JP2009192454A - Polarization apparatus of cable-like pressure sensor - Google Patents

Polarization apparatus of cable-like pressure sensor Download PDF

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Publication number
JP2009192454A
JP2009192454A JP2008035582A JP2008035582A JP2009192454A JP 2009192454 A JP2009192454 A JP 2009192454A JP 2008035582 A JP2008035582 A JP 2008035582A JP 2008035582 A JP2008035582 A JP 2008035582A JP 2009192454 A JP2009192454 A JP 2009192454A
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flexible pressure
sensitive body
electrode
polarization
cable
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Yuko Fujii
優子 藤井
Taku Hashida
卓 橋田
Yu Fukuda
祐 福田
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Panasonic Corp
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Panasonic Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To surely polarize a flexible pressure sensing element, and improve the productivity and the reliability. <P>SOLUTION: A polarization apparatus includes: the flexible pressure sensing element 2 provided around a core electrode 1; a polarization electrode 3 disposed so as to contact the entire circumference of the flexible pressure sensing element 2, and composed of a plurality of balls and chains formed by a conductive material; a DC voltage generating means 7 connected to the core electrode 1 and the polarization electrode 3; a moving means 5 for moving the flexible pressure sensing element 2 in a path; a heating means 4 for heating the polarization electrode 3; a charge removing means 13 for removing a charge applied to the flexible pressure sensing element 2; a stress applying means 8 for applying a physical stress to the flexible pressure sensing element 2; and an output detecting means 9 for detecting an output generated from the flexible pressure sensing element 2 when the stress applying means 8 operates. Since the flexible pressure sensing element 2 can uniformly contact the balls and chains, the flexible pressure sensing element 2 can be uniformly polarized from the entire circumference. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明はケーブル状圧力センサの分極装置に関するものである。   The present invention relates to a polarization device for a cable-shaped pressure sensor.

従来、この種のケ−ブル状圧力センサは図6に示すように、芯電極101の周囲に可撓性感圧体102を配置し、その周囲に外側電極103と外皮104を順次被覆して構成されている。   Conventionally, as shown in FIG. 6, this type of cable-type pressure sensor has a structure in which a flexible pressure-sensitive body 102 is disposed around a core electrode 101 and an outer electrode 103 and an outer skin 104 are sequentially covered around the flexible pressure-sensitive body 102. Has been.

可撓性感圧体102としては合成ゴムや合成樹脂の中にチタン酸鉛、チタン酸ジルコン酸鉛のセラミック圧電体粉末を添加した複合体が用いられ、一方、外側電極103は可撓性感圧体102の表面に銀系ゴム塗料などの導電塗料を塗着したものが用いられている。   The flexible pressure-sensitive body 102 is a composite in which a ceramic piezoelectric powder of lead titanate or lead zirconate titanate is added to synthetic rubber or synthetic resin, while the outer electrode 103 is a flexible pressure-sensitive body. The surface of 102 is coated with a conductive paint such as a silver-based rubber paint.

上記ケ−ブル状圧力センサの一部、あるいは全面に圧力が印加されたとき、その部分の圧力センサが歪む結果、芯電極101と外側電極103の間に電圧が誘起され、この誘起電圧を利用して圧力を検出している(例えば、特許文献1参照)。   When a pressure is applied to a part or the entire surface of the cable-shaped pressure sensor, the pressure sensor in that part is distorted. As a result, a voltage is induced between the core electrode 101 and the outer electrode 103, and this induced voltage is used. Thus, the pressure is detected (see, for example, Patent Document 1).

また、分極方法としては、芯電極101と外側電極103の間に高電圧を印加して、可撓性感圧体102を分極している(例えば、非特許文献1参照)。   As a polarization method, a high voltage is applied between the core electrode 101 and the outer electrode 103 to polarize the flexible pressure sensitive body 102 (see, for example, Non-Patent Document 1).

この分極により、セラミック粒子の自発分極の方向が電界方向に揃うので、可撓性感圧体102に圧電性が付与される。   Due to this polarization, the direction of spontaneous polarization of the ceramic particles is aligned with the direction of the electric field, so that piezoelectricity is imparted to the flexible pressure-sensitive body 102.

また別の方法として、図7に示すように、可撓性感圧体102をブロック状導電体105の通路に配設し、このブロック状導電体105と芯電極101間に電圧を印加させることにより、前記ブロック状導電体105に配設された部分の可撓性感圧体102を分極している(例えば、特許文献2参照)。   As another method, as shown in FIG. 7, a flexible pressure-sensitive body 102 is disposed in the passage of the block-shaped conductor 105, and a voltage is applied between the block-shaped conductor 105 and the core electrode 101. The portion of the flexible pressure-sensitive body 102 disposed on the block-like conductor 105 is polarized (see, for example, Patent Document 2).

この分極により、セラミック粒子の自発分極の方向が電界方向に揃うので、可撓性感圧体102に圧電性が付与されるものである。
特開昭62−230071号公報 特開2002−280633号公報 「圧電セラミック粉末と合成ゴムとから成る圧電複合材料」紛体と工業、22巻、1号、1990年p50・56
By this polarization, the direction of spontaneous polarization of the ceramic particles is aligned with the direction of the electric field, so that the piezoelectric property is imparted to the flexible pressure-sensitive body 102.
JP-A-62-230071 JP 2002-280633 A "Piezoelectric composite material consisting of piezoelectric ceramic powder and synthetic rubber" Powder and Industry, Vol. 22, No. 1, 1990, p50 / 56

しかしながら、従来のケ−ブル状圧力センサの分極方法では、芯電極101と外側電極103の間に高電圧を印加したときに、可撓性感圧体102中に微小なクラックや空孔などの欠陥が存在する場合、その欠陥部で微小放電が生じる。   However, in the conventional polarization method of the cable-shaped pressure sensor, when a high voltage is applied between the core electrode 101 and the outer electrode 103, defects such as minute cracks and holes in the flexible pressure sensitive body 102 are obtained. Is present, a micro discharge is generated at the defective portion.

この微小放電により、可撓性感圧体102の構成材料が熱的に蒸発、飛散して芯電極101と外側電極103間が短絡し、これら芯電極101と外側電極103間に高電圧を印加できなくなるので、可撓性感圧体102を分極できないという課題を有していた。   By this minute discharge, the constituent material of the flexible pressure-sensitive body 102 is thermally evaporated and scattered, and the core electrode 101 and the outer electrode 103 are short-circuited, and a high voltage can be applied between the core electrode 101 and the outer electrode 103. Therefore, the flexible pressure sensitive body 102 cannot be polarized.

また、ブロック状導電体5に可撓性感圧体2を配設し、可撓性感圧体2を移動手段7によって移動させながら分極する場合において、ブロック状導電体5と可撓性感圧体2との接触抵抗が大きく、移動スピードを上げることができないために生産効率が下がるという
課題があった。
Further, when the flexible pressure-sensitive body 2 is disposed on the block-shaped conductor 5 and polarized while being moved by the moving means 7, the block-shaped conductor 5 and the flexible pressure-sensitive body 2 are arranged. There is a problem that the production efficiency is lowered because the contact resistance is large and the moving speed cannot be increased.

本発明はこのような従来の課題を解決したもので、可撓性感圧体の分極を確実し、生産性や信頼性を向上することを目的とする。   The present invention solves such a conventional problem, and an object of the present invention is to ensure polarization of a flexible pressure-sensitive body and improve productivity and reliability.

前記従来の課題を解決するために、芯電極に周設された可撓性感圧体と、前記可撓性感圧体の全周に接触するように配置され、かつ導電材料からなる複数の玉鎖により構成された分極電極と、前記芯電極と分極電極に接続された直流電圧発生手段と、前記可撓性感圧体を通路で移動させる移動手段と、前記分極電極を加熱する加熱手段と、前記可撓性感圧体に帯電した電荷を除去する帯電除去手段と、前記可撓性感圧体に物理的応力を印加する応力印加手段と、前記応力印加手段の動作時に可撓性感圧体から発生する出力を検出する出力検出手段とから構成したものである。   In order to solve the above-described conventional problems, a flexible pressure-sensitive body provided around a core electrode, and a plurality of ball chains made of a conductive material, arranged to contact the entire circumference of the flexible pressure-sensitive body. A polarization electrode constituted by: a core electrode and a DC voltage generating means connected to the polarization electrode; a movement means for moving the flexible pressure sensitive member in a passage; a heating means for heating the polarization electrode; Generated from the flexible pressure sensitive body during operation of the stress applying means for applying a physical stress to the flexible pressure sensitive body, a charge removing means for removing charges charged in the flexible pressure sensitive body, It comprises output detection means for detecting the output.

これによって、可撓性感圧体に均一に玉鎖を接触させることができるので全周囲から均一に満遍なく分極することが可能となる。このため、分極できていない部分がなく、特性ばらつきのない安定した特性を得ることができる。   As a result, since the ball chain can be brought into contact with the flexible pressure-sensitive body uniformly, it becomes possible to uniformly polarize the entire circumference. For this reason, there are no unpolarized portions, and stable characteristics without characteristic variations can be obtained.

本発明のケーブル状圧力センサは、欠陥部が存在しても全体の可撓性感圧体が分極できなくなることを防ぐとともに、可撓性感圧体が正常に分極できているか否かを検知することができるので、分極装置の異常や可撓性感圧体の異常を即座に検知でき、生産性や信頼性を向上することができる。   The cable-shaped pressure sensor of the present invention prevents the entire flexible pressure sensing element from being unable to polarize even if a defect exists, and detects whether the flexible pressure sensing element is normally polarized. Therefore, it is possible to immediately detect the abnormality of the polarization device and the abnormality of the flexible pressure-sensitive body, and the productivity and reliability can be improved.

第1の発明は、芯電極に周設された可撓性感圧体と、前記可撓性感圧体の全周に接触するように配置され、かつ導電材料からなる複数の玉鎖により構成された分極電極と、前記芯電極と分極電極に接続された直流電圧発生手段と、前記可撓性感圧体を通路で移動させる移動手段と、前記分極電極を加熱する加熱手段と、前記可撓性感圧体に帯電した電荷を除去する帯電除去手段と、前記可撓性感圧体に物理的応力を印加する応力印加手段と、前記応力印加手段の動作時に可撓性感圧体から発生する出力を検出する出力検出手段とから構成したものである。   1st invention was comprised by the several ball chain which is arrange | positioned so that it may contact the perimeter of the said flexible pressure-sensitive body around the said core pressure electrode, and the said flexible pressure-sensitive body, and consists of an electroconductive material. Polarizing electrode, DC voltage generating means connected to the core electrode and the polarizing electrode, moving means for moving the flexible pressure sensitive body in a passage, heating means for heating the polarizing electrode, and flexible pressure sensitive A charge removing means for removing a charge charged on the body; a stress applying means for applying a physical stress to the flexible pressure sensitive body; and an output generated from the flexible pressure sensitive body during the operation of the stress applying means. And output detection means.

これによって、可撓性感圧体を均一に分極することができるとともに、正常に分極できているか否かを分極中に検知することができ、分極装置の異常や可撓性感圧体の異常を即座に検知でき、生産性や信頼性を向上することができる。   As a result, the flexible pressure-sensitive body can be polarized uniformly, and whether or not it is normally polarized can be detected during the polarization, so that the abnormality of the polarization device and the abnormality of the flexible pressure-sensitive body can be immediately detected. It is possible to improve productivity and reliability.

第2の発明は、特に、第1の発明において、帯電除去手段は可撓性感圧体の表面全周に接するように設けた導電体をアース電位に接続する構成にすることによって、簡単な構成で可撓性感圧体に帯電した電荷を除去することができる。   According to a second aspect of the invention, in particular, in the first aspect of the invention, the electrification removing means has a simple structure by connecting a conductor provided so as to be in contact with the entire surface of the flexible pressure-sensitive body to the ground potential. The charge charged on the flexible pressure sensitive body can be removed.

第3の発明は、特に、第2の発明において、導電体を導電性繊維で構成することによって、導電体と可撓性感圧体との接触抵抗を低減することができ、可撓性感圧体への傷などの発生を防ぐことができるので信頼性を向上することができる。   According to a third aspect of the invention, in particular, in the second aspect of the invention, the contact resistance between the conductor and the flexible pressure sensitive body can be reduced by configuring the conductor with a conductive fiber. The occurrence of scratches or the like can be prevented, so that the reliability can be improved.

第4の発明は、特に、第2の発明において、導電体を導電材料で構成した複数の玉鎖で構成することによって、導電体と可撓性感圧体との接触抵抗を低減することができ、可撓性感圧体への傷などの発生を防ぐことができるので信頼性を向上することができる。   In the fourth invention, in particular, in the second invention, the contact resistance between the conductor and the flexible pressure-sensitive body can be reduced by configuring the conductor with a plurality of ball chains made of a conductive material. Since the occurrence of scratches on the flexible pressure sensitive body can be prevented, the reliability can be improved.

さらに、導電体が分極電極と同じ形状なので分極電極の一部をアース電位に接続するだ
けでよいため、容易に可撓性感圧体に帯電した電荷を除去することが可能になる。
Furthermore, since the conductor has the same shape as that of the polarization electrode, it is only necessary to connect a part of the polarization electrode to the ground potential. Therefore, it is possible to easily remove the electric charge charged in the flexible pressure sensitive body.

第5の発明は、特に、第1の発明において、応力印加手段は可撓性感圧体を直接叩く構成にすることによって、簡単な構成で可撓性感圧体に応力を印加することができる。   According to a fifth aspect of the invention, in particular, in the first aspect of the invention, the stress applying unit can apply stress to the flexible pressure sensitive body with a simple configuration by directly hitting the flexible pressure sensitive body.

第6の発明は、特に、第1の発明において、応力印加手段は所定の空気圧を可撓性感圧体に印加する構成にすることによって、簡単な構成で可撓性感圧体に応力を印加することができる。   According to a sixth aspect of the present invention, in particular, in the first aspect, the stress applying means applies a predetermined air pressure to the flexible pressure sensitive body, thereby applying stress to the flexible pressure sensitive body with a simple configuration. be able to.

第7の発明は、特に、第1の発明において、応力印加手段は所定の高さから物体を落下させる構成にすることによって、簡単な構成で可撓性感圧体に応力を印加することができる。   According to a seventh aspect of the invention, in particular, in the first aspect of the invention, the stress applying means can apply the stress to the flexible pressure sensitive body with a simple configuration by dropping the object from a predetermined height. .

第8の発明は、特に、第1の発明において、出力検出手段を可撓性感圧体に接する金属材料と芯電極とで構成することによって、応力印加手段による応力の印加に伴う可撓性感圧体の出力を容易に検出することができる。   According to an eighth aspect of the invention, in particular, in the first aspect of the invention, the output detecting means is composed of a metal material in contact with the flexible pressure-sensitive body and a core electrode, so that the flexible pressure-sensitive force accompanying the application of stress by the stress applying means. The output of the body can be easily detected.

第9の発明は、特に、第1の発明において、出力検出手段の出力が規定範囲から外れていた場合に異常と判断し、警報を発する警報発生手段を設けることにより、異常を早急に検知でき、生産性や信頼性を向上することができる。   In the ninth aspect of the invention, in particular, in the first aspect of the invention, it is possible to quickly detect an abnormality by providing an alarm generation unit that determines that an abnormality occurs when the output of the output detection unit is out of the specified range and issues an alarm. , Improve productivity and reliability.

以下、本発明の実施の形態について、図面を参照しながら説明する。なお、この実施の形態によって本発明が限定されるものではない。   Hereinafter, embodiments of the present invention will be described with reference to the drawings. In addition, this invention is not limited by this embodiment.

(実施の形態1)
図1において、ケーブル状圧力センサは、芯電極1に周設された可撓性感圧体2が形成される。
(Embodiment 1)
In FIG. 1, the cable-shaped pressure sensor is formed with a flexible pressure-sensitive body 2 that is provided around the core electrode 1.

芯電極1は、コイル状金属線や金属細線を束ねた線などが用いられる。   For the core electrode 1, a coiled metal wire, a wire bundled with fine metal wires, or the like is used.

可撓性感圧体2として、エポキシ樹脂、ウレタン樹脂、クロロプレン樹脂、塩素化ポリエチレン、シリコン樹脂等の高分子母材にチタン酸ジルコン酸鉛などの圧電材料を複合化した高分子材料が用いられる。   As the flexible pressure-sensitive body 2, a polymer material in which a piezoelectric material such as lead zirconate titanate is combined with a polymer base material such as epoxy resin, urethane resin, chloroprene resin, chlorinated polyethylene, or silicon resin is used.

この可撓性感圧体2は導電材料で構成した複数の玉鎖で構成された分極電極3に全周で接触するように配設される。   The flexible pressure-sensitive body 2 is disposed so as to be in contact with the entire circumference of the polarization electrode 3 composed of a plurality of ball chains composed of a conductive material.

分極電極3としては、鉄、ステンレス、銅、黄銅、アルミニウム等を用いる。   As the polarization electrode 3, iron, stainless steel, copper, brass, aluminum or the like is used.

本実施の形態において、分極電極3はφ1.5のアルミニウムの球を縦方向に10個配設したものを縦に30個、横に10個配設して構成とした。   In the present embodiment, the polarizing electrode 3 has a configuration in which 10 pieces of aluminum balls of φ1.5 are arranged in the vertical direction and 30 pieces are arranged vertically and 10 pieces are arranged horizontally.

なお、このときの可撓性感圧体2の径は1.6mmであった。さらに、分極電極3を加熱することで可撓性感圧体2を加熱する加熱手段4を分極電極の下部に設けた。   In addition, the diameter of the flexible pressure sensitive body 2 at this time was 1.6 mm. Further, a heating means 4 for heating the flexible pressure sensitive body 2 by heating the polarization electrode 3 is provided below the polarization electrode.

可撓性感圧体2を加熱しながら分極電極3によって分極することで、効率良く分極を行うことができる。   Polarization can be performed efficiently by polarizing the polarization body 3 while heating the flexible pressure sensitive body 2.

さらに、可撓性感圧体2を移動させる移動手段5として回転ドラムを使用した。この回転ドラムの回転スピードを変化させることによって、可撓性感圧体2が分極電極3内に配
設される時間、言い換えれば分極時間を容易に調整することが可能となる。
Further, a rotating drum was used as the moving means 5 for moving the flexible pressure sensitive body 2. By changing the rotation speed of the rotating drum, it is possible to easily adjust the time during which the flexible pressure-sensitive body 2 is disposed in the polarization electrode 3, in other words, the polarization time.

また、移動手段5を設けることによって、自動化することができ、歩留まりを向上することができる。   Moreover, by providing the moving means 5, it can automate and can improve a yield.

また、分極電極3はリード線6bによって電気的に接続される。リード線6aは電気的に直流電圧発生手段7の正極または負極に接続され、芯電極1はリード線6aを介して電気的に直流電圧発生手段7の他の極に接続される。   Moreover, the polarization electrode 3 is electrically connected by the lead wire 6b. The lead wire 6a is electrically connected to the positive or negative electrode of the DC voltage generating means 7, and the core electrode 1 is electrically connected to the other pole of the DC voltage generating means 7 through the lead wire 6a.

このように接続して、直流電圧発生手段7により、芯電極1と分極電極3間に高電圧が印加されるので、可撓性感圧体2が分極される。   In this way, a high voltage is applied between the core electrode 1 and the polarization electrode 3 by the DC voltage generating means 7, so that the flexible pressure sensitive body 2 is polarized.

本実施の形態において、印加電圧は7kV/mmで分極を行った。   In the present embodiment, polarization was performed at an applied voltage of 7 kV / mm.

可撓性感圧体2の中に微少な欠陥が含まれ、その部分が分極電極13に配設されているとき、欠陥部で生じる微少な放電により分極電極13と芯電極11間に高電流が流れ、短絡するために分極できなくなるが、欠陥部が分極電極13から脱離し、分極電極13に配設されている可撓性感圧体12中に欠陥がなければ、分極電極13と芯電極11間の絶縁性は再び回復するので、分極が可能となる。   When a minute defect is included in the flexible pressure-sensitive body 2 and the portion is disposed on the polarization electrode 13, a high current is generated between the polarization electrode 13 and the core electrode 11 due to a minute discharge generated at the defect portion. Although it cannot be polarized because it flows and is short-circuited, if the defect portion is detached from the polarization electrode 13 and there is no defect in the flexible pressure-sensitive body 12 disposed on the polarization electrode 13, the polarization electrode 13 and the core electrode 11 Since the insulation between them is restored again, polarization becomes possible.

このように本実施の形態の分極装置によれば、欠陥を含む部分が分極電極13に配設されているときのみ、分極はできないがそれ以外の場合は分極可能となる。   As described above, according to the polarization device of the present embodiment, polarization cannot be performed only when a portion including a defect is disposed on the polarization electrode 13, but polarization is possible in other cases.

従って、欠陥の存在により可撓性感圧体12が全体にわたって分極できなくなることはない。   Therefore, the flexible pressure-sensitive body 12 cannot be polarized as a whole due to the presence of defects.

さらに、分極電極13はコイル形状をなしているので、図7に示す従来のブロック状導電体105を使用した場合と比較すると可撓性感圧体2との接触面積が少なくなり、接触抵抗を低減できる。   Further, since the polarization electrode 13 has a coil shape, the contact area with the flexible pressure-sensitive body 2 is reduced and the contact resistance is reduced as compared with the case where the conventional block-shaped conductor 105 shown in FIG. 7 is used. it can.

特に、直流電圧発生手段7を作動させると、芯電極1と分極電極3間に高電圧が印加されるため、可撓性感圧体2は分極電極3の方向に引っ張られるため、分極電極3と可撓性感圧体2間の接触抵抗は増大することとなる。   In particular, when the DC voltage generating means 7 is operated, a high voltage is applied between the core electrode 1 and the polarization electrode 3, and the flexible pressure sensitive body 2 is pulled in the direction of the polarization electrode 3. The contact resistance between the flexible pressure sensitive bodies 2 will increase.

図7に示す従来の分極装置を用いた場合では、ブロック状導電体105の全面で可撓性感圧体102を分極するので、移動手段107を用いて可撓性感圧体102を引っ張っても、接触抵抗が大きいので移動しにくく、無理に引っ張ると可撓性感圧体102表面に摩擦による傷が生じていた。また、この傷が可撓性感圧体102の絶縁低下の要因となり、分極中に傷部分が放電し歩留まりの低下に繋がっていた。   In the case of using the conventional polarization device shown in FIG. 7, since the flexible pressure sensitive body 102 is polarized on the entire surface of the block-like conductor 105, even if the flexible pressure sensitive body 102 is pulled using the moving means 107, Since the contact resistance is large, it is difficult to move, and when it is pulled forcefully, the surface of the flexible pressure-sensitive body 102 is scratched by friction. In addition, this scratch causes a decrease in insulation of the flexible pressure-sensitive body 102, and the scratch portion is discharged during polarization, leading to a decrease in yield.

一方、本実施の形態の分極装置においては、分極電極3が玉鎖状をなしているので接触抵抗が低減でき、移動手段5で可撓性感圧体2を引っ張っても、この可撓性感圧体2表面には摩擦による傷は生じていなかった。このため、傷による歩留まり低下を抑制することができる。   On the other hand, in the polarization device of the present embodiment, since the polarization electrode 3 has a ball chain shape, the contact resistance can be reduced, and even if the flexible pressure sensitive body 2 is pulled by the moving means 5, this flexible pressure sensitive pressure sensor can be used. The surface of the body 2 was not scratched by friction. For this reason, the yield fall by a damage | wound can be suppressed.

さらに、接触抵抗が抑制されるので移動手段5のスピード向上も可能になり生産効率を向上することができる。   Furthermore, since the contact resistance is suppressed, the speed of the moving means 5 can be improved and the production efficiency can be improved.

また、図7の従来のブロック状導電体105は可撓性感圧体102を配設しやすくさせるため、溝を切った凹状にしているが、その場合ブロック状導電体105と可撓性感圧体
102とが対向しない面があり、その部分の可撓性感圧体102は分極できないこととなる。
Further, the conventional block-shaped conductor 105 of FIG. 7 is formed in a concave shape with a groove to facilitate disposing the flexible pressure-sensitive body 102. In this case, the block-shaped conductor 105 and the flexible pressure-sensitive body are provided. There is a surface that does not face 102, and the flexible pressure-sensitive body 102 at that portion cannot be polarized.

そのため可撓性感圧体102に特性ばらつきが生じてしまい、特性や信頼性の低下の要因になる恐れがあった。   For this reason, characteristic variation occurs in the flexible pressure-sensitive body 102, which may cause a decrease in characteristics and reliability.

しかし、本実施の形態では、分極電極3が玉鎖状をなし、可撓性感圧体2の外周にこの分極電極3が配設しているので、分極できない部分が生じることはない。   However, in the present embodiment, the polarization electrode 3 has a ball chain shape, and the polarization electrode 3 is disposed on the outer periphery of the flexible pressure-sensitive body 2, so that a portion that cannot be polarized does not occur.

図7に示す従来の分極装置で分極した可撓性感圧体102に外部電極や外皮を形成し、ケーブル状圧力センサとして完成した後に振動を加えて、その時に発生する出力電圧を測定した結果、ブロック状導電体105に面していない部分と面していた部分とでは約1.5倍ほどの出力差が生じていた。   As a result of forming an external electrode and outer skin on the flexible pressure sensitive body 102 polarized by the conventional polarization device shown in FIG. 7 and completing vibration as a cable-shaped pressure sensor, and measuring the output voltage generated at that time, An output difference of about 1.5 times occurred between the portion not facing the block-like conductor 105 and the portion facing the block-like conductor 105.

しかし本実施の形態の分極装置を用いた場合では、どの部分から振動を印加しても出力の差は殆ど見られなかった。   However, in the case of using the polarization device of the present embodiment, the difference in output was hardly seen no matter which part was applied with vibration.

また、図7の従来のブロック状導電体105に均熱のために蓋を設けた場合や通路を孔にした場合においては、可撓性感圧体102を加熱しすぎた場合、可撓性感圧体102に含まれる揮発成分がブロック状導電体105の通路内に付着し、分極電圧はその付着物を介して可撓性感圧体102に印加されるので、分極効率が低下するという課題もあった。   In addition, when the conventional block-shaped conductor 105 of FIG. 7 is provided with a lid for soaking or when the passage is made a hole, if the flexible pressure-sensitive body 102 is heated too much, the flexible pressure-sensitive body Volatile components contained in the body 102 adhere to the passage of the block-like conductor 105, and the polarization voltage is applied to the flexible pressure-sensitive body 102 through the attached matter, so that there is a problem that the polarization efficiency is lowered. It was.

しかし、本実施の形態では、分極電極3が玉鎖状なので揮発成分が外気へ拡散され分極電極3内に付着することを抑制することができ、直流電圧発生手段7の出力が付着物によって阻害されることがなく、効率良い分極が可能となる。   However, in the present embodiment, since the polarization electrode 3 has a ball chain shape, it is possible to prevent the volatile component from being diffused into the outside air and adhering to the polarization electrode 3, and the output of the DC voltage generating means 7 is hindered by the adhering matter. Thus, efficient polarization is possible.

さらに、可撓性感圧体2を分極電極3内に一度配設してしまえば、次のロットを分極する際は芯電極1同士を結ぶだけでよく、改めて分極電極3内に配設する必要がない。   Further, once the flexible pressure-sensitive body 2 is arranged in the polarization electrode 3, it is only necessary to connect the core electrodes 1 to each other when the next lot is polarized, and it is necessary to arrange in the polarization electrode 3 again. There is no.

このため簡単に可撓性感圧体2を配設することができる。   For this reason, the flexible pressure-sensitive body 2 can be easily disposed.

また、本実施の形態1において、可撓性感圧体2の芯電極1をアース電位にして、芯電極1と分極電極3の間に直流電圧を印加した。   In the first embodiment, the core electrode 1 of the flexible pressure-sensitive body 2 is set to the ground potential, and a DC voltage is applied between the core electrode 1 and the polarization electrode 3.

このように接続することで、人体に危険な直流高電圧部分を分極電極3に限定でき、人体への安全を確保できる。   By connecting in this way, it is possible to limit the direct-current high voltage portion that is dangerous to the human body to the polarization electrode 3, and to ensure safety to the human body.

さらに、可撓性感圧体2が正常に分極されているか否かを判断するため、本実施の形態の分極装置には、可撓性感圧体2に物理的応力を印加する応力印加手段8を設け、この応力印加手段8動作時に可撓性感圧体2から発生する出力を検出する出力検出手段9を設けている。   Furthermore, in order to determine whether or not the flexible pressure sensitive body 2 is normally polarized, the polarization device of the present embodiment includes a stress applying means 8 that applies physical stress to the flexible pressure sensitive body 2. Provided is an output detecting means 9 for detecting an output generated from the flexible pressure sensitive body 2 when the stress applying means 8 is operated.

応力印加手段8はモータ10を利用してヘッダ11が可撓性感圧体2を直接接してヘッダ11が一定ストロークで一定間隔で殴打することにより応力を印加する構成とした。   The stress applying means 8 is configured to apply the stress by using the motor 10 so that the header 11 directly contacts the flexible pressure-sensitive body 2 and the header 11 strikes at constant intervals with a constant stroke.

また、出力検出手段9は、可撓性感圧体2に接する金属材料12と芯電極1とで構成し、可撓性感圧体2に応力が印加された時に発生する電荷を電圧値として検出している。   The output detecting means 9 is composed of a metal material 12 in contact with the flexible pressure sensitive body 2 and the core electrode 1, and detects the electric charge generated when stress is applied to the flexible pressure sensitive body 2 as a voltage value. ing.

本実施の形態においては、電圧値を検出したが、静電容量や電荷量を直接検知してもよい。   In the present embodiment, the voltage value is detected, but the capacitance and the charge amount may be directly detected.

なお、この応力印加の構成では移動手段による可撓性感圧体の移動は常時行われているので、応力印加と可撓性感圧体の出力検出のタイミングをあわせて、正常に分極できなかった感圧体の部位を正確に検出することができる。   In this stress application configuration, since the flexible pressure sensitive body is always moved by the moving means, the sense that the polarization could not be normally performed at the same time when the stress was applied and the output of the flexible pressure sensitive body was detected. It is possible to accurately detect the site of the pressure body.

但し、分極直後の可撓性感圧体2表面には直流電圧発生手段7によって印加された高電圧の影響で電荷が帯電しており、そのまま応力印加手段8によって可撓性感圧体2から発生する出力を検出すると、帯電の影響で出力に誤差が生じてしまう。   However, the surface of the flexible pressure sensitive body 2 immediately after polarization is charged by the influence of the high voltage applied by the DC voltage generating means 7 and is generated from the flexible pressure sensitive body 2 by the stress applying means 8 as it is. When the output is detected, an error occurs in the output due to the influence of charging.

そのため、応力印加手段8を動作させる前に可撓性感圧体2に帯電した電荷を除去する必要があり、本実施の形態は帯電除去手段13を設けて可撓性感圧体2表面の電荷を除去する構成とした。   For this reason, it is necessary to remove the electric charge charged on the flexible pressure-sensitive body 2 before operating the stress applying means 8. In this embodiment, the charge removing means 13 is provided to charge the surface of the flexible pressure-sensitive body 2. It was set as the structure removed.

帯電除去手段13は可撓性感圧体の表面全周に接するように設けた導電体をアース電位に接続する構成とした。   The electrification removing means 13 is configured to connect a conductor provided so as to be in contact with the entire surface of the flexible pressure-sensitive body to the ground potential.

本実施の形態において、帯電除去手段13の導電体14を導電性繊維で構成し、この導電性繊維をアース電位に接続することで帯電した電荷を除去する構成にした。   In the present embodiment, the conductor 14 of the charge removing means 13 is made of a conductive fiber, and the charged charge is removed by connecting the conductive fiber to the ground potential.

本構成にすることによって、帯電した電荷の影響を受けることがないので、出力ばらつきを約33%低減することができた。   By adopting this configuration, the output variation can be reduced by about 33% because there is no influence of the charged electric charge.

さらに導電体14を導電性繊維で構成することによって、導電体14と可撓性感圧体2との接触抵抗を低減することができ、可撓性感圧体2への傷などの発生を防ぐことができるので信頼性を向上することができる。   Further, by configuring the conductor 14 with a conductive fiber, the contact resistance between the conductor 14 and the flexible pressure-sensitive body 2 can be reduced, and the occurrence of damage to the flexible pressure-sensitive body 2 can be prevented. Therefore, reliability can be improved.

なお本実施例において帯電除去手段13として導電性繊維を使用したが、可撓性感圧体2に帯電する電荷を除去する構成であればこれに限るものではない。   In the present embodiment, the conductive fibers are used as the charge removing means 13, but the present invention is not limited to this as long as it is configured to remove the charges charged in the flexible pressure sensitive body 2.

例えば、図2に示すように、導電体14として、分極電極3と同様の玉鎖状の電極を設け、この電極をアース電位に接続する構成にしてもよい。   For example, as shown in FIG. 2, a ball chain-like electrode similar to the polarization electrode 3 may be provided as the conductor 14, and this electrode may be connected to the ground potential.

本構成の場合、導電体14が分極電極3と同じ形状なので、この分極電極3の一部をアース電位に接続するだけでよいため、容易に可撓性感圧体2に帯電した電荷を除去することが可能になる。   In the case of this configuration, since the conductor 14 has the same shape as the polarization electrode 3, it is only necessary to connect a part of the polarization electrode 3 to the ground potential. Therefore, the charge charged on the flexible pressure-sensitive body 2 can be easily removed. It becomes possible.

さらに、玉鎖状にすることよって、導電体14と可撓性感圧体2との接触抵抗を低減することができ、可撓性感圧体2への傷などの発生を防ぐことができるので信頼性を向上することができる。   Further, by forming the ball chain shape, the contact resistance between the conductor 14 and the flexible pressure sensitive body 2 can be reduced, and the occurrence of scratches on the flexible pressure sensitive body 2 can be prevented. Can be improved.

本構成にすることによって、応力印加手段8の印加応力に応じた出力を出力検出手段9によって検出することが可能になり、可撓性感圧体2の性能評価の信頼性を向上することが可能になった。   By adopting this configuration, the output corresponding to the applied stress of the stress applying means 8 can be detected by the output detecting means 9, and the reliability of the performance evaluation of the flexible pressure sensitive body 2 can be improved. Became.

特に、本実施の形態において、分極電極3は玉鎖状をなしているので、図6に示す従来の分極装置に比べて可撓性感圧体2を均一に分極することができるため、可撓性感圧体2の表面全体に電荷が溜まりやすくなっている。   In particular, in this embodiment, since the polarization electrode 3 has a ball chain shape, the flexible pressure-sensitive body 2 can be polarized more uniformly than the conventional polarization device shown in FIG. Electric charges are easily accumulated on the entire surface of the pressure-sensitive pressure body 2.

そのため、帯電除去手段13によって溜まった電荷を除去する必要がある。   Therefore, it is necessary to remove the charge accumulated by the charge removing means 13.

本実施の形態の分極装置において、分極が正常に実施された可撓性感圧体2の出力検出手段9の出力信号は規定値以上で、規定範囲内の信号を得ることができたが、分極していない可撓性感圧体2の場合では出力検出手段9の出力は規定値を得ることはできなかった。   In the polarization device of the present embodiment, the output signal of the output detection means 9 of the flexible pressure-sensitive body 2 that has been normally polarized is not less than a specified value, and a signal within a specified range could be obtained. In the case of the flexible pressure-sensitive body 2 that is not provided, the output of the output detection means 9 could not obtain a specified value.

このように本発明の分極装置によれば、可撓性感圧体の分極をした後に、応力印加手段8によって可撓性感圧体2に応力を印加し、その時に発生する信号を検出することによって、可撓性感圧体2が正常に分極できているか否かを検知することができる。   As described above, according to the polarizing device of the present invention, after the flexible pressure sensitive body is polarized, stress is applied to the flexible pressure sensitive body 2 by the stress applying means 8 and a signal generated at that time is detected. It is possible to detect whether or not the flexible pressure-sensitive body 2 is normally polarized.

このため、分極装置の異常や可撓性感圧体2の異常を即座に検知でき、生産性や信頼性を向上することができる。   For this reason, the abnormality of the polarization device and the abnormality of the flexible pressure-sensitive body 2 can be detected immediately, and the productivity and reliability can be improved.

(実施の形態2)
図3は、本発明の実施の形態2を示し、実施の形態1と異なるところは、応力印加手段8を所定の空気圧を可撓性感圧体2に印加することで、この可撓性感圧体2に応力を印加している点である。
(Embodiment 2)
FIG. 3 shows the second embodiment of the present invention. The difference from the first embodiment is that the stress applying means 8 applies a predetermined air pressure to the flexible pressure-sensitive body 2, so that the flexible pressure-sensitive body is shown. This is a point where stress is applied to 2.

なお、図1、2と同様な作用を行うものについては同一の符号を付し、具体的な説明は実施の形態1のものを援用する。   In addition, the same code | symbol is attached | subjected about what performs the effect | action similar to FIG. 1, 2, and the thing of Embodiment 1 is used for concrete description.

本実施の形態において、応力印加手段8は、圧力を印加するポンプ15と、このポンプ15からの空気を可撓性感圧体2に伝達するパイプ16で構成している。   In the present embodiment, the stress applying means 8 includes a pump 15 that applies pressure, and a pipe 16 that transmits air from the pump 15 to the flexible pressure-sensitive body 2.

本構成にすることによって、簡単な構成で可撓性感圧体2に応力を印加することができるので、可撓性感圧体2が正常に分極できているか否かを検知することができる。   By adopting this configuration, it is possible to apply stress to the flexible pressure sensitive body 2 with a simple configuration, and therefore it is possible to detect whether or not the flexible pressure sensitive body 2 is normally polarized.

このため、分極装置の異常や可撓性感圧体の異常を即座に検知でき、生産性や信頼性を向上することができる。   For this reason, it is possible to immediately detect the abnormality of the polarization device and the abnormality of the flexible pressure-sensitive body, and the productivity and reliability can be improved.

また、図4に示すように空気圧を印加するだけではなく、パイプ16内に物体17としてボールを配設し、所定の高さから落下させることで可撓性感圧体2に応力を印加させ、印加後は落下させたボールをポンプ15で吸引し、所定の高さまで戻す構成にしている。本構成においても、実施の形態1及び空気圧を印加させた時と同様の効果を得ることができる。   In addition to applying air pressure as shown in FIG. 4, a ball is disposed as an object 17 in the pipe 16 and dropped from a predetermined height to apply stress to the flexible pressure-sensitive body 2, After application, the dropped ball is sucked by the pump 15 and returned to a predetermined height. Also in this configuration, the same effect as in the first embodiment and when air pressure is applied can be obtained.

(実施の形態3)
図5は、本発明の実施の形態3を示し、実施の形態1,2と異なるところは、出力検出手段9の出力が規定範囲から外れていた場合には、異常と判断して警報を発する警報発生手段18を設けている点である。
(Embodiment 3)
FIG. 5 shows the third embodiment of the present invention. The difference from the first and second embodiments is that when the output of the output detection means 9 is out of the specified range, it is judged as abnormal and an alarm is issued. The alarm generation means 18 is provided.

なお、図1、2と同様な作用を行うものについては同一の符号を付し、具体的な説明は実施の形態1,2のものを援用する。   In addition, the same code | symbol is attached | subjected about what performs the effect | action similar to FIG. 1, 2, and the thing of Embodiment 1, 2 is used for concrete description.

本構成にすることによって、異常を早急に検知でき、生産性や信頼性を向上することができる。また、本実施の形態では警報発生手段18によって異常を知らせるが、異常を検知して直流電圧発生手段7を停止させても良い。   By adopting this configuration, it is possible to quickly detect an abnormality and improve productivity and reliability. Further, in the present embodiment, the abnormality is notified by the alarm generation means 18, but the abnormality may be detected and the DC voltage generation means 7 may be stopped.

そして、異常と判定されるような、出力が規定範囲からはずれた場合には、直流電圧発生手段7の出力が所定値から外れている、あるいは可撓性感圧体2の線径が所定の範囲から外れているというような異常が想定されるので、例えば、直流電圧発生手段7の出力が
所定値から外れているのであれば、所定値に戻す、可撓性感圧体2の線径が所定の範囲から外れているのであれば直流電圧発生手段7の出力を線径に応じて調整するというような対処を行うことができる。
When the output is determined to be abnormal and the output deviates from the specified range, the output of the DC voltage generating means 7 deviates from the predetermined value, or the wire diameter of the flexible pressure sensitive body 2 is within the predetermined range. For example, if the output of the DC voltage generating means 7 is out of a predetermined value, the wire diameter of the flexible pressure-sensitive body 2 is returned to the predetermined value. If it is out of the range, it is possible to take measures such as adjusting the output of the DC voltage generating means 7 in accordance with the wire diameter.

以上のように、本発明にかかるケ−ブル状圧力センサの分極装置は、欠陥部が存在しても全体の可撓性感圧体が分極できなくなることを防ぐとともに、可撓性感圧体と導電体間の摩擦を低減することができるので、可撓性感圧体の移動スピードを向上し、生産性を向上できるとともに、摩擦による可撓性感圧体のこすれで生じる欠陥を防ぐことができるので、安定して分極することができる。   As described above, the polarization device for the cable-shaped pressure sensor according to the present invention prevents the entire flexible pressure sensing element from being polarized even if a defect exists, and prevents the flexible pressure sensing element from conducting. Since the friction between the bodies can be reduced, the moving speed of the flexible pressure sensitive body can be improved, productivity can be improved, and defects caused by rubbing the flexible pressure sensitive body due to friction can be prevented. It can be polarized stably.

さらに、可撓性感圧体が正常に分極できているか否かを検知することができるので、分極装置の異常や可撓性感圧体の異常を即座に検知でき、生産性や信頼性を向上できる分極装置である。このため、ケーブル状圧力センサに限らず、分極が必要な圧電体の分極に適用できるものである。このため、ケーブル状圧力センサに限らず、分極が必要な圧電体の分極に適用できるものである。   Furthermore, since it is possible to detect whether or not the flexible pressure sensitive body is normally polarized, it is possible to immediately detect the abnormality of the polarization device and the abnormality of the flexible pressure sensitive body, thereby improving productivity and reliability. It is a polarization device. For this reason, it is applicable not only to a cable-shaped pressure sensor but also to polarization of a piezoelectric body that requires polarization. For this reason, it is applicable not only to a cable-shaped pressure sensor but also to polarization of a piezoelectric body that requires polarization.

本発明の実施の形態1における分極装置の構成を示す外観斜視図FIG. 1 is an external perspective view showing a configuration of a polarization device in Embodiment 1 of the present invention. 本発明の実施の形態1における他の分極装置の構成を示す外観斜視図FIG. 3 is an external perspective view showing the configuration of another polarization device according to Embodiment 1 of the present invention. 本発明の実施の形態2における分極装置の構成を示す外観斜視図External appearance perspective view which shows the structure of the polarization apparatus in Embodiment 2 of this invention. 本発明の実施の形態2における他の分極装置の構成を示す外観斜視図External appearance perspective view which shows the structure of the other polarizing apparatus in Embodiment 2 of this invention 本発明の実施の形態3における分極装置の構成を示す外観斜視図External appearance perspective view which shows the structure of the polarization apparatus in Embodiment 3 of this invention. 従来の圧電ケーブルセンサの外観図External view of conventional piezoelectric cable sensor 従来の分極装置の構成を示す外観見取り図Outline drawing showing the configuration of a conventional polarization device

符号の説明Explanation of symbols

1 芯電極
2 可撓性感圧体
3 分極電極
4 加熱手段
5 移動手段
7 直流電圧発生手段
8 応力印加手段
9 出力検出手段
12 金属材料
13 帯電除去手段
14 導電体
18 警報発生手段
1 core electrode 2 flexible pressure sensitive body
DESCRIPTION OF SYMBOLS 3 Polarizing electrode 4 Heating means 5 Moving means 7 DC voltage generating means 8 Stress applying means 9 Output detecting means 12 Metal material 13 Charge removing means 14 Conductor 18 Alarm generating means

Claims (9)

芯電極に周設された可撓性感圧体と、前記可撓性感圧体の全周に接触するように配置され、かつ導電材料からなる複数の玉鎖により構成された分極電極と、前記芯電極と分極電極に接続された直流電圧発生手段と、前記可撓性感圧体を通路で移動させる移動手段と、前記分極電極を加熱する加熱手段と、前記可撓性感圧体に帯電した電荷を除去する帯電除去手段と、前記可撓性感圧体に物理的応力を印加する応力印加手段と、前記応力印加手段の動作時に可撓性感圧体から発生する出力を検出する出力検出手段とからなるケーブル状圧力センサの分極装置。 A flexible pressure-sensitive body provided around the core electrode; a polarization electrode that is disposed so as to be in contact with the entire circumference of the flexible pressure-sensitive body and is formed of a plurality of ball chains made of a conductive material; and the core DC voltage generating means connected to the electrode and the polarizing electrode, moving means for moving the flexible pressure sensitive body in the passage, heating means for heating the polarizing electrode, and charge charged to the flexible pressure sensitive body A charge removing means for removing, a stress applying means for applying a physical stress to the flexible pressure sensitive body, and an output detecting means for detecting an output generated from the flexible pressure sensitive body during operation of the stress applying means. Cable pressure sensor polarization device. 帯電除去手段は可撓性感圧体の表面全周に接するように設けた導電体をアース電位に接続する構成とした請求項1記載のケーブル状圧力センサの分極装置。 2. The polarization device for a cable-shaped pressure sensor according to claim 1, wherein the electrification removing means is configured to connect a conductor provided so as to be in contact with the entire surface of the flexible pressure-sensitive body to a ground potential. 導電体を導電性繊維で構成した請求項2記載のケーブル状圧力センサの分極装置。 The polarization device for a cable-shaped pressure sensor according to claim 2, wherein the conductor is made of a conductive fiber. 導電体を導電材料からなる複数の玉鎖で構成した請求項2記載のケーブル状圧力センサの分極装置。 The polarization device for a cable-shaped pressure sensor according to claim 2, wherein the conductor is composed of a plurality of ball chains made of a conductive material. 応力印加手段は可撓性感圧体を直接叩いて応力を印加する構成とした請求項1記載のケーブル状圧力センサの分極装置。 2. The polarization device for a cable-shaped pressure sensor according to claim 1, wherein the stress applying means is configured to apply stress by directly hitting a flexible pressure sensitive body. 応力印加手段は所定の空気圧を可撓性感圧体に印加する構成とした請求項1記載のケーブル状圧力センサの分極装置。 2. The polarization device for a cable-shaped pressure sensor according to claim 1, wherein the stress applying means applies a predetermined air pressure to the flexible pressure sensitive body. 応力印加手段は所定の高さから物体を落下させて可撓性感圧体に印加する構成とした請求項1記載のケーブル状圧力センサの分極装置。 2. A polarization device for a cable-shaped pressure sensor according to claim 1, wherein the stress applying means drops the object from a predetermined height and applies the object to the flexible pressure sensitive body. 出力検出手段は可撓性感圧体に接する金属材料と芯電極とで構成し、金属材料と芯電極間の出力を検出する構成とした請求項1記載のケーブル状圧力センサの分極装置。 2. The polarization device for a cable-shaped pressure sensor according to claim 1, wherein the output detection means is constituted by a metal material in contact with the flexible pressure sensitive body and a core electrode, and detects an output between the metal material and the core electrode. 出力検出手段の出力が規定範囲から外れていた場合には異常と判断して警報を発する警報発生手段を設けた請求項1記載のケーブル状圧力センサの分極装置。 2. The polarization device for a cable-like pressure sensor according to claim 1, further comprising alarm generating means for determining that an abnormality occurs when the output of the output detecting means is out of a specified range.
JP2008035582A 2008-02-18 2008-02-18 Polarization apparatus of cable-like pressure sensor Pending JP2009192454A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108885146A (en) * 2016-01-29 2018-11-23 株式会社理光 Voltage sensitive sensor, grabbing device and robot

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108885146A (en) * 2016-01-29 2018-11-23 株式会社理光 Voltage sensitive sensor, grabbing device and robot

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