JP2009269108A - Tilting stage and joining device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a tilting stage capable of raising rigidity of an air bearing irrespective of load of a stage body. <P>SOLUTION: The tilting stage 100 includes the stage body 106 on which a wafer 164 is mounted, a swing 110 coupled with the stage body 106 having an arcuate side cross section on a bottom 111 viewed from one of directions, and an arcuate topped groove 112 having a side cross section of a bottom 1120 viewed from one direction in interdigitated relation with the bottom 111 of the swing 110. A pedestal 114 having air bearings 180 and 182 for supporting the swing 110 formed is provided between the bottom 1120 of the groove 112 and the bottom 111 of the swing 110 and between a top surface 1121 of the groove 112 and a top surface 113 of the swing 110. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a tilt stage on which a workpiece is placed and a joining apparatus including the tilt stage. In particular, the present invention relates to an inclined stage whose stage is supported by an air bearing and a joining apparatus including the inclined stage.

2. Description of the Related Art An inclination stage that adjusts the inclination of a stage on which a workpiece such as a semiconductor substrate is placed with respect to a horizontal plane is known (see, for example, Patent Documents 1 and 2). In the tilt stage described in Patent Document 1, the side sectional shape of the bottom surface viewed from one direction of the stage and the side sectional shape of the bottom surface viewed from one direction of the groove in which the bottom of the stage in the pedestal is fitted are formed in an arc shape. A rolling bearing disposed between the stage and the groove supports the stage so as to be swingable. In the tilt stage described in Patent Document 2, the bottom surface of the stage and the bottom surface of the groove into which the bottom of the stage in the pedestal fits are formed in a spherical shape, and an air bearing disposed between the stage and the groove is provided. The stage is swingably supported.
Japanese Patent Laid-Open No. 5-90341 Japanese Patent Laid-Open No. 9-258234

  In the tilt stage described in Patent Document 1, a frictional resistance is generated between the bottom surface of the stage and the bottom surface of the groove, and the magnitude of this frictional resistance varies depending on the diameter and environment. This variation in the magnitude of the frictional resistance reduces the accuracy of stage tilt adjustment. In addition, dust generation occurs in the tilt stage, and therefore, when used in a clean room or the like, a dustproof measure is essential.

  Further, in the tilt stage described in Patent Document 2, if the pressure of the air bearing is excessively increased without considering the load of the stage for the purpose of increasing the rigidity of the air bearing, the stage will wobble. The air bearing pressure must be set according to the stage load. That is, in the tilt stage, the rigidity of the air bearing depends on the load of the stage.

  In order to solve the above-described problems, an inclined stage according to the present invention includes a stage main body on which a workpiece is placed, and a coma portion that is connected to the stage main body and has a circular side cross-sectional shape when viewed from one direction. The top surface facing the top surface located on the opposite side of the bottom surface of the top portion, and the top surface facing the bottom surface of the top portion, and the side cross-sectional shape viewed from one direction is uneven with the bottom surface of the top portion A groove having a bottom surface that is arcuate in relation, between the bottom surface of the groove and the bottom surface of the top portion, and between the top surface of the groove and the top surface of the top portion. And a pedestal on which an air bearing that supports the top part is formed.

  It should be noted that the above summary of the invention does not enumerate all the necessary features of the present invention. In addition, a sub-combination of these feature groups can also be an invention.

  Hereinafter, the present invention will be described through embodiments of the invention, but the following embodiments do not limit the invention according to the claims. In addition, not all the combinations of features described in the embodiments are essential for the solving means of the invention.

  In FIG. 1, the structure of the joining apparatus 101 provided with the inclination stage 100 is typically shown with the sectional side view. The joining apparatus 101 includes an inclined stage 100, a drive unit 130 as a workpiece moving unit, a fixed table 140, and a load cell 150, which are arranged inside the frame body 120.

  The frame 120 includes a top plate 122 and a bottom plate 126 that are parallel to each other and horizontal, and a plurality of support columns 124 that couple the top plate 122 and the bottom plate 126. The top plate 122, the support column 124, and the bottom plate 126 are each formed of a high-rigidity material, and no deformation occurs even when a pressure reaction force is applied to the wafers 162 and 164 as workpieces in bonding described later.

  The drive unit 130 is disposed on the bottom plate 126 inside the frame body 120. The drive unit 130 includes a cylinder 134 that is fixed to the upper surface of the bottom plate 126 and a piston 132 that is disposed inside the cylinder 134. The piston 132 is driven by a fluid circuit (not shown), a cam, a train wheel, and the like, and moves up and down in a direction perpendicular to the bottom plate 126 indicated by an arrow Z in the drawing.

  The tilt stage 100 is attached to the upper end of the piston 132. At the upper part of the piston 132, a rotation adjusting mechanism that rotates the tilt stage 100 around an axis along the arrow Z direction in the figure (hereinafter referred to as the Z axis), and the tilt stage 100 in the arrow X direction (left and right in the figure). Direction), and an XY direction position adjusting mechanism for adjusting the position in the arrow Y direction (depth direction in the figure). In the figure, the axis along the arrow X direction is referred to as the X axis, and the axis along the Y direction in the figure is referred to as the Y axis.

  The tilt stage 100 includes an XZ stage 102 and a YZ stage 104. The YZ stage 104 is mounted on the upper surface of the piston 132, and the XZ stage 102 is mounted on the upper surface of the YZ stage 104. A wafer holder 170 is placed on the upper surface of the XZ stage 102, and a wafer 164 is placed on the upper surface of the wafer holder 170. The wafer holder 170 has an adsorption mechanism such as electrostatic adsorption or negative pressure adsorption, and adsorbs and holds the wafer 164 on the upper surface.

  The XZ stage 102 adjusts the inclination angle of the wafer 164 with respect to the X axis by swinging about the Y axis passing through the center of the upper surface of the wafer 164 as a fulcrum. Further, the YZ stage 104 adjusts the inclination angle of the wafer 164 with respect to the Y axis by swinging about the X axis passing through the center of the upper surface of the wafer 164 as a fulcrum.

  On the other hand, the fixed table 140 includes a substrate holding member 141 and a plurality of suspension portions 144. The suspension part 144 is suspended from the lower surface of the top plate 122. The substrate holding member 141 is supported from below in the vicinity of the lower end of the suspension portion 144 and is disposed to face the tilt stage 100. A wafer holder 170 is mounted on the lower surface of the substrate holding member 141. The wafer holder 170 has an adsorption mechanism such as electrostatic adsorption or negative pressure adsorption, and adsorbs and holds the wafer 162 on the lower surface.

  The suspension portion 144 supports the substrate holding member 141 from below, but does not restrict upward movement. However, a plurality of load cells 150 are sandwiched between the substrate holding member 141 and the top plate 122. Thereby, the pressure applied to the wafer 162 held by the substrate holding member 141 is detected, and the upward displacement of the substrate holding member 141 is restricted.

  The illustrated state corresponds to an initial state in the operation of the bonding apparatus 101. In this state, the piston 132 of the drive unit 130 is drawn into the cylinder 134, and the tilt stage 100 is lowered. Therefore, there is a wide gap between the wafers 162 and 164 held on the tilt stage 100 and the fixed table 140. A pair of wafers 162 and 164 to be bonded are loaded from the side with respect to the gap and held on the tilt stage 100 or the fixed table 140.

  Next, by operating the XY direction position adjustment mechanism, the wafer 164 held on the tilt stage 100 is moved horizontally, and the center positions of the wafers 162 and 164 are made to coincide with each other. Further, by operating the rotation adjusting mechanism, the wafer 164 is rotated around the Z axis, and the relative positions of the wafers 162 and 164 around the Z axis are matched. Further, the wafer 164 is swung by the XZ stage 102 to adjust the tilt of the wafer 164 with respect to the X axis, and the wafer 164 is swung by the YZ stage 104 to adjust the tilt of the wafer 164 with respect to the Y axis. 162 and 164 are parallel to each other. In this way, the wafers 162 and 164 can be bonded by being pressed by the driving unit 130 in a state of being aligned and parallel.

  In the bonded wafers 162 and 164, signal terminals formed on the respective surfaces are connected to each other to form one circuit as a whole. In this way, a stacked semiconductor device can be manufactured. In the manufacturing process of the stacked semiconductor device, there may be a case where a step of bonding the wafers 162 and 164 with an adhesive or the like to make the bonding permanent is introduced.

  Hereinafter, the tilt stage 100 will be described in detail. As described above, the tilt stage 100 includes the XZ stage 102 and the YZ stage 104. The XZ stage 102 has the same configuration, and is formed with a stage main body 106, a pair of feet 108, a swinging body 110 as a frame portion, and a ceiling groove 112 whose opposite side is closed. And a pedestal 114 as a pedestal. The YZ stage 104 has the same configuration as that of the XZ stage 102. The stage main body 106, the pair of feet 108, the swinging body 110 as the second frame portion, and the ceiling opposite the bottom side are closed. And a pedestal 114 as a second pedestal in which an attached groove 112 is formed.

  FIG. 2 shows the XZ stage 102 and the YZ stage 104 in an exploded perspective view. As shown in this figure, the stage main body 106 is a rectangular plate, and a wafer holder 170 on which a wafer 164 is placed is mounted at the center thereof. The pair of feet 108 is a semicircular plate, is symmetrical with respect to the center of the stage body 106, and is arranged in parallel with a pair of opposite sides of the stage body 106, and extends downward. Yes.

  The oscillating body 110 is a plate whose side cross-sectional shape of the bottom surface 111 and the top surface 113 as viewed from one direction (hereinafter referred to as the oscillating axis direction) is an arc-shaped plate, that is, a plate curved in an arc shape. Both ends in the axial direction are coupled to a pair of feet 108. The oscillating body 110 is disposed so that the centers of curvature of the bottom surface 111 and the top surface 113 are positioned upward, that is, curved downward. Further, the oscillating body 110 is disposed symmetrically with respect to the vertical plane (that is, symmetric when viewed from the direction shown in FIG. 1). The swing axis of the XZ stage 102 and the swing axis of the YZ stage 104 are orthogonal to each other, the swing axis direction of the XZ stage 102 is the Y axis direction, and the swing axis direction of the YZ stage 104 is the X axis direction. It corresponds to.

  The pedestal 114 includes a base 115 and a lid 117. The base 115 is a rectangular block in plan view, and a concave portion 118 having an arc shape with a constant curvature when viewed from the swing axis direction is formed on the upper surface of the base 115. Further, the recess 118 has a uniform shape in the direction along the swing axis. That is, the recess 118 has the same shape when viewed in any cross section in the swing axis direction. The lid portion 117 includes a rectangular plate portion 119 and a convex portion 121 disposed on the lower surface of the plate portion 119.

  The plate part 119 is coupled to the upper surface of the base part 115 and covers the recess 118. The convex portion 121 is a bulging portion having a so-called saddle shape, which is surrounded by a straight side extending in the horizontal direction and a circular arc having a curvature curved downward, as viewed from the swing axis direction. Thus, the concave portion 118 is opposed to the upper and lower sides. Further, the convex portion 121 has a uniform shape in the direction along the swing axis. That is, the convex portion 121 has the same shape when viewed in any cross section in the swing axis direction.

  Here, the plate part 119 and the convex part 121 together with the concave part 118 form a ceiling groove 112 (see FIG. 1). That is, the concave portion 118 forms the bottom surface 1120 of the groove 112, and the plate portion 119 and the convex portion 121 form the top surface 1121 of the groove 112. The side cross-sectional shape of the bottom surface 1120 of the groove 112 viewed from the swing axis direction is formed in an arc shape in which the center of curvature is located upward, that is, curved downward. In addition, the cross-sectional shape of the top surface 1121 of the groove 112 viewed from the swing axis direction is formed in a horizontal straight line at both ends in a direction orthogonal to the swing axis direction (hereinafter referred to as an orthogonal direction), The central portion is formed so as to be curved along the bottom surface.

  The rocking body 110 is inserted into the groove 112 in the rocking axis direction. When the pair of feet 108 and the rocking body 110 are coupled in advance, the base 115 and the lid 117 are coupled. It is only necessary that the rocking body 110 is fitted in the recess 118 before the operation. On the other hand, when the base 115 and the lid 117 are coupled in advance, the oscillating body 110 may be fitted into the recess 118 before the one foot 108 and the oscillating body 110 are coupled.

  FIG. 3 is a side sectional view showing the XZ stage 102 and the YZ stage 104. As shown in this figure, the bottom surface 111 of the rocking body 110 and the bottom surface 1120 of the groove 112 are in an uneven relationship, and the top surface 113 of the rocking body 110 and the top surface 1121 in the groove 112 are also in an uneven relationship. In addition, the thickness of the rocking body 110 is slightly smaller than the width of the groove 112, and the center of the rocking body 110 in the thickness direction and the center of the groove 112 in the width direction coincide with each other. A minute gap of, for example, less than 5 to 10 μm is formed between the bottom surface 111 and the bottom surface 1120 of the groove 112 and between the top surface 113 of the oscillator 110 and the top surface 1121 of the groove 112.

  Further, the length around the center of curvature O of the rocking body 110 is shorter than the length around the center of curvature O of the groove 112. A space (pressure chambers 190 and 192 described later) surrounded by 119, the convex portion 121, and the rocking body 110 is formed. For this reason, the rocking body 110 can rock around the center of curvature O. Note that the center of curvature O of the rocking body 110 and the groove 112 of the XZ stage 102, that is, the rocking center of the rocking body 110 is set at the center in the orthogonal direction on the upper surface of the wafer 164. Further, the center of curvature O of the rocking body 110 and the groove 112 of the YZ stage 104, that is, the rocking center of the rocking body 110 coincides with the rocking center of the rocking body 110 of the XZ stage 102.

  Here, below the groove 112 in the pedestal 114, a compressed air supply unit 184, an exhaust unit 186 as a pair of pressure separation units, and a pair of supply / exhaust units 188 are arranged. The compressed air supply unit 184 is disposed vertically below the center of curvature O, and the exhaust unit 186 is disposed at both ends of the rocking body 110 in the direction around the center of curvature O (hereinafter referred to as the rocking direction). In addition, the air supply / exhaust portions 188 are disposed at both ends of the groove 112 in the swing direction.

  The compressed air supply unit 184 is a pipe line extending in the swing axis direction, and one end side of the compressed air supply unit 184 is exposed at the center of the groove 112 in the swing axis direction. The other end of the compressed air supply unit 184 is connected to an air compressor such as a compressor. The compressed air supplied from the air compressor is supplied to the bottom surface 111 of the oscillator 110 and the bottom surface 1120 of the groove 112. Blow out. As a result, an air bearing 180 is formed in a minute space between the bottom surface 111 of the oscillator 110 and the bottom surface 1120 of the groove 112.

  The exhaust portion 186 is a pipe line extending in the swing axis direction, and one end side thereof is exposed at the central portion of the groove 112 in the swing axis direction. The other end side of the exhaust portion 186 is connected to a suction device such as a suction fan, and the suction device exhausts air from both ends in the swing direction of the bottom surface 111 of the swing body 110.

  The air supply / exhaust portion 188 is a pipe line extending in the swing axis direction, and one end thereof is exposed at the central portion of the groove 112 in the swing axis direction. The other end side of the air supply / exhaust unit 188 is connected to an air supply / exhaust device such as an air supply / exhaust fan, and the air supply / exhaust device supplies and exhausts air in the pressure chambers 190 and 192. Here, each air supply / exhaust unit 188 is connected to a separate air supply / exhaust device, and the supply and exhaust of the pressure chambers 190 and 192 are made independent of each other, and the pressures of the pressure chambers 190 and 192 are controlled independently of each other. The

  On the other hand, a compressed air supply part 185 and an exhaust part 187 as a pair of pressure separation parts are arranged above the groove 112 in the pedestal 114. The compressed air supply unit 185 is disposed vertically below the center of curvature O, and the exhaust units 187 are disposed at both ends of the rocking body 110 in the rocking direction.

  The compressed air supply unit 185 is a pipe line extending in the swing axis direction, and one end side thereof is exposed at the central portion of the groove 112 in the swing axis direction. The other end side of the compressed air supply unit 185 is connected to an air compressor such as a compressor. The compressed air supplied from the air compressor is supplied to the top surface 113 of the oscillator 110 and the top surface 1121 of the groove 112. Blow out between. As a result, an air bearing 182 is formed in a minute space between the top surface 113 of the oscillator 110 and the top surface 1121 of the groove 112. In the present embodiment, the pressure values of the compressed air sent to the compressed air supply units 184 and 185 are the same. However, the stage main body 106 and the wafers 162 and 164 may be varied depending on the magnitude of the load.

  The exhaust part 187 is a pipe line extending in the swing axis direction, and one end side of the exhaust part 187 is exposed at the central part of the groove 112 in the swing axis direction. The other end side of the exhaust portion 187 is connected to a suction device such as a suction fan, and the suction device exhausts air from both end portions in the swing direction of the top surface 1121 of the groove 112.

  FIG. 4 is a perspective view showing the base 115 of the pedestal 114. As shown in this figure, a recess 118 formed in the base 115, that is, a bottom groove 1194 of the groove 112, a main groove 194 that guides compressed air in the swinging direction between the bottom surface 111 of the swinging body 110, and A plurality of sub-grooves 195 are formed to guide the compressed air in the swing axis direction. The main groove 194 extends in the swing direction at the central portion in the swing axis direction.

  An end of the compressed air supply unit 184 is disposed at the center of the swing direction of the main groove 194, and the compressed air blown from the compressed air supply unit 184 is guided to the swing direction by the main groove 194. . The plurality of sub-grooves 195 are narrower and shallower than the main groove 194 and are arranged in the swing direction. Each sub-groove 195 extends from the main groove 194 to both sides in the swing axis direction, and guides the compressed air flowing through the main groove 194 in the swing axis direction. As a result, the compressed air spreads over a wide range between the bottom surface 111 of the rocking body 110 and the bottom surface 1120 of the groove 112, and the air bearing 180 is formed.

  It should be noted that the bottom surface of the oscillator 110 can be obtained by appropriately setting the width and depth of the main groove 194 and the sub-groove 195 and the number of the sub-grooves 195 and by appropriately setting the pressure of the compressed air to be supplied. The pressure between 111 and the bottom surface 1120 of the groove 112, that is, the supporting force of the air bearing 180 can be set appropriately. Similarly, a main groove 194 and a sub-groove 195 are also formed on the convex portion 121 of the lid portion 117, so that the compressed air blown out from the compressed air supply unit 185 is allowed to flow from the top surface of the oscillator 110. The air bearing 182 is formed by being spread over a wide range between 113 and the top surface 1121 of the groove 112.

  In addition, a pair of pressure separation grooves 196 are formed on the bottom surface 1120 of the groove 112 on the swinging direction of the sub-groove 195, that is, on both sides in the circumferential direction of the arc on the bottom surface 1120 of the groove 112. The pressure separation grooves 196 are arranged facing both ends in the swing direction of the bottom surface 111 of the swing body 110 and extend in the swing axis direction. An exhaust portion 186 is disposed at the center of the pressure separation groove 196 in the swing axis direction, and the air flowing into the pressure separation groove 196 is exhausted. As a result, the pressure between the bottom surface 111 of the oscillator 110 and the bottom surface 1120 of the groove 112 is separated from the pressure in the pressure chambers 190 and 192.

  Similarly, a pair of pressure separation grooves 196 is formed in the convex portion 121 of the lid portion 117. As a result, the pressure between the top surface 113 of the oscillator 110 and the top surface 1121 of the groove 112 is separated from the pressure in the pressure chambers 190 and 192.

  In FIG. 5, the pedestal 114 and the foot part 108 are shown in a side view. As shown in this figure, the pedestal 114 and the foot 108 are opposed to each other with a minute gap. Here, the foot portion 108 is disposed so as to cover the end portion of the groove 112 in the swing axis direction, and an air bearing 198 is formed between the pedestal 114 and the foot portion 108.

  FIG. 6 schematically shows the operation in the present embodiment in a side sectional view. As shown in this figure, an air bearing 180 is formed between the bottom surface 111 of the rocking body 110 and the bottom surface 1120 of the groove 112, and an air bearing is formed between the top surface 113 of the rocking body 110 and the top surface 1121 of the groove 112. 182 is formed. The air bearings 180 and 182 support the oscillating body 110 so as to oscillate around the oscillating axis (in the direction of arrow A in the figure) without contacting the groove 112. As a result, it is possible to eliminate the frictional resistance between the oscillating body 110 and the groove 112, which is a factor that reduces the accuracy of the tilt adjustment of the stage body 106. Further, since the rocking body 110 and the groove 112 do not rub, generation of dust can be prevented, and a dust-proof measure when used in a clean room or the like can be eliminated.

  In this embodiment, the rocking body 110 is not only supported from the lower side by the air bearing 180 but also pressed from the upper side to the lower side by the air bearing 182. Even when the downward load Q due to the stage main body 106, the foot 108, and the rocking body 110 is smaller than the upward load P due to the air bearing 180, the downward load R due to the air bearing 182 is added, so that the stage main body 106 is staggered. Absent. Thereby, since the pressure of the air bearing 180 can be increased regardless of the magnitude of the downward load Q, the air bearing 180 independent of the magnitude of the downward load Q is obtained.

  In the present embodiment, the pressures in the pressure chambers 190 and 192 can be controlled independently of each other. For this reason, for example, by sucking into the pressure chamber 190 and exhausting from the pressure chamber 192, the pressure chamber 190 can be set to a pressure higher than that of the pressure chamber 192, and the oscillating body 110 can be oscillated toward the pressure chamber 192. Thereby, for example, when the alignment mark on the wafer 164 is read, the inclination of the wafer 164 with respect to the horizontal plane can be adjusted so that the alignment mark falls within the range of the depth of focus of the reading device such as a microscope.

  Further, in the present embodiment, exhaust is performed at both ends in the swing direction of the bottom surface 111 of the swing body 110. Thereby, the inflow of air from the pressure chambers 190 and 192 to the region where the air bearing 180 is formed is suppressed, and the pressure drop in the region is suppressed. That is, the pressure in the region and the pressure in the pressure chambers 190 and 192 are separated.

  Further, exhaust is also performed at both ends in the swing direction of the top surface 113 of the swing body 110. Thereby, the inflow of air from the pressure chambers 190 and 192 to the region where the air bearing 182 is formed is suppressed, and a decrease in pressure in the region is suppressed. That is, the pressure in the region and the pressure in the pressure chambers 190 and 192 are separated.

  In the present embodiment, the foot 108 and the pedestal 114 are close to each other, and an air bearing 198 made of compressed air flowing out from the groove 112 is formed in a minute space between them. The air bearing 198 supports the rocking body 110 in the rocking axis direction. Thereby, the backlash of the stage main body 106 in the swing axis direction can be suppressed.

  In this embodiment, an XZ stage 102 that swings the stage main body 106 around the Y axis and a YZ stage 104 that swings the stage main body 106 around the X axis are arranged one above the other. Thereby, the tilt adjustment with respect to the X-axis of the stage main body 106 and the tilt adjustment with respect to the Y-axis can be performed. Here, since the tilt adjustment with respect to the X axis of the stage body 106 and the tilt adjustment with respect to the Y axis can be performed independently, it is possible to prevent the other tilt from changing during the adjustment of one tilt.

  In this embodiment, not only the bottom surface 111 of the rocking body 110 and the bottom surface 1120 of the groove 112 but also the top surface 113 of the rocking body 110 and the top surface 1121 of the groove 112 are viewed from the side cross-sectional shape as viewed from the rocking axis direction. Has an arc shape. Thereby, the rocking body 110 can be allowed to swing regardless of the distance between the top surface 113 of the rocking body 110 and the top surface 1121 of the groove 112. In addition, since there is no restriction on reducing the distance between the top surface 113 of the rocking body 110 and the top surface 1121 of the groove 112, the air bearing 182 is formed from the pressure chambers 190 and 192. It can be sufficiently narrowed to such an extent that air can be prevented from flowing into the space.

  Next, another embodiment will be described. In addition, the same code | symbol is attached | subjected to the structure same as the said embodiment, and description is abbreviate | omitted.

  FIG. 7A is a side sectional view showing a foot portion 108 of a tilt stage 200 according to another embodiment. FIG. 7B is a cross-sectional view taken along the line BB in FIG. As shown in these drawings, in the inclined stage 200, a plurality of suction holes 202 are formed in the foot portion 108. The plurality of suction holes 202 are arranged around the end of the rocking body 110 along the end.

  In addition, one end portion of the duct 204 is attached to the opposite side of the foot portion 108 from the pedestal 114 side. The duct 204 is a tubular member having an arc-shaped bottom surface and top surface, and the foot portion 108 and the plurality of suction holes 202 are disposed inside the duct 204 when viewed from the swing axis direction. The other end of the duct 204 is connected to a suction mechanism such as a suction fan, and suction force is generated in the suction hole 202 by the operation of the suction mechanism.

  For this reason, the compressed air flowing out from the end portion of the groove 112 in the swing axis direction is exhausted from the suction hole 202 and the duct 204 without leaking around the tilt stage 200. As a result, the compressed air flowing out of the groove 112 can be exhausted to the outside of the room in which the tilt stage 200 is used, so that the tilt stage 200 can be used in a vacuum environment.

  FIG. 8 is a side sectional view showing a tilt stage 300 according to another embodiment. FIG. 9 is a cross-sectional view taken along line 9-9 in FIG. As shown in these drawings, the tilt stage 300 includes an oscillating body 310, a groove 312 and a single foot 308 in place of the oscillating body 110, the groove 112, and the pair of feet 108 in the above embodiment. Yes.

  The side cross-sectional shapes of the bottom surface 311 and the top surface 313 of the rocking body 310 are not only from one specific direction as in the above-described embodiment, but also from an arc having an upward center of curvature when viewed from all lateral directions. ing. That is, the bottom surface 311 and the top surface 313 of the oscillator 310 are spherical. On the other hand, the bottom surface 315 and the top surface 317 of the groove 312 are also spherical surfaces having an uneven relationship with the bottom surface 311 and the top surface 313 of the rocking body 310. Further, the foot portion 308 is coupled to the central portion of the rocking body 310 in the plan view of the top surface 313 and the central portion of the stage body 106 in the plan view. The pedestal 114 has a hole 309 through which the foot 308 is inserted.

  A compressed air supply unit 184 is disposed below the groove 312 of the pedestal 114, and compressed air is supplied to a minute gap between the bottom surface 311 of the oscillator 310 and the bottom surface 315 of the groove 312. Thereby, an air bearing 180 is formed between the bottom surface 311 of the oscillator 310 and the bottom surface 315 of the groove 312.

  In addition, a pair of left and right compressed air supply units 185 is disposed on the upper side of the groove 312 of the pedestal 114, and compressed air flows into a minute space between the top surface 313 of the rocking body 310 and the top surface 317 of the groove 312. Supplied. Thereby, an air bearing 182 is formed between the top surface 313 of the oscillator 310 and the top surface 317 of the groove 312.

  That is, the air bearings 180 and 182 support the rocking body 310 so as to be rockable around the center of curvature of the rocking body 310 and the groove 312 without contacting the groove 312. Therefore, as in the above-described embodiment, it is possible to eliminate the frictional resistance between the rocking body 310 and the groove 312 that causes a decrease in the accuracy of the tilt adjustment of the stage body 106. In addition, since the rocking body 310 and the groove 312 do not rub, generation of dust can be prevented, and a dustproof measure when used in a clean room or the like can be eliminated. Further, the rigidity of the air bearing 180 can be increased regardless of the loads of the stage main body 106, the foot 308, and the swinging body 310.

  In addition, the tilt stage 300 includes a plurality of expansion bodies 320 disposed between the peripheral edge portion of the rocking body 310 in the groove 312 and the plate portion 119. The expansion body 320 is an elastic bag body, and is connected to an air supply / exhaust pipe 322. The expansion body 320 expands when air is supplied to the inside thereof, and contracts when exhausted from the inside.

  The peripheral part of the rocking body 310 and the plate part 119 are close to each other and sandwich the expansion body 320. For this reason, when the expansion body 320 expands, the downward biasing force from the expansion body 320 to the swinging body 310 increases. On the other hand, when the expansion body 320 contracts, the expansion body 320 switches from the swinging body 310. The downward biasing force to the is reduced.

  Here, the plurality of expansion bodies 320 are respectively arranged at predetermined intervals along the peripheral edge of the oscillating body 310. In the example shown in FIG. It is arranged at equal intervals along the interval, that is, π / 2. For this reason, the swinging body 310 is swung in the X direction or the Y direction by inflating one of the pair of expanding bodies 320 disposed at positions symmetrical to the center of the rocking body 310 and contracting the other. The tilt adjustment of the stage main body 106 with respect to the X axis and the tilt adjustment of the stage main body 106 with respect to the Y axis can be performed.

  Note that three or more expansion bodies 320 are required. Further, the arrangement of the expansion bodies 320 may be set as appropriate according to the number of expansion bodies 320. For example, when the number of the expansion bodies 320 is three, the expansion bodies 320 may be arranged at intervals of 2π / 3. In this case, the swinging body 310 can be swung around an axis parallel to a straight line connecting the two expanding bodies 320 by expanding the one expanding body 320 and contracting the remaining two expanding bodies 320. .

  As mentioned above, although this invention was demonstrated using embodiment, the technical scope of this invention is not limited to the range as described in the said embodiment. It will be apparent to those skilled in the art that various modifications or improvements can be added to the above-described embodiment. It is apparent from the scope of the claims that the embodiments added with such changes or improvements can be included in the technical scope of the present invention. For example, in the above-described embodiment, the present invention has been described by taking a bonding apparatus for bonding wafers as an example. However, if the apparatus requires an inclination adjustment with respect to a horizontal plane of a stage on which a workpiece is placed, such as a bonding apparatus and an exposure apparatus, The invention can be applied.

The structure of the joining apparatus 101 provided with the inclination stage 100 is typically shown with sectional drawing. The XZ stage 102 and the YZ stage 104 are shown in an exploded perspective view. The XZ stage 102 and the YZ stage 104 are shown in a side sectional view. The base 115 of the base 114 is shown in a perspective view. The pedestal 114 and the foot 108 are shown in a side view. The operation in the tilt stage 100 is schematically shown in a side sectional view. In (A), the foot | leg part 108 of the inclination stage 200 which concerns on other embodiment is shown with a sectional side view. (B) shows a cross-sectional view taken along the line BB of (A). The tilt stage 300 is shown in a side sectional view. 9-9 sectional drawing of FIG. 8 is shown.

Explanation of symbols

DESCRIPTION OF SYMBOLS 100 Inclination stage, 101 Joining apparatus, 102 XZ stage, 104 YZ stage, 106 Stage main body, 108 Foot part, 110 Oscillator, 111 Bottom face, 112 Groove, 113 Top surface, 114 Base, 115 Base part, 117 Cover part, 118 Recessed part 119 plate part, 120 frame, 121 convex part, 122 top plate, 124 column, 126 bottom plate, 130 drive part, 132 piston, 134 cylinder, 140 fixed table, 141 substrate holding member, 144 suspension part, 150 load cell, 162 Wafer, 164 wafer, 170 wafer holder, 180 air bearing, 182 air bearing, 184 compressed air supply unit, 185 compressed air supply unit, 186 exhaust unit, 187 exhaust unit, 188 supply / exhaust unit, 190 pressure chamber, 192 pressure chamber, 194 Main groove, 195 Sub groove 196 Pressure separation groove, 198 Air bearing, 200 Inclination stage, 202 Suction hole, 204 Duct, 300 Inclination stage, 308 Foot, 309 hole, 310 Oscillator, 311 bottom surface, 312 groove, 313 top surface, 315 bottom surface, 317 Top surface, 320 Expansion body, 322 Supply / exhaust pipe, 1120 Bottom surface, 1121 Top surface

Claims (10)

A stage body on which the workpiece is placed;
A coma portion that is connected to the stage body and has a circular side cross-sectional shape when viewed from one direction.
The top surface facing the top surface located on the opposite side of the bottom surface of the top part, and the side cross section viewed from one direction facing the bottom surface of the top part is uneven with the bottom surface of the top part A groove having a bottom surface having an arcuate shape, between the bottom surface of the groove and the bottom surface of the top portion, and between the top surface of the groove and the top surface of the top portion. A pedestal formed with an air bearing that supports the top part;
An inclined stage with   2. The tilt stage according to claim 1, wherein the groove includes a pair of pressure chambers that are arranged with the coma portion interposed therebetween in a circumferential direction of an arc on the bottom surface of the groove and that can control pressure independently of each other.   The tilt stage according to claim 2, further comprising a pressure separation unit that separates a pressure of the pair of pressure chambers and a pressure of a region of the groove in which the top part is accommodated. A pair of feet that connect the stage body and the top part;
The tilt stage according to any one of claims 1 to 3, wherein an air bearing is formed between the foot and the base by air flowing out of the groove. A pair of feet that connect the stage body and the top part;
The inclined stage according to any one of claims 1 to 3, wherein a suction hole for sucking air flowing out of the groove is formed in the foot portion. The side cross-sectional shape of the bottom surface seen from one direction of the top part is uniformly arcuate,
A second top portion that is connected to the pedestal and has a circular arc-shaped side section when viewed from a direction orthogonal to the one direction;
The top surface facing the top surface located on the opposite side of the bottom surface of the second frame portion, and the side cross-sectional shape as viewed from the direction orthogonal to the one direction facing the bottom surface of the second frame portion. A groove having an arc-shaped bottom surface that is concave and convex with the bottom surface of the second frame part, and between the bottom surface of the groove and the bottom surface of the second frame part, and the top of the groove A second pedestal formed with an air bearing that supports the second top portion between a surface and the top surface of the second top portion;
The tilt stage according to any one of claims 1 to 5, further comprising:   The tilt stage according to claim 1, wherein the bottom surface of the top portion is a spherical surface, and the bottom surface of the groove in the pedestal is a spherical surface.   The tilt stage according to claim 7, further comprising an inflating body that is arranged between the top surface of the top portion and the top surface of the groove around the axis of the top portion and can be expanded and contracted independently of each other. . A side cross-sectional shape of the top surface viewed from the one direction of the top portion is formed in an arc shape,
The side cross-sectional shape of the top surface as viewed from the one direction of the groove in the pedestal is formed in an arc shape having an uneven relationship with the top surface of the top part. The tilt stage according to item 1. The tilt stage according to any one of claims 1 to 9,
A workpiece holding unit that holds the workpiece opposite to the workpiece placed on the tilt stage;
A workpiece moving unit for relatively moving the workpiece held by the workpiece holding unit and the workpiece placed on the tilt stage in a direction of approaching each other and joining them;
A joining apparatus comprising:

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