JP2009259614A - Manufacturing method of electro-optical device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of an electro-optical device capable of suppressing thickness unevenness of a functional layer in a display region. <P>SOLUTION: The manufacturing method of an organic EL device 100 as the electro-optical device is provided with a first liquid ejection process in which a liquid body 33 containing a constituent material of an organic functional layer 30 and solvent is ejected on each of a plurality of pixel 2 regions, a second liquid ejection process in which a liquid body 44 containing at least a solvent is ejected on each of a plurality of liquid receiving regions 6 arranged on a member 40, and a drying process in which the liquid body 33 and the liquid body 44 are dried by arranging a face of the substrate 10 on which the liquid body 33 is ejected and a face of the member 40 on which the liquid body 44 is ejected in opposition each other so that the surrounding of the display region E may be surrounded by the plurality of liquid receiving regions 6. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a method for manufacturing an electro-optical device.

  As a method for manufacturing an organic EL type electro-optical device, a method of forming an organic functional layer by a droplet discharge method is known. In the droplet discharge method, a liquid material in which the constituent material of the organic functional layer is dissolved or dispersed in a solvent is selectively disposed in a predetermined region, for example, a pixel region in the display region contributing to display, and the liquid material is used. The organic functional layer is formed by evaporating the solvent. For this reason, the manufacturing process can be simplified and the amount of raw materials used can be reduced.

  On the other hand, in the method of forming the organic functional layer by the droplet discharge method, the liquid disposed in the peripheral portion in the display region tends to be dried faster than the central portion. This is because, in the display area, each pixel is adjacent to each other in the center portion, so there are many solvent molecules that evaporate. However, since no liquid material is arranged around the display area, it evaporates in the peripheral portion. This is because there are fewer solvent molecules and evaporation is faster than in the center. As a result, film thickness unevenness of the organic functional layer occurs between pixels in the display area. When there is such film thickness unevenness, a difference occurs in the current flowing through the organic functional layer, which causes display unevenness such as luminance unevenness and light emission color unevenness when the organic functional layer emits light.

  Therefore, a liquid material including a constituent material of an organic functional layer formed on a pixel located in the display region, in which dummy pixels that have substantially the same area as the pixel located in the display region and do not contribute to display are arranged around the display region. Has been proposed to prevent or suppress the occurrence of unevenness in the film thickness of the organic functional layer in the central portion and the peripheral portion of the display region (for example, Patent Document 1).

  Further, in order to increase the effect of preventing and suppressing the unevenness of the film thickness of the organic functional layer due to the arrangement of the dummy pixels, the amount of the solvent per unit area discharged to the dummy pixels is reduced per unit area discharged to the pixels of the display region. A configuration in which the amount of the liquid material is larger than the amount of the solvent (for example, Patent Document 2), or a configuration in which the amount of the liquid material per unit area ejected to the dummy pixels is equal to or greater than the amount of the liquid material per unit area ejected to the pixels in the display region. For example, Patent Document 3) has been proposed.

  On the other hand, as a method of preventing unevenness in the thickness of the organic functional layer by devising a drying method using a drying device, the area on which the liquid material is arranged on the substrate is divided into a plurality of areas, and the exhaust amount in each divided area is independent. Thus, a drying apparatus provided with a controllable member has been proposed (for example, Patent Document 4). In addition, a drying apparatus has been proposed that uses a current plate or a heater to dry the substrate with a uniform temperature distribution (for example, Patent Document 5).

JP 2002-252083 A JP 2006-3870 A JP 2001-188117 A JP 2006-261027 A JP 2006-210496 A

  However, if the area of the dummy pixel is increased to some extent as described above, there is a problem that the area of the display area is relatively reduced, and the electronic apparatus including the electro-optical device is increased in size. Further, when the amount of the solvent or liquid material per unit area discharged to the dummy pixel is increased, the liquid material overflows and spreads over the pixels located in the display region, and there is a problem that the manufacturing yield decreases. On the other hand, in the drying method using the above-described drying apparatus, precise adjustment is required every time the solvent species, the amount of liquid, the substrate size, the arrangement, and the like are changed, and there is a problem that the drying process becomes complicated.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

  Application Example 1 A method for manufacturing an electro-optical device according to this application example is a method for manufacturing an electro-optical device in which a functional layer is formed in each of a plurality of pixel regions arranged in a functional region on a substrate. A first liquid discharge step of discharging a first liquid including the constituent material of the functional layer and a first solvent in each of the plurality of pixel regions; and disposed on at least one member. A second liquid material discharge step for discharging a second liquid material containing at least a second solvent to each of the plurality of liquid receiving regions; a surface of the substrate on which the first liquid material is discharged; The surface of the at least one member on which the second liquid material is discharged is opposed so that the periphery of the functional region is surrounded by at least some of the liquid receiving regions of the plurality of liquid receiving regions. And drying the first liquid and the second liquid. And that the drying step, characterized by comprising a.

  According to this method, in the drying process, the liquid receiving region on the member is positioned so as to surround the periphery of the functional region on the substrate. Therefore, when the first solvent evaporates from the first liquid ejected to the pixel region, molecules of the second solvent evaporating from the second liquid ejected to the liquid receiving region are present around the first solvent. Exists. As a result, the number of solvent molecules in the peripheral part of the functional region increases, and evaporation of the first solvent in the peripheral part is suppressed. Therefore, there is a variation in the drying speed of the first liquid material between the peripheral part and the central part of the functional region. It can be suppressed. As a result, it is possible to suppress film thickness unevenness between pixels of the functional layer formed in the functional region.

  Further, according to this method, since the non-display area in which the dummy pixels that do not contribute to the display are arranged is not provided on the substrate, the thickness unevenness of the functional layer can be suppressed in the functional area. The relative area of the contributing functional region can be made larger than before. Further, in the manufacturing process of the electro-optical device, it is possible to perform drying while suppressing unevenness in film thickness between pixels by a simple configuration in which a member is opposed to a substrate.

  Application Example 2 In the electro-optical device manufacturing method according to the application example, in the drying step, the functional area is surrounded by all the liquid receiving areas of the plurality of liquid receiving areas. You may make it oppose.

  According to this method, most of the molecules of the second solvent are distributed around the functional region in the drying step. Thereby, the dispersion | variation in the drying speed of a 1st liquid can be restrained smaller by the peripheral part and center part of a functional area | region. Therefore, it is possible to further suppress film thickness unevenness between pixels of the functional layer formed in the functional region.

  [Application Example 3] A method of manufacturing an electro-optical device according to the application example described above, wherein, in the second liquid material discharge step, the plurality of liquid receiving regions are arranged on one member, and the drying is performed. In the step, the substrate and the one member may be opposed to each other.

  According to this method, the liquid receiving area is arranged on one member so as to surround the area corresponding to the functional area, and this area on the member overlaps the functional area on the substrate in plan view. If the substrate and the member are opposed to each other, the liquid receiving region on the member can be positioned so as to surround the periphery of the functional region on the substrate.

  Application Example 4 In the electro-optical device manufacturing method according to the application example, in the second liquid material discharge step, the plurality of liquid receiving regions are separately arranged on each of the plurality of members. In the drying step, the substrate and the plurality of members may be opposed to each other.

  According to this method, by arranging the functional area on the substrate so as to be surrounded by a plurality of members, the liquid receiving area is surrounded so as to surround the functional area without blocking the functional area on the substrate with these members. Can be positioned. For this reason, the evaporation of the first solvent in the functional region can be accelerated. Thereby, since the molecule | numerator of the 2nd solvent exists in the circumference | surroundings of a functional area | region until the 1st solvent evaporates, the dispersion | variation in the drying speed of a 1st liquid body is more more with the peripheral part and center part of a functional area | region. It can be kept small. Furthermore, even if the foreign matter adhering to the surface of the member on which the second liquid material is discharged falls, the foreign matter can be prevented from adhering to the surface of the substrate.

  Application Example 5 In the method of manufacturing the electro-optical device according to the application example, the arrangement pitch of the plurality of liquid receiving regions may be smaller than the arrangement pitch of the plurality of pixel regions.

  According to this method, the arrangement density of the liquid receiving regions is higher than the arrangement density of the pixels. Therefore, even if the discharge amount of the second liquid material per liquid receiving region and the discharge amount of the first liquid material per pixel region are substantially the same, the second liquid unit per unit area around the functional region is the same. The amount of the solvent can be larger than the amount of the first solvent per unit area in the functional region. Thereby, since there are more solvent molecules in the peripheral part of the functional region, the variation in the drying speed of the first liquid material can be further reduced between the peripheral part and the central part of the functional region.

  Application Example 6 In the electro-optical device manufacturing method according to the application example described above, the area of each of the plurality of liquid receiving regions may be larger than the area of each of the plurality of pixel regions.

  According to this method, since the area of the liquid receiving area is larger than the area of the pixel area, even if the arrangement pitch of the liquid receiving area is substantially the same as the arrangement pitch of the pixel area, the unit area around the functional area The amount of the second solvent per unit can be larger than the amount of the first solvent per unit area in the functional region. Thereby, the dispersion | variation in the drying speed of a 1st liquid can be restrained smaller by the peripheral part and center part of a functional area | region.

  Application Example 7 In the method of manufacturing the electro-optical device according to the application example described above, the plurality of liquid receiving regions may be formed in a belt shape.

  According to this method, since the liquid receiving region is formed in a band shape, the amount of the second solvent per unit area around the functional region can be increased. Thereby, the dispersion | variation in the drying speed of a 1st liquid can be restrained smaller by the peripheral part and center part of a functional area | region.

  Application Example 8 In the method of manufacturing the electro-optical device according to the application example, the amount of the second liquid material ejected per unit area of the plurality of liquid receiving regions is a region of the plurality of pixels. The amount of the first liquid material discharged per unit area may be larger.

  According to this method, even if each of the area of the liquid receiving region and the arrangement pitch is substantially the same as each of the area of the pixel region and each of the arrangement pitch, the second solvent per unit area around the functional region. The amount can be greater than the amount of the first solvent per unit area in the functional region. Thereby, the dispersion | variation in the drying speed of a 1st liquid can be restrained smaller by the peripheral part and center part of a functional area | region.

  Application Example 9 In the electro-optical device manufacturing method according to the application example described above, the boiling point of the second solvent may be higher than the boiling point of the first solvent.

  According to this method, the evaporation rate of the second solvent is slower than the evaporation rate of the first solvent. Thereby, since the molecule | numerator of the 2nd solvent exists in the circumference | surroundings of a functional area | region until the 1st solvent evaporates, the dispersion | variation in the drying speed of a 1st liquid body is more more with the peripheral part and center part of a functional area | region. It can be kept small.

  Application Example 10 In the method of manufacturing the electro-optical device according to the application example, the vapor pressure of the second solvent may be lower than the vapor pressure of the first solvent.

  According to this method, the evaporation rate of the second solvent is slower than the evaporation rate of the first solvent. Thereby, since the molecule | numerator of the 2nd solvent exists in the circumference | surroundings of a functional area | region until the 1st solvent evaporates, the dispersion | variation in the drying speed of a 1st liquid body is more more with the peripheral part and center part of a functional area | region. It can be kept small.

  Application Example 11 In the method of manufacturing an electro-optical device according to the application example, the second liquid material includes a constituent material of the functional layer, and the constituent material of the functional layer included in the second liquid material May be higher than the concentration of the constituent material of the functional layer contained in the first liquid.

  According to this method, the concentration of the constituent material of the functional layer contained in the second liquid is higher than the concentration of the constituent material of the functional layer contained in the first liquid. When the liquid is dried, the solvent in the liquid forms a liquid film on the surface of the liquid, and the liquid film evaporates and evaporates in the atmosphere or in a reduced-pressure atmosphere. When the liquid film of the solvent evaporates, the concentration of the constituent material of the functional layer increases on the liquid surface, but the temperature of the liquid surface decreases due to the heat of evaporation of the solvent and the concentration further increases on the liquid surface. Evaporation of the solvent inside the body is slow. Therefore, the evaporation rate of the second solvent can be made slower than the evaporation rate of the first solvent. Thereby, the dispersion | variation in the drying speed of a 1st liquid can be restrained smaller by the peripheral part and center part of a functional area | region.

  Application Example 12 In the method of manufacturing the electro-optical device according to the application example, the second liquid material may include the second solvent.

  According to this method, the molecules of the second solvent can be distributed around the functional region even if the second liquid does not contain the constituent material of the functional layer. Thereby, since the evaporation of the first solvent in the peripheral part of the functional region is suppressed, variation in the drying speed of the first liquid material is suppressed in the peripheral part and the central part of the functional region.

  [Application Example 13] A method for manufacturing an electro-optical device according to the application example, wherein the first liquid material forms at least a light emitting layer among functional layers constituting an organic EL element as a constituent material of the functional layer. It may contain material.

  According to this method, since the film thickness unevenness of the light emitting layer of the organic EL element formed in the pixel region disposed in the functional region contributing to display can be suppressed, an organic EL device free from display unevenness can be provided.

  Application Example 14 In the electro-optical device manufacturing method according to the application example, the first liquid material may include a color layer forming material for a color filter as a constituent material of the functional layer.

  According to this method, film thickness unevenness of the colored layer formed in the pixel region disposed in the functional region contributing to display can be suppressed, so that an electro-optical device including a color filter without color unevenness can be provided.

  Hereinafter, the present embodiment will be described with reference to the drawings, taking as an example a case where a liquid crystal device including an organic electroluminescence device (hereinafter referred to as an organic EL device) and a color filter as an electro-optical device is manufactured. In the drawings to be referred to, in order to show the configuration in an easy-to-understand manner, film thicknesses of components, ratios of dimensions, and the like are appropriately changed.

(First embodiment)
In the first embodiment, a case where an organic EL device as an electro-optical device is manufactured will be described.

<Organic EL device>
First, the configuration of the organic EL device according to the first embodiment will be described with reference to the drawings. FIG. 1 is a plan view showing the organic EL device according to the first embodiment. FIG. 2 is a circuit configuration diagram of the organic EL device according to the first embodiment. FIG. 3 is a cross-sectional view illustrating a schematic configuration of the organic EL device according to the first embodiment. Specifically, it is a partial cross-sectional view along the line AA ′ in FIG. In FIG. 1, illustration is omitted except for the components necessary for the following description of the positional relationship.

  As shown in FIG. 1, the organic EL device 100 includes a substrate 10 and a display area E as a functional area located on the substrate 10. The display area E is an area that substantially contributes to the display of the organic EL device 100.

  In the display region E, a plurality of pixels 2R, 2G, and 2B that contribute to the display of red (R), green (G), and blue (B) (also simply referred to as pixel 2 if the corresponding colors are not distinguished) are arranged. Has been. The pixels 2 are the minimum unit of display of the organic EL device 100 and are arranged in a matrix at intervals. The X axis indicates the row direction of the pixels 2, and the Y axis indicates the column direction of the pixels 2.

  The pixel 2 includes an organic electroluminescence element (hereinafter referred to as an organic EL element) 8 as a display element, and the light obtained by the organic EL elements 8R, 8G, and 8B that emit light to R, G, and B, respectively. It is designed to output as display light. A pixel group 4 is composed of the pixels 2R, 2G, and 2B. In the organic EL device 100, various colors can be displayed by appropriately changing the display brightness of each of the pixels 2R, 2G, and 2B in the pixel group 4.

  A bank unit 28 is provided on the substrate 10. The bank part 28 is formed in a substantially lattice shape, and partitions each area of the pixel 2. The region of the pixel 2 is, for example, a quadrangle with rounded corners. The region of the pixel 2 may be circular, oval, or other shape.

  Next, the circuit configuration of the organic EL device 100 will be described with reference to FIG. As shown in FIG. 2, the organic EL device 100 includes a switching TFT (thin film transistor) 11, 12, a storage capacitor 13, and a pixel functioning as an anode, which are provided on the substrate 10 corresponding to each pixel 2. The electrode 24, the common electrode 36 which functions as a cathode, and the organic functional layer 30 as a functional layer are provided. The pixel electrode 24, the common electrode 36, and the organic functional layer 30 constitute the organic EL element 8.

  On the substrate 10, further, a data line driving circuit 14, a scanning line driving circuit 15, a plurality of scanning lines 16 extending along the X-axis direction, and a plurality of signal lines 17 extending along the Y-axis direction, A plurality of power supply lines 18 extending in parallel with the signal lines 17 are provided. As in FIG. 1, the X axis indicates the row direction of the pixels 2, and the Y axis indicates the column direction of the pixels 2. A scanning line 16 is connected to the scanning line driving circuit 15, and a scanning signal is supplied to the gate electrode of the switching TFT 11 via the scanning line 16.

  On the other hand, a signal line 17 is connected to the data line driving circuit 14, and when the switching TFT 11 is turned on, an image signal supplied via the signal line 17 is held in the holding capacitor 13. Depending on the state, the on / off state of the switching TFT 12 is determined. When electrically connected to the power supply line 18 via the switching TFT 12, a drive current flows from the power supply line 18 to the pixel electrode 24, and further a current flows to the common electrode 36 through the organic functional layer 30. The organic functional layer 30 emits light with a luminance corresponding to the amount of current flowing between the pixel electrode 24 and the common electrode 36.

  Next, the structure of the organic EL device 100 will be described with reference to FIG. The organic EL device 100 is a bottom emission method in which light emitted from the organic functional layer 30 is emitted to the substrate 10 side. In FIG. 3, the TFT element portion 20 having the switching TFT 12 for driving the pixel electrode 24 and the circuit layer 22 are shown, but details of other elements, wiring, connection portions, and the like are omitted.

  The organic EL device 100 includes a TFT element unit 20, a circuit layer 22, a pixel electrode 24, a bank unit 28, an organic functional layer 30, a common electrode 36, and a sealing layer 38 on a substrate 10. I have.

  The substrate 10 is made of a light-transmitting material. Examples of the light-transmitting material include glass, quartz, and resin (plastic and plastic film).

  The TFT element portion 20 is provided corresponding to each of the pixels 2 and is disposed so as not to overlap each region of the pixel 2.

  The pixel electrode 24 is formed on the circuit layer 22 so as to correspond to each of the pixels 2. The pixel electrode 24 is, for example, a quadrangle, and has a region that is slightly larger than the region of the pixel 2. The pixel electrode 24 may have the same shape as the pixel 2. The pixel electrode 24 is made of a translucent conductive material, for example, ITO (Indium Tin Oxide). The pixel electrode 24 is connected to the TFT element unit 20 through a contact hole provided in the circuit layer 22.

The bank unit 28 is formed on the circuit layer 22. The bank unit 28 is configured by laminating an inorganic bank layer 26 and an organic bank layer 27. The inorganic bank layer 26 has a plurality of openings 26 a corresponding to the pixels 2. The inorganic bank layer 26 has a portion that overlaps the peripheral edge of the pixel electrode 24 with a predetermined width along the periphery of the opening 26a. The inorganic bank layer 26 is made of an inorganic material such as SiO ₂ . The film thickness of the inorganic bank layer 26 is, for example, 50 nm to 200 nm.

  Similar to the inorganic bank layer 26, the organic bank layer 27 has a plurality of openings 27 a corresponding to the pixels 2. The opening 27 a is wider than the opening 26 a of the inorganic bank layer 26. The organic bank layer 27 may overlap the peripheral edge of the pixel electrode 24. The organic bank layer 27 is made of an organic material such as acrylic resin. The organic bank layer 27 may be made of a material having liquid repellency such as a fluorine resin. The film thickness of the organic bank layer 27 is, for example, 0.1 μm to 3.5 μm.

  The bank unit 28 is not limited to the configuration having the inorganic bank layer 26. However, in order to increase the lyophilicity with the liquid forming the organic functional layer 30 and prevent the short circuit between the pixel electrode 24 and the common electrode 36 by forming the organic functional layer 30 to the vicinity of the bank portion 28, the bank It is preferable that the portion 28 has the inorganic bank layer 26.

  The organic functional layer 30 is formed in each region of the pixel 2 surrounded by the bank unit 28 and is located on the pixel electrode 24. The organic functional layer 30 includes a hole injection transport layer 32 and a light emitting layer 34 that are sequentially stacked. In the organic functional layer 30, light emission is obtained by recombination of holes injected from the hole injection transport layer 32 and electrons injected from the common electrode 36 in the light emitting layer 34. The light emitting layer 34 has three types of light emitting layers 34R, 34G, and 34B that emit light to each of R, G, and B (also simply referred to as the light emitting layer 34 when the corresponding colors are not distinguished). It corresponds to 2R, 2G, 2B.

  As the material of the hole injecting and transporting layer 32, for example, a polythiophene derivative such as polyethylene dioxythiophene (PEDOT) can be used. The material of the hole injecting and transporting layer 32 may be a mixture of a polythiophene derivative and polystyrene sulfonic acid (PSS), or may be polystyrene, polypyrrole, polyaniline, polyacetylene, or a derivative thereof. The film thickness of the hole injection transport layer 32 is, for example, 50 nm to 70 nm.

  The material of the light emitting layer 34 is (poly) fluorene derivative (PF), (poly) paraphenylene vinylene derivative (PPV), polyphenylene derivative (PP), polyparaphenylene derivative (PPP), polyvinyl which emits light to R, G, and B. Polythiophene derivatives such as carbazole (PVK) and PEDOT, polymethylphenylsilane (PMPS), and the like can be used. Further, these polymer materials include polymer materials such as perylene dyes, coumarin dyes, rhodamine dyes, rubrene, perylene, 9,10-diphenylanthracene, tetraphenylbutadiene, nile red, coumarin 6, quinacridone. For example, a low molecular material such as the like may be doped. The film thickness of the light emitting layer 34 is, for example, 50 nm to 80 nm.

  The organic functional layer 30 may have a configuration including an electron injecting and transporting layer in addition to the hole injecting and transporting layer 32 and the light emitting layer 34.

  The common electrode 36 is formed so as to cover the entire bank portion 28 and the organic functional layer 30. Although not shown, the common electrode 36 is configured by, for example, sequentially laminating a LiF layer having a thickness of 2 nm to 5 nm and an Al layer having a thickness of 100 nm to 1000 nm. With this configuration, the common electrode 36 also serves as an electron injection layer and a reflection layer.

  The common electrode 36 is covered with a sealing layer 38. The sealing layer 38 is made of epoxy resin, acrylic resin, liquid glass, or the like, and glass, metal, resin film, plastic, or other sealing members may be laminated and bonded.

  In the organic EL device 100 of the present embodiment, light emitted from the organic functional layer 30 to the substrate 10 side is emitted to the substrate 10 side, and light emitted from the organic functional layer 30 to the common electrode 36 side is emitted from the common electrode 36. And is emitted to the substrate 10 side.

  The organic EL device 100 may be a top emission type organic EL device in which light emitted from the organic functional layer 30 is emitted to the sealing layer 38 side. When the organic EL device 100 is a top emission method, the substrate 10 may use either a transparent material or an opaque material. The TFT element unit 20 may overlap each region of the pixel 2. In the case of the top emission method, a light-transmitting conductive material is used for the common electrode 36, and a light-transmitting material is used for the sealing layer 38.

<Method for manufacturing organic EL device>
Next, a method for manufacturing the organic EL device according to the first embodiment will be described with reference to the drawings. FIG. 4 is a flowchart illustrating a method for manufacturing the organic EL device according to the first embodiment. FIG. 5 is a plan view and a cross-sectional view for explaining the liquid material arranging step and the drying step. FIG. 6 is a graph showing the distribution of vapor pressure in the drying process.

  As shown in FIG. 4, the organic EL device manufacturing method includes a circuit layer forming step S10, a pixel electrode forming step S20, a bank part forming step S30, and a hole injection transport layer forming step for forming the organic functional layer 30. S40, the light emitting layer forming step S50, the common electrode forming step S60, and the sealing layer forming step S70 are included.

  In the circuit layer forming step S <b> 10, the circuit layer 22 including the TFT element unit 20 and the like is formed on the substrate 10. Next, in the pixel electrode formation step S <b> 20, the pixel electrode 24 is formed on the circuit layer 22. As a method for forming the circuit layer 22 and the pixel electrode 24, a known method may be applied. The pixel electrode 24 is connected to the TFT element unit 20.

Next, in the bank part forming step S <b> 30, the inorganic bank layer 26 is formed on the circuit layer 22, and the organic bank layer 27 is formed on the inorganic bank layer 26. Thereby, the bank part 28 is formed. Subsequently, prior to the next hole injection / transport layer forming step S40, the surface of the pixel electrode 24 and the inorganic bank layer 26 is subjected to lyophilic treatment such as O ₂ plasma treatment. By this treatment, the lyophilicity between the liquid containing the material of the organic functional layer 30 and the inorganic bank layer 26 is improved. Therefore, the organic functional layer 30 is formed up to the vicinity of the inorganic bank layer 26, so A short circuit with the electrode 36 can be prevented. Further, the surface of the organic bank layer 27 is subjected to lyophobic treatment such as CF ₄ plasma treatment.

  Next, in the hole injection / transport layer forming step S <b> 40, the hole injection / transport layer 32 is formed on the pixel electrode 24. This process includes a first liquid discharge process, a second liquid discharge process, and a drying process. The first liquid material discharge step is a step of discharging the liquid material 33 (see FIG. 5) as the first liquid material onto the pixel electrode 24 of the substrate 10. The drying step is a step of drying the liquid 33 using the facing member 40 (see FIG. 5) as a member. The second liquid material discharge step is a step of discharging the liquid material 44 (see FIG. 5) as the second liquid material onto the facing member 40.

  Before describing each step of the hole injecting and transporting layer forming step S40, first, the configuration of the facing member 40 will be described. FIG. 5A is a diagram illustrating the facing member 40, and FIG. 5B is a diagram illustrating the substrate 10 of the organic EL device 100. FIG. 5C is a diagram showing the arrangement of the substrate 10 and the counter member 40 in the drying process. Specifically, the cross section along the line BB ′ in FIGS. 5A and 5B is shown. Show. Here, only components necessary for the description are illustrated, and their shapes are simplified.

  As shown to Fig.5 (a), the opposing member 40 consists of a plate-shaped material which has a plane. The material of the facing member 40 may be the same material as the substrate 10 or may be a resin plate or a metal plate that does not have translucency. The facing member 40 has a surface that is at least larger than the display area E on the substrate 10. On the surface of the opposing member 40, a plurality of liquid receiving regions 6 are arranged so as to surround a region E ′ having substantially the same shape and area as the display region E on the substrate 10. In the present embodiment, each of the liquid receiving regions 6 has an arrangement pitch substantially the same as the arrangement pitch of the pixels 2 along the row direction and the column direction of the pixels 2 arranged in the display region E on the substrate 10. Arranged in a row.

  On the surface of the facing member 40, bank portions 42 that partition the respective regions of the liquid receiving region 6 are provided. The shape of the opening of the bank portion 42, that is, the shape of the region of the liquid receiving region 6 is substantially the same as the shape of the region of the pixel 2. Further, the area of the liquid receiving region 6 is substantially the same as the area of the pixel 2 region. The surface of the facing member 40 has good lyophilicity at the opening of the bank part 42 by lyophilic treatment or the like. The bank part 42 may not be provided on the surface of the opposing member 40, and the bank 44 may be provided on the surface of the opposing member 40 in order to prevent the discharged liquid material 44 from spreading from the liquid receiving region 6. It is preferable that the part 42 is provided.

  Next, the first liquid discharge process and the second liquid discharge process will be described. In the first liquid material discharge step, as shown in FIG. 5B, the liquid material 33 is discharged to each region of the pixel 2 by an inkjet method as a droplet discharge method. The liquid 33 contains, for example, about 0.5% by weight of PEDOT as a constituent material of the hole injection / transport layer 32, and contains, for example, ethylene glycol as the first solvent. In the second liquid material discharge step, as shown in FIG. 5A, the liquid material 44 is discharged to each region of the liquid receiving region 6 by an ink jet method as a droplet discharge method. The liquid material 44 has substantially the same configuration as the liquid material 33.

  Here, in this embodiment, the amount of the liquid material 44 discharged per unit area of the liquid receiving region 6 is larger than the amount of the liquid material 33 discharged per unit area of each region of the pixel 2. Many. In addition, either a 1st liquid body discharge process and a 2nd liquid body discharge process may be performed first, and both processes may be performed in parallel.

  A drying process is performed after a 1st liquid body discharge process and a 2nd liquid body discharge process. In the drying step, as shown in FIG. 5C, the surface of the substrate 10 from which the liquid material 33 is discharged and the surface of the counter member 40 from which the liquid material 44 is discharged are arranged to face each other. The liquid 44 is dried. More specifically, the substrate 10 is disposed on the lower side in the gravity direction, and the opposing member 40 is disposed on the upper side in the gravity direction. Further, the counter member 40 is arranged such that the display area E on the substrate 10 and the area E ′ on the counter member 40 overlap in plan view, that is, the periphery of the pixel 2 arranged in the display area E on the substrate 10 is It arrange | positions so that it may be enclosed by the liquid receiving area | region 6. FIG.

  At this time, the gap D is separated between the surface of the substrate 10 and the surface of the facing member 40. The space | gap D is 4 mm or less, for example, and it is preferable that it is as small as possible. This is because if the gap D is larger than 4 mm, the effect of suppressing the evaporation of the solvent of the liquid material 33 in the peripheral portion of the display area E by the solvent molecules evaporated from the liquid material 44 decreases. Even if the facing member 40 is arranged in such a state that the liquid material 44 is directed downward in the direction of gravity, the surface of the facing member 40 has good lyophilicity. It does not detach from the facing member 40 due to surface tension and does not fall.

  Next, the vapor pressure distribution in the drying process will be described with reference to FIG. FIG. 6A is a diagram showing the vapor pressure distribution of the solvent evaporating from the liquid material 44 in the facing member 40. FIG. 6B is a diagram showing the distribution of vapor pressure of the solvent evaporating from the liquid material 33 in the substrate 10. FIG. 6C is a diagram illustrating a distribution of vapor pressures of the solvent evaporating from the liquid 33 and the liquid 44 in a state where the substrate 10 and the facing member 40 are disposed to face each other. 6A, 6B, and 6C show the vapor pressure distribution in the cross section along the line B-B 'in FIGS. 5A and 5B.

  As shown in FIG. 6B, in the substrate 10, there are solvent molecules that evaporate from the liquid material 33 that is ejected to the area of the pixel 2 in the display area E. On the other hand, as shown in FIG. 6A, in the facing member 40, there are solvent molecules that evaporate from the liquid 44 discharged to the liquid receiving region 6 so as to surround the region E ′. Therefore, as shown in FIG. 6C, in a state where the surface of the substrate 10 from which the liquid material 33 is discharged and the surface of the counter member 40 from which the liquid material 44 is discharged are disposed opposite to each other, the liquid material 33 evaporates. Solvent molecules that evaporate from the liquid 44 exist around the solvent molecules. Thereby, since evaporation of the solvent of the liquid 33 in the periphery of the display area E is suppressed, variation in the drying speed of the liquid 33 is suppressed between the periphery and the center of the display area E. As a result, film thickness unevenness between the pixels 2 of the hole injection transport layer 32 formed in the display region E can be suppressed.

  Further, since the amount of the liquid material 44 ejected per unit area of the liquid receiving region 6 is larger than the amount of the liquid material 33 ejected per unit area of the pixel 2 region, it is shown in FIG. As described above, the vapor pressure of the solvent molecules around the region E ′ (display region E) of the facing member 40 is larger than the vapor pressure of the solvent molecules in the display region E of the substrate 10. Since the solvent molecules evaporate from the liquid material 44 exist around the display area E until the liquid material 33 is dried, the variation in the drying speed of the liquid material 33 is further increased between the peripheral portion and the central portion of the display region E. It can be kept small. Through the hole injection / transport layer formation step S40 described above, the hole injection / transport layer 32 is formed in the region of the pixel 2.

  In the drying step, the substrate 10 and the facing member 40 may be arranged so that the mutually facing surfaces of the substrate 10 and the facing member 40 are along the direction of gravity. If the substrate 10 and the facing member 40 are arranged in this way, it is possible to prevent the foreign matter from adhering to the surface of the substrate 10 when the foreign matter attached to the surface of the facing member 40 facing the substrate 10 falls.

  Next, in the light emitting layer forming step S <b> 50, the light emitting layer 34 is formed on the hole injecting and transporting layer 32. This step includes a first liquid discharge step, a second liquid discharge step, and a drying step, similar to the hole injection transport layer formation step S40. The light emitting layer forming step S50 is different in that the liquid 33 contains the constituent material and the solvent of the light emitting layer 34 instead of the constituent material and the solvent of the hole injection and transport layer 32. Since it is common with transport layer formation process S40, description about a common matter is abbreviate | omitted.

  In the light emitting layer forming step S50, the liquid 33 includes, for example, a PF light emitting material as a constituent material of the light emitting layer 34, and includes, for example, tetralin as a solvent. The liquid material 44 has substantially the same configuration as the liquid material 33.

  Also in the light emitting layer forming step S50, similarly to the hole injecting and transporting layer 32, the film thickness unevenness between the pixels 2 of the light emitting layer 34 can be suppressed. By the hole injection transport layer forming step S40 and the light emitting layer forming step S50 described above, the organic functional layer 30 can be formed while suppressing the film thickness unevenness in the display region E.

  In the next common electrode forming step S <b> 60, the common electrode 36 is formed so as to cover the organic functional layer 30 and the bank portion 28. As a method for forming the common electrode 36, for example, an evaporation method is applied. Finally, in the sealing layer forming step S70, the sealing layer 38 is formed on the common electrode 36. Thus, the organic EL device 100 can be manufactured.

  According to the manufacturing method of the organic EL device 100 described above, the unevenness of the film thickness of the organic functional layer 30 formed in the region of the pixel 2 arranged in the display region E that contributes to display can be suppressed. The EL device 100 can be provided. In addition, since the non-display area in which the dummy pixels that do not contribute to the display are arranged is not provided on the substrate 10, the film thickness unevenness of the organic functional layer 30 can be suppressed in the display area E, which contributes to the display of the organic EL device 100. The relative area of the display area E to be made can be made larger than when a non-display area is provided.

  In the manufacturing process of the organic EL device 100, since a non-display area is not required, it is possible to avoid a decrease in manufacturing yield due to the liquid material arranged in the dummy pixels overflowing and spreading into the display area. Further, in the drying process, it is possible to perform drying while suppressing the uneven thickness of the organic functional layer 30 in the display region E with a simple configuration in which the facing member 40 is opposed to the substrate 10.

  A non-display area where dummy pixels are arranged may be provided around the display area E of the organic EL device 100. According to the method for manufacturing the organic EL device 100 of the present embodiment, when providing a non-display region in the organic EL device 100, the non-display region can be made smaller than before. Further, the opposing member 40 may have a “B” shape having an opening in the region E ′. When the facing member 40 has such a shape, the display area E on the substrate 10 is opened to the atmosphere without being blocked by the facing member 40 in the drying process, so that the drying of the liquid 33 can be accelerated. Alternatively, in the facing member 40, the liquid receiving region 6 may be disposed in the region E ′. However, in this case, the amount of the liquid material 44 discharged into the region E ′ is smaller than the amount of the liquid material 44 discharged around the region E ′, and the liquid material 44 discharged into the region E ′ It is preferable that the substrate 10 and the facing member 40 face each other so that the liquid material 33 does not contact each other.

(Second Embodiment)
<Method for manufacturing organic EL device>
Next, a method for manufacturing an organic EL device according to the second embodiment will be described with reference to the drawings. The organic EL device according to the second embodiment has the same configuration as the organic EL device of the first embodiment. The manufacturing method of the organic EL device according to the second embodiment includes the same steps as the manufacturing steps described in the first embodiment. This embodiment is different from the method for manufacturing the organic EL device according to the first embodiment in that a plurality of opposing members are used in the liquid drying process, but the other methods are the same. FIG. 7 is a plan view and a cross-sectional view illustrating a drying process according to the second embodiment. Constituent elements common to the first embodiment are denoted by the same reference numerals, and description thereof is omitted.

  As shown in FIG. 7A, the plurality of facing members 40a, 40b, 40c, and 40d correspond to the four sides of the outer periphery of the substrate 10, respectively. In each of the facing members 40 a, 40 b, 40 c, and 40 d, the liquid receiving regions 6 are arranged in a line at an arrangement pitch that is substantially the same as the arrangement pitch of the pixels 2.

  As shown in FIG. 7C, in the drying process, a plurality of facing members 40a, 40b, 40c, and 40d are arranged to face the substrate 10, and the liquid 33 on the substrate 10 and the facing members 40a, 40b, and 40c. , 40d is dried. At this time, each of the facing members 40a, 40b, 40c, and 40d is disposed around the four sides of the outer periphery of the substrate 10 so that the surface on which the liquid material 44 is discharged is positioned along the direction of gravity. Thereby, the periphery of the pixel 2 arranged in the display area E on the substrate 10 is surrounded by the liquid receiving area 6.

  According to the manufacturing method of the second embodiment, since the plurality of facing members 40a, 40b, 40c, and 40d are used in the drying process, the facing members 40a, 40b, 40c, and 40d with respect to the display region E on the substrate 10 are used. The arrangement of each can be adjusted individually. Since the display area E on the substrate 10 is opened to the atmosphere without being blocked by the facing members 40a, 40b, 40c, and 40d, the drying of the liquid 33 can be accelerated. Furthermore, even if the foreign matter adhering to the surface on which the liquid material 44 of the opposing members 40a, 40b, 40c, and 40d is dropped, the foreign matter can be prevented from adhering to the surface of the substrate 10.

  Further, when the liquid material 44 is discharged onto the facing members 40a, 40b, 40c, and 40d, the liquid material 33 is discharged onto the substrate 10 if the facing members 40a, 40b, 40c, and 40d are disposed around the substrate 10. In the first liquid discharge process, the liquid 44 can be discharged onto the opposing members 40a, 40b, 40c, and 40d.

  In the present embodiment, the opposing members 40a, 40b, 40c, and 40d are arranged in the direction of gravity so that the surface from which the liquid material 44 is discharged and the surface from which the liquid material 33 is discharged from the substrate 10 are parallel to each other. It may be arranged on the upper side. Even if the opposing members 40a, 40b, 40c, and 40d are arranged in this manner, the same effects as described above can be obtained.

(Third embodiment)
Next, in the third embodiment, a case where a liquid crystal device including a color filter as an electro-optical device is manufactured will be described.

<Liquid crystal device with color filter>
First, an example of the configuration of a liquid crystal device including a color filter as an electro-optical device according to a third embodiment will be described with reference to the drawings. FIG. 8 is a plan view showing the liquid crystal device according to the third embodiment. FIG. 9 is a cross-sectional view illustrating a schematic configuration of the liquid crystal device according to the third embodiment. Specifically, FIG. 9 is a partial cross-sectional view taken along the line CC ′ of FIG. In FIG. 8, only components necessary for the following description of the positional relationship are shown.

  As shown in FIG. 9, the liquid crystal device 200 according to the third embodiment is positioned between the substrate 10 including the TFT element unit 20, the substrate 70 including the color filter 80, and the substrate 10 and the substrate 70. And an active matrix type liquid crystal device.

  As shown in FIG. 8, in the display area E, a plurality of pixels 3R, 3G, and 3B that contribute to the display of R, G, and B (also simply referred to as the pixel 3 when corresponding colors are not distinguished) are arranged. Yes. The pixels 3 are the minimum unit of display of the liquid crystal device 200 and are arranged in a matrix at intervals. A pixel group 5 is composed of the pixels 3R, 3G, and 3B. In the liquid crystal device 200, various colors can be displayed by appropriately changing the display brightness of the pixels 3R, 3G, and 3B in the pixel group 5.

  A bank 74 is provided on the substrate 70. The bank 74 is formed in a substantially lattice shape, and partitions each region of the pixel 3. The bank 74 has a plurality of openings corresponding to the pixels 3. The opening is, for example, a quadrangle.

  Next, the structure of the liquid crystal device 200 will be described with reference to FIG. The substrate 10 is made of a light-transmitting material. A circuit layer 22 including a plurality of TFT element portions 20 is provided on the substrate 10. On the circuit layer 22, a plurality of pixel electrodes 24 connected to each of the TFT element units 20 are provided. The pixel electrode 24 is made of, for example, ITO.

  The substrate 70 is made of a light-transmitting material. A color filter 80, an overcoat layer 82, and a common electrode 84 are stacked on the liquid crystal layer 90 side of the substrate 70. The color filter 80 includes a resin layer 72, a bank 74, and a colored layer 76.

  The resin layer 72 is made of an organic material such as a translucent acrylic resin or polyimide resin. The bank 74 is formed on the resin layer 72. The bank 74 is made of an organic material such as acrylic resin. A light shielding layer may be provided between the resin layer 72 and the bank 74 so as to overlap the bank 74.

  The colored layer 76 is formed in a region surrounded by the bank 74 and is located on the resin layer 72. Three color pixels 3R, 3G, and 3B are configured by combinations of the colored layers 76R, 76G, and 76B corresponding to the three colors R, G, and B and the three pixel electrodes 24, respectively.

  The overcoat layer 82 is formed so as to cover the color filter 80. The common electrode 84 is formed on the overcoat layer 82. The common electrode 84 is made of, for example, ITO.

  The liquid crystal layer 90 is located between the substrate 10 and the substrate 70. Although not shown, an alignment film is formed on the side of the substrate 10 in contact with the liquid crystal layer 90 so as to cover the circuit layer 22 and the pixel electrode 24. Although not shown, an alignment film is formed on the side of the substrate 70 in contact with the liquid crystal layer 90 so as to cover the common electrode 84. The alignment direction of the liquid crystal layer 90 is regulated by the alignment treatment performed on these alignment films. Although not shown, polarizing plates are disposed on the opposite side of the substrate 10 from the liquid crystal layer 90 and on the opposite side of the substrate 70 from the liquid crystal layer 90, respectively.

<Color filter manufacturing method>
As a method of manufacturing the color filter 80 included in the liquid crystal device 200 of the present embodiment, the method of manufacturing the organic EL device 100 of the above embodiment can be applied. When the color filter 80 is formed by applying the manufacturing method of the organic EL device 100, the constituent material of the functional layer included in the liquid material 33 and the liquid material 44 is set to a predetermined color light (for example, three colors of R, G, and B). Any one of them may be used as the colored layer forming material.

  According to the third embodiment, since the film thickness unevenness of the colored layer 76 formed in the pixel region contributing to display can be suppressed, the liquid crystal device 200 including the color filter 80 without color unevenness can be provided. In addition, what is necessary is just to apply a well-known structure and manufacturing method about the structure and manufacturing method which are not demonstrated above.

  In the present embodiment, the configuration in which the liquid crystal device 200 includes the color filter 80 has been described, but the present invention is not limited to this configuration. The organic EL device 100 according to the above embodiment may include the color filter 80 according to this embodiment. When the light emitting layer 34 of the organic EL device 100 emits white light, the color filter 80 can be combined to obtain three colors of R, G, and B.

  As mentioned above, although embodiment of this invention was described, various deformation | transformation can be added with respect to the said embodiment in the range which does not deviate from the meaning of this invention. As modifications, for example, the following can be considered.

(Modification 1)
In the method of manufacturing the electro-optical device according to the above embodiment, the amount of the liquid 44 discharged per unit area of the liquid receiving region 6 is the liquid receiving region on the facing member 40 (facing members 40a, 40b, 40c, 40d). Although it was substantially the same about each of 6, it is not limited to this form. The amount of the liquid 44 ejected per unit area of the liquid receiving region 6 may vary depending on the position on the facing member 40 (facing members 40a, 40b, 40c, 40d).

  FIG. 10 is a plan view and a cross-sectional view illustrating a liquid material arranging step and a drying step according to Modification 1. As shown in FIGS. 10A and 10B, the shape of the region of the pixel 2 and the shape of the liquid receiving region 6 are both elliptical and have substantially the same area. The major axis directions of the elliptical shapes of the pixel 2 region and the liquid receiving region 6 are both in the same direction. The display region E on the substrate 10 has a rectangular shape, and the long side direction thereof is along the elliptical long axis direction of the liquid receiving region 6 (the region of the pixel 2). As shown in FIG. 10A, on the facing member 40, the liquid receiving area 6a is located on the long side of the area E ′, and the liquid receiving area 6b is located on the short side of the area E ′. ing.

  At this time, in the second liquid discharge process, the amount of the liquid 44b discharged per unit area of the liquid receiving region 6b is the same as the amount of the liquid 44a discharged per unit area of the liquid receiving region 6a. Even so, the same effect as the above-described embodiment can be obtained. However, when the region of the pixel 2 has an elliptical shape or a rectangular shape as described above, the film thickness tends to be uneven in the direction along the major axis in the region of the pixel 2.

  In such a case, the amount of the liquid 44b discharged per unit area of the liquid receiving region 6b is preferably larger than the amount of the liquid 44a discharged per unit area of the liquid receiving region 6a. By making the amount of the liquid 44b discharged per unit area of the liquid receiving region 6b located on the short side of the region E ′ larger than the amount of the liquid 44a, both sides of the pixel 2 in the long axis direction (display Since the amount of the solvent that evaporates on the short side of the region E can be increased, film thickness unevenness in the direction along the long axis can be suppressed.

(Modification 2)
In the method of manufacturing the electro-optical device according to the above embodiment, the arrangement pitch of the liquid receiving regions 6 is substantially the same as the arrangement pitch of the pixels 2, but is not limited to this configuration. The arrangement pitch of the liquid receiving regions 6 may be smaller than the arrangement pitch of the pixels 2.

  FIG. 11 is a plan view and a cross-sectional view illustrating a liquid material arranging step and a drying step according to Modification 2. As shown in FIG. 11A, the arrangement pitch of the liquid receiving areas 6 is smaller than the arrangement pitch of the areas of the pixels 2. According to such a method, since the arrangement density of the liquid receiving area 6 is higher than the arrangement density of the pixel 2, the discharge amount of the liquid 44 per liquid receiving area 6 and the discharge of the liquid 33 per area of the pixel 2. Even if the amount is substantially the same, the amount of the solvent per unit area around the display region E can be made larger than the amount of the solvent per unit area in the display region E. As a result, solvent molecules that evaporate from the liquid material 44 exist around the display area E until the liquid material 33 is dried. Therefore, variation in the drying speed of the liquid material 33 between the peripheral portion and the central portion of the display region E is prevented. It can be kept smaller.

(Modification 3)
In the electro-optical device manufacturing method of the above embodiment, the area of the liquid receiving region 6 is substantially the same as the area of the pixel 2, but is not limited to this form. The area of the liquid receiving region 6 may be larger than the area of the pixel 2 region.

  FIG. 12 is a plan view and a cross-sectional view illustrating a liquid material arranging step and a drying step according to Modification 3. As shown in FIG. 12A, the area of the liquid receiving region 6 is larger than the area of the pixel 2 region. According to such a method, even if the amount of the liquid 44 discharged per unit area of the liquid receiving region 6 is the same as the amount of the liquid 33 discharged per unit area of the pixel 2 region. The amount of the solvent per unit area around the display area E can be made larger than the amount of the solvent per unit area in the display area E. Thereby, the dispersion | variation in the drying speed of the liquid 33 can be suppressed smaller between the peripheral part and the center part of the display area E.

(Modification 4)
In the method of manufacturing the electro-optical device according to the above embodiment, the shape of the liquid receiving region 6 is substantially the same as the shape of the pixel 2 region, but is not limited to this form. The liquid receiving region 6 may be formed in a strip shape.

  FIG. 13 is a plan view and a cross-sectional view illustrating a liquid material arranging step and a drying step according to Modification 4. As shown in FIG. 13 (a), the liquid receiving region 6c is located on the long side of the region E ′ along the periphery of the region E ′ on the facing member 40, and the short side of the region E ′. The liquid receiving area 6d is located on the side. The liquid receiving area 6c and the liquid receiving area 6d are each formed in a band shape in plan view along the long side or the short side of the area E '.

  According to such a method, the amount of the solvent per unit area around the display area E can be increased by discharging the liquid materials 44c and 44d to the liquid receiving areas 6c and 6d formed in a band shape. . The liquid receiving area 6c (6d) may be formed in a “B” shape so as to surround the display area E.

(Modification 5)
In the method of manufacturing the electro-optical device according to the above embodiment, the liquid receiving regions 6 are arranged in a line around the region E ′, but the present invention is not limited to this configuration. A configuration in which a plurality of rows of liquid receiving regions 6 are arranged around the region E ′ may be employed.

  FIG. 14 is a plan view and a cross-sectional view illustrating a liquid material arranging step and a drying step according to Modification 5. As shown in FIG. 14A, two rows of liquid receiving regions 6 are located on the opposing member 40 around the region E ′. According to such a method, the area of the liquid receiving region 6 is substantially the same as the area of the pixel 2, and the amount of the liquid 44 discharged per unit area of the liquid receiving region 6 is the same as that of the pixel 2. Even if the amount of the liquid 33 discharged per unit area of the region is the same, the total amount of the liquid 44 around the region E ′ can be increased. As a result, solvent molecules that evaporate from the liquid material 44 exist around the display area E until the liquid material 33 is dried. Therefore, variation in the drying speed of the liquid material 33 between the peripheral portion and the central portion of the display region E is prevented. It can be kept smaller.

(Modification 6)
In the method of manufacturing the electro-optical device according to the above-described embodiment and the modification, the liquid material 44 has substantially the same configuration as the liquid material 33, but is not limited to this configuration. The solvent contained in the liquid material 44 is different from the solvent contained in the liquid material 33, and the boiling point of the solvent contained in the liquid material 44 may be higher than the boiling point of the solvent contained in the liquid material 33.

  For example, in the hole injecting and transporting layer forming step S40, the liquid material 33 contains ethylene glycol as the first solvent, and the liquid material 44 contains diethylene glycol as the second solvent. Ethylene glycol contained as a solvent in the liquid 33 has a boiling point of 198 ° C. On the other hand, diethylene glycol contained as a solvent in the liquid 44 has a boiling point of 245 ° C.

  According to this configuration, since the boiling point of the solvent contained in the liquid material 44 is higher than the boiling point of the solvent contained in the liquid material 33, the evaporation speed of the liquid material 44 is slower than the evaporation speed of the liquid material 33. Thereby, in the drying step, solvent molecules evaporating from the liquid material 44 exist around the display area E until the liquid material 33 is dried. Therefore, the liquid material 33 is dried at the periphery and the center of the display area E. The variation in speed can be further reduced. Therefore, the film thickness unevenness of the hole injection transport layer 32 in the display region E can be further reduced.

  Further, since the evaporation rate of the liquid 44 is slower than the evaporation rate of the liquid 33, the amount of the liquid 44 discharged per unit area of the liquid receiving region 6 is discharged per unit area of the pixel 2 region. Even if the amount is not larger than the amount of the liquid material 33, the film thickness unevenness between the pixels 2 in the display region E can be suppressed.

(Modification 7)
In the method of manufacturing the electro-optical device according to the embodiment and the modification, the solvent contained in the liquid material 44 is different from the solvent contained in the liquid material 33, and the vapor pressure of the solvent in the liquid material 44 is the same as that of the solvent in the liquid material 33. The structure may be lower than the vapor pressure.

  For example, in the hole injection transport layer forming step S40, the liquid 33 contains triethylene glycol dimethyl ether as the first solvent, and the liquid 44 contains ethylene glycol as the second solvent. Triethylene glycol dimethyl ether contained as a solvent in the liquid 33 has a vapor pressure of 1.22 hPa at 20 ° C. On the other hand, ethylene glycol contained as a solvent in the liquid 44 has a vapor pressure of 0.05 hPa at 20 ° C.

  According to this configuration, since the vapor pressure of the solvent contained in the liquid material 44 is lower than the vapor pressure of the solvent contained in the liquid material 33, the evaporation speed of the liquid material 44 is slower than the evaporation speed of the liquid material 33. Thereby, in the drying step, solvent molecules evaporating from the liquid material 44 exist around the display area E until the liquid material 33 is dried. Therefore, the liquid material 33 is dried at the periphery and the center of the display area E. The variation in speed can be further reduced. Therefore, the film thickness unevenness of the hole injection transport layer 32 in the display region E can be further reduced.

(Modification 8)
In the method for manufacturing the electro-optical device according to the above-described embodiment and the modification, the liquid material 44 may have a configuration not including the constituent material of the organic functional layer. Even if the liquid material 44 does not contain the constituent material of the organic functional layer, the solvent of the liquid material 44 evaporates, so that the solvent molecules can be distributed around the functional region E. Therefore, the same effect can be obtained. It is done.

(Modification 9)
In the method of manufacturing the electro-optical device according to the embodiment and the modified example, the organic functional layer material concentration included in the liquid material 44 may be higher than the organic functional layer material concentration included in the liquid material 33. Good.

  For example, in the hole injecting and transporting layer forming step S40, the liquid 33 contains about 0.3% to 1.2% by weight of the material of the hole injecting and transporting layer 32. On the other hand, the liquid 44 contains about 2% to 3% of the material of the hole injecting and transporting layer 32 by weight. The concentration of the constituent material of the functional layer included in the liquid material 44 is preferably about 1.5% higher than the concentration of the constituent material of the functional layer included in the liquid material 33.

  Here, when the liquid is dried, the solvent in the liquid forms a liquid film on the surface of the liquid, and the liquid film is vaporized and evaporated in the atmosphere or in a reduced pressure atmosphere. When the liquid film of the solvent evaporates on the liquid surface, the concentration of the constituent material of the functional layer increases on the liquid surface, but the temperature of the liquid surface decreases due to the evaporation heat of the solvent, and the concentration further increases on the liquid surface. By doing so, the evaporation of the solvent inside the liquid is delayed. By repeating this, the evaporation of the solvent inside the liquid is further delayed over time.

  For this reason, if the concentration of the constituent material of the hole injection / transport layer 32 contained in the liquid material 44 is higher than that of the liquid material 33, the liquid material 44 has a larger decrease in evaporation amount over time than the liquid material 33. Therefore, it takes a longer time for the liquid 44 to evaporate completely than the liquid 33. Therefore, since the evaporation rate of the liquid 44 is slower than the evaporation rate of the liquid 33, the film thickness unevenness of the hole injection / transport layer 32 in the display region E can be further reduced.

1 is a plan view showing an organic EL device according to a first embodiment. 1 is a circuit configuration diagram of an organic EL device according to a first embodiment. 1 is a cross-sectional view illustrating a schematic configuration of an organic EL device according to a first embodiment. 6 is a flowchart illustrating a method for manufacturing the organic EL device according to the first embodiment. The top view and sectional drawing explaining a liquid body arrangement | positioning process and a drying process. The graph which shows distribution of the vapor pressure in a drying process. The top view and sectional drawing explaining the drying process which concerns on 2nd Embodiment. FIG. 6 is a plan view showing a liquid crystal device according to a third embodiment. Sectional drawing which shows schematic structure of the liquid crystal device which concerns on 3rd Embodiment. The top view and sectional drawing explaining the liquid body arrangement | positioning process and drying process which concern on the modification 1. FIG. The top view and sectional drawing explaining the liquid body arrangement | positioning process and drying process which concern on the modification 2. FIG. The top view and sectional drawing explaining the liquid body arrangement | positioning process and drying process which concern on the modification 3. FIG. The top view and sectional drawing explaining the liquid body arrangement | positioning process and drying process which concern on the modification 4. FIG. The top view and sectional drawing explaining the liquid body arrangement | positioning process and drying process which concern on the modification 5. FIG.

Explanation of symbols

  2, 3 ... Pixels, 4, 5 ... Pixel group, 6, 6a, 6b, 6c, 6d ... Liquid receiving region, 8 ... Organic EL element, 10 ... Substrate, 11, 12 ... Switching TFT, 13 ... Retention capacitance, DESCRIPTION OF SYMBOLS 14 ... Data line drive circuit, 15 ... Scanning line drive circuit, 16 ... Scanning line, 17 ... Signal line, 18 ... Power supply line, 20 ... TFT element part, 22 ... Circuit layer, 24 ... Pixel electrode, 26 ... Inorganic bank layer 26a ... opening, 27 ... organic bank layer, 27a ... opening, 28 ... bank part, 30 ... organic functional layer, 32 ... hole injection transport layer, 33 ... liquid, 34 ... light emitting layer, 36 ... common electrode 38 ... Sealing layer, 40, 40a, 40b, 40c, 40d ... Opposing member, 42 ... Bank part, 44, 44a, 44b, 44c, 44d ... Liquid, 70 ... Substrate, 72 ... Resin layer, 74 ... Bank 76 ... colored layer, 80 ... color filter, 82 ... Bakoto layer, 84 ... common electrode, 90 ... liquid crystal layer, 100 ... organic EL device, 200 ... liquid crystal device.

Claims (14)

A method of manufacturing an electro-optical device that forms a functional layer in each of a plurality of pixel regions arranged in a functional region on a substrate,
A first liquid discharge step of discharging a first liquid containing the constituent material of the functional layer and a first solvent into each of the plurality of pixel regions;
A second liquid material discharge step of discharging a second liquid material containing at least a second solvent to each of a plurality of liquid receiving regions arranged on at least one member;
The surface of the substrate on which the first liquid material is discharged and the surface of the at least one member on which the second liquid material is discharged are arranged around the functional region among the plurality of liquid receiving regions. And a drying step of drying the first liquid and the second liquid so as to face each other so as to be surrounded by at least a part of the liquid receiving region. Manufacturing method. A method of manufacturing the electro-optical device according to claim 1,
The method of manufacturing an electro-optical device, wherein in the drying step, the functional area is opposed to be surrounded by all the liquid receiving areas of the plurality of liquid receiving areas. A method for manufacturing the electro-optical device according to claim 1, wherein:
In the second liquid material discharge step, the plurality of liquid receiving regions are disposed on one member.
In the drying step, the substrate and the one piece of the member are opposed to each other. A method for manufacturing the electro-optical device according to claim 1, wherein:
In the second liquid material discharge step, the plurality of liquid receiving regions are separately arranged in each of the plurality of members,
In the drying step, the substrate and the plurality of members are opposed to each other, and the electro-optical device manufacturing method is characterized in that: The method for manufacturing an electro-optical device according to claim 1,
An electro-optical device manufacturing method, wherein an arrangement pitch of the plurality of liquid receiving regions is smaller than an arrangement pitch of the plurality of pixel regions. An electro-optical device manufacturing method according to claim 1,
An electro-optical device manufacturing method, wherein each of the plurality of liquid receiving regions has a larger area than each of the plurality of pixel regions. The method of manufacturing an electro-optical device according to claim 1,
The method of manufacturing an electro-optical device, wherein the plurality of liquid receiving regions are formed in a band shape. A method for manufacturing an electro-optical device according to any one of claims 1 to 7,
The amount of the second liquid material ejected per unit area of the plurality of liquid receiving regions is larger than the amount of the first liquid material ejected per unit area of the plurality of pixel regions. A method for manufacturing an electro-optical device. The method for manufacturing an electro-optical device according to claim 1,
The method of manufacturing an electro-optical device, wherein the boiling point of the second solvent is higher than the boiling point of the first solvent. A method for manufacturing an electro-optical device according to any one of claims 1 to 9,
The method of manufacturing an electro-optical device, wherein a vapor pressure of the second solvent is lower than a vapor pressure of the first solvent. The method for manufacturing an electro-optical device according to claim 1,
The second liquid includes a constituent material of the functional layer,
The method of manufacturing an electro-optical device, wherein the concentration of the constituent material of the functional layer contained in the second liquid is higher than the concentration of the constituent material of the functional layer contained in the first liquid. . The method for manufacturing an electro-optical device according to claim 1,
The method of manufacturing an electro-optical device, wherein the second liquid material includes the second solvent. The method of manufacturing an electro-optical device according to any one of claims 1 to 12,
The method of manufacturing an electro-optical device, wherein the first liquid includes at least a light emitting layer forming material among functional layers constituting an organic EL element as a constituent material of the functional layer. The method of manufacturing an electro-optical device according to any one of claims 1 to 12,
The method of manufacturing an electro-optical device, wherein the first liquid includes a color layer forming material of a color filter as a constituent material of the functional layer.

Images