JP2009175463A - Method of manufacturing optical scanner, and optical scanner - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method suitable for manufacturing an optical scanner for executing optical scanning by vibrating magnetically an oscillator having a mirror reciprocation-swingingly, to prevent the warpage and waviness of a mirror surface from being generated caused by a thermal remaining stress strain in an inside of the oscillator. <P>SOLUTION: The oscillator 40 includes a body part 12, and a laminate 34 attached locally onto a surface of the body part, the laminate 34 is laminated with the mirror 18 and a magnetic coil 32 each other. The laminate 34 is thereafter manufactured independently from the body part 12, by (a) manufacturing nonheatingly the body part 12 and by (b) laminating heatingly the mirror and the magnetic coil, (c) the body part 12 and the laminate 34 are bonded each other nonheatingly, thus the oscillator 40 is completed. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a method of manufacturing an optical scanner that reflects light incident on a reflecting surface of a mirror as scanning light by vibrating a vibrating body having a plate-like mirror in a reciprocating manner, and the light. It relates to the scanner.

  There is already known an optical scanner that reflects light incident on the reflection surface of the mirror as scanning light by magnetically vibrating a vibrating body having a plate-like mirror in a reciprocating manner (for example, Patent Documents). 1).

  This type of optical scanner is used, for example, in the field of image formation and the field of image reading. In the field of image formation, it is used for applications such as a retinal scanning display device that scans a light beam on the retina to directly display an image, a projector, a laser printer, laser lithography, and the like, while in the field of image reading, Used for applications such as facsimiles, copiers, image scanners, and barcode readers.

  In general, this type of optical scanner reflects a light incident on a reflecting surface of the mirror in a reciprocating manner by vibrating a vibrating body having a mirror and a movable magnetic element and magnetically vibrating the vibrating body. A fixed magnetic element that performs a magnetic interaction with the movable magnetic element.

  According to one conventional example of a method of manufacturing this type of optical scanner, the surface of the main body is formed by performing thermal film formation (for example, vacuum deposition) on the surface of the main body of the vibrating body. A plate-like mirror is attached to the substrate.

  Further, when the optical scanner has a magnetic thin film or a magnetic coil attached to the vibrating body as a movable magnetic element, according to the above-described conventional manufacturing method, the surface of the main body portion of the vibrating body The movable magnetic element is attached to the surface of the main body by performing thermal film formation (for example, sputtering) on the surface of the main body.

Specifically, in order to deposit the movable magnetic element on the surface of the main body, for example, particles adhere to the surface of the main body in a molten state in an atmosphere of about 300 to 500 ° C. Be made. As a result, the particles are embedded rather than simply deposited on the surface of the body portion, thereby ensuring that the particles adhere to the surface of the body portion.
JP 2001-33727 A

  However, when implementing this conventional manufacturing method, the mirror is formed on the surface of the main body by thermal film formation, and the movable magnetic element is also deposited on the surface of the same main body by thermal film formation. Therefore, a thermal internal stress is generated in the main body, and it may remain.

  When thermal internal stress is generated in the main body portion and remains in this manner, the main body portion is distorted, which can cause warpage and undulation on the surface of the mirror.

  When warping or undulation occurs on the surface of the mirror, the intensity distribution in the cross section of the reflected beam from the mirror changes even if the magnitude is on the order of 100 nanometers, and so-called beam degradation occurs. Such beam degradation can cause image quality degradation when, for example, a scanning beam emitted from an optical scanner is used for image formation / display.

  Against the background described above, the present invention provides light that reflects the light incident on the reflecting surface of the mirror as scanning light by magnetically vibrating a vibrating body having a plate-like mirror in a reciprocating manner. Provided is a technique for manufacturing a scanner, which is suitable for manufacturing an optical scanner so that mirror surface warping and undulation caused by thermal residual stress distortion inside a vibrating body is suppressed. It was made as an issue.

  The following aspects are obtained by the present invention. Each aspect is divided into sections, each section is given a number, and is described in a form that cites other section numbers as necessary. This is to facilitate understanding of some of the technical features that the present invention can employ and combinations thereof, and the technical features that can be employed by the present invention and combinations thereof are limited to the following embodiments. Should not be interpreted. That is, it should be construed that it is not impeded to appropriately extract and employ the technical features described in the present specification as technical features of the present invention although they are not described in the following embodiments.

  Further, describing each section in the form of quoting the numbers of the other sections does not necessarily prevent the technical features described in each section from being separated from the technical features described in the other sections. It should not be construed as meaning, but it should be construed that the technical features described in each section can be appropriately made independent depending on the nature.

(1) An optical scanner manufacturing method for manufacturing an optical scanner that reflects light incident on a reflecting surface of a mirror as scanning light by magnetically vibrating a vibrating body having a plate-like mirror in a reciprocating manner. There,
The vibrator is
The main body,
A laminate that is locally attached to the surface of the main body,
The laminate is configured by laminating the mirror and a plate-like movable magnetic element,
The optical scanner manufacturing method is as follows:
A main body manufacturing process for manufacturing the main body without heating;
Laminate manufacturing in which the mirror and the movable magnetic element are thermally stacked in such a manner that the mirror and the movable magnetic element are lined up toward the main body in that order, thereby manufacturing the stacked body physically independently from the main body. Process,
An optical scanner manufacturing method, comprising: a bonding step of bonding the manufactured main body and the manufactured laminate to each other in a non-heated manner.

  According to this manufacturing method, the mirror is not attached directly to the main body but attached via the plate-like movable magnetic element. In order to mount the mirror on the surface of the movable magnetic element, the movable magnetic element and the mirror are heated together, resulting in the formation of a stack of these movable magnetic elements and mirrors, with the heat generated during that time. Is not transmitted to the main body.

  Furthermore, according to this manufacturing method, the laminated body thus formed is bonded to the main body in a non-heated manner, whereby the mirror is attached to the main body via the movable magnetic element. Since the laminated body is bonded to the main body without heating the main body, no thermal internal stress is generated in the main body.

  Therefore, according to this manufacturing method, it is possible to manufacture the optical scanner so that the mirror surface warpage and waviness due to the thermal internal stress of the main body portion are suppressed.

(2) The mirror is
A mirror substrate;
A metal thin film attached to the surface of the mirror substrate,
The laminate manufacturing process includes:
A mirror film forming step of thermally forming the metal thin film on the surface of the mirror substrate;
The method for manufacturing an optical scanner according to (1), further comprising: a magnetic element film forming step of thermally forming the movable magnetic element on the back surface of the mirror base material.

  According to this manufacturing method, the mirror is manufactured by thermally forming a metal thin film on the surface of the mirror substrate, and further, the movable magnetic element is thermally formed on the back surface of the same mirror substrate. The Any heating film formation is performed without heating the main body.

  As a result, according to this manufacturing method, the laminated body in which the mirror base material is sandwiched between the metal thin film and the movable magnetic element is formed physically independently from the main body without heating the main body. Is done.

  The laminated body thus formed is bonded to the main body in a non-heated manner, and as a result, an optical scanner is manufactured.

  Therefore, according to this manufacturing method, it is possible to manufacture the optical scanner so that the mirror surface warpage and waviness due to the thermal internal stress of the main body portion are suppressed.

(3) The optical scanner manufacturing method according to (2), wherein the mirror base is configured to have higher rigidity than the main body.

  According to this manufacturing method, the deformation resistance of the mirror base material with respect to the external force is greater than the deformation resistance of the main body portion with respect to the external force, and as a result, the main body portion is deformed in a state where the mirror base material is mounted on the main body portion. However, it is possible to manufacture the optical scanner so that the deformation of the mirror base material and the warpage and undulation of the mirror surface are not caused.

  Therefore, according to this manufacturing method, in a state where the mirror base material is mounted on the main body portion, the degree to which the shape of the mirror base material reflects the shape of the main body portion is reduced, and as a result, the shape accuracy of the mirror base material is reduced. Therefore, it does not need to be lowered due to a decrease in the shape accuracy of the main body.

  Therefore, according to this manufacturing method, in the state in which the mirror base material is mounted on the main body portion, the tendency that the shape of the mirror surface is maintained despite the deformation of the main body portion is increased.

In addition, the rigidity (bending stiffness EI and torsion stiffness GI _P ) of the mirror base material is not limited to the mechanical properties (for example, the longitudinal elastic modulus E and the lateral elastic modulus G) of the material constituting the mirror base material. , And also depends on the shape and dimensions of the mirror substrate (for example, the cross-sectional secondary moment I and the cross-sectional secondary pole moment I _P ). The same applies to the rigidity of the main body.

(4) The optical scanner manufacturing method according to (2) or (3), wherein the mirror base is made of glass or ceramic.

  According to this manufacturing method, since glass or ceramic is selected as the material of the mirror base material, the mirror base material can be configured to have higher rigidity than that of the main body portion as compared with the case where other materials are selected. It becomes easy.

(5) The optical scanner manufacturing method according to any one of (1) to (4), wherein the movable magnetic element includes at least one of a magnetic thin film and a magnetic coil.

(6) The bonding step includes a step of bonding the manufactured main body and the manufactured laminate to each other in a non-heated manner using a photocurable resin as an adhesive. 5) The optical scanner manufacturing method according to any one of items.

  According to this manufacturing method, a photocurable resin that does not require heating is used as an adhesive for bonding the manufactured main body and the laminate manufactured independently from the main body to each other. The main body is not heated for mounting the part and the laminate.

(7) An optical scanner,
A vibrating body having a plate-like mirror and a plate-like movable magnetic element;
A magnetic interaction between the movable magnetic element and a fixed magnetic element that reflects light incident on the reflecting surface of the mirror as scanning light by magnetically vibrating the vibrating body in a reciprocating manner. Including those that perform
The vibrator is
The main body,
A laminate that is locally attached to the surface of the main body,
The stacked body is an optical scanner in which the mirror and the movable magnetic element are stacked on each other in a posture in which the mirror and the movable magnetic element are arranged in the order toward the main body.

  This optical scanner can be manufactured, for example, by the manufacturing method according to the item (1). According to this optical scanner, for example, on the condition that it is manufactured by the manufacturing method, it is possible to perform optical scanning while suppressing deterioration of the scanning beam.

(8) The mirror is
A mirror substrate;
A metal thin film attached to the surface of the mirror substrate,
The optical scanner according to item (7), wherein the mirror base is configured to have higher rigidity than the main body.

  According to this optical scanner, the deformation resistance of the mirror base material to the external force is increased more than the deformation resistance of the main body portion to the external force. You do n’t have to be invited.

  Therefore, according to this optical scanner, the tendency to maintain the shape of the mirror surface increases despite the deformation of the main body, and as a result, optical scanning can be performed while suppressing deterioration of the scanning beam. It becomes possible.

  Hereinafter, some of more specific embodiments of the present invention will be described in detail with reference to the drawings.

  FIG. 1 is a perspective view of an optical scanner 10 to be manufactured by the optical scanner manufacturing method according to the first embodiment of the present invention. The manufacturing method is an example of a method according to the first aspect of the present invention, while the optical scanner 10 is an example of an optical scanner according to the second aspect of the present invention.

  The optical scanner 10 shown in FIG. 1 is configured by mounting a plate-shaped main body 12 on a hollow rectangular parallelepiped base 14 that is open on one surface in a state in which the opening surface of the base 14 is closed.

  The main body 12 is formed using an elastic material (such as stainless steel or a metal material) such as silicon. The main body 12 has a through hole and has a thin plate rectangular shape. The main body portion 12 includes a fixed frame portion 16 on the outer side, and includes a movable portion 20 formed with a plate-like mirror 18 having a reflecting surface on the inner side.

  The main body 12 further includes a pair of torsion beam portions 22 and 22 that connect the movable portion 20 and the fixed frame portion 16 to each other coaxially. The movable portion 20 is reciprocally swung around one swing axis common to the pair of torsion beam portions 22 and 22, so that the light incident on the mirror 18 is reflected by the reciprocally swung mirror 18. The light is emitted from the mirror 18 as scanning light.

  The base 14 has a cavity 26 and is open at the upper surface. When the outer peripheral edge portion of the fixed frame portion 16 is fixedly mounted on the upper surface of the base 14, the movable portion 20 is supported by the base 14 so as to be elastically reciprocally swingable.

  FIG. 2 shows the optical scanner 10 in a longitudinal sectional view.

  As shown in FIG. 2, a laminate 34 of a mirror 18 and a magnetic coil 32 (an example of a movable magnetic element), both of which are plate-like, is mounted on the surface (upper surface in FIG. 2) of the movable portion 20. Yes. In the laminated body 34, the mirror 18 and the magnetic coil 32 are arranged in that order toward the movable part 20.

  The mirror 18 is configured by forming a metal thin film 36 on the surface of the mirror base 38 (the upper surface in FIG. 2). A magnetic coil 32 is formed on the rear surface (the lower surface in FIG. 2) of the mirror substrate 38. Therefore, the laminate 34 is also a laminate of the metal thin film 36, the mirror base material 38, and the magnetic coil 32.

  A voltage is applied to the magnetic coil 32 from the outside via a wiring (not shown) attached to the main body 12. A voltage is applied to the magnetic coil 32 so that its polarity changes alternately.

The mirror base material 38 has higher rigidity (bending stiffness EI and torsion stiffness GI _P ) than the portion of the main body portion 12 to which the mirror base material 38 is to be attached by appropriately selecting the material, shape, and size thereof. Designed to have.

  As shown in FIG. 2, in the optical scanner 10, the vibrating body 40 is formed by stacking the movable portion 20 and the stacked body 34 with each other.

  In order to magnetically vibrate the vibrating body 40 in a reciprocating manner, a permanent magnet (an example of a fixed magnetic element, for example, a rare earth (for example, Nd—Fe—B) sintered magnet) 42 is installed behind the vibrating body 40 so as to face the vibrating body 40.

  FIG. 3 shows a method of manufacturing the optical scanner 10 shown in FIG.

  The manufacturing method includes: (a) a main body manufacturing process for manufacturing the main body 12 in a non-heated manner; (b) a laminated body manufacturing process for manufacturing the stacked body 34 thermally; and (c) a manufactured main body. 12 and a laminated body 34 are bonded to each other in a non-heated manner, and (d) a packaging process for mounting the main body 12 to which the laminated body 34 is bonded to the base 14.

  In this manufacturing method, the main body manufacturing process and the laminated body manufacturing process are not in a serial relationship with each other as a work flow but in a parallel relationship with each other. Therefore, the main body 12 does not need to be affected by the heat necessary for manufacturing the laminate 34.

  Specifically, in the main body manufacturing process, first, a silicon substrate (for example, a thickness of 10 μm) is prepared and cleaned. Next, a resist is applied in a specific pattern on both sides of the silicon substrate.

  Subsequently, an etching process is performed on the silicon substrate provided with a resist. The etching process may be wet etching or dry etching. In any case, through-holes are formed in the silicon substrate by the etching process, and as a result, the main body 12 is completed.

  FIG. 4 is a flowchart showing details of the laminate manufacturing process.

  If this laminated body manufacturing process is implemented, first, in step S101, the mirror base material 38 (plate glass) is lapped. Next, in step S102, the mirror substrate 38 is polished (for example, buffing with cerium oxide).

  Subsequently, in step S103, final polishing (for example, final polishing by diamond polishing) is performed on the mirror substrate 38. By polishing, the surface roughness of the mirror substrate 38 can be 10 nanometers or less. In particular, when glass is used as the material of the mirror substrate 38, the roughness is reduced to several angstroms by controlling the polishing conditions.

  Thereafter, in step S104, the back surface of the mirror base 38, that is, the opposite surface of the mirror base 38 to the surface on which the metal thin film 36 is to be formed is vacuum-deposited on the surface of the movable magnetic element. As an example, a magnetic coil 32 (metal coil) is formed. Unlike the case of the surface of the mirror substrate 38, the surface roughness of the magnetic coil 32 is not particularly problematic.

  Subsequently, in step S105, the metal thin film 36 is formed on the surface of the mirror base 38, that is, on the opposite side of the surface of the mirror base 38 from the surface on which the magnetic coil 32 has already been formed, by vacuum deposition. (For example, the material is a metal such as aluminum, silver, or gold). Details of this mirror film forming step will be described later. When step S105 is completed, the stacked body 34 is completed.

  Thereafter, in step S106, the completed laminate 34 is diced into a plurality of pieces having a desired shape by a dicer.

  FIG. 5 is a flowchart showing an example of the mirror film forming process.

  If this mirror 18 film | membrane process is implemented, first, in step S201, washing | cleaning will be performed with respect to the mirror base material 38, Thereby, it is a mirror base material 38 (in this embodiment, although it is plate glass, it is limited to it) For example, dust and dust attached to the surface of ceramic) may be removed. Specifically, after the glass surface of the mirror substrate 38 is treated with tin chloride, it is washed with pure water.

  Next, silvering is performed on the mirror base material 38 in step S202. Specifically, a silver solution and a reducing solution are sprayed onto the surface of the mirror substrate 38, whereby a thin silver film is formed.

  Subsequently, copper drawing is performed on the mirror base material 38 in step S203. Specifically, a copper solution and a reducing solution thereof are further sprayed on the thin silver film thus formed, thereby forming a film. Thereafter, it is washed with pure water, then dried with hot air, and further dried with electric heat, whereby moisture is removed from the mirror substrate 38.

  Thereafter, in step S204, the mirror base material 38 is painted. Specifically, mirror back coating is performed, thereby protecting the formed silver film.

  Subsequently, in step S205, the mirror base material 38 is cleaned, and the dirt on the mirror base material 38 is washed away.

  Thereafter, in step S206, the mirror substrate 38 is sufficiently dried. This completes the mirror film forming step.

  As shown in FIG. 3, when the laminate manufacturing process is completed, the bonding process is subsequently performed. When this bonding step is performed, a photocurable resin is used as an adhesive, and the laminates 34 are bonded to the movable portion 20 of the main body portion 12 without heating. As a result, the vibrating body 40 is completed as an assembly of the main body 12 and the laminated body 34.

  In addition, the mirror base material 38 is bonded to only one surface of the movable portion 20. Therefore, it is desirable that the thickness of the mirror base material 38 is about 15 times or less the thickness of the movable portion 20. When the thickness of the movable portion 20 (that is, the thickness of the silicon substrate) is 10 μm, the thickness of the mirror base material 38 is desirably about 150 μm or less. This is because if the thickness of the mirror substrate 38 is greater than about 150 μm, unnecessary vibration is generated in the vibrating body 40 during the operation of the optical scanner 10, and as a result, the torsional vibration of the vibrating body 40 may not be stabilized. Because.

  When the bonding process is completed, the packaging process is subsequently performed. When the packaging process is performed, the permanent magnet 42 is installed at a predetermined position in the cavity 26 of the base 14, and the completed vibrating body 40 is fixed to the base 14. As a result, the optical scanner 10 is completed.

  FIG. 6 is a longitudinal sectional view showing an example of a conventional optical scanner 50 as a comparative example.

  In this conventional optical scanner 50, the vibrating body 52 is configured as a laminated body of the mirror 18, a corresponding portion (that is, the movable portion 20) of the main body portion 12, and the magnetic coil 32. In this laminated body, the main body 12 is sandwiched between the mirror 18 and the magnetic coil 32. In this conventional optical scanner 50, the movable magnetic element is the magnetic coil 32, and the fixed magnetic element is a permanent magnet 42 (for example, a rare earth sintered magnet) installed in the base 14.

  FIG. 7 shows an example of a conventional method for manufacturing the conventional optical scanner 50 shown in FIG.

  When this conventional manufacturing method is carried out, first, a silicon substrate (for example, having a thickness of 10 μm) is prepared and cleaned. Next, a resist is applied in a specific pattern on both sides of the silicon substrate.

  Subsequently, an etching process is performed on the silicon substrate provided with a resist. The etching process may be wet etching or dry etching. In any case, through-holes are formed in the silicon substrate by the etching process, and as a result, the main body 12 is completed.

  Thereafter, the metal mirror 18 and the magnetic coil 32 are respectively formed on both surfaces of the movable portion 20 of the main body portion 12. There are two types of this forming process.

  According to the first forming step, first, a metal mirror 18 (for example, a thickness of 0.3 μm) is formed on the surface of the movable portion 20 (upper surface in FIG. 7) by thermal evaporation, and then A magnetic coil 32 (for example, a thickness of 10 μm) is formed on the back surface (the lower surface in FIG. 7) of the same movable unit 20 by thermal evaporation. In any film forming process, the main body 12 is heated.

  On the other hand, according to the second forming step, first, a magnetic coil 32 (for example, a thickness of 10 μm) is formed on the back surface (the lower surface in FIG. 7) of the movable portion 20 by thermal evaporation, Next, a metal mirror 18 (for example, a thickness of 0.3 μm) is formed on the surface of the same movable part 20 (upper surface in FIG. 7) by thermal evaporation. In any film forming process, the main body 12 is heated.

  In this conventional manufacturing method, a portion of the main body 12 that does not need to be heated to form the metal mirror 18 and the magnetic coil 32 is also heated. Therefore, there is a possibility that thermal internal stress is generated and remains in the main body 12. Such a thermal residual stress causes the main body 12 to generate warpage or undulation as a surface shape error. Such surface shape error causes the surface shape of the metal mirror 18 to be deformed and the reflected beam from the metal mirror 18 to deteriorate.

  By the way, in order to prevent the surface of the metal mirror 18 from being deformed even when the main body portion 12 is deformed, for example, a countermeasure for making the rigidity of the metal mirror 18 higher than the rigidity of the movable portion 20 can be considered.

  However, in order to maintain the surface shape of the metal mirror 18 in spite of the somewhat large warp and undulation of the movable part 20, it is necessary to increase the thickness of the metal mirror 18 accordingly. On the other hand, an increase in the thickness of the metal mirror 18 leads to an increase in the weight of the metal mirror 18, which in turn leads to an increase in the weight of the oscillating portion of the conventional optical scanner 50. Due to the increase in the weight of the oscillating portion, the influence of the higher-order vibration mode due to the deflection of the torsion beam portions 22 and 22 and the unstable driving due to the swing motion occur, and stable torsional vibration cannot be expected.

  On the other hand, according to the present embodiment, the mirror 18 is not attached directly to the main body 12 but attached via the magnetic coil 32. In order to mount the mirror 18 on the surface of the magnetic coil 32, the magnetic coil 32 and the mirror 18 are heated together, so that a laminate 34 of the magnetic coil 32 and the mirror 18 is formed. Therefore, the heat generated in the main body 12 is not transmitted to the main body 12.

  Further, according to the present embodiment, the laminate 34 formed in this way is bonded to the main body 12 in a non-heated manner, whereby the mirror 18 is attached to the main body 12 via the magnetic coil 32. Is done. Since the laminate 34 is bonded to the main body 12 without heating the main body 12, no thermal internal stress is generated in the main body 12.

  Therefore, according to the present embodiment, the optical scanner 10 can be manufactured so that the warpage and undulation of the surface of the mirror 18 due to the thermal internal stress of the main body 12 is suppressed.

  Therefore, according to this embodiment, the optical scanner 10 can perform optical scanning while suppressing deterioration of the scanning beam.

  As is apparent from the above description, in this embodiment, for convenience of explanation, the magnetic coil 32 constitutes an example of the “movable magnetic element” in the above item (7), and the permanent magnet 42 is “fixed magnetism” in the same term. It can be considered that it constitutes an example of “element”.

  Next, an optical scanner manufacturing method according to the second embodiment of the present invention will be described. However, the present embodiment differs from the first embodiment only in the mirror film forming process, and other elements are common, so only the mirror film forming process will be described in detail, and the common elements will be duplicated. Is omitted.

  FIG. 8 is a flowchart showing the mirror film forming process according to this embodiment.

  When this mirror film forming step is performed, first, in step S301, the mirror base material 38 is cleaned in the same manner as in step S201 shown in FIG. Adhering dust and debris are removed. Specifically, after the glass surface of the mirror substrate 38 is treated with tin chloride, it is washed with pure water.

  Next, in step S <b> 302, the mirror base material 38 is dried with hot air, and further dried with electric heat, whereby the adhesion of the aluminum deposited film to the glass surface of the mirror base material 38 is improved.

  Thereafter, in step S303, vacuum deposition is performed on the mirror substrate 38 in a heated manner, whereby an aluminum deposition film is formed on the glass surface of the mirror substrate 38.

  Subsequently, in step S304, the mirror base material 38 is coated in the same manner as in step S204 shown in FIG. Specifically, mirror back coating is performed, thereby protecting the formed aluminum deposited film.

  Thereafter, in step S305, the mirror substrate 38 is sufficiently dried in the same manner as in step S206 shown in FIG. This completes the mirror film forming step.

  This mirror film forming step is more advantageous than the mirror film forming step according to the first embodiment in order to realize high flatness on the metal vapor deposition surface.

  Next, an optical scanner manufacturing method and an optical scanner manufactured by the manufacturing method according to the third embodiment of the present invention will be described.

  The optical scanner according to the present embodiment is an optical scanner according to the first embodiment in which the movable magnetic element is a magnetic thin film and the fixed magnetic element is an electromagnetic coil, and the movable magnetic element is a magnetic coil 32 and the fixed magnetic element is a permanent magnet 42. Although different from 10, other points are common to the first embodiment. Therefore, only differences from the first embodiment will be described in detail, and overlapping descriptions of common points will be omitted.

  FIG. 9 shows an optical scanner 70 according to the present embodiment in a longitudinal sectional view.

  Like the optical scanner 10 shown in FIG. 2, the optical scanner 70 has a main body 12 and a base 14, but unlike the optical scanner 10 shown in FIG. 2, a magnetic thin film 72 attached to the main body 12. And an electromagnetic coil 74 installed in the cavity 26 of the base 14. In the present embodiment, the mirror base 38 is sandwiched between the metal thin film 36 and the magnetic thin film 72 to constitute the laminate 76.

  FIG. 10 is a flowchart showing a method for manufacturing the optical scanner 70.

  When this manufacturing method is performed, first, the main body manufacturing process is performed in the same manner as the manufacturing method according to the first embodiment.

  Next, the laminate manufacturing process is performed basically in the same manner as the manufacturing method according to the first embodiment. However, in step S104 shown in FIG. 4, in the first embodiment, the magnetic coil 32 as the movable magnetic element is formed on the back surface of the mirror substrate 38 by heating vacuum vapor deposition. In the embodiment, a magnetic thin film 72 (for example, a hard magnetic thin film 72Co / Pt film) as a movable magnetic element is formed on the back surface of the mirror substrate 38 by thermal sputtering.

  Subsequently, the bonding step is performed basically in the same manner as the manufacturing method according to the first embodiment. Specifically, the laminated body 34 is bonded to the main body portion 12 by using a photocurable resin as an adhesive without heating. In the present embodiment, the surface of the magnetic thin film 72 in the stacked body 76 is bonded to the surface of the main body 12. As a result, a vibrating body 80 in which the laminated body 76 is locally attached to the surface of the main body 12 is completed.

  Thereafter, the packaging process is performed basically in the same manner as the manufacturing method according to the first embodiment. Specifically, after the electromagnetic coil 74 is installed at a predetermined position in the cavity 26 of the base 14, the completed vibrating body 80 is fixed to the base 14. As a result, the optical scanner 70 is completed.

  FIG. 11 is a longitudinal sectional view showing another example of a conventional optical scanner 90 as a comparative example.

  In this conventional optical scanner 90, the vibrating body 92 is configured as a laminated body of the mirror 18, a corresponding portion (that is, the movable portion 20) of the main body portion 12, and the magnetic thin film 72. In this laminated body, the main body 12 is sandwiched between the mirror 18 and the magnetic thin film 72. In this conventional optical scanner 90, the movable magnetic element is a magnetic thin film 72, and the fixed magnetic element is an electromagnetic coil 74 installed in the base 14.

  FIG. 12 shows an example of a conventional method for manufacturing the conventional optical scanner 90 shown in FIG.

  When this conventional manufacturing method is carried out, first, a silicon substrate (for example, having a thickness of 10 μm) is prepared and cleaned. Next, a resist is applied in a specific pattern on both sides of the silicon substrate.

  Subsequently, an etching process is performed on the silicon substrate provided with a resist. The etching process may be wet etching or dry etching. In any case, through-holes are formed in the silicon substrate by the etching process, and as a result, the main body 12 is completed.

  Thereafter, the metal mirror 18 and the magnetic thin film 72 are respectively formed on both surfaces of the movable portion 20 in the main body portion 12. There are two types of this forming process.

  According to the first forming step, first, a metal mirror 18 (for example, a thickness of 0.3 μm) is formed on the surface of the movable portion 20 (upper surface in FIG. 12) by thermal evaporation, and then A magnetic thin film 72 (for example, 1 μm in thickness) is formed on the back surface (the lower surface in FIG. 12) of the same movable portion 20 by thermal sputtering. In any film forming process, the main body 12 is heated.

  On the other hand, according to the second forming step, first, a magnetic thin film 72 (for example, a thickness of 1 μm) is formed on the back surface (the lower surface in FIG. 12) of the movable portion 20 by thermal sputtering, Next, a metal mirror 18 (for example, a thickness of 0.3 μm) is formed on the surface of the same movable part 20 (upper surface in FIG. 12) by thermal evaporation. In any film forming process, the main body 12 is heated.

  In this conventional manufacturing method, portions of the main body 12 that do not need to be heated to form the metal mirror 18 and the magnetic thin film 72 are also heated. Therefore, there is a possibility that thermal internal stress is generated and remains in the main body 12. Such a thermal residual stress causes the main body 12 to generate warpage or undulation as a surface shape error. Such surface shape error causes the surface shape of the metal mirror 18 to be deformed and the reflected beam from the metal mirror 18 to deteriorate.

  On the other hand, according to the present embodiment, the mirror 18 is not attached directly to the main body 12 but attached via the magnetic thin film 72. In order to form the mirror 18 on the surface of the magnetic thin film 72, the magnetic thin film 72 and the mirror 18 are heated together, and as a result, a laminate 76 of the magnetic thin film 72 and the mirror 18 is formed. Therefore, the heat generated in the main body 12 is not transmitted to the main body 12.

  Further, according to the present embodiment, the laminate 76 formed in this way is bonded to the main body 12 in a non-heated manner, whereby the mirror 18 is attached to the main body 12 via the magnetic thin film 72. Is done. Since the laminate 76 is adhered to the main body 12 without heating the main body 12, no thermal internal stress is generated in the main body 12.

  Therefore, according to the present embodiment, the optical scanner 70 can be manufactured such that warpage and undulation of the surface of the mirror 18 due to the thermal internal stress of the main body 12 is suppressed.

  Therefore, according to the present embodiment, the optical scanner 70 can perform optical scanning while suppressing deterioration of the scanning beam.

  As is clear from the above description, in the present embodiment, for convenience of explanation, the magnetic thin film 72 constitutes an example of the “movable magnetic element” in the item (7), and the electromagnetic coil 74 has the “fixed magnetism” in the same term. It can be considered that it constitutes an example of “element”.

  As described above, some of the embodiments of the present invention have been described in detail with reference to the drawings. However, these are exemplifications, and are based on the knowledge of those skilled in the art including the aspects described in the section of [Disclosure of the Invention]. The present invention can be implemented in other forms with various modifications and improvements.

It is a perspective view which shows the optical scanner manufactured by the optical scanner manufacturing method according to 1st Embodiment of this invention. It is a longitudinal cross-sectional view which shows the optical scanner shown in FIG. It is a systematic diagram which shows the optical scanner manufacturing method according to 1st Embodiment. It is a flowchart showing the detail of the laminated body manufacturing process shown in FIG. It is a flowchart showing the detail of the mirror film-forming process implemented in step S105 shown in FIG. It is a longitudinal cross-sectional view which shows an example of the conventional optical scanner. It is a systematic diagram which shows an example of the method of manufacturing the conventional optical scanner shown in FIG. It is a flowchart showing the detail of the mirror film-forming process of the optical scanner manufacturing method according to 2nd Embodiment of this invention. It is a longitudinal cross-sectional view which shows the optical scanner manufactured by the optical scanner manufacturing method according to 3rd Embodiment of this invention. It is a systematic diagram which shows the optical scanner manufacturing method according to 2nd Embodiment. It is a longitudinal cross-sectional view which shows another example of the conventional optical scanner. It is a systematic diagram which shows an example of the method of manufacturing the conventional optical scanner shown in FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Optical scanner 12 Main body part 18 Mirror 32 Magnetic coil 34 Laminated body 36 Metal thin film 38 Mirror base material 40 Vibrating body 42 Permanent magnet 70 Optical scanner 72 Magnetic thin film 74 Electromagnetic coil 76 Laminated body

Claims (8)

An optical scanner manufacturing method of manufacturing an optical scanner that reflects light incident on a reflection surface of a mirror as scanning light by magnetically vibrating a vibrating body having a plate-like mirror in a reciprocating manner,
The vibrator is
The main body,
A laminate that is locally attached to the surface of the main body,
The laminate is configured by laminating the mirror and a plate-like movable magnetic element,
The optical scanner manufacturing method is as follows:
A main body manufacturing process for manufacturing the main body without heating;
Laminate manufacturing in which the mirror and the movable magnetic element are thermally stacked in such a manner that the mirror and the movable magnetic element are lined up toward the main body in that order, thereby manufacturing the stacked body physically independently from the main body. Process,
An optical scanner manufacturing method, comprising: a bonding step of bonding the manufactured main body and the manufactured laminate to each other in a non-heated manner. The mirror is
A mirror substrate;
A metal thin film attached to the surface of the mirror substrate,
The laminate manufacturing process includes:
A mirror film forming step of thermally forming the metal thin film on the surface of the mirror substrate;
The optical scanner manufacturing method of Claim 1 including the magnetic element film-forming process which heat-forms the said movable magnetic element on the back surface of the said mirror base material.   The optical scanner manufacturing method according to claim 2, wherein the mirror base is configured to have higher rigidity than the main body.   The optical scanner manufacturing method according to claim 2 or 3, wherein the mirror substrate is made of glass or ceramic.   The optical scanner manufacturing method according to claim 1, wherein the movable magnetic element includes at least one of a magnetic thin film and a magnetic coil.   The said adhesion process includes the process of adhere | attaching the manufactured main-body part and the manufactured laminated body mutually on non-heating using a photocurable resin as an adhesive agent. The optical scanner manufacturing method as described in any one of Claims 1-3. An optical scanner,
A vibrating body having a plate-like mirror and a plate-like movable magnetic element;
A magnetic interaction between the movable magnetic element and a fixed magnetic element that reflects light incident on the reflecting surface of the mirror as scanning light by magnetically vibrating the vibrating body in a reciprocating manner. Including those that perform
The vibrator is
The main body,
A laminate that is locally attached to the surface of the main body,
The stacked body is an optical scanner in which the mirror and the movable magnetic element are stacked on each other in a posture in which the mirror and the movable magnetic element are arranged in the order toward the main body. The mirror is
A mirror substrate;
A metal thin film attached to the surface of the mirror substrate,
The optical scanner according to claim 7, wherein the mirror base is configured to have higher rigidity than the main body.

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