JP2009230814A - Inspection device and clamp mechanism - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To sufficiently and surely give a spring force to a minute structure by using a small spring and to secure a deformation amount of the spring when the minute structure is attached/detached, with respect to a clamp mechanism. <P>SOLUTION: The inspection device includes the clamp mechanism 8 for clamping the minute structure 7 and an inspection device body for supporting the clamp mechanism. The clamp mechanism 8 includes the spring 1 for abutting on one side of the minute structure 7 to give the spring force and stoppers 6 for abutting on another side of the minute structure 7 to make the positioning. The spring 1 includes a pressurizing section 14 abutted on the minute structure 7, support section 17 supported on the inspection device body side, and a spring force generating section 15 for generating the spring force. The spring force generating section 15 comprises compression sections 18 to be compressed and pulling sections 19 to be pulled when the minute structure 7 is clamped, and a connection section 16 for connecting the compression section 18 and the pulling section 19. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to an inspection apparatus and a clamp mechanism, and is particularly suitable for an inspection apparatus for inspecting characteristics of a microstructure such as a slider and a light emitting diode chip (hereinafter abbreviated as an LED chip) and a clamp mechanism used therefor. .

  A slider provided with a magnetic head element used for recording / reproducing data on a magnetic disk is inspected for characteristics of the slider before being incorporated into a magnetic disk device (for example, Japanese Patent Laid-Open No. 2002-214374 (Patent) Literature 1)). Such inspection involves a head gimbal assembly (hereinafter referred to as an HGA) constructed by assembling a suspension and a slider in order to perform recording / reproduction processing of data on the magnetic disk while floating the slider on the rotating magnetic disk. Abbreviated). Since the HGA is assembled by bonding the slider on the suspension using an adhesive, solder, or the like, if the inspection result is determined to be defective, the entire HGA is discarded.

  However, in the future, as the recording density of magnetic disk devices increases, high-performance parts such as suspensions equipped with complicated circuit patterns and actuators for slider position control will be applied to HGA. is expected. Therefore, in the conventional method of inspecting in the HGA state, there is a problem that the cost of these parts and assembly work is wasted.

  Therefore, in recent years, a state before the slider is assembled as an HGA, that is, a method of inspecting the slider alone has been studied. In order to realize this, a slider inspection apparatus including a clamp mechanism that can be easily attached and detached and that prevents the slider from dropping due to an impact at the time of slider inspection or the like is required. As a slider support device of such an inspection apparatus, a spring manufactured by a method combining lithography and etching from a thin plate is used, and it is considered to clamp the slider between the spring and the stopper by the spring force of this spring. (For example, JP 2007-305209 A (Patent Document 2)). The slider support device (clamp mechanism) of Patent Document 2 includes a flexure made of a metal plate having a spring property. The flexure includes a gimbal portion including a tongue, a first support portion (stopper) that supports one end portion in the length direction of the slider, and a second support portion (pressing portion) that supports the other end portion of the slider. Part) and a spring part composed of a pair of flat springs (spring force generating part). This flat spring is formed by alternately forming peaks and valleys in the plane direction of the flexure by etching. The flat spring is stretched to a length that allows the slider to be inserted between the support portions in a state where a tensile load is applied. In this state, the slider is contracted to such a length that the slider can be sandwiched between the support portions.

JP 2002-214374 A JP 2007-305209 A

  Since the slider inspection device performs inspection while floating the slider on the rotating magnetic disk, a spring force is applied sufficiently and securely so that the slider does not come off from the slider support device (clamp mechanism), and the slider is supported by the slider. It is necessary to ensure the amount of deformation of the spring when attaching to and detaching from the device (clamp mechanism), and to accurately align the positions of the contact probe and the electrode terminal formed on the slider.

  However, in the slider support device of Patent Document 2, the spring force is set only by a pair of flat springs, so that the spring force is sufficiently and surely applied to the slider, and the spring of the slider when the slider is attached to and detached from the clamp mechanism. There is a problem that it is difficult to achieve both of securing the deformation amount. That is, in order to obtain the necessary amount of deformation in a thin plate spring, it is conceivable to reduce the plate thickness. However, when applying a load to the spring using a jig, etc. When the spring force is applied to the slider, there is a problem that the deformation direction of the spring deviates from the target direction and tends to warp, and the spring force to the slider cannot be sufficiently applied. On the other hand, it is conceivable that the spring is formed by using a thin plate having a certain thickness in order to sufficiently and surely apply the spring force to the slider. However, in order to obtain a necessary amount of deformation, the overall size of the spring becomes large. There is a problem that it ends up.

  Moreover, in the slider support apparatus of patent document 2, it is not considered about aligning the position of a contact probe and the electrode terminal formed in the slider correctly. Due to the downsizing of the slider (about 1 mm square) accompanying the recent increase in recording density of magnetic disk devices, the pitch between the electrode terminals of the slider is narrowed, and accurate alignment with the contact probe is particularly important.

  SUMMARY OF THE INVENTION An object of the present invention is to provide an inspection apparatus capable of sufficiently and reliably applying a spring force to a microstructure using a small spring and ensuring the amount of deformation of the spring when the microstructure is attached to or detached from the clamp mechanism. And providing a clamping mechanism.

  Another object of the present invention is to provide an inspection apparatus capable of accurately aligning the positions of a contact probe and an electrode terminal formed on a slider.

  A first aspect of the present invention for achieving the above-described object includes a clamp mechanism that clamps a microstructure and an inspection apparatus main body that supports the clamp mechanism, and the clamp mechanism includes the microstructure. A spring that abuts on one side and applies a spring force to the microstructure, and a stopper that abuts on the other side of the microstructure and positions the microstructure, the spring being attached to the microstructure An inspection apparatus comprising: a pressing part to be contacted; a support part supported on the inspection apparatus main body side; and a spring force generation part that is interposed between the pressing part and the support part and generates a spring force. The spring force generation part is composed of a compression part that is compressed when the microstructure is clamped and a tension part that is pulled, and a connecting part that connects the compression part and the tension part. It is in.

A more preferable specific configuration example in the first aspect of the present invention is as follows.
(1) The pressing portion, the support portion, and the spring force generating portion are integrally formed of a single thin plate.
(2) In said (1), the said compression part and the said tension | pulling part are the shapes curved in multiple times within the plane of a thin plate.
(3) In the above (2), the pressing portion, the support portion, and the spring force generating portion are formed substantially flat and at the same height as the contact position of the stopper with the microstructure. It is installed.
(4) In the above (2), the compression part extends from the side opposite the contact surface of the pressing part and is connected to the center of the connection part, and the tension part extends from both ends of the connection part along the compression part. It must be formed of a pair of extending tension parts.
(5) In (4), the compression section is formed of a pair of compression sections, and the pair of compression sections and the pair of tension sections are provided symmetrically with respect to the center line.
(6) In (3), the spring is manufactured by combining lithography and etching from a single substantially flat stainless steel.
(7) In (1), the microstructure is formed of a rectangular block, has a magnetic head element for recording / reproducing data on a magnetic disk, and a plurality of the magnetic head elements are provided on a side surface on the stopper side. And the stopper is also used as a pair of contact probes in contact with the electrode terminals.
(8) In (7), a contact probe different from the pair of contact probes is provided, and the another contact probe is elastically deformed and brought into contact with the electrode terminal when the slider is clamped.
(9) In the above (1), the stopper is formed of a pair of inclined surfaces that come into contact with corners on both sides of the stopper on the side of the microstructure and whose interval is narrowed in the direction in which the microstructure is pressed. That.
(10) In (9), the stopper is formed by the support portion.

  According to a second aspect of the present invention, a spring that abuts on one side of the microstructure and applies a spring force to the microstructure, and abuts on the other side of the microstructure and positions the microstructure A spring that generates a spring force that is interposed between the pressing portion that contacts the microstructure, a supporting portion, and the pressing portion and the supporting portion. In the clamp mechanism, the spring force generation unit includes a compression unit that is compressed when the microstructure is clamped, a tension unit that is pulled, and a coupling unit that connects the compression unit and the tension unit. It is to be composed of.

  In addition, a third aspect of the present invention for achieving the above-described another object includes a clamp mechanism that clamps a microstructure, and an inspection apparatus main body that supports the clamp mechanism, A spring that abuts on one side of the microstructure to apply spring force to the microstructure, a stopper that abuts on the other side of the microstructure and positions the microstructure, and the other side of the microstructure A plurality of contact probes that come into contact with the magnetic head element, the microstructure having a rectangular block shape, having a magnetic head element for recording / reproducing data of a magnetic disk, and on the side surface on the stopper side, the magnetic head element Each of the plurality of contact probes is in contact with and electrically connected to each of the plurality of electrode terminals, and the spring includes the microstructure. An inspection provided with a pressing part abutted on, a support part supported on the inspection apparatus main body side, and a spring force generation part that is interposed between the pressing part and the support part and generates a spring force In the apparatus, the stopper is formed by a pair of inclined surfaces that come into contact with corners on both side surfaces of the microstructure on the stopper side and whose interval is narrowed in a direction in which the microstructure is pressed.

  According to the inspection apparatus of the first aspect of the present invention and the clamp mechanism of the second aspect of the present invention, a spring force is sufficiently and reliably applied to the microstructure using a small spring and the microstructure is clamped. The amount of deformation of the spring when attaching to and detaching from can be ensured.

  Further, according to the inspection apparatus of the third aspect of the present invention, the positions of the contact probe and the electrode terminal formed on the slider can be accurately aligned.

  Hereinafter, a plurality of embodiments of the present invention will be described with reference to the drawings. The same reference numerals in the drawings of the respective embodiments indicate the same or equivalent.

(First embodiment)
A slider inspection apparatus according to a first embodiment of the present invention will be described with reference to FIGS.

  First, the entire slider inspection apparatus 50 of this embodiment will be described with reference to FIG. FIG. 1 is a perspective view of an inspection apparatus 50 according to the first embodiment of the present invention.

  The slider inspection apparatus 50 includes a clamp mechanism 8 that clamps a slider 7 (see FIG. 2) that is a microstructure, and an inspection apparatus main body 21 that supports the clamp mechanism 8.

  The inspection apparatus main body 21 has a configuration in which a coarse movement stage device 23, a fine movement stage device 25, a fixing jig 26, a suspension 27, a magnetic disk 28, and a magnetic disk rotation mechanism 29 are mounted on a pedestal 22.

  The fine movement stage device 25 is fixed on the table 24 of the coarse movement stage device 23. The fine movement stage device 25 is capable of a large stroke in the movement direction of the table 24 indicated by the arrow in FIG. 1 by the operation of the coarse movement table device 22. One side of a suspension 27 fixed via a fixing jig 26 is fixed to the fine movement stage device 25. A clamp mechanism 8 that clamps the slider 7 is mounted on the tip of the suspension 27. The position of the slider 7 clamped by the clamp mechanism 8 is precisely positioned on the magnetic disk 28 placed on the magnetic disk rotating mechanism 29 by the fine movement stage device 25. The suspension 27 fixes and supports the clamp mechanism 8 and applies a vertical load to the slider 7 with respect to the magnetic disk 28 in order to float the slider 7 on the magnetic disk 28.

  With this configuration, the inspection device 50 can inspect the characteristics of the slider 7 by floating the slider 7 while positioning the slider 7 on the rotating magnetic disk 28.

  Next, the clamp mechanism 8 and the slider 7 will be specifically described with reference to FIGS. 2 is a perspective view of the clamp mechanism 8 of FIG. 1, FIG. 3 is a side view of the clamp mechanism 8 of FIG. 2 as viewed from the direction A, FIG. 4 is a perspective view of the base 2 of FIG. FIG. 6 is a plan view of the spring 1 of FIG.

  As shown in FIGS. 2 and 3, the clamp mechanism 8 includes a spring 1, a base 2, and a probe unit 3. The spring 1 and the probe unit 3 are fixed on the base 2. The base 2 is fixed to the tip of the suspension 27.

  As shown in FIG. 4, the base 2 fixes and supports the slider mounting portion 12 that mounts the slider 7, the spring support portion 13 that fixes and supports one end of the spring 1, and the probe unit 3. The probe support part 30 is provided. The slider mounting portion 12 is formed of a rectangular thin plate as viewed from above, and the slider 7 is mounted on the flat upper surface thereof. The spring support portion 13 and the probe support portion 30 are disposed on the front side of the slider mounting portion 12. The upper surface of the probe support unit 30 is flush with the upper surface of the slider mounting unit 12. The spring support portion 13 includes a pair of spring support portions disposed on the left and right sides of the probe support portion 30. The spring support portion 13 has a spring mounting surface that is one step higher than the slider mounting portion 12 and the probe support portion 30. The spring support portion 13 is formed in an L shape when viewed from the side.

  As shown in FIG. 5, the slider 7 is formed of a rectangular block, and includes a magnetic head element (not shown) for recording / reproducing data on the magnetic disk, and a front surface 10 which is a probe side (stopper side) surface. And the electrode terminal 11 exposed to the surface. The electrode terminal 11 is composed of a plurality of electrode terminals, and these electrode terminals 11 are juxtaposed on the left and right at a position lower than the center of the slider 7 in the height direction. The electrode terminal 11 is a terminal connected to the magnetic head element.

  As shown in FIGS. 2 and 3, the slider 7 is mounted on the slider mounting portion 12, and its upper surface serves as a floating surface 9 for floating on the magnetic disk. In a state where the slider 7 is mounted on the slider mounting portion 12, each electrode terminal 11 and each contact probe 5, 6 of the probe unit 3 face each other and are electrically connected.

  The spring 1 abuts on one side of the slider 7 and applies a spring force to the slider 7. The spring 1 is formed substantially flat from a single thin plate. As shown in FIGS. 2, 3, and 5, the spring 1 is supported by a support portion 17 supported on the inspection apparatus main body side and a slider substrate 7. It consists of a pressing part 14 that contacts and presses, and a spring force generation part 15 that is interposed between the pressing part 14 and the support part 17 and generates a spring force when the pressing part 14 is displaced. By forming the spring 1 substantially flat, the deformation direction of the spring force generating portion 15 and the pressing direction of the pressing portion 14 coincide with each other, and the slider 7 can be reliably clamped.

  The spring force generating part 15 is composed of a compressing part 18, a pulling part 19 and a connecting part 16, and is formed substantially flat. The connecting portion 16 is provided between one end of the compressing portion 18 and one end of the pulling portion 19. The pressing portion 14 is connected to the other end of the compression portion 18, and the support portion 17 is connected to the other end of the pulling portion 19. Specifically, the compression portion 18 is formed of a pair of compression portions that extend from the side of the pressing portion opposite to the contact surface and is connected to the center of the connecting portion 16, and the pulling portion 19 is formed from both ends of the connecting portion 16. Are formed by a pair of pulling portions extending along the line. According to such a configuration, the spring force can be sufficiently and reliably applied to the slider substrate 7 using the small spring 1 and the amount of deformation of the spring 1 when the slider substrate 7 is attached to and detached from the clamp mechanism 8 can be ensured. it can.

  The support portion 17 is fixed to the spring support portion 13 of the base 2 using, for example, an adhesive. Since the spring support portion 13 of the base 2 and the slider mounting portion 12 have a step, as shown in FIGS. 2 and 3, the portions 14 and 15 except the support portion 17 of the spring 1 and the slider contact of the base 2 are arranged. A gap can be provided between the details 12. Therefore, when applying a load to the pressing portion 14 of the spring 1, it can be deformed without contacting the slider mounting portion 12 of the base 2. The pressing portion 14 is brought into contact with the side surface opposite to the side surface on which the electrode terminal 11 of the slider 7 is formed, and applies a spring force to the slider 7. The pressing height of the pressing portion 14 coincides with the height at which the contact probes 5 and 6 are in contact with the electrode terminal 11. Thereby, the slider 7 can be clamped reliably.

  The compression part 18 and the tension part 19 of the spring 1 are formed in a U-shaped shape a plurality of times in a plane, and can be made to act as a spring by being deformed when a load is applied. Here, when a load is applied to the pressing portion 14 in the direction of the arrow B shown in FIG. 6, the compression portion 18 is deformed in the contracting direction between the pressing portion 14 and the connecting portion 16, and at the same time, the pulling portion 19 is It deforms in a direction extending between the support portion 17 and the connecting portion 16. Furthermore, since the width D of the connecting portion 16 is wider than the width C of the compressing portion 18 and the width E of the pulling portion 19, the load applied from the pressing portion 14 to the connecting portion 16 via the compressing portion 18 is applied. The load in the direction of extending the pulling portion 19 can be obtained.

  As shown in FIG. 6, the length in the planar direction of the back surface, which is the surface of the pressing portion 14 that comes into contact with the slider 7, is formed to be longer than the width of the slider 7. A load can be applied in the direction of arrow B by using a jig or the like in both end regions where the slider 7 does not directly contact.

  The spring 1 is integrally formed using a single flat thin plate. Even if the spring 1 has a fine and complicated shape as described above, for example, the spring 1 can be easily manufactured by a combination of lithography and etching. Can be manufactured. Further, a general spring material can be used, and stainless steel is used in this embodiment.

  The slider 7 must be floated on the rotating magnetic disk at the time of inspection. For this reason, as shown in FIG. 2, the spring 1 is a plate (for example, 0.2 mm or less) thinner than the slider 7 so that the height position of the spring 1 is lower than the height position of the flying surface 9 of the slider. It is formed using. On the other hand, if the spring 1 is too thin, when the spring 1 is deformed, the spring 1 may be warped in the direction of the air bearing surface 9 of the slider 7 or the slider mounting portion 12. In order to prevent this, the thickness of the spring 1 is preferably 0.05 mm or more. For these reasons, the thickness of the spring 1 is preferably in the range of 0.05 mm to 0.2 mm. In the present embodiment, a thin plate having a thickness of 0.1 mm is used.

  As shown in FIG. 2, the probe unit 3 has an insulating sheet 4 (for example, a flexible printed wiring board) having a metal wiring layer formed on the surface thereof, a contact probe 5 imparted with a spring property, and no spring property. A contact probe 6. These two types of contact probes 5 and 6 are respectively connected on the wiring layer of the insulating sheet 4 and arranged in parallel so as to face the electrode terminals 11 of the slider 7. Here, the total number of contact probes 5 and 6 is the same as the number of electrode terminals 11 of the slider 7 to be inspected.

  Among the contact probes 5 and 6 arranged on the insulating sheet 4, two contact probes 6 having no spring property are arranged at both ends, and a spring property is imparted to a central portion sandwiched between them. A plurality of contact probes 5 are arranged. Furthermore, the tip of the contact probe 5 to which springiness is imparted, that is, the portion in contact with the electrode terminal 11 of the slider 7 is closer to the slider 7 with respect to the position of the tip of the contact probe 6 disposed at both ends. Are arranged as follows. With this configuration, the pair of contact probes 6 arranged at both ends can be positioned by supporting the slider 7 against the spring force, that is, can function as a stopper. Further, the contact probe 5 provided with the spring property disposed at the center portion has its tip end closer to the slider 7 than the tip end of the contact probe 6, and therefore elastically deforms when the slider 7 is clamped. As a result, it is brought into contact with the electrode terminal 11, and variations in the arrangement of the contact probes 5 and 6 can be absorbed.

  In a state where the spring 1 is not deformed before the slider 7 is mounted, the position of the spring 1 and the probe unit 3 on the base 2 is in contact with the surface of the pressing portion 14 of the spring 1 that contacts the side surface of the slider. The length between the front end of the probe 6 is set to be shorter than the length of the slider 7. Here, when a load is applied to the pressing portion 14 in the direction of the arrow B shown in FIG. 6, a surface that contacts the side surface of the slider of the pressing portion 14 due to expansion and contraction of the compression portion 18 and the pulling portion 19 of the spring 1, and a contact probe 6 is longer than the length of the slider 7 so that the slider 7 can be mounted. When the load in the arrow B direction is released after the slider 7 is mounted, the slider 7 is clamped between the contact probe 6 and the pressing portion 14 of the spring 1 by the spring force. The total contact load of the slider 7 on the electrode terminal 11 by the contact probe 5 is designed to be smaller than the spring force.

  Note that the configuration of the contact probes 5 and 6 is not limited to that shown here, and for example, a wiring layer obtained by removing the insulating sheet at the tip of the flexible printed wiring board can be used as the contact probe. When such a contact probe is used, blocks or the like are arranged on the contact probes at both ends, and fixed on the insulating sheet so as to function as a stopper.

  As described above, by forming the compression portion 18 and the tension portion 19 of the spring 1 via the connecting portion 16, a small amount of deformation and a small spring 1 can be realized. Specifically, it is possible to obtain a deformation amount of about 0.05 mm. By using such a spring 1, a clamping mechanism 8 for clamping the slider 7 can be realized.

  According to this embodiment, a clamp mechanism that is small in size and easy to align when the slider is mounted can be provided, so that the characteristics of the slider alone can be accurately inspected. Accordingly, it is possible to eliminate waste such as suspension component costs and assembly costs.

  In the present embodiment, the case where the slider 7 is used as the microstructure has been described. However, a microstructure other than the slider 7 such as an LED chip can be clamped. The LED chip has a light emitting element, an electrode, and the like formed on the chip surface. When carrying the chip, it is necessary to clamp the LED chip so as not to be damaged. Since the clamping mechanism of this embodiment can be clamped by contacting the side surface of the chip, it can be clamped without scratching the surface of the chip. When the clamp mechanism 8 is used to transport the tip, the probe unit 3 is not necessary, so the clamp mechanism 8 may be only the spring 1 and the base 2, and the tip is the pressing portion 14 and the support portion 17 of the spring 1. Clamped between.

(Second Embodiment)
Next, a second embodiment of the present invention will be described with reference to FIG. FIG. 7 is a plan view of a clamp mechanism used in the slider inspection apparatus according to the second embodiment of the present invention. The second embodiment is different from the first embodiment in the points described below, and the other points are basically the same as those in the first embodiment, and thus redundant description is omitted.

  In the second embodiment, a stopper portion 20 is provided on a part of the support portion 17 of the spring 1, and the stopper portion 20 is brought into contact with both side portions of the surface 10 of the slider 7. As a result, the contact probes 5 and 6 arranged in the probe unit 3 can all be contact probes provided with springiness.

  Further, in the second embodiment, the stopper portion 20 is formed on the spring 1 in order to facilitate the alignment of the electrode terminal 11 of the slider 7 with the contact probe 5 and the contact probe 6. The stopper portion 20 is composed of a pair of left and right objects with respect to the central axis F of the clamp mechanism 8 shown in FIG. 7, and the distance between the stopper portions 20 is the direction from the pressing portion 14 of the spring 1 to the probe unit 3. It is getting shorter. When a load is applied to the pressing portion 14 of the spring 1 using a jig, the spring 1 is deformed and the slider 7 is mounted on the base 2, and the load applied to the pressing portion 14 is released, the side surface of the slider 7 is When pressed by the pressing portion 14, the slider 7 moves in the direction of the probe unit 3. At this time, when the center axis position of the slider 7 in the same direction as the center axis F is shifted laterally with respect to the center axis F of the clamp mechanism 8, the corner portion of the slider 7 abuts against the stopper portion 20. . Therefore, along the stopper portion 20, the slider 7 moves in the direction of the probe unit 3 and also moves in the direction perpendicular to the central axis F. By providing such a stopper portion 20, the slider 7 can be clamped to the clamp mechanism 8, and at the same time, alignment can be easily performed.

  The shape of the stopper portion 20 is not limited to the curved shape as shown in FIG. 7, and may be a linear shape. Moreover, the stopper part 20 is not restricted to what was shown in this 2nd Embodiment, For example, it can also form with the spring 1 and another member.

It is a perspective view of the inspection apparatus of a 1st embodiment of the present invention. It is a perspective view of the clamp mechanism of FIG. It is the side view which looked at the clamp mechanism of FIG. 2 from the A direction. It is a perspective view of the base of FIG. 2 is a perspective view of the slider. It is a top view of the spring of FIG. It is a top view of the clamp mechanism used for the slider test | inspection apparatus of 2nd Embodiment of this invention.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Spring, 2 ... Base, 3 ... Probe unit, 4 ... Insulation sheet, 5 ... Contact probe, 6 ... Contact probe (stopper), 7 ... Slider (micro structure), 8 ... Clamp mechanism, 9 ... Air bearing surface ( Upper surface), 10 ... Front surface, 11 ... Electrode terminal, 12 ... Slider mounting portion, 13 ... Spring support portion, 14 ... Pressing portion, 15 ... Spring force generating portion, 16 ... Connection portion, 17 ... Support portion, 18 ... Compression portion , 19 ... Pulling part, 20 ... Stopper part, 21 ... Inspection device main body, 22 ... Base, 23 ... Coarse movement stage device, 24 ... Table, 25 ... Fine movement stage device, 26 ... Fixing jig, 27 ... Suspension, 28 ... Magnetic disk, 29... Magnetic disk rotation mechanism, 30.

Claims (13)

A clamp mechanism that clamps the microstructure, and an inspection apparatus main body that supports the clamp mechanism,
The clamp mechanism includes a spring that abuts on one side of the microstructure and applies a spring force to the microstructure, and a stopper that abuts on the other side of the microstructure and positions the microstructure. ,
The spring is interposed between the pressing portion that comes into contact with the microstructure, the support portion supported on the inspection apparatus main body side, and the pressing portion and the support portion, and generates a spring force. In an inspection apparatus provided with a force generator,
The spring force generation part is composed of a compression part that is compressed when the microstructure is clamped and a tension part that is pulled, and a connecting part that connects the compression part and the tension part. Inspection equipment.   The inspection apparatus according to claim 1, wherein the pressing portion, the support portion, and the spring force generation portion are integrally formed from a single thin plate.   3. The inspection apparatus according to claim 2, wherein the compression part and the tension part have a shape that is bent a plurality of times in the plane of the thin plate.   In Claim 3, The said press part, the said support part, and the said spring force generation | occurrence | production part are formed substantially flat, and are installed in the same height as the contact position to the said microstructure of the said stopper. Inspection apparatus characterized by that.   4. The compression portion according to claim 3, wherein the compression portion extends from a side opposite to the abutting surface of the pressing portion and is connected to the center of the connection portion, and the tension portion extends from both ends of the connection portion along the compression portion. An inspection apparatus characterized by being formed of a portion.   6. The inspection apparatus according to claim 5, wherein the compression section is formed of a pair of compression sections, and the pair of compression sections and the pair of pulling sections are provided symmetrically with respect to a center line thereof.   5. The inspection apparatus according to claim 4, wherein the spring is manufactured by combining lithography and etching from a single substantially flat stainless steel.   3. The micro structure according to claim 2, wherein the microstructure is formed of a rectangular block, has a magnetic head element for recording / reproducing data on a magnetic disk, and has a plurality of electrode terminals of the magnetic head element on a side surface on the stopper side. An inspection apparatus comprising: a slider having a pair of contact probes that abut against the electrode terminals.   9. The inspection according to claim 8, further comprising a contact probe different from the pair of contact probes, wherein the another contact probe is elastically deformed and brought into contact with the electrode terminal when a slider is clamped. apparatus.   3. The stopper according to claim 2, wherein the stopper is formed of a pair of inclined surfaces that come into contact with corners on both side surfaces of the microstructure on the stopper side and whose interval is narrowed in a direction in which the microstructure is pressed. Characteristic inspection device.   The inspection apparatus according to claim 10, wherein the stopper is formed by the support portion. A spring that abuts on one side of the microstructure and applies a spring force to the microstructure, and a stopper that abuts on the other side of the microstructure and positions the microstructure.
The spring includes a pressing portion that comes into contact with the microstructure, a support portion, and a clamp mechanism that is interposed between the pressing portion and the support portion and generates a spring force. In
The spring force generation part is composed of a compression part that is compressed when the microstructure is clamped and a tension part that is pulled, and a connecting part that connects the compression part and the tension part. And clamping mechanism. A clamp mechanism that clamps the microstructure, and an inspection apparatus main body that supports the clamp mechanism,
The clamp mechanism includes a spring that abuts on one side of the microstructure and applies a spring force to the microstructure, a stopper that abuts on the other side of the microstructure and positions the microstructure, A plurality of contact probes that contact the other side of the microstructure,
The microstructure has a rectangular block shape, and includes a magnetic head element for recording / reproducing data on a magnetic disk, and a slider having a plurality of electrode terminals of the magnetic head element on a side surface on the stopper side. ,
Each of the plurality of contact probes is in contact with and electrically connected to each of the plurality of electrode terminals,
The spring is interposed between the pressing portion that comes into contact with the microstructure, the support portion supported on the inspection apparatus main body side, and the pressing portion and the support portion, and generates a spring force. In an inspection apparatus provided with a force generator,
The stopper is formed of a pair of inclined surfaces that come into contact with corners on both side surfaces of the microstructure on the stopper side and whose interval is narrowed in a direction in which the microstructure is pressed. .

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