JP2009122597A5 - - Google Patents
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- JP2009122597A5 JP2009122597A5 JP2007299304A JP2007299304A JP2009122597A5 JP 2009122597 A5 JP2009122597 A5 JP 2009122597A5 JP 2007299304 A JP2007299304 A JP 2007299304A JP 2007299304 A JP2007299304 A JP 2007299304A JP 2009122597 A5 JP2009122597 A5 JP 2009122597A5
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007299304A JP4997073B2 (en) | 2007-11-19 | 2007-11-19 | Laser direct writing system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007299304A JP4997073B2 (en) | 2007-11-19 | 2007-11-19 | Laser direct writing system |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2009122597A JP2009122597A (en) | 2009-06-04 |
JP2009122597A5 true JP2009122597A5 (en) | 2010-04-15 |
JP4997073B2 JP4997073B2 (en) | 2012-08-08 |
Family
ID=40814772
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007299304A Active JP4997073B2 (en) | 2007-11-19 | 2007-11-19 | Laser direct writing system |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4997073B2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7383341B2 (en) | 2019-11-27 | 2023-11-20 | 株式会社オーク製作所 | Direct exposure equipment and substrate exposure method |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62201414A (en) * | 1986-02-28 | 1987-09-05 | Toshiba Mach Co Ltd | Laser drawing device |
JPH07333859A (en) * | 1994-06-03 | 1995-12-22 | Fujitsu Ltd | Exposure device |
JP2000338432A (en) * | 1999-05-31 | 2000-12-08 | Dainippon Screen Mfg Co Ltd | Laser exposure device and its method |
JP4076341B2 (en) * | 2001-11-29 | 2008-04-16 | 大日本スクリーン製造株式会社 | Laser drawing method and apparatus |
JP2005121959A (en) * | 2003-10-17 | 2005-05-12 | Pentax Corp | Double-sided exposure apparatus |
JP4508743B2 (en) * | 2004-03-31 | 2010-07-21 | 日立ビアメカニクス株式会社 | Pattern exposure method and pattern exposure apparatus |
-
2007
- 2007-11-19 JP JP2007299304A patent/JP4997073B2/en active Active
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