JP2009272259A - Method of manufacturing hermetic seal component and hermetic seal component - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a hermetic seal component in which, when a hermetic sealing is carried out between a connection pin and a holding member by glass, a surface of a burning jig is inhibited from being transferred to a surface of the glass. <P>SOLUTION: In the method of manufacturing a hermetic seal component in which a holding member 1 made of a metallic material in which a penetrated hole 1d is formed is mounted on the burning jig 5 and held upright and a connection pin 3 is inserted into the penetrated hole to seal by glass between the penetrate hole and the connection pin, a first sealing glass 11 having a high softening temperature is arranged on a side contacting with a surface 5f of the burning jig, and a second sealing glass 12 having a softening temperature lower than that of the first sealing glass is arranged on the opposite side to the burning jig of the first sealing glass, and are heated and burned at a higher temperature than the softening temperature of the first sealing glass to seal between the penetrated hole of the holding member and the connection pin. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  In the present invention, a holding member made of a metal material in which a through hole is formed is placed on a firing jig and held upright, a connection pin is inserted into the through hole, and a glass between the through hole and the connection pin is made of glass. The present invention relates to a method for manufacturing a hermetic seal part to be sealed and a hermetic seal part.

  As is well known, hermetic seals are suitable for seals such as vacuum vessels and other sensors that require high airtightness, such as in places where high pressure is applied, such as Kovar and stainless steel ( Hereinafter, the structure is such that a holding member (shell or case) made of a metal member such as “SUS” and the connection pin is baked and hardened with glass. For this reason, it is applied to seals of connection terminals (connection pins) of sensors that have extremely high reliability and require high breakdown voltage, high liquid tightness, high air tightness, high insulation, and the like.

  FIG. 3 shows an example of a conventional method of manufacturing a hermetic seal part. The holding member 1 has a cylindrical shape made of a metal material, and a large-diameter concave portion 1b is formed concentrically on the upper surface 1a. The bottom surface 1c of the concave portion 1b is circumferentially arranged on the same circumference as shown in FIG. A plurality of, for example, four through holes 1d are formed at equal intervals along the axial direction. A glass tube 2 is inserted into each through-hole 1d, and a connection pin 3 is inserted into each glass tube 2. The holding member 1 is formed of a metal member such as SUS that is excellent in heat resistance, pressure resistance, weather resistance, and the like.

  The firing jig 5 for hermetic sealing has a disk shape larger in diameter than the holding member 1 and each of the circular recess 5b in which the lower portion of the holding member 1 is fitted to the upper surface 5a and the holding member 1 on the bottom surface 5c of the recess 5b. A columnar positioning projection (boss) 5d that protrudes at a position corresponding to the through-hole 1d and fits in the through-hole 1d, and a connection pin 3 is inserted through the center of the projection 5d and the connection pin A positioning pin hole 5e for determining the protrusion length 3 is formed.

  The hermetic seal firing jig 6 is attached to the upper end of the holding member 1 to position each connection pin 3 and has a disk shape with the same diameter as the firing jig 5 and a circular recess 6b on the lower surface 6a. And the recess 6c are formed concentrically with a step. The recess 6b is formed so that the upper end of the holding member 1 can be fitted, and the recess 6c has a slightly smaller diameter than the recess 6b. And the positioning pin hole 6e for inserting and positioning these in the position corresponding to each connection pin 3 which protrudes above the holding member 1 of the bottom face (ceiling) 6d of the recessed part 6c is formed.

  These firing jigs 5 and 6 for hermetic sealing have the property that the firing temperature of the glass tube 2 rises to about 1000 ° C., and carbon has the property that softened (melted) glass does not adhere. The firing jigs 5 and 6 are made of carbon. Note that the firing jig 6 may be formed of a metal member such as SUS so as not to contact the glass.

  The holding member 1 is erected with the lower part fitted into the recess 5b of the firing jig 5, the lower surface 1e abutting against the bottom surface 5c of the recess 5b, and the projections 5d fitted into the lower ends of the through holes 1d. Held. The glass tube 2 is inserted into the through-hole 1d from above the holding member 1 and dropped by its own weight, and the lower end surface 2a abuts on the upper surface 5f of the protruding portion 5d and is supported. The connection pin 3 is inserted into the glass tube 2 from above, falls due to its own weight, is inserted into the pin hole 5e of the protrusion 5d of the firing jig 5, and the lower end surface 3a contacts the bottom surface 5h of the pin hole 5e. Positioned in contact.

  Then, after the firing jig 6 is attached to the holding member 1 and the upper portions of the connection pins 3 are inserted and positioned in the pin holes 6e, they are carried into an electric furnace and heated to a predetermined high temperature. The glass tube 2 is softened by heating and is in close contact with the inner peripheral surface of the through hole 1 d of the holding member 1 and the outer peripheral surface of the connection pin 3 to seal between the holding member 1 and the connection pin 3.

  When the glass tube 2 is softened and sealed between the holding member 1 and the connection pin 3, the portion (lower surface) in contact with the protruding portion (boss) 5 d of the firing jig 5 is flat, and the upper portion On the opening side, the side in contact with the inner peripheral surface of the through-hole 1d and the outer peripheral surface of the connection pin 3 is higher due to surface tension, and the intermediate portion is lower. That is, the glass tube 2 has a shape in which the upper opening side is recessed in the middle with respect to the side in contact with the inner peripheral surface of the through hole 1 d and the outer peripheral surface of the connection pin 3.

As an application of a hermetic seal, powder glass is hardened by press molding to form a hollow cylindrical powder glass, and this solid powder glass is inserted into the lead wire insertion hole, and then the lead wire insertion hole by a plug. Both open ends of are covered. Next, the metal substrate is arranged so that the lead wire insertion hole extends in the vertical direction, the lower opening end of the lead wire insertion hole is covered with a plug, and the upper opening end of the lead wire insertion hole is covered with a plug. A hermetic sealing method and a hermetic sealing jig for electrical wiring in which lead wires are hermetically sealed with an insulating sealing glass formed by firing solid powder glass in this state (for example, patents) Reference 1).
JP 2006-1258 A (page 3-4, FIG. 5)

  The lower end surface 2a of the glass tube 2 is assembled in contact with the upper surface 5f of the protrusion (boss) 5d of the firing jig 5, and the glass tube 2 softens during firing and the lower end surface of the glass tube 2 ( The surface shape (unevenness) of the upper surface 5f of the protrusion 5d of the firing jig 5 is transferred to the surface 2a, and the unevenness of the lower end surface of the glass tube 2 becomes large, and insulation is caused by adhesion of cleaning residues and the like in the subsequent process. It causes a decrease in resistance. Further, there is a problem that the fine powder of carbon used in the firing jig 5 adheres to the lower end surface (surface) 2a of the glass tube 2 and causes insulation resistance. It cannot be solved by finishing the surface of the upper surface 5f of the part 5d smoothly. Further, from the viewpoint of manufacturing cost, the firing jig 5 is frequently used not only once but repeatedly. Therefore, the surface roughness of the upper surface 5f is deteriorated every time the number of firings is repeated. . The technique disclosed in Patent Document 1 has the same problem.

  An object of the present invention is to provide a method of manufacturing a hermetic seal part and a hermetic seal part that suppress the transfer of the surface of the firing jig to the surface of the glass when the connection pin and the holding member are hermetically sealed with glass. is there.

In order to solve the above-described problem, a method for manufacturing a hermetic seal component according to the present invention includes:
A hermetic in which a holding member made of a metal material in which a through hole is formed is placed and held on a firing jig, and a connection pin is inserted into the through hole and the space between the through hole and the connection pin is sealed with glass. In the manufacturing method of seal parts,
A first sealing glass having a high softening temperature is disposed on the side contacting the surface of the firing jig, and the first sealing glass is disposed on the opposite side of the firing jig with respect to the first sealing glass. A second sealing glass having a softening temperature lower than the softening temperature of the first sealing glass is heated and fired to a temperature higher than the softening temperature of the first sealing glass, and the through hole of the holding component and the connection pin It is characterized by sealing between the two.

  A first sealing glass having a high softening temperature is disposed in the through hole of the holding member on the side in contact with the surface of the firing jig, and the softening temperature of the first sealing glass is disposed on the first sealing glass. A second sealing glass having a softening temperature lower than that of the first sealing glass is disposed and fired at a temperature higher than the softening temperature of the first sealing glass.

  The second sealing glass is sufficiently softened because the softening temperature is lower than the firing temperature, and its inner peripheral surface is in close contact with the outer peripheral surface of the connection pin, and the outer peripheral surface is the inner peripheral surface of the through hole of the holding member. Close contact with. Thereby, between the holding member and the connection pin is completely sealed. Since the first sealing glass has a softening temperature higher than the softening temperature of the second sealing glass, the viscosity does not decrease much even in the state of being softened at the firing temperature. For this reason, the transfer of the surface shape (unevenness) of the firing jig to the lower end surface (surface) in contact with the surface of the firing jig is suppressed.

  This effectively prevents a decrease in insulation resistance due to cleaning residues in subsequent processes, and a decrease in insulation resistance due to the carbon powder used in the firing jig adhering to the glass end face (surface). can do.

A method for manufacturing a hermetic seal component according to claim 2 of the present invention is the method for manufacturing a hermetic seal component according to claim 1,
The firing jig is made of carbon.

  Carbon has a heat resistance to a high temperature of about 1000 ° C. when sealing between the holding member and the connection pin with glass, and has a property that the softened glass does not adhere. As carbon.

Moreover, the manufacturing method of the hermetic seal component which concerns on Claim 3 of this invention is the manufacturing method of the hermetic seal component of Claim 1,
The glass is characterized in that a plurality of the first and second sealing glasses made of a disk-shaped thick plate glass having a through hole in the center are stacked to have a predetermined length.

  A first sealing glass made of a disk-shaped thick plate glass having a through-hole at the center is disposed in the through-hole of the holding member, and an end surface thereof is brought into contact with the surface of the firing jig. A second sealing glass made of a disk-shaped thick plate glass having a through-hole at the center is placed on top of each other. In this case, a plurality of first and second sealing glasses forming a disc-shaped thick glass plate having a through-hole in the center may be arranged one by one or at least one first sealing glass. It is also possible to use a plurality of second sealing glasses on the first sealing glass.

  Thus, by using the disk-shaped thick plate glass having a through hole at the center as the first and second sealing glasses, the length of the glass can be easily adjusted to a desired length by changing the number thereof. It becomes possible to set to. Therefore, it is possible to easily cope with this by changing (increasing or decreasing) the number of second sealing glasses according to the required pressure resistance.

Moreover, the manufacturing method of the hermetic seal component which concerns on Claim 4 of this invention is the manufacturing method of the hermetic seal component of Claim 1,
The glass is characterized in that the first and second sealing glasses made of a cylindrical glass tube are stacked to have a predetermined length.

  A first sealing glass made of a cylindrical glass tube is disposed in the through hole of the holding member, and its surface (lower end surface) is brought into contact with the surface of the firing jig, and the first sealing glass is placed on the first sealing glass. A second sealing glass made of a cylindrical glass tube is stacked and disposed. Thus, by using cylindrical glass tubes as the first and second sealing glasses, the assemblability is improved and the workability is improved.

Moreover, the manufacturing method of the hermetic seal component according to claim 5 of the present invention is the method of manufacturing a hermetic seal component according to claim 1,
The first sealing glass is a disc-shaped thick plate glass having a through hole in the center, and the second sealing glass is a cylindrical glass tube.

  Inserting the glass tube into the through-hole of the holding member by using a disk-shaped thick plate glass having a through-hole centered on the first sealing glass and a second sealing glass as a cylindrical glass tube This facilitates the improvement of workability. In this case, a disc-shaped thick plate glass having a through hole at the center of at least one is used as the first sealing glass.

A hermetic seal component according to claim 6 of the present invention is
In a hermetic seal part having a structure in which a connection pin is inserted into a through hole of a holding member made of a metal material and a space between the through hole and the connection pin is sealed with glass.
The glass is
It consists of glass with a high softening temperature from the end surface on one side with respect to the longitudinal direction of the connection pin to a predetermined region along the connection pin,
It is characterized by being made of glass having a softening temperature lower than that of the glass from the end face on the other side to the predetermined region along the connection pin.

  According to the present invention, it is possible to provide a method of manufacturing a hermetic seal part that suppresses transfer of the surface of the firing jig to the surface of the glass when the connection pin and the holding member are hermetically sealed with glass.

  Hereinafter, a method for manufacturing a hermetic seal component according to an embodiment of the present invention will be described with reference to the drawings. 1, the same members as those shown in FIG. 3 are denoted by the same reference numerals, and detailed description thereof is omitted. As shown in FIG. 1, the holding member 1 has a lower portion fitted in the recess 5b of the firing jig 5, a lower surface 1e in contact with the bottom surface 5c of the recess 5b, and a positioning projection 5d at the lower end of the through hole 1d. Are fitted upright and held.

  Next, as shown in FIGS. 1 and 2, a plurality of first sealing glass 11 and second sealing glass 12 as sealing glasses are inserted into the through-hole 1d from the opening at the upper end, and the protrusion 5d. Place multiple layers on top of each other. These sealing glasses 11 and 12 consist of disk-shaped thick plate glass which has a through-hole in the center. Hereinafter, these sealing glasses are referred to as “tablet glass”. These tablet glasses 11 and 12 have an inner diameter and an outer diameter that allow the connection pin 3 to be inserted through the central through hole with a slight clearance and can be inserted into the through hole 1d of the holding member 1 with a slight clearance. It is formed at a predetermined height h.

  The first tablet glass 11 is stacked, for example, in two stages, and the second tablet glass 12 is stacked, for example, in four stages, so as to have a predetermined height H (H> h). And the lower end surface (surface) 11a of the 1st tablet glass 11 of the lowest step (lowermost step) is contacting the upper surface 5f of the projection part 5d. In addition, H of the whole height which accumulated these tablet glasses 11 and 12 is set slightly shorter (H <L) than the length (depth) L of the through-hole 1d.

  The first tablet glass 11 and the second tablet glass 12 have different softening temperatures, and the softening temperature of the first tablet glass 11 is higher than the softening temperature of the second tablet glass 12. The first tablet glass 11 has a softening temperature of about 800 ° C., for example, and the second tablet glass 12 has a softening temperature of about 700 ° C., for example. It is about ℃.

  Thus, when the 1st, 2nd tablet glass 11 and 12 is assembled | attached in the through-hole 1d of the holding member 1, the 1st tablet glass 11 with a high softening temperature is made lower (firing jig 5 side). The second tablet glass 12 having a low softening temperature is placed on the upper side (side away from the firing jig 5). These tablet glasses 11 and 12 are made of borosilicate glass. In addition, it is not restricted to borosilicate glass, You may use another glass according to a specification.

  As the 1st tablet glass 11, there exists GA-13 glass (Nippon Electric Glass Co., Ltd. product) whose softening temperature is 850 degreeC, for example. Moreover, as the 2nd tablet glass 12, there exists ST-W glass (Nippon Electric Glass Co., Ltd. product) whose softening temperature is 663 degreeC, for example.

  Next, the connection pins 3 are inserted from above the uppermost tablet glass 12. The connection pin 3 falls by its own weight and is sequentially inserted through the tablet glasses 12 and 11, and the lower end surface 3a is positioned in contact with the bottom surface 5h of the pin hole 5e of the projection 5d. As a result, the lower end portion of the connection pin 3 protrudes from the lower surface 1e of the holding member 1 by a predetermined length and is positioned. Further, the upper part of the connection pin 3 protrudes above the holding member 1 by a predetermined length.

  In this way, the first and second tablet glasses 11 and 12 and the connection pin 3 are inserted into the through hole 1d of the holding member 1 with a slight gap. Next, the firing jig 6 is mounted on the holding member 1, and the upper end portion of each connection pin 3 is inserted into each pin hole 6e for positioning. The connection pin 3 is made of, for example, an Fe-50Ni alloy.

  Next, these are carried into an electric furnace (not shown) and heated to a predetermined temperature (for example, about 900 ° C. to 1000 ° C.) higher than the softening temperature (about 800 ° C.) of the first tablet glass 11 and fired. When the second tablet glass 12 reaches a predetermined temperature (about 700 ° C.) lower than the softening temperature of the first tablet glass 11, the second tablet glass 12 starts to soften and its inner peripheral surface starts to weld to the outer peripheral surface of the connection pin 3, The outer peripheral surface begins to weld to the inner peripheral surface of the through hole 1d.

  When the temperature further rises and exceeds the softening temperature (about 800 ° C.) of the first tablet glass 11, the first tablet glass 11 begins to soften gradually and its inner peripheral surface is welded to the outer peripheral surface of the connection pin 3. First, the outer peripheral surface starts to weld to the inner peripheral surface of the through hole 1d. And it heats and bakes to the said predetermined temperature (about 900 to 1000 degreeC).

  At the firing temperature (about 900 ° C. to 1000 ° C.), the second tablet glass 12 having a low softening temperature is sufficiently softened so that the inner peripheral surface is completely adhered to the outer peripheral surface of the connection pin 3 and the outer peripheral surface is The space between the through hole 1d of the holding member 1 and the connection pin 3 is sealed by being in close contact with the inner peripheral surface of the through hole 1d. As shown in FIG. 1, the uppermost tablet glass 12 in the figure has a shape in which the side in contact with the inner peripheral surface of the through hole 1d and the outer peripheral surface of the connection pin 3 is raised due to surface tension, and the intermediate portion is recessed. ing.

  Moreover, the viscosity of the first tablet glass 11 does not decrease much even when the second tablet glass 12 is softened. Therefore, the lower end surface 11a of the lowermost first tablet glass 11 that is in contact with the upper surface 5f of the protrusion 5d of the firing jig 5 is substantially flat, and the surface of the upper surface 5f of the protrusion 5d. The shape (unevenness) is hardly transferred. Note that the lower end surface 11a is “substantially flat” means that the volume of the entire glass shrinks due to cooling after firing, and the end surface of the lower end surface 11a changes to a slightly concave surface accordingly, and is not a perfect plane. Means. However, the degree of depression of the lower end surface 11a is smaller than that of the other concave surface (upper end surface).

  The first tablet glass 11 has an inner peripheral surface and an outer peripheral surface that pass through the outer peripheral surface of the connection pin 3 and a through-hole even in a state in which the viscosity is not significantly reduced at the baking heating temperature (about 900 ° C. to 1000 ° C.). The holding member 1 and the connection pin 3 are sealed in close contact with the inner peripheral surface of the hole 1d. Then, after the firing is finished, the holding member 1 is taken out from the firing jigs 5 and 6. In this way, a hermetic seal part is manufactured.

  As shown in FIG. 1, the glass for sealing hermetic seal components has a flat end surface on one side (the end surface on the lower side in the figure) in the longitudinal direction of the connection pin 3, and an end surface on the other side (see FIG. 1). The middle upper end surface) has a shape in which the intermediate portion is recessed with respect to the side in contact with the inner peripheral surface of the through hole 1d and the outer peripheral surface of the connection pin 3. Further, the glass for sealing is made of glass 11 having a high softening temperature from the end surface on one side to a predetermined region (height) along the connection pin 3, and the predetermined glass along the connection pin 3 from the other end surface. It is set as the structure which consists of the glass 12 whose softening temperature is lower than the said glass 11 to the area | region of this.

  This effectively suppresses the transfer of the surface shape (unevenness) of the firing jig 5 to the lower end surface (front surface) 11a of the first tablet glass 11 in contact with the upper surface 5f of the protrusion 5d of the firing jig 5. It becomes possible to reduce the insulation resistance due to cleaning residues in the subsequent process, and the carbon powder used in the baking jig adheres to the lower end surface (surface) 11a of the first tablet glass 11 to reduce the insulation resistance. It can prevent effectively that it falls.

  In the above embodiment, the first tablet glass 11 having a high softening temperature to be assembled on the side in contact with the firing jig 5 (lower side) is two (two steps), and the upper side (opposite to the firing jig 5). The second tablet glass 12 having a low softening temperature to be assembled on the side) is set to four pieces (four steps), but is not limited to this ratio (1: 2), depending on the specifications of the hermetic seal parts, for example, withstand pressure What is necessary is just to set to an appropriate ratio.

  In the above embodiment, two types of tablet glasses having different softening temperatures are stacked and used as the sealing glass in an appropriate number (ratio), but the present invention is not limited to this, and two types of predetermined lengths having different softening temperatures are used. A cylindrical glass tube may be used. In this case as well, the first glass tube having a high softening temperature is disposed on the side (lower side) in contact with the firing jig 5 as described above, and the first glass tube is disposed on the first glass tube (on the opposite side to the firing jig 5). Of course, the second glass tube having a softening temperature lower than the softening temperature of the glass tube is placed in an overlapping manner. Moreover, what is necessary is just to set the length of these glass tubes to an appropriate length according to a specification.

  Or you may use it combining tablet glass and a cylindrical glass tube as sealing glass. For example, a first tablet glass having a high softening temperature is disposed on the side (lower side) that contacts the upper surface 5f of the protrusion 5d of the firing jig 5, and the first tablet glass is disposed on the first tablet glass (on the opposite side to the firing jig 5). A second cylindrical glass tube having a softening temperature lower than the softening temperature of the tablet glass may be assembled.

  In addition, the above-described method for manufacturing a hermetic seal part according to the present invention can be applied to a hermetic seal part in which the surface shape (unevenness) of the firing jig needs to be prevented from being transferred to the glass surface in the glass hermetic seal. .

  As described above, the first sealing glass having a high softening temperature is disposed in the through hole of the holding member on the side in contact with the surface of the baking jig, and the first sealing glass is placed on the first sealing glass. A second sealing glass having a softening temperature lower than the softening temperature of the glass is disposed and fired at a temperature higher than the softening temperature of the first sealing glass. Since the softening temperature is lower than the firing temperature, the second sealing glass is sufficiently softened so that its inner peripheral surface is in close contact with the outer peripheral surface of the connection pin, and its outer peripheral surface is in close contact with the inner peripheral surface of the holding member. .

  Thereby, between the holding member and the connection pin is completely sealed. Since the first sealing glass has a softening temperature higher than the softening temperature of the second sealing glass, the viscosity does not decrease much even in the state of being softened at the firing temperature. For this reason, the transfer of the surface shape (unevenness) of the firing jig to the lower end surface (surface) in contact with the surface of the firing jig is suppressed. This effectively prevents a decrease in insulation resistance due to cleaning residues in subsequent processes, and a decrease in insulation resistance due to the carbon powder used in the firing jig adhering to the glass end face (surface). can do.

  Carbon has heat resistance to a high temperature of about 1000 ° C. when the gap between the holding member and the connection pin is sealed with glass, and has a property that softened glass does not adhere. Thereby, carbon is used as a firing jig.

  In addition, a first sealing glass made of a disk-shaped thick plate glass having a through hole at the center is disposed in the through hole of the holding member, and the end surface thereof is brought into contact with the surface of the firing jig, and this first sealing is performed. A second sealing glass made of a disk-shaped thick plate glass having a through-hole at the center is placed on the stop glass in an overlapping manner. In this case, a plurality of first and second sealing glasses forming a disc-shaped thick glass plate having a through-hole in the center may be arranged one by one or at least one first sealing glass. It is also possible to use a plurality of second sealing glasses on the first sealing glass.

  Thus, by using the disk-shaped thick plate glass having a through hole at the center as the first and second sealing glasses, the length of the glass can be easily adjusted to a desired length by changing the number thereof. It becomes possible to set to. Therefore, it is possible to easily cope with this by changing (increasing or decreasing) the number of second sealing glasses according to the required pressure resistance.

  Moreover, the 1st sealing glass which consists of a cylindrical glass tube is arrange | positioned in the through-hole of a holding member, the surface (lower end surface) is made to contact the surface of a baking jig, and this 1st sealing glass of A second sealing glass made of a cylindrical glass tube is placed on top. Thus, by using cylindrical glass tubes as the first and second sealing glasses, the assemblability is improved and the workability is improved.

  Moreover, it is set as the disk-shaped thick plate glass which has a through-hole centering on 1st sealing glass, and makes the 2nd sealing glass into a cylindrical glass tube, The glass tube in the through-hole of a holding member Can be easily inserted, and workability can be improved. In this case, a disc-shaped thick plate glass having a through hole at the center of at least one is used as the first sealing glass.

It is sectional drawing which shows the manufacturing method of the hermetic seal component which concerns on embodiment of this invention. It is a principal part enlarged view of the manufacturing method of the hermetic seal components shown in FIG. It is sectional drawing which shows the manufacturing method of the conventional hermetic seal components. FIG. 4 is a cross-sectional view taken along the arrow IV-IV of the hermetic seal component shown in FIG. 3.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Holding member 1a Upper surface 1b Recessed part 1c Bottom surface 1d Through-hole 1e Lower surface 2 Glass tube 2a Lower end surface 3 Connection pin 3a Lower end surface 5 (For hermetic seal) Firing jig 5a Upper surface 5b Recessed part 5c Bottom surface 5d Protruding part 5e Pin hole 5f Protruding part Upper surface 5h Bottom surface of protrusion 6 (for hermetic seal) Firing jig 6a Lower surface 6b, 6c Recess 6d Bottom surface (ceiling)
6e pin hole 11 1st sealing glass (tablet glass)
11a Lower surface 12 Second sealing glass (tablet glass)
h Tablet glass height H Overall tablet glass height L Through hole depth

Claims (6)

A hermetic in which a holding member made of a metal material in which a through hole is formed is placed and held on a firing jig, and a connection pin is inserted into the through hole and the space between the through hole and the connection pin is sealed with glass. In the manufacturing method of seal parts,
A first sealing glass having a high softening temperature is disposed on the side contacting the surface of the firing jig, and the first sealing glass is disposed on the opposite side of the firing jig with respect to the first sealing glass. A second sealing glass having a softening temperature lower than the softening temperature of the first sealing glass is heated and fired to a temperature higher than the softening temperature of the first sealing glass, and the through hole of the holding component and the connection pin A method of manufacturing a hermetic seal part, wherein the gap is sealed.   2. The method for manufacturing a hermetic seal part according to claim 1, wherein the firing jig is made of carbon.   2. The glass according to claim 1, wherein the glass is formed to have a predetermined length by stacking a plurality of the first and second sealing glasses made of a disk-shaped thick plate glass having a through hole in the center. Manufacturing method for hermetic seal parts.   The method for manufacturing a hermetic seal component according to claim 1, wherein the glass is formed to have a predetermined length by overlapping the first and second sealing glasses made of a cylindrical glass tube.   The hermetic according to claim 1, wherein the first sealing glass is a disc-shaped thick plate glass having a through hole in the center, and the second sealing glass is a cylindrical glass tube. Manufacturing method of seal parts. In a hermetic seal part having a structure in which a connection pin is inserted into a through hole of a holding member made of a metal material and a space between the through hole and the connection pin is sealed with glass.
The glass is
It consists of glass with a high softening temperature from the end surface on one side with respect to the longitudinal direction of the connection pin to a predetermined region along the connection pin,
A hermetic seal component comprising a glass having a softening temperature lower than that of the glass from the other end surface to the predetermined region along the connection pin.

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