JP2009212776A - Ultrasonic sensor for measuring state of object existing under high temperature environment - Google Patents

Ultrasonic sensor for measuring state of object existing under high temperature environment Download PDF

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JP2009212776A
JP2009212776A JP2008053251A JP2008053251A JP2009212776A JP 2009212776 A JP2009212776 A JP 2009212776A JP 2008053251 A JP2008053251 A JP 2008053251A JP 2008053251 A JP2008053251 A JP 2008053251A JP 2009212776 A JP2009212776 A JP 2009212776A
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ultrasonic
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JP4911630B2 (en
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Akihiro Tagawa
明広 田川
Takuya Yamashita
卓哉 山下
Masashi Ueda
雅司 上田
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an ultrasonic sensor that is used even under high temperature environment as a case that an object for measurement exists in high temperature sodium of a fast breeder reactor and by which a high resolution measured image is obtained. <P>SOLUTION: The ultrasonic sensor is constituted of a plurality of sensor elements arranged like a matrix, wherein each sensor element is constituted of a sensor frame constituting one electrode, and a plurality of sensor elements formed like a matrix on the sensor frame. Each of the sensor elements includes a piezoelectric element which transmits/receives ultrasonic wave, one surface of which is connected to the sensor frame, a damping material for ultrasonic attenuation vertically arranged on the other surface of the piezoelectric element, and the other electrode arranged between the damping material and the piezoelectric element. Each sensor element is fixed to a metal frame, respectively, and the damping material is constituted of a material exhibiting large resistance to thermal shock. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、高温環境下にある測定対象物の変形、破壊等の状態を目視測定するための超音波センサに関するものである。さらに詳細には、本発明は、高速増殖炉の冷却材のような高温ナトリウム（Na）中においても使用可能な超音波センサに関する。   The present invention relates to an ultrasonic sensor for visually measuring the state of deformation or destruction of a measurement object in a high temperature environment. More particularly, the present invention relates to an ultrasonic sensor that can also be used in high temperature sodium (Na), such as a fast breeder reactor coolant.

超音波を利用した各種センシング技術は、圧電素子を利用することによって、超音波の発信から受信までの到達時間差を把握することで、被対象物の有無、形状、欠陥等を測定するために、幅広い産業分野において利用されている。
解像度を向上させ、測定対称物の解析精度を向上させるため、圧電素子を平面状に均等配列（マトリックス配列）させた超音波センサや、超音波の送信と受信を別々の圧電素子に分担させる構造を持つ超音波センサなどが、既に多くの産業分野において使用されている。 In order to measure the presence / absence, shape, defect, etc. of the object by grasping the arrival time difference from transmission to reception of ultrasonic waves by using piezoelectric elements, various sensing technologies using ultrasonic waves, It is used in a wide range of industrial fields.
In order to improve resolution and improve the analysis accuracy of symmetrical objects, ultrasonic sensors with piezoelectric elements arranged in a uniform plane (matrix arrangement) and structures that share transmission and reception of ultrasonic waves to separate piezoelectric elements Have already been used in many industrial fields.

例えば、特許文献１に開示された「超音波装置」では、水中あるいは大気中において、圧電素子をマトリックス状に複数併設し、超音波による解析精度を上げ、かつ、各圧電素子間のクロストークを減少させるためのインピーダンスの整合性を取る等の工夫がなされている。   For example, in the “ultrasonic device” disclosed in Patent Document 1, a plurality of piezoelectric elements are provided in a matrix in water or in the air, the accuracy of ultrasonic analysis is improved, and crosstalk between the piezoelectric elements is reduced. Ingenuity is taken such as taking impedance matching to reduce.

また、特許文献２に開示された「リアルタイム３次元超音波映像装置および探触子」では、水中あるいは大気中において、マトリックス状に複数併設した圧電素子を、送信用と受信用とに使いわけ、それらを交互に配列し、超音波による解析精度向上と、解析時間短縮が図られている。   In addition, in the “real-time three-dimensional ultrasound imaging apparatus and probe” disclosed in Patent Document 2, in water or in the air, a plurality of piezoelectric elements arranged in a matrix are used for transmission and reception, They are arranged alternately to improve the analysis accuracy by ultrasonic waves and shorten the analysis time.

さらに、特許文献３に開示された「液体金属用超音波トランジューサ」では、特許文献１あるいは特許文献２とは異なり、超音波トランジューサの液体重金属との接液界面における音圧透過効率の悪さを改善するため、圧電素子の振動伝達部に液体重金属との濡れ性を持たせる工夫がなされている。
特開２００１−１９７５９３号公報 特開２００３−０００５９９号公報 特開２００６−３２２７４９号公報 Furthermore, unlike “Patent Document 1” or “Patent Document 2”, the “ultrasonic transducer for liquid metal” disclosed in Patent Document 3 has poor sound pressure transmission efficiency at the liquid contact interface between the ultrasonic transducer and the liquid heavy metal. In order to improve the above, a device has been devised in which the vibration transmitting portion of the piezoelectric element has wettability with the liquid heavy metal.
JP 2001-197593 A JP 2003-0000599 A JP 2006-322749 A

しかしながら、上述の各超音波装置では、ダンピング材の材質が環境が厳しい分野での使用、例えば、高速増殖炉の検査時のナトリウム液中のように高温環境下（２００℃）、高放射線下（１０５Ｇｙ）での測定、さらに、プラント配管の探傷等の高温環境下、各種液体の取扱い環境下での測定のように、使用環境が極めて厳しい分野での使用に耐えないという欠点があった。 However, in each of the above-described ultrasonic apparatuses, the material used for the damping material is used in a severe environment, for example, in a high temperature environment (200 ° C.) or in a high radiation state (for example, in a sodium solution at the time of inspection of a fast breeder reactor). 10 5 Gy), as well as measurement under high temperature environment such as flaw detection of plant piping, and handling of various liquids .

したがって、本発明の目的は、測定対象物が高速増殖炉の高温ナトリウム中に存在する場合のように、高温環境下であっても使用でき、かつ高解像度の測定画像を得ることのできる超音波センサを提供することにある。   Therefore, an object of the present invention is to provide an ultrasonic wave that can be used even in a high temperature environment and can obtain a high-resolution measurement image, such as when the measurement object is present in high-temperature sodium of a fast breeder reactor. It is to provide a sensor.

本発明の１つの観点に係る超音波センサは、マトリクス状に配列された複数個のセンサ要素から構成され、各センサ要素が、一方の電極を構成する平面状のセンサフレームと、該センサフレームの同一面上にマトリクス状に形成された複数個のセンサ素子から構成され、前記センサ素子のそれぞれが、一方の面が前記センサフレームに接するように接続された、超音波を発信／受信する圧電素子と、該圧電素子の他方の面に垂直に配置された超音波減衰用のダンピング材と、該ダンピング材と前記圧電素子の間に配置された他方の電極とから構成される超音波センサであって、前記各センサ要素がそれぞれ金属製のフレームに固定されており、前記ダンピング材が、少なくとも熱衝撃に対して大きな抵抗を示す材料から構成されている。このように、各センサ要素をフレームに収納するようにしているので、高温環境下で使用しても熱歪みが抑えられ、高解像度を得ることができる。   An ultrasonic sensor according to one aspect of the present invention includes a plurality of sensor elements arranged in a matrix, and each sensor element includes a planar sensor frame constituting one electrode, and the sensor frame. Piezoelectric elements for transmitting / receiving ultrasonic waves, each composed of a plurality of sensor elements formed in a matrix on the same surface, each of which is connected such that one surface is in contact with the sensor frame An ultrasonic attenuation damper disposed perpendicular to the other surface of the piezoelectric element, and the other electrode disposed between the damping material and the piezoelectric element. The sensor elements are fixed to a metal frame, and the damping material is made of a material that exhibits at least a large resistance to thermal shock. Thus, since each sensor element is stored in the frame, thermal distortion is suppressed even when used in a high temperature environment, and high resolution can be obtained.

より好適には、前記ダンピング材の材料として、アルマタイトを用いることがのぞましい。アルマタイトは、同じように熱衝撃特性に優れた他の材料、例えば、ボロンナイトライトなどよりも超音波のダンピング特性に優れていることから、高温環境下で使用される超音波センサのダンピング材としては最適である。   More preferably, it is preferable to use almatite as the material of the damping material. Almatite is superior to other materials with excellent thermal shock characteristics, such as boron nitrite, so it has superior ultrasonic damping characteristics. Therefore, it is used as a damping material for ultrasonic sensors used in high-temperature environments. Is the best.

さらにより好適には、前記他方の電極が前記ダンピング材の底面及び少なくとも１つの側面に蒸着された金属から構成することが望ましい。電極を蒸着することで、センサ要素自体を小型化できるので、よりセンサ素子数の多い小型の超音波センサが得られるようになる。また、この蒸着金属としては、耐久性等の面からチタン（Ｔｉ）を用いることが望ましい。   More preferably, it is desirable that the other electrode is made of a metal deposited on the bottom surface and at least one side surface of the damping material. By evaporating the electrodes, the sensor element itself can be miniaturized, and a small ultrasonic sensor with a larger number of sensor elements can be obtained. Moreover, as this vapor deposition metal, it is desirable to use titanium (Ti) from the viewpoint of durability.

本発明に係る超音波センサは、稼働中の高速増殖炉の高温ナトリウムのような高温環境下で使用できる構造に作られているので、従来は測定対象物が入った高温の液体はすべて取除いた上で超音波測定を行なっていたものを、高温の液体が存在したままであっても超音波測定を実現できる。従って、原子力機器、プラント等が運転中であっても超音波検が可能となり、各種運転機器の操業度を低下させずに、かつ、供用期間中の超音波測定が可能になることにより、早期の異常把握が可能となり、各種運転機器のより一層の安全性向上を図ることができる。   The ultrasonic sensor according to the present invention has a structure that can be used in a high-temperature environment such as high-temperature sodium in an operating fast breeder reactor, so conventionally all high-temperature liquids containing measurement objects are removed. In addition, ultrasonic measurement can be realized even if the high-temperature liquid remains in the state where ultrasonic measurement has been performed. Therefore, ultrasonic inspection is possible even when nuclear equipment, plants, etc. are in operation, and it is possible to perform ultrasonic measurement during the service period without deteriorating the operating degree of various operating equipment, and at an early stage. Abnormality can be grasped, and the safety of various operating devices can be further improved.

勿論、上記のような過酷な条件下でその効果を発揮する本発明は、一般の水中等であっても充分その性能、効果を達成することができる。   Of course, the present invention, which exhibits its effect under the severe conditions as described above, can sufficiently achieve its performance and effect even in general water.

本発明の好適な超音波センサは、例えば、４×４のマトリクス状に配列された複数個のセンサ要素から構成される。各センサ要素は、一方の電極を構成するセンサフレームと、センサフレームの同一平面上に、例えば、８×８のマトリクス状に形成された複数個のセンサ素子から構成される。センサフレームを一方の電極として使用することにより、超音波センサ自体の構造を簡潔かつ強固にすることができる。これらセンサ素子のそれぞれは、一方の面がセンサフレームに接続された、超音波を発信／受信する圧電素子と、圧電素子の他方の面に垂直に配置された超音波減衰用のダンピング材と、ダンピング材と圧電素子の間に配置された他方の電極とから構成される。   The preferred ultrasonic sensor of the present invention is composed of a plurality of sensor elements arranged in a 4 × 4 matrix, for example. Each sensor element is composed of a sensor frame that constitutes one electrode and a plurality of sensor elements formed on the same plane of the sensor frame, for example, in an 8 × 8 matrix. By using the sensor frame as one electrode, the structure of the ultrasonic sensor itself can be simplified and strengthened. Each of these sensor elements includes a piezoelectric element for transmitting / receiving ultrasonic waves, one surface of which is connected to a sensor frame, and a damping material for ultrasonic attenuation disposed perpendicular to the other surface of the piezoelectric element, It is comprised from the other electrode arrange | positioned between a damping material and a piezoelectric element.

ダンピング材は、圧電素子に電圧をかけて超音波を発信させたときに発生する第２波以降の波を吸収するためのものであり、超音波の進行方向に長い直方体の形状をしている。また、約２２０℃という稼働中の高速増殖炉の高温ナトリウムに接しても変形しないように、熱衝撃に対して大きな抵抗を示す材料で構成される。熱衝撃に対して大きな抵抗を示す材料、すなわち、耐熱性の高い材料として、最高仕様温度２０００℃、耐熱衝撃温度１５００℃、密度２．０のボロンナイトライト（六方結晶化ホウ酸）と、最高仕様温度１５００℃、耐熱衝撃温度１２００℃、密度３．３のアルマタイト（チタン酸アルミ）を選択し、試験を行ってこれらの材料の超音波減衰特性を調べた。その結果を図４の（ａ）及び（ｂ）に示す。ここで、（ａ）はアルマタイトの減衰特性を示し、（ｂ）はボロンナイトライトの減衰特性を示している。図４に示された減衰特性から、ボロンナイトライトのよりもアルマタイトの方が優れた減衰特性を示すことがわかる。   The damping material is for absorbing the second and subsequent waves generated when an ultrasonic wave is transmitted by applying a voltage to the piezoelectric element, and has a rectangular parallelepiped shape that is long in the traveling direction of the ultrasonic wave. . Moreover, it is comprised with the material which shows big resistance with respect to a thermal shock so that it may not deform | transform even if it contacts the high temperature sodium of the operating fast breeder reactor of about 220 degreeC. As a material exhibiting a large resistance to thermal shock, that is, a material having high heat resistance, boron nitrite (hexagonal crystal boric acid) having a maximum specification temperature of 2000 ° C., a thermal shock temperature of 1500 ° C. and a density of 2.0, and the highest Almatite (aluminum titanate) having a specification temperature of 1500 ° C., a thermal shock temperature of 1200 ° C., and a density of 3.3 was selected and tested to examine the ultrasonic attenuation characteristics of these materials. The results are shown in FIGS. 4 (a) and (b). Here, (a) shows the attenuation characteristics of almatite, and (b) shows the attenuation characteristics of boron nitrite. It can be seen from the attenuation characteristics shown in FIG. 4 that alumite exhibits superior attenuation characteristics than boron nitride.

さらにまた、各センサ要素が熱歪みを起こし、得られる画像が不鮮明にならないように、各センサ要素はそれぞれ金属製のフレームに固定収納される。このフレームの材質としては、熱変形の抑制の観点からスーパーインバー金属を用いることが好ましい。スーパーインバーは、鉄やステンレス鋼に比べて熱膨張係数が１０分の１以下であり、温度が変わっても変形し難い性質があるためである。各フレームを縦方向に４個、横方向に４個マトリクス状に配置して１個の超音波センサを形成する。超音波センサの解像度は、受信素子の超音波向角が大きいほど（圧電素子の場合には素子の直径が小さいほど超音波向角が大きい）、また素子の個数が多いほど高くなる。しかし、素子の個数を多くすると画像化に時間がかかるため、現実的な画像処理時間にするために素子数は、２５６個すなわちセンサ要素数１６個（４×４マトリクス）程度が好ましい。   Furthermore, each sensor element is fixedly housed in a metal frame so that each sensor element is not thermally distorted and the resulting image is unclear. As the material of the frame, it is preferable to use Super Invar metal from the viewpoint of suppressing thermal deformation. This is because Super Invar has a thermal expansion coefficient of 1/10 or less as compared with iron and stainless steel, and is difficult to deform even when the temperature changes. One ultrasonic sensor is formed by arranging four frames in the vertical direction and four in the horizontal direction in a matrix. The resolution of the ultrasonic sensor increases as the ultrasonic direction angle of the receiving element increases (in the case of a piezoelectric element, the ultrasonic direction angle increases as the element diameter decreases) and as the number of elements increases. However, since imaging takes time when the number of elements is increased, the number of elements is preferably about 256, that is, about 16 sensor elements (4 × 4 matrix) in order to achieve a realistic image processing time.

次に、本発明に係る超音波センサを用いた高温ナトリウム内の対象物の測定装置及びその方法について、図５を用いて説明する。図５は、本発明の超音波センサを使用した超音波測定装置を概略的に表わしている。図５において、符号１は本発明に係る超音波センサを示し、１００は高温ナトリウム中の測定対象物である。超音波センサ１は、測定対象物１００への超音波の発信と、発信した超音波が測定対象物１００から反射した反射波を受信する機能とを兼ね備えている。   Next, a measuring apparatus and method for an object in high-temperature sodium using the ultrasonic sensor according to the present invention will be described with reference to FIG. FIG. 5 schematically shows an ultrasonic measurement apparatus using the ultrasonic sensor of the present invention. In FIG. 5, the code | symbol 1 shows the ultrasonic sensor which concerns on this invention, 100 is a measuring object in high temperature sodium. The ultrasonic sensor 1 has both a function of transmitting an ultrasonic wave to the measurement object 100 and a function of receiving a reflected wave reflected from the measurement object 100 by the transmitted ultrasonic wave.

超音波測定時は、上記超音波センサ１の圧電素子（図１参照）を所定時間動作させることにより、測定対象物１００に向けて超音波を発信させる。この際、ダンピング材（図１の符号６）によって超音波の余分な成分が減衰させられるので、残響が少ない超音波が発信させられる。その後、超音波発信を停止し、測定対象物１００からの反射波を受信する。この反射波もダンピング材によって余分な周波数成分が減衰させられるため、残響が少ない超音波として圧電素子によって受信される。   During ultrasonic measurement, the piezoelectric element (see FIG. 1) of the ultrasonic sensor 1 is operated for a predetermined time to transmit ultrasonic waves toward the measurement object 100. At this time, since an extra component of the ultrasonic wave is attenuated by the damping material (reference numeral 6 in FIG. 1), an ultrasonic wave with less reverberation is transmitted. Thereafter, the ultrasonic wave transmission is stopped, and the reflected wave from the measuring object 100 is received. Since the excessive frequency component is also attenuated by the damping material, the reflected wave is received by the piezoelectric element as an ultrasonic wave with little reverberation.

１回の操作毎に得られたデータは、発信／受信器１０１でアナログ信号として受信されたのち、ＡＤ変換部２０１でディジタル信号に変換され、高速信号処理部３０１に送られる一時的に記憶される。高速信号処理部３０１では、繰り返し実行され、得られた対象物のデータに基づいて３次元開口合成処理プログラムによって、合成処理がおこなわれる。このようにして得られた対象物に関するデータは、インターフェース４０１を介して、例えば、パーソナルコンピュータ５０１に送られ、そのディスプレイ６０１に目視可能な画像として表示される。   Data obtained for each operation is received as an analog signal by the transmitter / receiver 101, converted to a digital signal by the AD converter 201, and temporarily stored in the high-speed signal processor 301. The The high-speed signal processing unit 301 is repeatedly executed, and synthesis processing is performed by a three-dimensional aperture synthesis processing program based on the obtained object data. Data relating to the object obtained in this way is sent to, for example, the personal computer 501 via the interface 401 and displayed on the display 601 as a visible image.

以下、図１乃至図３を参照して、本発明に係る超音波センサの一実施例について説明する。図１は、本発明に係る超音波センサに使用されるセンサ素子の一実施例の構成を概略的に示している。また、図２は、図１に示されたセンサ素子をマトリクス状に配列した構成を示している。図３は、本発明によって測定した測定対象物の高速画像処理結果の例を示している。   Hereinafter, an embodiment of an ultrasonic sensor according to the present invention will be described with reference to FIGS. 1 to 3. FIG. 1 schematically shows a configuration of an embodiment of a sensor element used in an ultrasonic sensor according to the present invention. FIG. 2 shows a configuration in which the sensor elements shown in FIG. 1 are arranged in a matrix. FIG. 3 shows an example of a high-speed image processing result of the measurement object measured by the present invention.

図１において、センサ素子３は、始めに真空スパッタによりダンピング材にチタン（Ｔｉ）を蒸着させ、電極６を形成し、その後、圧電素子４と、電極６が形成されたダンピング材５を積層することにより作成した。電極６をこのように形成することで、余計なリード線が不要になり、断線等の排除、省スペース化、軽量化が図られた。圧電素子４とダンピング材５は、高温用の半田で接合した。このようにして作られたセンサ素子３を、電極を兼ねたスーパーインバー製のフレームの同一平面上に８×８のマトリクス状に均一に配列し、センサ要素１０が構成された。なお、作成されたセンサ素子３において、圧電素子４の厚さは０．４ｍｍ、縦横の幅はそれぞれ２．５ｍｍであり、ダンピング材の厚さ（高さ）は５ｍｍ、縦横の幅はそれぞれ２．５ｍｍである。各センサ要素の周囲を金属製のフレームで囲むことで、超音波センサ全体の物理的強度が向上し、しいては、良好な解像度を有する。   In FIG. 1, the sensor element 3 first deposits titanium (Ti) on a damping material by vacuum sputtering to form an electrode 6, and then laminates the piezoelectric element 4 and the damping material 5 on which the electrode 6 is formed. Created by. By forming the electrode 6 in this way, unnecessary lead wires are unnecessary, and disconnection and the like, space saving, and weight reduction are achieved. The piezoelectric element 4 and the damping material 5 were joined with high-temperature solder. The sensor elements 3 thus produced were uniformly arranged in an 8 × 8 matrix on the same plane of a frame made of Super Invar that also served as an electrode, and the sensor element 10 was configured. In the created sensor element 3, the thickness of the piezoelectric element 4 is 0.4 mm, the vertical and horizontal widths are 2.5 mm, the thickness (height) of the damping material is 5 mm, and the vertical and horizontal widths are 2 respectively. .5 mm. By enclosing each sensor element with a metal frame, the physical strength of the entire ultrasonic sensor is improved, and the resolution is good.

上述のようにして構成されたセンサ要素１０を同一平面上に２×２のマトリクス状に配列し、合計１６×１６（２５６個）のセンサ素子３から構成される超音波センサ１を作成した。この超音波センサ１を図２に示す。なお、作られた超音波センサの一辺の長さは、約８０ｍｍで、センサ素子間の距離（センサ素子の中心から隣りのセンサ素子の中心までの距離）は、４ｍｍである。   The sensor elements 10 configured as described above were arranged in a 2 × 2 matrix on the same plane, and an ultrasonic sensor 1 composed of a total of 16 × 16 (256) sensor elements 3 was produced. This ultrasonic sensor 1 is shown in FIG. The length of one side of the produced ultrasonic sensor is about 80 mm, and the distance between the sensor elements (the distance from the center of the sensor element to the center of the adjacent sensor element) is 4 mm.

図３に、上述の超音波センサを用いて、水中に存在する模擬対象物を測定して得た、３Ｄ画像解析の結果を示す。水中と高温ナトリウム中では超音波特性が異なるため、この画像がそのまま高温ナトリウム中で得られるものではないが、本発明に係る超音波センサを使用すれば、多少の画像処理の調整によってほぼ同様の画像が得られると考えられる。   FIG. 3 shows the result of 3D image analysis obtained by measuring a simulated object existing in water using the above-described ultrasonic sensor. Since the ultrasonic characteristics are different between water and high-temperature sodium, this image cannot be obtained as it is in high-temperature sodium, but if the ultrasonic sensor according to the present invention is used, it is almost the same by adjusting some image processing. An image can be obtained.

本発明によれば、原子力設備の共用期間中であっても、設備機器の測定が可能になるため、各種運転機器の安全性をこれまで以上に向上させることができる。また、高温下、放射線環境下等の過酷環境であっても、遠隔（約１００ｍ程度）にある測定対象物に対して高解像度（２ｍｍ程度）、解析処理時間も０．５秒程度の超音波測定装置が実現できるので、点検検査の精度をこれまで以上に向上させることができ、原子力プラント、化学プラント等において極めて有用である。   According to the present invention, since it is possible to measure facility equipment even during a period during which nuclear facilities are shared, the safety of various operating devices can be improved more than ever. Moreover, even in harsh environments such as high temperatures and radiation environments, ultrasonic waves with a high resolution (about 2 mm) and an analysis processing time of about 0.5 seconds for a remote (about 100 m) measurement object. Since a measuring device can be realized, the accuracy of inspection and inspection can be improved more than ever, and it is extremely useful in nuclear power plants, chemical plants and the like.

本発明に係る超音波センサに使用されるセンサ素子の一実施例の構成説明図である。1 is a configuration explanatory diagram of one embodiment of a sensor element used in an ultrasonic sensor according to the present invention. FIG. 図１に示されたセンサ素子をマトリクス状に配列した構成を示す図である。It is a figure which shows the structure which arranged the sensor element shown by FIG. 1 in the matrix form. 本発明によって測定した測定対象物の高速画像処理結果の例を示す図である。It is a figure which shows the example of the high-speed image processing result of the measuring object measured by this invention. 超音波センサに使用可能な２種類のダンピング材のそれぞれの超音波特性を示す図である。It is a figure which shows each ultrasonic characteristic of two types of damping materials which can be used for an ultrasonic sensor. 本発明の超音波センサを用いて行う超音波測定装置の概略説明図である。It is a schematic explanatory drawing of the ultrasonic measuring apparatus performed using the ultrasonic sensor of this invention.

符号の説明Explanation of symbols

１ 超音波センサ
２ センサフレーム
３ センサ素子
４ 圧電素子
５ ダンピング材
６ 電極
７ 信号ケーブル
１０ センサ要素
１００ 測定対象物 DESCRIPTION OF SYMBOLS 1 Ultrasonic sensor 2 Sensor frame 3 Sensor element 4 Piezoelectric element 5 Damping material 6 Electrode 7 Signal cable 10 Sensor element 100 Measurement object

Claims (4)

マトリクス状に配列された複数個のセンサ要素から構成され、各センサ要素が、
一方の電極を構成する平面状のセンサフレームと、該センサフレームの同一面上にマトリクス状に形成された複数個のセンサ素子から構成され、
前記センサ素子のそれぞれが、一方の面が前記センサフレームに接続された、超音波を発信／受信する圧電素子と、該圧電素子の他方の面に垂直に配置された超音波減衰用のダンピング材と、該ダンピング材と前記圧電素子の間に配置された他方の電極とから構成される超音波センサであって、
前記各センサ要素がそれぞれ金属製フレームに固定されており、前記ダンピング材が、少なくとも熱衝撃に対して大きな抵抗を示す材料から構成されていることを特徴とする超音波センサ。 It is composed of a plurality of sensor elements arranged in a matrix, and each sensor element is
It is composed of a planar sensor frame constituting one electrode and a plurality of sensor elements formed in a matrix on the same surface of the sensor frame,
Each of the sensor elements includes a piezoelectric element for transmitting / receiving ultrasonic waves, one surface of which is connected to the sensor frame, and a damping material for ultrasonic attenuation disposed perpendicular to the other surface of the piezoelectric element. And an ultrasonic sensor composed of the damping material and the other electrode disposed between the piezoelectric elements,
The ultrasonic sensor, wherein each sensor element is fixed to a metal frame, and the damping material is made of a material that exhibits at least a large resistance to thermal shock. 前記ダンピング材の材料が、アルマタイトであることを特徴とする請求項１に記載の超音波センサ。   The ultrasonic sensor according to claim 1, wherein the material of the damping material is almatite. 前記他方の電極が前記ダンピング材の底面及び少なくとも１つの側面に蒸着された金属から構成されていることを特徴とする請求項１又は２のいずれかに記載の超音波センサ。   The ultrasonic sensor according to claim 1, wherein the other electrode is made of a metal deposited on a bottom surface and at least one side surface of the damping material. 前記蒸着金属がチタン（Ｔｉ）であることを特徴とする請求項３に記載の超音波センサ。   The ultrasonic sensor according to claim 3, wherein the deposited metal is titanium (Ti).
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US10458955B2 (en) 2010-11-05 2019-10-29 National Research Council Of Canada Ultrasonic transducer assembly and system for monitoring structural integrity
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CN114063085B (en) * 2021-05-21 2024-04-30 友达光电股份有限公司 Ultrasonic detection device

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