JP2009139338A5 - - Google Patents

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Publication number
JP2009139338A5
JP2009139338A5 JP2007318884A JP2007318884A JP2009139338A5 JP 2009139338 A5 JP2009139338 A5 JP 2009139338A5 JP 2007318884 A JP2007318884 A JP 2007318884A JP 2007318884 A JP2007318884 A JP 2007318884A JP 2009139338 A5 JP2009139338 A5 JP 2009139338A5
Authority
JP
Japan
Prior art keywords
piezoelectric
substrate
pressure sensor
semiconductor pressure
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2007318884A
Other languages
English (en)
Japanese (ja)
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JP2009139338A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007318884A priority Critical patent/JP2009139338A/ja
Priority claimed from JP2007318884A external-priority patent/JP2009139338A/ja
Publication of JP2009139338A publication Critical patent/JP2009139338A/ja
Publication of JP2009139338A5 publication Critical patent/JP2009139338A5/ja
Withdrawn legal-status Critical Current

Links

JP2007318884A 2007-12-10 2007-12-10 半導体圧力センサ及びその製造方法、半導体装置並びに電子機器 Withdrawn JP2009139338A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007318884A JP2009139338A (ja) 2007-12-10 2007-12-10 半導体圧力センサ及びその製造方法、半導体装置並びに電子機器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007318884A JP2009139338A (ja) 2007-12-10 2007-12-10 半導体圧力センサ及びその製造方法、半導体装置並びに電子機器

Publications (2)

Publication Number Publication Date
JP2009139338A JP2009139338A (ja) 2009-06-25
JP2009139338A5 true JP2009139338A5 (cg-RX-API-DMAC10.html) 2010-12-24

Family

ID=40870071

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007318884A Withdrawn JP2009139338A (ja) 2007-12-10 2007-12-10 半導体圧力センサ及びその製造方法、半導体装置並びに電子機器

Country Status (1)

Country Link
JP (1) JP2009139338A (cg-RX-API-DMAC10.html)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5836755B2 (ja) * 2011-10-04 2015-12-24 富士フイルム株式会社 圧電体素子及び液体吐出ヘッド
JP5836754B2 (ja) 2011-10-04 2015-12-24 富士フイルム株式会社 圧電体素子及びその製造方法
CN109141731A (zh) * 2018-07-26 2019-01-04 西北工业大学 一种可用于水下湍流边界层壁面脉动压力测试的柔性基微传感器及其制造方法
JP7320402B2 (ja) * 2019-08-08 2023-08-03 ローム株式会社 Ｍｅｍｓセンサ
CN112082674B (zh) * 2020-09-25 2022-03-25 长安大学 一种基于正挠曲电效应的土压力测量盒

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