JP2009164080A - Lamp lighting-up device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a lamp lighting-up device capable of restraining main discharge current flowing inside an arc tube from flowing in an inner wall or its vicinity of the arc tube and preventing shading caused by a white-clouded state of the arc tube and its breakage. <P>SOLUTION: Simmer electric discharge is generated by applying voltage to a trigger member 3 arranged at a lower side in relation to the gravity direction of the arc tube of the flash lamp 2 while voltage is applied to a capacitor C1. The simmer electric discharge is generated by the trigger member 3 at a lower side in relation to the gravity direction, and it is moved to an upper part of the arc tube caused by a heat convection current inside the arc tube with progress of time. When the moving simmer electric discharge passes by a tube axis or its vicinity of the arc tube, a switching element 51 becomes conductive, and a resistor R1 connected with the flash lamp 2 in series is short-circuited. Thus, energy accumulated in the capacitor C1 is immediately supplied to the flash lamp 2, and the main discharge current flows between electrodes. Consequently, flow of the main discharge current is restrained on the inner wall or its vicinity of the arc tube. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a lamp lighting device used in an annealing device or the like used for semiconductor manufacturing or thin film transistor manufacturing.

In semiconductor manufacturing and thin film transistor manufacturing, an annealing apparatus having a lamp unit having a flash lamp is used. For example, in the step of forming a shallow diffusion layer (pn junction) on the surface layer of a silicon wafer (activation of an ion-implanted impurity), the lamp annealing apparatus is used.
In the above-described annealing process, it is necessary to avoid problems such as the profile loss of the ion-implanted impurity and volatilization of the formed pattern, and to obtain a good activated state of the impurity.
Also in manufacturing a thin film transistor for a liquid crystal display panel, it is necessary to reliably and uniformly activate a semiconductor film formed on a substrate. In particular, in the case of using a glass substrate, it is necessary to prevent the substrate from being excessively heated and to suppress the expansion and contraction and “warping” while achieving the annealing treatment.
A flash lamp and a trigger member provided in such an annealing apparatus are described in Patent Document 1, for example.

FIG. 7 is an explanatory diagram of the flash lamp 2 and the trigger member 3 described in Patent Document 1. 7A is a cross-sectional view along the longitudinal direction of the flash lamp 2, and FIG. 7B is a cross-sectional view along the vertical direction of the flash lamp 2 (B in FIG. 7A). -B sectional view).
In the flash lamp 2, a light emitting gas made of, for example, xenon (Xe) gas is sealed in a sealed interior 26 of a rod-like light emitting tube 25 made of, for example, quartz glass. Further, a pair of electrodes 23 and 24 connected to the rod-shaped leads 21 and 22 are disposed opposite to each other in the interior 26 of the rod-shaped arc tube 25 so as to extend to the central axis thereof. The leads 21 and 22 connected to the electrodes 23 and 24 protrude from both ends in the longitudinal direction of the arc tube 25.
On the outer surface of the arc tube 25 of the flash lamp 2, for example, a rod-shaped conductor 34 made of stainless steel is disposed as a trigger member 3 along the longitudinal direction of the arc tube 25. Bands 4 for fixing the conductor 34 to the flash lamp 2 are provided at both ends of the rod-shaped conductor 34 so as to be wound around the outer peripheral surface of the arc tube 25.

FIG. 8 is a circuit configuration example of the lamp lighting device 1 for lighting the flash lamp 2 of FIG.
A capacitor C is connected between the high voltage side and the low voltage side of the power supply, and an inductance L is connected to a terminal of the capacitor C connected to the high voltage side of the power supply. One electrode of the flash lamp 2 is connected to the inductance L, and the other electrode of the flash lamp 2 is connected to a terminal of a capacitor C connected to the low voltage side of the power source. The trigger member 3 is connected to the secondary side of the trigger coil 7, and the trigger circuit 54 is connected to the primary side of the trigger coil 7.

FIG. 9 is a timing chart showing the operation of the lamp lighting device 1 shown in FIG. 8, and shows the operation when the lamp is lit by an ON signal from the trigger circuit 54.
The capacitor C stores desired energy by applying a desired voltage until the lamp is lit (T3).
When the lamp is lit (T3), a trigger signal is transmitted from the trigger circuit 54.
A voltage is applied to the primary side of the trigger coil 7 by the trigger signal, a high voltage of several kilovolts is induced in the secondary side coil, and this is applied to the conductor of the trigger member 3 connected to the secondary side coil. A high voltage is applied.
Thereby, a dielectric breakdown occurs between the pair of electrodes 23 and 24 connected to the capacitor C and the trigger member 3 to which a high voltage is applied, and the energy stored in the capacitor C is transferred between the pair of electrodes 23 and 24. Immediately input as main discharge current.
When the flash lamp 2 is turned on in this way, a very high main discharge current is input in a short time (short pulse width), and a flash lamp lighting state is obtained in which radiant light having extremely high radiance is obtained.
JP 2001-185088 A

In the flash lamp 2 having the trigger member 3 described above, since the dielectric breakdown occurs between the pair of electrodes 23 and 24 and the trigger member 3 when starting the lamp by applying a voltage between the electrodes 23 and 24, the arc tube 25 In the interior 26, the main discharge current is supplied at or near the inner wall of the arc tube 25 offset from the central axis of the arc tube 25 toward the trigger member 3 side. FIG. 10 schematically shows a state in which the main discharge current flows toward the trigger member 3 side.
As a recent request, for example, in the step of forming a shallow diffusion layer (pn junction) on the surface layer of a silicon wafer (activation of an ion-implanted impurity), it is desired to form a shallower portion of the diffusion layer formed on the surface layer of the silicon wafer. there were. For that purpose, it is conceivable that the flash pulse width of the flash lamp 2 is made shorter than that of the conventional one, for example, the layer to be heated on the surface layer of the silicon wafer is heated only at a position shallower than the conventional one.

Conventionally, irradiation energy of 20 J / cm ² with a pulse width of 1 ms, for example, has been applied to the flash lamp. At this time, it is estimated that the silicon wafer was heated to 800 ° C. or higher.
In order to shorten the pulse width and heat the silicon wafer, which is a recent request, when the pulse width is 0.1 ms by reducing the capacitor capacity, the irradiation energy from the flash lamp is 7 J / cm ² or more. It is necessary to become.
However, in order to meet the recent demand, the main discharge current of 4 KA or more flows between the electrodes in order to make the irradiation energy of the flash lamp 7 J / cm ² or more.
This is a very high current compared to the conventional discharge current of ² KA when the pulse width is 1 ms and the irradiation energy is 20 J / cm ² .
As shown in FIG. 10, the main discharge current flows on or near the inner wall of the arc tube 25 offset from the central axis of the arc tube 25 toward the trigger member 3, and the arc tube 25 is exposed to the main discharge current. Therefore, it has been heated to a very high temperature than before.

When the arc tube 25 is made of, for example, quartz glass, it is heated by repeatedly lighting the lamp, and white turbidity in which the quartz glass is crystallized occurs. If the quartz glass becomes clouded, the emitted light from the flash lamp 2 is shielded, and the arc tube 25 is damaged due to the cloudiness.
With a main discharge current of ² KA with a conventional pulse width of 1 ms and an irradiation energy of 20 J / cm ² , white turbidity of the arc tube 25 has occurred after tens of thousands of times. When the main discharge current is 4 KA with an energy of 7 J / cm ² , the arc tube 25 becomes clouded several hundred times, and cannot be put to practical use in a conventional lamp lighting device.
This invention is made | formed in view of the said situation, Comprising: The objective of this invention is suppressing that the main discharge current which flows into the inside of an arc_tube | light_emitting_tube flows on the inner wall of an arc_tube | light_emitting_tube, or its vicinity.

In a flash lamp lighting device, when a voltage is applied to a capacitor connected to a pair of electrodes and a voltage is applied to the trigger member by a first signal transmitted from the drive circuit, the electrodes are insulated from each other. Destroyed. Here, when a resistor is connected in series with the electrode of the flash lamp, the input of energy stored in the capacitor is limited, and this limited current (preliminary current) is discharged between the electrodes. This weak current discharge due to the limiting current is called simmer discharge.
In the present invention, the trigger member is provided on the lower side in the gravity direction of the arc tube, and the simmer discharge is generated on the lower side in the direction of gravity inside the arc tube by the trigger member. The simmer discharge moves upward with the passage of time due to thermal convection inside the arc tube, but the moving simmer discharge passes through the tube axis of the arc tube or the vicinity thereof after a predetermined time. . At that time, a second signal for transmitting the switching element connected in parallel to the resistor is transmitted.
As a result, the energy stored in the capacitor is released from the restriction by the resistance, and immediately put into the flash lamp, and the main discharge current flows between the electrodes. That is, since the main discharge current can be generated at or near the tube axis of the arc tube, it is possible to suppress the main discharge current from flowing on the inner wall of the arc tube or the vicinity thereof, and to prevent the arc tube from being shaded or damaged by cloudiness. it can.
Further, in the above, the trigger member is provided in a range of 0 ° ± 45 ° on the cross section perpendicular to the tube axis direction of the arc tube, with reference to the gravity direction line drawn from the tube axis of the arc tube. . As a result, the main discharge current can surely flow at or near the tube axis of the arc tube.

In the present invention, the following effects can be obtained.
(1) A trigger member is provided on the lower side in the gravity direction of the arc tube, and a simmer discharge is generated on the lower side in the direction of gravity inside the arc tube, and when the simmer discharge passes through or near the tube axis of the arc tube, Since it is made conductive, the resistor connected in series with the electrode of the flash lamp is short-circuited, and the energy stored in the capacitor is input to the flash lamp, so that the main discharge current is generated at or near the tube axis of the arc tube. be able to.
For this reason, it is possible to suppress the main discharge current from flowing on the inner wall of the arc tube or in the vicinity thereof, and even when the main discharge current increases, it is possible to prevent the arc tube from being shielded or damaged due to cloudiness.
(2) By providing the trigger member within a range of 0 ° ± 45 ° with respect to the gravity direction line drawn from the tube axis of the arc tube on the cross section orthogonal to the tube axis direction of the arc tube, It becomes possible to flow the discharge current reliably at or near the tube axis of the arc tube.

FIG. 1 is a diagram showing a configuration example of a lamp lighting device according to an embodiment of the present invention, FIG. 2 is an explanatory diagram of a flash lamp provided in the lamp lighting device according to the present invention, and FIG. 2B is a sectional view taken along the direction perpendicular to the tube axis direction of the arc tube (AA sectional view of FIG. 2A), and FIG. b) shows a range in which the trigger member is provided. 1 and 2, the same components as those shown in FIGS. 7 and 8 are denoted by the same reference numerals.
In FIG. 1, the lamp lighting device of the present embodiment includes a flash lamp 2, a trigger member 3 provided outside the arc tube of the flash lamp 2, and a lamp lighting circuit 11 connected to a pair of electrodes of the flash lamp 2. A trigger circuit 12 for applying a voltage to the trigger member 3, and a timer circuit 6 for transmitting a signal for starting the application of voltage to the trigger member 3 and for transmitting a signal for starting the main discharge of the flash lamp 2 after a predetermined time has elapsed. And consist of

The lamp lighting circuit 11 includes a capacitor C1 connected to the high voltage side and the low voltage side of the power supply, an inductance L1 connected to the high voltage side of the power supply and the high voltage side terminal of the capacitor C1, and one connected to the inductance L1. A first switching element 51 composed of a thyristor SCR1 or the like having an anode connected to the other electrode and a cathode connected between the capacitor C1 and the low-voltage side of the power source, and the switching element 51 are connected in parallel. The resistor R1 and the low-voltage side terminal of the capacitor C1 and the low-voltage side of the power source are grounded.
The trigger circuit 12 includes a resistor R2 connected in series to the high voltage side of the power source, a thyristor SCR2 having an anode side connected to the resistor R2 and a cathode side connected to the low voltage side of the power source, and the like. And a capacitor C2 having one terminal connected to the resistor R2 and the anode side of the switching element 52, and a trigger coil 7 having a primary coil L21 connected in series to the other terminal of the capacitor C2. Thus, the secondary coil L22 of the trigger coil 7 is connected to the trigger member 3.
The timer circuit 6 is configured by using, for example, a semiconductor, and the first signal line a that transmits the first signal is connected to the gate of the second switching element 52 of the trigger circuit 12 to transmit the first signal. A second signal line b that transmits a second signal when a predetermined time has passed later is connected to the gate of the first switching element 51 of the lamp lighting circuit 11.

In the flash lamp 2, as shown in FIG. 2A, a rare gas made of, for example, xenon (Xe) gas is sealed as a luminescent gas in a sealed interior 26 of a rod-like light emitting tube 25 made of, for example, quartz glass. Is.
A pair of electrodes (anode 23 and cathode 24) connected to the rod-shaped leads 21 and 22 so as to extend in the central axis thereof are disposed in the interior 26 of the rod-shaped arc tube 25 so as to face each other. The rod-shaped leads 21 and 22 connected to each electrode (the anode 23 and the cathode 24) protrude from both ends in the longitudinal direction of the arc tube 25.
The leads 21 and 22 are made of, for example, tungsten (W). The anode 23 provided at the tip of one lead 21 is made of, for example, tungsten (W), and the cathode 24 provided at the tip of the other lead 22 contains, for example, barium aluminate (BaAl ₂ O ₃ ). Formed of tungsten (W).

As shown in FIG. 2A, the trigger member 3 is provided on the outer surface of the straight tubular arc tube 25 in parallel with the arc tube 25 on the lower side in the gravity direction. The longitudinal direction of the trigger member 3 is provided such that the length L1 between the opposing electrodes L1 in the interior 26 of the arc tube 25 is connected by the outer surface of the arc tube 25. Bands (not shown) are provided at both ends of the trigger member 3 and are fixed to the outer surface of the arc tube 25.
The trigger member 3 can be a rod-shaped conductor 34 made of, for example, tungsten. Further, the trigger member 3 is not limited to a conductive member such as a metal rod, and can supply electric charge from the trigger member 3 to the arc tube 25 when a voltage is applied to the trigger member 3. For example, the trigger member 3 may be a trigger member 3 in which a metal rod is disposed inside a tubular quartz glass having dielectric properties.

FIG. 2B shows a preferable range as the range of the outer surface on the lower side in the gravity direction of the arc tube 25 provided with the trigger member 3.
On the outer surface of the arc tube 25, 0 ° ± with respect to the gravity direction line drawn from the tube axis of the arc tube 25 (perpendicular line shown by a dotted line extending downward from the tube axis of the arc tube 25 in FIG. 2B). The trigger member 3 is preferably provided in a range of 45 ° (in FIG. 2B, two dotted lines extending obliquely downward in the drawing at 45 ° from the tube axis of the arc tube 25).

Here, numerical examples of the flash lamp 2 provided in the lamp lighting device according to the present invention will be given below.
The total length L2 in the longitudinal direction of the arc tube 25 is 580 mm, and the distance L1 between the electrodes 23 and 24 is 500 mm. The outer diameter L3 of the arc tube 25 is 13 mm, the inner diameter L4 of the arc tube 25 is 10.5 mm, and the xenon (Xe) gas sealed in the interior 26 of the arc tube 25 is 450 Torr.
The conductor 34 which is the trigger member 3 provided in the lamp lighting device according to the present invention has a total length L5 in the longitudinal direction on the outer surface of the arc tube 25 of 540 mm and an outer diameter of 1 mm.

FIG. 3 is a timing chart showing the relationship between the operation of the lamp lighting device by the first signal and the second signal from the timer circuit 6 in the lamp lighting device according to the present invention shown in FIG. FIG. 4 shows the state of discharge inside the arc tube of the flash lamp provided in the lamp lighting device according to the present invention. The flash lamp shown in FIGS. 4A to 4C shows a cross-sectional view along the tube axis of the arc tube and a cross-sectional view along the direction perpendicular to the tube axis of the arc tube.
The operation of the lamp lighting device will be described with reference to the timing chart shown in FIG. 3, and the discharge with the flash lamp at each timing will be described with reference to FIG.
Before the DC power supply is started, the switching element 51 of the lamp lighting circuit 11 and the switching element 52 of the trigger circuit 12 are both in a non-conductive state between the anode and the cathode.
When the DC power supply is started in this state, dielectric breakdown does not occur between the electrodes of the flash lamp 2, voltage is applied to the capacitor C1 in the lamp lighting circuit connected to the DC power supply, and energy corresponding to the capacitor capacity of the capacitor C1 is obtained. Stored.
Since the pulse width of the main discharge described later is determined by the capacitor capacity of the capacitor C1 of the lamp lighting device, for example, when trying to obtain a main discharge pulse width of 0.1 ms, the capacitor capacitance of the capacitor C1 of the lamp lighting device Is 200 μF.
Similarly, a voltage is applied to the capacitor C2 in the trigger circuit 12 connected to the DC power source, and energy corresponding to the capacitor capacity of the capacitor C2 is stored.

For example, 10 KV, which is a voltage required for simmer discharge and main discharge described later, is applied to the capacitor C1 of the lamp lighting circuit 11, and energy necessary for dielectric breakdown between the electrodes is stored in the capacitor C2 of the trigger circuit 12.
In this state, the timer circuit 6 transmits a first signal to the first signal line a that connects the gate of the switching element 52 of the trigger circuit 12 (at time T1 in FIG. 3 (i)), and the trigger circuit. The anode and cathode of the switching element 52 are electrically connected.
Thereby, the energy stored in the capacitor C <b> 2 of the trigger circuit 12 immediately flows through the switching element 52. As a result, the voltage on the primary side of the trigger coil 7 connected to the capacitor C2 of the trigger circuit 12 fluctuates, and a voltage fluctuation on the secondary side is induced. The trigger member 3 connected to the secondary side of the trigger coil 7 A voltage is applied.

By applying a voltage to the trigger member 3, dielectric breakdown occurs between the electrodes inside the arc tube of the flash lamp 2 and the trigger member 3 (at time T1 in FIG. 3 (iv)). At this time, since the anode and the cathode of the switching element 51 of the lamp lighting circuit are non-conductive, the current supplied from the capacitor C1 of the lamp lighting device to the flash lamp 2 is limited to the resistor R1 connected to the other electrode. (FIG. 3 (iv)). Due to the limited current limit, a simmer discharge due to a weak limit current occurs between the pair of electrodes and the trigger member 3.
Note that after the voltage is applied to the trigger member 3, the transmission of the first signal from the timer circuit 6 is terminated, and the anode and the cathode of the switching element 52 of the trigger circuit 12 are brought into a non-conductive state again. Energy is stored in the capacitor C2. Thereby, the voltage required for the dielectric breakdown is not applied to the trigger member 3.

When the dielectric breakdown occurs between the pair of electrodes of the flash lamp 2 and the trigger member 3 by the first signal of the timer circuit 6 (at time T1 in FIG. 3), the simmer discharge generated inside the arc tube of the flash lamp 2 Forms a discharge path as shown in FIG. The trigger member 3 is disposed on the outer surface of the arc tube on the gravity direction side. When the simmer discharge is started, the simmer discharge is caused by a dielectric breakdown between the pair of electrodes and the trigger member 3. A discharge path is formed along the trigger member 3 on the lower side in the gravitational direction inside the tube.
The simmer discharge generated in the flash lamp 2 is continuously discharged until a second signal from the timer circuit 6 described later is transmitted. For this reason, the energy stored in the capacitor C1 of the lamp lighting circuit 11 is input to the flash lamp 2 from the time of transmission of the first signal from the timer circuit 6 (time T1 in FIG. 3) (FIG. 3). 3 (iii) and T1 to T2 in FIG. 3 (iv).

As shown in FIG. 4B, during T1 to T2 between the first signal transmission from the timer circuit 6 (at time T1 in FIG. 3) and the second signal transmission (at time T2 in FIG. 3). The simmer discharge in the flash lamp 2 moves upward in the direction of gravity by thermal convection.
The switching circuit 51 of the lamp lighting circuit 11 from the timer circuit 6 after a predetermined time elapses when the simmer discharge moves from the lower side in the gravity direction inside the arc tube to the tube axis of the arc tube, for example, at T2 after 80 ms from T1. A second signal is transmitted to the second signal line b connecting the gates of the first and second gates (at time T2 in FIG. 3 (ii)), and the anode and cathode of the switching element 51 of the lamp lighting circuit 11 are conducted. As a result, all of the energy stored in the capacitor C1 of the lamp lighting circuit 11 is immediately supplied to the flash lamp 2, and an extremely high main discharge current necessary for the main discharge flows between the electrodes (FIGS. 3 (iii) and 3). (at T2 of (iv)).

The main discharge between the pair of electrodes of the flash lamp when the timer circuit 6 sends the second signal (at time T2 in FIG. 3), as shown in FIG. 4C, immediately before the second signal transmission (in FIG. 3). Discharge is performed based on the discharge path of the simmer discharge immediately before T2.
That is, when the second signal is transmitted from the timer circuit 6 when the simmer discharge is located at or near the tube axis of the arc tube, the main discharge of the flash lamp 2 is performed along the tube axis of the arc tube.
Thereby, the lamp lighting device according to the present invention can generate a very high main discharge current at or near the tube axis of the arc tube, and can suppress the main discharge current on the inner wall of the arc tube or in the vicinity thereof. It is possible to prevent light shielding and breakage due to cloudiness of the arc tube.

What time is desirable as the time (T1 to T2) from when the first signal is transmitted to start the simmer discharge until the second signal is transmitted and the main discharge is generated between the electrodes This was confirmed by the following experiment.
As experimental conditions, the arc tube cross-section inner diameter: 10.4 mm, emission length: 500 mm, sealed gas pressure: 450 torr, trigger electrode: SUS304, φ1 mm flash lamp, simmer voltage 10000 V, simmer current 100 mA, trigger voltage 10 kV In this case, the position of the simmer discharge and the residence time were investigated.
FIG. 5 shows the experimental results.
As shown in the figure, after starting the simmer discharge, the position of the simmer discharge is 0 to 2 mm from the bottom of the arc tube at 0 to 40 ms, and 2 to 4 mm from the bottom of the arc tube at 40 to 70 ms. Move to position. Furthermore, in 70 to 110 ms, it moves to a position 4 to 6 mm from the bottom of the arc tube, in 110 to 130 ms, it moves to a position 6 to 8 mm from the bottom of the arc tube, and in 130 ms or more, it is 8 mm or more from the bottom of the arc tube. Move to.
Although the simmer discharge rises while meandering, the range where the simmer discharge does not touch the inner surface of the lamp is considered to be between 40 and 110 ms, as is apparent from FIG.
That is, the meandering due to the simmer discharge increases from the lower side to the upper side in the direction of gravity in the arc tube. For this reason, it is considered that the main discharge is generated when the position of the simmer discharge is in the range of 2 to 6 mm, thereby preventing the main discharge from touching the inner surface of the arc tube.
From this, it is considered that 40 to 110 ms is desirable for the time from the start of the simmer discharge to the start of the main discharge, that is, the above T1 to T2.

The range in which the trigger member 3 is provided was confirmed by the following experiment.
As the experimental conditions, the arc tube cross-section inner diameter: 10.4 mm, emission length: 500 mm, sealed gas pressure: 450 torr, trigger electrode: SUS304, φ1 mm flash lamp, simmer voltage 10000 V, simmer current 100 mA, The trigger voltage is set to 10 kV, and the position where the trigger member (electrode) is provided is changed in the range of 0 to 60 ° with the gravitational direction line drawn from the tube axis on the cross section orthogonal to the tube axis direction of the arc tube as 0 °. I examined the rise of the shimmer.
FIG. 6 shows the experimental results.
As shown in the figure, when the trigger member was provided in the range of 0 ° to 45 °, the simmer discharge moved in the tube axis direction of the arc tube, but the trigger member was provided at a position of 60 °. In some cases, the shimmer discharge moved along the inner wall of the arc tube.
Therefore, the trigger member 3 is provided in a range of 0 ° ± 45 ° on the cross section perpendicular to the tube axis direction of the arc tube, with reference to the gravity direction line drawn from the tube axis of the arc tube. Desirable.
As described above, by setting the trigger member to a range of 0 ° ± 45 °, the main discharge current can be surely flown at the tube axis of the arc tube or the vicinity thereof, and the inner wall of the arc tube or the vicinity thereof Therefore, it is possible to prevent the main discharge current from flowing, and to prevent the arc tube from being shaded or broken by cloudiness.

In the above description, the thyristors SCR1 and SCR2 are described as examples of the first and second switching elements included in the lamp lighting device according to the present invention. However, the switching elements receive signals from the outside. Others can be used as long as they can conduct / non-conduct (on / off).
Specifically, an insulated gate bipolar transistor (IGBT), a bipolar transistor (Bipolar transistor), and a MOSFET (metal-oxide-field-effect transistor) according to the first embodiment of the present invention are used. It can be used as a second switching element.

It is a figure which shows the circuit structure of the lamp lighting apparatus of the Example of this invention. It is explanatory drawing of the lamp unit with which the lamp lighting device which concerns on this invention is provided. It is a timing chart which shows operation | movement of the lamp lighting device which concerns on this invention. It is explanatory drawing which shows the mode of the movement of a simmer discharge in the lamp lighting device which concerns on this invention. It is a figure which shows the experimental result which investigated the relationship between the position of a simmer discharge, and its residence time. It is a figure which shows the experimental result which investigated the relationship between the installation position of a trigger member, and the mode of a raise of a simmer discharge. It is explanatory drawing of the lamp unit with which the lamp lighting device which concerns on the past is equipped. It is a figure which shows an example of the circuit structure of the conventional lamp lighting device. It is a timing chart which shows operation | movement of the conventional lamp lighting device. It is explanatory drawing explaining the lighting state of the flash lamp by the conventional lamp lighting device.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Lamp lighting device 11 Lamp lighting circuit 12 Trigger circuit 2 Flash lamp 21 One lead 22 The other lead 23 One electrode 24 The other electrode 25 Light emitting tube 26 Inside of the light emitting tube 27 Tube axis of the light emitting tube 3 Trigger member 34 Conductor 4 Band 51 First switching element 52 Second switching element 6 Timer circuit 7 Trigger coil 8 Gravitational direction 81 Gravitational direction line L1 Inductance C1 Capacitor R1 Resistance L21 Primary side of trigger coil L22 Secondary side of trigger coil R2 Resistance a First B The second signal line L1 The distance between the electrodes facing the pair of electrodes (anode and cathode) L2 The total length in the longitudinal direction of the arc tube L3 The outer diameter of the arc tube L4 The inner diameter of the arc tube L5 The length of the conductor of the trigger member Total length in direction

Claims (2)

A flash lamp in which a pair of electrodes are provided inside a rod-like arc tube, and the tube axis of the arc tube is disposed horizontally, and a trigger member provided outside the arc tube and along the tube axis And comprising
In a lamp lighting device that applies a voltage to the pair of electrodes and applies a voltage to the trigger member to light the flash lamp,
The trigger member is provided on the lower side in the gravity direction of the arc tube,
A first switching means connected in series to the electrode; and a second switching means for controlling switching of voltage application to the trigger member; a resistor connected in parallel to the first switching means;
A first signal for turning on the second switching means, and a drive for sending a second signal for turning on the first switching means after a predetermined time has passed since the first signal was sent. A lamp lighting device comprising a circuit. A trigger member is provided within a range of 0 ° ± 45 ° with respect to a gravity direction line drawn from the tube axis of the arc tube on a cross section orthogonal to the tube axis direction of the arc tube. The lamp lighting device according to claim 1.

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