JP2009133720A - X-ray analyzer - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an X-ray analyzer capable of acquiring sufficient collimation accuracy, and enhancing the intensity of an incident X-ray into a detector by shortening sufficiently the distance between a sample and the detector. <P>SOLUTION: A collimator 31 wherein the first restriction hole 31a and the second restriction hole 31b whose respective center axes agree mutually are formed is installed between the sample 5 and the detector 14, and a groove part 31c for arranging a filter member 32a or an aperture member on the axis is formed on the collimator 31, and a secondary X-ray 6 transmitted through the two restriction holes 31a, 31b and the groove part 31c is detected by the detector 14. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an X-ray analyzer such as a fluorescent X-ray analyzer.

  The X-ray fluorescence analyzer irradiates a sample to be analyzed with X-rays (primary X-rays) generated from an X-ray tube serving as an X-ray source, and is secondarily excited in the sample in response to this irradiation. By detecting the characteristic X-rays with a detector, qualitative analysis and quantitative analysis of sample constituent elements are performed.

  When sample X is analyzed by detecting characteristic X-rays in this way, in the analyzer, scattered X-rays etc. generated from apparatus constituent members (apparatus constituent parts other than the sample) irradiated with primary X-rays. It is necessary to perform collimation so as not to enter the detector (see, for example, Patent Document 1).

  Further, in order to improve the analysis accuracy or shorten the analysis time, it is preferable that the intensity of the characteristic X-ray reaching (incident) the detector is high, and the detector needs to be close to the sample.

Furthermore, in the analysis of specific elements, filters are arranged between the X-ray tube and the sample and between the sample and the detector in order to improve the S / N of the characteristic X-ray intensity for the specific element. With reference to FIG. 1, the configuration of the fluorescent X-ray analyzer in the prior art will be described. In the figure, the primary X-ray 3 emitted from the X-ray tube 1 passes through the primary filter 2 and is irradiated to the analysis target position of the sample 5.

  The sample 5 is supported on a sample support plate 4 constituting the analyzer. An opening 4 a is formed in the sample support plate 4, and the primary X-ray 3 from the X-ray tube 1 reaches the analysis target position of the sample 5 through the opening 4 a.

  Characteristic X-rays 6 that are secondary X-rays are generated from the analysis target position of the sample 5 irradiated with the primary X-rays 3. The characteristic X-ray 6 reaches the detector 14 via the sample side diaphragm member 9, the secondary side filter 10 and the detector side diaphragm member 12. The detector 14 detects the characteristic X-ray 6 incident in this way.

  The sample-side diaphragm member 9 is formed with a diaphragm hole 9a, and only the characteristic X-ray 6 that has passed through the diaphragm hole 9a reaches the secondary-side filter 10 located on the rear stage side. The sample side diaphragm member 9 is supported by a cylindrical support member 7, and the characteristic X-ray 6 from the sample 5 passes through the inside of the support member 7 and reaches the sample side diaphragm member 9. The support member 7 is held by a holding member 8 fixed to the bottom surface of the sample support plate 4.

  The secondary filter 10 passes only characteristic X-rays corresponding to the specific element, and the characteristic X-rays 6 that have passed through the secondary filter 10 reach the detector-side diaphragm member 12. The secondary filter 10 is supported by the support member 11. An opening is formed in the support member 11, and the characteristic X-ray 6 that has passed through the filter 10 reaches the detector-side diaphragm member 12 through the opening.

  A diaphragm hole 12a is formed in the detector-side diaphragm member 12, and only the characteristic X-ray 6 that has passed through the diaphragm hole 12a reaches the detector 14 located on the rear stage side. The detector-side diaphragm member 12 is disposed at the tip of the casing 13 that houses the detector 14 therein. A window (opening) 13 a is formed at the tip of the casing 13, and the characteristic X-ray 6 that has passed through the aperture 12 a of the detector-side aperture member 12 and the window 13 a is incident on the detector 14. The two diaphragm members 9 and 12 constitute a collimator for performing collimation.

  In the above apparatus configuration, it is necessary to dispose each diaphragm member 9, 12 so that the central axis of the diaphragm hole 9a of the sample side diaphragm member 9 and the central axis of the diaphragm hole 12a of the detector side diaphragm member 12 coincide with each other. There is.

JP 2000-199750 A

  In the conventional apparatus configuration described above, since the secondary filter 10 is disposed between the sample side diaphragm member 9 and the detector side diaphragm member 12, the sample side diaphragm member 9 and the detector side diaphragm member 12 are supported. The member 7 and the casing 13 are individually supported in a separated / separated state.

  Therefore, it is difficult to align the central axes of the respective apertures 9a and 12a, which are necessary for proper collimation of the characteristic X-ray 6.

  The sample side diaphragm member 9 is attached to the lower side of the sample support plate 4 by a support member 7 and a holding member 8.

  Therefore, an installation space for the support member 7 and the holding member 8 installed to attach the sample-side diaphragm member 9 is necessary below the sample support plate 4, and since there is the installation space, the sample 5 is detected. The distance to the vessel 14 was long.

  As a result, sufficient assembly accuracy (positional accuracy between the sample-side diaphragm member 9 and the detector-side diaphragm member 12) to avoid incidence of scattered X-rays from the apparatus constituent members other than the sample 5 to the detector 14 is obtained. Since the collimation accuracy cannot be obtained, the collimation accuracy is lowered, the element not included in the sample to be analyzed is detected by the detector 14, and the distance between the sample 5 and the detector 14 is long. The intensity of the characteristic X-ray 6 reaching the instrument 14 is also lowered, and it has been difficult to further improve the analysis accuracy and shorten the analysis time.

  In addition, an aperture member having an aperture having a different diameter from that of the apertures 9a and 12a may be disposed between the sample-side aperture member 9 and the detector-side aperture member 12.

  The present invention has been made in view of such points, and even when a filter member (secondary filter) or an aperture member is disposed between the sample and the detector, sufficient collimation accuracy can be obtained. An object of the present invention is to provide an X-ray analyzer capable of increasing the incident X-ray intensity to the detector by sufficiently shortening the distance between the sample and the detector.

  A first X-ray analyzer according to the present invention irradiates a sample with primary X-rays from an X-ray source, and detects secondary X-rays generated from the sample by irradiation with the primary X-rays using a detector. In the X-ray analyzing apparatus, a collimator in which a first diaphragm hole and a second diaphragm hole whose center axes coincide with each other is formed between a sample and a detector, and a filter is installed in the collimator. A groove portion for arranging the member or the aperture member on the shaft is formed, and secondary X-rays passing through the two throttle holes and the groove portion are detected by a detector.

  A second X-ray analyzer according to the present invention irradiates a sample with primary X-rays from an X-ray source, detects secondary X-rays generated from the sample by irradiation with the primary X-rays, and detects the sample. In the X-ray analysis apparatus, the second diaphragm hole, which supports the diaphragm member in which the first diaphragm hole is formed between the sample and the detector and whose central axis coincides with the first diaphragm hole, is provided. The formed collimator is installed, and the collimator is formed with a groove portion for arranging the filter member or aperture member on the shaft, and secondary X-rays passing through the two aperture holes and the groove portion are detected. It is detected by a detector.

  A third X-ray analyzer according to the present invention irradiates a sample with primary X-rays from an X-ray source, and detects secondary X-rays generated from the sample by irradiation with the primary X-rays using a detector. In the X-ray analysis apparatus for performing the above, a second diaphragm whose first axis is aligned with the first diaphragm is supported while the first diaphragm member with the first diaphragm hole formed is supported between the sample and the detector. A collimator that supports the second diaphragm member in which the diaphragm hole is formed is installed, and the collimator is formed with a groove for arranging a filter member or an aperture member on the shaft. A secondary X-ray that has passed through the hole and the groove is detected by a detector.

  In the first X-ray analyzer according to the present invention, a collimator formed by forming a first diaphragm hole and a second diaphragm hole whose center axes coincide with each other is installed between the sample and the detector. The collimator is formed with a groove portion for arranging a filter member or an aperture member on the shaft, and secondary X-rays passing through the two aperture holes and the groove portion are detected by a detector.

  Therefore, even if a filter member or an aperture member is disposed between the sample and the detector (particularly, between the first and second aperture holes), the member is in the groove formed in the collimator. Since the first restrictor hole and the second restrictor hole are formed in the same collimator with the center axis aligned, the centers of the first and second restrictor holes are arranged. There is no need to realign the axes. Thereby, proper collimation can be performed and the fall of collimation precision can be prevented. As a result, analysis accuracy can be improved.

  In addition, since it is not necessary to separately arrange the sample-side diaphragm member below the sample support plate, it is not necessary to provide a space for installing the support member and the holding member in the conventional technique. Thereby, since the distance between the sample and the detector can be shortened as compared with the conventional case, the incident X-ray intensity to the detector can be increased, and the analysis time can be shortened.

  In the second X-ray analyzer according to the present invention, the diaphragm member in which the first diaphragm hole is formed is supported between the sample and the detector, and the central axes of the first diaphragm hole coincide with each other. A collimator formed with a second throttle hole is installed, and the collimator is formed with a groove for arranging a filter member or aperture member on the shaft, and passes through the two throttle holes and the groove. Secondary X-rays are detected by the detector.

  In the third X-ray analyzer according to the present invention, the first diaphragm member in which the first diaphragm hole is formed is supported between the sample and the detector, and the first diaphragm hole is mutually connected. A collimator that supports the second diaphragm member in which the second diaphragm hole having the same central axis is formed is installed, and the collimator is formed with a groove for arranging the filter member or the aperture member on the shaft. The secondary X-rays that have passed through these two apertures and grooves are detected by the detector.

  Even with these configurations, even if a filter member or an aperture member is disposed between the sample and the detector (particularly, between the first and second aperture holes), the member is formed on the collimator. Therefore, it is not necessary to realign the center axes of the first and second throttle holes. Thereby, proper collimation can be performed and the fall of collimation precision can be prevented. As a result, analysis accuracy can be improved.

  Further, similarly to the above, since it is not necessary to separately arrange the sample side diaphragm member below the sample support plate, it is not necessary to provide an installation space for the support member and the holding member in the conventional technique, and the sample and the detector The distance can be shortened compared to the conventional one. Thereby, the incident X-ray intensity to the detector can be increased, and the analysis time can be shortened.

  Embodiments of the present invention will be described below with reference to the drawings. FIG. 2 is a schematic configuration diagram showing an X-ray analysis apparatus according to the present invention, and the same components as those in FIG. 1 are given the same numbers.

  In FIG. 2, the primary X-ray 3 emitted from the X-ray tube (X-ray source) 1 passes through a filter (not shown) and is irradiated to the analysis target position of the sample 5.

  The sample 5 is supported on the sample support plate 4 constituting the present analyzer. The sample support plate 4 has an opening 4a, and the primary X-ray from the X-ray tube 1 is the opening 4a. To reach the analysis target position of the sample 5.

  Characteristic X-rays 6 that are secondary X-rays are generated from the analysis target position of the sample 5 irradiated with the primary X-rays 3. The characteristic X-ray 6 reaches the detector 14 via a collimator (not shown). Thereby, the detector 14 detects the characteristic X-ray 6. Here, the detector 14 includes a semiconductor detector and is provided inside the casing 13.

  An output signal from the detector 14 based on the detection of the characteristic X-ray 6 is input to a multichannel analyzer (MCA) 21. The output signal of the MCA 21 is input to a central control unit (CPU) 22.

  The MCA 21 separates the output signal from the detector 14 according to the energy and outputs it to the CPU 22. The X-ray intensity signal is accumulated and stored in the storage unit 23 of the CPU 22 corresponding to each energy. That is, as the analysis of the sample 5 proceeds, the intensity of the X-ray intensity signal increases.

  The data stored in the storage unit 23 is sent to the spectrum forming unit 24 of the CPU 22. The spectrum forming unit 24 forms X-ray spectrum data based on the data sent from the storage unit 23, and the X-ray spectrum is visually displayed on the display unit 25.

  Here, a first embodiment of the present invention will be described with reference to FIG. FIG. 3 is a diagram showing a main part in the first embodiment of the present invention.

  The primary X-rays 3 emitted from the X-ray tube 1 pass through the primary filter 2 and reach the analysis target position of the sample 5. The characteristic X-ray 6 generated from the analysis target position irradiated with the primary X-ray 3 passes through the collimator 31 and is detected by the detector 14 accommodated in the casing 13.

  The collimator 31 is attached to the tip of the casing 13. That is, the collimator 31 is fixed to the distal end portion of the casing 13 by engaging the engaging portion 31 d located at the proximal end portion of the collimator 31 with the side surface of the distal end of the casing 13.

  Further, the collimator 31 is formed with a first throttle hole 31a and a second throttle hole 31b. The first throttle hole 31a is positioned on the sample 5 side, the second throttle hole 31b is positioned on the detector 14 side, and the central axes of both the first and second throttle holes 31a and 31b are It matches on the same straight line.

  Further, in the collimator 31, a slit-shaped groove 31c is formed between the first throttle hole 31a and the second throttle hole 31b. The 1st aperture hole 31a and the 2nd aperture hole 31b are connected via the groove part 31c.

  A filter (filter member) 32a is disposed in the groove 31c. The filter 32a is supported by the filter support member 32, and is located on the central axis in the groove 31c. A part of the filter support member 32 is also located in the groove 31c.

  The filter support member 32 holds a plurality of types of filters 32a. And the filter support member 32 moves to the orthogonal | vertical direction with respect to the paper surface in FIG. 3, and the specific filter 32a is selectively arrange | positioned in the groove part 31c.

  Note that a window (opening) 13a provided in the casing 13 is located on the rear stage side (detector 14 side) of the second throttle hole 31b. With this configuration, the characteristic X-ray 6 from the sample 5 sequentially passes through the first throttle hole 31a of the collimator 31, the filter 32a in the groove 31cb, the second throttle hole 31b, and the window 13a of the casing 13. The detector 14 is reached. Here, as a reference, FIG. 4 shows a bird's-eye view of a detection system including a casing 13 provided with a detector 14 on which characteristic X-rays 6 are incident.

  In the configuration described above, between the sample 5 and the detector 14, most of the path of the characteristic X-ray 6 is occupied (occupied) by the apertures 31 a and 31 b and the groove 31 c of the collimator 31, and the two A filter 32a is disposed between the throttle holes 31a and 31b.

  And the 1st aperture hole 31a located in the front-end | tip (front surface) of the collimator 31 is approaching the irradiation surface of the primary X-ray 3 in the sample 5, and is 2nd located in the base end (rear surface) of the collimator 31. The aperture 31b is disposed near the detection surface of the detector 14.

  Thereby, the influence by the scattered X-rays generated from the members other than the sample 5 according to the irradiation of the primary X-ray 3 reaching the detection surface of the detector 14 can be eliminated as much as possible.

  Further, the filter 32a is disposed between the first throttle hole 31a and the second throttle hole 31b and fits in the installation space of the collimator 31, so that the filter 32a is supported and moved in the path of the characteristic X-ray 6 There is no need to provide a filter mechanism.

  Since the characteristic X-ray 6 that reaches the filter 32a passes through the first aperture 31a of the collimator 31, the area of the filter 32a through which the characteristic X-ray 6 passes is reduced. 32a itself can be made compact.

  From these things, the distance between the sample 5 and the detector 14 can be shortened as much as possible, and the fall of the intensity | strength of the characteristic X-ray 6 which reaches | attains the detector 14 can be prevented.

  Further, in the above configuration, since the filter 32a slides and moves in the groove 31c of the collimator 31 as the filter support member 32 moves, sample analysis can be performed by automatically selecting several types of filters 32a. .

  Next, a second embodiment of the present invention will be described with reference to FIG. FIG. 5 is a diagram showing the main part in the second embodiment of the present invention.

  5 is different from the configuration shown in FIG. 3 (first embodiment) described above in that a diaphragm member (first diaphragm member) 33 is held at the tip of the collimator 31. In FIG.

  The aperture member 33 is formed with a through hole 33a corresponding to the first aperture hole. The aperture member 33 is attached to an opening formed at the tip of the collimator 31.

  The central axis of the through hole 33a of the throttle member 33 coincides with the central axis of the throttle hole (second throttle hole) 31b formed in the collimator 31 on the same straight line.

  Further, a third embodiment of the present invention will be described with reference to FIG. FIG. 6 is a diagram showing the main part in the third embodiment of the present invention.

  6 is different from the configuration shown in FIG. 5 described above (third embodiment) in that a diaphragm member (second diaphragm member) 34 is held at the base end of the collimator 31.

  The aperture member 34 is formed with a through hole 34a corresponding to the second aperture hole. The aperture member 34 is attached to an opening formed at the proximal end of the collimator 31.

  Both central axes of the through-hole 33a of the throttle member 33 and the through-hole 34a of the throttle member 34 coincide on the same straight line.

  Also in the configurations of the second and third embodiments described above, most of the path of the characteristic X-ray 6 between the sample 5 and the detector 14 is formed by the throttle holes 33a and 31b (34a) and the groove 31c. The filter 32a is disposed between the two throttle holes 33a and 31b (34a).

  And the 1st aperture 33a located in the front-end | tip (front surface) of the collimator 31 is approaching the irradiation surface of the primary X-ray 3 in the sample 5, and is 2nd located in the base end (rear surface) of the collimator 31. The aperture 31b (34a) is disposed near the detection surface of the detector 14.

  Thereby, the influence by the scattered X-rays generated from the members other than the sample 5 in response to the irradiation of the primary X-ray 3 reaching the detection surface of the detector 14 can be eliminated as much as possible.

  The filter 32a is disposed between the first throttle hole 33a and the second throttle hole 31b (34a) and fits in the installation space of the collimator 31, so the filter 32a is placed in the path of the characteristic X-ray 6. There is no need to provide a filter mechanism for supporting and moving.

  Since the characteristic X-ray 6 that reaches the filter 32a passes through the first hole 33a and is narrowed down, the area of the filter 32a through which the characteristic X-ray 6 passes is reduced, and the filter 32a itself is compact. Can be.

  From these things, the distance between the sample 5 and the detector 14 can be shortened as much as possible, and the fall of the intensity | strength of the characteristic X-ray 6 which reaches | attains the detector 14 can be prevented.

  Further, in the above configuration, since the filter 32a slides and moves in the groove 31c of the collimator 31 as the filter support member 32 moves, sample analysis can be performed by automatically selecting several types of filters 32a. .

  In each of the above embodiments, the filter 32a is arranged in the groove 31c of the collimator 31. However, instead of the filter 32a or in addition to the filter 32a, an adjustment throttle hole (threshold hole having a different diameter) is used. ) May be disposed in the groove 31c.

  In this case, a plurality of types of adjustment apertures may be provided in the aperture member, and the adjustment apertures may be arranged so as to be selectable in the groove 31c of the collimator 31.

  According to such a configuration, the aperture member is disposed between the first throttle hole 31a (33a) and the second throttle hole 31b (34a) and fits in the installation space of the collimator 31.

  Thereby, even when an aperture member is provided, the distance between the sample 5 and the detector 14 can be shortened as much as possible, and a decrease in the intensity of the characteristic X-ray 6 reaching the detector 14 can be prevented. Can do.

  Furthermore, a fourth embodiment of the present invention will be described with reference to FIG. FIG. 7 is a diagram showing the main part in the fourth embodiment of the present invention.

  7 is different from the configuration (first embodiment) shown in FIG. 3 described above in that the groove 31c (see FIG. 3) is not formed in the collimator 31. In FIG. In the configuration of FIG. 7, a recess (groove) 31 f is formed at the base end of the collimator 31, and the first throttle hole 31 a and the second throttle hole 31 b communicate with each other inside the collimator 31. A hollow portion 31e is provided.

  That is, in the collimator 31, the first throttle hole 31a is connected to the second throttle hole 31b via the cavity 31e, and the second throttle hole 31b is connected to the recess 31f. Here, the central axes of the first throttle hole 31a and the second throttle hole 31b coincide on the same straight line. A filter 35 is disposed in the recess 31 f of the collimator 31. The filter (filter member) 35 is located on the central axis.

  In this configuration, the characteristic X-ray 6 from the sample 5 sequentially passes through the first throttle hole 31a of the collimator 31, the cavity 31e, the second throttle hole 31b, the filter 35, and the window 13a of the casing 13. The detector 14 is reached.

  Even in such a configuration, most of the path of the characteristic X-ray 6 between the sample 5 and the detector 14 is occupied (occupied) by the aperture holes 31a and 31b and the cavity 31e of the collimator 31, and the aperture is limited. A filter 35 is disposed downstream of the hole 31b.

  The first diaphragm hole 31 a located at the tip (front surface) of the collimator 31 is close to the irradiation surface of the primary X-ray 3 in the sample 5, and is the second diaphragm hole located at the proximal end (rear surface) of the collimator 31. 31b is arrange | positioned near the detection surface of the detector 14 through the filter 35 in between.

  Thereby, the influence by the scattered X-rays generated from the members other than the sample 5 in response to the irradiation of the primary X-ray 3 reaching the detection surface of the detector 14 can be eliminated as much as possible.

  In the configuration shown in FIG. 7, the filter 35 is disposed in the recess 31 f located at the base end of the collimator 31. However, a recess (groove) communicating with the throttle hole 31 a is provided at the tip of the collimator 31. The filter 35 may be disposed in the recess.

  Further, in the first to third embodiments, a concave portion (corresponding to the concave portion 31f in FIG. 7) is formed at the base end of the collimator 31, and a filter is arranged in the concave portion, or the tip of the collimator 31 is restricted. It is also possible to provide a recess communicating with the hole 31a and arrange the filter in the recess.

  In each of the above embodiments, by adopting a configuration in which the filters 32a and 35 are inserted into the collimator 31, there is no useless space between the sample 5 and the detector 14, and the detector 14 is brought closer to the sample 5 to be analyzed. It becomes possible.

  In addition, the collimator 31 for disposing the two throttle holes 31a and 31b (34a) between the sample 5 and the detector 14 is not separated, and the collimator 31 extends integrally from the vicinity of the sample 5 to the front surface of the detector 14. Therefore, it is possible to prevent the acquisition of scattered X-rays unnecessary for sample analysis.

  As described above, the first X-ray analyzer according to the present invention irradiates the sample 5 with the primary X-ray 3 from the X-ray source 1, and the secondary X-ray 6 generated from the sample 5 by the irradiation with the primary X-ray 3. In the X-ray analysis apparatus for detecting the sample by the detector 14 and performing the sample analysis, the first throttle hole 31a and the second throttle hole 31b whose center axes coincide with each other are provided between the sample 5 and the detector 14. The formed collimator 31 is installed, and the collimator 31 is formed with a groove 31c (31f) for arranging a filter member 32a (35) or an aperture member on the shaft, and these two throttle holes 31a. , 31b and the secondary X-ray 6 that has passed through the groove 31c (31f) is detected by the detector 14.

  Further, the second X-ray analyzer in the present invention irradiates the sample 5 with the primary X-ray 3 from the X-ray source 1 and detects the secondary X-ray 6 generated from the sample 5 by the irradiation with the primary X-ray 3. In the X-ray analysis apparatus that performs sample analysis by detecting with the detector 14, the diaphragm member 33 in which the first diaphragm hole 33a is formed is supported between the sample 5 and the detector 14, and the first diaphragm hole 33a is supported. And a collimator 31 having a second throttle hole 31b having a central axis that coincides with each other. A collimator 31 has a groove 31c (31f) for arranging a filter member 32a or an aperture member on the shaft. The secondary X-rays 6 that are formed and have passed through the two throttle holes 33a and 31b and the groove 31c (31f) are detected by the detector 14.

  Further, the third X-ray analyzer according to the present invention irradiates the sample 5 with the primary X-ray 3 from the X-ray source 1 and detects the secondary X-ray 6 generated from the sample 5 by the irradiation with the primary X-ray 3. In the X-ray analysis apparatus that detects the sample by the detector 14 and analyzes the sample, the first throttle member 33 in which the first throttle hole 33a is formed is supported between the sample 5 and the detector 14, and the first A collimator 31 that supports a second diaphragm member 34 formed with a second diaphragm hole 34a having a central axis that coincides with the diaphragm hole 33a is installed. The collimator 31 is provided with a filter member 32a or an aperture member. A groove portion 31c (31f) for placement on the shaft is formed, and the secondary X-ray 6 that has passed through the two throttle holes 33a and 34a and the groove portion 31c (31f) is detected by the detector 14.

  In each of the X-ray analyzers, a groove 31c can be formed in a portion of the collimator 31 located between the two apertures, and the filter member 32a can be disposed in the groove 31c.

  At this time, a plurality of types of filter members 32a can be installed in a selectable manner, and the selected filter members 32a can be arranged in the groove 31c.

  Further, in each of the X-ray analyzers, a groove portion 31c can be formed in a portion located between the two holes in the collimator 31, and an aperture member can be disposed in the groove portion 31c.

  At this time, a plurality of types of aperture members can be selectively installed, and the selected aperture members can be arranged in the groove 31c.

  Further, a concave portion (groove portion) 31f may be formed in a portion of the collimator 31 facing the detector 14, and the filter 35 or the aperture member may be disposed in the concave portion 31f.

  As described above, in the first X-ray analysis apparatus according to the present invention, the first throttle hole 31a and the second throttle hole 31b whose center axes coincide with each other are formed between the sample 5 and the detector 14. The collimator 31 is provided with a groove 31c (31f) for arranging the filter member 32a or the aperture member on the shaft. The two throttle holes 31a and 31b and the groove are formed in the collimator 31. The secondary X-ray 6 that has passed through 31c (31f) is detected by the detector 14.

  Therefore, even if the filter member 32a or the aperture member is disposed between the sample 5 and the detector 14 (particularly, between the first throttle hole 31a and the second throttle hole 31b), the member remains in the collimator 31. The first throttle hole 31a and the second throttle hole 31b are formed in the same collimator 31 in a state where the central axes are aligned with each other, which are arranged in the formed groove 31c (31f). Therefore, it is not necessary to realign the center axes of the first and second throttle holes 31a and 31b. Thereby, proper collimation can be performed and the fall of collimation precision can be prevented. As a result, analysis accuracy can be improved.

  Moreover, since it is not necessary to separately arrange the sample side diaphragm member below the sample support plate, it is not necessary to provide an installation space for the support member and the holding member in the prior art. Thereby, since the distance between the sample 5 and the detector 14 can be shortened as compared with the conventional case, the incident X-ray intensity to the detector 14 can be increased, and the analysis time can be shortened. .

  In the second X-ray analysis apparatus according to the present invention, the diaphragm member 33 in which the first diaphragm hole 33a is formed is supported between the sample 5 and the detector 14, and the first diaphragm hole 33a is centered with each other. A collimator 31 having a second aperture hole 31b having the same axis is provided, and the collimator 31 is provided with a groove 31c (31f) for arranging a filter member 32a or an aperture member on the axis. The secondary X-ray 6 that has passed through the two throttle holes 33a and 31b and the groove 31c (31f) is detected by the detector 14.

  Further, in the third X-ray analyzer according to the present invention, the first diaphragm member 33 having the first diaphragm hole 33a formed between the sample 5 and the detector 14 is supported and the first diaphragm is formed. A collimator 31 that supports a second diaphragm member 34 in which a second diaphragm hole 34a having a central axis that coincides with the hole 33a is provided. The collimator 31 has a filter member 32a or an aperture member disposed on the shaft. A groove portion 31c (31f) is arranged for placement on the top, and the secondary X-ray 6 that has passed through the two throttle holes 33a, 34a and the groove portion 31c (31f) is detected by the detector 14.

  Even with these configurations, even if the filter member 32a or the aperture member is disposed between the sample 5 and the detector 14 (particularly, between the first throttle hole and the second throttle hole), the member remains the collimator. Therefore, it is not necessary to realign the center axes of the first and second throttle holes. Thereby, proper collimation can be performed and the fall of collimation precision can be prevented. As a result, analysis accuracy can be improved.

  Further, similarly to the above, it is not necessary to separately arrange the sample side diaphragm member below the sample support plate, so that it is not necessary to provide a space for installing the support member and the holding member in the prior art, and the sample 5 and the detector 14 Can be shortened compared to the conventional method. Thereby, the incident X-ray intensity to the detector can be increased, and the analysis time can be shortened.

It is a schematic block diagram which shows the principal part of the X-ray analyzer in a prior art. It is a schematic block diagram which shows the X-ray analyzer in this invention. It is a figure which shows the principal part in 1st Example of this invention. It is a bird's-eye view which shows the detection system in this invention. It is a figure which shows the principal part in 2nd Example of this invention. It is a figure which shows the principal part in 3rd Example of this invention. It is a figure which shows the principal part in 4th Example of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... X-ray tube (X-ray source), 2 ... Primary side filter, 3 ... Primary X-ray, 4 ... Sample support plate, 5 ... Sample, 6 ... Characteristic X-ray (secondary X-ray), 14 ... Detector , 31 ... collimator, 31a ... first restrictor hole, 31b ... second restrictor hole, 31c ... groove, 31f ... recess (groove), 32 ... filter support member, 32a ... filter, 33 ... restrictor member, 33a ... penetrating Hole (first restricting hole), 34 ... restricting member, 34a ... through hole (second restricting hole), 35 ... filter

Claims (7)

In an X-ray analysis apparatus for performing sample analysis by irradiating a sample with primary X-rays from an X-ray source and detecting secondary X-rays generated from the sample by irradiation with primary X-rays using a detector, A collimator having a first aperture hole and a second aperture hole whose center axes coincide with each other is installed between the filter member and the aperture member on the axis. An X-ray analyzer characterized in that a groove is formed, and secondary X-rays that have passed through these two apertures and the groove are detected by a detector. In an X-ray analysis apparatus for performing sample analysis by irradiating a sample with primary X-rays from an X-ray source and detecting secondary X-rays generated from the sample by irradiation with primary X-rays using a detector, In the meantime, a collimator is installed which supports the diaphragm member in which the first diaphragm hole is formed and is formed with a second diaphragm hole having a central axis that coincides with the first diaphragm hole. An X-ray analysis is characterized in that a groove portion for arranging a filter member or an aperture member on the shaft is formed, and secondary X-rays passing through the two throttle holes and the groove portion are detected by a detector. apparatus. In an X-ray analysis apparatus for performing sample analysis by irradiating a sample with primary X-rays from an X-ray source and detecting secondary X-rays generated from the sample by irradiation with primary X-rays using a detector, The first throttle member in which the first throttle hole is formed is supported between the first throttle hole and the second throttle member in which the second throttle hole having the same central axis as the first throttle hole is supported. The collimator is provided with a groove portion for arranging a filter member or an aperture member on the shaft, and secondary X-rays passing through the two throttle holes and the groove portion are detected by the detector. An X-ray analyzer characterized in that it is detected by: The X-ray analyzer according to any one of claims 1 to 3, wherein in the collimator, the groove is located between the two aperture holes. The X-ray analysis apparatus according to claim 4, wherein a plurality of types of filter members are selectably provided, and the selected filter members are disposed in the groove portion. The X-ray analysis apparatus according to claim 4, wherein a plurality of types of aperture members are selectably provided, and the selected aperture members are disposed in the groove portion. The X-ray analyzer according to any one of claims 1 to 3, wherein in the collimator, the groove portion is located in a portion facing the detector.

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