JP2009217193A5 - - Google Patents
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- Publication number
- JP2009217193A5 JP2009217193A5 JP2008063522A JP2008063522A JP2009217193A5 JP 2009217193 A5 JP2009217193 A5 JP 2009217193A5 JP 2008063522 A JP2008063522 A JP 2008063522A JP 2008063522 A JP2008063522 A JP 2008063522A JP 2009217193 A5 JP2009217193 A5 JP 2009217193A5
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- magnet
- substrate
- recess
- optical deflector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000758 substrate Substances 0.000 claims 10
- 230000003287 optical effect Effects 0.000 claims 5
- 239000000853 adhesive Substances 0.000 claims 3
- 230000001070 adhesive effect Effects 0.000 claims 3
- 238000004519 manufacturing process Methods 0.000 claims 2
- 238000005530 etching Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008063522A JP2009217193A (ja) | 2008-03-13 | 2008-03-13 | 光偏向器及びその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008063522A JP2009217193A (ja) | 2008-03-13 | 2008-03-13 | 光偏向器及びその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2009217193A JP2009217193A (ja) | 2009-09-24 |
| JP2009217193A5 true JP2009217193A5 (https=) | 2011-04-07 |
Family
ID=41189070
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008063522A Withdrawn JP2009217193A (ja) | 2008-03-13 | 2008-03-13 | 光偏向器及びその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2009217193A (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5842356B2 (ja) * | 2011-03-24 | 2016-01-13 | セイコーエプソン株式会社 | アクチュエーター、光スキャナーおよび画像形成装置 |
| JP5923933B2 (ja) * | 2011-11-08 | 2016-05-25 | セイコーエプソン株式会社 | ミラーデバイス、光スキャナーおよび画像形成装置 |
| JP5842837B2 (ja) * | 2013-01-30 | 2016-01-13 | セイコーエプソン株式会社 | アクチュエーター、光スキャナーおよび画像形成装置 |
-
2008
- 2008-03-13 JP JP2008063522A patent/JP2009217193A/ja not_active Withdrawn
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