JP2009109537A - Liquid crystal device and method of manufacturing it - Google Patents

Liquid crystal device and method of manufacturing it Download PDF

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JP2009109537A
JP2009109537A JP2007278515A JP2007278515A JP2009109537A JP 2009109537 A JP2009109537 A JP 2009109537A JP 2007278515 A JP2007278515 A JP 2007278515A JP 2007278515 A JP2007278515 A JP 2007278515A JP 2009109537 A JP2009109537 A JP 2009109537A
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liquid crystal
region
polarizing plate
crystal device
crystal cell
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Hiroshi Tsukada
浩 塚田
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Citizen Holdings Co Ltd
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Citizen Holdings Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a liquid crystal device, hardly separating a polarizer from a liquid crystal cell, and also causing no deterioration of characteristics in the main area such as a display area, and method of manufacturing it. <P>SOLUTION: A polarizer 1 stuck to a liquid crystal cell enclosing liquid crystal material between upper and lower substrates 2, 3 made of plastic includes an area 24 having high bonding strength and an area 25 having bonding strength lower than the area 24, and at least the peripheral part of the polarizer 1 is an area having high bonding strength. The area having high bonding strength is made by plasma cleaning using a mask or the like. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

この発明は、プラスチックフィルムなど可撓性のある基板を使った液晶装置の構造とその製造方法に関し、さらに詳しくは可撓性基板と偏光板の接着構造とその製造方法に関わる。   The present invention relates to a structure of a liquid crystal device using a flexible substrate such as a plastic film and a manufacturing method thereof, and more particularly to a bonding structure of a flexible substrate and a polarizing plate and a manufacturing method thereof.

プラスチックフィルム基板からなる液晶装置は、軽量で薄いという性質を活かし携帯電話機の表示パネルとして実用化されたことがある。最近では、割れにくい、曲げられる、平面形状の自由度が高い、という特徴にも注目が集まるようになり様々な応用製品が提案されるようになった。   A liquid crystal device made of a plastic film substrate has been put into practical use as a display panel of a mobile phone taking advantage of its light weight and thin properties. Recently, attention has been focused on the features of being hard to break, being bent, and having a high degree of freedom in planar shape, and various applied products have been proposed.

広く普及している液晶装置は、上下基板の間に液晶材料を封入した液晶セルを2枚の偏
光板で挟んだ構造となっている。我々はプラスチック基板を使ってこの構造の液晶装置を試作し長期信頼性試験にかけたところ偏光板周辺部が剥がれてきた。この原因として、これまでガラス基板で作っていた液晶装置にくらべ、プラスチック基板を使った液晶装置の偏光板の接着(粘着)強度が弱いことが判明した。これはガラス基板にくらべプラスチック基板は表面が汚れ易いためと推定される。
A widely used liquid crystal device has a structure in which a liquid crystal cell in which a liquid crystal material is sealed is sandwiched between two polarizing plates between upper and lower substrates. When we prototyped a liquid crystal device with this structure using a plastic substrate and conducted a long-term reliability test, the periphery of the polarizing plate was peeled off. As a cause of this, it has been found that the adhesion (adhesion) strength of the polarizing plate of a liquid crystal device using a plastic substrate is weaker than that of a liquid crystal device conventionally made of a glass substrate. This is presumably because the surface of the plastic substrate is more easily stained than the glass substrate.

この根拠として基板表面の洗浄により偏光板の接着強度を向上させる方法があげられる(例えば、下記特許文献1参照)。特許文献1では、オゾンを供給しながらUV光を基板表面に照射し偏光板の接着性を向上させた。なお基板はガラスからなり、汚染物質はシリコン樹脂であった。
特開平9−281474号公報
As a basis for this, there is a method of improving the adhesive strength of the polarizing plate by cleaning the substrate surface (for example, see Patent Document 1 below). In Patent Document 1, UV light is applied to the substrate surface while ozone is supplied to improve the adhesion of the polarizing plate. The substrate was made of glass, and the contaminant was silicon resin.
JP-A-9-281474

そこで我々も液晶装置の基板表面の汚染除去に有効と言われるプラズマ洗浄法をプラスチック基板からなる液晶セルに適用した。しかしながら偏光板の接着強度は向上したものの、基板表面が劣化し液晶装置の表示画像品質が低下してしまった。   Therefore, we also applied a plasma cleaning method, which is said to be effective for removing contamination on the substrate surface of a liquid crystal device, to a liquid crystal cell made of a plastic substrate. However, although the adhesive strength of the polarizing plate was improved, the surface of the substrate was deteriorated and the display image quality of the liquid crystal device was lowered.

我々が使用したプラズマ洗浄装置は、大気圧下で誘電体間の放電により得られる酸素ラジカルが表面の汚染物質と化学結合し、この汚染物質を除去するものであり、表面への物理的ダメージが少ないと言われている。ここで図4により我々が使用したプラスチック基板の層構造を説明する。図4はプラスチック基板の表面側の断面図である。ポリカーボネイトからなる基板支持材45上には、アンダーコート層44、有機ガスバリア層43、無機ガスバリア層42、耐溶剤コート層41が積層している。各層の厚みは数十nmから数μmである。前述の表示画像品質の劣化は、プラズマ洗浄により耐溶剤コート層あるいはそれ以下の層が目視できるまで変質したものと考えられる。   In the plasma cleaning equipment we used, oxygen radicals obtained by discharge between dielectrics under atmospheric pressure chemically bond with surface contaminants to remove these contaminants, and there is no physical damage to the surface. It is said that there are few. Here, the layer structure of the plastic substrate we used will be described with reference to FIG. FIG. 4 is a cross-sectional view of the surface side of the plastic substrate. An undercoat layer 44, an organic gas barrier layer 43, an inorganic gas barrier layer 42, and a solvent-resistant coat layer 41 are laminated on a substrate support material 45 made of polycarbonate. The thickness of each layer is several tens of nm to several μm. The above-described deterioration in display image quality is considered to have been altered by plasma cleaning until the solvent-resistant coating layer or a layer below it is visible.

本発明は、上記の問題に鑑みてなされたものであり、液晶セルから偏光板が剥がれにくく、同時に表示領域等の主要領域では特性劣化がない液晶装置とその製造方法を提供することを目的とする。   The present invention has been made in view of the above problems, and an object of the present invention is to provide a liquid crystal device in which a polarizing plate is hardly peeled off from a liquid crystal cell and at the same time has no characteristic deterioration in a main region such as a display region and a manufacturing method thereof. To do.

上記目的を達成するため、本発明は、上下基板の間に液晶材料を封入した液晶セルを有し、液晶セルの上下基板の少なくとも一方がプラスチック基板であり、該プラスチック基板には偏光板が貼り付けられた液晶装置において、偏光板が貼り付けられた領域には、接
着強度の強い第1領域と、この第1領域より接着強度の弱い第2領域とがあり、少なくとも偏光板の周辺部の一部は前記第1領域になっていることを特徴とするものである。
In order to achieve the above object, the present invention includes a liquid crystal cell in which a liquid crystal material is sealed between upper and lower substrates, and at least one of the upper and lower substrates of the liquid crystal cell is a plastic substrate, and a polarizing plate is attached to the plastic substrate. In the attached liquid crystal device, the region to which the polarizing plate is attached has a first region having a high adhesive strength and a second region having a lower adhesive strength than the first region, and at least a peripheral portion of the polarizing plate. A part is the first region.

液晶セルが表示領域を有し、少なくとも該表示領域の一部は前記第2領域になっていることが好ましい。   It is preferable that the liquid crystal cell has a display area, and at least a part of the display area is the second area.

第2領域の接着強度は、表示画像品質が劣化しない程度の強度であることが好ましい。   The adhesive strength of the second region is preferably a strength that does not deteriorate the display image quality.

液晶セルと偏光板の平面外形が一致していてもよい。   The planar external shapes of the liquid crystal cell and the polarizing plate may be the same.

また本発明は、上下基板の間に液晶材料を封入した液晶セルを有し、液晶セルの上下基板の少なくとも一方がプラスチック基板であり、該プラスチック基板には偏光板が貼り付けられた液晶装置の製造方法において、偏光板の周辺部の一部を含む領域を選択的に洗浄し、該領域の接着強度を強くしたことを特徴とするものである。   The present invention also includes a liquid crystal cell in which a liquid crystal material is sealed between upper and lower substrates, at least one of the upper and lower substrates of the liquid crystal cell being a plastic substrate, and a polarizing plate attached to the plastic substrate. In the manufacturing method, a region including a part of the peripheral portion of the polarizing plate is selectively washed to increase the adhesive strength of the region.

選択的に洗浄する領域をマスクし、液晶セル全面を洗浄するのが好ましい。   It is preferable to clean the entire surface of the liquid crystal cell by masking the region to be selectively cleaned.

選択的な洗浄は、プラズマ洗浄であってもよい。   The selective cleaning may be plasma cleaning.

選択的な洗浄は、UV洗浄であってもよい。   The selective cleaning may be a UV cleaning.

偏光板の周辺部の接着強度を強くすることで周辺部から始まる偏光板の剥がれに対し強化した。接着強度を強くするには前述のように基板表面に物理化学的処理を施すことで達成できる。プラスチック基板の表面はこれらの物理化学的処理に対して影響を受けやすいが、表示領域など液晶装置の主要部に接着強度の弱い領域を割り当てることで、主要部の基板表面が劣化せず見栄え等に関わる特性が維持される。さらに主要部は基板と接着しているので、偏光板の浮きにともなう干渉縞の発生や気泡の抱き込みが起きにくい。   By strengthening the adhesive strength of the peripheral part of the polarizing plate, it strengthened against peeling of the polarizing plate starting from the peripheral part. Increasing the adhesive strength can be achieved by applying a physicochemical treatment to the substrate surface as described above. The surface of the plastic substrate is easily affected by these physicochemical treatments, but by assigning areas with weak adhesive strength to the main parts of the liquid crystal device such as the display area, the surface of the main part does not deteriorate and looks good The characteristics related to are maintained. Further, since the main part is bonded to the substrate, it is difficult for interference fringes and bubbles to be held in due to the floating of the polarizing plate.

一般的には液晶セルの平面外形は偏光板の平面外形よりも大きい。しかしデザイン上の理由や単純なラミネート構造を希望する場合、液晶セルと偏光板の平面外形がほぼ一致することがある。しかし本発明は、偏光板の周辺部の接着強度を強くすることで周辺部から始まる偏光板の剥がれに強くできている。   In general, the planar outline of the liquid crystal cell is larger than the planar outline of the polarizing plate. However, when a design reason or a simple laminate structure is desired, the planar outlines of the liquid crystal cell and the polarizing plate may be substantially the same. However, the present invention is strong against peeling of the polarizing plate starting from the peripheral portion by increasing the adhesive strength of the peripheral portion of the polarizing plate.

前述のように接着強度が弱くなるのは表面の汚れが主な原因である。特定の領域の接着強度を大きくするには、この領域だけ選択的に洗浄すれば良い。液体を使う洗浄は様々な短所があるので、大気中で可能なプラズマ洗浄やUV洗浄が優れている。   As described above, the adhesion strength is weakened mainly due to surface contamination. In order to increase the adhesive strength in a specific region, it is sufficient to selectively clean only this region. Since cleaning using liquid has various disadvantages, plasma cleaning and UV cleaning that are possible in the atmosphere are excellent.

選択的に洗浄するためには、プラズマビームやUV光を絞って特定の領域を走査しても良いし、洗浄しない領域をマスクし液晶セル全面をシャワー状のプラズマないし光束の広がったUV光で洗浄しても良い。マスクを使う方法は走査する方法にくらべ一般に機械装置が簡単であり高速でもある。   In order to perform selective cleaning, a specific region may be scanned by narrowing the plasma beam or UV light, or the entire surface of the liquid crystal cell may be masked with a shower-like plasma or UV light with a spread of light flux. It may be washed. The method using the mask is generally simpler and faster than the scanning method.

以下、図面を参照しながらこの発明の実施の形態について詳細に説明する。なお、図面の説明において、同一または相当要素には同一の符号を付し、重複する説明は省略する。また縮尺は適宜変更している。
(第1実施形態)
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the description of the drawings, the same or corresponding elements are denoted by the same reference numerals, and redundant description is omitted. The scale is changed as appropriate.
(First embodiment)

図1と図2を用いて本発明の第1の実施形態を説明する。図1は第1の実施形態の積層
構造を示すため層別に分解した斜視図である。図2は洗浄工程の斜視図(a)と偏光板貼付け後の液晶装置の平面図(b)である。
A first embodiment of the present invention will be described with reference to FIGS. FIG. 1 is an exploded perspective view showing layers according to the first embodiment. FIG. 2 is a perspective view (a) of the cleaning process and a plan view (b) of the liquid crystal device after applying the polarizing plate.

図1において本実施形態の液晶装置の層構造を説明する。図の下から、下側の偏光板4、下側の基板3、上側の基板2、上側の偏光板1が積層している。上下の基板2、3は周辺部をシール(図示せず)で接着されており、上下の基板2、3とシールからなる空間に液晶が封入されている。上下の基板2、3は偏光板1、4側に図4で示した層構造を有し、基板支持材がポリカーボネートからなり、厚さが0.1mmのシートである。上下の偏光板1、4は厚さが0.1mmで偏光層をTAC(トリアセチルセルロース)で挟み込んだシートで、上下の基板2、3側に粘着層(図示せず)を有している。なおシールは幅が1mmで厚さが5μmのエポキシ系接着剤である。なお、本実施形態では、偏光板1,4、基板2,3の平面外形がすべて等しくなっているが、必ずしも一致している必要はなく、例えば偏光板が基板より大きくなっているなど、平面外形が異なっていてもよい。   The layer structure of the liquid crystal device of this embodiment will be described with reference to FIG. From the bottom of the figure, a lower polarizing plate 4, a lower substrate 3, an upper substrate 2, and an upper polarizing plate 1 are laminated. The upper and lower substrates 2 and 3 are bonded at their peripheral portions with a seal (not shown), and liquid crystal is sealed in a space formed by the upper and lower substrates 2 and 3 and the seal. The upper and lower substrates 2 and 3 have the layer structure shown in FIG. 4 on the side of the polarizing plates 1 and 4, the substrate support material is made of polycarbonate, and is a sheet having a thickness of 0.1 mm. The upper and lower polarizing plates 1 and 4 are sheets having a thickness of 0.1 mm and sandwiching a polarizing layer with TAC (triacetyl cellulose), and have adhesive layers (not shown) on the upper and lower substrates 2 and 3 side. . The seal is an epoxy adhesive having a width of 1 mm and a thickness of 5 μm. In the present embodiment, the planar outer shapes of the polarizing plates 1 and 4 and the substrates 2 and 3 are all the same, but it is not always necessary to match, for example, the planar surface is larger than the substrate. The external shape may be different.

図2(a)において洗浄工程を説明する。液晶注入済みの基板2、3(以後液晶セルと称する)の中央部にマスク22を置き、上方からプラズマシャワー21が吹き付けられている。大気圧下でプラズマ洗浄を実施しており、プラズマを発生する電極から液晶セルまでの距離は5mmである。洗浄量は、電極に供給するガスの量とプラズマシャワー21中を通過する液晶セルの搬送速度(正確には時間)で制御する。ちなみに本試作では100mm/sで実施した。マスクはゴムシートを使用したが、黒色紙やアルミ箔なども使える。   The cleaning process will be described with reference to FIG. A mask 22 is placed in the center of the substrates 2 and 3 (hereinafter referred to as liquid crystal cells) into which liquid crystal has been injected, and a plasma shower 21 is sprayed from above. Plasma cleaning is performed under atmospheric pressure, and the distance from the electrode that generates plasma to the liquid crystal cell is 5 mm. The amount of cleaning is controlled by the amount of gas supplied to the electrode and the transport speed (more precisely, time) of the liquid crystal cell passing through the plasma shower 21. By the way, in this prototype, it was carried out at 100 mm / s. The mask used a rubber sheet, but black paper or aluminum foil can also be used.

図2(b)において偏光板を貼った状態の液晶装置を説明する。斜線で示した偏光板1の周辺部は(a)でプラズマ洗浄された領域24であり、接着強度が強くなっている。領域24の内側の領域25は、マスク22によりプラズマ洗浄されなかったため接着強度は領域24より弱い状態のままである。この領域25には画像表示部23がある。
(第2実施形態)
The liquid crystal device with the polarizing plate attached in FIG. The peripheral portion of the polarizing plate 1 indicated by the oblique lines is the region 24 plasma-cleaned in FIG. The region 25 inside the region 24 is not plasma-cleaned by the mask 22, so that the adhesive strength remains weaker than the region 24. This area 25 has an image display unit 23.
(Second Embodiment)

図3を用いて本発明の第2の実施形態を説明する。図3は第2の実施形態の分解斜視図である。   A second embodiment of the present invention will be described with reference to FIG. FIG. 3 is an exploded perspective view of the second embodiment.

まず装置の概要を説明する。第2実施形態の液晶装置は、照明用のエレクトロルミネセンスシート301の上に、下側の偏光板34、下側の基板33及び上側の基板32を含む液晶セル、上側の偏光板31が積層したものである。材料は第1の実施形態と同じである。上側の基板32上に実線で示した領域は、それぞれ第1の画像表示領域35、スイッチボタン表示領域37、第2の画像表示領域38、であり、それぞれに対して液晶層側に電極が形成されている。第1と第2の画像表示領域35、38とスイッチボタン領域37は、動作モードに応じていづれかが点灯し視認できるようになる。スイッチボタン領域37の下部にはスイッチシート30が貼り付けられ、可視状態にあるスイッチボタンを押すとスイッチシート30が押圧を検知し制御ブロック(図示せず)に信号を送る。   First, an outline of the apparatus will be described. In the liquid crystal device of the second embodiment, a lower polarizing plate 34, a liquid crystal cell including a lower substrate 33 and an upper substrate 32, and an upper polarizing plate 31 are stacked on an electroluminescence sheet 301 for illumination. It is a thing. The material is the same as in the first embodiment. The regions indicated by solid lines on the upper substrate 32 are a first image display region 35, a switch button display region 37, and a second image display region 38, respectively, and electrodes are formed on the liquid crystal layer side with respect to each. Has been. The first and second image display areas 35 and 38 and the switch button area 37 are turned on and can be visually recognized according to the operation mode. A switch sheet 30 is affixed to the lower part of the switch button area 37. When the switch button in the visible state is pressed, the switch sheet 30 detects the press and sends a signal to a control block (not shown).

次に偏光板31の粘着情況を説明する。上側の基板32上の領域36、39にはプラズマ洗浄時にマスクが置かれる領域である。このため偏光板31を上側の基板32に貼り付けると、領域36、39が接着強度の弱い領域となる。この接着強度の弱い領域36、39の内部に第1と第2の表示領域35、38がある。スイッチボタン領域37は、押圧が加わるので表示品質よりも気泡発生や偏光板浮きが懸念されるので、領域36、39よりも接着強度の強い領域とした。なお、下側の偏光板34にも接着強度の強い領域と弱い領域を設けた方が好ましい。   Next, the adhesive situation of the polarizing plate 31 will be described. The regions 36 and 39 on the upper substrate 32 are regions where a mask is placed during plasma cleaning. For this reason, when the polarizing plate 31 is attached to the upper substrate 32, the regions 36 and 39 become regions having low adhesive strength. The first and second display areas 35 and 38 are inside the areas 36 and 39 having low adhesive strength. Since the switch button area 37 is pressed, there is a concern about the generation of bubbles and the floating of the polarizing plate rather than display quality. It is preferable that the lower polarizing plate 34 is also provided with a region having a strong adhesive strength and a region having a weak adhesive strength.

第1と第2の実施形態では偏光板の周辺部全てを接着強度の強い領域としたが、周辺部
の一部だけ接着強度を強くしても良い。この場合、剥がれ防止としてコーナー部を接着強度の強い領域とすることが好ましい。また第1と第2の実施形態では洗浄方法としてプラズマ洗浄方式を採用したがUV光洗浄でも良い。我々は、マスクを使用し波長が254nm1500mJ/cm2から2000mJ/cm2のUV光下で送り速度を2.2m/minとし同等の効果を得た。
In the first and second embodiments, the entire peripheral portion of the polarizing plate is a region having a high adhesive strength, but the adhesive strength may be increased only for a part of the peripheral portion. In this case, it is preferable to make the corner portion a region having a high adhesive strength to prevent peeling. In the first and second embodiments, the plasma cleaning method is adopted as the cleaning method, but UV light cleaning may be used. We used a mask and obtained the same effect at a feed rate of 2.2 m / min under UV light with a wavelength of 254 nm 1500 mJ / cm 2 to 2000 mJ / cm 2.

本発明の第1の実施形態の分解斜視図である。It is a disassembled perspective view of the 1st Embodiment of this invention. 本発明の第1の実施形態の洗浄工程の斜視図(a)と液晶装置の平面図(b)である。It is the perspective view (a) of the washing | cleaning process of the 1st Embodiment of this invention, and the top view (b) of a liquid crystal device. 本発明の第2の実施形態の分解斜視図である。It is a disassembled perspective view of the 2nd Embodiment of this invention. 従来例1の断面図である。It is sectional drawing of the prior art example 1. FIG.

符号の説明Explanation of symbols

1、31 上側の偏光板
2、32 上側の基板
3、33 下側の基板
4、34 下側の偏光板
21 プラズマシャワー
22 マスク
23、35、38 画像表示領域
24 接着強度の強い領域(第1領域)
25、36、39 接着強度の弱い領域(第2領域)
37 スイッチボタン領域
30 スイッチシート
301 エレクトロルミネセンスシート
1, 31 Upper polarizing plate 2, 32 Upper substrate 3, 33 Lower substrate 4, 34 Lower polarizing plate 21 Plasma shower 22 Masks 23, 35, 38 Image display region 24 High bonding strength region (first region)
25, 36, 39 Area with weak adhesive strength (second area)
37 Switch button area 30 Switch sheet 301 Electroluminescence sheet

Claims (8)

上下基板の間に液晶材料を封入した液晶セルを有し、前記液晶セルの前記上下基板の少なくとも一方がプラスチック基板であり、該プラスチック基板には偏光板が貼り付けられた液晶装置において、
前記偏光板が貼り付けられた領域には、接着強度の強い第1領域と、この第1領域より接着強度の弱い第2領域とがあり、
少なくとも前記偏光板の周辺部の一部は前記第1領域になっていることを特徴とする液晶装置。
In a liquid crystal device having a liquid crystal cell in which a liquid crystal material is sealed between upper and lower substrates, at least one of the upper and lower substrates of the liquid crystal cell is a plastic substrate, and a polarizing plate is attached to the plastic substrate,
In the region where the polarizing plate is attached, there are a first region having a strong adhesive strength and a second region having a weaker adhesive strength than the first region,
At least a part of the periphery of the polarizing plate is the first region.
前記液晶セルが表示領域を有し、少なくとも該表示領域の一部は前記第2領域になっていることを特徴とする請求項1に記載の液晶装置。   The liquid crystal device according to claim 1, wherein the liquid crystal cell has a display area, and at least a part of the display area is the second area. 前記第2領域の接着強度は、表示画像品質が劣化しない程度の強度であることを特徴とする請求項1または2記載の液晶装置。   3. The liquid crystal device according to claim 1, wherein the adhesive strength of the second region is a strength that does not deteriorate display image quality. 前記液晶セルと前記偏光板の平面外形が一致することを特徴とする請求項1〜3いずれか一項に記載の液晶装置。   The liquid crystal device according to claim 1, wherein the liquid crystal cell and the polarizing plate have a planar outer shape that matches. 上下基板の間に液晶材料を封入した液晶セルを有し、前記液晶セルの前記上下基板の少なくとも一方がプラスチック基板であり、該プラスチック基板には偏光板が貼り付けられた液晶装置の製造方法において、
前記偏光板の周辺部の一部を含む領域を選択的に洗浄し、該領域の接着強度を強くしたことを特徴とする液晶装置の製造方法。
In a method of manufacturing a liquid crystal device having a liquid crystal cell in which a liquid crystal material is sealed between upper and lower substrates, at least one of the upper and lower substrates of the liquid crystal cell being a plastic substrate, and a polarizing plate attached to the plastic substrate ,
A method of manufacturing a liquid crystal device, wherein a region including a part of a peripheral portion of the polarizing plate is selectively washed to increase the adhesive strength of the region.
前記選択的に洗浄する領域をマスクし、前記液晶セル全面を洗浄したことを特徴とする請求項5に記載の液晶装置の製造方法。   6. The method of manufacturing a liquid crystal device according to claim 5, wherein the selectively cleaned region is masked and the entire surface of the liquid crystal cell is cleaned. 前記選択的な洗浄がプラズマ洗浄であることを特徴とする請求項5または6に記載の液晶装置の製造方法。   The method for manufacturing a liquid crystal device according to claim 5, wherein the selective cleaning is plasma cleaning. 前記選択的な洗浄がUV洗浄であることを特徴とする請求項5または6に記載の液晶装置の製造方法。   The method of manufacturing a liquid crystal device according to claim 5, wherein the selective cleaning is UV cleaning.
JP2007278515A 2007-10-26 2007-10-26 Liquid crystal device and method of manufacturing it Pending JP2009109537A (en)

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US20110187960A1 (en) * 2010-02-04 2011-08-04 Hitachi Displays, Ltd. Display device and manufacturing method thereof
US8610837B2 (en) 2010-02-04 2013-12-17 Hitachi Displays, Ltd. Display device and manufacturing method thereof
JP2013120713A (en) * 2011-12-08 2013-06-17 Stanley Electric Co Ltd Light-emitting plate, light source device, lighting device, and manufacturing method for light-emitting plate
JP2013125262A (en) * 2011-12-16 2013-06-24 Technology Research Association For Advanced Display Materials Bonding material, display element, and method for manufacturing display element
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WO2016004699A1 (en) * 2014-07-08 2016-01-14 京东方科技集团股份有限公司 Display apparatus
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