JP2009175330A - Observation system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an observation device capable of observing a side of a specimen speedily, reproducing, when another specimen is set, the position of the side the same as that of a previous specimen for observing the side. <P>SOLUTION: The observation system includes: the observation device having an optical system for obtaining an optical image of a specimen, and a diaphragm disposed so that an aperture part is eccentric to the optical axis of the optical system and rotatable in a direction perpendicular to the optical axis; an instructing section to which an instruction to drive the diaphragm is input; and a control section that stores at least one rotating position of the diaphragm based on the instruction from the instructing section, and rotates the diaphragm to the rotating position stored in the storage section, based on the instruction from the instructing section to drive the diaphragm. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an observation apparatus attached to an automatic machine such as a microscope, a processing machine, and a wire bonding apparatus that observes a predetermined observation site of an observation object, a measuring instrument, and the like.

  Conventionally, stereoscopic microscopes, video microscopes, and the like have been used as observation devices in the above fields. When observing a position that is not perpendicular to the optical axis, such as a side wall of a hole in a workpiece, an internal screw of a washer, or the like using this observation apparatus, it is necessary to take the following procedure.

  In the case of a stereomicroscope, the sample is further tilted so that the surface to be observed is perpendicular to the optical axis. Thereafter, while observing the observation image, the rotation stage is moved in order to obtain the position to be observed, and the sample is rotated.

  In the case of a video microscope, first tilt the microscope section so that the surface to be observed is perpendicular to the optical axis, and then move the rotating stage to the desired observation position while viewing the observation image, and rotate the sample. Let

However, the above-described operation is very troublesome for the observer to move the plane coordinates of the sample while observing the observation image, and is a work to be avoided.
In particular, in the case of a video microscope, the microscope unit is tilted. At that time, the position irradiated with the illumination light changes, and therefore it is necessary to move the XY position of the sample. Therefore, when the video microscope is attached to a processing machine, a wire bonding apparatus or the like, it is necessary to return the XY position of the sample to a state for processing again, which is a time-consuming operation.

Therefore, in recent years, a diaphragm having an opening at an eccentric position from the optical axis is provided, the diaphragm is moved in a direction perpendicular to the optical axis without changing the diameter of the diaphragm, and is rotated in parallel with a plane perpendicular to the optical axis. Thus, an observation apparatus that can observe the side surface of the sample has been proposed (for example, Patent Document 1).
JP 2007-58199 A

  However, in this observation apparatus, when observing the side surface of the sample, the diaphragm is rotated while looking at the screen, so it takes time to find the position to be observed. In addition, when observing one or more side faces with the same type of sample, such as part inspection or positioning of a processing machine, it is very difficult to reproduce the position of the diaphragm at the previous sample observation.

  In view of the above problems, the present invention provides an observation apparatus that can quickly observe the side surface of a sample and can reproduce the same side surface position as the previous sample when another sample is installed.

  An observation system according to the present invention includes an optical system for obtaining an optical image of a sample, and an observation apparatus having an aperture portion that is arranged eccentrically from the optical axis of the optical system and that can be rotated in a direction perpendicular to the optical axis. , An instruction unit to which an instruction for driving the diaphragm is input, and at least one rotation position of the diaphragm is stored based on the instruction from the instruction unit, and the diaphragm from the instruction unit is driven And a control unit that rotates the diaphragm to a rotational position stored in the storage unit based on an instruction to that effect.

In the observation system, the diaphragm can be inserted into and removed from the optical axis.
The observation system further includes at least one of a coaxial incident light source and a ring illumination, and the control unit increases the light amount of the light source when the diaphragm is inserted with respect to the optical axis. It is characterized by that.

  The observation system further includes a coaxial incident light source and a ring illumination light source, and the control unit turns on both the coaxial incident light source and the ring illumination when the diaphragm is inserted with respect to the optical axis. When the diaphragm is removed from the optical axis, one of the coaxial incident light source and ring illumination is turned on.

  The observation system further includes an imaging unit that converts the optical image into an electrical signal to obtain an imaging signal, and a display unit that displays an image based on the imaging signal from the imaging unit, and the control unit Is characterized in that the imaging timing of the imaging unit and the driving timing of the diaphragm are synchronized.

  In the observation system, the control unit repeats control of causing the imaging unit to perform imaging after rotating the diaphragm at a predetermined driving pitch based on an instruction from the instruction unit.

  In the observation system, the observation state based on the optical system is at least two observation states, and the control unit repeats the control for each observation state.

  In the observation system, when any image is selected from the images at the rotation positions of the diaphragm displayed on the display unit by the instruction unit, the control unit rotates the rotation corresponding to the rotation position of the selected image. The aperture is rotated to a position, and the rotation position is stored.

In the observation system, an image at each rotation position of the diaphragm is continuously displayed on the display unit.
Control for controlling an optical system for obtaining an optical image of a sample according to the present invention, and an observation apparatus having an aperture whose aperture is decentered from the optical axis of the optical system and having a stop rotatable in a direction perpendicular to the optical axis The apparatus includes an acquisition unit that acquires an instruction related to the observation device, a storage unit that stores at least one rotation position of the diaphragm based on the instruction, and the stored rotation position based on the instruction. And a diaphragm drive control means for rotating the diaphragm.

  The control device further includes light source control means for controlling a light source of the observation device, wherein the light source of the observation device is at least one of a coaxial incident light source and a ring illumination, and the instruction indicates the diaphragm In the case of an instruction for insertion with respect to the optical axis, the light source control means determines the light amount of the light source when the diaphragm is inserted with respect to the optical axis by the diaphragm drive control means based on the instruction. It is characterized by being enlarged.

  The control device further includes light source driving means for controlling a light source of the observation device, wherein the light source of the observation device is at least one of a coaxial incident light source and a ring illumination, and the instruction indicates the diaphragm. In the case of an instruction to insert or remove from the optical axis, the light source driving means is configured to cause the coaxial incident light source when the diaphragm is inserted into the optical axis by the diaphragm driving control means based on the instruction. And the ring illumination, and when the diaphragm is removed from the optical axis by the diaphragm drive control unit based on the instruction, either the coaxial incident light source or the ring illumination is lit. And

  The control device further includes: an imaging device driving unit that gives an instruction related to an imaging timing of the imaging device that obtains an imaging signal by converting the optical image into an electrical signal; and an imaging timing of the imaging device and a driving timing of the diaphragm. Control means for controlling the imaging device driving means and the diaphragm driving means so as to be synchronized with each other.

  In the control device, the control unit repeats control of causing the imaging device to take an image with the imaging device driving unit after the diaphragm driving unit rotates the aperture with a predetermined driving pitch based on the instruction. It is characterized by.

  In the control apparatus, the observation state based on the optical system is at least two observation states, and the control unit repeats the control for each observation state.

  According to the present invention, observation of the side surface of a sample can be quickly observed, and the position of the same side surface as the previous sample can be reproduced and observed when another sample is installed.

The observation system in the embodiment of the present invention includes an observation device, an instruction unit, and a control unit.
The observation apparatus has an optical system for obtaining an optical image of a sample, and an aperture that is arranged with its aperture portion decentered from the optical axis of the optical system and rotatable in a direction perpendicular to the optical axis. For example, in the embodiment of the present invention, the observation device corresponds to the observation devices 1, 7, 12, and 18.

The instruction unit receives an instruction for driving the diaphragm. For example, the instruction unit corresponds to the PC 1014 in the embodiment of the present invention.
The control unit stores at least one rotation position of the diaphragm based on an instruction from the instruction unit, and is stored in the storage unit based on an instruction from the instruction unit to drive the diaphragm. The diaphragm is rotated to the rotating position. For example, the control unit corresponds to the control unit 1013 in the embodiment of the present invention.

  With this configuration, the aperture position is stored in the memory. Therefore, the side surface of the sample can be observed quickly, and the position of the same side surface as the previous sample can be reproduced and observed when another sample is installed.

The diaphragm can be inserted into and removed from the optical axis. Therefore, when the side wall of the sample is not observed, the diaphragm is outside the optical axis, so that an observation image with good optical resolution can be obtained.
The observation system further includes at least one of a coaxial incident light source and ring illumination. At this time, the control unit may increase the light amount of the light source when the diaphragm is inserted with respect to the optical axis.

  The observation system further includes a coaxial incident light source and a ring illumination light source. In this case, the control unit turns on both the coaxial incident light source and the ring illumination when the diaphragm is inserted with respect to the optical axis, and when the diaphragm is removed from the optical axis, Either the coaxial incident light source or the ring illumination may be turned on.

  The observation system may further include an imaging unit and a display unit. The imaging unit converts the optical image into an electrical signal to obtain an imaging signal. For example, the imaging unit corresponds to the CCD camera 1010 in the embodiment of the present invention. The display unit displays an image based on the imaging signal from the imaging unit. For example, the display unit corresponds to the monitor 1015 in the embodiment of the present invention.

  In this case, the control unit synchronizes the imaging timing of the imaging unit and the driving timing of the diaphragm. More specifically, the control unit repeats control for causing the imaging unit to capture an image after rotating the diaphragm at a predetermined drive pitch based on an instruction from the instruction unit.

By configuring in this way, it is possible to capture an image every time a predetermined angle is rotated.
The observation state based on the optical system is at least two observation states. At this time, the control unit repeats the control for each observation state. By configuring in this way, the present invention can be applied even when there are a plurality of observation conditions.

  In addition, when any image is selected from the images at the respective rotation positions of the diaphragm displayed on the display unit by the instruction unit, the control unit moves the rotation position corresponding to the rotation position of the selected image to the rotation position. The aperture is rotated and the rotational position is stored.

With this configuration, the observation image can be displayed again, and the aperture position can be recorded with the image designated by the observer.
The display unit continuously displays images at each rotation position of the diaphragm. With this configuration, the captured image can be displayed as a moving image.

  In addition, the control device according to the embodiment of the present invention includes an optical system for obtaining an optical image of a sample, and an aperture that is disposed with its aperture portion decentered from the optical axis of the optical system and rotatable in a direction perpendicular to the optical axis. The observation apparatus which has is controlled.

  The control device includes acquisition means, storage means, and aperture drive control means. For example, the control device corresponds to the control unit 1013 in the embodiment of the present invention. The control device may be a PC 1014.

The acquisition unit acquires an instruction regarding the observation apparatus. For example, the acquisition unit corresponds to the serial I / F 1021 in the embodiment of the present invention.
The storage unit stores at least one rotation position of the diaphragm based on the instruction. The storage means corresponds to the ROM 1018 in the embodiment of the present invention, for example.

  The aperture drive control means rotates the aperture to the stored rotational position based on the instruction. The diaphragm drive control means corresponds to the diaphragm drive I / F 1020 in the embodiment of the present invention, for example.

The control device further includes light source control means for controlling the light source of the observation device. The light source control means corresponds to, for example, the light source I / F 1022 in the embodiment of the present invention.
The control device further includes an imaging device driving unit and a control unit.

  The imaging device driving unit gives an instruction regarding imaging timing of the imaging device that converts the optical image into an electrical signal to obtain an imaging signal. The imaging device driving means corresponds to the camera I / F 7002 in the embodiment of the present invention, for example.

  The control unit controls the imaging device driving unit and the diaphragm driving unit so as to synchronize the imaging timing of the imaging device and the driving timing of the diaphragm. For example, the control means corresponds to the CPU 1016 in the embodiment of the present invention.

The embodiment of the present invention will be described in detail below.
<First Embodiment>
FIG. 1 shows a schematic configuration of an observation apparatus 1 in the present embodiment. The observation apparatus 1 is an apparatus that observes an optical image of a sample 1002 mounted on an XY stage 1001. The observation apparatus 1 is provided with a ring illumination 1003 and a coaxial incident illumination light source 1004.

  The ring illumination 1003 includes a light emitting diode (hereinafter referred to as LED) as a light source for irradiating the sample 1002. The light of the ring illumination 1003 is directly illuminated on the sample 1002.

  On the other hand, the light from the coaxial incident illumination light source 1004 passes through the illumination optical system 1005 to become parallel light, and is guided to the half mirror 1006. The light reflected 90 degrees by the half mirror 1006 passes through the objective lens 1007 and illuminates the sample 1002.

  The light reflected by the sample 1002 passes through the objective lens 1007, passes through the half mirror 1006, and advances to the aperture member 1008. In the aperture member 1008, only a part of the light beam passes and is focused on the CCD camera 1010 by the imaging lens 1009.

  Although not shown, the observation apparatus 1 is fixed to a stand. By driving the focus adjusting unit on the stand, the observation apparatus 1 itself moves up and down, and the focus can be adjusted by changing the relative distance between the sample 1002 and the objective lens 1007.

The observation device 1 is connected to a control unit 1013 that controls the electric part. The control unit 1013 is connected to the PC 1014.
The PC 1014 is a computer including a CPU (Central Processing Unit), a random access memory (RAM), a read only memory (ROM), a mass storage device, and the like. The mass storage device of the PC 1014 is installed with application software to be described later for operation by the observer. The CPU of the PC 1014 reads application software from the mass storage device, displays a graphical user interface (GUI) described later on the monitor 1015, and executes a flow described later.

  A monitor 1015 is connected to the PC 1014. The monitor 1015 is a display device that displays an image from the CCD camera 1010, and is, for example, a liquid crystal display (LCD).

  The control unit 1013 includes a CPU 1016, a RAM 1017, a ROM 1018, an aperture drive I / F 1020, a light source I / F 1022, and a bus 1019. The RAM 1017 stores data such as operation data. The ROM 1018 stores control programs, data, and the like. The aperture drive I / F 1020 sends drive signals to various electric units, the rotary motor 1011, and the insertion / removal motor 1012. The light source I / F 1022 controls ON / OFF of the coaxial incident light source 1004 and the ring illumination 1003 and the driving voltage. The bus 1019 connects the CPU 1016, RAM 1017, ROM 1 O 18, aperture drive I / F 1020, and light source I / F 1022.

  The ROM 1018 is a rewritable nonvolatile ROM such as an EEPROM. The ROM 1018 can rewrite data from the PC 1014 using the serial I / F 1021.

  The aperture drive I / F 1020 includes a driver and a sensor register. The driver is for driving the rotation motor 1011 and the insertion / removal motor 1012 by a specified driving amount when a driving instruction is issued from the CPU 1016. The sensor register holds the state of the sensor together with a current position counter that holds the current position of the motor.

The CPU 1016 can read the sensor state and read / write the current position counter by accessing the aperture drive I / F 1020.
An instruction from the application software is transmitted to the CPU 1016 via the serial I / F 1021. After processing according to the command, the CPU 1016 returns normal termination, error information, and the like to the PC 1014 via the serial I / F 1021.

  FIG. 2 shows a configuration of the diaphragm in the present embodiment. The aperture member 1008 includes an aperture 2001, a rotation motor 1011 formed of a stepping motor, an insertion / removal motor 1012, a rotation motor sensor 2002, and an insertion / removal motor sensor 2003.

  The stop 2001 has an opening 2004 and a notch 2005 for determining a rotation position at a position eccentric from the center of the optical axis. The aperture member 1008 has a mechanism in which the aperture 2001 is rotated by a rotary motor 1011.

  By driving the insertion / removal motor 1012, the diaphragm 2001 and the rotary motor 1011 are moved in the direction perpendicular to the optical axis, and the diaphragm 2001 is moved in and out of the optical axis.

  FIG. 3 shows an optical system of the observation apparatus 1 when a cylindrical sample 1002 is installed. In FIG. 3A, the stop 2001 is at the center of the optical axis. Therefore, there is no difference in the image point 303 of the light beam on the side wall upper surface 301 and the side wall lower surface 302 on the CCD camera 1010. Therefore, the side wall is not visible.

  On the other hand, in FIG. 3B, the opening of the diaphragm 2001 is at a position eccentric from the optical axis. For this reason, a deviation occurs between the light beam image formation point 304 on the CCD camera 1010 on the side wall upper surface 301 and the light beam image formation point 305 on the CCD camera 1010 on the side wall lower surface 302. Therefore, in the obtained image from the CCD camera 1010, it appears that the section 306 between the side wall upper surface 301 and the side wall surface 302 of the sample 1002 is inclined.

  In FIG. 3C, the opening of the diaphragm 2001 is at a position rotated 180 degrees from FIG. Therefore, the sample 1002 also appears to be tilted in the section between the side wall upper surface 307 and the side wall lower surface 308 at a position rotated by 180 degrees.

  FIG. 4 shows the configuration of the memory in this embodiment. The ROM 1018 has a data structure shown in FIG. 4 as an example. In the AP_PRE_POS [0]-[6] address, the rotational position of the rotary motor 1011 set in preset 1-6 buttons described later is stored. The value of the light source applied voltage at the time of coaxial epi-illumination is stored at address COAX_LMP_PRE.

  FIG. 5 shows the GUI of the application software in this embodiment. The application software shown in the figure is installed in the PC 1014. The GUI includes a diaphragm member operation unit 5001, a light amount operation unit 5002, a camera operation unit 5003, and an image display unit 5004.

  The diaphragm member operation unit 5001 is for driving the diaphragm member 1008 and registering the position in the ROM 1018. The light amount operation unit 5002 is for changing the brightness of the ring illumination 1003 and the coaxial incident illumination 1004. A camera operation unit 5003 is used to change the exposure time of the CCD camera 1010 and to start / stop imaging. The image display unit 5004 displays the acquired image.

  The aperture member operation unit 5001 can rotate the rotary motor 1011 to an arbitrary position between 0 to 360 degrees. The aperture member operation unit 5001 includes an aperture rotation operation bar 5005, a preset instruction button 5006, a preset registration button 5007, and an aperture insertion / removal button 5008.

  The aperture rotation operation bar 5005 is for notifying the current position of the rotary motor 1011. The preset instruction button 5006 is for rotating the rotary motor 1011 to a preset rotation position. A preset registration button 5007 is for registering the current position of the aperture 2001 as a preset position. A diaphragm insertion / removal button 5008 is for driving the insertion / removal motor 1012 to insert / remov the diaphragm 2001 to / from the optical axis. The diaphragm insertion / removal button 5008 displays “OUT” when the diaphragm 2001 is on the optical axis, and “IN” when the diaphragm 2001 is not on the optical axis.

  Next, the operation of this embodiment will be described. When the power of the observation apparatus 1 is turned on, the rotation motor 1011 and the insertion / removal motor 1012 are driven to each sensor position and stopped for initialization. At this time, the position of the insertion / removal motor 1012 is in a state where the diaphragm 2001 is not inserted into the optical axis, and the display of the diaphragm insertion / removal button 5008 is “IN”.

  The position of the rotary motor 1011 is a position where the notch 2005 passes the sensor, and this position is set to 0 degree. At this time, the current position counter of the rotary motor 1011 of the aperture driving I / F 1020 is set to zero. Also, the cursor position of the GUI aperture rotation operation bar 5005 is set to a position of 0 degrees.

  When an imaging start button 5009 of the camera operation unit 5003 is pressed, the PC 1014 outputs an imaging start signal to the CCD camera 1010. Thereafter, the image taken from the CCD camera 1010 is transferred. The PC 1014 displays the image on the image display unit 5004.

  Further, the observer moves the cursor position of the exposure time operation bar 5010 of the camera operation unit 5003 or moves the cursor positions of the ring illumination operation bar 5011 and the coaxial incident illumination operation bar 5012 of the light amount operation unit 5002 as necessary. , You can adjust the brightness of the image.

  Next, the sample 1002 is mounted on the XY stage 1001, and the sample 1002 is brought into focus by the focus adjustment unit. Thereafter, when the side wall of the sample 1002 is observed, a diaphragm insertion / removal button 5008 is pressed.

  When the diaphragm insertion / removal button 5008 is pressed, the PC 1014 transmits the following command to the CPU 1016 via the serial I / F 1021 in order to instruct the insertion / removal motor 1012 to drive.

MOVE_AP IN
The command includes an instruction and an argument. The instruction is “MOVE_AP (Move Aperture)” and the argument is “IN”.

  FIG. 6 shows a flow of the operation of the CPU 1016 when receiving the MOVE_AP command in the present embodiment. First, the CPU 1016 acquires a command argument. If the argument of the acquired command is “IN” (“Y” in S1), the CPU 1016 issues an insertion / removal motor IN drive instruction to the aperture drive I / F 1020 (S2). Accordingly, the insertion / removal motor 1012 is driven, and the rotation center of the diaphragm 2001 is moved to the position of the optical axis.

  Thereafter, to turn on the coaxial epi-illumination 1004, the CPU 1016 reads a voltage value from the COAX_LMP_PRE address in the ROM 1018, and outputs an application voltage setting instruction to the coaxial epi-illumination light source 1004 to the light source I / F 1022 (S3).

When the application voltage setting instruction has been issued, the CPU 1016 returns a signal indicating the normal end to the PC 1014 via the serial I / F 1021 (S4).
Then, the application software receives a reply signal indicating that the application software has ended normally. At this time, the display of the aperture insertion / removal button is changed to “OUT”.

  If the stop 2001 is inserted into the optical axis, the light from the sample 1002 passes through the stop 2001 only at a certain angle. The monitor 1015 can observe the side wall of the sample 1002 by focusing the light on the CCD camera 1010.

Next, the operation when the aperture insertion / removal button 5008 is pressed when the display of the aperture insertion / removal button 5008 is “OUT” will be described with reference to the flowchart of FIG.
When the diaphragm insertion / removal button 5008 is pressed, the PC 1014 issues a command
MOVE_AP OUT
Send. At this time, since the argument of the command is “OUT” (“N” in S1), the CPU 1016 outputs an insertion / removal motor OUT drive instruction to the aperture drive I / F 1020 (S5). Accordingly, the insertion / removal motor 1012 is driven, and the diaphragm 2001 is deviated from the optical axis.

Thereafter, in order to turn off the coaxial epi-illumination 1004, the CPU 1016 outputs an instruction to turn off the coaxial epi-illumination 1004 to the light source I / F 1022 (S6).
When the turn-off instruction has been issued, the CPU 1016 transmits a reply signal indicating normal termination to the PC 1014 via the serial I / F 1021 (S4).

Then, the application software receives a return signal indicating that the application software has ended normally. At this time, the display of the aperture insertion / removal button 5008 is changed to “IN”.
After the diaphragm 2001 is inserted into the optical axis, the observer sets the cursor position of the diaphragm rotation operation bar 5005 to 180 degrees, for example. Then, the PC 1014 transmits the following command to the CPU 1016.

ROTATE “180”
In this case, the command is “ROTATE” and the argument is an angle. In this case, “180” is the argument.

The CPU 1016 outputs a drive instruction to the aperture drive I / F 1020 so that the rotary motor 1011 rotates to a position of 180 degrees.
When the driving instruction has been issued, the CPU 1016 returns a signal indicating the normal end to the PC 1014 via the serial I / F 1021. When the diaphragm 2001 is rotated to a position of 180 degrees, the position of the side wall of the observation image is rotated by 180 degrees.

  For example, when registering the current position (position of 180 degrees) as a preset 1, the observer presses a preset registration button 5006, and then presses a button number (preset button 1) to be preset registered. Then, the PC 1014 transmits the following command to the CPU 1016 via the serial I / F 1021.

PRESET_WRITE 1
In this case, the instruction is “PRESET_WRITE”, the argument is an address, and in this case, “1” is the argument.

  When the CPU 1016 receives this command, the CPU 1016 acquires the current position 180 of the rotary motor 1011 from the aperture drive I / F 1020 and writes 180 in the AP_PRE_POS [1] address. Thereafter, the CPU 1016 returns a signal indicating the normal end to the PC 1014 via the serial I / F 1021. The positions of other preset instruction buttons 5006 are registered in the same procedure.

  For example, when the observer presses the preset instruction button 5006 in a state where values are set in the addresses AP_PRE_POS [1] to [6] shown in FIG. 4, the PC 1014 sends the following command to the CPU 1016 via the serial I / F 1021. Send.

MOVE_PRESET 2
In this case, the instruction is “MOVE_PRESET”, the argument is an address, and in this case, “2” is the argument.

  Upon receiving this command, the CPU 1016 reads a value from the AP_PRE_POS [2] address in the ROM 1018 (in this case, “90”). Then, the CPU 1016 issues a drive instruction to the aperture drive I / F 1020 so as to drive the rotary motor 1011 and rotate it to a position of 90 degrees.

  Thereafter, the rotary motor 1011 rotates to a position of 90 degrees, and the CPU 1016 returns a signal indicating the normal end to the PC 1014 via the serial I / F 1021. Then, the observer can observe the image of the side wall at 90 degrees.

  According to this embodiment, the observer can observe the image of the side wall at an arbitrary rotational position. In addition, the side surface of the sample can be observed quickly. Moreover, when another sample is installed, the same side surface position as the previous sample can be reproduced and observed. Furthermore, the diaphragm can be inserted into and removed from the optical axis. When the side wall of the sample is not observed, the diaphragm is outside the optical axis, so that an observation image with good optical resolution can be obtained.

<Second Embodiment>
Next, a second embodiment of the present invention will be described. Description of the same parts as those in the first embodiment is omitted.

  FIG. 7 shows a configuration of the observation apparatus 7 in the present embodiment. In this embodiment, a camera I / F 7002 is added to the control unit 1013, and the camera I / F 7002 is connected to the CCD camera 1010. A camera I / F 7002 is an interface that outputs a trigger signal 7001 to the CCD camera 1010.

FIG. 8 shows the GUI of the application software in this embodiment. The GUI in FIG. 8A is obtained by adding a mode selection unit 8001 to the GUI in FIG.
The mode selection unit 8001 includes a mode selection scroll 8002 and a start button 8003. A mode selection scroll 8002 is for selecting an image acquisition mode. A start button 8003 is for starting observation in the selected mode.

  There are two modes that can be selected by the mode selection unit 8001, “live mode” and “side moving image mode”. When “side moving image mode” is selected by the mode selection unit 8001, the display of the mode selection unit 8001 becomes “side moving image mode” as shown in FIG.

“Live mode” is a mode in which images are captured at a frame rate set by the CCD camera 1010 and the captured images are sequentially displayed on the image display unit 5004.
On the other hand, the “side moving image mode” is a mode in which imaging is performed based on the camera trigger signal 7001 output from the camera I / F 7002 of the control unit 1013 and the captured images are continuously displayed on the image display unit 5004. . In the “side moving image mode”, since it looks like a moving image to the observer, it is suitable when the observer decides a favorite angle for the rotating moving image.

  FIG. 9 shows the configuration of the memory in this embodiment. The AP_ROATE_PITCH address in the ROM 1018 stores the pitch at which the rotary motor 1011 of the diaphragm member 1008 rotates in the side moving image mode. For example, the default value is 6, but this value can be rewritten from the PC 1014 via the serial I / F 1021.

  Since the display of the mode selection scroll 8002 is “live” after power-on, the image of the CCD camera 1010 is displayed on the image display unit 5004. The observer first adjusts the focus between the observation apparatus 7 and the sample 1002 with the aperture 2001 set to the OUT state in order to focus on the sample 1002. Thereafter, in order to set the aperture 2001 to IN, the aperture insertion / removal (IN) button is pressed.

When the stop insertion / removal (IN) button is pressed, the stop 2001 is inserted into the optical axis, and the image of the side wall of one surface is displayed on the image display unit 5004.
Then, the operation of the application software when the start button 8003 is pressed after setting the side driving mode with the mode selection scroll 8002 will be described with reference to the flowchart of FIG. 10 and the timing chart of FIG.

  FIG. 10 shows an operation flow of the application software in this embodiment. When the start button 8003 is pressed, the application software first initializes the acquisition counter n to 1 (S11). Then, in order to rotate the diaphragm 2001, the PC 1014 issues the following command to the control unit 1013 (S22).

ROTATE_CW (Rotate Clockwise)
Processing when the CPU 1016 receives the command will be described with reference to the timing chart of FIG.

FIG. 11 shows a timing chart in the present embodiment. When the CPU 1016 receives the command, the CPU 1016 reads a value from the address AP_ROATE_PITCH (in this case, 6). The CPU 1016 instructs the diaphragm drive I / F 1020 to drive the rotary motor 1011 with 6 pulses (T ₁ ). The aperture drive I / F 1020 outputs 6 pulses to the rotary motor 1011 (T ₂ ). Then, the rotary motor 1011 rotates by 6 pulses.

When the CPU 1016 receives notification from the aperture drive I / F 1020 that the pulse output to the rotary motor 1011 has been completed (T ₃ ), the CPU 1016 outputs a camera trigger signal 7001, and therefore issues a trigger instruction to the camera I / F 7002 (T ₄ ). .

When the CCD camera 1010 receives the trigger instruction, it performs imaging (T ₅ ). When the imaging is completed (T ₆ ), the CCD camera 1010 transfers the image to the PC 1014 (T ₇ ).
The application software waits if the image transfer has not been completed (“N” in S13). When the image transfer is completed (“Y” in S13), the application software saves the image at an Image [n] address of a memory (not shown) in the PC 1014 (S14).

  Thereafter, the application software checks whether all 360-degree images have been acquired, and therefore determines whether the acquisition counter n is 60 or more (S15). If it is determined that the acquisition counter is smaller than 60 (“N” in S15), the application software increments n (S16), moves the rotary motor 1011 to the next angle, and acquires an image.

If the acquisition counter is 60 or more (“Y” in S15), the application software has acquired all 360 ° images, and the process proceeds to image display processing.
In the image display process, the application software first initializes the display counter i (S17). Then, the application software reads the image stored in Image [i] from the memory in the PC 1014, displays it on the image display unit 5004, and waits for a certain time (S18).

  If the image display unit 5004 is not clicked with the mouse (“N” in S19), the display counter i is incremented (S20). At this time, if i has not reached 60 (“N” in S21), the next numbered image (image stored in Image [i]) is displayed (S18). When i reaches 60 (“Y” in S21), i is initialized (S17), and the image [1] is displayed again (S18).

When the image display portion 5004 is clicked with the mouse during image display (“Y” in S19), the display stops.
Here, the preset instruction button 5006 is not pressed (“N” in S22), and after a predetermined time has elapsed (“Y” in S23), the image display is resumed.

If the preset instruction button 5006 is pressed (“Y” in S22), the application software acquires the button number of the pressed preset instruction button and stores it in j on the memory (S24). The application software is a command for driving the rotary motor 1011 to rotate the aperture 2001 to the i × 6 position.
ROTATE “i × 6”
Is transmitted to the control unit 1013 (S25). In order to have the current position of the rotary motor 1011 written in the AP_PRE_POS [j] address of the ROM 1018 in the control unit 1013, the application software uses the following command
PRESET_WRITE j
Is transmitted to the control unit 1013 (S26), and this flow is exited.

  According to this embodiment, the observer can realize the preset position climbing of the rotation position of the diaphragm 2001 corresponding to the position of the side wall to be observed by clicking the image display unit 5004 with a mouse while viewing the moving image. In addition to the effects of the first embodiment, the observer can easily find the aperture position to be observed by viewing the moving image without operating the microscope, and the operability is improved.

<Third Embodiment>
Next, a third embodiment of the present invention will be described. Description of the same parts as those in the first and second embodiments is omitted.

  FIG. 12 shows a configuration of the observation apparatus 12 in the present embodiment. Although not shown, the observation device 12 is fixed to a stand. There is a Z drive motor 1201 in the focus adjustment unit in the stand. The Z drive motor 1201 is connected to the Z drive I / F 1202 of the control unit 1013. When information on the driving amount, speed, and direction is input from the CPU 1016 to the Z driving I / F 1202, the observation device 12 itself is moved up and down in the Z direction by driving the Z driving motor 1201, and the objective lens and the XY stage 1001 are driven. The relative distance between can be changed.

  FIG. 13 shows the GUI of the application software in this embodiment. In FIG. 13A, the GUI has a Z operation unit 1301. The Z operation unit 1301 includes a focus adjustment scroll unit 1302 for adjusting the focus position and a Z coordinate display unit 1303 for displaying the current Z coordinate.

  Also, there are three modes that can be selected by the GUI mode selection unit 8001: “live mode”, “side moving image mode”, and “Z moving side moving image mode”. When the mode selection unit 8001 selects, for example, “Z moving side moving image mode”, the display of the mode selecting unit 8001 becomes “Z moving side moving image mode” as shown in FIG.

  In the “Z-moving side moving image mode”, the Z drive motor 1201 is moved at a fixed pitch from the current position, and at each stop position of the Z drive motor 1201, the diaphragm 2001 is moved 360 degrees to acquire an image and output from the control unit 1013 In this mode, an image is captured based on the camera trigger signal 7001 and the captured image is continuously displayed on the image display unit 5004. As a result, a moving image that rotates 360 degrees at each Z measurement point is displayed to the observer.

  The “Z moving side moving image mode” is suitable for searching for a place to be observed with respect to the side wall of the sample 1002 such that a side wall of the sample 1002 such as a nut is deep and the upper side and the lower side of the side wall are equal to or greater than the focal depth of the objective lens 1007. Mode.

  The pitch input unit 1304 can set a pitch for moving the Z drive motor 1201 in the “Z moving side moving image mode”. In the measurement point input unit 1305, it is possible to set how many times the Z drive motor 1201 is moved.

When the observer moves the focus adjustment scroll unit 1302 up and down to adjust the focus, the PC 1014 transmits the following command to the CPU 1016.
ZMOVE “Indicated position”
In this case, the command is ZMOVE (Z Motor Move), the argument is the designated position, and the specific position of the Z drive motor 1201 is the argument.

  The CPU 1016 outputs a drive instruction to the Z drive I / F 1202 so that the Z drive motor 1201 moves to the designated position. Then, the Z drive motor 1201 is driven to the designated position.

  After entering the Z moving side moving image mode, the observer focuses on the bottom surface of the side wall to be observed and estimates the approximate distance to the top surface. Then, the observer inputs the pitch driven by the Z drive motor 1201 to the pitch input unit 1304 and inputs the number of measurement points to the measurement point input unit 1305.

Thereafter, when a start button 8003 is pressed, imaging in the Z moving side moving image mode is started. The operation at this time will be described with reference to the flowchart of FIG.
FIG. 14 shows an operation flow of the application software in this embodiment. When the start button 8003 is pressed, the application software first initializes the pitch counter k to 1 (S31).

  Then, the application software compares the pitch counter k with the number of measurements input by the measurement point number input unit 1305 (S32). In this case, since the pitch counter k is smaller than the number of measurements (“N” in S32), the application software calls the image acquisition process shown in FIG. As described above, in the image acquisition process, the diaphragm 2001 can be moved to acquire an image. The acquired image is stored at the address Image [k] [n] (S33). At this time, the rotational position of the Z drive motor can be calculated by k × Pitch.

After that, the PC 1014 is a command for driving the Z drive motor 1201 to move to the next measurement point.
ZMOVE “Start position – k × Pitch”
Is transmitted to the CPU 1016 (S34). Here, Pitch is a numerical value input by the pitch input unit 1304.

The CPU 1016 that has received the command drives the Z drive motor 1201 to the next measurement point via the Z drive I / F 1202.
Then, the application software increments the pitch counter k (S35), and again compares the pitch counter with the number of measurements (S32). If the pitch counter is greater than the number of measurements (“Y” in S32), the application software has finished acquiring images at all measurement points, and enters image display processing.

  Here, the pitch counter k is initialized again to 1 (S36), and the display counter n is also initialized to 1 (S37). The application software reads the image stored at the address Image [k] [n] from the memory in the PC 1014, displays the image on the image display unit 5004, and waits for a predetermined time (S38).

  If the image display unit 5004 is not clicked with the mouse (“N” in S39), the display counter n is incremented (S40). At this time, if n has not reached 60 (“N” in S41), the next numbered image (the image stored at the address Image [k] [n]) is displayed (S38). When i reaches 60 (“Y” in S41), the display of the image at one Z measurement point is finished. In this case, the pitch counter k is incremented in order to display the picture award at the next Z measurement point (S42).

  The application software compares the pitch counter k with the number of measurements (S43). If the pitch counter k is equal to or smaller than the number of measurements (“N” in S43), the display counter n is initialized to 1 (S37), and an image of the next Z measurement point is displayed (S38).

  On the other hand, if the pitch counter is larger than the number of measurements (“Y” in S43), the image display of all Z measurement points is completed. In this case, the pitch counter k is initialized to 1 (S36), the display counter n is initialized to 1 (S37), and an image of the Z measurement point at the start of measurement is displayed (S38).

When the image display portion 5004 is clicked with the mouse during image display (“Y” in S39), the display stops.
Here, when the preset button is not pressed (“N” in S44) and a predetermined time has passed (S45 is “Y”), the image display is resumed (S38).

If the preset button is pressed (“Y” in S44), the application software acquires the button number and stores it in j on the memory (S46). Then, the application software commands to drive the rotary motor 1011 to the n × 6 position.
ROTATE “n × 6”
Is transmitted (S47). The application software then writes the current position of the rotary motor 1011 to the AP_PRE_POS [j] address in the ROM 1018 in the control unit 1013, using the following command:
PRESET_WRITE j
Is transmitted to the CPU 1016 (S48). The application software then executes the following command to move the Z drive motor 1201 to the Z measurement point of the selected image.
ZMOVE “Start Position-k x Pitch
Is transmitted to the CPU 1016 (S49), and this flow is exited.

  According to the present embodiment, the observer can perform preset position registration of the rotational position of the diaphragm 2001 corresponding to the position of the side wall at the position of the Z motor to be observed by clicking the image display unit 5004 with a mouse while viewing the moving image. .

  According to the present embodiment, in addition to the effects of the first and second embodiments, the positions of the diaphragm 2001 and the Z drive motor 1201 that are desired to be observed can be easily found, so that the operability is improved. Further, it is easy to find a place to be observed with respect to the side wall of the sample 1002 where the side wall of the sample 1002 such as a nut is deep and the upper side and the lower side of the side wall are equal to or greater than the focal depth of the objective lens 1007, and the state of the sample 1002 is easy. Can be observed.

  In the first and second embodiments, the rotary motor 1011 and the insertion / removal motor 1012 are not limited to stepping motors, and may be actuators that can detect the current position of the diaphragm 2001 by a DC motor and an encoder.

  In the embodiment of the present invention, the observer's operation is a GUI on the PC 1014 as an example, but an operation unit such as a desktop hand switch may be used. In this case, the control unit 1013 needs an operation unit I / F.

  In the first, second, and third embodiments, the current position of the rotary motor 1011 is stored in the ROM 1018 by pressing a preset registration button on the GUI. However, the position is not limited to the position of the rotary motor 1011. For example, at least one of the current coaxial epi-illumination 1004, ring illumination 1003 brightness, imaging conditions of the CCD camera 1010, and the position of the Z drive motor 1201 can be stored in the ROM 1018. When the preset button is pressed, the value in the ROM 1018 is stored. And the electric unit may be set in a state stored in the ROM 1018. At this time, an area of the number of preset buttons × the number of motorized parts is required in the ROM 1018.

  In the first, second, and third embodiments, the diaphragm 2001 is driven only in the rotational direction with respect to the optical axis. However, the insertion / removal motor 1012 is used to drive the diaphragm 2001 in the direction perpendicular to the optical axis direction. By driving, as shown in FIG. 15 or FIG. 16, the diaphragm 2001 may be set at an arbitrary position with respect to two dimensions.

  FIG. 15 shows a diaphragm member operation unit (example 1) in a modification of the first, second, or third embodiment. The symbol displayed on the aperture display unit 1501 of the aperture member operation unit can be clicked and dragged with the mouse. Then, the application software calculates the drive amounts of the rotary motor 1011 and the insertion / removal motor 1012 so that the aperture 2001 is instructed, and the control unit 1013 issues a command for driving the rotation motor 1011 and the insertion / removal motor 1012. Send to.

  FIG. 16 shows a diaphragm member operation unit (example 2) in a modification of the first, second, or third embodiment. The aperture member operation unit includes an aperture rotation angle bar 1601 for setting the aperture rotation angle of the observation image and an observation image angle bar 1602 for setting the angle of the observation image. By setting the cursor and the observation image angle bar of the aperture rotation angle bar 1601, the rotation motor 1011 and the insertion / removal motor 1012 may be driven, respectively. In this way, the angle of the observation image can be changed by moving the diaphragm 2001 in the direction perpendicular to the optical axis.

  In addition, the coaxial epi-illumination 1004 is turned on when the diaphragm 2001 is inserted in the first embodiment. However, the coaxial epi-illumination 1004 only system or the ring illumination 1003 only system The amount of light may be increased when 2001 is inserted. Further, in this case, the amount of light may be reduced when the diaphragm 2001 is removed from the optical path.

  In the second or third embodiment, an imaging trigger signal is output after the rotation of the motor is finished, but the camera frame signal is transmitted to the control unit 1013 to drive the diaphragm 2001 in synchronization with the camera frame. You may let them.

  In the second or third embodiment, the image acquired for each motor coordinate is displayed as a moving image, and the position of the rotary motor 1011 is determined by selecting the rotation angle that the observer wants to observe. Not limited to this, an image acquired for each motor coordinate may be displayed as a thumbnail on the camera image display unit 5004 to determine the coordinates of the rotary motor 1011 corresponding to the selected image. In addition, the moving images are displayed at regular intervals (W18 time in FIG. 10), but this wait time can be changed by the observer.

  FIG. 17 shows a mode selection unit in a modification of the second or third embodiment. In the second or third embodiment, when the side moving image mode is started, the 360-degree stop 2001 is rotated, but the rotation angle is not limited to 360 degrees. As shown in FIG. 17, an angle designation range portion may be provided in the mode selection portion 8001 or the like, and the diaphragm 2001 may be driven within the angle range (start position cursor to end position cursor 1703) designated by the angle designation range portion 1701. Absent.

  In the second or third embodiment, the PC 1014 receives the image signal and drives the rotary motor 1011 every time after the image transfer is completed, but the image transfer time is determined by the camera. Thus, the control unit 1013 may be configured to issue a drive instruction for the rotary motor 1011 at regular intervals. In this case, it goes without saying that the drive instruction interval of the rotary motor 1011 does not exceed the frame rate of the camera. In addition, after the image transfer is completed, an instruction to drive the rotary motor 1011 may be issued.

  In the first, second, or third embodiment, the diaphragm 2001 is decentered from the optical axis, thereby obtaining an observation image in one direction decentered from the optical axis so that the side surface of the sample 1002 can be observed. . However, instead of the diaphragm 2001, a method of providing a mirror having an inclined tip as shown in FIG.

  FIG. 18 shows a schematic configuration of an observation apparatus in a modification of the first, second, or third embodiment. The observation device 18 is provided with a declination mirror 1801 and an insertion / removal motor 1803 instead of the diaphragm member 1008.

  The declination mirror unit 1801 includes declination mirrors 1801a and 1801b. The declination mirror unit 1801 can rotate the declination mirrors 1801 a and 1801 b by a mirror rotation motor 1802. By driving the insertion / removal motor 1803, the oblique mirror portion 1801 can be inserted / removed with respect to the optical axis. In this way, the observation image can be decentered from the optical axis by rotating the declination mirrors 1801a and 1801b.

  Note that the control unit 1013 of the first, second, or third embodiment may also include an operation unit I / F 1804 as in FIG. Then, an instruction may be given to the control unit 1013 by the operation unit 1805 via the operation unit I / F 1804.

  In the first, second, or third embodiment, the value of the COAX_LMP_PRE address is fixed, but may be changed from the PC 1014. At this time, it is necessary to have a command that can change the value of the COAX_LMP_PRE address. By making the COAX_LMP_PRE address variable, it becomes possible to make the brightness of the image uniform when the diaphragm 2001 is inserted on the optical axis due to the reflectance of the sample.

  In the third embodiment, the observer inputs the pitch and the number of measurement points. However, the pitch may be constant, and the stroke driven by the Z drive motor 1201 in the Z moving side moving image mode may be input. .

  In the third embodiment, the diaphragm 2001 is rotated 360 degrees at the position of each Z drive motor 1201, and the image is displayed as a moving image. However, in a system having a plurality of observation methods (for example, bright field observation, dark field observation, phase difference observation, differential interference observation, fluorescence observation, etc.), the aperture 2001 is rotated 360 degrees for each observation method, and the image is animated. It may be displayed. In this system, the observer can easily determine the optimum position of the diaphragm 2001 for each observation method.

  In any of the embodiments described in the present invention, various modifications can be made without departing from the gist thereof. Moreover, the numerical value described in any embodiment of this invention is an example, Comprising: It is not limited to the numerical value.

  According to the present invention, it is possible to quickly observe the side surface of a sample and to reproduce and observe the same side surface position as the previous sample when another sample is installed. In addition, the diaphragm can be inserted into and removed from the optical axis, and the observation method can be switched between observation with high resolution and observation with a deep focal depth.

The schematic structure of the observation apparatus 1 in 1st Embodiment is shown. The structure of the aperture_diaphragm | restriction in 1st Embodiment is shown. The optical system of the observation apparatus 1 when the cylindrical sample 1002 is installed is shown. The structure of the memory in 1st Embodiment is shown. 2 shows a GUI of application software in the first embodiment. The flow of operation | movement of CPU1016 when the MOVE_AP command in 1st Embodiment is received is shown. The structure of the observation apparatus 7 in 2nd Embodiment is shown. The GUI of the application software in 2nd Embodiment is shown. The structure of the memory in 2nd Embodiment is shown. The operation | movement flow of the application software in 2nd Embodiment is shown. The timing chart in 2nd Embodiment is shown. The structure of the observation apparatus 12 in 3rd Embodiment is shown. The GUI of the application software in 3rd Embodiment is shown. The operation | movement flow of the application software in 3rd Embodiment is shown. The diaphragm member operation part (example 1) in the modification of 1st, 2nd or 3rd embodiment is shown. The diaphragm member operation part (example 2) in the modification of 1st, 2nd or 3rd embodiment is shown. The mode selection part in the modification of 2nd or 3rd embodiment is shown. The schematic structure of the observation apparatus in the modification of 1st, 2nd or 3rd embodiment is shown.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Observation apparatus 1001 XY stage 1002 Sample 1003 Ring illumination 1004 Coaxial epi-illumination 1005 Illumination optical system 1006 Half mirror 1007 Objective lens 1008 Aperture member 1009 Imaging lens 1010 CCD camera 1011 Rotation motor 1012 Insertion / removal motor 1013 Control unit 1014 PC
1015 monitor 1016 CPU
1017 RAM
1018 ROM
1019 Bus 1020 Aperture drive I / F
1021 Serial I / F
1022 Light source I / F
2001 Aperture 2002 Rotation motor sensor 2003 Insertion / removal motor sensor 2004 Opening 2005 Notch 7 Observation device 7002 Camera I / F
12 Observation device 1201 Z drive motor 1202 Z drive I / F
1801 Declination mirror unit 1801a, 1801b Declination mirror 1802 Mirror rotation motor 1803 Insertion / removal motor 1804 Operation unit I / F
1805 Operation unit

Claims (15)

An optical system for obtaining an optical image of a sample, and an observation apparatus having an aperture portion that is decentered from the optical axis of the optical system and has a stop that is rotatable in a direction perpendicular to the optical axis;
An instruction unit for inputting an instruction for driving the diaphragm;
Based on an instruction from the instruction unit, at least one rotation position of the diaphragm is stored, and based on an instruction from the instruction unit to drive the diaphragm, a rotation position stored in the storage unit A control section for rotating the diaphragm;
An observation system comprising: The observation system according to claim 1, wherein the diaphragm is detachable with respect to the optical axis. The observation system further comprises:
Including at least one of a coaxial incident light source and a ring illumination,
The observation system according to claim 2, wherein the control unit increases a light amount of the light source when the diaphragm is inserted with respect to the optical axis. The observation system further comprises:
It has a coaxial incident light source and a ring illumination light source,
The controller turns on both the coaxial incident light source and the ring illumination when the diaphragm is inserted with respect to the optical axis, and the coaxial incident light source when the diaphragm is removed from the optical axis. The observation system according to claim 2, wherein one of the light sources is turned on. The observation system further comprises:
An imaging unit that converts the optical image into an electrical signal to obtain an imaging signal;
A display unit for displaying an image based on an imaging signal from the imaging unit;
With
The observation system according to claim 1, wherein the control unit synchronizes an imaging timing of the imaging unit and a driving timing of the diaphragm. The observation system according to claim 5, wherein the control unit repeats control of causing the imaging unit to capture an image after rotating the diaphragm at a predetermined drive pitch based on an instruction from the instruction unit. The observation state based on the optical system is at least two observation states,
The observation system according to claim 6, wherein the control unit repeats the control for each observation state. When any image is selected from the images at the rotation positions of the diaphragm displayed on the display section by the instruction section, the control section opens the diaphragm at a rotation position corresponding to the rotation position of the selected image. The observation system according to claim 6 or 7, wherein the observation position is stored while the rotation position is stored. The observation system according to claim 6 or 7, wherein an image at each rotation position of the diaphragm is continuously displayed on the display unit. An optical system for obtaining an optical image of a sample, and a control device for controlling an observation apparatus having an aperture portion that is arranged eccentrically from the optical axis of the optical system and has a stop that is rotatable in a direction perpendicular to the optical axis;
Obtaining means for obtaining instructions relating to the observation device;
Storage means for storing at least one rotation position of the diaphragm based on the instruction;
A diaphragm drive control means for rotating the diaphragm to the stored rotational position based on the instruction;
A control device for controlling an observation device. The control device further includes:
A light source control means for controlling the light source of the observation device,
When the light source of the observation device is at least one of a coaxial incident light source and ring illumination, and the instruction is an instruction to insert a diaphragm with respect to the optical axis,
The observation according to claim 10, wherein the light source control means increases the light amount of the light source when the diaphragm is inserted with respect to the optical axis by the diaphragm drive control means based on the instruction. A control device that controls the device. The control device further includes:
A light source driving means for controlling the light source of the observation device,
When the light source of the observation device is at least one of a coaxial incident light source and ring illumination, and the instruction is an instruction to insert or remove the diaphragm with respect to the optical axis,
The light source driving means turns on both the coaxial incident light source and the ring illumination when the diaphragm is inserted with respect to the optical axis by the diaphragm drive control means based on the instruction, and based on the instruction The control apparatus for controlling an observation apparatus according to claim 10, wherein when the diaphragm is removed from the optical axis by the diaphragm drive control means, one of the coaxial incident light source and ring illumination is turned on. The control device further includes:
Imaging device driving means for giving instructions regarding imaging timing of an imaging device that obtains an imaging signal by converting the optical image into an electrical signal;
Control means for controlling the imaging device driving means and the diaphragm driving means so as to synchronize the imaging timing of the imaging device and the driving timing of the diaphragm;
The control apparatus which controls the observation apparatus of Claim 10 characterized by the above-mentioned. The control means repeats control of causing the imaging apparatus to take an image with the imaging apparatus driving means after the diaphragm driving means rotates the diaphragm at a predetermined driving pitch based on the instruction. Item 14. A control device that controls the observation device according to Item 13. The observation state based on the optical system is at least two observation states,
The control device for controlling an observation device according to claim 14, wherein the control means repeats the control for each observation state.