JP2009217193A5 - - Google Patents

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Publication number
JP2009217193A5
JP2009217193A5 JP2008063522A JP2008063522A JP2009217193A5 JP 2009217193 A5 JP2009217193 A5 JP 2009217193A5 JP 2008063522 A JP2008063522 A JP 2008063522A JP 2008063522 A JP2008063522 A JP 2008063522A JP 2009217193 A5 JP2009217193 A5 JP 2009217193A5
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JP
Japan
Prior art keywords
mirror
magnet
substrate
recess
optical deflector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2008063522A
Other languages
English (en)
Japanese (ja)
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JP2009217193A (ja
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Publication date
Application filed filed Critical
Priority to JP2008063522A priority Critical patent/JP2009217193A/ja
Priority claimed from JP2008063522A external-priority patent/JP2009217193A/ja
Publication of JP2009217193A publication Critical patent/JP2009217193A/ja
Publication of JP2009217193A5 publication Critical patent/JP2009217193A5/ja
Withdrawn legal-status Critical Current

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JP2008063522A 2008-03-13 2008-03-13 光偏向器及びその製造方法 Withdrawn JP2009217193A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008063522A JP2009217193A (ja) 2008-03-13 2008-03-13 光偏向器及びその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008063522A JP2009217193A (ja) 2008-03-13 2008-03-13 光偏向器及びその製造方法

Publications (2)

Publication Number Publication Date
JP2009217193A JP2009217193A (ja) 2009-09-24
JP2009217193A5 true JP2009217193A5 (https=) 2011-04-07

Family

ID=41189070

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008063522A Withdrawn JP2009217193A (ja) 2008-03-13 2008-03-13 光偏向器及びその製造方法

Country Status (1)

Country Link
JP (1) JP2009217193A (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5842356B2 (ja) * 2011-03-24 2016-01-13 セイコーエプソン株式会社 アクチュエーター、光スキャナーおよび画像形成装置
JP5923933B2 (ja) * 2011-11-08 2016-05-25 セイコーエプソン株式会社 ミラーデバイス、光スキャナーおよび画像形成装置
JP5842837B2 (ja) * 2013-01-30 2016-01-13 セイコーエプソン株式会社 アクチュエーター、光スキャナーおよび画像形成装置

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