JP2009158251A - Arc plasma generating device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an arc plasma generating device capable of irradiating arc plasma excellently on a treating object having at least two-dimensional (planar) expansion. <P>SOLUTION: A plurality of discharge electrodes 31 are installed along emitting ports 20a on both sides in longitudinal direction of the emitting ports 20a so that each top end part 31 may oppositely interpose the emitting port 20a. A multi-phase AC conversion part 52 is constructed of a plurality of single-phase transformers and converts the commercial three-phase AC and outputs a multi-phase AC. When an output voltage from an output terminal corresponding to each discharge electrode 31 is given, discharge is generated excellently between the adjoining discharge electrodes 31 and arc plasma is generated in the chamber 3. Then, the arc plasma generated is pushed out from the emitting port 20a to the outside of the chamber 3 by inert gas from an operating gas supply nozzle 41. Thereby, linear arc plasma extending in a longitudinal direction along the shape of the emitting port 20a can be emitted from the chamber 3. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an arc plasma generator that generates arc plasma emitted to a workpiece.

  2. Description of the Related Art Conventionally, a technique is known in which a DC arc plasma is generated between a plasma torch and an object to be processed, and the object to be processed is heat-treated or melted by the arc plasma (for example, Patent Document 1).

  In addition, a technique for generating a three-dimensional arc plasma by converting a commercial three-phase alternating current into a 12-phase alternating current and connecting the 12-phase alternating current to a corresponding discharge electrode has been conventionally known (for example, patents). Reference 2).

Japanese Patent Application Laid-Open No. 07-2014492 Patent No. 3094217

  Here, at least two-dimensional (planar) such as a semiconductor substrate, a glass substrate for a liquid crystal display device, a glass substrate for a photomask, a substrate for an optical disk, and a plastic substrate for electronic paper (hereinafter simply referred to as “substrate”). As a technique for irradiating arc plasma to the entire surface of the object to be processed (which may have irregularities on the surface), the plasma disclosed in Patent Document 1 is disclosed. A method of scanning the torch on the object to be processed can be considered. In this case, the substantially point-shaped arc plasma moves across the entire surface of the object to be processed, so that the object to be processed is subjected to heat treatment or melting treatment. Therefore, this method has a problem that the processing time increases as the surface area of the object to be processed increases.

  As another method for irradiating the entire surface of the object to be processed with arc plasma, a plurality of plasma torches disclosed in Patent Document 1 are used to form a substantially linear arc plasma. A method of scanning on the object to be processed is conceivable. That is, the plasma torches are arranged in parallel so that the plasma arcs irradiated from the plasma torches are in substantially the same direction. And a linear plasma arc is formed by irradiating a plasma arc from each plasma torch substantially simultaneously.

  However, in this method, the arc plasma irradiated from each plasma torch is affected by the arc plasma irradiated from the adjacent plasma torch, and the straightness of the arc plasma is reduced. As a result, the arrival position of each arc plasma in the object to be processed fluctuates, causing a problem that a uniform linear arc plasma cannot be obtained.

  Furthermore, in the technique of Patent Document 2, a discharge electrode layer is formed by the discharge electrodes arranged at each vertex position of a regular hexagon, and three-dimensional plasma is generated between these discharge electrode layers. Therefore, even when it is desired to perform heat treatment or melting treatment on only one of the upper surface and the lower surface of the object to be processed, there arises a problem that both the upper surface and the lower surface are processed.

  Therefore, an object of the present invention is to provide an arc plasma generator capable of emitting arc plasma satisfactorily to a workpiece having at least a two-dimensional (planar) spread.

  In order to solve the above-mentioned problems, the invention of claim 1 includes: (a) a chamber that is a substantially sealed space and having an injection port extending in one direction; and (b) discharging an inert gas into the chamber. (C) a working gas supply nozzle that makes the inside of the chamber an inert gas atmosphere; and (c) the length of the injection port so that each tip is opposed to the injection port. A plurality of discharge electrodes arranged side by side along the injection port on both sides in the direction, and (d) by converting a three-phase alternating current to output a multi-phase alternating current and applying an output voltage corresponding to each discharge electrode A multi-phase AC converter that generates discharge between adjacent discharge electrodes and generates arc plasma between the discharge electrodes, and the arc plasma generated in the chamber is supplied from the working gas supply nozzle to the chamber. Discharged into By the inert gas, characterized in that it is pushed out of the chamber from the injection port.

  The invention according to claim 2 is the arc plasma generator according to claim 1, wherein each of the plurality of discharge electrodes is arranged in a staggered manner with each tip portion sandwiching the injection port. .

  The invention according to claim 3 is the arc plasma generator according to claim 1 or 2, further comprising a rectifying member that covers the injection port of the chamber.

  According to a fourth aspect of the present invention, there is provided the arc plasma generator according to any one of the first to third aspects, wherein the injection port edge portion of the chamber has an injection port along an emission direction of the arc plasma. It is inclined so as to be tapered.

  Further, the invention of claim 5 is the arc plasma generator according to claim 4, further comprising a plurality of fin members provided at the injection port edge and extending along the emission direction of the arc plasma. It is characterized by providing.

  Further, the invention of claim 6 is the arc plasma generator according to any one of claims 1 to 5, wherein the arc plasma generator is provided on both sides in the longitudinal direction of the injection port and protrudes in the emission direction of the arc plasma. The multiphase AC converter is configured by a plurality of transformers, the neutral points on the output side of each transformer are connected by a neutral wire, and each guide member is , Formed of metal, attached to the chamber via an insulating member, and connected to the neutral wire.

  The invention according to claim 7 is the arc plasma generator according to any one of claims 1 to 6, further comprising a cooling pipe provided in a housing wall of the chamber, wherein the cooling pipe is cooled. The inside of the chamber is cooled by flowing the fluid.

  The invention of claim 8 is the arc plasma generator according to any one of claims 1 to 7, wherein the arc plasma generator is controlled by controlling a flow rate of an inert gas supplied to each discharge electrode. And a control unit configured to adjust the density.

  According to the first to eighth aspects of the invention, it is possible to generate arc plasma extending along the injection port by discharging between adjacent discharge electrodes. Further, by discharging an inert gas into the chamber from the working gas supply nozzle, the arc plasma generated in the chamber can be pushed out of the chamber from the injection port. Therefore, linear arc plasma extending in the longitudinal direction following the shape of the injection port can be emitted from the chamber.

  In particular, according to the second aspect of the present invention, it is possible to cause a good discharge between the discharge electrodes facing each other across the injection port. Therefore, the arc plasma extending along the injection port can be generated satisfactorily.

  In particular, according to the invention described in claim 3, the arc plasma generated in the chamber is rectified when passing through the slit member. Therefore, the emission direction of the linear arc plasma can be made more uniform.

  In particular, according to the invention described in claim 4, the exit of the chamber is tapered along the direction of arc plasma emission, and the line width of the arc plasma passing through the exit (in the short direction of the exit). Can be narrowed. Therefore, a good linear arc plasma with a reduced line width can be emitted from the chamber, and the density of the linear arc plasma can be improved.

  In particular, according to the invention described in claim 5, the arc plasma generated in the chamber is rectified by the plurality of fin members when passing through the injection port. Therefore, the emission direction of the linear arc plasma can be made more uniform.

  In particular, according to the sixth aspect of the present invention, each guide member is connected to a neutral wire that connects the neutral points of each transformer. As a result, a potential difference is generated between the arc plasma generated between each discharge electrode and each guide member, and a force drawn out of the chamber acts on the arc plasma. Therefore, the flow rate of the linear arc plasma ejected from the chamber can be further increased.

  In particular, according to the seventh aspect of the present invention, when the chamber housing is cooled by flowing the cooling fluid through the cooling pipe, the arc plasma generated in the chamber is also cooled. As a result, the arc plasma at the periphery of the discharge region is cooled, and the discharge current hardly flows at the periphery. As a result, the discharge current is concentrated at the center of the discharge region, and the line width of the arc plasma is reduced. Further, when the line width of the arc plasma is reduced, the magnetic field (self-induced magnetic field) formed by the arc plasma itself further increases. As a result, the line width of the arc plasma is further reduced by increasing the magnetic field.

  Thus, when the arc plasma is cooled, the line width of the arc plasma is reduced by the thermal pinch effect and the magnetic pinch effect. Therefore, it is possible to generate a higher-temperature linear arc plasma.

  In particular, according to the arc plasma generator of claim 8, the density of the linear arc plasma can be adjusted by controlling the flow rate of the inert gas supplied to each of the plurality of discharge electrodes. Therefore, it is possible to easily generate linear arc plasma having a density corresponding to the object to be processed.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

<1. Configuration of Arc Plasma Generator>
FIG. 1 and FIG. 2 are a perspective view and a front sectional view showing an example of the configuration of the arc plasma generator 1 in the embodiment of the present invention. The arc plasma generation apparatus 1 is an apparatus that generates linear arc plasma that is emitted to an object to be processed having at least a two-dimensional extent, such as a substrate. As shown in FIG. 1 and FIG. 2, the arc plasma generator 1 mainly includes a chamber 3 that generates arc plasma that is injected to the object to be processed, a discharge torch 30, a multiphase AC converter 52, It has. 1 and the subsequent drawings have an XYZ orthogonal coordinate system in which the Z-axis direction is a vertical direction and the XY plane is a horizontal plane, as necessary, in order to clarify the directional relationship. .

  As shown in FIG. 2, the chamber 3 includes a substantially cylindrical upper housing 10 having an opening at the lower end, and a lower housing 20 to which the discharge torch 30 is attached. A space 10a surrounded by the upper housing 10 and the lower housing 20 is used as a generation space 10a for generating arc plasma.

  The cooling pipes 12 and 22 cool the generation space 10 a in the chamber 3. As shown in FIG. 2, the cooling pipe 12 is, for example, a helical pipe provided in the wall 11 of the upper housing 10, and the cooling pipe 22 is a helical pipe provided in the wall 21 of the lower housing 20. is there. The lower end portion of the cooling pipe 12 is connected in communication with the upper end portion of the cooling pipe 22.

  Further, as shown in FIG. 2, the cooling pipe 12 communicates with the cooling water supply source 13 via the valve 14 and the cooling water supply pipe 15. Further, the cooling pipe 22 communicates with the drain 17 through the drain pipe 16. Therefore, when the valve 14 is opened, cooling water used as a cooling fluid flows through the cooling pipes 12 and 22, and the inside of the chamber 3 is cooled. In particular, the arc plasma generated in the generation space 10 a is cooled by the cooling tube 22 near the discharge electrode 31 of the discharge torch 30. Then, the cooling water flowing through the cooling pipes 12 and 22 is discarded in the drain 17.

  The arc plasma generator 1 adjusts the temperature of the cooling water discharged from the cooling pipe 22 to a predetermined temperature range by a temperature adjustment unit (not shown), and then supplies the cooling water to the cooling pipe 12 again. A circulation mechanism may be provided. Thereby, the usage-amount of cooling water can be reduced.

  The injection port 20a is an opening provided at the lower end of the lower housing 20, and extends in one direction (for example, approximately Y-axis direction: scanning direction AR1). Here, the width in the short direction of the injection port 20a of the present embodiment is 2 mm to 10 mm (preferably 3 mm to 5 mm), which is sufficiently smaller than the size of the chamber 3. Therefore, the generation space 10a can be used as a substantially sealed space.

  The guide member 25 is made of metal and guides the linear arc plasma injected out of the chamber 3. As shown in FIG. 2, the guide members 25 are provided on both sides in the longitudinal direction of the injection port 20 a and project in the arc plasma injection direction AR <b> 3 emitted from the chamber 3. The guide member 25 is attached to the lower portion of the chamber 3 via an insulating member 26. Therefore, the linear arc plasma emitted from the chamber 3 is rectified by the guide member 25 and the insulating member 26 provided on both sides in the longitudinal direction of the injection port 20a. Therefore, the uniformity of the flow of the linear arc plasma is ensured.

  The plurality of discharge torches 30 are provided in the chamber 3 and generate arc plasma in the generation space 10a. As shown in FIG. 2, each discharge torch 30 has a torch body 30 a and a discharge electrode 31. For convenience of illustration, FIG. 1 shows three on each side in the longitudinal direction of the injection port 20a, and FIG. 2 shows one on each side.

  The torch body 30a of each discharge torch 30 has a substantially cylindrical shape. The corresponding discharge electrode 31 is supported in the inner space of the torch main body 30a, and the distal end portion 31a of the discharge electrode 31 is discharged from the opening 30b of the torch main body 30a to the injection port 20a side.

  The discharge electrode 31 of each discharge torch 30 is a rod-like body formed of a metal such as tungsten. Each discharge torch 30 is inserted through a through-hole (not shown) formed in the lower housing 20 and is fixed by an attachment portion 27 along the inclined portion 23. In addition, each discharge electrode 31 is arranged in parallel along the ejection port 20a on both sides in the longitudinal direction of the ejection port 20a so that the respective tip portions 31a face each other with the ejection port 20a interposed therebetween.

  As shown in FIG. 2, each discharge electrode 31 is electrically connected to the multiphase AC converter 52 via an output line 55. Further, the discharge electrodes 31 are arranged in a staggered manner with the injection ports 20a interposed therebetween (so that the tip portions 31a are alternately arranged on one side and the other side in the longitudinal direction). Thereby, discharge can be favorably generated between the discharge electrodes 31 facing each other with the injection port 20a interposed therebetween. Therefore, the arc plasma extending along the injection port 20a can be generated satisfactorily by the discharge electrode 31 disposed in the vicinity of the injection port 20a.

  Furthermore, as shown in FIG. 2, the internal space of each torch body 30 a is not connected via the corresponding protective gas supply pipe 47 (47 a, 47 b) and valve 44 (44 a, 44 b) and the common pipe 45. It communicates with the active gas supply source 42. Therefore, when the bulb 44 is opened, an inert gas (for example, argon, helium, etc.) is supplied to the corresponding internal space of the torch body 30a, and the discharge electrode 31 during discharge is protected.

  The working gas supply nozzle 41 is provided at the inner upper end of the upper housing 10. As shown in FIG. 2, the working gas supply nozzle 41 is in communication with an inert gas supply source 42 via a working gas supply pipe 46, a valve 43, and a common pipe 45. Therefore, when the valve 43 is opened, the inert gas is discharged into the chamber 3, and the chamber 3 is set to an inert gas atmosphere. The arc plasma generated in the chamber 3 is pushed out of the chamber 3 from the injection port 20a by the inert gas discharged into the chamber 3 from the working gas supply nozzle 41.

  The control unit 90 includes a memory 91 that stores programs, variables, and the like, and a CPU 92 that executes control according to the programs stored in the memory 91. Therefore, when the program is executed by the CPU 92, for example, the opening / closing control of the valve 44 (44a, 44b) is executed at a predetermined timing.

  For example, the control unit 90 can be configured to adjust the arc plasma density by opening and closing the bulb 44 and controlling the flow rate of the inert gas supplied to each discharge electrode 31. For this reason, the linear arc plasma of the density according to a to-be-processed object is produced | generated easily.

<2. Connection between each discharge electrode 31 and the polyphase AC converter>
FIG. 3 is a diagram illustrating an example of the configuration of the polyphase AC converter 52. FIG. 4 is a vector diagram showing the relationship between 3-phase alternating current and 12-phase alternating current. FIG. 5 is a diagram for explaining the connection between the plurality of discharge electrodes 31 and the output terminals S01 to S12 of the multiphase AC converter 52. Here, the multiphase AC conversion unit 52 will be described first, and then the connection between each discharge electrode 31 and the output terminals S01 to S12 of the multiphase AC conversion unit 52 will be described.

  As shown in FIG. 3, the multiphase AC converter 52 is connected to, for example, a three-phase AC power supply 51 via an input line 54, and has a commercial three-phase AC (R phase, S phase, and T phase). ) To output polyphase alternating current. As shown in FIG. 3, the polyphase AC conversion unit 52 includes a plurality (six in this embodiment) of single-phase transformers T1 to T6.

  The primary side (input side) of the single-phase transformers T1 to T3 is star-connected, and the primary side of the single-phase transformers T4 to T6 is delta-connected. Further, the neutral points N1 to N6 on the secondary side of the single-phase transformers T1 to T6 are connected to each other. Therefore, as shown in FIG. 4, sinusoidal alternating currents whose phases are different by 30 degrees are output from the output terminals S01 to S12 on the secondary side of the single-phase transformers T1 to T6.

  When the multiphase AC converter 52 is configured using the same single-phase transformers T1 to T6, the secondary output of the delta connection is √3 times the secondary output of the star connection. Therefore, when the winding ratio of star-connected single-phase transformers T1 to T3 is CR1, and the winding ratio of delta-connected single-phase transformers T4 to T6 is R2, R1 is √3 times R2. Thus, when the winding ratio of each single-phase transformer T1-T6 is set, the amplitude of the alternating current output from each of each output terminal S01-S12 will become substantially the same.

  Next, regarding the connection between each discharge electrode 31 and the multiphase AC converter 52, the output of the single phase transformers T1 to T3 among the output terminals S01 to S12 of the polyphase AC converter 52, as shown in FIG. Terminals S01, S03, S05, S07, S09, and S11 are connected to a discharge electrode 31 disposed on one side 21a in the longitudinal direction of the injection port 20a. The output terminals S02, S04, S06, S08, S10, and S12 of the single-phase transformers T4 to T6 are connected to the discharge electrode 31 disposed on the other longitudinal side 21b of the injection port 20a.

  Thereby, when the output voltage from the output terminals S01 to S12 corresponding to each discharge electrode 31 is applied, each discharge electrode 31 is disposed at the facing position and the discharge electrode 31 has a phase difference of 30 degrees. And between the discharge electrodes 31 that are arranged side by side and have a phase difference of 60 degrees (that is, between the adjacent discharge electrodes 31), a good discharge occurs.

<3. Configuration near the injection port>
FIG. 6 is a front sectional view showing an example of the configuration in the vicinity of the injection port 20a. FIG. 7 is a top view showing an example of the configuration in the vicinity of the injection port 20a. As shown in FIGS. 6 and 7, the injection port edge 24 of the chamber 3 is inclined so that the injection port 20a is tapered along the arc plasma injection direction AR3. Therefore, a good linear arc plasma with a reduced line width can be emitted from the chamber, and the density of the linear arc plasma can be improved.

  The injection port edge 24 is provided with a plurality of fin members 61 extending along the arc plasma injection direction AR3. Thereby, the arc plasma generated in the chamber 3 is rectified by the plurality of fin members 61 when passing through the injection port. Therefore, the emission direction AR3 of the linear arc plasma can be made more uniform. Thus, in this Embodiment, the fin member 61 is used as a rectification member.

  Moreover, as shown in FIG. 6, the guide members 25 provided on both sides in the longitudinal direction of the injection port 20a and projecting in the arc plasma injection direction AR3 are secondary sides of the single-phase transformers T1 to T6. Are connected to a neutral line 56 that connects the neutral points of the two. As a result, a potential difference is generated between the arc plasma generated between the discharge electrodes 31 and the guide members 25, and a force drawn out of the chamber 3 acts on the arc plasma. Therefore, the flow velocity of the linear arc plasma ejected from the chamber 3 can be further increased.

<4. Advantages of Arc Plasma Generator of the Present Embodiment>
As described above, the arc plasma generation apparatus 1 according to the present embodiment can generate arc plasma extending along the injection port 20a by discharging between the adjacent discharge electrodes 31. Further, by discharging an inert gas into the chamber 3 from the working gas supply nozzle 41, the arc plasma generated in the chamber 3 can be pushed out of the chamber 3 from the injection port 20a.

  Thereby, linear arc plasma extending in the longitudinal direction (substantially Y-axis direction) following the shape of the injection port 20a can be emitted from the chamber 3. Therefore, by moving the arc plasma generator 1 in the sub-scanning direction AR2 by a drive mechanism (not shown), the linear arc plasma can be scanned on the object to be processed, such as heat treatment or melting treatment of the object to be processed. Can be executed efficiently. As described above, the arc plasma generator 1 can be used in a heat treatment apparatus or a melt treatment apparatus that performs a heat treatment or a melt treatment using linear plasma.

  Further, in the arc plasma generator 1 of the present embodiment, when the upper housing 10 and the lower housing 20 of the chamber 3 are cooled by circulating the cooling water through the cooling pipes 12 and 22, they are generated in the chamber 3. The arc plasma is also cooled. As a result, the arc plasma at the periphery of the discharge region 28 (see FIG. 5) is cooled, and the discharge current hardly flows at this periphery. As a result, the discharge current is concentrated at the center of the discharge region 28, and the line width of the arc plasma is reduced.

  Further, when the line width of the arc plasma is reduced, the magnetic field (self-induced magnetic field) formed by the arc plasma itself further increases. As a result, the line width of the arc plasma is further reduced by increasing the magnetic field.

  Thus, when the arc plasma is cooled, the line width of the arc plasma is reduced by the thermal pinch effect and the magnetic pinch effect. Therefore, it is possible to generate a higher-temperature linear arc plasma.

<5. Modification>
Although the embodiments of the present invention have been described above, the present invention is not limited to the above embodiments, and various modifications can be made.

  (1) In the present embodiment, it has been described that the fin member 61 that rectifies the arc plasma is provided in the vicinity of the injection port 20a, but the rectification member provided in the vicinity of the injection port 20a is not limited to this. .

  FIG. 8 is a front sectional view showing another example of the configuration near the injection port 20a. 9 and 10 are top views showing other examples of the configuration near the injection port 20a.

  As shown in FIG. 9, the mesh member 62 is a lattice-like member disposed in the chamber 3 near the injection port 20a, and the injection port 20a is divided into a plurality of cells. Moreover, as shown in FIG. 8, the mesh member 62 is provided so as to cover the injection port 20a. Thereby, the arc plasma generated in the chamber 3 is rectified when passing through the mesh member 62. Therefore, similarly to the fin member 61, the mesh member 62 can further uniform the injection direction AR3 of the linear arc plasma.

  As shown in FIG. 10, the slit member 63 is formed by a plurality of partition members extending along the longitudinal direction of the opening, and the injection port 20a is divided into a plurality of elongated gaps. Moreover, as shown in FIG. 8, the slit member 63 is provided so as to cover the injection port 20a. Thereby, the arc plasma generated in the chamber 3 is rectified when passing through the slit member 63. Therefore, similarly to the fin member 61 and the mesh member 62, the slit member 63 can make the emission direction AR3 of the linear arc plasma more uniform.

  (2) Moreover, in this Embodiment, each discharge torch 30 is being fixed along the inclination part 23, and the two discharge torches 30 which oppose are arrange | positioned so that it may become a substantially V shape by a front view. However, it is not limited to this. For example, you may arrange | position so that the discharge torches 30 which oppose may be in the same plane.

  (3) Moreover, in this Embodiment, although the one polyphase alternating current conversion part 52 is used, it is not limited to this. For example, two or more polyphase AC converters 52 may be used. Thereby, the usable discharge electrodes 31 are increased, and the length of the linear arc plasma 8 in the longitudinal direction can be increased. In addition, when using two or more polyphase alternating current conversion parts 52, the neutral line of each polyphase alternating current conversion part 52 is connected mutually.

  (4) Further, in the present embodiment, the cooling pipes 12 and 22 are spiral pipes, and both the cooling pipes 12 and 22 are described as being connected in communication, but the present invention is not limited to this. For example, the cooling pipes 12 and 22 may not be connected in communication. Further, the cooling pipes 12 and 22 may be ring-shaped pipes provided in the wall 21.

It is a perspective view which shows an example of the whole structure of the arc plasma generator in embodiment of this invention. It is front sectional drawing which shows an example of the whole structure of the arc plasma generator in embodiment of this invention. It is a figure which shows an example of a structure of a polyphase alternating current conversion part. It is a vector diagram which shows the relationship between 3 phase alternating current and 12 phase alternating current. It is a figure for demonstrating the connection of a some discharge electrode and the output terminal of a polyphase alternating current conversion part. It is front sectional drawing which shows an example of a structure of the injection opening vicinity. It is a top view which shows an example of a structure of the injection hole vicinity. It is front sectional drawing which shows the other example of a structure of the injection hole vicinity. It is a top view which shows the other example of a structure of the injection hole vicinity. It is a top view which shows the other example of a structure of the injection hole vicinity.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Arc plasma generator 3 Chamber 8 Linear arc plasma 10 Upper housing 11 Wall 12, 22 Cooling pipe 20 Lower housing 20a Injection port 24 Injection port edge 25 Guide member 26 Insulation member 27 Mounting part 28 Discharge area 31 Discharge electrode 31a Tip Unit 41 Working gas supply nozzle 47 (47a, 47b) Protective gas supply pipe 51 Three-phase AC power supply 52 Multi-phase AC converter 56 Neutral wire 61 Fin member 62 Mesh member 63 Slit member 90 Control unit

Claims (8)

(a) a chamber having a substantially sealed space and an injection port extending in one direction;
(b) a working gas supply nozzle that discharges an inert gas into the chamber to make the chamber an inert gas atmosphere;
(c) a plurality of discharge electrodes provided in the chamber, and arranged in parallel along the ejection port on both sides in the longitudinal direction of the ejection port, such that each tip portion is opposed across the ejection port;
(d) Converting three-phase alternating current to output multi-phase alternating current and applying an output voltage corresponding to each discharge electrode to cause discharge between adjacent discharge electrodes, and arc plasma between each discharge electrode A multi-phase AC converter that generates
With
The arc plasma generating apparatus, wherein the arc plasma generated in the chamber is pushed out of the chamber from the injection port by an inert gas discharged from the working gas supply nozzle into the chamber. In the arc plasma generator according to claim 1,
The arc plasma generator according to claim 1, wherein each of the plurality of discharge electrodes is arranged in a staggered manner with each tip portion sandwiching the injection port. In the arc plasma generator according to claim 1 or 2,
A rectifying member covering the injection port of the chamber;
An arc plasma generator characterized by further comprising: In the arc plasma generator according to any one of claims 1 to 3,
An arc plasma generator according to claim 1, wherein an edge of the outlet of the chamber is inclined so that the outlet is tapered along the arc plasma emission direction. In the arc plasma generator according to claim 4,
A plurality of fin members which are provided at the injection port edge and extend along the injection direction of the arc plasma;
An arc plasma generator characterized by further comprising: In the arc plasma generator according to any one of claims 1 to 5,
Guide members provided on both sides in the longitudinal direction of the injection port, and projecting in the injection direction of the arc plasma,
Further comprising
The polyphase AC converter is composed of a plurality of transformers, and the neutral point on the output side of each transformer is connected by a neutral wire,
Each guide member is made of metal, is attached to the chamber via an insulating member, and is connected to the neutral wire. In the arc plasma generator according to any one of claims 1 to 6,
A cooling pipe provided in the housing wall of the chamber;
Further comprising
An arc plasma generation apparatus characterized in that the inside of the chamber is cooled by flowing a cooling fluid through the cooling pipe. In the arc plasma generator according to any one of claims 1 to 7,
A controller configured to adjust the density of the arc plasma by controlling the flow rate of the inert gas supplied to each discharge electrode;
An arc plasma generator characterized by further comprising:

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