JP2009189946A - Dipping treatment apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a dipping treatment apparatus capable of stably carrying out the surface treatment of a work. <P>SOLUTION: The dipping treatment apparatus 1 for carrying out the surface treatment of the work W by dipping the work W into a treatment solution includes: a treating vessel part 5A for dip-treating the work W with the stored treatment solution; a replenishing vessel part 5B for replenishing the treatment solution to the treating vessel part 5A; a work treating vessel 5 having a partition plate 42 for parting the treating vessel part 5a from the replenishing vessel part 5B and overflowing the treatment solution in the treating vessel part 5A to the replenishing vessel part 5B; a replenishing flow path 78 communicating the replenishing vessel part 5B with the treating vessel part 5A; a delivery pump 34 provided in the replenishing flow path 78 and for delivering the treating solution in the replenishing vessel part 5B to the treating vessel part 5A; and a controlling means 9 for controlling the delivery pump 34. The controlling means replenishes the treatment solution into the treating vessel part 5A by driving the delivering pump 34 at a time period for waiting treatment between one dip treatment and a next dip treatment. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an immersion treatment apparatus that performs surface treatment of a workpiece by immersing a workpiece, which is a treatment object, in a treatment solution.

Conventionally, as this type of immersion treatment apparatus, an immersion tank (treatment tank) that performs surface treatment on a workpiece, a liquid storage tank (replenishment layer) that collects a coating liquid (treatment solution) overflowed from the immersion tank, A pipe connecting the liquid storage tank and the immersion tank, a filter interposed in the pipe to remove foreign matter mixed in the coating liquid, and a pipe interposed between the storage tank and the coating liquid in the liquid storage tank A coating apparatus having a pump for feeding liquid is known (see Patent Document 1). In this coating device, a liquid metering discharge device such as a metering pump or a dispenser or an infusion device is used to continuously replenish an organic solvent of the coating liquid into the liquid storage tank at short time intervals, while driving the pump to perform coating. The working liquid is circulated between the liquid storage tank and the immersion tank while overflowing from the immersion tank. Thus, the concentration of the coating liquid is kept constant, and the coating film thickness is kept constant.
JP 2004-113935 A

  Thus, the conventional immersion treatment apparatus circulates the coating liquid between the liquid storage tank and the immersion tank in order to keep the concentration of the coating liquid constant. For this reason, although depending on the coating liquid used (treatment solution), the film surface becomes unstable when the workpiece is pulled up due to the undulation of the liquid surface in the immersion tank, and the coating film thickness becomes non-uniform (stripe pattern and There was a problem.

  This invention makes it the subject to provide the immersion treatment apparatus which can perform the surface treatment of a workpiece | work stably.

  The immersion treatment apparatus of the present invention is an immersion treatment apparatus that performs a surface treatment of a workpiece by immersing the workpiece in a treatment solution. The treatment bath unit immerses the workpiece with a stored treatment solution, and the treatment solution in the treatment vessel unit. A work tank having a replenishing tank section for replenishing, a separator tank for defining a processing tank section and a replenishing tank section, and overflowing a processing solution in the processing tank section to the replenishing tank section, a replenishing tank section and a processing tank A replenishing channel communicating with the unit, a liquid feeding unit interposed in the replenishing channel, for feeding the processing solution of the replenishing tank unit to the processing tank unit, and a control unit for controlling the liquid feeding unit, The control means is characterized in that the liquid feeding means is stopped while performing one immersion treatment.

  In this case, it is preferable that the control means drives the liquid feeding means and replenishes the treatment solution to the treatment tank unit when waiting for treatment between one immersion treatment and the next immersion treatment.

  According to these configurations, the processing solution is replenished from the replenishing tank part to the processing tank part by driving the liquid feeding means and feeding the processing solution stored in the replenishing tank part to the processing tank part. Since the liquid feeding means is in a stopped state during the immersion process 1, the treatment solution is not replenished during the immersion process 1, and the liquid level in the treatment tank may be undulated. Absent. Therefore, the surface treatment of the workpiece can be performed stably. In addition, since the treatment solution is replenished to the treatment tank unit when waiting for a treatment between one immersion treatment and the next immersion treatment, the replenishment of the treatment solution does not affect the next immersion treatment.

  Further, it is preferable that the control means drives the liquid feeding means every time waiting for processing to replenish the processing solution until it overflows from the processing tank section.

  According to this configuration, since the processing solution is replenished every time when waiting for processing and until it overflows from the processing tank unit, processing is always performed at the same liquid level for each immersion process in the processing tank unit. Become. For this reason, the surface treatment of the workpiece can always be performed stably.

  In this case, it is preferable that the control means performs replenishment of the processing solution by the liquid feeding means by timer control.

  According to this configuration, in combination with the overflow of the processing solution, the processing solution can be reliably replenished by a simple control operation.

  In these cases, it is preferable that the replenishment flow path is connected to the lower part of the replenishing tank part at the upstream end and connected to the lower part of the processing tank part at the downstream end.

  According to this configuration, even when the processing solution is replenished, it is possible to suppress the undulation of the liquid level in the processing tank, so that the time for the undulation to settle can be shortened, and the tact time of the workpiece processing as a whole can be reduced. It can be shortened.

  In this case, the bottom of the processing tank and the bottom of the replenishing tank are provided with a liquid collecting part that communicates with a waste liquid channel for draining the processing solution, and the bottom of the processing tank and the bottom of the replenishing tank are It is preferable that each of the liquid collecting portions is formed in a downward gradient.

  According to this configuration, when the processing solution stored in the processing tank unit and the replenishing tank unit is drained, all the processing solutions can be fed, and at the same time, foreign matters mixed in the processing solution can be discharged. . Therefore, even when foreign matters are mixed in the processing solution, the processing solution in the processing bath can be kept clean and appropriately surface-treated by replacing (disposing of) the processing solution. Alternatively, the filtration efficiency can be improved by filtering after extracting the treatment solution.

  In this case, the processing solution is a mixture of the solvent introduced into the workpiece processing tank and mixed, and the control means drives the liquid feeding means to transfer the processing solution from the processing tank section to the replenishment tank section. It is preferable to mix the solvent and the solvent by repeating the circulation returning to the part.

  According to this structure, when newly adjusting a processing solution, a liquid sending means can be utilized and a solvent can be completely dissolved in the solvent stored in the workpiece processing tank. Therefore, the concentration of the treatment solution can be kept constant, and an appropriate surface treatment can be performed.

  In this case, it is preferable that an opening / closing lid for opening and closing the workpiece processing tank is further provided, and a sealing member for sealing the closed opening / closing lid is embedded in the upper peripheral edge of the workpiece processing tank.

  According to this configuration, since the work processing tank can be sealed by the open / close lid except when the work is carried into and out of the processing tank unit, the vaporization of the processing solution (solvent thereof) can be suppressed and stable. Surface treatment becomes possible. In addition, since the work processing tank is sealed by the open / close lid even during standby, it is possible to prevent foreign matters from being mixed into the processing solution stored in the work processing tank.

  Hereinafter, an immersion treatment apparatus according to an embodiment of the present invention will be described with reference to the accompanying drawings. This immersion treatment apparatus is a so-called Dip coater that performs surface treatment such as coating by immersing a workpiece in a treatment solution.

  As shown in FIGS. 1 and 2, the immersion treatment apparatus 1 includes a lower tank cabinet 2, a machine base 3 disposed on the upper surface of the tank cabinet 2, and a work treatment tank 5 installed on the machine base 3. And a device cover 6 that accommodates the processing device main body 4 and that covers the upper space of the machine base 3. The tank cabinet 2 and the device cover 6 communicate with exhaust equipment not shown in the figure, and the internal atmosphere is appropriately ventilated. Further, the immersion processing apparatus 1 incorporates a control device 9 including an electrical box 7 provided on the back side of the device cover 6 and a control device main body 8 provided on the front surface (front surface) of the device cover 6.

  The workpiece W, which is the object to be processed, is a rectangular metal plate, and is accommodated in the workpiece magazine 11 in units of a plurality (20) thereof and is gradually fed to the immersion treatment apparatus 1. More specifically, two work magazines 11, 11 storing a plurality of workpieces W arranged side by side are mounted on the magazine tray 12, and the two work magazines 11, 11 together with the magazine tray 12 are immersed together. The material is gradually fed to the processing apparatus 1. The plurality of workpieces W are immersed in the workpiece processing tank 5 together with the workpiece magazine 11 and subjected to surface treatment.

  The processing apparatus main body 4 includes a workpiece processing tank 5 for dipping the workpiece, an opening / closing lid 14 for opening and closing the upper end opening of the workpiece processing tank 5, and a magazine disposed in the workpiece supply unit 15 adjacent to the workpiece processing tank 5. A set mechanism 16, an immersion movement mechanism 17 for immersing and moving a plurality of workpieces W together with the workpiece magazine 11 between the workpiece supply unit 15 and the workpiece processing tank 5, and an opening / closing lid 14 for the workpiece processing tank 5. And a lid moving mechanism 18 to be moved. The work processing tank 5 and the magazine setting mechanism 16 are arranged at the front part of the machine base 3, and the immersion movement mechanism 17 and the lid movement mechanism 18 are arranged at the rear part of the machine base 3 in a state where they overlap each other. ing.

  The immersion moving mechanism 17 hooks the work magazine 11 and moves it to the position directly above the workpiece processing tank 5, waits for the lid moving mechanism 18 to open the opening / closing lid 14, and immerses the workpiece magazine 11 in the workpiece processing tank 5. To do. In this immersion treatment, the immersion movement mechanism 17 slowly submerges the work magazine 11 in the treatment solution, and slowly lifts it up after the undulation of the liquid surface has subsided. Thereby, the surface treatment is appropriately performed on the plurality of workpieces W in the workpiece magazine 11. As will be described later, the processing solution contains a highly volatile solvent, and the processing solution (solvent) adhering to the work magazine 11 or the work W is rapidly vaporized while the work magazine 11 is pulled up ( Dry). When the lifting of the work magazine 11 is completed, the lid moving mechanism 18 immediately closes the opening / closing lid 14. On the other hand, the lifted work magazine 11 is returned to the magazine tray 12 of the work material supply unit 15. When the above operation is performed twice and the immersion processing of the two work magazines (work W) 11, 11 is completed, the work magazine 11 is gradually removed together with the magazine tray 12, and a new work magazine (unprocessed work W is processed). ) 11 is supplied.

  On the other hand, in the tank cabinet 2, a liquid supply tank 21 for supplying a processing solution to the work processing tank 5, a waste liquid tank 22 for collecting the used processing solution from the work processing tank 5, and a work processing tank for filtering And a buffer tank 23 for extracting and collecting the processing solution from 5. Further, in the tank cabinet 2, various pumps and valves are accommodated together with various pipes (details will be described later) so as to be provided in the tanks 21, 22, and 23.

  The treatment solution is composed of a solvent that is a main component of the surface treatment and a solvent that dissolves the solvent. The solvent is supplied from the liquid supply tank 21 to the work treatment tank 5, and the solvent is directly applied to the solvent supplied from the work treatment tank 5. Charged and mixed. In addition, a highly volatile solvent is used. For this reason, the work treatment tank 5 is airtightly closed by the opening / closing lid 14 except when the immersion treatment is performed, and the vaporized solvent evaporated from the work treatment tank 5 during the immersion treatment is the atmosphere in the apparatus cover 6. At the same time, it is exhausted through the exhaust duct 25 to the exhaust equipment (exhaust treatment equipment).

  As shown in the piping system diagram of FIG. 3, the processing apparatus main body 4 includes the work processing tank 5, the liquid supply tank 21, the waste liquid tank 22, and the buffer tank 23, and the work processing tank 5, the liquid supply tank 21, and the like. A forward flow path 31 connecting the buffer tank 23, a return flow path 32 connecting the work processing tank 5, the waste liquid tank 22 and the buffer tank 23, and a bypass flow path 33 connecting the forward flow path 31 and the return flow path 32. And a forward pump (liquid feeding means) 34 interposed in the forward flow path 31 and a return pump 35 interposed in the return flow path.

  The workpiece processing tank 5 defines a processing tank section 5A for directly surface-treating the workpiece W, a replenishing tank section 5B for replenishing the processing tank section 5A with a processing solution, a processing tank section 5A and a replenishing tank section 5B. And a partition plate 42 that overflows the processing solution in the processing tank 5A to the replenishing tank 5B.

  As shown in FIGS. 4 and 5, the work processing tank 5 is installed on the drain pan 27 and is formed in a substantially square shape with stainless steel or the like. Further, the work processing tank 5 includes a processing tank main body 41 having an inside defined by a partition plate 42 as a processing tank portion 5A and a replenishing tank portion 5B, and four leg pieces 43 that support the processing tank main body 41 on the drain pan 27. And a lid mounting portion 44 that is provided at the upper end portion of the processing tank main body 41 and receives the opening / closing lid 14. A lid seal 45 that seals the gap with the opening / closing lid 14 is embedded in the lid mounting portion 44 upward.

  The bottom 47 of the treatment tank 5A is formed in a downward slope (down slope) from the position of the partition plate 42 toward the opposing side wall 48, and a treatment tank drain port 49 serving as a liquid collection part is formed in the center on the side wall 48 side. Is formed. Similarly, the bottom 51 of the replenishing tank part 5B is formed in a downward slope (downward slope) from the position of the partition plate 42 toward the opposing side wall 52, and in the center on the side of the side wall 52, the replenishing tank drainage serving as a liquid collection part. A mouth 53 is formed. And this processing tank drain 49 and the replenishment tank drain 53 are connected to the replenishment flow path 78 mentioned later. That is, the replenishment flow path 78 is connected to the lower part of the replenishing tank part 5B at the upstream end, and connected to the lower part of the processing tank part 5A at the downstream end.

  Reference numeral 55 in the figure denotes an overflow pipe that rises from the bottom 51 of the replenishing tank 5B (adjacent to the replenishing tank drain 53). For example, the supply stop of the processing solution from the liquid supply tank 21 malfunctions. When the process is not carried out, the processing solution is drained from this portion to prevent the processing solution from overflowing from the work processing tank 5. In addition, it is preferable to make the bottom part 47 of 5 A of processing tanks into a funnel downward slope toward the processing tank drain port 49. FIG. Similarly, it is preferable that the bottom 51 of the replenishing tank 5B has a funnel-shaped downward slope toward the replenishing tank drain 53. Further, it is preferable to adopt the above-described form even at the bottom of the buffer tank 23.

  As shown in FIG. 3, the forward flow path 31 includes a main forward flow path 61 having a downstream end connected to the processing tank 5A, a circulation forward flow path 62 that joins the upstream end of the main forward flow path 61, and a liquid supply flow. And a path 63. The forward pump 34 is interposed in the main forward flow path 61, and a filter 36 and a liquid feeding sensor 37 are interposed downstream of the forward pump 34. Further, a second merging switching valve 65 is interposed in the main forward channel 61 located upstream of the forward pump 34, and the bypass channel 33 is mergingly connected to the second merging switching valve 65. . Further, the circulation forward flow path 62 connected to the buffer tank 23 and the liquid supply flow path 63 connected to the liquid supply tank 21 are connected to the upstream end of the main forward flow path 61 via the first junction switching valve 64, respectively. Has been. The circulation forward flow path 62 is connected to the bottom of the buffer tank 23, the liquid supply flow path 63 is connected to the upper end of the liquid supply tank 21, and the tip thereof reaches the vicinity of the bottom of the liquid supply tank 21. .

  On the other hand, the return flow path 32 includes a communication flow path 67 communicating with the replenishment tank section 5B and the processing tank section 5A, a main return flow path 68 branched from an intermediate position of the communication flow path 67, and a main return flow. A waste liquid channel 69 and a circulation return channel 70 branched from the downstream end of the channel 68 are configured. The communication flow path 67 includes a processing side short flow path 71 connected to the processing tank section 5A and a replenishment side short flow path 72 connected to the replenishing tank section 5B with the branch portion of the main return flow path 68 as a boundary. The processing side short flow path 71 is provided with a processing side opening / closing valve 73, and the replenishment side short flow path 72 is provided with a replenishment side opening / closing valve 74.

  The main return flow path 68 is provided with the return pump 35, and the bypass flow path 33 is branched and connected to the upstream side of the return pump 35 via a first branch switching valve 75. The downstream end of the main return flow path 68 is connected to the waste liquid flow path 69 connected to the waste liquid tank 22 and the circulation return flow path 70 connected to the buffer tank 23 via the second branch switching valve 76. Yes. In addition, the waste liquid channel 69 is connected to the upper end portion of the waste liquid tank 22, and similarly, the circulation return channel 70 is connected to the upper end portion of the buffer tank 23. In addition, the replenishment flow path 78 referred to in the embodiment includes a replenishment side short flow path 72, a main return flow path 68 to the first branch switching valve 75, a bypass flow path 33, and a main forward flow path after the second merge switching valve 65. 61.

  Next, with reference to FIG. 3, the operation method of the immersion processing apparatus 1 by said control apparatus 9 is demonstrated. Prior to the surface treatment, the immersion treatment apparatus 1 is operated by supplying a treatment solution (solvent) stored in the liquid supply tank 21 to the work treatment tank 5 and mixing it with the solvent, and a treatment solution. A replenishment operation for replenishing the processing tank unit 5A from the replenishing tank unit 5B, a filtering operation for removing foreign substances in the processing solution through the filter 36, a waste liquid operation for discarding the used processing solution in the waste liquid tank 22, There is.

  In the adjustment operation, the first merging switching valve 64 is switched to the liquid supply flow path 63 side, the second merging switching valve 65 is switched to the main forward flow path 61 side, and the forward pump 34 is driven. As a result, the processing solution (solvent) in the liquid supply tank 21 is supplied to the work processing tank 5, and then a small amount of solvent is added to the processing solution (solvent) stored in the work processing tank 5 so as to have a predetermined concentration. To do. Next, the processing side opening / closing valve 73 is “closed”, the replenishment side opening / closing valve 74 is “open”, and the first branch switching valve 75 and the second merging switching valve 65 are respectively switched to the bypass flow path 33 side. The pump 34 is driven. As a result, the processing solution in the replenishing tank unit 5B flows through the replenishment side short flow path 72, the main return flow path 68, the bypass flow path 33, and the main forward flow path 61 (together with the replenishing flow path 78), thereby processing tank 5A. And then overflows from the processing tank 5A and returns to the replenishing tank 5B. By repeating this circulation operation a plurality of times (actually, for a predetermined time), the processing solution (solvent) and the solvent are uniformly mixed to prepare a processing solution having a predetermined concentration.

  In the replenishment operation, similarly to the above, the processing side opening / closing valve 73 is “closed”, the replenishment side opening / closing valve 74 is “open”, and the first branch switching valve 75 and the second merging switching valve 65 are respectively connected to the bypass flow path 33. The forward pump 34 is driven. As a result, the processing solution in the replenishing tank unit 5B flows through the replenishment side short flow path 72, the main return flow path 68, the bypass flow path 33, and the main forward flow path 61 (together with the replenishing flow path 78), thereby processing tank 5A. The liquid is sent to When the processing solution overflows from the processing tank 5A (full solution), the forward pump 34 is stopped to complete the replenishment of the processing solution. Note that the processing solution supplemented to the processing tank 5A passes through the filter 36 in the main forward flow path 61 and is appropriately filtered.

  The filtering operation is performed when it is necessary to remove foreign matter mixed in the processing solution by the immersion treatment of the workpiece W. First, both the processing side opening / closing valve 73 and the replenishment side opening / closing valve 74 are set to “open”, the first branch switching valve 75 is switched to the main return flow path 68 side, and the second branch switching valve 76 is switched to the circulation return flow path 70 side. After switching to, the return pump 35 is driven. As a result, all the processing solutions stored in the processing tank 5A and the replenishing tank 5B flow from the processing-side short flow path 71 and the replenishing-side short flow path 72 to the main return flow path 68, respectively, and are further circulated and returned. It flows through the passage 70 and is once stored (drained) in the buffer tank 23.

  Next, the first merging switching valve 64 is switched to the circulating forward flow path 62 side, the second merging switching valve 65 is switched to the main forward flow path 61 side, and the forward pump 34 is driven. The driving of the forward pump 34 is continued until the buffer tank 23 is emptied, and the processing solution in the buffer tank 23 flows through the circulating forward flow path 62 and the main forward flow path 61 to a part of the processing tank 5A. Overflows further and is fed to the replenishing tank 5B. At this time, all the processing solutions pass through the filter 36 interposed in the main forward flow path 61 and are filtered. That is, since all the processing solutions pass through the filter 36, the foreign matters mixed in the processing solutions are filtered all at once.

  In the disposal operation, the processing side opening / closing valve 73 and the replenishment side opening / closing valve 74 are each opened, the first branch switching valve 75 is switched to the main return flow path 68 side, and the second branch switching valve 76 is switched to the waste liquid flow path. The return pump 35 is driven by switching to the 69 side. As a result, when foreign substances that cannot be filtered are mixed into the processing solution or the processing solution that needs to be replaced due to deterioration over time, the processing return short flow channel 71 and the replenishment side short flow channel 72 are returned from the main return flow channel, respectively. 68, and further flows through the waste liquid flow path 69, and all is discharged into the waste liquid tank 22.

  Here, the relationship between the above-described replenishment operation and the immersion processing operation of the workpiece W will be described. As described above, the plurality of workpieces W are set in the workpiece magazine 11 and are carried into the workpiece processing tank 5 by the immersion moving mechanism 17 and are immersed in the processing tank section 5A. In addition, two work magazines 11 and 11 are brought into the immersion treatment apparatus 1 at a time (feeding), and immersion treatment is performed in units of two. On the other hand, the replenishment operation is performed for each immersion process. That is, the replenishment operation is performed during the processing waiting time between one immersion process and the next immersion process, and each immersion process is always performed in a state where the processing tank portion 5A is full.

  As described above, the replenishment operation is performed until the processing solution overflows from the processing tank 5A through the partition plate 42, and this is performed by the timer control of the forward pump 34 described above. The timer control is an amount of decrease in liquid that is the sum of the overflow amount of the treatment solution during the immersion treatment, the consumption amount of the treatment solution attached to the pulled workpiece W and the work magazine 11, and the transpiration amount of the treatment solution during the immersion treatment. And the drive time of the forward pump 34 that is determined in advance with a margin from the relationship between the discharge amount of the forward pump 34. Further, the replenishment operation is performed immediately after the immersion process is completed, and at least when the immersion process is started, the replenishment operation is completed and the ripple of the liquid level is stopped.

  As described above, when the operation method in which the replenishment operation is not performed every processing waiting time is performed, a liquid reducing sensor is provided in the processing tank 5A, and when the liquid reducing sensor is turned on, the forward pump 34 is turned on for a predetermined time ( It is preferable to drive until it overflows. The replenishing tank 5B is provided with a full liquid sensor and a liquid reduction sensor. When the processing solution is supplied, the forward pump 34 is stopped when the full liquid sensor is ON (liquid supply is completed), and the liquid supply sensor 5 is replenished with the liquid reduction sensor ON. It is preferable to issue an alarm to the effect that the treatment solution is insufficient.

  As described above, in this embodiment, the replenishment operation of the processing solution is not performed (stopped) during the dipping process. Therefore, when the dipping process of the workpiece W is started, there is no ripple on the liquid level of the processing solution. Is not generated, and the immersion treatment can be appropriately performed. Further, the dipping operation (raising and lowering) is also performed slowly. In particular, the pulling operation important in the film formation is performed slowly after the undulation of the liquid level is settled, so that the dipping process can be performed more appropriately. Moreover, since the replenishment operation is performed for each immersion process, each immersion process can be performed at the same liquid level, that is, under the same conditions, and the immersion process can be performed stably.

It is the external appearance perspective view seen from the front side of the immersion treatment apparatus concerning 1st Embodiment. It is the external appearance perspective view seen from the back side of the immersion treatment apparatus concerning a 1st embodiment. It is a piping system diagram of the immersion treatment apparatus concerning a 1st embodiment. It is a perspective view around a workpiece processing tank. It is sectional drawing of a workpiece processing tank.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 Immersion processing apparatus, 4 Processing apparatus main body, 5 Work processing tank, 5A Processing tank part, 5B Replenishment tank part, 9 Control apparatus, 11 Work magazine, 17 Immersion moving mechanism, 31 Outward flow path, 32 Return flow path, 33 Bypass Flow path, 34 Outward pump, 41 Processing tank body, 42 Separator, 47 Bottom, 49 Processing tank outlet, 51 Bottom, 53 Replenisher outlet, 61 Main forward path, 67 Communication path, 68 Main return path 78 Replenishment flow path, W work

Claims (8)

An immersion treatment apparatus that performs surface treatment of the workpiece by immersing the workpiece in a treatment solution,
A processing tank section for immersing the workpiece with the stored processing solution, a replenishing tank section for replenishing the processing tank section with the processing solution, and defining the processing tank section and the replenishing tank section, and the processing tank section. A work treatment tank having a partition plate that overflows the treatment solution of the replenishment tank part,
A replenishment flow path communicating the replenishing tank section and the processing tank section;
A liquid feeding means interposed in the replenishing flow path, for feeding the processing solution in the replenishing tank section to the processing tank section;
Control means for controlling the liquid feeding means,
The said control means makes the said liquid feeding means a stop state while performing the said 1 immersion process, The immersion processing apparatus characterized by the above-mentioned.   The said control means drives the said liquid feeding means at the time of the process waiting between the said 1 immersion process and the next said immersion process, and replenishes the said process solution to the said processing tank part. The immersion treatment apparatus according to 1.   3. The immersion processing apparatus according to claim 2, wherein the control means drives the liquid feeding means every time the process waits and replenishes the processing solution until the processing tank section overflows.   The immersion processing apparatus according to claim 2 or 3, wherein the control means performs replenishment of the processing solution by the liquid feeding means by timer control.   5. The immersion according to claim 1, wherein the replenishing flow path is connected to a lower part of the replenishing tank part at an upstream end and connected to a lower part of the processing tank part at a downstream end. Processing equipment. The bottom of the treatment tank and the bottom of the replenishment tank are each provided with a liquid collection part that communicates with a waste liquid flow path for waste of the treatment solution,
6. The immersion treatment apparatus according to claim 1, wherein a bottom surface of the treatment tank part and a bottom surface of the replenishment tank part are respectively formed in a downward gradient toward each liquid collection part. The treatment solution is a mixture of a solvent introduced into the work treatment layer and mixed.
The control means drives the liquid feeding means and mixes the solvent and the solvent by repeating circulation of returning the treatment solution from the treatment tank to the treatment tank via the replenishment tank. An immersion treatment apparatus according to any one of claims 1 to 6. An opening / closing lid for opening and closing the workpiece processing tank;
The immersion processing apparatus according to any one of claims 1 to 7, wherein a seal member that seals between the closed lid is embedded in an upper peripheral edge portion of the work processing tank.

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