JP2009170487A - Adhesive rubber sheet for substrate transfer jig, and substrate transfer jig - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an adhesive rubber sheet for a substrate transfer jig having a sufficiently high adhesion to the substrate to be adhered and a supporting board at the solder reflow temperature notwithstanding a fluorine-contained-rubber-series elastomer sheet, capable of absolutely fix-holding the substrate in the solder reflow step, and preventing exfoliation from the supporting board. <P>SOLUTION: The adhesive rubber sheet 10 fixed to the supporting board 20 and composing the substrate transfer jig includes: 100 pts.wt of fluorine rubber, 0.2 to 0.6 pts.wt of organic peroxide, 0.5 to 1.5 pts.wt of crosslinking agent; and can be obtained by mold-pressurizing a rubber composite having polymer purity of ≥85.0 wt.%. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an adhesive rubber sheet for a substrate transport jig and a substrate transport jig, and more specifically, an adhesive rubber sheet constituting a substrate transport jig used when mounting an electronic component on a substrate such as an FPC board, and The present invention relates to a substrate conveying jig formed by laminating such an adhesive rubber sheet on a support board.

  Since an FPC (Flexible Printed Circuit) substrate is thin and rich in flexibility, it has recently played a central role as a base material constituting a circuit of a small electronic device.

  Various electronic components are mounted on the FPC. Mounting electronic components on the FPC board includes a cream solder printing process, an electronic component mounting process, a solder reflow process, a cutting process, and the like. In the electronic component mounting line, the FPC board is held in a flattened state and is transported within each process and between each process.

  As a conveyance jig for an FPC board, there has been proposed a conveyance pallet in which a sheet made of an adhesive silicone elastomer is bonded and fixed on a support (see Patent Document 1).

  However, in the conveying jig described in Patent Document 1, in the solder reflow process that is usually performed in a high temperature environment of 200 to 260 ° C., low molecular siloxane contained in the silicone elastomer is released as outgas, which is an electronic component. There is a problem in that contact failure occurs due to contact with the contact portion.

  In order to solve such a problem, there has been proposed a board transport jig in which a fluororubber elastomer sheet (circuit board holding layer) not containing siloxane is provided on a support board (see Patent Document 2).

  However, the fluoroelastomer-based elastomer sheet does not have sufficient adhesion to the adherend FCP substrate and support board at the solder reflow temperature (usually 200 to 260 ° C.) (adhesion in a high temperature environment). Inferior). For this reason, in a solder reflow process, the FPC board currently hold | maintained at the elastomer sheet may peel, or an elastomer sheet may peel from a support board.

On the other hand, the elastomer sheet that constitutes the board transport jig has high insulation and is easily charged. Therefore, the FPC board is contaminated by adsorbing dust and dirt in the environment, and electronic components are electrostatically destroyed. There is. In order to solve such problems, it has been practiced to impart conductivity (for example, surface resistance ≦ 10 ⁸ Ω) to the elastomer sheet by blending a conductive material such as conductive carbon black.

However, the adhesive strength (at room temperature and high temperature) of the elastomer sheet tends to be further reduced by the blending of the conductive material.
For this reason, as an adhesive rubber sheet constituting the substrate transport jig, an adhesive rubber sheet having both the desired conductivity (antistatic property) and sufficient adhesive force (under normal temperature and high temperature) to the adherend Development of was desired.
JP 2003-273581 A JP 2004-363438 A

The present invention has been made based on the above situation.
The object of the present invention is a fluoroelastomer-based elastomer sheet, which has a sufficiently high adhesive force to a substrate and a support board, which are adherends, even at a solder reflow temperature. An object of the present invention is to provide an adhesive rubber sheet for a substrate carrying jig that is securely fixed and held and is not peeled off from a support board.
Another object of the present invention is to provide a pressure-sensitive adhesive rubber sheet for a substrate transporting jig that has both the desired conductivity (antistatic property) and a sufficient adhesive force to an adherend.
Still another object of the present invention is to provide a substrate transport jig in which the above-mentioned adhesive rubber sheet is fixed on a support board.

  As a result of intensive studies by the inventor in order to achieve the above object, each of the organic peroxide and the co-crosslinking agent is specified to be different from the conventional blending amount for the peroxide-crosslinking type fluororubber. The pressure-sensitive rubber sheet having a high adhesive force even in a high-temperature environment can be obtained by molding a rubber compound having a polymer purity ratio of a certain ratio or more within a range of The inventors have found that the present invention can be obtained, and have completed the present invention based on such knowledge.

  The pressure-sensitive adhesive rubber sheet for a substrate transport jig according to claim 1 is a pressure-sensitive adhesive rubber sheet that is fixed on a support board and constitutes the substrate transport jig. It is obtained by molding and processing a rubber compound containing ~ 0.6 parts by mass and 0.5 to 1.5 parts by mass of a co-crosslinking agent and having a polymer purity of 85.0% by mass or more. To do.

  The adhesive rubber sheet for a substrate transport jig according to claim 2 is an adhesive rubber sheet that is fixed on a support board and constitutes the substrate transport jig, and includes 100 parts by mass of fluororubber and an organic peroxide of 0.2. It is characterized by being obtained by molding a rubber compound containing ~ 0.5 part by mass and 0.5-1.2 parts by mass of a co-crosslinking agent and having a polymer purity of 90.0% by mass or more. To do.

  The pressure-sensitive adhesive rubber sheet for a substrate conveying jig according to claim 3 is characterized in that the organic peroxide is 2,5-dimethyl-2,5-bis (t-butylperoxy) hexane and the co-crosslinking agent is triallyl. It is an isocyanurate.

  The pressure-sensitive adhesive rubber sheet for a substrate carrying jig according to claim 4 is characterized in that the fluororubber is made of a copolymer having a side chain.

  The pressure-sensitive adhesive rubber sheet for a substrate carrying jig according to claim 5 is characterized in that the fluororubber is made of a vinylidene fluoride / perfluoroalkyl vinyl ether / tetrafluoroethylene copolymer.

  The pressure-sensitive adhesive rubber sheet for a substrate carrying jig according to claim 6 is characterized in that the fluororubber is made of a vinylidene fluoride / hexafluoropropylene / tetrafluoroethylene copolymer.

  The pressure-sensitive adhesive rubber sheet for a substrate carrying jig according to claim 7 is characterized in that the rubber compound contains 0.5 to 10 parts by mass of conductive carbon black.

  The adhesive rubber sheet for a substrate transport jig according to an eighth aspect is characterized in that the conductive carbon black is ketjen black.

The pressure-sensitive adhesive rubber sheet for a substrate carrying jig according to claim 9 has a surface resistance of 10 ⁸ Ω or less.

  The board | substrate conveyance jig of this invention is comprised by laminating | stacking the heat-resistant support board and the adhesive rubber sheet of this invention.

The pressure-sensitive adhesive rubber sheet for a substrate transport jig of the present invention is a fluoroelastomer elastomer sheet, but is sufficient for an adherend (substrate and support board) even at a solder reflow temperature (for example, 200 to 260 ° C.). High adhesive strength.
Further, the pressure-sensitive adhesive rubber sheet for a substrate transport jig according to claims 7 to 9 obtained by molding a rubber compound containing a predetermined amount of conductive carbon black has a desired conductivity (antistatic property). ) And sufficient adhesive strength (under normal temperature and high temperature) to the adherend.

Hereinafter, the present invention will be described in detail.
<Adhesive rubber sheet>
The adhesive rubber sheet for a substrate transport jig of the present invention is an adhesive rubber sheet that is fixed on a support board and constitutes the substrate transport jig.

  Examples of the constituent material of the support board to which the adhesive rubber sheet of the present invention is fixed include aluminum, aluminum alloy, stainless steel, magnesium alloy, fiber reinforced epoxy resin, polyethersulfone, polyacrylate, polyimide, alumina, aluminum nitride, and the like. Can do.

  As a method for fixing the pressure-sensitive adhesive rubber sheet of the present invention to the support board, a method using the pressure-sensitive adhesive force of the pressure-sensitive rubber sheet (adhesion fixing) can be mentioned. Thereby, when the adhesive rubber sheet is deteriorated, it can be removed from the support board and replaced with a new one, so that the support board can be reused.

  The pressure-sensitive adhesive rubber sheet of the present invention may be bonded and fixed on the support board (fixed firmly by cross-linking or the like). Thereby, in the solder reflow process implemented using the board | substrate conveyance jig obtained, it can prevent reliably that an adhesive rubber sheet peels from a support board.

  The adhesive rubber sheet of the present invention contains 100 parts by mass of fluororubber, 0.2 to 0.6 parts by mass of an organic peroxide, and 0.5 to 1.5 parts by mass of a co-crosslinking agent. It is obtained by molding a rubber compound (hereinafter also referred to as “specific rubber compound”) that is 85.0% by mass or more.

  In the present invention, fluororubber is used as the raw rubber constituting the specific rubber compound. Thereby, problems, such as a contact failure of an electronic component resulting from low molecular siloxane (outgas), can be avoided.

The fluororubber constituting the specific rubber compound is not particularly limited as long as it is a fluororubber capable of peroxide crosslinking.
As the copolymer constituting the fluororubber, vinylidene fluoride / hexafluoropropylene (VDF / HFP) copolymer, vinylidene fluoride / hexafluoropropylene / tetrafluoroethylene (VDF / HFP / TFE) copolymer , Vinylidene fluoride / perfluoroalkyl vinyl ether / tetrafluoroethylene (VDF / PAVE / TFE) copolymer, vinylidene fluoride / perfluoroalkyl vinyl ether / hexafluoropropylene (VDF / PAVE / HFP) copolymer, vinylidene Fluoride / perfluoroalkyl vinyl ether / hexafluoropropylene / tetrafluoroethylene (VDF / PAVE / HFP / TFE) copolymer and the like can be exemplified. These copolymers are copolymerized with a crosslinking point monomer (for example, olefin bromide).

  Among these, copolymers having a side chain (-ORf) introduced by perfluoroalkyl vinyl ether (VDF / PAVE / TFE copolymer, VDF / PAVE / HFP copolymer, VDF / PAVE / HFP / TFE). The copolymer is preferably from the viewpoint of obtaining a rubber sheet having high adhesive strength, and a VDF / PAVE / TFE copolymer is particularly preferable. A VDF / HFP / TFE copolymer having a side chain introduced with hexafluoropropylene is also preferred.

  Commercial products of fluororubber include Viton (registered trademark) GLT, GLT-S, GFLT, GFLT-S, GF, GF-S, GBL, GBL-S (above, DuPont Elastomer Co., Ltd.) ))) And the like.

  Examples of the organic peroxide constituting the specific rubber compound include those used as a crosslinking agent for rubber peroxide crosslinking. Specifically, 2,5-dimethyl-2,5-bis (t-butylperoxy) hexane, dicumyl peroxide, bis (t-butylperoxy) diisopropylbenzene and the like can be exemplified. Of these, 2,5-dimethyl-2,5-bis (t-butylperoxy) hexane is preferred.

  As a compounding quantity of an organic peroxide, it is 0.2-0.6 mass part normally with respect to 100 mass parts of fluororubber, Preferably it is 0.2-0.5 mass part, More preferably, it is 0.2. To 0.48 parts by mass, particularly preferably 0.2 to 0.4 parts by mass.

  In a typical compounding recipe of the peroxide cross-linking type fluororubber, the compounding amount of the organic peroxide is about 1.2 to 1.8 parts by mass with respect to 100 parts by mass of the fluororubber. Thus, the compounding amount (0.2 to 0.6 parts by mass) of the organic peroxide in the present invention is considerably smaller than the compounding amount in a typical compounding recipe for obtaining a completely crosslinked product. It is.

  And the adhesive rubber sheet obtained only by prescribing the blending amount of the organic peroxide in such a numerical range is a fluororubber-based elastomer sheet that has been considered to be inferior in adhesiveness in a high temperature environment. However, even at a solder reflow temperature (usually 200 to 260 ° C.), a sufficiently high adhesive force is exhibited with respect to the adherend (substrate and support board).

  When the blending amount of the organic peroxide is less than 0.2 parts by mass, a sufficient crosslinking reaction cannot be performed, and a crosslinked rubber sheet (elastic body) cannot be obtained (see Comparative Example 4 described later). ). On the other hand, when this compounding quantity exceeds 0.6 mass part, the adhesive rubber sheet obtained will not have sufficient adhesive force in a high temperature environment (refer the comparative example 5 mentioned later).

  Examples of the co-crosslinking agent (crosslinking aid) constituting the specific rubber compound include triallyl isocyanurate (TAIC), triallyl isocyanurate prepolymer (TAIC prepolymer), trimethallyl isocyanurate (TMAIC), triary Examples thereof include lucyanurate, triallyl trimellylate, N, N′-m-phenylene dimaleimide, and trimethylolpropane trimethacrylate. Of these, triallyl isocyanurate is preferred.

  As a compounding quantity of a co-crosslinking agent, it is 0.5-1.5 mass parts normally with respect to 100 mass parts of fluororubber, Preferably it is 0.5-1.2 mass parts, More preferably, it is 0.5- The amount is 1.0 part by mass.

  In a typical blended formulation of a peroxide crosslinking type fluororubber, the blending amount of the co-crosslinking agent is about 3 to 4 parts by mass with respect to 100 parts by mass of the fluororubber. Thus, the compounding amount (0.5 to 1.5 parts by mass) of the co-crosslinking agent in the present invention is considerably smaller than a typical compounding recipe.

When the compounding amount of the co-crosslinking agent is less than 0.5 parts by mass, the physical properties of the obtained adhesive rubber sheet are extremely inferior (see Comparative Example 6 described later).
On the other hand, when this compounding quantity exceeds 1.5 mass parts, the obtained adhesive rubber sheet will not have sufficient adhesive force in a high temperature environment (refer to Comparative Example 7 described later).

The specific rubber compound may contain various optional components as long as the polymer purity requirement described later is satisfied without impairing the object of the present invention.
Examples of such optional components include conductive particles, acid acceptors, fillers, and the like.

The conductive particles constituting the specific rubber blend are blended to impart the desired conductivity (antistatic property) to the adhesive rubber sheet of the present invention.
Examples of the conductive particles include conductive carbon black, graphite, and metal particles. Among these, conductive carbon is used from the viewpoint of forming a rubber sheet that is inexpensive and has good wear resistance. It is preferable to use black.

  The type of conductive carbon black is not particularly limited, but ketjen black and acetylene black are preferable, and ketjen black is particularly preferable from the viewpoint of excellent conductivity imparting performance.

The particle size of the conductive carbon black is preferably 20 to 50 nm, and more preferably 30 to 40 nm.
When the particle size of the conductive carbon black is less than 20 nm, the processability is deteriorated and the adhesive strength of the resulting rubber sheet tends to decrease. On the other hand, when the particle diameter exceeds 50 nm, the conductive carbon black particles may fall off from the rubber sheet, and the resulting rubber sheet may be reduced in adhesive strength.

The specific surface area of conductive carbon black (N ₂ adsorption) varies depending on the type of conductive carbon black used is preferably 40~2000m ² / g, more preferably a 55~1500m ² / g Is done.
Conductive carbon black particles having a specific surface area (N ₂ adsorption amount) of less than 40 m ² / g have an excessively large particle size and may fall off the rubber sheet, and the adhesive strength of the resulting rubber sheet Cause a decline. On the other hand, the conductive carbon black particles having a specific surface area exceeding 2000 m ² / g have an excessively small particle size, resulting in a decrease in processability and a decrease in the adhesive strength of the resulting rubber sheet.

As a compounding quantity of electroconductive carbon black, it is preferable that it is 0.5-10 mass parts with respect to 100 mass parts of fluororubber, More preferably, it is 5-10 mass parts.
When the amount of conductive carbon black is too small, sufficient conductivity (antistatic properties) cannot be imparted to the resulting rubber sheet. On the other hand, when the compounding amount of the conductive carbon black is excessive, the processability of the rubber compound is lowered and the adhesive force of the resulting adhesive rubber sheet is lowered.

Examples of the acid acceptor constituting the specific rubber compound as an optional component include zinc oxide, calcium hydroxide, and magnesium oxide.
Moreover, insulating carbon black can be illustrated as a filler which comprises a specific rubber compound as an arbitrary component.

The polymer purity of the specific rubber compound is usually 85.0% by mass or more, preferably 90.0% by mass or more.
Here, “polymer purity” refers to the mass proportion of fluororubber in the rubber compound.
When the polymer purity is less than 85.0% by mass, the resulting adhesive rubber sheet does not have sufficient adhesive strength in a high temperature environment.

The pressure-sensitive adhesive rubber sheet of the present invention can be obtained by molding a specific rubber compound.
Here, “molding” refers to forming into a predetermined shape (sheet shape) and causing a cross-linking reaction of fluororubber (crosslinking the compound).

  Examples of a method for forming a specific rubber compound into a sheet include a method using a calendar or an extruder.

  Examples of the crosslinking method for the uncrosslinked rubber sheet include a crosslinking method using a vulcanizing can, a continuous crosslinking method such as heated drum press vulcanization (roto cure), and a crosslinking method using a mold. As crosslinking conditions (heating conditions), the primary heating is 150 to 200 ° C. for 5 to 20 minutes, and the secondary heating is 180 to 250 ° C. for 2 to 6 hours.

In addition, when the obtained adhesive rubber sheet is not used immediately but stored or shipped as a product, it is preferable to attach a release sheet (release film) on both sides.
The pressure-sensitive adhesive rubber sheet of the present invention is commercialized in a roll or sheet state, and can be appropriately cut according to the shape of the support board.

  The thickness of the adhesive rubber sheet of the present invention is preferably 0.05 to 1 mm, more preferably 0.1 to 0.5 mm.

  The hardness (JIS-A hardness) of the pressure-sensitive adhesive rubber sheet of the present invention is preferably 40 or more (60 or more if it is obtained by blending conductive carbon black). Moreover, it is preferable that the tensile strength of the adhesive rubber sheet of this invention is 3.0 MPa or more (in the case of what is obtained by mix | blending conductive carbon black, it is 6.0 MPa or more). The tensile strength of the pressure-sensitive adhesive rubber sheet of the present invention is a cross-linked rubber sheet (completely cross-linked rubber sheet. For example, a pressure-sensitive rubber sheet according to Comparative Example 3 to be described later). However, even such a tensile strength is sufficient for the use of the present invention (a component part of the substrate transport jig).

The adhesive rubber sheet of the present invention does not contain an adhesive resin (viscous material) as an essential component unlike a sheet made of a rubber adhesive.
The adhesive rubber sheet of the present invention has a slight adhesive force inherent to rubber (adhesive force sufficient to fix a substrate and a support board although it is smaller than the adhesive force expressed by a rubber adhesive). Yes.

The adhesive strength of the adhesive rubber sheet of the present invention preferably has adhesive strength to a stainless steel which is measured at room temperature is 5.0gf / mm ² or more, more preferably 7.0gf / mm ² or more, particularly preferably 7 0.0-20.0 gf / mm ² . When the adhesive strength is 5.0 gf / mm ² or more, the substrate to be transported can be securely adhered and fixed in a room temperature environment.

The pressure-sensitive adhesive strength of the pressure-sensitive adhesive rubber sheet of the present invention is preferably 3.0 gf / mm ² or more, more preferably 3.5 gf with respect to stainless steel measured at a temperature of 200 ° C. / Mm ² or more. When the adhesive strength is 3.0 gf / mm ² or more, the adhesive rubber sheet securely holds and holds the substrate in the solder reflow process performed using the substrate transport jig provided with the adhesive rubber sheet. At the same time, the adhesive rubber sheet is not peeled off from the support board.

Here, “adhesive strength to stainless steel” is an index value of the adhesive strength of the adhesive rubber sheet, and a stainless steel pin having a diameter = 5.1 mm (20.4 mm ² ) is brought into contact with the test piece (adhesive rubber sheet). The force (force per unit area) generated when a load of 50 gf is applied for 3 seconds and then separated at a speed of 120 mm / min is defined as an adhesive force.

The surface resistance of the adhesive rubber sheet of the present invention obtained by blending conductive carbon black is preferably 10 ⁸ Ω or less, more preferably 10 ⁶ Ω or less, and particularly preferably 10 ³ Ω or less.
Adhesive rubber sheets with a surface resistance of 10 ⁸ Ω or less are less likely to be charged and reliably prevent dirt and dust in the environment from adhering to the substrate and causing electrostatic damage to electronic components. be able to.
In the present invention, “surface resistance” is a surface resistance measured by a double ring electrode method according to JIS K 6271.

  The adhesive rubber sheet of the present invention is a fluororubber-based elastomer sheet that is inferior in adhesiveness in a high temperature environment, but has a high adhesive force in a high temperature environment, and a substrate provided with the adhesive rubber sheet In the solder reflow process performed using the conveying jig, the substrate can be securely fixed and held, and is not peeled off from the support board.

<Board transfer jig>
The adhesive rubber sheet of the present invention constitutes a substrate transport jig by being fixed (laminated) on a support board.

FIG. 1 (A) is a plan view showing an embodiment of a support board for fixing the adhesive rubber sheet of the present invention, and FIG. 1 (B) is a sectional view taken along line XX in FIG. 1 (A).
As shown in FIG. 1, when laminating an adhesive rubber sheet on the support board 20, suction air for sucking air between the support board 20 and the adhesive rubber sheet to improve the adhesion between them. Through holes 25 (five places) and through holes 22 (four places) for alignment for mounting the substrate transport jig at predetermined positions of the mounting apparatus are formed. The thickness of the support board 20 is about 0.3 to 5 mm.

FIG. 2A is a plan view showing an embodiment of the substrate transport jig of the present invention provided with the support board shown in FIG. 1, and FIG. It is Y sectional drawing.
By sticking the adhesive rubber sheet 10 on the support board 20, a substrate transport jig 50 (a substrate transport jig of the present invention) as shown in FIG. 2 is obtained.
As a method for bonding the adhesive rubber sheet 10, a method in which the adhesive rubber sheet 10 is placed on the support board 20 and then pressure-bonded with a roller or the like, a method in which press-pressure bonding is performed while sucking air from the suction through-hole 25, etc. Can be mentioned.

  Here, the bonding (fixing) of the support board 20 and the adhesive rubber sheet 10 uses the adhesive strength of the adhesive rubber sheet 10, and therefore there is no need to use an adhesive / adhesive. For this reason, the board | substrate conveyance jig | tool 50 can be manufactured easily.

  As shown in FIG. 2, a through hole 24 for positioning the FPC board is formed in the board transport jig 50. The through hole 24 can be formed using a drill or the like after the support board 20 and the adhesive rubber sheet 10 are bonded together.

<Usage of substrate transfer jig>
FIG. 3 is a cross-sectional view showing a usage state of the substrate carrying jig shown in FIG.
As shown in FIG. 3, the FPC substrate 70 to be conveyed is adhesively fixed to the surface of the adhesive rubber sheet 10 constituting the substrate conveying jig 50.
The FPC board 70 is fixed as follows. That is, the FPC board 70 is aligned by inserting the pin 42 so that the through hole 73 formed in the FPC board 70 and the through hole 24 formed in the board conveying jig 50 are aligned. The FPC board 70 is fixed by the adhesive force of the adhesive rubber sheet 10.

Further, the substrate transport jig 50 to which the FPC substrate is adhesively fixed is fixed at a predetermined position (mounting portion 61) of the mounting apparatus 60.
The substrate transport jig 50 is fixed as follows. In other words, the substrate transport jig 50 is placed so that the through hole 22 formed in the support board 20 constituting the substrate transport jig 50 and the hole 62 formed in the placement portion 61 of the mounting apparatus 60 coincide. It is placed on the part 61 and fixed by inserting the pin 41 into the through hole 22 and the hole 62.

  Hereinafter, although an example and a comparative example explain the present invention, the present invention is not limited by these.

<Example 1>
In accordance with the formulation shown in 1 below, 100 parts by mass of a fluororubber “Viton (registered trademark) GLT-200S” (manufactured by DuPont Elastomer Co., Ltd.) composed of a VDF / PAVE / TFE copolymer, and 2,5-dimethyl-2 , 5-bis (t-butylperoxy) hexane-containing crosslinking agent “Perhexa (registered trademark) 25B-40” (manufactured by NOF Corporation, purity = 40%) 1.0 part by mass (organic peroxide) 0.4 parts by mass), 0.5 parts by mass of a co-crosslinking agent (manufactured by Nippon Kasei Co., Ltd.) consisting of triallyl isocyanurate (TAIC), and ketjen black (average particle size = 34 nm, specific surface area (N ₂ adsorption) = 1270 m ² /G)5.0 parts by weight and the particular rubber formulation by blending and kneading (polymer purity = 93.9 wt%) was prepared, which thickness seating by the calendar of 0 To produce a 50mm non-crosslinked rubber sheet. The obtained uncrosslinked rubber sheet was crosslinked by using a mold having a mirror-finished mold surface under conditions of 170 ° C. × 10 minutes (primary) and 200 ° C. × 4 hours (secondary). An adhesive rubber sheet having a thickness of 0.50 mm (adhesive rubber sheet of the present invention) was produced.

<Examples 2 to 4>
In accordance with the formulation shown in Table 1 below, a specific rubber was prepared in the same manner as in Example 1 except that the compounding amount of at least one of the crosslinking agent “Perhexa (registered trademark) 25B-40” and the co-crosslinking agent (TAIC) was changed. An uncrosslinked rubber sheet is prepared by preparing a blend, and each of the resulting rubber blends is sheeted, and this is subjected to a crosslinking treatment, whereby a 0.50 mm thick adhesive rubber sheet (the adhesive rubber sheet of the present invention) ) Was manufactured.

<Example 5>
In accordance with the prescription shown in Table 1 below, instead of “Viton (registered trademark) GLT-200S”, a fluoro rubber “Viton (registered trademark) GBL-200S” (DuPont Elastomer Co., Ltd.) made of a VDF / HFP / TFE copolymer ) Made) A specific rubber compound was prepared in the same manner as in Example 1 except that 100 parts by mass was used, and this was sheeted to produce an uncrosslinked rubber sheet. An adhesive rubber sheet having a thickness of 0.50 mm (adhesive rubber sheet of the present invention) was produced.

<Example 6>
According to the formulation shown in Table 1 below, a specific rubber compound was prepared in the same manner as in Example 1 except that 3.0 parts by mass of calcium hydroxide and 3.0 parts by mass of zinc oxide were compounded. Thus, an uncrosslinked rubber sheet was prepared, and this was subjected to a crosslinking treatment to produce a 0.50 mm thick adhesive rubber sheet (adhesive rubber sheet of the present invention).

<Example 7>
According to the formulation shown in Table 1 below, a specific rubber compound was prepared in the same manner as in Example 1 except that ketjen black was not used, and this was sheeted to produce an uncrosslinked rubber sheet. By performing the crosslinking treatment, an adhesive rubber sheet having a thickness of 0.50 mm (adhesive rubber sheet of the present invention) was produced.

About each of the adhesive rubber sheet of this invention obtained in Examples 1-7, tensile strength (Tb), elongation (Eb), hardness (JIS-A), surface resistance (according to JIS K 6271), against SUS pin The adhesive strength (adhesive area = 20.4 mm ² , applied load = 50 gf × 3 seconds, peel rate = 120 mm / min, measurement temperature: 25 ° C. and 200 ° C.) was measured. The results are also shown in Table 1 below.

<Comparative Example 1>
In accordance with the formulation shown in Table 2 below, the amount of the crosslinking agent “Perhexa (registered trademark) 25B-40” was changed to 0.3 parts by mass (0.12 parts by mass as an organic peroxide), and a co-crosslinking agent (TAIC A rubber compound was prepared in the same manner as in Example 1 except that the compounding amount was changed to 0.3 parts by mass and sheeted to prepare an uncrosslinked rubber sheet. The obtained uncrosslinked rubber sheet was subjected to a crosslinking treatment under the same conditions as in Example 1, but a crosslinked rubber sheet (elastic body) could not be obtained. This comparative example is a comparative example in which the blending amounts of the organic peroxide and the co-crosslinking agent are outside the scope of the present invention (too little).

<Comparative Examples 2-3>
According to the formulation shown in Table 2 below, a rubber compound was prepared in the same manner as in Example 1 except that the compounding amounts of the crosslinking agent “Perhexa (registered trademark) 25B-40” and the co-crosslinking agent (TAIC) were changed. Each of the obtained rubber blends was sheeted to prepare an uncrosslinked rubber sheet, and this was subjected to a crosslinking treatment to produce a 0.50 mm thick adhesive rubber sheet (comparative adhesive rubber sheet). These comparative examples are comparative examples in which the blending amounts of the organic peroxide and the co-crosslinking agent are outside (excessive) the scope of the present invention.

<Comparative example 4>
Example 1 except that the amount of the crosslinking agent “Perhexa (registered trademark) 25B-40” was changed to 0.3 parts by mass (0.12 parts by mass as an organic peroxide) according to the formulation shown in Table 2 below. Similarly, a rubber compound was prepared and sheeted to produce an uncrosslinked rubber sheet. The obtained uncrosslinked rubber sheet was subjected to a crosslinking treatment under the same conditions as in Example 1, but a crosslinked rubber sheet (elastic body) could not be obtained. This comparative example is a comparative example in which the compounding amount of the organic peroxide is out of the range of the present invention (too little).

<Comparative Example 5>
Example 1 except that the amount of the crosslinking agent “Perhexa (registered trademark) 25B-40” was changed to 2.0 parts by mass (0.8 parts by mass as an organic peroxide) according to the formulation shown in Table 2 below. In the same manner, a rubber compound is prepared, and this is sheeted to produce an uncrosslinked rubber sheet, which is then crosslinked to produce an adhesive rubber sheet having a thickness of 0.50 mm (comparative adhesive rubber sheet). did. This comparative example is a comparative example in which the blending amount of the organic peroxide is outside (excess) the range of the present invention.

<Comparative Examples 6-7>
A rubber compound was prepared in the same manner as in Example 1 except that the compounding amount of the co-crosslinking agent (TAIC) was changed according to the formulation shown in Table 2 below, and each of the resulting rubber compounds was seated and uncrosslinked. A rubber sheet was prepared, and this was subjected to a crosslinking treatment to produce a 0.50 mm thick adhesive rubber sheet (comparative adhesive rubber sheet). These comparative examples are comparative examples in which the amount of the co-crosslinking agent is out of the range of the present invention (comparative example 6 is too small and comparative example 7 is excessive).

<Comparative Example 8>
A rubber compound was prepared in the same manner as Comparative Example 2 except that the amount of ketjen black was changed to 10.0 parts by mass according to the formulation shown in Table 2 below, and this was sheeted to produce an uncrosslinked rubber sheet. This was subjected to a crosslinking treatment to produce a 0.50 mm thick adhesive rubber sheet (comparative adhesive rubber sheet). This comparative example is a comparative example in which the blending amount of the organic peroxide and the co-crosslinking agent is outside (excess) the range of the present invention.

<Reference example>
A substrate transport jig “Magi Carey” (manufactured by Kyosei Co., Ltd.) in which a silicone-based adhesive resin layer was laminated on a support board was prepared.

For each of the comparative adhesive rubber sheets obtained in Comparative Examples 2-3 and Comparative Examples 5-8, tensile strength (Tb), elongation (Eb), hardness (JIS-A), surface resistance (in accordance with JIS K 6271) Conformity), and adhesion to the SUS pin (adhesion area = 20.4 mm ² , applied load = 50 gf × 3 seconds, peel rate = 120 mm / min, measurement temperature: 25 ° C. and 200 ° C.).
Moreover, about the adhesive resin layer of the board | substrate conveyance jig prepared by the reference example, the adhesive force (measurement temperature: 25 degreeC and 200 degreeC) with respect to a SUS pin was measured. The results are also shown in Table 2 below.

* 1) “GLT-200S”:
Fluoro rubber “Viton (registered trademark) GLT-200S” (manufactured by DuPont Elastomer Co., Ltd.) made of VDF / PAVE (PMVE: perfluoromethyl vinyl ether) / TFE copolymer.
* 2) “GBL-200S”:
Fluoro rubber “Viton (registered trademark) GBL-200S” (manufactured by DuPont Elastomer Co., Ltd.) made of a VDF / HFP / TFE copolymer.
* 3) “25B-40”:
Cross-linking agent containing 2,5-dimethyl-2,5-bis (t-butylperoxy) hexane “Perhexa (registered trademark) 25B-40” (manufactured by NOF Corporation, purity = 40%)
* 4) “TAIC”:
Co-crosslinking agent consisting of triallyl isocyanurate (Nippon Kasei Co., Ltd.)
* 5) “Ketjen Black”:
Conductive carbon black (Ketjen Black International Co., Ltd., average particle size = 34 nm, specific surface area (N ₂ adsorption amount) = 1270 m ² / g)
* 6) Substrate transport jig “Majikary” (manufactured by Kyosha Co., Ltd.)

(A) is a top view which shows one Embodiment of the support board to which the adhesive rubber sheet of this invention is fixed, (B) is XX sectional drawing of the figure (A). (A) is a top view which shows one Embodiment of the board | substrate conveyance jig of this invention, (B) is YY sectional drawing of the figure (A). It is sectional drawing which shows the use condition of the board | substrate conveyance jig shown in FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Adhesive rubber sheet 20 Support board 22 Through-hole for alignment 25 Through-hole for suction 24 Through-hole for alignment 41 Pin 42 Pin 50 Substrate conveying jig 60 Mounting device 61 Mounting portion 62 Hole 70 FPC board 73 Through Hole

Claims (10)

An adhesive rubber sheet that is fixed on a support board and constitutes a substrate transfer jig,
100 parts by mass of fluororubber,
0.2 to 0.6 parts by mass of organic peroxide,
A pressure-sensitive adhesive rubber sheet for a substrate transporting jig obtained by molding a rubber compound containing 0.5 to 1.5 parts by mass of a co-crosslinking agent and having a polymer purity of 85.0% by mass or more. An adhesive rubber sheet that is fixed on a support board and constitutes a substrate transfer jig,
100 parts by mass of fluororubber,
0.2 to 0.5 parts by mass of organic peroxide,
A pressure-sensitive adhesive rubber sheet for a substrate transporting jig obtained by molding a rubber compound containing 0.5 to 1.2 parts by mass of a co-crosslinking agent and having a polymer purity of 90.0% by mass or more.   The substrate according to claim 1 or 2, wherein the organic peroxide is 2,5-dimethyl-2,5-bis (t-butylperoxy) hexane, and the co-crosslinking agent is triallyl isocyanurate. Adhesive rubber sheet for conveying jigs.   The pressure-sensitive adhesive rubber sheet for a substrate carrying jig according to any one of claims 1 to 3, wherein the fluororubber comprises a copolymer having a side chain.   The pressure-sensitive adhesive rubber sheet for a substrate carrying jig according to claim 4, wherein the fluororubber comprises a vinylidene fluoride / perfluoroalkyl vinyl ether / tetrafluoroethylene copolymer.   The pressure-sensitive adhesive rubber sheet for a substrate carrying jig according to claim 4, wherein the fluororubber comprises a vinylidene fluoride / hexafluoropropylene / tetrafluoroethylene copolymer.   The pressure-sensitive adhesive rubber sheet for a substrate transport jig according to any one of claims 1 to 6, wherein the rubber compound contains 0.5 to 10 parts by mass of conductive carbon black.   The pressure-sensitive adhesive rubber sheet for a substrate transport jig according to claim 7, wherein the conductive carbon black is ketjen black. The pressure-sensitive adhesive rubber sheet for a substrate carrying jig according to claim 7 or ^{8, wherein the} surface resistance is 10 ⁸ Ω or less.   A substrate transport jig formed by laminating a heat-resistant support board and the adhesive rubber sheet according to any one of claims 1 to 9.

Images