JP2009238844A - Light-emitting device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a novel light-emitting device of high output which can reduce the speckle noise. <P>SOLUTION: A light-emitting device 100 comprises first and second clad layers and an active layer 108. At least a part of the active layer constitutes a plurality of gain regions 180 and 182; the plurality of gain regions are respectively provided in the direction inclined from the perpendicular line of a first side surface, extending from a first side surface 107 of the active layer to a second side surface 109 of the active layer, parallel to the first side surface in top view; the plurality of gain regions forms at least one pair 183 of gain regions; one first gain region 180 in the pair of gain regions is provided in one direction, while the other second gain region 182 of the pair of gain regions is provided in the other direction different from that direction; and the first gain region and the second gain region cross each other between the first side surface and the second side surface. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a light emitting device.

As a light emitting device for a light source of a display device such as a projector, a high-pressure mercury lamp is used. Recently, a laser device capable of reducing power consumption and downsizing is expected. However, in the case of using a laser device, speckle noise generated due to interference of irregularly reflected light on the screen surface may be a problem. For example, Japanese Patent Application Laid-Open Publication No. 2004-228620 proposes a method for reducing speckle noise by changing the speckle pattern by swinging the screen.
Japanese Patent Laid-Open No. 11-64789

  However, in the method disclosed in Patent Document 1, the screen is limited, a member such as a motor for moving the screen is required, and noise is generated from the motor or the like. Problems may occur.

  In order to reduce speckle noise, it is also conceivable to use a general LED (Light Emitting Diode) as a light emitting device for a light source. However, there are cases where a sufficient light output cannot be obtained with an LED.

  An object of the present invention is to provide a novel light emitting device that can reduce speckle noise and has high output.

The light emitting device according to the present invention is
A first cladding layer;
An active layer formed above the first cladding layer;
A second cladding layer formed above the active layer;
Including
At least a part of the active layer constitutes a plurality of gain regions,
Each of the plurality of gain regions is inclined with respect to the normal of the first side surface from the first side surface of the active layer to the second side surface of the active layer parallel to the first side surface in a plan view. Provided in the direction,
The plurality of gain regions form at least one pair of gain regions;
One first gain region of the pair of gain regions is provided toward one direction;
The other second gain region of the pair of gain regions is provided in another direction different from the one direction;
The first gain region and the second gain region intersect between the first side surface and the second side surface.

  In the light emitting device according to the present invention, as will be described later, laser oscillation of light generated in the gain region can be suppressed or prevented. Therefore, speckle noise can be reduced. Furthermore, in the light emitting device according to the present invention, the light generated in the gain region can travel while receiving a gain in the gain region and be emitted to the outside. Therefore, it is possible to obtain a higher output than conventional general LEDs. As described above, according to the present invention, it is possible to provide a novel light-emitting device that can reduce speckle noise and has high output.

  In the description of the present invention, the word “upper” is referred to as, for example, another specific member (hereinafter referred to as “B member”) formed “above” a “specific member (hereinafter referred to as“ A member ”). ) "Etc. In the description according to the present invention, in such a case, the B member is formed directly on the A member, and the B member is formed on the A member via another. The word “above” is used as a case where the case is included.

In the light emitting device according to the present invention,
In each of the plurality of gain regions, the end surface on the first side surface side and the end surface on the second side surface side may not overlap each other when viewed in plan from the first side surface side.

In the light emitting device according to the present invention,
In plan view, an inclination angle θ of each outer edge of the plurality of gain regions with respect to a perpendicular at an end point outside the end surface on the first side surface side, an end surface on the first side surface side of each of the plurality of gain regions And the distance L between the first side surface and the second side surface can satisfy the following formula (1).

tan θ> b / L (1)
In the light emitting device according to the present invention,
A first electrode electrically connected to the first cladding layer;
A second electrode electrically connected to the second cladding layer;
Can be included.

  In the description according to the present invention, the phrase “electrically connected” is used as, for example, another specific member (hereinafter “electrically connected” to “specific member (hereinafter referred to as“ C member ”)”. It is used as "D member"). In the description according to the present invention, in the case of this example, the case where the C member and the D member are directly connected and electrically connected, and the C member and the D member are the other members. The term “electrically connected” is used as a case where the case where the terminals are electrically connected to each other is included.

In the light emitting device according to the present invention,
The first electrode is in contact with the first layer in ohmic contact;
The second electrode is in contact with the second layer in ohmic contact;
At least one of the contact surface between the first electrode and the first layer and the contact surface between the second electrode and the second layer may have the same planar shape as the plurality of gain regions. .

In the light emitting device according to the present invention,
At least one of the contact surface side portion of the first layer and the contact surface side portion of the second layer constitutes at least a part of a columnar portion;
The columnar portion has the same planar shape as the plurality of gain regions,
An insulating part is provided on the side of the columnar part,
The insulating portion may be in contact with the side surface of the columnar portion between the first side surface and the second side surface as viewed in a plan view.

In the light emitting device according to the present invention,
The plurality of gain regions have at least one of a third gain region and a fourth gain region;
At least a part of the end surface of the third gain region on the first side surface side overlaps at least a part of the end surface of the first gain region on the first side surface side,
At least a part of the first side surface end surface of the fourth gain region may overlap at least a part of the first side surface end surface of the second gain region.

In the light emitting device according to the present invention,
The planar shape of the first gain region and the planar shape of the third gain region are axisymmetric with respect to the perpendicular line in the end face on the first side surface side of the first gain region or the third gain region. Yes,
The planar shape of the second gain region and the planar shape of the fourth gain region are axisymmetric with respect to the perpendicular line in the end face on the first side surface side of the second gain region or the fourth gain region. Can be.

In the light emitting device according to the present invention,
A plurality of gain region pairs may be arranged.

In the light emitting device according to the present invention,
Of the pair of adjacent gain regions, at least a part of the first side surface of the first gain region of one pair of gain regions and the second of the other pair of gain regions. The gain region may overlap with at least a part of the end surface on the first side surface side.

In the light emitting device according to the present invention,
The planar shape of the first gain region of the one pair of gain regions and the planar shape of the second gain region of the other pair of gain regions are the first gain region or the second gain region. It is axisymmetric with respect to the perpendicular in the said end surface of the said 1st side surface side.

In the light emitting device according to the present invention,
In the wavelength band of light generated in the plurality of gain regions, the reflectance of the first side surface can be higher than the reflectance of the second side surface.

In the light emitting device according to the present invention,
At least two of the end surfaces on the second side surface of the plurality of gain regions may not overlap each other.

  Preferred embodiments of the present invention will be described below with reference to the drawings.

1. 1. First embodiment 1.1. First, the light emitting device 100 according to the first embodiment will be described.

  1 is a perspective view schematically showing the light emitting device 100, FIG. 2 is a plan view schematically showing the light emitting device 100, and FIG. 3 is a sectional view taken along line III-III in FIG. In FIG. 1, members other than the active layer 108 are not shown for convenience. Here, a case where the light emitting device 100 is an InGaAlP-based (red) semiconductor light emitting device will be described.

  As illustrated in FIGS. 1 to 3, the light emitting device 100 includes a first cladding layer 106, an active layer 108, a second cladding layer 110, a first electrode 120, and a second electrode 122. The light emitting device 100 can further include, for example, a substrate 102, a buffer layer 104, and a contact layer 112.

  As the substrate 102, for example, a first conductivity type (for example, n-type) GaAs substrate or the like can be used.

  The buffer layer 104 can be formed on the substrate 102 as shown in FIG. 3, for example. The buffer layer 104 can improve the crystallinity of a layer formed thereabove, for example. As the buffer layer 104, for example, a first conductivity type (n-type) GaAs layer, InGaP layer, or the like having better crystallinity (for example, lower defect density) than the substrate 102 can be used.

  The first cladding layer 106 is formed on the buffer layer 104. The first cladding layer 106 is made of, for example, a first conductivity type semiconductor. As the first cladding layer 106, for example, an n-type AlGaP layer can be used.

  The active layer 108 is formed on the first cladding layer 106. The active layer 108 has, for example, a multiple quantum well (MQW) structure in which three quantum well structures each composed of an InGaP well layer and an InGaAlP barrier layer are stacked.

  A part of the active layer 108 constitutes a plurality of gain regions. Each of the plurality of gain regions forms a pair. For example, in the illustrated example, the active layer 108 has two gain regions (a first gain region 180 and a second gain region 182), and these constitute a gain region pair 183.

  The gain regions 180 and 182 can generate light, and this light can receive gain within the gain regions 180 and 182. The shape of the active layer 108 is, for example, a rectangular parallelepiped (including a cube). As shown in FIGS. 1 and 2, the active layer 108 has a first side surface 107 and a second side surface 109. The first side surface 107 and the second side surface 109 are parallel.

  Each of the gain regions 180 and 182 is provided from the first side surface 107 to the second side surface 109 in a direction inclined with respect to the normal line P of the first side surface 107 when viewed in plan (see FIG. 2). Yes. Thereby, the laser oscillation of the light generated in the gain regions 180 and 182 can be suppressed or prevented. The first gain region 180 and the second gain region 182 are provided in different directions. In the illustrated example, the first gain region 180 is inclined toward one side with respect to the perpendicular P, and is provided toward one direction A (hereinafter also referred to as “first direction”) A having an inclination of an angle θ. ing. In addition, the second gain region 182 is inclined to the other side (opposite side of the one side) with respect to the perpendicular P, and has another direction having an inclination of the angle θ (hereinafter also referred to as “second direction”). It is provided toward B. Note that the case where the first gain region 180 is provided in one direction refers to the first end surface 170 on the first side surface 107 side of the first gain region 180 when the one direction is viewed in a plan view. And the direction connecting the center of the second end surface 172 on the second side surface 109 side. The same applies to the other gain regions. Further, for example, the first gain region 180 and the second gain region 182 may be inclined to the same side with respect to the perpendicular P.

  As shown in FIGS. 1 and 2, the first gain region 180 and the second gain region 182 intersect between the first side surface 107 and the second side surface 109. The first gain region 180 and the second gain region 182 intersect at the center between the first side surface 107 and the second side surface 109, for example, as illustrated. In the illustrated example, the center of the first gain region 180 and the center of the second gain region 182 intersect. The planar shape of the intersecting region 160 is, for example, a rhombus or a parallelogram.

  FIG. 4 is a plan view of the active layer 108 in the example of FIGS. 1 to 3 as seen from the first side face 107 side. As shown in FIG. 4, in each of the first gain region 180 and the second gain region 182, the end surfaces 170 and 174 on the first side surface 107 side and the end surfaces 172 and 176 on the second side surface 109 side do not overlap. . As a result, light generated in the gain regions 180 and 182 can be prevented from being directly subjected to multiple reflection between the end surfaces 170 and 174 on the first side surface 107 side and the end surfaces 172 and 176 on the second side surface 109 side. As a result, since a direct resonator cannot be configured, laser oscillation of light generated in the gain regions 180 and 182 can be more reliably suppressed or prevented. Therefore, the light emitting device 100 can emit light that is not laser light. In this case, as shown in FIG. 4, for example, in the first gain region 180, the shift width x between the first end surface 170 and the second end surface 172 may be a positive value. Since the deviation width x is expressed by the following formula (a), the tilt angle θ, the width b, and the distance L shown in FIG. 2 can satisfy the following formula (1). The same applies to the other gain regions.

x = Ltan θ−b (a)
tan θ> b / L (1)
In addition, the inclination angle θ is a perpendicular line of the first end face 170 in a plan view, and the first gain area with respect to the perpendicular line P at the end point Q on the outer side (opposite to the inclined side of the first gain area 180). 180 is an inclination angle of the outer edge 181. Further, the width b is the width of the first end face 170 in plan view. The distance L is the shortest length between the first side surface 107 and the second side surface 109.

  In the illustrated example, the width a of the second end surface 172 and the fourth end surface 176 on the second side surface 109 side of each of the first gain region 180 and the second gain region 182 when viewed in plan (see FIG. 2). Is the same as the width b of the first end surface 170 and the third end surface 174 on the first side surface 107 side. The planar shape of the first gain region 180 and the planar shape of the second gain region 182 are, for example, with respect to a perpendicular bisector S of a line connecting the end points R inside the first end surface 170 and the third end surface 174. Are line symmetric. Such line symmetry is not necessary. The planar shape of each of the first gain region 180 and the second gain region 182 is, for example, a parallelogram as shown in FIG.

  The second cladding layer 110 is formed on the active layer 108. The second cladding layer 110 is made of, for example, a second conductivity type (eg, p-type) semiconductor. As the second cladding layer 110, for example, a p-type AlGaP layer can be used.

  For example, the p-type second cladding layer 110, the active layer 108 not doped with impurities, and the n-type first cladding layer 106 constitute a pin diode. Each of the first cladding layer 106 and the second cladding layer 110 is a layer having a larger forbidden band width and a smaller refractive index than the active layer 108. The active layer 108 has a function of amplifying light. The first cladding layer 106 and the second cladding layer 110 have a function of confining injected carriers (electrons and holes) and light with the active layer 108 interposed therebetween.

  In the light emitting device 100, when a forward bias voltage of a pin diode is applied between the first electrode 120 and the second electrode 122, recombination of electrons and holes occurs in the gain regions 180 and 182 of the active layer 108. This recombination causes light emission. Starting from this generated light, stimulated emission occurs in a chain, light travels in the gain regions 180 and 182, and the light intensity is amplified during that time, and the emitted light L 1 is emitted from the end surfaces 172 and 176 on the second side surface 109 side. Can be emitted. In the illustrated example, there is also light (not shown) emitted from the end faces 170 and 174 on the first side face 107 side.

  The contact layer 112 can be formed on the second cladding layer 110, for example, as shown in FIG. As the contact layer 112, a layer in ohmic contact with the second electrode 122 can be used. The contact layer 112 is made of, for example, a second conductivity type semiconductor. As the contact layer 112, for example, a p-type GaAs layer can be used.

  For example, as shown in FIG. 3, the first electrode 120 is formed on the entire lower surface of the substrate 102. The first electrode 120 can be in contact with a layer that is in ohmic contact with the first electrode 120 (the substrate 102 in the illustrated example). The first electrode 120 is electrically connected to the first cladding layer 106 through the substrate 102 and the buffer layer 104. The first electrode 120 is one electrode for driving the light emitting device 100. As the first electrode 120, for example, an electrode in which a Cr layer, an AuGe layer, a Ni layer, and an Au layer are stacked in this order from the substrate 102 side can be used. Note that a second contact layer (not shown) is provided between the first cladding layer 106 and the buffer layer 104, the second contact layer is exposed by dry etching or the like, and the first electrode 120 is connected to the second contact layer. It can also be provided above. Thereby, a single-sided electrode structure can be obtained. This form is particularly effective when the substrate 102 is insulative. Examples of the insulating substrate 102 include a semi-insulating GaAs substrate. For example, an n-type GaAs layer can be used as the second contact layer. Although not shown, the substrate 102 and a member provided thereon can be separated using, for example, an epitaxial lift-off (ELO) method, a laser lift-off method, or the like. That is, the light emitting device 100 may not have the substrate 102. In this case, for example, the first electrode 120 can be formed directly below the buffer layer 104. This form is also particularly effective when the substrate 102 is insulative.

  The second electrode 122 is formed on the contact layer 112. The second electrode 122 is electrically connected to the second cladding layer 110 through the contact layer 112. The second electrode 122 is the other electrode for driving the light emitting device 100. As the second electrode 122, for example, an electrode in which a Cr layer, an AuZn layer, and an Au layer are stacked in this order from the contact layer 112 side can be used. The lower surface of the second electrode 122 has the same planar shape as the gain regions 180 and 182 as shown in FIG. In the illustrated example, the current path between the electrodes 120 and 122 is determined by the planar shape of the contact surface between the second electrode 122 and the contact layer 112, and as a result, the planar shape of the gain regions 180 and 182 is determined. Can do. Although not shown, for example, the contact surface between the first electrode 120 and the substrate 102 may have the same planar shape as the gain regions 180 and 182.

  The light emitting device 100 according to the present embodiment can be applied to a light source such as a projector, a display, a lighting device, and a measurement device. The same applies to the embodiments described later.

  1.2. Next, a method for manufacturing the light emitting device 100 according to the first embodiment will be described with reference to the drawings.

  FIG. 5 is a cross-sectional view schematically showing a manufacturing process of the light-emitting device 100, and corresponds to the cross-sectional view shown in FIG.

  (1) First, for example, as shown in FIG. 5, the buffer layer 104, the first cladding layer 106, the active layer 108, the second cladding layer 110, and the contact layer 112 are epitaxially grown in this order on the substrate 102. . As a method for epitaxial growth, for example, MOCVD (Metal-Organic Chemical Vapor Deposition) method, MBE (Molecular Beam Epitaxy) method or the like can be used.

  (2) Next, for example, as shown in FIG. 3, the second electrode 122 is formed on the contact layer 112. The second electrode 122 is formed, for example, by forming a conductive layer on the entire surface by a vacuum evaporation method and then patterning the conductive layer using a photolithography technique and an etching technique. The second electrode 122 can also be formed in a desired shape by, for example, a combination of a vacuum deposition method and a lift-off method.

  Next, for example, as shown in FIG. 3, the first electrode 120 is formed under the lower surface of the substrate 102. The manufacturing method of the 1st electrode 120 is the same as the illustration of the manufacturing method of the 2nd electrode 122 mentioned above, for example. Note that the order of forming the first electrode 120 and the second electrode 122 is not particularly limited.

  (3) The light emitting device 100 of the present embodiment is obtained by the above steps as shown in FIGS.

  1.3. In the light emitting device 100 according to this embodiment, as described above, the laser oscillation of the light generated in the gain regions 180 and 182 can be suppressed or prevented. Therefore, speckle noise can be reduced. Furthermore, in the light emitting device 100 according to the present embodiment, light generated in the gain regions 180 and 182 can travel while receiving gain in the gain regions 180 and 182 and can be emitted to the outside. Therefore, it is possible to obtain a higher output than conventional general LEDs. As described above, according to the present embodiment, it is possible to provide a novel light emitting device that can reduce speckle noise and has high output.

  Further, in the light emitting device 100 according to the present embodiment, the first gain region 180 and the second gain region 182 intersect between the first side surface 107 and the second side surface 109. Thereby, compared with the case where it does not cross, for example, the device area seen planarly can be made small. Therefore, the light emitting device 100 can be reduced in size.

  1.4. Next, a modification of the light emitting device according to this embodiment will be described. In addition, a different point from the example of the light-emitting device 100 shown in FIGS. 1-3 mentioned above is demonstrated, and description is abbreviate | omitted about the same point.

  (1) First, a first modification will be described.

  FIG. 6 is a cross-sectional view schematically showing a light emitting device 200 according to this modification. Note that the cross-sectional view shown in FIG. 6 corresponds to the cross-sectional view shown in FIG.

  In the example of the light emitting device 100, as shown in FIGS. 2 and 3, the case where the upper surface and the lower surface of the second electrode 122 have the same planar shape as the gain regions 180 and 182 has been described. On the other hand, in the present modification, for example, as shown in FIG. 6, the upper surface of the second electrode 122 can have a planar shape different from the gain regions 180 and 182. In this modification, the insulating layer 202 having an opening can be formed over the contact layer 112, and the second electrode 122 filling the opening can be formed. The second electrode 122 is formed in the opening and on the insulating layer (including the opening) 202. In this modification, the lower surface of the second electrode 122 has the same planar shape as the gain regions 180 and 182, and the upper surface of the second electrode 122 is the entire surface on the insulating layer 202.

As the insulating layer 202, for example, a SiN layer, a SiO ₂ layer, a polyimide layer, or the like can be used. The insulating layer 202 is formed by, for example, a CVD method or a coating method.

  According to this modification, since the volume of the second electrode 122 is increased as compared with the example of the light emitting device 100, the light emitting device 200 having excellent heat dissipation can be provided.

  (2) Next, a second modification will be described.

  7 and 8 are plan views schematically showing light emitting devices 300 and 350 according to this modification.

  In the example of the light emitting device 100, the width a of the end surfaces 172 and 176 on the second side surface 109 side of each of the first gain region 180 and the second gain region 182 in the plan view (see FIG. 2) is the first side surface. The case where it is the same as the width b of the end surfaces 170 and 174 on the 107 side has been described. On the other hand, in this modification, the width a of the end surfaces 172 and 176 on the second side surface 109 side of each of the gain regions 180 and 182 may be different from the width b of the end surfaces 170 and 174 on the first side surface 107 side. it can. For example, as shown in FIG. 7, the width a of the end surfaces 172 and 176 on the second side surface 109 side of each of the gain regions 180 and 182 is made larger than the width b of the end surfaces 170 and 174 on the first side surface 107 side. Can do. For example, as shown in FIG. 8, the width a of the end surfaces 172 and 176 on the second side surface 109 side of each of the gain regions 180 and 182 is smaller than the width b of the end surfaces 170 and 174 on the first side surface 107 side. You can also Note that these can also be performed for one of the first gain region 180 and the second gain region 182.

  (3) Next, a third modification will be described.

  FIG. 9 is a plan view schematically showing a light emitting device 500 according to this modification.

  In the example of the light emitting device 100, the case where one pair of gain regions 180 and 182 (gain region pair 183) is provided as illustrated in FIGS. On the other hand, in this modification, a plurality (for example, two in the example of FIG. 9) of gain region pairs 183 can be arranged. For example, the plurality of gain region pairs 183 are arranged in a direction parallel to the first side surface 107. In the illustrated example, all of the four light emission surfaces (two second end surfaces 172 and two fourth end surfaces 176) are provided on the second side surface 109 side. One direction (first direction) A toward each first gain region 180 of each of the plurality of gain region pairs 183 may be the same direction (example shown in the figure) for each gain region pair 183, or in a different direction. There may be. Similarly, the other direction (second direction) B toward the second gain region 182 of each of the plurality of gain region pairs 183 may be the same direction (example shown) for each gain region pair 183, It may be in a different direction. In the present modification, for example, as shown in FIG. 9, all the second end surfaces 172 and the fourth end surfaces 176 in the light emitting device 500 can be prevented from overlapping each other.

  According to this modification, the output of the entire light emitting device can be increased as compared with the example of the light emitting device 100.

  (4) Next, a fourth modification will be described.

  In the example of the light emitting device 100, the planar shape of the gain regions 180 and 182 has been described as being linear as illustrated in FIG. 2, but in the present modification, for example, the gain regions 180 and 182 are not illustrated. The planar shape can be a curved line or a combination of a straight line and a curved line.

  (5) Next, a fifth modification will be described.

  In the example of the light emitting device 100, the case of the InGaAlP system has been described. However, in this modification, any material system capable of forming the light emission gain region can be used. As the semiconductor material, for example, an AlGaN-based, InGaN-based, GaAs-based, InGaAs-based, GaInNAs-based, or ZnCdSe-based semiconductor material can be used. Moreover, in this modification, an organic material etc. can also be used, for example.

  (6) It should be noted that the above-described modifications are merely examples, and the present invention is not limited to these. For example, it is possible to appropriately combine the modified examples. Moreover, these modifications and the example of the light-emitting device 100 are applicable also to embodiment mentioned later as needed.

2. Second Embodiment 2.1. Next, a light emitting device 600 according to the second embodiment will be described.

  10 is a plan view schematically showing the light emitting device 600, and FIG. 11 is a sectional view taken along line XI-XI in FIG. In addition, in the light emitting device 600 according to the second embodiment, members having the same functions as those of the constituent members of the light emitting device 100 according to the first embodiment described above are denoted by the same reference numerals, and detailed descriptions thereof are given. Omitted.

  10 and 11, the light emitting device 600 includes a first cladding layer 106, an active layer 108, a second cladding layer 110, a first electrode 120, a second electrode 122, an insulating portion 602, and the like. ,including. The light emitting device 600 can further include, for example, the substrate 102, the buffer layer 104, and the contact layer 112.

  The entire active layer 108 constitutes a first gain region 180 and a second gain region 182. At least the active layer 108 has the same planar shape as the first gain region 180 and the second gain region 182 as shown in FIGS. For example, the first cladding layer 106, the active layer 108, the second cladding layer 110, the contact layer 112, and the second electrode 122 have the same planar shape as the first gain region 180 and the second gain region 182. For example, the first cladding layer 106, the active layer 108, the second cladding layer 110, and the contact layer 112 can constitute a columnar semiconductor deposited body (hereinafter referred to as “columnar portion”) 610.

  As shown in FIG. 11, the insulating portion 602 is provided on the side of the columnar portion 610. The insulating part 602 is formed on, for example, a layer (buffer layer 104 in the illustrated example) that is in contact with the side opposite to the second electrode 122 side of the columnar part 610. The insulating unit 602 can cover, for example, side surfaces of the active layer 108 other than the first to fourth end surfaces 170, 172, 174, and 176. For example, the insulating unit 602 can cover at least the side surface of the active layer 108 between the first side surface 107 and the second side surface 109 of the active layer 108. For example, of the side surfaces of the columnar portion 610, the side surfaces other than the first side surface 107 side and the second side surface 109 side are covered with the insulating portion 602. As shown in FIGS. 10 and 11, the insulating portion 602 is in contact with the side surface of the columnar portion 610 between the first side surface 107 and the second side surface 109. The current between the electrodes 120 and 122 can flow through the columnar portion 610 sandwiched between the insulating portions 602, avoiding the insulating portions 602. Since the side surface of the active layer 108 is covered with the insulating portion 602, crosstalk between the first gain region 180 and the second gain region 182 can be easily prevented.

The insulating unit 602 can have a refractive index lower than that of the active layer 108, for example. Thereby, light can be efficiently confined in the active layer 108. In the light emitting device 600 according to the present embodiment, the light generated in the gain regions 180 and 182 propagates in the axial direction (first direction A and second direction B) of the gain regions 180 and 182 formed by the difference in refractive index. To the propagation mode For this reason, there is almost no light that propagates in a direction different from the axial direction of the gain regions 180 and 182. For example, when the first end face 170 and the second end face 172 facing each other in the first gain region 180 overlap in a plan view from the first side face 107 side, the first end face 170 and the second end face are overlapped at the overlapping portion. The direction connecting the end face 172 perpendicularly is different from the axial direction of the first gain region 180. For this reason, there is almost no light propagating in the direction connecting the first end face 170 and the second end face 172 vertically. The same applies to the second gain region 182. Accordingly, each of the gain regions 180 and 182 is provided in a direction inclined with respect to the perpendicular P of the first side surface 107, and the light emitting device 600 that emits light that is not laser light by suppressing or preventing multiple reflection of light. Can be obtained. As the insulating portion 602, for example, a SiN layer, a SiO ₂ layer, a polyimide layer, or the like can be used.

  2.2. Next, a method for manufacturing the light emitting device 600 according to the second embodiment will be described with reference to the drawings. In addition, a different point from the manufacturing method of the light-emitting device 100 which concerns on 1st Embodiment mentioned above is demonstrated, and detailed description is abbreviate | omitted about the same point.

  12 is a cross-sectional view schematically showing a manufacturing process of the light-emitting device 600 shown in FIGS. 10 and 11, and corresponds to the cross-sectional view shown in FIG.

  (1) First, the buffer layer 104, the first cladding layer 106, the active layer 108, the second cladding layer 110, and the contact layer 112 are formed on the substrate 102.

  (2) Next, as shown in FIG. 12, for example, the first cladding layer 106, the active layer 108, the second cladding layer 110, and the contact layer 112 can be patterned. The opening by patterning can be performed, for example, to a depth that reaches at least the upper surface of the first cladding layer 106. The patterning is performed using, for example, a photolithography technique and an etching technique. By this step, the columnar portion 610 can be formed.

  (3) Next, as shown in FIGS. 10 and 11, the insulating portion 602 can be formed so as to cover the side surface of the columnar portion 610. Specifically, first, an insulating layer (not shown) is formed on the entire surface of the buffer layer 104 (including on the contact layer 112) by, for example, a CVD method or a coating method. Next, the upper surface of the contact layer 112 is exposed using, for example, an etching technique. Through the above steps, the insulating portion 602 can be obtained.

  (4) Next, for example, the first electrode 120 and the second electrode 122 are formed.

  (5) Through the above steps, the light emitting device 600 of this embodiment is obtained as shown in FIGS. 10 and 11.

  2.3. According to this embodiment, like the first embodiment described above, it is possible to provide a novel light emitting device that can reduce speckle noise and has high output.

  2.4. Next, a modification of the light emitting device according to this embodiment will be described. Note that differences from the example of the light-emitting device 600 illustrated in FIGS. 10 and 11 described above will be described, and description of similar points will be omitted.

  (1) First, a first modification will be described.

  FIG. 13 is a cross-sectional view schematically showing a manufacturing process of the light emitting device 700 according to this modification. FIG. 14 is a cross-sectional view schematically showing a light emitting device 700 according to this modification. Note that the cross-sectional views shown in FIGS. 13 and 14 correspond to the cross-sectional view shown in FIG. For convenience, FIG. 14 also shows the characteristics of a second modification described later.

  In the example of the light emitting device 600, after forming the columnar portion 610 as shown in FIG. 12, an insulating layer (not shown) is formed, and then the contact layer 112 is exposed to form the insulating portion 602. Explained the case. On the other hand, in this modification, first, as shown in FIG. 13, for example, a region on the contact layer 112 and above the first gain region 180 and the second gain region 182 is masked with a photoresist or the like. Cover with layer 704. Next, for example, ions 706 such as protons are implanted to a depth reaching at least the upper surface of the first cladding layer 106 using the mask layer 704 as a mask. Through the above steps, for example, as shown in FIG. 14, the insulating portion 602 of the light emitting device 700 according to this modification can be formed. In the illustrated example, the position of the lower surface of the insulating portion 602 is lower than the position of the upper surface of the first cladding layer 106 and higher than the position of the lower surface of the first cladding layer 106.

  (2) Next, a second modification will be described.

  FIG. 14 is a cross-sectional view schematically showing a light emitting device 700 according to this modification.

  In the present modification, as shown in FIG. 14, the second electrode 122 can be formed on the entire surface of the columnar portion 610 and the insulating portion 602. The insulating part 602 is, for example, a side of the columnar part 610 that is in contact with the side opposite to the second electrode 122 side of the columnar part 610 (in the illustrated example, the lower layer of the first cladding layer 106), It is formed between the second electrode 122.

  According to this modification, since the volume of the second electrode 122 is increased as compared to the example of the light emitting device 600, the light emitting device 700 having excellent heat dissipation can be provided. In addition, since the second electrode 122 may be formed over the entire surface on a flat surface, the risk of disconnection of the second electrode 122 can be reduced. Moreover, since the patterning process of the 2nd electrode 122 becomes unnecessary, a manufacturing process can be simplified.

  (3) Next, a third modification will be described.

  FIG. 15 is a cross-sectional view schematically showing a light emitting device 800 according to this modification.

  In the example of the light emitting device 600, as shown in FIG. 11, the case where the insulating portion 602 covers at least the side surface of the active layer 108 between the first side surface 107 and the second side surface 109 has been described. On the other hand, in this modification, as shown in FIG. 15, the insulating portion 602 can not cover the side surface of the active layer 108. In the present modification, for example, at least a portion of the contact layer 112 on the contact surface side with the second electrode 122 (upper portion of the contact layer 112) can constitute the columnar portion 610. For example, the columnar portion 610 may be configured by the upper portion of the second cladding layer 110 and the contact layer 112 as illustrated. For example, the insulating portion 602 covers a part of the upper surface of the second cladding layer 110, a part of the side surface of the second cladding layer 110, and the side surface of the contact layer 112. The position of the lower surface of the insulating unit 602 is, for example, higher than the position of the upper surface of the active layer 108. In the illustrated example, the second electrode 122 is formed on the entire surface of the columnar portion 610 and the insulating portion 602 as in the second modification described above. Although not shown, the columnar portion 610 and the insulating portion 602 can also be formed on the substrate 102 side.

  Also in this modification, the current between the electrodes 120 and 122 can flow through the columnar portion 610 sandwiched between the insulating portions 602. In this modification, the current path between the electrodes 120 and 122 is determined by the planar shape of the columnar portion 610, and as a result, the planar shape of the gain regions 180 and 182 can be determined.

  (4) It should be noted that the above-described modifications are merely examples, and the present invention is not limited to these. For example, it is possible to appropriately combine the modified examples. Moreover, these modifications and the examples of the light-emitting device 600 can be applied to the above-described embodiments and the embodiments described later as needed.

3. Third Embodiment 3.1. Next, a light emitting device 900 according to the third embodiment will be described.

  FIG. 16 is a plan view schematically showing the light emitting device 900. In addition, in the light emitting device 900 according to the third embodiment, members having the same functions as those of the constituent members of the light emitting device 100 according to the first embodiment described above are denoted by the same reference numerals, and detailed descriptions thereof are given. Omitted.

  The light emitting device 900 includes a first cladding layer 106, an active layer 108, a second cladding layer 110, a first electrode 120, and a second electrode 122. The light emitting device 900 can further include, for example, the substrate 102, the buffer layer 104, the contact layer 112, and the reflection unit 130, but can also not include these.

  A part of the active layer 108 constitutes a plurality of gain regions 180, 182, 187 and 188. For example, in the illustrated example, the active layer 108 includes a first gain region 180 and a second gain region 182 (one gain region pair 183), a third gain region 187, and a fourth gain region 188. The active layer 108 may not have the third gain region 187 or the fourth gain region 188.

In the wavelength band of light generated in the gain regions 180, 182, 187 and 188, the reflectance of the first side surface 107 can be higher than the reflectance of the second side surface 109, for example. For example, as shown in FIG. 16, a high reflectance can be obtained by covering the first side surface 107 with a reflecting portion 130. As the reflection unit 130, for example, a dielectric multilayer mirror in which four pairs are stacked in the order of the Al ₂ O ₃ layer and the TiO ₂ layer from the first side surface 107 side can be used. In this case, the reflectance of the first side surface 107 is, for example, 90%. The reflectance of the first side surface 107 is desirably 100% or close thereto. On the other hand, the reflectance of the second side surface 109 is desirably 0% or close thereto. For example, a low reflectance can be obtained by covering the second side surface 109 with an antireflection portion (not shown). As the antireflection part, for example, an Al ₂ O ₃ single layer can be used. As the reflecting portion 130 and the anti-reflection portion, not limited to the example described above, for example, SiO ₂ layer, and a SiN layer, _Ta 2 _{O 5} layer, etc. can be used these multilayer films.

  Each of the third gain region 187 and the fourth gain region 188 is provided from the first side surface 107 to the second side surface 109 in a direction inclined with respect to the normal line P of the first side surface 107, as shown in FIG. It has been. The third gain region 187 and the fourth gain region 188 are provided in different directions. The third gain region 187 is, for example, inclined toward one side with respect to the perpendicular P, and is provided toward one direction C (hereinafter referred to as “third direction”) C having an inclination of the angle θ. The third direction C is, for example, the same as the second direction B toward the second gain region 182. Further, the fourth gain region 188 is inclined to the other side (opposite side of the one side) with respect to the perpendicular P, for example, and is referred to as another direction having an inclination of the angle θ (hereinafter referred to as “fourth direction”). ) It is provided towards D. For example, the fourth direction D is the same as the first direction A toward the first gain region 180.

  At least a part (all in the illustrated example) of the fifth end surface 171 of the third gain region 187 on the first side surface 107 side is the first end surface 170 of the first gain region 180 on the first side surface 107 side. The first overlapping surface 178 overlaps at least part (all in the illustrated example). The planar shape of the first gain region 180 and the planar shape of the third gain region 187 are, for example, line symmetric with respect to the normal T in the first end surface 170 or the fifth end surface 171. For example, the planar shape of the first gain region 180 and the planar shape of the third gain region 187 are axisymmetric with respect to the perpendicular bisector T of the first overlapping surface 178.

  At least a part (all in the illustrated example) of the seventh end surface 175 on the first side surface 107 side of the fourth gain region 188 is out of the third end surface 174 on the first side surface 107 side of the second gain region 182. At least a part (all in the illustrated example) overlaps with the second overlapping surface 179. The planar shape of the second gain region 182 and the planar shape of the fourth gain region 188 are line-symmetric with respect to the normal line U in the third end surface 174 or the seventh end surface 175, for example. For example, the planar shape of the second gain region 182 and the planar shape of the fourth gain region 188 are line symmetric with respect to the perpendicular bisector U of the second overlapping surface 179.

  For example, at least two of the end surfaces 172, 176, 173, and 177 on the second side surface 109 side of the plurality of gain regions 180, 182, 187, and 188 may not overlap each other. In the illustrated example, all of the end surfaces 172, 176, 173, and 177 on the second side surface 109 side of the plurality of gain regions 180, 182, 187, and 188 do not overlap each other.

  In the light emitting device 900 of the present embodiment, for example, part of the light generated in the first gain region 180 is reflected by the first overlapping surface 178 and the sixth end surface 173 on the second side surface 109 side of the third gain region 187. In the meantime, the light intensity is amplified. Similarly, part of the light generated in the third gain region 187 is reflected by the first overlapping surface 178 and emitted from the second end surface 172, while the light intensity is amplified. Note that some of the light generated in the first gain region 180 is directly emitted from the second end surface 172. Similarly, some of the light generated in the third gain region 187 is directly emitted from the sixth end face 173. Light may be reflected also at the second end surface 172 and the sixth end surface 173, but this reflected light can be absorbed in regions other than the gain regions 180, 182, 187, and 188.

  In the light emitting device 900 of the present embodiment, for example, part of the light generated in the second gain region 182 is reflected by the second overlapping surface 179, and the eighth gain on the second side surface 109 side of the fourth gain region 188. The light is emitted from the end face 177, while the light intensity is amplified. Similarly, a part of the light generated in the fourth gain region 188 is reflected by the second overlapping surface 179 and emitted from the fourth end surface 176, while the light intensity is amplified. Note that some of the light generated in the second gain region 182 is directly emitted from the fourth end face 176. Similarly, some of the light generated in the fourth gain region 188 is directly emitted from the eighth end surface 177. Also, light may be reflected on the fourth end surface 176 and the eighth end surface 177, but this reflected light can be absorbed in regions other than the gain regions 180, 182, 187, and 188.

  3.2. Next, a method for manufacturing the light emitting device 900 according to the third embodiment will be described with reference to the drawings. In addition, a different point from the manufacturing method of the light-emitting device 100 which concerns on 1st Embodiment mentioned above is demonstrated, and detailed description is abbreviate | omitted about the same point.

  (1) First, the buffer layer 104, the first cladding layer 106, the active layer 108, the second cladding layer 110, and the contact layer 112 are formed on the substrate 102.

  (2) Next, for example, the reflection portion 130 can be formed on the entire surface on the first side surface 107 side, and the antireflection portion can be formed on the entire surface on the second side surface 109 side. The reflection unit 130 and the antireflection unit are formed by, for example, a CVD (Chemical Vapor Deposition) method, a sputtering method, an ion assisted deposition (Ion Assisted Deposition) method, or the like. In addition, the formation order of the reflection part 130 and an antireflection part is not specifically limited.

  (3) Next, for example, the first electrode 120 and the second electrode 122 are formed.

  (4) The light emitting device 900 of this embodiment is obtained by the above steps as shown in FIG.

  3.3. According to this embodiment, like the first embodiment described above, it is possible to provide a novel light emitting device that can reduce speckle noise and has high output.

  In the light emitting device 900 according to the present embodiment, part of the light generated in the first gain region 180 is reflected by the first overlapping surface 178 and travels while receiving gain in the third gain region 187. be able to. The same applies to part of the light generated in the other gain regions 187, 182 and 188. Therefore, according to the light emitting device 900 of the present embodiment, for example, compared with a case where the light is not reflected on the overlapping surfaces 178 and 179, the light intensity amplification distance becomes longer, so that a high light output can be obtained.

  In the light emitting device 900 of this embodiment, as shown in FIG. 16, the first gain region 180 and the second gain region 182 intersect between the first side surface 107 and the second side surface 109. Further, the end surfaces 172, 176, 173, and 177 on the second side surface 109 side of the plurality of gain regions 180, 182, 187, and 188 do not overlap each other. Therefore, for example, as compared with the case where the first gain region 180 and the second gain region 182 do not cross each other, according to the light emitting device 100 of the present embodiment, the light emitting points per unit area (four The number of end faces 172, 176, 173, 177) can be increased. As a result, the energy density of light at the light emitting point can be reduced to prevent the light emitting surface from being destroyed due to the high energy density, and the luminance of the light emitting device 900 can be increased.

  3.4. Next, a modification of the light emitting device according to this embodiment will be described. Note that differences from the example of the light-emitting device 900 illustrated in FIG. 16 described above will be described, and description of similar points will be omitted.

  FIG. 17 is a plan view schematically showing a light emitting device 950 according to this modification.

  In the example of the light emitting device 900, the case where one pair of gain regions 180 and 182 (gain region pair 183) is provided as shown in FIG. On the other hand, in this modification, a plurality of gain region pairs 183 (for example, two in the example of FIG. 17) can be arranged. In the illustrated example, all of the six light emission surfaces (two second end surfaces 172, two fourth end surfaces 176, sixth end surface 173, and eighth end surface 177) are provided on the second side surface 109 side. Yes.

  Of the adjacent gain region pairs 183 (a) and 183 (b), at least a part of the first end surface 170 of one gain region pair (hereinafter referred to as "first gain region pair") 183 (a) (not shown) In the example, all) and at least a part (all in the illustrated example) of the third end surface 174 of the other gain region pair (hereinafter referred to as “second gain region pair”) 183 (b) are in a third overlap. Overlap at surface 189. The planar shape of the first gain region 180 of the first gain region pair 183 (a) and the planar shape of the second gain region 182 of the second gain region pair 183 (b) are, for example, the first gain region pair 183 ( It is axisymmetric with respect to the normal V in the first end face 170 of a) or the third end face 174 of the second gain region pair 183 (b). For example, the planar shape of the first gain region 180 of the first gain region pair 183 (a) and the planar shape of the second gain region 182 of the second gain region pair 183 (b) are perpendicular to the third overlapping surface 189. Axisymmetric with respect to the bisector V.

  In addition, the fourth end surface 176 of the first gain region pair 183 (a) and the second end surface 172 of the second gain region pair 183 (b) may not overlap, for example. The first gain region 180 and the second gain region 182 of each of the gain region pair 183 (a) and (b) are, for example, more than the center between the first side surface 107 and the second side surface 109 as shown in the figure. It can cross on the second side 109 side.

  In the light emitting device 950 of the present modification, for example, part of the light generated in the first gain region 180 of the first gain region pair 183 (a) is reflected by the third overlapping surface 189, and the second gain region pair 183 is reflected. The light is emitted from the fourth end surface 176 of (b), and the light intensity is amplified during that time. Similarly, part of the light generated in the second gain region 182 of the second gain region pair 183 (b) is reflected by the third overlapping surface 189, and the second end surface 172 of the first gain region pair 183 (a). In the meantime, the light intensity is amplified. Therefore, according to the light emitting device 950 according to the present modification, for example, compared with the case where the light is not reflected on the third overlapping surface 189, the light intensity amplification distance becomes longer, so that a high light output can be obtained.

  In addition, the modification mentioned above is an example, Comprising: It is not necessarily limited to this. Moreover, this modification and the example of the light-emitting device 900 are applicable also to embodiment mentioned above as needed.

  4). Although the embodiments of the present invention have been described in detail as described above, those skilled in the art will readily understand that many modifications are possible without substantially departing from the novel matters and effects of the present invention. Accordingly, all such modifications are intended to be included in the scope of the present invention.

1 is a perspective view schematically showing a light emitting device according to a first embodiment. 1 is a plan view schematically showing a light emitting device according to a first embodiment. 1 is a cross-sectional view schematically showing a light emitting device according to a first embodiment. The figure which looked at the active layer of 1st Embodiment planarly from the 1st side surface side. Sectional drawing which shows schematically the manufacturing process of the light-emitting device of 1st Embodiment. Sectional drawing which shows schematically the 1st modification of the light-emitting device of 1st Embodiment. The top view which shows roughly the 2nd modification of the light-emitting device of 1st Embodiment. The top view which shows roughly the 2nd modification of the light-emitting device of 1st Embodiment. The top view which shows roughly the 3rd modification of the light-emitting device of 1st Embodiment. The top view which shows schematically the light-emitting device of 2nd Embodiment. Sectional drawing which shows schematically the light-emitting device of 2nd Embodiment. Sectional drawing which shows schematically the manufacturing process of the light-emitting device of 2nd Embodiment. Sectional drawing which shows schematically the manufacturing process of the 1st modification of the light-emitting device of 2nd Embodiment. Sectional drawing which shows schematically the 1st and 2nd modification of the light-emitting device of 2nd Embodiment. Sectional drawing which shows schematically the 3rd modification of the light-emitting device of 2nd Embodiment. The top view which shows schematically the light-emitting device of 3rd Embodiment. The top view which shows roughly the modification of the light-emitting device of 3rd Embodiment.

Explanation of symbols

100 light emitting device, 102 substrate, 104 buffer layer, 106 first cladding layer, 107 first side surface, 108 active layer, 109 second side surface, 110 second cladding layer, 112 contact layer, 120 first electrode, 122 second electrode , 130 Reflector, 160 Intersection region, 170 First end surface, 171 Fifth end surface, 172 Second end surface, 173 Sixth end surface, 174 Third end surface, 175 Seventh end surface, 176 Fourth end surface, 177 Eighth end surface First overlapping surface, 179 Second overlapping surface, 180 First gain region, 181 Outer edge, 182 Second gain region, 183 Gain region pair, 187 Third gain region, 188 Fourth gain region, 189 Third overlapping surface, 200 Light emitting device, 202 Insulating layer, 500,600 Light emitting device, 602 Insulating portion, 610 Columnar portion, 700 Light emitting device, 70 Mask layer 706 ion, 800,900,950 emitting device

Claims (13)

A first cladding layer;
An active layer formed above the first cladding layer;
A second cladding layer formed above the active layer;
Including
At least a part of the active layer constitutes a plurality of gain regions,
Each of the plurality of gain regions is inclined with respect to the normal of the first side surface from the first side surface of the active layer to the second side surface of the active layer parallel to the first side surface in a plan view. Provided in the direction,
The plurality of gain regions form at least one pair of gain regions;
One first gain region of the pair of gain regions is provided toward one direction;
The other second gain region of the pair of gain regions is provided in another direction different from the one direction;
The light emitting device, wherein the first gain region and the second gain region intersect between the first side surface and the second side surface. In claim 1,
In each of the plurality of gain regions, the end surface on the first side surface side and the end surface on the second side surface side do not overlap each other when viewed in plan from the first side surface side. In claim 1 or 2,
In plan view, an inclination angle θ of each outer edge of the plurality of gain regions with respect to a perpendicular at an end point outside the end surface on the first side surface side, an end surface on the first side surface side of each of the plurality of gain regions The width b and the distance L between the first side surface and the second side surface satisfy the following formula (1).
tan θ> b / L (1) In any one of Claims 1 thru | or 3,
A first electrode electrically connected to the first cladding layer;
A second electrode electrically connected to the second cladding layer;
A light emitting device. In any one of Claims 1 thru | or 4,
The first electrode is in contact with the first layer in ohmic contact;
The second electrode is in contact with the second layer in ohmic contact;
At least one of the contact surface between the first electrode and the first layer and the contact surface between the second electrode and the second layer has the same planar shape as the plurality of gain regions. . In claim 5,
At least one of the contact surface side portion of the first layer and the contact surface side portion of the second layer constitutes at least a part of a columnar portion;
The columnar portion has the same planar shape as the plurality of gain regions,
An insulating part is provided on the side of the columnar part,
The insulating portion is a light emitting device that is in contact with a side surface of the columnar portion between the first side surface and the second side surface as viewed in a plan view. In any one of Claims 1 thru | or 6.
The plurality of gain regions have at least one of a third gain region and a fourth gain region;
At least a part of the end surface of the third gain region on the first side surface side overlaps at least a part of the end surface of the first gain region on the first side surface side,
The light emitting device, wherein at least a part of an end surface of the fourth gain region on the first side surface side overlaps at least a part of the end surface of the second gain region on the first side surface side. In claim 7,
The planar shape of the first gain region and the planar shape of the third gain region are axisymmetric with respect to the perpendicular line in the end face on the first side surface side of the first gain region or the third gain region. Yes,
The planar shape of the second gain region and the planar shape of the fourth gain region are axisymmetric with respect to the perpendicular line in the end face on the first side surface side of the second gain region or the fourth gain region. There is a light emitting device. In any one of Claims 1 thru | or 8.
A light emitting device in which a plurality of gain region pairs are arranged. In claim 9,
Of the pair of adjacent gain regions, at least a part of the first side surface of the first gain region of one pair of gain regions and the second of the other pair of gain regions. A light emitting device that overlaps at least a part of an end surface of the gain region on the first side surface side. In claim 10,
The planar shape of the first gain region of the one pair of gain regions and the planar shape of the second gain region of the other pair of gain regions are the first gain region or the second gain region. A light-emitting device that is line-symmetric with respect to a perpendicular line in the end face on the first side face side of In claim 7, 8, 10, or 11,
The light emitting device, wherein a reflectance of the first side surface is higher than a reflectance of the second side surface in a wavelength band of light generated in the plurality of gain regions. In any one of Claims 1 to 12,
The light emitting device, wherein at least two of the end surfaces on the second side surface of the plurality of gain regions do not overlap each other.

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