JP2009218163A - Static eliminator with cleaning mechanism - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a static eliminator with a cleaning mechanism, which can effectively remove even a coating-like product adhering to an electrode needle. <P>SOLUTION: A cleaning part 63a has polishing films 631 and 632 arranged opposite to each other, and ends 6311 and 6321 of the respective polishing films are attached to a film support body 633. The respective polishing films are curved, and projecting surfaces thereof are kept in a state of abutting on each other. The two polishing films cooperate with each other to receive an electrode needle 4a and form at least part of an opening 634 allowing the electrode needle to pass therethrough. The opening 634 is formed by separating the facing polishing films 631 and 632 from each other at a predetermined distance at least at one-side lateral ends 6312 and 6322 thereof. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a static eliminator including an electrode needle cleaning mechanism.

  Various types of so-called blown static eliminators have been developed that generate positive and negative ions simultaneously by corona discharge and transport the generated ions toward the object together with the air blown by the fan to neutralize the static electricity charged. Yes. Such blower type static eliminators are used for the purpose of preventing the destruction of components and the like due to the discharge of static electricity charged in the components and the like in the assembly process of semiconductor components and electronic devices. This type of static eliminator has electrode needles (discharge needles) for generating corona discharge, but since dust in the air is sucked into the tip of the electrode needles due to use and the discharge performance is reduced, Periodic cleaning is required. For example, in the blow type ion generating device described in Patent Document 1, “The movable member operates when the fin portion receives an air flow. Then, the brush member attached to the movable member touches the tip of the discharge needle, and the tip of the discharge needle. It is said that the dust adhering to is removed.

  Further, the corona discharge device described in Patent Document 2 is “in a corona discharge device having an electrode plate in which a plurality of sawtooth discharge electrodes are arranged in a row on a long base, and is provided in pressure contact with both surfaces of the electrode plate. And a moving means for moving the cleaning member in the longitudinal direction of the electrode plate ”.

JP 2004-234972 A JP 2006-317790 A

  In the method of cleaning the electrode needle with the brush as described above, dust attached to the electrode needle can be removed, but it is very difficult to remove the film-like product generated by corona discharge and attached to the electrode needle. It was difficult. The film-like product referred to here is, for example, silicon dioxide deposited on the tip portion of the electrode needle, and such a product may not be sufficiently removed only by cleaning with a brush. If the film-like product remains attached to the electrode needle, its discharge performance is lowered, and as a result, the film-like product is a cause of lowering the static elimination performance of the static eliminator.

  Therefore, the present invention provides a static eliminator provided with a cleaning mechanism that can effectively remove the product even when a film-like product adheres to the electrode needle.

  In order to achieve the above object, according to one aspect of the present invention, at least one electrode needle for generating ions by corona discharge, and an air blowing means for generating an air flow for carrying the ions generated by the electrode needle And a cleaning mechanism for cleaning the electrode needle, wherein the cleaning mechanism is at least one configured to be movable with respect to the at least one electrode needle to clean the at least one electrode needle. And at least one cleaning unit includes a polishing film configured to be able to contact each electrode needle, and the polishing film moves when the cleaning unit having the polishing film moves. A table of the tip of the electrode needle that forms at least a part of the opening for receiving the tip of the needle and is received in the opening. Configured to slide along the, static eliminator is provided.

  In the static eliminator according to one aspect of the present invention, since a polishing film is used for the cleaning member, a film-like product that has been difficult to remove with a brush can be effectively removed from the tip of the electrode needle. In addition, the polishing film is configured to form an opening that can receive the tip of the electrode needle and slide along the surface of the tip of the electrode needle, so that the cleaning portion can be moved substantially in one direction. Only the electrode needle can be cleaned.

  FIG. 1 is a top view showing a first embodiment of a static eliminator according to the present invention, and FIG. 2 is a side sectional view taken along line II-II in FIG. In the present embodiment, the present invention will be described using a DC type static eliminator as an example. The static eliminator 1 includes a housing 2, a blower unit disposed inside the housing 2, that is, a fan 3, and electrode needles 4 a to 4 d for generating ions by corona discharge (two pairs in this embodiment, a total of four). And high voltage power supplies 5a and 5b for sending a high voltage to the electrode needles 4a to 4d. The static eliminator 1 further includes a counter electrode (not shown) that generates corona discharge between the electrode needles 4a to 4d. A pair of electrode needles (electrode needles 4a and 4c and 4b and 4d in the illustrated example) are arranged at positions facing each other, and one pair of electrode needles (4a and 4c) is electrically connected to the positive high voltage power source 5a. The other pair of electrode needles (4b and 4d) are electrically connected to the negative high voltage power source 5b. Corona discharge is generated between the electrode needle and the counter electrode by the voltage applied from these high voltage power supplies. The counter electrode is grounded via the housing 2. Air ions are generated by the corona discharge, and the generated air ions are transported along with the air flow generated by the fan 3 toward an object (not shown) to be neutralized.

  The static eliminator 1 further includes a cleaning mechanism 6 that cleans each electrode needle. The cleaning mechanism 6 includes a rotating member 61 configured to be rotatable coaxially with the rotation axis of the fan 3, a plurality of (four in the illustrated example) rods 62a to 62d radially attached to the rotating member 61, And cleaning portions 63a to 63d attached to the tip of the rod. The number of rods and cleaning parts may be smaller than the number of electrode needles or the same number as the number of electrode needles. The larger the number of cleaning units, the smaller the rotation angle range of the rotating member 61, leading to a reduction in cleaning time. Further, when cleaning a plurality of electrode needles with one cleaning unit, the cleaning effect may vary between the electrode needles due to an assembly error of each electrode needle or the cleaning unit, but the cleaning unit and the electrode needle are in a one-to-one relationship. In this case, the positional relationship between each cleaning unit and the electrode needle can be individually adjusted.

  The rotation member 61 of the cleaning mechanism 6 is driven by an actuator 64, and an electromagnetic solenoid is used as the actuator 64 in the illustrated embodiment. As an actuator other than the electromagnetic solenoid, a hydraulic actuator or an actuator having a shape memory alloy and using Joule heat generated by an input current can be used. In the illustrated embodiment, the electromagnetic solenoid 64 is controlled by an electrical signal or the like from the control circuit 67. Moreover, you may use other well-known means, such as a stepping motor, as a drive source.

  In the illustrated example, the actuator, that is, the electromagnetic solenoid 64 is disposed on the side of the fan 3 with respect to the peripheral portion of the fan 3, that is, the blowing direction. The power of the electromagnetic solenoid 64 is transmitted to the rotating member 61 by the connecting means 66. As the connecting means 66, a known belt, chain, wire, crank mechanism or the like can be used. Use of a flat belt or wire having a simple structure is advantageous from the viewpoint of manufacturing cost and weight reduction of the static eliminator. Further, since each cleaning unit does not require high positioning accuracy with respect to each electrode needle, there is no particular problem even with a flat belt or a wire that may cause a slight slip.

  FIG. 3 is a perspective view showing details of each cleaning unit. Each cleaning unit (the cleaning unit 63a in the illustrated example) has polishing films 631 and 632 arranged to face each other, and ends 6311 and 6321 of the respective polishing films toward the center of the cleaning mechanism 6 are attached to the film support 633. The support 633 is attached to the tip of the rod 62a. Also, each polishing film is curved and its convex surfaces are held in contact with each other, whereby the polishing films 631 and 632 cooperate to receive the electrode needle 4a when the rotating member 61 rotates and At least a part of the opening 634 through which the electrode needle 4a can pass is formed. Although not shown, the curvatures of the respective polishing films may be equal to or different from each other, or as another configuration, one of the polishing films is curved and the convex surface thereof becomes the other film having a substantially planar shape. An abutting configuration can also be used. The opening 634 is substantially in both the movable direction of the support 633 and the extending direction of the electrode needles at the lateral ends (electrode needle side ends) 6312 and 6322 of the polishing films 631 and 632 facing each other. It is formed by leaving a predetermined distance in the vertical direction. Here, the predetermined distance means at least the diameter of the cleaning target portion of the electrode needle, and the cleaning target portion means the tip of the electrode needle, that is, the tip and its vicinity. The cleaning unit may be configured to include one polishing film and one other film that is not a polishing film.

  The polishing films 631 and 632 are basically flexible, but in a state where the polishing films 631 and 632 are somewhat curved as shown in FIG. 3, the polishing films 631 and 632 have rigidity sufficient to maintain the state unless an external force is applied. Therefore, each polishing film can be maintained in a desired shape even if it is supported in a so-called cantilever manner by the film support 633, and a simple configuration can be realized as the entire cleaning unit. As a suitable polishing film having such characteristics, there is a “wrapping film sheet” commercially available from Sumitomo 3M.

  Here, when the grain size of the polishing film is too large, the electrode needles become worn excessively, and the electrode surface becomes rough. When the electrode surface becomes rough, the film-like product is likely to be deposited. On the other hand, when the particle size of the polishing film is small, the removal performance of the film-like product is lowered. Therefore, the grain size of the polishing film is preferably 9 microns or more, and preferably 30 microns or less.

  FIG. 4 is a cross-sectional view showing the configuration of the polishing film 631. The abrasive film used in the present invention is a type of abrasive film called a wrapping film. The polishing film has a base film 6313 such as polyester and an adhesive layer 6314 formed by applying a film in which abrasive grains 6315 are dispersed in an adhesive on the base film 6313. When the polishing object is polished with the polishing film thus manufactured, the surface is polished precisely and smoothly unlike ordinary sandpaper in which an adhesive layer is previously applied to a base material and abrasive grains are arranged thereon. be able to.

  The “wrapping film sheet” commercially available from Sumitomo 3M Co., Ltd. has a finer powder at the time of polishing compared to general coated abrasives whose abrasive grains are relatively spherical and have irregularly shaped abrasive grains. There is an advantage that it is difficult to generate (abrasive grains are broken), and this is particularly advantageous when a static eliminator is used at a production site where suppression of generation of dust is particularly desired. Note that the polishing film 632 can have a similar structure.

  Such a cleaning mechanism can be manufactured at a low cost and does not deteriorate the original performance of the static eliminator such as the amount of air blown by the fan. 3 shows only the cleaning unit 63a, the other cleaning units 63b to 63d may have the same configuration.

  Next, the operation of the cleaning mechanism 6 will be described. When a power switch (not shown) for the electromagnetic solenoid 64 is turned on, the electromagnetic solenoid 64 is activated (here, an element 65 such as a pulley included in the electromagnetic solenoid 64 is rotated). However, the pulley 65 does not continuously rotate in one direction, but reciprocates within a predetermined angle range. Here, the predetermined angle range means that each cleaning unit can clean each electrode needle from both directions opposite to each other, and when the electromagnetic solenoid 64 is not operated (or when the operation is finished), each cleaning unit is an electrode. The range is such that the electrode needles are positioned away from the electrode needles to the extent that they are not affected by heat from the discharge of the needles. If the predetermined angle range is too wide, the cleaning time becomes longer. Conversely, if the predetermined angle range is too narrow, the cleaning unit cannot be separated from the electrode needle by a sufficient distance. For example, when four cleaning portions are provided for four electrode needles as in the illustrated example, the movable angle range of each rod attached to the rotating member 61 is typically about 20 ° or more. The movable angle range is typically 60 ° or less. With such a configuration, each cleaning unit substantially integrated with the rotating member 61 connected to the element 65 of the electromagnetic solenoid 64 via the connecting means 66 can clean each electrode needle from both the left and right directions.

  FIGS. 5A to 5C are views of the electrode needle 4a as seen in the direction of the arrow V in FIG. 3 when each cleaning unit cleans each electrode needle. For example, when the rotation angle range of the rotating member 61 by the operation of the electromagnetic solenoid 64 is 45 °, before the operation of the electromagnetic solenoid 64, the rod 62a is moved from the corresponding electrode 4a to the initial position 22.5 ° counterclockwise, that is, the first position. It is positioned at the position (FIG. 5A). Here, when the electromagnetic solenoid 64 is activated, the pulley 65 connected to the electromagnetic solenoid 64 rotates clockwise, and the cleaning portion 63a has the tip 41a of the electrode needle 4a in a direction substantially perpendicular to the extending direction of the electrode needle 4a. The cleaning unit 63a moves so as to enter the opening 634.

  When the tip 41a of the electrode needle 4a enters the opening 634 between the two polishing films, the polishing films 631 and 632 surround the tip 41a of the electrode needle as shown in FIG. 5B. Deform. More specifically, since each polishing film constitutes a curved surface, the front side portion 411a (see FIG. 5A) of the front end portion 41a in the direction of entering the opening 634 first becomes the curved surface of the polishing film. Next, the upper and lower portions 412a of the tip portion 41a abut against the polishing film, and immediately before the tip portion 41a is separated from the polishing film, the back portion 413a opposite to the front portion 411a of the tip portion contacts the polishing film. Touch. Therefore, almost the entire surface of the tip end portion 41 a slides on either the polishing film 631 or 632. In this process, dirt and film-like generated substances adhering to the tip 41a of the electrode needle are effectively removed by the abrasive grains of the above-mentioned polishing film.

  When a brush or the like was used for the cleaning part, even the film-like product could not be removed sufficiently, but the film-like product was generated by sliding the polishing film against almost the entire surface of the tip part of the electrode needle. Even substances can be effectively removed. In addition, since the two polishing films cooperate to form an opening that can receive the tip of the electrode needle, the cleaning portion is in one direction (in this embodiment, a direction substantially perpendicular to the direction in which the electrode needle extends). The electrode needle can be effectively cleaned simply by moving it.

  As the pulley 65 further rotates clockwise, as shown in FIG. 5C, the cleaning unit 63a moves to the second position away from the electrode needle 4a corresponding to 22.5 ° clockwise. And stop. Here, although the cleaning operation may be finished in the above-described cleaning unit 63a, a similar opening 635 is formed on the opposite side of the opening 634 in the lateral direction (moving direction of the cleaning unit). The pulley 65 can be rotated in the reverse direction, that is, counterclockwise, and each cleaning unit can clean the electrode needle in the reverse direction. In addition, the cleaning operation may be performed for one way for one cleaning or for one round trip. By performing such a cleaning operation at an appropriate time interval (for example, once every 12 to 24 hours), the electrode needle can be kept clean to such an extent that its performance can be exhibited. The cleaning operation may be performed several times at a time.

  6 and 7 are views showing a cleaning unit 63a 'according to the second embodiment. The difference from the first embodiment is that two curved polishing films 631 ′ and 632 ′ forming at least a part of the opening 634 ′ that receives the tip 41 a of the electrode needle 4 a have a moving direction of the rod 62 a ′. Is supported by being shifted by a predetermined distance. Although not shown, the curvatures of the polishing films may be the same or different from each other.

  Further, as shown in FIG. 7, it is preferable that the apexes 6316 'and 6326' of the curved surfaces of the polishing films 631 'and 632' protrude toward the other polishing film side with respect to the movement locus 42a of the tip of the electrode needle 4a. . In this way, the tip 41a of the electrode needle can be made to contact the polishing film more strongly, and the front side of the tip 41a in the direction of entering the opening 634 'than in the first embodiment. The polishing film easily comes into contact with the portion 411a (see FIG. 5A). In the illustrated example, the two polishing films are separated from each other, but may be configured to contact each other.

  In the above-described embodiment, if the rotating member 61 rotates only in one direction, that is, the moving direction of the cleaning portion relative to the electrode needle when cleaning the electrode needle is limited to one, the polishing film is curved. There is no need to hold on. For example, in the cleaning unit 63a ″ according to the third embodiment shown in FIG. 8, the polishing films 631 ″ and 632 ″ are held on the support 633 ″ at the tip of the rod 62a ″ so that they are in a substantially flat shape inclined to each other. In the above-described cleaning unit 63a, openings are formed on both sides in the lateral direction so that the electrode needle can be cleaned from both directions, but in the cleaning unit 63a ″, the electrode needle 4a An opening 634 ″ for receiving the tip 41a is formed only on one side in the lateral direction, and the polishing films 631 ″ and 632 ″ are in contact with each other at the lateral end opposite to the opening.

  FIG. 9 is a diagram illustrating a fourth embodiment of each cleaning unit. The fourth embodiment differs from the first to third embodiments in that each polishing film is not supported in a so-called cantilever type but is attached to a member having a predetermined curvature. . Specifically, the cleaning portion 63a ″ ″ shown in FIG. 9 is disposed opposite to the polishing films 631 ″ ″ and 632 ″ ′, and the mounting surface 6331 ″ to which the polishing films 631 ″ ″ and 632 ″ ″ are respectively attached. ', 6351 "' and film attachment portions 633" ", 635" "respectively, and arm members 636" ", 637" "provided with film attachment portions 633" ", 635" "at the tips. The arm members 636 ″ ″ and 637 ″ ″ are configured to be elastically displaceable relative to each other in the direction in which the electrode needle 4 a is sandwiched, and are attached to the rod 62 a ″ ″. In addition, at least one of the film attachment surfaces 6331 ″ ″ and 6351 ″ ″ has a curved surface, and forms at least a part of an opening 634 ″ ″ that can receive the electrode needle 4a when the rotating member 61 rotates. Moreover, it is preferable that the curvature of the curved surface of the mounting surface is substantially equal to the curvature of each polishing film in the first embodiment.

  The operation of the cleaning unit 63a ″ ′ is substantially the same as that of the above-described cleaning unit 63a, and therefore the description thereof will be omitted. Therefore, the arm members need not be configured to be displaceable with each other.

  Although each of the above-described embodiments has been described by taking a DC type static eliminator as an example, the present invention can be similarly implemented in an AC type static eliminator. In the AC type static eliminator, it is not always necessary to dispose the electrode needles at opposite positions. For example, one electrode needle may be provided. Further, all the electrode needles can be electrically connected to one AC power source, and corona discharge is performed between the electrode needles and the counter electrode disposed facing the electrode needles.

It is a top view of the static eliminator which concerns on the 1st Embodiment of this invention. It is a sectional side view which follows the II-II line of FIG. It is a figure which shows one Embodiment of the cleaning part which the static eliminator of FIG. 1 has. It is a figure which shows the cross-sectional shape of the abrasive film used for a cleaning part. (A) It is the figure which looked at the cleaning part and the electrode needle in the direction of arrow V of FIG. 3, Comprising: It is a figure which shows the state before a cleaning part cleans an electrode needle, (b) The cleaning part is an electrode needle. It is a figure which shows the state which is cleaning the front-end | tip part, (c) It is a figure which shows the state which cleaning completed. It is a figure similar to FIG. 3, Comprising: It is a figure which shows 2nd Embodiment which changed arrangement | positioning of an abrasive film. It is the figure which looked at FIG. 6 in the direction of arrow VII. It is a figure which shows 3rd Embodiment which supported the polishing film in substantially planar shape. It is a figure which shows the cleaning part which concerns on 4th Embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Charger 2 Housing 3 Fan 4a-4d Electrode needle 41a-41d Tip part 5a, 5b Power supply 6 Cleaning mechanism 61 Rotating member 62a-62d Rod 63a-63d Cleaning part 631, 632 Polishing film 634, 635 Opening 64 Actuator 65 Pulley 66 Connecting means

Claims (7)

It is a static eliminator having at least one electrode needle for generating ions by corona discharge, a blowing means for generating an air flow for carrying ions generated by the electrode needle, and a cleaning mechanism for cleaning the electrode needle. And
The cleaning mechanism has at least one cleaning unit configured to be movable with respect to the at least one electrode needle to clean the at least one electrode needle,
The at least one cleaning unit includes a polishing film configured to be in contact with each electrode needle, and the polishing film receives a tip portion of the electrode needle when the cleaning unit having the polishing film moves. A static eliminator configured to form at least a part of an opening and to slide along a surface of the tip of the electrode needle received in the opening.   Each of the at least one cleaning unit has two polishing films disposed opposite to each other, at least one of the two polishing films is curved, and the convex surface of the at least one polishing film is in contact with the other polishing film. The static eliminator according to claim 1, wherein the static eliminator is held in contact.   Each of the at least one cleaning unit has two curved polishing films, and the vertices of the curved surfaces of the two polishing films are arranged at a predetermined distance from each other in the moving direction of the cleaning unit, and The static eliminator of Claim 1 comprised so that it may protrude in the other polishing film side rather than the movement locus | trajectory of the front-end | tip part of an electrode needle.   The static eliminator according to claim 2 or 3, wherein the polishing film is supported in a cantilever manner.   The cleaning section includes two film mounting sections each having a mounting surface to which the two polishing films are respectively attached, and two arm members each having the two film mounting sections at their tips, The static eliminator according to claim 2, wherein at least one of the attachment surfaces of the two film attachment portions is curved so as to have a convex surface capable of coming into contact with the attachment surface of the other film attachment portion.   The static eliminator according to claim 5, wherein the two film attachment portions are made of an elastically deformable material.   The static eliminator according to claim 5, wherein the two arm members are configured to be elastically displaceable in a direction in which the electrode needle is sandwiched.

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