JP2009190054A - Energy beam boring method, liquid droplet discharging head manufacturing method using the same, and energy beam boring device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an energy beam boring method which prevents a recess from being formed through irradiation of energy beam while suppressing the increase of cost and processing time and is capable of forming a plurality of minute holes on a member to be processed at high density. <P>SOLUTION: An irradiation area 47 at the member 11 to be processed is moved in an alignment direction in a through-hole pattern to allow the energy beam L to make the irradiation areas 47 formed on the member 11 partially overlap with each other using a shielding mechanism 43 for enabling a shielding member 44 to be inserted into/removed from a light path. A plurality of through-holes 15 are formed by sequentially increasing depth dimension through sequential irradiation of the energy beam L onto the member 11. The shielding mechanism 43 inserts the shielding member 44 into the light path corresponding to the movement of the irradiation area 47 at the member 11 to prevent the energy beam L which does not contribute to the formation of a through-hole 15 at the irradiation area 47 from being irradiated to the member 11. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an energy beam drilling method for forming holes in a workpiece using an energy beam, and more particularly, an energy beam suitable for forming a droplet discharge head for discharging droplets for image recording. The present invention relates to a drilling method.

  In recent years, a recording apparatus (droplet discharge apparatus) that records an image using an ink jet type droplet discharge head that prints on a sheet of paper by discharging ink droplets (droplets) toward the sheet, such as a printer, The number of facsimiles and copiers is increasing. Various droplet discharge heads are known. In order to form a nozzle plate having a plurality of nozzle holes for discharging ink droplets and a liquid chamber corresponding to each nozzle. And an actuator provided corresponding to each nozzle to give ejection energy to the ink in the liquid chamber, and each actuator is selectively driven to generate ink droplets corresponding to the recording signal. Some ejected from a nozzle hole to form an image with the ink droplet. As the actuator, an electromechanical conversion element that converts electrical energy into mechanical displacement, a heating resistor, or the like is used.

  In recent years, an ink jet recording apparatus having such a droplet discharge head has been improved in quality of a recorded image, and a high-definition image equivalent to 1200 dpi is now being put into practical use. In order to form such a high-definition image, the ink droplets ejected from each nozzle hole are miniaturized, that is, the nozzle holes are miniaturized, and the set positions of the plurality of nozzle holes are set on the nozzle plate. It is required to increase the density, and ink droplets from the nozzle holes set in this way are required to land at a set landing position with high accuracy. In order to increase the accuracy of the landing position with respect to the set landing position, it is necessary to increase the accuracy of the hole shape of each nozzle hole.

  Excimer laser light is known to be used as a method for forming a plurality of such minute and highly accurate nozzle holes at a high density in the nozzle plate (see, for example, Patent Document 1). In this device, a mask on which a predetermined nozzle hole pattern is formed is irradiated with an excimer laser beam, and a member to be processed (nozzle plate) is irradiated with a transmitted laser beam of the nozzle hole pattern that has passed through the mask. By penetrating, it is possible to form a plurality of nozzle holes in the member to be processed at a time in a positional relationship that matches the nozzle hole pattern. In this method, by providing a reduction optical system between the excimer laser beam (transmitted laser beam) that has passed through the mask and the workpiece, the setting positions of the nozzle holes in the nozzle plate can be increased in density.

  However, in the above-described method, the excimer laser light to be irradiated has a predetermined width dimension, and it is necessary to make the excimer laser light uniform throughout the region using a homogenizer or the like. It is difficult to make uniform, and the beam intensity or straightness deteriorates at the end of the region. For this reason, when a plurality of minute nozzle holes are formed in the nozzle plate at a high density by the above-described method, a plurality of nozzle holes formed at one time due to a difference in beam intensity or straightness in the transmitted laser light transmitted through the mask. Variation occurs in the hole shape. Although this variation is very small, it becomes a problem when a high-definition image is formed.

  For this reason, the applicant of the present invention has proposed a method for suppressing variations that may occur in the shape of a plurality of nozzle holes formed due to differences in beam intensity or straightness in transmitted laser light. (Japanese Patent Application No. 2007-207326).

This method uses the transmitted laser light while moving the irradiation range in the alignment direction of the nozzle hole pattern so that the irradiated areas formed on the workpiece by the transmitted laser light that has passed through the mask partially overlap. Irradiating a member, a plurality of different portions in the transmitted laser light viewed in the alignment direction sequentially irradiate the workpiece for a uniform time and sequentially increase the depth dimension, thereby penetrating the workpiece and passing through the nozzle. A hole is formed. In this method, the hole shape of each nozzle hole reflects the influence of each beam intensity or straightness in a plurality of different portions of the irradiated transmitted laser beam evenly. Variations in the hole shape that may occur between them can be suppressed.
JP 2007-118585 A

  However, in the above-described method, the irradiated laser beam is transmitted with the transmitted laser beam while shifting the irradiation range in the alignment direction of the nozzle hole pattern so that the irradiated region formed on the workpiece by the transmitted laser beam transmitted through the mask partially overlaps. Since the workpiece is irradiated, the workpiece is processed by the portion of the transmitted laser beam that does not contribute to the formation of the nozzle hole (through hole) when the irradiation starts and when the irradiation ends. Since the member is irradiated, recesses (intermediate nozzle holes not penetrating the workpiece) are formed at both ends of the nozzle holes on the workpiece as viewed in the alignment direction. End up. This recess becomes an obstructive factor for joining the nozzle plate to another member (channel plate in the above example), or between the other member (channel plate in the above example) joined. There is a possibility that the sealing performance may be hindered. For this reason, in the above-described method, each time drilling is performed, a beam shielding member is attached to a portion of the transmitted laser light in each processed member that is irradiated by a portion that does not contribute to the formation of the nozzle hole, and drilling is performed. Although it is conceivable that the beam shielding member is peeled off from each workpiece after finishing the processing, it causes an increase in the cost required for drilling and increases the time required for the drilling.

  The present invention has been made in view of the above problems, and while preventing an increase in cost and an increase in drilling time while preventing the formation of a recess due to irradiation of an energy beam, a plurality of minute It is an object of the present invention to provide an energy beam drilling method capable of forming holes in a workpiece at high density.

  In order to solve the above-described problem, the invention according to claim 1 is directed to irradiating the member to be processed with an energy beam through a mask provided with a predetermined aligned through-hole pattern. An energy beam drilling method for forming a plurality of through-holes having a positional relationship that coincides with a pattern, wherein a shielding member capable of blocking the transmission of the energy beam is inserted in an optical path where the energy beam reaches the workpiece. Using a shielding mechanism for removing, the irradiation region on the workpiece is moved in the alignment direction in the through-hole pattern so that the irradiation region formed on the workpiece by the energy beam partially overlaps. By sequentially irradiating the workpiece with the energy beam, the depth dimension is sequentially increased to form a plurality of the through holes. Accordingly, the shielding mechanism moves the irradiation region on the workpiece so as to prevent the irradiation of the energy beam that does not contribute to the formation of the through hole in the irradiation region. Accordingly, the shielding member is inserted into the optical path.

  The invention according to claim 2 is the energy beam drilling method according to claim 1, wherein the number of pulses of the energy beam that do not penetrate the workpiece as the through-hole and is a constant pulse An irradiation step of irradiating a plurality of energy beams and a moving step of moving the irradiation region in the workpiece in the alignment direction are alternately repeated a plurality of times, thereby sequentially increasing the depth dimension to a plurality of the plurality of the energy beams. A through hole is formed in the workpiece, and the shielding mechanism inserts and removes the shielding member in the optical path in the moving step.

  The invention according to claim 3 is the energy beam drilling method according to claim 1 or 2, wherein the irradiation region is equally divided in the alignment direction to form a plurality of irradiation division regions, The shielding member has a size that can prevent irradiation of the energy beam to the irradiation divided region, which is one less than the division number among the plurality of irradiation divided regions. It is formed by the irradiation of the energy beam in the irradiation division region.

  The invention according to claim 4 is the energy beam drilling method according to claim 3, wherein the mask has two or more transmission holes that allow the energy beam to pass through a member that blocks the transmission of the energy beam. A plurality of transmission hole-shaped beams that have been transmitted through the transmission holes by irradiating the mask with the energy beam are uniformly present in the irradiation divided regions. The member is sized so as to be able to shield the transmission holes for a plurality of transmission hole-shaped beams existing in the irradiation division region, which is one less than the division number among the plurality of irradiation division regions. It is characterized by that.

  The invention according to claim 5 is the energy beam drilling method according to claim 3 or claim 4, wherein in the first irradiation step, only one end of one of the plurality of irradiation divided regions is provided. Is the irradiation of the energy beam to the workpiece that contributes to the formation of the through-hole, and in the last irradiation step, only one of the other ends of the plurality of irradiation division regions is the The shielding member is set to be irradiated with the energy beam to the workpiece that contributes to the formation of a through hole, and the shielding mechanism is configured such that, in the first irradiation step, the one of the plurality of irradiation divided regions. The shielding member is positioned so as to prevent the irradiation of the energy beam to all the irradiation divided regions other than the end, and in the second and subsequent irradiation steps, the number of times of the irradiation step from the one end The shielding member is positioned so as to prevent irradiation of the energy beam to all of the irradiation divided regions other than the number of the irradiation divided regions, and in the last irradiation step, among the plurality of irradiation divided regions The shielding member is positioned so as to prevent irradiation of the energy beam to all of the irradiation divided regions other than the other end, and in the irradiation step before the second time from the last, the irradiation step starts from the other end. The shielding member is positioned so as to prevent irradiation of the energy beam to all of the irradiation divided areas other than the irradiation divided areas of the same number as the number counted from the end of the first.

  The invention according to claim 6 is the energy beam drilling method according to any one of claims 1 to 5, wherein a reduction lens is provided between the mask and the workpiece in the optical path. And the shielding member is provided in the vicinity of the mask in the optical path.

  The invention according to claim 7 is a method of manufacturing a droplet discharge head, wherein a plurality of nozzle holes for discharging droplets, and a plurality of liquid chambers provided individually corresponding to the nozzle holes, And a discharge energy generating body provided corresponding to each liquid chamber, and a liquid discharge head for discharging the liquid in each liquid chamber as a liquid droplet from each nozzle hole by the discharge energy generating body It is a method, Comprising: Each said nozzle hole is formed by the energy beam drilling method of any one of Claim 1 thru | or 6.

  The invention according to claim 8 is the method of manufacturing a droplet discharge head according to claim 7, wherein each of the nozzle holes is provided in a nozzle plate made of a resin material.

  The invention according to claim 9 is the method of manufacturing a droplet discharge head according to claim 7 or claim 8, wherein the liquid chamber is in a direction perpendicular to the discharge direction of the droplet from each nozzle hole. The located side wall is made of a metal material.

  The invention according to claim 10 is the method of manufacturing a droplet discharge head according to claim 7 or claim 8, wherein the liquid chamber is in a direction perpendicular to the discharge direction of the droplet from each nozzle hole. The positioned side wall is made of a resin material.

  According to an eleventh aspect of the present invention, there is provided a liquid droplet ejection apparatus including the liquid droplet ejection head according to any one of the seventh to tenth aspects.

  A twelfth aspect of the present invention is a recording apparatus, wherein the droplet discharge head according to any one of the seventh to tenth aspects is mounted.

  According to a thirteenth aspect of the present invention, there is provided an energy beam drilling apparatus, wherein the workpiece is irradiated onto the workpiece by irradiating the workpiece with an energy beam through a mask provided with a predetermined aligned through-hole pattern. An energy beam drilling apparatus for forming a plurality of through-holes having a positional relationship that coincides with a through-hole pattern, an emission mechanism that emits the energy beam, and a processing stage that holds the workpiece to be movable. A shielding mechanism for inserting / removing a shielding member capable of blocking transmission of the energy beam into / from an optical path where the energy beam reaches the workpiece, and a control mechanism for driving and controlling the emission mechanism, the processing stage, and the shielding mechanism The control mechanism partially overlaps the irradiation area formed on the workpiece by the energy beam. In addition, by controlling the processing stage to move the irradiation area in the workpiece in the alignment direction in the through-hole pattern, the emission mechanism is controlled to sequentially irradiate the workpiece with the energy beam. In order to prevent the irradiation of the energy beam that does not contribute to the formation of the through-hole in the irradiation region with the formation of the plurality of through-holes by sequentially increasing the depth dimension, The shielding mechanism is controlled to insert the shielding member into the optical path in accordance with the movement of the irradiation region in the workpiece.

  The invention according to a fourteenth aspect is the energy beam drilling apparatus according to the thirteenth aspect, in which the control mechanism is configured to prevent the energy beam from passing through the workpiece as the through hole in the emission mechanism. An irradiation step of irradiating an energy beam having a fixed number of irradiation pulses and a moving step of moving the irradiation region of the workpiece in the alignment direction to the processing stage are alternately repeated a plurality of times. The depth dimension is sequentially increased to form a plurality of the through holes in the workpiece, and the shielding mechanism is controlled by the control mechanism so that the shielding member is inserted into and removed from the optical path in the moving step. It is characterized by being.

  The invention according to claim 15 is the energy beam drilling apparatus according to claim 13 or claim 14, wherein the irradiation region is equally divided in the alignment direction to form a plurality of irradiation division regions, The shielding member has a size that can prevent irradiation of the energy beam to the irradiation divided region, which is one less than the division number among the plurality of irradiation divided regions. It is formed by the irradiation of the energy beam in the irradiation division region.

  The invention according to claim 16 is the energy beam drilling apparatus according to claim 15, wherein the mask has two or more transmission holes that allow the energy beam to pass through a member that blocks the transmission of the energy beam. A plurality of transmission hole-shaped beams that have been transmitted through the transmission holes by irradiating the mask with the energy beam are uniformly present in the irradiation divided regions. The member is sized so as to be able to shield the transmission holes for a plurality of transmission hole-shaped beams existing in the irradiation division region, which is one less than the division number among the plurality of irradiation division regions. It is characterized by that.

  The invention according to claim 17 is the energy beam drilling apparatus according to claim 15 or claim 16, wherein, in the first irradiation step, only one of one end of the plurality of irradiation divided regions is provided. The processing stage is controlled to irradiate the member to be processed that contributes to the formation of the through hole, and in the last irradiation step, the other of the plurality of irradiation division regions is controlled. The processing stage is controlled so that only one of the ends is irradiated with the energy beam to the member to be processed that contributes to the formation of the through-hole, and the shielding mechanism includes a plurality of the irradiation steps in the first irradiation step. The shielding member is positioned so as to prevent the irradiation of the energy beam to all of the irradiation divided regions other than the one end of the irradiation divided regions, and the irradiation after the second time. In the process, the shielding member is positioned so as to prevent irradiation of the energy beam to all of the irradiation divided regions other than the irradiation divided regions equal to the number of the irradiation steps from the one end, and the last In the irradiation step, the shielding member is positioned so as to prevent irradiation of the energy beam to all of the irradiation divided regions other than the other end of the plurality of irradiation divided regions, and the last two times before the last. In the irradiation step, the shielding member is configured to prevent irradiation of the energy beam to all of the irradiation divided regions other than the irradiation divided regions as many times as counted from the end of the irradiation step from the other end. It is controlled to be positioned.

  The invention according to claim 18 is the energy beam drilling apparatus according to any one of claims 13 to 17, wherein a reduction lens is provided between the mask and the workpiece in the optical path. And the shielding member is provided in the vicinity of the mask in the optical path.

  In the liquid droplet ejection head according to the present invention, a concave portion unrelated to the through hole is prevented from being formed by the irradiation of the energy beam, and the transmitted laser light irradiated to the hole shape of each nozzle hole is used. Since the influence of each beam intensity or straightness in a plurality of different portions can be reflected evenly, it is possible to suppress variations in hole shape that may occur between the plurality of nozzle holes. For this reason, when the member to be processed is, for example, a nozzle plate of a droplet discharge head and the through hole is a nozzle hole, the nozzle plate and another member (channel plate in the above example) are appropriately joined. In addition, it is possible to make appropriate the sealing performance with other members joined (in the above-described example, the flow path plate).

  In addition, each time drilling is performed, a beam shielding member is attached to a portion of the transmitted laser beam in each workpiece to be irradiated by a portion that does not contribute to the formation of the nozzle hole, and after the drilling is finished, Since it is possible to prevent the formation of a recess that is not related to the through-hole due to the irradiation of the energy beam without performing the work of peeling the beam shielding member from the workpiece, the cost is increased and the drilling time is increased. Can be suppressed.

  In addition to the above-described configuration, an irradiation step of irradiating an energy beam having a constant pulse number that is the number of irradiation pulses of the energy beam that does not penetrate the workpiece as the through-hole, and in the workpiece The movement step of moving the irradiation region in the alignment direction is alternately repeated a plurality of times to sequentially increase the depth dimension to form the plurality of through holes in the workpiece, and the shielding mechanism includes: If the shielding member is inserted into and removed from the optical path in the moving step, it is possible to surely make the hole shapes of the plurality of nozzle holes uniform and prevent the formation of unintended recesses.

  In addition to the above-described configuration, the irradiation region is equally divided in the alignment direction to form a plurality of irradiation division regions, and the shielding member is one less than the division number among the plurality of irradiation division regions. The size of the irradiation split region is prevented from being irradiated with the energy beam, and each through hole is formed by irradiation of the energy beam in all the irradiation split regions. It is possible to easily and surely prevent the formation of a recess that does not occur.

  In addition to the above-described configuration, the mask is configured such that two or more transmission holes that allow the transmission of the energy beam are arranged on the member that blocks the transmission of the energy beam, Irradiates the mask with the energy beam so that a plurality of transmission hole-shaped beams that have passed through the transmission holes are evenly present, and the shielding member is one of the plurality of the irradiation divided regions by the number of divisions. Assuming that the transmission holes for the plurality of transmission hole beams existing in a small number of the irradiation divided regions are sized so as to be shielded, the transmission holes of the mask are appropriately shielded by the shielding member. Therefore, it is possible to more easily and more reliably prevent an unintended recess from being formed. In other words, the position setting of the shielding member by the shielding mechanism can be made easier.

  In addition to the configuration described above, in the first irradiation step, irradiation of the energy beam to the workpiece to be processed in which only one end of one of the plurality of irradiation divided regions contributes to the formation of the through hole is performed. In the last irradiation step, only one of the other ends of the plurality of irradiation divided regions is irradiated with the energy beam to the workpiece to be contributed to the formation of the through hole. In the first irradiation step, the shielding mechanism prevents irradiation of the energy beam to all the irradiation divided regions other than the one end of the plurality of irradiation divided regions. In the second and subsequent irradiation steps, the energy from the one end to all the irradiation divided regions other than the number of the irradiation divided regions is the same as the number of the irradiation steps. The shielding member is positioned so as to prevent irradiation of the beam, and in the last irradiation step, the energy beam to all the irradiation divided regions other than the other end of the plurality of irradiation divided regions. The shielding member is positioned so as to prevent the irradiation, and in the irradiation process before the second time from the last, all of the irradiation division regions other than the number of the irradiation divided regions equal to the number of times counted from the last of the irradiation process from the other end. If the shielding member is positioned so as to prevent irradiation of the energy beam to the irradiation divided region, an unintended recess is formed while the amount of movement of the shielding member by the shielding mechanism is small. This can be prevented more easily and more reliably.

  In addition to the above-described configuration, it is assumed that a reduction lens is provided in the optical path between the mask and the workpiece, and the shielding member is provided in the vicinity of the mask in the optical path. Since it is only necessary to move the shielding member in accordance with the through-hole pattern of the mask, it is possible to more easily and more reliably prevent the formation of an unintended recess.

  Embodiments of an energy beam drilling method according to the present invention will be described below with reference to the drawings.

  FIG. 1 is an explanatory view schematically showing the structure of the main part of a droplet discharge head 10 manufactured by using the energy beam drilling method according to the present invention, and FIG. FIG. FIG. 3 is an explanatory diagram schematically showing the configuration of the energy beam drilling apparatus 30 according to the present invention, and FIG. 4 is an explanatory diagram schematically showing the main part of the energy beam drilling apparatus 30. It is. In FIG. 4, the state of reaching the member to be processed (nozzle plate 11) through the mask 40 and the reduction lens 41 will be described, but the reflection mirror 35 and the reflection mirror 36 are omitted for easy understanding. Yes. FIGS. 5A and 5B are explanatory diagrams for explaining the state of drilling in the energy beam drilling apparatus 30, wherein FIG. 5A shows the first irradiation process, FIG. 5B shows the second irradiation process, c) shows the third irradiation step, (d) shows the third irradiation step counting from the end, (e) shows the second irradiation step counting from the end, and (f) shows the last irradiation step. The process is shown. In FIG. 5, the reduction lens 41, the reflection mirror 35, and the reflection mirror 36 are omitted for easy understanding.

  The droplet discharge head 10 manufactured by using the energy beam drilling method according to the present invention is a PZT type print head in this embodiment, and includes a nozzle plate 11, a flow path plate 12, a vibration substrate 13, and an actuator substrate 14. (See FIG. 2).

  As shown in FIG. 2, the nozzle plate 11 is formed of a polyimide sheet and has a long plate shape, and a plurality of nozzle holes 15 are arranged in the longitudinal direction. In this embodiment, the nozzle plate 11 is formed of a polyimide sheet having a thickness of 25 μm, and a water-repellent layer 20 having a thickness of 0.01 μm (see FIG. 1) formed of a fluorine-based coating film is formed on the upper layer. Has been. In this embodiment, the nozzle holes 15 are aligned in a line along the longitudinal direction of the nozzle plate 11. The nozzle hole 15 has a shape that tapers from the discharge surface (upper side in FIG. 1 when viewed from the front) toward the flow channel side (flow channel plate 12 side), and has an opening diameter (a diameter on the discharge surface side). ) Is 21 μm. A flow path plate 12 is joined to the nozzle plate 11.

  The flow path plate 12 is formed of a silicon substrate and has a long plate shape, and a plurality of communication holes 16 and a plurality of ink liquid chambers 17 are formed. Each communication hole 16 communicates the corresponding nozzle hole 15 with the ink liquid chamber 17. Each ink liquid chamber 17 communicates with a common liquid chamber 21 (see FIG. 1), and ink is supplied from the common liquid chamber 21 and stored. A vibration substrate 13 is joined to the flow path plate 12. In addition, the flow path plate 12 may be formed from the resin material and may be formed from the metal material.

  The vibration substrate 13 is formed of a Ni material and has a long plate shape, and a plurality of vibration plates 18 are formed. The plurality of diaphragms 18 have a diaphragm shape, and are provided individually corresponding to the ink liquid chambers 17 so as to form one surface of each ink liquid chamber 17. An actuator substrate 14 is bonded to the vibration substrate 13.

  The actuator substrate 14 has a long plate shape, and although not shown, electrodes are individually provided corresponding to the diaphragm 18, and a piezoelectric element 19 as an actuator (discharge energy generator) is provided corresponding to this electrode. Is provided.

  In the droplet discharge head 10 configured as described above, each piezoelectric element 19 is moved to an electric machine by a drive signal supplied from an external electric circuit (not shown) via an electrode (not shown) provided on the actuator substrate 14. The diaphragm 18 is selectively contracted appropriately by the converting action, and the diaphragm 18 corresponding to the piezoelectric element 19 is appropriately displaced. Thereby, in the droplet discharge head 10, pressure acts on the ink stored in the ink liquid chamber 17 corresponding to each vibration plate 18, and the nozzle hole 15 communicated with the ink liquid chamber 17 through the communication hole 16. From which ink droplets are ejected. In this embodiment, the piezoelectric element 14 is used as an actuator for the droplet discharge head 10 which is a PZT type print head. However, as the actuator of the droplet discharge head, other electromechanical conversion elements or heat generation are used. An electrothermal conversion element such as a resistor can also be used.

  In this droplet discharge head 10, each nozzle hole 15 of the nozzle plate 11 is minute and highly accurate and has a high density on the nozzle plate 11 in order to appropriately discharge ink droplets so as to form a high-definition image. Is formed. Next, a method for forming each nozzle hole 15 in the nozzle plate 11 will be described.

  In this embodiment, in order to form each nozzle hole 15 in the nozzle plate 11, an energy beam drilling apparatus 30 shown in FIG. 3 is used. This energy beam drilling apparatus 30 is an apparatus capable of executing the energy beam drilling method according to the present invention, and basically forms and processes an image of a pattern provided on a mask on a workpiece. A processing method called a mask image method is executed.

  In the energy beam drilling apparatus 30, an excimer laser is used as the energy beam, and a laser oscillator 31 is provided to generate the excimer laser. In this embodiment, the laser oscillator 31 can oscillate and emit a KrF excimer laser having a wavelength of 248 nm.

  In the energy beam drilling processing apparatus 30, the excimer laser light L emitted from the laser oscillator 31 is reflected by the reflection mirror 32, the reflection mirror 33, the reflection mirror 34, the reflection mirror 35, and the reflection mirror 36, and then on the processing stage 37. A guided light path is constructed. On this optical path, a homogenizer 38, a field lens 39, a mask 40 (selective transmission member), and a reduction lens 41 are provided.

  The homogenizer 38 is provided between the reflection mirror 33 and the reflection mirror 34 on the optical path. The homogenizer 38 emits the incident excimer laser light L with uniform energy in the entire region.

  The field lens 39 and the mask 40 are provided between the reflection mirror 34 and the reflection mirror 35 on the optical path. The field lens 39 cooperates with the homogenizer 38 and the reduction lens 41 to appropriately cause the excimer laser light L from the laser oscillator 31 to reach the processing stage 37. The mask 40 is formed of a member that blocks transmission of the excimer laser light L that has passed through the field lens 39, and is provided with a desired nozzle hole pattern. This desired nozzle hole pattern is composed of a plurality of transmission holes 42 (see FIG. 4) that allow the excimer laser beam L to pass therethrough. As shown in FIG. 4, each of the transmission holes 42 has a desired size and dimension for forming the nozzle holes 15 and is aligned at a desired interval. In the present embodiment, twelve transmission holes 42 are aligned on the mask 40 at equal intervals on a straight line.

  The reduction lens 41 is provided between the reflection mirror 36 and the processing stage 37 on the optical path (see FIG. 3). The reduction lens 41 reduces the image of the mask 40 (nozzle hole pattern provided therein) on the processing surface of the member to be processed (nozzle plate 11 in the present embodiment) placed on the processing stage 37 and connects the reduced image. Image.

  The processing stage 37 (see FIG. 3) can hold the workpiece so as to be movable along a plane orthogonal to the axial direction of the optical path (the optical axis direction of the excimer laser light L).

  In the energy beam drilling apparatus 30, the excimer laser light L that has passed through the mask 40 reaches only the plurality of transmission hole laser beams Ld that have passed through the transmission holes 42, and therefore the reduction lens 41. As a result, the nozzle plate 11 as a member to be processed on which the image of the mask 40 is reduced can be punched with a plurality of transmission hole laser beams Ld whose size and interval are reduced. A region irradiated with the excimer laser light L on the nozzle plate 11 at this time, that is, a region irradiated with all the transmission hole laser light Ld is referred to as an irradiation region 47 (see FIG. 5).

  In the energy beam drilling apparatus 30 according to the present invention, a shielding mechanism 43 is further provided. The shielding mechanism 43 includes a shielding member 44 that blocks transmission of the excimer laser light L, and a drive unit 45 that moves the shielding member 44. In this embodiment, the shielding member 44 has a configuration in which a front end shielding portion 44a and a rear end shielding portion 44b are connected to each other, and the shielding portions 44a and 44b are formed by dividing an irradiation region 47 into equal parts. Among a plurality of irradiation division regions 48 (see reference numerals 48a, 48b, and 48c in FIG. 5), a plurality of transmission hole laser beams Ld corresponding to a plurality of transmission hole type laser beams Ld forming the number of irradiation division regions 48 obtained by subtracting 1 from the division number The size is such that the transmission hole 42 can be shielded. Specifically, in this embodiment, as described above, the mask 40 is provided with twelve transmission holes 42 aligned on a straight line, and in this embodiment, as described later, an irradiation region is provided. 47 is divided into three and three irradiation division regions 48 are formed (see FIG. 5), the two shielding portions 44a and 44b are sized to shield the eight transmission holes 42. Further, in this embodiment, the shielding member 44 is sized so that all (12) transmission holes 42 provided in the mask 40 can be interposed between the shielding portions 44a and 44b. (See FIG. 5).

  As shown in FIG. 3, the drive unit 45 holds the shielding member 44 so as to be movable along the extending direction of the mask 40 in the vicinity of the mask 40, and both shielding portions 44 a and 44 b on the optical path. Then, the shielding member 44 is appropriately moved to shield any transmission hole 42. In the energy beam drilling apparatus 30 of the present embodiment, a control mechanism 46 connected to the processing stage 37 and the laser oscillator 31 is provided, and a drive unit 45 is also connected to the control mechanism 46. The control mechanism 46 comprehensively drives and controls the processing stage 37, the laser oscillator 31, and the drive unit 45.

  Next, a method for forming each nozzle hole 15 in the nozzle plate 11 by the energy beam drilling apparatus 30, that is, an energy beam drilling process method according to the present invention will be described. In FIG. 5, the left-right direction viewed from the front is the alignment direction of the nozzle holes 15. In the following, description will be made using the left and right sides of the alignment direction.

  Prior to drilling the nozzle plate 11, the irradiation area 47 is equally divided. This equal division means that the irradiation area 47 is viewed in the nozzle arrangement direction, that is, the alignment direction of the plurality of transmission hole laser beams Ld (transmission holes 42), and the same number of transmission hole laser beams Ld (transmission holes 42) are obtained. It means dividing so that it exists. In this embodiment, the irradiation region 47 is divided into three portions as viewed in the alignment direction to form three irradiation division regions 48, and each of the irradiation division regions 48 includes four transmission hole laser beams Ld (transmission holes 42). ) Will exist. These are defined as a first irradiation divided region 48a, a second irradiation divided region 48b, and a third irradiation divided region 48c from the right side in the alignment direction.

  The nozzle plate 11 is placed on the processing stage 37 (see FIG. 3). At this time, the position of the nozzle plate 11 is set via the processing stage 37 so that only the first irradiation division region 48a matches the desired position to be formed by aligning the nozzle holes 15 (see FIG. 5A). ).

  Then, in the energy beam drilling apparatus 30, as shown in FIG. 5A, the eight transmission holes 42 corresponding to the second irradiation divided region 48b and the third irradiation divided region 48c are shielded by the front end shielding portion 44a. The shielding member 44 is positioned by the driving unit 45.

  Thereafter, the first excimer laser beam L is irradiated. At this time, since the eight transmission holes 42 corresponding to the second irradiation divided region 48b and the third irradiation divided region 48c are shielded by the front end shielding portion 44a, in the second irradiation divided region 48b and the third irradiation divided region 48c, The eight transmission hole laser beams Ld indicated by two-dot chain lines are prevented from irradiating the nozzle plate 11. This is the first irradiation step. In this first irradiation step, 60 pulses of excimer laser light L (each through-hole laser light Ld) are irradiated. This is because the excimer laser beam L (each transmission hole type laser beam Ld) is set to an intensity penetrating the nozzle plate 11 when the same portion of the nozzle plate 11 is irradiated with 180 pulses, and the irradiation region 47 is Since it is divided into three, 60 pulses, which is 1/3 of 180 pulses, are used. In the first irradiation step, four recesses 49a having a depth corresponding to approximately 1/3 of the thickness of the nozzle plate 11 are formed.

  When the first irradiation process is completed, the nozzle plate 11 is moved to the left in the alignment direction by an amount equal to the length dimension of each irradiation division region 48 by the processing stage 37 as shown in FIG. (See arrow A1). As a result, the four recesses 49a of the nozzle plate 11 are matched with the irradiation positions of the four transmission hole laser beams Ld in the second irradiation divided region 48b. This is the first movement process. In the first moving step, the shielding member 44 is positioned by the driving unit 45 so as to shield the four transmission holes 42 corresponding to the third irradiation division region 48c with the front end shielding portion 44a (see arrow A2).

  Thereafter, the second excimer laser beam L is irradiated. At this time, since the four transmission holes 42 corresponding to the third irradiation division region 48c are shielded by the front end shielding portion 44a, the four transmission hole laser beams Ld indicated by the two-dot chain line are generated in the third irradiation division region 48c. Irradiation of the nozzle plate 11 is prevented. This is the second irradiation step. Also in this second irradiation step, 60 pulses of excimer laser light L (each through-hole laser light Ld) are irradiated. In the second irradiation step, the four recesses 49a that have already been formed in the nozzle plate 11 have a depth dimension corresponding to approximately 2/3 of the thickness dimension of the nozzle plate 11, and the thickness dimension. Four recesses 49b having a depth corresponding to approximately 1/3 of the above are newly formed.

  When the second irradiation step is completed, as shown in FIG. 5C, the nozzle plate 11 is moved to the left in the alignment direction by an amount equal to the length dimension of each irradiation division region 48 by the processing stage 37 ( (See arrow A3). Accordingly, the nozzle plate 11 has the four recesses 49a aligned with the irradiation positions of the four transmission hole laser beams Ld in the third irradiation divided region 48c, and the four recesses 49b formed in the second irradiation divided region. It matches the irradiation position of the four transmission hole laser beams Ld in the region 48b. This is the second movement process. In the second moving step, the shielding member 44 (front end shielding portion 44a) is set to a position where none of the transmission holes 42 is shielded by the drive unit 45 (see arrow A4). In other words, all the transmission holes 42 are positioned between the front end shielding portion 44a and the rear end shielding portion 44b.

  Thereafter, the third excimer laser beam L is irradiated. At this time, since none of the transmission holes 42 is shielded by the shielding member 44, twelve transmission hole type laser beams Ld irradiate the nozzle plate 11. This is the third irradiation step. Also in this third irradiation step, 60 pulses of excimer laser light L (each through-hole laser light Ld) are irradiated. In the third irradiation step, the four recesses 49a that have already been formed in the nozzle plate 11 are penetrated through the nozzle plate 11, and the four recesses 49b that have already been formed are the thickness of the nozzle plate 11. Four new recesses 49c having a depth corresponding to approximately 2/3 of the dimension and having a depth corresponding to approximately 1/3 of the thickness are formed. Four recesses 49 a penetrating the nozzle plate 11 serve as nozzle holes 15.

  In the subsequent n-th moving process (immediately after the third time) and the n-th irradiation process, the shielding member 44 is not positioned to shield any transmission hole 42, and the above operation is repeated. Is omitted. As a result, the four recesses 49 b are sequentially penetrated to become the nozzle holes 15, and the four recesses 49 c are penetrated to become the nozzle holes 15.

  Next, the nf-2th irradiation process is demonstrated by making the last irradiation process nfth. In this embodiment, since the irradiation region 47 is divided into three parts, the nozzle holes 15 positioned at both ends (regions corresponding to one irradiation division region 48) when viewed in the alignment direction are formed. This is because unnecessary irradiation is performed in two irradiation divided regions 48.

  In the nf-2th irradiation step, as shown in FIG. 5D, the shielding member 44 (front end shielding portion 44 a) is positioned so as not to shield any transmission hole 42 by the drive unit 45. At this time, since none of the transmission holes 42 is shielded by the shielding member 44, twelve transmission hole type laser beams Ld irradiate the nozzle plate 11. Also in this nf-2th irradiation process, 60 pulses of excimer laser light L (each through-hole laser light Ld) are irradiated. In the nf-2th irradiation step, the four recesses 49d that have already been formed in the nozzle plate 11 penetrate the nozzle plate 11 to become the nozzle holes 15 and the four recesses 49e that have already been formed. Is a depth dimension corresponding to approximately 2/3 of the thickness dimension of the nozzle plate 11, and four new recesses 49f having a depth dimension corresponding to approximately 1/3 of the thickness dimension are formed.

  When the nf-2th irradiation process is completed, the nozzle plate 11 is moved to the left in the alignment direction by an amount equal to the length dimension of each irradiation division region 48 by the processing stage 37 as shown in FIG. (See arrow A5). Accordingly, the nozzle plate 11 has the four recesses 49e aligned with the irradiation positions of the four transmission hole laser beams Ld in the third irradiation divided region 48c, and the four recesses 49f formed in the second irradiation divided region. It matches the irradiation position of the four transmission hole laser beams Ld in the region 48b. This is the nf-2th moving step. In the nf-2th moving step, the shielding member 44 is positioned by the drive unit 45 so that the rear end shielding portion 44b shields the four transmission holes 42 corresponding to the first irradiation divided region 48a with the rear end shielding portion 44b. (See arrow A6).

  Thereafter, nf-1th excimer laser light L irradiation is performed. At this time, since the four transmission holes 42 corresponding to the first irradiation division region 48a are shielded by the rear end shielding portion 44b, the four transmission hole laser beams Ld indicated by the two-dot chain line in the first irradiation division region 48a. Is prevented from irradiating the nozzle plate 11. This is the nf-1th irradiation step. In this nf-1th irradiation step, 60 pulses of excimer laser light L (each transmission hole type laser light Ld) are irradiated. In the nf-1th irradiation step, the four recesses 49e that have already been formed in the nozzle plate 11 penetrate the nozzle plate 11 to become the nozzle holes 15, and the four recesses 49f that have already been formed. Is a depth dimension corresponding to approximately 2/3 of the thickness dimension of the nozzle plate 11.

  When the nf-1th irradiation process is completed, the nozzle plate 11 is moved to the left in the alignment direction by an amount equal to the length dimension of each irradiation division region 48 by the processing stage 37 as shown in FIG. (See arrow A7). As a result, in the nozzle plate 11, the four recesses 49f are matched with the irradiation positions of the four transmission hole laser beams Ld in the third irradiation divided region 48c. This is the nf-1th moving step. In the nf-1th moving step, the rear end shielding portion 44b shields the eight transmission holes 42 corresponding to the first irradiation divided region 48a and the second irradiation divided region 48b with the rear end shielding portion 44b. 44 is positioned by the drive unit 45 (see arrow A8).

  Thereafter, the nf-th (last) excimer laser light L is irradiated. At this time, since the eight transmission holes 42 corresponding to the first irradiation divided region 48a and the second irradiation divided region 48b are shielded by the rear end shielding portion 44b, the first irradiation divided region 48a and the second irradiation divided region 48b. Then, it is prevented that the eight through-hole laser beams Ld indicated by the two-dot chain line irradiate the nozzle plate 11. This is the nf-th irradiation step. Also in the nf-th irradiation process, 60 pulses of excimer laser light L (each through-hole laser light Ld) are irradiated. In the nf-th irradiation process, the four recesses 49 f that have already been formed in the nozzle plate 11 penetrate the nozzle plate 11 to form nozzle holes 15.

  As described above, the energy beam drilling apparatus 30 can form a plurality of nozzle holes 15 aligned at equal intervals on the nozzle plate 11.

  In the energy beam drilling apparatus 30, when a plurality of transmission holes 42 are formed in a row in the mask 40 and a nozzle hole pattern is formed, the number of the aligned transmission holes 42 is X, and a workpiece ( Assuming that the number of through holes (nozzle holes 15) to be formed in one row of the nozzle plate 11) is K and the number of divisions of the irradiation region 47 is m, the number n of irradiation steps can be obtained by the following equation (1). it can.

n = K / X + (m−1) (1)
From this, for example, when 192 nozzle holes 15 are formed in two rows on the nozzle plate 11, the irradiation process may be performed 10 times per row (20 times in total).

  As described above, in the energy beam drilling method according to the present invention, the irradiation region 47 is equally divided to form a plurality of irradiation division regions 48, and each irradiation division region 48 is sequentially irradiated to form through holes (nozzle holes). 15), the shielding member 44 prevents the energy beam (excimer laser beam L) from reaching the workpiece (nozzle plate 11) in the irradiation divided region 48 that does not contribute to the formation of the through hole. It is possible to prevent a recess from being formed in the workpiece (nozzle plate 11) by the energy beam (excimer laser beam L) that does not contribute to the formation of the through hole. For this reason, for example, in the droplet discharge head 10 using the nozzle plate 11 formed by this energy beam drilling method, the bonding failure between the nozzle plate 11 and the flow path plate 12 due to the recess, A decrease in sealing performance between the nozzle plate 11 and the flow path plate 12 due to the recess is prevented.

  Further, in the energy beam drilling method according to the present invention, the energy beam (excimer laser beam L) that does not contribute to the formation of the through hole is processed by the shielding member 44 positioned near the mask 40 (nozzle plate 11). Therefore, there is no need to stick or peel off the beam shielding member for each member to be processed as in the prior art. For this reason, compared with the past, the cost which a drilling process requires can be reduced. In particular, in the energy beam drilling apparatus 30 described above, the shielding member 44 is automatically positioned by the drive unit 45 that is driven and controlled by the control mechanism 46 together with the processing stage 37 and the laser oscillator 31. It is not necessary to set the position of the shielding member 44, and the cost required for drilling can be further reduced.

  Furthermore, in the energy beam drilling method according to the present invention, each nozzle hole 15 is formed by irradiation in a plurality of different irradiation division regions (in the above-described embodiment, each nozzle hole 15 is formed in the first irradiation division). (Transmission hole type laser beam Ld in the region 48a, transmission hole type laser beam Ld in the second irradiation divided region 48b, and transmission hole type laser beam Ld in the third irradiation divided region 48c are sequentially irradiated). Therefore, the shape of each nozzle hole 15 reflects the influence of the difference in the beam intensity or the straightness of each other in the three types of transmission hole laser light Ld in each irradiation divided region 48 evenly. The variation in hole shape that can occur between the plurality of nozzle holes 15 can be suppressed.

  In the energy beam drilling apparatus 30 described above, since the shielding member 44 shields the plurality of transmission holes 42 provided in the vicinity of the mask 40, movement control of the shielding member 44 is easy. This is because it is necessary to make a small amount of movement between the reduction lens 41 and the processing stage 37 according to the degree of reduction, and it is only necessary to overlap the transmission hole 42 in the vicinity of the mask 40. . From this, the shielding member 44 can obtain the same effect even if it is in the vicinity of the mask 40 between the mask 40 and the reflection mirror 34 (see FIG. 3).

  In the droplet discharge head 10 having the nozzle plate 1 in which the nozzle holes 15 are formed by the energy beam drilling apparatus 30 described above, high-quality droplets are set and landed at high density even when the nozzle plate 1 is miniaturized. It is possible to land on the position with high accuracy.

  Therefore, according to the energy beam drilling method according to the present invention, it is possible to prevent a recess from being formed by irradiation of the energy beam while suppressing an increase in cost and an increase in drilling time, and a plurality of minute holes. Can be formed with high density on the workpiece.

  In the above-described embodiment, the nozzle plate 11 is placed on the processing stage 37 as a member to be processed. However, the nozzle plate 11 may be a member in which the flow path plate 12 is joined, and a plurality of nozzles One plate member that can be cut out as the plate 11 may be used, and is not limited to the above-described embodiment. In other words, the workpiece is only required to be drilled.

  In the above-described embodiment, the shielding member 44 is configured by connecting the front end shielding portion 44a and the rear end shielding portion 44b. However, the irradiation region 47 is formed by equally dividing the irradiation region 47. For example, the front end shielding portion 44a and the rear end shielding portion 44b may be provided as long as the plurality of transmission holes 42 corresponding to the (divided number-1) irradiation division regions 48 out of 48 can be shielded. It may be a separate body or only one of them, and is not limited to the above-described embodiments.

  Further, in the above-described embodiment, the irradiation region 47 is equally divided into three to form three irradiation division regions 48. However, the irradiation region 47 may have any number of sections. It is not limited to. Here, as the number of sections of the irradiation region 47 is increased, the accuracy and shape of the through holes (nozzle holes 15) formed can be made uniform, but the throughput (the number of production per unit time) is reduced. Therefore, the number of sections of the irradiation region 47 may be set as appropriate in consideration of these.

  In the above embodiment, the mask 40 is formed with twelve transmission holes 42 aligned in one row. However, the mask 40 has a number of transmissions that is at least equal to or greater than the number of sections of the irradiation region 47 in the arrangement direction. The hole 42 only needs to be provided, and is not limited to the above-described embodiment. In any case, the position of the processing stage 37 and the shielding member 44 and the excimer emitted from the laser oscillator 31 are controlled by the control mechanism 46 according to the position and the number of through holes formed in the mask and the workpiece. The number of pulses of the laser beam L may be driven and controlled.

In the above-described embodiment, an excimer laser is used. However, if a through-hole can be formed in a member to be processed (the nozzle plate 11 in the above-described embodiment), for example, a YAG laser or a CO ₂ laser can be used. It may be present and is not limited to the above-described embodiments. However, an excimer laser is preferably an excimer laser because it can be processed with high precision because it is an ablation process that utilizes the phenomenon of breaking an intermolecular chemical bond of a polymer organic material.

  Next, an example of an image recording apparatus equipped with the droplet discharge head 10 manufactured using the energy beam drilling method according to the present invention will be described with reference to FIGS. FIG. 6 is a schematic perspective view showing an ink jet recording apparatus 60 as an image recording apparatus on which the droplet discharge head 10 is mounted, and FIG. 7 shows the inside of the ink jet recording apparatus 60 in order to explain the internal configuration thereof. FIG. 8 is a schematic explanatory view seen in the main scanning direction to be described later, and FIG. 8 is a schematic explanatory view seen along an arrow A9 shown in FIG.

  The ink jet recording apparatus 60 is configured by attaching a paper feed tray 62 to an apparatus main body 61 and detachably attaching a paper discharge tray 63. The paper feed tray 62 is for loading a recording paper S (see FIGS. 7 and 8) as a recording medium into the apparatus main body 61, and the paper discharge tray 63 is a recording paper S on which an image is recorded (formed). It is to be loaded (stocked).

  The apparatus main body 61 has a cartridge loading portion 64 at a position where one end portion side (the side of the paper feed tray 62 and the paper discharge tray 63) of the front surface in FIG. The upper surface (65) of the cartridge loading unit 64 is set lower than the upper surface of the apparatus main body 61, and an operation button, a display, and the like are provided as the operation / display unit 65.

  In the operation / display unit 65, the remaining amounts of the ink cartridges 66k, 66c, 66m, and 66y of each color are arranged at positions corresponding to the mounting positions (arrangement positions) of the ink cartridges 66k, 66c, 66m, and 66y described later. The remaining amount display portions 65k, 65c, 65m, and 65y of the respective colors for displaying that the near end and the end are displayed. Further, the operation / display unit 65 is also provided with a power button 65a, a paper feed / print resume button 65b, and a cancel button 65c.

  The cartridge loading unit 64 is a place where the ink cartridge 66 is loaded, and can be loaded by being inserted from the front side opening of the apparatus main body 61 toward the rear side. The cartridge loading section 64 is provided with a front cover (cartridge cover) 67 for opening and closing an opening on the front side for loading the ink cartridge 66. The cartridge loading unit 64 is loaded with a plurality of ink cartridges 66 containing liquids (inks) of different colors from the front side of the apparatus main body 61 toward the rear side. In this embodiment, yellow (Y) ink cartridge 66k containing black (K) ink, ink cartridge 66c containing cyan (C) ink, ink cartridge 66m containing magenta (M) ink, and ink cartridge 66 are used. An ink cartridge 66y containing ink (hereinafter referred to as an ink cartridge 66 when the colors are not distinguished) is used. The ink cartridges 66k, 66c, 66m, and 66y are configured to be loaded side by side in the horizontal direction (main scanning direction) in a vertically placed state.

  As shown in FIGS. 7 and 8, the ink jet recording apparatus 60 (apparatus main body 61) includes a carriage 68 on which each of the droplet discharge heads 10 described above is mounted, and a main guide rod 69 that supports the carriage 68. . The main guide rod 69 is provided across the main side plates 71 a and 71 b (see FIG. 8) of the frame 71 that forms the outer shape of the apparatus main body 61. A carriage 68 is slidably supported along the extending direction of the main guide rod 69.

  The carriage 68 is movable along the extending direction (see arrow A10 in FIG. 8) on the main guide rod 69 by a driving force from a main scanning motor received via a timing belt (not shown). . This moving direction is the main scanning direction in the inkjet recording apparatus 60.

  In the carriage 68, a plurality of droplet discharge heads 10 containing liquids (inks) of different colors are in a downward posture (each nozzle hole 15 faces a conveyance belt 83 described later). It is mounted in parallel. In this embodiment, as the droplet discharge head 10, a droplet discharge head 10K for discharging a black (K) droplet, a droplet discharge head 10C for discharging a cyan (C) droplet, magenta ( The droplet discharge head 10M for discharging the M droplets and the droplet discharge head 10Y for discharging the yellow (Y) droplets (hereinafter referred to as the droplet discharge head 10 when the colors are not distinguished). ) Is used. The droplet discharge head 10 is mounted with a driver IC (not shown), and is connected to a control unit (not shown) of the inkjet recording apparatus 60 via a harness (flexible print cable) 70. Yes.

  In the present embodiment, the carriage 68 is provided with four liquid tanks 72 that individually correspond to the liquid ejection heads 10 and communicate with the common liquid chamber 21 (see FIG. 1). Each of the liquid tanks 72 is connected to a corresponding ink cartridge 66 mounted on the cartridge loading unit 64 via a flexible supply tube 73, so that each color ink can be replenished and supplied from each ink cartridge 66. It is said that. In order to replenish and supply the ink, the cartridge loading unit 64 is provided with a supply pump unit 74 that is a liquid feeding means for feeding the liquid in the ink cartridge 66. In the example shown in the figure, the supply tube 73 is configured by bundling four tubes corresponding to each color (see FIG. 8), and an intermediate portion thereof constitutes the frame 71 via the holding member 73a. It is fixed to the rear plate 71c. The liquid droplets ejected from the liquid ejection head 10 are recorded (formed) on the recording paper S as an image. The recording paper S is stacked on a paper stacking unit (pressure plate) 76 provided in the paper feeding tray 62, and the recording paper S is fed to the apparatus main body 61 in order to feed the recording paper S from the paper feeding tray 62. A paper section is provided.

  The paper feed unit includes a paper feed roller (half moon roller) 77 and a separation pad 78. The sheet feeding roller 77 is a half-moon-shaped cylindrical member, and a separation pad 78 is provided to face the sheet feeding roller 77. The separation pad 78 is made of a material having a large friction coefficient and is urged toward the paper feed roller 77 side. In this paper feeding unit, the recording paper S can be separated and fed one by one from the paper stacking unit 76 by the paper feeding roller 77 and the separation pad 78. In order to feed the recording paper S fed from the paper feeding unit to the lower side of the liquid ejection head 10, the apparatus main body 61 is provided with a feeding unit.

  The feeding unit includes a guide member 79 that guides the recording paper S, a counter roller 80, a transport guide member 81, and a pressing member 82 having a leading end pressure roller 82a, and the recording paper S is transported by the transport unit. It is fed to a certain conveyor belt 83.

  The conveyance belt 83 is an endless belt, and is looped between the conveyance roller 84 and the tension roller 85 so as to be able to circulate in the belt conveyance direction (refer to the arrow A11 shown in FIG. 8). Yes. The transport belt 83 electrostatically attracts the fed recording paper S and transports the recording paper S to a position facing each nozzle hole 15 (see FIGS. 1 and 2) of the liquid ejection head 10. In order to charge the surface of the conveying belt 83, the apparatus main body 61 is provided with a charging roller 86 as charging means. The charging roller 86 is disposed so as to be in contact with the surface of the conveyance belt 83 and rotates following the rotation of the conveyance belt 83. The apparatus main body 61 is provided with a guide plate 87 on the back side of the conveyor belt 83. The guide plate 87 holds the flatness of the recording paper S. This guide plate 87 is opposed to each nozzle hole 15 (see FIG. 1 and FIG. 2 etc.) of each liquid discharge head 10 so as to correspond to the printing area by each liquid discharge head 10 with the conveyance belt 83 interposed. In the position.

  Although not shown, the conveyance belt 83 rotates or is circulated in the belt conveyance direction (sub-scanning direction) when the conveyance roller 84 that receives the driving force from the sub-scanning motor via the timing belt is rotationally driven. . The apparatus main body 61 is provided with a paper discharge unit on the downstream side of the printing area of the liquid discharge head 10 when viewed in the circulation direction.

  The paper discharge unit includes a separation claw 88, a paper discharge roller 89, and a paper discharge roller 90. The separation claw 88 separates the recording paper S from the conveyance belt 83. The paper discharge tray 63 on which the recording paper S discharged by the paper discharge unit is stacked is positioned below the paper discharge roller 89.

  In the ink jet recording apparatus 60, a duplex unit 91 is detachably mounted on the back side of the apparatus main body 61. The duplex unit 91 takes in the recording sheet S returned by the circulation of the conveying belt 83 without being separated from the conveying belt 83 in the paper discharge unit, reverses the recording sheet S, and again connects the counter roller 80 and the conveying belt 83. Paper is fed in between. A manual feed tray 92 is provided on the upper surface of the duplex unit 91.

  In the ink jet recording apparatus 60, as shown in FIG. 8, when viewed in the main scanning direction (the extending direction of the main guide rod 69), which is the moving direction of the carriage 68, the intermediate area is the printing area by the liquid ejection head 10 described above. The two ends are non-printing areas. In both the non-printing areas, a maintenance / recovery mechanism 93 is provided on one side, and an idle discharge receiver 94 is provided on the other side.

  The maintenance / recovery mechanism 93 includes cap members (hereinafter referred to as “caps”) 96a to 96d (hereinafter referred to as caps 96) for capping the nozzle surfaces of the liquid ejection head 10 and nozzle surfaces. A wiper blade 97, which is a blade member for wiping, and a blank discharge receiver 98 for receiving droplets when performing blank discharge for discharging droplets that do not contribute to recording in order to discharge the thickened recording liquid. Yes. Here, the cap 96a is a suction and moisture retention cap, and the other caps 96b to 96d are moisture retention caps.

  The idle ejection receiver 94 receives droplets when performing idle ejection for ejecting droplets that do not contribute to recording in order to eject liquid that has been thickened during recording or the like, and in the nozzle row direction of the liquid ejection head 10. The opening part 94a along is provided. Although not shown, the opening 94a communicates with the waste liquid tank.

  Then, the waste liquid of the recording liquid generated by the maintenance and recovery operation by the maintenance and recovery mechanism 93, the ink discharged to the cap 96, the ink attached to the wiper blade 97 and removed by the wiper cleaner (not shown), and the idle ejection receiver 94 The ink ejected idle is discharged and stored in a waste liquid tank (not shown).

  In the ink jet recording apparatus 60, the recording sheets S are separated and fed one by one from the sheet feeding tray 62 to the feeding section by the sheet feeding section. The recording sheet S is fed substantially vertically upward by the guide of the guide member 79, sandwiched between the transport belt 83 and the counter roller 80, transported, guided at the leading end by the transport guide member 81, and pressurized at the leading end. The roller 82a is pressed against the conveyance belt 83.

  At this time, a so-called alternating voltage that alternately repeats a positive output and a negative output is applied to the charging roller 86 from an AC bias supply unit of a control unit (not shown), and the conveying belt 83 has an alternating charging voltage. The pattern is charged, that is, plus and minus are alternately charged in a strip shape with a predetermined width in the sub-scanning direction which is the circulation (circulation) direction. When the recording paper S is fed onto the conveyance belt 83 charged alternately with plus and minus, the recording paper S is adsorbed to the conveyance belt 83. For this reason, the recording sheet S is adsorbed to the conveyance belt 83 in an appropriate state by the above-described guidance and pressing by each member and the adsorption force due to charging, and the circulation direction of the conveyance belt 83 by circulation (circulation movement) of the conveyance belt 83. The direction of conveyance is changed by approximately 90 ° along the direction, and is conveyed in the sub-scanning direction and sent to the recording area.

  In this recording area, a control unit (not shown) is stopped by driving each liquid ejection head 10 according to an image signal while moving the carriage 68 in the main scanning direction based on main scanning position information by the linear encoder 99. The droplets are ejected onto the recording sheet S, and an image for one line is recorded. Thereafter, a control unit (not shown) transports the recording paper S by a predetermined amount in the sub-scanning direction, and records the next line. A control unit (not shown) repeats this recording operation. When a recording end signal or a signal that the trailing edge of the recording paper S reaches the recording area is received, the recording operation is ended, and the recording paper S is transferred to the transport belt 83. The paper is discharged to the paper discharge tray 63 by the circulation (circulation) of the paper. Thereby, a desired image can be recorded on a desired recording medium (the recording sheet S fed).

  In the ink jet recording apparatus 60, before the start of recording, in the middle of recording, etc., the carriage 68 is appropriately retracted above the idle discharge receiver 94 or above the idle discharge receiving portion 98 of the maintenance / recovery mechanism 93. The liquid ejection head 10 is driven to perform an idle ejection operation for ejecting ink. Thereby, the stable discharge performance of each liquid discharge head 10 is maintained.

  Further, in the ink jet recording apparatus 60, during printing (recording) standby, the carriage 68 is moved above the maintenance / recovery mechanism 93, and the cap surface 19 caps the nozzle surface 16 a of each liquid ejection head 10. By keeping the nozzle holes 15 (see FIG. 1 and FIG. 2 and the like) in a wet state, it is possible to prevent ejection failure due to liquid drying in each nozzle hole 15.

  Further, in the ink jet recording apparatus 60, the recording liquid is sucked from the nozzle by a suction pump (not shown) with the liquid ejection head 10 capped by the cap 96 (referred to as "nozzle suction" or "head suction") to increase the viscosity. A recovery operation is performed to discharge the recording liquid and bubbles. Thereby, the stable discharge performance of the liquid discharge head 10 is maintained.

  The droplet discharge head manufactured by using the energy beam drilling method according to the present invention can be mounted on a printer, a facsimile machine, a copying machine, a multi-function machine, etc. as an image recording apparatus, The present invention can also be applied to a liquid droplet ejection head for ejecting a liquid other than ink, such as a DNA sample, a resist, or a pattern material, a liquid droplet ejection apparatus equipped with the liquid ejection head, or an image forming apparatus including these.

  The present invention has been described in detail based on the embodiments. However, the present invention is not limited to this specific configuration, and design changes that do not depart from the spirit of the present invention are included in the technical scope of the present invention.

It is explanatory drawing which shows schematically the structure of the principal part of the droplet discharge head manufactured using the energy beam drilling method which concerns on this invention. It is a schematic exploded perspective view for description of a droplet discharge head. It is explanatory drawing which shows typically the structure of the energy beam drilling processing apparatus which concerns on this invention. It is explanatory drawing which shows typically the mode of the principal part of an energy beam drilling processing apparatus. It is explanatory drawing for demonstrating the mode of the punching in an energy beam punching processing apparatus, (a) shows the 1st irradiation process, (b) shows the 2nd irradiation process, (c) is the 3rd time. (D) shows the third irradiation process counted from the last, (e) shows the second irradiation process counted from the last, and (f) shows the last irradiation process. . 1 is a schematic perspective view showing a droplet discharge recording apparatus equipped with a droplet discharge head manufactured using an energy beam drilling method. FIG. FIG. 3 is a schematic explanatory view of the inside of the droplet discharge recording apparatus according to the present invention as viewed in the main scanning direction in order to explain the internal configuration. FIG. 8 is a schematic explanatory diagram viewed along an arrow A9 shown in FIG. 7.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Droplet discharge head 11 Nozzle plate (as a member to be processed) 15 Nozzle hole (as a through hole) 17 Ink liquid chamber 19 Piezoelectric element (as a discharge energy generator) 30 Energy beam punching device 40 Mask 41 Reduction lens 42 (through-hole pattern) transmission hole 43 shielding mechanism 44 shielding member 47 irradiation region 48 irradiation divided region 60 inkjet recording device (as recording device) excimer laser beam Ld (as energy beam) Ld (transmission hole beam) Through-hole laser beam

Claims (18)

By irradiating the workpiece with an energy beam through a mask provided with a predetermined aligned through-hole pattern, a plurality of through-holes having a positional relationship matching the through-hole pattern is formed on the workpiece. An energy beam drilling method for
Using a shielding mechanism that inserts and removes a shielding member capable of blocking the transmission of the energy beam to and from an optical path where the energy beam reaches the workpiece,
While moving the irradiation region in the workpiece in the alignment direction in the through-hole pattern so that the irradiation region formed on the workpiece by the energy beam partially overlaps, the member to be processed is moved to the energy direction. Along with forming the plurality of through holes by sequentially increasing the depth dimension by sequentially irradiating with a beam,
The shielding member according to the movement of the irradiation region in the workpiece so that the shielding mechanism prevents irradiation of the energy beam that does not contribute to the formation of the through hole in the irradiation region. Is inserted into the optical path. An irradiation step of irradiating the workpiece with the energy beam having a constant pulse number that does not penetrate the workpiece as the through-hole, and the irradiation region of the workpiece with the alignment direction And by repeatedly repeating the moving step to move to a plurality of times, the depth dimension is sequentially increased to form the plurality of through holes in the workpiece,
2. The energy beam drilling method according to claim 1, wherein the shielding mechanism causes the shielding member to be inserted into and removed from the optical path in the moving step. The irradiation region is equally divided in the alignment direction to form a plurality of irradiation division regions,
The shielding member has a size that can prevent irradiation of the energy beam to a number of the irradiation division regions that is one less than the number of divisions among the plurality of irradiation division regions,
3. The energy beam drilling method according to claim 1, wherein each of the through holes is formed by irradiation of the energy beam in all of the irradiation divided regions. The mask is configured such that a member that blocks transmission of the energy beam is provided so that two or more transmission holes that allow transmission of the energy beam are aligned.
In each of the irradiation divided regions, a plurality of transmission hole-shaped beams that are transmitted through the transmission holes by irradiating the mask with the energy beam are uniformly present,
The shielding member has a size that can shield the transmission holes for a plurality of transmission hole-shaped beams that are present in the irradiation division region that is one less than the division number among the plurality of irradiation division regions. The energy beam drilling method according to claim 3, wherein: In the first irradiation step, only one of the ends of the plurality of irradiation divided regions is irradiated with the energy beam to the workpiece that contributes to the formation of the through-hole, and the last In the irradiation step, only one of the other ends of the plurality of irradiation division regions is set to be irradiated with the energy beam to the workpiece to be contributed to the formation of the through hole,
In the first irradiation step, the shielding mechanism positions the shielding member so as to prevent irradiation of the energy beam to all the irradiation divided regions other than the one end of the plurality of irradiation divided regions. In the second and subsequent irradiation steps, the shielding is performed so as to prevent irradiation of the energy beam from the one end to all the irradiation divided regions other than the irradiation divided regions equal to the number of the irradiation steps. In the last irradiation step, the shielding member is disposed so as to prevent irradiation of the energy beam to all the irradiation divided regions other than the other end of the plurality of irradiation divided regions. In the irradiation process before the second time from the last, all the above-mentioned irradiation division regions other than the same number as the number counted from the last of the irradiation process from the other end Energy beam drilling method according to claim 3 or claim 4, wherein said positioning the shielding member to prevent irradiation of said energy beam to the morphism divided region. In the optical path, a reduction lens is provided between the mask and the workpiece,
6. The energy beam drilling method according to claim 1, wherein the shielding member is provided in the vicinity of the mask in the optical path. A plurality of nozzle holes for discharging droplets, a plurality of liquid chambers provided individually corresponding to the nozzle holes, and a discharge energy generator provided corresponding to the liquid chambers. And a method of manufacturing a droplet discharge head in which the liquid in each liquid chamber is discharged as a droplet from each nozzle hole by the discharge energy generator,
A method for manufacturing a droplet discharge head, wherein each nozzle hole is formed by the energy beam drilling method according to any one of claims 1 to 6.   The method for manufacturing a droplet discharge head according to claim 7, wherein each nozzle hole is provided in a nozzle plate made of a resin material.   9. The droplet according to claim 7, wherein the liquid chamber has a side wall located in a direction orthogonal to a direction in which the droplet is ejected from each nozzle hole made of a metal material. Manufacturing method of the discharge head.   9. The droplet according to claim 7, wherein the liquid chamber has a sidewall made of a resin material positioned in a direction orthogonal to a direction in which the droplet is discharged from each nozzle hole. Manufacturing method of the discharge head.   A liquid droplet ejection apparatus, comprising the liquid droplet ejection head according to any one of claims 7 to 10.   A recording apparatus comprising the droplet discharge head according to any one of claims 7 to 10. By irradiating the workpiece with an energy beam through a mask provided with a predetermined aligned through-hole pattern, a plurality of through-holes having a positional relationship matching the through-hole pattern is formed on the workpiece. An energy beam drilling device that performs
An emission mechanism that emits the energy beam, a processing stage that holds the workpiece to be movable, and a shielding member that can block transmission of the energy beam are inserted into and removed from an optical path that leads the energy beam to the workpiece. And a control mechanism that drives and controls the output mechanism, the processing stage, and the shield mechanism,
The control mechanism is configured to move the irradiation region on the workpiece in the alignment direction of the through-hole pattern so that the irradiation region formed on the workpiece by the energy beam partially overlaps. Along with forming the plurality of through holes by sequentially increasing the depth dimension by controlling the emission mechanism to sequentially irradiate the workpiece with the energy beam while controlling the stage,
The shielding member is inserted into the optical path in accordance with the movement of the irradiation region in the workpiece so as to prevent the irradiation of the energy beam that does not contribute to the formation of the through hole in the irradiation region. An energy beam drilling apparatus characterized by controlling the shielding mechanism. The control mechanism includes: an irradiation step of irradiating the output mechanism with an energy beam having a constant pulse number that does not pass through the workpiece as the through hole; and the processing stage A plurality of through holes are formed in the workpiece by sequentially increasing a depth dimension by alternately repeating a moving step of moving the irradiation area in the workpiece in the alignment direction. ,
14. The energy beam drilling apparatus according to claim 13, wherein the shielding mechanism is controlled by the control mechanism so that the shielding member is inserted into and removed from the optical path in the moving step. The irradiation region is equally divided in the alignment direction to form a plurality of irradiation division regions,
The shielding member has a size that can prevent irradiation of the energy beam to a number of the irradiation division regions that is one less than the number of divisions among the plurality of irradiation division regions,
15. The energy beam drilling apparatus according to claim 13, wherein each of the through holes is formed by irradiation of the energy beam in all of the irradiation divided regions. The mask is configured such that a member that blocks transmission of the energy beam is provided so that two or more transmission holes that allow transmission of the energy beam are aligned.
In each of the irradiation divided regions, a plurality of transmission hole-shaped beams that are transmitted through the transmission holes by irradiating the mask with the energy beam are uniformly present,
The shielding member has a size that can shield the transmission holes for a plurality of transmission hole-shaped beams that are present in the irradiation division region that is one less than the division number among the plurality of irradiation division regions. The energy beam drilling apparatus according to claim 15, wherein In the first irradiation step, the processing stage is configured so that only one end of the plurality of irradiation division regions is irradiated with the energy beam to the processing member that contributes to the formation of the through hole. In the final irradiation step, only one of the other ends of the plurality of irradiation division regions is irradiated with the energy beam on the workpiece to be contributed to the formation of the through hole. Therefore, the machining stage is controlled,
In the first irradiation step, the shielding mechanism positions the shielding member so as to prevent irradiation of the energy beam to all the irradiation divided regions other than the one end of the plurality of irradiation divided regions. In the second and subsequent irradiation steps, the shielding is performed so as to prevent irradiation of the energy beam from the one end to all the irradiation divided regions other than the irradiation divided regions equal to the number of the irradiation steps. In the last irradiation step, the shielding member is disposed so as to prevent irradiation of the energy beam to all the irradiation divided regions other than the other end of the plurality of irradiation divided regions. In the irradiation process before the second time from the last, all the above-mentioned irradiation division regions other than the same number as the number counted from the last of the irradiation process from the other end Energy beam drilling apparatus according to claim 15 or claim 16, wherein the controlled so as to position the shielding member to prevent irradiation of said energy beam to the morphism divided region. In the optical path, a reduction lens is provided between the mask and the workpiece,
18. The energy beam drilling apparatus according to claim 13, wherein the shielding member is provided in the vicinity of the mask in the optical path.

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