this time is indicated by a cross section 22be indicated by hatching in the state (b10) of FIG.

Accordingly, the valve body 22 rotates between the state shown in the state (a9) and the state shown in the state (b9), whereby the opening degree of the second flow path 22bb is adjusted, and the second fluid passage C22 (see FIG. 8). ) Is adjusted. That is, when the valve body 22 is rotated in the direction P from the state shown in the state (a9) toward the state shown in the state (b9), the second fluid passage C22 ( The flow rate (see FIG. 8) continuously and gradually decreases from the maximum value to the minimum value. Further, when the valve body 22 is rotated in the direction Q from the state shown in the state (b9) toward the state shown in the state (a9), the second fluid passage C22 together with the flow path cross-sectional area of the second flow path 22bb. The flow rate (see FIG. 8) increases gradually and gradually from the minimum value to the maximum value.
Even when the valve body 22 is rotated in the direction Q from the state shown in the state (a9), the flow path cross-sectional area of the second flow path 22bb and the flow rate of the second fluid path C22 change similarly.

  Referring to FIG. 8, when the vibration actuator 10 is operated under the control of the driving device 9 and the valve body 22 is slid vertically downward in the same manner as in the first embodiment, the second fluid passage C22 is obtained. Is blocked by the valve body 22, and the first fluid passage C12 communicates. That is, the first inflow path 1b and the first outflow path 1c communicate with each other through the first flow path 22ab. Further, by rotating the valve body 22, the flow rate of the first fluid passage C12 continuously changes as in the case of communication of the second fluid passage C22.

Therefore, the switching valve 102 selects one of the first fluid passage C12 having the first inflow passage 1b and the outflow passage 1c and the second fluid passage C22 having the second inflow passage 1d and the second outflow passage 1e. And the flow rate is adjusted.
Moreover, since the other operation | movement of the switching valve 102 which concerns on this Embodiment 2 is the same as that of Embodiment 1, description is abbreviate | omitted.

Thus, in the switching valve 102 according to the second embodiment, the same effect as the switching valve 101 in the first embodiment can be obtained.
Further, the V-shaped grooves 22 a and 22 b of the valve body 22 have a triangular cross-sectional shape that is symmetric with respect to a plane perpendicular to the rotation center axis of the valve body 22, that is, a horizontal plane. Accordingly, since the fluid pressure applied to the V-shaped grooves 22a and 22b is canceled in the vertical direction, the valve body 22 is not subjected to the vertical force by the fluid pressure and is pressed in the sliding direction in the valve hole 1a. It is never done. That is, the valve body 22 has a pressure balance shape. Accordingly, since the driving force for sliding and rotating the valve body 22 is not affected by the magnitude of the pressure of the fluid, the valve body 22 can be slid and rotated with a small driving force even when high-pressure fluid flows. To. Therefore, since the small vibration actuator 10 that requires a small driving force can be used, the switching valve 102 can be further downsized.

Embodiment 3 FIG.
The switching valve 103 according to Embodiment 3 of the present invention is obtained by changing the configuration of the inflow passage formed in the body 1 with respect to the switching valve 101 of Embodiment 1.
First, the configuration of the switching valve 103 according to Embodiment 3 of the present invention will be described with reference to FIG.
A cylindrical valve hole 31a is formed in the body 31 of the switching valve 103 in the same manner as in the first embodiment.
The body 31 has a second inflow passage 31d and a second outflow passage 31e that extend in a direction perpendicular to the central axis of the valve hole 31a and communicate the valve hole 31a with the outside of the body 31, respectively. . The second inflow passage 31d and the second outflow passage 31e have a circular cross section and the same shape as each other, and have the same central axis and intersect perpendicularly to the central axis of the valve hole 31a.

Further, a first inflow passage 31b and a first outflow passage 31c having a circular cross section are formed in parallel with the second inflow passage 31d and the second outflow passage 31e, respectively. The first inflow passage 31 b extends from the valve hole 31 a to the middle of the body 31. Further, the first outflow passage 31 c extends so as to communicate the valve hole 31 a with the outside of the body 1. Note that the first inflow passage 31b and the first outflow passage 31c have the same opening cross section with respect to the valve hole 31a, and further intersect with the central axis of the valve hole 31a perpendicularly with the same central axis.
The body 31 is formed with a third inflow passage 31g extending vertically downward from the upper surface thereof. The third inflow path 31g has the same cross-sectional shape as the first inflow path 31b, and communicates the first inflow path 31b and the second inflow path 31d. Further, the upper end of the third inflow passage 31g is sealed by a cap 33 having a sealing function.
The distance L2 between the lower end of the flow path 2a of the valve body 2 and the upper end of the flow path 2b is larger than the distance L31 between the upper opening end of the first inflow passage 31b and the lower opening end of the second inflow passage 31d with respect to the valve hole 31a. It has become.

Therefore, when the valve body 2 slides in the valve hole 31a, the first flow path 2a communicates the first inflow path 31b and the first outflow path 31c, and the second inflow path 31d and the third inflow path. 31g, the 1st inflow passage 31b, the 1st channel 2a, and the 1st outflow passage 31c constitute the 1st fluid passage C13. The second flow path 2b communicates the second inflow path 31d and the second outflow path 31e, and the second inflow path 31d, the second flow path 2b, and the second outflow path 31e constitute a second fluid path C23. To do. The distance L2 between the lower end of the first flow path 2a of the valve body 2 and the upper end of the second flow path 2b is such that the upper opening end of the first inflow path 31b and the lower open end of the second inflow path 31d with respect to the valve hole 31a. Since the distance is greater than the distance L31, only one of the first fluid passage C13 and the second fluid passage C23 communicates with the sliding of the valve body 2 in the valve hole 31a.
Moreover, since the other structure of the switching valve 103 which concerns on this Embodiment 3 is the same as that of Embodiment 1, description is abbreviate | omitted.

Next, FIG. 11 is used to show the operation of the switching valve 103 according to Embodiment 3 of the present invention.
A fluid of gas supplied from a surge tank (not shown) flows into the switching valve 103 from the second inflow passage 31d. When the valve body 2 is in the state shown in FIG. 11, since the first inflow path 31b is blocked by the valve body 2, the fluid that has flowed into the second inflow path 31d flows through the second flow path 2b to the second outflow. It flows out of the switching valve 103 from the path 31e. That is, the fluid that has flowed into the second inflow passage 31d flows through the second fluid passage C23 that is in communication. Further, in the same manner as in the first embodiment, under the control of the driving device 9, the vibration actuator 10 is operated to rotate the valve body 2, whereby the flow passage cross-sectional area of the second fluid passage C 23, that is, the flow rate is increased. The maximum flow rate is adjusted to 0.

  In the same manner as in the first embodiment, when the vibration actuator 10 is operated and the valve body 2 is slid vertically downward under the control of the driving device 9, the communication of the second fluid passage C23 is connected to the valve body. 2 and the first fluid passage C13 communicates. That is, the fluid that has flowed into the second inflow path 31d flows out of the switching valve 103 from the first outflow path 31c through the third inflow path 31g, the first inflow path 31b, and the first flow path 2a. Furthermore, by rotating the valve body 2, the flow rate of the first fluid passage C13 is adjusted from the maximum flow rate to 0.

Therefore, the switching valve 103 selects and communicates one of the first fluid passage C13 and the second fluid passage C23 branched from the one second inflow passage 31d into two, and the flow rate is increased from the maximum flow rate to 0. To be adjusted.
Moreover, since the other operation | movement of the switching valve 103 concerning this Embodiment 3 is the same as that of Embodiment 1, description is abbreviate | omitted.
Thus, in the switching valve 103 in the third embodiment, the same effect as the switching valve 101 in the first embodiment can be obtained.

In the first to third embodiments, the valve bodies 2 and 22 reciprocate linearly to switch between the communication of the first fluid passages C1, C12, and C13 and the communication of the second fluid passages C2, C22, and C23. The flow rate of the first fluid passages C1, C12, C13 or the second fluid passages C2, C22, C23 communicated with each other is adjusted by rotating the valve bodies 2, 22. However, these may be reversed, and the communication between the first fluid passages C1, C12, and C13 and the communication of the second fluid passages C2, C22, and C23 are switched by rotating the valve bodies 2 and 22, The flow rates of the first fluid passages C1, C12, and C13 or the second fluid passages C2, C22, and C23 that communicate with each other may be adjusted by causing the valve bodies 2 and 22 to reciprocate linearly.
Further, in the first to third embodiments, the convex portion 10ba as the contact portion of the vibration actuator 10 is caused to perform an elliptical motion, but the cylindrical portions 2c and 22c in the axial direction with respect to the valve bodies 2 and 22 are used. Any vibration that causes sliding and circumferential rotation is acceptable. The elliptical motion in the directions P11 and Q11 is not limited to being in the yz plane but may be motion having an x-axis component, and the elliptical motion in the directions P12 and Q12 is not limited to being in the xz plane and may be motion having a y-axis component. .

It is a cross-sectional side view which shows the structure of the switching valve which concerns on Embodiment 1 of this invention. It is a cross-sectional side view which shows the structure of the switching valve of the state which rotated the valve body of FIG. 1 90 degrees. It is a schematic diagram of the cross section along the III-III line of FIG. It is a cross-sectional side view which shows the structure of the switching valve of the state which made the valve body of FIG. 1 slide. It is a perspective view which shows the structure of the vibration actuator of FIG. FIG. 6 is a partial cross-sectional view illustrating a configuration related to a piezoelectric element of the vibration actuator of FIG. 5. It is a perspective view which shows the polarization direction of the piezoelectric element board used with the vibration actuator of FIG. It is a cross-sectional side view which shows the structure of the switching valve which concerns on Embodiment 2 of this invention. It is sectional drawing along the IX-IX line of FIG. It is sectional drawing along the XX line of FIG. It is a cross-sectional side view which shows the structure of the switching valve which concerns on Embodiment 3 of this invention.

Explanation of symbols

  1,31 Body (valve body), 1a, 31a Valve hole, 1b, 31b First inflow path, 1c, 31c First outflow path, 1d, 31d Second inflow path, 1e, 31e Second outflow path, 2,22 Valve body, 2a 1st flow path (flow path, through hole), 22ab 1st flow path, 2b 2nd flow path (flow path, through hole), 22bb 2nd flow path, 2c, 22c cylindrical part, 8 spring ( Elastic member), 10 vibration actuator, 10ba convex portion (contact portion), 11, 12, 13 piezoelectric element portion (piezoelectric element), 22a, 22b V-shaped groove (groove portion), 31g third inflow path, 101, 102 , 103 switching valve, C1, C12, C13 first fluid passage, C2, C22, C23 second fluid passage.

Claims (7)

A valve body having at least two fluid passages;
A valve body having a columnar cylindrical portion that is housed in a valve hole provided in the valve body inside the valve body and is capable of two different movements;
The fluid passage has a flow path formed by the valve body in the valve hole, an inflow path, and an outflow path,
One of the two different movements of the valve body causes the flow path to switch between communication and non-communication between the inflow path and the outflow path in at least one of the at least two fluid paths. And
Due to the other of the two different movements of the valve body, the flow passage cross-sectional area of the flow passage of the at least one fluid passage communicated is changed, and the opening degree of the at least one fluid passage communicated is changed. A switching valve to be adjusted,
A vibration actuator provided inside the valve body and having a piezoelectric element, having a contact portion that contacts the valve body, and performing the two different movements on the valve body by vibration of the piezoelectric element. Switch valve with a vibration actuator. The vibration actuator is
The switching valve according to claim 1, wherein the contact portion performs elliptical motion by vibration of the piezoelectric element. The valve body is
Having an elastic member inside the valve body,
The elastic member is
The switching valve according to claim 1, wherein the contact portion of the vibration actuator is pressed against the valve body. The one of the two different movements of the valve body is a linear reciprocating motion in the axial direction of the cylindrical portion of the valve body;
The switching valve according to any one of claims 1 to 3, wherein the other of the two different movements of the valve body is a rotation operation in a circumferential direction of the cylindrical portion of the valve body. The valve body is
The cylindrical part is provided with a through-hole penetrating the cylindrical part,
The switching valve according to claim 4, wherein the through hole forms the flow path of the fluid passage. The valve body is
The cylindrical portion has a groove portion provided along the direction of the rotation of the valve body,
The groove is
Forming the flow path of the fluid passage together with the valve hole;
The switching valve according to claim 4, wherein a cross-sectional area perpendicular to the direction of the rotation operation changes along the direction of the rotation operation of the valve body. The switching valve according to claim 6, wherein the groove portion of the valve body has a symmetric cross-sectional shape with respect to a plane perpendicular to the axial direction of the cylindrical portion of the valve body.

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