JP2009225512A - Drive unit and its manufacturing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide drive unit which reduces the amount of the deformation a movable part caused by a repulsion force which is generated in a magnet group of a Halbach array. <P>SOLUTION: The drive unit comprises the magnet group 9 aligned in the Halbach array, and drives the movable part 1 to which the magnet group 9 is attached, by relatively moving the magnet group 9 and an opposing coil group 7. The drive unit also comprises a first holding member 2, composed of a non-magnetic material which holds the magnet group 9 from the coil-group side. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a driving device and a manufacturing method thereof. The present invention also relates to an exposure apparatus having a driving device and a device manufacturing method.

  A stage (movable part) used for driving and positioning an original plate (mask or reticle) or substrate (wafer, liquid crystal panel, etc.) in an exposure apparatus is required to have high-precision positioning and high-speed movement. Further, high surface accuracy is required for the stage of the exposure apparatus in order to maintain high imaging performance.

As an actuator for such a stage, Patent Document 1 discloses a linear motor that generates a control force by an action between a coil group and a magnet group arranged in a plane. Patent Document 1 discloses a linear motor in which a magnet group bonded to the back surface of a stage with an adhesive forms a Halbach array in two directions by a main pole magnet and an auxiliary pole magnet, and an exposure apparatus having the linear motor.
JP 2006-136154 A

  However, on the side of the magnet group facing the coil group, a repulsive force is generated between the main pole magnet and the complementary pole magnet adjacent to each other, and the main pole magnet receives a force in the direction of protruding in the vertical direction, and the auxiliary pole magnet Receives force in the direction away from the main pole magnet in the horizontal direction. Since the stiffness of the adhesive is not infinite, if the magnet is slightly displaced, these forces will be transmitted to the stage, causing a curved deformation. Due to this curved deformation, the stage cannot maintain the surface accuracy, and the imaging performance of the exposure apparatus deteriorates.

  An object of the present invention is to provide a driving device that reduces the amount of deformation of a movable part due to a repulsive force generated in a magnet group in a Halbach array.

  A driving apparatus according to an aspect of the present invention is a driving apparatus that drives a movable portion to which the magnet group is attached by relatively moving the magnet group and the coil group, and the magnet group includes a plurality of first magnets. One magnet and a plurality of second magnets, wherein the plurality of first magnets and the plurality of second magnets form a Halbach array, and the first magnet is in a direction perpendicular to the direction in which the Halbach array is arrayed Having a magnetization direction, the second magnet having a magnetization direction in a direction arranged as the Halbach arrangement, and the driving device includes at least two adjacent first magnets in the direction in which the first magnet is arranged. It has 1st holding member which consists of a nonmagnetic material and is hold | maintained from the said coil group side, It is characterized by the above-mentioned.

  The manufacturing method of the drive device as another aspect of the present invention is a drive device that drives a movable part to which the magnet group is attached by relatively moving the magnet group and the coil group, and the magnet group Has a plurality of first magnets and a plurality of second magnets, wherein the plurality of first magnets and the plurality of second magnets form a Halbach array, and the first magnets are arranged in the Halbach array. Having a magnetization direction in a vertical direction, the second magnet having a magnetization direction in a direction arranged as the Halbach arrangement, and at least two adjacent first magnets in the direction in which the first magnet is arranged, A method of manufacturing a drive device further comprising a first holding member made of a nonmagnetic material held from a coil group side, the step of fixing the movable part on a surface plate, and the magnet group as the fixed part of the movable part. Contrary to the board A step of fixing to the magnet side, a step of applying a force to the magnet group in a direction perpendicular to the magnetization direction of the first magnet, and the first holding member from the side opposite to the movable part of the magnet group. A step of fixing to the group; a step of releasing the force; and a step of separating the movable portion from the surface plate.

  ADVANTAGE OF THE INVENTION According to this invention, the drive device which reduces the deformation amount of a movable part by the repulsive force which generate | occur | produces in the magnet group of a Halbach array can be provided.

  Embodiments of the present invention will be described below with reference to the accompanying drawings.

  FIG. 1 is a cross-sectional view of the linear motor (drive device) of the first embodiment. In FIG. 1, 1 is a stage main body (movable part), 2a is a holding member (first holding member), 3 is a supplementary magnet (second magnet) of a magnet group, and 4 is a main pole magnet (of a magnet group). First magnet), 6 is a stator base, 7 is a coil group, and 9 is a magnet group. The magnet group 9 forms a two-dimensional Halbach array having a Halbach array in two directions. The linear motor drives the stage body 1 to which the magnet group 9 is attached by relatively moving the magnet group 9 and the coil group 7 facing the magnet group 9. The linear motor can drive the stage body 1 even if the arrangement of the coil group 7 and the magnet group 9 is reversed.

  The magnet group 9 is attached to the bottom surface 1 a facing the coil group of the stage body 1. Conventionally, the magnet group 9 is not directly bonded to the bottom surface 1a of the stage main body 1 and is provided on the arm portion protruding outward from the side surface 1c of the stage main body 1. However, in this embodiment, the magnet group 9 is provided on the stage main body 1. The linear motor is reduced in size by being bonded and fixed to the bottom surface 1a.

  FIG. 2 is a plan view of FIG. 1 taken along line II, and is a plan view of the magnet group 9 and the stage body 1 as viewed from below in the Z direction. In FIG. 2, reference numeral 4 and reference numeral 5 are main pole magnets of the magnet group 9, which are permanent magnets magnetized in the Z direction. The main pole magnet 4 and the main pole magnet 5 have opposite magnetization directions (anti-parallel). These main pole magnets 4 and 5 are alternately and periodically arranged, and an interpolating magnet 3 indicated by reference symbol c is disposed therebetween. In FIG. 2, the stage body 1 and the magnet group 9 are square shapes having the same size on the XY plane, and one side is 11 t√2. In the magnet group 9, the main pole magnets 4, 5 and the auxiliary pole magnet 3 have the same square shape with one side t, and the direction in which the side of each magnet extends forms 45 ° with the X axis or the Y axis. . However, the shape of the magnet is not limited to a square, and includes other polygonal shapes such as a hexagon and an octagon.

  First, the Halbach array will be described with reference to FIG. 3A is a plan view of a part of the magnet group 9 taken out, and FIG. 3B is a cross-sectional view taken along the line II-II in FIG. The Halbach array is known as an array along the line II-II in FIG. 3A (or an array shown in FIG. 3B). In the Halbach array, the magnet group 9 includes a plurality of main pole magnets 4 and 5 and a plurality of auxiliary pole magnets 3.

  In FIG. 3A, considering the X′Y ′ axis obtained by rotating the XY axis 45 ° counterclockwise, the main pole magnets 4 and 5 are arranged in a Halbach array direction (shown in FIG. 3A). It has a magnetization direction in a direction (Z-axis direction) perpendicular to the X′-axis direction or −X′-axis direction). The auxiliary pole magnet 3 has a magnetization direction in the direction in which the main pole magnets 4 and 5 are arranged. In the X′-axis direction or the −X′-axis direction shown in FIG. 3A, the main pole magnet and the auxiliary pole magnet are alternately arranged. Further, the magnetization directions of the two main pole magnets 4 and 5 adjacent to each other via the auxiliary magnet 3 in the X′-axis direction or the −X′-axis direction shown in FIG. 3A are opposite (antiparallel). Further, in FIG. 3A, a common reference c is given, but actually, the auxiliary pole magnet 3 is classified into four types of auxiliary pole magnets 3a to 3d depending on the magnetization direction.

  The auxiliary pole magnet 3a has a magnetization direction in the X′-axis direction, the auxiliary pole magnet 3b has a magnetization direction in the Y′-axis direction, and the auxiliary pole magnet 3c has a magnetization direction in the −X′-axis direction. The polar magnet 3d has a magnetization direction in the −Y ′ axis direction. Then, the magnetization directions of two auxiliary magnets 3 (complementary magnets 3a and 3c) adjacent to each other via the main magnet in the X′-axis direction or the −X′-axis direction shown in FIG. 3A are opposite to each other. . Further, the magnetization directions of the auxiliary pole magnets 3b and 3d adjacent to the main pole magnet 4 in the Y-axis direction are also opposite to each other, and the auxiliary pole magnet 3 around the main pole magnet 4 is the main pole in both the X-axis direction and the Y-axis direction. The direction of magnetization is away from the magnet 4. Further, the magnetization directions of the auxiliary pole magnets 3b and 3d adjacent to the main pole magnet 5 in the Y-axis direction are also opposite to each other, and the auxiliary pole magnet 3 around the main pole magnet 5 is the main pole in both the X-axis direction and the Y-axis direction. It has a magnetization direction in the direction toward the magnet 4.

  FIG. 2 shows a two-dimensional Halbach array. The two-dimensional Halbach array is an array having a Halbach array in two directions. In FIG. 2, considering the X′Y ′ axis obtained by rotating the XY axis 45 ° counterclockwise, the magnet group 9 forms a Halbach array in the X ′ axis direction and the Y ′ axis direction. In FIG. 2, the common reference c is given, but actually, the auxiliary pole magnet 3 is classified into four types of auxiliary pole magnets 3a to 3d depending on the magnetization direction, and the arrangement is shown in FIG. ).

  In the coil group 7, long coils are spread in two layers in a planar shape. The upper layer coil 8a and the lower layer coil 8b are orthogonal to each other. Further, the coil pitch CP (the distance from the center of the coil to the center of the adjacent coil) shown in FIG. 1 is 1.5 times the magnetic pole pitch MP shown in FIG. The length of the coil is determined in accordance with the movable stroke of the stage body, and the required number of coils is also determined.

  As described above, FIG. 3A shows the magnetization direction (magnetization direction) by extracting a part of the main pole magnets 4 and 5 and the auxiliary pole magnet 3 of the magnet group 9 shown in FIG. . Here, the Halbach array has the following problems. That is, in FIG. 3B, in the portion 10 on the stage main body side where the auxiliary pole magnet and the main pole magnet are adjacent, different polarities are adjacent between the auxiliary pole magnet and the main pole magnet, and they are attracted to each other. . On the other hand, in the portion 11 on the opposite coil group side, the same poles are adjacent to each other and repel each other. Due to the attractive and repulsive characteristics of the magnet, there is a problem that when the portion 10 is bonded and fixed to the stage body 1 as in the prior art, the stage body 1 is deformed into a downwardly convex shape. This is because the force acts on the portion 11 that is separated from the portion 10 that is the bonding portion by the height of the magnet, and is applied to the stage body 1 as a moment.

  Therefore, means for reducing the influence of the repulsive force generated from the magnet group 9 is necessary to prevent the stage body 1 from being deformed. In particular, when the magnet group 9 is provided on the bottom surface 1a of the stage body 1 as in this embodiment, the influence of the repulsive force generated from the magnet group 9 becomes more remarkable. In the present embodiment, a holding member 2a made of a nonmagnetic material that holds at least two adjacent main pole magnets from the coil group side in the direction in which the main pole magnets 4 are arranged as a repulsive force reducing means is provided. The nonmagnetic material is, for example, a resin.

  The holding member 2 a is configured as a plate-like member that covers the magnet group 9. Thereby, the influence which the repulsive force exerts on the stage main body 1 can be reduced more than covering a part of the magnet group 9. The holding member 2a is bonded and fixed to the bottom surface 9a of the magnet group 9 on the coil group side with an adhesive, but the fixing means for the holding member 2a is not limited.

  Hereinafter, a method for manufacturing the linear motor shown in FIG. 1 will be described with reference to FIGS. 4 and 5. FIG. 4 is a flowchart for explaining a method of manufacturing a linear motor. In FIG. 4, “S” represents a step.

  First, the stage body 1 is turned upside down to fix the stage body 1 on the surface plate (S31). The surface plate 12 has a sufficient thickness and the rigidity in the bending direction is very large. The upper surface 12a of the surface plate 12 and the upper surface (lower surface in FIG. 4) 1b of the stage main body 1 are finished with high accuracy and are in close contact with each other. In this state, the stage body 1 is preferably bolted to the surface plate 12.

  Next, the magnet group 9 is fixed to the bottom surface (upper surface in FIG. 4) 1a opposite to the surface plate 12 of the stage body 1 with an adhesive (S32). At this time, the stage main body 1 tends to be deformed by the above-described force, but the deformation is suppressed as much as possible because it is fixed in close contact with the surface plate 12.

  In order to further reduce the deformation, a force F is applied to the magnet group 9 in the horizontal direction (direction perpendicular to the Z-axis direction) (S33). The force F is a force having the same magnitude in opposite directions. For example, the magnet abutting portion can be made non-magnetic, and the abutting portion can be pushed in the horizontal direction using a feed screw mechanism to apply a horizontal force F. The horizontal direction may be the X ′ direction and the −X ′ direction, the Y ′ direction and the −Y ′ direction, the X direction and the −X direction, or the Y direction and the −Y direction.

  Next, the holding member 2 is fixed to the magnet group 9 on the bottom surface 9a opposite to the stage body 1 of the magnet group 9 with an adhesive (S34). By providing the holding member 2 in the very vicinity of the portion 11 where the force by the magnet group 9 is large, the force of the magnet group 9 can be suppressed by the tension of the holding member 2. This state is shown in FIG.

  Thereafter, the horizontal force F is released (S35). Even when the horizontal force F is released, the force of the magnet group 9 can be suppressed by the tension of the holding member 2. Next, the stage body 1 is separated from the surface plate 12 (S36). Even after the stage body 1 is separated from the surface plate 12, the holding member 2 can greatly reduce the deformation of the stage body 1 due to the force of the magnet group 9. Thereafter, the stage main body 1, the magnet group 9, and the holding member 2 separated from the surface plate 12 are arranged with respect to the coil group formed in a separate process (S37).

  In the present embodiment, the magnetization direction of the auxiliary pole magnet is orthogonal to the magnetization direction of the main pole magnet, but both may have an angle. That is, the holding member 2 can be used as long as it has an arrangement in which a repulsive force is generated between the main pole magnet and the auxiliary pole magnet.

  FIG. 6 is a cross-sectional view of a main part of the linear motor according to the second embodiment. The linear motor of this embodiment is different from the linear motor of Embodiment 1 in that a holding member (second holding member) 13 that holds the magnet group 9 is provided between the stage body 1 and the magnet group 9. The holding member 13 is a plate-like member that holds the magnet group 9 from the side opposite to the coil group 7 or the holding member 2 and is made of a nonmagnetic material. The holding member 13 functions as a means for reducing the repulsive force of the magnet group 9 together with the holding member 2, but also has an effect of facilitating the manufacture and maintenance of the linear motor, as will be described below.

  A method for manufacturing the linear motor shown in FIG. 6 will be described below with reference to FIGS. FIG. 7 is a flowchart for explaining a method of manufacturing a linear motor. In FIG. 7, “S” represents a step.

  First, the upper surface 13a of the holding member 13 is fixed to the upper surface 12a of the surface plate 12 (S41). At this time, the holding member 13 is bolted to the surface plate 12. It is preferable that the bolt fastening interval is small. Next, the magnet group 9 is fixed to the bottom surface 13b of the holding member 13 on the side opposite to the surface plate 12 with an adhesive (S42). At this time, the holding member 13 tends to be deformed by the above-described force, but the deformation is suppressed as much as possible because the holding member 13 is fixed in close contact with the surface plate 12.

  In order to further reduce the deformation, a force F is applied to the magnet group 9 in the horizontal direction (direction perpendicular to the Z-axis direction) (S43). The force F is a force having the same magnitude in opposite directions. For example, the magnet abutting portion can be made non-magnetic, and the abutting portion can be pushed in the horizontal direction using a feed screw mechanism to apply a horizontal force F. The horizontal direction may be the X ′ direction, the −X ′ direction, the Y ′ direction, and the −Y ′ direction, or the X direction, the −X direction, the Y direction, and the −Y direction. Since the holding member 13 is a thin plate, is bolted to the surface plate 12, and is further applied with a horizontal force F, the deformation of the holding member 13 is very small.

  Next, the holding member 2 is fixed to the magnet group 9 on the bottom surface 9a opposite to the holding member 13 of the magnet group 9 with an adhesive (S44). By providing the holding member 2 in the very vicinity of the portion 11 where the force by the magnet group 9 is large, the force of the magnet group 9 can be suppressed by the tension of the holding members 2 and 13. This state is shown in FIG.

  Thereafter, the horizontal force F is released (S45). Even when the horizontal force F is released, the force of the magnet group 9 can be suppressed by the tension of the holding member 2. Next, the holding member 13 is separated from the surface plate 12 (S46). Even after the holding member 13 is separated from the surface plate 12, the holding member 2 can greatly reduce the deformation of the holding member 13 caused by the force of the magnet group 9. Next, the holding member 13 is fixed to the stage body 1 formed in a separate process by bolt fastening (S47). Thus, the holding member 13 is fixed to the stage main body 1 so as to be separable. In the present embodiment, the holding member 13, the magnet group 9, and the holding member 2 can be used as a single unit, and when either the stage body 1 or the magnet group 9 has a failure, the unit that has failed. Since it can be replaced only, it is excellent in maintainability and economy. In addition, other processing and assembly of the stage main body 1 can be performed in parallel with the assembly of the unit including the holding member 13, the magnet group 9, and the holding member 2, so that the manufacturing efficiency is increased. Then, the stage main body 1, the magnet group 9, and the holding member 2 separated from the surface plate 12 are arranged with respect to the coil group formed in a separate process (S48).

  FIG. 9 is a plan view illustrating a relationship between the holding member 2c and the magnet group 9 according to the third embodiment. FIG. 9 shows the arrangement of the magnet group 9 under the holding member 2c. The actual holding member 2 does not need to be transparent. As described above, the holding member 2c opposes a large force from the magnet group 9 as a tension. In order to reduce the mass of the stage body 1, the holding member 2c is preferably made of a light material.

  In this embodiment, a fiber reinforced composite material is used for the holding member 2c. The fiber reinforced composite material may be, for example, a GFRP (Glass Fiber Reinforced Plastics) material using glass fibers or a CFRP (Carbon Fiber Reinforced Plastics) material using carbon fibers. Further, in FIG. 9, when an axis obtained by rotating the XY axis by 45 ° counterclockwise is an X′Y ′ axis, the force acting between the main pole magnet and the auxiliary pole magnet is different from that of the main pole magnet in FIG. , That is, the X′-axis direction and the Y′-axis direction. As shown in FIG. 9, the fiber direction is a direction that intersects at 90 degrees in the plane, and coincides with the direction in which the repulsive force between the magnets is generated.

  There are the following two methods for adjusting the fiber direction to the direction intersecting 90 degrees in the plane in the production of the fiber reinforcement. One is a so-called cloth material in which fibers are woven so as to intersect at 90 degrees to form a single layer. The second method is a method in which a single layer composed of unidirectional fibers is formed, and two or more layers are rotated 90 degrees from each other and overlapped to form a single sheet. In the present embodiment, it is sufficient that there is an arrangement direction of the main pole magnets and a fiber direction regardless of the production method. Although there may be a slight shift in the fiber direction due to the production of the fiber reinforced composite material, such a shift is not a problem. Thus, by making the fiber direction with high strength coincide with the tension direction of the holding member 2c, the holding member 2c can be formed in a thin plate shape, and the weight can be reduced. A similar configuration can be used for the holding member 13.

  FIG. 10 is a schematic plan view of the holding member 2d according to the fourth embodiment. It may be expensive to manufacture a large plate using a CFRP material for the holding member 2d. In this case, the holding member 2d may be divided into two like 2d-1 and 2d-2 as shown in FIG. The dividing line 2d-3 is not limited to the horizontal line shown in FIG. In order to increase the reliability and suppress deformation, it is preferable that at least the two main pole magnets of different magnetic poles are covered. In addition, it is desirable that the number of divisions be as small as possible to make up a large plate. If the number of divisions is increased, the area exposed to the adhesive on the surface when the holding member 2 is bonded to the magnet group 9 tends to increase. Since chemical degassing from the adhesive may adversely affect the projection optical system of the exposure apparatus, it is preferable to reduce the exposed area of the adhesive.

  Fig.11 (a) is a schematic plan view of the magnet group of Example 5, and also shows the magnetization direction of each magnet. The magnetization directions of the main pole magnets 4 and 5 are perpendicular to the paper surface, and the magnetization direction of the auxiliary pole magnet 3 is a horizontal direction. FIG. 11B is a schematic plan view of the holding member 2e corresponding to this, and shows the fiber direction of the holding member 2e. The fiber direction of the holding member 2 e is the horizontal direction, similar to the magnetization direction of the auxiliary pole magnet 3. This embodiment uses a one-dimensional Halbach array instead of a two-dimensional Halbach array for the magnet group. In this case, since the repulsive force between the magnets is generated in only one direction, the fiber direction of the holding member 2e may be one direction (horizontal direction) as shown in FIG.

  FIG. 12 shows an exposure apparatus in which the linear motor is applied to an original or a substrate stage. The exposure apparatus illuminates the original M with the illumination optical system using light from the light source, and projects the diffracted light from the pattern of the original M onto the substrate W via the projection optical system 56. An illumination device 52 includes a light source and an illumination optical system. The exposure apparatus of this embodiment exposes the original M and the substrate W by synchronously driving them by the original stage 54 and the substrate stage 58 in a step-and-scan manner. The original stage 54 is positioned by mounting the original. The substrate stage 58 is mounted and positioned. The linear motor can be applied to the original stage 54 or the substrate stage 58. In another embodiment, the exposure apparatus exposes the original pattern onto the substrate W by a step-and-repeat method. In this case, the linear motor can be applied to the substrate stage.

  A device (semiconductor integrated circuit element, liquid crystal display element, etc.) includes a step of exposing a substrate (wafer, glass plate, etc.) coated with a photosensitive agent using the exposure apparatus of any one of the embodiments described above, and the substrate It is manufactured by undergoing a development step and other known steps.

  The preferred embodiments of the present invention have been described above, but the present invention is not limited to these embodiments, and various modifications and changes can be made within the scope of the gist.

It is sectional drawing of the linear motor of Example 1 of this invention. It is a bottom view of the magnet group and stage main body of the linear motor shown in FIG. It is the top view and sectional drawing which show the magnetization direction of the magnet group of the linear motor shown in FIG. It is a flowchart for demonstrating the manufacturing method of the linear motor shown in FIG. It is sectional drawing for demonstrating the manufacturing method of the linear motor shown in FIG. It is sectional drawing of the principal part of the linear motor of Example 2 of this invention. It is a flowchart for demonstrating the manufacturing method of the linear motor shown in FIG. It is sectional drawing for demonstrating the manufacturing method of the linear motor shown in FIG. It is a bottom view of the magnet group in the state which permeate | transmitted the holding member of the linear motor of Example 3 of this invention. It is a schematic plan view of the holding member of Example 4 of the present invention. It is a figure which shows the magnetization direction of the holding member and magnet group of Example 5 of this invention. It is a block diagram of the exposure apparatus which has a drive device.

Explanation of symbols

1 Stage body (movable part)
2a, 2c, 2d, 2e Holding member (first holding member)
3 Supplementary magnet (second magnet)
4, 5 Main pole magnet (first magnet)
7 Coil group 9 Magnet group 12 Surface plate 13 Holding member (second holding member)
54 Original stage 56 Substrate stage

Claims (10)

A drive device for driving a movable part to which the magnet group is attached by relatively moving the magnet group and the coil group,
The magnet group includes a plurality of first magnets and a plurality of second magnets, the plurality of first magnets and the plurality of second magnets form a Halbach array, and the first magnets are arrayed as the Halbach array. The second magnet has a magnetization direction in a direction arranged as the Halbach array,
The drive device further includes a first holding member made of a nonmagnetic material, holding at least two adjacent first magnets from the coil group side in a direction in which the first magnets are arranged. apparatus.   The drive device according to claim 1, wherein the first holding member is a plate-like member that covers the magnet group.   The first holding member is made of a fiber reinforced composite material, and a direction in which the first magnet and the second magnet are arranged is a fiber direction of the fiber reinforced composite material. Drive device.   4. The driving device according to claim 1, further comprising a plate-like second holding member that holds the magnet group from a side opposite to the coil group and is made of a nonmagnetic material. 5. .   The drive device according to any one of claims 1 to 4, wherein the first magnet and the second magnet form a Halbach array in two directions.   6. The driving device according to claim 1, wherein the magnet group is attached to a bottom surface of the movable portion facing the coil group. An exposure apparatus that exposes a pattern of an original on a substrate using light from a light source,
A stage for mounting and positioning the substrate or the original plate;
An exposure apparatus comprising the stage according to any one of claims 1 to 6. Exposing the substrate using the exposure apparatus according to claim 7;
Developing the exposed substrate;
A device manufacturing method comprising: A drive device for driving a movable part to which the magnet group is attached by relatively moving the magnet group and the coil group,
The magnet group includes a plurality of first magnets and a plurality of second magnets, the plurality of first magnets and the plurality of second magnets form a Halbach array, and the first magnets are arrayed as the Halbach array. The second magnet has a magnetization direction in a direction arranged as the Halbach array,
A method of manufacturing a drive device that holds at least two adjacent first magnets from the coil group side in a direction in which the first magnets are arranged, and further includes a first holding member made of a nonmagnetic material,
Fixing the movable part on a surface plate;
Fixing the magnet group to the side of the movable part opposite to the surface plate;
Applying a force to the magnet group in a direction perpendicular to the magnetization direction of the first magnet;
Fixing the first holding member to the magnet group from the side opposite to the movable part of the magnet group;
Releasing the force;
Separating the movable part from the surface plate;
The manufacturing method of the drive device characterized by having. A drive device for driving a movable part to which the magnet group is attached by relatively moving the magnet group and the coil group,
The magnet group includes a plurality of first magnets and a plurality of second magnets, the plurality of first magnets and the plurality of second magnets form a Halbach array, and the first magnets are arrayed as the Halbach array. The second magnet has a magnetization direction in a direction arranged as the Halbach array,
A first holding member made of a non-magnetic material that holds at least two adjacent first magnets from the coil group side in a direction in which the first magnets are arranged;
A plate-like second holding member made of a non-magnetic material that holds the magnet group from the side opposite to the coil group;
A method for manufacturing a drive device further comprising:
Fixing the second holding member on a surface plate;
Fixing the magnet group to a side of the second holding member opposite to the surface plate;
Applying a force to the magnet group in a direction perpendicular to the magnetization direction of the first magnet;
Fixing the first holding member to the magnet group from the opposite side of the magnet group to the second holding member;
Releasing the force;
Separating the second holding member from the surface plate;
Fixing the second holding member to the movable part;
The manufacturing method of the drive device characterized by having.