JP2009206407A - ワイヤーボンド方法 - Google Patents
ワイヤーボンド方法 Download PDFInfo
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- JP2009206407A JP2009206407A JP2008049594A JP2008049594A JP2009206407A JP 2009206407 A JP2009206407 A JP 2009206407A JP 2008049594 A JP2008049594 A JP 2008049594A JP 2008049594 A JP2008049594 A JP 2008049594A JP 2009206407 A JP2009206407 A JP 2009206407A
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Abstract
【解決手段】 水晶基板11にアルミで成膜した薄膜にアルミ線13を超音波で接合し配線を作るワイヤーボンド方法であって、ウエッジヘッドでアルミ線13をアルミ薄膜12の上に押しつける工程と、アルミ線13とアルミ薄膜12に超音波振動を印加する工程とを含み、前記超音波振動の強度を所定値より低く、前記超音波振動の印加時間を所定値より長くする。
【選択図】 図1
Description
12 アルミ薄膜
13 アルミ線
14 フットプリント
21 アルミ薄膜
22 アルミ欠落部
23 アイランド部
24 光源
Claims (3)
- 水晶基板にアルミで成膜した薄膜にアルミ線を超音波で接合し配線を作るワイヤーボンド方法であって、
ウエッジヘッドでアルミ線をアルミ薄膜の上に押しつける工程と、
アルミ線とアルミ薄膜に超音波振動を印加する工程とを含み、
前記超音波振動の強度を所定値より低く、前記超音波振動の印加時間を所定値より長くするワイヤーボンド方法。 - 前記ウエッジヘッドを前記アルミ線に押しつけた直後に超音波振動を印加する請求項1記載のワイヤーボンド方法。
- 水晶基板にアルミで成膜した表面弾性波素子にアルミ線を超音波で接合し配線を作る請求項1記載のワイヤーボンド方法であって、
前記表面弾性波素子のアルミ結線を行うパッドの部分の厚みを周囲より厚くするワイヤーボンド方法。
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JP2008049594A JP2009206407A (ja) | 2008-02-29 | 2008-02-29 | ワイヤーボンド方法 |
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JP2008049594A JP2009206407A (ja) | 2008-02-29 | 2008-02-29 | ワイヤーボンド方法 |
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS61105852A (ja) * | 1985-08-07 | 1986-05-23 | Hitachi Ltd | ワイヤボンダ |
JP2000183117A (ja) * | 1998-12-10 | 2000-06-30 | Matsushita Electric Works Ltd | ワイヤボンディング評価方法と装置及びその記録媒体 |
JP2005045414A (ja) * | 2003-07-24 | 2005-02-17 | Seiko Epson Corp | 弾性表面波デバイス |
JP2007201772A (ja) * | 2006-01-26 | 2007-08-09 | Seiko Epson Corp | 弾性波素子の製造方法、電子機器の製造方法、マスクおよびマスクの製造方法 |
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2008
- 2008-02-29 JP JP2008049594A patent/JP2009206407A/ja not_active Withdrawn
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS61105852A (ja) * | 1985-08-07 | 1986-05-23 | Hitachi Ltd | ワイヤボンダ |
JP2000183117A (ja) * | 1998-12-10 | 2000-06-30 | Matsushita Electric Works Ltd | ワイヤボンディング評価方法と装置及びその記録媒体 |
JP2005045414A (ja) * | 2003-07-24 | 2005-02-17 | Seiko Epson Corp | 弾性表面波デバイス |
JP2007201772A (ja) * | 2006-01-26 | 2007-08-09 | Seiko Epson Corp | 弾性波素子の製造方法、電子機器の製造方法、マスクおよびマスクの製造方法 |
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