JP2009199022A - Optical member - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical member having an excellent anti-reflection film with low luminous reflectance and high luminous transmittance as well as improved film density and excellent scratch resistance in a thin film of a low refractive index layer made of a deposition raw material containing SiO<SB>2</SB>and Al<SB>2</SB>O<SB>3</SB>. <P>SOLUTION: The optical member has a plastic base material and the anti-reflection film formed by vacuum vapor deposition. At least one layer in the anti-reflection film is provided with a layer made of the deposition raw material containing SiO<SB>2</SB>and Al<SB>2</SB>O<SB>3</SB>. The layer is the low refractive index layer with a push-in depth of 70-95 nm when push-in load is 0.98 mN on the basis of nanoindentation. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an optical member having an antireflection film. More specifically, not only has an excellent antireflection film with low luminous reflectance and high luminous transmittance, but also good antireflection with excellent scratch resistance (wear resistance) on plastic substrates. The present invention relates to an optical member having a film, particularly to a plastic lens for spectacles.

2. Description of the Related Art Conventionally, there has been known an optical member in which an antireflection film formed by depositing an inorganic substance on a plastic substrate is provided. Such an optical member has excellent antireflection properties and scratch resistance. However, an optical member having such an antireflection film is not sufficient in impact resistance and heat resistance. As a method for solving the problem, for example, it is known to apply a primer layer made of an organic compound between a plastic substrate and an antireflection film (see, for example, Patent Document 1). However, since the primer layer is formed by applying a primer solution to a plastic substrate and then curing it by heating to form an antireflection film by vapor deposition, the thickness of the primer layer may not be uniform. .
In addition to having an excellent antireflection film with low luminous reflectance and high luminous transmittance, it also has impact resistance, adhesion, heat resistance, scratch resistance and alkali resistance on plastic substrates. As an excellent and good optical member, a hybrid layer made of an inorganic substance and an organic substance is included in at least one antireflection film of an optical member having a plastic substrate and an antireflection film formed by vacuum deposition. An optical member having an antireflection film is known (see, for example, Patent Document 2). However, there is a need for an optical member with further improved scratch resistance.

JP 63-14001 A Japanese Patent Laid-Open No. 2003-202407

The present invention has been made under such circumstances. In addition to having an excellent antireflection film having a low luminous reflectance and a high luminous transmittance, the present invention is composed of SiO ₂ and Al ₂ O _{3 as} optical members. An object of the present invention is to provide an optical member having improved film density and improved scratch resistance in a thin film of a low refractive index layer composed of a layer using a film raw material.

As a result of intensive studies to solve the above-mentioned problems, the present inventors have provided a layer using a film forming material composed of SiO ₂ and Al ₂ O _{3 in} at least one of the constituent layers of the antireflection film. In the measurement with the nanoindentation measurement method (Elionix Co., Ltd., ultra indentation hardness tester, using ENT-2100), by providing a low refractive index layer having specific physical properties, scratch resistance is improved. It has been found that an optical member having an improved antireflection film can be obtained, and based on this finding, the present invention has been completed.
That is, the optical member of the present invention is an optical member having a plastic substrate and an antireflection film formed by a vacuum deposition method, and at least one layer of the antireflection film includes SiO ₂ and Al ₂ O _3. A low refractive index layer comprising a layer using a film forming raw material, and the indentation depth is 70 to 95 nm when the indentation load is 0.98 mN in the measurement by the nanoindentation measurement method. It is characterized by having.

According to the present invention, not only has an excellent antireflection film having a low luminous reflectance and a high luminous transmittance, but also a low film-forming raw material made of SiO ₂ and Al ₂ O _{3 for} optical members. It is possible to provide an optical member having an improved anti-scratch property by improving the film density of the antireflection film including the refractive index layer.

Hereinafter, the present invention will be described in detail.
The optical member of the present invention has a layer made of SiO ₂ and Al ₂ O ₃ using a film forming raw material in an antireflection film formed by a vacuum deposition method, and the layer is a nanoindentation measuring method. In this measurement, the indentation depth is 70 to 95 nm when the indentation load is 0.98 mN. By forming this layer, it is possible to reduce the stress in the antireflection film. Thus, an optical member having an antireflection film with improved scratch resistance can be provided without impairing impact resistance.
Furthermore, in the present invention, by increasing the output in the ion assist method, a layer having a high film density using a film forming material composed of SiO ₂ and Al ₂ O ₃ is formed, and a thin film having high scratch resistance is obtained. Become. In addition, it is not necessary to provide a primer layer that is formed by applying and heating the primer solution in the air, so that it does not require time for curing, prevents contamination, and further increases the thickness of the antireflection film. It can also be controlled accurately.

  The low refractive index layer can be formed in any layer in the antireflection film. However, in order to improve the reflectance characteristics, the above-described physical properties, particularly scratch resistance, at least the outermost layer of the antireflection film, that is, a plastic group. It is particularly preferable to form the layer farthest from the material side. The antireflection film is preferably formed of a plurality of layers, and the low refractive index layer is preferably formed by an ion assist method in order to obtain good film strength and adhesion.

  In the ion assist method, a preferable range regarding the output is higher than the acceleration voltage of 50 to 150 V and the acceleration current of 30 to 100 mA described in Patent Document 2, particularly from the viewpoint of obtaining a good low refractive index layer, and the acceleration voltage is 250 V. 450V and acceleration current 160-220 mA. It is preferable to use a mixed gas of argon and oxygen as the ionizing gas used when the ion assist method is performed, and the argon / oxygen mixing ratio (partial pressure ratio) is about 90/10 to 25/75. preferable. Particularly preferred is 75/25 to 40/60.

Here, the antireflection film of the present invention may be formed directly on the plastic substrate layer, and nickel (Ni), silver (Ag), platinum (Pt), niobium (Nb), titanium (Ti), etc. It may be formed via an underlayer.
In the case of forming via an underlayer, an ion gun pretreatment is performed before forming the underlayer in order to ensure adhesion between the plastic substrate and the underlayer and to make the initial film formation state of the vapor deposition material uniform. You may go. As the ionization gas in the ion gun pretreatment, oxygen, argon (Ar), or the like can be used, and the preferable range of output is an acceleration voltage of 50 to 200 V, from the viewpoint of obtaining particularly good adhesion and scratch resistance. The current is 50 to 150 mA.

The mixing ratio of SiO ₂ and Al ₂ O ₃ for use in the low refractive index layer, Al ₂ O ₃ is preferably 1 to 10 mass% with respect to SiO _2, more preferably 3 to 5 wt%. By mixing Al ₂ O ₃ in this range, it is possible to suppress the compressive stress generated during the film formation of SiO ₂ , and the main component is SiO ₂ having a high film density by film formation by the ion assist method. Thus, a thin film with improved scratch resistance can be obtained.
Regarding film constituent layers other than the low refractive index layer of the antireflection film of the present invention, physical vapor deposition (PVD method), chemical vapor deposition (CVD), sputtering, ion plating, It can also be formed by a plasma CVD method or the like. Although these layers are not particularly limited, in order to obtain physical properties such as a good antireflection effect, as a low refractive index layer, a layer using a film forming material composed of SiO ₂ layer, SiO ₂ and Al ₂ O ₃ , SiO _{2 2} and Al ₂ O ₃ mixed layer, high refractive index layer, at least one kind selected from Nb ₂ O ₅ layer, Ta ₂ O ₅ layer, ZrO ₂ layer, ITO layer, TiN layer and TiO ₂ layer It is preferable to have these layers.

As described above, it is preferable to use a mixed gas of argon and oxygen as the ionization gas used when the ion assist method is performed from the viewpoint of reactivity during film formation. The film formation itself is possible with only argon gas, but the SiO ₂ film tends to be in an oxygen deficient state (SiO _(2-n) ), and as a result, the film is colored brown. This problem is solved by using oxygen gas together to make up for the insufficient oxygen.

In the ion assist method of the present invention, regarding the output, the acceleration voltage is preferably 250 V to 450 V and the acceleration current 160 to 220 mA. By ion assisting with such an ion assist output, a low refractive index layer having an indentation depth of 70 to 95 nm, preferably 70 to 90 nm when the indentation load is 0.98 mN in the measurement by the nanoindentation measurement method. Can be formed.
At this time, if the output is increased too much, SiO ₂ or Al ₂ O ₃ enters the inside of the high refractive index layer, for example, and an optical defect such as an avatar occurs, and if the output is insufficient, scratch resistance, etc. There is a problem that the film hardness required for the glasses cannot be secured.

As a structure of the antireflection film formed on the plastic substrate in the present invention, for example, the following is preferable.
Example 1
First layer: a low refractive index layer (layer thickness: 10 to 180 nm) according to the present invention using a film forming material composed of SiO ₂ and Al ₂ O ₃ ,
Second layer: a high refractive index layer (layer thickness: 1 to 25 nm) made of Nb ₂ O ₅ ,
Third layer: a normal low refractive index layer (layer thickness: 10 to 500 nm) using a film forming material composed of SiO ₂ and Al ₂ O ₃ ,
Fourth layer: high refractive index layer (layer thickness: 10 to 55 nm) made of Nb ₂ O ₅ ,
Fifth layer: a normal low refractive index layer (layer thickness: 10 to 50 nm) using a film forming raw material composed of SiO ₂ and Al ₂ O ₃ ,
Sixth layer: high refractive index layer (layer thickness: 10 to 120 nm) made of Nb ₂ O ₅ ,
Seventh layer: a low refractive index layer (layer thickness: 70 to 100 nm) according to the present invention using a film forming material composed of SiO ₂ and Al ₂ O ₃ .
The layer thickness range is a preferable range in terms of impact resistance, adhesion, heat resistance, and scratch resistance of an optical member having an antireflection film on a plastic substrate.
Here, the first layer is the plastic substrate side.
Example 2
First layer: a low refractive index layer (layer thickness: 10 to 180 nm) according to the present invention using a film forming material composed of SiO ₂ and Al ₂ O ₃ ,
Second layer: high refractive index layer (layer thickness: 1 to 25 nm) made of Ta ₂ O ₅ ,
Third layer: a normal low refractive index layer (layer thickness: 10 to 500 nm) using a film forming material composed of SiO ₂ and Al ₂ O ₃ ,
Fourth layer: a high refractive index layer (layer thickness: 10 to 55 nm) made of Ta ₂ O ₅ ,
Fifth layer: a normal low refractive index layer (layer thickness: 10 to 50 nm) using a film forming raw material composed of SiO ₂ and Al ₂ O ₃ ,
Sixth layer: high refractive index layer (layer thickness: 10 to 120 nm) made of Ta ₂ O ₅ ,
Seventh layer: a low refractive index layer (layer thickness: 70 to 100 nm) according to the present invention using a film forming material composed of SiO ₂ and Al ₂ O ₃ .
The layer thickness range is a preferable range in terms of impact resistance, adhesion, heat resistance, and scratch resistance of an optical member having an antireflection film on a plastic substrate.
Here, the first layer is the plastic substrate side.

Further, the following antireflection film configuration is also preferable.
Example 3
Underlayer: Nb layer (layer thickness 1-5 nm),
First layer: a low refractive index layer (layer thickness: 10 to 180 nm) according to the present invention using a film forming material composed of SiO ₂ and Al ₂ O ₃ ,
Second layer: a high refractive index layer (layer thickness: 1 to 25 nm) made of Nb ₂ O ₅ ,
Third layer: a normal low refractive index layer (layer thickness: 10 to 500 nm) using a film forming material composed of SiO ₂ and Al ₂ O ₃ ,
Fourth layer: high refractive index layer (layer thickness: 10 to 55 nm) made of Nb ₂ O ₅ ,
Fifth layer: a normal low refractive index layer (layer thickness: 10 to 50 nm) using a film forming raw material composed of SiO ₂ and Al ₂ O ₃ ,
Sixth layer: high refractive index layer (layer thickness: 10 to 120 nm) made of Nb ₂ O ₅ ,
Seventh layer: a low refractive index layer (layer thickness: 70 to 100 nm) according to the present invention using a film forming material composed of SiO ₂ and Al ₂ O ₃ .
Here, the first layer is the plastic substrate side.
Example 4
Underlayer: Nb layer (layer thickness 1-5 nm),
First layer: a low refractive index layer (layer thickness: 10 to 180 nm) according to the present invention using a film forming material composed of SiO ₂ and Al ₂ O ₃ ,
Second layer: high refractive index layer (layer thickness: 1 to 25 nm) made of Ta ₂ O ₅ ,
Third layer: a normal low refractive index layer (layer thickness: 10 to 500 nm) using a film forming material composed of SiO ₂ and Al ₂ O ₃ ,
Fourth layer: a high refractive index layer (layer thickness: 10 to 55 nm) made of Ta ₂ O ₅ ,
Fifth layer: a normal low refractive index layer (layer thickness: 10 to 50 nm) using a film forming raw material composed of SiO ₂ and Al ₂ O ₃ ,
Sixth layer: high refractive index layer (layer thickness: 10 to 120 nm) made of Ta ₂ O ₅ ,
Seventh layer: a low refractive index layer (layer thickness: 70 to 100 nm) according to the present invention using a film forming material composed of SiO ₂ and Al ₂ O ₃ .
Here, the first layer is the plastic substrate side.

The layer thickness range is a preferable range in terms of impact resistance, adhesion, heat resistance, and scratch resistance of an optical member having an antireflection film on a plastic substrate. The preferable range of the refractive index of the low refractive index layer using the film forming raw material composed of SiO ₂ and Al ₂ O _{3 according} to the present invention is 1.47 to 1.55 from the viewpoint of obtaining good antireflection properties. It is.

  The material of the plastic substrate used in the present invention is not particularly limited. For example, methyl methacrylate homopolymer, copolymer of methyl methacrylate and one or more other monomers, diethylene glycol bis Allyl carbonate homopolymer, copolymer of diethylene glycol bisallyl carbonate and one or more other monomers, sulfur-containing copolymer, halogen copolymer, polycarbonate, polystyrene, polyvinyl chloride, unsaturated polyester , Polyethylene terephthalate, polyurethane, polythiourethane, episulfide compound and the like.

The optical member of the present invention may have a cured film between the plastic substrate and the base layer. As the cured coating, metal oxide colloidal particles and the following general formula (R ₁ ) _a (R ₂ ) _b Si (OR ₃ ) _{4- (a + b)}
Wherein R ₁ and R ₂ are each independently an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an aryl group having 6 to 10 carbon atoms, or an acyl group having 1 to 8 carbon atoms. Represents an organic group selected from a halogen atom, a glycidoxy group, an epoxy group, an amino group, a mercapto group, a methacryloxy group and a cyano group, and R ₃ represents an alkyl group having 1 to 8 carbon atoms and an acyl group having 1 to 8 carbon atoms. And an organic group selected from aryl groups having 6 to 10 carbon atoms, wherein a and b are each independently an integer of 0 or 1). The

Examples of the metal oxide colloidal particles include tungsten oxide (WO ₃ ), zinc oxide (ZnO), silicon oxide (SiO ₂ ), aluminum oxide (Al ₂ O ₃ ), titanium oxide (TiO ₂ ), zirconium oxide ( ZrO ₂ ), tin oxide (SnO ₂ ), beryllium oxide (BeO), or antimony oxide (Sb ₂ O ₅ ), and the like can be used alone or in combination of two or more.

  Examples of the organosilicon compound represented by the above general formula include methyl silicate, ethyl silicate, n-propyl silicate, i-propyl silicate, n-butyl silicate, sec-butyl silicate, t-butyl silicate, tetraacetoxysilane, methyl Trimethoxysilane, methyltriethoxysilane, methyltripropoxysilane, methyltriacetoxysilane, methyltributoxysilane, methyltripropoxysilane, methyltriamyloxysilane, methyltriphenoxysilane, methyltribenzyloxysilane, methyltriphenethyloxy Silane, glycidoxymethyltrimethoxysilane, glycidoxymethyltriethoxysilane, α-glycidoxyethyltriethoxysilane, β-glycidoxyethyltrimethoxy Silane, β-glycidoxyethyltriethoxysilane, α-glycidoxypropyltrimethoxysilane, α-glycidoxypropyltriethoxysilane, β-glycidoxypropyltrimethoxysilane, β-glycidoxypropyltriethoxy Silane, γ-glycidoxypropyltrimethoxysilane, γ-glycidoxypropyltriethoxysilane, γ-glycidoxypropyltripropoxysilane, γ-glycidoxypropyltributoxysilane, γ-glycidoxypropyltriphenoxy Silane, α-glycidoxybutyltrimethoxysilane, α-glycidoxybutyltriethoxysilane, β-glycidoxybutyltrimethoxysilane, β-glycidoxybutyltriethoxysilane, γ-glycidoxybutyltrimethoxy Silane, γ-glycidoxy Tiltlyethoxysilane, δ-glycidoxybutyltrimethoxysilane, δ-glycidoxybutyltriethoxysilane, (3,4-epoxycyclohexyl) methyltrimethoxysilane, (3,4-epoxycyclohexyl) methyltriethoxysilane , Β- (3,4-epoxycyclohexyl) ethyltrimethoxysilane, β- (3,4-epoxycyclohexyl) ethyltriethoxysilane, β- (3,4-epoxycyclohexyl) ethyltripropoxysilane, β- (3 , 4-epoxycyclohexyl) ethyltributoxysilane, β- (3,4-epoxycyclohexyl) ethyltriphenoxysilane, γ- (3,4-epoxycyclohexyl) propyltrimethoxysilane, γ- (3,4-epoxycyclohexyl) ) Propyl triet Xysilane, δ- (3,4-epoxycyclohexyl) butyltrimethoxysilane, δ- (3,4-epoxycyclohexyl) butyltriethoxysilane, glycidoxymethylmethyldimethoxysilane, glycidoxymethylmethyldiethoxysilane, α -Glycidoxyethylmethyldimethoxysilane, α-glycidoxyethylmethyldiethoxysilane, β-glycidoxyethylmethyldimethoxysilane, β-glycidoxyethylmethyldiethoxysilane, α-glycidoxypropylmethyldimethoxysilane , Α-glycidoxypropylmethyldiethoxysilane, β-glycidoxypropylmethyldimethoxysilane, β-glycidoxypropylmethyldiethoxysilane, γ-glycidoxypropylmethyldimethoxysilane, γ-glycidoxypropylme Rudiethoxysilane, γ-glycidoxypropylmethyldipropoxysilane, γ-glycidoxypropylmethyldibutoxysilane, γ-glycidoxypropylmethyldiphenoxysilane, γ-glycidoxypropylethyldimethoxysilane, γ-glycyl Sidoxypropylethyldiethoxysilane, γ-glycidoxypropylvinyldimethoxysilane, γ-glycidoxypropylvinyldiethoxysilane, γ-glycidoxypropylphenyldimethoxysilane, γ-glycidoxypropylphenyldiethoxysilane, Ethyltrimethoxysilane, ethyltriethoxysilane, vinyltrimethoxysilane, vinyltriacetoxysilane, vinyltrimethoxyethoxysilane, phenyltrimethoxysilane, phenyltriethoxysilane, phenyltria Toxisilane, γ-chloropropyltrimethoxysilane, γ-chloropropyltriethoxysilane, γ-chloropropyltriacetoxysilane, 3,3,3-trifluoropropyltrimethoxysilane, γ-methacryloxypropyltrimethoxysilane, γ- Mercaptopropyltrimethoxysilane, γ-mercaptopropyltriethoxysilane, β-cyanoethyltriethoxysilane, chloromethyltrimethoxysilane, chloromethyltriethoxysilane, N- (β-aminoethyl) γ-aminopropyltrimethoxysilane, N -(Β-aminoethyl) γ-aminopropylmethyldimethoxysilane, γ-aminopropylmethyldimethoxysilane, N- (β-aminoethyl) γ-aminopropyltriethoxysilane, N- (β-aminoethyl) γ-a Nopropylmethyldiethoxysilane, dimethyldimethoxysilane, phenylmethyldimethoxysilane, dimethyldiethoxysilane, phenylmethyldiethoxysilane, γ-chloropropylmethyldimethoxysilane, γ-chloropropylmethyldiethoxysilane, dimethyldiacetoxysilane, γ -Methacryloxypropylmethyldimethoxysilane, γ-methacryloxypropylmethyldiethoxysilane, γ-mercaptopropylmethyldimethoxysilane, γ-mercaptopropylmethyldiethoxysilane, methylvinyldimethoxysilane, methylvinyldiethoxysilane and the like.

  The coating composition for producing the cured film is prepared by a conventionally known method. If desired, various organic solvents and surfactants can be included for the purpose of improving the curing catalyst and wettability during coating and improving the smoothness of the cured film. Furthermore, ultraviolet absorbers, antioxidants, light stabilizers, anti-aging agents, and the like can be added as long as the desired physical properties of the coating composition and cured film are obtained.

  Curing of the coating composition is performed by hot air drying or active energy ray irradiation, and the curing conditions are preferably 70-200 ° C. in hot air, particularly preferably 90-150 ° C. Active energy rays include far infrared rays and the like, and damage due to heat can be kept low. Moreover, the method of apply | coating the coating composition mentioned above to a base material as a method of forming the cured film which consists of a coating composition on a base material is mentioned. As a coating means, a commonly performed method such as a dipping method, a spin coating method, or a spray method can be applied, but a dipping method or a spin coating method is particularly preferable in terms of surface accuracy.

  EXAMPLES Hereinafter, although an Example demonstrates this invention further in detail, this invention is not limited to these Examples. In addition, the physical property evaluation of the optical member obtained in the Example and the comparative example was performed as follows.

(1) 19.6N / cm ² at the steel wool on the surface of the scratch resistant plastic lens, a load of 29.4 N / cm ^2, 10 strokes rubbed, the surface state was evaluated by the following criteria. This test was performed three times.
○: Almost no scratch,
×: scratch Yes Scoring: 2 points when the ○ a load ^{19.6N / cm 2, 29.4N / cm} 2, in three points when ○, and then, as shown in the total score.

(2) Measurement of indentation depth by nano-indentation measurement method A single-layer thin film of a low refractive index layer made of a raw material made of SiO ₂ and Al ₂ O ₃ for an optical member is formed on a glass plate with a thickness of 200 nm. Then, an indentation test was performed using a measuring device for nanoindentation measurement (Elionix, Inc., ultra-fine indentation hardness tester ENT-2100). For the measurement, a triangular pyramid diamond indenter with a ridge interval of 115 degrees was used. The measurement was set so that the indenter was loaded at a load speed of 0.2 mgf / sec, the maximum load of 0.98 mN was held for 1 second, and then unloaded at the same load speed. The indentation depth when the maximum load was reached was read from the indenter indentation depth-load curve obtained from this measurement.
The indentation hardness H was determined using the following formula.
H = P _max / A (h _A ) (1)
A load-displacement curve obtained from the nanoindentation measurement method is shown in FIG.
Here, P _max is the maximum load and A (h _A ) is the contact projected area of the indenter. A (h _A ) is obtained by first obtaining h _A from the maximum indentation depth h _max and the unloading curve gradient and the displacement axis intersection h _S, and then the geometric shape of a regular triangular pyramid (Berkovic) indenter made of diamond ( (Vertical angle 65.03 °). h _A and A (h _A ) are each represented by the following formula.
h _A = h _max −0.75 (h _max −h _S ) (2)
A (h _A ) = 3√3 tan ² (65.03 °) h _A ² (3)
(Here, 0.75 in equation (2) is a constant of the Barkovic indenter.)
Furthermore, the composite Young's modulus E ^* was obtained from the following equation using the slope (contact stiffness) S of the unloading curve and the contact projected area A with the indenter of the load-displacement curve.
S = (2 / π ^1/2 ) E ^* A ^1/2 (4)

(3) Luminous reflectance The luminous reflectance was measured by using a spectrophotometer U-4100 (Hitachi High-Technologies Corporation) to measure luminous reflectance Y%.

(4) Luminous transmittance For luminous transmittance, a luminous reflectance Yt% was measured using a spectrophotometer U-4100 (Hitachi High-Technologies Corporation).

(5) Ion Assist Method Ion assist was performed by using an ion gun RIS-120-D manufactured by Shincron Co., Ltd., a vacuum deposition apparatus, and installed in CES-1050-HP type.
In addition, it was always used in an ion assist state during the deposition of the deposited material.

Example 1
The single layer film was formed using the vacuum apparatus and ion assist apparatus.
The raw material used was a commercially available L5 (trade name: manufactured by Merck & Co., Inc.) in which SiO ₂ and Al ₂ O ₃ were mixed at a ratio of 96: 4, and a film having a thickness of 200 nm was formed on a glass substrate. The ion assist was 350 V / 170 mA, and the ionization gas was Ar and O ₂ introduced at 50:50.
Table 1 shows the measurement of the indentation depth by the nanoindentation measurement method (four measurements and an average value display). The measurement chart is shown in FIG.
As indicated, the indentation depth is 95 nm or less. The composite elastic modulus E ^* is 73.6 GPa.

Example 2
Reflection using a single layer film (low refractive index layer) prepared using the conditions of the single layer film described in Example 1 as the outermost layer, and Ta ₂ O ₅ is used for the high refractive index layer An anti-reflection film was formed on each of the base material A and the base material B, the luminous reflectance, luminous transmittance and scratch resistance of the obtained antireflection film were measured, and the film performance evaluation results are shown in Table 2. Indicated.
Base material A: EYNOA base material (trade name, manufactured by HOYA Co., Ltd., polythiourethane resin), refractive index 1.67, center thickness 1.0 mm, lens power 0.00
Base material B: EYRY base material (trade name, manufactured by HOYA, episulfide compound), refractive index 1.70, center thickness 1.0 mm, lens power 0.00

A seven-layer antireflection film having a single-layer film prepared using the single-layer film conditions described in Example 1 in a low-refractive index layer, and Ta ₂ O ₅ was used for the high-refractive index layer. . The film configuration and film forming conditions of the antireflection film are shown below.
A layer comprising L5 obtained by a vacuum deposition method (vacuum degree: 2.67 × 10 ⁻³ Pa (2 × 10 ⁻⁵ Torr)) and an ion beam assist method of irradiating a mixed ion beam of oxygen and argon on the cured film. [Refractive index 1.48, film thickness 0.10λ (λ is 550 nm)], and then a layer made of tantalum dioxide (film thickness 0.06λ) obtained by an ion beam assist method in which an oxygen ion beam is irradiated. ), An L5 layer [refractive index 1.48 (film thickness 0.50λ)] obtained by an ion beam assist method of irradiating a mixed ion beam of oxygen and argon. Furthermore, a first layer [refractive index 2.20, film thickness 0.2λ] of a three-layer equivalent high refractive index layer made of a tantalum dioxide layer obtained by an ion beam assist method was formed. On this first layer, a second layer [refractive index 1.48 (film thickness 0.12λ)] made of L5 obtained by an ion beam assist method of irradiating a mixed ion beam of oxygen and argon was provided. Further, a third layer (refractive index 2.20, film thickness 0.22λ) made of tantalum dioxide was formed by an ion beam assist method to provide a three-layer equivalent high refractive index. Next, a layer made of L5 [refractive index: 1.48 (film thickness: 0.25λ)] obtained by an ion beam assist method of irradiating a mixed ion beam of oxygen and argon was formed to obtain a plastic lens with an antireflection film. . This lens had a luminous reflectance of 0.4% and a luminous transmittance of 99.1%.

Comparative Example 1
A single layer film was formed using the vacuum apparatus and ion assist apparatus.
The raw material used was Emaron L (trade name: manufactured by Tokyo Product Development Laboratory Co., Ltd.), and a film was formed on a glass substrate with a thickness of 200 nm. The ion assist was 350 V / 170 mA, and the ionization gas was Ar and O ₂ introduced at 50:50.
Table 1 shows the indentation depth measured by the nanoindentation measurement method. The measurement chart is shown in FIG.
The indentation depth was 100 nm or more, and the composite elastic modulus E ^* was 64.1 GPa.
The measurement results are shown in Table 1.

Comparative Example 2
It consists of 7 layers with the single layer film (low refractive index layer) prepared using the conditions of the single layer film described in Comparative Example 1 as the outermost layer, and reflection using Ta ₂ O ₅ for the high refractive index layer The prevention films were formed on the substrate A and the substrate B, respectively. The resulting antireflective film was measured for luminous reflectance, luminous transmittance, and scratch resistance, and the film performance evaluation results are shown in Table 2.

A seven-layer antireflection film having a single-layer film prepared using the single-layer film conditions described in Comparative Example 1 as a low-refractive index layer, and Ta ₂ O ₅ was used for the high-refractive index layer. . The film configuration and film forming conditions of the antireflection film are shown below.
A layer made of Sio2 obtained by a vacuum vapor deposition method (vacuum degree 2.67 × 10 ⁻³ Pa (2 × 10 ⁻⁵ Torr)) and an ion beam assist method of irradiating a mixed ion beam of oxygen and argon on the cured film. [Refractive index 1.468, film thickness 0.11λ (λ is 550 nm)], and then a layer of tantalum dioxide (film thickness 0.06λ) obtained by an ion beam assist method in which an oxygen ion beam is irradiated. ), A layer made of SiO ₂ [refractive index 1.468 (film thickness 0.50λ)] obtained by an ion beam assist method of irradiating a mixed ion beam of oxygen and argon. Furthermore, a first layer [refractive index 2.20 (film thickness 0.2λ)] of a three-layer equivalent high refractive index layer made of a tantalum dioxide layer obtained by an ion beam assist method was formed. On the first layer, oxygen, made of SiO ₂ obtained by an ion beam assisted method of irradiating an argon mixed ion beam was a second layer [refractive index 1.468 (thickness 0.12Ramuda)] was provided. Furthermore, a third layer [refractive index 2.20 (film thickness 0.22λ)] made of tantalum dioxide was formed by an ion beam assist method to provide a three-layer equivalent high refractive index. Next, a layer made of SiO ₂ [refractive index: 1.68 (film thickness: 0.25λ)] obtained by an ion beam assist method of irradiating a mixed ion beam of oxygen and argon is formed to obtain a plastic lens with an antireflection film. It was. The luminous reflectance of this lens was 0.4%.
The luminous reflectance, luminous transmittance and scratch resistance of the antireflection film were measured, and the film performance evaluation results are shown in Table 2.

As shown in the measurement results of scratch resistance of Example 2, the scratch resistance is improved by using the film forming material and film forming method of Example 1.
Moreover, from the measurement result of the indentation depth in the nanoindentation measurement method, the film of Example 2 is deformed because the amount of change in indentation is smaller than that of the film of Comparative Example 2 and the longitudinal elastic modulus value is high. It was found that the film quality was difficult to do.
Therefore, it was shown that the measured value of the indentation depth in the nanoindentation measurement method is effective as a numerical value indicating the scratch resistance of the film.

Not only has an excellent antireflection film with low luminous reflectance and high luminous transmittance, but also a low refractive index layer made of SiO ₂ and Al ₂ O _{3 for} optical members, which uses a film forming raw material. In a thin film, an optical member having improved film density and excellent scratch resistance can be provided.

The load-displacement curve obtained by the nanoindentation measurement method is shown. The measurement result by the nanoindentation measuring method of Example 1 is shown. The measurement result by the nanoindentation measuring method of the comparative example 1 is shown.

Claims (5)

An optical member having a plastic substrate and an antireflection film formed by a vacuum deposition method, wherein at least one layer in the antireflection film uses a film forming raw material made of SiO ₂ and Al ₂ O ₃ An optical member having an antireflection film which is an optical thin film and the optical thin film is a low refractive index layer having an indentation depth of 70 to 95 nm when an indentation load is 0.98 mN in measurement by a nanoindentation measurement method.   The optical member having an antireflection film according to claim 1, wherein the low refractive index layer is formed by an ion assist method. The antireflection film according to claim 2, wherein the low refractive index layer using a film forming material composed of SiO ₂ and Al ₂ O ₃ is formed by an ion assist method using a mixed gas of argon and oxygen. An optical member having. A low-refractive index layer using a film-forming raw material made of SiO ₂ and Al ₂ O ₃ is formed by an ion assist method performed at an acceleration voltage of 250 to 450 V and an acceleration current of 160 to 220 mA. Item 4. An optical member having the antireflection film according to Item 2 or 3.   An optical member having an antireflection film in which at least the outermost layer of the antireflection film is formed of the low refractive index layer according to claim 1.

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