JP2009248120A - Method and apparatus of measuring laser beam output - Google Patents

Method and apparatus of measuring laser beam output Download PDF

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JP2009248120A
JP2009248120A JP2008098123A JP2008098123A JP2009248120A JP 2009248120 A JP2009248120 A JP 2009248120A JP 2008098123 A JP2008098123 A JP 2008098123A JP 2008098123 A JP2008098123 A JP 2008098123A JP 2009248120 A JP2009248120 A JP 2009248120A
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laser beam
output
measuring
jet
laser light
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JP5072691B2 (en
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Masami Suzuki
正美 鈴木
Koji Okabe
浩司 岡部
Masaki Inoue
雅輝 井上
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Kataoka Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To directly measure a laser beam output, in a laser beam machine that performs machining by irradiating a workpiece with a laser beam which is guided into a jet stream of a liquid. <P>SOLUTION: A shielding material 1 that shields a jet stream 4 while transmitting a laser beam 5 is provided with a measuring means 2 arranged in the back. Measurement is done by emitting the laser beam 5 to the measuring means 2 through the shielding material 1. As a result, problems of a laser beam output can be picked up in advance, such as fluctuation of transmissivity of a laser beam 6 incidental to deterioration of a projection nozzle 33, for example. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、液体の噴流中に導光させたレーザ光を被加工物に照射して加工を行うレーザ加工機における、レーザ光出力の計測に関する。   The present invention relates to measurement of laser light output in a laser processing machine that performs processing by irradiating a workpiece with laser light guided in a liquid jet.

液体、特に水の微細径なジェット噴流中にレーザ光を入射し、噴流にレーザ光を案内させつつ噴流もろとも被加工物に照射する水ガイド式レーザ加工機が既知である（例えば、下記特許文献を参照）。この種の加工機では、噴流がちょうど光ファイバの役割を果たしてレーザ光の拡散を妨げることから、高精密な加工が可能となり、また照射ノズルと被加工物との距離を大きくとることができる。加えて、噴流の高圧で加工塵が洗浄除去される、噴流の冷熱で被加工物が冷却されてクラック、歪み、組成変化等の熱影響が抑制されるといった副効用もある。
特表２００７−５３７８８１号公報 2. Description of the Related Art A water guide type laser processing machine is known in which laser light is incident in a jet jet of liquid, particularly water, and the workpiece is irradiated with the laser light while guiding the laser light into the jet (for example, the following patents) See literature). In this type of processing machine, since the jet just acts as an optical fiber and prevents the diffusion of laser light, high-precision processing is possible, and the distance between the irradiation nozzle and the workpiece can be increased. In addition, there is a secondary effect that the processing dust is cleaned and removed by the high pressure of the jet, and the work is cooled by the cold heat of the jet, so that the thermal influence such as cracks, distortion and composition change is suppressed.
Special Table 2007-537881

上述のレーザ加工機では、レーザ光が液体の噴流中をこれに沿って導かれるために、その出力を直接計測することがこれまでできなかった。それ故に、レーザビームの強度、安定性、出力分布等を観察しておらず、例えば噴流射出用ノズルが劣化してレーザビームの透過率が変化したとしてもその変化を加工作業前に察することが困難であった。   In the laser processing machine described above, since the laser beam is guided along the liquid jet, it has not been possible to measure the output directly. Therefore, we have not observed the intensity, stability, output distribution, etc. of the laser beam. For example, even if the nozzle for jet injection deteriorates and the transmittance of the laser beam changes, the change can be observed before processing. It was difficult.

本発明は、上記の問題に初めて着目してなされたものであって、液体の噴流中に導光させたレーザ光の出力を好適に計測することを所期の目的とする。   The present invention has been made by paying attention to the above-mentioned problem for the first time, and an object of the present invention is to suitably measure the output of laser light guided into a liquid jet.

本発明では、液体の噴流中に導光させたレーザ光を被加工物に照射して加工を行うレーザ加工機において、前記噴流を遮蔽しかつ前記レーザ光を透過し得る遮蔽材を設けてその後背に計測手段を配し、前記レーザ光を前記遮蔽材越しに前記計測手段に入射させてレーザ光出力を計測するようにした。遮蔽材は、例えばガラス板等の透明な板とし、この板によって一旦噴流を遮り、遮られた噴流の断面から板越しにレーザ光を直接計測、観察する。   According to the present invention, in a laser processing machine that performs processing by irradiating a workpiece with laser light guided in a liquid jet, a shielding material that shields the jet and transmits the laser light is provided, and thereafter A measuring means is arranged on the back, and the laser light is incident on the measuring means through the shielding material to measure the laser light output. The shielding material is, for example, a transparent plate such as a glass plate, and the jet is temporarily blocked by this plate, and the laser beam is directly measured and observed through the cross section of the blocked jet.

前記計測手段は、前記噴流中のレーザ光の出力分布を計測可能なＣＣＤセンサ、フォトダイオードセンサ、感熱式パワーセンサ等を有するものであることが望ましい。   The measuring means preferably has a CCD sensor, a photodiode sensor, a thermal power sensor or the like that can measure the output distribution of the laser light in the jet.

本発明によれば、液体の噴流中に導光させたレーザ光の出力を直接計測でき、レーザ光出力の問題点を事前に察知することが可能となる。   According to the present invention, it is possible to directly measure the output of the laser light guided into the liquid jet, and it is possible to detect in advance the problem of the laser light output.

以下、本発明の実施の形態を、図面を参照して説明する。図１に、本実施形態における出力計測装置の構成を示す。この出力計測装置は、液体の噴流４を遮蔽する遮蔽材１と、遮蔽材１の後背にあって遮蔽材１越しにレーザ光５を計測する計測手段２とを具備する。   Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 shows the configuration of the output measuring apparatus according to this embodiment. The output measuring device includes a shielding member 1 that shields the liquid jet 4 and a measuring unit 2 that is behind the shielding member 1 and measures the laser beam 5 through the shielding member 1.

水ガイド式レーザ加工機では、水の微細径な噴流４にレーザ光５を案内させながら被加工物に照射する。具体的には、レーザ加工機の加工ヘッド３に、高圧水の供給を受けてジェット噴流４を生成する水チャンバ３１を設けており、集光レンズ３４及びチャンバ３１のウィンドウ３２を介してレーザ光をチャンバ３１内に入射し、ウィンドウ３２の反対側のノズル３３から高圧水４及びレーザ光５を射出する。   In the water guide type laser processing machine, the workpiece is irradiated while the laser beam 5 is guided by the fine water jet 4. Specifically, the processing head 3 of the laser processing machine is provided with a water chamber 31 that receives the supply of high-pressure water to generate the jet jet 4, and laser light is transmitted through the condenser lens 34 and the window 32 of the chamber 31. Is injected into the chamber 31, and the high-pressure water 4 and the laser beam 5 are emitted from the nozzle 33 on the opposite side of the window 32.

遮蔽材１は、例えばガラス、アクリル等を基材とした透明薄板またはレンズであり、レーザ光５の光軸に対して略垂直に固定する。   The shielding material 1 is a transparent thin plate or lens using, for example, glass, acrylic or the like as a base material, and is fixed substantially perpendicular to the optical axis of the laser light 5.

計測手段２は、ＣＣＤセンサ、フォトダイオードセンサ、感熱式パワーセンサ等２１を有したもので、遮蔽材１の背面側に配置する。センサ２１と遮蔽材１との間には、レーザ光５のビーム径を拡げるビームエキスパンダ２２が介在することがある。レーザ光５は、遮蔽材１越しに計測手段２に入射する。計測手段２は、分析用のコンピュータに接続しており、遮蔽材１の表面近傍におけるレーザ光５の出力ないし出力分布に応じたデータ信号をコンピュータに入力する。   The measuring means 2 includes a CCD sensor, a photodiode sensor, a thermal power sensor 21 and the like, and is arranged on the back side of the shielding material 1. A beam expander 22 that expands the beam diameter of the laser light 5 may be interposed between the sensor 21 and the shielding material 1. The laser beam 5 enters the measuring means 2 through the shielding material 1. The measuring means 2 is connected to a computer for analysis and inputs a data signal corresponding to the output or output distribution of the laser beam 5 in the vicinity of the surface of the shielding material 1 to the computer.

データ信号を受け取ったコンピュータは、ソフトウェアプログラムに従い、ハードディスクドライブ等の記憶デバイスにレーザ光出力データを蓄積する。また、レーザ光出力データから、ビームプロファイル（ビームのピーク、中心位置、ビーム径／幅、ビーム真円率、ガウスフィット、アパーチャフィット、ビーム均一度等）、波長、パワースペクトル、パルス幅、繰り返し周波数等を演算して、その結果を記憶デバイスに蓄積する。並びに、レーザ光出力分布及びビームプロファイル、波長、パワースペクトルやパルス幅等の各種情報を、ディスプレイに画面表示したりプリントアウトしたりする。   The computer that has received the data signal accumulates the laser beam output data in a storage device such as a hard disk drive in accordance with the software program. Also, from the laser output data, the beam profile (beam peak, center position, beam diameter / width, beam roundness, Gaussian fit, aperture fit, beam uniformity, etc.), wavelength, power spectrum, pulse width, repetition frequency Etc. and the result is stored in the storage device. In addition, various information such as the laser light output distribution and beam profile, wavelength, power spectrum, and pulse width are displayed on the screen or printed out.

尤も、計測手段２、コンピュータ及びプログラムは、既製のものを採用してよい。   However, the measuring means 2, the computer, and the program may adopt ready-made ones.

本実施形態によれば、液体の噴流４を遮蔽しかつレーザ光５を透過し得る遮蔽材１を設けてその後背に計測手段２を配し、遮蔽材１によって噴流４を遮り、遮られた噴流４の断面から遮蔽材１越しにレーザ光５を計測するようにしたため、噴流４の存在にかかわらずレーザ光出力を直接計測し観察することができる。そして、これにより、例えばノズル３３の劣化に伴うレーザビーム６の透過率の変動等の、レーザ光出力の問題点を事前に察知することが可能となる。   According to the present embodiment, the shielding member 1 capable of shielding the liquid jet 4 and transmitting the laser beam 5 is provided, and the measuring means 2 is arranged on the back of the shielding member 1. Since the laser beam 5 is measured from the cross section of the jet 4 through the shielding material 1, the laser beam output can be directly measured and observed regardless of the presence of the jet 4. This makes it possible to detect in advance problems of laser light output, such as fluctuations in the transmittance of the laser beam 6 due to deterioration of the nozzle 33, for example.

なお、本発明は以上に詳述した実施形態に限られるものではない。各部の具体的構成は、本発明の趣旨を逸脱しない範囲で種々変形が可能である。   The present invention is not limited to the embodiment described in detail above. The specific configuration of each part can be variously modified without departing from the spirit of the present invention.

本発明の一実施形態の出力計測装置を模式的に示す図。The figure which shows typically the output measuring device of one Embodiment of this invention.

符号の説明Explanation of symbols

１…遮蔽材
２…計測装置
２１…ＣＣＤセンサ、フォトダイオードセンサ、感熱式パワーセンサ等
４…液体の噴流
５…レーザ光 DESCRIPTION OF SYMBOLS 1 ... Shielding material 2 ... Measuring device 21 ... CCD sensor, photodiode sensor, thermal power sensor, etc. 4 ... Liquid jet 5 ... Laser beam

Claims (4)

液体の噴流中に導光させたレーザ光を被加工物に照射して加工を行うレーザ加工機におけるレーザ光出力の計測方法であって、
前記噴流を遮蔽しかつ前記レーザ光を透過し得る遮蔽材を設けてその後背に計測手段を配し、
前記レーザ光を前記遮蔽材越しに前記計測手段に入射させて計測することを特徴とする出力計測方法。 A method for measuring laser light output in a laser processing machine that performs processing by irradiating a workpiece with laser light guided in a liquid jet,
Provide a shielding means that shields the jet and transmits the laser light, and arranges a measuring means behind the back,
An output measuring method, wherein the laser light is incident on the measuring means through the shielding material and measured. 前記計測手段は、前記噴流中のレーザ光の出力分布を計測可能なＣＣＤセンサ、フォトダイオードセンサまたは感熱式パワーセンサ等を有するものである請求項１記載の出力計測方法。 2. The output measuring method according to claim 1, wherein the measuring means includes a CCD sensor, a photodiode sensor, a thermal power sensor, or the like capable of measuring an output distribution of the laser light in the jet. 請求項１または２記載の出力計測方法を実施するために使用するものであって、
前記噴流を遮蔽しかつ前記レーザ光を透過し得る遮蔽材と、
前記遮蔽材の後背に配され、前記レーザ光を前記遮蔽材越しに前記計測手段に入射させてこれを計測する計測手段と
を具備する出力計測装置。 It is used for carrying out the output measuring method according to claim 1 or 2,
A shielding material capable of shielding the jet and transmitting the laser beam;
An output measuring device, comprising: a measuring unit that is arranged behind the shielding member and measures the laser beam incident on the measuring unit through the shielding member. 前記計測手段は、前記噴流中のレーザ光の出力分布を計測可能なＣＣＤセンサ、フォトダイオードセンサまたは感熱式パワーセンサ等を有するものである請求項３記載の出力計測装置。 4. The output measuring apparatus according to claim 3, wherein the measuring means includes a CCD sensor, a photodiode sensor, a thermal power sensor, or the like that can measure the output distribution of the laser light in the jet.
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Cited By (4)

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US20160108213A1 (en) * 2013-05-31 2016-04-21 Sumitomo Rubber Industries, Ltd. Pneumatic tire and rubber masterbatch
JP6194464B1 (en) * 2016-08-10 2017-09-13 株式会社牧野フライス製作所 Method for determining nozzle life of laser processing machine and laser processing machine
JP2019124989A (en) * 2018-01-12 2019-07-25 株式会社ディスコ Managing method of processing apparatus and processing apparatus
CN110744212A (en) * 2019-09-30 2020-02-04 武汉大学 Device for conducting laser drilling on FPC (flexible printed circuit)

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JP6688979B2 (en) * 2015-03-31 2020-04-28 株式会社東京精密 Laser processing apparatus and laser processing method

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JP2007098418A (en) * 2005-09-30 2007-04-19 Shibuya Kogyo Co Ltd Hybrid laser machining method and apparatus
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Publication number Priority date Publication date Assignee Title
US20160108213A1 (en) * 2013-05-31 2016-04-21 Sumitomo Rubber Industries, Ltd. Pneumatic tire and rubber masterbatch
JP6194464B1 (en) * 2016-08-10 2017-09-13 株式会社牧野フライス製作所 Method for determining nozzle life of laser processing machine and laser processing machine
JP2018024003A (en) * 2016-08-10 2018-02-15 株式会社牧野フライス製作所 Nozzle life determination method for laser beam machine, and laser beam machine
JP2019124989A (en) * 2018-01-12 2019-07-25 株式会社ディスコ Managing method of processing apparatus and processing apparatus
JP7064887B2 (en) 2018-01-12 2022-05-11 株式会社ディスコ Processing equipment management method and processing equipment
CN110744212A (en) * 2019-09-30 2020-02-04 武汉大学 Device for conducting laser drilling on FPC (flexible printed circuit)
CN110744212B (en) * 2019-09-30 2021-01-01 武汉大学 Device for conducting laser drilling on FPC (flexible printed circuit)

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