JP2009263206A - Boron carbide-silicon carbide-silicon composite material and its producing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a composite material excellent in grindability regardless of the composite material with high specific rigidity utilizing the high specific rigidity of boron carbide and to provide its producing method. <P>SOLUTION: The composite material whose main ingredients are X pts.vol. of boron carbide, Y pts.vol. of silicon carbide and Z pts.vol. of silicon (wherein, 10<X<60; 20<Y<70; and 5<Z<30) and where boron carbide and silicon carbide having a particle size of 10 μm or more are contained by 10-50 pts.vol. is provided. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  Aspects of the present invention generally relate to a composite material mainly composed of boron carbide, silicon carbide, and silicon and a manufacturing method thereof, and more particularly to a composite material that can be manufactured with high specific rigidity and low cost and a manufacturing method thereof.

Specific rigidity is a parameter obtained by dividing Young's modulus by specific gravity (weight ratio with respect to water), and various mechanical parts may require materials having a high value.
Examples thereof include a three-dimensional measuring device, a linearity measuring device, and an exposure machine for forming a pattern of a planar object, which are mobile devices that require a highly accurate positioning function. In particular, in an exposure machine, when manufacturing semiconductor wafers, liquid crystal panels, etc., there is a demand for a more accurate positioning function that meets the recent demands for pattern miniaturization, and high-speed operation for economical pattern formation. Therefore, it is required to improve the throughput of the apparatus by moving a moving body such as a hydrostatic pressure fluid bearing apparatus on which an object to be exposed or a reticle is mounted at a high speed.

  However, moving such a moving body at high speed inevitably generates vibration, which is a negative factor with respect to positioning accuracy. In order to damp this vibration quickly, a material with high specific rigidity is required, and in order to move the moving body at a high speed under a constant driving force, it is necessary to reduce the weight of the movable part. Since bending leads to a decrease in positioning accuracy, a material having a large Young's modulus and a small specific gravity is also required for this purpose.

  Conventionally, metal materials such as steel have been used as such mechanical parts that require high specific rigidity. Recently, however, ceramic alumina with higher specific rigidity has been used. . However, when higher specific rigidity is required, it is necessary to use non-oxide ceramics instead of oxide ceramics such as alumina even in the ceramic system. Among them, boron carbide having the highest specific rigidity ratio as an industrial material. System materials are expected.

  The boron carbide material that is expected to have the highest specific rigidity is a substantially pure boron carbide sintered body, but boron carbide is known as a hardly sintered body. Therefore, conventional boron carbide sintered bodies have been manufactured by hot pressing. However, in the hot press sintering method, it is difficult to manufacture large-sized complex products, and the cost of hot press equipment and dies for applying high temperature and high pressure is high, so structural members are actually manufactured. It's not a way to do it.

  In order to solve this problem, methods of casting molding and atmospheric pressure sintering of boron carbide have been disclosed (for example, Patent Document 1, Patent Document 2, Patent Document 3, Patent Document 4, Patent Document 5, Patent Document) 6). However, in this method, since the fired body is difficult to grind, in applications where high dimensional accuracy is required, such as a semiconductor / liquid crystal manufacturing apparatus, the grinding cost is increased, and the atmospheric pressure sintering temperature is 2200 ° C. Since it is quite high as mentioned above, there is a problem that the firing cost increases.

  Therefore, a material in which boron carbide powder is dispersed as a filler in a metal matrix phase instead of sintering boron carbide is also disclosed (for example, see Patent Document 7). This material is a material in which boron carbide is dispersed in aluminum, but because the wettability of boron carbide and aluminum is poor, it is manufactured by hot pressing a mixture of boron carbide and aluminum. However, since the manufacturing cost is high, it cannot be said to be a method for manufacturing a structural member in practice.

  Therefore, composite materials in which silicon having relatively good wettability with boron carbide is used as a metal and a boron carbide molded body is impregnated with molten silicon are also disclosed (for example, Patent Document 8, Patent Document 9, Patent). Reference 10), and some examples include materials that can serve as a small amount of carbon source as raw materials. However, this method is a composite material that is highly impregnated with boron carbide although it is impregnated with silicon. There is no change. In addition, since silicon is filled in the gaps between the molded bodies mainly composed of boron carbide, the resulting composite material contains a large amount of silicon. Such a material has a low specific rigidity and a high ratio of boron carbide. The rigidity cannot be utilized.

  Also disclosed is a composite material in which a material containing silicon carbide in addition to boron carbide is used as a raw material of a molded body, and this molded body is impregnated with molten silicon (see, for example, Patent Document 11). In some cases, the raw material contains a material that can be a small amount of carbon source. However, this method also results in a composite material that is highly filled with boron carbide / silicon carbide, so the grindability is slightly improved compared to that filled with boron carbide alone, but it is still difficult to grind. Will not change. In addition, since silicon is filled in the gaps between the molded bodies mainly composed of boron carbide and silicon carbide, the resulting composite material contains a large amount of silicon. Such a material has a low specific rigidity and is low in boron carbide. It cannot take advantage of the high specific rigidity that it has.

WO01 / 72659A1 (pages 15-16) JP 2001-342069 (page 3-4) JP 2002-160975 (page 4-6) JP 2002-167278 (page 4-6) JP 2003-109982 (page 3-5) JP2003-2011178 (page 4-9) United States Patent 4104062 (col2-5) United States Patent 37225015 (col2-6) United States Patent 3796564 (col2-13) United States Patent 3857744 (col1-3) JP-T-2007-51384 (pages 20-22)

  An aspect of the present invention has been made to solve the above-described problems, and provides a composite material having excellent grindability while being a high specific rigidity composite material using the high specific rigidity of boron carbide, and a method for manufacturing the same. It is to be.

  In order to achieve the above object, according to one embodiment of the present invention, boron carbide X volume part, silicon carbide Y volume part, silicon Z volume part is a main component, 10 <X <60, 20 <Y <70, Composite material characterized by 5 <Z <30 and 10 to 50 parts by volume of particles of boron carbide and silicon carbide of 10 μm or more. High composite rigidity and excellent grindability are possible. It was.

  According to another embodiment of the present invention, a molding step of manufacturing a molded body by molding a raw material mainly composed of boron carbide, silicon carbide, and a carbon source, and impregnating the molded body with molten silicon And a reaction sintering step of converting carbon into silicon carbide by the following, comprising boron carbide X volume part, silicon carbide Y volume part, silicon Z volume part as main components, 10 <X <60, 20 < Y <70, 5 <Z <30, and 10 to 50 parts by volume of boron carbide and silicon carbide particles having a size of 10 to 50 parts by volume. Made it possible to produce excellent composite materials.

  Further, according to another embodiment of the present invention, a reaction firing in which carbon is converted to silicon carbide by impregnating molten silicon into a molded body obtained by molding a raw material mainly composed of boron carbide, silicon carbide, and carbon source. The main component is a boron carbide X volume part, a silicon carbide Y volume part, and a silicon Z volume part, characterized in that it comprises a sintering step, and 10 <X <60, 20 <Y <70, and 5 <Z <30. In addition, a composite material manufacturing method is characterized in that 10 μm or more particles of boron carbide and silicon carbide are 10 to 50 parts by volume. As a result, it was possible to produce a composite material having high specific rigidity and excellent grindability.

According to the aspect of the present invention, it is possible to provide a composite material having excellent grindability while being a high specific rigidity composite material utilizing the high specific rigidity of boron carbide, and a method for manufacturing the same.

It is a figure which shows the particle size distribution of the raw material used in one Example of this invention. It is a figure which shows the baking process no heat curve used in one Example of this invention. It is a figure which shows the microstructure of the reaction sintered compact of one Example of this invention.

  The main terms in the present invention will be described below.

(Specific rigidity)
Specific rigidity is a value obtained by dividing Young's modulus by specific gravity. Since specific gravity is a density ratio to water and has no unit, the unit of specific rigidity is the same as the unit of Young's modulus. Young's modulus is measured by the resonance method, and specific gravity is measured by the Archimedes method.

(Particle size)
The particle size of the particles in the composite material refers to the maximum diameter of the particles when the cut surface of the composite material is wrapped and observed with an optical microscope.

(Coarse grain)
It shall mean particles having a particle size of 10 μm or more.

(Fine particles)
It shall mean particles having a particle size of less than 10 μm.

(F1)
When adopting cast molding in the manufacturing process of the composite material in the present invention, it refers to the volume fraction of solids in the slurry.

(F3)
This refers to the filling rate of the solid content of the compact in the manufacturing process of the composite material in the present invention, and is measured by the Archimedes method.

(F3 ')
Volatile components are removed from the solid content filling rate in the composite material manufacturing process of the present invention, and the volatilized components are calculated from the blending ratio.

  The composite material according to one embodiment of the present invention has a structure in which silicon is filled in a gap between powders mainly composed of boron carbide and silicon carbide. Boron carbide forming the composite material is added as a main component of the raw material as a boron carbide powder from the molding process. Silicon carbide is added as a main component of the raw material as a silicon carbide powder from the molding process (hereinafter referred to as initial charged silicon carbide), and silicon carbide produced by the reaction of silicon in the molded body with silicon (hereinafter referred to as silicon carbide) Reaction product silicon carbide).

  In one embodiment of the present invention, a composite material manufacturing method includes impregnating molten silicon into a molded body mainly composed of boron carbide, initially charged silicon carbide, and a carbon source, and reacting the carbon source with silicon to generate a reaction carbonized product. A reactive sintering step is performed in which silicon is produced and silicon is impregnated in the gaps between boron carbide, initially charged silicon carbide, and reaction produced silicon carbide. The composite material according to the present invention is characterized in that the volume fraction of particles of 10 μm or more of boron carbide and initially charged silicon carbide is 10 to 50 parts by volume. By taking such a structure, high specific rigidity is obtained. Rate and excellent grindability can be achieved.

  Therefore, the composite material in one embodiment of the present invention is suitably applied to a product that requires a high specific rigidity and requires precise grinding.

  Details of materials and processes in one embodiment of the present invention will be described below.

  The composite material according to one embodiment of the present invention is composed of 100 parts by volume of the entire composite material, X volume part of boron carbide, Y volume part of silicon carbide, and Z volume part of silicon Z as main components, and 10 <X <60, 20 <Y. <70, 5 <Z <30. When the amount of boron carbide is 10 parts by volume or less, the composite material cannot obtain a sufficient specific rigidity, and when it is 60 parts by volume or more, the grindability of the composite material is deteriorated. Further, if importance is attached to grindability, it is more preferable that 10 <X <50. When the amount of silicon carbide is 20 parts by volume or less, the composite material cannot obtain a sufficient specific rigidity, and when it is 70 parts by volume or more, the grindability of the composite material is deteriorated. Further, if importance is attached to the specific rigidity, 30 <Y <70 is more preferable, and if importance is given to grindability, 20 <Y <65 is more preferable. In addition, composite materials with an amount of silicon of 5 parts by volume or less are prone to defects such as cracks or non-impregnated pores in the reaction sintering process. The rate drops. In addition, it is more preferable that 10 <Z <30 for products that require particular attention to the occurrence of cracks, such as thick-walled large products.

  The volume fraction of particles of 10 μm or more of boron carbide and silicon carbide in the composite material according to one embodiment of the present invention is 10 to 50 parts by volume. When the volume fraction is smaller than 10 parts by volume, the composite material has a sufficient specific rigidity. When it exceeds 50 volume parts, the grindability of a composite material will fall. Here, the particles of 10 μm or more are preferably all of the boron carbide powder added as a raw material, or all of the boron carbide powder added as a raw material and a part of the initially charged silicon carbide powder added as a raw material. .

  The average particle size of the boron carbide powder, which is a raw material for producing the composite material in one embodiment of the present invention, is preferably 10 μm to 200 μm, more preferably 20 μm to 100 μm. If the average particle size of the boron carbide powder is 10 μm or less, cracks are likely to occur in the sintered body during reaction sintering, and the average particle size is preferably 20 μm or more for the purpose of preventing cracks. Further, when the average particle diameter of boron carbide is 200 μm or more, the grindability of the composite material is deteriorated, and in order to prevent the deterioration of the grindability, the average particle diameter is desirably 100 μm or less.

  Note that the particle size of the boron carbide powder used as a raw material is almost the same as the particle size of the boron carbide powder in the composite material. However, it seems that boron carbide reacts with the impregnated silicon and the surface is covered with the reaction product, and the surface of boron carbide powder observed by SEM is covered with a layer with slightly different contrast. Yes. The boron carbide particles of the composite material according to an embodiment of the present invention and the particle size thereof are defined including the surface layer made of this reactive organism. The reason why cracks occur during reaction sintering when the fine boron carbide powder is used is that the ratio of the reaction product layer on the surface is so large that it cannot be ignored relative to the entire boron carbide powder. It is estimated that it will be.

  The preferable particle diameter of the initially charged silicon carbide that is a raw material for producing the composite material in one embodiment of the present invention varies depending on the amount of boron carbide. That is, the particle diameter of the initially charged silicon carbide in the composite material is not different from the particle diameter of the silicon carbide powder used as a raw material, which is considered to be because the initially charged silicon carbide powder does not react with silicon.

  Therefore, if 10 to 50 parts by volume, which is a preferable volume fraction of particles of 10 μm or more, are all taken from boron carbide, the initial charge silicon carbide may be fine particles less than 10 μm, and if a part thereof is taken from silicon carbide. Initially charged silicon carbide requires a coarse particle part of 10 μm or more and a fine particle part of less than 10 μm.

  The average particle diameter of silicon carbide preferable as a coarse particle is 20 μm to 100 μm, and if it exceeds 100 μm, the grindability of the composite material deteriorates. The average particle size of the initially charged silicon carbide, which is preferable as a fine particle, is 0.1 μm to 5 μm. When the average particle size is smaller than 0.1 μm, it becomes difficult to form a highly filled molded body at the time of molding. Grindability decreases.

  Preferred as a carbon source as a raw material for producing a composite material in one embodiment of the present invention is carbon powder, and the particle size of the reaction-molded silicon carbide formed by the reaction of the carbon and silicon is substantially all. Is preferably less than 10 μm.

  As the carbon powder, anything from a very low crystallinity to a graphite having a very high crystallinity can be used, but generally a carbon black having a low crystallinity is easily available. The preferred average particle size of the carbon powder is 10 nm to 1 μm.

  In addition, it is estimated that such carbon powder is substantially converted into reaction-produced SiC by reaction with silicon in the reaction sintering process, and carbon powder that is considered to be unreacted is observed in the result of observation of the composite material. Was not.

  In addition to carbon powder, an organic substance can be used as a carbon source. When an organic substance is used as the carbon source, it is necessary to select an organic substance having a high residual carbon ratio in the sintering step in a non-oxidizing atmosphere, and particularly suitable organic substances include phenol resins and furan resins. When such an organic substance is used as a carbon source, it can be expected to serve as a binder, a plasticizer, or a solvent for dispersing powder in the molding process.

  Since silicon, which is a raw material for producing a composite material in one embodiment of the present invention, is melt impregnated, it is impregnated into a molded body regardless of the shape such as powder, granule, or plate. A shape that can be easily arranged may be used.

  Silicon may contain a substance other than silicon as an impurity, but the amount of silicon in the composite material in the present invention is defined as a silicon matrix layer containing the impurity.

  In addition to impurities inevitably included in the silicon production process, impurities in silicon are prevented from reacting with boron carbide on the surface of boron carbide because the melting point of silicon is lowered to lower the temperature of the reaction sintering process. Therefore, in order to prevent the silicon from blowing out from the reaction sintered body when the temperature is lowered after the reaction sintering, to control the thermal expansion coefficient of silicon, to intentionally impart conductivity to the composite material, etc. Impurities such as C, Al, Ca, Mg, Cu, Ba, Sr, Sn, Ge, Pb, Ni, Co, Zn, Ag, Au, Ti, Y, Zr, V, Cr, Mn, and Mo are added. You can also.

  A method for producing a composite material according to an embodiment of the present invention includes: a molding step of molding a raw material mainly composed of boron carbide, initially charged silicon carbide, and a carbon source; and a molded body impregnated with silicon. The reaction sintering step of converting carbon into silicon carbide and filling the voids with silicon is thus provided.

  There is no restriction | limiting in particular as the shaping | molding method in one Embodiment of this invention, The shape of the workpiece | work aiming at dry press molding, wet press molding, CIP molding, cast molding, injection molding, extrusion molding, plastic molding, vibration molding, etc. And can be selected according to production volume.

  Among them, cast molding is particularly suitable for the production of large complex shaped products.

  When adopting cast molding as a molding method according to an embodiment of the present invention, an organic solvent or water may be used as a solvent, but water is used in consideration of simplification of the process and influence on the global environment. A solvent is preferred.

  In the case of casting using water as a solvent, a raw material boron carbide powder, initially charged silicon carbide powder, and a slurry in which a carbon source and water are mixed are first manufactured. Additives such as dispersants / peptizers, binders, and plasticizers for production can also be added.

  Suitable additives include ammonium polycarboxylate, sodium polycarboxylate, sodium alginate, ammonium alginate, triethanolamine alginate, styrene / maleic acid copolymer, dibutalftal, carboxymethylcellulose, sodium carboxymethylcellulose, carboxymethylcellulose ammonium, methylcellulose, Sodium methylcellulose, polyvinyl alcohol, polyethylene oxide, sodium polyacrylate, oligomers of acrylic acid or its ammonium salt, various amines such as monoethylamine, pyridine, piperidine, tetramethylammonium hydroxide, dextrin, peptone, water-soluble starch, acrylic Various resin emulsions such as emulsion, resorcin Various water-soluble resins such as phenol resins, novolak type various water-insoluble resins such as phenol resins, water glass and the like.

  In addition, when adding a water-insoluble additive, it is preferable to form an emulsion or coat the powder surface. When a slurry production process includes a grinding process, It is preferred to add it after the grinding step.

  For casting, both gypsum casting using a gypsum-type capillary suction force and pressure casting that directly applies pressure to the slurry can be used. In the case of pressure casting, an appropriate pressure is 0.1 MPa to 5 MPa.

  In the molding process, it is important to produce a compact with a high filling rate. This is because silicon is buried in the portion excluding the volume expansion due to the combination of carbon with silicon and conversion into silicon carbide from the voids of the molded body. That is, a reaction sintered body produced from a highly filled molded body has a small silicon content, and a reaction sintered body having a small silicon content can be expected to have a high specific rigidity.

  The filling rate of a preferable molded body is 60 to 80%, more preferably 65 to 75%.

  The lower limit of the preferable filling rate is to reduce the silicon content of the reaction sintered body as described above. However, the upper limit of the preferable filling rate is that the molded body having an excessively high filling rate is not made of silicon. This is because impregnation is difficult. However, in practice, it is difficult to industrially produce a molded body having such a high filling rate, so only the lower limit needs to be considered.

  Note that the filling rate of the above-mentioned compact is the filling rate of each powder of boron carbide, silicon carbide, and carbon, and excludes components such as additives that volatilize in the firing process. Therefore, in the case of using an additive having a residual carbon content such as a phenol resin, the residual carbon content is added as a filling rate. As for the specific measurement / display method, the filling rate of the molded body measured by the Archimedes method is indicated as F3, and the filling rate excluding the volatilized content is indicated as F3 ′. It shall refer to the value of F3 ′.

  In casting molding, a slurry having a small F1 which is the volume filling rate of powder in the slurry has a large solvent content sucked into the mold and is difficult to industrially produce. Therefore, F1 is preferably 40% or more. . In normal casting, F3 and F3 ′ are larger in pressure casting than in gypsum casting, but in the present invention, F3 and F3 ′ are obtained in pressure casting and gypsum casting. There is no big difference, and plaster molding suitable for high-mix low-volume production can be suitably employed.

  In addition, it is also possible to provide a calcination process between the formation process of the composite material and the reaction sintering process in one embodiment of the present invention.

  This calcining process may not be necessary if the compact has a small and simple shape. However, if the compact has a large and complex shape, it may cause damage during handling or cracking during reaction sintering. In order to prevent this, it is preferable to provide a calcination step.

  A preferable temperature as the calcining temperature is 1000 to 2000 ° C., and if the temperature is lower than 1000 ° C., the effect of the calcining cannot be expected. There is a possibility that the advantage as a near net shape manufacturing process in which the firing shrinkage, which is a characteristic of the manufacturing process, is almost zero may be impaired. A preferable firing atmosphere in the calcination step is a non-oxidizing atmosphere.

  In addition, although this calcining process is normally performed also as the degreasing | defatting process of a molded object, when contamination of a furnace is concerned, you may provide a degreasing process separately before a calcining process.

  Moreover, you may provide only a degreasing process without a calcination process. In that case, a degreasing temperature necessary for decomposing and removing the binder may be adopted.

  The preferred reaction sintering temperature in the subsequent silicon impregnation reaction sintering step is 1800 ° C. from the melting point of silicon. The larger the workpiece, the more complex the shape, the more difficult it is to impregnate silicon, so the reaction sintering temperature is high, and it is necessary to increase the time for keeping the maximum temperature, but the reaction sintering where carbon is converted to silicon carbide is completely advanced. However, it is preferable that the reaction sintering temperature is as low as possible and the maximum temperature keeping time is short as long as silicon is completely impregnated and pores are eliminated.

  Since the melting point of silicon is 1414 ° C., a reaction sintering temperature of 1430 ° C. or higher is usually necessary. However, if impurities are added to silicon to lower the melting point, the reaction sintering temperature is lowered to about 1350 ° C. It is also possible.

  As described above, the composite material according to one embodiment of the present invention has a molded body in which the carbon content in the molded body reacts with silicon to expand into silicon carbide, and silicon fills the voids. The composition ratio of the reaction sintered body is clarified by measuring the blending ratio of the raw materials and the filling factor F3 ′ of the compact.

  In addition, in the microstructure observation of the reaction sintered body shown in the examples described later, coarse boron carbide, coarse silicon carbide, fine silicon carbide, and silicon that fills the gaps between the particles, which are the elements constituting the reaction sintered body The area ratio was averaged over 10 screens to determine the volume ratio, and the volume ratio of each component was consistent with the value calculated from the blending ratio.

  In addition, since the black part of FIG. 3 which is a photograph of the microstructure to be described later is a boron carbide or silicon carbide particle and the white part is silicon, it is easy to identify the particle and silicon, and the coarse and fine particles. In addition, coarse silicon carbide and coarse boron carbide can be easily identified by SEM / EPMA analysis.

  As described above, the composition ratio of the raw materials for realizing the composition ratio of the composite material in one embodiment of the present invention can be calculated from the composition ratio of the target composite material and the filling ratio of the molded body. The preferable mixing ratio of each raw material is 0 to 45 parts by weight of the carbon source with respect to 100 parts by weight in total of 10 to 90 parts by weight of boron carbide and 90 to 10 parts by weight of initially charged silicon carbide.

  The carbon source here means parts by weight in terms of carbon. When carbon powder is used, it is the blended weight itself, and when an additive with a residual carbon content is used, the residual carbon is added to the blended weight. It is the value multiplied by the rate.

  About the trouble that occurs when each component of boron carbide and silicon carbide is out of the preferred composition range, the trouble that occurs when each component of boron carbide and silicon carbide that is a component of the composite material is out of the preferred range. It is the same.

  Carbon may be 0 part by weight, but in this case, since the reaction of carbon reacting with silicon and expanding is not available, it becomes difficult to completely fill the voids of the molded body with silicon, and pores remain. There is a risk. Moreover, when there is too much carbon content, there exists a danger that a crack will generate | occur | produce in the reaction sintered compact by the expansion reaction.

  Therefore, a more preferable blending ratio of the carbon source is 10 to 40 parts by weight with respect to 100 parts by weight of the total of boron carbide and initially charged silicon carbide. Further, the preferable silicon amount necessary for the reactive sintering is 105 to 200%, more preferably 110 to 150% of the silicon amount necessary for converting the carbon content into silicon carbide and filling the voids. Adjust according to the shape.

  The preferable specific rigidity of the composite material in one embodiment of the present invention is 130 GPa or more, and more preferably 140 GPa or more.

  One of the objects of the present invention is to provide a composite material having a high specific rigidity, so that there is no preferable upper limit of the specific rigidity, but in reality, it is difficult to make a composite material having a specific rigidity of 200 GPa or more. In order to achieve high specific rigidity while maintaining excellent grindability, the upper limit is about 170 GPa.

The composite material according to one embodiment of the present invention is preferably applied to a product that requires high specific rigidity and requires precise grinding, and a product having a large grinding cost due to a large complex shape. A particularly suitable product application is a semiconductor / liquid crystal manufacturing apparatus member. Among them, an application example to a particularly suitable product is a member for an exposure apparatus. By using it as a wafer support member such as a susceptor stage and an optical system support member such as a reticle stage, the positioning accuracy of the exposure apparatus is improved. The throughput of the apparatus can be improved by shortening the positioning time.
(Example)

  Hereinafter, an embodiment of the present invention will be described with reference to tables and drawings.

  Table 1 shows a list of examples and comparative examples shown below.

  The slurry concentration in each preparation example is indicated by F1 in Table 1. Further, the amount of binder added in each formulation example is indicated by the difference between F3 'and F3 in Table 1. In addition, after removing excess silicon on the surface of each reaction sintered body, a test piece was cut out, and after polishing the surface, specific gravity was measured by Archimedes method and Young's modulus was measured by resonance method to calculate specific stiffness.

  In addition, the surface-finished product is placed on a dynamometer (model number 9256C2 manufactured by Kistler), and rotated at a rotational speed of 100 m / min (3200 rpm) with a φ10 mm core drill (# 60, manufactured by Asahi Diamond Industrial Co., Ltd.). A hole with a depth of 4 mm was drilled at a step amount of 0.2 mm, and the resistance of the machining was measured and the state of chipping around the hole was confirmed. For the evaluation of machinability, the case where the maximum value of the machining resistance was 2000N or more was evaluated as x, the case of 1500-2000N as Δ, and the case of less than 1500N as ◯.

  However, even when the maximum resistance value was Δ or ×, the machining resistance decreased in a short time, and those that were stable at the low value were evaluated at the low value. Moreover, even if the machining resistance was ◯ or Δ, the case where cracks presumed to be caused by machining during machining and the case where tool breakage occurred were rated as x.

  The evaluation of the chipping state was ○ when the outer peripheral chip of the hole was less than 0.3 mm, Δ when 0.3 mm or more and less than 0.5 mm, and x when 0.5 mm or more. In addition, the microstructure was observed by cutting the fired body into an appropriate size, lapping the surface with 1 μm abrasive grains, and setting it to 2800 times with an optical microscope.

  FIG. 1 shows the particle size distribution measurement results of coarse boron carbide having an average particle diameter of 50 μm, coarse silicon carbide having an average particle diameter of 65 μm, and fine silicon carbide having an average particle diameter of 0.6 μm used in the practice of the present invention. The particle size distribution is measured by a laser particle size analyzer (MT3000 manufactured by Nikkiso), and the above average particle size indicates the volume average particle size.

  As can be seen in FIG. 1, the coarse fraction is substantially free of particles of 10 μm or less, and the fine fraction is substantially free of coarse particles of 10 μm or more.

  FIG. 2 shows a graph showing the heat curves of calcination and reaction sintering.

  FIG. 3 shows an optical microscope image of the microstructure of the reaction sintered body of Example 2. As described above, it was easy to distinguish between coarse particles of 10 μm or more and fine particles of 10 μm or less.

(Examples 1-3)
30 parts by weight of silicon carbide powder having an average particle diameter of 0.6 μm, 70 parts by weight of boron carbide powder having an average particle diameter of 50 μm, and 10 to 30 parts by weight of carbon black powder having an average particle diameter of 55 nm are obtained. A slurry having a low viscosity of less than 500 CP by adding and dispersing in pure water to which 0.1 to 1 part by weight of a dispersant is added to the carbon black powder and adjusting the pH to 8 to 9.5 with aqueous ammonia or the like. Was made. After mixing this slurry with a pot mill or the like for several hours, add 1-2 parts by weight of binder to silicon carbide powder, boron carbide powder, carbon powder, and then defoaming, and then an acrylic pipe with an inner diameter of 80 mm is placed on the gypsum plate. The placed slurry was cast to produce a molded body having a thickness of about 10 mm. The molded body is naturally dried, dried at 100 to 150 ° C., degreased by holding at a temperature of 600 ° C. for 2 hours under a reduced pressure of 1 × 10 −4 to 1 × 10 −3 torr, and held at a temperature of 1700 ° C. for 1 hour. Perform calcination. After calcination, the reaction sintered body was manufactured by heating to a temperature of 1470 ° C. and holding for 30 minutes, and impregnating molten silicon into the molded body. In Examples 1 to 3, the amount of carbon powder added is 10, 20, and 30 parts by weight, respectively.

Example 4
20 parts by weight of silicon carbide powder having an average particle size of 0.6 μm, 30 parts by weight of silicon carbide powder having an average particle size of 65 μm, 50 parts by weight of boron carbide powder having an average particle size of 50 μm, and carbon black powder having an average particle size of 55 nm 30 parts by weight is dispersed in pure water to which 0.1 to 1 part by weight of a dispersant is added with respect to silicon carbide powder, boron carbide powder, and carbon black powder, and pH is adjusted with ammonia water or the like.
Was adjusted to 8 to 9.5 to prepare a low viscosity slurry of less than 500 CP. After mixing this slurry with a pot mill or the like for several hours, add 1-2 parts by weight of binder to silicon carbide powder, boron carbide powder, carbon powder, and then defoaming, and then an acrylic pipe with an inner diameter of 80 mm is placed on the gypsum plate. The placed slurry was cast to produce a molded body having a thickness of about 10 mm. The molded body is naturally dried, dried at 100 to 150 ° C., degreased by holding at a temperature of 600 ° C. for 2 hours under a reduced pressure of 1 × 10 −4 to 1 × 10 −3 torr, and held at a temperature of 1700 ° C. for 1 hour. Perform calcination. After calcination, the reaction sintered body was manufactured by heating to a temperature of 1470 ° C. and holding for 30 minutes, and impregnating molten silicon into the molded body.

(Example 5)
25 parts by weight of silicon carbide powder having an average particle size of 0.6 μm, 25 parts by weight of silicon carbide powder having an average particle size of 65 μm, 50 parts by weight of boron carbide powder having an average particle size of 50 μm, and carbon black powder having an average particle size of 55 nm 10 parts by weight is dispersed in pure water to which 0.1 to 1 part by weight of a dispersant is added with respect to silicon carbide powder, boron carbide powder and carbon black powder, and pH is adjusted with ammonia water or the like.
Was adjusted to 8 to 9.5 to prepare a low-viscosity slurry of less than 500 cp. After mixing this slurry with a pot mill or the like for several hours, add 1-2 parts by weight of binder to silicon carbide powder, boron carbide powder, carbon powder, and then defoaming, and then an acrylic pipe with an inner diameter of 80 mm is placed on the gypsum plate. The placed slurry was cast to produce a molded body having a thickness of about 10 mm. The molded body is naturally dried, dried at 100 to 150 ° C., degreased by holding at a temperature of 600 ° C. for 2 hours under a reduced pressure of 1 × 10 −4 to 1 × 10 −3 torr, and held at a temperature of 1700 ° C. for 1 hour. Perform calcination. After calcination, the reaction sintered body was manufactured by heating to a temperature of 1470 ° C. and holding for 30 minutes, and impregnating molten silicon into the molded body.

(Example 6)
25 parts by weight of silicon carbide powder having an average particle size of 0.6 μm, silicon carbide powder 2 having an average particle size of 65 μm
5 parts by weight, 50 parts by weight of boron carbide powder having an average particle diameter of 50 μm, and 20 parts by weight of carbon black powder having an average particle diameter of 55 nm are 0.1 to 1 weight with respect to silicon carbide powder, boron carbide powder and carbon black powder. The mixture was dispersed in pure water to which part of the dispersant was added, and the pH was adjusted to 8 to 9.5 with aqueous ammonia or the like to prepare a low-viscosity slurry of less than 500 cp. After mixing this slurry with a pot mill or the like for several hours, add 1-2 parts by weight of binder to silicon carbide powder, boron carbide powder, carbon powder, and then defoaming, and then an acrylic pipe with an inner diameter of 80 mm is placed on the gypsum plate. The placed slurry was cast to produce a molded body having a thickness of about 10 mm. The molded body is naturally dried, dried at 100 to 150 ° C., degreased by holding at a temperature of 600 ° C. for 2 hours under a reduced pressure of 1 × 10 −4 to 1 × 10 −3 torr, and held at a temperature of 1700 ° C. for 1 hour. Perform calcination. After calcination, the reaction sintered body was manufactured by heating to a temperature of 1470 ° C. and holding for 30 minutes, and impregnating molten silicon into the molded body.

(Example 7)
50 parts by weight of silicon carbide powder having an average particle diameter of 0.6 μm and 50 parts by weight of boron carbide powder having an average particle diameter of 50 μm were added with 0.1 to 1 part by weight of a dispersant relative to silicon carbide and boron carbide powder. The slurry was placed in pure water and dispersed, and the pH was adjusted to 8 to 9.5 with ammonia water or the like to prepare a low viscosity slurry of less than 500 cp. After mixing this slurry with a pot mill or the like for several hours, add 1-2 parts by weight of binder to silicon carbide powder, boron carbide powder, carbon powder, and then defoaming, and then an acrylic pipe with an inner diameter of 80 mm is placed on the gypsum plate. Casting slurry, thickness 10mm
A molded body of a degree was produced. The molded body is naturally dried and dried at 100 to 150 ° C., then 1 × 10 −
Under reduced pressure of 4 to 1 × 10 −3 torr, degreasing is performed by holding at a temperature of 600 ° C. for 2 hours and holding at a temperature of 1700 ° C. for 1 hour to perform calcination. After calcination, the reaction sintered body was manufactured by heating to a temperature of 1470 ° C. and holding for 30 minutes, and impregnating molten silicon into the molded body.

(Example 8)
80 parts by weight of silicon carbide powder having an average particle diameter of 0.6 μm, 20 parts by weight of boron carbide powder having an average particle diameter of 50 μm, and 10 parts by weight of carbon black powder having an average particle diameter of 55 nm are obtained by silicon carbide powder, boron carbide powder, carbon Disperse in pure water with 0.1 to 1 part by weight of dispersant added to black powder, adjust pH to 8 to 9.5 with aqueous ammonia, etc. to produce low viscosity slurry of less than 500 cp. did. After mixing this slurry with a pot mill or the like for several hours, add 1-2 parts by weight of binder to silicon carbide powder, boron carbide powder, carbon powder, and then defoaming, and then an acrylic pipe with an inner diameter of 80 mm is placed on the gypsum plate. The placed slurry was cast to produce a molded body having a thickness of about 10 mm. The molded body is naturally dried and dried at 100 to 150 ° C., then 1 × 10 −4
Degrease by holding at 600 ° C. for 2 hours under reduced pressure of ˜1 × 10 −3 torr, temperature 1
Calcination is performed by holding at 700 ° C. for 1 h. After calcination, heat to 1470 ° C and
A reaction sintered body was manufactured by impregnating molten silicon in the molded body for 0 min.

(Comparative Example 1)
30 parts by weight of silicon carbide powder with an average particle size of 0.6 μm and 70 parts by weight of boron carbide powder with an average particle size of 50 μm are added to silicon carbide powder, and 0.1 to 1 part by weight of a dispersant is added to the boron carbide powder. The slurry was placed in pure water and dispersed, and the pH was adjusted to 8 to 9.5 with ammonia water or the like to prepare a low viscosity slurry of less than 500 cp. After mixing this slurry for several hours in a pot mill or the like, add 1-2 parts by weight of binder to silicon carbide powder and boron carbide powder, mix, and then defoam and place an acrylic pipe with an inner diameter of 80 mm on the gypsum plate to prepare the slurry. Casting and the molded object about 10 mm thick were produced. The molded body is naturally dried and dried at 100 to 150 ° C., then 1 × 10 −4 to 1 × 1
Degrease by holding at 600 ° C. for 2 hours under reduced pressure of 0-3 torr, temperature 1700 ° C.
Is calcined by holding for 1 h. After calcination, heat to 1470 ° C for 30 min
A reaction sintered body was produced by holding and impregnating molten silicon in the molded body.

(Comparative Example 2)
50 parts by weight of silicon carbide powder with an average particle size of 0.6 μm, 50 parts by weight of boron carbide powder with an average particle size of 50 μm, and 50 parts by weight of carbon powder with an average particle size of 55 nm are silicon carbide powder, boron carbide powder, carbon black powder The mixture was dispersed in pure water to which 0.1 to 1 part by weight of a dispersant was added, and the pH was adjusted to 8 to 9.5 with aqueous ammonia or the like to prepare a low viscosity slurry of less than 500 cp. After mixing this slurry with a pot mill or the like for several hours, add 1 to 2 parts by weight of binder to silicon carbide powder, boron carbide powder, carbon powder, and then defoaming to place an acrylic pipe with an inner diameter of 80 nm on the gypsum plate. The placed slurry was cast to produce a molded body having a thickness of about 10 mm. The molded body is naturally dried and dried at 100 to 150 ° C., then 1 × 10 −4 to 1 × 10
Degreasing is performed by holding at 600 ° C. for 2 hours under a reduced pressure of −3 torr, and calcining is performed by holding at 1700 ° C. for 1 hour. After calcination, the reaction sintered body was manufactured by heating to a temperature of 1470 ° C. and holding for 30 minutes, and impregnating molten silicon into the molded body.

(Comparative Example 3)
80 parts by weight of silicon carbide powder having an average particle size of 0.6 μm and boron carbide powder 2 having an average particle size of 4 μm
0 parts by weight and 50 parts by weight of carbon powder having an average particle size of 55 nm are dispersed in pure water to which 0.1 to 1 part by weight of a dispersant is added to silicon carbide powder, boron carbide powder, and carbon black powder. Then, the pH was adjusted to 8 to 9.5 with aqueous ammonia or the like to prepare a low viscosity slurry of less than 500 cp. After mixing this slurry with a pot mill or the like for several hours, add 1-2 parts by weight of binder to silicon carbide powder, boron carbide powder, carbon powder, and then defoaming, and then an acrylic pipe with an inner diameter of 80 mm is placed on the gypsum plate. The placed slurry was cast to produce a molded body having a thickness of about 10 mm. The molded body is naturally dried and dried at 100 to 150 ° C., then 1 × 10 −4 to 1 × 10
Degreasing is performed by holding at 600 ° C. for 2 hours under a reduced pressure of −3 torr, and calcining is performed by holding at 1700 ° C. for 1 hour. After calcination, the reaction sintered body was manufactured by heating to a temperature of 1470 ° C. and holding for 30 minutes, and impregnating molten silicon into the molded body.

  In Examples 1 to 8, since the specific rigidity was 130 GPa or more, the grinding resistance was small, and chipping was difficult to occur, a composite material excellent in grinding workability could be manufactured.

  In Comparative Example 1, since the grinding resistance was large and chipping was likely to occur, the grindability was inferior.

  In Comparative Example 2, fine cracks were generated in the composite material, the specific rigidity was lowered, and chipping was likely to occur during grinding.

  In Comparative Example 3, the specific rigidity of the composite material was small, and chipping was easy to occur during grinding.

  According to an embodiment of the present invention, by providing a composite material having high specific rigidity and excellent grindability, and a method for manufacturing the same, high specific rigidity required for semiconductor / liquid crystal manufacturing apparatuses and the like and high dimensional accuracy are provided. Therefore, it can be applied to a member having a large complex shape.

Claims (3)

Mainly composed of boron carbide X volume part, silicon carbide Y volume part, silicon Z volume part, 10 <X <60, 20 <Y <70, 5 <Z <30, and 10 μm or more of boron carbide and silicon carbide. A composite material, wherein the particles are 10 to 50 parts by volume. A molding process for producing a molded body by molding a raw material mainly composed of boron carbide, silicon carbide and a carbon source, and a reactive sintering process for converting carbon into silicon carbide by impregnating the molded body with molten silicon. The main component is X part by volume of boron carbide, Y part by volume of silicon carbide, and Z part by volume of silicon Z, and 10 <X <60, 20 <Y <70, and 5 <Z <30. A method for producing a composite material, wherein 10 to 50 parts by volume of boron and silicon carbide particles having a size of 10 μm or more are contained. A boron carbide characterized by comprising a reactive sintering step in which carbon is converted to silicon carbide by impregnating molten silicon into a molded body obtained by molding a raw material mainly composed of boron carbide, silicon carbide, and a carbon source. X volume part, silicon carbide Y volume part, silicon Z volume part are the main components, 10 <X <60, 20 <Y <70, 5 <Z <30, and particles of 10 μm or more of boron carbide and silicon carbide are included. The manufacturing method of the composite material characterized by being 10-50 volume parts.

Images