JP2009182193A - Laser beam processing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a laser beam processing device capable of obtaining a desired laser output which is preset without generating processing unevenness even if the installation state changes. <P>SOLUTION: A memory 9 is stored with a preset reference level Ps as an output level of laser light Lo to be output from a laser oscillator 2. In a head unit 3, an output monitor 21 is provided which detects an actual output level of the laser light Lo emitted from the laser oscillator 2. A CPU 8 controls a driving circuit 5 when powered on to adjust a current fed to a light source 4 for excitation so that the output level Pd of the actual laser light Lo detected on the basis of a detection signal Sd of the output monitor 21 may match the set reference level Ps. The value of the adjusted current is set again as the value of a prescribed current Ip, and the light source 4 for excitation is driven thereafter by feeding the prescribed current Ip after having been set again. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a laser processing apparatus.

  2. Description of the Related Art Conventionally, there is a laser processing apparatus including a laser oscillator that irradiates a laser medium with excitation light output from an excitation light source and emits laser light amplified by the laser medium. In such a laser processing apparatus, a head unit containing the laser oscillator, a control unit containing an excitation light source and a drive circuit, and the head unit and the control unit are connected and excited. Some optical fibers include an optical fiber that guides excitation light output from a light source to a laser medium.

  By adopting such a so-called head-divided configuration, it is possible to reduce the size and improve the layout flexibility. Furthermore, by providing the laser oscillator on the head unit side, the output of the laser light transmitted through the optical fiber can be suppressed to a small value. As a result, the fiber cost can be suppressed, and various advantages such as propagation loss in the optical fiber and generation of sub-wavelength laser due to Raman scattering can be enjoyed.

However, while having these many advantages, the head-divided laser processing apparatus also has a problem due to its high layout flexibility.
That is, the amount of light transmitted through the optical fiber changes slightly as the bending state of the optical fiber changes. Therefore, in the configuration in which the excitation light is transmitted through the optical fiber as described above, the light amount of the excitation light introduced into the laser oscillator (laser medium) varies with the change in the bending state, and as a result, the final The laser output may change. Therefore, in the laser processing apparatus having such a configuration, it is desirable to set the laser output and use the apparatus in a state where the bent state of the optical fiber is stably fixed.

  However, in the case of a head-divided laser processing apparatus, the arrangement of the head unit and the control unit and the handling of the optical fiber can be changed relatively easily even after the installation. For this reason, for example, the operator may change the installation state of the apparatus without particular awareness, for example, by shifting the position of the head unit during cleaning and then returning it to the original location again. Then, since the bending state of the optical fiber changes in accordance with the change in the installation state, there is a possibility that the desired laser output set initially cannot be obtained.

As a method for solving such a problem, for example, it is conceivable to detect the output level of laser light emitted from a laser oscillator and perform feedback control (see Patent Document 1). That is, the energization of the excitation light source is controlled so that the output level of the detected laser beam follows the target output level. The laser output is stabilized by eliminating the influence of disturbance such as a change in the bent state of the optical fiber.
JP 2007-253189 A

  However, the head-divided laser processing apparatus as described above is often used for applications such as scanning the surface of a processing object at a high speed, such as marking characters or numbers on the surface of an object to be processed. . Therefore, the countermeasure using the feedback control may not always lead to a favorable result.

  That is, the feedback control basically involves a follow-up delay (phase delay). In particular, in a laser processing apparatus, the relationship between the amount of current supplied to the excitation light source and its output (the amount of excitation light) is also necessarily proportional. Therefore, the follow-up delay appears more prominently. In other words, if the concept of microscopic time is introduced, the laser output is constantly fluctuated by executing the feedback control as described above. For this reason, in applications where the laser beam is scanned at high speed, fluctuations in the laser output due to the phase delay may be manifested as processing irregularities such as “marking skipping”, which is still an improvement. The room was left.

  The present invention has been made to solve the above-described problems, and its purpose is to achieve a desired laser that has been set in advance without causing processing unevenness even when the installation state has changed. An object of the present invention is to provide a laser processing apparatus capable of obtaining an output.

  In order to solve the above problem, the invention according to claim 1 is a laser oscillator including a laser medium, a pumping light source that outputs pumping light for pumping the laser medium, and a predetermined predetermined value. Drive means for driving the excitation light source by supplying drive power; a head unit that houses the laser oscillator and irradiates the workpiece with laser light output from the laser oscillator; the excitation light source; A control unit that accommodates the driving means; and an optical fiber that connects the head unit and the control unit, and the excitation light output from the excitation light source in the control unit passes through the optical fiber. In a laser processing apparatus guided to the laser medium in the head unit, an output to be output from the laser oscillator Storage means for storing a reference level preset as a bell, detection means provided in the head unit so as to be able to detect the output level of the laser beam output from the laser oscillator, and switching to the output adjustment mode And the excitation light source so that the output level detected by the detection means becomes the reference level stored in the storage means when the mode switching means is performed and the output adjustment mode is switched. And adjusting means for adjusting the supply value of the drive power supplied to the power supply and setting the adjusted supply value of the drive power as the predetermined supply value.

  According to the above configuration, the output level of the laser light has changed due to the fixing and handling of the head unit, the control unit, and the optical fiber, that is, the installation state of the apparatus is changed, and the bending state of the optical fiber is changed. Even in this case, the reference level is automatically adjusted to a desired reference level. After that, by driving the excitation light source by supplying a predetermined drive power, a stable laser output without fluctuation can be achieved. As a result, even when there is a change in the installation state, it is possible to obtain a preset desired laser output without causing processing unevenness.

The gist of the invention described in claim 2 is that the mode switching means switches to the output adjustment mode when power is turned on.
According to the above configuration, a desired laser output set in advance can be obtained more easily and stably.

The gist of the invention described in claim 3 is provided with a registration means for storing the detected output level of the laser beam in the storage means as the reference level.
According to each of the above configurations, it is possible to register the output level of the desired laser light actually obtained as the reference level.

  The invention according to claim 4 includes confirmation means for confirming that an arrangement state of the head unit, the control unit, and the optical fiber is confirmed, and the registration means is confirmed by the confirmation means. The gist is that it is activated in some cases.

According to each of the above configurations, the reference level can be appropriately set. As a result, a desired laser output can be obtained more reliably.
According to a fifth aspect of the present invention, there is provided a comparison unit that compares a supply value of the driving power supplied to the excitation light source with a predetermined threshold value, and is appropriate when the supply value of the driving power exceeds a first threshold value. The gist of the present invention is to include first notifying means for notifying that it is out of range.

According to the above configuration, it is possible to promptly improve the installation state of the optical fiber such as reviewing the handling.
The gist of the invention described in claim 6 is provided with a second notification means for notifying that there is an abnormality when the supply value of the driving power exceeds a second threshold value.

According to the above configuration, abnormality notification can be performed accurately and promptly.
The gist of the invention described in claim 7 is that it comprises stop means for stopping the supply of drive power to the excitation light source when it is determined that the abnormality.

  According to the said structure, the fail safe by an apparatus stop can be aimed at.

  According to the present invention, it is possible to provide a laser processing apparatus capable of obtaining a preset desired laser output without causing uneven processing even when the installation state is changed.

DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, an embodiment of the invention will be described with reference to the drawings.
As shown in FIG. 1, a laser processing apparatus 1 according to this embodiment includes a head unit 3 that houses a laser oscillator 2, a control unit 6 that houses an excitation light source 4 and a drive circuit 5, and the head unit 3 and the control unit. And an optical fiber 7 to which the unit 6 is connected.

  The drive circuit 5 of the present embodiment is connected to the CPU 8 and controlled by the CPU 8 to drive the excitation light source 4 through supply of drive power to the excitation light source 4. Specifically, the CPU 8 of the present embodiment generates the control signal Sc so as to energize a predetermined current Ip that is set in advance as predetermined driving power supplied to the excitation light source 4. In this embodiment, the value of the predetermined current Ip is stored in the memory 9 (see FIG. 2), and the CPU 8 generates the control signal Sc by reading the stored value of the predetermined current Ip. . Then, the drive circuit 5 drives the excitation light source 4 by applying a predetermined current Ip based on the control signal Sc.

  In the present embodiment, the operation input unit 10 provided in the control unit 6 is provided with a setting dial 11, and when the operator operates the setting dial 11, the predetermined current Ip is set. (Basic setting). That is, the CPU 8 identifies the current value corresponding to the operation state by detecting the operation state (for example, the scale value) of the setting dial 11. Then, the CPU 8 stores the specified current value in the memory 9 as the value of the predetermined current Ip.

  The excitation light source 4 is driven by the predetermined current Ip supplied from the drive circuit 5 and outputs excitation light Le based on the predetermined current Ip. The excitation light Le output from the excitation light source 4 is collected by the lens 12 and applied to the control unit side end surface 7 a of the optical fiber 7. Then, the light is introduced into the head unit 3 by propagating through the optical fiber 7.

  The excitation light Le output from the head unit side end surface 7 b into the head unit 3 is collected by the lens 14 and input to the laser oscillator 2. The laser oscillator 2 of the present embodiment includes a laser medium 15 and a pair of mirrors 16 and 17 disposed so as to sandwich the laser medium 15. The excitation light Le condensed by the lens 14 is The laser medium 15 is irradiated through the mirror 16. In this embodiment, the laser medium 15 is composed of a YVO4 crystal, an SHG crystal, or the like. Then, the laser light Lo amplified by repeating the reflection between the two mirrors 16 and 17 and the transmission through the laser medium 15 passes through the mirror 17 and is output (emitted) to the outside of the laser oscillator 2. .

  In the present embodiment, the laser light Lo emitted from the laser oscillator 2 is input to the scanning unit 19 via the mirror 18. The scanning unit 19 uses a galvano scanner. The laser beam Lo scanned by the scanning unit 19 is output to the outside of the head unit 3 through the lens 20 and is irradiated onto the object to be processed.

(Laser output automatic adjustment function)
Next, the automatic adjustment function of the laser output in the laser processing apparatus of this embodiment will be described.

  In the present embodiment, the memory 9 provided in the control unit 6 stores a preset reference level Ps as the output level of the laser light Lo to be output from the laser oscillator 2 (see FIG. 2). ). In the head unit 3, an output monitor 21 for detecting the actual output level of the laser light Lo emitted from the laser oscillator 2 is provided. The laser processing apparatus 1 according to the present embodiment automatically adjusts the laser output so that the actual output level of the laser light Lo emitted from the laser oscillator 2 becomes the set reference level Ps. It has a function.

  Specifically, the output monitor 21 of the present embodiment is configured by a sensor element such as a photo detector or a thermopile whose output changes according to the output level of the irradiated laser light. The mirror 18 disposed between the laser oscillator 2 and the scanning unit 19 is configured to transmit a part (for example, 5%) of the irradiated laser light Lo. The output monitor 21 is arranged on the back surface of the mirror 18 so that the transmitted light Lo ′ transmitted through the mirror 18, that is, the actual output level of the laser light Lo output from the laser oscillator 2 is obtained. A corresponding detection signal Sd is output.

  In the present embodiment, the detection signal Sd output from the output monitor 21 is transmitted from the head unit 3 side to the control unit 6 side via the connection cable 24 and input to the CPU 8. The CPU 8 is configured to be able to detect the actual output level Pd of the laser light Lo output from the laser oscillator 2 by performing arithmetic processing based on the input detection signal Sd.

  In the present embodiment, the operation input unit 10 of the control unit 6 is provided with a setting button 25 together with the setting dial 11. Then, the CPU 8 stores the output level Pd of the laser beam Lo detected when the setting button 25 is operated in the memory 9 as the set reference level Ps.

That is, the setting of the reference level Ps in the present embodiment is performed by the operator operating the setting dial 11 and the setting button 25 in the following procedure.
-Adjust the output of the laser light Lo emitted from the laser oscillator 2 by operating the setting dial 11 to increase or decrease the value of the predetermined current Ip energized to the excitation light source 4. Normally, the output adjustment using the setting dial 11 is performed by, for example, trial firing of the laser light Lo on the workpiece.

  -Confirmation (reconfirmation) that the head unit 3, the control unit 6, and the optical fiber 7 are fixed and handled (especially the bent state of the optical fiber 7), that is, the installation state of the device is confirmed, and the setting button 25 is Manipulate.

  In the present embodiment, the automatic adjustment of the laser output described above is performed by changing the output level Pd of the actual laser light Lo detected based on the detection signal Sd of the output monitor 21 to the reference level Ps set in advance in this way. This is done by adjusting the current supplied to the excitation light source 4 so as to match. In this embodiment, the adjusted current value is reset as the value of the predetermined current Ip, and thereafter, the excitation light source 4 is driven by the reset predetermined current Ip. Yes.

  Specifically, as shown in the flowchart of FIG. 3, in the laser processing apparatus 1 of the present embodiment, when the power is turned on (step 101: YES), adjustment of the current supplied to the excitation light source 4 and the predetermined current Ip are performed. The check mode is activated in order to reset (step 102). The head unit 3 according to the present embodiment is provided with a shutter (not shown) that blocks the laser light Lo emitted from the head unit 3 to the outside. Is performed in a state where is interrupted. Then, after the end of the check mode, that is, when the power is not turned on (step 101: NO), the excitation light source 4 is driven by energizing the predetermined current Ip reset in the check mode (step 103).

  That is, in the present embodiment, the mode switching means is configured by the CPU 8 that executes such a series of processes. The switching to the check mode that constitutes the output adjustment mode is configured to be triggered by current input.

  More specifically, as shown in the flowchart of FIG. 4, in the above check mode, the CPU 8 of the present embodiment first reads the reference level Ps from the memory 9 (step 201), and then sets the reference level Ps to the reference level Ps. Based on this, the current value In when starting energization of the excitation light source 4 is determined (step 202).

  In the present embodiment, the memory 9 stores a table 27 in which the relationship between the “current value” energized to the excitation light source 4 and the “output level” of the laser light Lo emitted from the laser oscillator 2 is stored. The CPU 8 determines the current value In at the start of energization by referring to the table 27 (see FIG. 2). In the present embodiment, the table 27 stores the relationship between “the current value to be energized” and “the output level of the laser beam to be output” when the installation state of the apparatus is ideal. That is, the current value In obtained by referring to the table 27 is theoretically the minimum value (theoretical value) that can output the laser light Lo of the set reference level Ps. Then, the CPU 8 outputs to the drive circuit 5 a control signal Sc indicating that energization based on the determined current value In should be performed (step 203).

  Next, the CPU 8 detects the actual output level Pd of the laser light Lo based on the detection signal Sd of the output monitor 21 (step 204). Then, it is determined whether or not the detected output level Pd matches the set reference level Ps (step 205).

  In this embodiment, when it is determined in step 205 that the detected output level Pd and the set reference level Ps do not match (step 205: NO), the CPU 8 uses the excitation light source 4 from the drive circuit 5. Is increased (current value In ′, step 206). Then, after executing the abnormality determination (step 207), the control signal Sc of step 203 is output again based on the current value In ′ increased in step 206.

  Then, when the CPU 8 determines that the detected output level Pd matches the set reference level Ps (step 205: YES), the current value to be supplied to the excitation light source 4 at that time point, That is, the current amount In ′ increased to increase the energization amount is stored in the memory 9 as a preset value of the predetermined current Ip (step 208).

  In other words, in the present embodiment, the CPU 8 repeats the processing from step 203 to step 207 to determine the value (In ′) of the current that is supplied from the drive circuit 5 to the excitation light source 4 at the start of energization. The value is gradually increased from the theoretical value (In). Thus, the current supplied to the excitation light source 4 is adjusted so that the detected output level Pd of the actual laser light Lo matches the preset reference level Ps, and the value of the adjusted current is adjusted. (In ′) is reset (updated) as the value of the predetermined current Ip.

  In this embodiment, the abnormality determination process in step 207 is a process in which the current supplied to the excitation light source 4 is adjusted so that the actual output level Pd of the detected laser light Lo is the reference level Ps. This is performed by comparing the increased current value In ′ (see FIG. 4, step 207) with the theoretical value of the current value In at the start of energization (step 202).

  That is, the current value In determined at the start of energization is the minimum current value necessary for outputting the laser light Lo of the preset reference level Ps, and if the installation state of the apparatus is ideal, Theoretically, the laser output of the preset reference level Ps should be obtained even when the current value In is applied. Accordingly, the current value In ′ that rises in the process of adjusting the current so that the output level Pd of the detected laser beam Lo becomes the reference level Ps is emitted from the laser oscillator 2 and the value of the current that is passed through the excitation light source 4. This means that the relationship with the output level Pd of the laser beam Lo deviates from the ideal state (see FIG. 2, table 27).

  In the present embodiment, the current value In ′ that rises in the process of performing the current adjustment is monitored by monitoring the deviation from the theoretical value (In). An abnormality determination is made based on the relationship with the output level Pd of the detected laser beam Lo.

  Specifically, as shown in the flowchart of FIG. 5, the CPU 8 first determines that the deviation (In′−In) from the theoretical value (In) of the current value In ′ increased by the adjustment is within the appropriate range. It is determined whether or not a first threshold value α1 corresponding to the upper limit is exceeded (step 301). When the deviation exceeds the first threshold value α1 (In′−In> α1, step 301: YES), notification output control is executed to notify the operator that the deviation is outside the appropriate range ( Step 302).

  In the present embodiment, the control unit 6 is provided with a notification output unit 29 provided with a notification lamp, a speaker, etc. (not shown). The CPU 8 controls the notification output unit 29 to control the notification. Execute output control.

  Next, the CPU 8 determines that the deviation (In′−In) from the theoretical value of the current value In ′ increased by the above adjustment corresponds to a level at which energization should be stopped, that is, a level at which the apparatus should be stopped. It is determined whether or not α2 is exceeded (step 303). Then, when the deviation exceeds the second threshold value α2 (In′−In> α2, step 303: YES), the CPU 8 executes notification output control for notifying the operator of the abnormality. And the control signal Sc to the effect that the energization to the excitation light source 4 should be stopped is generated for the drive circuit 5, and control for stopping the apparatus is executed (step 304).

  In Step 301, when it is determined that the deviation (In′−In) from the theoretical value of the current value In ′ increased by the adjustment is within the appropriate range (In′−In ≦ α1, Step 301: NO) ), The processing after step 302 is not executed. Further, when it is not the level at which energization should be stopped in step 303 (In′−In ≦ α2, step 303: NO), the process of step 304 is not executed.

As described above, according to the present embodiment, the following operations and effects can be obtained.
(1) A preset reference level Ps is stored as an output level of the laser light Lo to be output from the laser oscillator 2 in the memory 9 as a storage means provided in the control unit 6. In the head unit 3, an output monitor 21 for detecting the actual output level of the laser light Lo emitted from the laser oscillator 2 is provided. When the power is turned on, the CPU 8 controls the drive circuit 5 so that the output level Pd of the actual laser light Lo detected based on the detection signal Sd of the output monitor 21 matches the preset reference level Ps. Thus, the current supplied to the excitation light source 4 is adjusted. Then, the adjusted current value is reset as the value of the predetermined current Ip, and thereafter, the excitation light source 4 is driven by energizing the predetermined current Ip after the reset.

  According to the above configuration, the output level of the laser light Lo can be obtained by fixing and handling the head unit 3, the control unit 6, and the optical fiber 7, that is, by changing the installation state of the apparatus and changing the bending state of the optical fiber 7. Even if Pd has changed, when the power is turned on, it is automatically adjusted to a preset reference level Ps. Thereafter, the excitation light source 4 is driven by energization with the predetermined current Ip, thereby enabling stable laser output without fluctuation. As a result, even when there is a change in the installation state, it is possible to obtain a preset desired laser output without causing processing unevenness.

  (2) The operation input unit 10 of the control unit 6 is provided with a setting dial 11. Then, the CPU 8 detects the operation state (for example, the value of the scale) of the setting dial 11 to identify the current value corresponding to the operation state, and uses the identified current value as the value of the predetermined current Ip. Is stored in the memory 9. This facilitates setting of the predetermined current Ip.

  (3) The operation input unit 10 of the control unit 6 is provided with a setting button 25. Then, the CPU 8 stores the output level Pd of the laser light Lo detected when the setting button 25 is operated in the memory 9 as the preset reference level Ps.

  According to the above configuration, it is possible to set the actual output level Pd of the laser beam Lo at an arbitrary time point as the preset reference level Ps. For example, the output of the laser light Lo emitted from the laser oscillator 2 is adjusted by operating the setting dial 11 having the above configuration (2) to increase / decrease the value of the predetermined current Ip energized to the excitation light source 4. . After confirming (reconfirming) that the head unit 3, the control unit 6, and the optical fiber 7 are fixed and routed (particularly the bent state of the optical fiber 7), that is, the installation state of the device is confirmed (reconfirmation). By operating the setting button 25, the reference level Ps can be set appropriately. As a result, a desired laser output can be obtained more reliably.

  (4) The CPU 8 monitors the deviation from the theoretical value (In ′) of the current value In ′ that changes (increases) due to the current adjustment, so that the current value In ′ that is energized to the excitation light source 4 Abnormality determination is executed based on the relationship with the output level Pd of the detected laser beam Lo.

  According to the above configuration, in particular, an abnormality related to the installation state of the optical fiber 7, more specifically, a decrease in the output level Pd of the laser light Lo due to its excessive bending, more accurate use beyond the proper range, and an abnormality. Can be detected.

  (5) The CPU 8 determines whether or not the deviation (In′−In) from the theoretical value (In) of the current value In ′ increased by the adjustment exceeds the first threshold value α1 corresponding to the upper limit of the appropriate range. Determine whether. When the deviation exceeds the first threshold value α1 (In′−In> α1, step 301: YES), notification output control is executed to notify the operator that the deviation is outside the appropriate range. Accordingly, it is possible to promptly improve the installation state of the optical fiber 7 such as reviewing the handling.

  (6) The CPU 8 determines that the deviation (In'-In) from the theoretical value of the current value In 'increased by the adjustment corresponds to a level at which energization should be stopped, that is, a level at which the apparatus should be stopped. It is determined whether or not α2 is exceeded (step 303). When the deviation exceeds the second threshold value α2 (In′−In> α2, step 303: YES), execution of notification output control for notifying the operator of an abnormality, and a drive circuit 5, a control signal Sc is generated to stop energization of the excitation light source 4, and control for stopping the apparatus is executed (step 304). As a result, it is possible to provide a quick abnormality notification and fail-safe by stopping the apparatus.

In addition, you may change this embodiment as follows.
In the present embodiment, the drive circuit 5 energizes a predetermined current Ip set in advance as the predetermined drive power supplied to the excitation light source 4, that is, the drive power supply form by the drive circuit 5 is current control. The current value In (In ′) to be energized was used as the supply value of the driving power. However, the present invention is not limited to this, and the supply form of the drive power may be based on voltage control or the like. That is, for example, when the supply form of the drive power is based on voltage control, the supply value of the drive power is the voltage value.

  In the present embodiment, the CPU 8 determines that the deviation (In′−In) from the theoretical value (In) of the current value In ′ increased by the adjustment in the abnormality determination corresponds to the upper limit of the appropriate range. It was decided to determine whether or not the first threshold value α1 and the second threshold value α2 were exceeded. However, the comparison between the drive power supply value and the predetermined threshold is not limited to such an indirect comparison, and the drive power supply value and the predetermined threshold may be directly compared.

  In the present embodiment, the laser light Lo emitted from the laser oscillator 2 is output to the outside of the head unit 3 via the mirror 18 and the scanning unit 19 and irradiated onto the object to be processed. However, the laser beam Lo may be output to the outside without using the scanning unit 19.

  In the present embodiment, the output monitor 21 that constitutes the detection means is disposed on the back surface of the mirror 18 so that the transmitted light Lo ′ that is input through the mirror 18, that is, the laser that is output from the laser oscillator 2. The detection signal Sd corresponding to the actual output level of the light Lo is output. However, the arrangement of the output monitor 21 is not particularly limited as long as the output level Pd of the laser light Lo output from the laser oscillator 2 can be detected.

  -In this embodiment, CPU8 controls each component of the drive circuit 5, the output monitor 21, the setting button 25, and the alerting | reporting output part 29, and a drive means, a detection means, a registration means, a confirmation means, an adjustment means The comparing means, the first notifying means, the second notifying means, and the stopping means are configured. However, the present invention is not limited to this, and each component corresponding to each means may be embodied in a configuration that executes processes such as necessary calculations and determinations.

  -In this embodiment, it was set as the structure by which a confirmation means performs confirmation by an operator operating the setting button 25, ie, manual confirmation. However, the present invention is not limited to this, and using various sensors, the head unit 3, the control unit 6, and the optical fiber 7 are fixed and routed, that is, the arrangement state of the apparatus is detected, and the arrangement state is automatically determined. It is good also as a structure which confirms that it is.

  In the present embodiment, the check mode is activated when the power is turned on, that is, the switching to the output adjustment mode by the CPU 8 as the mode switching means is triggered by the current input (see FIG. 3). However, the present invention is not limited to this, and for the activation of the check mode constituting the adjustment unit, for example, an activation button is provided as an activation unit for activating the check mode, and the check mode is activated when the activation button is operated. It may be configured to be activated. Thereby, the operator can perform automatic adjustment of the laser output at an arbitrary time.

  In the present embodiment, the CPU 8 stores the output level Pd of the laser light Lo detected when the setting button 25 is operated in the memory 9 so that the reference level Ps is set. However, the present invention is not limited to this, and when the power is stopped, the output level Pd of the laser light Lo detected immediately before the stop may be stored in the memory 9 so that the reference level Ps is set. . Thereby, even when the apparatus is restarted, it is possible to easily reproduce the laser output obtained immediately before the power is stopped.

  In the present embodiment, the reference level Ps is set indirectly through the setting of the predetermined current Ip by operating the setting dial 11 (and the setting button 25). However, the present invention is not limited to this, and a setting unit that is directly operated to set the reference level Ps may be provided. Thereby, the setting of the reference level Ps becomes easy.

  In the present embodiment, the current value In ′ that changes (increases) due to current adjustment is detected from the current value In ′ that is supplied to the excitation light source 4 by monitoring the deviation from the theoretical value (In ′). The abnormality determination based on the relationship with the output level Pd of the laser beam Lo to be performed is executed. However, the present invention is not limited to this, and the abnormality determination may be performed by monitoring the output level Pd of the detected laser light Lo even in a mode other than the check mode (that is, when the predetermined current Ip is applied).

Next, technical ideas other than the claims that can be grasped from the above embodiments will be described together with their effects.
(Additional remark 1) The laser processing apparatus of Claim 1 provided with the starting means operated in order to switch to the said adjustment mode by the said mode switching means, The laser processing apparatus characterized by the above-mentioned. Thereby, the operator can perform automatic adjustment of the laser output at an arbitrary time.

(Additional remark 2) The laser processing apparatus of Claim 1 provided with the setting means operated in order to set the said predetermined drive electric power, The laser processing apparatus characterized by the above-mentioned.
(Additional remark 3) The laser processing apparatus of Claim 1 provided with the setting means operated in order to set the said reference level, The laser processing apparatus characterized by the above-mentioned. This facilitates setting of the reference level.

  (Additional remark 4) The laser processing apparatus of Claim 3 provided with the starting means operated in order to start the said registration means, The laser processing apparatus characterized by the above-mentioned. This makes it possible to set the actual laser light output level at an arbitrary time point as the preset reference level. Further, by combining with the configuration of (Appendix 2), the reference level can be set indirectly.

  (Supplementary note 5) The laser processing apparatus according to claim 3, wherein the registration unit stores the output level of the laser beam detected immediately before the power is stopped in the storage unit as the reference level. Laser processing equipment. Thereby, even when the apparatus is restarted, it is possible to easily reproduce the laser output obtained immediately before the power is stopped.

The schematic block diagram of a laser processing apparatus. The schematic block diagram of memory. The flowchart which shows the processing procedure of check mode starting. The flowchart which shows the process sequence of adjustment of the energization current in a check mode, and resetting of predetermined current. The flowchart which shows the process sequence of abnormality determination.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Laser processing apparatus, 2 ... Laser oscillator, 3 ... Head unit, 4 ... Light source for excitation, 5 ... Drive circuit, 6 ... Control unit, 7 ... Optical fiber, 8 ... CPU, 9 ... Memory, 10 ... Operation input part , 11 ... setting dial, 15 ... laser medium, 21 ... detection monitor, 25 ... setting button, 27 ... table, 29 ... notification output unit, Ip ... predetermined current, Le ... excitation light, Lo ... laser light, Lo '... transmission Light, Sd ... detection signal, Pd ... output level, Ps ... reference level, In, In '... current value, α1, α2 ... threshold.

Claims (7)

A laser oscillator including a laser medium;
An excitation light source that outputs excitation light for exciting the laser medium;
Driving means for driving the excitation light source by supplying a predetermined driving power set in advance;
A head unit that houses the laser oscillator and irradiates the workpiece with laser light output from the laser oscillator;
A control unit that houses the excitation light source and the drive means;
An optical fiber connecting the head unit and the control unit;
In the laser processing apparatus in which the excitation light output from the excitation light source in the control unit is guided to the laser medium in the head unit via the optical fiber,
Storage means for storing a reference level set in advance as an output level to be output from the laser oscillator;
Detection means provided in the head unit so as to be able to detect the output level of the laser beam output from the laser oscillator;
Mode switching means for switching to the output adjustment mode;
When switching to the output adjustment mode is performed, the drive power supplied to the excitation light source so that the output level detected by the detection unit becomes the reference level stored in the storage unit A laser processing apparatus comprising: adjusting means for adjusting a supply value and setting the adjusted supply value of driving power as the predetermined supply value. In the laser processing apparatus of Claim 1,
The laser processing apparatus, wherein the mode switching unit performs switching to the output adjustment mode when power is turned on. In the laser processing apparatus of Claim 1 or Claim 2,
A laser processing apparatus comprising: a registration unit that stores the detected output level of the laser beam in the storage unit as the reference level. In the laser processing apparatus of Claim 3,
A confirmation means for confirming that the arrangement state of the head unit, the control unit, and the optical fiber is confirmed;
The registration means is activated when confirmed by the confirmation means;
A laser processing apparatus characterized by the above. In the laser processing apparatus as described in any one of Claims 1-4,
A comparison means for comparing a supply value of driving power supplied to the excitation light source with a predetermined threshold;
A laser processing apparatus comprising: a first notification unit that notifies that the drive power supply value is outside the proper range when the supply value of the drive power exceeds a first threshold value. In the laser processing apparatus of Claim 5,
A laser processing apparatus comprising: a second notification unit that notifies that the drive power supply value is abnormal when the supply value of the drive power exceeds a second threshold value. The laser processing apparatus according to claim 6,
A laser processing apparatus comprising: a stopping unit that stops supply of driving power to the excitation light source when it is determined that the abnormality is present.

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