JP2009103275A - Welding method and welding structure of fluid contact member - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a welding method and a welding structure of a fluid contact member, capable of further surely welding a main body and the fluid contact member, without directly heating a welding member. <P>SOLUTION: Welding groove parts 50 and 55 are formed of a first projection strip part 15 formed over the whole periphery in a predetermined position of the main body 11 and second projection strip parts 41 and 46 formed over the whole periphery in an outer peripheral edge part of the fluid contact members 40 and 45. The welding members 60 and 65 having melting performance are interposed in the welding groove parts 50 and 55. Any one or both of the first projection strip part 15 and the second projection strip parts 41 and 46 are pressed from any one or both of the outer peripheral side of the first projection strip part 15 and the inner peripheral side of the second projection strip parts 41 and 46, and any one or both of the first projection strip part 15 and the second projection strip parts 41 and 46 are deformed to the welding groove part 50, 55 side, and are welded by melting the welding members 60 and 65 by indirectly heating via the first projection strip part 15 and the second projection strip parts 41 and 46. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a welding method and a welding structure for welding a fluid contact member to a body main body of a fluid device via a welding member.

  In the field of semiconductor manufacturing and the like, in particular, the semiconductor cleaning process is carried out in a very clean environment that does not allow the entry of slight impurities. At that time, since fluids to be controlled such as pure water, high-temperature chemicals, or chemicals having metal corrosiveness are used, fluid devices made of resins with high heat resistance, corrosion resistance, chemical resistance, etc. such as fluororesin are used. It is done. As such a fluid device, a diaphragm device such as a diaphragm valve or a diaphragm pump, a bellows device such as a bellows valve or a bellows pump, and the like are known. By disposing in this way, the metal part of the fluid device and the controlled fluid are prevented from coming into contact with each other, and impurities and the like are prevented from being mixed into the controlled fluid that circulates.

  By the way, in the conventional fluid device, the outer peripheral edge portion of the fluid contact member is press-fitted and fixed at a predetermined position of the body body, but when used in a high temperature environment (for example, about 150 ° C.). However, since the fixing portion is deformed by stress and heat, the sealing performance cannot be sufficiently secured, and the controlled fluid may leak to the outside. Therefore, as a method for improving the sealing performance of the fixed portion of the fluid contact member, a method of welding the fluid contact member to the body main body via a welding member is known.

  In this welding method, for example, a groove is formed by a ridge formed over the entire circumference of a predetermined position of the body body and a ridge formed over the entire circumference of the outer peripheral edge of the fluid contact member. Then, the body main body and the fluid contact member are welded by heating and dissolving a welding rod (welding member) made of PFA into the groove. However, in the method in which the welding rod is melted and poured into the groove portion, the melted welding rod (welding member) is sequentially poured over the entire circumference of the groove portion. In some cases, the controlled fluid may leak to the outside through the joint. Further, since this method is performed manually, there is a problem in terms of work efficiency.

  On the other hand, as another welding method, there is a method in which a welding member interposed over the entire circumference between the body main body and the fluid contact member is heated by a heating member at one time and welded (see, for example, Patent Document 1). ). In this welding method, as shown in FIG. 5, a protrusion 215 having a notch 216 at the tip is formed at a predetermined position (fixed part of the fluid contact member) of the body main body 211 and the outer peripheral edge of the fluid contact member 240. A protrusion 241 having a notch 242 at the tip is formed at the tip, and the notch 216 of the protrusion 215 of the body main body 211 and the notch 242 of the protrusion 241 of the fluid contact member 240 are arranged to face each other. A meltable welding member 260 is interposed in the groove 250 and the heating member 270 is pressed against the welding member 260. As a result, the welding member 260 is fluidly melted, the temperature around the welded portion is increased, and the protrusion 215 of the body main body 211 and the protrusion 241 of the fluid contact member 240 expand (soften) to dissolve. The weld member 260, the protrusion 215 of the body main body 211, and the protrusion 241 of the fluid contact member 240 are melted and welded. In the drawing, reference numeral 271 denotes an upper heating part for abutting and heating the welding member 260, 272 denotes a side heating part for heating the welding member 260 from the side surface of the protrusion 215 of the body main body 211, and 273 This is a side surface heating unit for heating the welding member 260 from the side surface of the protrusion 241 of the fluid contact member 240.

However, in the above conventional welding method, since the heating member is brought into contact with the welding member and melted, the molten welding member adheres to the heating member and becomes dirty, or when the heating member is released, There was a problem such as peeling off from the groove.
JP 2005-163877 A

  The present invention has been made in view of the above points, and provides a welding method and a welding structure for a fluid contact member that can more reliably weld a body body and a fluid contact member without directly heating the welding member. Is.

  That is, the invention of claim 1 is a welding method for welding a fluid contact member to a body body of a fluid device via a welding member, and the first protrusion formed at a predetermined position of the body body over the entire circumference. A weld groove is formed by the strip and a second protrusion formed on the outer peripheral edge of the fluid contact member over the entire circumference, and a weld member having a meltability is interposed in the weld groove, and the first One or both of the first ridge and the second ridge are pressed from one or both of the outer peripheral side of the one ridge and the inner peripheral side of the second ridge. Either one or both of the ridge and the second ridge are deformed toward the weld groove, and the welding member is heated indirectly through the first and second ridges. The present invention relates to a welding method for a fluid contact member, characterized by melting and welding.

  According to a second aspect of the present invention, the outer peripheral surface of the first ridge portion is formed in a tapered shape so as to be thin in the tip direction, and the taper-shaped outer peripheral surface is formed from directly above the first ridge portion. The fluid contact member welding method according to claim 1, wherein the first projecting ridge portion is deformed to the weld groove portion side by pressing against the weld groove portion.

  According to a third aspect of the present invention, the inner peripheral surface of the second ridge is formed in a tapered shape so as to be thin in the tip direction, and the tapered inner periphery is formed from directly above the second ridge. 3. The fluid contact member welding method according to claim 1, wherein the second protrusion is deformed toward the weld groove by pressing against a surface.

  Invention of Claim 4 has a 1st heating part heated from the outer peripheral surface side of said 1st protrusion part, and a 2nd heating part heated from the inner peripheral surface side of said 2nd protrusion part, Said 1st One or both of the inner peripheral surface of the one heating unit and the outer peripheral surface of the second heating unit are tapered by a heating member that is inclined so as to be thin in the distal direction. 2. The fluid contact member welding method according to claim 1, wherein the two projecting portions are pressed from directly above to be deformed toward the weld groove portion.

  According to a fifth aspect of the present invention, there is provided the fluid contact member welding method according to any one of the first to fourth aspects, wherein the fluid contact member is a diaphragm.

  The invention according to claim 6 relates to the method for welding a fluid contact member according to any one of claims 1 to 4, wherein the fluid contact member is a bellows.

  The invention according to claim 7 is a welding structure in which a fluid contact member is welded to a body main body of a fluid device via a welding member, and is formed at a predetermined position of the body main body over the entire circumference. Part, a second protrusion formed on the outer peripheral edge of the fluid contact member over the entire periphery, and a welding groove formed by the first protrusion and the second protrusion. A welding member having meltability is interposed in the weld groove portion, and the first ridge portion and the first ridge portion are provided from one or both of the outer peripheral side of the first ridge portion and the inner peripheral side of the second ridge portion. Either one or both of the two ridges are pressed so as to be deformed toward the weld groove, and the welding member is melted by indirectly heating through the first and second ridges. The present invention relates to a welded structure of a fluid contact member characterized by being welded.

  The invention according to claim 8 relates to the welding structure of the fluid contact member according to claim 7, wherein the outer peripheral surface of the first protrusion is formed in a tapered shape so as to be thin in the distal direction.

  The invention according to claim 9 is the fluid contact member welding structure according to claim 7 or 8, wherein the inner peripheral surface of the second protrusion is formed in a tapered shape so as to be thin toward the tip. Related.

  The invention of claim 10 relates to the fluid contact member welding structure according to any one of claims 7 to 9, wherein the fluid contact member is a diaphragm.

  An eleventh aspect of the invention relates to the welding structure for a fluid contact member according to any one of claims 7 to 9, wherein the fluid contact member is a bellows.

  A welding method for a fluid contact member according to the invention of claim 1 is a welding method in which a fluid contact member is welded to a body main body of a fluid device via a welding member, and the entire circumference of a predetermined position of the body main body is provided. A welding groove part is formed by the formed first protrusion part and the second protrusion part formed over the entire circumference on the outer peripheral edge part of the fluid contact member, and a welding member having meltability in the weld groove part Between the outer periphery of the first protrusion and the inner periphery of the second protrusion or one or both of the first protrusion and the second protrusion. Pressing and deforming one or both of the first and second ridges to the weld groove side and heating indirectly through the first and second ridges In order to melt and weld the welding member, the body main body and the fluid contact member It can be results to welding.

  According to a second aspect of the present invention, in the first aspect of the present invention, the outer peripheral surface of the first ridge portion is formed in a tapered shape so as to be thin in the tip direction, and the taper is formed from a direction directly above the first ridge portion. By pressing against the outer peripheral surface, the first protrusion is deformed toward the weld groove, so that the body main body and the diaphragm can be easily welded.

  Invention of Claim 3 forms in the taper shape which inclines so that it may become thin in the front-end | tip direction in the inner peripheral surface of said 2nd protrusion part in Claim 1 or 2, The direction right above said 2nd protrusion part By pressing against the tapered inner peripheral surface, the second protrusion is deformed toward the weld groove, so that the body main body and the diaphragm can be easily welded.

  The invention of claim 4 is the invention according to claim 1, wherein the first heating part that heats from the outer peripheral surface side of the first protrusion and the second heating part that heats from the inner peripheral surface side of the second protrusion. A heating member formed in a tapered shape so that one or both of the inner peripheral surface of the first heating unit and the outer peripheral surface of the second heating unit is inclined toward the distal end. Since the projecting portion and the second projecting portion are pressed from above and deformed toward the weld groove portion, the body body and the diaphragm can be easily welded.

  According to a fifth aspect of the present invention, since the fluid contact member is a diaphragm according to the first to fourth aspects, welding can be suitably performed even with a fluid device using the diaphragm.

  According to a sixth aspect of the present invention, since the fluid contact member is a bellows according to the first to fourth aspects, the fluid device using the bellows can be suitably welded.

  According to a seventh aspect of the present invention, there is provided a welding structure for a fluid contact member in which a fluid contact member is welded to a body main body of a fluid device via a welding member, and the entire circumference of a predetermined position of the body main body is provided. Formed by the first ridge portion, the second ridge portion formed on the outer peripheral edge of the fluid contact member over the entire circumference, and the first ridge portion and the second ridge portion. A weld member having a meltability is interposed in the weld groove, and from either one or both of the outer peripheral side of the first protrusion and the inner peripheral side of the second protrusion One or both of the first and second ridges are pressed so as to be deformed toward the weld groove, and indirectly through the first and second ridges. Since the welding member is melted and welded by heating, the body main body and the fluid contact member are extremely effective. It is possible to provide a welding fluid device basis.

  The invention of claim 8 is the welding of the body main body and the fluid contact member according to claim 7, since the outer peripheral surface of the first protrusion is formed in a tapered shape so as to be thin in the distal direction. Can be easily performed.

  The invention of claim 9 is the body main body and the fluid contact member according to claim 7 or 8, since the inner peripheral surface of the second protrusion is formed in a tapered shape so as to be thin in the tip direction. Can be easily welded.

  A tenth aspect of the present invention can provide a fluid device in which the diaphragm is effectively welded because the fluid contact member is a diaphragm in the seventh to ninth aspects.

  The invention of claim 11 provides the fluid device according to claims 7 to 9, wherein the fluid contact member is a bellows, so that the bellows is effectively welded.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.
FIG. 1 is a sectional view of a diaphragm valve having a fluid contact member welding structure according to an embodiment of the present invention, FIG. 2 is a schematic sectional view showing a diaphragm welding method, and FIG. 3 is a stage of the welding method of FIG. FIG. 4 is a cross-sectional view of an essential part of a bellows valve provided with a weld structure for a fluid contact member according to the present invention, and FIG. 5 is a case where the inner peripheral surface of the second protrusion is tapered. FIG. 6 is a schematic diagram showing the welding method in stages, and FIG. 6 is a schematic diagram showing the welding method according to another embodiment in stages.

  The fluidic device shown in FIG. 1 is a diaphragm valve 10 that is a so-called flow control valve, and includes a body main body 11 and a valve mechanism 30 that is installed in a chamber 20 formed in the body main body 11.

  The body body 11 is made of a resin having high heat resistance, corrosion resistance, chemical resistance, etc., such as a fluororesin, and has an inflow portion 12 for a controlled fluid on one side, via a valve seat 14. It has a chamber 20 in which an outflow portion 13 for a controlled fluid is formed on the other side. As a material of the body main body 11, PTFE, modified PTFE, or the like is preferably used. In this embodiment, modified PTFE is used. Moreover, the body main body 11 of an Example is divided | segmented into several blocks (1st block 11a, 2nd block 11b, 3rd block 11c) as shown in figure, and these are assembled | attached integrally.

  The valve mechanism 30 is formed of a resin having high heat resistance, corrosion resistance, chemical resistance, and the like such as fluororesin, and includes a valve portion 35 that opens and closes the valve seat 14, a first diaphragm 40 and a second diaphragm as fluid contact members. And a diaphragm 45. In the valve mechanism 30, the chamber 20 is divided into a valve chamber 21, a first pressurizing chamber 22, and a second pressurizing chamber 23 by a first diaphragm 40 and a second diaphragm 45. In this embodiment, the first diaphragm 40 divides one side into the first pressurizing chamber 22 and the other side into the valve chamber 21, and the second diaphragm 45 has one side as the valve chamber 21 and the other side into the second pressurizing chamber. It is comprised so that it may partition into 23. The valve mechanism 30 is preferably formed of PTFE, modified PTFE, or the like, similar to the body main body 11, and modified PTFE is used in the embodiment.

  In FIG. 1, reference numeral 22a denotes a breathing path through which air enters and exits the first pressurizing chamber 22, and 24 denotes a pressurizing means that constantly applies a constant pressure to the second diaphragm 45 in the direction of the valve chamber by a pressurized gas. , An exhaust port, S is a pressurizing means comprising a spring that constantly applies a constant pressure to the first diaphragm 40 in the direction of the valve chamber, and S1 represents a receiving portion for the spring S.

  In this diaphragm valve 10, as shown in FIG. 1, the first protrusion 15 (15 a, 15 b) formed at a predetermined position of the body body 11 over the entire circumference and the outer peripheral edge of the diaphragms 40, 45 are all Welding groove portions 50 and 55 are formed by the second protrusions 41 and 46 formed over the circumference, and welding members 60 and 65 having melting properties are interposed in the welding groove portions 50 and 55, so that the first One or both of the first ridge 15 and the second ridges 41, 46 from one or both of the outer periphery of the ridge 15 and the inner periphery of the second ridges 41, 46 Is pressed to deform either one or both of the first ridge 15 and the second ridges 41, 46 toward the weld groove 50, 55 side, and the first ridge 15 and the second ridge. The welding members 60, 6 are heated indirectly through the portions 41, 46. Dissolved configured to welding. Hereinafter, a preferred embodiment of the above-described diaphragm welding method will be specifically described together with a welded structure of the second diaphragm 45.

  As shown in FIGS. 2 and 3, the welding structure of the second diaphragm 45 includes a first protrusion 15 b formed on the second block 11 b of the body main body 11 and a second protrusion formed on the second diaphragm 45. 46, a welding member 65 is interposed in the welding groove 55, and the welding member 65 is melted by the heating member 70, so that the second block 11 b and the second diaphragm 45 of the body main body 11 are Are welded.

  The 1st protrusion part 15b is formed in the 1st surface side of the 2nd block 11b of the body main body 11, and protrudes over the perimeter. In this 1st protrusion part 15b, it forms in the taper shape which inclines so that the outer peripheral surface 16 may become thin toward the front-end | tip direction. Needless to say, the material of the first protrusion 15b is modified PTFE as in the case of the body body 11.

  The second protrusion 46 is formed to protrude from the outer peripheral edge of the second diaphragm 45 over the entire circumference. The protrusion height of the second protrusion 46 is substantially the same as the protrusion height of the first protrusion 15b. Needless to say, the material of the second protrusion 46 is a modified PTFE as in the valve mechanism 30. Reference numeral 47 denotes an inner peripheral surface of the second protrusion 46.

  The weld groove 55 is formed by disposing the second protrusion 46 of the first diaphragm 45 so as to face each other at a predetermined interval inside the first protrusion 15b.

  The welding member 65 is interposed in the welding groove portion 55, is formed of a resin having high corrosion resistance and chemical resistance such as a fluororesin, and is particularly preferably a member having excellent heat melting characteristics. The welding member 65 of the embodiment is formed of PFA.

  As shown in FIGS. 2 and 3, the heating member 70 includes the first protrusion 15 b and the second protrusion from both sides of the outer periphery 16 side of the first protrusion 15 b and the inner periphery 47 side of the second protrusion 46. While pressing so that the part 46 may deform | transform to the welding groove part 55 side, it heats indirectly via the 1st protrusion part 15b and the 2nd protrusion part 46, and the welding member 65 is melt | dissolved. The heating member 70 includes a heat source part (not shown) inside and a main body part 75 with good thermal conductivity that heats the first protrusion part 15b from the first heating part 71 and the second protrusion part 46 side. A second heating unit 76 for heating is formed.

  In the heating member 70 of the embodiment, a known heater that can be heated to about 300 ° C. is used as a heat source part, and the main body part 75 made of brass is slightly smaller than the outer diameter of the first protrusion 15b formed on the body main body 11. It is formed in a substantially cylindrical shape with a large outer diameter. Further, the first heating unit 71 is formed so as to protrude over the entire outer peripheral edge of the main body 75 on the one surface 75 a side, and the second heating unit 76 is formed on the inner side of the first heating unit 71. It is formed so as to protrude over the entire circumference with a predetermined interval slightly smaller than the interval between the outer diameter of the strip portion 15 b and the inner diameter of the second protrusion 46. Further, when the first heating unit 71 and the second heating unit 76 are in contact with the body main body 11 or the diaphragm 45 at the time of heating, the one surface 75a of the main body 75 is formed by the first protrusion 15b and the second protrusion. Each of the protrusions 46 is formed with a protruding height at which a sufficient interval can be obtained without contacting the tip portion of the portion 46. In FIG. 3, reference numeral 72 denotes a step portion formed at the inner peripheral surface side tip of the first heating unit 71, and 77 denotes a notch portion formed at the outer peripheral side tip of the second heating unit 76.

  That is, as can be understood from FIG. 3A, first, the second protrusion of the second diaphragm 45 is spaced apart from the first protrusion 15b formed on the second block 11b of the body body 11 with a predetermined interval. The strips 46 are arranged to face each other to form a weld groove 55, and an undissolved welding member 66 is interposed in the weld groove 55. The heating member 70 is configured such that the first heating portion 71 is substantially above the outer peripheral surface 16 of the first protrusion 15b and the second heating portion 76 is substantially above the inner peripheral surface 47 of the second protrusion 46. Placed in.

  Next, the heating temperature of the heating member 70 is raised to about 300 ° C. to obtain a heating state, and the heating member 70 in the heating state is moved to the first protrusion 15b and the second protrusion as shown in FIG. Lower toward the shape 46. And the welding member 67 is indirectly heated via the 1st protrusion part 15b, when the inner peripheral side of the 1st heating part 71 of the heating member 70 contact | abuts to the outer peripheral surface 16 of the 1st protrusion part 15b. When the outer peripheral side (notch 77) of the second heating part 76 of the heating member 70 comes into contact with the inner peripheral surface 47 of the second protruding part 46, the welding member 67 is indirectly connected via the second protruding part 46. To be dissolved fluidly.

  When the heating member 70 is further lowered from the contact state, the first heating portion 71 of the heating member 70 is pressed against the tapered outer peripheral surface 16 from the direction directly above the first protrusion 15b. The first protrusion 15b is pushed and deformed toward the welding groove 55. On the other hand, in the second heating portion 76 of the heating member 70, the second protrusion 46 is welded by being lowered from the state in which the notch 77 is in contact with the tip of the inner protrusion 47 side of the second protrusion 46. The groove 55 is pushed and deformed. In addition, since both the 1st protrusion part 15b and the 2nd protrusion part 46 are deform | transformed into the welding groove part 55 side by the 1st heating part 71 and the 2nd heating part 76 of the heating member 70, it melt | dissolved fluidly. The welding member 67 is slightly pushed out from the welding groove 55.

  Then, as shown in FIG. 3C, the heating member 70 is continuously lowered to a position where an appropriate pressing force is applied to the first protrusion 15b and the second protrusion 46, and the first protrusion The first protrusion 15b and the second protrusion 46 are welded by indirectly heating the welding member 68 while further deforming the portion 15b and the second protrusion 46 to the welding groove 55 side. At that time, the melted welding member 68 is further pushed out from the welding groove 55 so as to cover the first protrusion 15b and the distal end surface of the second protrusion 46. Thereby, the 1st protrusion part 15b and the 2nd protrusion part 46 are welded more effectively. In addition, since sufficient space | interval which does not contact | abut between the one surface 75a of the main-body part 75 of the heating member 70, and the front-end | tip part of the 1st protrusion part 15b and the 2nd protrusion part 46 is formed, welding Welding can be performed without bringing the welding member 68 pushed out from the groove 55 into contact with the heating member 70.

  As described above, in the welding method, the body main body 11 (11b) and the diaphragm 45 are bonded by indirectly heating and melting the welding member 65 via the first protrusion 15b and the second protrusion 46. Since the welding is performed, the heating member 70 and the welding member 65 are not in contact with each other at the time of welding, and there is no fear that the welding member 65 is peeled off from the welding groove portion 55, so that welding can be reliably performed. Particularly, the first protrusion 15b and the second protrusion 46 are deformed to the welding groove 55 side by pressing from the outer periphery 16 side of the first protrusion 15b and the inner periphery 47 side of the second protrusion 46. Therefore, an appropriate pressure is applied to the welding member 65 from the first protruding portion 15b and the second protruding portion 46 pressed from the outside, and the welding member 65, the first protruding portion 15b and the second protruding portion 46 are applied. The protrusion 46 is more strongly joined and can be welded extremely effectively.

  Further, the outer peripheral surface 16 of the first protrusion 15b is formed in a tapered shape so as to be thin in the tip direction, and is pressed against the tapered outer surface 16 from directly above the first protrusion 15b. Since the first protrusion 15b is deformed toward the weld groove 55, the first protrusion 15b can be deformed toward the weld groove 55 with a very simple configuration, and the body main body 11 (11b). And the diaphragm 45 can be easily welded. Further, as in the embodiment, the pressing force of the heating member 70 from directly above is adjusted by pressing the taper-shaped outer peripheral surface 16 from directly above the first protrusion 15b by the heating member 70. Thus, the deformation of the first protrusion 15b toward the weld groove 55 can be easily controlled.

  Although not shown, it goes without saying that the welding method can be applied to welding of the body main body 11 (11b) and the first diaphragm 40.

  Next, an embodiment in which the fluid contact member is a bellows 140 will be described with reference to FIG. The illustrated fluid device is a bellows valve 100, and includes a body main body 111 and a valve mechanism 130 installed in a chamber 120 formed in the body main body 111. In this figure, reference numeral 111b is the second block of the body main body 111, 111c is the third block of the body main body 11, 115 is the first protrusion formed on the second block 111b of the body main body 11, and 116 is the first protrusion. The outer peripheral surface of the strip part, 131 is a piston part for operating the valve mechanism 130, 135 is a valve part of the valve mechanism 130, 141 is a second projecting part formed on the outer peripheral edge of the bellows 140, 142 is the second An inner peripheral surface of the projecting portion, 150 is a weld groove formed by the first projecting portion 115 and the second projecting portion 141, and 160 is a welding member interposed in the weld groove 150.

  In the bellows valve 100, as shown in the drawing, the first protrusion 115 from the outer periphery 116 side of the first protrusion 115 and the inner periphery 142 side of the second protrusion 141, as in the welded structure of the diaphragm valve 10. And the second protrusion 141 are pressed so as to be deformed toward the welding groove 150, and indirectly heated via the first protrusion 115 and the second protrusion 141 to melt the welding member 160. Body body 111 (111b) and bellows 140 are welded. Thus, in the welding method of the present invention, even when the fluid contact member is the bellows 140, the welding can be effectively performed.

  The welding method and welded structure of the fluid contact member of the present invention are not limited to the configurations described in the above embodiments, and can be implemented with various modifications without departing from the spirit of the invention. . For example, in the embodiment, the configuration is such that both the first protrusion and the second protrusion are pressed from the outer peripheral side of the first protrusion and the inner peripheral side of the second protrusion to deform toward the weld groove. However, either the first ridge or the second ridge is deformed from the outer peripheral side of the first ridge or the inner peripheral side of the second ridge to the weld groove side. You may make it press on.

  Further, in the embodiment, the outer peripheral surface of the first ridge portion is formed in a tapered shape that is inclined so as to become thinner toward the distal end. However, as shown in FIG. 5A, the inner periphery of the second ridge portion 46s. The surface 47s may be formed in a tapered shape that is inclined so as to become thinner toward the tip. In FIG. 5, reference numeral 15 s denotes a first protrusion of the body main body 11 (11 b) whose outer peripheral surface 16 s is formed substantially vertically, 45 s is a fluid contact member, 70 s is a heating member, and 71 s is a notch at the inner peripheral surface tip. A first heating unit having 72 s and 76 s represent a second heating unit having a step 77 s formed at the tip of the outer peripheral surface. In the following embodiments, the same reference numerals as those in the previous embodiments represent the same configuration, and the description thereof is omitted.

  In this embodiment, as shown in FIG. 5A, the first heating part 71 of the heating member 70s is substantially above the outer peripheral surface 16s of the first protrusion 15s and the second heating part 76s is the second protrusion. It is arranged so as to be substantially above the inner peripheral surface 47s of 46s, and then lowered toward the first protrusion 15s and the second protrusion 46s. Then, as shown in FIG. 5 (b), the first heating part 71 (notch part 72s) of the heating member 70s descends from a state where it abuts on the outer peripheral 16s side tip part of the first protrusion 15s. The protruding portion 15s is pressed and deformed toward the welding groove 55, and the second heating portion 76s is pressed against the tapered outer peripheral surface 47s from the direction directly above the second protruding portion 46s to form the second protruding portion. The first protrusion 15b and the second protrusion are formed by deforming the portion 46s toward the weld groove 55 and indirectly heating the welding member 68 via the first protrusion 15b and the second protrusion 46s. The portion 46s is welded.

  That is, the inner peripheral surface 47s of the second protrusion 46s is formed in a tapered shape so as to be thin toward the tip, and is pressed against the tapered outer surface 47s from directly above the second protrusion 46s. By deforming the second protrusion 46s toward the weld groove 55, the second protrusion 46s can be deformed toward the weld groove 55 with a very simple configuration. Thus, even when the inner peripheral surface 47s of the second ridge 46s is formed in a tapered shape that is inclined so as to be thin in the tip direction, the outer peripheral surface of the first ridge part is thin in the tip direction. In the same manner as in the above-described embodiment formed in a tapered shape so as to be inclined, it is possible to easily weld the body main body and the fluid contact member. Although not shown, if both the outer peripheral surface of the first protrusion and the inner peripheral surface of the second protrusion are formed in a tapered shape so as to be thin toward the tip, the body body and the fluid contact member Can be more easily welded.

  Moreover, in the above-mentioned Example, although comprised so that the outer peripheral surface of a 1st protrusion part and the inner peripheral surface of a 2nd protrusion part may be formed in a taper shape, it is not restricted to this, The 1st heating part of a heating member Any one or both of the inner peripheral surface and the outer peripheral surface of the second heating portion may be formed in a tapered shape that is inclined so as to become thinner in the distal direction.

  In the embodiment shown in FIG. 6, the heating member 70t is formed in a tapered shape so that both the inner peripheral surface 72t of the first heating unit 71t and the outer peripheral surface 77t of the second heating unit 76t are inclined toward the tip. Welding is performed by In this heating member 70t, the interval (maximum interval) between the distal end of the inner peripheral surface 72t of the first heating portion 71t and the distal end of the outer peripheral surface 77t of the second heating portion 76t is the same as that of the outer peripheral surface 16t of the first protrusion 15t. The distance between the protrusion 46 and the inner peripheral surface 47 is larger. Further, the distance between the inner peripheral surface 16t of the first heating portion 71t and the outer peripheral surface 77t of the second projecting portion 76t on the main body 75 side is the distance between the outer peripheral surface 16t of the first projecting portion 15t and the second projecting portion 46. It is formed smaller than the interval with the peripheral surface 47. In this figure, reference numeral 15t denotes a first protrusion of the body body 11 (11b) having an outer peripheral surface 16t formed substantially vertically, and 45t denotes a fluid contact member.

  Therefore, as shown in FIG. 6 (a), the heating member 70t has an inner peripheral surface 72t of the first heating portion 71t substantially above the outer peripheral surface 16t of the first protrusion 15t and an inner periphery of the second heating portion 76t. It arrange | positions so that the surface 77t may become substantially above the outer peripheral surface 47 of the 2nd protrusion part 46, and it is lowered | hung toward the 1st protrusion part 15t and the 2nd protrusion part 46t. Subsequently, as shown in FIG. 6B, the inner surface 72t of the first heating unit 71t is lowered from the state in contact with the tip of the outer surface 16t of the first protrusion 15t, and the first protrusion 15t. Is pressed to the weld groove 55 side and deformed, and further, the outer peripheral surface 77t of the second heating portion 76t is lowered from the state in contact with the tip of the inner peripheral surface 47t of the second protruding portion 46t, and the second protruding portion 46t is pressed and deformed to the welding groove 55 side, and the welding member 68 is indirectly heated via the first protrusion 15t and the second protrusion 46t, whereby the first protrusion 15t and The second protrusion 46t is welded.

  In this way, the inner peripheral surface 72t of the first heating part 71t and the outer peripheral surface 77t of the second heating part 76t of the heating member 70t are formed in a tapered shape so as to become thinner toward the distal end, and the first protrusion part The first protrusion 15t and the second protrusion 46t are deformed to the welding groove 55 side with an extremely simple configuration by pressing the 15t and the second protrusion 46t from the upper direction and deforming the welding protrusion 55t. Can be made. Therefore, similarly to the case where the outer peripheral surface of the first protrusion and the inner peripheral surface of the second protrusion are tapered, the body main body and the fluid contact member can be easily welded. Although not shown in the drawings, the body main body may be formed even if either the inner peripheral surface of the first heating portion or the outer peripheral surface of the second heating portion of the heating member is tapered so as to be thin toward the distal end. And the fluid contact member can be easily welded.

It is sectional drawing of the diaphragm valve provided with the welding structure of the fluid contact member which concerns on one Example of this invention. It is a schematic sectional drawing showing the welding method of a diaphragm. It is the schematic which represented the welding method of FIG. 2 in steps. It is principal part sectional drawing of the bellows valve provided with the welding structure of the fluid contact member of this invention. It is the schematic which represented the welding method at the time of forming the internal peripheral surface of a 2nd protrusion part in a taper shape in steps. It is the schematic which represented the welding method which concerns on another Example in steps. It is a schematic sectional drawing showing the welding method of the conventional fluid contact member.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Diaphragm valve 11 Body main body 15 1st protrusion part 20 Chamber 30 valve mechanism 40 1st diaphragm 41 2nd protrusion part 45 2nd diaphragm 46 2nd protrusion part 50,55 Welding groove part 60,65 welding member

Claims (11)

A welding method for welding a fluid contact member to a body body of a fluid device via a welding member,
A welding groove is formed by a first protrusion formed on the entire circumference of the body body at a predetermined position and a second protrusion formed on the outer peripheral edge of the fluid contact member. The welding groove member is interposed in the weld groove, and the first ridge is formed from one or both of the outer peripheral side of the first ridge and the inner peripheral side of the second ridge. One or both of the second ridges are pressed to deform either one or both of the first ridges and the second ridges toward the weld groove, and the first ridges and A welding method for a fluid contact member, wherein the welding member is melted and welded by indirectly heating through a second protrusion.   By forming the outer peripheral surface of the first ridge portion into a tapered shape that is inclined so as to be thin in the tip direction, by pressing against the tapered outer peripheral surface from directly above the first ridge portion, The fluid contact member welding method according to claim 1, wherein the first protrusion is deformed toward the welding groove.   The inner peripheral surface of the second ridge is formed in a tapered shape so as to be thin toward the tip, and is pressed against the tapered inner peripheral surface from the direction directly above the second ridge. The method for welding a fluid contact member according to claim 1 or 2, wherein the second projecting ridge portion is deformed to the welding groove portion side.   It has a 1st heating part heated from the outer peripheral surface side of said 1st protrusion part, and a 2nd heating part heated from the inner peripheral surface side of said 2nd projection part, and the inner peripheral surface of said 1st heating part And the outer peripheral surface of the second heating part or both of the outer circumferential surfaces of the second heating part, the first projecting part and the second projecting part are directed directly upward by a heating member formed in a tapered shape so as to be thin in the tip direction. The method for welding a fluid contact member according to claim 1, wherein the fluid contact member is deformed toward the weld groove by being pressed from the side.   The method for welding a fluid contact member according to any one of claims 1 to 4, wherein the fluid contact member is a diaphragm.   The method for welding a fluid contact member according to any one of claims 1 to 4, wherein the fluid contact member is a bellows. A welding structure in which a fluid contact member is welded to a body body of a fluid device via a welding member,
A first ridge formed over the entire circumference at a predetermined position of the body body; a second ridge formed over the entire circumference of the outer peripheral edge of the fluid contact member; and the first protrusion. A welding groove formed by the strip and the second protrusion,
A welding member having meltability is interposed in the weld groove portion, and the first ridge portion and the first ridge portion are provided from one or both of the outer peripheral side of the first ridge portion and the inner peripheral side of the second ridge portion. Either one or both of the two ridges are pressed so as to be deformed toward the weld groove, and the welding member is melted by indirectly heating through the first and second ridges. A welded structure of a fluid contact member characterized by being welded.   The weld structure for a fluid contact member according to claim 7, wherein the outer peripheral surface of the first protrusion is formed in a tapered shape that is inclined so as to be thin in a distal direction.   The welding structure of the fluid contact member according to claim 7 or 8, wherein the inner peripheral surface of the second protrusion is formed in a tapered shape so as to be thin toward the tip.   The weld structure of a fluid contact member according to any one of claims 7 to 9, wherein the fluid contact member is a diaphragm.   The fluid contact member welding structure according to claim 7, wherein the fluid contact member is a bellows.

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