JP2009250742A - Electrical connection device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To easily adjust the bending degree in each part of an overhanging region, in order to prevent an overhanging region from projecting downward from the height position of a needlepoint of a contact. <P>SOLUTION: An electrical connection device includes: a rigid board; a block which is elastically supported via a spring member so as to be displaceable in the thickness direction of the rigid board; the flexible board which is a flexible board arranged at a lower side of the rigid board and the block, and has a contact region opposed to the lower surface of the block and a plurality of overhanging regions, extending radially toward the rigid board, from an outer rim of the contact region over an outer rim of the block and being coupled with the rigid board; a plurality of contacts disposed on the lower surface of the contact region; and a guide disposed around the block. The guide includes a first piece, extending in the vertical direction and being attached to the block, and a second piece, extending outward from the lower end of the first piece and around the block and being plastically deformable to the first piece, wherein the second piece has a lower surface with which at least a side part of the contact region of the overhanging region is brought into abutment. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to an electrical connection apparatus suitable for use in an energization test of a flat object to be inspected such as an integrated circuit or another semiconductor device.

  As one of the conventional electrical connection devices of this type, for example, there are electrical connection devices described in Patent Documents 1 and 2. The electrical connection device includes a rigid board having a central opening, a block disposed in the central opening of the rigid board, and a block elastically supported by the rigid board via a spring member so as to be displaceable in the thickness direction of the rigid board. A rigid substrate and a flexible substrate disposed under the block.

  In the electrical connection device, at least the lower surface center portion of the block and the flexible substrate protrudes downward from the rigid substrate. The rigid board and the flexible board are a wiring board and a multilayer wiring board each having a wiring path connected to a tester and a conductive path corresponding to the wiring path.

  The flexible board is a contact area supported at the center of the lower face of the block, and an overhang area extending from the contact area beyond the outer edge of the block toward the rigid board, with a conductive path And an overhanging region coupled to the rigid substrate so as to be connected to the wiring path.

  The plurality of contacts are provided on the lower surface of the contact region and are connected to the conductive path. The object to be inspected is connected to a tester when the contact is pressed against the pad electrode of the object to be inspected, and is subjected to an electrical test.

  The contactor region is fixed to the center of the lower surface of the block or the entire lower surface on the upper surface thereof. On the other hand, the overhang region is bent obliquely upward toward the rigid substrate at the outer edge at the center of the lower surface of the block or at the outer edge of the lower surface of the block, and is fixed to the lower surface of the rigid substrate at the outer edge.

  The overhanging area is bent outwardly in the vicinity of the central edge with respect to the substantially horizontal contact area, and the outer edge is fixed to the rigid board from the bent part. It is bent so as to be convex upward obliquely between the parts.

  If the flexible substrate, in particular, the overhang region is bent outwardly at the outer edge of the lower surface of the block, a tension acts on the lower surface of the flexible substrate. The location where the tension acts extends to the contact region where the contact is provided corresponding to the arrangement pitch of the pad electrodes of the object to be inspected.

  For this reason, if the bending angle with respect to the contact area at the outer edge of the lower surface of the block is large, the tension acting on the lower surface of the contact area increases accordingly. As a result, an increase in the bending angle of the flexible substrate may cause partial elongation on the lower surface of the contact region.

  The above-described elongation of the lower surface of the contact region causes a shift between the arrangement pitch of the pad electrodes of the object to be inspected and the arrangement pitch of the needle tips of the contact. If the deviation between the two arrangement pitches is large, proper contact between each contact and the electrode pad corresponding to the contact is hindered, making accurate electrical measurement difficult.

  From the above, the present inventors provide a new technology for providing a flange portion for relaxing the bending angle of the flexible substrate along the edge portion of the block and bringing the upper surface of the overhanging region into contact with the outer edge of the flange portion. Developed.

  In the new technology described above, the overhang area of the flexible board does not reach the rigid board directly from the outer edge of the block, and by contacting the flange part between them, not only at the outer edge of the block but also at the outer edge of the flange part. Can also be bent.

  The bending angle of the overhang area at the edge of the block is as follows. The overhang area by the abutment position of the overhang area to the flange, that is, the height position of the lower surface of the block and the outer edge of the flange section The distance in the height direction to the bent portion and the lateral distance from the outer edge of the block to the bent portion perpendicular to the distance are reduced.

  For this reason, in the new technology, the height position of the flange portion with respect to the height position of the lower surface of the block is adjusted to reduce the bending angle of the flexible board at the outer edge of the block. Suppresses elongation of the lower surface of the region.

  The coordinate position of the needle tip must be adjusted with the rigid board, leaf spring, block, flexible board, contactor, etc. assembled in the electrical connection device. This is performed after confirming the coordinate position of the needle tip within the lower surface of the child region.

  However, it is extremely difficult to adjust the height position of the flange portion in a state assembled to the electrical connection device. For this reason, in the new technology, after disassembling the electrical connection device once assembled, the height position of the flange portion must be adjusted, and the adjustment can only be performed in stages. Such adjustment work is complicated.

  In addition, the bending angle as described above varies depending on the location of the overhang region in the circumferential direction of the flange portion because the amount of extension of the contact region caused by the bending differs depending on the location of the overhang region in the circumferential direction of the flange portion. It needs to be adjusted. However, in the above-described new technique, such adjustment cannot be performed step by step for each portion of the overhang region.

  In addition, when the overhanging area is bent outwardly at the outer edge of the block as in the above-described conventional technique or new technique, the contact point of the contact is pressed against the pad electrode of the object to be inspected. The part of the overhanging region bent outwardly may bulge downward, and the bulged part may protrude downward from the height position of the needle tip of the contact.

  If at least a part between the center portion and the outer edge portion of the overhanging region protrudes below the height position of the contact needle tip, the flexible substrate itself has elasticity, so that the overhanging region protrudes. The location comes into contact with the upper surface of the object to be inspected, and the contact area of the block and thus the flexible substrate is displaced upward against the elastic force of the spring member.

  As a result, the pressing force (that is, the needle pressure) of the contact to the pad electrode is reduced, and in an extreme case, the contact is separated from the pad electrode of the object to be inspected. When such a contact with a small needle pressure is present, the electrical test of the object to be inspected becomes inaccurate.

JP 2002-311049 A JP 2007-285801 A

  An object of the present invention is to make it possible to easily adjust the degree of curvature of each part of the overhang region so as to prevent the overhang region from projecting below the height position of the needle tip of the contact.

  An electrical connection device according to the present invention includes a rigid board, a block elastically supported by the rigid board via a spring member so as to be displaceable in the thickness direction of the rigid board, the rigid board, and a lower side of the block A flexible substrate disposed on the block, the contact region facing the lower surface of the block, and extending radially from the outer edge of the contact region over the outer edge of the block toward the rigid substrate and coupled to the rigid substrate A flexible substrate having a plurality of overhang regions, a plurality of contacts disposed on a lower surface of the contact region, and a guide positioned around the block.

  The guide is a first piece that extends in the vertical direction and is attached to the block, and a second piece that extends outward from the lower end of the first piece and extends around the block. And a second piece that can be plastically deformed with respect to the first piece. The second piece has a lower surface on which at least a part of the projecting area on the contact area side is in contact.

  At least a part of the second piece in the circumferential direction may extend obliquely upward from substantially the same height as the lower surface of the block.

  The first piece may be divided into a plurality of first side members that are positioned around the block and extend in the vertical direction. Instead of this, the first piece may have a cylindrical shape fitted to the block.

  The second piece may be divided into a plurality of side members positioned around the first piece and extending outward from the lower end of the first piece and extending around the block. Good.

  The block and the first piece may have a polygonal shape when viewed from above.

  The electrical connection device according to the present invention may further include a plurality of pins that penetrate the second piece of the guide in the vertical direction and engage with the flexible substrate at the lower end.

  The electrical connection device according to the present invention may further include an outward flange portion disposed above the guide and disposed on the block, and the pin extends downward from the flange portion. The flange portion may be supported in a state.

  The lower end surface of the pin can act as an alignment mark. The lower end surface of the pin may be retracted to the rigid substrate side with respect to the height position of the contact region.

  The rigid substrate may include a plurality of wiring paths, the flexible substrate may further include a conductive path corresponding to the wiring path and connected to a corresponding wiring path, and the contact may include the conductive path. Corresponding to the path, it can be electrically connected to the corresponding conductive path.

  The lower surface of the block may be substantially parallel to the rigid substrate and opposed to the contact region.

  The contactor area may have its upper surface in contact with the lower surface of the block.

  In the electrical connection device according to the present invention, the overhanging region does not reach the rigid board directly from the outer edge of the block, but contacts the lower surface of the second piece of the guide from the outer edge of the block to the rigid board. It reaches. As a result, the overhang region is bent at the outer edge of the lower surface of the second piece and further extends toward the rigid substrate.

  The bending angle of the overhang region in the vicinity of the outer edge of the block is to change the bending angle of the second piece with respect to the first piece by plastically deforming the second piece with respect to the first piece. Can be adjusted. Such plastic deformation can be performed for each portion of the second piece around the block.

  For this reason, according to this invention, it can adjust for every part around the curvature degree block of each part of an overhang | projection area | region. In such adjustment, since the second piece can be plastically deformed with respect to the first piece, in the state where the rigid board, the block, the flexible board, the contact and the like are assembled in the electrical connection device, This can be done by steplessly adjusting the bending angle of the second piece with respect to the one piece for each part of the second piece.

  As a result, since the degree of curvature of each part of the overhang area can be adjusted steplessly and easily for each part of the second piece around the block, the overhang area can be adjusted to the needle tip of the contactor. It is possible to easily adjust the distance between the overhang region and the object to be inspected by suppressing the protrusion from the lower position.

  When the second piece is divided into a plurality of side members that are positioned around the first piece and extend outward from the lower end of the first piece and extend around the block, Can be adjusted steplessly and easily for each side member.

  [Definition of terms]

  In the present invention, in FIG. 3, the vertical direction, the horizontal direction, and the paper back direction are referred to as the vertical direction, the horizontal direction, and the front-back direction, respectively. However, these directions differ depending on the posture of the substrate in a state in which the substrate on which a large number of contacts are arranged is attached to the tester.

  Therefore, in the electrical connection device according to the present invention, in the state where it is attached to the tester, the vertical direction in the present invention is actually the vertical direction, the upside down state, and the diagonal direction. It may be used in any state such as a state.

  [Example]

  The electrical connection device 10 is used in the same way as a probe card for an energization test of a rectangular integrated circuit (not shown). An integrated circuit as an object to be inspected has a plurality of electrodes.

  Referring to FIGS. 1 to 6, the electrical connection device 10 is coupled to a disc-shaped rigid substrate 12, a reinforcing member 14 coupled to the upper surface of the rigid substrate 12, and a lower side of the reinforcing member 14. Plate-shaped ring-shaped member 16, plate spring 18 disposed on the lower side of ring-shaped member 16, a base or block 20 mounted on the lower surface of plate spring 18, and a film disposed on the lower side of block 20 A flexible substrate 22, a plurality of contacts 24 provided in the central region of the lower surface of the flexible substrate 22, and a guide 26 disposed below the block 20.

  The rigid substrate 12 has a circular planar through hole 28 that penetrates the center of the rigid substrate 12 in the thickness direction (vertical direction), and a plurality of tester lands (not shown) connected to the tester are provided on the upper surface. The outer peripheral edge portion has a plurality of connection lands (not shown) on the lower surface of the region between the through hole 28 and the outer peripheral edge portion.

  Although not shown, the rigid board 12 has a plurality of wiring paths that connect the tester lands and the connection lands in a one-to-one manner. Such a rigid substrate 12 can be a multilayer wiring substrate manufactured from a glass-filled epoxy resin or a ceramic material.

  In the illustrated example, the reinforcing member 14 has a disk shape larger than the through hole 28, and the through hole is formed by a plurality of screw members 30 that pass through the reinforcing member 14 and are screwed to the rigid board 12. 28 is attached to the upper surface of the rigid substrate 12 in a state of closing, that is, parallel to the rigid substrate 12.

  The reinforcing member 14 is made of a metal material such as stainless steel so as to act as a reinforcing plate of the rigid substrate 12. The reinforcing member 14 does not have to be a complete disc shape, and like a leaf spring 18 described later, the reinforcing member 14 has a flat central portion and the virtual circle is spaced from the central portion in the circumferential direction of the virtual circle. It may have a plate-like shape by a plurality of extending portions extending in the radial direction and an outer peripheral portion connected to the distal ends of these extending portions and extending in the circumferential direction of the virtual circle.

  The ring-shaped member 16 is formed of a metal material such as stainless steel, particularly a metal material having a low coefficient of thermal expansion, and is formed in the shape of a plate-shaped ring having an outer diameter that is slightly smaller than the diameter of the through hole 28. Is positioned in the through hole 28 of the rigid substrate 12 so as to be vertically movable in a state of being positioned in the through hole 28 of the rigid substrate 12.

  The ring-shaped member 16 is parallel to both the rigid substrate 12 and the reinforcing member 14 by a plurality of mounting screws 32 that pass through the reinforcing member 14 in the thickness direction and are screwed to the ring-shaped member 16. The reinforcing member 14 is attached to the lower surface. In the illustrated example, the ring-shaped member 16 has a thickness dimension different from that of the rigid substrate 12, but may have substantially the same thickness dimension as the rigid substrate 12.

  The leaf spring 18 integrally extends around the rim region, a flat central region, a plurality of plate-like rim regions extending from the central region in the radial direction of the virtual circle at intervals in the circumferential direction. And a ring-shaped peripheral region.

  The central region and the rim region of the leaf spring 18 have a star shape or a cross shape. The number of rim regions may be an appropriate value such as 4, 6, 8, or the like. In the example shown in the figure, the number of rim areas is four. Therefore, the central area and the rim area have a cross shape that intersects the central area.

  The leaf spring 18 is made of a material selected from the group including tungsten, molybdenum, alloys thereof and ceramic materials that have a low coefficient of thermal expansion. The leaf spring 18 includes a ring-shaped spring retainer 34 and a plurality of screw members 36 that penetrate the leaf spring 18 and the spring retainer 34 from below and are screwed to the ring-shaped member 16. It is assembled to the lower surface of the member 16.

  As a result, the leaf spring 18 is in a stable state with the rigid substrate 12 via the reinforcing member 14 so as to close the through hole 28 of the rigid substrate 12 while being sandwiched between the ring-shaped member 16 and the spring retainer 34. Supported.

  In the illustrated example, the spring retainer 34 includes a plurality of arc-shaped retainer pieces 38 combined in a ring shape. However, the spring retainer 34 may be formed of an annular single member or may be formed of at least two retainer pieces 38.

  At least the reinforcing member 14, the ring-shaped member 16, and the spring retainer 34 function as an assembling device for assembling the leaf spring 18 to the rigid board 12.

  The block 20 includes a lower block portion 40 having a polygonal lower surface, that is, a polygonal (octagonal in the illustrated example) column or plate shape having a downward surface, and an upper surface attached to the leaf spring 18. An upper block portion 42 having a polygonal (rectangular in the illustrated example) column or plate shape, and a flange portion 44 extending radially outward from the boundary between the upper and lower block portions 40, 42, and having a circular or And an outward flange portion 44 having a planar shape of a polygon (preferably an octagon similar to the lower block portion 40).

  In the illustrated example, the upper and lower block portions 40 and 42 and the flange portion 44 are integrally formed. However, the flange portion 44 may be formed separately from the upper and lower block portions 40 and 42 and detachably attached to the upper and lower block portions 40 and 42 by a plurality of screw members.

  The block 20 is sandwiched by a plurality of screw members 48 in the upper block portion 42 so that the central region of the leaf spring 18 is sandwiched between the rectangular assembly plate 46 and the upper end surface (attached surface) of the upper block portion 42. It is assembled to the lower surface of the central region of the spring 18.

  The screw member 48 penetrates the assembly plate 46 and the leaf spring 18 from the upper side to the lower side and is screwed to the block 20 at the tip portion. Thereby, the block 20 is maintained to be releasable in a state where it is attached to and supported by the leaf spring 18.

  At least the downward surface of the lower block portion 40 includes a central region having a rectangular shape. The central region of the lower block portion 40 protrudes slightly below the region around the central region.

  The flexible substrate 22 is a flexible multilayer wiring substrate in which a plurality of strip-shaped wirings, that is, conductive paths are formed inside an electrically insulating sheet such as polyimide.

  The flexible substrate 22 has a plurality of contacts 24 arranged in the center and a plurality of contact regions 50 extending radially from the outer edge of the contact region 50 to the rigid substrate 12 beyond the outer edge of the block 20 (illustrated). In the example shown in FIG. 8, eight extended regions 52 are provided.

  The contact region 50 has a polygonal shape (an octagon in the illustrated example) having substantially the same size and shape as the downward surface of the lower block portion 40. The contactor region 50 has at least the center part 50a (see FIG. 2) by appropriate means such as an adhesive so that the polygonal side of the contactor region 50 is aligned with the polygonal side of the lower block part 40. Are fixed to the downward surface of the lower block 40.

  The overhang region 52 corresponds to the shape of the lower block portion 40 and the contact region 50 (polygonal) in a one-to-one shape, and radially outward from the contact region 50 through the corresponding side. It is growing.

  The overhang region 52 includes a plate-like rubber ring 54 having elasticity like silicone rubber, a plate-like presser ring 56 having a certain degree of rigidity like stainless steel, and a plurality of screw members at the outer edge, that is, the tip. 58 is attached to the lower surface of the rigid substrate 12.

  In the illustrated example, the inner peripheral surfaces of the rubber ring 54 and the pressing ring 56 are polygons similar to the shape of the lower block portion 40 of the block 20 as shown in FIG. The rubber ring 54 and the presser ring 56 are overlapped so that their polygonal sides are aligned with each other and the polygonal sides of the lower block 40 and the contact region 50, and the overhang region 52 is formed by the screw member 58. At the same time, it is assembled to the lower surface of the rigid substrate 12.

  The conductive path of the flexible substrate 22 extends radially outward from the inside of the central portion 50a of the contact region 50 and reaches the tip of the overhang region 52, and is also connected to the wiring path of the rigid substrate 12. Electrical connection is made at the tip of each conductive path.

  The central portion 50a of the flexible substrate 22 has substantially the same size and shape as the central region of the downward surface of the lower block portion 40, and is opposed to the central region of the downward surface of the lower block portion 40.

  A central portion 50a of the flexible substrate 22 is an area where the plurality of contacts 24 are actually arranged. The central portion 50a protrudes slightly below the peripheral portion 50b around the central portion 50a because the central region of the downward surface of the lower block portion 40 protrudes slightly below the surrounding region. .

  The positioning of the flexible substrate 22 with respect to the rigid substrate 12 extends downward from the rigid substrate 12 and passes through the overhang region 52, the rubber ring 54, and the holding ring 56 of the flexible substrate 22 from above to below. 2, 3 and 4). Each positioning pin 62 is stably supported by the rigid substrate 12.

  The flexible substrate 22 as described above can be manufactured using a resin material coating technique, a photolithography technique, a metal material deposition technique, and the like.

  Each contactor 24 includes a mounting portion extending in the vertical direction, an arm portion extending from the lower end portion of the mounting portion in at least one of the left and right directions, and a needle tip portion protruding downward from the tip portion of the arm portion. It has a shape.

  The contactor 24 is attached to the central part 50a of the contactor region 50 at the upper end part of the attachment part so that the lower end of the needle point part is pressed against the electrode of the object to be inspected. (See FIGS. 2 to 4). The contact 24 is electrically connected to the conductive path of the flexible substrate 22 at the upper end of the attachment portion.

  The contact 24 as described above can be manufactured simultaneously with or separately from the flexible substrate 22 using a photolithography technique, a metal material deposition technique, or the like. However, the contactor 24 may use a thin metal wire.

  When the contactor 24 is manufactured separately from the flexible substrate 22, the contactor 24 is fixed to an attachment land such as a probe land provided on the lower surface of the flexible substrate 22 with an appropriate material such as solder.

  The guide 26 has a first piece 64 attached to the block 20 in a vertically extended state, and a second piece that extends outward from the lower end of the first piece 64 and extends around the block 20. 66. The guide 26 has a substantially L-shaped cross-sectional shape due to the first and second pieces 66 and 66.

  In the illustrated example, the guide 26 is formed entirely of a plastically deformable material. However, the guide 26 may be configured such that at least the second piece 66 can be plastically deformed with respect to the first piece 64.

  The first piece 64 is divided into a plurality of (eight in the illustrated example) first side members that are positioned around the lower block 40 and extend in the vertical direction. In the illustrated example, the first side member corresponds to a polygonal side of the lower block 40 (an octagon in the illustrated example) in a one-to-one shape.

  However, the first piece 64 may be made of a single member in the shape of a polygonal cylinder. In other words, the first piece 64 has a polygonal cylindrical shape (in the example shown, an octagonal cylindrical shape) integrally formed by positioning the first side member around the lower block 40. You may have.

  The second piece 66 is located around the first piece 64 and extends outward from the lower end of the first piece 64 and extends around the block 20 (eight in the illustrated example). Are divided into second side members 66a, 66b... 66h (see FIG. 5).

  Each of the second side members 66a, 66b,... 66h corresponds to the polygonal side of the first piece 64, and in turn, one-to-one with the first side member of the first piece 64. And extending radially outward from the corresponding first side member and circumferentially along the corresponding first side member.

  The second piece 66 has a lower surface on which at least a portion of the protruding region 52 on the contactor region 50 side is in contact. The lower surface of the second piece 66 is located at substantially the same height as the lower surface of the block 20. The second piece 66 may also be made into a polygon with a single member.

  The first piece 64 is fitted to the lower end of the lower block 40 so that the first side member of the first piece 64 is aligned with the polygonal side of the lower block 40, In this state, it is supported by the block 20 by being maintained by screws, adhesive, solder, or the like.

  In the above state, the lower end surface of the pin 68 is slightly retracted to the rigid substrate 12 side (upward) from the height position of the contact region 50. In addition, at least one second side member of the second piece portion 66 extends obliquely upward from substantially the same height position as the lower surface of the block 20. As a result, at least a part of the second piece 66 in the circumferential direction extends obliquely upward from substantially the same height position as the lower surface of the block 20.

  The overhanging region 52 of the flexible substrate 22 corresponds to the second side members 62a, 62b,... 62h of the second piece 66 in a one-to-one manner, and passes through the lower surface of the corresponding second side member. It extends toward the rigid substrate 12.

  The flexible substrate 22 and the guide 26 are maintained in a predetermined positional relationship with respect to a plurality of pins 68 that pass through the flange portion 44 and the second piece 66 and are engaged with the contact region 50 of the flexible substrate 22. Yes.

  Each pin 68 is supported by the flange portion 44 and penetrates the overhang region 52. For this reason, you may use the lower end surface of each pin 68 as an alignment mark used when positioning the electrical connection apparatus 10 with respect to a tester.

  With reference to FIGS. 7A to 7C, a method for assembling the block 20, the guide 26, and the flexible substrate 22, and adjustment of the bending angle of the second piece with respect to the first piece will be described.

  First, the block 20, the guide 26, and the flexible substrate 22 described above are prepared. The pin 68 is attached to the flange portion 42 so that the pin 68 extends downward from the flange portion 44.

  Next, as illustrated in FIG. 7A, the guide 26 is attached to the block 20 in a state where the first piece 64 is fitted to the lower block 40 of the block 20. In this state, the lower end portion of the pin 68 passes through the second piece 66 of the guide 26 and slightly protrudes below the second piece 66.

  Next, as shown in FIG. 7B, the flexible substrate 22 in which the plurality of contacts 24 are arranged on the lower surface of the central portion 50a is arranged so that the upper surface of the contact region 50 faces both the lower block portion 40 and the second piece portion 66. The lower block portion 40 and the second piece portion 66 are mounted in a state of being in contact with the lower surface. At this time, the upper surface of at least the central portion 50a of the contact region 50 may be bonded to the lower surfaces of the lower block portion 40 and the second piece portion 66.

  In the state shown in FIG. 7B, the lower end portion of the pin 68 is received at a position on the contact region 50 side of the overhang region 52, and the lower end is exposed below the overhang region 52.

  Next, as shown in FIG. 7C, the second side member of the second piece 66 of the guide 26 is partially plastically deformed with respect to the first piece 64, and the first piece 64. The bending angle of each part in the circumferential direction of the second piece 66 is changed. Such adjustment work is performed steplessly by the operator.

  As a result of the above adjustment, the bending angle of each overhang region 52 in the vicinity of the lower edge of the lower block portion 40 is adjusted for each second side portion of the second piece 66 around the block 20, and the lower end of the pin 68. The lower part of the part protrudes slightly below the peripheral part 50b. Each overhang region 52 after adjustment may extend linearly from the vicinity of the outer edge of the lower end of the lower block portion 40, or may extend in a curved manner in an arc.

  The assembly as described above is assembled to the electrical connection device 10 already described. At this time, each overhang region 52 extends obliquely upward toward the rigid substrate 12 with its upper surface in contact with the lower surface of the corresponding second side portion of the second piece 66. It is stretched and is tense.

  Thereby, each overhang | projection area | region 52 does not reach the rigid board | substrate 12 directly from the lower end outer edge part of the block 20, but touches the lower surface of the 2nd piece part 66 of the guide 26 from the lower end outer edge part of the block 20. It extends outward, is bent at the outer edge of the lower surface of the second piece 66, and further extends toward the rigid substrate 12 from there.

  The adjustment of the bending angle of each overhang region 52 as described above can be performed steplessly for each overhang region 52 even when assembled in the electrical connecting device 10. As a result, the protruding region 50 can be prevented from projecting downward from the height position of the needle tip of the contactor 24, and the distance between the protruding region 50 and the object to be inspected can be easily adjusted.

  The present invention is not limited to the above embodiments, and various modifications can be made without departing from the spirit of the present invention.

It is a disassembled perspective view which shows one Example of the electrical connection apparatus which concerns on this invention. It is a bottom view of the electrical connection apparatus shown in FIG. It is a longitudinal cross-sectional view of the electrical connection apparatus shown in FIG. FIG. 2 is an enlarged longitudinal sectional view in the vicinity of a block in the electrical connection device shown in FIG. 1. It is a perspective view which shows one Example of the assembly of the block and guide used with the electrical connection apparatus shown in FIG. FIG. 6 is a perspective view showing a state in which a flexible substrate is mounted on the block and guide assembly shown in FIG. 5. It is a figure for demonstrating the assembly method of a block, a guide, and a flexible substrate, (A) is sectional drawing which shows the state which assembled | attached the guide to the block, (B) is a flexible substrate on the lower surface of a block and a guide. It is sectional drawing which shows the state arrange | positioned, (C) is sectional drawing which shows the state which strained the overhang | projection area | region.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Electrical connection apparatus 12 Rigid wiring board 14 Reinforcement member 16 Ring-shaped member 18 Leaf spring 20 Block 22 Flexible board 24 Contactor 26 Guide 28 Rigid wiring board through-hole 38 Presser piece 40 Block part 44 on lower block part 44 Flange part 46 Assembly plate 50 Contactor area 50a Contactor area center part 50b Contactor area peripheral part 52 Overhang area 54 Rubber ring 56 Presser ring 64, 66 First and second piece parts 64a to 64h Second Side member 68 pins

Claims (13)

A rigid substrate, a block elastically supported by the rigid substrate via a spring member so as to be displaceable in the thickness direction of the rigid substrate, the rigid substrate and a flexible substrate disposed below the block, Flexible comprising a contact region facing the lower surface of the block and a plurality of overhang regions extending radially from the outer edge of the contact region to the rigid substrate over the outer edge of the block and coupled to the rigid substrate A substrate, a plurality of contacts disposed on a lower surface of the contact region, and a guide positioned around the block;
The guide is a first piece that extends in the vertical direction and is attached to the block, and a second piece that extends outward from the lower end of the first piece and extends around the block. A second piece that is plastically deformable with respect to the first piece,
The electrical connection device, wherein the second piece has a lower surface on which at least a portion of the projecting region on the contact region side is in contact.   2. The electrical connection device according to claim 1, wherein at least a part of the second piece in the circumferential direction extends obliquely upward from a height position substantially the same as the lower surface of the block.   3. The electrical connection device according to claim 1, wherein the first piece is divided into a plurality of first side members that are positioned around the block and extend in a vertical direction. 4. .   3. The electrical connection device according to claim 1, wherein the first piece has a cylindrical shape fitted to the block. 4.   The second piece is divided into a plurality of second side members positioned around the first piece and extending outward from the lower end of the first piece and extending around the block. The electrical connection device according to any one of claims 1 to 4.   The electrical connection device according to any one of claims 1 to 5, wherein the block and the first piece have a polygonal shape when viewed from above.   The electrical connection according to any one of claims 1 to 6, further comprising a plurality of pins penetrating the second piece of the guide in the vertical direction and engaged with the flexible substrate at a lower end portion. apparatus.   Furthermore, the said pin part is supported by the said flange part in the state extended below from the said flange part, including the outward flange part arrange | positioned above the said guide and arrange | positioned at the said block. The electrical connection device described.   The electrical connection device according to claim 7, wherein a lower end surface of the pin acts as an alignment mark.   10. The electrical connection device according to claim 7, wherein a lower end surface of the pin is retracted toward the rigid board with respect to a height position of the contact region.   The rigid board includes a plurality of wiring paths, the flexible board further includes a conductive path connected to the corresponding wiring path corresponding to the wiring path, and the contact corresponds to the conductive path. The electrical connection device according to claim 1, wherein the electrical connection device is electrically connected to a conductive path.   12. The electrical connection device according to claim 1, wherein the lower surface of the block is substantially parallel to the rigid substrate and faces the contact region.   The electrical connection device according to claim 12, wherein the contact region has an upper surface in contact with a lower surface of the block.

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