JP2009123476A - Hermetic sealing tool and method for manufacturing the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a hermetic sealing tool for preventing adhesion of glass to an end face of a connecting pin when hermetically sealing the connecting pin and a holder member with a glass tube. <P>SOLUTION: In the hermetic sealing tool 11, the holder member 1 of a metal material having a through-hole 1d into which a glass tube 2 through which the connecting pin 3 passes is inserted is held upright, the holder member is heated while inserting the glass tube through which the connecting pin passes into the through-hole by fusing the glass tube and bringing the fused glass into close-contact with an inner peripheral surface of the through-hole in the holder member and with an outer peripheral surface of the connecting pin to seal them together. A fixture part contacting at least a lower end face 3a of the connecting pin is formed by a member more excellent in adhesion to glass of the glass tube than the connecting pin. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a hermetic seal jig and a hermetic seal manufacturing method.

  As is well known, hermetic seals are suitable for seals such as vacuum vessels and other sensors that require high airtightness, such as in places where high pressure is applied, such as Kovar and stainless steel ( Hereinafter, the structure is such that a holding member (shell or case) made of a metal member such as “SUS” and a connection pin is baked and hardened with glass (glass). For this reason, it is applied to seals of connection terminals (connection pins) of sensors that have extremely high reliability and require high breakdown voltage, high liquid tightness, high air tightness, high insulation, and the like.

  FIG. 3 shows a case where the connection pin 3 is sealed with glass on a metal holding member 1 to which a conventional hermetic sealing jig is applied. The holding member 1 has a cylindrical shape, and a large-diameter concave portion 1b is formed concentrically on the upper surface 1a. A plurality of the holding members 1 are arranged at equal intervals in the circumferential direction on the same circumference as shown in FIG. For example, four through holes 1d are formed along the axial direction. A glass tube 2 is inserted into each through-hole 1d, and a connection pin 3 is inserted into each glass tube 2. The holding member 1 is formed of a metal member such as SUS that is excellent in heat resistance, pressure resistance, weather resistance, and the like.

  The hermetic sealing jig 5 is formed in a disc shape having a larger diameter than the holding member 1, and each of the circular concave portion 5b in which the lower portion of the holding member 1 is fitted to the upper surface 5a and the holding member 1 on the bottom surface 5c of the concave portion 5b. A cylindrical projection (boss) 5d that protrudes at a position corresponding to the through-hole 1d and fits in the through-hole 1d, and the connection pin 3 is inserted into the center of the projection 5d and the projection of the connection pin 3 A positioning pin hole 5e for determining the length is formed.

  The hermetic seal jig 6 is attached to the upper end of the holding member 1 to position each connection pin 3. The hermetic seal jig 6 has a disk shape having the same diameter as the jig 5 and a circular recess 6b on the lower surface 6a. The recess 6c is formed concentrically and with a step. The recess 6b is formed so that the upper end of the holding member 1 can be fitted, and the recess 6c has a slightly smaller diameter than the recess 6b. And the positioning pin hole 6e for inserting and positioning these in the position corresponding to each connection pin 3 which protrudes above the holding member 1 of the bottom face (ceiling) 6d of the recessed part 6c is formed.

  These jigs 5 and 6 for hermetic sealing have the property that the firing temperature of the glass tube 2 rises to about 1000 ° C., and carbon has the property that molten glass does not adhere to these jigs 5. And 6 are made of carbon. Note that the jig 6 may be formed of a metal member such as SUS so as not to contact the molten glass.

  The holding member 1 has a lower portion fitted into the concave portion 5b of the jig 5, a lower surface 1e abutted against the bottom surface 5c of the concave portion 5b, and a protruding portion 5d fitted into the lower end portion of the through hole 1d. Is done. The glass tube 2 is inserted into the through-hole 1d from above the holding member 1 and falls due to its own weight, and the lower end surface is supported by being in contact with the upper surface of the protruding portion 5d. The connecting pin 3 is inserted into the glass tube 2 from above and dropped by its own weight, and is inserted into the pin hole 5e of the protrusion 5d of the jig 5, so that the lower end surface 3a contacts the bottom surface of the pin hole 5e and is positioned. Is done.

  Then, after the jig 6 is attached to the holding member 1 and the upper portion of the connection pin 3 is inserted into the pin hole 6e and positioned, it is carried into an electric furnace and heated to a predetermined high temperature. The glass tube 2 is melted by heating and is brought into close contact with the inner peripheral surface of the through hole 1 d of the holding member 1 and the outer peripheral surface of the connection pin 3 to seal between the holding member 1 and the connection pin 3.

As an application of a hermetic seal, powder glass is hardened by press molding to form a hollow cylindrical powder glass, and this solid powder glass is inserted into the lead wire insertion hole, and then the lead wire insertion hole by a plug. Both open ends of are covered. Next, the metal substrate is arranged so that the lead wire insertion hole extends in the vertical direction, the lower opening end of the lead wire insertion hole is covered with a plug, and the upper opening end of the lead wire insertion hole is covered with a plug. There has been proposed a hermetic sealing method and a hermetic sealing jig for electrical wiring in which lead wires are hermetically formed by insulating sealing glass formed by firing solid powder glass in this state (for example, Patent Documents). 1).
JP 2006-1258 A (page 3-4, FIG. 5)

  The hermetic-seal glass tube 2 is usually formed using a tablet obtained by baking and solidifying powdered glass. However, since the tablet has pores in the form of a sponge, the glass powder is easily broken when inserting the connection pin 3. Often scattered. Further, the glass tube 2 may be formed from a tablet, or may be formed by cutting a glass formed in a tubular shape into a necessary length without using a tablet. In many cases, burrs are present in the portion, and because of the nature of glass, the outer peripheral portion and the inner peripheral end are likely to be chipped, so that the burrs are scraped and scattered / dropped when inserted into the through hole 1d of the holding member 1. .

  The connection pin 3 is inserted into the pin hole 5e of the glass tube 2 and the jig 5, falls by its own weight, and is positioned by the lower end surface 3a abutting against the bottom surface of the pin hole 5e. If glass powder, broken pieces, etc. scattered or dropped are sandwiched between the lower end surface 3a and the bottom surface of the pin hole 5e, the glass always adheres to the lower end surface 3a of the connection pin 3 when fired. For this reason, an unplated portion occurs when the lower end surface 3a of the connection pin 3 is plated with gold after the hermetic seal. Therefore, in the step of wire bonding to the lower end surface 3a of the connection pin 3, the non-plated portion causes a bonding failure and becomes a defective product, resulting in a decrease in yield. Hermetic seals are applied to various technologies, and it goes without saying that improvement in yield is important, but when wire bonding is performed on connection pins in the subsequent process, special care should be taken not to generate unplated parts. There is a need.

  In addition, the technique disclosed in Patent Document 1 is considered to prevent the glass powder from scattering because the plug is fitted to the bottom of the solid powder glass, but the solid powder is inserted into the lead wire insertion hole of the metal base. The lead wire is inserted after the glass is inserted, and there is a possibility that the glass powder adheres to the end surface of the lead wire when the lead wire is inserted, as in the prior art.

  An object of the present invention is to provide a hermetic seal jig and a method for manufacturing a hermetic seal that prevent glass from adhering to the end face of the connection pin when the connection pin and the holding member are hermetically sealed with a glass tube. It is in.

In order to solve the above-described problems, the hermetic sealing jig according to the present invention is:
A through hole for inserting a glass tube through which the connection pin is inserted is formed and a holding member made of a metal material is erected and held in a state where the glass tube through which the connection pin is inserted is inserted into the through hole. In a hermetic sealing jig for sealing the glass tube by melting the glass tube by heating the holding member and sealing the glass tube to the inner peripheral surface of the through hole of the holding member and the outer peripheral surface of the connection pin,
It is characterized in that at least a portion of the jig that is in contact with the lower end surface of the connection pin is formed of a member having better adhesion to the glass forming the glass tube than the connection pin.

Further, the hermetic seal manufacturing method according to claim 3 of the present invention is:
A first step of standing and holding a metal holding member in which a through-hole for inserting a glass tube for inserting a connection pin is formed on a jig;
A second step of inserting a glass tube through which the connection pin is inserted into the through hole;
In a hermetic seal manufacturing method, comprising: a third step of heating the holding member to melt the glass tube so that the glass tube is in close contact with the inner peripheral surface of the through hole and the outer peripheral surface of the connection pin and sealed. ,
In the second step, the lower end surface of the connection pin is brought into contact with a member having better adhesion to the glass of the glass tube than the connection pin.

A hermetic seal manufacturing method according to claim 4 of the present invention is the hermetic seal manufacturing method according to claim 3,
In the second step, the lower end surface of the glass tube is brought into contact with a portion formed by a member to which the glass tube does not adhere.

  A holding member is erected on the jig, and a glass tube is inserted into the through hole of the holding member from above. The glass tube falls by its own weight, and the lower end surface is held in contact with the jig. Next, a connection pin is inserted into the glass tube from above. The connection pin is inserted by inserting the glass tube by its own weight, and the lower end surface is in contact with the jig. Next, these are heated to melt the glass tube and adhere closely to the inner peripheral surface of the through hole and the outer peripheral surface of the connection pin.

  When a glass tube is inserted into the through hole of the holding member or when a connection pin is inserted into the glass tube, a part of the glass tube is broken or chipped, and glass powder or broken pieces are scattered and dropped, and the jig When falling or adhering to the top, it is sandwiched between the lower end surfaces of the connection pins.

  The jig is made of a member that has better adhesion with glass than the connection pin (good compatibility), so that the glass melted in a state sandwiched between the lower end surface of the connection pin and the jig. The powder or debris adheres (welds) to the jig and does not adhere to the lower end surface of the connection pin. That is, the glass is prevented from adhering to the lower end surface of the connection pin. Thereby, a connection pin can be hermetically sealed to a holding member, without glass adhering to the lower end surface of a connection pin. Accordingly, gold plating or the like can be performed over the entire end face of the connection pin, and the occurrence of defective products during wire bonding can be greatly suppressed, and the yield of products can be greatly improved.

A hermetic seal jig according to claim 2 of the present invention is the hermetic seal jig according to claim 1,
A through hole for inserting a glass tube through which the connection pin is inserted is formed and a holding member made of a metal material is erected and held in a state where the glass tube through which the connection pin is inserted is inserted into the through hole. In a hermetic sealing jig for sealing the glass tube by melting the glass tube by heating the holding member and sealing the glass tube to the inner peripheral surface of the through hole of the holding member and the outer peripheral surface of the connection pin,
The jig is formed of a member having at least a portion in contact with the lower end surface of the connection pin and having excellent adhesion to the glass forming the glass tube than the connection pin, and corresponds to the hole of the glass holding member on the upper surface. Glass attachment prevention member insertion hole is formed at the position to
The glass adhesion prevention member insertion hole is formed in a tube shape, and the connection pin is inserted therethrough, and the glass adhesion prevention member supporting the glass tube with the upper end surface contacting the lower end surface of the glass tube is detachably inserted. It is characterized by being.

  Insert the tube-shaped glass adhesion prevention member into the glass adhesion prevention member insertion hole of the jig, place the holding member on the jig, and fit the upper part of the glass adhesion prevention member to the lower end of each through hole. A holding member is erected on the jig. Next, a glass tube is inserted into each through hole of the holding member from above. The glass tube is dropped by its own weight, and its lower end surface comes into contact with the upper end surface of the glass adhesion preventing member and is held. Next, a connection pin is inserted into the glass tube from above. The connection pin is positioned by the glass tube and the tube-shaped glass adhesion preventing member inserted by its own weight, and the lower end surface abutting against the bottom surface of the glass adhesion preventing member insertion hole of the jig.

  When a glass tube is inserted into the through hole of the holding member or when a connection pin is inserted into the glass tube, a part of the glass tube is broken or chipped, and glass powder or fragments are scattered and dropped, and the glass adheres. When it adheres on the bottom surface of the prevention member insertion hole, it is sandwiched between the lower end surfaces of the connection pins.

  When the glass is melted by firing in this state, the jig is made of a member that is at least in contact with the lower end surface of the connection pin, i.e., the bottom surface of the glass adhesion preventing member insertion hole has better adhesion to glass than the connection pin. By being formed, the glass melted in the state sandwiched between the lower end surface of the connection pin and the bottom surface of the glass adhesion preventing member insertion hole of the jig adheres (welds) to the bottom surface of the connection pin. It does not adhere to the lower end surface. That is, the glass is prevented from adhering to the lower end surface of the connection pin. Further, since the lower end surface of the glass tube is supported by the glass adhesion preventing member, it does not adhere (weld) to the glass adhesion preventing member even if it is melted. Thereby, a connection pin can be sealed to a holding member, without glass adhering to the lower end surface of a connection pin.

  When the glass adhesion preventing member is worn or damaged, the glass adhesion preventing member is taken out from the glass adhesion preventing member insertion hole of the jig and replaced with a new glass adhesion preventing member. Thereby, it becomes possible to replace | exchange only a glass adhesion prevention member easily, and the reduction of the maintenance cost of a jig | tool is achieved.

  According to the present invention, in the hermetic seal in which the space between the holding member and the connection pin is baked and hardened with glass, at least the portion of the jig that contacts the lower end surface of the connection pin is more adhesive to the glass of the glass tube than the connection pin. By being formed of an excellent member, even when glass powder or fragments are sandwiched between the end face of the connection pin and the jig, the glass adheres to the end face of the connection pin when the glass is baked. This can be prevented. This eliminates the occurrence of non-plated parts when gold plating is applied to the end face of the connection pin after hermetic sealing, improving the product yield, and especially suitable for products where wire bonding is applied to the connection pin in the subsequent process. A product is obtained.

  Hereinafter, a hermetic sealing jig according to a first embodiment of the present invention will be described with reference to the drawings. In addition, the same code | symbol is attached | subjected to the same member as the member shown in FIG. In FIG. 1, the holding member 1 has a cylindrical shape, and a large-diameter concave portion 1b is concentrically formed on the upper surface 1a. A plurality of, for example, four concave members 1b are circumferentially spaced on the same circumference on the bottom surface 1c. Through-holes 1d are formed along the axial direction (see FIG. 4). The glass tubes 2 can be inserted into the through holes 1d, and the connection pins 3 can be inserted into the glass tubes 2. The holding member 1 is formed of a metal member such as SUS that is excellent in heat resistance, pressure resistance, weather resistance, and the like.

  The glass tube 2 as the sealing glass can be inserted with a slight clearance (clearance) in the through hole 1d of the holding member 1 and has a length longer than the depth (length) of the through hole 1d. It is set slightly short. Thus, the glass tube 12 is prevented from protruding from the through hole 1d when it is inserted into the through hole 1d and melted. The glass tube 2 is formed by cutting a long borosilicate glass tube into a predetermined length, for example. The glass tube 2 may be formed by, for example, compressing and molding a mixture of glass powder and a small amount of binder in a mold and then sintering in a furnace.

  The connection pin 3 has a predetermined length longer than the length of the holding member 1 and is formed to have an outer diameter that can be inserted into the glass tube 2 with a slight gap (clearance). The connection pin 3 is formed of a metal member such as Kovar and plated with nickel or the like. The connection pin 3 is subjected to other metal plating such as gold plating on the lower end surface 3a and the upper end surface 3b according to the specification after the hermetic seal is completed.

  The hermetic sealing jig 11 is formed in a disk shape having a diameter larger than that of the holding member 1, and a circular concave portion 11b into which the lower portion of the holding member 1 is fitted is formed on the upper surface 11a, and the bottom surface 11c of the concave portion 11b is formed. A cylindrical projection (boss) 11d having a predetermined height is provided so as to correspond to each through-hole 1d of the holding member 1 and to be fitted into the open end. A pin hole 11e for inserting the connection pin 3 is formed through the bottom surface 11f at the center of the upper surface of each projection 11d. The plate thickness from the bottom surface 11 c to the lower surface 11 f of the recess 11 b of the jig 11 is set to a plate thickness corresponding to the protruding length from the lower surface 1 e of the holding member 1 to the lower end surface 3 a of the connection pin 3.

  The hermetic seal jig 11 is obtained by processing a baked and hardened carbon because the firing temperature for firing the glass tube 2 rises to around 1000 ° C. and a material to which the molten glass does not adhere is required. Is formed.

  The hermetic seal jig 12 has a disk shape larger in diameter than the jig 11, and a circular recess 12b into which the lower portion of the jig 11 is fitted is formed on the upper surface 12a. And the lower end surface 3a of the connection pin 3 which penetrated the lower surface 11f of the jig | tool 11 to the bottom face 12c of this recessed part 12b, and the glass tube 2 inserted in each through-hole 1d of the holding member 1, and the pin hole 11e of the jig | tool 11. Can be contacted. That is, the jig 12 positions the connection pin 3.

And this jig | tool 12 is formed with the member (member with good compatibility) excellent in adhesiveness with glass rather than the connection pin 13. FIG. Examples of such a member include oxides such as alumina ceramics (Al ₂ O ₃ ). This alumina ceramic has heat resistance similar to carbon and can sufficiently withstand the high temperature of the hermetic seal, and has good compatibility with glass SiO ₂ which is the same oxide and has excellent adhesion. The hermetic sealing jig 6 is the same as the jig shown in FIG.

  Next, a case where hermetic sealing is performed using the above-described hermetic sealing jig will be described. First, as shown in FIG. 1, the lower portion of the jig 11 is fitted into the concave portion 12b of the jig 12, and the lower surface 11f is brought into contact with the lower surface 12c of the concave portion 12b. In this way, the jig 11 is mounted in the recess 12b of the jig 12. Next, the lower portion of the holding member 1 is fitted into the recess 11b of the jig 11, and the projections 11d are inserted into the opening ends of the corresponding through holes 1d of the holding member 1, and the lower surface 1e is inserted into the bottom surface 11c of the recess 11b. Abut. In this way, the holding member 1 is erected on the jig 12.

  Next, the glass tube 2 is inserted into each through hole 1 d of the holding member 1 from above. The glass tube 2 is dropped by its own weight, and the lower end surface is in contact with the upper surface of the protruding portion 11d and is held in this position. That is, the glass tube 2 is held at an inner (upper) position slightly lower than the lower surface 1e of the holding member 1 without falling off from the through hole 1d. Moreover, the upper end of the glass tube 2 is located in the vicinity of the upper end of the through hole 1d.

  Next, the connection pin 3 is inserted into the glass tube 2 from above. The connection pin 3 is positioned by the glass tube 2 and the pin hole 11e of the protrusion 11d being inserted by its own weight, with the lower end surface 3a coming into contact with the bottom surface 12c of the recess 12b of the jig 12. Alternatively, the connection pin 3 may be inserted into the glass tube 2 in advance, and the glass tube 2 and the connection pin 3 may be simultaneously inserted into the through hole 1d of the holding member 1. Then, the jig 6 is attached to the upper end of the holding member 1, and the upper portion of the connection pin 3 is inserted into the positioning pin hole 6e for positioning.

  Next, these are carried into an electric furnace (not shown) and heated to a predetermined temperature. When the glass tube 2 reaches a predetermined temperature, it melts and adheres closely to the inner peripheral surface of the through hole 1 d and the outer peripheral surface of the connection pin 3. Further, when the glass tube 2 is inserted into the through hole 1d of the holding member 1 or when the connection pin 3 is inserted into the glass tube 2, a part of the glass tube is broken or chipped, and glass powder or broken pieces are scattered. If it falls and falls into the pin hole 11e of the protrusion 11d and falls on or adheres to the bottom surface 12c of the recess 12b of the jig 12, it is sandwiched between the lower end surface 3a and the bottom surface 12c of the connection pin 3 It is.

  However, in the case of the present embodiment, the jig 12 is formed of alumina ceramic that is more easily bonded to glass than the connection pin 3, so that the lower end surface 3 a of the connection pin 3 and the bottom surface 12 c of the recess 12 b of the jig 12. The glass melted in a state of being sandwiched between and adheres to the bottom surface 12 c and does not adhere to the lower end surface 3 a of the connection pin 3. That is, the adhesion of the glass to the lower end surface 3a of the connection pin 3 is prevented.

  Further, the glass tube 2 is set to be shorter than the length of the through hole 1d of the holding member 1, so that the glass tube 2 does not flow out from the upper end of the through hole 1d. Thereby, the connection pin 3 can be hermetically sealed to the holding member 1 in the state as shown in FIG. 1 and without the glass adhering to the lower end surface 3 a of the connection pin 3.

  Then, after the hermetic sealing step is completed, the holding member 1 is taken out from the jig 11. As described above, by preventing the glass from adhering to the lower end surface 3a of the connection pin 3, gold plating or the like can be satisfactorily applied to the lower end surface 3a of the connection pin 3 after hermetic sealing. In addition, glass powder, broken pieces, and the like do not adhere to the upper end surface 3b of the connection pin 3.

Further, if the portion of the jig 12 that contacts the lower end surface 3a of the connection pin 3 is worn due to friction with the connection pin 3, the height of the connection pin 3 after hermetic sealing may vary, resulting in wire bonding failure. However, by using a hard member such as alumina ceramics (Al ₂ O ₃ ) for the jig 12, the jig can be provided with durability, and the life of the jig can be extended.

  In the above embodiment, the jig 12 is made of carbon, and at least a portion corresponding to the lower end surface 3a of the connection pin 3 of the bottom surface 12c of the recess 12b or the entire surface of the bottom surface 12c, for example, a thin plate is disposed. The jig 11 may be mounted. Thereby, it becomes possible to prevent the glass from adhering to the lower end surface 3a of the connection pin 3, and to suppress wear of the contact portion with the connection pin 3.

  FIG. 2 shows a hermetic sealing jig according to a second embodiment of the present invention. In FIG. 2, the same or corresponding members as those shown in FIG. 1 are denoted by the same or corresponding reference numerals, and detailed description thereof is omitted. The hermetic sealing jig 15 has a disk shape larger in diameter than the holding member 1 and is formed with a circular recess 15b into which the lower portion of the holding member 1 is fitted on the upper surface 15a. A glass adhesion preventing member insertion hole 15d having the same diameter as the through hole 1d is formed at a predetermined depth at a position facing the open end of each through hole 1a of the holding member 1.

The glass adhesion preventing member insertion hole 15d is used for positioning the connection pin 3 and fitting the glass adhesion preventing member 16, and is set to the length of the connection pin 3 protruding from the lower surface 11e of the holding member 1. ing. This jig 15 is formed of an oxide such as alumina ceramics (Al ₂ O ₃ ) which has better adhesion with the glass tube 2 than the connection pin 3 (good compatibility), like the jig 12 described above. Yes.

  A tube-shaped glass adhesion preventing member 16 is detachably fitted in each glass adhesion preventing member insertion hole 15 d of the jig 15. The glass adhesion preventing member 16 has an outer diameter that is the same as that of the through hole 1d of the holding member 1, an inner diameter that is the same as the inner diameter of the glass tube 2, and the connection pin 3 can be inserted therethrough. The glass adhesion preventing member 16 is fitted in the glass adhesion preventing member insertion hole 15d, the lower end surface 16a is in contact with the bottom surface 15e of the glass adhesion preventing member insertion hole 15d, and the upper portion 16b is the bottom surface 15c of the recess 15b. It protrudes by a predetermined length from the through hole 1d of the holding member 1 and can be inserted. The glass adhesion preventing member 16 is made of carbon having a property that molten glass does not adhere.

  Next, a case where hermetic sealing is performed by the hermetic sealing jig 15 having the above-described configuration will be described. First, as shown in FIG. 2, the glass adhesion preventing member 16 is fitted into the glass adhesion preventing member insertion hole 15 d of the jig 15. In this state, the upper portion 16b of the glass adhesion preventing member 16 protrudes from the bottom surface 15c of the recess 15b by a predetermined length. Next, the lower portion of the holding member 1 is fitted into the concave portion 15b of the jig 15, and the upper portion 16b of the glass adhesion preventing member 16 is fitted to the lower end portion of each through hole 1d. Is brought into contact with the bottom surface 15c of the recess 15b. In this way, the holding member 1 is erected on the jig 15.

  Next, the glass tube 2 is inserted into each through hole 1 d of the holding member 1 from above. The glass tube 2 falls by its own weight, and its lower end surface is held in contact with the upper end surface of the glass adhesion preventing member 16. Next, the connection pin 3 is inserted into the glass tube 2 from above. The connection pin 3 is positioned by the glass tube 2 and the glass adhesion preventing member 16 being inserted by its own weight, and the lower end surface 3a abutting against the bottom surface 15e of the glass adhesion preventing member insertion hole 15d of the jig 15. Alternatively, the connection pin 3 may be inserted into the glass tube 2 in advance, and the glass tube 2 and the connection pin 3 may be simultaneously inserted into the through hole 1d of the holding member 1. Then, the jig 6 is attached to the upper end portion of the holding member 1, and the upper portion of the connection pin 3 is inserted into the positioning pin hole 6e for positioning.

  When the glass tube 2 is inserted into the through-hole 1d of the holding member 1 or when the connection pin 3 is inserted into the glass tube 2, a part of the glass tube 2 is broken or chipped so that glass powder or fragments are scattered. If it falls and falls or adheres to the bottom surface 15e of the glass adhesion preventing member insertion hole 15d, it is sandwiched between the lower end surface 3a and the bottom surface 15e of the connection pin 3.

  However, in the case of the present embodiment, the jig 15 is made of alumina ceramic that is more easily bonded to glass than the connection pin 3, so that the glass adhesion preventing member insertion of the lower end surface 3 a of the connection pin 3 and the jig 15 is inserted. The glass melted while sandwiched between the bottom surface 15e of the hole 15d adheres (welds) to the bottom surface 15e and does not adhere to the lower end surface 3a of the connection pin 3. That is, the adhesion of the glass to the lower end surface 3a of the connection pin 3 is prevented. Thereby, the connection pin 3 can be hermetically sealed to the holding member 1 without glass adhering to the lower end surface 3 a of the connection pin 3.

  Moreover, since the glass adhesion preventing member 16 is formed of carbon, the glass adhesion preventing member 16 is easily worn, and since the glass adhesion preventing member 16 is formed in a thin tube shape, the opening end portion is easily damaged. In such a case, the glass adhesion preventing member 16 is taken out from the glass adhesion preventing member insertion hole 15d of the jig 15 and replaced with a new glass adhesion preventing member. Thereby, only the glass adhesion preventing member 16 can be easily replaced, and the maintenance cost of the jig 15 can be reduced.

  Further, in the above embodiment, the jig 15 is made of carbon, and is formed of alumina ceramics on the bottom surface of the glass adhesion preventing member insertion hole 15d. For example, a thin plate is arranged so that the glass adhesion preventing member 16 is fitted. good. Thereby, it becomes possible to prevent the glass from adhering to the lower end surface 3a of the connection pin 3, and to suppress wear of the contact portion with the connection pin 3.

It is sectional drawing which shows the jig for hermetic sealing which concerns on the 1st Embodiment of this invention. It is sectional drawing which shows the jig for hermetic sealing which concerns on the 2nd Embodiment of this invention. It is sectional drawing of the conventional jig for hermetic sealing. FIG. 4 is a cross-sectional view along the arrow IV-IV of the hermetic jig shown in FIG. 3.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Holding member 1a Upper surface 1b Recessed part 1c Bottom surface 1d Through-hole 1e Lower surface 2 Glass tube 3 Connection pin 3a Lower end surface 3b Upper end surface 5 Hermetic seal jig 5a Upper surface 5b Recessed part 5c Bottom surface 5d Projection part 5e Pin hole 6 Hermetic seal jig 6a bottom surface 6b, 6c recess 6d bottom surface (ceiling)
6e Pin hole 11 Hermetic seal jig 11a Upper surface 11b Recess 11c Bottom surface 11d Protrusion 11e Pin hole 11f Lower surface 12 Hermetic seal jig 12a Upper surface 12b Recess 12c Bottom surface 15 Hermetic seal jig 15a Upper surface 15b Recess 15c Bottom surface 15d Bottom surface 15d Prevention member insertion hole 15e Bottom surface 16 Glass adhesion prevention member 16a Lower end surface 16b Upper part

Claims (4)

A through hole for inserting a glass tube through which the connection pin is inserted is formed and a holding member made of a metal material is erected and held while the glass tube through which the connection pin is inserted is inserted into the through hole. In a hermetic sealing jig for sealing the glass tube by melting the glass tube by heating the holding member and sealing the glass tube to the inner peripheral surface of the through hole of the holding member and the outer peripheral surface of the connection pin,
A hermetic sealing jig characterized in that at least a portion of the jig that contacts the lower end surface of the connection pin is formed of a member that has better adhesion to the glass forming the glass tube than the connection pin. . A through hole for inserting a glass tube through which the connection pin is inserted is formed and a holding member made of a metal material is erected and held while the glass tube through which the connection pin is inserted is inserted into the through hole. In a hermetic sealing jig for sealing the glass tube by melting the glass tube by heating the holding member and sealing the glass tube to the inner peripheral surface of the through hole of the holding member and the outer peripheral surface of the connection pin,
The jig is formed of a member having at least a portion in contact with the lower end surface of the connection pin that is superior in adhesion to the glass forming the glass tube than the connection pin, and corresponds to the hole of the glass holding member on the upper surface. Glass attachment prevention member insertion hole is formed at the position to
The glass adhesion preventing member insertion hole is formed in a tube shape, and the connection pin is inserted therethrough, and the glass adhesion preventing member that supports the glass tube with the upper end surface contacting the lower end surface of the glass tube is detachably inserted. Hermetic sealing jig characterized by being made. A first step of standing and holding a metal holding member in which a through-hole for inserting a glass tube for inserting a connection pin is formed on a jig;
A second step of inserting a glass tube through which the connection pin is inserted into the through hole;
In a hermetic seal manufacturing method, comprising: a third step of heating the holding member to melt the glass tube so that the glass tube is in close contact with the inner peripheral surface of the through hole and the outer peripheral surface of the connection pin and sealed. ,
In the second step, the lower end surface of the connection pin is brought into contact with a member having better adhesiveness with the glass forming the glass tube than the connection pin.   The hermetic seal manufacturing method according to claim 3, wherein, in the second step, a lower end surface of the glass tube is brought into contact with a portion formed by a member to which the glass tube does not adhere.

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