JP2009269152A - Holder for ultrasonic machining tool and ultrasonic machining device - Google Patents

Holder for ultrasonic machining tool and ultrasonic machining device Download PDF

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Publication number
JP2009269152A
JP2009269152A JP2008123690A JP2008123690A JP2009269152A JP 2009269152 A JP2009269152 A JP 2009269152A JP 2008123690 A JP2008123690 A JP 2008123690A JP 2008123690 A JP2008123690 A JP 2008123690A JP 2009269152 A JP2009269152 A JP 2009269152A
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ultrasonic
tool
holder
machining
slit
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Yoshihiro Take
義弘 岳
Yukio Murakami
幸男 村上
Hirobumi Shiraishi
博文 白石
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TAKEMASA KK
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TAKEMASA KK
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Abstract

<P>PROBLEM TO BE SOLVED: To improve machining accuracy when mounting an ultrasonic machining tool to an ultrasonic machining device using a tool holder having a tool insertion part at the tip end and a slit which is continued to the tool insertion part and divides the tip end, and to enable ultraprecision machining. <P>SOLUTION: The ultrasonic machining holder includes the tool insertion part 10 having a tool 2 to be inserted at the tip end of the holder 1 and the slit 11 which is continued to the tool insertion part 10 and divides the tip end. The slit 11 is in a surface approximately parallel to an axis center of the holder 1, and the depth form the tip end surface of the holder 1 is 1/8 to 1/5 of a machining ultrasonic wavelength. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、超音波加工装置に超音波加工用工具を取り付けるための超音波加工用工具ホルダおよびこれを用いた超音波加工装置に関する。   The present invention relates to an ultrasonic processing tool holder for attaching an ultrasonic processing tool to an ultrasonic processing apparatus, and an ultrasonic processing apparatus using the same.

従来、超音波加工装置においては、超音波加工用工具が超音波加工用ホーンの先端部にろう付けされることによって一体化されていたが、この超音波加工用工具のろう付け作業は手間が掛かって面倒であり、さらにろう付けの場合、摩耗した超音波加工用工具の交換作業は大変に手間が掛かって面倒である。そこで、このろう付け手段に代わり、例えば特許文献1に記載のような固定手段が提案されている。   Conventionally, in an ultrasonic machining apparatus, the ultrasonic machining tool is integrated by brazing the tip of the ultrasonic machining horn, but brazing the ultrasonic machining tool is troublesome. In addition, in the case of brazing, replacement work of a worn ultrasonic machining tool is very troublesome and troublesome. Therefore, instead of this brazing means, for example, a fixing means as described in Patent Document 1 has been proposed.

特許文献1に記載の超音波加工装置では、ホーンの先端部に工具挿入部が設けられ、かつ、この工具挿入部に連なるホーンを分割する第1の溝が構成されており、この第1の分割溝は、ホーンの軸芯と略平行な面内にあり、その長さを適用超音波の波長の略1/4以上としている。そして、この超音波加工装置によれば、振動特性が略等しいホーンを二つ並列してコーンに接続した状態のものに近いものと考えられるようになり、発振器とのインピーダンス整合が容易で、特に強励振時においても工具の結合強度は高く、振動特性は良好で、力率の低下もなく、安定した動作を得ることができるとされている。   In the ultrasonic processing apparatus described in Patent Document 1, a tool insertion portion is provided at the tip of the horn, and a first groove that divides the horn connected to the tool insertion portion is configured. The dividing groove is in a plane substantially parallel to the axis of the horn, and the length thereof is set to about 1/4 or more of the wavelength of the applied ultrasonic wave. And according to this ultrasonic processing apparatus, it comes to be considered to be close to the state in which two horns having substantially the same vibration characteristics are connected in parallel to the cone, and impedance matching with the oscillator is easy. It is said that even during strong excitation, the bonding strength of the tool is high, the vibration characteristics are good, the power factor is not reduced, and stable operation can be obtained.

特公平7−14584号公報Japanese Patent Publication No.7-14584

ところが、このように先端部に工具挿入部が設けられて、かつ、この工具挿入部に連なる分割溝が設けられたホーンを使用した場合、ろう付けしたものと比較して超音波加工用工具先端部の振幅が大きくなる傾向がある。このように超音波加工用工具先端部の振幅が大きくなると、加工精度が悪くなってしまい、ミクロンオーダーの超精密加工を行うことが不可能となる。   However, when using a horn with a tool insertion portion provided at the tip and a split groove connected to the tool insertion portion in this way, the tip of the ultrasonic processing tool is compared with the brazed one. The amplitude of the part tends to increase. Thus, when the amplitude of the ultrasonic machining tool tip increases, the machining accuracy deteriorates, making it impossible to perform micron-order ultraprecision machining.

そこで、本発明においては、先端部に工具挿入部が設けられて、かつ、この工具挿入部に連なり当該先端部を分割するスリットが設けられた工具ホルダを使用して超音波加工用工具を超音波加工装置に取り付けた場合の加工精度を向上させ、超精密加工を可能にすることを目的とする。   Therefore, in the present invention, the tool for ultrasonic processing is superposed using a tool holder provided with a tool insertion portion at the tip portion and provided with a slit that is connected to the tool insertion portion and divides the tip portion. The object is to improve the processing accuracy when attached to a sonic processing device and enable ultra-precision processing.

本発明の超音波加工用工具ホルダは、超音波加工装置に超音波加工用工具を取り付けるための超音波加工用工具ホルダであって、先端部に、超音波加工用工具が挿入される工具挿入部と、この工具挿入部に連なり当該先端部を分割するスリットとを備え、さらにスリットが、当該超音波加工用工具ホルダの軸芯と略平行な面内にあり、当該超音波加工用工具ホルダの先端面からの深さが加工超音波の波長の1/8以上1/5以下であることを特徴とする。   The ultrasonic processing tool holder of the present invention is an ultrasonic processing tool holder for attaching an ultrasonic processing tool to an ultrasonic processing apparatus, and the tool insertion in which the ultrasonic processing tool is inserted at the tip portion. And a slit that divides the tip portion into the tool insertion portion, and the slit is in a plane substantially parallel to the axis of the ultrasonic processing tool holder, and the ultrasonic processing tool holder The depth from the front end surface is not less than 1/8 and not more than 1/5 of the wavelength of the processing ultrasonic wave.

また、本発明の超音波加工装置は、超音波加工用工具が超音波加工用工具ホルダを介して取り付けられる超音波加工装置であって、超音波加工用工具ホルダは、先端部に、超音波加工用工具が挿入される工具挿入部と、この工具挿入部に連なり当該先端部を分割するスリットとを備え、さらにスリットが、当該超音波加工用工具ホルダの軸芯と略平行な面内にあり、当該超音波加工用工具ホルダの先端面からの深さが加工超音波の波長の1/8以上1/5以下であることを特徴とする。   The ultrasonic machining apparatus of the present invention is an ultrasonic machining apparatus in which an ultrasonic machining tool is attached via an ultrasonic machining tool holder, and the ultrasonic machining tool holder A tool insertion portion into which a machining tool is inserted, and a slit that is connected to the tool insertion portion and divides the tip portion, and the slit is in a plane substantially parallel to the axis of the ultrasonic machining tool holder. The depth from the tip surface of the ultrasonic processing tool holder is 1/8 or more and 1/5 or less of the wavelength of the processing ultrasonic wave.

本発明に係る超音波加工用工具ホルダでは、工具挿入部に連なるスリットの深さを加工超音波の波長の1/8以上1/5以下とすることによって、この工具ホルダを使用して超音波加工用工具を超音波加工装置に取り付けた場合の加工精度が向上し、超精密加工を行うことが可能となる。   In the tool holder for ultrasonic processing according to the present invention, the depth of the slit connected to the tool insertion portion is set to 1/8 or more and 1/5 or less of the wavelength of the processing ultrasonic wave. When the machining tool is attached to the ultrasonic machining apparatus, the machining accuracy is improved, and ultra-precision machining can be performed.

図1は本発明の実施の形態における超音波加工装置の要部の正面図、図2は図1の右側面図、図3は図1の超音波加工用工具ホルダの正面図、図4は図3の右側面図である。   1 is a front view of a main part of an ultrasonic processing apparatus according to an embodiment of the present invention, FIG. 2 is a right side view of FIG. 1, FIG. 3 is a front view of the ultrasonic processing tool holder of FIG. FIG. 4 is a right side view of FIG. 3.

図1および図2に示すように、本発明の実施の形態における超音波加工装置は、超音波ホーンHの先端部に超音波加工用工具ホルダ(以下、「ホルダ」と称す。)1が連結固定されたものである。ホルダ1の先端部には、超音波加工用工具(以下、「工具」と称す。)2が挿入される工具挿入部10と、この工具挿入部10に連なり当該先端部を2分割するスリット11とが形成されている。   As shown in FIGS. 1 and 2, in the ultrasonic machining apparatus according to the embodiment of the present invention, an ultrasonic machining tool holder (hereinafter referred to as “holder”) 1 is connected to the tip of an ultrasonic horn H. It is fixed. A tool insertion portion 10 into which an ultrasonic processing tool (hereinafter referred to as “tool”) 2 is inserted, and a slit 11 that is connected to the tool insertion portion 10 and divides the tip portion into two at the distal end portion of the holder 1. And are formed.

スリット11は、図3に示すように、ホルダ1の軸芯Cと略平行な面内にあり、ホルダ1の先端面(図3の右端面)からの深さLは、超音波加工装置の加工超音波の波長λに対して1/8≦λ≦1/5の範囲内としている。なお、工具挿入部10は、その深さBがスリット11の深さLよりも浅くなるように形成された有底の丸穴である。   As shown in FIG. 3, the slit 11 is in a plane substantially parallel to the axis C of the holder 1, and the depth L from the front end surface (right end surface in FIG. 3) of the holder 1 is determined by the ultrasonic processing apparatus. It is set within the range of 1/8 ≦ λ ≦ 1/5 with respect to the wavelength λ of the processing ultrasonic wave. The tool insertion portion 10 is a bottomed round hole formed so that its depth B is shallower than the depth L of the slit 11.

また、ホルダ1の先端部には、スリット11を閉じる方向にボルト3を締め付けて工具2を工具挿入部10に固定するための雌ねじ穴12と、ボルト3の胴部を挿入するボルト穴13と、ボルト3の頭部が固定されるザグリ穴14とが設けられている。なお、雌ねじ穴12、ボルト穴13およびザグリ穴14は、ホルダ1の軸芯Cを中心として対称の位置に計2箇所設けられている。工具2は工具挿入部10の底に当接する位置まで挿入され、2個のボルト3をザグリ穴14から挿入して雌ねじ穴12へ締め付けることによってホルダ1に固定される。   Further, at the tip of the holder 1, a bolt 3 is tightened in a direction to close the slit 11 to fix the tool 2 to the tool insertion portion 10, and a bolt hole 13 into which the body of the bolt 3 is inserted. And a counterbore hole 14 to which the head of the bolt 3 is fixed. The female screw hole 12, the bolt hole 13, and the counterbore hole 14 are provided in a total of two positions at symmetrical positions around the axis C of the holder 1. The tool 2 is inserted to a position where it abuts against the bottom of the tool insertion portion 10, and is fixed to the holder 1 by inserting two bolts 3 from the counterbore holes 14 and tightening them into the female screw holes 12.

上記実施形態における超音波加工装置において、工具2先端部の縦振動および横振動の振幅測定を行った。使用したホルダ1は外径22A(呼び径)のアルミ丸棒製であり、スリット11の深さLは18mm(1/8≦λ≦1/5;λ=126)である。工具2としてφ3mmの丸棒を使用した。なお、比較例としてスリット深さLを31.5mm(λ>1/5)としたもの(比較例1)、15mm(λ<1/8)としたもの(比較例2)を使用した。   In the ultrasonic machining apparatus according to the above-described embodiment, the amplitudes of the longitudinal vibration and the lateral vibration of the tip portion of the tool 2 were measured. The used holder 1 is made of an aluminum round bar having an outer diameter of 22A (nominal diameter), and the depth L of the slit 11 is 18 mm (1/8 ≦ λ ≦ 1/5; λ = 126). A round bar having a diameter of 3 mm was used as the tool 2. As comparative examples, a slit depth L of 31.5 mm (λ> 1/5) (Comparative Example 1) and 15 mm (λ <1/8) (Comparative Example 2) were used.

表1は測定結果を示している。表1中、縦は軸芯C方向の振幅、横0°はスリット11に対して平行かつ軸芯Cに対して直角方向(図2の横方向)の振幅、横90°はスリット11に対して直角かつ軸芯Cに対して直角方向(図2の縦方向)の振幅である。

Figure 2009269152
Table 1 shows the measurement results. In Table 1, the vertical axis represents the amplitude in the direction of the axis C, the horizontal 0 ° is parallel to the slit 11 and the amplitude in the direction perpendicular to the axial center C (the horizontal direction in FIG. 2), and the horizontal 90 ° is And the amplitude in the direction perpendicular to the axis C (vertical direction in FIG. 2).
Figure 2009269152

表1から、実施例1のスリット11の深さLが1/8≦λ≦1/5の場合には、横0°、横90°ともに1μm程度の振幅で収まっており、ミクロンオーダーの超精密加工を行うことが可能であることが確認できた。なお、比較例1,2の場合には、横0°の振幅が実施例1と比較して大きく異なっており、いずれの場合もミクロンオーダーの超精密加工を行うことは不可能であることが確認できた。   From Table 1, when the depth L of the slit 11 of Example 1 is 1/8 ≦ λ ≦ 1/5, both the horizontal 0 ° and the horizontal 90 ° are within an amplitude of about 1 μm, which is over a micron order. It was confirmed that precision machining was possible. In the case of Comparative Examples 1 and 2, the amplitude at 0 ° in the horizontal direction is greatly different from that in Example 1. In either case, it is impossible to perform micron-order ultraprecision machining. It could be confirmed.

本発明は、超音波振動を利用してミクロンオーダーの超精密加工を行うための超音波加工用工具ホルダおよび超音波加工装置として有用である。   INDUSTRIAL APPLICABILITY The present invention is useful as an ultrasonic processing tool holder and an ultrasonic processing apparatus for performing micron-order ultraprecision processing using ultrasonic vibration.

本発明の実施の形態における超音波加工装置の要部の正面図である。It is a front view of the principal part of the ultrasonic processing apparatus in embodiment of this invention. 図1の右側面図である。It is a right view of FIG. 図1の超音波加工用工具ホルダの正面図である。It is a front view of the tool holder for ultrasonic processing of FIG. 図3の右側面図である。FIG. 4 is a right side view of FIG. 3.

符号の説明Explanation of symbols

1 ホルダ
2 工具
3 ボルト
10 工具挿入部
11 スリット
12 雌ねじ穴
13 ボルト穴
14 ザグリ穴
DESCRIPTION OF SYMBOLS 1 Holder 2 Tool 3 Bolt 10 Tool insertion part 11 Slit 12 Female screw hole 13 Bolt hole 14 Counterbore hole

Claims (2)

超音波加工装置に超音波加工用工具を取り付けるための超音波加工用工具ホルダであって、
先端部に、前記超音波加工用工具が挿入される工具挿入部と、この工具挿入部に連なり当該先端部を分割するスリットとを備え、
さらに前記スリットが、当該超音波加工用工具ホルダの軸芯と略平行な面内にあり、当該超音波加工用工具ホルダの先端面からの深さが加工超音波の波長の1/8以上1/5以下である
ことを特徴とする超音波加工用工具ホルダ。
An ultrasonic processing tool holder for attaching an ultrasonic processing tool to an ultrasonic processing apparatus,
Provided at the tip portion with a tool insertion portion into which the ultrasonic processing tool is inserted, and a slit that divides the tip portion connected to the tool insertion portion,
Further, the slit is in a plane substantially parallel to the axis of the ultrasonic machining tool holder, and the depth from the tip surface of the ultrasonic machining tool holder is 1/8 or more of the wavelength of machining ultrasonic waves. / 5 or less, a tool holder for ultrasonic machining.
超音波加工用工具が超音波加工用工具ホルダを介して取り付けられる超音波加工装置であって、
前記超音波加工用工具ホルダは、先端部に、前記超音波加工用工具が挿入される工具挿入部と、この工具挿入部に連なり当該先端部を分割するスリットとを備え、
さらに前記スリットが、当該超音波加工用工具ホルダの軸芯と略平行な面内にあり、当該超音波加工用工具ホルダの先端面からの深さが加工超音波の波長の1/8以上1/5以下である
ことを特徴とする超音波加工装置。
An ultrasonic processing apparatus in which an ultrasonic processing tool is attached via an ultrasonic processing tool holder,
The ultrasonic processing tool holder includes a tool insertion portion into which the ultrasonic processing tool is inserted at a distal end portion, and a slit that is connected to the tool insertion portion and divides the distal end portion.
Further, the slit is in a plane substantially parallel to the axis of the ultrasonic machining tool holder, and the depth from the tip surface of the ultrasonic machining tool holder is 1/8 or more of the wavelength of machining ultrasonic waves. / 5 or less ultrasonic processing apparatus.
JP2008123690A 2008-05-09 2008-05-09 Holder for ultrasonic machining tool and ultrasonic machining device Pending JP2009269152A (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5916142Y2 (en) * 1979-12-19 1984-05-12 日本電子工業株式会社 Ultrasonic processing equipment
JPH01110051A (en) * 1987-10-21 1989-04-26 Nec Corp Miniature linear pulse motor
JPH0297553A (en) * 1988-10-03 1990-04-10 Hitachi Chem Co Ltd Epoxy resin composition
JPH0714584B2 (en) * 1991-10-30 1995-02-22 日本電子工業株式会社 Ultrasonic processing equipment

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5916142Y2 (en) * 1979-12-19 1984-05-12 日本電子工業株式会社 Ultrasonic processing equipment
JPH01110051A (en) * 1987-10-21 1989-04-26 Nec Corp Miniature linear pulse motor
JPH0297553A (en) * 1988-10-03 1990-04-10 Hitachi Chem Co Ltd Epoxy resin composition
JPH0714584B2 (en) * 1991-10-30 1995-02-22 日本電子工業株式会社 Ultrasonic processing equipment

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